WO2021143148A1 - 一种多级复眼透镜的制造方法 - Google Patents

一种多级复眼透镜的制造方法 Download PDF

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WO2021143148A1
WO2021143148A1 PCT/CN2020/112203 CN2020112203W WO2021143148A1 WO 2021143148 A1 WO2021143148 A1 WO 2021143148A1 CN 2020112203 W CN2020112203 W CN 2020112203W WO 2021143148 A1 WO2021143148 A1 WO 2021143148A1
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sample
array
minutes
eye lens
micro
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PCT/CN2020/112203
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English (en)
French (fr)
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王文君
梅雪松
李江
潘爱飞
刘斌
崔健磊
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西安交通大学
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Priority to US17/758,304 priority Critical patent/US12105301B2/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0075—Arrays characterized by non-optical structures, e.g. having integrated holding or alignment means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals

Definitions

  • the invention belongs to the technical field of micro-nano manufacturing and processing, and particularly relates to a manufacturing method of a multi-stage fly-eye lens.
  • the compound eyes of insects are composed of numerous small eye structures. There are many hairy structures in the gaps between the small eye structures.
  • the advantage of this structure is that the compound eyes of insects have super hydrophobicity, which greatly enhances the insect’s rain and fog. Survivability in harsh environments such as the sky. In the manufacturing process, the surface of a single microlens array has greater adhesion and poor hydrophobicity, which is quite different from the small eyes of natural insects.
  • the column array can improve the hydrophobicity of the surface, but the stability of the droplets on the surface of the sample is poor, and slight vibration can make the droplets fill the gaps of the microcolumn array, so that the droplets have greater adhesion.
  • the preparation of nanostructures on the surface of the structure can effectively improve the hydrophobicity and the stability of the droplets on the surface, but the presence of nanostructures will affect the light transmittance of the microlens.
  • the purpose of the present invention is to provide a method for manufacturing a multi-stage fly eye lens, which can greatly improve the hydrophobicity of the structure surface and the stability of droplets while reducing the cross-linking of optical signals. It is difficult for the droplets to fill the gaps of the micropillar array; the nanostructure of the microlens gaps can reduce the light permeability and reduce the cross-linking between the optical signals.
  • a manufacturing method of a multi-stage compound eye lens includes the following steps:
  • the present invention can realize the accurate positioning of the microlens array by using the microjet printer, and prepare the microlens array in the gap of the micropillar array; the ZnO seed layer can be covered by the inkjet printing method, except for the position of the microlens. , To achieve full coverage of nanostructures.
  • the micropillar array can effectively improve the hydrophobicity of the surface, but the stability is poor.
  • a slight vibration can make the droplets fill the gaps of the micropillar array, and the nanostructure on the top of the micropillar array can greatly improve the structural stability.
  • the existence of the gap nanostructure of the substrate microlens array can effectively reduce the light transmittance and prevent the mutual influence of the optical signal, especially when the optical signal is strong.
  • FIG. 1 is an electron micrograph of the multi-stage fly-eye lens prepared in Example 1.
  • FIG. 1 is an electron micrograph of the multi-stage fly-eye lens prepared in Example 1.
  • Fig. 2 is a topography diagram of the P1 part in Fig. 1.
  • Fig. 3 is a topography diagram of the P2 part in Fig. 1.
  • Fig. 4 is a topography diagram of the P3 part in Fig. 1.
  • FIG. 5 is an imaging diagram of the multi-stage fly-eye lens prepared in Example 1.
  • Example 6 is an electron micrograph of the multi-stage fly-eye lens prepared in Example 2.
  • FIG. 7 is an electron micrograph of the multi-stage fly-eye lens prepared in Example 3.
  • Example 8 is an electron micrograph of the multi-stage fly-eye lens prepared in Example 4.
  • Embodiment 1 a manufacturing method of a multi-stage fly-eye lens, includes the following steps:
  • sample four Sputter 30nm ZnO on the three surfaces of the sample to obtain sample four, and use a micro-jet printer to print UV curing glue in the gap of the micro-pillar array of sample four, and use the number of droplets to control the microlens morphology, and the droplets fall The number of times is 12, and the fifth sample with a microlens array is obtained;
  • the multi-stage fly eye lens obtained in this embodiment has super hydrophobic characteristics.
  • the droplet contacts the multi-stage fly eye lens, it can be quickly separated from the multi-stage fly eye lens; traditional super hydrophobic
  • the structure will affect the light transmittance.
  • the nano-structure and the micro-pillar array are fabricated in the micro-lens gap, which will not affect the imaging of the fly-eye lens. Refer to FIG. 5. This structure is of great significance to the practical application of the fly-eye lens.
  • Embodiment 2 The number of droplets in step 2) of embodiment 1 is changed to 2, and the other steps are the same, and the structure of the obtained multi-stage fly eye lens is similar to that of embodiment 1, as shown in FIG. 6.
  • Embodiment 3 The number of droplets in step 2) of embodiment 1 is changed to 4, and the other steps are the same, and the structure of the obtained multi-stage fly eye lens is similar to that of embodiment 1, as shown in FIG. 7.
  • Example 4 The number of droplets in step 2) of Example 1 is changed to 8, and the other steps are the same, to obtain a three-level composite structure similar to that of Example 1 as a multi-level fly eye lens, as shown in FIG. 8.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
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Abstract

一种多级复眼透镜的制造方法，先利用光刻方法制备微柱阵列，然后给微柱阵列表面溅射ZnO，利用微喷印机在微柱阵列间隙喷印紫外固化胶，利用液滴滴落次数控制微透镜形貌，得到微透镜阵列；再将六甲基四胺和硝酸锌分别溶于去离子水中，然后将六甲基四胺溶液倒入硝酸锌溶液中得到混合溶液，将微透镜阵列放入混合溶液中，放入水浴锅中水浴；最后取出微透镜阵列用去离子水清洗，烘干得到多级复眼透镜；在减小光信号交联的情况下，可以极大程度提高结构表面疏水性及液滴稳定性；极大提高液滴的稳定性，液滴很难填充到微柱阵列间隙；微透镜间隙的纳米结构可以降低光透性，降低了光信号之间的交联。

Description

一种多级复眼透镜的制造方法 技术领域
本发明属于微纳制造加工技术领域，特别涉及一种多级复眼透镜的制造方法。
背景技术
自然界中昆虫的复眼是由无数小眼结构组成的，小眼结构间隙存在很多绒毛结构，这种结构带来的优势是使得昆虫复眼具有超强的疏水性，极大增强了昆虫在雨天、雾天等恶劣环境下的生存能力。在制造过程中，单一的微透镜阵列表面粘附力较大，疏水性较差，与自然界昆虫小眼差别较大，同时，在较大光通量下，光信号经过透镜后会发生相互干扰；微柱阵列可以提高表面疏水性，但是液滴在样片表面稳定性较差，轻微振动可以使得液滴填充到微柱阵列间隙，使得液滴具有较大的粘附力。在结构表面制备纳米结构可以有效提高疏水性及液滴在表面的稳定性，但是纳米结构的存在又会影响微透镜的光透性。
发明内容
为了克服上述现有技术的缺点，本发明的目的在于提供一种多级复眼透镜的制造方法，在减小光信号交联的情况下，可以极大程度提高结构表面疏水性及液滴稳定性，液滴很难填充到微柱阵列间隙；微透镜间隙的纳米结构可以降低光透性，降低了光信号之间的交联。
为了实现上述目的，本发明采用的技术方案为：
一种多级复眼透镜的制造方法，包括以下步骤：
1)利用光刻方法制备微柱阵列：将光刻胶4620旋涂在玻璃片上，旋涂速度为1500r/s，放在烘台上5min，重复旋涂，获得厚度为22μm的微孔阵列，即样片一；利用PDMS对样片一进行两次翻模后，得到微孔阵列模具，即样片二；将NOA61紫外固化胶浇筑在样片二的PDMS曲面上，压上玻璃基底，然后紫外曝光机曝光100s，脱模制得高度为22μm的微柱阵列，即样片三；
2)给样片三表面溅射30nm的ZnO得到样片四，利用微喷印机在样片四的微柱阵列间隙喷印紫外固化胶，利用液滴滴落次数控制微透镜形貌，液滴滴落次数为2-12，得到具有微透镜阵列的样片五；
3)将7g六甲基四胺和14.87g硝酸锌分别溶于500ml的去离子水中，搅拌20分钟，然后将六甲基四胺溶液倒入硝酸锌溶液中，混合搅拌15分钟得到混合溶液，将样片五放入混合溶液中，放入90℃水浴锅中水浴80分钟，得到样片六；
4)将样片六用去离子水清洗2分钟，放在60℃的烘台上50分钟，得到多级复眼透镜。
本发明的有益效果为：本发明利用微喷印机可以实现微透镜阵列的准确定位，在微柱阵列间隙制备微透镜阵列；利用喷印方法可以将ZnO种子层进行覆盖，除微透镜所在位置，实现了纳米结构的全覆盖。微柱阵列可以有效提高表面疏水性，但是稳定性较差，轻微振动即可使得液滴填充到微柱阵列间隙，微柱阵列顶部的纳米结构可以很大程度提高结构稳定性。同时基底微透镜阵列间隙纳米结构存在可以有效降低光透性，防止光信号的相互影响，特别是在光信号较强情况下。
附图说明
图1为实施例1制备的多级复眼透镜的电镜图。
图2为图1中P1部位的结构形貌图。
图3为图1中P2部位的结构形貌图。
图4为图1中P3部位的结构形貌图。
图5为实施例1制备的多级复眼透镜的成像图。
图6为实施例2制备的多级复眼透镜的电镜图。
图7为实施例3制备的多级复眼透镜的电镜图。
图8为实施例4制备的多级复眼透镜的电镜图。
具体实施方式
下面结合附图和实施例对本发明进一步说明。
实施例1，一种多级复眼透镜的制造方法，包括以下步骤：
1)利用光刻方法制备微柱阵列：将光刻胶4620旋涂在玻璃片上，旋涂速度为1500r/s，放在烘台上5min，重复旋涂，获得厚度约为22μm的微孔阵列，即样片一；利用PDMS对样片一进行两次翻模后，得到微孔阵列模具，即样片二；将NOA61紫外固化胶浇筑在样片二的PDMS曲面上，压上玻璃基底，然后紫外曝光机曝光100s，脱模制得高度约为22μm的微柱阵列，即样片三；
2)将样片三表面溅射30nm的ZnO得到样片四，利用微喷印机在样片四的微柱阵列间隙喷印紫外固化胶，利用液滴滴落次数控制微透镜形貌，液滴滴落次数为12，得到具有微透镜阵列的样片五；
3)将7g六甲基四胺和14.87g硝酸锌分别溶于500ml的去离子水 中，搅拌20分钟，然后将六甲基四胺溶液倒入硝酸锌溶液中，混合搅拌15分钟得到混合溶液，将样片五放入混合溶液中，放入90℃水浴锅中水浴80分钟，得到样片六；
4)将样片六用去离子水清洗2分钟，放在60℃的烘台上50分钟，得到多级复眼透镜。
参照图1、图2、图3、图4，本实施例得到的多级复眼透镜具有超疏水特性，当液滴与多级复眼透镜接触后，可以快速与多级复眼透镜分离；传统超疏水结构都会对光透性产生影响，本方法将纳米结构与微柱阵列制造于微透镜间隙，不会对复眼透镜成像产生影响，参照图5。此种结构对于复眼透镜的实际应用具有重要意义。
实施例2：将实施例1步骤2)中液滴滴次数变为2次，其它步骤相同，得到多级复眼透镜和实施例1的结构类似，如图6所示。
实施例3：将实施例1步骤2)中液滴滴次数变为4次，其它步骤相同，得到多级复眼透镜和实施例1的结构类似，如图7所示。
实施例4：将实施例1步骤2)中液滴滴次数变为8次，其它步骤相同，得到多级复眼透镜和实施例1的结构类似的三级复合结构，如图8所示。

Claims (1)

  1. 一种多级复眼透镜的制造方法，其特征在于，包括以下步骤：
    1)利用光刻方法制备微柱阵列：将光刻胶4620旋涂在玻璃片上，旋涂速度为1500r/s，放在烘台上5min，重复旋涂，获得厚度为22μm的微孔阵列，即样片一；利用PDMS对样片一进行两次翻模后，得到微孔阵列模具，即样片二；将NOA61紫外固化胶浇筑在样片二的PDMS曲面上，压上玻璃基底，然后紫外曝光机曝光100s，脱模制得高度为22μm的微柱阵列，即样片三；
    2)给样片三表面溅射30nm的ZnO得到样片四，利用微喷印机在样片四的微柱阵列间隙喷印紫外固化胶，利用液滴滴落次数控制微透镜形貌，液滴滴落次数为2-12，得到具有微透镜阵列的样片五；
    3)将7g六甲基四胺和14.87g硝酸锌分别溶于500ml的去离子水中，搅拌20分钟，然后将六甲基四胺溶液倒入硝酸锌溶液中，混合搅拌15分钟得到混合溶液，将样片五放入混合溶液中，放入90℃水浴锅中水浴80分钟，得到样片六；
    4)将样片六用去离子水清洗2分钟，放在60℃的烘台上50分钟，得到多级复眼透镜。
PCT/CN2020/112203 2020-01-19 2020-08-28 一种多级复眼透镜的制造方法 WO2021143148A1 (zh)

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CN111060997B (zh) * 2020-01-19 2021-05-07 西安交通大学 一种多级复眼透镜的制造方法
CN113156552A (zh) * 2021-04-22 2021-07-23 西北农林科技大学 一种大视场双焦点复眼透镜的制造方法
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