WO2021117685A1 - 基板洗浄装置、研磨装置、バフ処理装置、基板洗浄方法、基板処理装置、および機械学習器 - Google Patents
基板洗浄装置、研磨装置、バフ処理装置、基板洗浄方法、基板処理装置、および機械学習器 Download PDFInfo
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- WO2021117685A1 WO2021117685A1 PCT/JP2020/045509 JP2020045509W WO2021117685A1 WO 2021117685 A1 WO2021117685 A1 WO 2021117685A1 JP 2020045509 W JP2020045509 W JP 2020045509W WO 2021117685 A1 WO2021117685 A1 WO 2021117685A1
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- substrate
- cleaning
- cleaning tool
- replacement time
- image data
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- B08B1/50—
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- B08B1/52—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/02—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving rotary barrels
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- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
- G01H1/003—Measuring characteristics of vibrations in solids by using direct conduction to the detector of rotating machines
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
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- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
- G05B13/028—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion using expert systems only
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H04N23/60—Control of cameras or camera modules
- H04N23/695—Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects
Definitions
- the present invention relates to a substrate cleaning device and a substrate cleaning method for scrubbing the substrate with a cleaning tool while supplying a cleaning liquid to a substrate such as a semiconductor substrate, a glass substrate, or a liquid crystal panel. Furthermore, the present invention relates to a polishing apparatus for polishing the surface of a substrate. Further, the present invention further polishes the substrate slightly while pressing a contact member having a diameter smaller than that of the substrate against the substrate after the polishing treatment and causing the substrate to move relative to the substrate, and removes and cleans the deposits on the substrate. Buffing equipment to be used. Furthermore, the present invention relates to a substrate processing apparatus equipped with at least one of a substrate cleaning apparatus, a polishing apparatus, and a buffing apparatus. Furthermore, the present invention relates to a machine learning device that learns at least one of a cleaning tool replacement time, a polishing pad replacement time, and a buff member replacement time.
- a cleaning tool for example, a cleaning tool (for example, pure water) is supplied to the surface of the substrate while supplying a cleaning liquid (for example, a chemical solution or pure water) to the surface of the substrate.
- a scrub cleaning method of rubbing a roll sponge, a pen sponge, or a cleaning brush is used (see, for example, Patent Document 1 and Patent Document 2). Scrub cleaning is performed by sliding the cleaning tool against the substrate while supplying the cleaning liquid to the substrate in a state where at least one of the substrate and the cleaning tool is rotated.
- polishing is performed by supplying pure water (cleaning liquid) to the surface of the wafer and sliding a rotating roll sponge (cleaning tool) on the surface of the rotating wafer. Particles (pollutants) such as abrasive grains contained in the debris and the polishing liquid are removed from the surface of the wafer. The particles removed from the surface of the substrate are either accumulated in the cleaning tool or discharged from the substrate together with the cleaning liquid.
- cleaning liquid pure water
- cleaning tool rotating roll sponge
- Scrub cleaning has the advantage of high particle removal rate, that is, cleaning efficiency, because the cleaning tool is brought into direct contact with the substrate for cleaning.
- cleaning efficiency because the cleaning tool is brought into direct contact with the substrate for cleaning.
- the cleaning tool deteriorates. Deterioration of the cleaning tool leads to a decrease in the cleaning efficiency of the substrate.
- abrasion powder may be generated from the cleaning tool during scrubbing of the substrate and adhere to the surface of the substrate. In this case, the substrate is contaminated by the abrasion powder generated from the cleaning tool.
- the particles once accumulated in the cleaning tool may separate from the cleaning tool during scrubbing of the substrate and reattach to the surface of the substrate. That is, in scrub cleaning, the particles accumulated in the cleaning tool may cause back-contamination of the substrate. In order to suppress such substrate contamination and deterioration of cleaning efficiency, it is necessary to replace the cleaning tool with a new cleaning tool at an appropriate timing.
- the replacement time of the cleaning tool is determined in advance mainly based on the quality control (QC: Quality Control) and / or the empirical rule of the worker.
- the main reasons for this are that the cleaning tools are replaced at different times depending on the substrate cleaning process and cleaning recipe, and that the surface properties of the cleaning tools actually used for scrubbing are measured in the substrate cleaning equipment. Was difficult. That is, in order to accurately determine the appropriate replacement time for the cleaning tool, it is necessary to observe and / or measure the surface properties of the cleaning tool that is actually scrubbing according to various cleaning processes and cleaning recipes. .. However, it has been difficult to determine an appropriate replacement time because a specific method for observing and / or measuring the surface texture of the cleaning tool in the substrate processing apparatus has not been established.
- the usage time of the cleaning tool may exceed the appropriate time when the cleaning tool should be replaced.
- the cleaning tool since the substrate is scrub-cleaned by the cleaning tool that has already reached the replacement time, back-contamination of the substrate may occur and the yield may decrease.
- the cleaning tool may be replaced even though the cleaning tool is still available. In this case, the running cost of the substrate cleaning device increases. Further, if the substrate cleaning apparatus is stopped in order to replace the cleaning tool, the throughput of the substrate cleaning apparatus may decrease and the manufacturing cost of the substrate may increase.
- a CMP (Chemical Mechanical Polishing) treatment is known as an example of a substrate polishing treatment performed before scrubbing the substrate.
- the substrate is pressed against a polishing pad on a rotating polishing table to polish the surface of the substrate.
- the polishing pad also deteriorates, so it is necessary to replace the polishing pad with a new polishing pad at an appropriate timing.
- Ensuring appropriate polishing performance is in a trade-off relationship with ensuring high throughput. That is, if the polishing pad is frequently replaced in order to ensure appropriate polishing performance, the throughput will decrease. Therefore, it is required to replace the polishing pad at a timing that can achieve both appropriate polishing performance and high throughput.
- a contact member having a diameter smaller than that of the substrate is pressed against the substrate to cause relative movement, and the substrate is slightly additionally polished, and the deposits on the substrate are removed and cleaned. Buffing may be performed.
- the surface of the substrate is slightly treated or the surface of the substrate is processed by pressing a contact member called a buff pad held by the buff head against the substrate held by the rotating buff table. Removes foreign matter adhering to the table.
- the buff pad As the buffing process is repeated, the buff pad also deteriorates, so it is necessary to replace the buff pad with a new buff pad at an appropriate time. Ensuring appropriate buff performance is also in a trade-off relationship with ensuring high throughput. That is, if the buff pads are frequently replaced in order to ensure appropriate buff performance, the throughput will decrease. Therefore, it is required to replace the buff pad at a timing that can realize both appropriate buff performance and high throughput.
- Some conventional CMP devices are composed of a polishing unit that uses a polishing pad, a buff unit that uses a buff pad, and a cleaning unit that uses a cleaning tool. In such a CMP apparatus, if the entire CMP apparatus is stopped only for replacing any one of the polishing pad, the buff pad, and the cleaning tool, the throughput of the entire CMP apparatus is lowered.
- a substrate cleaning apparatus a polishing apparatus, a buffing apparatus, a substrate processing apparatus, a machine learning device used for any of these, and a substrate cleaning method, which are improved in terms of both performance and throughput.
- the purpose is to provide.
- One aspect of the present invention is to provide a substrate cleaning apparatus and a substrate cleaning method capable of determining an appropriate replacement time of a cleaning tool.
- one aspect of the present invention is to provide a polishing apparatus capable of determining an appropriate replacement time of the polishing pad.
- a substrate holding portion that holds the substrate, a cleaning tool that cleans the substrate by sliding contact with the substrate in the presence of a cleaning liquid, and surface data representing the surface properties of the cleaning tool are acquired in a non-contact manner.
- the surface texture measuring device includes a control unit connected to the surface texture measuring device and determining a replacement time of the cleaning tool based on the surface data, and the surface texture measuring device includes a predetermined number of substrates. Each time scrubbing is performed, the surface data of the cleaning tool is acquired at at least two measurement points of the cleaning tool, and the control unit determines the replacement time of the cleaning tool based on the difference of the acquired surface data.
- a substrate cleaning apparatus is provided, which comprises determining.
- the control unit stores in advance a predetermined threshold value for the difference in the surface data, and when the difference reaches the predetermined threshold value, determines that the cleaning tool has reached the replacement time. ..
- the surface texture measuring device includes an imaging device that acquires the surface data and a camera moving mechanism that moves the imaging device.
- the cleaning tool is further provided with a cleaning tool moving unit that moves the cleaning tool between a cleaning position where the cleaning tool contacts the surface of the substrate and a standby position where the cleaning tool moves away from the surface of the substrate. , The surface property measuring device acquires the surface data of the cleaning tool moved to the standby position.
- control unit is configured to perform a break-in confirmation operation after replacing the cleaning tool with a new cleaning tool, and the break-in confirmation operation cleans a predetermined number of dummy substrates with the new cleaning tool.
- the surface texture measuring device is used to acquire surface data of the new cleaning tool at at least two measurement points of the new cleaning tool, and based on the difference in the acquired surface data, the surface data of the new cleaning tool is acquired.
- a substrate cleaning apparatus is provided that determines the completion of break-in of the new cleaning tool.
- the surface data is any one of polarized image data, infrared absorption spectrum spectrum pattern, distorted image data, three-dimensional image data, spectral image data, hyperspectral image data, and polarized image data.
- the surface data is a spectral intensity graph converted from the hyperspectral image data, and the cleaning tool is replaced when the difference in spectral intensity at a predetermined wavelength becomes larger than a predetermined threshold. Decide that the time has come. In one aspect, it is further determined that the cleaning tool has reached the replacement time when the amount of change in the slope of the tangent line at the inflection point of the spectral intensity graph becomes equal to or less than a predetermined threshold value.
- a substrate holding portion that holds the substrate, a cleaning tool that cleans the substrate by sliding contact with the substrate in the presence of a cleaning liquid, and surface data representing the surface properties of the cleaning tool are acquired in a non-contact manner.
- the surface texture measuring device includes a control unit connected to the surface texture measuring device and determining a replacement time of the cleaning tool based on the surface data, and the surface texture measuring device includes hyperspectral image data.
- the control unit scrubs and cleans a predetermined number of substrates, and the cleaning tool displays a spectral intensity graph converted from the hyperspectral image data at one measurement point of the cleaning tool.
- the cleaning tool When the difference in the spectral intensity at the predetermined wavelength at the predetermined measurement point becomes smaller than the predetermined threshold value, which is acquired as the surface data of the above and obtained every time the predetermined number of substrates are scrubbed, the cleaning tool is used.
- a substrate cleaning device is provided that determines that the replacement time has been reached.
- the substrate is cleaned by sliding a cleaning tool against the substrate in the presence of the cleaning liquid while supplying the cleaning liquid to the substrate, and every time a predetermined number of the substrates are scrubbed, the cleaning is performed.
- a substrate cleaning method characterized in that surface data of the cleaning tool is acquired at at least two measurement points of the tool and the replacement time of the cleaning tool is determined based on the difference of the acquired surface data. ..
- the difference in the surface data is compared with a predetermined threshold, and when the difference reaches the predetermined threshold, it is determined that the cleaning tool has reached the replacement time.
- the surface data is acquired by an imaging device that is moved by a camera moving mechanism. In one aspect, the surface data is acquired at a standby position where the cleaning tool is away from the surface of the substrate.
- a break-in confirmation operation is executed after the cleaning tool is replaced with a new cleaning tool, and the break-in confirmation operation performs the new cleaning every time a predetermined number of dummy substrates are scrubbed with the new cleaning tool.
- a substrate cleaning method comprising acquiring surface data of the new cleaning tool at at least two measurement points of the tool and determining the completion of break-in of the new cleaning tool based on the difference of the acquired surface data.
- the step of acquiring the surface data is a polarized image data of the cleaning tool at the measurement point, a spectral pattern of an infrared absorption spectrum, a distorted image data, a three-dimensional image data, a spectral image data, a hyperspectral.
- the step of acquiring the surface data is a step of acquiring a spectral intensity graph converted from the hyperspectral image data. When the difference in spectral intensity at a predetermined wavelength becomes larger than a predetermined threshold value, it is determined that the cleaning tool has reached the replacement time.
- the substrate is cleaned by sliding a cleaning tool against the substrate in the presence of the cleaning liquid while supplying the cleaning liquid to the substrate, and every time a predetermined number of the substrates are scrubbed, the cleaning is performed.
- the step of acquiring the surface data includes a step of acquiring the surface data of the cleaning tool at one measurement point of the tool and determining the replacement time of the cleaning tool based on the difference of the acquired surface data.
- the step of acquiring a spectral intensity graph converted from the hyperspectral image data acquired by the image pickup apparatus, and the step of determining the replacement time of the cleaning tool is obtained every time a predetermined number of substrates are scrubbed.
- a substrate cleaning method characterized in that it is a step of determining that the cleaning tool has reached the replacement time when the difference in spectral intensity at a predetermined wavelength at a measurement point becomes smaller than a predetermined threshold value. Will be done.
- a polishing table that supports the polishing pad, a polishing head that presses the substrate against the polishing pad, a surface texture measuring device that non-contactly acquires surface data representing the surface texture of the polishing pad, and the surface texture.
- the surface texture measuring device is an imaging device capable of acquiring hyperspectral image data, which is connected to a measuring device and includes a control unit for determining a replacement time of the polishing pad based on the surface data.
- the surface texture measuring device acquires surface data of the polishing pad at at least two measurement points of the polishing pad every time a predetermined number of substrates are polished, and the surface data is a hyperspectral image acquired by the imaging device.
- a polishing apparatus characterized by the above is provided.
- a polishing table that supports the polishing pad, a polishing head that presses the substrate against the polishing pad, a surface texture measuring device that non-contactly acquires surface data representing the surface texture of the polishing pad, and the surface texture.
- the surface texture measuring device is an imaging device capable of acquiring hyperspectral image data, which is connected to a measuring device and includes a control unit for determining a replacement time of the polishing pad based on the surface data. Each time the control unit polishes a predetermined number of substrates, the control unit acquires a spectral intensity graph converted from the hyperspectral image data at one measurement point of the polishing pad as surface data of the polishing pad, and acquires a predetermined number of substrates.
- polishing equipment is provided.
- a buff table for holding the substrate, a buff member having a diameter smaller than that of the substrate and performing a finishing process in contact with the substrate, a buff head for holding the buff member, and surface properties of the buff member are formed.
- the surface texture measuring device is provided with a surface texture measuring device that acquires the surface data to be represented in a non-contact manner, and a control unit that is connected to the surface texture measuring device and determines the replacement time of the buff head based on the surface data.
- the measuring device is an imaging device capable of acquiring hyperspectral image data, and the surface texture measuring device is a buff member at at least two measurement points of the buff member each time a predetermined number of substrates are finished.
- the surface data is acquired, and the surface data is a spectrum intensity graph converted from the hyperspectral image data acquired by the imaging device, and the control unit has a difference in the spectral intensity at a predetermined wavelength from a predetermined threshold value.
- a buffing apparatus characterized in that it is determined that the replacement time has been reached when the buff member becomes smaller.
- a buff table for holding the substrate, a buff member having a diameter smaller than that of the substrate and performing a finishing process in contact with the substrate, a buff head for holding the buff member, and surface properties of the buff member are formed.
- the surface property measuring device is provided with a surface property measuring device for non-contactly acquiring the surface data to be represented, and a control unit connected to the surface property measuring device and determining a replacement time of the buff head based on the surface data.
- the measuring device is an imaging device capable of acquiring hyperspectral image data, and the control unit is converted from the hyperspectral image data at one measurement point of the buff member each time a predetermined number of substrates are finished.
- the spectral intensity graph was acquired as the surface data of the buff member, and the difference in the spectral intensity at the predetermined wavelength at the measurement point, which was obtained every time the predetermined number of substrates were polished, became smaller than the predetermined threshold value.
- a buffing apparatus is provided that determines that the buff member has reached a replacement time.
- a substrate processing apparatus comprising at least one of the substrate cleaning apparatus, the polishing apparatus, and the buffing apparatus is provided.
- At least one of the replacement time of the cleaning tool provided in the substrate cleaning device, the replacement time of the polishing pad provided in the polishing device, and the replacement time of the buff member provided in the buffing device is set. Whether or not the cleaning tool should be replaced and whether or not the polishing pad should be replaced in association with the state observation unit which is a machine learning device to learn and acquires a state variable including at least the surface data and the state variable. Based on the training data set consisting of a combination of the exchange data acquisition unit for acquiring the exchange data for determining at least one of the buff members and whether or not the buff member should be exchanged, and the state variable and the exchange data.
- a machine learning device comprising a learning unit that learns at least one of an appropriate replacement time of a cleaning tool, an appropriate replacement time of the polishing pad, and an appropriate replacement time of the buff member. Will be done.
- the state variable further includes the output value of a vibrometer attached to a bearing that rotatably supports the washer. In one aspect, the state variable further includes the output value of a torque sensor provided in the motor that rotates the washer. In one aspect, the state variable further includes a measurement value of a particle counter that measures the number of particles in the cleaning liquid discharged from the cleaning tank of the cleaning tool cleaning apparatus.
- surface data representing the surface properties (surface shape, degree of contamination, etc.) of the cleaning tool actually used for scrub cleaning is acquired at at least two measurement points having different deterioration degrees, and the difference thereof. Determine when to replace the cleaning tool based on. Therefore, it is possible to determine an appropriate replacement time for the cleaning tool.
- surface data representing the surface properties (surface shape, degree of contamination, etc.) of the polishing pad actually used for polishing the substrate is acquired at at least two measurement points having different deterioration degrees. , The time to replace the polishing pad is determined based on the difference. Therefore, it is possible to determine an appropriate replacement time for the polishing pad.
- surface data representing the surface properties (surface shape, degree of contamination, etc.) of the buff pad actually used for buffing the substrate is acquired at at least two measurement points having different deterioration degrees. , Determine when to replace the buff pad based on the difference. Therefore, it is possible to determine an appropriate replacement time for the buff pad.
- FIG. 1 is a plan view showing an overall configuration of a substrate processing apparatus including the substrate cleaning apparatus according to the embodiment.
- FIG. 2 is a perspective view schematically showing the first cleaning unit.
- FIG. 3 is a side view schematically showing an example of an upper roll arm that rotatably supports the upper roll sponge shown in FIG.
- FIG. 4 is a schematic perspective view showing an example of the cleaning tool moving unit.
- FIG. 5A is a perspective view schematically showing the upper roll sponge shown in FIG.
- FIG. 5B is a perspective view schematically showing a modified example of the upper roll sponge shown in FIG. 5A.
- FIG. 6 is a schematic perspective view showing the relationship between the upper roll sponge and the substrate during scrub cleaning.
- FIG. 7 is a schematic plan view showing the relationship between the upper roll sponge and the substrate during scrub cleaning.
- FIG. 8A is a schematic diagram showing the substrate and the upper roll sponge in the forward cleaning area together with their rotational speeds.
- FIG. 8B is a schematic diagram showing the substrate and the upper roll sponge in the reverse cleaning area together with their rotation speeds.
- FIG. 9A shows a change in the relative speed along the longitudinal direction of the upper roll sponge when a reversal point T occurs on the substrate in which the magnitude of the relative speed between the rotation speed of the substrate and the rotation speed of the upper roll sponge becomes zero. It is a schematic diagram which showed an example.
- FIG. 9B shows the relative speed along the longitudinal direction of the upper roll sponge when the reversal point T at which the magnitude of the relative speed between the rotation speed of the substrate and the rotation speed of the upper roll sponge becomes zero does not occur on the substrate.
- FIG. 10A is a schematic view showing the tip of the nodule at the point PA and the point PB in the unused upper roll sponge in the embodiment in which the reversal point T shown in FIG. 9A occurs.
- FIG. 10B is a schematic view showing the tips of nodules at points PA and PB after scrubbing a predetermined number of substrates.
- FIG. 10C is a schematic view showing the tips of nodules at points PA and PB after scrubbing a predetermined number of substrates.
- FIG. 11A is a schematic view showing the tip of the nodule at the point PA and the point PB in the unused upper roll sponge in the embodiment in which the reversal point T shown in FIG.
- FIG. 11B is a schematic view showing the tips of nodules at the point PA and the point PB after scrubbing a predetermined number of substrates.
- FIG. 11C is a schematic view showing the tips of nodules at points PA and PB after scrubbing a predetermined number of substrates.
- FIG. 12 is a schematic view showing a surface property measuring device according to an embodiment.
- FIG. 13A is an example of polarized image data of nodules of an unused upper roll sponge.
- FIG. 13B is an example of polarized image data of nodules on the upper roll sponge after scrubbing a predetermined number of substrates.
- FIG. 14 is a schematic diagram showing an example of a spectrum pattern created by the imaging device.
- FIG. 13A is an example of polarized image data of nodules of an unused upper roll sponge.
- FIG. 13B is an example of polarized image data of nodules on the upper roll sponge after scrubbing a predetermined number of substrates.
- FIG. 15 is a table showing an example of the difference between the area of the dark part of the measurement point and the area of the dark part of the measurement point.
- FIG. 16 is a graph for explaining a modified example of the method for determining the replacement time of the upper roll sponge described with reference to FIG.
- FIG. 17A is a diagram showing a spectral intensity graph converted from hyperspectral image data at two measurement points after scrubbing a predetermined number of substrates.
- FIG. 17B is a diagram showing a spectral intensity graph converted from hyperspectral image data at two measurement points PA and PB after scrubbing a predetermined number of substrates W.
- FIG. 18 is a diagram showing changes in the spectral intensity graph converted from the hyperspectral image data acquired at one measurement point PA.
- FIG. 19 is an enlarged view showing the vicinity of the intersection of the solid line and the alternate long and short dash line in FIG. 18 and the intersection of the alternate long and short dash line and the alternate long and short dash line.
- FIG. 20 is a table showing an example of the change in spectral intensity acquired at one measurement point after scrubbing a predetermined number of substrates.
- FIG. 21 is a schematic view showing a surface property measuring device according to another embodiment.
- FIG. 22 is a schematic view showing an example of a cleaning tool cleaning device.
- FIG. 23 is a schematic view showing an example of cleaning the surface of the substrate with a roll sponge while holding the substrate in a vertical position.
- FIG. 24 is a schematic view showing an example of cleaning the surface of the substrate with a roll sponge while holding the substrate in an inclined state.
- FIG. 25 is a perspective view schematically showing a second cleaning unit of the substrate processing apparatus shown in FIG.
- FIG. 26A is a schematic view showing an example of a surface property measuring device for acquiring surface data of a pen sponge.
- FIG. 26B is a bottom view of the pen sponge shown in FIG. 26A.
- FIG. 26C is a schematic view showing a modified example of the surface texture measuring device shown in FIG. 26A.
- FIG. 27 is a schematic diagram showing an example of a machine learning device.
- FIG. 28 is a schematic diagram showing an example of the structure of the neural network.
- FIG. 29A is a schematic diagram showing the time axis expansion of the Elman network.
- FIG. 29B is a schematic diagram showing the backpropagation through time of the error backpropagation method.
- FIG. 29A is a schematic diagram showing the time axis expansion of the Elman network.
- FIG. 29B is a schematic diagram showing the backpropagation through time of the error backpropagation method.
- FIG. 30 is a perspective view schematically showing a polishing unit (polishing apparatus) according to an embodiment.
- FIG. 31 is a schematic view showing the state of the polishing head swinging on the polishing pad.
- FIG. 32 is a schematic view showing how two image pickup devices of the surface texture measuring device acquire surface data at two measurement points different in the radial direction of the polishing pad.
- FIG. 33 is a schematic view showing a buffing apparatus according to an embodiment.
- FIG. 34 is a schematic view showing how two image pickup devices of the surface texture measuring device acquire surface data at two measurement points different in the radial direction of the buff pad.
- FIG. 1 is a plan view showing the overall configuration of the substrate processing apparatus 1 provided with the substrate cleaning apparatus according to the embodiment.
- the substrate processing apparatus 1 shown in FIG. 1 is configured to perform a series of polishing processes of polishing the surface of a substrate (wafer), cleaning the polished substrate, and drying the cleaned substrate.
- the substrate processing apparatus 1 shown in FIG. 1 will be described as an example of the substrate processing apparatus provided with the substrate cleaning apparatus according to the embodiment.
- the substrate processing device 1 includes a substantially rectangular housing 10 and a load port 12 on which a substrate cassette accommodating a large number of substrates (wafers) is placed.
- the load port 12 is arranged adjacent to the housing 10.
- An open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Enhanced Pod) can be mounted on the load port 12.
- SMIF and FOUP are airtight containers that can maintain an environment independent of the external space by storing the substrate cassette inside and covering it with a partition wall.
- polishing units 14a to 14d for polishing the substrate, a first cleaning unit 16 for cleaning the polished substrate, and a second cleaning unit 18 are cleaned.
- a drying unit 20 for drying the substrate is housed.
- the polishing units 14a to 14d are arranged along the longitudinal direction of the substrate processing device 1, and the cleaning units 16 and 18 and the drying unit 20 are also arranged along the longitudinal direction of the substrate processing device 1.
- the substrate processing apparatus 1 includes a plurality of polishing units 14a to 14d, but the present invention is not limited to this example.
- the substrate processing device 1 may have one polishing unit.
- the substrate processing apparatus 1 replaces the bevel polishing unit for polishing the peripheral portion (also referred to as the bevel portion) of the substrate with the plurality of or one polishing unit, or adds the bevel polishing unit to the plurality or one polishing unit. You may have it.
- the first substrate transfer robot 22 is arranged in the area surrounded by the load port 12, the polishing unit 14a, and the drying unit 20, and the substrate transfer unit 24 is arranged in parallel with the polishing units 14a to 14d.
- the first substrate transfer robot 22 receives the unpolished substrate from the load port 12 and passes it to the substrate transfer unit 24, and receives the dried substrate from the drying unit 20 and returns it to the load port 12.
- the substrate transfer unit 24 transports the substrate received from the first substrate transfer robot 22 and transfers the substrate between the polishing units 14a to 14d.
- Each of the polishing units 14a to 14d polishes the surface of the substrate by sliding the substrate against the polishing surface while supplying the polishing liquid (slurry containing abrasive grains) to the polishing surface.
- a second substrate transfer robot 26 that transfers a substrate between the cleaning units 16 and 18 and the substrate transfer unit 24 is arranged between the first cleaning unit 16 and the second cleaning unit 18, and the second cleaning is performed.
- a third substrate transfer robot 28 that transfers a substrate between the units 18 and 20 is arranged between the unit 18 and the drying unit 20.
- a control unit 30 that controls the operation of each unit of the substrate processing device 1 is arranged inside the housing 10.
- a substrate cleaning device for scrubbing the substrate by rubbing roll sponges on both the front and back surfaces of the substrate in the presence of a chemical solution is used
- a pen is used as the second cleaning unit 18.
- a substrate cleaning device using a mold sponge (pen sponge) is used as the second cleaning unit 18.
- a substrate cleaning device that scrubs the substrate by rubbing roll sponges on both the front and back surfaces of the substrate in the presence of a chemical solution may be used.
- a spin drying device is used which holds the substrate, ejects IPA steam from a moving nozzle to dry the substrate, and further rotates the substrate at a high speed to dry the substrate.
- the substrate is cleaned while cleaning the front surface (or back surface) of the substrate by injecting a two-fluid jet stream onto the front surface (or back surface) of the substrate.
- a substrate cleaning device may be used in which a cleaning tool (for example, a roll sponge, a pen sponge, or a cleaning brush) is pressed against the back surface (or front surface) of the substrate to scrub the back surface (or front surface) of the substrate.
- a substrate cleaning device that scrubs only one of the front surface and the back surface of the substrate with a cleaning tool may be used as the first cleaning unit 16 or the second cleaning unit 18.
- the substrate is polished by at least one of the polishing units 14a to 14d.
- the polished substrate is cleaned by the first cleaning unit 16 and the second cleaning unit 18, and the washed substrate is further dried by the drying unit 20.
- the polished substrate may be cleaned by either the first cleaning unit 16 or the second cleaning unit 18.
- FIG. 2 is a perspective view schematically showing the first cleaning unit 16 shown in FIG.
- the first cleaning unit 16 shown in FIG. 2 is a substrate cleaning device according to an embodiment of the present invention.
- FIG. 3 is a side view schematically showing an example of an upper roll arm that rotatably supports the upper roll sponge shown in FIG.
- the first cleaning unit 16 also has a lower roll arm that rotatably supports the lower roll sponge 78.
- the configuration of the lower roll arm has, for example, a configuration in which the configuration of the upper roll arm, which will be described later, is turned upside down so that the lower roll sponge 78 can be slidably contacted with the lower surface of the substrate W.
- the description of "upper” or “lower” means the position or direction of a component such as a cleaning member starting from the substrate. Further, the description of “upper surface” or “surface” of a component such as a cleaning member means a surface of the component on the side in contact with the substrate. Moreover, the description of these positions or orientations relates to examples in the drawings and is therefore not considered to limit the scope of the invention.
- the first cleaning unit 16 comes into contact with four holding rollers 71, 72, 73, 74 that hold and rotate the substrate (wafer) W in a horizontal posture, and the upper and lower surfaces of the substrate W, respectively.
- the upper chemical solution supply nozzle 87 for supplying the chemical solution is provided.
- a lower rinse liquid supply nozzle for supplying a rinse liquid (for example, pure water) and a lower chemical liquid supply nozzle for supplying a chemical liquid are provided on the lower surface of the substrate W.
- the chemical solution and the rinse solution may be collectively referred to as a cleaning solution
- the chemical solution supply nozzle 87 and the rinse solution supply nozzle 85 may be collectively referred to as a cleaning solution supply nozzle.
- the roll sponges 77 and 78 have a porous structure, and such roll sponges 77 and 78 are made of, for example, a resin such as PVA or nylon.
- the holding rollers 71, 72, 73, 74 can be moved in the direction of approaching and separating from the substrate W by a drive mechanism (for example, an air cylinder) (not shown). Two of the four holding rollers 71 and 74 are connected to the substrate rotating mechanism 75, and these holding rollers 71 and 74 are rotated in the same direction by the substrate rotating mechanism 75. In one embodiment, a plurality of substrate rotation mechanisms 75 connected to the holding rollers 71, 72, 73, 74 may be provided. With the four holding rollers 71, 72, 73, 74 holding the substrate W, the rotation of the two holding rollers 71, 74 causes the substrate W to rotate about its axis. In the present embodiment, the substrate holding portion for holding and rotating the substrate W is composed of holding rollers 71, 72, 73, 74 and a substrate rotating mechanism 75.
- the upper roll sponge 77 is rotatably supported by the upper roll arm 48.
- the upper roll arm 48 includes an arm portion 48a extending above the upper roll sponge 77 along the longitudinal direction of the upper roll sponge 77, and a pair of support portions 48b extending downward from both ends of the arm portion 48a.
- a bearing device 90 having a plurality of bearings 90a (two in FIG. 3) is arranged on each support portion 48b, and the bearing device 90 has a rotating shaft 95 extending from both ends of the upper roll sponge 77. It is rotatably supported. Further, an electric motor 93 for rotating the upper roll sponge 77 is arranged on one of the support portions 48b, and the drive shaft 93a of the electric motor 93 is connected to the one rotating shaft 95 via a coupling 94.
- the electric motor 93 is a rotary drive mechanism that rotates the upper roll sponge 77. When the electric motor 93 is driven, rotational torque is transmitted to the rotating shaft 95 of the upper roll sponge 77 via the drive shaft 93a and the coupling 94, whereby the upper roll sponge 77 rotates.
- each bearing device 90 has two bearings 90a, but this embodiment is not limited to this example.
- each bearing device 90 may have one bearing or three or more bearings that support the rotating shaft 95 of the upper roll sponge 77.
- the electric motor 93 has a torque sensor 93b that measures the torque for rotating the drive shaft 93a (that is, the torque given to the upper roll sponge 77 via the rotating shaft 95).
- a vibration meter 97 is attached to each bearing 90a of the bearing device 90, and the vibration meter 97 measures the vibration generated in the bearing 90a while the upper roll sponge 77 is rotating.
- the torque sensor 93b and the vibration meter 97 are connected to the control unit 30 (see FIG. 1), and the measured value of the torque for rotating the drive shaft 93a and the measured value of the vibration generated in the bearing 90a are transmitted to the control unit 30. Send.
- the operation and purpose of the torque sensor 93b and the vibration meter 97 will be described later.
- the first cleaning unit 16 further includes a cleaning tool moving unit that moves the cleaning tool (for example, the upper roll sponge 77 or the lower roll sponge 78) from the retreat position to the cleaning position and from the cleaning position to the retreat position.
- FIG. 4 is a schematic perspective view showing an example of a cleaning tool moving unit provided in the first cleaning unit 16.
- the cleaning tool moving unit 51 shown in FIG. 4 is configured to move the upper roll sponge 77 from the retreat position to the cleaning position and from the cleaning position to the retreat position.
- the first cleaning unit 16 also has a cleaning tool moving unit that moves the lower roll sponge 78 from the retreat position to the cleaning position and from the cleaning position to the repellent position.
- the cleaning position of the cleaning tool is defined as the position where the cleaning tool is in contact with the substrate W in order to clean the surface of the substrate W
- the retreat position of the cleaning tool is defined by the cleaning tool. It is defined as a position separated from the surface of the substrate W.
- FIG. 2 shows a state in which the upper roll sponge 77 and the lower roll sponge 78 have been moved to the cleaning positions, respectively.
- the cleaning tool moving unit 51 shown in FIG. 4 has an elevating mechanism 53 that moves the upper roll arm 48 in the vertical direction integrally with the upper roll sponge 77, and a horizontal mechanism that moves the upper roll arm 48 in the horizontal direction together with the elevating mechanism 53. It is equipped with a moving mechanism 58.
- the elevating mechanism 53 includes a guide rail 54 that guides the vertical movement of the upper roll arm 48, and an elevating drive mechanism 55 that moves the upper roll arm 48 along the guide rail 54.
- the upper roll arm 48 is attached to the guide rail 54.
- the elevating drive mechanism 55 is a linear motion mechanism such as an air cylinder or a ball screw mechanism. When the elevating drive mechanism 55 is operated, the upper roll sponge 77 is moved up and down along the guide rail 54 together with the upper roll arm 48.
- the horizontal movement mechanism 58 is, for example, a linear motion mechanism such as an air cylinder connected to the elevating mechanism 53 or a ball screw mechanism.
- the upper roll arm 48 that is, the upper roll sponge 77
- the elevating mechanism 53 is, for example, a linear motion mechanism such as an air cylinder connected to the elevating mechanism 53 or a ball screw mechanism.
- the cleaning tool moving unit 51 may have only the elevating mechanism 53. In this case, the cleaning tool moving unit 51 moves the upper roll sponge 77 between the cleaning position where the upper roll sponge 77 contacts the surface of the substrate W and the retreat position P1 which is separated upward from the surface of the substrate W.
- the holding rollers 71, 72, 73, 74 rotate the substrate W around its axis.
- the roll sponges 77 and 78 are moved from the retreat position P2 (or P1) to the cleaning position shown in FIG. 2 by using the cleaning tool moving unit 51 shown in FIG.
- the chemical solution is supplied to the front surface and the lower surface of the substrate W from the upper chemical solution supply nozzle 87 and the lower chemical solution supply nozzle (not shown).
- the roll sponges (cleaning tools) 77 and 78 scrub and clean the upper and lower surfaces of the substrate W by sliding against the upper and lower surfaces of the substrate W while rotating around the axis extending horizontally.
- the roll sponges 77 and 78 are longer than the diameter (width) of the substrate W and come into contact with the entire upper and lower surfaces of the substrate W.
- the substrate W is rinsed by supplying pure water as a rinsing liquid to the front and lower surfaces of the rotating substrate W while sliding the roll sponges 77 and 78 onto the upper and lower surfaces of the substrate W. ..
- FIG. 5A is a perspective view schematically showing the upper roll sponge 77 shown in FIG. 2
- FIG. 5B is a perspective view schematically showing a modified example of the upper roll sponge 77 shown in FIG. 5A. Since the lower roll sponge 78 has the same shape as the upper roll sponge 77 shown in FIG. 5A or FIG. 5B, the overlapping description thereof will be omitted.
- the upper roll sponge 77 shown in FIG. 5A is composed of a cylindrical core material 77A and a scrub member 77B covered on the outer peripheral surface of the core material 77A.
- the scrub member 77B is made of a resin such as PVA, and a plurality of cylindrical protrusions (hereinafter referred to as "nodules") 77C are formed on the surface thereof.
- the upper roll sponge 77 has a plurality of nodules group consisting of a plurality of nodules 77C arranged in a row at equal intervals in the longitudinal direction (axial direction) of the upper roll sponge 77.
- the plurality of nodules are arranged at equal intervals in the circumferential direction of the upper roll sponge 77.
- adjacent nodules GR1 and GR2 are shown with hatching as an example of nodules arranged in the circumferential direction of the upper roll sponge 77.
- each nodule 77C belonging to the nodule group GR1 and the position of each nodule 77C belonging to the nodule group GR2 are deviated from each other with respect to the longitudinal direction of the upper roll sponge 77.
- the tips of a plurality of nodules 77C belonging to the adjacent nodules groups GR1 and GR2 come into contact with the surface of the substrate W without gaps, whereby the surface of the substrate W is contacted. The whole is washed.
- the upper roll sponge 77 shown in FIG. 5B is different from the upper roll sponge 77 shown in FIG. 5A in that the nodule 77C is omitted. As described above, the upper roll sponge 77 does not have to have the nodule 77C. In this case, the entire surface of the substrate W is cleaned by the surface of the scrub member 77B that comes into surface contact with the surface of the substrate W.
- FIG. 6 is a schematic perspective view showing the relationship between the upper roll sponge 77 and the substrate W during scrub cleaning
- FIG. 7 is a schematic plan view showing the relationship between the upper roll sponge 77 and the substrate W during scrub cleaning. is there. Since the relationship between the lower roll sponge 78 and the substrate W during scrub cleaning is the same as the relationship between the upper roll sponge 77 and the substrate W shown in FIGS. 6 and 7, the overlapping description thereof will be omitted.
- the length of the upper roll sponge 77 is set to be slightly longer than the diameter of the substrate W, and the central axis (rotation axis) CL1 of the upper roll sponge 77 is the rotation axis CL2 of the substrate W. It is arranged so as to be almost orthogonal to. In this case, the substrate W and the upper roll sponge 77 come into contact with each other in a cleaning area 32 having a length L extending linearly over the entire length in the radial direction of the substrate W. According to such a configuration, the upper roll sponge 77 can clean the entire surface of the substrate W simultaneously and efficiently.
- the X-axis is set parallel to the cleaning area 32 corresponding to the longitudinal direction (axial direction) of the upper roll sponge 77, and the Y-axis is set in the direction orthogonal to the X-axis.
- the origin of the ⁇ Y plane is aligned with the rotation axis CL2 of the substrate W. This is the same as follows.
- the absolute value of the magnitude of the rotation speed Vw of the substrate W along the cleaning area 32 becomes zero on the rotation axis CL2 of the substrate W and toward the peripheral edge of the substrate W. It gets bigger gradually. Further, the directions of the rotation speed Vw of the substrate W are opposite to each other with the rotation axis CL2 in between.
- the magnitude of the rotation speed Vr of the upper roll sponge 77 along the cleaning area 32 is constant over the entire length of the cleaning area 32, and the direction of the rotation speed Vr. Is the same.
- the cleaning area 32 is a forward cleaning area having a length Lf in which the direction of the rotation speed Vw of the substrate W and the direction of the rotation speed Vr of the upper roll sponge 77 are the same across the rotation axis CL2 of the substrate W. It is divided into 34 and a reverse cleaning area 35 having a length Li in which the direction of the rotation speed Vw of the substrate W and the direction of the rotation speed Vr of the upper roll sponge 77 are opposite to each other.
- the magnitude of the relative speed (relative rotation speed) Vs of the rotation speed Vw of the substrate W and the rotation speed Vr of the upper roll sponge 77 is the magnitude of the rotation speeds of both. It becomes the absolute value of the difference between, and becomes relatively low.
- the magnitude of the relative speed (relative rotation speed) Vs of the rotation speed Vw of the substrate W and the rotation speed Vr of the upper roll sponge 77 is the rotation speed of both. It becomes the absolute value of the sum of the magnitudes and becomes relatively high. Therefore, as shown in FIG.
- FIG. 9A shows the longitudinal direction of the upper roll sponge 77 when a reversal point T occurs on the substrate W in which the relative speed Vs of the rotation speed Vw of the substrate W and the rotation speed Vr of the upper roll sponge 77 becomes zero. It is a schematic diagram which showed an example of the change of the relative velocity Vs along.
- FIG. 9B shows an example of a change in the relative speed Vs when the reversal point T at which the magnitude of the rotation speed Vw of the substrate W and the rotation speed Vr of the upper roll sponge 77 becomes zero does not occur on the substrate W. It is a schematic diagram shown. In FIGS. 9A and 9B, the magnitude of the relative velocity Vs changing along the X axis is drawn by a thick solid line.
- the relative velocity Vs changes along the longitudinal direction of the upper roll sponge 77. Therefore, during scrubbing of the substrate W, the time during which each nodule 77C belonging to a certain nodule group (for example, the nodule group GR1 or GR2 shown in FIG. 5A) comes into contact with the surface of the rotating substrate W is the upper roll sponge 77, respectively. Different along the longitudinal direction of. This means that the degree of deterioration (or deterioration rate) of the upper roll sponge 77, which progresses as the scrubbing of the substrate W is repeated, differs along the longitudinal direction of the upper roll sponge 77.
- the contact time of the upper roll sponge 77 with the substrate W at the point PA in the cleaning area 34 is the upper roll sponge 77 at the point PB in the reverse cleaning area 35. It is longer than the contact time with the substrate W. Therefore, the degree of deterioration of the upper roll sponge 77 at the point PA is larger than the degree of deterioration of the upper roll sponge 77 at the point PB.
- the mode in which the nodule 77C comes into contact with the substrate W at the point PA on the forward cleaning area 34 side with the reversal point T sandwiched is sandwiched between the reversal point T.
- This is different from the mode in which the nodule 77C contacts the substrate W at the point PB on the reverse cleaning area 35 side. More specifically, the tip of the nodule 77C at the point PA contacts the surface of the substrate W for a relatively long time not only in the region located on the downstream side in the rotation direction of the upper roll sponge 77 but also in the region located on the upstream side. ..
- the tip of the nodule 77C at the point PA deteriorates even in a region located upstream of the upper roll sponge 77 in the rotation direction as compared with the tip of the nodule 77C at the point PB.
- the upstream side / downstream side of the upper roll sponge 77 in the rotation direction of the nodule 77C means the opposite side / forward side of the upper roll sponge 77 in the rotation direction with respect to the center of the nodule 77C. .. In the examples shown in FIGS.
- the upper half of the tip of the nodule 77C in these figures is the upstream side seen from the center of the nodule 77C which is the reference position, and the lower half of the tip of the nodule 77C is the reference position. It is the downstream side seen from the center of the nodule 88.
- the tip of the nodule 77C provided on the rotating upper roll sponge 77 comes into contact with the substrate W from the downstream side to the upstream side in the rotation direction of the upper roll sponge 77 in the nodule 77C. This also applies to the examples shown in FIGS. 11A to 11C described below.
- FIG. 10A to 10C are schematic views showing an example of the deterioration of the tip of the nodule 77C at the point PA and the deterioration of the tip of the nodule 77C at the point PB in the embodiment in which the reversal point T shown in FIG. 9A occurs. is there. More specifically, FIG. 10A is a schematic view showing the tips of nodules 77C at points PA and PB in the unused upper roll sponge 77, and FIG. 10B is a scrubbing wash of a predetermined number of substrates W. FIG. 10C is a schematic view showing the tip of the nodule 77C at the later point PA and the point PB, and FIG. 10C shows the tip of the nodule 77C at the point PA and the point PB after further scrubbing a predetermined number of substrates W. It is a schematic diagram.
- the nodule 77C at the point PA has a deteriorated region Fia1 at the tip position located on the upstream side in the rotation direction of the upper roll sponge 77, and the nodule 77C at the point PB also has an upstream side in the rotation direction of the upper roll sponge 77.
- a deteriorated region Fib1 is generated at the tip position located at.
- the degraded region Fib1 is much smaller than the degraded region Fia1.
- the deteriorated region Fua1 is larger than the deteriorated region Fia1.
- the nodule 77C at the point PA has a deteriorated region Fua2 larger than the deteriorated region Fua1 and a deteriorated region Fia2 larger than the deteriorated region Fia1. Further, the deteriorated region Fia2 is much larger than the deteriorated region Fua2. That is, the progress of deterioration of the tip of the nodule 77 on the upstream side is greater than the progress of deterioration on the downstream side.
- the nodule 77C at the point PB has a deteriorated region Fab2 larger than the deteriorated region Fab1 and a deteriorated region Fib2 larger than the deteriorated region Fib1.
- the deteriorated regions Fua1, Fia1, Fua2, Fia2, Fub1, Fib1, Fub2, and Fib2 are also regions in which a large amount of particles (pollutants) such as abrasive grains contained in the polishing debris and the polishing liquid are deposited, respectively. Therefore, the degree of contamination of nodules 77C at point PA increases at an accelerating rate as compared with the degree of contamination of nodules 77C at point PB. That is, as the scrubbing of the substrate W is repeated, the degree of deterioration and the degree of contamination of the upper roll sponge 77 greatly differ along the longitudinal direction of the upper roll sponge 77.
- FIG. 11A to 11C are schematic views showing an example of the deterioration of the tip of the nodule 77C at the point PA and the deterioration of the tip of the nodule 77C at the point PB in the embodiment in which the reversal point T shown in FIG. 9B does not occur. is there. More specifically, FIG. 11A is a schematic view showing the tips of nodules 77C at the point PA and the point PB in the unused upper roll sponge 77, and FIG. 11B scrubs and cleans a predetermined number of substrates W. FIG.
- FIG. 11C is a schematic view showing the tip of the nodule 77C at the later point PA and the point PB, and FIG. 11C shows the tip of the nodule 77C at the point PA and the point PB after further scrubbing a predetermined number of substrates W. It is a schematic diagram.
- the degree of deterioration and the degree of contamination of the upper roll sponge 77 increase along the longitudinal direction of the upper roll sponge 77. It will be different. Further, the degree of deterioration and the degree of contamination of the substrate W also differ depending on the cleaning recipe of the substrate W. Therefore, even if the surface texture of the upper roll sponge 77 is observed and / or measured at one measurement point of the upper roll sponge 77, it is difficult to determine an appropriate replacement time of the upper roll sponge 77.
- the surface data of the upper roll sponge 77 is acquired at at least two measurement points of the upper roll sponge (cleaning tool) 77, and the surface data of the upper roll sponge 77 is obtained based on the difference between the two surface data.
- Determine the appropriate replacement time For example, surface data representing the surface properties of at least two measurement points (for example, points PA and PB shown in FIGS. 9A and 9B) separated along the longitudinal direction of the upper roll sponge 77 are acquired, and the surface data of the surface data are obtained.
- the appropriate replacement time of the upper roll sponge 77 is determined based on the difference.
- the surface data of the lower roll sponge 78 is acquired at at least two measurement points of the lower roll sponge (cleaning tool) 78, and the surface data of the lower roll sponge 78 is obtained based on the difference between the two surface data. Determine the appropriate replacement time for the lower roll sponge 78.
- a surface property measuring device that acquires surface data of the upper roll sponge 77 at at least two measurement points of the upper roll sponge (cleaning tool) 77 will be described. Since the configuration of the surface texture measuring device for acquiring the surface data of the lower roll sponge 78 is the same as the configuration of the surface texture measuring apparatus for acquiring the surface data of the upper roll sponge 77, the overlapping description thereof will be omitted.
- FIG. 12 is a schematic view showing a surface texture measuring device according to an embodiment.
- the surface texture measuring device 60 shown in FIG. 12 directly and non-contactly acquires surface data representing the surface texture of the upper roll sponge 77 moved to the retreat position P1 or the retreat position P2 (see FIG. 4). It is a device.
- the surface texture measuring device 60 includes imaging devices 61A and 61B for acquiring surface data representing the surface texture of the upper roll sponge (cleaning tool) 77 at the measurement points PA and PB. Since the image pickup device 61B has the same configuration as the image pickup device 61A, the image pickup devices 61A and 61B are simply referred to as the image pickup device 61 in the following unless otherwise specified.
- the image pickup device 61 is connected to the control unit 30 described above, and the surface data of the upper roll sponge 77 acquired by the image pickup device 61 is sent to the control unit 30.
- the image pickup apparatus 61 directly acquires the actual image data of the upper roll sponge 77 at the measurement point PA (or the measurement point PB), and obtains the image data from the surface texture (that is, the degree of deterioration and the degree of deterioration) of the upper roll sponge 77. Convert to surface data showing the degree of pollution).
- the surface data acquired by the image pickup apparatus 61 is, for example, the area of the dark part (or bright part) in the polarized image data of the upper roll sponge 77 (Nozur 77C), or the red on the upper roll sponge 77 (Nozur 77C). It is a spectral pattern of an infrared absorption spectrum of reflected light or transmitted light obtained when irradiated with external light.
- the surface data acquired by the image pickup apparatus 61 may be three-dimensional image data of the upper roll sponge 77 (Nozur 77C) obtained by irradiating the upper roll sponge 77 (Nozur 77C) with a laser beam.
- it may be distortion image data that visualizes the distortion generated when a predetermined pressure is applied to the upper roll sponge 77.
- the surface data acquired by the image pickup apparatus 61 is spectroscopic image data obtained by photographing the upper roll sponge 77 (nodule 77C) by dispersing light at a large number of wavelengths (for example, 10 or more wavelengths). It may be.
- the surface data acquired by the image pickup apparatus 61 is hyperspectral image data obtained by spectroscopically photographing the upper roll sponge 77 (Nodule 77C) for each of a large number of wavelengths including wavelengths in the near infrared region. It may be.
- the hyperspectral image data can visualize the difference in image data in the invisible region (near infrared region) that cannot be discriminated by the human eye or a color camera image.
- the surface data acquired by the image pickup apparatus 61 may be polarized image data of the upper roll sponge 77 (nodule 77C).
- the polarized image data is image data including information on the polarization direction and the degree of polarization of the reflected light from the upper roll sponge 77 (Nodule 77C).
- Surface data can be acquired.
- Such an imaging device can capture a moving image of the rotating upper roll sponge 77, extract a frame image from the moving image, and acquire the surface data of the upper roll sponge 77 from the frame image. That is, the image pickup apparatus can acquire the surface data in a state where the upper roll sponge 77 moved to the retreat position P1 (or P2) is rotated.
- the imaging device preferably includes a high-sensitivity high-speed camera unit. As a matter of course, the image pickup apparatus can acquire the surface data from the upper roll sponge 77 in the stationary state.
- FIG. 13A is an example of polarized image data of the nodule 77C of the unused upper roll sponge 77
- FIG. 13B shows the bipolar of the nodule 77C of the upper roll sponge 77 after scrubbing a predetermined number of substrates W. This is an example of the image data.
- the polarized image data shown in FIG. 13B is acquired at the same measurement point as the polarized image data shown in FIG. 13A.
- Such polarized image data is subjected to a polarization process for dividing the photograph (of the nodule 77C) of the upper roll sponge 77 taken by the camera unit (not shown) of the image pickup apparatus 61 into a bright part and a dark part. Obtained at.
- the image pickup apparatus 61 executes an image processing unit (not shown) for calculating the area of the dark part (or bright part) from the obtained polarized image data by executing the polarization processing on the photograph acquired by the camera unit. I have.
- FIG. 14 is a schematic diagram showing an example of a spectrum pattern created by the image pickup apparatus 61.
- the vertical axis represents the absorbance and the horizontal axis represents the wave number.
- the image pickup device 61 irradiates the surface of the upper roll sponge 77 with infrared rays and absorbs infrared rays from the reflected light or transmitted light of the infrared rays. It is configured to acquire a spectrum and create a spectral pattern based on the infrared absorption spectrum.
- the image pickup apparatus 61 acquires the image.
- the spectral pattern changes. For example, the absorbance of the characteristic peak SP1 changes, or the wave number at which the peak SP1 appears changes.
- the relative positional relationship between the two characteristic peaks SP1 and SP2 (for example, the absolute value of the difference between the wave numbers of the two peaks SP1 and SP2) changes.
- the spectral patterns acquired as surface data are compared each time a predetermined number of substrates W are scrubbed (for example, the amount of change in the absorbance and wavenumber of peak P1, the amount of change in the absorbance and wavenumber of peak P2, or two.
- the amount of change in the absolute value of the difference between the wave numbers of the peaks SP1 and SP2 the degree of deterioration of the upper roll sponge 77 can be grasped.
- the image pickup device 61 When the surface data acquired by the image pickup device 61 is the three-dimensional image data of the upper roll sponge 77, the image pickup device 61 irradiates the upper roll sponge 77 with a laser beam from a light projecting unit (not shown) and reflects the laser beam.
- the three-dimensional image data of the upper roll sponge 77 is acquired by receiving the laser beam at the light receiving unit (not shown).
- the image pickup apparatus 61 has a function of a laser displacement meter. More specifically, the image pickup apparatus 61 first acquires the three-dimensional image data of the unused upper roll sponge 77.
- the image pickup apparatus 61 compares (for example, superimposes) the three-dimensional image data of the unused upper roll sponge 77 with the three-dimensional image data of the upper roll sponge 77 after use, and changes the amount (for example, nodules). The amount of decrease in the surface area at the tip of 77C) can be calculated.
- the amount of change in the three-dimensional image data corresponds to the degree of deterioration of the upper roll sponge 77. Therefore, by comparing the three-dimensional image data acquired as surface data each time a predetermined number of substrates W are scrubbed (for example, calculating the amount of decrease in the surface area at the tip of the nodule 77C), the upper roll sponge 77 The degree of deterioration can be grasped.
- the surface texture measuring device 60 includes a pressing device (not shown) that applies a predetermined pressure to the upper roll sponge 77 that has been moved to the retreat position P2 (or the retreat position P1).
- the pressing device is, for example, a device that applies pressing force in the axial direction of the upper roll sponge 77 from both ends of the upper roll sponge 77 (that is, compresses the upper roll sponge 77 in the axial direction with a predetermined pressing force).
- the image pickup device 61 visualizes the distortion of the upper roll sponge 77 by using a camera unit (not shown) that captures image data of the upper roll sponge 77 before and after being deformed by the pressing device and a digital image correlation method (DIC). It is equipped with an image processing unit (not shown).
- the digital image correlation method measures the displacement of the speckle pattern by analyzing and calculating the image data before and after the deformation of the upper roll sponge 77 taken by the camera unit, and thereby the distortion generated in the upper roll sponge 77. It is a method of visualization.
- the degree of deterioration of the upper roll sponge 77 can be grasped by comparing the distortion image data acquired as surface data (that is, calculating the amount of change in distortion) every time a predetermined number of substrates W are scrubbed. Can be done.
- the imaging device 61 When the surface data acquired by the imaging device 61 is the spectral image data of the upper roll sponge 77 or the hyperspectral image data, the imaging device 61 is configured as a so-called “multispectral camera” or “hyperspectral camera”. Equipped with a camera unit. According to the multispectral camera or the hyperspectral camera, it is possible to acquire a number of spectroscopic images (for example, grayscale images) according to the number of spectra, and further, it is possible to acquire two-dimensional image data in which these spectroscopic images are overlapped. In particular, according to the hyperspectral camera, it is possible to acquire a spectroscopic image in the near infrared region, which is an invisible region. Further, the hyperspectral camera can display the acquired plurality of spectroscopic images in different colors and superimpose the spectroscopic images displayed in other colors.
- the image pickup apparatus 61 compares the spectral image data or hyperspectral image data of the unused upper roll sponge 77 with the spectral image data or hyperspectral image data of the upper roll sponge 77 after use (for example, superimposing).
- the amount of change (for example, the amount of decrease in the surface area at the tip of Nozur 77C and / or the degree of contamination) can be calculated.
- the amount of change in the spectral image data or the hyperspectral image data corresponds to the degree of deterioration of the upper roll sponge 77.
- the contaminants adhering to the surface of the upper roll sponge 77 can be distinguished from the material of the upper roll sponge (that is, a resin such as PVA). Therefore, the spectroscopic image data or hyperspectral image data acquired as surface data is compared every time a predetermined number of substrates W are scrubbed (for example, the amount of decrease in the surface area at the tip of the Nozur 77C and the contaminants adhere to it. By calculating the amount of increase in the surface area, the degree of deterioration of the upper roll sponge 77 can be grasped.
- the imaging device 61 calculates surface data representing the degree of deterioration and the degree of contamination of the upper roll sponge 77 (for example, the degree of contamination at the tip of the Nozur 77C). Can be obtained from.
- the image pickup apparatus 61 can convert hyperspectral image data that changes according to the degree of deterioration and the degree of contamination of the upper roll sponge 77 into a graph of spectral intensity for each wavelength.
- the image pickup apparatus 61 includes an image processing unit (not shown) that converts hyperspectral image data into a graph of spectral intensity for each wavelength.
- the graph of the spectral intensity for each wavelength may be referred to as a “spectral intensity graph”.
- the hyperspectral image data acquired by the image pickup apparatus 61 changes. ..
- the spectral intensity graph converted from the hyperspectral image data also changes.
- the image pickup apparatus 61 compares (for example, superimposes) the spectral intensity graph of the unused upper roll sponge 77 with the spectral intensity graph of the upper roll sponge 77 after use, and changes the spectral intensity at a predetermined wavelength. Is configured to be operable. By calculating the amount of change in the spectral intensity, the degree of deterioration of the upper roll sponge 77 can be grasped.
- the imaging device 61 may be configured to be able to calculate the slope of the close battle in the spectral intensity graph.
- the imaging device 61 may be configured to be able to calculate the slope of the close battle in the spectral intensity graph.
- the image pickup device 61 obtains the slope of the close battle in the spectral intensity graph by calculation (for example, a differential calculation of the spectral intensity graph), and the amount of change in the slope of the close battle (for example, By calculating (the amount of change in the maximum value of the inclination of the close battle), the degree of deterioration of the upper roll sponge 77 can be grasped.
- the image pickup device 61 When the surface data acquired by the image pickup device 61 is the polarized image data of the upper roll sponge 77, the image pickup device 61 includes a camera unit configured as a so-called "polarized camera". According to the polarized camera, polarized image data including information on the polarization direction and the degree of polarization of the reflected light from the upper roll sponge 77 (Nodule 77C) can be acquired. A polarized camera capable of acquiring polarized image data can visualize a detailed surface state of a subject that is difficult to recognize with a normal camera that acquires color image data.
- the amount of change in the polarized image data also corresponds to the degree of deterioration of the upper roll sponge 77. Therefore, the polarized image data acquired as surface data is compared every time a predetermined number of substrates W are scrubbed (for example, the amount of decrease in the surface area at the tip of Nozur 77C and the amount of increase in the surface area to which contaminants are attached. By calculating), the degree of deterioration of the upper roll sponge 77 can be grasped.
- the replacement time of the upper roll sponge (cleaning tool) 77 using the surface texture measuring device 60 will be described.
- the image pickup apparatus 61 acquires the area of the dark portion in the polarized image data as surface data.
- the imaging device 61 acquires the spectral pattern of the infrared absorption spectrum, the distorted image data, the three-dimensional image data, the spectral image data, the hyperspectral image data, or the polarized image data as surface data
- the replacement time of the upper roll sponge (cleaning tool) 77 can be determined.
- the degree of deterioration and the degree of contamination of the nodule 77C of the upper roll sponge 77 at the measurement point PA are different from the degree of deterioration and the degree of contamination of the nodule 77C of the upper roll sponge 77 at the measurement point PB.
- the degree of deterioration and the degree of contamination of the nodule 77C of the upper roll sponge 77 at the measurement point PA are the degree of deterioration of the nodule 77C of the upper roll sponge 77 at the measurement point PB and the degree of deterioration. It increases at an accelerating rate compared to the degree of pollution.
- FIGS. 10A to 10C the degree of deterioration and the degree of contamination of the nodule 77C of the upper roll sponge 77 at the measurement point PA are the degree of deterioration of the nodule 77C of the upper roll sponge 77 at the measurement point PB and the degree of deterioration. It increases at an accelerating rate compared to the degree of pollution.
- the degree of deterioration and the degree of contamination of the nodule 77C of the upper roll sponge 77 at the measurement point PB is the degree of deterioration and the degree of contamination of the nodule 77C of the upper roll sponge 77 at the measurement point PA. It increases at an accelerating rate compared to.
- the control unit 30 uses the image pickup devices 61A and 61B (see FIG. 12) of the surface texture measuring device 60 every time the substrate W of a predetermined number of NAs is scrubbed and washed, and the measurement points PA and PB are used.
- the area of the dark part of the measurement point PA is acquired as surface data, and the difference between the area of the dark part of the measurement point PA and the area of the dark part of the measurement point PB is calculated.
- the control unit 30 compares the calculated difference with a predetermined threshold value. This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the predetermined number NA of the substrate W is a value used for determining whether or not the surface data of the upper roll sponge 77 is acquired by the surface property measuring device 60, and can be arbitrarily set.
- the predetermined number NA of the substrate W may be “1”.
- the control unit 30 acquires the surface data of the upper roll sponge 77 every time the substrate W is scrubbed.
- the control unit 30 determines that the upper roll sponge 77 has reached the replacement time (that is, the life), and issues an alarm (first alarm) prompting the replacement of the upper roll sponge 77. Output.
- the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the first cleaning unit.
- the control unit 30 conveys the next substrate W to the first cleaning unit 16 and continues scrub cleaning of the substrate W using the upper roll sponge 77.
- FIG. 15 is a table showing an example of the difference between the area of the dark part of the measurement point PA and the area of the dark part of the measurement point PB.
- a method of determining the replacement time of the upper roll sponge 77 described above will be described in more detail with reference to FIG.
- the control unit 30 acquires the area of the dark part of the measurement points PA and PB of the unused upper roll sponge 77 as surface data, and the area of the dark part of the measurement point PA and the dark part of the measurement point PB. Calculate the difference from the area. In the example shown in FIG. 15, the difference is "1", and it can be seen that the area of the dark part of the measurement point PA is equivalent to the area of the dark part of the measurement point PB. If the area of the dark part of the measurement point PA of the unused upper roll sponge 77 is significantly different from the area of the dark part of the measurement point PB, the upper roll sponge 77 and / or the surface texture measuring device 60 (particularly, the imaging devices 61A and 61B). It is suspected that something is wrong with the. Therefore, in this case, the control unit 30 may issue an alarm prompting to confirm the state of the upper roll sponge 77 and / or the surface texture measuring device 60.
- the control unit 30 determines whether or not the number of processed sheets N of the substrate W has reached a predetermined number of processed sheets NA (in FIG. 15, it is described as "NA1" for convenience of explanation).
- NA1 the number of processed sheets N of the substrate W
- the control unit 30 returns the number of processed sheets N of the substrate W to zero and uses the surface texture measuring device 60 to reduce the number of processed sheets N of the upper roll sponge 77.
- the area of the dark part of the measurement points PA and PB is acquired as surface data, and the difference between the area of the dark part of the measurement point PA and the area of the dark part of the measurement point PB is calculated. Further, the control unit 30 compares the calculated difference with the predetermined threshold value Dt. In the example shown in FIG.
- the predetermined threshold value Dt is set to 22, and the difference when the number of processed sheets N of the substrate W reaches the predetermined number of processed sheets NA1 is “4”. Therefore, the control unit 30 again scrubs the substrate W until the number of processed sheets N of the substrate W reaches a predetermined number of processed sheets NA (in FIG. 15, it is referred to as “NA2” for convenience of explanation).
- the control unit 30 When the number of processed sheets N of the substrate W reaches the predetermined number of processed sheets NA2, the control unit 30 returns the number of processed sheets N of the substrate W to zero again and measures the upper roll sponge 77 using the surface texture measuring device 60.
- the area of the dark part of the point PA and PB is acquired as surface data, and the difference between the area of the dark part of the measurement point PA and the area of the dark part of the measurement point PB is calculated.
- the control unit 30 compares the calculated difference with the predetermined threshold value Dt, and determines whether or not the difference is equal to or greater than the predetermined threshold value Dt.
- the control unit 30 repeats these processing steps until the difference becomes equal to or higher than a predetermined threshold value Dt.
- the control unit 30 issues an alarm (first alarm) prompting the replacement of the upper roll sponge 77 and first.
- the operation of transporting the next substrate W to the cleaning unit 16 is stopped.
- the operator can replace the upper roll sponge 77 with a new roll sponge before the substrate W is back-contaminated by the upper roll sponge 77.
- the predetermined threshold value Dt stored in advance in the control unit 30 is an important value for determining an appropriate replacement time of the cleaning tool (upper roll sponge 77 in the above-described embodiment). As described above, when the scrub cleaning in which the cleaning tool is rubbed against the substrate W is repeated, the surface of the cleaning tool may be worn and the particles accumulated in the cleaning tool may cause back-contamination of the substrate W. Therefore, in order to determine the threshold value for determining the replacement time of the cleaning tool, it is necessary to consider the cleaning efficiency, the amount of particles generated, and the like.
- the number of processed sheets of the substrate W in which the number of particles adhering to the surface of the substrate W is greatly increased is found by an experiment, and the above difference corresponding to the number of processed sheets is determined as a predetermined threshold value Dt.
- the difference corresponding to the number of processed substrates W in which the cleaning efficiency of the substrate W is greatly reduced may be determined as a predetermined threshold value Dt.
- the difference corresponding to the number of processed substrates W in which the number of particles adhering to the surface of the substrate W is greatly increased is compared with the difference corresponding to the number of processed substrates W in which the cleaning efficiency of the substrate W is greatly reduced. You may. In this case, the smaller difference is determined as a predetermined threshold Dt.
- FIG. 16 is a graph for explaining a modified example of the method for determining the replacement time of the upper roll sponge 77 described with reference to FIG.
- the vertical axis represents the difference between the area of the dark portion of the measurement point PA and the area of the dark portion of the measurement point PB, and the horizontal axis represents the number of processed substrates W.
- the pre-threshold value (second threshold value) Dt' is determined in advance by subtracting the predetermined value ( ⁇ t) from the predetermined threshold value (first threshold value) Dt.
- This pre-threshold value Dt' is also stored in advance in the control unit 30.
- the control unit 30 when the difference between the area of the dark part of the measurement point PA and the area of the dark part of the measurement point PB is equal to or greater than the pre-threshold value Dt'(in FIG. 15, when the number of processed sheets of the substrate W reaches Nd'). ), The second alarm is output.
- the second alarm is an alarm that informs the operator that the upper roll sponge 77 does not need to be replaced immediately, but the upper roll sponge 77 is about to be used for the replacement period.
- the second alarm allows the operator to prepare a new upper roll sponge 77 in advance.
- the upper roll sponge 77 may be replaced when the second alarm is issued. In this case, the occurrence of back pollution of the substrate W can be prevented more effectively.
- the image pickup device 61 grasps the degree of deterioration of the upper roll sponge 77 from the spectrum intensity graph converted from the hyperspectral image data. can do.
- the replacement time of the upper roll sponge 77 is determined by using the spectral intensity graph converted from the hyperspectral image data.
- FIG. 17A is a diagram showing a spectral intensity graph converted from hyperspectral image data at two measurement points PA and PB after scrubbing the substrate W having a predetermined number of NAs
- FIG. 17B is a diagram showing a further predetermined number of substrates W. It is a figure which shows the spectral intensity graph converted from the hyperspectral image data at two measurement points PA and PB after scrubbing the substrate W.
- the vertical axis represents the spectral intensity and the horizontal axis represents the wavelength.
- FIGS. 17A and 17B the vertical axis represents the spectral intensity and the horizontal axis represents the wavelength.
- the solid line is the spectral intensity for each wavelength converted from the hyperspectral image data at the measurement point PA
- the single point chain line is the each wavelength converted from the hyperspectral image data at the measurement point PB. Is the spectral intensity with respect to.
- the graphs shown in FIGS. 17A and 17B show that light is absorbed as it goes up and reflected as it goes down.
- the control unit 30 each time the control unit 30 scrubs the substrate W having a predetermined number of NAs, the control unit 30 acquires the data at the measurement points PA and PB using the image pickup devices 61A and 61B (see FIG. 12) of the surface texture measuring device 60.
- the spectral intensity graph converted from the hyperspectral image data obtained is acquired as surface data.
- the control unit 30 determines that the upper roll sponge 77 has reached the replacement time (that is, the life), and issues an alarm (first alarm) prompting the replacement of the upper roll sponge 77. Output.
- the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the first cleaning unit.
- the control unit 30 conveys the next substrate W to the first cleaning unit 16 and continues scrub cleaning of the substrate W using the upper roll sponge 77.
- the pre-threshold value (second threshold value) Dt' may be determined in advance by subtracting a predetermined value ( ⁇ t) from the predetermined threshold value (first threshold value) Dt.
- the control unit 30 outputs the second alarm when the difference between the spectral intensity of the measurement point PA and the spectral intensity of the measurement point PB at the predetermined wavelength ⁇ p is equal to or greater than the pre-threshold value Dt'.
- the appropriate replacement time of the upper roll sponge 77 is determined by paying attention to each change of the slope of the close battle in the spectral intensity graph of the measurement point PA and the slope of the close battle in the spectral intensity graph of the measurement point PB. Good.
- the upper roll sponge 77 is appropriate. Determine the replacement time.
- the point at which the slope of the tangent line becomes the maximum value in the spectral intensity graph may be referred to as an "inflection point”.
- the change in the obtained hyperspectral image data becomes scarce. That is, in both the spectral intensity graph of the measurement point PA and the spectral intensity graph of the measurement point PB acquired every time the substrate W of a predetermined number of NAs is scrubbed, the slope of the tangent line at the inflection point does not change. .. In this embodiment, this phenomenon is used to determine an appropriate replacement time for the upper roll sponge 77.
- the slope of the inflection point Ipa1 in the spectral intensity graph of the measurement point PA is Sta1
- the slope of the inflection point Ipb1 in the spectral intensity graph of the measurement point PB is Stb1.
- FIG. 17B after scrubbing the predetermined number of processed sheets NA, the inflection point of the measurement point PA moves to Sta2, and the inclination of the close battle at the inflection point Sta2 is Sta2.
- the inflection point of the measurement point PB moves to Stb2
- the slope of the close battle at the inflection point Stb2 is Stb2.
- the control unit 30 uses the imaging devices 61A and 61B (see FIG. 12) of the surface texture measuring device 60 to obtain hyperspectral images at the measurement points PA and PB.
- the spectral intensity graph converted from the data is acquired as surface data.
- the control unit 30 compares each calculated difference with a predetermined threshold value. This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the control unit 30 determines that the upper roll sponge 77 has reached the replacement time (that is, the life), and prompts the replacement of the upper roll sponge 77 (first alarm). ) Is output. In one embodiment, the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the first cleaning unit. When each change amount is larger than a predetermined threshold value, the control unit 30 conveys the next substrate W to the first cleaning unit 16 and continues scrub cleaning of the substrate W using the upper roll sponge 77.
- either one of the amount of change in the slope of the inflection point in the spectral intensity graph of the measurement point PA and the amount of change in the slope of the inflection point in the spectral intensity graph of the measurement point PB is a predetermined threshold value.
- the control unit 30 may determine that the upper roll sponge 77 has reached the replacement time (that is, the life). Further, in one embodiment, the control unit 30 determines the difference between the spectral intensity of the measurement point PA and the spectral intensity of the measurement point PB at a predetermined wavelength ⁇ p and the close battle of the turning point in the spectral intensity graph of the measurement point PA.
- the upper roll sponge 77 may determine the replacement time based on at least one of the amount of change in the slope and the amount of change in the slope of the close battle at the turning point in the spectral intensity graph of the measurement point PB.
- the control unit 30 controls the upper roll sponge 77 when the difference is equal to or more than a predetermined threshold value and the amount of change in the slope of the inflection point in the spectral intensity graph of the measurement point PA is equal to or less than the predetermined threshold value. May decide that the replacement time has been reached. In this case, since the degree of deterioration and contamination progress of the upper roll sponge 77 can be determined more accurately, an appropriate replacement time of the upper roll sponge 77 can be determined more accurately.
- the replacement time of the upper roll sponge 77 may be determined using the spectral intensity graph converted from the hyperspectral image data acquired at one measurement point PA (or PB). Since the configuration of the present embodiment, which is not particularly described, is the same as that of the above-described embodiment, the duplicated description will be omitted.
- FIG. 18 is a diagram showing changes in the spectral intensity graph converted from the hyperspectral image data acquired at one measurement point PA.
- the vertical axis represents the spectral intensity and the horizontal axis represents the wavelength.
- the solid line shows the spectral intensity graph converted from the hyperspectral image data at one measurement point PA after scrubbing the substrate W of the predetermined number of NAs, and the one-point chain line further indicates the predetermined number of NAs.
- the spectral intensity graph converted from the hyperspectral image data at one measurement point PA after scrubbing the substrate W is shown, and the two-point chain line is one measurement after scrubbing the substrate W of a predetermined number of NAs.
- FIG. 19 is an enlarged view showing the vicinity of the intersection of the solid line and the alternate long and short dash line in FIG. 18 and the intersection of the alternate long and short dash line and the alternate long and short dash line.
- the spectral intensity graph converted from the hyperspectral image data changes as a whole, but as shown in FIG. 19, one point is the solid line.
- the amount of change in the spectral intensity is small, and it is difficult to accurately determine the appropriate replacement time of the upper roll sponge 77.
- the replacement time of the upper roll sponge 77 is determined based on the amount of change in this difference.
- the control unit 30 scrubs and cleans the substrate W having a predetermined number of NAs, and uses the image pickup device 61A (see FIG. 12) of the surface texture measuring device 60 to obtain a hyperspectrum acquired at the measurement point PA.
- the graph of the spectral intensity for each wavelength converted from the image data is acquired as surface data.
- the control unit 30 calculates the difference between the spectral intensity at the predetermined wavelength ⁇ p acquired this time and the spectral intensity of the measurement point PA at the predetermined wavelength ⁇ p acquired last time. Then, the control unit 30 compares this difference with a predetermined threshold value. This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the control unit 30 determines that the upper roll sponge 77 is replaced ( That is, it is determined that the life) has been reached, and an alarm (first alarm) prompting the replacement of the upper roll sponge 77 is output.
- the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the first cleaning unit.
- the control unit 30 conveys the next substrate W to the first cleaning unit 16 and continues scrub cleaning of the substrate W using the upper roll sponge 77.
- the appropriate replacement time of the upper roll sponge 77 is based on the amount of change in the slope of the tangent line of the spectral intensity graph converted from the hyperspectral image data and the above difference. May be determined. This method will be described in more detail.
- the first difference between Sta1 acquired two times before and Sta2 acquired last time is the same as Sta2 acquired last time and Sta1 acquired this time. It is almost equal to the second difference of.
- the control unit 30 determines the amount of change in the spectral intensity with respect to the predetermined wavelength ⁇ p (that is, the spectral intensity at the predetermined wavelength ⁇ p acquired this time and the spectral intensity at the predetermined wavelength ⁇ p acquired last time.
- the difference between the first difference and the second difference is not more than a predetermined threshold, it is determined that the upper roll sponge 77 has reached the replacement time. In this case, since the degree of deterioration and contamination progress of the upper roll sponge 77 can be determined more accurately, an appropriate replacement time of the upper roll sponge 77 can be determined more accurately.
- FIG. 20 is a table showing an example of a change in spectral intensity acquired at one measurement point PA after scrubbing and cleaning a predetermined number of NA substrates W.
- a method of determining the replacement time of the upper roll sponge 77 based on the difference in spectral intensity acquired at one measurement point PA will be described with reference to FIG. 20.
- the control unit 30 is a spectral intensity graph converted from a hyperspectral image of the measurement point PA of the unused (or after self-cleaning of the upper roll sponge 77) upper roll sponge 77. Is acquired as surface data, and the spectral intensity of a predetermined wavelength ⁇ p in the graph is stored. Next, the control unit 30 determines whether or not the number of processed sheets N of the substrate W has reached a predetermined number of processed sheets NA (in FIG. 20, it is described as “NA1” for convenience of explanation).
- the control unit 30 When the number of processed sheets N of the substrate W has reached the predetermined number of processed sheets NA1, the control unit 30 returns the number of processed sheets N of the substrate W to zero and uses the surface texture measuring device 60 to reduce the number of processed sheets N of the upper roll sponge 77.
- the spectral intensity graph converted from the hyperspectral image of the measurement point PA is acquired as surface data, and the spectral intensity of a predetermined wavelength ⁇ p in the graph is stored. Further, the control unit 30 has a spectral intensity of a predetermined wavelength ⁇ p at the measurement point PA of the unused upper roll sponge 77 and a measurement point of the upper roll sponge 77 after slab cleaning the substrate W having a predetermined number of processed sheets NA1.
- the difference from the spectral intensity of a predetermined wavelength ⁇ p in PA is calculated. In the example shown in FIG. 20, this difference is "16". Further, the control unit 30 compares the calculated difference with the predetermined threshold value Dt. In the example shown in FIG. 20, the predetermined threshold value Dt is set to 2, and the difference when the processed number N of the substrate W reaches the predetermined processed number NA1 is “16”. Therefore, the control unit 30 again scrubs the substrate W until the number of processed sheets N of the substrate W reaches a predetermined number of processed sheets NA (in FIG. 20, it is referred to as “NA2” for convenience of explanation).
- the control unit 30 When the number of processed sheets N of the substrate W reaches the predetermined number of processed sheets NA2, the control unit 30 returns the number of processed sheets N of the substrate W to zero again and measures the upper roll sponge 77 using the surface texture measuring device 60.
- the spectral intensity graph converted from the hyperspectral image of the point PA is acquired as surface data, and the spectral intensity of a predetermined wavelength ⁇ p in the graph is stored. Further, the control unit 30 scrubs the spectral intensity of the predetermined wavelength ⁇ p at the measurement point PA of the upper roll sponge 77 after slab cleaning the substrate W of the predetermined number of processed sheets NA1 and the substrate W of the predetermined number of processed sheets NA2.
- the difference from the spectral intensity of the predetermined wavelength ⁇ p at the measurement point PA of the upper roll sponge 77 after washing is calculated. In the example shown in FIG. 20, this difference is "15".
- control unit 30 calculates the difference (change amount) of the spectral intensity at the predetermined wavelength ⁇ p, and at the same time, at the same time, inflections of the spectral intensity graph after scrubbing the substrate W of the predetermined number of processed sheets NA1. Calculate the difference between the slope of the tangent line Spa1 at the point CP1 and the slope of the tangent line Spa2 at the inflection point CP2 of the spectrum intensity graph after scrubbing the substrate W of the number of processed sheets NA2 (the amount of change in the slope of the tangent line at the inflection point). However, it may be compared with a predetermined threshold.
- the control unit 30 performs these processing steps until the difference becomes smaller than the predetermined threshold value Dt, or the difference becomes smaller than the predetermined threshold value Dt, and the amount of change in the slope of the tangent line becomes smaller than the predetermined threshold value. repeat.
- the control unit 30 issues an alarm prompting the replacement of the upper roll sponge 77, and stops the operation of transporting the next substrate W to the first cleaning unit 16. As a result, the operator can replace the upper roll sponge 77 with a new roll sponge before the substrate W is back-contaminated by the upper roll sponge 77.
- control unit 30 issues an alarm prompting the replacement of the upper roll sponge 77 after scrubbing the substrate W having a predetermined number of processed sheets NB after the difference becomes smaller than the predetermined threshold value Dt. , The transfer operation of the next substrate W to the first cleaning unit 16 may be stopped.
- the surface texture measuring device 60 acquires the surface data of the upper roll sponge 77 at the two measurement points PA and PB, but this embodiment is not limited to this example.
- surface data of the upper roll sponge 77 may be acquired at three or more measurement points.
- a measurement point PC is set at a reversal point T at which the relative velocity Vs becomes zero, and the surface texture measuring device 60 further sets a surface at the measurement point PC.
- An imaging device 61C for acquiring data may be provided.
- the surface texture measuring device 60 may include camera moving mechanisms 63A and 63B for moving the imaging devices 61A and 61B in the longitudinal direction of the upper roll sponge 77.
- the camera moving mechanisms 63A and 63B are linear motion mechanisms such as, for example, an air cylinder or a ball screw mechanism.
- the image pickup devices 61A and 61B can acquire surface data at a plurality of measurement points.
- the image pickup device 61A When the image pickup device 61A is connected to the camera moving mechanism 63A, the image pickup device 61B (and the image pickup device 61C) may be omitted. In this case, the camera moving mechanism 63A moves the image pickup device 61A in the longitudinal direction of the upper roll sponge 77, so that the image pickup device 61A can acquire surface data at a plurality of measurement points (for example, measurement points PA, PB, PC). Is.
- the control unit 30 may calculate the above difference from all combinations of the two measurement points. For example, when three measurement points PA, PB, and PC are set, the control unit 30 acquires the difference D1 of the surface data acquired at the measurement point PA and the measurement point PB, and the measurement point PA and the measurement point PC. The difference D2 of the surface data obtained and the difference D3 of the surface data acquired by the measurement point PB and the measurement point PC may be calculated. In this case, the control unit 30 stores in advance three predetermined threshold values Dt1, Dt2, Dt3 corresponding to the three differences D1, D2, D3, respectively. The control unit 30 compares the three differences D1, D2, and D3 with the predetermined threshold values Dt1, Dt2, and Dt3, respectively.
- the control unit 30 may issue an alarm prompting the replacement of the upper roll sponge 77, or the three differences.
- an alarm prompting the replacement of the upper roll sponge 77 may be issued.
- the control unit 30 may issue the second alarm when one of the three differences D1, D2, D3 exceeds a predetermined threshold value.
- FIG. 21 is a schematic view showing a surface texture measuring device according to another embodiment. Since the configuration not particularly described is the same as that of the above-described embodiment, the duplicate description will be omitted.
- the surface texture measuring device 60 shown in FIG. 21 is an image process for converting the camera units 62A and 62B for acquiring the image data of the upper roll sponge 77 and the image data acquired by the camera units 62A and 62B into surface data. It includes a unit 65.
- the camera units 62A and 62B are connected to the image processing unit 65 via cables (for example, optical fibers) 64A and 64B.
- the image processing unit 65 is connected to the control unit 30 and sends the surface data converted from the image data to the control unit 30. As described above, the control unit 30 determines the replacement time of the upper roll sponge 77 based on the difference of the surface data converted from the image data acquired by the camera units 62A and 62B at the measurement points PA and PB.
- the surface texture measuring device 60 may include a camera unit 62C for acquiring image data of the measurement point PC, in which case the camera unit 62C is via a cable (for example, an optical fiber) 64C. Is connected to the image processing unit 65.
- a camera unit 62C for acquiring image data of the measurement point PC, in which case the camera unit 62C is via a cable (for example, an optical fiber) 64C. Is connected to the image processing unit 65.
- the first cleaning unit 16 may include a cleaning tool cleaning device that cleans contaminants adhering to the roll sponges 77 and 78.
- FIG. 22 is a schematic view showing an example of a cleaning tool cleaning device.
- the cleaning tool cleaning device 100 shown in FIG. 22 is arranged below the retreat position P2 shown in FIG. 4, and is provided in a cleaning tank 102 that stores a cleaning liquid such as pure water and an upper roll sponge 77 that rotates in the cleaning tank 102.
- a contact member (cleaning member) 104 that abuts and presses and cleans the upper roll sponge 77, a drive device 112 that brings the contact member 104 closer to or away from the upper roll sponge 77, and a drain that discharges cleaning liquid from the cleaning tank 102.
- a liquid pipe 113 and a particle counter 114 connected to the drain pipe 113 are provided.
- the cleaning liquid is supplied to the cleaning tank 102 from a supply pipe (not shown).
- the upper roll sponge 77 moved to the retreat position P2 (see FIG. 4) by the cleaning tool moving unit 51 is moved (lowered) into the washing tank 102 by the elevating mechanism 53 of the cleaning tool moving unit 51.
- the contact member 104 is, for example, a quartz plate, and the total length of the contact member 104 is substantially equal to the total length of the upper roll sponge 77 so that the entire outer peripheral surface of the upper roll sponge 77 can be washed.
- the cleaning member cleaning device 100 the upper roll sponge 77 obtained by scrubbing the substrate W is immersed in the cleaning liquid in the cleaning tank 102, and the contact member 104 is further subjected to a predetermined pressing force on the rotating upper roll sponge 77. By pressing, the upper roll sponge 77 is washed. As a result, particles (pollutants) adhering to the upper roll sponge 77 are removed from the upper roll sponge 77.
- the cleaning tool cleaning device 100 may have an ultrasonic transmitter 122 that applies ultrasonic waves to the cleaning liquid or the like in the cleaning tank 102.
- the particle counter 114 is a device that measures the number of particles in the cleaning liquid discharged from the cleaning tank 102.
- the measured value of the particle counter 114 corresponds to the degree of contamination of the upper roll sponge (cleaning tool) 77. That is, when the measured value of the particle counter 114 is high, it means that the degree of contamination of the upper roll sponge 77 is high, and when the measured value of the particle counter 114 is low, it means that the degree of contamination of the upper roll sponge 77 is low. To do.
- the particle counter 114 is connected to the control unit 30 (see FIG. 1), and the measured value of the particle counter 114 is sent to the control unit 30.
- the control unit 30 monitors the degree of contamination of the cleaning liquid (that is, the degree of contamination of the upper roll sponge 77) based on the measured value of the particle counter 114. Further, the control unit 30 feedback-controls the drive device 121 based on the degree of contamination of the cleaning liquid. Specifically, when the cleaning liquid is highly contaminated (that is, the upper roll sponge 77 is highly contaminated), the control unit 30 transmits a predetermined control signal to the drive device 21, and the contact member 104 sends a predetermined control signal. The cleaning conditions for cleaning the upper roll sponge 77 are changed.
- a flat plate-shaped observation wall 105 made of a transparent material such as glass is installed at the bottom of the cleaning tank 102, and the above-mentioned surface texture measuring device 60 is arranged below the flat observation wall 105.
- the image pickup device 61 (or camera unit 62) of the surface texture measuring device 60 is drawn.
- the image processing unit 65 is drawn by a virtual line (dotted line).
- the image pickup device 61 (or camera unit 62) of the surface property measuring device 60 acquires the surface data (or image data) of the surface of the upper roll sponge 77 in the cleaning tank 102 via the observation wall 105. It is attached to the cleaning tool cleaning device 100 so as to do so.
- the imaging device 61 (or camera unit 62) of the surface property measuring device 60 acquires the surface data of the upper roll sponge 77 that rotates or stands still in the cleaning tank 102 of the cleaning tool cleaning device 100.
- the first cleaning unit (board cleaning device) 16 holds the substrate W in a horizontal posture by a plurality of holding rollers 71, 72, 73, 74 (four in FIG. 2) of the substrate holding portion.
- both sides (upper and lower surfaces) of the substrate W are cleaned with roll sponges 77 and 78, which are cleaning tools, but this embodiment is not limited to this example.
- the first cleaning unit 16 may clean both sides of the substrate W with a roll sponge while holding the substrate W in a vertical posture by a plurality of holding rollers of the substrate holding portion.
- the first cleaning unit 16 cleans both sides of the substrate W with a roll sponge while holding the substrate W with a plurality of holding rollers of the substrate holding portion in a state where the surface thereof is inclined. You may.
- the first cleaning unit 16 has two holding rollers 72, 73 that support and rotate the substrate W in a vertical position, and one of the substrates W supported by the holding rollers 72, 73.
- a roll sponge 77 that comes into contact with the surface of the substrate W, a rinse liquid supply nozzle 85 that supplies a rinse liquid (for example, pure water) to one surface of the substrate W, and a chemical liquid supply nozzle 87 that supplies a chemical liquid to one surface of the substrate W. It has.
- a roll sponge that contacts the other surface of the substrate W, a rinse liquid supply nozzle that supplies a rinse liquid (for example, pure water) to the other surface of the substrate W, and a substrate W.
- a chemical supply nozzle for supplying the chemical solution is provided on the other surface of the.
- the first cleaning unit 16 holds the substrate W in an inclined state and rotates the four holding rollers (in FIG. 24, two of the four holding rollers). Holding rollers 73 and 74 are shown), roll sponges 77 and 78 that come into contact with both sides of the substrate W supported by the four holding rollers, and a rinse liquid (for example, pure water) on one surface of the substrate W.
- a chemical solution supply nozzle 87B for supplying the chemical solution to the other surface of the substrate W is provided.
- the control unit 30 determines an appropriate replacement time of the roll sponge 77 (and the roll sponge 78) by using the method described above.
- the roll sponge 77 (and the roll sponge 78) is moved to a retreat position away from the surface of the substrate W.
- surface data is acquired at at least two measurement points of the roll sponge 77 by the imaging device 61 (or camera unit 62) of the surface texture measuring device 60, and the two surface data.
- the appropriate replacement time of the roll sponge 77 is determined based on the difference between the two.
- examples of the surface data acquired by the image pickup apparatus 61 (or the camera unit 62) include polarized image data, infrared absorption spectrum spectrum pattern, distorted image data, three-dimensional image data, and spectral image. Data, hyperspectral image data, or polarized image data can be mentioned.
- the image pickup apparatus 61 (or the camera unit 62) can acquire surface data in a state in which the roll sponge 77 moved to the save position is rotated or stationary.
- surface data representing the surface properties of the roll sponge 77 (and the roll sponge 78) actually used for scrub cleaning is acquired at at least two measurement points of the roll sponge 77 having different deterioration degrees.
- the replacement time of the roll sponge 77 is determined based on the difference. Therefore, an appropriate replacement time for the roll sponge 77 can be determined.
- FIG. 25 is a perspective view schematically showing the second cleaning unit 18 of the substrate processing apparatus 1 shown in FIG.
- the second cleaning unit 18 shown in FIG. 25 is a substrate cleaning device according to another embodiment of the present invention.
- the pen-type substrate cleaning apparatus includes a substrate holding portion 41 that holds and rotates the substrate (wafer) W, a pen sponge (cleaning tool) 42 that contacts the surface of the substrate W, and a pen sponge.
- An arm 44 for holding the 42, a rinse liquid supply nozzle 46 for supplying a rinse liquid (usually pure water) to the surface of the substrate W, and a chemical liquid supply nozzle 47 for supplying the chemical liquid to the surface of the substrate W are provided.
- the pen sponge 42 is connected to a cleaning tool rotation mechanism (not shown) arranged in the arm 44, and the pen sponge 42 is rotated around its central axis extending in the vertical direction.
- the substrate holding portion 41 includes a plurality of rollers 45 (four in FIG. 25) for holding the peripheral edge portion of the substrate W.
- Each of these rollers 45 is configured to rotate in the same direction and at the same speed. When the roller 45 rotates while the roller 45 holds the substrate W horizontally, the substrate W is rotated around its central axis in the direction indicated by the arrow.
- the arm 44 is arranged above the substrate W.
- a pen sponge 42 is connected to one end of the arm 44, and a swivel shaft 50 is connected to the other end of the arm 44.
- the pen sponge 42 is connected to the cleaning tool moving mechanism 51 via the arm 44 and the swivel shaft 50. More specifically, a cleaning tool moving mechanism 51 that swivels the arm 44 is connected to the swivel shaft 50.
- the cleaning tool moving mechanism 51 rotates the swivel shaft 50 by a predetermined angle so that the arm 44 is swiveled in a plane parallel to the substrate W.
- the pen sponge 42 supported by the arm 44 moves (swings) in the radial direction of the wafer W.
- the cleaning tool moving mechanism 51 is configured to be able to move the swivel shaft 50 up and down, whereby the pen sponge 42 can be pressed against the surface of the substrate W with a predetermined pressure.
- the lower surface of the pen sponge 42 constitutes a flat scrubbing surface, and the scrubbing surface is in sliding contact with the surface of the substrate W.
- the substrate W is cleaned as follows. First, the substrate W is rotated around its central axis. Next, the cleaning liquid is supplied from the cleaning liquid supply nozzle 47 to the surface of the substrate W. In this state, the pen sponge 42 is pressed against the surface of the substrate W while rotating, and the pen sponge 42 further swings in the radial direction of the substrate W. The substrate W is scrubbed by the pen sponge 42 sliding in contact with the surface of the substrate W in the presence of the cleaning liquid. After scrubbing, the rinse liquid is supplied from the rinse liquid supply nozzle 46 to the surface of the substrate W rotating in order to wash away the cleaning liquid from the substrate W.
- the pen sponge 42 is made of a resin such as PVA and has a porous structure. Therefore, when the scrubbing of the substrate W is repeated, contaminants such as abrasive grains and polishing debris accumulate inside the pen sponge 42, which deteriorates the cleaning performance and may cause back-contamination of the substrate W. Therefore, in order to remove contaminants from the pen sponge 42, the second cleaning unit 18 further includes a cleaning member 80 for cleaning the pen sponge 42.
- the cleaning member 80 is arranged adjacent to the substrate W held by the substrate holding portion 41.
- the cleaning member 80 shown in FIG. 25 has a conical trapezoidal shape.
- the upper surface of the cleaning member 80 constitutes a cleaning surface 81 that contacts the lower surface (scrub surface) of the pen sponge 42.
- the cleaning surface 81 of the cleaning member 80 has a circular central portion 81a and an inclined portion 81b that extends outward from the central portion 81a and is inclined downward.
- the inclined portion 81b has an annular shape.
- the arm 44 is moved outward in the radial direction of the substrate W by the cleaning tool moving mechanism 51 until the pen sponge 42 reaches the upper position of the cleaning member 80. Further, the pen sponge 42 is pressed against the cleaning surface 81 of the cleaning member 80 by the cleaning tool moving mechanism 51 while rotating around its axis.
- a pure water supply nozzle 70 is arranged adjacent to the cleaning member 80, and pure water is supplied from the pure water supply nozzle 70 to the pen sponge 42 in contact with the cleaning member 80.
- the central portion 81a of the cleaning member 80 projects upward and is located at a higher position than other portions (that is, the inclined portion 81b) around the central portion 81a. Therefore, when the pen sponge 42 is lowered, the central portion of the lower surface of the pen sponge 42 comes into contact with the protruding central portion 81a of the cleaning surface 81. When the pen sponge 42 is further lowered, the outer peripheral portion of the lower surface of the pen sponge 42 comes into contact with the inclined portion 81b of the cleaning surface 81. In this way, the entire lower surface of the pen sponge 42 comes into contact with the cleaning surface 81 of the cleaning member 80.
- the cleaning member 80 is made of quartz, resin, polypropylene, polybutylene terephthalate, or the like.
- the central portion 81a of the cleaning member 80 is located at a higher position than other portions around it (that is, the inclined portion 81b). Therefore, the central portion of the pen sponge 42 is pressed more strongly against the cleaning member 80 than the other portions, and particles such as abrasive grains and polishing debris that have entered the central portion of the pen sponge 42 can be removed. The particles once removed from the pen sponge 42 quickly flow down on the inclined portion 81b of the cleaning member 80 together with pure water. Therefore, the particles are prevented from reattaching to the pen sponge 42.
- the rotating pen sponge 42 in order to clean the surface of the substrate W, the rotating pen sponge 42 is swung on the rotating substrate W.
- the magnitude of the rotation speed of the pen sponge 42 becomes zero on the rotation axis of the pen sponge 42, and gradually increases toward the peripheral edge of the pen sponge 42. Therefore, the degree of deterioration and the degree of contamination of the scrubbing surface of the pen sponge 42 differ in the radial direction thereof.
- the surface texture measuring device 60 acquires the surface data of the pen sponge 42 at at least two measurement points of the pen sponge (cleaning tool) 42, and based on the difference between the two surface data, the surface texture measuring device 60 obtains the surface data of the pen sponge 42. Determine the appropriate replacement time for the pen sponge 42.
- FIG. 26A is a schematic view showing an example of the surface property measuring device 60 for acquiring the surface data of the pen sponge 42
- FIG. 26B is a bottom view of the pen sponge 42 shown in FIG. 26A
- FIG. 26C is a bottom view of FIG. 26A.
- It is a schematic diagram which shows the modification of the surface property measuring apparatus 60 shown in 1. Since the configuration of the present embodiment not particularly described is the same as the configuration of the above-described embodiment, the duplicate description will be omitted.
- the imaging devices 61A and 61B (or camera units 62A and 62B) of the surface texture measuring device 60 have two measurement points PA, which are separated in the radial direction of the scrubbing surface of the pen sponge 42.
- the surface data of the pen sponge 42 is acquired by PB.
- the image pickup devices 61A and 61B (or the camera units 62A and 62B) acquire the surface data of the pen sponge 42 at the retreat position located above the cleaning member 80.
- the measurement point PA is at the center of the scrubbing surface of the pen sponge 42.
- the surface texture measuring device 60 has camera moving mechanisms 63A and 63B for moving the imaging devices 61A and 61B (or camera units 62A and 62B) in the radial direction of the pen sponge 42, the measuring points PA on the scrubbing surface, The position of the PB can be changed arbitrarily.
- the surface texture measuring device 60 has an imaging device 61C (or a camera unit 62C) for acquiring surface data of the measurement point PC set on the side surface of the pen sponge 42.
- the pen sponge 42 is brought into contact with the cleaning member 80 after the image pickup devices 61A and 61B (or the camera units 62A and 62B) have acquired the surface data of the scrubbing surface of the pen sponge 42.
- the image pickup apparatus 61C (or the camera unit 62C) acquires surface data of the side surface of the pen sponge 42 pressed against the cleaning member 80.
- the surface texture measuring device 60 has a camera moving mechanism 63C for moving the image pickup device 61C (or the camera unit 62C) in the vertical direction, the position of the measurement point PC on the side surface of the pen sponge 42 is arbitrarily changed. Can be done.
- surface data representing the surface properties of the pen sponge 42 actually used for scrub cleaning is acquired at at least two measurement points of the pen sponge 42 having different deterioration degrees, and the pen sponge is based on the difference. Determine when to replace 42. Therefore, an appropriate replacement time for the pen sponge 42 can be determined.
- control unit 30 determines the replacement time of the roll sponges 77 and 78 and the pen sponge 42 based on the difference between at least two surface data acquired by the surface property measuring device 60. Using a similar method, the control unit 30 may determine the completion of the "initial break-in" of the roll sponges 77, 78 and the pen sponge 42.
- an initial operation is carried out in which a break-in operation of rubbing the new cleaning tool on a dummy substrate having the same shape as the product substrate is repeated for a predetermined number of times.
- the number of substrates to which the cleaning tool is rubbed during the initial operation has been determined based on quality control and / or the rule of thumb of the operator, as in the conventional method of determining the replacement time of the cleaning tool.
- the surface condition of the cleaning tool rubbed against a predetermined number of substrates (for example, the degree of scraping of the surface of the cleaning tool or the degree of peeling of the coating applied to the surface of the cleaning tool) is still the target surface condition.
- the cleaning tool will not be able to exert its proper cleaning ability. In this case, poor cleaning of the product substrate may occur.
- the surface condition of the cleaning tool rubbed against a predetermined number of substrates greatly exceeds the target surface condition, the number of substrates that can be cleaned by the cleaning tool decreases, and the substrate cleaning apparatus This leads to an increase in running costs.
- the control unit 30 executes the break-in confirmation operation by using the same method as the method for determining the replacement time of the cleaning tool.
- the break-in confirmation operation is performed to determine the completion of the "initial break-in" of the cleaning tool after replacing the cleaning unit (roll sponge 77, 78, or pen sponge 42) with a new cleaning tool. It is a process to be performed.
- a retreat position where a new cleaning tool (roll sponge 77, 78, or pen sponge 42) is separated from the surface of the substrate W.
- the image pickup device 61 (or camera unit 62) of the surface texture measuring device 60 acquires surface data at at least two measurement points of the cleaning tool, and based on the difference between the two surface data, the cleaning tool Determine the completion of initial break-in.
- examples of the surface data acquired by the image pickup apparatus 61 (or the camera unit 62) include polarized image data, infrared absorption spectrum spectrum pattern, distorted image data, three-dimensional image data, and spectral image. Examples include data, hyperpecto image data, and polarized image data.
- the image pickup apparatus 61 (or the camera unit 62) can acquire surface data in a state in which the cleaning tool moved to the retreat position is rotated or stationary.
- the board processing device 1 or the board cleaning devices (board cleaning units) 16 and 18 machine-learn the appropriate replacement time of the cleaning tool (roll sponge 77, 78 or pen sponge 42) with the machine learning device described below. It may be predicted or determined using the trained model constructed by performing.
- Machine learning is executed by a learning algorithm that is an algorithm of artificial intelligence (AI), and machine learning builds a learned model that predicts an appropriate replacement time of cleaning tools 77, 78, 42.
- the learning algorithm for constructing the trained model is not particularly limited.
- known learning algorithms such as "supervised learning”, “unsupervised learning”, “reinforcement learning”, and “neural network” are used as learning algorithms for learning the appropriate replacement time of the cleaning tools 77, 78, 42. Can be adopted.
- FIG. 27 is a schematic diagram showing an example of a machine learning device.
- the machine learning device 300 shown in FIG. 27 is a device connected to the control unit 30 and learns an appropriate replacement time of the cleaning tools 77, 78, 42 provided in the cleaning units 16 and 18 of the substrate processing device 1.
- the machine learning device 300 includes a state observation unit 301, an exchange data acquisition unit 302, and a learning unit 303.
- the control unit 30 may include the machine learning device 300 shown in FIG. 27. In this case, a trained model that predicts an appropriate replacement time for the cleaning tools 77, 78, 42 is constructed using the processor 30a of the control unit 30.
- the state observation unit 301 observes a state variable as an input value for machine learning.
- This state variable contains at least the surface data acquired by the surface texture device 60.
- the state variable is the output value of the vibration meter 97 attached to the bearing 90a (see FIG. 3) of the bearing device 90 and / or the output value of the torque sensor 93b (see FIG. 3) of the motor 93. It may be included. Further, the state variable may include the measured value of the particle counter 114 provided in the cleaning tool cleaning device 100.
- the exchange data acquisition unit 302 acquires exchange data from the exchange determination unit 310.
- the replacement data is data used when constructing a trained model that predicts an appropriate replacement time of the cleaning tools 77, 78, 42, and it is known whether or not the cleaning tools 77, 78, 42 should be replaced. It is the data judged according to the judgment method.
- the exchanged data is associated with (associated with) a state variable input to the state observer 301.
- An example of machine learning executed by the machine learning device 300 is as follows. First, the state observer 301 acquires the state variable including at least the surface data, and the exchange data acquisition unit 302 acquires the exchange data of the cleaning tools 77, 78, 42 associated with the state variable acquired by the state observer 301. get. The learning unit 303 determines the appropriate replacement time of the cleaning tools 77, 78, 42 based on the training data set which is a combination of the state variable acquired from the state observation unit 52 and the exchange data acquired from the exchange data acquisition unit 51. learn. The machine learning executed by the machine learning device 300 is repeatedly executed until the machine learning device 300 outputs an appropriate replacement time of the cleaning units 77, 78, 42.
- the machine learning executed by the learning unit 303 of the machine learning device 300 may be machine learning using a neural network, particularly deep learning.
- Deep learning is a machine learning method based on a neural network in which hidden layers (also called intermediate layers) are multi-layered.
- hidden layers also called intermediate layers
- machine learning using a neural network composed of an input layer, two or more hidden layers, and an output layer is referred to as deep learning.
- FIG. 28 is a schematic diagram showing an example of the structure of the neural network.
- the neural network shown in FIG. 28 has an input layer 350, a plurality of hidden layers 351 and an output layer 352.
- the neural network is a cleaning tool based on a training data set consisting of a large number of combinations of state variables acquired by the state observer 301 and exchanged data associated with the state variables and acquired by the exchange data acquisition unit 302. Learn the appropriate replacement time for 77, 78, 42. That is, the neural network learns the relationship between the state variable and the replacement time of the cleaning tools 77, 78, 42. Such machine learning is so-called "supervised learning". In supervised learning, a large amount of combinations of state variables and exchanged data (labels) associated with these state variables are input to a neural network, and their relationships are inductively learned.
- the neural network may learn the appropriate replacement time of the cleaning tools 77, 78, 42 by so-called "unsupervised learning".
- unsupervised learning for example, a large amount of only state variables are input to a neural network, and learning how the state variables are distributed is learned. Then, in unsupervised learning, even if the teacher output data (exchange data) corresponding to the state variables is not input to the neural network, the input state variables are compressed, classified, shaped, etc., and the cleaning tool 77, Build a trained model to output the appropriate replacement times of 78 and 42. That is, in unsupervised learning, the neural network classifies a large number of input state variables into groups with similar characteristics.
- the neural network sets a predetermined standard for outputting the appropriate replacement time of the cleaning tools 77, 78, 42 for the plurality of classified groups so that the relationship between them is optimized.
- the appropriate replacement time of the cleaning tools 77, 78, 42 is output.
- the machine learning executed by the learning unit 303 uses a so-called "recurrent neural network (RNN)" in order to reflect the change over time of the state variable in the trained model.
- RNN recurrent neural network
- the recurrent neural network uses not only the state variables of the current time but also the state variables that have been input to the input layer 351 so far.
- the appropriate replacement time of the cleaning tools 77, 78, and 42 is estimated based on the transitions of the state variables input so far by expanding and considering the changes of the state variables along the time axis. You can build a trained model to do.
- FIGS. 29A and 29B are development views for explaining a simple recursive network (Elman network: Elman Network) which is an example of a recurrent neural network. More specifically, FIG. 29A is a schematic diagram showing the time-axis expansion of the Elman network, and FIG. 29B shows the backpropagation through time of the error backpropagation method (also referred to as “backpropagation”). It is a schematic diagram.
- Elman network Elman Network
- the error propagates so as to go back in time, unlike a normal neural network (see FIG. 29B).
- the appropriate replacement timing of the cleaning tools 77, 78, 42 based on the transition of the state variables input so far. You can build a trained model that outputs.
- the trained model constructed in this way is stored in the storage device 30b (see FIG. 27) of the control unit 30.
- the control unit 30 operates according to a program electrically stored in the storage device 30b. That is, the processor 30a of the control unit 30 inputs a state variable including at least the surface data transmitted from the surface texture measuring device 60 to the control unit 30 into the input layer 351 of the trained model, and the input state variable (and the input state variable (and) , The amount of change in the state variable over time) predicts the number of processed substrates W until the surface data of the cleaning tools 77, 78, 42 reaches a predetermined threshold Dt, and outputs the predicted number of processed sheets. The operation for outputting from the layer 352 is executed.
- control unit 30 can acquire the number of substrates W that can be processed by the time the cleaning tools 77, 78, 42 are replaced (that is, the service life) is reached (hereinafter, the predicted number of substrates W). Further, the control unit 30 adds the predicted number of processed sheets output from the output layer 303 to the number of processed sheets after the cleaning tools 77, 78, 42 are started to be used, thereby causing the cleaning tools 77, 78, 42 to be processed.
- the replacement time that is, the life of the cleaning tools 77, 78, 42
- the control unit 30 determines this.
- the number of processed sheets and the replacement time of the cleaning tool may be stored in the replacement determination unit 310 as additional teacher data.
- the machine learning device 300 updates the trained model through machine learning based on the teacher data and the additional teacher data. As a result, it is possible to improve the accuracy of the predicted time output from the trained model and the replacement time of the cleaning tool.
- the measured value of the particle counter 114 increases. This phenomenon also occurs in the lower roll sponge 78. Therefore, by inputting the measured value of the particle counter 114 as a state variable into the input layer 351 of the neural network, a trained model is constructed in which the predicted number of cleaning tools 77 and 78 is output from the output layer 352 more accurately. can do.
- the substrate processing apparatus 1 is a substrate polishing apparatus including a plurality of polishing units 14a to 14d, but the substrate processing apparatus 1 is not limited to these embodiments.
- the substrate processing apparatus 1 may be a substrate plating apparatus having at least one plating tank and plating a substrate in the plating tank.
- the above-mentioned substrate cleaning unit can be used to clean the substrate before being immersed in the plating tank and / or the substrate after being immersed.
- the substrate processing apparatus 1 may be a substrate cleaning apparatus for cleaning the substrate after being subjected to various processes. In this case, the substrate cleaning unit described above is incorporated in the substrate cleaning apparatus.
- the wafer which is a substrate having a circular shape
- the substrate is scrubbed with a cleaning tool.
- the substrate has a circular shape. It is not limited to the wafer to have.
- the substrate may be a glass substrate having a rectangular shape or a liquid crystal panel.
- the substrate holding device does not have to rotate the glass substrate or the liquid crystal panel.
- the cleaning tool is a roll sponge or a pen sponge, but the cleaning tool may be a cleaning brush.
- the appropriate replacement time of the cleaning tool is determined based on the surface data acquired by the surface quality measuring device 60. It may be placed in at least one of 14d to determine the appropriate time to replace the polishing pad.
- FIG. 30 is a perspective view schematically showing a polishing unit (polishing apparatus) according to one embodiment. At least one of the polishing units 14a to 14d of the substrate polishing apparatus shown in FIG. 1 is the polishing unit (polishing apparatus) shown in FIG.
- the polishing unit shown in FIG. 30 has a polishing table 135 to which a polishing pad 133 having a polishing surface 133a is attached, and a polishing head (top ring) that holds the substrate W and presses the substrate W against the polishing pad 133 on the polishing table 135.
- a polishing liquid supply nozzle 138 for supplying a polishing liquid or a dressing liquid (for example, pure water) to the polishing pad 133, and a dresser 141 for dressing the polishing surface 133a of the polishing pad 133.
- the dressing device 140 and the dressing device 140 are provided. In one embodiment, the dressing device 140 may be omitted.
- the polishing table 133 is connected to a table motor 131 arranged below the table shaft 135a, and the table motor 131 rotates the polishing table 135 in the direction indicated by the arrow.
- a polishing pad 133 is attached to the upper surface of the polishing table 135, and the upper surface of the polishing pad 133 constitutes a polishing surface 133a for polishing the substrate W.
- the polishing head 137 is connected to the lower end of the head shaft 136.
- the polishing head 137 is configured so that the substrate W can be held on the lower surface thereof by vacuum suction.
- the head shaft 136 is moved up and down by a vertical movement mechanism (not shown).
- the head shaft 136 is rotatably supported by the head arm 142, and the head arm 142 is driven by the head swivel motor 154 and is configured to swivel around the head swivel shaft 143.
- the polishing head 137 can swing on the polishing pad 33 in the substantially radial direction of the polishing pad 33. Further, by driving the head swivel motor 154, the polishing head 137 moves between the polishing position above the polishing pad 133 and the standby position on the side of the polishing pad 133.
- the substrate W is polished as follows.
- the polishing head 137 and the polishing table 135 are rotated in the directions indicated by the arrows, respectively, and the polishing liquid (slurry) is supplied onto the polishing pad 133 from the polishing liquid supply nozzle 138.
- the polishing head 137 presses the substrate W against the polishing surface 133a of the polishing pad 133.
- the surface of the substrate W is polished by the mechanical action of the abrasive grains contained in the polishing liquid and the chemical action of the polishing liquid.
- the dressing device 140 dresses (conditions) the polished surface 133a.
- FIG. 31 is a schematic view showing a state of the polishing head 137 swinging on the polishing pad 133. As shown in FIG. 31, the polishing head 137 swings in the substantially radial direction of the polishing pad 133 so that the substrate W held on the lower surface thereof moves between the center CP and the outer edge of the polishing pad 133.
- the polishing pad 133 is also made of resin, and the surface of the polishing pad 133 deteriorates as the polishing of the substrate W is repeated. Therefore, it is necessary to replace the polishing pad 133 with a new polishing pad at an appropriate timing.
- the appropriate replacement time of the polishing pad 133 is determined by using the surface texture measuring device 60 described above. Since the configuration of the surface texture measuring device 60 of the present embodiment, which is not particularly described, is the same as the configuration of the surface texture measuring device 60 described above, the overlapping description thereof will be omitted.
- the polishing head 137 swings in the substantially radial direction of the polishing pad 133 during polishing of the substrate W. Therefore, the degree of deterioration and the degree of contamination of the polishing pad 133 differ in the radial direction of the polishing pad 133. Therefore, in order to determine an appropriate replacement time of the polishing pad 137, the surface texture measuring device 60 acquires the surface data of the polishing pad 133 at two measurement points different in the radial direction of the polishing pad 133, and the two. Based on the difference in surface data, the appropriate replacement time for the polishing pad 133 is determined.
- FIG. 32 is a schematic view showing how the two imaging devices 61A and 61B of the surface texture measuring device 60 acquire surface data at two measurement points PA and PB that are different in the radial direction of the polishing pad 133.
- the polishing pad 133 is divided into a central region CRp and an outer edge region ERp at a boundary line L located at a position half the radius of the polishing pad 133 from the central CP.
- One imaging device 61A acquires surface data on or near the boundary line L
- the other imaging device 61B acquires surface data on the outer edge region ERp.
- the other imaging device 61B may acquire surface data on the central region CRp (see alternate long and short dash line in FIG. 32).
- the image pickup device 61B may be omitted.
- the imaging device 61 of the surface texture measuring device 60 uses a camera unit (not shown) configured as a hyperspectral camera and hyperspectral image data acquired by the hyperspectral camera to obtain spectral intensities for each wavelength. It is equipped with an image processing unit (not shown) that converts to a graph.
- the image pickup device 61 can grasp the degree of deterioration of the polishing pad 133 by calculating the amount of change in the spectral intensity at a predetermined wavelength.
- the control unit 30 moves the polishing head 137 to the standby position every time the substrate W having a predetermined number of NAs is polished (see FIG. 32), and then measures using the image pickup devices 61A and 61B of the surface texture measuring device 60.
- the graph of the spectral intensity for each wavelength converted from the hyperspectral image data acquired at the points PA and PB is acquired as surface data.
- the control unit 30 calculates the difference between the spectral intensity of the measurement point PA and the spectral intensity of the measurement point PB at a predetermined wavelength. Then, the control unit 30 compares the calculated difference with a predetermined threshold value. This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the control unit 30 determines that the polishing pad 133 has reached the replacement time (that is, the life), and outputs an alarm (first alarm) prompting the replacement of the polishing pad 133. .. In one embodiment, the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the polishing unit. When the difference is smaller than a predetermined threshold value, the control unit 30 conveys the next substrate W to the polishing unit and continues the polishing process of the substrate W.
- the control unit 30 determines that the time to sharpen the polishing pad 133 (that is, the dressing time) has been reached, and the dresser 141 of the polishing pad 133 is determined.
- the dressing process may be started.
- the spectral intensity graphs converted from the hyperspectral image data acquired at the measurement points PA and PB are acquired as surface data by using the imaging devices 61A and 61B of the surface texture measuring device 60, and dressing is performed. If there is no change in the difference between the spectral intensities of the measurement points PA and PB before and after, the control unit 30 may determine that the polishing pad 133 has reached the replacement time (that is, the life).
- control unit 30 may apply the above-mentioned method for determining an appropriate replacement time of the cleaning tool based on the inclination of the tangent line to the polishing pad 133.
- the control unit 30 stores in advance a predetermined threshold value to be compared with the amount of change in the inclination of the tangent line, and based on the amount of change in the inclination of the tangent line and the above difference, the polishing pad 133 is appropriately replaced. decide.
- the pre-threshold value (second threshold value) Dt' may be determined in advance by subtracting the predetermined value ( ⁇ t) from the predetermined threshold value (first threshold value) Dt.
- the control unit 30 outputs a second alarm when the difference between the spectral intensity of the measurement point PA and the spectral intensity of the measurement point PB at a predetermined wavelength becomes equal to or greater than the pre-threshold value Dt'.
- the second alarm does not need to replace the polishing pad 133 immediately, but is an alarm notifying the operator that the period of use of the polishing pad 133 will soon reach the replacement time.
- the second alarm allows the operator to prepare a new polishing pad 133 in advance.
- the control unit 30 calculates the difference between the spectral intensity at the predetermined wavelength at the measurement point PA acquired this time and the spectral intensity at the measurement point PA at the predetermined wavelength acquired last time. Then, the control unit 30 compares this difference with a predetermined threshold value. This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the control unit 30 determines that the polishing pad 133 has a replacement time (that is, a lifetime). ) Has been reached, and an alarm (first alarm) prompting the replacement of the polishing pad 133 is output.
- the difference between the spectral intensity at the predetermined wavelength acquired this time and the spectral intensity at the predetermined wavelength acquired last time is smaller than the predetermined threshold, and the variation of the spectral intensity graph acquired this time
- the control unit 30 determines that the polishing pad 133 is replaced (that is, the replacement time). It may be determined that the life) has been reached.
- the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the polishing unit.
- the control unit 30 conveys the next substrate W to the polishing unit and continues the polishing process of the substrate W.
- control unit 30 issues an alarm prompting the replacement of the polishing pad 133 after polishing the substrate W having a predetermined number of processed sheets NB after the difference becomes smaller than the predetermined threshold value, and the polishing unit.
- the transfer operation of the next substrate W to the may be stopped.
- the substrate processing apparatus slightly additionally polishes the substrate W and removes and cleans the deposits on the substrate while pressing a contact member having a diameter smaller than that of the substrate W against the substrate W after the polishing treatment to move the substrate W relative to the substrate W. It may have a buffing device to be used.
- the buffing apparatus may be arranged in the substrate processing apparatus instead of the first cleaning unit 16 shown in FIG. 1, or may be arranged between the polishing units 14a to 14d and the first cleaning unit 16. Good.
- FIG. 33 is a schematic view showing a buffing apparatus according to an embodiment.
- the buffing apparatus shown in FIG. 33 includes a buffing table 200 on which a substrate W is installed, a buffing component 250, a liquid supply system 270 for supplying a buffing liquid, and a buff pad (buff member) 252 for conditioning (sharpening). ) Is provided with a conditioning unit 280.
- the buffing component 250 includes a buff head 255 to which a buff pad 252 for performing buffing is attached to the treated surface of the substrate W, and a buff arm 256 for holding the buff head 255.
- the buffing solution contains at least one of DIW (pure water), a cleaning chemical solution, and a polishing solution such as a slurry.
- DIW pure water
- a cleaning chemical solution a cleaning chemical solution
- a polishing solution such as a slurry.
- the other method is a method of removing a certain amount of the substrate W to which the contaminants are attached by polishing or the like.
- the buffing solution is preferably a cleaning chemical solution or DIW, and in the latter case, a polishing solution is preferable.
- the buff pad 252 is formed of, for example, a polyurethane foam hard pad, a suede soft pad, or a sponge.
- the type of buff pad 252 may be appropriately selected depending on the material of the surface of the substrate W and the state of contaminants to be removed. Further, the surface of the buff pad 252 may be provided with a groove shape such as a concentric groove, an XY groove, a spiral groove, or a radial groove. Further, at least one hole penetrating the buff pad 252 may be provided in the buff pad 252, and the buffing liquid may be supplied through the main hole. Further, the buff pad 252 may be made of a sponge-like material through which the buffing liquid can permeate, such as a PVA sponge. As a result, it is possible to make the flow distribution of the buffing liquid in the buff pad surface uniform and to quickly discharge the contaminants removed by the buffing.
- the buff table 200 has a mechanism for adsorbing the substrate W. Further, the buff table 200 can be rotated around the rotation axis A by a drive mechanism (not shown). In one embodiment, the buff table 200 may be adapted to cause the substrate W to perform an angular rotation motion or a scroll motion by a drive mechanism (not shown).
- the buff pad 252 is attached to the surface of the buff head 255 facing the substrate W.
- the buff head 255 can be rotated around the rotation axis B by a drive mechanism (not shown). Further, the buff head 255 can press the buff pad 252 against the processing surface of the substrate W by a drive mechanism (not shown).
- the buff arm 256 can move the buff head 255 within the radius or diameter of the substrate W as shown by the arrow C. Further, the buff arm 256 is capable of swinging the buff head 255 to a position where the buff pad 252 faces the conditioning portion 280.
- the conditioning unit 280 is a member for conditioning the surface of the buff pad 252.
- the conditioning unit 280 includes a dress table 281 and a dresser 282 installed on the dress table 281.
- the dress table 281 can be rotated around the rotation axis D by a drive mechanism (not shown). Further, the dress table 281 may be adapted to cause the dresser 282 to scroll by a drive mechanism (not shown).
- the buff processing device When conditioning the buff pad 252, the buff processing device rotates the buff arm 256 until the buff pad 252 faces the dresser 282.
- the buffing apparatus conditions the buff pad 252 by rotating the dress table 281 around the rotation axis D, rotating the buff head 255, and pressing the buff pad 252 against the dresser 282.
- the liquid supply system 270 provides a pure water nozzle 271 for supplying pure water (DIW) to the surface of the substrate W, a chemical liquid nozzle 272 for supplying a chemical liquid to the surface of the substrate W, and a slurry on the surface of the substrate W.
- a slurry nozzle 273 for supplying is provided.
- the buffing apparatus supplies the processing liquid to the substrate W, rotates the buff table 200 around the rotation axis A, presses the buff pad 252 against the surface of the substrate W, and rotates the buff head 255 around the rotation axis B while rotating the arrow C.
- the substrate W is buffed by swinging in the direction.
- the buffing treatment includes at least one of a buffing treatment and a buffing treatment.
- the substrate W and the buff pad 252 are moved relative to each other while the buff pad 252 is brought into contact with the substrate W, and an abrasive such as a slurry is interposed between the substrate W and the buff pad 252. It is a process of slightly scraping the surface.
- the buffing treatment it is possible to remove the surface layer portion to which contaminants have adhered, additionally remove the portion that could not be removed by the main polishing in the polishing units 14a to 14d, or improve the morphology after the main polishing.
- the substrate W and the buff pad 252 are moved relative to each other while the buff pad 252 is in contact with the substrate W, and a cleaning liquid (for example, a chemical solution or a chemical solution and pure water) is used between the substrate W and the buff pad 252.
- a cleaning liquid for example, a chemical solution or a chemical solution and pure water
- the buff pad 252 is also made of resin, and the surface of the buff pad 252 deteriorates as the buffing process of the substrate W is repeated. Therefore, it is necessary to replace the buff pad 252 with a new buff pad 252 at an appropriate timing.
- the appropriate replacement time of the buff pad 252 is determined by using the surface texture measuring device 60 described above. Since the configuration of the surface texture measuring device 60 of the present embodiment, which is not particularly described, is the same as the configuration of the surface texture measuring device 60 described above, the overlapping description thereof will be omitted.
- FIG. 34 is a schematic view showing how the two imaging devices 61A and 61B of the surface texture measuring device 60 acquire surface data at two measurement points PA and PB that are different in the radial direction of the buff pad 252.
- the buff pad 252 is divided into a central region CRb and an outer edge region ERb at a boundary line L'located at a position half the radius of the buff pad 252 from the central CP.
- One imaging device 61A acquires surface data on or near the boundary line L'
- the other imaging device 61B acquires surface data on the outer edge region ERb.
- the other imaging device 61B may acquire surface data on the central region CRb (see alternate long and short dash line in FIG. 34).
- the surface texture measuring device 60 has a camera moving mechanism for moving the image pickup device 61A in the radial direction of the buff pad 252, the image pickup device 61B may be omitted.
- the image pickup device 61 of the surface texture measuring device 60 uses a camera unit (not shown) configured as a hyperspectral camera and hyperspectral image data acquired by the hyperspectral camera to obtain spectral intensities for each wavelength. It is equipped with an image processing unit (not shown) that converts to a graph.
- the image pickup device 61 can grasp the degree of deterioration of the buff pad 252 by calculating the amount of change in the spectral intensity at a predetermined wavelength.
- the control unit 30 moves the buff pad 252 above the dresser 282 each time the substrate W of a predetermined number of NAs is buffed, and then uses the image pickup devices 61A and 61B of the surface texture measuring device 60 to measure the measurement points PA,
- the graph of the spectral intensity for each wavelength converted from the hyperspectral image data acquired by PB is acquired as surface data.
- control unit 30 calculates the difference between the spectral intensity of the measurement point PA and the spectral intensity of the measurement point PB at a predetermined wavelength, and compares the calculated difference with a predetermined threshold value.
- This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the control unit 30 determines that the buff pad 252 has reached the replacement time (that is, the life), and outputs an alarm (first alarm) prompting the replacement of the buff pad 252.
- the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the buffing device.
- the control unit 30 conveys the next substrate W to the buffing apparatus and continues the buffing processing of the substrate W.
- the pre-threshold value (second threshold value) Dt' may be determined in advance by subtracting a predetermined value ( ⁇ t) from the predetermined threshold value (first threshold value) Dt.
- the control unit 30 outputs a second alarm when the difference between the spectral intensity of the measurement point PA and the spectral intensity of the measurement point PB at a predetermined wavelength becomes equal to or greater than the pre-threshold value Dt'.
- the second alarm does not need to replace the buff pad 252 immediately, but is an alarm that notifies the operator that the period of use of the buff pad 252 will soon reach the replacement time.
- the second alarm allows the operator to prepare a new buff pad 252 in advance.
- control unit 30 may apply to the buff pad 252 the above-mentioned method of determining an appropriate replacement time of the cleaning tool based on the inclination of the tangent line.
- control unit 30 stores in advance a predetermined threshold value to be compared with the amount of change in the inclination of the tangent line, and determines an appropriate replacement time of the buff pad 252 based on the amount of change in the inclination of the tangent line and the above difference. To do.
- the replacement time of the buff pad 252 using the graph of the spectral intensity for each wavelength converted from the hyperspectral image data acquired at one measurement point PA (or PB). May be determined. More specifically, each time the buffing process of the substrate W having a predetermined number of NAs is repeated, the hyperspectral image data acquired at the measurement point PA is converted by using the image pickup device 61A of the surface texture measuring device 60. A graph of spectral intensity for each wavelength is acquired as surface data. Further, the control unit 30 calculates the difference between the spectral intensity at the predetermined wavelength at the measurement point PA acquired this time and the spectral intensity at the measurement point PA at the predetermined wavelength acquired last time. Then, the control unit 30 compares this difference with a predetermined threshold value. This threshold value is predetermined by an experiment or the like and is stored in advance in the control unit 30.
- the control unit 30 determines that the buff pad 252 is replaced (that is, the life). Is determined, and an alarm (first alarm) prompting the replacement of the buff pad 252 is output.
- the difference between the spectral intensity at the predetermined wavelength acquired this time and the spectral intensity at the predetermined wavelength acquired last time is smaller than the predetermined threshold, and the variation of the spectral intensity graph acquired this time
- the control unit 30 determines that the buff pad 252 is replaced (that is, the service life). ) May be determined.
- the control unit 30 may issue the first alarm and stop the operation of transporting the substrate W to the buffing device.
- the control unit 30 conveys the next substrate W to the buffing apparatus and continues the buffing processing of the substrate W.
- the control unit 30 buffs the substrate W having a predetermined number of processed sheets NB, and then issues an alarm prompting the replacement of the buff pad 252 and buffs the process.
- the transfer operation of the next substrate W to the apparatus may be stopped.
- the substrate cleaning device described above may be an independent device that is not incorporated in the CMP device.
- the above-described embodiment of the machine learning device for learning the replacement time of the cleaning tool can be applied to the machine learning device for learning the replacement time of the polishing pad and / or the buff pad. Therefore, the present invention is not limited to the described embodiments, but is construed in the broadest range according to the technical idea defined by the claims.
- the present invention can be used in a substrate cleaning device and a substrate cleaning method for scrubbing the substrate with a cleaning tool while supplying a cleaning liquid to a substrate such as a semiconductor substrate, a glass substrate, or a liquid crystal panel. Furthermore, the present invention can be used in a polishing apparatus for polishing the surface of a substrate. Further, the present invention further polishes the substrate slightly while pressing a contact member having a diameter smaller than that of the substrate against the substrate after the polishing treatment and causing the substrate to move relative to the substrate, and removes and cleans the deposits on the substrate. It can be used for buffing equipment. Further, the present invention can be applied to a substrate processing apparatus equipped with at least one of a substrate cleaning apparatus, a polishing apparatus, and a buffing apparatus. Further, the present invention can be used in a machine learning device that learns at least one of a cleaning tool replacement time, a polishing pad replacement time, and a buff member replacement time.
Abstract
Description
本発明の一態様では、洗浄具の適切な交換時期を決定することができる基板洗浄装置および基板洗浄方法を提供することを目的とする。さらに、本発明の一態様では、研磨パッドの適切な交換時期を決定することができる研磨装置を提供することを目的とする。さらに、本発明の一態様では、バフパッドの適切な交換時期を決定することができるバフ処理装置を提供することを目的とする。さらに、本発明の一態様では、このような基板洗浄装置、研磨装置、およびバフ処理装置のいずれかを備えた基板処理装置を提供することを目的とする。さらに、本発明の一態様では、洗浄具の適切な交換時期を予測することが可能な機械学習器を提供することを目的とする。さらに、本発明の一態様では、研磨パッドの適切な交換時期を予測することが可能な機械学習器を提供することを目的とする。さらに、本発明の一態様では、バフパッドの適切な交換時期を予測することが可能な機械学習器を提供することを目的とする。
一態様では、前記表面性状測定装置は、前記表面データを取得する撮像装置と、前記撮像装置を移動させるカメラ移動機構とを備える。
一態様では、前記洗浄具を、該洗浄具が前記基板の表面に接触する洗浄位置と、該洗浄具が前記基板の表面から離れた待機位置との間で移動させる洗浄具移動ユニットをさらに備え、前記表面性状測定装置は、前記待機位置に移動された前記洗浄具の表面データを取得する。
一態様では、前記表面データは、二極化画像データ、赤外吸収スペクトルのスペクトルパターン、歪み画像データ、三次元画像データ、分光画像データ、ハイパースペクトル画像データ、および偏光画像データのうちのいずれかである。
一態様では、前記表面データは、前記ハイパースペクトル画像データから変換されたスペクトル強度グラフであり、所定の波長における前記スペクトル強度の差分が所定の閾値よりも大きくなった場合に、前記洗浄具が交換時期に達したと決定する。
一態様では、さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記洗浄具が交換時期に達したと決定する。
一態様では、前記表面データを、カメラ移動機構によって移動される撮像装置によって取得する。
一態様では、前記表面データは、前記洗浄具が前記基板の表面から離れた待機位置で取得される。
一態様では、前記表面データを取得する工程は、前記測定ポイントにおける前記洗浄具の二極化画像データ、赤外吸収スペクトルのスペクトルパターン、歪み画像データ、三次元画像データ、分光画像データ、ハイパースペクトル画像データ、および偏光画像データのうちのいずれかを取得する工程である。
一態様では、前記表面データを取得する工程は、前記ハイパースペクトル画像データから変換されたスペクトル強度グラフを取得する工程であり、
所定の波長における前記スペクトル強度の差分が所定の閾値よりも大きくなった場合に、前記洗浄具が交換時期に達したと決定する。
一態様では、前記状態変数には、前記洗浄具を回転させる電動機に設けられたトルクセンサの出力値がさらに含まれる。
一態様では、前記状態変数には、洗浄具洗浄装置の洗浄槽から排出される洗浄液内のパーティクルの数を測定するパーティクルカウンタの測定値がさらに含まれる。
さらに、本発明によれば、実際に基板の研磨に用いられている研磨パッドの表面性状(表面形状、および汚染度など)を表す表面データを、劣化具合の異なる少なくとも2つの測定ポイントで取得し、その差分に基づいて研磨パッドの交換時期を判断する。したがって、研磨パッドの適切な交換時期を決定することができる。
さらに、本発明によれば、実際に基板のバフ処理に用いられているバフパッドの表面性状(表面形状、および汚染度など)を表す表面データを、劣化具合の異なる少なくとも2つの測定ポイントで取得し、その差分に基づいてバフパッドの交換時期を判断する。したがって、バフパッドの適切な交換時期を決定することができる。
14a,14b,14c,14d 研磨ユニット
17 第1洗浄ユニット(第1基板洗浄装置)
18 第2洗浄ユニット(第2基板洗浄装置)
20 乾燥ユニット
22 第1基板搬送ロボット
24 基板搬送ユニット
26 第2基板搬送ロボット
28 第3基板搬送ロボット
30 制御部
41 基板保持部
42 ペンスポンジ(洗浄具)
51 洗浄具移動機構
60 表面性状測定装置
61A,61B,61C 撮像装置
62A,62B,62C カメラユニット
65 画像処理ユニット
77,78 ロールスポンジ(洗浄具)
90 軸受装置
90a 軸受
93 電動機
93b トルクセンサ
97 振動センサ
114 パーティクルカウンタ
300 機械学習器
301 状態観測部
302 交換データ取得部
303 学習部
310 交換判定部
Claims (33)
- 基板を保持する基板保持部と、
洗浄液の存在下で前記基板に摺接することで前記基板を洗浄する洗浄具と、
前記洗浄具の表面性状を表す表面データを非接触式に取得する表面性状測定装置と、
前記表面性状測定装置に接続され、前記表面データに基づいて、前記洗浄具の交換時期を決定する制御部と、を備え、
前記表面性状測定装置は、所定枚数の基板をスクラブ洗浄するごとに、前記洗浄具の少なくとも2つの測定ポイントで該洗浄具の表面データを取得し、
前記制御部は、取得された表面データの差分に基づいて、前記洗浄具の交換時期を決定することを特徴とする基板洗浄装置。 - 前記制御部は、前記表面データの差分に対する所定の閾値を予め記憶しており、前記差分が前記所定の閾値に到達した場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項1に記載の基板洗浄装置。
- 前記表面性状測定装置は、前記表面データを取得する撮像装置と、前記撮像装置を移動させるカメラ移動機構とを備えることを特徴とする請求項1または2に記載の基板洗浄装置。
- 前記洗浄具を、該洗浄具が前記基板の表面に接触する洗浄位置と、該洗浄具が前記基板の表面から離れた待機位置との間で移動させる洗浄具移動ユニットをさらに備え、
前記表面性状測定装置は、前記待機位置に移動された前記洗浄具の表面データを取得することを特徴とする請求項1乃至3のいずれか一項に記載の基板洗浄装置。 - 前記制御部は、前記洗浄具を新しい洗浄具に交換した後にブレークイン確認動作を実行するように構成されており、
前記ブレークイン確認動作は、
所定枚数のダミー基板を前記新しい洗浄具でスクラブ洗浄するごとに、前記表面性状測定装置を用いて、前記新しい洗浄具の少なくとも2つの測定ポイントで該新しい洗浄具の表面データを取得し、
取得された表面データの差分に基づいて、前記新しい洗浄具のブレークインの完了を決定することを特徴とする請求項1乃至4のいずれか一項に記載の基板洗浄装置。 - 前記表面データは、二極化画像データ、赤外吸収スペクトルのスペクトルパターン、歪み画像データ、三次元画像データ、分光画像データ、ハイパースペクトル画像データ、および偏光画像データのうちのいずれかであることを特徴とする請求項1乃至5のいずれか一項に記載の基板洗浄装置。
- 前記表面データは、前記ハイパースペクトル画像データから変換されたスペクトル強度グラフであり、
所定の波長における前記スペクトル強度の差分が所定の閾値よりも大きくなった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項6に記載の基板洗浄装置。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項7に記載の基板洗浄装置。
- 基板を保持する基板保持部と、
洗浄液の存在下で前記基板に摺接することで前記基板を洗浄する洗浄具と、
前記洗浄具の表面性状を表す表面データを非接触式に取得する表面性状測定装置と、
前記表面性状測定装置に接続され、前記表面データに基づいて、前記洗浄具の交換時期を決定する制御部と、を備え、
前記表面性状測定装置は、ハイパースペクトル画像データを取得可能な撮像装置であり、
前記制御部は、
所定枚数の基板をスクラブ洗浄するごとに、前記洗浄具の1つの測定ポイントにおける前記ハイパースペクトル画像データから変換されたスペクトル強度グラフを前記洗浄具の表面データとして取得し、
所定枚数の基板をスクラブ洗浄するごとに得られる、前記測定ポイントでの所定の波長における前記スペクトル強度の差分が所定の閾値よりも小さくなった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする基板洗浄装置。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項9に記載の基板洗浄装置。
- 洗浄液を基板に供給しつつ、前記洗浄液の存在下で洗浄具を前記基板に摺接させることにより、前記基板を洗浄し、
所定枚数の前記基板をスクラブ洗浄するごとに、前記洗浄具の少なくとも2つの測定ポイントで該洗浄具の表面データを取得し、
取得された表面データの差分に基づいて、前記洗浄具の交換時期を決定することを特徴とする基板洗浄方法。 - 前記表面データの差分を、所定の閾値と比較し、
前記差分が前記所定の閾値に到達した場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項11に記載の基板洗浄方法。 - 前記表面データを、カメラ移動機構によって移動される撮像装置によって取得することを特徴とする請求項11または12に記載の基板洗浄方法。
- 前記表面データは、前記洗浄具が前記基板の表面から離れた待機位置で取得されることを特徴とする請求項11乃至13のいずれか一項に記載の基板洗浄方法。
- 前記洗浄具を新しい洗浄具に交換した後にブレークイン確認動作を実行し、
前記ブレークイン確認動作は、
所定枚数のダミー基板を前記新しい洗浄具でスクラブ洗浄するごとに、前記新しい洗浄具の少なくとも2つの測定ポイントで該新しい洗浄具の表面データを取得し、
取得された表面データの差分に基づいて、前記新しい洗浄具のブレークインの完了を決定することを特徴とする基板洗浄方法。 - 前記表面データを取得する工程は、前記測定ポイントにおける前記洗浄具の二極化画像データ、赤外吸収スペクトルのスペクトルパターン、歪み画像データ、三次元画像データ、分光画像データ、ハイパースペクトル画像データ、および偏光画像データのうちのいずれかを取得する工程であることを特徴とする請求項11乃至15のいずれか一項に記載の基板洗浄方法。
- 前記表面データを取得する工程は、前記ハイパースペクトル画像データから変換されたスペクトル強度グラフを取得する工程であり、
所定の波長における前記スペクトル強度の差分が所定の閾値よりも大きくなった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項16に記載の基板洗浄方法。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項17に記載の基板洗浄方法。
- 洗浄液を基板に供給しつつ、前記洗浄液の存在下で洗浄具を前記基板に摺接させることにより、前記基板を洗浄し、
所定枚数の前記基板をスクラブ洗浄するごとに、前記洗浄具の1つの測定ポイントで前記洗浄具の表面データを取得し、
取得された表面データの差分に基づいて、前記洗浄具の交換時期を決定する工程を含み、
前記表面データを取得する工程は、撮像装置によって取得されたハイパースペクトル画像データから変換されたスペクトル強度グラフを取得する工程であり、
前記洗浄具の交換時期を決定する工程は、所定枚数の基板をスクラブ洗浄するごとに得られる、前記測定ポイントでの所定の波長における前記スペクトル強度の差分が所定の閾値よりも小さくなった場合に、前記洗浄具が交換時期に達したと決定する工程であることを特徴とする基板洗浄方法。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記洗浄具が交換時期に達したと決定することを特徴とする請求項19に記載の基板洗浄方法。
- 研磨パッドを支持する研磨テーブルと、
基板を前記研磨パッドに押し付ける研磨ヘッドと、
前記研磨パッドの表面性状を表す表面データを非接触式に取得する表面性状測定装置と、
前記表面性状測定装置に接続され、前記表面データに基づいて、前記研磨パッドの交換時期を決定する制御部と、を備え、
前記表面性状測定装置は、ハイパースペクトル画像データを取得可能な撮像装置であり、 前記表面性状測定装置は、所定枚数の基板を研磨するごとに、前記研磨パッドの少なくとも2つの測定ポイントで該研磨パッドの表面データを取得し、
前記表面データは、撮像装置よって取得されたハイパースペクトル画像データから変換されたスペクトル強度グラフであり、
前記制御部は、所定の波長における前記スペクトル強度の差分が所定の閾値よりも大きくなった場合に、前記研磨パッドが交換時期に達したと決定することを特徴とする研磨装置。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記研磨パッドが交換時期に達したと決定することを特徴とする請求項21に記載の研磨装置。
- 研磨パッドを支持する研磨テーブルと、
基板を前記研磨パッドに押し付ける研磨ヘッドと、
前記研磨パッドの表面性状を表す表面データを非接触式に取得する表面性状測定装置と、
前記表面性状測定装置に接続され、前記表面データに基づいて、前記研磨パッドの交換時期を決定する制御部と、を備え、
前記表面性状測定装置は、ハイパースペクトル画像データを取得可能な撮像装置であり、
前記制御部は、
所定枚数の基板を研磨するごとに、前記研磨パッドの1つの測定ポイントにおける前記ハイパースペクトル画像データから変換されたスペクトル強度グラフを前記研磨パッドの表面データとして取得し、
所定枚数の基板を研磨するごとに得られる、前記測定ポイントでの所定の波長における前記スペクトル強度の差分が所定の閾値よりも小さくなった場合に、前記研磨パッドが交換時期に達したと決定することを特徴とする研磨装置。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記研磨パッドが交換時期に達したと決定することを特徴とする請求項23に記載の研磨装置。
- 基板を保持するバフテーブルと、
前記基板よりも小径であり、前記基板に接触させて仕上げ処理を行うバフ部材と、
前記バフ部材を保持するバフヘッドと、
前記バフ部材の表面性状を表す表面データを非接触式に取得する表面性状測定装置と、
前記表面性状測定装置に接続され、前記表面データに基づいて、前記バフヘッドの交換時期を決定する制御部と、を備え、
前記表面性状測定装置は、ハイパースペクトル画像データを取得可能な撮像装置であり、 前記表面性状測定装置は、所定枚数の基板を仕上げ処理をするごとに、前記バフ部材の少なくとも2つの測定ポイントで該バフ部材の表面データを取得し、
前記表面データは、撮像装置よって取得されたハイパースペクトル画像データから変換されたスペクトル強度グラフであり、
前記制御部は、所定の波長における前記スペクトル強度の差分が所定の閾値よりも小さくなった場合に、前記バフ部材が交換時期に達したと決定することを特徴とするバフ処理装置。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記バフ部材が交換時期に達したと決定することを特徴とする請求項25に記載のバフ処理装置。
- 基板を保持するバフテーブルと、
前記基板よりも小径であり、前記基板に接触させて仕上げ処理を行うバフ部材と、
前記バフ部材を保持するバフヘッドと、
前記バフ部材の表面性状を表す表面データを非接触式に取得する表面性状測定装置と、
前記表面性状測定装置に接続され、前記表面データに基づいて、前記バフヘッドの交換時期を決定する制御部と、を備え、
前記表面性状測定装置は、ハイパースペクトル画像データを取得可能な撮像装置であり、
前記制御部は、
所定枚数の基板を仕上げ処理するごとに、前記バフ部材の1つの測定ポイントにおける前記ハイパースペクトル画像データから変換されたスペクトル強度グラフを前記バフ部材の表面データとして取得し、
所定枚数の基板を研磨するごとに得られる、前記測定ポイントでの所定の波長における前記スペクトル強度の差分が所定の閾値よりも小さくなった場合に、前記バフ部材が交換時期に達したと決定することを特徴とするバフ処理装置。 - さらに、スペクトル強度グラフの変曲点における接線の傾きの変化量が所定の閾値以下になった場合に、前記バフ部材が交換時期に達したと決定することを特徴とする請求項27に記載のバフ処理装置。
- 請求項1乃至10のいずれか一項に記載の基板洗浄装置、請求項21乃至24のいずれか一項に記載の研磨装置、および請求項25乃至28のいずれか一項に記載のバフ処理装置の少なくともいずれかを備えたことを特徴とする基板処理装置。
- 請求項1乃至10のいずれか一項に記載の基板洗浄装置に設けられた洗浄具の交換時期、請求項21乃至24のいずれか一項に記載の研磨装置に設けられた研磨パッドの交換時期、および請求項25乃至28のいずれか一項に記載のバフ処理装置に設けられたバフ部材の交換時期の少なくとも1つを学習する機械学習器であって、
前記表面データを少なくとも含む状態変数を取得する状態観測部と、
前記状態変数に関連付けて、前記洗浄具を交換すべきか否か、前記研磨パッドを交換すべきか否か、および前記バフ部材を交換すべきか否かの少なくとも1つを判定した交換データを取得する交換データ取得部と、
前記状態変数および前記交換データとの組み合わせからなる訓練データセットに基づいて、前記洗浄具の適切な交換時期、前記研磨パッドの適切な交換時期、および前記バフ部材の適切な交換時期の少なくとも1つを学習する学習部と、を備えたことを特徴とする機械学習器。 - 前記状態変数には、前記洗浄具を回転自在に支持する軸受に取り付けられた振動計の出力値がさらに含まれることを特徴とする請求項30に記載の機械学習器。
- 前記状態変数には、前記洗浄具を回転させる電動機に設けられたトルクセンサの出力値がさらに含まれることを特徴とする請求項30または31に記載の機械学習器。
- 前記状態変数には、洗浄具洗浄装置の洗浄槽から排出される洗浄液内のパーティクルの数を測定するパーティクルカウンタの測定値がさらに含まれることを特徴とする請求項30乃至32のいずれか一項に記載の機械学習器。
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- 2020-12-07 KR KR1020227023767A patent/KR20220113493A/ko unknown
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JP2008515171A (ja) * | 2004-09-28 | 2008-05-08 | 株式会社荏原製作所 | 基板洗浄装置及び洗浄部材の交換時期判定方法 |
JP2015185571A (ja) * | 2014-03-20 | 2015-10-22 | 株式会社荏原製作所 | 半導体ウェーハ用の研磨装置およびこれを用いた研磨方法 |
JP2015220402A (ja) * | 2014-05-20 | 2015-12-07 | 株式会社荏原製作所 | 基板洗浄装置および基板洗浄装置で実行される方法 |
JP2016092158A (ja) * | 2014-10-31 | 2016-05-23 | 株式会社荏原製作所 | ロール部材、ペンシル部材、及びそれらの少なくともいずれか一方を含む基板処理装置 |
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WO2023149161A1 (ja) * | 2022-02-04 | 2023-08-10 | 株式会社荏原製作所 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
WO2023189170A1 (ja) * | 2022-03-30 | 2023-10-05 | 株式会社荏原製作所 | 情報処理装置、推論装置、機械学習装置、情報処理方法、推論方法、及び、機械学習方法 |
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Publication number | Publication date |
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CN114846581A (zh) | 2022-08-02 |
JPWO2021117685A1 (ja) | 2021-06-17 |
TW202129801A (zh) | 2021-08-01 |
KR20220113493A (ko) | 2022-08-12 |
US20220410343A1 (en) | 2022-12-29 |
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