WO2021188098A1 - Revêtement fluide de tête d'éjection de fluide - Google Patents

Revêtement fluide de tête d'éjection de fluide Download PDF

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Publication number
WO2021188098A1
WO2021188098A1 PCT/US2020/023200 US2020023200W WO2021188098A1 WO 2021188098 A1 WO2021188098 A1 WO 2021188098A1 US 2020023200 W US2020023200 W US 2020023200W WO 2021188098 A1 WO2021188098 A1 WO 2021188098A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
ejection
layer
coating
chamber
Prior art date
Application number
PCT/US2020/023200
Other languages
English (en)
Inventor
Zhizhang Chen
Michael W. Cumbie
Chien-Hua Chen
Original Assignee
Hewlett-Packard Development Company, L.P.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett-Packard Development Company, L.P. filed Critical Hewlett-Packard Development Company, L.P.
Priority to PCT/US2020/023200 priority Critical patent/WO2021188098A1/fr
Publication of WO2021188098A1 publication Critical patent/WO2021188098A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

Definitions

  • Fluid ejection heads are used to controllably eject droplets of fluid onto a target, such as a print medium. Such fluid ejection heads direct a supply of fluid through internal passages to an ejection chamber, wherein a fluid actuator displaces fluid within the ejection chamber through an ejection orifice. Such fluid ejection heads are sometimes bonded to or encapsulated by other bodies, such as printed circuit boards, moldings or fluid supplying structures.
  • Figure 1 is a sectional view schematically illustrating portions of an example fluid ejection apparatus.
  • Figure 2A is an enlarged view of the fluid ejection apparatus of
  • Figure 2B is an enlarged view of the fluid ejection apparatus of
  • FIG. 1 taken along line 2A following erosion of an internal coating layer by fluid being delivered.
  • Figure 3 is a sectional view schematically illustrating portions of an example fluid ejection apparatus.
  • Figure 4 is a flow diagram of an example method for forming an example fluid ejection apparatus.
  • Figure 5 is a sectional view illustrating portions of an example fluid ejection apparatus during coating of internal passages and an ejection chamber of the fluid ejection apparatus.
  • Figure 6 is a sectional view of the example fluid ejection apparatus of Figure 5 following deposition of a layer of a coating on the internal passages and the ejection chamber of the fluid ejection apparatus.
  • Figure 7 A is a perspective view of a cross-section of an example fluid ejection apparatus.
  • Figure 7B is a sectional view of the fluid ejection apparatus of Figure 7A taken along line 7B-7B.
  • Figure 7C is a sectional view of the fluid ejection apparatus of Figure 7B taken along line 7C-7C.
  • the example fluid ejection apparatus include fluid passages of a fluid ejection head that are coated with a coating.
  • the coating comprises a fluid robust layer that protects underlying portions of the fluid passage from fluid induced damage, such as erosion or corrosion.
  • the coating comprises a contaminant resistant layer that provides enhanced resistance to chemical interaction with airborne contaminants that may be present during fabrication of the fluid ejection head or connection of the fluid ejection head to other bodies.
  • the coating comprises a stack of layers comprising the contaminant resistant layer over the fluid robust layer.
  • the contaminant resistant layer initially protects the fluid robust layer from contamination by airborne contaminants that may be present during fabrication of the fluid ejection head or connection of the fluid ejection head to other bodies.
  • the contaminant resistant layer may be less robust (as compared to the fluid robust layer) with respect to the fluids being ejected such that the contaminant resistant layer eventually erodes, exposing the underlying fluid robust layer.
  • the fluid robust layer may provide prolonged protection for the integrity of the fluid passage through which the fluid is delivered to the ejection chamber.
  • the coating extends over internal surfaces of the passage extending to the ejection chamber and also extends over surfaces of the ejection chamber. In some implementations, the coating may additionally extend along internal sides of the ejection orifice. In some implementations, the fluid robust layer is sandwiched between two contaminant resistant layers. In some implementations, the fluid robust layer is formed from hafnium oxide while the contaminant resistant layer or layers are formed from aluminum oxide. In some implementations, the coating formed by the layers has a thickness of no greater than 2 mm.
  • the example methods disclosed for forming a fluid ejection apparatus deposit a coating on the interior surfaces of the passage extending to the ejection chamber by directing a gas carrying material of the coating through the passage.
  • the example methods may direct the gas through the passage and into the ejection chamber such that the coating coats internal surfaces of the passage and ejection chamber.
  • the coating is formed by atomic layer deposition. This coating process may be repeatedly and sequentially carried out with different gas born materials to form a coating having multiple layers of different materials.
  • the example methods occlude the ejection orifice during deposition of the coating.
  • the ejection orifice is occluded with a high temperature tape, such as a thermal release tape, applied over the front face of the fluid ejection head and over the ejection orifice. Once the coating has been deposited, the ejection orifice may be opened to ready the fluid ejection head for use.
  • a high temperature tape such as a thermal release tape
  • the method may include providing a fluid ejection head having a body with a back face and a front face, a fluid actuator supported by the body, an ejection chamber in the body proximate the fluid actuator, an ejection orifice extending from the ejection chamber through the front face and a fluid passage extending from the back face to the ejection chamber.
  • the method may further include occluding the ejection orifice, depositing a coating on internal sources of the fluid passage and ejection chamber by directing a gas into the fluid passage in the ejection chamber and opening the ejection orifice following the depositing of the coating on the internal surfaces.
  • the example apparatus may include a fluid ejection head having a body with a back face and a front face, a fluid actuator supported by the body, an ejection chamber in the body proximate the fluid actuator, an ejection orifice extending from the ejection chamber through the front face and a fluid passage extending from the back face to the ejection chamber.
  • the apparatus may further include a coating on internal surfaces of the fluid passage. The coating may include a first layer exposed to an interior of the fluid passage and the ejection chamber.
  • the first layer has a first degree of robustness to fluid to be ejected through the ejection orifice from the ejection chamber and a first degree of chemical interactivity to airborne contaminants produced during bonding of the fluid ejection head to another body.
  • the coating may include a second layer sandwiched between the first layer and the internal surfaces.
  • the second layer has a second degree of robustness to the fluid to be ejected through the ejection orifice from the ejection chamber, the second degree of robustness being greater than the first degree of robustness, and a second degree of chemical interactivity to the airborne contaminants, the second degree of chemical interactivity being less than the first degree of chemical interactivity.
  • the example fluid ejection apparatus may include a fluid ejection head comprising a body having a back face and a front face, a fluid actuator supported by the body, an ejection chamber in the body proximate the fluid actuator, an ejection orifice extending from the ejection chamber through the front face and a fluid passage extending from the back face to the ejection chamber.
  • the example apparatus may further include a coating on internal surfaces of the fluid passage and the ejection chamber of the fluid ejection head.
  • the coating may comprise a first layer exposed to an interior of the fluid passage and the ejection chamber, the first layer comprising aluminum oxide and a second layer sandwiched between the first layer and the internal surfaces, the second layer comprising hafnium oxide.
  • Figures 1 and 2 illustrate portions of an example fluid ejection apparatus 20.
  • Fluid ejection apparatus 20 may be less susceptible to contamination during its fabrication and may be more durable when delivering corrosive fluids or inks.
  • Fluid ejection apparatus 20 utilizes a protective coating that (a) provides enhanced robustness when delivering and ejecting fluids that might be corrosive or otherwise damaging to the fluid ejection head and (b) that also provides a higher degree of inertness with respect to airborne contaminants that may be present during the fabrication or manufacture of fluid ejection apparatus 20.
  • Fluid ejection apparatus 20 comprises fluid ejection head 24 and coating 30 (shown in Figure 2A).
  • Fluid ejection head 24 comprises fluid ejection body 26, fluid actuator 36, ejection chamber 38, ejection orifice 44 and a fluid passage 48. Fluid ejection body 26 supports fluid actuator 36 and forms ejection chamber 38, ejection orifice 44 and fluid passage 48. Fluid ejection body 26 comprises a back face 50 and a front face 52. Fluid ejection body 26 may be formed from a single monolithic layer or multiple individual layers of material. In some implementations, portions of body 26 along fluid passage 28 are formed from a material susceptible to corrosion, erosion or other damage from the fluid being delivered through fluid passage 28. In some implementations, portions of body 26 along fluid passage 28, but coated with coating 30, are formed from silicon. In other implementations, portions of body 26 along fluid passage 28, but coated with coating 30, are formed from other materials susceptible to damage from prolonged exposure to the fluid being delivered by fluid ejection head 24.
  • Fluid actuator 36 is supported by body 24 so as to displace fluid within fluid ejection chamber 38 through ejection orifice 44.
  • Fluid actuator 36 comprises a device that displaces fluid within an adjacent void or volume through an associated or corresponding ejection orifice 44.
  • Fluid actuator 36 is supported by body 26.
  • electrically conductive traces, switches/transistors and other electronic componentry associated with the powering and control of fluid actuator 36 are also supported by body 26.
  • fluid actuator 36 may comprise a thermal resistor which, upon receiving electrical current, heats to a temperature above the nucleation temperature of the fluid so as to vaporize a portion of the adjacent fluid to create a bubble which displaces the fluid through the associated orifice 44.
  • the fluid actuator 36 may comprise other forms of fluid actuators.
  • the fluid actuator may comprise a fluid actuator in the form of a piezo-membrane based actuator, an electrostatic membrane actuator, mechanical/impact driven membrane actuator, a magnetostrictive drive actuator, an electrochemical actuator, and external laser actuators (that form a bubble through boiling with a laser beam), other such microdevices, or any combination thereof.
  • Fluid ejection chamber 38 comprises a void or volume extending proximate to fluid actuator 36 to contain fluid as the fluid is being displaced through fluid ejection orifice 44.
  • fluid ejection chamber 38 comprises a dead-ended passage, wherein all fluid entering chamber 38 exits through ejection orifice 44.
  • fluid ejection chamber 38 is part of a recirculation passage, wherein those portions of fluid not ejected through ejection orifice 44 are circulated between and across fluid actuator 36 and ejection orifice 44 to reduce particle or pigment settling in the fluid and to inhibit remnant air bubble accumulation.
  • fluid ejection chamber 38 may be part of a recirculation passage that extends into the view shown in Figure 1.
  • Fluid ejection orifice 44 comprises an opening extending from fluid ejection chamber 38 through front face 52 of body 26.
  • Fluid passage 48 delivers fluid through body 26 to fluid ejection chamber 38.
  • Fluid passage 28 may be in the form of a fluid hole or a slot.
  • fluid passage 48 extends from and through back face 50 of body 26 to fluid ejection chamber 38. Although illustrated as turning at a right angle, fluid passage 48 may extend along various shaped paths.
  • FIG. 2A is an enlarged view of fluid ejection apparatus 20 taken along line 2A of Figure 1.
  • coating 30 extends over the internal surfaces of passage 48.
  • Coating 30 comprises a stack of layers comprising a contaminant resistant layer 60 over a fluid robust layer 62.
  • Contaminant resistant layer 60 is exposed to the interior of fluid passage 48.
  • Contaminant resistant layer 60 has a lesser degree of chemical interactivity (a higher degree of inertness) with respect to airborne contaminants that may be present during the fabrication of fluid ejection apparatus 20 as compared to fluid robust layer 62.
  • Contaminant resistant layer 60 has a lower degree of wetness with respect to the material of fluid robust layer 62.
  • Fluid robust layer 62 is sandwiched between layer 60 and the internal surfaces of fluid passage 48. As compared to layer 60 and as compared to the uncoated surfaces of body 26 along fluid passage 28, fluid robust layer 62 is formed from a material that has a greater robustness with respect to the fluid delivered by fluid ejection head 24. For example, fluid robust layer 62 may be formed from a material that will undergo corrosion or erosion, when exposed to the same fluid being delivered, at a slower rate as compared to the uncoated surfaces of fluid passage 28 formed by body 26 and as compared to the material forming layer 60. In one example implementation, contaminant resistant layer 60 is formed from aluminum oxide while fluid robust layer 62 is formed from hafnium oxide.
  • coating 30 formed by layers 60 and 62 has a thickness of no greater than 2 pm. As a result, the thickness of the coating does not substantially reduce the flow rate of fluid through passage 48.
  • the different layers of coating 30 are each formed using atomic layer deposition, as will be described hereafter.
  • Contaminant resistant layer 60 initially protects the fluid robust layer from contamination by airborne contaminants that may be present during fabrication of the fluid ejection head 24 or connection of the fluid ejection head 24 to other bodies, such as the other body 54.
  • the other body 54 may be bonded to body 26 with an adhesive or molding 56, such as an epoxy mold compound.
  • the adhesive or molding compound may out gas releasing contaminants which, if absorbed or coated upon the interior surfaces of passage 28, may impact the rate of fluid flow through passage 28.
  • Contaminant resistant layer 60 inhibits the absorption or coating of passage 28 with such contaminants to enhance performance of fluid ejection head 24.
  • the contaminant resistant layer 60 may be less robust (as compared to the fluid robust layer) with respect to the fluids being ejected such that the contaminant resistant layer 60 eventually erodes, exposing the underlying fluid robust layer.
  • Figure 3 illustrates portions of fluid ejection apparatus 20 following prolonged exposure of passage 28 to the fluid being ejected. As shown by Figure 3, such prolonged exposure eventually results in contaminant resistant layer eroding to expose fluid robust layer 62. Upon its exposure, the fluid robust layer 62 may provide prolonged protection for the integrity of the fluid passage 28 through which the fluid is delivered to the ejection chamber 38.
  • Coating 30 provides fluid passage 48 with staged dual protection. During initial fabrication or manufacturing of fluid ejection apparatus 20, layer 60 of coating 30 inhibits contamination of those surfaces along fluid passage 48 to provide more consistent fluid flow characteristics. Although layer 60 may erode during use of fluid ejection apparatus 20 (well after any risk of airborne contamination), layer 60 is backed by layer 62 which provides fluid passage 28 with long-term robustness with respect to the fluid being delivered. Thus, coating 30 offers greater design freedom, allowing those portions of body 26 forming passage 48 to be formed from a wider variety of materials and/or allowing fluid ejection apparatus 20 to be utilized for delivering a wider variety of fluids, including fluids that might otherwise be corrosive or otherwise damaging to fluid ejection head 24 over prolonged periods of time.
  • Figure 3 is a sectional view illustrating portions of an example fluid ejection apparatus 120.
  • Figure 3 illustrates an example fluid ejection head (a) having a fluid ejection body formed for multiple layers, (b) an example extent to which interior fluid directing surfaces of the fluid ejection body may be coated with coating 30 and (c) examples of how other structures or bodies may be joined to body 26 to form a fluid ejection apparatus.
  • Fluid ejection apparatus 120 comprises fluid ejection head 124, coating 130 and other bodies 154-1 , 154-2 (shown in broken lines).
  • Fluid ejection head 124 is similar to fluid ejection head 24 described above except that fluid ejection head 124 is formed from multiple layers of different materials. Those portions of fluid ejection head 124 which correspond to components of fluid ejection head 24 are numbered similarly.
  • fluid ejection head 124 comprises layers 124, 132 and 134.
  • Layer 124 supports fluid actuator 36.
  • layer 124 supports electrically conductive traces and other circuitry for selectively actuating fluid actuator 36.
  • Layer 124 furthers forms fluid passage 148.
  • fluid passage 148 comprises a fluid feed hole.
  • fluid passage 148 comprises a slot.
  • the material of layer 124 about passage 148 comprises a material that is subject to corrosion when exposed for prolonged periods of time to the fluid being directed through passage 148.
  • the material layer 124 comprises silicon.
  • Layer 132 comprises a layer or multiple layers of material or materials joined to an underside of layer 124 so as to form fluid passage 149 and fluid ejection chamber 38.
  • Fluid passage 149 extends from fluid passage 148 to fluid ejection chamber 38.
  • fluid ejection chamber 38 has a ceiling form by layer 124, sides formed by layer 132 and a floor formed by layer 134.
  • fluid ejection chamber 138 may comprise a dead-end chamber. In some implementations, fluid ejection chamber 138 may be part of a longer recirculation passage in which fluid a portion of the fluid directed to chamber 138 flows across chamber 138 and is recirculated.
  • layer 132 is formed from a photo- imageable polymer, such as a photo-imageable epoxy such as SU8. In other implementations, layer 132 may be formed from other materials.
  • Layer 134 comprise a layer of material or multiple layers of material joined to layer 132 informing ejection orifice 44. In some implementations, layer 134 is formed from the same material is layer 132. For example, in some implementations, layers 132 and 134 may both be formed from a photo-imageable polymer, such as a photo-imageable epoxy. In some implementations, layer 134 may be formed from a different material.
  • Coating 130 is similar to coating 30 described above except that coating 130 coats fluid passage 148, fluid passage 149, fluid ejection chamber 38 and interior surfaces of fluid ejection orifice 44. In such an implementation, coating 130 coats those exposed portions of layer 124 along fluid passage 149 and along or adjacent to fluid ejection chamber 38. With such an implementation, coating 130 may be formed or applied after layers 124, 132 and 134 have been joined to one another such that coating 130 forms a continuous set of layers 60, 62 extending along all exposed surfaces without interruption.
  • fluid ejection head 124 may be joined to other bodies, such as other body 154-1 or other body 154-2. Such joining may be through the use of adhesives and/or a molding compound that may result in airborne contaminants.
  • layer 60 of coating 130 has a lower wetting property as compared to layer 62, better inhibiting the contamination of the interior surfaces of passages 148, 149, fluid ejection chamber 38 or the interior of ejection orifice 44 as compared to layer 62.
  • Layer 62 offers a greater degree of robustness with respect to the fluid being delivered as compared to the materials of layer 124 and layer 60.
  • other body 154-1 may comprise an additional fluid delivering structure having an additional fluid supply passage 160 for delivering fluid to fluid passage 148.
  • Other body 154-1 may be formed from a material or materials different than that of layer 124.
  • other body 154-1 may comprise a polymeric body formed from an epoxy mold compound.
  • other body 154-1 may be formed from other polymers or other materials.
  • passage 160 may be a fan out fluid passage.
  • body 155 1 may comprise a printed circuit board carrying electronics for controlling fluid actuator 36.
  • Body 154-1 may be joined to die 124 by an adhesive or epoxy 166-1.
  • body 154-2 comprises a body that has an opening 170 for receiving fluid ejection head 124.
  • body 154-2 may comprise multiple openings 170 for receiving multiple fluid ejection heads 124.
  • body 154-2 may receive multiple fluid ejection heads 124 which are arranged in offset or staggered rows of heads 124.
  • body 154-2 may comprise and interposer printed circuit board which facilitates electrical connection between the individual fluid injection heads (or dies) 124 and a printed circuit assembly and/or interconnect for connection to a firing system that controls the firing rejection of fluid by fluid actuator 36.
  • fluid ejection head 124 is secured within opening 170 by an adhesive or epoxy 166-2.
  • adhesive or epoxy 166-2 each of such adhesives or epoxies 166-1 , 166-2 release airborne contaminants during curing, the airborne contaminants having a greater affinity with respect to the material of layer 62 as compared to the material of layer 60.
  • adhesive 166-1 and 166-2 comprise
  • layer 60 comprises aluminum oxide and layer 62 comprises hafnium oxide.
  • the adhesives and the layers of coating 130 may be formed from other materials.
  • coating 130 provides fluid passages 148
  • layer 60 of coating 130 inhibits contamination of those surfaces along fluid passages 148, 149 and chamber 38 to provide more consistent fluid flow characteristics.
  • layer 60 may erode during use of fluid ejection apparatus 120 (well after any risk of airborne contamination), layer 60 is backed by layer 62 which provides fluid passage 148, 149 and chamber 38 with long-term robustness with respect to the fluid being delivered.
  • coating 130 offers greater design freedom, allowing those portions of body 124 forming passages 148, 149 and chamber 38 to be formed from a wider variety of materials and/or allowing fluid ejection apparatus 120 to be utilized for delivering a wider variety of fluids, including fluids that might otherwise be corrosive or otherwise damaging to fluid ejection head 124 over prolonged periods of time.
  • Figure 4 is a flow diagram of an example method 200 for forming an example fluid ejection apparatus, such as fluid ejection apparatus 20 or fluid ejection apparatus 120.
  • Method 200 facilitates the deposition of a coating, such as coating 30 or 130, in a conformal manner along internal fluid passages of a fluid ejection apparatus, one that adapts to any irregularities along the underlying surfaces.
  • Method 200 facilitates the deposition of coating on internal surfaces of a fluid ejection apparatus, wherein the coating is formed an individual layer or multiple layers with each layer having a thin controlled thickness.
  • method 200 may begin with the provision of a fluid ejection head, such as fluid ejection head 24 or fluid ejection head 124 described above.
  • method 200 may include additional processes for forming the fluid ejection head.
  • the fluid ejection head includes a body having a back face and a front face, fluid actuator supported by the body, an ejection chamber in the body and proximate the fluid actuator, an ejection orifice extending from the ejection chamber through the front face and a fluid passage extending from the back face to the ejection chamber.
  • Figure 5 illustrates the ejection orifice 44 of the example fluid ejection head 124 being occluded.
  • an orifice blocker 220 is positioned on or against front face 52, over and across orifice 44.
  • orifice blocker 220 seals orifice 44 such that gases within fluid ejection chamber 38 are inhibited or prevented from egress through ejection orifice 44.
  • orifice blocker 220 comprises a member that is releasably adhered or bonded to face 52, temporarily occluding ejection office 44 but that is subsequently being removed from face 52 following the deposition of a coating within passages of fluid ejection head 124.
  • orifice blocker 220 comprises a high temperature tape that adheres and conforms to the face 52 so as to seal orifice 44.
  • the tape is “high temperature” in that the tape maintains its integrity and it adhesive bond to face 52 while experiencing temperatures that head 124 may experience during the fabrication of head 124, such as during the supply of a gas into passages 148, 149 and chamber 38.
  • the high temperature tape is formed from a material or materials and has a construction such that the tape maintains its integrity and adhesive bond to face 52 while experiencing temperatures of 120°F or more and nominally 150°F or more.
  • the high temperature tape serving as orifice blocker 220 may comprise a thermal release tape.
  • a thermal release tape is a tape that will stay adhesive until heat is applied over relatively short amount of time at which point the tape may be easily removed.
  • the thermal release tape maintains its adhesiveness and integrity when experiencing temperatures of 120°F or more and nominally 150° or more and wherein the thermal release tape experiences a substantial drop in adhesiveness in response to experiencing temperature of at least .
  • examples of such a thermal release tape include, but are not limited to, _ .
  • the use of a high temperature tape or the use of a thermal release tape provides an inexpensive option for temporarily occluding ejection orifice 44 during the injection of a gas into the internal passages or chambers of head 124.
  • orifice blocker 220 may comprise a rubberlike or elastomeric pad which is held in contact and sealing engagement with face 52 so as to occlude ejection orifice 44.
  • fluid ejection head 124 may be lowered into sealing engagement with a rubber pad or a member having a perimeter with an elastomeric sealing gasket that seals about ejection orifice 44.
  • the elastomeric pad or elastomeric gasket/ring forming orifice blocker 220 may be raised into sealing contact with face 52 to occlude ejection orifice 44.
  • the elastomeric pad or structure supporting an elastomeric ring may be sized or have multiple rings for concurrently blocking or occluding multiple ejection orifices 44 of a fluid ejection head.
  • orifice blocker 220 may additionally include a plug portion 222 projecting from the remainder of orifice blocker 220.
  • Plug portion 222 is sized and located to project into ejection orifice 44 when occluding ejection orifice 44.
  • plug portion 222 may be elastomeric to form an enhanced seal against the interior sides of ejection orifice 44.
  • plug portion 222 may inhibit the deposition of any coatings upon the internal side surfaces of ejection orifice 44.
  • plug portion 222 may be omitted.
  • a coating is deposited on internal surfaces of the fluid passage and the ejection chamber by directing a gas into the fluid passages and the ejection chamber.
  • the material of the coating is airborne, being carried by the gas, wherein the material is deposited upon the internal surfaces to form a layer having a controlled thickness.
  • Figure 5 illustrates a gas source 224 directing a gas 226 into fluid passage 148, fluid passage 149 and ejection chamber 38.
  • occlusion blocker 220 inhibits gas 226 from passing through ejection office 44 and onto face 52.
  • the gas 226 carries particles or materials that are to be subject only deposited upon the internal surfaces of passages 140, 149 and chamber 38 to line such surfaces with a coating.
  • the gas 226 carries materials for forming coating 62 described above.
  • Figure 6 illustrates the resulting layer 62 formed on the internal surfaces of passages 148, 149, the ejection chamber 38 and the interior side surface of ejection orifice 44 (when plug portion 222 is not utilized).
  • layer 62 comprises a single layer of material that conformally coats such interior surfaces.
  • the layer has a thickness of less than or equal to 2 pm.
  • the layer 62 may be formed from materials that protect surfaces of layer 124 from corrosion, erosion or other damage when coming into contact with the fluids delivered through passages 148, 149 and ejection chamber 38.
  • body 124 is formed from silicon while layer 62 is formed from hafnium oxide.
  • the coating deposited pursuant to block 212 may comprise a stack of multiple layers.
  • a different gas from a different gas source may be supplied through back face 50 and into passages 148, 149 and chamber 38, wherein the different gas results the deposition of a second layer of material, different than and over the first layer of material.
  • the gas is directed into such passages 148, 149 and ejection chamber 38 while ejection orifice 44 is occluded by orifice blocker 220 (and in some implementations, plug portion 222). This process may be repeated multiple times depending upon the number of different layers of the same or different materials being formed on the carrier surfaces of passage 140, 149 and ejection chamber 38.
  • FIG. 3 illustrates the opening of ejection orifice 44 following the deposition of the second layer 60 over the previously formed layer 62.
  • the second layer 60 is deposited by directing a gas (carrying materials for layer 60) into passages 148, 149 chamber 38 after such surfaces have been coated with layer 62.
  • plug portion 222 was omitted such that the resulting coating 130 coats the interior side surfaces of ejection orifice 44.
  • layer 62 and layer 60 are sequentially deposited using a vapor deposition technique such as atomic layer deposition.
  • Atomic layer deposition is a chemical gas phase thin-film deposition technique that utilizes sequential, self saturating surface reactions. Different precursor chemicals, each containing different elements of materials being deposited, be introduced to the surface separately, one at a time.
  • such precursors may be pulsed alternately, one at a time and may be separated by inert gas purging to reduce gas phase reactions.
  • the growth of the layer may be controlled.
  • the self-limiting growth mechanism may provide enhanced conformality and thickness uniformity of the film in the potentially fine (extremely small) and complicated fluid passages of the fluid ejection apparatus 120.
  • layer 1662 may be controlled to have a thickness of a monolayer, a layer having a thickness of one molecule.
  • layers 60 and 62 have a combined thickness of less than 2 pm.
  • layer 160 and 162 may each have a greater thickness.
  • Figures 7A, 7B and 7C illustrate portions of an example fluid ejection apparatus 320.
  • Such figures illustrate an example of how a fluid ejection head, having recirculation passages that provide ejection chambers and that provide for recirculation of fluid across the ejection chambers, may be coated with a coating.
  • Such figures further illustrate an example of a coating formed from three sandwiched layers.
  • Figure 7A is a perspective view illustrating a cross-section of portions an example fluid ejection apparatus 320.
  • Figures 7B and 7C are enlarged views of portions of the fluid ejection apparatus 320 of Fig. 7A.
  • apparatus 320 has a coating 330 that provides its internal surfaces that may contact the fluid being ejected with staged protection.
  • Fluid ejection apparatus 320 comprises fluid ejection head 324 and coating 330. Head 324 is joined to body 400.
  • Body 400 supports head 324 while providing fan-out fluid passages 433-1 and 433-2 (collectively referred to as passages 433).
  • body 400 is adhesively bonded to fluid ejection head 324.
  • body 400 is molded about fluid ejection head 324.
  • the adhesive material or the molding forming body 400 may release contaminants to the air during curing. As will be described hereafter, layer 60 of coating 330 reduces contamination from such contaminants.
  • passage 433-1 receives fluid from a pressurized fluid source 322.
  • Passage 433-2 directs fluid back to the pressurized fluid source 322 for recirculation.
  • body 400 comprises a single unitary polymeric body is formed from an epoxy mold compound. In other implementations, body 400 may be formed from other polymers. In one implementation, body 400 is molded to form fan-out fluid passages 433. In other implementations, body 400 may be formed from other materials.
  • Head 324 comprises layer 422, layer 424, fluid actuators 428, layer 432 and layer 434.
  • Layer 422 comprises a layer of material extending between body 400 and layer 424. Layer 422 forms an outlet 435 for fluid passage 433-1 and an inlet 436 for fluid passage 433-2. In one implementation, outlet 435 and inlet 436 comprise fluid holes. In another implementation, outlet 435 and inlet 436 comprise slots or channels.
  • Layer 424 comprises a layer or multiple layers of material forming inlet channel 437 and outlet channel 438.
  • Inlet channel 437 extends within layer 424 from outlet 435 of layer 422.
  • Outlet channel 438 extends within layer 424 from inlet 436.
  • Inlet channel 437 and outlet channel 438 are separated by an intervening rib 440 of layer 424.
  • Rib 440 supports fluid actuators 428, which are each similar to fluid actuator 28 described above.
  • Layer 424 may additionally support electrically conductive traces, switches or other electronic componentry associated with the fluid actuators 428.
  • layers 422 and 424 may comprise a single unitary or monolithic layer. In some implementations, both of layers 422 and 424 are formed from silicon. In other implementations, layers 422 and 424 may be formed from different materials. In some implementations, layer 424 may be formed from silicon while layer 422 is formed from other materials such as polymers, ceramics, glass and the like. In some implementations, layer 424 may be formed from materials other than silicon.
  • Layer 432 comprises a layer or multiple layers of a material or materials joined to an underside of layer 424 and forming recirculation passages 448 (shown in Figure 4B).
  • Recirculation passages 448 comprise fluid passages that extend between and provide for fluid flow from channel 437 to channel 438, through an ejection chamber 338 between an associated fluid actuator 428 and an ejection orifice 444 associated with the particular fluid actuator 428.
  • each of recirculation passages 448 and the formed fluid ejection chamber 338 has a ceiling provided by layer 424, internal sides provided by layer 432 and a floor provided by layer 434.
  • Recirculation passages 448 each receive fluid from channel 437 through an inlet 452 and discharge fluid to channel 438 through an outlet 454.
  • each of inlets 452 and outlets 454 comprise fluid holes formed in layer 424.
  • inlet 452 and outlets 454 may be partially formed within layer 432.
  • inlets 452 and outlets 454 may each comprise multiple fluid holes or an array of fluid holes.
  • inlets 452 and outlets 454 may comprise slots or channels.
  • Recirculation passages 448 supply their respective fluid actuators 428 with fluid for ejection through the corresponding ejection orifice 444.
  • Recirculation passages 448 additionally circulate fluid across their respective fluid actuators 428 from channel 437 to channel 438 to reduce settling.
  • Layer 434 comprises a layer of material or multiple layers of material joined to layer 432 and forming ejection orifices 444. In some implementations, layer 434 is formed from the same material as layer 432.
  • layers 432 and layer 434 both formed from a photo-imageable epoxy.
  • layer 434 is formed from a different material as layer 432.
  • layers 424, 432 and 434 are formed as a single fluid ejection die which is joined to body 400 by layer 422.
  • layers 422, 424, 432 and 434 are formed as a single fluid ejection die which is otherwise joined to body 400.
  • Coating 330 (shown with stippling) coats the interior surfaces of layer 424 which may be vulnerable to corrosion, erosion or other damage from the fluid to be ejected by fluid ejection apparatus 320.
  • layer 424 may be formed from silicon, wherein the fluid to be ejected is corrosive or erosive to silicon.
  • Coating 330 has a greater degree of robustness or a greater ability to withstand the corrosive and/or erosive nature of the fluid being ejected as compared to the silicon or other material forming layer 424.
  • coating 330 also has a greater degree of inertness or a lower chemical interactivity with respect to any airborne contaminants that may be present during the fabrication of head 324 or the joining of head 324 to body 400.
  • coating 330 coats the interior surface of each of passages 433, outlet 435, inlet 436, channel 437, 438, outlets 452, inlets 454, recirculation passages 448 (including the formed ejection chamber 338) and the interior side surfaces of ejection orifices 444.
  • each layer of coating 330 is formed by injecting or directing a gas containing the elements or materials of the layer into one or both of passages 433 from a back face 401 of body 400.
  • passages 433 may omit coating 330 such as when each layer of coating 330 is formed by injecting or directing a gas containing the elements or materials of the layer into one or both of outlet 435 and inlet 436, prior to the joining of body 400 to fluid ejection head 324.
  • the gas carrying the materials or elements forming an individual layer of coating 330 may be supplied to passage 433-1 (or outlet 435) and withdrawn from passage 433-2 (or inlet 436) such that the gas is circulated through head 324, across recirculation channels 448.
  • coating 330 comprises layers 358, 60 and 62.
  • Layer 358 comprise a layer that is in contact with and extends over an interior surface that is to be protected from the corrosive/erosive nature of the fluid being delivered by fluid ejection apparatus 320.
  • layer 358 is in contact with and extends over the surfaces of passages 433, outlet 435, inlet 436, channels 437, 438, inlets 452, outlets 454 and recirculation passages 448 and interior side surfaces of ejection orifices 444.
  • Layer 358 serves as an interface between such surfaces and layer 60, providing enhanced adherence of layer 60 to such interior surfaces [please confirm or revise as needed]
  • layer 358 is formed from the same material as layer 62.
  • layer 358 is formed from aluminum oxide.
  • Layers 60 and 62 are described above. However, layer 62 in fluid ejection apparatus 320 is in contact with and extends over layer 358, being sandwiched between layer 358 and 60. In some implementations, layer 62 comprises hafnium oxide while layer 358 comprises aluminum oxide.
  • Layer 60 is described above. In some implementations, layer 60 and layer 358 both comprise aluminum oxide while layer 62 comprises hafnium oxide.
  • the combination of the three layers forming coating 330 has a total thickness of 2 pm or less so as to lessen the impact of coating 330 on the dimensions of the various fluid passages and so as to not substantially impair or altar the flow of fluid through such passages.
  • each of layers 358, 60 and 62 are formed pursuant to method 200 described above, wherein each of such layers is formed by depositing materials on internal surfaces of the various fluid passages or channels by directing a gas into the various fluid passages or channels while each of the ejection orifices 444 is occluded.
  • each of layers 358, 60 and 62 are formed by a vapor deposition technique such as atomic layer deposition.
  • precursors may be pulsed alternately, one at a time and may be separated by inert gas purging to reduce gas phase reactions.
  • the growth of each of layers 358, 60 and 62 may be controlled.
  • the self-limiting growth mechanism may provide enhanced conformality and thickness uniformity of the individual layers 358, 60 and 62 in the potentially fine (extremely small) and complicated fluid passages of the fluid ejection apparatus 320.
  • layers 358, 60 and 62 may be controlled to each have a thickness of a monolayer, a layer having a thickness of one molecule.
  • layers 358, 60 and 62 have a combined thickness of less than 2 pm.
  • layers 358, 60 and 62 may each have a greater thickness.
  • layer 60 of coating 330 inhibits contamination of those surfaces along fluid passages 433, outlet 435, inlet 436, channels 437, 438, inlets 452, outlets 454, recirculation passages 448 and the interior side surfaces of ejection orifices 444 to provide more consistent fluid flow characteristics.
  • layer 60 may erode during use of fluid ejection apparatus 320 (well after any risk of airborne contamination)
  • layer 60 is backed by layer 62 which provides the various fluid passages and channels within head 324 and within body 400 with long-term robustness with respect to the fluid being delivered.
  • coating 330 offers greater design freedom, allowing portions of fluid ejection apparatus 320 that would otherwise come into contact with the fluid being delivered to be formed from a wider variety of materials and/or allowing fluid ejection apparatus 320 to be utilized for delivering a wider variety of fluids, including fluids that might otherwise be corrosive or otherwise damaging to fluid ejection head 324 over prolonged periods of time.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Un procédé de formation d'une tête d'éjection de fluide peut comprendre la fourniture d'une tête d'éjection de fluide comportant un corps ayant une face arrière et une face avant, un actionneur de fluide supporté par le corps, une chambre d'éjection dans le corps à proximité de l'actionneur de fluide, un orifice d'éjection s'étendant à partir de la chambre d'éjection à travers la face avant et un passage de fluide s'étendant de la face arrière à la chambre d'éjection. Le procédé peut en outre comprendre la fermeture de l'orifice d'éjection, le dépôt d'un revêtement sur des sources internes du passage de fluide et de la chambre d'éjection en dirigeant un gaz dans le passage de fluide dans la chambre d'éjection et l'ouverture de l'orifice d'éjection après le dépôt du revêtement sur les surfaces internes.
PCT/US2020/023200 2020-03-17 2020-03-17 Revêtement fluide de tête d'éjection de fluide WO2021188098A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/US2020/023200 WO2021188098A1 (fr) 2020-03-17 2020-03-17 Revêtement fluide de tête d'éjection de fluide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2020/023200 WO2021188098A1 (fr) 2020-03-17 2020-03-17 Revêtement fluide de tête d'éjection de fluide

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015147804A1 (fr) * 2014-03-25 2015-10-01 Hewlett-Packard Development Company, L.P. Couche de passivation de film mince pour passage de fluide d'une tête d'impression
RU2566409C1 (ru) * 2014-07-03 2015-10-27 Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г. Ромашина" (АО "ОНПП "Технология" им.А.Г.Ромашина") Способ изоляции отверстий в металлических изделиях при окраске
WO2016122620A1 (fr) * 2015-01-30 2016-08-04 Hewlett-Packard Development Company, L.P. Revêtement de tête d'impression
US20190217618A1 (en) * 2018-01-17 2019-07-18 Stmicroelectronics S.R.L. Method for manufacturing a fluid-ejection device with improved resonance frequency and fluid-ejection velocity, and fluid-ejection device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015147804A1 (fr) * 2014-03-25 2015-10-01 Hewlett-Packard Development Company, L.P. Couche de passivation de film mince pour passage de fluide d'une tête d'impression
RU2566409C1 (ru) * 2014-07-03 2015-10-27 Акционерное общество "Обнинское научно-производственное предприятие "Технология" им. А.Г. Ромашина" (АО "ОНПП "Технология" им.А.Г.Ромашина") Способ изоляции отверстий в металлических изделиях при окраске
WO2016122620A1 (fr) * 2015-01-30 2016-08-04 Hewlett-Packard Development Company, L.P. Revêtement de tête d'impression
US20190217618A1 (en) * 2018-01-17 2019-07-18 Stmicroelectronics S.R.L. Method for manufacturing a fluid-ejection device with improved resonance frequency and fluid-ejection velocity, and fluid-ejection device

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