WO2022176430A1

WO2022176430A1 - Method for manufacturing three-dimensional structure, and fabrication device

Info

Publication number: WO2022176430A1
Application number: PCT/JP2022/000452
Authority: WO
Inventors: 高弘林
Original assignee: 国立大学法人大阪大学
Priority date: 2021-02-18
Filing date: 2022-01-11
Publication date: 2022-08-25

Abstract

In manufacturing of a metal three-dimensional structure using an additive fabrication method, the present invention detects defects on or directly under a surface during the course of manufacturing. This method for manufacturing a metal three-dimensional structure includes: a layering step (S2) for layering material layers composed of a metal powder; an irradiation step (S5) for irradiating the surface of the layered material layers with inspection laser light when a prescribed number of the material layers have been layered, and generating vibration at irradiation points; a detection step (S6) for detecting the vibration; and a determination step (S8) for determining, on the basis of the strength of the detected vibration, whether defects are present in the material layers.

Description

Three-dimensional structure manufacturing method and modeling apparatus

The present invention relates to a method for manufacturing a three-dimensional structure using a layered manufacturing method and a manufacturing apparatus for the three-dimensional structure.

　Technology for detecting defects occurring in three-dimensional metal structures (hereinafter referred to as metal structures) produced using the additive manufacturing method is known as a conventional technology. Non-Patent Document 1 discloses a technique for detecting defects occurring in a metal structure from reflected waves of laser light irradiated to the metal structure.

The conventional techniques as described above are suitable for detecting defects inside a metal structure (typically on the order of mm from the surface layer), directly below the surface layer (typically on the order of μm from the surface layer) or There is a problem that it is not suitable for detecting defects on the surface. Due to this problem, the prior art cannot detect defects during the manufacturing process of the metal structure and repair the defects during the manufacturing process.

An object of one aspect of the present invention is to realize a manufacturing method or the like that detects defects directly under the surface layer or on the surface during manufacturing in the manufacturing of a three-dimensional structure using the additive manufacturing method.

In order to solve the above problems, a method for manufacturing a three-dimensional structure according to one aspect of the present invention is a method for manufacturing a three-dimensional structure using a modeling apparatus that models a three-dimensional structure by a layered manufacturing method. After starting the stacking step of stacking a material layer made of the material of the three-dimensional structure, and the stacking step of stacking the surface layer on a surface layer that is the uppermost material layer among the stacked material layers. and an irradiation step of irradiating a beam before the start of the next lamination step to generate vibration at the irradiation point, a detection step of detecting the vibration, and based on the intensity of the detected vibration, the material layer and a determination step of determining the presence or absence of defects.

Further, in order to solve the above problems, a method for manufacturing a three-dimensional structure according to one aspect of the present invention includes manufacturing a three-dimensional structure using a modeling apparatus that models a three-dimensional structure by a layered manufacturing method. A method, comprising: providing a material for the three-dimensional structure to a predetermined build area; and forming a material layer by irradiating the material provided to the build area with a beam and solidifying the material. a forming step, wherein the material layers are laminated by repeating the providing step and the layer forming step; a detecting step of detecting vibration generated at an irradiation point of the beam; and the detected vibration. and a determining step of determining whether or not there is a defect in the material layer based on the intensity of .

Further, in order to solve the above problems, a modeling apparatus according to an aspect of the present invention is a modeling apparatus that models a three-dimensional structure by a layered manufacturing method, and defines a modeling area of the three-dimensional structure. a table, a control device for controlling lamination of material layers made of the material of the three-dimensional structure, and a surface layer, which is the uppermost material layer among the laminated material layers, after the start of lamination of the surface layer and the following A beam output device that outputs a beam that is irradiated before the start of lamination of the material layers and that generates vibration at an irradiation point, and a detection device that is provided on the table and detects the vibration are provided.

Further, in order to solve the above problems, a modeling apparatus according to an aspect of the present invention is a modeling apparatus that models a three-dimensional structure by a layered manufacturing method, and defines a modeling area of the three-dimensional structure. a table, a providing device for providing the material of the three-dimensional structure to a predetermined modeling area, and a forming device for forming a material layer by irradiating the material provided to the modeling area with a beam to solidify the material. , a control device for stacking the material layers by controlling the providing device and the forming device to repeat the formation of the material layers in the modeling area; a detection device for detecting vibrations generated by the

According to one aspect of the present invention, in the production of a three-dimensional structure using the additive manufacturing method, it is possible to detect defects directly below the surface layer or on the surface during production.

It is a figure which shows the principal part structure of the modeling apparatus which concerns on Embodiment 1 of this invention. FIG. 2 is a flowchart showing an example of the flow of manufacturing processing for a metal structure executed by the modeling apparatus shown in FIG. 1; FIG. FIG. 3 is a diagram showing an outline of a modeling process included in the manufacturing process shown in FIG. 2; 3 is a diagram showing an overview of inspection processing included in the manufacturing processing shown in FIG. 2; FIG. 2 is a diagram showing an example of a vibration waveform of ultrasonic waves received by an ultrasonic probe included in the modeling apparatus shown in FIG. 1; FIG. 3 is a flowchart showing an example of the flow of defect detection processing included in the manufacturing processing shown in FIG. 2; It is a figure which shows an example of the frequency spectrum converted from the vibration waveform. It is a figure which shows the principal part structure of the modeling apparatus which concerns on Embodiment 2 of this invention. FIG. 9 is a flow chart showing an example of the flow of manufacturing processing of a metal structure executed by the modeling apparatus shown in FIG. 8. FIG. FIG. 10 is a diagram showing an outline of simultaneous processing included in the manufacturing processing shown in FIG. 9; FIG.

[Embodiment 1]
An embodiment of the present invention will be described in detail below.

(modeling device)
FIG. 1 is a diagram showing the main configuration of a modeling apparatus 1 according to this embodiment. The modeling apparatus 1 is an apparatus for modeling (manufacturing) a metal three-dimensional structure (hereinafter referred to as a metal structure) using the additive manufacturing method. That is, the modeling apparatus 1 models a desired metal structure by stacking a plurality of layers.

The modeling apparatus 1 includes a base 2, a table 3, a recoater 4 (providing device), a modeling laser 5, a mirror 6, an optical system 7, a control device 8, an inspection laser 9 (beam output device), and an ultrasonic probe. 10 (detection device) and an information processing device 11 . The base table 2 is a table on which the metal powder M that is the material of the metal structure is placed, and the recoater 4 is arranged. The recoater 4 reciprocates in a horizontal uniaxial direction (direction of arrow A) to supply the metal powder M onto the table 3 and flatten it to form a powder layer. Table 3 is a platform on which the desired metal structure is formed. In other words, the table 3 defines a shaping area, which is a predetermined area in which the metal structure is to be shaped. As described above, a powder layer is formed on the table 3 by the recoater 4 . The table 3 can be moved vertically (in the direction of arrow U) by a drive unit (not shown). Until the first layer of metal structure is manufactured, the base 2 and the table 3 form a horizontal surface. The layer is generated by solidifying the powder layer with a laser beam for shaping the metal structure (hereinafter referred to as a shaping laser beam R1). Henceforth, the said layer is described as a material layer. Although the details will be described later, the table 3 moves downward in FIG. 1 by the thickness of the material layer each time the material layer is formed (stacked). Thereby, the metal powder can be layered on the formed material layer.

The shaping laser 5 outputs a shaping laser beam R1 (shaping beam). The shaping laser beam R1 can melt the powder layer, and the shaping laser 5 is, for example, a _CO2 laser, a fiber laser or a YAG laser. As an example, the modeling laser 5 outputs a continuous wave with an output of several hundred W (for example, 300 W). The shaping laser 5 includes a light source, a collimator and a focus control unit. The shaping laser beam R1 output from the light source is converted into parallel light by a collimator. Subsequently, the parallel light is condensed by the focus control unit and adjusted to a predetermined beam diameter. The modeling laser beam R1 has higher energy than the laser beam output from the inspection laser 9 . In other words, the modeling laser 5 has a higher output than the inspection laser 9 .

The mirror 6 reflects light of a specific wavelength and transmits light of wavelengths other than the specific wavelength. Here, the modeling laser 5 outputs the modeling laser beam R1 of the specific wavelength. That is, the mirror 6 reflects the modeling laser beam R1.

The optical system 7 includes a plurality of galvanomirrors (two in the example of FIG. 1). The optical system 7 reflects the modeling laser beam and irradiates it onto a predetermined region (modeling region) of the powder layer. This causes the powder layer to melt and then solidify to form a material layer.

The control device 8 controls the modeling laser 5, the optical system 7, and the inspection laser 9. The control device 8 controls the modeling laser 5 to output the modeling laser beam R1. Also, the control device 8 controls the optical system 7 to adjust the angle of each galvanomirror. As a result, the powder layer is irradiated with the shaping laser beam R1 whose irradiation position is controlled, and a desired material layer is formed. The control device 8 also controls the inspection laser 9 to output laser light (hereinafter referred to as inspection laser light R2).

Note that the control device 8 may be a plurality of control devices that control the modeling laser 5, the optical system 7, and the inspection laser 9, respectively.

Here, I will explain the outline of the flow of modeling of metal structures. With the base 2 and the table 3 forming a horizontal surface, the controller 8 controls the recoater 4 to supply the metal powder M onto the table 3 and flatten it to form a powder layer. Subsequently, the control device 8 controls the shaping laser 5 and the optical system 7 to irradiate a predetermined region of the powder layer with the shaping laser beam R1. Thus, the first material layer is formed. Subsequently, the control device 8 controls the drive section of the table 3 to move the table 3 downward in FIG. 1 by a predetermined distance (specifically, the thickness of the material layer).

By repeating the above processes, the laminated material layer P (hereinafter referred to as laminated material layer P) shown in FIG. 1 is formed. As a result of repeating the process for a predetermined number of times, a metal structure is formed.

　Referring to FIG. The inspection laser 9 outputs an inspection laser beam R2 for inspecting the presence or absence of defects occurring in the material layer. Note that defects include, but are not limited to, voids, cracks, peeling, and the like that occur in the material layer.

The inspection laser 9 is, for example, a CO ₂ laser, a fiber laser, or a YAG laser, and can vibrate the material layer without melting it by the output inspection laser light R2 (beam, laser light). That is, the inspection laser beam R2 has lower energy than the modeling laser beam R1. As an example, the inspection laser 9 outputs a pulse wave as the inspection laser light R2 with an output of several tens of W (for example, 50 W). In this embodiment, an example in which the inspection laser 9 is a pulse laser will be described. Specifically, the inspection laser 9 outputs an inspection laser beam R2 at a repetition frequency _fL . Note that the repetition frequency f _L can be controlled within a range of 1 kHz to 200 kHz, for example. Also, in this embodiment, the repetition frequency f _L is set to a frequency within the band of 10 to 100 kHz. The inspection laser 9 also includes a light source, a collimator and a focus control unit. The inspection laser beam R2 output from the light source is converted into parallel light by a collimator. Subsequently, the parallel light is condensed by the focus control unit and adjusted to a predetermined beam diameter.

The inspection laser beam R2 is a laser beam with a wavelength other than a specific wavelength. As a result, the inspection laser beam R2 passes through the mirror 6 and enters the optical system 7 . The control device 8 controls the optical system 7 to adjust the galvanomirror, thereby scanning the surface layer of the laminated material layer P with the inspection laser beam R2. As a result, the entire surface layer is irradiated with the inspection laser beam R2. The surface layer is the uppermost material layer of the laminated material layers P, that is, the outermost material layer formed last. The surface layer is irradiated with the inspection laser beam R2 and vibrates to generate ultrasonic waves. The ultrasonic waves propagate to the table 3 .

The modeling laser 5, the mirror 6, and the inspection laser 9 are configured such that the modeling laser beam R1 and the inspection laser beam R2 enter the mirror 6 from different directions and are reflected by the mirror 6. It is arranged so that R1 and the inspection laser beam R2 transmitted through the mirror 6 enter the optical system 7 along the same optical path.

The ultrasonic probe 10 receives ultrasonic waves generated in the laminated material layer P. Specifically, the ultrasonic probe 10 is provided on the table 3 and receives ultrasonic waves propagated from the material layer to the table 3 . In the example of FIG. 1, a plurality of (six) ultrasonic probes 10 are provided on the back surface of the table 3, but the number and installation positions of the ultrasonic probes 10 are not limited to this. The back surface is the surface opposite to the surface on which the material layer is formed. For example, the ultrasonic probe 10 may be provided at least partially on the surface on which the material layer is formed. The number of ultrasonic probes 10 may be one, but it is desirable to have a plurality of them. By providing a plurality of ultrasonic probes 10 on the table 3, the ultrasonic waves received by each ultrasonic probe 10 can be added. As a result, it is possible to minimize the unevenness in the intensity of the ultrasonic waves caused by the installation position of the ultrasonic probe 10, and as a result, it is possible to specify the position of the defect more accurately.

The applicant found that the ultrasonic waves generated in the laminated material layer P contain frequency components higher than the repetition frequency _fL of the inspection laser beam R2. Therefore, the frequency band of ultrasonic waves that can be received by the ultrasonic probe 10 (second frequency band, hereinafter referred to as reception band) is the frequency band that the repetition frequency f _L can take (first frequency band, hereinafter referred to as an irradiation band). Specifically, the reception band includes an irradiation band and a higher frequency band than the irradiation band. As an example, the lower limit of the reception band is equal to or higher than the lowest resonant frequency of the metal structure, and the upper limit is on the order of 10 MHz. By making the lower limit of the reception band equal to or higher than the lowest-order resonance frequency, the influence of rigid body displacement can be eliminated. Also, by setting the upper limit to the order of 10 MHz, more resonance frequencies can be included in the reception band, making it easier to detect defects.

It should be noted that "ultrasonic waves" in the present embodiment are not intended to be limited to elastic waves with frequencies higher than audible sound. That is, in the present embodiment, "ultrasonic waves" may include elastic waves (vibrations) with a frequency of 15 kHz or less. In other words, the reception band of the ultrasound probe 10 may include a frequency band of 15 kHz or less. Note that the lower limit of the reception band may be, for example, 10 kHz. Of course, in this embodiment, "ultrasonic waves" may include elastic waves (vibrations) of frequencies higher than 15 kHz.

The information processing device 11 is communicably connected to the ultrasonic probe 10, and determines whether there is a defect and identifies the position of the defect based on the intensity of the ultrasonic waves received by the ultrasonic probe 10. . The details of this processing will be described later. When the information processing device 11 identifies the position of the defect, the information processing device 11 transmits position information indicating the position to the control device 8 . As a result, the control device 8 can control the modeling laser 5 and the optical system 7 to irradiate the modeling laser beam to the position indicated by the position information, thereby repairing the defect.

In the modeling apparatus 1, the base 2, the table 3, the recoater 4, the modeling laser 5, the mirror 6, the optical system 7, the inspection laser 9, and the ultrasonic probe 10 are placed in an appropriate draft chamber (not shown). position.

(Manufacturing process flow)
FIG. 2 is a flow chart showing an example of the flow of the metal structure manufacturing process (hereinafter simply referred to as manufacturing process) executed by the modeling apparatus 1 . The manufacturing process includes the outlined modeling process and the process of inspecting the laminate material layer P for defects.

In step S1 (providing step), the control device 8 controls the recoater 4 to supply the metal powder M onto the table 3 and flatten it to form a powder layer. After starting the manufacturing process, in the first execution of step S<b>1 , the build area of the powder layer is formed on the table 3 . In subsequent executions of step S1, the build region of the powder layer is formed on the previously formed material layer.

Subsequently, in step S2 (lamination step, layer formation step), the control device 8 controls the modeling laser 5 and the optical system 7 to scan the modeling laser beam R1 in the modeling area to form a material layer. . In the execution of step S2 for the second and subsequent times, the material layer is formed on the material layer formed in the previous execution of step S2, so the process executed in step S2 is expressed as the process of stacking the material layers. can also

FIG. 3 is a diagram showing an overview of the modeling process. 3 omits the description of the base 2, the recoater 4, the control device 8, and the information processing device 11, which are less relevant to the description here, among the components of the modeling apparatus 1. FIG. As shown in FIG. 3, the modeling laser 5 outputs a modeling laser beam R1. The modeling laser beam R1 is output under the control of the control device 8, reflected by the mirror 6, and enters the optical system 7. As shown in FIG. Further, the control device 8 controls the optical system 7 to scan the modeling area with the laser beam R1 for modeling to form a material layer.

Return to the description of the manufacturing process flow with reference to FIG. 2 again. Subsequently, in step S3, the control device 8 controls the drive section of the table 3 to lower the table 3 by one material layer.

Subsequently, in step S4, the control device 8 determines whether or not the material layer has been formed a predetermined number of times. If it is determined that the process has been performed a predetermined number of times (YES in step S4), the manufacturing process proceeds to step S5. On the other hand, if it is determined that the process has not been performed the predetermined number of times (NO in step S4), the manufacturing process returns to step S1. That is, in the case of NO in step S4, the modeling apparatus 1 re-executes formation of the material layer and stacks the material layer (stacking step).

In step S5 (irradiation step), the control device 8 controls the inspection laser 9 and the optical system 7 to scan the surface layer with the inspection laser light R2 (pulse wave).

FIG. 4 is a diagram showing an overview of inspection processing. 4 omits the description of the base 2, the recoater 4, the control device 8, and the information processing device 11, which are less relevant to the description here, among the components of the modeling apparatus 1. FIG. As shown in FIG. 4, the inspection laser 9 outputs an inspection laser beam R2. The inspection laser beam R2 is output under the control of the control device 8. FIG. The inspection laser beam R2 has a wavelength different from that of the modeling laser beam R1, and is not a wavelength reflected by the mirror 6. Therefore, the inspection laser beam R2 passes through the mirror 6 and enters the optical system . Further, the control device 8 controls the optical system 7 to scan the surface layer with the inspection laser beam R2.

With reference to FIG. 2 again, the explanation of the flow of the manufacturing process will be resumed. Subsequently, in step S6 (detection step), the ultrasonic probe 10 receives the generated ultrasonic waves. FIG. 5 is a diagram showing an example of a vibration waveform of ultrasonic waves received by the ultrasonic probe 10. As shown in FIG. The vibration waveform is based on the inspection laser beam R2 output by the inspection laser 9 . That is, the ultrasonic probe 10 receives ultrasonic waves generated multiple times at each position of the surface layer with a period of 1/f _L based on the repetition frequency f _L of the inspection laser beam R2. 1/ _fL is the pulse period of the inspection laser beam R2.

Return to the description of the manufacturing process flow with reference to FIG. 2 again. Subsequently, in step S<b>7 , the information processing device 11 executes defect detection processing based on the ultrasonic waves received by the ultrasonic probe 10 .

FIG. 6 is a flowchart showing an example of the flow of defect detection processing. In step S21, the information processing device 11 converts the vibration waveform of the ultrasonic waves received by the ultrasonic probe 10 into a frequency spectrum. As an example, the information processing device 11 generates a frequency spectrum by Fourier transforming the vibration waveform. Specifically, when the information processing device 11 receives all pulses of the 1/f _L period, the information processing device 11 Fourier-transforms the entire waveform. This produces a frequency spectrum.

FIG. 7 is a diagram showing an example of a frequency spectrum. As described above, the frequency spectrum includes a frequency _fH higher than the repetition frequency _fL of the inspection laser beam R2 (inside the dashed rectangle in FIG. 7). The frequency _fH is, for example, a frequency that is an integral multiple of the frequency _fL as shown in FIG. In other words, in the example of FIG. 7, the interval of the frequency spectrum is _fL .

　Referring to FIG. 6 again, return to the description of the flow of the defect detection process. Subsequently, in step S22, the information processing device 11 calculates the sum of squares of the frequency spectrum. That is, the information processing device 11 squares the intensity of each frequency in the frequency spectrum, and totals the squared intensity of each frequency. Unnecessary frequency bands can be removed by calculating the sum of squares of the frequency spectrum.

Subsequently, in step S23, the calculated sum of squares is compared with the reference value. Here, the reference value is based on the value of the sum of squares of the frequency spectrum corresponding to defect-free locations in the metal structure. The reference value may be a single numerical value or a numerical range (hereinafter referred to as a reference range), but in this embodiment it is assumed to be a single numerical value. After step S23 ends, the defect detection process returns to the manufacturing process.

Return to the description of the manufacturing process flow with reference to FIG. 2 again. In step S8 (determination step), the information processing device 11 determines whether or not there is a defect directly under the surface layer (or on the surface). Specifically, the information processing device 11 compares the sum of squares corresponding to each position with a reference value. (YES in step S8). In this case, the information processing device 11 identifies the position corresponding to the sum of squares of values larger than the reference value by a predetermined value or more. This position is a position where a defect occurs directly under the surface layer. The information processing device 11 transmits position information indicating the specified position to the control device 8 . The manufacturing process then proceeds to step S9.

On the other hand, if the difference between the sum of squares and the reference value is less than the predetermined value (NO in step S8), the information processing device 11 determines that there is no defect directly below the surface layer. In this case, the manufacturing process proceeds to step S10.

When using the reference range, the information processing device 11 may determine whether the sum of squares corresponding to each position is within the reference range. If it is within the reference range, the manufacturing process proceeds to step S9, and if it is not within the reference range, the manufacturing process proceeds to step S10.

In step S9 (repairing step), the control device 8 controls the modeling laser 5 and the optical system 7 based on the received position information to irradiate the defected position with the modeling laser beam R1 to repair the defect. do.

At step S10, the control device 8 determines whether or not the metal structure is completed. If it is determined that the manufacturing process has been completed (YES in step S10), the manufacturing process ends. If it is determined that it is not completed (NO in step S10), the manufacturing process returns to step S1.

<effect>
According to the above configuration, the modeling apparatus 1 irradiates the surface layer of the laminated material layer P with the inspection laser beam R2 every time the material layer is generated a predetermined number of times, and detects the ultrasonic probe provided on the table 3. Ultrasonic waves are detected by the element 10 . The modeling apparatus 1 determines whether or not there is a defect in the material layer based on the intensity of the ultrasonic waves. As a result, in manufacturing a metal structure, it is possible to detect defects directly under the surface layer or on the surface during manufacturing.

In addition, the modeling apparatus 1 scans the surface layer with the inspection laser beam R2, generates ultrasonic waves at a plurality of irradiation points, and determines the presence or absence of defects for each of the plurality of irradiation points. This can improve the likelihood of detecting defects.

In addition, the modeling apparatus 1 irradiates the irradiation point determined to have a defect with the laser beam for modeling R1 to repair the defect. As a result, the metal structure can be completed in a defect-free state, thereby suppressing a decrease in the strength of the metal structure.

In addition, the modeling apparatus 1 irradiates a pulse-wave laser beam as the inspection laser beam R2. Then, the modeling apparatus 1 determines whether or not there is a defect based on all of the ultrasonic waves generated a plurality of times at the irradiation point from the start to the end of the irradiation of the inspection laser beam R2. As a result, the intensity of the ultrasonic waves can be made sufficient for determination, so that the accuracy of determination can be improved.

Further, the modeling apparatus 1 receives ultrasonic waves in a reception band that includes frequencies higher than the irradiation band that the repetition frequency _fL of the inspection laser beam R2 can take. As a result, it is possible to perform determination using high-frequency components contained in ultrasonic waves, so that defects occurring directly under the surface layer or on the surface can be detected.

Further, in the modeling apparatus 1, the modeling laser 5, the mirror 6, the optical system 7, and the inspection laser 9 are arranged so that the modeling laser beam R1 and the inspection laser beam R2 share the optical system 7. Therefore, the modeling apparatus 1 can accurately identify the position of the defect and repair the defect with high accuracy.

Also, the mirror 6 reflects the modeling laser beam R1 and transmits the inspection laser beam R2. As a result, even if the modeling laser 5 and the inspection laser 9 are arranged so that the modeling laser beam R1 and the inspection laser beam R2 are incident on the mirror 6 from different directions, the modeling from the mirror 6 to the optical system 7 If the shaping laser 5, the mirror 6, and the inspection laser 9 are arranged so that the optical paths of the shaping laser beam R1 and the inspection laser beam R2 are the same, scanning with the shaping laser beam R1 and scanning with the inspection laser beam R2 can be performed. and the optical system 7 can be shared. As a result, it is possible to easily realize the sharing of the optical system 7 between the laser beam R1 for modeling and the laser beam R2 for inspection.

Also, the ultrasonic probe 10 is provided on the table 3 to receive ultrasonic waves propagated from the surface layer to the table 3 . Some existing defect detection techniques use laser vibrometers to detect vibrations in the material layer. Since the laser vibrometer detects reflected light and scattered light, detection may be difficult depending on the state of the surface layer (surface state). In contrast, the modeling apparatus 1 according to the present embodiment can determine the presence or absence of defects regardless of the state of the surface layer (the surface state of the laminated material layer P).

[Embodiment 2]
Another embodiment of the invention is described in detail below. For convenience of explanation, members having the same functions as the members explained in the first embodiment are denoted by the same reference numerals, and the explanation thereof may not be repeated.

(Modeling device 1A)
FIG. 8 is a diagram showing the main configuration of a modeling apparatus 1A according to this embodiment. The modeling apparatus 1A differs from the modeling apparatus 1 in that it includes a laser 5A (forming apparatus) in place of the modeling laser 5 and does not include an inspection laser 9 .

The laser 5A is, for example, a continuous wave laser that outputs continuous waves. In addition, it is desirable that the intensity of the continuous wave is controllable.

In this embodiment, the laser 5A is caused to generate laser light R3, which is a pulse wave, by applying a modulation signal from an external device to the laser 5A. The external device may be, for example, the control device 8 or another device (not shown). As an example, the external device inputs to the laser 5A a modulation signal such that the duty ratio of the laser beam R3 is 50%. Here, the duty ratio is a value obtained by dividing the period during which a pulse is generated (pulse width) by the period of the pulse wave. Note that the pulse wave generation method is not limited to this example. For example, the modeling apparatus 1A may include a modulator (not shown) and convert the continuous wave output from the laser 5A into a pulse wave using the modulator.

(Manufacturing process flow)
FIG. 9 is a flowchart showing an example of the flow of the metal structure manufacturing process (hereinafter simply referred to as manufacturing process) executed by the modeling apparatus 1A. In the manufacturing process, the same step numbers as in FIG. 2 are assigned to the steps that execute the same processes as the manufacturing process (see FIG. 2) according to the first embodiment. Also, since the details of this step have already been described, the description will not be repeated here.

Before describing each step shown in FIG. 9, differences between the manufacturing process according to the present embodiment and the manufacturing process according to the first embodiment will be described. In the manufacturing process according to the first embodiment, a material layer is formed by irradiating a powder layer with the shaping laser beam R1 output from the shaping laser 5, and the surface layer of the laminated material layer P obtained by laminating the material layer is By scanning with the inspection laser beam R2 output from the inspection laser 9, defects just below the surface layer are detected. That is, in the modeling process according to the first embodiment, the irradiation with the modeling laser beam R1 and the irradiation with the inspection laser beam R2 are performed at different timings.

On the other hand, in the manufacturing process according to the present embodiment, the material layer is formed by irradiating the powder layer with laser light R3, which is a pulse wave, and ultrasonic waves are generated from the laminated material layer P. That is, in the manufacturing process according to the present embodiment, the irradiation with the laser beam R3 simultaneously melts and solidifies the powder layer and generates ultrasonic waves. Henceforth, this processing may be described as "simultaneous processing."

In step S31, the control device 8 controls the laser 5A and the optical system 7 to scan the modeling area with the laser beam R3.

FIG. 10 is a diagram showing an overview of simultaneous processing. Note that FIG. 10 omits the description of the base 2, the recoater 4, the control device 8, and the information processing device 11, which are less relevant to the description here, among the components of the modeling apparatus 1A. As shown in FIG. 10, the laser 5A outputs laser light R3, which is a pulse wave, and makes it enter the optical system 7. As shown in FIG. Further, the optical system 7 scans the modeling area with the laser beam R3 to form a material layer. The output and scanning of the laser beam R3 are performed under the control of the controller 8. FIG.

It should be noted that when the duty ratio is 50%, the energy of the laser light R3 is about half of the energy in the case of irradiating the powder layer with the continuous wave of the same output for the same time. If the energy of the continuous wave is sufficient to melt the powder layer, the energy of the laser beam R3 may be insufficient to melt the powder layer. Therefore, the control device 8 approximately doubles the maximum output of the laser beam R3. As a result, the same level of energy as in the case of continuous wave irradiation can be imparted to the powder layer, so that the pulse wave can impart sufficient energy to the powder layer for melting.

Since the laser beam R3 is a pulse wave, when the powder layer is irradiated with the laser beam R3, ultrasonic waves are generated in the laminated material layer P and propagated to the table 3. When the ultrasonic wave is received by the ultrasonic probe 10 in step S6, it is possible to determine whether there is a defect in the surface layer, that is, directly under the material layer being formed, that is, perform defect detection processing. Since the defect detection process has been described in the first embodiment, the description will not be repeated here.

In step S8, when the information processing device 11 determines that there is a defect just below the surface layer (YES in step S8), in step S32, the control device 8 controls the laser 5A and the optical system 7 to determine whether the defect has occurred. The position is irradiated with laser light R3 to repair the defect. Note that the position where the defect occurs can be specified based on the position information transmitted from the information processing device 11 to the control device 8, as described in the first embodiment.

In step S8, when the information processing device 11 determines that there is no defect directly under the surface layer (NO in step S8), step S32 is not executed, and the process proceeds to step S10.

In the example of FIG. 10, when it is determined in step S10 that the metal structure has not been completed (NO in step S10), step S3, that is, the control device 8 controls the drive unit of the table 3, and the table 3 is lowered by one material layer. However, the execution timing of step S3 is not limited to this example, and may be any timing after execution of step S31.

<effect>
According to the configuration described in the present embodiment, the modeling apparatus 1A irradiates the powder layer with the laser beam R3, which is a pulse wave, detects ultrasonic waves with the ultrasonic probe 10 provided on the table 3, and detects the ultrasonic waves. Based on the intensity of the ultrasonic waves, it is determined whether there is a defect in the material layer. This allows defects in the surface layer, ie, directly under the material layer being formed, to be detected during manufacture in the manufacture of metal structures.

In addition, the modeling apparatus 1A can detect defects directly below the surface layer by only including one laser 5A. That is, the modeling apparatus 1A does not need to be equipped with a plurality of lasers like the modeling apparatus 1 does. As a result, the cost for preparing the modeling apparatus 1A can be reduced.

In addition, in the modeling of the metal structure by the modeling apparatus 1A, since the material layer is formed by irradiating the pulse wave, there is a period during which the metal powder is not heated during the process of forming the material layer. The presence of this period can positively affect the physical properties of the material layers formed and the metal structures produced.

[Modification]
In Embodiment 1, the device for forming the material layer is not limited to the shaping laser 5 as long as it can solidify the powder layer. The device may be, for example, a device that outputs an electron beam. In this example, the electron beam is controlled by the control device 8 to irradiate the modeling area without passing through the mirror 6 and the optical system 7 . The modeling apparatus 1 may further include a configuration for irradiating a desired position in the modeling region with the electron beam.

In Embodiment 1, the device for generating ultrasonic waves from the material layer is not limited to the inspection laser 9 as long as it can output a beam for generating ultrasonic waves. The device may be, for example, a device that outputs an electron beam. In this example, the electron beam is controlled by the control device 8 to irradiate the modeling area without passing through the mirror 6 and the optical system 7 . The modeling apparatus 1 may further include a configuration for irradiating a desired position in the modeling region with the electron beam.

In Embodiment 2, the device for generating ultrasonic waves while forming a material layer is not limited to the laser 5A as long as it can solidify the powder layer and output a beam for generating ultrasonic waves. The device may be, for example, a device that outputs an electron beam. In the case of this example, the electron beam is controlled by the control device 8 to irradiate the modeling area without passing through the optical system 7 . The modeling apparatus 1A may further include a configuration for irradiating a desired position in the modeling region with the electron beam.

In Embodiment 1, the method of generating pulse waves is not limited to the example of using a pulse laser. Specifically, a pulse wave may be generated by the method described in the second embodiment.

In

Embodiments

1 and 2, the detection device for detecting the presence or absence of defects may be any device capable of detecting vibration generated in the material layer and propagated to the table 3, and the ultrasonic probe 10 is not limited to

In the first and second embodiments, the defect detection processing executed by the information processing device 11 is not limited to the example of FIG. For example, the information processing device 11 calculates the sum of squares of the discrete waveform signal for the vibration waveform without converting the vibration waveform into a frequency spectrum, and calculates the sum of squares of the discrete waveform signal when there is no defect ( A reference value) may be compared to determine the presence or absence of defects. Further, the information processing device 11 may compare the intensity of the highest intensity frequency in the frequency spectrum with the frequency (reference value) when there is no defect, and determine the presence or absence of the defect. Further, the information processing device 11 may compare the intensity of a predetermined frequency with the frequency (reference value) when there is no defect, and determine whether or not there is a defect. The predetermined frequency is desirably a frequency on the order of MHz in order to detect defects that occur just below the surface layer.

The information processing device 11 may also generate an image of the corresponding position in the laminated material layer P based on the vibration waveform of the ultrasonic waves received by the ultrasonic probe 10 and display it on a display device (not shown). Thereby, the user of the modeling apparatus 1 can confirm whether or not there is a defect at the position. Further, the information processing apparatus 11 may determine whether or not there is a defect by inputting an image generated in a learned model obtained by machine learning an image indicating a defect.

In Embodiment 1, the wavelength of the inspection laser beam R2 may be the wavelength reflected by the mirror 6. In this example, the controller 8 controls the position of the mirror 6 as an example. Specifically, when the inspection laser 9 outputs the inspection laser beam R2, the controller 8 moves the mirror 6 out of the optical path of the inspection laser beam R2. This allows the inspection laser beam R2 to enter the optical system 7 .

In Embodiment 1, after execution of step S2 in FIG. 2 and before execution of the next step S1, the control device 8 controls the inspection laser 9 to irradiate the surface layer with the inspection laser beam R2. good. In the above-described embodiment, the irradiation timing of the inspection laser beam R2 is after the formation of the material layer is finished, but the irradiation timing is not limited to this. For example, the irradiation timing may be, specifically, the timing when the irradiation position of the laser beam R1 for modeling reaches a predetermined position in the modeling region during formation of the material layer. In this example, since the modeling laser beam R1 and the inspection laser beam R2 are simultaneously irradiated, the modeling apparatus 1 includes an optical system for the modeling laser beam R1 and an optical system for the inspection laser beam R2. It is equipped with a system.

In Embodiment 2, the duty ratio of the laser beam R3 is not limited to 50%. The duty ratio should be set to an appropriate value that can realize solidification of the powder layer and generation of ultrasonic waves sufficient for defect detection.

In Embodiment 2, the period of laser light R3 is not particularly limited. In other words, the period may be any period suitable for forming the material layer and generating the ultrasonic waves.

In

Embodiments

1 and 2, the material of the three-dimensional structure to be modeled is not limited to metal. The material may be, for example, gypsum, resin, sand, or ceramics.

In addition, in

Embodiments

1 and 2, the three-dimensional structure modeling method is not limited to the methods described above, as long as an appropriate one is selected based on the material or the three-dimensional structure to be modeled. For example, the method of forming the laminated material layers, in other words, the method of solidifying the material, is not limited to melting. The method includes, for example, a method of irradiating a powder with a beam (laser beam, electron beam, etc.) to sinter it, a method of supplying a molten material and solidifying it, and a method of solidifying (hardening) a liquid material by irradiating it with ultraviolet rays. method, a method of mixing and solidifying a liquid binder, etc., but not limited thereto.

In addition, a method of stacking material layers that have already been formed may be employed in the method of forming a three-dimensional structure. As an example, a method of laminating materials formed on sheets may be employed.

In other words, as an example of a three-dimensional structure modeling method, in addition to the method described in the embodiment, the so-called PBF (Powder Bed Function), binder jetting method, material jetting method, FDM (Fused Deposition Modeling), DED (Directed Energy Deposition), sheet lamination, stereolithography, and the like.

It should be noted that the modeling method employed in Embodiment 1 may be any of the methods described above. On the other hand, the modeling method employed in the second embodiment may be a method of solidifying a material by irradiation with a beam (typically laser light).

Therefore, the providing device provided by the table 3 that provides materials to the modeling area for modeling the three-dimensional structure is not limited to the recoater 4 . Further, the forming device that solidifies the provided material to form the material layer is not limited to the modeling laser 5 and the laser 5A. The providing device and the forming device may be those according to the adopted modeling method.

[Example of realization by software]
The functions of the control device 8 and the information processing device 11 (hereinafter referred to as “apparatus”) are programs for causing a computer to function as the device, and the program for causing the computer to function as each control block of the device. can be realized.

In this case, the device comprises a computer having at least one control device (eg processor) and at least one storage device (eg memory) as hardware for executing the program. Each function described in each of the above embodiments is realized by executing the above program using the control device and the storage device.

The above program may be recorded on one or more computer-readable recording media, not temporary. The recording medium may or may not be included in the device. In the latter case, the program may be supplied to the device via any transmission medium, wired or wireless.

Also, part or all of the functions of the above control blocks can be realized by logic circuits. For example, integrated circuits in which logic circuits functioning as the control blocks described above are formed are also included in the scope of the present invention. In addition, it is also possible to implement the functions of the control blocks described above by, for example, a quantum computer.

〔summary〕
A method for manufacturing a three-dimensional structure according to aspect 1 of the present invention is a method for manufacturing the three-dimensional structure using a modeling apparatus that models the three-dimensional structure by a layered manufacturing method, wherein the three-dimensional structure After the start of the lamination step of laminating a material layer made of a material, and the lamination step of laminating the surface layer on a surface layer that is the uppermost material layer among the laminated material layers, and before the start of the next lamination step an irradiation step of irradiating a beam to generate vibration at the irradiation point, a detection step of detecting the vibration, and a determination step of determining whether or not there is a defect in the material layer based on the intensity of the detected vibration. ,including.

According to the above configuration, manufacturing a three-dimensional structure includes an irradiation step, a detection step, and a determination step. Thereby, in manufacturing a three-dimensional structure, it is possible to detect defects directly under the surface layer or on the surface during manufacturing.

Further, in the manufacturing method according to aspect 2 of the present invention, in aspect 1, in the irradiation step, the surface layer is scanned with the beam, the vibration is generated at a plurality of the irradiation points, and the determination step includes: The presence or absence of the defect may be determined for each of the plurality of irradiation points.

According to the above configuration, since the entire surface layer is irradiated with the beam, it is possible to improve the possibility of detecting defects.

In addition, the manufacturing method according to aspect 3 of the present invention may further include a repair step of repairing the defect at the irradiation point determined to have the defect in the aspect 2.

According to the above configuration, the three-dimensional structure can be completed in a defect-free state, so that the reduction in strength of the completed three-dimensional structure can be suppressed.

Further, in the manufacturing method according to aspect 4 of the present invention, in any one of aspects 1 to 3, in the irradiation step, laser light may be irradiated as the beam.

According to the above configuration, the surface layer can be irradiated with a laser beam having directivity and convergence, so that a desired position of the surface layer can be accurately irradiated with the laser beam.

Further, in the manufacturing method according to aspect 5 of the present invention, in aspect 4, in the irradiation step, the pulse wave of the laser light is irradiated, and in the determination step, the irradiation is performed from the start to the end of the irradiation of the laser light. The presence or absence of the defect may be determined based on the intensity of the vibrations generated at the point a plurality of times.

According to the above configuration, since the presence or absence of a defect is determined based on the intensity of the vibration generated by the pulse wave a plurality of times, the intensity of the vibration can be made sufficient for determination, and as a result, the presence or absence of the defect can be determined. Judgment accuracy can be improved.

Further, in the manufacturing method according to aspect 6 of the present invention, in aspect 5, in the irradiating step, the laser beam having a repetition frequency of the pulse wave included in a first frequency band is radiated, and in the detecting step, The vibration may be detected in a second frequency band that includes frequencies higher than those of the first frequency band.

The applicant found that the vibration of the material layer in response to the laser light contains high frequency components that are higher in frequency than the repetition frequency of the laser light (pulse wave). According to the above configuration, it is possible to determine the presence or absence of defects using the high-frequency component, so that defects occurring directly under the surface layer or on the surface can be detected.

Further, in the manufacturing method according to aspect 7 of the present invention, in any one of aspects 1 to 6, in the determination step, if the strength exceeds a reference value, it is determined that the defect is present immediately below or on the surface of the surface layer. You can judge.

According to the above configuration, repairable defects can be detected, so that defects that have occurred can be repaired while manufacturing a three-dimensional structure.

Further, in the manufacturing method according to aspect 8 of the present invention, in any one of aspects 1 to 7, in the irradiation step, the beam may be irradiated when the stacking step is performed a predetermined number of times.

According to the above configuration, the presence or absence of defects can be determined each time a predetermined number of material layers are laminated. Here, if the predetermined number of times is set to the number of times that the generated defect can be repaired, the generated defect can be repaired while manufacturing the three-dimensional structure.

Further, in the manufacturing method according to aspect 9 of the present invention, in any one of aspects 1 to 8, the lamination step includes a providing step of providing the material to a predetermined modeling area; a layer forming step of forming the material layer by solidifying a material; the providing step and the layer forming step are repeated to stack the material layer; The beam may be irradiated after the start of the layer forming step for forming the and before the start of the next material providing step.

According to the above configuration, in the technique of forming and stacking material layers from materials, the beam is irradiated from the start of surface layer formation until the next material is provided, so defects directly under the surface layer or on the surface can be detected appropriately. can do.

Further, in the manufacturing method according to aspect 10 of the present invention, in aspect 9, the material is metal powder, and in the providing step, the metal powder is flattened at a predetermined position on a table to form a powder layer, and In the layer forming step, a predetermined region of the powder layer may be irradiated with a shaping beam to solidify the powder layer to form the material layer.

According to the above configuration, in the technique of manufacturing a three-dimensional structure by laminating material layers obtained by sintering metal powder, defects immediately below the surface layer or on the surface can be detected during manufacturing. For example, the shaping beam has a higher power than said beam of the irradiation step.

A method for manufacturing a three-dimensional structure according to aspect 11 of the present invention is a method for manufacturing the three-dimensional structure using a modeling apparatus that models the three-dimensional structure by a layered manufacturing method, wherein the three-dimensional structure a providing step of providing a material to a predetermined modeling area; and a layer forming step of forming a material layer by irradiating the material provided in the modeling area with a beam to solidify the material, wherein the material layer is , a detection step of detecting vibration generated at the irradiation point of the beam, which is laminated by repeating the providing step and the layer forming step; and a determination step of determining the presence or absence of defects.

According to the above configuration, in manufacturing a three-dimensional structure, there are a detection step of detecting vibration generated in beam irradiation for forming a material layer, and a determination step of determining the presence or absence of a defect based on the intensity of the vibration. include. Thereby, in the manufacture of a three-dimensional structure, defects in the surface layer, ie directly under or on the surface of the material layer being formed, can be detected during manufacture.

Further, according to the above configuration, defects directly below the surface layer or on the surface can be detected without preparing a device for outputting a beam for generating vibrations, in addition to a device for outputting a beam for forming the material layer. can be detected.

A modeling apparatus according to aspect 12 of the present invention is a modeling apparatus that models a three-dimensional structure by a layered manufacturing method, comprising: a table defining a modeling region of the three-dimensional structure; a control device for controlling lamination of material layers, and a surface layer that is the uppermost material layer among the laminated material layers is irradiated after the start of lamination of the surface layer and before the start of lamination of the next material layer; A beam output device that outputs a beam that generates vibration at an irradiation point, and a detection device that is provided on the table and detects the vibration are provided.

According to the above configuration, the modeling device includes the beam output device and the detection device. Thereby, in manufacturing a three-dimensional structure, it is possible to detect defects directly under the surface layer or on the surface during manufacturing.

A modeling apparatus according to aspect 13 of the present invention is a modeling apparatus that models a three-dimensional structure by a layered manufacturing method, and includes: a table that defines a modeling region of the three-dimensional structure; A providing device for providing a predetermined modeling region, a forming device for forming a material layer by irradiating a beam to the material provided in the modeling region to solidify it, and controlling the providing device and the forming device. a control device for stacking the material layers by repeating the formation of the material layers in the modeling area; a detection device provided on the table for detecting vibration generated at the irradiation point of the beam; Prepare.

Further, the modeling apparatus according to aspect 14 of the present invention is the aspect 12 or 13, further comprising an information processing device that determines whether or not there is a defect in the material layer based on the intensity of the vibration detected by the detection device. good too.

According to the above configuration, defects occurring in the material layer can be automatically detected based on the intensity of vibration detected by the detection device.

Further, in the modeling apparatus according to aspect 15 of the present invention, in any one of aspects 12 to 14, the detection device detects the vibration propagated from the material layer irradiated with the beam to the table. good.

　The existing defect detection technology uses a laser vibrometer to detect vibrations in the material layer. Since the laser vibrometer detects reflected light and scattered light, detection may be difficult depending on the state of the surface layer (surface state). On the other hand, according to the above configuration, it is possible to determine the presence or absence of a defect without providing a configuration for detecting the reflected light or the scattered light of the beam.

The present invention is not limited to the above-described embodiments, but can be modified in various ways within the scope of the claims, and can be obtained by appropriately combining technical means disclosed in different embodiments. is also included in the technical scope of the present invention.

Reference Signs List

1, 1A molding device 2 base stand 3 table 4 recoater (providing device)
5 laser for modeling 5A laser (forming device)
6 mirror 7 optical system 8 control device 9 inspection laser (beam output device)
10 Ultrasonic probe (detection device)
11 information processing device M metal powder P laminated material layer R1 modeling laser beam (modeling beam)
R2 Inspection laser light (beam, laser light)
R3 laser light (beam)

Claims

A method for manufacturing the three-dimensional structure using a modeling apparatus that models the three-dimensional structure by an additive manufacturing method,
A stacking step of stacking material layers made of the material of the three-dimensional structure;
A surface layer, which is the uppermost material layer among the laminated material layers, is irradiated with a beam after the start of the lamination step of laminating the surface layer and before the start of the next lamination step, and vibration is caused at the irradiation point. an irradiation step to occur;
a detection step of detecting the vibration;
and a determination step of determining whether or not there is a defect in the material layer based on the intensity of the detected vibration.
In the irradiation step, the surface layer is scanned with the beam to generate the vibration at a plurality of the irradiation points;
2. The manufacturing method according to claim 1, wherein, in said determining step, presence or absence of said defect is determined for each of said plurality of irradiation points.
The manufacturing method according to claim 2, further comprising a repair step of repairing the defect at the irradiation point determined to have the defect.
The manufacturing method according to any one of claims 1 to 3, wherein in said irradiation step, a laser beam is irradiated as said beam.
In the irradiation step, the pulse wave of the laser light is irradiated,
In the determination step,
5. The manufacturing method according to claim 4, wherein the presence or absence of the defect is determined based on the intensity of the vibration generated at the irradiation point a plurality of times from the start to the end of the irradiation of the laser light.
In the irradiating step, irradiating the laser light whose repetition frequency of the pulse wave is included in a first frequency band;
6. The manufacturing method according to claim 5, wherein in said detecting step, said vibration is detected in a second frequency band including frequencies higher than those of said first frequency band.
The manufacturing method according to any one of claims 1 to 6, wherein in the determining step, if the intensity exceeds a reference value, it is determined that the defect is present directly under or on the surface of the surface layer.
The manufacturing method according to any one of claims 1 to 7, wherein in the irradiation step, the beam is irradiated when the stacking step has been performed a predetermined number of times.
The lamination step includes:
a providing step of providing the material to a predetermined build area;
a layer forming step of forming the material layer by solidifying the material provided to the build region;
The material layers are laminated by repeating the providing step and the layer forming step,
The manufacturing method according to any one of claims 1 to 8, wherein in the irradiation step, the beam is irradiated after starting the layer forming step of forming the surface layer and before starting the next providing step.
the material is a metal powder,
in the providing step, flattening the metal powder at a predetermined position on a table to form a powder layer;
10. The manufacturing method according to claim 9, wherein in said layer forming step, a predetermined region of said powder layer is irradiated with a shaping beam to solidify said powder layer to form said material layer.
A method for manufacturing the three-dimensional structure using a modeling apparatus that models the three-dimensional structure by an additive manufacturing method,
a providing step of providing a material for the three-dimensional structure to a predetermined modeling area;
a layer forming step of forming a material layer by irradiating the material provided in the modeling region with a beam and solidifying it,
The material layers are laminated by repeating the providing step and the layer forming step,
a detection step of detecting vibration generated at the irradiation point of the beam;
and a determination step of determining whether or not there is a defect in the material layer based on the intensity of the detected vibration.
A modeling apparatus for modeling a three-dimensional structure by an additive manufacturing method,
a table that defines a modeling area for the three-dimensional structure;
a control device for controlling lamination of material layers made of the material of the three-dimensional structure;
A surface layer, which is the uppermost material layer among the laminated material layers, is irradiated after the start of lamination of the surface layer and before the start of lamination of the next material layer, and outputs a beam that generates vibration at the irradiation point. a beam output device;
and a detection device that is provided on the table and detects the vibration.
A modeling apparatus for modeling a three-dimensional structure by an additive manufacturing method,
a table that defines a modeling area for the three-dimensional structure;
a providing device for providing the material for the three-dimensional structure to a predetermined modeling area;
a forming device that forms a material layer by irradiating the material provided in the modeling region with a beam and solidifying the material;
a control device for stacking the material layers by controlling the providing device and the forming device to repeat the formation of the material layers in the modeling area;
and a detection device that is provided on the table and detects vibration generated at the irradiation point of the beam.
14. The modeling apparatus according to claim 12 or 13, further comprising an information processing device that determines the presence or absence of defects in the material layer based on the intensity of the vibration detected by the detection device.
The molding apparatus according to any one of claims 12 to 14, wherein said detection device detects said vibration propagated from said material layer irradiated with said beam to said table.