WO2021172128A1 - 焼結体の製造方法 - Google Patents

焼結体の製造方法 Download PDF

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Publication number
WO2021172128A1
WO2021172128A1 PCT/JP2021/005908 JP2021005908W WO2021172128A1 WO 2021172128 A1 WO2021172128 A1 WO 2021172128A1 JP 2021005908 W JP2021005908 W JP 2021005908W WO 2021172128 A1 WO2021172128 A1 WO 2021172128A1
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Prior art keywords
laser
article
oxide
sintered body
ceramic powder
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Ceased
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PCT/JP2021/005908
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English (en)
French (fr)
Japanese (ja)
Inventor
木村　禎一
智 末廣
義総 奈須
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Japan Fine Ceramics Center
Sumitomo Chemical Co Ltd
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Japan Fine Ceramics Center
Sumitomo Chemical Co Ltd
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Application filed by Japan Fine Ceramics Center, Sumitomo Chemical Co Ltd filed Critical Japan Fine Ceramics Center
Priority to US17/802,395 priority Critical patent/US20230191652A1/en
Priority to KR1020227029274A priority patent/KR20220141820A/ko
Priority to EP21761327.2A priority patent/EP4112585A4/en
Priority to CN202180016903.7A priority patent/CN115210198A/zh
Publication of WO2021172128A1 publication Critical patent/WO2021172128A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Definitions

  • This disclosure relates to a method for manufacturing a sintered body.
  • the present invention relates to a method for producing a sintered body by laser irradiation.
  • a method for producing a sintered body a method of producing a sintered body containing ceramics such as alumina by using yttria as a sintering aid is known.
  • a method for producing a sintered body a method of sintering by laser irradiation is being adopted instead of sintering using a heating furnace.
  • a mixed powder is prepared by mixing a ceramic powder with an inorganic binder powder, the mixed powder is formed into an article by an addition manufacturing process, and the article is densified by transient liquid phase sintering.
  • the manufacturing method of the part including is shown.
  • Patent Document 1 discloses that, for example, Si 1 N 1- Y 2 O 3- AlN containing yttria is used as the ceramic powder, and the transient liquid phase sintering is performed using a laser. It is shown.
  • an object of the present invention is to provide a method for producing a sintered body in a short time by irradiating an article containing ceramics with a laser.
  • Aspect 1 of the present invention is a method for producing a sintered body by sintering by laser irradiation.
  • Aspect 2 of the present invention is the method for producing a sintered body according to Aspect 1, wherein in the article forming step, the ceramic powder and the laser absorbing oxide are mixed and molded into an article shape to form an article. be.
  • the ceramic powder is molded into an article shape to obtain a molded article, and then the article is formed by arranging the laser absorbing oxide on the surface of the molded article.
  • Aspect 4 of the present invention is the method for producing a sintered body according to any one of aspects 1 to 3, wherein the laser absorbing oxide is one or more selected from the group consisting of magnesium oxide and a rare earth element-containing oxide. Is.
  • Aspect 5 of the present invention is the method for producing a sintered body according to Aspect 4, wherein the rare earth element-containing oxide is yttrium oxide.
  • Aspect 6 of the present invention occupies the raw materials.
  • the proportion of the laser-absorbed oxide is 1% by mass or more and 65% by mass or less.
  • the proportion of the ceramic powder is 35% by mass or more and 99% by mass or less.
  • Aspect 7 of the present invention is the firing according to any one of aspects 1 to 6, wherein the laser is any one of Nd: YAG laser, Nd: YVO laser, Nd: YLF laser, titanium sapphire laser, and carbon dioxide gas laser. This is a method for manufacturing a body.
  • Aspect 8 of the present invention is the method for producing a sintered body according to any one of aspects 1 to 7, wherein in the sintering step, a sintered portion is formed by laser irradiation in an air atmosphere.
  • Aspect 9 of the present invention is the embodiment in which the sintered portion is formed by laser irradiation in a non-oxidizing atmosphere in the sintering step, and then the sintered portion is further laser-irradiated in an atmospheric atmosphere.
  • Aspect 10 of the present invention is any of aspects 1 to 9, wherein in the raw material preparation step, white yttrium oxide is irradiated with a laser in a non-oxidizing atmosphere to obtain black yttrium oxide as the laser absorbing oxide.
  • This is a method for producing a sintered body according to the above.
  • Aspect 11 of the present invention is the production of the sintered body according to any one of aspects 1 to 10, wherein the ceramic powder contains at least one selected from the group consisting of aluminum oxide, aluminum nitride, and aluminum nitride. The method.
  • FIG. 1A to 1D are schematic cross-sectional views showing an example of a method for producing a sintered body according to an embodiment of the present invention.
  • 2A to 2D are schematic cross-sectional views showing another example of the method for producing a sintered body according to the embodiment of the present invention.
  • 3A to 3C are schematic cross-sectional views showing another example of the method for producing a sintered body according to the embodiment of the present invention.
  • FIG. 4 is a graph showing the results of measuring the absorption rates of black yttrium oxide and ceramic powder at each laser wavelength in the examples.
  • FIG. 5 is a scanning electron micrograph of the sintered body of Example 1.
  • FIG. 6 is a scanning electron micrograph of the sintered body of Example 2.
  • FIG. 5 is a scanning electron micrograph of the sintered body of Example 1.
  • FIG. 7 is a scanning electron micrograph in which the broken line portion in FIG. 6 is enlarged.
  • FIG. 8A is a scanning electron micrograph of the sintered body of Comparative Example 1.
  • FIG. 8B is a scanning electron micrograph obtained by enlarging a part of the scanning electron micrograph of FIG. 8A.
  • the present inventors have conducted diligent research to realize a method for producing a sintered body in a short time by irradiating an article containing ceramics with a laser.
  • the article containing the laser-absorbing oxide according to the present disclosure may be targeted for sintering, and as a method for producing a sintered body according to the present disclosure using the article, it is sintered by laser irradiation. It is a method of manufacturing a sintered body.
  • Step 1 A raw material preparation step of preparing a raw material containing a ceramic powder and a laser absorbing oxide having an absorption rate at a laser wavelength of 5% or more higher than that of the ceramic powder.
  • Step 2 An article forming step of forming an article made of the raw material, an article including a region composed of only the raw material, or an article made of the raw material and formed on a base material.
  • Step 3 A sintering step of irradiating the article with a laser to form a sintered portion, I found that it should be included.
  • Step 1 Raw Material Preparation Step First, a raw material containing a ceramic powder and a laser absorbing oxide having an absorption rate at a laser wavelength used for sintering is 5% or more higher than that of the ceramic powder is prepared. The details of the raw materials will be described in the order of laser absorbing oxide, ceramic powder, and other possible materials.
  • a laser absorbing oxide having an absorption rate of 5% or more higher than that of the ceramic powder is prepared.
  • the laser include a laser having a wavelength of 500 nm to 11 ⁇ m.
  • the laser for example, Nd: YAG laser, Nd: YVO laser, Nd: YLF laser, titanium sapphire laser, carbon dioxide gas laser and the like can be used.
  • the absorption rate of the laser used for sintering is preferably 5% or more, more preferably 10% or more, still more preferably 15% or more, still more preferably 30% or more, particularly preferably 30% or more, as compared with the ceramic powder. It can be in the range of 50% or more.
  • the higher the difference in absorption rate, the more preferable, and the upper limit is not particularly limited.
  • the upper limit of the difference in absorption rate can be, for example, 95%.
  • the laser absorption oxide for example, one or more selected from the group consisting of magnesium oxide and a rare earth element-containing oxide (as a rare earth element Y, La, Ce, Nd, Gd, Eu, Dy, etc.) is preferably used. Among these, a rare earth element-containing oxide is more preferable, and yttrium oxide is more preferable.
  • the shape of the laser-absorbed oxide is not limited, and may be, for example, particle-like, powder-like, block-like, sheet-like, fiber-like, or rod-like.
  • the BET specific surface area of the laser-absorbed oxide can be, for example, in the range of 0.1 to 500 m 2 / g, preferably 1 to 50 m 2 / g, and more preferably 20 to 40 m 2 / g.
  • the laser-absorbing oxide absorbs the energy of the laser, the laser-absorbing oxide itself generates heat, and the surrounding ceramic particles are heated by the heated laser-absorbing oxide, so that the ceramic particles generate the energy of the laser. It is considered that the ceramics are easily absorbed and the sintering is promoted. Therefore, it is preferable that the laser absorbing oxide and the ceramic powder are uniformly dispersed in the laser sintered portion in the article. Further, if the laser-absorbing oxide is used, volatilization and the like do not occur during sintering, so that a sintered body having good surface properties can be obtained.
  • the laser-absorbing oxide used in the embodiment of the present invention means that the absorption rate at the wavelength of the laser used for sintering is 5% or more higher than that of the ceramic powder.
  • the laser-absorbing oxide can be obtained by irradiating one or more selected from the group consisting of white oxides, for example, white magnesium oxide and rare earth element-containing oxides, with a laser having a wavelength of 500 nm to 11 ⁇ m. Can be done.
  • white oxides for example, white magnesium oxide and rare earth element-containing oxides
  • a laser having a wavelength of 500 nm to 11 ⁇ m.
  • the laser for example, Nd: YAG laser, Nd: YVO laser, Nd: YLF laser, titanium sapphire laser, carbon dioxide gas laser and the like can be used.
  • the laser output is preferably 50 to 2000 W / cm 2 , more preferably 100 to 500 W / cm 2 .
  • the laser used in producing this laser-absorbing oxide may be the same as or different from the laser used in sintering.
  • it can be 100 to 1000 W, preferably 200 to 800 W, and more preferably 250 to 500 W, similar to the laser output at the time of sintering when aluminum oxide is used as the ceramic powder.
  • it can be 50 to 1000 W, preferably 50 to 800 W, and more preferably 100 to 500 W, similar to the laser output at the time of sintering when aluminum nitride is used as the ceramic powder. can.
  • the irradiation time of the laser is preferably 1 second to 60 minutes, more preferably 5 seconds to 30 minutes.
  • the laser irradiation atmosphere is not particularly limited, but is preferably a non-oxidizing atmosphere such as a reduced pressure atmosphere, a vacuum atmosphere, a nitrogen atmosphere, or an argon atmosphere from the viewpoint of promoting the formation of the laser absorbing oxide.
  • Black yttrium oxide (sometimes called “black yttrium”) is oxygen-deficient in white yttrium oxide (III) (Y 2 O 3 , sometimes called “white yttrium”), Y 2 O 3-x. It is a compound represented by (X is less than 1).
  • This black yttrium oxide is obtained by, for example, powder-molding white yttrium oxide, applying carbon to the surface, and irradiating a laser in a non-oxidizing atmosphere such as a vacuum or an argon or nitrogen atmosphere. be able to. After laser irradiation, the obtained black yttrium oxide can be pulverized with a ball mill, jet mill or the like, if necessary, to obtain a laser-absorbing oxide of a desired size.
  • the above laser absorption oxide is particularly used as a laser absorption aid.
  • the laser absorbing substance instead of the laser absorbing oxide, holes are likely to be formed on the surface of the sintered body or the like when the carbon evaporates as carbon dioxide gas or the like, for example.
  • the laser absorbing oxide is used as in the embodiment of the present invention, the problem when the above carbon is used does not occur.
  • the laser-absorbing oxide is obtained by the formation of the laser-absorbing oxide described above can be confirmed by a method such as ultraviolet-visible absorption spectroscopy, as shown in Examples described later.
  • the laser-absorbing oxide contributes to the promotion of the above-mentioned sintering reaction even in a very small amount.
  • the ratio of the laser-absorbing oxide to the raw material is preferably 0.1% by mass or more, more preferably 1% by mass or more, still more preferably. Is 2.0% by mass or more.
  • the ratio of the laser-absorbing oxide in the raw material is preferably 65% by mass or less, more preferably 40% by mass or less, still more preferably 20. It is mass% or less, more preferably 10 mass% or less.
  • the ceramic powder for sintering constituting the above article preferably contains at least one selected from aluminum oxide, aluminum nitride, and aluminum nitride.
  • the particle size of the ceramic powder is, for example, preferably 100 nm (0.1 ⁇ m) to 100 ⁇ m. Further, for example, it is also possible to use a mixture of two or more types of ceramic powders having different particle sizes.
  • the ratio of the ceramic powder to the raw material is preferably 35% by mass or more, more preferably 60% by mass or more, still more preferably 80% by mass or more, from the viewpoint of securing the ratio of the ceramics to the sintered body. More preferably, it is 90% by mass or more.
  • the ratio of the ceramic powder is preferably 99% by mass or less, more preferably 98.5% by mass or less, still more preferably 98. It is 0.0% by mass or less.
  • Other possible materials include, for example, a binder.
  • the binder include polymer binders.
  • the polymer binder include those that dissolve or disperse in a medium consisting of at least one of water and an organic solvent.
  • Specific examples of the polymer binder include polyvinyl alcohol, polyvinyl acetal, acrylic polymers, polyvinyl acetate, polyvinyl butyral, and the like.
  • the proportion of the raw material can be, for example, 5% by volume or less, further 3% by volume or less, and further 1% by volume or less.
  • Step 2 Article forming step In step 2, the raw material is used to form an article in which the ceramic powder and the laser absorbing oxide are present.
  • the laser absorbing oxide may be present in at least one of the articles. Therefore, as the existence form of the laser-absorbing oxide, there are cases where the laser-absorbing oxide exists both on the surface and inside the article, when it exists only on the surface, and when it does not exist on the surface but exists only inside the article. Can be mentioned.
  • Examples of the article include an article made of the raw material, an article including a region composed of only the raw material, or an article made of the raw material and formed on a base material.
  • the raw material may be used to form an article containing ceramic powder and a laser-absorbing oxide, and the specific method thereof is not limited.
  • the method for forming the article include any of the following methods (step A) and (step B), or a combination of these methods.
  • the “article” refers to a product containing the ceramic powder and the laser-absorbing oxide, which is obtained by molding the ceramic powder into an article shape, which is obtained in the middle of the following (step B). It is distinguished from the "molded product" before the laser absorption oxide is placed.
  • Step A A method of forming an article by mixing the ceramic powder and the laser-absorbing oxide and molding it into an article shape
  • Step B After molding the ceramic powder into an article shape to obtain a molded product, A method of forming an article by arranging a laser-absorbing oxide on the surface of the molded article.
  • process A will be described with reference to FIGS. 1A and 1B
  • process B will be described with reference to FIGS. 2A and 2B.
  • step A the ceramic powder 100 and the laser absorbing oxide 10 are mixed to obtain a mixture.
  • the method of mixing is not particularly limited, and examples thereof include diffusion mixing with a mixer (double cone blender) and the like, and mixing while pulverizing with a ball mill, jet mill and the like.
  • the ceramic powder 100 When a plurality of sizes of ceramic powder are used as the ceramic powder 100, they may be premixed in advance before being mixed with the laser absorbing oxide to obtain a mixture of the ceramic powder.
  • An article is formed using a mixture of the ceramic powder and a laser absorbing oxide.
  • a mixture of ceramic powder 100 and laser absorbing oxide 10 is put into a molding die 60, and the pressure jig 61 is pressed in the direction of arrow F for pressure molding.
  • the pressure can be 10 MPa to 30 MPa.
  • the ceramic powder 100 and the laser absorbing oxide 10 may be subjected to injection molding, extrusion molding, screen printing, or the like to obtain an article.
  • the article 20 obtained in (Step A) does not necessarily have to be the one in which the ceramic powder and the laser-absorbing oxide are uniformly mixed and dispersed.
  • the surface 20A (for example, the outermost surface to be irradiated with the laser) has a higher concentration of the laser-absorbed oxide than the inside of the article 20, for example, the inside of the article 20.
  • a form in which the concentration of the laser-absorbed oxide gradually increases from the surface to the surface 20A can be mentioned.
  • the laser-absorbing oxide exists on both the surface 20A and the inside of the article as described above, and the laser-absorbing oxide exists on the surface 20A. It may include the case where the laser absorbing oxide is present only in the surface 20A and the case where the laser absorbing oxide is not present in the surface 20A but only inside the article.
  • step B first, a raw material containing ceramic powder is molded into an article shape to obtain a molded product.
  • the ceramic powder 100 is put into a molding die 60, the pressure jig 61 is pressed in the direction of arrow F, and pressure molding (press molding) is performed.
  • a molded product 21 having a predetermined shape is obtained.
  • the pressure can be 10 MPa to 30 MPa.
  • the ceramic powder may be subjected to injection molding, extrusion molding, screen printing, or the like to obtain a molded product.
  • the ceramic powder 100 uses a plurality of sizes of ceramic powder such as the large particle size and the small particle size, these may be premixed in advance and the mixture of the ceramic powder may be subjected to pressure molding.
  • the laser absorbing oxide layer 22 is arranged on the surface 21a of the molded product 21.
  • the article 23 in which the molded product 21 and the laser absorbing oxide layer 22 are arranged is obtained.
  • the laser absorbing oxide is shown as the laser absorbing oxide layer 22 in FIG. 2, the arrangement of the laser absorbing oxide is not limited to this. That is, as a method for arranging the laser-absorbing oxide, for example, only the laser-absorbing oxide or a composition containing the laser-absorbing oxide and the binder, or the laser-absorbing oxide and the organic solvent are contained. Examples thereof include a spraying method such as spraying, a printing method such as screen printing, a doctor blade method, a spin coating method, and a coating method such as a curtain coater method using the composition.
  • the laser-absorbing oxide may be formed on the entire surface of the surface 21a of the molded product 21, or may be partially formed only at a predetermined position on the surface 21a (not shown).
  • the laser absorbing oxide may be arranged in a dot pattern or the like.
  • the proportion of the laser-absorbing oxide contained in the composition is preferably 50 from the viewpoint of enhancing the laser absorption capacity.
  • the thickness at the time of arranging the laser absorbing oxide is preferably 5 nm to 30 ⁇ m, more preferably 100 nm to 10 ⁇ m from the viewpoint of enhancing the absorption capacity of the laser.
  • the shape of the article is not limited to that shown in FIGS. 1 and 2. That is, in addition to a flat plate shape, it can be a curved plate shape, a rod shape, a tubular shape, a lump shape, a sheet shape, a combination thereof, or a deformed shape thereof.
  • Step 3 Sintering Step In Step 3, the surface of the article is irradiated with a laser to form a sintered portion.
  • the sintering process will be described with reference to FIGS. 1C and 1D when the article formed in (Step A) is sintered, and FIGS. 2C and 2D when sintering the article formed in (Step B). ..
  • the laser 31 from the laser device 30 is irradiated to a predetermined position on the surface 20A of the article 20 or the surface 22a of the laser absorbing oxide layer 22 on the article 23.
  • the laser-absorbing oxide in the article absorbs the energy of the laser and generates heat. This preheats the area surrounding the laser-absorbed oxide.
  • the temperature rise progresses by further irradiating the portion 20P of the article 20 or the portion 21P of the article 23 with a laser.
  • the ceramic powder in the portion 20P or the portion 21P is sintered to form the sintered portion 41 or 44 (FIGS. 1D and 2D).
  • the sintered portion 41 or 44 can be locally formed at a desired position (part 20P or 21P) of the article 20 or 23.
  • the laser-irradiated portion of the laser-absorbing oxide layer 22 on the surface of the article is mainly a white oxide obtained by reacting the laser-absorbing oxide by laser irradiation as shown in FIG. 2D. It can be the sintered portion 45.
  • the portion outside the range of the region 31R directly below the irradiation position 31E is not sintered and becomes the non-sintered portion 42 or 46.
  • the non-sintered portion 42 or 46 may be removed as needed, and additional laser irradiation is performed to sinter the non-sintered portion 42 or 46 to obtain the sintered portions 41, or 44 and 45. It may be enlarged.
  • the laser 31 may irradiate only a part (predetermined position) of the surface 20A or the surface 22a, but may irradiate the entire surface of the surface 20A or the surface 22a.
  • a method of irradiating the entire surface of the surface with the laser 31 a method of simultaneously irradiating the entire surface using the laser 31 having a large spot diameter (simultaneous irradiation) and a method of relatively moving the irradiation position of the laser 31 having a small spot diameter.
  • the scanning irradiation includes, for example, a method of scanning the laser with the articles 20 and 23 fixed, a method of irradiating while changing the optical path of the laser through a light diffusing lens, or an article by fixing the optical path of the laser.
  • a method of irradiating a laser while moving 20 and 23 can be mentioned.
  • the type of laser used is not particularly limited, but from the viewpoint of enhancing the absorption capacity of the laser, it is preferable to use a laser in a wavelength range (500 nm to 11 ⁇ m) having a high absorption rate by the laser absorbing oxide.
  • a laser in a wavelength range (500 nm to 11 ⁇ m) having a high absorption rate by the laser absorbing oxide.
  • any one of Nd: YAG laser, Nd: YVO laser, Nd: YLF laser, titanium sapphire laser, and carbon dioxide gas laser is preferable.
  • the laser irradiation conditions are appropriately selected depending on the type of ceramics for sintering, the sintering area, the sintering depth, and the like.
  • Laser power in terms of advancing properly sintering, preferably 50 ⁇ 2000W / cm 2, more preferably 100 ⁇ 500W / cm 2.
  • the laser output is 100 to 1000 W, preferably 200 to 800 W, and more preferably 250 to 500 W.
  • the laser output is 50 to 1000 W, preferably 50 to 800 W, and more preferably 100 to 500 W.
  • the laser irradiation time is preferably 1 second to 60 minutes, more preferably 5 seconds to 30 minutes.
  • the articles 20 and 23 may be preheated before irradiating the laser.
  • the preheating temperature is preferably 300 ° C. or higher, more preferably 400 ° C. or higher, and the upper limit of the preheating temperature is usually 200 ° C. or higher lower than the melting point of the ceramics for sintering.
  • Preheating can be performed by, for example, an infrared lamp, a halogen lamp, resistance heating, high frequency induction heating, microwave heating, or the like.
  • the sintered body may be a white-colored laser-absorbed oxide used in the production from the viewpoint of ensuring a beautiful appearance.
  • the laser-absorbing oxide for example, black yttrium oxide
  • a white oxide for example, white yttrium oxide
  • the sintered portion in step 3, in order to perform sintering and change the laser-absorbed oxide to white, the sintered portion may be formed by laser irradiation in an oxygen-containing atmosphere (for example, an atmospheric atmosphere).
  • an oxygen-containing atmosphere for example, an atmospheric atmosphere
  • a step of further changing the laser-absorbed oxide to white may be provided.
  • a sintered portion is formed by laser irradiation, and then oxygen is contained as an additional step.
  • Laser irradiation of the sintered portion may be performed in an atmosphere (for example, an atmospheric atmosphere).
  • the conditions of laser irradiation when changing the laser-absorbed oxide to white oxide may be the same as or different from the laser irradiation at the time of sintering, except for the atmosphere.
  • laser irradiation can be performed under a plurality of conditions.
  • laser irradiation in an anaerobic atmosphere and then laser irradiation in an atmospheric atmosphere can be mentioned.
  • the article may be provided on a base material.
  • a base material For example, the case where the article is formed on the base material in the step A will be described with reference to FIG. 3 as an example.
  • a mixture of the ceramic powder 100 and the laser absorbing oxide 10 is formed on the base material 24 to prepare the article 20 on the base material 24 as shown in FIG. 3A.
  • the base material 24 is preferably made of at least one selected from metals, alloys and ceramics.
  • Examples of the method for forming the article 20 on the base material 24 include a thermal spraying method, an electron beam physical vapor deposition method, a laser chemical vapor deposition method, a cold spray method, ceramic particles for sintering, a dispersion medium, and a polymer binder used as needed. It can be formed by a conventionally known method such as a method in which a slurry containing the above-mentioned material is applied, dried, and further degreased.
  • the base material 24 and the article 20 may be joined, or the article 20 may be placed on the base material 24 without being joined.
  • the surface 20A of the article 20 is irradiated with a laser, and as shown in FIG. 3C, the sintered portion 41 is formed in the article 20.
  • the sintered body 40 including the sintered portion 41 and the non-sintered portion 42 is formed on the base material 24.
  • the desired portion is a sintered portion, that is, the sintered portion is a part and the rest is non-sintered. Including the case of part.
  • the sintered body preferably comprises only the sintered portion.
  • Ceramics account for 50% by mass or more of the sintered body according to the embodiment of the present invention.
  • the ceramics preferably contain at least one selected from the group consisting of aluminum oxide, aluminum nitride, and aluminum oxynitride. More preferably, the ceramic is any one of aluminum oxide, aluminum nitride, and aluminum nitride.
  • a laser-absorbing oxide or a white oxide obtained by oxidation of the laser-absorbing oxide may be present in the sintered portion.
  • it may exist as a composite oxide, a solid solution, a co-crystal, or the like of the oxide and the ceramics.
  • the sintered portion may have a spherical, ellipsoidal, or polygonal structure, for example, the particle size of the crystal is within the range of 0.01 ⁇ m to 50 ⁇ m, more preferably 0.1 ⁇ m to 20 ⁇ m. It can be in.
  • the laser absorbing oxide layer 22 is changed to a white oxide layer, and a white oxide is formed at the interface between the white oxide layer and the sintered portion 44.
  • a white oxide is formed at the interface between the white oxide layer and the sintered portion 44.
  • aluminum nitride is used as the ceramic and black yttrium oxide is used as the laser absorbing oxide to obtain a sintered body
  • aluminum nitride, aluminum oxide, black yttrium oxide, and black yttrium oxide are used in the sintered portion.
  • a composite oxide or eutectic with white yttrium oxide obtained by oxidation of yttrium oxide can be obtained.
  • One embodiment of the sintered body according to the embodiment of the present invention is a dense body having a porosity of 10% or less, for example. Further, as another aspect of the sintered body according to the embodiment of the present invention, there is a porous body having a porosity of more than 10% and 80% or less, for example.
  • Examples of the dense body include a sintered body obtained by using aluminum nitride and black yttrium oxide as a laser absorbing oxide.
  • the sintered body of Example 2 shown in Examples described later can be mentioned.
  • examples of the porous body include a sintered body obtained by using aluminum oxide and black yttrium oxide as a laser absorbing oxide.
  • the sintered body of Example 1 shown in Examples described later can be mentioned.
  • Example 1 (Preparation of black itria powder)
  • White itria (particle size 1 ⁇ m) was loaded into a die for pellet molding (cylindrical shape with an inner diameter of 10 mm) and pressed with a uniaxial press at 10 MPa for 30 seconds to obtain white itria pellets.
  • the surface of the white Itria pellets was sprayed with an aerosol dry graphite film-forming lubricant "DGF Spray” (trade name) manufactured by Nippon Ship Tools Co., Ltd. for about 1 second. Then, this was left for 30 seconds to obtain a laminated sample having a carbon powder-containing layer having a thickness of about 5 ⁇ m.
  • DGF Spray trade name
  • a black yttria sintered body (BET 3.8 m 2 / g) was obtained by irradiating the surface of the laminated sample with a laser having a wavelength of 1064 nm and an output of 300 W for 1 minute.
  • the obtained black yttria sintered body was pulverized by a dry ball mill to obtain black yttria powder (BET 33.0 m 2 / g).
  • the absorptivity of the ceramic powder and the absorptivity of the black Itria powder at a certain laser wavelength were determined based on the ultraviolet-visible absorption spectroscopic spectra in the wavelength range of 400 nm to 1500 nm measured by the methods shown below. ..
  • the ceramic powder aluminum oxide or aluminum nitride powder was used.
  • the transmittance (T%) and reflectance (R%) are obtained by measuring the transmission spectrum and the reflection spectrum using an ultraviolet-visible absorption spectroscope.
  • FIG. 4 also shows the absorption rate of white yttrium.
  • the difference in absorption rate obtained from (absorption rate of the black yttria powder at each wavelength)-(absorption rate of ceramic powder at each wavelength) is any wavelength in the range of 400 nm to 1500 nm.
  • the ceramic powder was 5% or more in both cases of aluminum oxide and aluminum nitride.
  • the difference in absorption rate was 10% or more at any of the above wavelengths, and especially when the wavelength was 600 nm or more, the difference in absorption rate was 20% or more. .
  • the difference in absorption rate is 70% or more at any of the above wavelengths, and black yttria shows a sufficiently high absorption rate as compared with the ceramic powder. rice field.
  • the ceramic powder aluminum oxide powder (particle size 0.15 ⁇ m) and the black itria powder are uniformly dispersed and mixed while being crushed by a wet ball mill at the ratio shown in Table 1, and further dried to obtain a mixed powder. A sample was obtained. The obtained mixed powder sample was loaded into a die for pellet molding (cylindrical shape having an inner diameter of 10 mm) and pressed with a uniaxial press at 10 MPa for 30 seconds to obtain pellets for sintering as an article.
  • the surface of the sintering pellet was irradiated with a laser having a wavelength of 1064 nm and an output of 300 W for 30 seconds.
  • the atmosphere at the time of laser irradiation was the atmosphere.
  • the beam diameter was set to 10 mm, and the position of the laser was adjusted so that the entire sintering pellet (diameter 10 mm) could be laser-sintered.
  • the entire sintering pellet was sintered to obtain a sintered sample containing no non-sintered portion (that is, the entire sintered portion was formed).
  • Example 2 A sintered sample was obtained in the same manner as in Example 1 except that the aluminum oxide powder in Example 1 was changed to aluminum nitride powder (particle size 0.10 ⁇ m) and the laser output was changed to 250 W. rice field.
  • Example 3 A sintered sample was obtained in the same manner as in Example 1 except that the laser output in Example 1 was changed to 400 W.
  • Example 4 A sintered sample was obtained in the same manner as in Example 2 except that the laser output in Example 2 was changed to 150 W.
  • Example 5 A sintered sample was obtained in the same manner as in Example 1 except that the laser output in Example 1 was changed to 200 W.
  • Example 1 A sintered sample was obtained in the same manner as in Example 1 except that the black yttria powder in Example 1 was changed to white yttria powder (particle size 1 ⁇ m).
  • Example 2 A sintered sample was obtained in the same manner as in Example 2 except that the black yttria powder in Example 2 was changed to white yttria powder (particle size 1 ⁇ m).
  • Sinterability was judged from scanning electron micrographs. Specifically, when a scanning electron micrograph of 5000 times or more is taken and the connection between the particles is observed over the entire imaging area from the photograph, or the connection between the particles is further advanced and the particles cannot be discriminated. When a fine microstructure of a certain degree is observed, it is regarded as "good”, and when the connection between particles is observed in a part of the imaging area, it is regarded as "possible”, and the connection between particles is observed. If it was not done, it was evaluated as x as "impossible”. Then, when the evaluation result was ⁇ or ⁇ , it was judged that the sinterability was high.
  • FIG. 8A is a scanning electron micrograph obtained by enlarging a part of the scanning electron micrograph of FIG. 8A.
  • Laser absorption oxide 100 Ceramic powder 20, 23 Article 20A Article surface 20P, 21P Part existing in the area directly below the laser irradiation position 21 Molded product 21a Molded product surface 22 Laser absorption oxide layer 22a Laser absorption oxide layer Surface 24 Base material 30 Laser irradiation means 31 Laser 31E Laser irradiation position 31R Area directly below the laser irradiation position 40, 43 Sintered body 41, 44, 45 Sintered part 42, 46 Non-sintered part 60 Mold 61 Pressurized cure Ingredients

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