WO2021152963A1 - Dispositif d'imagerie, dispositif d'inspection, et procédé d'inspection - Google Patents

Dispositif d'imagerie, dispositif d'inspection, et procédé d'inspection Download PDF

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Publication number
WO2021152963A1
WO2021152963A1 PCT/JP2020/042788 JP2020042788W WO2021152963A1 WO 2021152963 A1 WO2021152963 A1 WO 2021152963A1 JP 2020042788 W JP2020042788 W JP 2020042788W WO 2021152963 A1 WO2021152963 A1 WO 2021152963A1
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WIPO (PCT)
Prior art keywords
work
unit
inspection
camera
light emitting
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PCT/JP2020/042788
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English (en)
Japanese (ja)
Inventor
努 作山
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株式会社Ｓｃｒｅｅｎホールディングス
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Publication of WO2021152963A1 publication Critical patent/WO2021152963A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Definitions

  • the present invention relates to an imaging device that images a wide variety of workpieces, an inspection device that acquires and inspects an image of a workpiece using the imaging device, and an inspection method.
  • Patent Document 1 An inspection technique for inspecting a work such as an industrial part for defects such as scratches has been proposed (see, for example, Patent Document 1).
  • the light emitted from the light source is diffusely reflected on the inner surface of the dome-shaped reflector (corresponding to the "cover member" of the present invention) to irradiate the work, and the ceiling portion of the dome-shaped reflector is provided.
  • the work is imaged by the imaging means through the photographing window provided in the above, and the image of the work is acquired. Then, the work is inspected based on the image. Further, as a device for imaging a work by dome illumination, for example, there is one described in Patent Document 2.
  • a plurality of light emitting elements are dispersedly arranged on a dome having a dome-shaped inner peripheral surface facing the work (corresponding to the "cover member" of the present invention), and the work is illuminated from various directions.
  • the imaging means images the work through the observation window provided on the ceiling of the dome to acquire the image.
  • the work is imaged by dome illumination, but depending on the type of work, it is possible to image while illuminating only a part of a plurality of light emitting elements, for example, the oblique side of the work. It may be preferable. Further, in order to sequentially image different types of workpieces, it is desirable to appropriately switch the illumination for each workpiece, but the conventional dome illumination has not been able to cope with this appropriately.
  • the present invention has been made in view of the above problems, and an imaging device capable of satisfactorily imaging the work while appropriately illuminating a wide variety of workpieces, and a workpiece based on an image acquired by the imaging apparatus.
  • An object of the present invention is to provide an inspection device and an inspection method capable of inspecting with high accuracy.
  • a first aspect of the present invention is an imaging device, which comprises a work holding portion for holding a work, a cover member having a dome-shaped inner peripheral surface facing the work held by the work holding portion, and an inner peripheral surface. It has a plurality of light emitting elements that are arranged and irradiate illumination light from different irradiation directions, and an illumination unit that illuminates the work held by the work holding unit with the illumination light, and an imaged area of the work that is illuminated by the illumination unit. It is characterized by including an imaging unit that captures an image and a lighting control unit that selectively switches a light emitting element that irradiates the illumination light to control the illumination of the imaged region.
  • a second aspect of the present invention is an inspection device, which is based on the image pickup device and a work determination image obtained by an imaging unit imaging an imaged region with a plurality of light emitting elements lit. Selected by a work determination unit that determines the type of work held in the work holding unit, a selection unit that selects a light emitting element that irradiates illumination light according to the type of work determined by the work determination unit, and a selection unit.
  • the imaging unit includes a work inspection unit that inspects the work held by the work holding unit based on the work inspection image obtained by imaging the imaged region with only the light emitting element lit. It is supposed to be.
  • a third aspect of the present invention is an inspection method for inspecting a work held in a work holding portion based on an image captured by the image pickup apparatus, wherein all of a plurality of light emitting elements are inspected.
  • a determination process in which the imaged area is imaged by the imaging unit in the lit state to acquire a work determination image, and the type of work held in the work holding unit is determined based on the work determination image, and the type of work.
  • a light emitting element to irradiate the illumination light is selected according to the above conditions, and the imaged area is imaged by the imaging unit with only the selected light emitting element turned on to acquire a work inspection image, and the work inspection image is obtained based on the work inspection image. It is characterized by including an inspection process for inspecting the work held in the work holding portion.
  • a plurality of light emitting elements are arranged on the inner peripheral surface of the cover member, and it is possible to irradiate illumination light from different irradiation directions. Then, among the plurality of light emitting elements, the one that irradiates the illumination light is selectively switched. Therefore, it is possible to take a good image while appropriately illuminating the work according to the type of work held in the work holding portion.
  • the image of the work is acquired by the imaging device while appropriately illuminating the work in this way, the work can be inspected with high accuracy based on the image.
  • the plurality of components of each aspect of the present invention described above are not all essential, and may be used to solve some or all of the above-mentioned problems, or part or all of the effects described herein.
  • the technical features included in the above-mentioned aspect of the present invention it is also possible to combine some or all with some or all of the technical features contained in the other aspects of the invention described above to form an independent form of the invention.
  • FIG. 1 is a diagram showing an overall configuration of an inspection device equipped with the first embodiment of the imaging device according to the present invention.
  • FIG. 2 is a view of the cover member provided in the image pickup apparatus as viewed from above.
  • 3 and 4 are diagrams schematically showing a state in which the camera and the light emitting element are attached to the cover member.
  • FIG. 5 is a diagram schematically showing a division mode of the light emitting element.
  • FIG. 6 is a diagram schematically showing various information stored in the storage unit.
  • the inspection device 1 controls each part of the image pickup device 2 and the image pickup device 2 that images the work W having a shape that is rotationally symmetric about the axis of rotational symmetry (reference numerals AXw in FIGS.
  • the image pickup device 2 controls the image pickup device 2. It is provided with a control device 3 that inspects the work W based on the acquired image of the work W.
  • a control device 3 that inspects the work W based on the acquired image of the work W.
  • the XYZ right-angled coordinate axes are shown in FIG. That is, the X direction for moving the work W in the horizontal direction, the horizontal direction Y orthogonal to the X direction, and the vertical direction Z are shown.
  • the image pickup device 2 includes an XY manual stage 21, a stage drive mechanism 22, a cover member 23, an image pickup section 24, and an illumination section (reference numeral 25 in FIGS. 3 and 4).
  • the XY manual stage 21 is configured so that the work W can be held on the upper surface 21a. Further, the XY manual stage 21 can be moved in the X direction and the Y direction according to the manual operation of the operator. Therefore, by moving the XY manual stage 21 in the X and Y directions, the relative position of the work W with respect to the rotation axis AXr (FIG. 2) when the XY manual stage 21 is rotated by the stage drive mechanism 22 is adjusted. Can be done. That is, it is possible to suppress the eccentricity by matching the rotation axis AXr and the rotation symmetry axis AXw by the position adjustment.
  • the stage drive mechanism 22 has a Z-axis drive unit 221 that moves the XY manual stage 21 up and down in the Z direction, an XY-axis drive unit 222 that moves the XY manual stage 21 in the X and Y directions, and the Z direction in order from the bottom. It has an R-axis drive unit 223 that rotates in the R direction around the facing rotation shaft AXr. Therefore, the work W held by the XY manual stage 21 is positioned in the Z direction by operating the Z-axis drive unit 221 in response to an operation command from the drive control unit 34 of the control device 3. Further, by operating the XY axis drive unit 222 in response to the above operation command, as shown in FIG.
  • the position where the work image is taken below the cover member 23 (hereinafter referred to as “imaging position”) and the cover member 23 are separated from each other.
  • the XY manual stage 21 is moved to and from the work delivery position (not shown). Further, by operating the R-axis drive unit 223 in response to the operation command, the XY manual stage 21 and the work W after the eccentricity adjustment are integrally rotated around the rotation shaft AXr at least once.
  • the cover member 23 has a concave inner peripheral surface 23a. Then, the cover member 23 is manually positioned at the imaging position with the central axis (not shown) of the cover member 23 substantially aligned with the rotation axis AXr of the R-axis drive unit 223 and the inner peripheral surface 23a facing downward. It is fixedly arranged vertically above the stage 21. That is, the inner peripheral surface 23a of the cover member 23 faces the work W positioned at the imaging position, and is a dome that covers the work W from above. Further, the cover member 23 is provided with seven through holes 23U, 23La, 23Ca, 23Ra, 23Lb, 23Cb, 23Rb penetrating the inner peripheral surface 23a and the outer peripheral surface 23b.
  • the through hole 23U is provided at an upper position of the XY manual stage 21.
  • the through hole 23U is arranged slightly deviated from the rotation axis AXr in the (+ X) direction.
  • the through hole 23Ca is provided at an angle of 45 ° when viewed from the XY manual stage 21, and the through hole 23Cb is XY manual. It is provided laterally when viewed from the stage 21. Further, as shown in FIG.
  • through holes 23La and 23Lb are provided at positions rotated about 75 ° clockwise from the through holes 23Ca and 23Cb around the XY manual stage 21, respectively.
  • the through holes 23Ra and 23Rb are provided at positions rotated by about 75 ° counterclockwise from the through holes 23Ca and 23Cb, respectively.
  • the imaging unit 24 is composed of seven cameras CU, CLa, CCa, CRa, CLb, CCb, and CRb.
  • the camera CU is arranged in the through hole 23U so that the imaged region Wa of the work W positioned at the imaging position can be imaged from above.
  • the camera CCa is arranged in the through hole 23Ca so that the imaged region Wa can be imaged from the imaging direction (hereinafter referred to as "center oblique direction") of 45 ° with respect to the XY plane in the X direction.
  • the camera CLa is arranged in the through hole 23La so that the imaged region Wa can be imaged from the direction rotated by 75 ° clockwise from the X direction and from the imaging direction of 45 ° with respect to the XY plane (hereinafter referred to as "diagonal left direction”).
  • the camera CRa is arranged in the through hole 23Ra so that the imaged region Wa can be imaged from the direction rotated by 75 ° counterclockwise from the X direction and from the imaging direction of 45 ° with respect to the XY plane (hereinafter referred to as "diagonal right direction"). It is installed.
  • the camera CCb is arranged in the through hole 23Cb so that the imaged region Wa can be imaged from the lateral direction (hereinafter referred to as "center lateral direction") parallel to the X direction.
  • the camera CLb is arranged in the through hole 23Lb so that the imaged region Wa can be imaged from the lateral direction (hereinafter referred to as “left lateral direction”) rotated by 75 ° clockwise from the X direction.
  • the camera CRb is arranged in the through hole 23Rb so that the imaged region Wa can be imaged from the lateral direction (hereinafter referred to as “right lateral direction”) rotated by 75 ° counterclockwise from the X direction.
  • the imaged region Wa of the work W is imaged by the image pickup unit 24 from seven different imaging directions for one rotation of the work.
  • the image data is stored in the storage unit 33 of the control device 3.
  • the images for one rotation of the work acquired by the cameras CU, CLa, CCa, CRa, CLb, CCb, and CRb are taken as "image GU", "image GLa”, “image GCa”, “image GRa”, and “image GLb”, respectively.
  • a plurality of triangular or trapezoidal printed circuit boards are spread on the inner peripheral surface 23a of the cover member 23.
  • the inner peripheral surface 23a is divided into six arrangement regions AC +, AC ⁇ , AL +, AL ⁇ , AR +, and AR ⁇ .
  • the arrangement area AC + one or a plurality of printed circuit boards are spread.
  • the printed circuit board is provided with through holes of the same size (not shown) facing the through holes 23U, 23Ca, and 23Cb. Further, except for these through holes, the printed circuit board is provided with a plurality of through holes.
  • each light emitting element 251 the lead of the light emitting element 251 is inserted into the through hole with the light emitting surface facing the work W positioned at the imaging position, and the light emitting element 251 is mounted on the land of the printed circuit board.
  • a plurality of light emitting elements 251 are dispersedly arranged in the arrangement region AC + of the inner peripheral surface 23a, and each light emitting element 251 emits light in response to a lighting command from the lighting control unit 35 of the control device 3.
  • the work W is irradiated with illumination light from various illumination directions from the (+ X) direction side.
  • one or a plurality of printed circuit boards are spread in the arrangement area AC-.
  • a plurality of light emitting elements 251 are also dispersedly arranged in the arrangement region AC- on the inner peripheral surface 23a. Then, each light emitting element 251 emits light in response to a lighting command from the lighting control unit 35 of the control device 3, so that the work W is irradiated with illumination light from various lighting directions from the (-X) direction side.
  • each light emitting element 251 emits light in response to a lighting command from the illumination control unit 35 of the control device 3, similarly to the above arrangement areas AC + and AC-.
  • the work W is irradiated with illumination light from various illumination directions. Therefore, the work W held in the XY manual stage 21 by giving a lighting command to the entire arrangement area AC +, AC-, AL +, AL-, AR +, AR- is a dome as in the invention described in Patent Document 2. Can be illuminated.
  • the work W is set to (+ X) by giving a lighting command only to a part of the arrangement areas, for example, the light emitting elements 251 of the arrangement areas AC + and AC- as shown in the "light emission pattern" in FIGS. 3 and 6. It can only be illuminated from the direction and the (-X) direction. That is, in the present embodiment, the work W can be selectively imaged in various lighting modes by selecting the pattern to emit light.
  • the light emitting element 251 an LED or the like can be used.
  • the control device 3 has an arithmetic processing unit 31, an image processing unit 32, a storage unit 33, a drive control unit 34, and a lighting control unit 35.
  • the storage unit 33 is composed of a storage medium such as a hard disk drive, and not only temporarily stores the image acquired by imaging the work W to be inspected as described above, but also stores the work determination reference image.
  • the reference image for work determination is each camera CU, CLa, CCa, in a so-called dome illumination state in which the light emitting elements 251 of the entire arrangement area AC +, AC-, AL +, AL-, AR +, and AR- are turned on.
  • a work determination reference image is acquired for each type of work W (WK1 or the like in FIG. 6) and stored in the storage unit 33. Therefore, it is possible to determine the type of work W by referring to the work determination reference image. Further, in the present embodiment, as shown in FIG. 6, a light emitting pattern suitable for inspecting the work W and a camera pattern are associated with each type of the work W and stored in the storage unit 33 or the like.
  • the image processing unit 32 reads the image data acquired by the image pickup unit 24 from the storage unit 33 while the XY manual stage 21 holding the work W is rotated at least once around the rotation axis, and is the subject to be inspected.
  • An image of the imaging area Wa that is, an image for workpiece inspection is created.
  • the arithmetic processing unit 31 appropriately reads the inspection program stored in the storage unit 33 in advance and develops it in the RAM. Then, the arithmetic processing unit 31 performs a work determination step of determining the type of the work W according to the inspection program, a selection process of selecting a light emission pattern and a camera pattern based on the determination result, and a work inspection under the selected conditions. Perform the work inspection process.
  • the arithmetic processing unit 31 functions as a "work determination unit", a "selection unit", and a "work inspection unit” of the present invention.
  • FIG. 7 is a flowchart showing the inspection operation of the workpiece by the inspection device shown in FIG.
  • this inspection device 1 in which a reference image for work determination, a light emission pattern suitable for inspection of the work W, and a camera pattern are associated with each type of work W (hereinafter, “Work-related information”) is stored in the storage unit 33.
  • Work-related information information in which a reference image for work determination, a light emission pattern suitable for inspection of the work W, and a camera pattern are associated with each type of work W (hereinafter, “Work-related information”) is stored in the storage unit 33.
  • a reference information input process may be executed.
  • a new type of non-defective work is set on the XY manual stage 21, and the light emitting elements 251 of the entire arrangement area AC +, AC-, AL +, AL-, AR +, and AR- are turned on while each camera CU, CLa, CCa, Images for one rotation are acquired by CRa, CLb, CCb, and CRb, and stored in the storage unit 33 as a reference image for work determination. Further, the operator sets the lighting pattern of the light emitting element 251 suitable for the inspection of the work W and the combination of the inspection cameras (camera pattern) to be used for the inspection of the work W through the operation panel (not shown). Is stored in the storage unit 33 in association with the type of. In the following, the inspection method will be described on the premise that the work-related information of the work W to be inspected is already stored in the storage unit 33.
  • An uninspected work W is placed on the upper surface 21a of the XY manual stage 21 waiting at a work delivery position away from the imaging position (FIG. 1) in the X direction by a transfer robot or an operator (not shown).
  • the drive control unit 34 of the control device 3 drives the stage drive mechanism 22 to position the work W at the imaging position (step S1).
  • the rotation symmetry axis AXw (FIGS. 3 and 4) of the work W with respect to the rotation axis AXr is eccentric
  • the operator performs eccentricity adjustment. That is, the operator moves the XY manual stage 21 in the X and Y directions to match the rotation axis AXr with the rotation symmetry axis AXw.
  • This eccentricity adjustment process may be performed by temporarily suspending the stage movement during the positioning of the work W to the imaging position, or may be performed after the positioning is completed.
  • the drive control unit 34 controls the R axis drive unit 223 to manually adjust the eccentricity of the XY.
  • the stage 21 and the work W are integrally rotated around the rotation axis AXr (step S2).
  • the work determination step (step S3), the selection step (step S4), and the work inspection step (step S5) are executed in this order.
  • the illumination control unit 35 lights all the light emitting elements 251 to illuminate the work W from various illumination directions (step S3-1: dome illumination). Then, the dome-lit work W is imaged by all the cameras CU, CLa, CCa, CRa, CLb, CCb, and CRb (step S3-2). These imagings are continued while the determination of "NO" in step S3-3, that is, until the work W makes at least one rotation.
  • the work W is continuously or intermittently imaged by each camera CU, CLa, CCa, CRa, CLb, CCb, CRb from seven different imaging directions, and the image GU for one rotation of the work in the imaged region Wa, GLa, GCa, GRa, GLb, GCb, and GRb are stored in the storage unit 33 as work determination images.
  • the arithmetic processing unit 31 compares the work determination image with the work determination reference image (FIG. 6), so that the work W on the XY manual stage 21 (Step S3-4).
  • the arithmetic processing unit 31 determines the light emission pattern and the camera pattern corresponding to the types determined in step S3-4 from the work-related information (FIG. 6) (step). S4). For example, when it is determined that the work W is "type WK1" as shown in FIG. 6, only the light emitting pattern corresponding to the type WK1, that is, the light emitting element 251 provided in the arrangement areas AC + and AC- is selectively emitted. The pattern to be selected is selected. Further, a camera pattern corresponding to the type WK1, that is, a pattern in which only the cameras CU, CCa, and CCb of the imaging unit 24 are selected as inspection cameras is selected.
  • the light emitting elements arranged in the area with dots among the arranged areas AC +, AC-, AL +, AL-, AR +, and AR- It is schematically shown that the 251 is turned off, and it is clearly shown that the light emitting element 251 arranged in the area not marked with dots is made to emit light.
  • the hatched cameras CLa, CLb, CRa, and CRb are non-inspection cameras, and the non-hatched cameras CU, CCa, and CCb are inspection cameras. It is clearly stated that there is.
  • the arithmetic processing unit 31 is arranged in the non-selected light emitting elements 251 (for example, in the case of the type WK1, in the arrangement areas AL +, AL-, AR +, AR-) based on the light emission pattern determined in step S4.
  • the light emitting element 251) is turned off (step S5-1). As a result, only the light emitting element 251 suitable for the inspection of the work W is selectively lit to illuminate the work W on the XY manual stage 21.
  • the work W is imaged by the inspection camera (step S5-2).
  • the imaging of the work W by the inspection camera is continued while the image of the work W is determined as “NO” in step S5-3, that is, until the work W makes at least one rotation.
  • the work W is continuously or intermittently imaged by the cameras CU, CCa, and CCb from the upward direction, the central oblique direction, and the central lateral direction, and the images GU and GCa for one rotation of the work in the imaged region Wa.
  • GCb is stored in the storage unit 33.
  • step S5-3 the image processing unit 32 reads the image data from the storage unit 33 and creates an image for work inspection. Further, the arithmetic processing unit 31 inspects the work W based on the work inspection image (step S5-4).
  • step S5-4 the lighting control unit 35 turns off the light emitting element 251 that was lit during the work inspection process to stop the work illumination, and the drive control unit 34 has the R axis.
  • the work rotation by the drive unit 223 is stopped (step S6).
  • the drive control unit 34 drives the stage drive mechanism 22 to move the XY manual stage 21 from the imaging position to the work delivery position (step S7).
  • the work W that has been imaged from the XY manual stage 21 positioned at the work delivery position is carried out from the inspection device 1 by a transfer robot, an operator, or the like.
  • a plurality of light emitting elements 251 are arranged on the inner peripheral surface 23a of the cover member 23, and the work W can be irradiated with illumination light from different irradiation directions. Moreover, switching between lighting and extinguishing of each light emitting element 251 can be executed for each arrangement area. Then, all or a part of the light emitting element 251 is turned on according to the type of the work W held on the XY manual stage 21. In this way, it is possible to illuminate the work W in an illumination mode corresponding to the type of the work W.
  • the imaging unit 24 includes a plurality of cameras CU, CLa, CCa, CRa, CLb, CCb, and CRb, an inspection camera suitable for the work inspection is selected from them, and only the image captured by the inspection camera is selected. It is used for the work inspection image. Therefore, the work can be inspected with high accuracy.
  • the work determination image obtained by imaging the imaged region Wa with all the cameras CU, CLa, CCa, CRa, CLb, CCb, and CRb with all the light emitting elements 251 turned on in advance is used as the work determination reference image (work determination reference image).
  • the type of work W is obtained in comparison with FIG. 6). Therefore, even if the type of the work W transported to the XY manual stage 21 is unknown, the type is automatically determined, and the work W is highly accurate under the corresponding inspection conditions (light emission pattern and camera pattern). Can be inspected at.
  • the XY manual stage 21 corresponds to an example of the "work holding unit” of the present invention.
  • one of the seven through holes 23U, 23La, 23Ca, 23Ra, 23Lb, 23Cb, and 23Rb corresponds to the "first through hole” of the present invention, and one of the remaining one corresponds to the "second through hole” of the present invention. It corresponds to a "hole”.
  • the camera inserted into the first through hole corresponds to an example of the "first camera” of the present invention
  • the second through hole The camera inserted in the above corresponds to an example of the "second camera” of the present invention.
  • the R-axis drive unit 223 corresponds to an example of the "rotational drive unit” of the present invention.
  • the light emission pattern and the camera pattern shown in FIG. 6 correspond to an example of the "light emission selection information" and the "camera selection information” of the present invention, respectively.
  • the illumination light from each light emitting element 251 is directly applied to the work W to illuminate the work.
  • the light is diffused toward the light emitting surface (not shown) of the light emitting element 251.
  • the member 252 may be arranged (second embodiment).
  • the diffusing member 252 is arranged between the light emitting element 251 and the work W held on the XY manual stage 21 to diffuse the illumination light from the light emitting element 251. That is, diffused light is applied to the work W as illumination light. Therefore, the light intensity of the illumination light applied to the work W can be made uniform, and the inspection accuracy can be improved.
  • the inner peripheral surface 23a is divided into six arrangement regions AC +, AC-, AL +, AL-, AR +, and AR-, and a plurality of light emitting elements 251 are distributed and arranged among them.
  • the number of arrangement areas may be 2 or more, and the shape of the arrangement areas is also arbitrary. Further, the number and arrangement of the light emitting elements 251 arranged in each arrangement region are also arbitrary.
  • the number of cameras constituting the imaging unit 24 is not limited to seven.
  • the present invention can also be applied to an apparatus in which two or more cameras are provided and configured to image the imaged region Wa of the work W from different directions.
  • the present invention can be applied to general imaging technology for imaging a wide variety of workpieces, and general inspection technology for acquiring and inspecting an image of a workpiece using the imaging technology.
  • Rotational symmetry axis CU CCa, CCb, CLa, CLb, CRa, CRb ... Camera GU , GLa, GCa, GRa, GLb, GCb, GRb ... Image W ... Work Wa ... Imaged area

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Abstract

La présente invention comprend : une unité de maintien de pièce ouvrée qui maintient une pièce ouvrée ; un élément de couvercle ayant une surface périphérique interne en forme de tambour qui fait face à la ouvrée pièce maintenue par l'unité de maintien de pièce ouvrée ; une unité d'éclairage ayant une pluralité d'éléments émetteurs de lumière qui sont positionnés sur la surface périphérique interne et émettent une lumière d'éclairage à partir d'une pluralité de directions d'émission différentes les unes des autres, l'unité d'éclairage éclairant la pièce ouvrée maintenue par l'unité de maintien de pièce ouvrée en utilisant la lumière d'éclairage ; une unité d'imagerie qui forme une image d'une région de la pièce ouvrée dont une image doit être formée par l'unité d'éclairage ; et une unité de commande d'éclairage qui commute sélectivement les éléments émetteurs de lumière émettant la lumière d'éclairage pour commander l'éclairage de la région dont une image doit être formée.
PCT/JP2020/042788 2020-01-27 2020-11-17 Dispositif d'imagerie, dispositif d'inspection, et procédé d'inspection WO2021152963A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7213506B1 (ja) 2021-10-11 2023-01-27 エバ・ジャパン 株式会社 電池の電解液漏れ検出システム及び電池の電解液漏れ検出方法

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