WO2021248588A1 - Real-time monitoring device for laser near-net shape manufacturing, and manufacturing apparatus and method - Google Patents

Real-time monitoring device for laser near-net shape manufacturing, and manufacturing apparatus and method Download PDF

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Publication number
WO2021248588A1
WO2021248588A1 PCT/CN2020/099675 CN2020099675W WO2021248588A1 WO 2021248588 A1 WO2021248588 A1 WO 2021248588A1 CN 2020099675 W CN2020099675 W CN 2020099675W WO 2021248588 A1 WO2021248588 A1 WO 2021248588A1
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monitoring
laser
workpiece
real
strain
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PCT/CN2020/099675
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French (fr)
Chinese (zh)
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刘胜
李辉
申胜男
张臣
田祺
胡平
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武汉大学
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Publication of WO2021248588A1 publication Critical patent/WO2021248588A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Definitions

  • the present invention belongs to the technical field of laser near net shaping, and more specifically, relates to a real-time monitoring device, forming equipment and method for laser near net shaping.
  • laser near-net forming technology combines new technologies such as numerical control, computer, and laser, and realizes the manufacture of three-dimensional metal parts through the method of cladding metal powder particles layer by layer by laser. Compared with traditional processing methods, it has the advantages of fewer processing procedures, shorter cycle, more types of materials, and the ability to process parts with complex shapes. It is widely used in industrial manufacturing, biomedical, aerospace and other fields.
  • the workpiece Due to the processing characteristics of laser near-net forming process layer by layer laser cladding and rapid melting and solidification of metal powder particles, the workpiece is prone to defects such as layer separation, three-dimensional contour deformation, non-fusion, holes and cracks, which seriously affect the performance and working life of the product , Especially in the manufacturing process of large components, the accumulation of small defects will eventually lead to product processing failure. Therefore, in the process of processing, it is necessary to conduct real-time online non-destructive monitoring of each processing step, especially to monitor the parameters that directly affect the quality and performance of the workpiece, such as the temperature distribution of the molten pool, the change of the molten pool shape, and the three-dimensional contour of the processing part Deformation, stress field distribution of the workpiece and internal defects, etc.
  • the present invention provides a real-time monitoring device, forming equipment and method for laser near-net forming, which monitors key components such as a circular motion platform and a 360° rotating processing table. And the design of the specific assembly relationship of multiple monitoring parts can realize the all-round real-time measurement of multiple parameters of the laser near-net-shaped workpiece. It has the advantages of simple structure, convenient operation, and strong applicability.
  • a real-time monitoring device for laser near-net forming which includes a laser ultrasonic monitoring part, a molten pool shape monitoring part, a molten pool temperature distribution monitoring part, and a three-dimensional contour of a workpiece.
  • Monitoring department, stress and strain monitoring department, laser-induced breakdown spectroscopy monitoring department, CT defect monitoring department, circular monitoring motion platform and 360°rotating processing table including:
  • the laser ultrasonic monitoring unit, the molten pool temperature distribution monitoring unit, the stress and strain monitoring unit, and the laser induced breakdown spectrum monitoring unit are installed on the annular monitoring motion platform and face the workpiece to be monitored; the molten pool shape monitoring unit and The workpiece three-dimensional contour monitoring part is installed on the side of the laser processing head used to perform laser near-net shaping, and keeps synchronous movement with the laser processing head; the CT defect monitoring part is installed on the side of the ring-shaped monitoring movement platform for realizing Monitoring of internal defects of the workpiece; the ring-shaped monitoring movement platform is arranged outside and coaxially with the 360° rotating processing table, and the 360° rotating processing table is used to drive the workpiece to be tested to rotate 360° to ensure Each monitoring department monitors the workpiece in 360°, and then realizes the online real-time measurement of multiple parameters of the laser near-net shape.
  • the circular monitoring motion platform includes a circular motion track and a lifting device.
  • the lifting device When the workpiece forms a height of each layer, the lifting device correspondingly raises the circular motion track by one level, so that the circular monitoring motion platform is Each monitoring department always monitors the part of the workpiece to be monitored.
  • the laser ultrasonic monitoring part includes an excitation laser and a detection laser, wherein the excitation laser is used to inject a pulsed laser beam on the surface of the workpiece to be detected to generate an ultrasonic signal, and the ultrasonic wave is in contact with the near surface of the workpiece. The defects interact and are reflected back to the surface of the workpiece and are received by the detection laser.
  • the molten pool shape monitoring unit is preferably a near visible hyperspectral camera; the molten pool temperature distribution monitoring unit is preferably an ultra-high-speed photoelectric thermometer; the workpiece three-dimensional contour monitoring unit is preferably a high-speed industrial camera .
  • the stress and strain monitoring part includes a bottom strain measurement mechanism and a side strain measurement mechanism, wherein the bottom strain measurement mechanism includes a strain signal analyzer and a strain measurement sensor array connected to each other, and the strain signal analyzer Installed at the bottom of the 360° rotating processing table, the strain measurement sensor array is embedded in the substrate for placing the workpiece to measure the strain at the bottom of the workpiece; the side strain measurement mechanism is an industrial camera, which is installed on A beam splitter is arranged on the ring-shaped monitoring movement platform and between the workpiece; preferably, the strain measurement sensor array has a temperature compensation function.
  • the laser-induced breakdown spectrum monitoring unit includes a detector and a spectrograph that are connected to each other, and the detector is used to detect and acquire the plasma light emitted from the surface of the workpiece, and transmit the plasma light to the spectrograph. In order to realize the detection of the element composition and content of the material prepared by the workpiece.
  • the CT defect monitoring unit includes an X-ray source and an X-ray detector.
  • the X-ray source and the X-ray detector are located on both sides of the workpiece.
  • the X-ray source is used to emit X-rays. After penetrating the workpiece, it is received by the X-ray detector.
  • the laser ultrasonic monitoring section uses ultrasonic waves with a wavelength of 0.4mm to 0.5mm for detection
  • the molten pool shape monitoring section and the molten pool temperature distribution monitoring section use infrared light with a wavelength of 780nm to 950nm for detection
  • the workpiece is three-dimensional
  • the profile monitoring section and the stress-strain monitoring section use visible light with a wavelength of 446mm ⁇ 464mm for detection
  • the laser induced breakdown spectroscopy monitoring section uses a laser with a wavelength of 530nm ⁇ 540nm for detection
  • the CT defect monitoring section uses a wavelength of 10 -3 nm ⁇ 10nm.
  • X-ray detection; preferably, narrow band-pass filter design is performed on the molten pool shape monitoring part, the molten pool temperature distribution monitoring part, the workpiece three-dimensional contour monitoring part, and the stress and strain monitoring part.
  • a laser near-net shape forming device with real-time monitoring function.
  • the forming device includes a laser processing device, a control device, and the real-time monitoring device, wherein the laser processing device uses For performing laser near-net shaping, the real-time monitoring device is used for real-time monitoring of the workpiece during the laser near-net shaping process, and the monitored data is fed back to the control device, which is based on the dynamics of the monitoring data fed back by the real-time monitoring device Adjust the laser near-net-shaping process parameters, and control the action of the laser processing device based on the dynamically adjusted parameters, so as to achieve the preparation of high-quality laser near-net-shaping workpieces.
  • a laser near-net-shaping method with real-time monitoring function which includes the following steps:
  • the laser processing device is used to print the single-layer cladding layer of the workpiece to be formed.
  • the bottom strain measuring mechanism of the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, and the stress and strain monitoring unit work in real time to achieve Real-time monitoring of the dynamic profile of the molten pool, the temperature distribution of the molten pool and the strain at the bottom of the workpiece;
  • the laser processing device After the single-layer cladding layer is printed, the laser processing device returns to the preset origin and pauses, the workpiece three-dimensional contour monitoring department, laser ultrasonic monitoring department, CT defect monitoring department, laser induced breakdown spectroscopy monitoring department, and stress-strain monitoring department
  • the side strain measuring mechanism of the slab starts to work synchronously or time-sharing to realize the real-time monitoring of the three-dimensional contour of the workpiece, the near surface defect of the workpiece, the internal defect of the workpiece, the element composition and content of the workpiece preparation material, and the side strain of the workpiece. 360°rotating during the inspection process
  • the processing table drives the workpiece to rotate 360° to ensure that each monitoring department scans the workpiece in all directions, realizing the purpose of all-round real-time online monitoring;
  • Each monitoring department feeds back the monitored data to the control device, which dynamically adjusts the process parameters of the laser near-net forming based on the monitoring data fed back by the real-time monitoring device, and the dynamically adjusted process parameters are used as the next layer of cladding layer Printing process;
  • the present invention has designed a real-time monitoring device suitable for laser near-net-shaping, which can realize multiple parameters in the laser near-net-shaping process (such as workpiece near-surface defects, molten pool dynamic profile contour, molten pool On-line real-time measurement of temperature distribution, three-dimensional contour morphology of the workpiece, strain on the bottom and side of the workpiece, element composition of the workpiece, and internal defects of the workpiece).
  • the use of these parameter data can guide the subsequent laser near-net forming, thereby improving the laser near-net forming of the workpiece the quality of.
  • the present invention can install multiple real-time online monitoring devices by building a ring-shaped monitoring movement platform.
  • the monitoring device installed on it can be driven to increase the height of a printing layer, ensuring that the monitoring device can accurately focus on
  • the monitoring point through the construction of a 360° rotating processing table equipped with a circular monitoring motion platform, drives the workpiece to rotate 360°, ensuring that the workpiece can be scanned in all directions, and realizing the purpose of all-round real-time online monitoring of the contour of the workpiece
  • the molten pool shape monitoring part and the workpiece three-dimensional contour monitoring part to keep synchronized movement with the laser processing head, it can ensure the all-round and accurate scanning and monitoring of the molten pool shape and the three-dimensional contour of the workpiece.
  • the present invention uses laser ultrasonic detection technology to monitor the near-surface hole and crack defects of the workpiece. It uses the mechanism of laser acting on the surface of the workpiece to excite ultrasonic waves. Ultrasound is transmitted and diffused from the interior of the workpiece, and ultrasonic signals at different distances from the excitation point are extracted and analyzed. In this way, the position and morphological distribution of defects in the workpiece can be judged.
  • This method can perform non-destructive real-time online non-destructive inspection of the interior of the workpiece while ensuring the detection accuracy.
  • the present invention uses a near-visible hyperspectral camera that operates synchronously with the laser head for shape measurement, and an ultra-high-speed photoelectric thermometer for temperature measurement.
  • the measurement accuracy of the molten pool profile can be achieved. Up to 0.001mm, the temperature measurement accuracy can be as large as ⁇ 5°C, which can effectively eliminate the influence of environmental noise and quickly and accurately determine the molten pool area.
  • the present invention measures the bottom surface strain of the processed part through the strain measurement sensor array installed in the substrate, and records the speckle distribution of the laser spot on the side of the sample through an industrial camera, so as to realize the measurement of the side strain of the processed part.
  • the hardware combination uses optical measurement and electrical measurement to realize the omni-directional strain measurement of the workpiece.
  • the stress can be reversed based on the measured stress combined with the existing finite element calculation hybrid method to achieve efficient real-time non-contact And non-destructive stress testing.
  • the present invention uses laser-induced breakdown spectroscopy non-destructive online detection to perform qualitative and quantitative analysis and detection of elemental composition of processed parts, and uses the peeling phenomenon caused by the action of pulsed laser on the processed parts to induce plasma light radiation around the molten metal pool. Perform detection and spectral analysis to provide environmental cleanliness support for controlling the quality of additive manufacturing components.
  • the CT defect monitoring part of the present invention transmits X-rays through the X-ray source through the workpiece and is received by the X-ray detector, and transmits the information to the computer control system to obtain internal defects and geometric contour images of the workpiece. Intuitively detect the type, location and size of the internal defects of the processed parts. Due to the large volume of the CT defect detection device, the present invention installs it on the side of the annular monitoring platform to reduce the load-bearing pressure of the annular monitoring platform and improve the stability of the device.
  • the monitoring device of the present invention contains multiple monitoring components, there will be a certain amount of interference between each other.
  • the present invention The detection methods and detection wavelengths of each monitoring department have been researched and designed.
  • the specific laser ultrasonic monitoring department uses ultrasonic waves with a wavelength of 0.4mm ⁇ 0.5mm for detection
  • the molten pool shape monitoring department and the molten pool temperature distribution monitoring department use a wavelength of 780nm ⁇ 950nm infrared light is used for detection
  • workpiece 3D contour monitoring part and stress strain monitoring part use visible light with wavelength of 446mm ⁇ 464mm for detection
  • laser induced breakdown spectroscopy monitoring part uses laser with wavelength of 530nm ⁇ 540nm for detection
  • CT defect monitoring The part uses X-rays with a wavelength of 10-3nm ⁇ 10nm for detection; through the above design, interference between monitoring components can be effectively avoided.
  • the present invention also proposes a laser near-net-shaping device and method equipped with the real-time monitoring device of the present invention, which can dynamically adjust the laser near-net-shaping process based on the data monitored by the real-time monitoring device in real time, thereby realizing laser Close-loop control of the near-net-shape forming process, thereby improving the quality and performance of the processed parts as a whole.
  • the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, and the bottom strain measuring mechanism work in real time.
  • the workpiece three-dimensional contour monitoring unit, the laser ultrasonic monitoring unit, and the CT defect monitoring unit start to work synchronously or step by step, so as to realize the time delay measurement, avoid the interference between the components and avoid the influence of the molten pool on the detection results, thereby improving the detection Accuracy.
  • the present invention also implements a narrow band-pass filter design for the molten pool shape monitoring part, the molten pool temperature distribution monitoring part, the workpiece three-dimensional contour monitoring part and the stress strain monitoring part to eliminate the interference of the laser heat source and improve the monitoring accuracy.
  • FIG. 1 is a schematic structural diagram of a laser near-net-shaping device with real-time monitoring function provided by an embodiment of the present invention
  • FIG. 2 is a schematic diagram of the assembly structure between the annular monitoring movement platform and each monitoring part provided by an embodiment of the present invention
  • FIG. 3 is a schematic structural diagram of a stress and strain monitoring part provided by an embodiment of the present invention.
  • Fig. 4 is a schematic structural diagram of a laser induced breakdown spectroscopy monitoring unit provided by an embodiment of the present invention.
  • 1-computer control system 2-manipulator control cabinet, 3-fiber coupler, 4-axial robot, 5-manipulator, 6-transmission fiber, 7-laser processing head, 8-powder feeding device, 9-protection Gas supply device, 10-detection laser, 11-ultra-high-speed photoelectric thermometer, 12-worktable, 13-substrate, 14-strain measurement sensor array, 15-360°rotating processing table, 16-workpiece, 17-high speed Industrial camera, 18-approximately visible hyperspectral camera, 19-excitation laser, 20-fixed frame, 21-X-ray source, 22-X-ray detector, 100-stress and strain monitoring department, 200-circular monitoring motion platform, 300 -Laser-induced breakdown spectrum monitoring department, 101-strain signal analyzer, 102-spectroscope, 103-industrial camera, 201-circular motion track, 202-lifting device, 301-plasma light, 302-detector, 303-spectrum Camera, 304-fiber cable, 305-plasma
  • the embodiment of the present invention provides a real-time monitoring device for laser near-net forming, which includes a laser ultrasonic monitoring unit, a molten pool shape monitoring unit, a molten pool temperature distribution monitoring unit, and a workpiece three-dimensional contour monitoring unit , Stress and strain monitoring department, laser-induced breakdown spectroscopy monitoring department 300, CT defect monitoring department, circular monitoring movement platform 200 and 360°rotating processing table 15.
  • the laser ultrasonic monitoring part is used to monitor defects such as near-surface holes and cracks of the workpiece
  • the molten pool shape monitoring part is used to monitor the dynamic profile contour of the molten pool
  • the molten pool temperature distribution monitoring part is used to monitor the temperature distribution of the molten pool.
  • the workpiece three-dimensional contour monitoring department is used to monitor the three-dimensional contour of the workpiece
  • the stress-strain monitoring department is used to monitor the stress field distribution of the workpiece
  • the laser-induced breakdown spectroscopy monitoring department is used to realize the qualitative and quantitative detection of the element composition of the workpiece preparation material.
  • the CT defect monitoring department is used to monitor the internal defects of the workpiece.
  • laser ultrasonic monitoring acts on the defects in the near surface of the print, and detects the approximate location, type and size of the defect by analyzing the ultrasonic signal.
  • CT defect monitoring uses X-rays to penetrate the print and receives it by the X-ray detector. The processing can restore the image inside the print, and the defects can be seen more intuitively and clearly.
  • the laser ultrasonic monitoring unit, the molten pool temperature distribution monitoring unit, the stress-strain monitoring unit, and the laser-induced breakdown spectrum monitoring unit are installed on the ring-shaped monitoring movement platform 200 and face the workpiece to be monitored; the molten pool shape monitoring unit and the workpiece three-dimensional
  • the contour monitoring unit is installed on the side of the laser processing head used to perform laser near-net shaping, and keeps moving synchronously with the laser processing head; the CT defect monitoring unit is located on the side of the ring-shaped monitoring movement platform 200 to realize internal defects of the workpiece Monitoring.
  • the annular monitoring motion platform 200 is arranged outside the 360° rotating processing table 15 and coaxially arranged with the 360° rotating processing table.
  • the 360° rotating processing table 15 is used to drive the workpiece to rotate 360° to ensure that each monitoring unit Perform 360-degree monitoring of the workpiece, and then realize the multi-parameter online real-time monitoring of laser near-net forming.
  • the circular monitoring motion platform 200 includes a circular motion track 201 and a lifting device 202.
  • the circular motion track 201 is arranged outside the 360° rotating processing table 15 and coaxially arranged with the 360° rotating processing table.
  • the circular motion track 201 is centered on the workpiece and can move up and down through the lifting device.
  • a laser ultrasonic monitoring part, a molten pool temperature distribution monitoring part, a stress-strain monitoring part 100 and a laser-induced breakdown spectroscopy monitoring part are installed on the circular motion track 201.
  • the lifting device 202 When the workpiece 16 is processed by layer-by-layer cladding, the lifting device 202 lifts the circular motion track 201 by one layer of powder spreading height for each layer of processing height, and the designed 360° rotating worktable 15 drives the workpiece 16 to rotate. It can be scanned and monitored in all directions. Through the action of the lifting device 202, the monitoring parts placed on the circular motion track 201 are always focused on the part being processed, so as to achieve the purpose of real-time online monitoring.
  • the 360° rotating processing table is powered by an electric motor. Its function is to drive the substrate and the workpiece on it to rotate around the center together, so that the monitoring device installed around can monitor the workpiece on the substrate in all directions without dead angles to achieve The purpose of real-time monitoring of processed parts.
  • the present invention designs the above-mentioned annular monitoring motion platform and a 360° rotating processing table to realize the assembly of the monitoring devices and the rotation of the workpiece, and realize the comprehensive real-time monitoring Features.
  • the laser ultrasonic monitoring unit includes an excitation laser 19 and a detection laser 10, the detection laser is installed on the circular motion track 201, and the excitation laser 19 is installed on the detection laser 10.
  • the excitation laser 19 incidents the pulsed laser beam on the surface of the workpiece to be inspected, causing the workpiece 16 to locally produce rapid thermal expansion.
  • the excited ultrasonic wave propagates inside the workpiece and interacts with the defects inside the workpiece, and is finally reflected back to the surface of the workpiece for detection.
  • the laser 10 receives the ultrasonic signal reflected on the surface of the workpiece after the interaction, and transmits it to the computer control system for processing. It has the characteristics of high resolution, wide frequency band, high energy and non-contact, which is higher than traditional monitoring methods.
  • Detection accuracy By detecting the ultrasonic signal obtained by the laser 10, it is possible to analyze whether there are defects (such as cracks, holes, non-fusion, stress concentration), types and locations on the near surface of the workpiece, and adjust the laser scanning strategy and processing parameters based on the analysis results.
  • the specific analysis method can be carried out by the existing conventional method, which will not be repeated here.
  • the molten pool shape monitoring unit is preferably close to the visible hyperspectral camera 18, which is installed on the side of the laser processing head 7 through a fixing frame 20, and moves synchronously with the laser processing head. By adjusting its angle, it can be ensured that it is in line with the laser processing.
  • the head scanning position is consistent, real-time monitoring of the dynamic characteristics and contours of the metal molten pool.
  • the near-visible hyperspectral camera can eliminate the influence of environmental noise, quickly and accurately determine the molten pool area, and the obtained image information is transmitted to the computer control system 1 for analysis, and the computer control system 1 controls the single-channel scanning based on the obtained information Parameters such as height, laser power and energy density can be used to improve processing quality in real time.
  • the temperature distribution monitoring part of the molten pool is preferably an ultra-high-speed photoelectric thermometer 11, which is installed on the circular motion track 201 for real-time monitoring of the temperature distribution around the metal molten pool, and judges whether the temperature distribution gradient of the molten pool is If the temperature distribution gradient is too large, it can be fed back to the computer control system to adjust processing parameters, such as laser power, scanning distance, laser spot radius, and scanning speed, so as to improve the temperature distribution.
  • the stress and strain monitoring part includes a bottom strain measurement mechanism and a side strain measurement mechanism, wherein the bottom strain measurement mechanism includes a strain signal analyzer 101 and a strain measurement sensor array 14 connected to each other, and the strain signal analyzer 101 is installed at 360° At the bottom of the rotating processing table, electrical signals are transmitted through cable connections. There is a certain area at the bottom of the print, and the strain measurement sensor array 14 is designed for array distribution to measure the strain of each part, making the measurement of the strain at the bottom of the print more accurate.
  • the strain measurement sensor array 14 is embedded in the substrate 13 to measure the strain at the bottom of the workpiece.
  • the side strain measuring mechanism is preferably an industrial camera 103, which is installed on the circular motion track 201, and a beam splitter 102 is arranged between it and the workpiece.
  • the metal powder particles are directly spread on the substrate 13 for laser processing.
  • the strain monitoring of the workpiece is sensed by the strain measurement sensor array 14 pre-installed inside the substrate 13, and the array distribution optimization design of the sensor is used to obtain the substrate.
  • the strain field distribution Since the substrate needs to be preheated when printing the bottom layer, and the temperature increase will affect the measurement effect of the sensor, the strain measurement sensor array 14 is designed with a temperature compensation function to eliminate the effect of temperature increase.
  • the signal measured by the strain measurement sensor array 14 is transmitted to the strain signal analyzer 101 for processing, combined with the finite element calculation method for stress inversion, to achieve non-destructive measurement of the stress at the bottom of the workpiece, and how to achieve the stress inversion is an existing technology.
  • the industrial camera 103 installed on the circular motion track 201 measures the side strain of the workpiece. Specifically, a laser beam is used to irradiate the side of the workpiece to generate speckles. The industrial camera obtains the speckle image through a 360° rotating The processing table drives the workpiece to rotate, and measures the side strain of the workpiece in all directions. Then, the strain is calculated according to the image obtained by the industrial camera through the conventional digital correlation analysis method, and the strain data and the finite element calculation method are combined to perform stress inversion to realize the stress on the side surface of the workpiece without damage The measurement, specifically how to achieve stress inversion, is an existing technology, and will not be repeated here.
  • the workpiece three-dimensional contour monitoring part is preferably a high-speed industrial camera 17, which is installed beside the laser processing head and moves synchronously with the laser processing head.
  • the fixed frame 20 is installed beside the laser processing head 7 to ensure the synchronous movement of the robot arm during processing, real-time scanning of the outer contour of the processed part to obtain the workpiece image, and accurate edge contour extraction through the workpiece image, which is consistent with the designed workpiece
  • the ideal contour size is compared, the warpage defect of the processing plane and the surface contour size error are identified and analyzed, and the analysis data is transmitted to the computer control system 1 to adjust the scanning trajectory.
  • the laser induced breakdown spectrum monitoring unit 300 includes a detector 302 and a spectrograph 303 connected to each other.
  • the detector 302 and the spectrograph 303 are connected by an optical fiber cable 304, and the spectrograph 303 is installed on the circular motion track 201. superior.
  • a pulsed laser is applied to the surface of the workpiece 16 to produce a peeling phenomenon, and a plasma 305 with a short life but high brightness is generated on the surface of the material.
  • the plasma 305 expands outward at supersonic speed and cools rapidly.
  • the atoms and ions in the excited state transition from the high-energy state to the low-energy state, and emit plasma light 301 with a specific wavelength.
  • the plasma light is detected by the high-sensitivity detector 302, and the information is transmitted to the Spectrograph 303, spectrograph 303 can analyze what kind of element exists in the sample through the information obtained, and can perform further qualitative and quantitative analysis of the spectrum, realize the detection of element composition and content in the processing process, and then can carry out the material
  • the identification, classification, qualitative and quantitative analysis can be directly carried out for material analysis without pretreatment of samples. It has the advantages of fast measurement speed, non-contact measurement, and simultaneous analysis of multiple elements.
  • the specific analysis method can be carried out by the existing conventional method, which will not be repeated here.
  • the CT defect monitoring unit includes an X-ray source 21 and an X-ray detector 22.
  • X-rays emitted from the X-ray source 21 penetrate the workpiece and are received by the X-ray detector 22.
  • the X-ray detector 22 will receive information Transfer to the computer system to obtain the internal defects and geometric contour images of the workpiece, and visually detect the type, location and size of the internal defects of the workpiece.
  • computer information processing and image reconstruction technology are combined to obtain internal defects and geometric contour images of the workpiece, the feedback information is compared with the setting information, and the error is found to be fed back to the laser
  • the processing device is regulated in real time.
  • the CT defect monitoring device Due to the large volume of the CT defect monitoring device, it is installed beside the circular monitoring movement platform 200. Specifically, the X-ray source 21 and the X-ray detector 22 are arranged on the working table 12 and located on both sides of the circular movement track 201. After the current layer processing and various monitoring are completed, the workpiece 16 on the substrate is rotated by the 360° rotating worktable 15 so that the CT defect monitoring department can perform an all-round three-dimensional scanning analysis of the workpiece.
  • the present invention also provides a laser near-net-shaping device with real-time monitoring function, which includes a laser processing device, a control device and the real-time monitoring device, wherein the laser processing device is used for performing laser near-net-shaping, and the real-time monitoring device is used for During the laser near net forming process, various parameters of the workpiece to be formed are monitored in real time, and the monitoring data is fed back to the control device.
  • the control device dynamically adjusts the laser near net forming process parameters based on the monitoring data fed back by the real-time monitoring device.
  • the laser processing device includes a laser processing head 7, an optical fiber coupler 3, a powder feeding device 8, a protective gas supply device 9, a working table 12, a substrate 13, and a control component.
  • the substrate 13 and the ring-shaped monitoring movement platform 200 It is arranged above the worktable 12, the base plate 13 is rotated by an electric motor, the electric motor is installed in the worktable 12, the laser processing head 7 is connected to the optical fiber coupler 3 through the transmission fiber 6, and the control assembly includes a robot arm control cabinet 2 connected in sequence , The axial robot 4 and the mechanical arm 5, the mechanical arm control cabinet 2 is connected with the computer control system 1, and the mechanical arm 5 is connected with the laser processing head 7.
  • the movement track in the direction drives the laser processing head 7 mounted on the mechanical arm 5 to move.
  • the optical fiber coupler 3 transmits the optical signal to the laser processing head 7 through the transmission fiber 6 and focuses the light on the predetermined workpiece 16 through the focusing lens.
  • the substrate 13 is set on the 360° rotating processing table 15. The substrate 13 is preheated before processing to improve stress concentration and other problems.
  • the powder feeding device 8 transfers the metal powder particles to a certain flow rate at a set rate and movement trajectory.
  • the protective gas supply device 9 provides an oxygen-free environment in the processing area to prevent the material from oxidizing during processing.
  • the laser emitted by the laser processing head 7 quickly melts the solid metal powder particles sent by the powder feeding device 8, and the molten pool is rapidly solidified.
  • the layer cladding finally forms the designed workpiece shape.
  • the 360° rotating processing table 15 drives the substrate and the workpiece 16 on it to rotate, and the designed monitoring parts are used to monitor the workpiece in 360° without dead angles.
  • control device in the present invention is a computer control system 1, which is used to monitor the laser processing device, the laser ultrasonic monitoring unit, the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, the workpiece three-dimensional contour monitoring unit, the stress and strain monitoring unit, Laser-induced breakdown spectroscopy monitoring department, CT defect monitoring department, ring monitoring motion platform and 360° rotating processing table are controlled, and the acquired molten pool image information, temperature distribution information, three-dimensional shape information of the workpiece, and the material composition of the processed part are qualitatively controlled. Quantitative information, workpiece near-surface defect analysis and detection information, workpiece internal defect analysis and detection information, workpiece stress analysis and detection information, etc.
  • the control device stops all processing parts and gives an alarm to prevent further processing from damaging the machine.
  • the specific working process of the laser near net shaping equipment is as follows:
  • the laser processing device After the single-layer cladding layer is printed, the laser processing device returns to the preset origin, pauses, and waits for the work of other detection departments.
  • the workpiece three-dimensional contour monitoring department, laser ultrasonic monitoring department, The CT defect monitoring department, the laser-induced breakdown spectrum monitoring department, and the side strain measuring mechanism work at the wrong time in the sequence, of course, they can also work at the same time.
  • the 360°rotating processing table 15 drives the workpiece to rotate to realize the full range of the workpiece Real-time online monitoring;
  • each monitoring department including workpiece near-surface hole crack defect data, molten pool dynamic topography profile data, molten pool temperature distribution data, workpiece three-dimensional contour topography data, workpiece stress field distribution data, workpiece preparation material elements
  • the composition and content data, the internal defect data of the workpiece, etc. are fed back to the control device.
  • the control device dynamically adjusts the laser near-net forming process parameters based on the monitoring data fed back by the real-time monitoring device, such as adjusting the laser power, scanning speed, scanning distance, The laser spot radius and powder feeding flow rate, etc., dynamically adjusted process parameters are used as the printing process of the next layer of cladding layer;
  • the bottom strain measurement mechanism of the molten pool shape monitoring part, the molten pool temperature distribution monitoring part and the stress and strain monitoring part are measured in real time during the printing process.
  • the lateral strain measurement mechanism of the cross-spectrum monitoring part and the stress-strain monitoring part performs measurement after the cladding layer is printed, so as to realize the time-delayed measurement to avoid interference between monitoring methods and effectively avoid the molten pool to the detection results The impact of this to improve the accuracy of detection.
  • the computer control system 1 controls the robotic arm control cabinet 2 and the fiber coupler 3, and then controls the movement trajectory of the laser processing head 7.
  • the powder feeding device 8 provides metal powder particles
  • the shielding gas supply device 9 provides shielding gas to avoid metal powder.
  • the particles are oxidized in the process of melting, and a single layer of material is melted on the substrate 13 to form a printed cladding layer and use this as the inspection object;
  • the high-speed industrial camera 17 monitors the deformation of the three-dimensional outline of the workpiece 16, which is close to the visible hyperspectral camera 18
  • the dynamic shape of the molten pool is monitored, and the laser processing head 7 moves synchronously; at the same time, the laser-induced breakdown spectroscopy monitoring unit 300, the side strain measuring mechanism, and the ultra-high-speed photoelectric thermometer 11, which are installed on the ring-shaped monitoring movement platform 200,
  • the detection laser 10 and the excitation laser 19 perform qualitative and quantitative analysis and detection of material elements, stress field distribution detection, molten pool temperature distribution detection and internal defect detection
  • the present invention also researches and designs the detection methods and detection wavelengths of each monitoring unit.
  • the laser ultrasonic monitoring part ultrasonic waves with a wavelength of 0.4mm ⁇ 0.5mm (preferably 0.48mm) are used for detection, and for the molten pool shape monitoring part and the molten pool temperature distribution monitoring part, infrared light with a wavelength of 780nm ⁇ 950nm is used.
  • the three-dimensional contour monitoring part and the stress-strain monitoring part of the workpiece use visible light with a wavelength of 446mm ⁇ 464mm for detection
  • the laser induced breakdown spectroscopy monitoring part uses a laser with a wavelength of 530nm ⁇ 540nm (preferably 532nm) for detection
  • CT defect monitoring The department uses X-rays with a wavelength of 10 -3 nm to 10 nm for detection.
  • narrow band-pass filtering is designed for the molten pool shape monitoring part, molten pool temperature distribution monitoring part, workpiece three-dimensional contour monitoring part, and stress and strain monitoring part.
  • the molten pool shape monitoring part that is, near the visible hyperspectral A filter is set between the camera 18
  • the molten pool for decoupling so as to retain the infrared monitoring light with the same wavelength as the detection light of the visible hyperspectral camera, and eliminate the light influence of the laser heat source.
  • a filter is set between the molten pool temperature distribution monitoring part (i.e., the ultra-high-speed photoelectric thermometer 11) and the molten pool for decoupling, so as to retain the infrared monitoring light with the same wavelength as the ultra-high-speed photoelectric thermometer to eliminate the laser heat source.
  • Light influence Set a filter between the workpiece three-dimensional contour monitoring part (ie, high-speed industrial camera 17) and the workpiece to be tested for decoupling, so as to retain the visible light with the same wavelength as the detection light of the high-speed industrial camera, eliminate the light influence of the laser heat source, and reduce the single wavelength (460nm) blue light is used as the projection light source of high-speed industrial cameras.
  • a filter is provided between the industrial camera 103 and the beam splitter 102 for decoupling, so as to retain the visible light with the same wavelength as the detection light of the industrial camera 103 and eliminate the light influence of the laser heat source.
  • the real-time online non-destructive monitoring of near-net laser forming of the present invention includes near-surface defect detection of the workpiece, qualitative and quantitative detection of the material element composition of the workpiece, the external three-dimensional contour size error and deformation detection of the workpiece, the dynamic shape detection of the processing molten pool, and the processing molten pool Temperature distribution detection, workpiece stress field distribution detection.

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Abstract

Disclosed are a real-time monitoring device for laser near-net shape manufacturing, and a manufacturing apparatus and method. In the design of the monitoring device, an annular monitoring motion platform (200) and a 360° rotary machining table (15), which are coaxially arranged, are provided; a molten pool morphology monitoring portion and a workpiece three-dimensional profile monitoring portion are arranged beside a laser machining head (7) and maintain a synchronous motion therewith; a laser ultrasonic monitoring portion, a molten pool temperature distribution monitoring portion, a stress-strain monitoring portion (100) and a laser-induced breakdown spectroscopy monitoring portion (300) are carried on the annular monitoring motion platform (200); and a CT defect monitoring portion is carried beside the annular monitoring motion platform (200). The components cooperate with each other to achieve omnidirectional, real-time and online monitoring of parameters of a workpiece in a laser near-net shape manufacturing process. The monitoring device has the advantages of simple structure, convenient operation, high applicability, etc.

Description

一种用于激光近净成形的实时监测装置、成形设备及方法Real-time monitoring device, forming equipment and method for laser near-net forming 【技术领域】【Technical Field】
本发明属于激光近净成形技术领域,更具体地,涉及一种用于激光近净成形的实时监测装置、成形设备及方法。The present invention belongs to the technical field of laser near net shaping, and more specifically, relates to a real-time monitoring device, forming equipment and method for laser near net shaping.
【背景技术】【Background technique】
激光近净成形技术作为一种新型生产工艺,将数控、计算机、激光等新型技术结合在内,通过激光逐层熔覆金属粉末颗粒的方法实现立体金属件的制造。相比于传统的加工方式,具有加工工序少、周期短、材料种类多以及能够加工形状复杂零件等优势,广泛应用于工业制造、生物医疗、航空航天等领域。As a new type of production process, laser near-net forming technology combines new technologies such as numerical control, computer, and laser, and realizes the manufacture of three-dimensional metal parts through the method of cladding metal powder particles layer by layer by laser. Compared with traditional processing methods, it has the advantages of fewer processing procedures, shorter cycle, more types of materials, and the ability to process parts with complex shapes. It is widely used in industrial manufacturing, biomedical, aerospace and other fields.
由于激光近净成形工艺逐层激光熔覆和金属粉末颗粒快速熔化凝固的加工特点,工件容易产生层分离、三维轮廓变形、未熔合、孔洞和裂纹等缺陷,严重影响产品的使用性能和工作寿命,特别是大型构件的制造过程,细微缺陷的累积最终将导致产品加工失败。因此,在加工过程中,需要对每一道加工步骤进行实时在线无损监测,尤其是对直接影响工件质量和性能的参数进行监测,例如熔池的温度分布、熔池形状变化、加工部位的三维轮廓变形、工件应力场分布以及内部缺陷等。Due to the processing characteristics of laser near-net forming process layer by layer laser cladding and rapid melting and solidification of metal powder particles, the workpiece is prone to defects such as layer separation, three-dimensional contour deformation, non-fusion, holes and cracks, which seriously affect the performance and working life of the product , Especially in the manufacturing process of large components, the accumulation of small defects will eventually lead to product processing failure. Therefore, in the process of processing, it is necessary to conduct real-time online non-destructive monitoring of each processing step, especially to monitor the parameters that directly affect the quality and performance of the workpiece, such as the temperature distribution of the molten pool, the change of the molten pool shape, and the three-dimensional contour of the processing part Deformation, stress field distribution of the workpiece and internal defects, etc.
而目前本领域并未有可同时实现激光近净成形的上述多个参数在线实时监测的装置,因此,本领域有待进行研究与设计,以获得一种可适用于激光近净成形的实时监测装置,以实现激光近净成形过程中多个参数的实时在线测量,以指导后续的激光近净成形。At present, there is no device in this field that can simultaneously realize the online real-time monitoring of the above-mentioned multiple parameters of laser near-net-shaping. Therefore, research and design are needed in this field to obtain a real-time monitoring device suitable for laser near-net-shaping. , In order to realize the real-time online measurement of multiple parameters in the laser near-net-shaping process to guide the subsequent laser near-net-shaping.
【发明内容】[Summary of the invention]
针对现有技术的以上缺陷或改进需求,本发明提供了一种用于激光近净成形的实时监测装置、成形设备及方法,其通过对关键组件如环形监测运动平台、360°旋转式加工台及多个监测部的具体装配关系的设计,可实现激光近净成形工件多个参数的全方位实时测量,具有结构简单、操作方便、适用性强等优点。In view of the above defects or improvement needs of the prior art, the present invention provides a real-time monitoring device, forming equipment and method for laser near-net forming, which monitors key components such as a circular motion platform and a 360° rotating processing table. And the design of the specific assembly relationship of multiple monitoring parts can realize the all-round real-time measurement of multiple parameters of the laser near-net-shaped workpiece. It has the advantages of simple structure, convenient operation, and strong applicability.
为实现上述目的,按照本发明的一个方面,提出了一种用于激光近净成形的实时监测装置,其包括激光超声监测部、熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部、应力应变监测部、激光诱导击穿光谱监测部、CT缺陷监测部、环形监测运动平台和360°旋转式加工台,其中:In order to achieve the above objective, according to one aspect of the present invention, a real-time monitoring device for laser near-net forming is proposed, which includes a laser ultrasonic monitoring part, a molten pool shape monitoring part, a molten pool temperature distribution monitoring part, and a three-dimensional contour of a workpiece. Monitoring department, stress and strain monitoring department, laser-induced breakdown spectroscopy monitoring department, CT defect monitoring department, circular monitoring motion platform and 360°rotating processing table, including:
所述激光超声监测部、熔池温度分布监测部、应力应变监测部和激光诱导击穿光谱监测部安装在所述环形监测运动平台上,并面向待监测工件;所述熔池形态监测部和工件三维轮廓监测部安装在用于执行激光近净成形的激光加工头的旁侧,并与激光加工头保持同步运动;所述CT缺陷监测部设于环形监测运动平台的旁侧,用于实现工件内部缺陷的监测;所述环形监测运动平台设置在所述360°旋转式加工台的外部并与其同轴设置,该360°旋转式加工台用于带动待测工件做360°旋转,以保证各监测部对工件进行360°全方位监测,进而实现激光近净成形的多参数在线实时测量。The laser ultrasonic monitoring unit, the molten pool temperature distribution monitoring unit, the stress and strain monitoring unit, and the laser induced breakdown spectrum monitoring unit are installed on the annular monitoring motion platform and face the workpiece to be monitored; the molten pool shape monitoring unit and The workpiece three-dimensional contour monitoring part is installed on the side of the laser processing head used to perform laser near-net shaping, and keeps synchronous movement with the laser processing head; the CT defect monitoring part is installed on the side of the ring-shaped monitoring movement platform for realizing Monitoring of internal defects of the workpiece; the ring-shaped monitoring movement platform is arranged outside and coaxially with the 360° rotating processing table, and the 360° rotating processing table is used to drive the workpiece to be tested to rotate 360° to ensure Each monitoring department monitors the workpiece in 360°, and then realizes the online real-time measurement of multiple parameters of the laser near-net shape.
作为进一步优选的,所述环形监测运动平台包括环形运动轨道和升降装置,在工件每成形一层高度时,所述升降装置对应的将环形运动轨道上升一层高度,以使得环形监测运动平台上的各监测部始终监测工件待监测的部分。As a further preference, the circular monitoring motion platform includes a circular motion track and a lifting device. When the workpiece forms a height of each layer, the lifting device correspondingly raises the circular motion track by one level, so that the circular monitoring motion platform is Each monitoring department always monitors the part of the workpiece to be monitored.
作为进一步优选的,所述激光超声监测部包括激发激光器和探测激光器,其中,所述激发激光器用于将脉冲激光束入射至待检测的工件表面以产生超声波信号,该超声波在工件近表面内部与缺陷相互作用,并反射回工件的表面,并被所述探测激光器接收。As a further preference, the laser ultrasonic monitoring part includes an excitation laser and a detection laser, wherein the excitation laser is used to inject a pulsed laser beam on the surface of the workpiece to be detected to generate an ultrasonic signal, and the ultrasonic wave is in contact with the near surface of the workpiece. The defects interact and are reflected back to the surface of the workpiece and are received by the detection laser.
作为进一步优选的,所述熔池形态监测部优选为抵近可见高光谱相机;所述熔池温度分布监测部优选为超高速光电测温仪;所述工件三维轮廓监测部优选为高速工业相机。As a further preference, the molten pool shape monitoring unit is preferably a near visible hyperspectral camera; the molten pool temperature distribution monitoring unit is preferably an ultra-high-speed photoelectric thermometer; the workpiece three-dimensional contour monitoring unit is preferably a high-speed industrial camera .
作为进一步优选的,所述应力应变监测部包括底部应变测量机构和侧面应变测量机构,其中,所述底部应变测量机构包括彼此相连的应变信号分析仪和应变测量传感器阵列,所述应变信号分析仪安装在360°旋转式加工台的底部,所述应变测量传感器阵列嵌装在用于放置工件的基板内,以对工件底部的应变 进行测量;所述侧面应变测量机构为工业相机,其安装在环形监测运动平台上,并与工件之间设置有分光器;优选的,所述应变测量传感器阵列具有温度补偿功能。As a further preference, the stress and strain monitoring part includes a bottom strain measurement mechanism and a side strain measurement mechanism, wherein the bottom strain measurement mechanism includes a strain signal analyzer and a strain measurement sensor array connected to each other, and the strain signal analyzer Installed at the bottom of the 360° rotating processing table, the strain measurement sensor array is embedded in the substrate for placing the workpiece to measure the strain at the bottom of the workpiece; the side strain measurement mechanism is an industrial camera, which is installed on A beam splitter is arranged on the ring-shaped monitoring movement platform and between the workpiece; preferably, the strain measurement sensor array has a temperature compensation function.
作为进一步优选的,所述激光诱导击穿光谱监测部包括彼此相连的探测器和光谱摄制仪,所述探测器用于探测获取工件表面发射出的等离子光线,并将该等离子光线传送至光谱摄制仪中,以实现工件制备材料的元素成分及含量的检测。As a further preference, the laser-induced breakdown spectrum monitoring unit includes a detector and a spectrograph that are connected to each other, and the detector is used to detect and acquire the plasma light emitted from the surface of the workpiece, and transmit the plasma light to the spectrograph. In order to realize the detection of the element composition and content of the material prepared by the workpiece.
作为进一步优选的,所述CT缺陷监测部包括X射线源和X射线探测器,该X射线源和X射线探测器位于工件的两侧,其中,X射线源用于发出X射线,该X射线穿透工件后由所述X射线探测器接收。As a further preference, the CT defect monitoring unit includes an X-ray source and an X-ray detector. The X-ray source and the X-ray detector are located on both sides of the workpiece. The X-ray source is used to emit X-rays. After penetrating the workpiece, it is received by the X-ray detector.
作为进一步优选的,所述激光超声监测部采用波长为0.4mm~0.5mm的超声波进行检测,熔池形态监测部和熔池温度分布监测部采用波长为780nm~950nm的红外光进行检测,工件三维轮廓监测部和应力应变监测部采用波长为446mm~464mm的可见光进行检测,激光诱导击穿光谱监测部采用波长为530nm~540nm的激光进行检测,CT缺陷监测部采用波长为10 -3nm~10nm的X射线进行检测;优选的,对熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部和应力应变监测部进行窄带通滤波设计。 As a further preference, the laser ultrasonic monitoring section uses ultrasonic waves with a wavelength of 0.4mm to 0.5mm for detection, and the molten pool shape monitoring section and the molten pool temperature distribution monitoring section use infrared light with a wavelength of 780nm to 950nm for detection, and the workpiece is three-dimensional The profile monitoring section and the stress-strain monitoring section use visible light with a wavelength of 446mm~464mm for detection, the laser induced breakdown spectroscopy monitoring section uses a laser with a wavelength of 530nm~540nm for detection, and the CT defect monitoring section uses a wavelength of 10 -3 nm~10nm. X-ray detection; preferably, narrow band-pass filter design is performed on the molten pool shape monitoring part, the molten pool temperature distribution monitoring part, the workpiece three-dimensional contour monitoring part, and the stress and strain monitoring part.
按照本发明的第二个方面,提供了一种具有实时监测功能的激光近净成形设备,该成形设备包括激光加工装置、控制装置及所述的实时监测装置,其中,所述激光加工装置用于执行激光近净成形,所述实时监测装置用于在激光近净成形过程中实时监测工件,并将监测的数据反馈至控制装置中,所述控制装置则基于实时监测装置反馈的监测数据动态调整激光近净成形工艺参数,并基于动态调整后的参数控制激光加工装置动作,以此实现高质量激光近净成形工件的制备。According to a second aspect of the present invention, there is provided a laser near-net shape forming device with real-time monitoring function. The forming device includes a laser processing device, a control device, and the real-time monitoring device, wherein the laser processing device uses For performing laser near-net shaping, the real-time monitoring device is used for real-time monitoring of the workpiece during the laser near-net shaping process, and the monitored data is fed back to the control device, which is based on the dynamics of the monitoring data fed back by the real-time monitoring device Adjust the laser near-net-shaping process parameters, and control the action of the laser processing device based on the dynamically adjusted parameters, so as to achieve the preparation of high-quality laser near-net-shaping workpieces.
按照本发明的第三个方面,提供了一种具有实时监测功能的激光近净成形方法,其包括如下步骤:According to the third aspect of the present invention, a laser near-net-shaping method with real-time monitoring function is provided, which includes the following steps:
1)利用激光加工装置进行待成形工件的单层熔覆层打印,在打印过程中,熔池形态监测部、熔池温度分布监测部、应力应变监测部的底部应变测量机构实时工作,以实现熔池动态形貌轮廓、熔池温度分布以及工件底部应变的实时监测;1) The laser processing device is used to print the single-layer cladding layer of the workpiece to be formed. During the printing process, the bottom strain measuring mechanism of the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, and the stress and strain monitoring unit work in real time to achieve Real-time monitoring of the dynamic profile of the molten pool, the temperature distribution of the molten pool and the strain at the bottom of the workpiece;
2)单层熔覆层打印完成后,激光加工装置回到预设原点并暂停,工件三维轮廓监测部、激光超声监测部、CT缺陷监测部、激光诱导击穿光谱监测部以及应力应变监测部的侧面应变测量机构开始同步或分时工作,实现工件三维轮廓形貌、工件近表面缺陷、工件内部缺陷、工件制备材料元素成分及含量、工件侧面应变的实时监测,检测过程中360°旋转式加工台带动工件进行360°旋转,保证各监测部全方位扫描工件,实现全方位实时在线监测的目的;2) After the single-layer cladding layer is printed, the laser processing device returns to the preset origin and pauses, the workpiece three-dimensional contour monitoring department, laser ultrasonic monitoring department, CT defect monitoring department, laser induced breakdown spectroscopy monitoring department, and stress-strain monitoring department The side strain measuring mechanism of the slab starts to work synchronously or time-sharing to realize the real-time monitoring of the three-dimensional contour of the workpiece, the near surface defect of the workpiece, the internal defect of the workpiece, the element composition and content of the workpiece preparation material, and the side strain of the workpiece. 360°rotating during the inspection process The processing table drives the workpiece to rotate 360° to ensure that each monitoring department scans the workpiece in all directions, realizing the purpose of all-round real-time online monitoring;
3)各监测部将监测的数据反馈至控制装置中,该控制装置基于实时监测装置反馈的监测数据动态调整激光近净成形的工艺参数,该动态调整后的工艺参数作为下一层熔覆层的打印工艺;3) Each monitoring department feeds back the monitored data to the control device, which dynamically adjusts the process parameters of the laser near-net forming based on the monitoring data fed back by the real-time monitoring device, and the dynamically adjusted process parameters are used as the next layer of cladding layer Printing process;
4)重复步骤1)~3),以此实现所需工件的激光近净成形。4) Repeat steps 1) to 3) to achieve the laser near-net shape of the desired workpiece.
总体而言,通过本发明所构思的以上技术方案与现有技术相比,主要具备以下的技术优点:Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention mainly have the following technical advantages:
1.本发明研究设计了一种可适用于激光近净成形的实时监测装置,该装置可实现激光近净成形过程中多个参数(例如工件近表面缺陷、熔池动态形貌轮廓、熔池温度分布、工件三维轮廓形貌、工件底部和侧面的应变、工件材料元素成分、工件内部缺陷)的在线实时测量,利用这些参数数据可以指导后续的激光近净成形,进而提高激光近净成形工件的质量。1. The present invention has designed a real-time monitoring device suitable for laser near-net-shaping, which can realize multiple parameters in the laser near-net-shaping process (such as workpiece near-surface defects, molten pool dynamic profile contour, molten pool On-line real-time measurement of temperature distribution, three-dimensional contour morphology of the workpiece, strain on the bottom and side of the workpiece, element composition of the workpiece, and internal defects of the workpiece). The use of these parameter data can guide the subsequent laser near-net forming, thereby improving the laser near-net forming of the workpiece the quality of.
2.本发明通过搭建环形监测运动平台,可安装多个实时在线监测装置,当加工完一层后,可以带动安装在上面的监测装置上升一层打印层的高度,保证监测装置能够准确对焦于监测点,通过搭建与环形监测运动平台配的360°旋转式加工台,带动加工件进行360°旋转,保证加工件能够被全方位扫描到,实现对加工件轮廓的全方位实时在线监测的目的,同时通过将熔池形态监测部和工 件三维轮廓监测部设计成与激光加工头保持同步运动,由此可保证熔池形态及工件三维轮廓的全方位准确扫描监测。2. The present invention can install multiple real-time online monitoring devices by building a ring-shaped monitoring movement platform. When a layer is processed, the monitoring device installed on it can be driven to increase the height of a printing layer, ensuring that the monitoring device can accurately focus on The monitoring point, through the construction of a 360° rotating processing table equipped with a circular monitoring motion platform, drives the workpiece to rotate 360°, ensuring that the workpiece can be scanned in all directions, and realizing the purpose of all-round real-time online monitoring of the contour of the workpiece At the same time, by designing the molten pool shape monitoring part and the workpiece three-dimensional contour monitoring part to keep synchronized movement with the laser processing head, it can ensure the all-round and accurate scanning and monitoring of the molten pool shape and the three-dimensional contour of the workpiece.
3.本发明采用激光超声检测技术进行工件近表面孔洞裂纹缺陷监测,其利用激光作用于加工件表面激发超声波的机理,超声波从加工件内部透射扩散,对激发点不同距离超声信号进行提取分析,从而判断加工件缺陷的位置及形貌分布,该方法在保证检测精度的同时可以对加工件内部进行无损的实时在线无损检测。3. The present invention uses laser ultrasonic detection technology to monitor the near-surface hole and crack defects of the workpiece. It uses the mechanism of laser acting on the surface of the workpiece to excite ultrasonic waves. Ultrasound is transmitted and diffused from the interior of the workpiece, and ultrasonic signals at different distances from the excitation point are extracted and analyzed. In this way, the position and morphological distribution of defects in the workpiece can be judged. This method can perform non-destructive real-time online non-destructive inspection of the interior of the workpiece while ensuring the detection accuracy.
4.本发明在熔池形貌及温度监测过程中,使用与激光头同步动作的抵近可见高光谱相机进行形貌测量,以及超高速光电测温仪进行温度测量,熔池轮廓测量精度可达0.001mm,温度测量精度可大±5℃,可有效消除环境噪声的影响,快速准确的判断熔池区域。4. In the process of monitoring the shape and temperature of the molten pool, the present invention uses a near-visible hyperspectral camera that operates synchronously with the laser head for shape measurement, and an ultra-high-speed photoelectric thermometer for temperature measurement. The measurement accuracy of the molten pool profile can be achieved. Up to 0.001mm, the temperature measurement accuracy can be as large as ±5℃, which can effectively eliminate the influence of environmental noise and quickly and accurately determine the molten pool area.
5.本发明通过安装在基板内的应变测量传感器阵列对加工件进行底面应变的测量,通过工业相机记录激光光斑在样品侧面的散斑分布,实现加工件侧面应变的测量,其通过低成本的硬件组合,利用光测-电测复合即实现了工件的全方位应变测量,此外,可根据测得的应力结合现有有限元计算混合方法即可反演出应力,以此实现高效的实时非接触且无损的应力检测。5. The present invention measures the bottom surface strain of the processed part through the strain measurement sensor array installed in the substrate, and records the speckle distribution of the laser spot on the side of the sample through an industrial camera, so as to realize the measurement of the side strain of the processed part. The hardware combination uses optical measurement and electrical measurement to realize the omni-directional strain measurement of the workpiece. In addition, the stress can be reversed based on the measured stress combined with the existing finite element calculation hybrid method to achieve efficient real-time non-contact And non-destructive stress testing.
6.本发明采用激光诱导击穿光谱无损在线检测对加工件进行元素成分定性定量分析检测,利用脉冲激光对加工件的作用所产生的剥离现象,对金属熔池周围所诱发的等离子体光辐射进行探测和光谱分析,为控制增材制造构件质量提供环境洁净度支撑。6. The present invention uses laser-induced breakdown spectroscopy non-destructive online detection to perform qualitative and quantitative analysis and detection of elemental composition of processed parts, and uses the peeling phenomenon caused by the action of pulsed laser on the processed parts to induce plasma light radiation around the molten metal pool. Perform detection and spectral analysis to provide environmental cleanliness support for controlling the quality of additive manufacturing components.
7.本发明所述的CT缺陷监测部通过X射线源发出X射线穿透加工件并由X射线探测器接收,将信息传至计算机控制系统即可获取加工件内部缺陷和几何轮廓图像,可直观检测加工件内部缺陷的类型、位置和尺寸大小,由于CT缺陷检测装置体积较大,本发明将其安装在环形监测平台旁侧,以减小环形监测平台的承重压力,提高装置稳定性。7. The CT defect monitoring part of the present invention transmits X-rays through the X-ray source through the workpiece and is received by the X-ray detector, and transmits the information to the computer control system to obtain internal defects and geometric contour images of the workpiece. Intuitively detect the type, location and size of the internal defects of the processed parts. Due to the large volume of the CT defect detection device, the present invention installs it on the side of the annular monitoring platform to reduce the load-bearing pressure of the annular monitoring platform and improve the stability of the device.
8.由于本发明的监测装置中包含有多个监测部件,彼此之间会存在一定的 干扰,为了使不同监测部件工作时互不干扰,避免各检测方法间光、振动的干扰,本发明对各监测部的检测方式和检测波长进行了研究与设计,具体的激光超声监测部采用波长为0.4mm~0.5mm的超声波进行检测,熔池形态监测部和熔池温度分布监测部采用波长为780nm~950nm的红外光进行检测,工件三维轮廓监测部和应力应变监测部采用波长为446mm~464mm的可见光进行检测,激光诱导击穿光谱监测部采用波长为530nm~540nm的激光进行检测,CT缺陷监测部采用波长为10-3nm~10nm的X射线进行检测;通过上述设计,可有效避免各监测部件间的干扰。8. Since the monitoring device of the present invention contains multiple monitoring components, there will be a certain amount of interference between each other. In order to prevent the different monitoring components from interfering with each other when working, and avoid the interference of light and vibration between the detection methods, the present invention The detection methods and detection wavelengths of each monitoring department have been researched and designed. The specific laser ultrasonic monitoring department uses ultrasonic waves with a wavelength of 0.4mm~0.5mm for detection, and the molten pool shape monitoring department and the molten pool temperature distribution monitoring department use a wavelength of 780nm ~950nm infrared light is used for detection, workpiece 3D contour monitoring part and stress strain monitoring part use visible light with wavelength of 446mm~464mm for detection, laser induced breakdown spectroscopy monitoring part uses laser with wavelength of 530nm~540nm for detection, CT defect monitoring The part uses X-rays with a wavelength of 10-3nm~10nm for detection; through the above design, interference between monitoring components can be effectively avoided.
9.本发明还提出了搭载有本发明所述的实时监测装置的激光近净成形设备及方法,由此可基于实时监测装置实时监测的数据来动态调节激光近净成形的工艺,进而实现激光近净成形加工过程的闭环控制,从而整体提高加工件的质量和性能。9. The present invention also proposes a laser near-net-shaping device and method equipped with the real-time monitoring device of the present invention, which can dynamically adjust the laser near-net-shaping process based on the data monitored by the real-time monitoring device in real time, thereby realizing laser Close-loop control of the near-net-shape forming process, thereby improving the quality and performance of the processed parts as a whole.
10.本发明中在打印过程中使得熔池形态监测部、熔池温度分布监测部和底部应变测量机构实时工作,在打印完成后使得工件三维轮廓监测部、激光超声监测部、CT缺陷监测部、激光诱导击穿光谱监测部和侧面应变测量机构开始同步或分步工作,以此实现分时段延迟测量,避免各部件之间的干扰及避开熔池对检测结果的影响,进而提高检测的精度。10. In the present invention, during the printing process, the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, and the bottom strain measuring mechanism work in real time. After the printing is completed, the workpiece three-dimensional contour monitoring unit, the laser ultrasonic monitoring unit, and the CT defect monitoring unit , The laser-induced breakdown spectroscopy monitoring unit and the side strain measuring mechanism start to work synchronously or step by step, so as to realize the time delay measurement, avoid the interference between the components and avoid the influence of the molten pool on the detection results, thereby improving the detection Accuracy.
11.此外,本发明还对对熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部和应力应变监测部进行窄带通滤波设计,以消除激光热源的干扰,提高监测精确度。11. In addition, the present invention also implements a narrow band-pass filter design for the molten pool shape monitoring part, the molten pool temperature distribution monitoring part, the workpiece three-dimensional contour monitoring part and the stress strain monitoring part to eliminate the interference of the laser heat source and improve the monitoring accuracy.
【附图说明】【Explanation of the drawings】
图1是本发明实施例提供的具有实时监测功能的激光近净成形设备的结构示意图;FIG. 1 is a schematic structural diagram of a laser near-net-shaping device with real-time monitoring function provided by an embodiment of the present invention;
图2是本发明实施例提供的环形监测运动平台与各监测部间的装配结构示意图;2 is a schematic diagram of the assembly structure between the annular monitoring movement platform and each monitoring part provided by an embodiment of the present invention;
图3是本发明实施例提供的应力应变监测部的结构示意图;3 is a schematic structural diagram of a stress and strain monitoring part provided by an embodiment of the present invention;
图4是本发明实施例提供的激光诱导击穿光谱监测部的结构示意图。Fig. 4 is a schematic structural diagram of a laser induced breakdown spectroscopy monitoring unit provided by an embodiment of the present invention.
在所有附图中,相同的附图标记用来表示相同的元件或结构,其中:In all the drawings, the same reference numerals are used to denote the same elements or structures, in which:
1-计算机控制系统,2-机械臂控制柜,3-光纤耦合器,4-轴向机器人,5-机械臂,6-传输光纤,7-激光加工头,8-送粉装置,9-保护气供给装置,10-探测激光器,11-超高速光电测温仪,12-工作台,13-基板,14-应变测量传感器阵列,15-360°旋转式加工台,16-工件,17-高速工业相机,18-抵近可见高光谱相机,19-激发激光器,20-固定架,21-X射线源,22-X射线探测器,100-应力应变监测部,200-环形监测运动平台,300-激光诱导击穿光谱监测部,101-应变信号分析仪,102-分光器,103-工业相机,201-环形运动轨道,202-升降装置,301-等离子光线,302-探测器,303-光谱摄制仪,304-光纤线缆,305-等离子体。1-computer control system, 2-manipulator control cabinet, 3-fiber coupler, 4-axial robot, 5-manipulator, 6-transmission fiber, 7-laser processing head, 8-powder feeding device, 9-protection Gas supply device, 10-detection laser, 11-ultra-high-speed photoelectric thermometer, 12-worktable, 13-substrate, 14-strain measurement sensor array, 15-360°rotating processing table, 16-workpiece, 17-high speed Industrial camera, 18-approximately visible hyperspectral camera, 19-excitation laser, 20-fixed frame, 21-X-ray source, 22-X-ray detector, 100-stress and strain monitoring department, 200-circular monitoring motion platform, 300 -Laser-induced breakdown spectrum monitoring department, 101-strain signal analyzer, 102-spectroscope, 103-industrial camera, 201-circular motion track, 202-lifting device, 301-plasma light, 302-detector, 303-spectrum Camera, 304-fiber cable, 305-plasma.
【具体实施方式】【detailed description】
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not used to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
如图1所示,本发明实施例提供了一种用于激光近净成形的实时监测装置,其包括激光超声监测部、熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部、应力应变监测部、激光诱导击穿光谱监测部300、CT缺陷监测部、环形监测运动平台200和360°旋转式加工台15。As shown in Figure 1, the embodiment of the present invention provides a real-time monitoring device for laser near-net forming, which includes a laser ultrasonic monitoring unit, a molten pool shape monitoring unit, a molten pool temperature distribution monitoring unit, and a workpiece three-dimensional contour monitoring unit , Stress and strain monitoring department, laser-induced breakdown spectroscopy monitoring department 300, CT defect monitoring department, circular monitoring movement platform 200 and 360°rotating processing table 15.
其中,激光超声监测部用于实现工件近表面孔洞裂纹等缺陷的监测,熔池形态监测部用于实现熔池动态形貌轮廓监测,熔池温度分布监测部用于实现熔池温度分布监测,工件三维轮廓监测部用于实现工件三维轮廓形貌的监测,应力应变监测部用于实现工件应力场分布的监测,激光诱导击穿光谱监测部用来实现工件制备材料元素成分的定性定量检测,CT缺陷监测部用于实现工件内部缺陷的监测。具体的,激光超声监测作用于打印件近表面内部的缺陷,通过分析超声波的信号来检测缺陷的大概位置、类型和大小,CT缺陷监测通过X射线 穿透打印件,由X射线探测器接收后处理可以还原出打印件内部的图像,可以更加直观清晰的看到缺陷。Among them, the laser ultrasonic monitoring part is used to monitor defects such as near-surface holes and cracks of the workpiece, the molten pool shape monitoring part is used to monitor the dynamic profile contour of the molten pool, and the molten pool temperature distribution monitoring part is used to monitor the temperature distribution of the molten pool. The workpiece three-dimensional contour monitoring department is used to monitor the three-dimensional contour of the workpiece, the stress-strain monitoring department is used to monitor the stress field distribution of the workpiece, and the laser-induced breakdown spectroscopy monitoring department is used to realize the qualitative and quantitative detection of the element composition of the workpiece preparation material. The CT defect monitoring department is used to monitor the internal defects of the workpiece. Specifically, laser ultrasonic monitoring acts on the defects in the near surface of the print, and detects the approximate location, type and size of the defect by analyzing the ultrasonic signal. CT defect monitoring uses X-rays to penetrate the print and receives it by the X-ray detector. The processing can restore the image inside the print, and the defects can be seen more intuitively and clearly.
具体的,激光超声监测部、熔池温度分布监测部、应力应变监测部和激光诱导击穿光谱监测部安装在环形监测运动平台200上,并面向待监测工件;熔池形态监测部和工件三维轮廓监测部安装在用于执行激光近净成形的激光加工头的旁侧,并与激光加工头保持同步运动;CT缺陷监测部设于环形监测运动平台200的旁侧,用于实现工件内部缺陷的监测。环形监测运动平台200设置在360°旋转式加工台15的外部并与360°旋转式加工台同轴设置,该360°旋转式加工台15用于带动工件做360°旋转,以保证各监测部对工件进行360°全方位监测,进而实现激光近净成形的多参数在线实时监测。Specifically, the laser ultrasonic monitoring unit, the molten pool temperature distribution monitoring unit, the stress-strain monitoring unit, and the laser-induced breakdown spectrum monitoring unit are installed on the ring-shaped monitoring movement platform 200 and face the workpiece to be monitored; the molten pool shape monitoring unit and the workpiece three-dimensional The contour monitoring unit is installed on the side of the laser processing head used to perform laser near-net shaping, and keeps moving synchronously with the laser processing head; the CT defect monitoring unit is located on the side of the ring-shaped monitoring movement platform 200 to realize internal defects of the workpiece Monitoring. The annular monitoring motion platform 200 is arranged outside the 360° rotating processing table 15 and coaxially arranged with the 360° rotating processing table. The 360° rotating processing table 15 is used to drive the workpiece to rotate 360° to ensure that each monitoring unit Perform 360-degree monitoring of the workpiece, and then realize the multi-parameter online real-time monitoring of laser near-net forming.
如图2所示,环形监测运动平台200包括环形运动轨道201和升降装置202,该环形运动轨道201设置在360°旋转式加工台15的外部,并与360°旋转式加工台同轴设置,环形运动轨道201以工件为中心,可通过升降装置上下方向运动。环形运动轨道201上安装有激光超声监测部、熔池温度分布监测部、应力应变监测部100和激光诱导击穿光谱监测部。当工件16通过逐层熔覆加工时,每加工一层的高度,升降装置202将环形运动轨道201整体提升一层的铺粉高度,通过设计的360°旋转式工作台15带动工件16旋转使其能够被全方位扫描监测,通过升降装置202的动作使放置在环形运动轨道201上的各监测部始终聚焦于正在加工的部分,实现实时在线监测的目的。360°旋转式加工台通过电动马达提供动力旋转,其作用是带动基板及其上的工件一起绕中心旋转,使安装在周围的监测装置能够对基板上的工件进行无死角全方位监测,达到对加工件实时监测的目的。As shown in Figure 2, the circular monitoring motion platform 200 includes a circular motion track 201 and a lifting device 202. The circular motion track 201 is arranged outside the 360° rotating processing table 15 and coaxially arranged with the 360° rotating processing table. The circular motion track 201 is centered on the workpiece and can move up and down through the lifting device. A laser ultrasonic monitoring part, a molten pool temperature distribution monitoring part, a stress-strain monitoring part 100 and a laser-induced breakdown spectroscopy monitoring part are installed on the circular motion track 201. When the workpiece 16 is processed by layer-by-layer cladding, the lifting device 202 lifts the circular motion track 201 by one layer of powder spreading height for each layer of processing height, and the designed 360° rotating worktable 15 drives the workpiece 16 to rotate. It can be scanned and monitored in all directions. Through the action of the lifting device 202, the monitoring parts placed on the circular motion track 201 are always focused on the part being processed, so as to achieve the purpose of real-time online monitoring. The 360° rotating processing table is powered by an electric motor. Its function is to drive the substrate and the workpiece on it to rotate around the center together, so that the monitoring device installed around can monitor the workpiece on the substrate in all directions without dead angles to achieve The purpose of real-time monitoring of processed parts.
由于所涉及的监测领域众多,包括对加工样品的激光超声监测、熔池温度分布监测、应力应变监测、激光诱导击穿光谱监测等,每加工完一层加工件就会升高一层金属粉末颗粒的高度,为解决监测装置的安装和定位问题,本发明设计了上述环形监测运动平台和360°旋转式加工台,以实现各监测装置的装 配及工件旋转的旋转,实现全方位实时监测的功能。Since there are many monitoring fields involved, including laser ultrasonic monitoring of processed samples, temperature distribution monitoring of molten pool, stress and strain monitoring, laser induced breakdown spectroscopy, etc., a layer of metal powder will rise after each layer of processed parts is processed. The height of the particles, in order to solve the problem of the installation and positioning of the monitoring device, the present invention designs the above-mentioned annular monitoring motion platform and a 360° rotating processing table to realize the assembly of the monitoring devices and the rotation of the workpiece, and realize the comprehensive real-time monitoring Features.
参见图1和图2,激光超声监测部包括激发激光器19和探测激光器10,探测激光器安装在环形运动轨道201上,激发激光器19安装在探测激光器10上。其中,激发激光器19将脉冲激光束入射在待检测的工件表面,使得工件16表面局部产生快速热膨胀,激发的超声波在工件内部传播并与工件内部的缺陷相互作用,最终反射回工件的表面,探测激光器10接收相互作用后反射在工件表面的超声波信号,并传输至计算机控制系统中进行处理,具有高分辨率、宽频段、高能量和无接触等特点,相较于传统监测方式具有更高的检测精度。通过探测激光器10所获取的超声波信号即可分析工件近表面是否存在缺陷(例如裂纹、孔洞、未熔合、应力集中)及种类和位置,并基于分析的结果以调整激光扫描策略和加工参数。具体分析方法可采用现有常规方法进行,在此不赘述。1 and 2, the laser ultrasonic monitoring unit includes an excitation laser 19 and a detection laser 10, the detection laser is installed on the circular motion track 201, and the excitation laser 19 is installed on the detection laser 10. Among them, the excitation laser 19 incidents the pulsed laser beam on the surface of the workpiece to be inspected, causing the workpiece 16 to locally produce rapid thermal expansion. The excited ultrasonic wave propagates inside the workpiece and interacts with the defects inside the workpiece, and is finally reflected back to the surface of the workpiece for detection. The laser 10 receives the ultrasonic signal reflected on the surface of the workpiece after the interaction, and transmits it to the computer control system for processing. It has the characteristics of high resolution, wide frequency band, high energy and non-contact, which is higher than traditional monitoring methods. Detection accuracy. By detecting the ultrasonic signal obtained by the laser 10, it is possible to analyze whether there are defects (such as cracks, holes, non-fusion, stress concentration), types and locations on the near surface of the workpiece, and adjust the laser scanning strategy and processing parameters based on the analysis results. The specific analysis method can be carried out by the existing conventional method, which will not be repeated here.
具体的,熔池形态监测部优选为抵近可见高光谱相机18,其通过固定架20安装在激光加工头7的旁侧,与激光加工头同步运动,通过调整其角度可保证其与激光加工头扫描位置一致,对金属熔池的动态特征及形貌轮廓进行实时监测。该抵近可见高光谱相机可以消除环境噪声的影响,快速准确的判断熔池区域,所得到的图像信息传输至计算机控制系统1中进行分析,该计算机控制系统1基于获得的信息控制单通道扫描高度、激光功率和能量密度等参数以实时改善加工质量。Specifically, the molten pool shape monitoring unit is preferably close to the visible hyperspectral camera 18, which is installed on the side of the laser processing head 7 through a fixing frame 20, and moves synchronously with the laser processing head. By adjusting its angle, it can be ensured that it is in line with the laser processing. The head scanning position is consistent, real-time monitoring of the dynamic characteristics and contours of the metal molten pool. The near-visible hyperspectral camera can eliminate the influence of environmental noise, quickly and accurately determine the molten pool area, and the obtained image information is transmitted to the computer control system 1 for analysis, and the computer control system 1 controls the single-channel scanning based on the obtained information Parameters such as height, laser power and energy density can be used to improve processing quality in real time.
进一步的,熔池温度分布监测部优选为超高速光电测温仪11,其安装在环形运动轨道201上,用于对金属熔池周边部分的温度分布进行实时监测,判断熔池温度分布梯度是否过大,若温度分布梯度过大,可以反馈给计算机控制系统,调节加工参数,如激光功率、扫描间距、激光光斑半径和扫描速度等,从而改善温度分布的情况。Further, the temperature distribution monitoring part of the molten pool is preferably an ultra-high-speed photoelectric thermometer 11, which is installed on the circular motion track 201 for real-time monitoring of the temperature distribution around the metal molten pool, and judges whether the temperature distribution gradient of the molten pool is If the temperature distribution gradient is too large, it can be fed back to the computer control system to adjust processing parameters, such as laser power, scanning distance, laser spot radius, and scanning speed, so as to improve the temperature distribution.
参见图3,应力应变监测部包括底部应变测量机构和侧面应变测量机构,其中底部应变测量机构包括彼此相连的应变信号分析仪101和应变测量传感器阵列14,该应变信号分析仪101安装在360°旋转式加工台底部,通过线缆连 接传输电信号。打印件底部有一定的面积大小,应变测量传感器阵列14进行阵列分布设计可以对每一部分的应变情况都进行测量,使得打印件底部应变情况测量更准确。应变测量传感器阵列14嵌装在基板13内,以对工件底部的应变进行测量。侧面应变测量机构优选为工业相机103,其安装在环形运动轨道201上,其与工件之间设置有分光器102。3, the stress and strain monitoring part includes a bottom strain measurement mechanism and a side strain measurement mechanism, wherein the bottom strain measurement mechanism includes a strain signal analyzer 101 and a strain measurement sensor array 14 connected to each other, and the strain signal analyzer 101 is installed at 360° At the bottom of the rotating processing table, electrical signals are transmitted through cable connections. There is a certain area at the bottom of the print, and the strain measurement sensor array 14 is designed for array distribution to measure the strain of each part, making the measurement of the strain at the bottom of the print more accurate. The strain measurement sensor array 14 is embedded in the substrate 13 to measure the strain at the bottom of the workpiece. The side strain measuring mechanism is preferably an industrial camera 103, which is installed on the circular motion track 201, and a beam splitter 102 is arranged between it and the workpiece.
在工件的加工初期,金属粉末颗粒直接在基板13上铺粉进行激光加工,工件的应变监测由预先安置在基板13内部的应变测量传感器阵列14感知,通过传感器的阵列式分布优化设计,获取基板的应变场分布。由于在打印最底层时需要对基板预热,温度升高会对传感器的测量效果有影响,故应变测量传感器阵列14设计成带温度补偿功能,以消除温度提高带来的影响。应变测量传感器阵列14测得的信号传输至应变信号分析仪101进行处理,结合有限元计算方法进行应力反演,实现工件底部的应力无损测量,具体如何实现应力反演,其为现有技术,在此不赘述。在加工中后期过程中,安装在环形运动轨道201上的工业相机103测量工件侧面应变,具体的,采用激光束照射在工件侧面以产生散斑,工业相机获取散斑图像,通过360°旋转式加工台带动工件旋转,对工件侧面应变进行全方位测量,然后通过常规数字相关分析方法根据工业相机获取的图像计算应变,结合应变数据与有限元计算方法进行应力反演,实现工件侧面的应力无损测量,具体如何实现应力反演,其为现有技术,在此不赘述。In the initial stage of the processing of the workpiece, the metal powder particles are directly spread on the substrate 13 for laser processing. The strain monitoring of the workpiece is sensed by the strain measurement sensor array 14 pre-installed inside the substrate 13, and the array distribution optimization design of the sensor is used to obtain the substrate. The strain field distribution. Since the substrate needs to be preheated when printing the bottom layer, and the temperature increase will affect the measurement effect of the sensor, the strain measurement sensor array 14 is designed with a temperature compensation function to eliminate the effect of temperature increase. The signal measured by the strain measurement sensor array 14 is transmitted to the strain signal analyzer 101 for processing, combined with the finite element calculation method for stress inversion, to achieve non-destructive measurement of the stress at the bottom of the workpiece, and how to achieve the stress inversion is an existing technology. I won't repeat them here. In the middle and later stages of processing, the industrial camera 103 installed on the circular motion track 201 measures the side strain of the workpiece. Specifically, a laser beam is used to irradiate the side of the workpiece to generate speckles. The industrial camera obtains the speckle image through a 360° rotating The processing table drives the workpiece to rotate, and measures the side strain of the workpiece in all directions. Then, the strain is calculated according to the image obtained by the industrial camera through the conventional digital correlation analysis method, and the strain data and the finite element calculation method are combined to perform stress inversion to realize the stress on the side surface of the workpiece without damage The measurement, specifically how to achieve stress inversion, is an existing technology, and will not be repeated here.
具体的,工件三维轮廓监测部优选为高速工业相机17,其安装在激光加工头的旁侧,与激光加工头同步运动。具体通过固定架20安装在激光加工头7旁侧,保证在加工时随机械臂同步运动,实时扫描所加工部分的外部轮廓获取工件图像,通过工件图像进行精确的边缘轮廓提取,与设计的工件理想轮廓尺寸进行对比,识别分析加工层面翘曲缺陷和表面轮廓尺寸误差,并将分析数据传输至计算机控制系统1中以调整扫描轨迹。Specifically, the workpiece three-dimensional contour monitoring part is preferably a high-speed industrial camera 17, which is installed beside the laser processing head and moves synchronously with the laser processing head. Specifically, the fixed frame 20 is installed beside the laser processing head 7 to ensure the synchronous movement of the robot arm during processing, real-time scanning of the outer contour of the processed part to obtain the workpiece image, and accurate edge contour extraction through the workpiece image, which is consistent with the designed workpiece The ideal contour size is compared, the warpage defect of the processing plane and the surface contour size error are identified and analyzed, and the analysis data is transmitted to the computer control system 1 to adjust the scanning trajectory.
参见图4,激光诱导击穿光谱监测部300包括彼此相连的探测器302和光谱摄制仪303,探测器302与光谱摄制仪303通过光纤线缆304相连,光谱摄 制仪303安装在环形运动轨道201上。检测时,通过脉冲激光作用于工件16表面产生剥离现象,在材料表面产生寿命很短但具有很高亮度的等离子体305,等离子体305以超音速向外扩展并迅速冷却,在这段时间内,处于激发态的原子和离子从高能态跃迁到低能态,并发射出具有特定波长的等离子光线301,通过高灵敏度的探测器302对等离子光线进行探测获取,并通过光纤线缆304将信息传送至光谱摄制仪303,光谱摄制仪303通过获取的信息可分析样品中存在何种元素,并可对光谱进行进一步的定性分析和定量分析,实现加工过程中元素成分和含量的检测,进而可以进行材料的识别、分类、定性以及定量分析,可直接进行材料分析无需预处理样品,具有测量速度快、非接触测量、可同时分析多种元素等优点。具体分析方法可采用现有常规方法进行,在此不赘述。4, the laser induced breakdown spectrum monitoring unit 300 includes a detector 302 and a spectrograph 303 connected to each other. The detector 302 and the spectrograph 303 are connected by an optical fiber cable 304, and the spectrograph 303 is installed on the circular motion track 201. superior. During detection, a pulsed laser is applied to the surface of the workpiece 16 to produce a peeling phenomenon, and a plasma 305 with a short life but high brightness is generated on the surface of the material. The plasma 305 expands outward at supersonic speed and cools rapidly. During this time , The atoms and ions in the excited state transition from the high-energy state to the low-energy state, and emit plasma light 301 with a specific wavelength. The plasma light is detected by the high-sensitivity detector 302, and the information is transmitted to the Spectrograph 303, spectrograph 303 can analyze what kind of element exists in the sample through the information obtained, and can perform further qualitative and quantitative analysis of the spectrum, realize the detection of element composition and content in the processing process, and then can carry out the material The identification, classification, qualitative and quantitative analysis can be directly carried out for material analysis without pretreatment of samples. It has the advantages of fast measurement speed, non-contact measurement, and simultaneous analysis of multiple elements. The specific analysis method can be carried out by the existing conventional method, which will not be repeated here.
继续参见图1,CT缺陷监测部包括X射线源21和X射线探测器22,通过X射线源21发出X射线穿透工件并由X射线探测器22接收,X射线探测器22将接收的信息传至计算机系统中可获取工件内部缺陷和几何轮廓图像,可直观检测工件内部缺陷的类型、位置和尺寸大小。具体的,根据各个透射方向上各体积元的衰减系数不同,结合计算机信息处理和图像重建技术获得加工件内部缺陷和几何轮廓图像,将反馈信息与设定信息进行对比,发现误差后反馈给激光加工装置进行实时调控。由于CT缺陷监测装置体积较大,所以安装在环形监测运动平台200旁侧,具体将X射线源21和X射线探测器22设置在工作台12上,并位于环形运动轨道201的两侧。当前层加工和各监测完成后,通过360°旋转工作台15带动基板上的工件16旋转,使CT缺陷监测部能够对工件进行全方位三维扫描分析。Continuing to refer to Fig. 1, the CT defect monitoring unit includes an X-ray source 21 and an X-ray detector 22. X-rays emitted from the X-ray source 21 penetrate the workpiece and are received by the X-ray detector 22. The X-ray detector 22 will receive information Transfer to the computer system to obtain the internal defects and geometric contour images of the workpiece, and visually detect the type, location and size of the internal defects of the workpiece. Specifically, according to the different attenuation coefficients of each volume element in each transmission direction, computer information processing and image reconstruction technology are combined to obtain internal defects and geometric contour images of the workpiece, the feedback information is compared with the setting information, and the error is found to be fed back to the laser The processing device is regulated in real time. Due to the large volume of the CT defect monitoring device, it is installed beside the circular monitoring movement platform 200. Specifically, the X-ray source 21 and the X-ray detector 22 are arranged on the working table 12 and located on both sides of the circular movement track 201. After the current layer processing and various monitoring are completed, the workpiece 16 on the substrate is rotated by the 360° rotating worktable 15 so that the CT defect monitoring department can perform an all-round three-dimensional scanning analysis of the workpiece.
本发明还提供了具有实时监测功能的激光近净成形设备,其包括激光加工装置、控制装置及所述的实时监测装置,其中,激光加工装置用于执行激光近净成形,实时监测装置用于在激光近净成形过程中实时监测待成形工件的各项参数,并将监测数据反馈至控制装置中,控制装置则基于实时监测装置反馈的 监测数据进行激光近净成形工艺参数的动态调整,具体的利用反馈的监测数据确定是否存在加工缺陷及缺陷类型和缺陷位置,并基于缺陷类型和缺陷位置及时调整优化激光加工参数,然后利用调整优化后的激光加工参数实现激光加工装置的控制,即使激光加工装置以调整后的激光加工参数执行激光近净成形,以此将每一加工步骤的缺陷误差控制在可接受的范围内,进而制备高质量无缺陷的工件。而具体如何基于缺陷类型和缺陷位置调整激光加工参数,其是本领域的常规技术,在此不赘述。The present invention also provides a laser near-net-shaping device with real-time monitoring function, which includes a laser processing device, a control device and the real-time monitoring device, wherein the laser processing device is used for performing laser near-net-shaping, and the real-time monitoring device is used for During the laser near net forming process, various parameters of the workpiece to be formed are monitored in real time, and the monitoring data is fed back to the control device. The control device dynamically adjusts the laser near net forming process parameters based on the monitoring data fed back by the real-time monitoring device. Use the feedback monitoring data to determine whether there are processing defects, defect types and defect locations, and adjust and optimize the laser processing parameters in time based on the defect types and defect locations, and then use the adjusted and optimized laser processing parameters to achieve the control of the laser processing device, even if the laser The processing device performs laser near-net shaping with the adjusted laser processing parameters, thereby controlling the defect error of each processing step within an acceptable range, thereby preparing high-quality defect-free workpieces. How to adjust the laser processing parameters based on the defect type and defect position is a conventional technique in this field and will not be repeated here.
继续参见图1,激光加工装置包括激光加工头7、光纤耦合器3、送粉装置8、保护气供给装置9、工作台12、基板13和控制组件,其中,基板13和环形监测运动平台200设置在工作台12上方,基板13通过电动马达实现旋转,电动马达安装在工作台12内,激光加工头7通过传输光纤6与光纤耦合器3相连,控制组件包括依次相连的机械臂控制柜2、轴向机器人4和机械臂5,该机械臂控制柜2与计算机控制系统1相连,该机械臂5与激光加工头7相连。成形时,将所设计的工件结构信息输入计算机控制系统1,通过切片软件获得各层的加工轨迹并传输至机械臂控制柜2,从而控制轴向机器人4和机械臂5在空间六个自由度方向上的运动轨迹,带动安装在机械臂5上的激光加工头7运动,光纤耦合器3通过传输光纤6将光信号传至激光加工头7,通过聚焦透镜将光线聚焦于预定的工件16处,基板13设置在360°旋转式加工台15上,在加工前对基板13进行预热以改善应力集中等问题,送粉装置8以设定的速率和运动轨迹将金属粉末颗粒以一定的流量送至基板13上,保护气供给装置9在加工区域提供无氧环境防止加工时材料氧化,通过激光加工头7发射的激光快速熔化送粉装置8送出的固体金属粉末颗粒,熔池快速凝固逐层熔覆最终形成设计的工件形状。在成形过程中,360°旋转式加工台15带动基板及其上的工件16旋转,利用设计的各监测部对工件进行360°全方位无死角监测。Continuing to refer to Fig. 1, the laser processing device includes a laser processing head 7, an optical fiber coupler 3, a powder feeding device 8, a protective gas supply device 9, a working table 12, a substrate 13, and a control component. Among them, the substrate 13 and the ring-shaped monitoring movement platform 200 It is arranged above the worktable 12, the base plate 13 is rotated by an electric motor, the electric motor is installed in the worktable 12, the laser processing head 7 is connected to the optical fiber coupler 3 through the transmission fiber 6, and the control assembly includes a robot arm control cabinet 2 connected in sequence , The axial robot 4 and the mechanical arm 5, the mechanical arm control cabinet 2 is connected with the computer control system 1, and the mechanical arm 5 is connected with the laser processing head 7. When forming, input the designed workpiece structure information into the computer control system 1, and obtain the processing trajectory of each layer through the slicing software and transmit it to the robotic arm control cabinet 2, thereby controlling the axial robot 4 and the robotic arm 5 in six degrees of freedom in space The movement track in the direction drives the laser processing head 7 mounted on the mechanical arm 5 to move. The optical fiber coupler 3 transmits the optical signal to the laser processing head 7 through the transmission fiber 6 and focuses the light on the predetermined workpiece 16 through the focusing lens. , The substrate 13 is set on the 360° rotating processing table 15. The substrate 13 is preheated before processing to improve stress concentration and other problems. The powder feeding device 8 transfers the metal powder particles to a certain flow rate at a set rate and movement trajectory. The protective gas supply device 9 provides an oxygen-free environment in the processing area to prevent the material from oxidizing during processing. The laser emitted by the laser processing head 7 quickly melts the solid metal powder particles sent by the powder feeding device 8, and the molten pool is rapidly solidified. The layer cladding finally forms the designed workpiece shape. During the forming process, the 360° rotating processing table 15 drives the substrate and the workpiece 16 on it to rotate, and the designed monitoring parts are used to monitor the workpiece in 360° without dead angles.
具体的,本发明中控制装置为计算机控制系统1,用于对激光加工装置、激光超声监测部、熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测 部、应力应变监测部、激光诱导击穿光谱监测部、CT缺陷监测部、环形监测运动平台和360°旋转式加工台进行控制,将获取的熔池图像信息、温度分布信息、工件三维形貌信息、加工件材料成分定性定量信息、工件近表面缺陷分析检测信息、工件内部缺陷分析检测信息、工件应力分析检测信息等进行处理分析,判断是否存在加工缺陷,并确定缺陷类型和缺陷位置,及时调整优化激光加工参数,对正在进行的加工件质量进行改良,如果出现较大的缺陷信息无法改良,控制装置停止所有的加工部分并报警提示以免继续加工损坏机器。Specifically, the control device in the present invention is a computer control system 1, which is used to monitor the laser processing device, the laser ultrasonic monitoring unit, the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, the workpiece three-dimensional contour monitoring unit, the stress and strain monitoring unit, Laser-induced breakdown spectroscopy monitoring department, CT defect monitoring department, ring monitoring motion platform and 360° rotating processing table are controlled, and the acquired molten pool image information, temperature distribution information, three-dimensional shape information of the workpiece, and the material composition of the processed part are qualitatively controlled. Quantitative information, workpiece near-surface defect analysis and detection information, workpiece internal defect analysis and detection information, workpiece stress analysis and detection information, etc. are processed and analyzed to determine whether there are processing defects, and determine the defect type and defect location, and adjust and optimize the laser processing parameters in time. The quality of the processing parts in progress is improved. If there is a large defect information that cannot be improved, the control device stops all processing parts and gives an alarm to prevent further processing from damaging the machine.
该激光近净成形设备具体工作流程如下:The specific working process of the laser near net shaping equipment is as follows:
1)首先控制激光加工装置完成单层材料熔融,形成打印熔覆层,此为检测对象,在打印过程中,熔池形态监测部、熔池温度分布监测部和底部应变测量机构实时工作,以实现熔池动态形貌轮廓、熔池温度分布以及工件底部应变的实时监测;1) First, control the laser processing device to complete the single-layer material melting to form the printed cladding layer. This is the detection object. During the printing process, the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit and the bottom strain measuring mechanism work in real time to Realize real-time monitoring of the dynamic profile of the molten pool, the temperature distribution of the molten pool, and the strain at the bottom of the workpiece;
2)单层熔覆层打印完成后,激光加工装置回预设原点,暂停,等待其它检测部工作,为避免各检测手段间光、振动的干扰,工件三维轮廓监测部、激光超声监测部、CT缺陷监测部、激光诱导击穿光谱监测部、侧面应变测量机构,按先后顺序错时工作,当然也可以同时工作,在此检测过程中360°旋转式加工台15带动工件旋转,实现工件全方位实时在线监测;2) After the single-layer cladding layer is printed, the laser processing device returns to the preset origin, pauses, and waits for the work of other detection departments. In order to avoid the interference of light and vibration between the detection methods, the workpiece three-dimensional contour monitoring department, laser ultrasonic monitoring department, The CT defect monitoring department, the laser-induced breakdown spectrum monitoring department, and the side strain measuring mechanism work at the wrong time in the sequence, of course, they can also work at the same time. During the inspection process, the 360°rotating processing table 15 drives the workpiece to rotate to realize the full range of the workpiece Real-time online monitoring;
3)各监测部将监测的数据(包括工件近表面孔洞裂纹缺陷数据、熔池动态形貌轮廓数据、熔池温度分布数据、工件三维轮廓形貌数据、工件应力场分布数据、工件制备材料元素成分及含量数据、工件内部缺陷数据等)反馈至控制装置中,该控制装置基于实时监测装置反馈的监测数据进行激光近净成形工艺参数的动态调整,例如调整激光功率、扫描速度、扫描间距、激光光斑半径和送粉流量等,动态调整后的工艺参数作为下一层熔覆层的打印工艺;3) Data to be monitored by each monitoring department (including workpiece near-surface hole crack defect data, molten pool dynamic topography profile data, molten pool temperature distribution data, workpiece three-dimensional contour topography data, workpiece stress field distribution data, workpiece preparation material elements The composition and content data, the internal defect data of the workpiece, etc.) are fed back to the control device. The control device dynamically adjusts the laser near-net forming process parameters based on the monitoring data fed back by the real-time monitoring device, such as adjusting the laser power, scanning speed, scanning distance, The laser spot radius and powder feeding flow rate, etc., dynamically adjusted process parameters are used as the printing process of the next layer of cladding layer;
4)重复步骤1)~3),以此实现所需工件的激光近净成形,即完成当前层加工与检测工作后,进入下一层的“加工-检测-反馈优化-加工”循环,以此类推,直至完成整个工件的激光近净成形。4) Repeat steps 1) to 3) to achieve the laser near-net shape of the desired workpiece, that is, after completing the processing and inspection of the current layer, enter the "processing-inspection-feedback optimization-processing" cycle of the next layer to And so on, until the laser near-net shape of the entire workpiece is completed.
其中,熔池形态监测部、熔池温度分布监测部和应力应变监测部的底部应变测量机构在打印过程中实时测量,工件三维轮廓监测部、激光超声监测部、CT缺陷监测部、激光诱导击穿光谱监测部和应力应变监测部的侧面应变测量机构在熔覆层打印后进行测量,以此实现分时段延迟测量,以避免各监测方法之间的干扰,并有效避开熔池对检测结果的影响,提高检测的精度。Among them, the bottom strain measurement mechanism of the molten pool shape monitoring part, the molten pool temperature distribution monitoring part and the stress and strain monitoring part are measured in real time during the printing process. The lateral strain measurement mechanism of the cross-spectrum monitoring part and the stress-strain monitoring part performs measurement after the cladding layer is printed, so as to realize the time-delayed measurement to avoid interference between monitoring methods and effectively avoid the molten pool to the detection results The impact of this to improve the accuracy of detection.
具体操作时,计算机控制系统1控制机械臂控制柜2和光纤耦合器3,进而控制激光加工头7的运动轨迹,送粉装置8提供金属粉末颗粒,保护气供给装置9提供保护气体避免金属粉末颗粒熔化过程中氧化,在基板13完成单层材料熔融,形成打印熔覆层并以此为检测对象;高速工业相机17对工件16的三维轮廓尺寸变形进行监测,抵近可见高光谱相机18对熔池的动态形貌进行监测,与激光加工头7同步运动工作;同时安装在环形监测运动平台200上的激光诱导击穿光谱监测部300、侧面应变测量机构、超高速光电测温仪11、探测激光器10和激发激光器19对工件16分别进行材料元素定性定量分析检测、应力场分布检测、熔池温度分布检测和内部缺陷检测,结合安装在基板13内部的应变测量传感器阵列14对加工工件底部的应变结果进行检测分析,测量应变结果与有限元计算结果比,反演工件的应力分布。通过搭建360°旋转式加工台15,带动加工件进行360°旋转,保证各监测装置能够全方位扫描加工件侧面,达到对加工件轮廓的全方位实时在线监测的目的。During specific operation, the computer control system 1 controls the robotic arm control cabinet 2 and the fiber coupler 3, and then controls the movement trajectory of the laser processing head 7. The powder feeding device 8 provides metal powder particles, and the shielding gas supply device 9 provides shielding gas to avoid metal powder. The particles are oxidized in the process of melting, and a single layer of material is melted on the substrate 13 to form a printed cladding layer and use this as the inspection object; the high-speed industrial camera 17 monitors the deformation of the three-dimensional outline of the workpiece 16, which is close to the visible hyperspectral camera 18 The dynamic shape of the molten pool is monitored, and the laser processing head 7 moves synchronously; at the same time, the laser-induced breakdown spectroscopy monitoring unit 300, the side strain measuring mechanism, and the ultra-high-speed photoelectric thermometer 11, which are installed on the ring-shaped monitoring movement platform 200, The detection laser 10 and the excitation laser 19 perform qualitative and quantitative analysis and detection of material elements, stress field distribution detection, molten pool temperature distribution detection and internal defect detection on the workpiece 16 respectively, combined with the strain measurement sensor array 14 installed inside the substrate 13 to process the bottom of the workpiece The strain results are tested and analyzed, the measured strain results are compared with the finite element calculation results, and the stress distribution of the workpiece is inverted. By building a 360° rotating processing table 15 to drive the workpiece to rotate 360°, it is ensured that each monitoring device can scan the side of the workpiece in all directions, and achieve the purpose of all-round real-time online monitoring of the contour of the workpiece.
为整合七种不同的监测模块正常工作互不干扰,避免各检测方法间光、振动的干扰,除采用分时段测量,本发明还对各监测部的检测方式和检测波长进行了研究与设计,以实现分波段错开统一调控。具体的,对于激光超声监测部采用波长为0.4mm~0.5mm(优选为0.48mm)的超声波进行检测,对于熔池形态监测部和熔池温度分布监测部采用波长为780nm~950nm的红外光进行检测,对于工件三维轮廓监测部和应力应变监测部采用波长为446mm~464mm的可见光进行检测,激光诱导击穿光谱监测部采用波长为530nm~540nm(优选为532nm)的激光进行检测,CT缺陷监测部采用波长为10 -3nm~10nm的X射线进 行检测。 In order to integrate the normal operation of the seven different monitoring modules without interfering with each other and avoid the interference of light and vibration between the detection methods, in addition to the time-division measurement, the present invention also researches and designs the detection methods and detection wavelengths of each monitoring unit. In order to realize the unified regulation of sub-band stagger. Specifically, for the laser ultrasonic monitoring part, ultrasonic waves with a wavelength of 0.4mm~0.5mm (preferably 0.48mm) are used for detection, and for the molten pool shape monitoring part and the molten pool temperature distribution monitoring part, infrared light with a wavelength of 780nm~950nm is used. For detection, the three-dimensional contour monitoring part and the stress-strain monitoring part of the workpiece use visible light with a wavelength of 446mm ~ 464mm for detection, the laser induced breakdown spectroscopy monitoring part uses a laser with a wavelength of 530nm ~ 540nm (preferably 532nm) for detection, and CT defect monitoring The department uses X-rays with a wavelength of 10 -3 nm to 10 nm for detection.
此外,对熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部和应力应变监测部还进行窄带通滤波设计,具体而言,在熔池形态监测部(即抵近可见高光谱相机18)与熔池之间设置滤波片进行解耦,以保留与抵近可见高光谱相机检测光波长一致的红外监测光,消除激光热源的光影响。在熔池温度分布监测部(即超高速光电测温仪11)与熔池之间设置滤波片进行解耦,以保留与超高速光电测温仪检测光波长一致的红外监测光,消除激光热源的光影响。在工件三维轮廓监测部(即高速工业相机17)与待测工件之间设置滤波片进行解耦,以保留与高速工业相机检测光波长一致的可见光,消除激光热源的光影响,同时将单波长(460nm)蓝光作为高速工业相机的投影光源。对于应力应变监测部而言,在工业相机103与分光器102之间设置滤波片进行解耦,以保留与工业相机103检测光波长一致的可见光,消除激光热源的光影响。In addition, narrow band-pass filtering is designed for the molten pool shape monitoring part, molten pool temperature distribution monitoring part, workpiece three-dimensional contour monitoring part, and stress and strain monitoring part. Specifically, in the molten pool shape monitoring part (that is, near the visible hyperspectral A filter is set between the camera 18) and the molten pool for decoupling, so as to retain the infrared monitoring light with the same wavelength as the detection light of the visible hyperspectral camera, and eliminate the light influence of the laser heat source. A filter is set between the molten pool temperature distribution monitoring part (i.e., the ultra-high-speed photoelectric thermometer 11) and the molten pool for decoupling, so as to retain the infrared monitoring light with the same wavelength as the ultra-high-speed photoelectric thermometer to eliminate the laser heat source. Light influence. Set a filter between the workpiece three-dimensional contour monitoring part (ie, high-speed industrial camera 17) and the workpiece to be tested for decoupling, so as to retain the visible light with the same wavelength as the detection light of the high-speed industrial camera, eliminate the light influence of the laser heat source, and reduce the single wavelength (460nm) blue light is used as the projection light source of high-speed industrial cameras. For the stress and strain monitoring part, a filter is provided between the industrial camera 103 and the beam splitter 102 for decoupling, so as to retain the visible light with the same wavelength as the detection light of the industrial camera 103 and eliminate the light influence of the laser heat source.
本发明所涉及的激光近净成形实时在线无损监测包括对工件近表面缺陷检测、加工件材料元素成分定性定量检测、工件外部三维轮廓尺寸误差变形检测、加工熔池动态形貌检测、加工熔池温度分布检测、工件应力场分布检测。通过在加工件外围安装多套监测装置,围绕加工中心进行实时在线监测,将监测所得的数据实时传输至计算机进行加工件质量和缺陷分析,并将分析结果实时反馈至激光加工装置对加工工艺进行调节,例如激光功率、激光扫描速度、激光扫描间距、激光光斑半径、单层熔覆高度、金属粉末颗粒出粉量等,以此将每一层每一步的加工参数进行最优化处理,将每一个加工步骤的缺陷误差控制在可接受的范围内。此外,还可以利用激光重熔技术对加工已产生的缺陷进行改善和消除,对于超出预定范围内的严重误差,可对激光加工装置发出停止信号并发出警报信号,以免持续加工造成材料浪费和损坏装置。The real-time online non-destructive monitoring of near-net laser forming of the present invention includes near-surface defect detection of the workpiece, qualitative and quantitative detection of the material element composition of the workpiece, the external three-dimensional contour size error and deformation detection of the workpiece, the dynamic shape detection of the processing molten pool, and the processing molten pool Temperature distribution detection, workpiece stress field distribution detection. By installing multiple sets of monitoring devices on the periphery of the processed parts, real-time online monitoring is performed around the processing center, the data obtained from the monitoring is transmitted to the computer in real time for the quality and defect analysis of the processed parts, and the analysis results are fed back to the laser processing device in real time to perform the processing process Adjust, such as laser power, laser scanning speed, laser scanning distance, laser spot radius, single-layer cladding height, metal powder particle output, etc., so as to optimize the processing parameters of each layer and each step. The defect error of a processing step is controlled within an acceptable range. In addition, laser remelting technology can also be used to improve and eliminate processing defects. For serious errors that exceed the predetermined range, a stop signal and an alarm signal can be issued to the laser processing device to avoid material waste and damage caused by continuous processing. Device.
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modification, equivalent replacement and improvement, etc. made within the spirit and principle of the present invention, All should be included in the protection scope of the present invention.

Claims (10)

  1. 一种用于激光近净成形的实时监测装置,其特征在于,包括激光超声监测部、熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部、应力应变监测部(100)、激光诱导击穿光谱监测部(300)、CT缺陷监测部、环形监测运动平台(200)和360°旋转式加工台(15),其中:A real-time monitoring device for laser near-net forming, which is characterized by comprising a laser ultrasonic monitoring part, a molten pool shape monitoring part, a molten pool temperature distribution monitoring part, a workpiece three-dimensional contour monitoring part, a stress and strain monitoring part (100), Laser-induced breakdown spectroscopy monitoring unit (300), CT defect monitoring unit, ring monitoring motion platform (200) and 360° rotating processing table (15), of which:
    所述激光超声监测部、熔池温度分布监测部、应力应变监测部和激光诱导击穿光谱监测部安装在所述环形监测运动平台(200)上,并面向待监测工件;所述熔池形态监测部和工件三维轮廓监测部安装在用于执行激光近净成形的激光加工头的旁侧,并与激光加工头保持同步运动;所述CT缺陷监测部设于环形监测运动平台(200)的旁侧,用于实现工件内部缺陷的监测;所述环形监测运动平台(200)设置在所述360°旋转式加工台(15)的外部并与其同轴设置,该360°旋转式加工台(15)用于带动待测工件做360°旋转,以保证各监测部对工件进行360°全方位监测,进而实现激光近净成形的多参数在线实时测量。The laser ultrasonic monitoring part, the molten pool temperature distribution monitoring part, the stress and strain monitoring part and the laser induced breakdown spectrum monitoring part are installed on the annular monitoring movement platform (200) and face the workpiece to be monitored; the molten pool shape The monitoring part and the workpiece three-dimensional contour monitoring part are installed on the side of the laser processing head used to perform laser near-net shaping, and keep synchronized movement with the laser processing head; the CT defect monitoring part is set on the ring monitoring movement platform (200) The side is used to monitor the internal defects of the workpiece; the ring-shaped monitoring motion platform (200) is arranged outside and coaxially with the 360° rotating processing table (15), and the 360° rotating processing table ( 15) It is used to drive the workpiece to be measured to rotate 360° to ensure that each monitoring department can monitor the workpiece in 360°, and then realize the multi-parameter online real-time measurement of the laser near-net shape.
  2. 如权利要求1所述的用于激光近净成形的实时监测装置,其特征在于,所述环形监测运动平台(200)包括环形运动轨道(201)和升降装置(202),在工件每成形一层高度时,所述升降装置(202)对应的将环形运动轨道(201)上升一层高度,以使得环形监测运动平台(200)上的各监测部始终监测工件待监测的部分。The real-time monitoring device for laser near-net shaping according to claim 1, characterized in that the ring-shaped monitoring motion platform (200) includes a ring-shaped motion track (201) and a lifting device (202). When the height of the floor is reached, the lifting device (202) correspondingly raises the circular motion track (201) by one level, so that the monitoring parts on the circular monitoring motion platform (200) always monitor the part of the workpiece to be monitored.
  3. 如权利要求1所述的用于激光近净成形的实时监测装置,其特征在于,所述激光超声监测部包括激发激光器(19)和探测激光器(10),其中,所述激发激光器(19)用于将脉冲激光束入射至待检测的工件表面以产生超声波信号,该超声波在工件近表面内部与缺陷相互作用,并反射回工件的表面,并被所述探测激光器(10)接收。The real-time monitoring device for laser near-net shaping according to claim 1, wherein the laser ultrasonic monitoring part includes an excitation laser (19) and a detection laser (10), wherein the excitation laser (19) The pulsed laser beam is used to incident the surface of the workpiece to be inspected to generate an ultrasonic signal, which interacts with the defect in the near surface of the workpiece, is reflected back to the surface of the workpiece, and is received by the detection laser (10).
  4. 如权利要求1所述的用于激光近净成形的实时监测装置,其特征在于,所述熔池形态监测部优选为抵近可见高光谱相机(18);所述熔池温度分布监测部优选为超高速光电测温仪(11);所述工件三维轮廓监测部优选为高速工 业相机(17)。The real-time monitoring device for laser near-net-shaping according to claim 1, wherein the molten pool shape monitoring part is preferably a near visible hyperspectral camera (18); the molten pool temperature distribution monitoring part is preferably It is an ultra-high-speed photoelectric thermometer (11); the three-dimensional contour monitoring part of the workpiece is preferably a high-speed industrial camera (17).
  5. 如权利要求1所述的用于激光近净成形的实时监测装置,其特征在于,所述应力应变监测部(100)包括底部应变测量机构和侧面应变测量机构,其中,所述底部应变测量机构包括彼此相连的应变信号分析仪(101)和应变测量传感器阵列(14),所述应变信号分析仪(101)安装在360°旋转式加工台(15)的底部,所述应变测量传感器阵列(14)嵌装在用于放置工件的基板内,以对工件底部的应变进行测量;所述侧面应变测量机构为工业相机(103),其安装在环形监测运动平台(200)上,并与工件之间设置有分光器(102);优选的,所述应变测量传感器阵列(14)具有温度补偿功能。The real-time monitoring device for laser near net shaping according to claim 1, wherein the stress-strain monitoring part (100) comprises a bottom strain measuring mechanism and a side strain measuring mechanism, wherein the bottom strain measuring mechanism It includes a strain signal analyzer (101) and a strain measurement sensor array (14) connected to each other, the strain signal analyzer (101) is installed at the bottom of a 360° rotating processing table (15), and the strain measurement sensor array ( 14) It is embedded in the substrate for placing the workpiece to measure the strain at the bottom of the workpiece; the side strain measurement mechanism is an industrial camera (103), which is installed on the ring-shaped monitoring motion platform (200) and is connected to the workpiece A beam splitter (102) is arranged in between; preferably, the strain measurement sensor array (14) has a temperature compensation function.
  6. 如权利要求1所述的用于激光近净成形的实时监测装置,其特征在于,所述激光诱导击穿光谱监测部(300)包括彼此相连的探测器(302)和光谱摄制仪(303),所述探测器(302)用于探测获取工件表面发射出的等离子光线,并将该等离子光线传送至光谱摄制仪(303)中,以实现工件制备材料的元素成分及含量的检测。The real-time monitoring device for laser near-net shaping according to claim 1, wherein the laser-induced breakdown spectroscopy monitoring part (300) comprises a detector (302) and a spectrograph (303) connected to each other The detector (302) is used to detect and acquire the plasma light emitted from the surface of the workpiece, and transmit the plasma light to the spectrograph (303), so as to realize the detection of the element composition and content of the material prepared by the workpiece.
  7. 如权利要求1-6任一项所述的用于激光近净成形的实时监测装置,其特征在于,所述CT缺陷监测部包括X射线源(21)和X射线探测器(22),该X射线源(21)和X射线探测器(22)位于工件的两侧,其中,X射线源(21)用于发出X射线,该X射线穿透工件后由所述X射线探测器(22)接收。The real-time monitoring device for laser near-net-shaping according to any one of claims 1-6, wherein the CT defect monitoring unit includes an X-ray source (21) and an X-ray detector (22), and The X-ray source (21) and the X-ray detector (22) are located on both sides of the workpiece. The X-ray source (21) is used to emit X-rays. After the X-ray penetrates the workpiece, the X-ray detector (22) )take over.
  8. 如权利要求1-7任一项所述的用于激光近净成形的实时监测装置,其特征在于,所述激光超声监测部采用波长为0.4mm~0.5mm的超声波进行检测,熔池形态监测部和熔池温度分布监测部采用波长为780nm~950nm的红外光进行检测,工件三维轮廓监测部和应力应变监测部采用波长为446mm~464mm的可见光进行检测,激光诱导击穿光谱监测部采用波长为530nm~540nm的激光进行检测,CT缺陷监测部采用波长为10 -3nm~10nm的X射线进行检测;优选的,对熔池形态监测部、熔池温度分布监测部、工件三维轮廓监测部和应力应变监测部进行窄带通滤波设计。 The real-time monitoring device for laser near-net-shaping according to any one of claims 1-7, wherein the laser ultrasonic monitoring unit uses ultrasonic waves with a wavelength of 0.4 mm to 0.5 mm for detection, and molten pool shape monitoring The temperature distribution monitoring part and the molten pool adopt infrared light with a wavelength of 780nm~950nm for detection, the workpiece three-dimensional profile monitoring part and the stress-strain monitoring part adopt visible light with a wavelength of 446mm~464mm for detection, and the laser-induced breakdown spectroscopy monitoring part adopts a wavelength. The detection is carried out with a laser of 530nm~540nm, and the CT defect monitoring department uses X-rays with a wavelength of 10 -3 nm~10nm for detection; preferably, the molten pool shape monitoring unit, molten pool temperature distribution monitoring unit, and workpiece three-dimensional contour monitoring unit And the stress and strain monitoring department for narrow band pass filter design.
  9. 一种具有实时监测功能的激光近净成形设备,其特征在于,该成形设备包括激光加工装置、控制装置及如权利要求1-8任一项所述的实时监测装置,其中,所述激光加工装置用于执行激光近净成形,所述实时监测装置用于在激光近净成形过程中实时监测工件,并将监测的数据反馈至控制装置中,所述控制装置则基于实时监测装置反馈的监测数据动态调整激光近净成形工艺参数,并基于动态调整后的参数控制激光加工装置动作,以此实现高质量激光近净成形工件的制备。A laser near-net forming equipment with real-time monitoring function, characterized in that the forming equipment includes a laser processing device, a control device, and the real-time monitoring device according to any one of claims 1-8, wherein the laser processing The device is used to perform laser near-net shaping, the real-time monitoring device is used to monitor the workpiece in real time during the laser near-net shaping process, and feedback the monitored data to the control device, which is based on the monitoring feedback from the real-time monitoring device The data dynamically adjusts the laser near-net-shaping process parameters, and controls the action of the laser processing device based on the dynamically adjusted parameters, so as to realize the preparation of high-quality laser near-net-shaping workpieces.
  10. 一种具有实时监测功能的激光近净成形方法,其特征在于,包括如下步骤:A laser near-net shaping method with real-time monitoring function is characterized in that it comprises the following steps:
    1)利用激光加工装置进行待成形工件的单层熔覆层打印,在打印过程中,熔池形态监测部、熔池温度分布监测部、应力应变监测部的底部应变测量机构实时工作,以实现熔池动态形貌轮廓、熔池温度分布以及工件底部应变的实时监测;1) The laser processing device is used to print the single-layer cladding layer of the workpiece to be formed. During the printing process, the bottom strain measuring mechanism of the molten pool shape monitoring unit, the molten pool temperature distribution monitoring unit, and the stress and strain monitoring unit work in real time to achieve Real-time monitoring of the dynamic profile of the molten pool, the temperature distribution of the molten pool and the strain at the bottom of the workpiece;
    2)单层熔覆层打印完成后,激光加工装置回到预设原点并暂停,工件三维轮廓监测部、激光超声监测部、CT缺陷监测部、激光诱导击穿光谱监测部以及应力应变监测部的侧面应变测量机构开始同步或分时工作,实现工件三维轮廓形貌、工件近表面缺陷、工件内部缺陷、工件制备材料元素成分及含量、工件侧面应变的实时监测,检测过程中360°旋转式加工台带动工件进行360°旋转,保证各监测部全方位扫描工件,实现全方位实时在线监测的目的;2) After the single-layer cladding layer is printed, the laser processing device returns to the preset origin and pauses, the workpiece three-dimensional contour monitoring department, laser ultrasonic monitoring department, CT defect monitoring department, laser induced breakdown spectroscopy monitoring department, and stress-strain monitoring department The side strain measuring mechanism of the slab starts to work synchronously or time-sharing to realize the real-time monitoring of the three-dimensional contour of the workpiece, the near surface defect of the workpiece, the internal defect of the workpiece, the element composition and content of the workpiece preparation material, and the side strain of the workpiece. 360°rotating during the inspection process The processing table drives the workpiece to rotate 360° to ensure that each monitoring department scans the workpiece in all directions, realizing the purpose of all-round real-time online monitoring;
    3)各监测部将监测的数据反馈至控制装置中,该控制装置基于实时监测装置反馈的监测数据动态调整激光近净成形的工艺参数,该动态调整后的工艺参数作为下一层熔覆层的打印工艺;3) Each monitoring department feeds back the monitored data to the control device, which dynamically adjusts the process parameters of the laser near-net forming based on the monitoring data fed back by the real-time monitoring device, and the dynamically adjusted process parameters are used as the next layer of cladding layer Printing process;
    4)重复步骤1)~3),以此实现所需工件的激光近净成形。4) Repeat steps 1) to 3) to achieve the laser near-net shape of the desired workpiece.
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CN116875974B (en) * 2023-07-07 2024-01-09 郑州工业应用技术学院 Laser cladding method and laser cladding system
CN117571712A (en) * 2023-08-17 2024-02-20 哈尔滨工业大学 Mixed laser-induced ultrasonic infrared multi-field imaging detection device and method for reusing multi-type cross-scale damage of spacecraft
CN117161413B (en) * 2023-11-02 2024-03-15 成都飞机工业(集团)有限责任公司 Device and method for repairing 3D printing defects in real time
CN117161413A (en) * 2023-11-02 2023-12-05 成都飞机工业(集团)有限责任公司 Device and method for repairing 3D printing defects in real time
CN118002910A (en) * 2024-01-17 2024-05-10 北京晶飞半导体科技有限公司 Stress-enhanced laser modification stripping method and device
CN118310573A (en) * 2024-04-03 2024-07-09 炎京科技(深圳)有限公司 Automatic visual detection equipment for processing precise metal piece

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