WO2021075266A1 - 加工ヘッドおよびレーザ加工装置 - Google Patents

加工ヘッドおよびレーザ加工装置 Download PDF

Info

Publication number
WO2021075266A1
WO2021075266A1 PCT/JP2020/037275 JP2020037275W WO2021075266A1 WO 2021075266 A1 WO2021075266 A1 WO 2021075266A1 JP 2020037275 W JP2020037275 W JP 2020037275W WO 2021075266 A1 WO2021075266 A1 WO 2021075266A1
Authority
WO
WIPO (PCT)
Prior art keywords
component
processing head
arm
attachment
magnet
Prior art date
Application number
PCT/JP2020/037275
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
秀和 中井
長谷川　正彦
彰倫 西尾
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP2021552305A priority Critical patent/JP7118286B2/ja
Publication of WO2021075266A1 publication Critical patent/WO2021075266A1/ja

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment

Definitions

  • the present invention relates to a processing head and a laser processing device including a desorption device using an adsorption function.
  • a laser machining device that has a machining head and a drive mechanism, and performs cutting and the like by relatively moving the machining head and the workpiece to be machined by the drive mechanism according to a preset trajectory.
  • the damage prevention device described in Patent Document 1 includes a plate fixed to a drive mechanism and a holder for fixing a processing head and connecting to the plate. Further, the damage prevention device described in Patent Document 1 includes a magnet that is embedded in one of a connecting surface in which the plate is connected to the holder and a connecting surface in which the holder is connected to the plate and attracts the other connecting surface. As a result, the plate and the holder, which are the two constituent members, are attracted by the magnet. Then, when a force exceeding the attractive force of the magnet is applied to the processing head, the processing head is separated from the plate. That is, damage to the machining head is avoided by releasing the impact force applied to the machining head.
  • the present invention has been made in view of the above, and the weight of a structure in which two constituent members are connected can be reduced as compared with the conventional case while fixing the two constituent members by adsorption.
  • the purpose is to obtain a processing head.
  • the processing head collects the arm, the rotating mechanism for rotating the arm, and the laser light propagating inside the arm and the rotating mechanism. It is provided with a light collecting unit that emits light to the outside.
  • the arm includes a first component member, a second component member, and a detachable device that detachably connects the first component member and the second component member by suction.
  • the attachment / detachment device is located between the first component fixed to the first component, the second component fixed to the second component, and the first facing surface of the first component and the second facing surface of the second component.
  • the connecting member is an annular magnetic circuit component that combines a magnet and a yoke and is arranged on the second facing surface of the second component so as to surround the central portion of the second facing surface of the second component.
  • the weight of the structure in which the two constituent members are connected can be reduced as compared with the conventional one while fixing the two constituent members by adsorption.
  • FIG. 1 Perspective view showing another configuration example of the connecting member according to the first embodiment.
  • Sectional drawing which shows the other structural example of the connecting member according to Embodiment 1.
  • An exploded perspective view showing an example of the configuration of the attachment / detachment device according to the second embodiment.
  • the figure which shows an example of the structure of the decompressor used for the decompression device according to Embodiment 2.
  • An exploded perspective view showing another configuration example of the attachment / detachment device according to the second embodiment.
  • FIG. 5 is a cross-sectional view showing an example of the configuration of the attachment / detachment device according to the fourth embodiment, and is a cross-sectional view of XVIII-XVIII of FIG. The figure which shows an example of the structure of the laser processing apparatus according to Embodiment 5.
  • FIG. 1 is an exploded perspective view showing an example of the configuration of the attachment / detachment device according to the first embodiment.
  • the attachment / detachment device 10 used in the laser processing device and the processing head of the laser processing device will be described as an example.
  • the attachment / detachment device 10 is provided in a part of the optical system of the processing head. That is, the attachment / detachment device 10 is provided between the drive mechanism and the light collecting unit.
  • the attachment / detachment device 10 includes a disk-shaped first component 11, a disk-shaped second component 12, and an annular connecting member 13.
  • the first component 11 is, for example, a component fixed to a component on the drive mechanism side of the laser processing device among the components of the processing head.
  • the first component 11 has a perfectly circular contour, and has a first surface 111 and a second surface 112 arranged to face each other, and a side surface 113 provided along the outer circumferences of the first surface 111 and the second surface 112. And have.
  • the first component 11 has an optical path hole 114 opened at the center of the first surface 111 and the second surface 112 in a direction orthogonal to the first surface 111 and the second surface 112.
  • the optical path hole 114 is a through hole through which the laser beam L passes.
  • the first component 11 is fixed to the constituent member on the drive mechanism side by the fixing member.
  • the fixing member is, in one example, a screw.
  • a screw hole (not shown) is provided at a predetermined position on the first surface 111, and the first component 11 is fastened to a component member on the drive mechanism side by a screw.
  • the second surface 112 corresponds to the first facing surface.
  • the first component 11 may be made of any material as long as the portion in contact with the connecting member 13 is made of a magnetic material and the other portion has necessary physical properties such as strength.
  • the portion that does not come into contact with the connecting member 13 is, for example, made of metal, ceramics, or resin.
  • Hard magnetic materials and soft magnetic materials are examples of magnetic materials.
  • a soft magnetic material is a material that is not magnetized by itself but is easily magnetized by an external magnetic field.
  • the magnetic material constituting the first component 11 used in the first embodiment is preferably a soft magnetic material having a magnetic permeability of 1 ⁇ 10 -3 [H / m] or more. Examples of soft magnetic materials are soft iron, permalloy, silicon steel plate, and electromagnetic stainless steel.
  • a hard magnetic material is a material that can hold magnetism by itself and is also called a permanent magnet. Examples of hard magnetic materials are iron, nickel and cobalt.
  • the second component 12 is, for example, a component of the processing head that is fixed to the component on the condensing portion side of the laser processing device.
  • the second component 12 has a perfect circular shape, and has a third surface 121 and a fourth surface 122 arranged opposite to each other, and a side surface 123 provided along the outer circumferences of the third surface 121 and the fourth surface 122. And have.
  • the second component 12 has an optical path hole 124 opened at the center of the third surface 121 and the fourth surface 122 in a direction orthogonal to the third surface 121 and the fourth surface 122.
  • the optical path hole 124 is a through hole through which the laser beam L passes.
  • the second component 12 is fixed to the component on the light collecting portion side by the fixing member.
  • the fixing member is, in one example, a screw.
  • a screw hole is provided at a predetermined position on the fourth surface 122, and the second component 12 is fastened to the constituent member on the light collecting portion side by a screw.
  • the second component 12 may be made of any material as long as it has necessary physical properties such as strength.
  • the second component 12, for example, is made of metal, ceramics or resin.
  • the second component 12 is made of iron, which is a metal.
  • the third surface 121 corresponds to the second facing surface.
  • the connecting member 13 is a member that connects the first component 11 and the second component 12 by suction.
  • the connecting member 13 is fixed on the third surface 121 of the second component 12 so as to surround the optical path hole 124.
  • the connecting member 13 is fixed to the second component 12 by a method such as screw fastening, adhesion, or fusion.
  • FIG. 2 is a perspective view schematically showing an example of a connecting member of the attachment / detachment device according to the first embodiment
  • FIG. 3 is a partially enlarged perspective view showing an example of the connecting member of the attachment / detachment device according to the first embodiment. is there.
  • FIG. 3 is an enlarged view of the region R1 of FIG.
  • the connecting member 13 of the first embodiment is a magnetic circuit constituent member 13A.
  • the magnetic circuit component 13A includes an annular magnet 131 and two annular yokes 132a and 132b arranged in contact with an outer peripheral surface and an inner peripheral surface perpendicular to the radial direction of the annular magnet 131. ..
  • the magnetic circuit component 13A has a structure in which an annular magnet 131 is sandwiched between two yokes 132a and 132b from the outside and the inside. Further, in the example shown in FIG. 3, the position of the surface of the yokes 132a and 132b facing the first component 11 is closer to the first component 11 than the position of the surface of the magnet 131 facing the first component 11. It is protruding.
  • An example of the magnet 131 is a neodymium magnet.
  • the yokes 132a and 132b are soft magnetic materials. Here, it is desirable that the yokes 132a and 132b are soft magnetic materials having a magnetic permeability of 1 ⁇ 10 -3 [H / m] or more. Examples of yokes 132a and 132b are soft iron, permalloy, silicon steel plate, and electromagnetic stainless steel.
  • the outer peripheral side of the magnet 131 is the north pole and the inner peripheral side is the south pole.
  • the magnetic flux 133 from the north pole of the magnet 131 extends from the suction surface 133a of the outer yoke 132a to the space, and the magnetic flux 133 extending into the space passes through the suction surface 133b of the inner yoke 132b.
  • a magnetic circuit is formed that returns to the magnet 131.
  • the connecting member 13 is a magnetic circuit constituent member 13A.
  • the third surface 121 of the second component 12 and the second surface 112 of the first component 11 are opposed to each other, and the third surface 121 and the second surface 112 are parallel to each other and the first surface is first.
  • the first component 11 is brought into contact with the magnetic circuit component 13A so that the position of the optical path hole 114 of the component 11 and the position of the optical path hole 124 of the second component 12 overlap.
  • the magnetic circuit component 13A comes into contact with the first component 11, as described above, the magnetic flux 133 is emitted from the magnetic circuit component 13A by the magnetic circuit component 13A, passes through the first component 11, and passes through the magnetic circuit component 13A.
  • a magnetic circuit is formed.
  • the attractive force of the magnetic circuit constituent member 13A in which the magnet 131 and the yokes 132a and 132b are combined can be increased as in the first embodiment. It is known that the attractive force of the magnetic circuit component 13A, which is a combination of the magnet 131 and the yokes 132a and 132b, is three times or more that of the magnet alone.
  • FIG. 4 is a partial cross-sectional view illustrating the magnetic flux distribution in the desorption device according to the first embodiment.
  • the magnetic flux 133 emitted from the annular magnet 131 is represented by three magnetic field lines 1331.
  • the detachable device 10 of the first embodiment has a configuration in which the magnetic circuit component 13A is fixed on the second component 12.
  • the magnet 131 of the magnetic circuit component 13A enters the first component 11 through the yoke 132a and the suction surface 133a, and enters the first component 11.
  • a magnetic field line 1331 is drawn which enters the yoke 132b via the suction surface 133b and returns to the magnet 131.
  • all the magnetic field lines 1331 constituting the magnetic flux 133 pass through the suction surfaces 133a and 133b of the yokes 132a and 132b.
  • FIG. 5 is a partial cross-sectional view illustrating the magnetic flux distribution in the conventional desorption device.
  • the same components as those of FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted.
  • the attachment / detachment device 100 of FIG. 5 is based on the contents described in Patent Document 1.
  • the magnetic circuit component 13A is embedded in the second component 12.
  • the first component 11 and the second component 12 are in contact with each other on a surface.
  • the magnetic flux 133 emitted from the magnet 131 is shown by three magnetic field lines 1332 and 1333.
  • one magnetic field line 1332 follows a path via the suction surfaces 133a and 133b of the yokes 132a and 132b as before.
  • the remaining two magnetic field lines 1333 penetrate the yoke 132a from the magnet 131 in the radial direction and enter the second component 12, then enter the second component 12 again via the first component 11, and then enter the yoke from there. It penetrates 132b in the radial direction and returns to the magnet 131. That is, the magnetic field lines 1333 do not pass through the suction surfaces 133a and 133b of the yokes 132a and 132b. From the viewpoint of availability, price, and strength, when a material containing iron as a main component is used for the second component 12, such a tendency tends to appear because iron is a good magnetic material.
  • FIG. 4 according to the first embodiment can obtain a larger attractive force than the conventional FIG. 5. That is, in the case of realizing the same attractive force, the detachable device 10 according to the first embodiment shown in FIG. 4 requires a smaller magnetic circuit component 13A than the conventional detachable device 100 of FIG. become. As a result, the weight of the magnetic circuit component 13A and the attachment / detachment device 10 including the magnetic circuit component 13A can be reduced.
  • the attachment / detachment device 10 arranged between the drive mechanism and the light collecting portion is provided. Can pass. Further, by forming at least the portion of the first component 11 in contact with the magnetic circuit component 13A with a magnetic material, the attractive force is generated when the position of the magnetic circuit component 13A and the position of the magnetic material match. Become the strongest. As a result, the alignment between the first component 11 and the second component 12 via the magnetic circuit component 13A can be easily performed.
  • FIG. 6 is a perspective view showing an example of a processing head of the laser processing apparatus according to the first embodiment.
  • the direction in which the laser beam L is incident on the processing head 200 is defined as the Z direction
  • the two directions orthogonal to each other in the plane parallel to the Z direction are defined as the X direction and the Y direction.
  • the processing head 200 includes a first arm 210, a second arm 220, rotation mechanisms 230 and 240, a light collecting unit 250, and a detachable device 10.
  • the first arm 210 has a first portion 211 extending in a direction parallel to the XY plane and a second portion 212 inclined with respect to the XY plane.
  • the second arm 220 has a third portion 221 extending in the Z direction and a fourth portion 222 inclined at an angle not perpendicular to the XY plane.
  • the tilt angle of the first arm 210 and the second arm 220 is 45 °. That is, the second portion 212 and the fourth portion 222 are inclined portions inclined at an angle other than the horizontal direction with respect to the vertical direction.
  • the materials constituting the first arm 210 and the second arm 220 may be made of any material as long as they have necessary physical properties such as strength as an arm.
  • the first arm 210 and the second arm 220 are made of metal, ceramics or resin.
  • the rotation mechanisms 230 and 240 rotate the first arm 210 or the second arm 220.
  • the rotation mechanism 230 is provided between the first arm 210 and a drive mechanism (not shown), and the rotation mechanism 240 is provided between the first arm 210 and the second arm 220.
  • An example of the rotating mechanisms 230 and 240 is a motor.
  • the first arm 210 is fixed to the drive mechanism via the rotation mechanism 230.
  • the light collecting unit 250 is provided at one end of the second arm 220.
  • the condensing unit 250 includes a condensing optical system 251 that condenses the laser beam L, and a nozzle 252 that emits the condensed laser light L.
  • the second arm 220 is divided into two by the fourth part 222. That is, the second arm 220 is divided into two so as to be perpendicular to the extending direction of the optical path hole 201 in the fourth portion 222.
  • the processing head 200 is divided into a condensing unit side member 225, which is a component arranged on the condensing unit 250 side, and a drive mechanism side member 226, which is a component arranged on the drive mechanism side.
  • the above-mentioned attachment / detachment device 10 connects the light collecting portion side member 225 and the drive mechanism side member 226.
  • the first arm 210, the second arm 220, the rotating mechanisms 230 and 240, the condensing unit 250, and the attachment / detachment device 10 have an optical path hole 201 through which the laser beam L is passed. That is, the optical path hole 201 is a through hole that penetrates the inside of the first arm 210, the second arm 220, the rotating mechanisms 230, 240, the condensing unit 250, and the attachment / detachment device 10. Further, although not shown, an optical component that reflects the laser beam L along the optical path hole 201 is provided at a portion where the optical path hole 201 inside the first arm 210 and the second arm 220 is bent.
  • the processing head 200 is assembled so that the positions of the optical path holes 201 at each connection of the first arm 210, the second arm 220, the rotating mechanisms 230, 240, the condensing unit 250, and the attachment / detachment device 10 are the same.
  • the operation of the processing head 200 shown in FIG. 6 will be described.
  • the laser beam L that reaches the processing head 200 from the drive mechanism side propagates in the optical path hole 201 provided inside the rotation mechanism 230, the first arm 210, the rotation mechanism 240, the second arm 220, and the attachment / detachment device 10.
  • the laser beam L is reflected along the shape of the optical path hole 201 by the optical component provided in the optical path hole 201, propagated in the optical path hole 201, and reaches the condensing unit 250.
  • the laser beam L is focused by the focusing optical system 251 of the focusing unit 250, and then emitted from the nozzle 252 together with the assist gas toward a work to be processed (not shown).
  • the first arm 210 is rotated about the a-axis by the rotation mechanism 230, and the second arm 220 is rotated about the b-axis by the rotation mechanism 240. That is, since the processing head 200 rotates about two axes, the laser beam L can be vertically irradiated to the surface of the three-dimensional work. By irradiating the laser beam L in this way, the quality of the cut surface is ensured.
  • the condensing unit 250 collides with the work, if the impact force on the condensing unit 250 exceeds the attracting force of the magnetic circuit component 13A that attracts the first component 11, the condensing unit side member 225 The position of is shifted with respect to the drive mechanism side member 226. As a result, the external force applied to the condensing unit 250 is suppressed to a certain value or less, and damage to the condensing unit 250 is suppressed.
  • the operation of the machining head 200 becomes slow due to the weight of the motor itself, and it is possible to provide a laser machining device having a machining ability that meets the market demand. It will be difficult.
  • the detachable device 10 according to the first embodiment is fixed to the first component 11 fixed to the drive mechanism side member 226, the second component 12 fixed to the light collecting portion side member 225, and the second component 12. It also has a magnetic circuit component 13A in which a magnet 131 and yokes 132a and 132b are combined. Normally, the magnetic circuit component 13A has an attractive force that is three times or more that of the magnet alone. Therefore, in order to support the processing head 200 having the same weight as that of Patent Document 1, the case of Patent Document 1 is used. It can be significantly reduced compared to the amount of magnets in. That is, the attachment / detachment device 10 according to the first embodiment can be miniaturized.
  • the attachment / detachment device 10 can be miniaturized, it is not necessary to use a large motor for the rotation mechanisms 230 and 240 that rotate the processing head 200. Therefore, the centrifugal force applied to the processing head 200 when the first arm 210 or the second arm 220 is rotated becomes smaller than when the damage prevention device shown in Patent Document 1 is used. As a result, as compared with the case of using the damage prevention device described in Patent Document 1, the machining speed of the work can be increased while improving the accuracy of the irradiation position of the laser beam L on the work.
  • the attachment / detachment device 10 since the attachment / detachment device 10 according to the first embodiment is smaller than the damage prevention device described in Patent Document 1, it can be attached to any part of the arm of the processing head 200. Above all, it is preferable to attach the attachment / detachment device 10 to the inclined portion of the arm. This is because the attachment / detachment device 10 functions not only when the processing head 200 collides with the work from a direction perpendicular to the optical axis, but also when the processing head 200 collides head-on with the work along the Z direction. In the case of the processing head 200 having the configuration as shown in FIG.
  • the attachment / detachment device 10 is attached to the second arm 220 so that the optical path hole 201 of the attachment / detachment device 10 matches the optical path hole 201 of the second arm 220. Therefore, when the processing head 200 collides with the work, the optical path hole 201 of the drive mechanism side member 226 of the second arm 220 and the optical path hole 201 of the condensing portion side member 225 are displaced, and the laser beam L is focused on the condensing portion. It will not reach 250. That is, when the processing head 200 collides with the work, it is possible to stop the emission of the laser beam L, which performs processing instantly, from the condensing unit 250.
  • the processing head 200 to which the attachment / detachment device 10 according to the lightened embodiment 1 is attached does not need to use a large motor and is lighter than the damage prevention device described in Patent Document 1.
  • the processing head 200 can be realized.
  • FIG. 7 is an exploded perspective view showing another configuration example of the attachment / detachment device according to the first embodiment.
  • the same components as those in FIG. 1 are designated by the same reference numerals, and the description thereof will be omitted.
  • the first component 11 has a columnar optical path constituent portion 115 and two flanges 116 and 117 provided at both ends of the optical path constituent portion 115.
  • the second component 12 has a columnar optical path constituent portion 125 and two flanges 126 and 127 provided at both ends of the optical path constituent portion 125.
  • the optical path hole 114 of the first component 11 is perpendicular to the first surface 116a of the flange 116 and the second surface 117a of the flange 117, passes through the optical path component 115 from the center of the first surface 116a, and reaches the center of the second surface 117a. It is provided so as to penetrate.
  • the optical path hole 124 of the second component 12 is perpendicular to the third surface 126a of the flange 126 and the fourth surface 127a of the flange 127, passes through the optical path component 125 from the center of the third surface 126a, and reaches the center of the fourth surface 127a. It is provided so as to penetrate.
  • the optical path holes 114 and 124 are holes for passing the laser beam L emitted from the laser oscillator.
  • the flange 116 of the first component 11 is fixed by a drive mechanism side member 226 and a fixing member of a processing head (not shown).
  • the flange 127 of the second component 12 is fixed by a light collecting portion side member 225 and a fixing member (not shown).
  • through holes are formed in the flange 116 of the first component 11 and the flange 127 of the second component 12. Then, the flange 116 of the first component 11 and the flange provided on the drive mechanism side member 226 are fastened with bolts and nuts. Similarly, the flange 127 of the second component 12 and the flange provided on the light collecting portion side member 225 are fastened by bolts and nuts.
  • the flange 117 of the first component 11 is made of a magnetic material.
  • the magnetic material includes a soft magnetic material and a hard magnetic material.
  • the flange 117 is a magnetic material having a magnetic permeability of 1 ⁇ 10 -3 [H / m] or more.
  • soft magnetic materials are soft iron, permalloy, silicon steel plate, and electromagnetic stainless steel.
  • hard magnetic materials are iron, nickel and cobalt.
  • the portion of the first component 11 other than the flange 117 and the second component 12 may be made of any material as long as they have necessary physical properties such as strength. In one example, the portion of the first component 11 other than the flange 117 and the second component 12 are made of metal, ceramics, or resin.
  • the connecting member 13 is composed of three disc-shaped magnetic circuit constituent members 13B instead of the annular magnetic circuit constituent member 13A.
  • the diameter of the disk-shaped magnetic circuit component 13B is smaller than the flange width, which is the distance between the outside of the optical path hole 124 and the outer circumference of the flange 126, on the diameter passing through the center of the third surface 126a of the flange 126. Will be done.
  • the three disc-shaped magnetic circuit constituent members 13B are arranged at equal intervals around the optical path holes 124 on the third surface 126a of the flange 126.
  • FIG. 8 is a perspective view showing another configuration example of the connecting member according to the first embodiment
  • FIG. 9 is a cross-sectional view showing another configuration example of the connecting member according to the first embodiment.
  • the magnetic circuit component 13B which is the connecting member 13 includes a disc-shaped magnet 135 and a yoke 136 provided so as to cover a surface other than the suction surface 135a of the disc-shaped magnet 135.
  • the yoke 136 has a hollow cylindrical shape with a bottom, and a magnet 135 is arranged in the hollow portion. That is, the bottomed hollow cylindrical yoke 136 has a structure that covers the magnet 135 except for the suction surface 135a.
  • the magnet 135 is, in one example, a samarium-cobalt magnet.
  • the position of the surface of the magnet 135 facing the first component 11 and the position of the surface of the yoke 136 facing the first component 11 are the same positions.
  • the suction surface 135a side of the magnet 135 is the south pole and the contact surface 135b side with the bottom of the yoke 136 is the north pole.
  • the magnetic flux 133 from the magnet 135 extends into space from the suction surface 136a of the yoke 136 via the contact surface 135b with the yoke 136 and the yoke 136, and the magnetic flux 133 extending into the space is A magnetic circuit is formed that returns to the magnet 135.
  • the third surface 126a of the flange 126 of the second component 12 and the second surface 117a of the flange 117 of the first component 11 face each other, and the third surface 126a and the second surface 117a become parallel to each other.
  • the first component 11 is brought into contact with the magnetic circuit component 13B so that the position of the optical path hole 114 of the first component 11 and the position of the optical path hole 124 of the second component 12 overlap.
  • the magnetic circuit component 13B comes into contact with the first component 11, as described above, the magnetic circuit component 13B causes the magnetic flux 133 to exit the magnetic circuit component 13B, pass through the first component 11, and pass through the magnetic circuit component 13B.
  • a magnetic circuit is formed.
  • the magnetic circuit By forming the magnetic circuit, it is possible to suppress the generation of leakage flux and control the magnetic flux density. Therefore, as shown in FIGS. 8 and 9, the attractive force of the magnetic circuit component 13B in which the magnet 135 and the yoke 136 are combined can be increased as compared with the case where the magnet is used alone.
  • the connecting member 13 was composed of three magnetic circuit constituent members 13B, but the number of magnetic circuit constituent members 13B may be changed according to the weight of the condensing unit side member 225. Can be done.
  • the attachment / detachment device 10 has a first component 11 fixed to the drive mechanism side member 226 of the laser processing device, a second component 12 fixed to the light collecting portion side member 225, and a second component 12. It is provided with a connecting member 13 which is fixed to and attracts the first component 11. Further, the connecting member 13 is composed of magnetic circuit constituent members 13A and 13B having magnets 131 and 135 and yokes 132a, 132b and 136, and the portion of the first component 11 in contact with the connecting member 13 is made of a magnetic material. To.
  • the position of the second component 12 in the detachable device 10 moves so as to deviate from the position of the first component 11, and the impact force applied to the condensing unit 250 is constant. It can be suppressed below the value.
  • the magnetic flux density can be controlled in the magnetic circuit constituent members 13A and 13B in which the magnets 131 and 135 and the yokes 132a, 132b and 136 are combined. Therefore, the attractive force of the magnetic circuit constituent members 13A and 13B is larger than that when the magnet alone is used, and the weight of the magnetic circuit constituent members 13A and 13B required to obtain the same attractive force is lightened.
  • the weights of the magnetic circuit components 13A and 13B are reduced, the weight of the processing head 200 when the attachment / detachment device 10 is used for the processing head 200 is also reduced, and a large motor is used when operating the processing head 200. No need.
  • the weight of the processing head 200 can be reduced as compared with the conventional one.
  • the processing head 200 can be reduced in weight, the accuracy of the position of the light collecting unit 250 with respect to the work can be ensured, and the moving time of the light collecting unit 250 to a desired position can be shortened. ..
  • the contact surface between the holder and the plate separated at the time of collision is parallel to the optical path in the processing head to be held. That is, in the technique described in Patent Document 1, it is necessary to dispose the damage prevention device on the outside of the processing head away from the optical path.
  • the contact surface between the connecting member 13 and the first component 11 which are separated at the time of collision is orthogonal to the optical path in the light collecting portion side member 225 to be held. That is, in the first embodiment, the attachment / detachment device 10 can be arranged on the member constituting the processing head 200, and it is not necessary to arrange the damage prevention device on the outside of the processing head 200 as in Patent Document 1. As a result, a smaller detachable device 10 can be realized as compared with the case of Patent Document 1.
  • FIG. 10 is an exploded perspective view showing an example of the configuration of the attachment / detachment device according to the second embodiment.
  • the same components as those in the first embodiment are designated by the same reference numerals, the description thereof will be omitted, and different parts will be described.
  • the connecting member 13 is composed of a decompressor.
  • a pad 141 which is a part of the decompressor, is provided on the third surface 121 of the second component 12.
  • the pad 141 is circular in plan view. The diameter of the circular pad 141 is made smaller than the distance between the outside of the optical path hole 124 and the outer circumference of the second component 12 on the diameter passing through the center of the third surface 121 of the second component 12. Further, the four circular pads 141 are arranged at equal intervals around the optical path holes 124 on the third surface 121 of the second component 12.
  • FIG. 11 is a diagram showing an example of the configuration of the decompressor used in the decompression device according to the second embodiment.
  • the decompressor 13C includes a pad 141, a vacuum pump 142, and a pipe 143 connecting the pad 141 and the vacuum pump 142.
  • the pad 141 has a funnel shape in which the diameter decreases from the suction surface 141a in contact with the object to be sucked toward the pipe 143.
  • At least the suction surface 141a of the pad 141 in contact with the object is partially made of a flexible material such as rubber or resin.
  • the root portion 141b of the pad 141 connected to the pipe 143 is made of resin.
  • a through hole penetrating in the thickness direction of the second component 12 is provided at a position where the pad 141 of the second component 12 is arranged.
  • the pad 141 is inserted into this through hole.
  • the pad 141 can be fixed to the second component 12 by adhering the root portion 141b of the pad 141 to the second component 12 with an adhesive.
  • the pipe 143 is composed of an aluminum pipe in one example. One end of the pipe 143 is connected to the root portion 141b of the pad 141, and the other end is connected to the vacuum pump 142.
  • the vacuum pump 142 may be provided for a decompressor, or a vacuum pump used in a laser processing apparatus may be used. This completes the decompressor 13C having a decompression function. Although only one pad 141 is shown in FIG. 11, each pad 141 shown in FIG. 10 is connected to the vacuum pump 142 via the pipe 143.
  • Such a decompressor 13C can adsorb parts by utilizing the differential pressure between the inside of the pipe 143 and the atmospheric pressure. For example, by using a pad 141 having an area of 100 cm 2 and a vacuum pump 142 having an ultimate pressure of 3 kPa, a weight of 33 kgf can be supported. If a number of pads 141 capable of holding the condensing unit side member 225 fixed to the second component 12 of the processing head 200 by suction are installed, the magnetic circuit component 13A, as in the first embodiment, The light collecting portion side member 225 can be adsorbed without using 13B.
  • FIG. 12 is an exploded perspective view showing another configuration example of the attachment / detachment device according to the second embodiment.
  • the same components as those in the first and second embodiments are designated by the same reference numerals, the description thereof will be omitted, and different parts will be described.
  • the connecting member 13 is composed of a magnet 145 and a decompressor.
  • two circular pads 141 and four circular magnets 145 which are part of the decompressor, are provided on the third surface 121 of the second component 12.
  • the two pads 141 and the four magnets 145 are arranged at equal intervals around the optical path holes 124 on the third surface 121 of the second component 12.
  • the decompressor 13C has a configuration similar to that shown in FIG.
  • the magnet 145 is a permanent magnet.
  • the position of the light collecting portion side member 225 is the drive mechanism as in the first embodiment. It shifts with respect to the side member 226. As a result, the external force applied to the condensing unit 250 is suppressed to a certain value or less, and damage to the condensing unit 250 is suppressed.
  • the decompressor 13C is used for the connecting member 13. This has the effect that the weight of the processing head 200 can be reduced as compared with the conventional case while suppressing damage to the processing head 200 when the processing head 200 collides with the work.
  • the weight of the attachment / detachment device 10 can be reduced by replacing a part of the magnet 145 with the decompressor 13C.
  • Embodiment 3 In the third embodiment, another example of the connecting member 13 in the detachable device 10 of the first embodiment will be described.
  • FIG. 13 is a perspective view schematically showing an example of a connecting member of the attachment / detachment device according to the third embodiment
  • FIG. 14 is a partially enlarged cross-sectional view showing an example of the connecting member of the attachment / detachment device according to the third embodiment. is there.
  • FIG. 14 is an enlarged view of the region R2 of FIG.
  • the connecting member 13 of the third embodiment is a magnetic circuit component 15A.
  • the magnetic circuit component 15A includes an annular magnet 151 and an annular yoke 152 arranged in contact with the bottom surface of the annular magnet 151 and having a U-shaped cross section perpendicular to the circumferential direction.
  • the annular yoke 152 has an annular bottom surface 152a, a side surface 152b provided on the outer peripheral side of the annular bottom surface 152a, and a side surface 152c provided on the inner peripheral side of the annular bottom surface 152a. That is, the annular yoke 152 has a U-shaped groove 152t.
  • the annular magnet 151 is provided in a U-shaped groove 152t provided in the annular yoke 152 so as to be in contact with the bottom surface 152a and not with the side surfaces 152b and 152c. In the example shown in FIGS.
  • the position of the surface of the side surfaces 152b and 152c of the yoke 152 facing the first component 11 is the same as the position of the surface of the magnet 151 facing the first component 11.
  • An example of the magnet 151 is a neodymium magnet.
  • the yoke 152 is a soft magnetic material.
  • FIGS. 13 and 14 it is assumed that the side of the magnet 151 in contact with the first component 11 is the north pole and the bottom side of the yoke 152 in contact with the bottom surface 152a is the south pole.
  • the magnetic flux 153 from the north pole of the magnet 151 extends into the space, passes through the suction surface 152d of the yoke 152, and passes through the outer peripheral side side surface 152b or the inner peripheral side of the yoke 152.
  • a magnetic circuit is formed that passes through the side surface 152c and returns from the bottom surface 152a to the bottom of the magnet 151.
  • the third surface 121 of the second component 12 and the second surface 112 of the first component 11 face each other, and the third surface 121 and the second surface 112 are parallel to each other and the first component.
  • the first component 11 is brought into contact with the magnetic circuit component 15A so that the position of the optical path hole 114 of 11 and the position of the optical path hole 124 of the second component 12 overlap.
  • a magnetic circuit is formed in which the magnetic flux 153 exits the magnetic circuit component 15A, passes through the first component 11, and returns to the magnetic circuit component 15A.
  • the attractive force of the magnetic circuit constituent member 15A in which the magnet 151 and the yoke 152 are combined as in the third embodiment can be increased.
  • FIG. 15 is an exploded perspective view showing another configuration example of the connecting member of the attachment / detachment device according to the third embodiment
  • FIG. 16 is a part showing another configuration example of the connecting member of the attachment / detachment device according to the third embodiment. It is an enlarged perspective view.
  • FIG. 16 is an enlarged view of the region R3 of FIG.
  • the connecting member 13 of the third embodiment is a magnetic circuit component 15B.
  • the magnetic circuit component 15B has an annular shape in which a plurality of arc-shaped magnets 155 and a plurality of yokes 156 are alternately arranged.
  • a plurality of arc-shaped magnets 155 are arranged in an annular shape, and a plurality of yokes 156 are arranged between adjacent arc-shaped magnets 155 to form an annular magnetic circuit component 15B. Will be done.
  • An example of a magnet 155 is a neodymium magnet.
  • An example of the yoke 156 is a silicon steel plate.
  • the magnets 155 are arranged so that the same magnetic poles face each other with the yoke 156 in between.
  • the yokes 156 at both ends are in contact with the north pole of the magnet 155, and the yoke 156 in the center is in contact with the south pole. That is, the yokes 156 at both ends have north poles, and the yokes 156 at the center have south poles.
  • the magnetic flux 157 passes from the north pole of the magnet 155 through the yoke 156, extends from the suction surface 157a into the space, and passes from the suction surface 157b through the yoke 156 which is the central south pole of the magnet 155.
  • a magnetic circuit is formed.
  • the magnetic circuit component 15B provided on the second component 12 comes into contact with the first component 11, the magnetic flux 157 is emitted from the magnetic circuit component 15B as described above, and the first component 11 is moved. As a result, a magnetic circuit is formed that returns to the magnetic circuit component 15B. Similar to the magnetic circuit component 15A shown in FIGS. 13 and 14, the attractive force of the magnetic circuit component 15B in which the magnet 155 and the yoke 156 are combined can be increased.
  • the attachment / detachment device 10 has a positioning component at a position where the first component 11 and the second component 12 face each other.
  • FIG. 17 is a top view showing an example of the configuration of the attachment / detachment device according to the fourth embodiment.
  • FIG. 18 is a cross-sectional view showing an example of the configuration of the attachment / detachment device according to the fourth embodiment, and is a cross-sectional view of XVIII-XVIII of FIG. Since the configuration of the detachable device 10 is the same as that shown in FIGS. 1 to 3 of the first embodiment, the same components as those of the first embodiment are designated by the same reference numerals and the description thereof will be described. Omit.
  • the attachment / detachment device 10 includes a positioning component 160.
  • the positioning component 160 includes a first positioning member 161 and a second positioning member 171.
  • the first component 11 and the second component 12 have a first positioning member 161 and a second positioning member 171 at positions facing each other, respectively.
  • the first positioning member 161 has a full screw 163, a nut 164, and a support component 165.
  • the second positioning member 171 has a bolt 172 and a protrusion 173.
  • the first positioning member 161 has a support component 165 having a conical recess 165a on the second component 12 side
  • the second positioning member 171 is a protruding component 173 whose first component 11 side is spherical.
  • the support component 165 is a conical recess 165a that supports a spherical protrusion component 173 fixed to the second component 12.
  • the protrusion component 173 and the support component 165 are positioning components 160 for making the shape of the attachment / detachment device 10 the same before and after attachment / detachment.
  • the first component 11 is provided with a through hole 118 for providing the first positioning member 161 and the second component 12 is provided with a through hole 128 for providing the second positioning member 171.
  • the support component 165 is fixed to the second surface 112 of the first component 11 at the position of the through hole 118 by using all the screws 163 and the nut 164 which are fixing members.
  • the protrusion 173 is fixed to the third surface 121 of the second component 12 at the position of the through hole 128 by using the bolt 172 which is a fixing member.
  • the method of assembling the detachable device 10 will be described. First, all the screws 163 are passed through the through holes 118 of the first component 11, the support component 165 is fixed to one end of the all screws 163, and the nut 164 is fastened to the other end to temporarily attach the support component 165 to the first component 11. Stop. Further, the bolt 172 is passed through the through hole 128 of the second component 12 to fix the protruding component 173 to the second component 12. Next, the connecting member 13 is fixed to the second component 12. After that, the second component 12 is placed on a table, and the first component 11 is placed on the second component 12 via the positioning component 160. Here, while maintaining the state in which the suction surfaces 133a and 133b of the magnetic circuit component 13A shown in FIG.
  • the support component utilizes the gap of the through hole 118.
  • the position of 165 is adjusted.
  • the position of the support component 165 is adjusted so that the protrusion component 173 and the support component 165 do not come into contact with each other.
  • the one-sided contact means that the protrusion part 173 is supported by the support part 165 in a state where the central axis passing through the bolt 172 of the spherical protrusion part 173 and the center axis of the conical recess 165a of the support part 165 are displaced from each other. Refers to a state in which point contact is made with the conical recess 165a of the above.
  • the contact portion between the protrusion 173 and the conical recess 165a of the support component 165 is a circle.
  • the position of the support component 165 is adjusted so as to form an annular shape. Then, the nut 164 of the first component 11 is tightened, and the support component 165 is fixed to the first component 11.
  • the number of positioning parts 160 is preferably three, but may be four or more.
  • the attachment / detachment device 10 of the fourth embodiment has the positioning component 160, the first component 11 and the second component 12 can be easily returned to the original state after attachment / detachment, and it takes time and effort to readjust. It becomes unnecessary.
  • FIGS. 17 and 18 the case where the positioning component 160 is provided in the attachment / detachment device 10 shown in FIGS. 1 to 3 is shown, but the positioning component 160 is implemented in a manner other than that shown in FIGS. 1 to 3. It can also be provided in the attachment / detachment device 10 shown in the first to third forms.
  • the attachment / detachment device 10 has a structure in which the second surface 112 of the first component 11 and the third surface 121 of the second component 12 do not come into contact with each other, and the positioning component 160 is the second surface 112 and the third surface 112.
  • the structure is such that the distance between the surface 121 and the surface 121 can be adjusted. Therefore, the connecting member 13 is not affected by the dimensional error of the component parts of the attachment / detachment device 10, and the spherical protrusion part 173 and the cone are formed so that reproducibility can be obtained in a state where the connecting member 13 is in proper surface contact with the first part 11.
  • the first component 11 and the second component 12 can be connected so that the support component 165 having the concave portion 165a of the shape does not come into contact with one side.
  • the detachable device 10 is required to have such a shape reproducibility is the processing head 200 of the laser processing device as shown in FIG. If the shape is reproducible, the optical path of the laser does not change at the time of attachment / detachment. Therefore, even if the processing head 200 collides with the work and is separated by the attachment / detachment device 10, the performance of the laser processing device is not deteriorated. The processing head 200 can be restored.
  • the detachable device 10 according to the fourth embodiment can secure stable quality, but has a large allowable range for the component size and is easy to assemble. Therefore, it is suitable for technological innovation of the processing head 200 equipped with the detachable device 10. Can contribute.
  • FIG. 19 is a diagram showing an example of the configuration of the laser processing apparatus according to the fifth embodiment.
  • the same parts as those in the first to fourth embodiments are designated by the same reference numerals, and the description thereof will be omitted.
  • two directions orthogonal to each other in the horizontal plane are defined as the X direction and the Y direction, and the direction perpendicular to the X direction and the Y direction is defined as the Z direction. That is, the Z direction is the vertical direction.
  • the laser processing apparatus 300 includes a laser oscillator 310, a processing machine main body 320, and a processing head 200.
  • the laser oscillator 310 oscillates the laser beam L to irradiate the work.
  • the laser beam L is oscillated in a pulse shape.
  • a CO 2 laser oscillator or a fiber laser oscillator with high output is used.
  • the processing machine main body 320 has a drive mechanism and an optical system that guides the laser beam L from the laser oscillator 310 to the processing head 200.
  • the processing head 200 is fixed to the drive mechanism of the processing machine main body 320.
  • the processing head 200 for example, has the configuration shown in FIG.
  • the laser beam L emitted from the laser oscillator 310 is emitted through the optical system and the processing head 200 provided in the processing machine main body 320.
  • the processing machine main body 320 has a Z-axis operating unit 321 that moves the processing head 200 in the Z direction, and an X-axis operating unit 322 that moves the processing head 200 in the X direction.
  • the Z-axis operating unit 321 and the X-axis operating unit 322 are attached to the gate 331.
  • the gate 331 is fixed to the installation surface of the laser processing apparatus 300.
  • the laser machining apparatus 300 further includes a work stage 332 on which the work is placed and a Y-axis operating unit 323 that moves the work stage 332 in the Y direction.
  • the Z-axis operating unit 321 and the X-axis operating unit 322 and the Y-axis operating unit 323 form a drive mechanism for the laser processing device 300. That is, the drive mechanism of the laser processing apparatus 300 of FIG. 19 has a two-axis moving axis composed of an X-axis and a Y-axis in a horizontal plane, and has a one-axis moving axis composed of a Z-axis in the vertical direction. Operates on the axis. As a result, the machining head 200 is capable of three-axis operation by the drive mechanism in addition to the two-axis operation of the a-axis and the b-axis shown in FIG.
  • the attachment / detachment device 10 shown in the first to fourth embodiments can be applied to the processing head 200.
  • the laser machining apparatus 300 includes a machining head 200 having the attachment / detachment apparatus 10 shown in the first to fourth embodiments.
  • the weight of the structure in which the two constituent members are connected by the detachable device 10 can be reduced as compared with the conventional one while fixing the two constituent members by adsorption.
  • the weight-reduced attachment / detachment device 10 can be obtained, the inertial force during operation of the processing head 200 is reduced.
  • the laser processing apparatus 300 for processing sheet metal having a three-dimensional structure the position accuracy can be ensured and the moving time can be shortened as compared with the technique described in Patent Document 1. That is, there is an effect that the laser processing apparatus 300 for processing sheet metal having a three-dimensional structure that realizes processing quality that meets the market demand can be provided.
  • the configuration shown in the above-described embodiment shows an example of the content of the present invention, can be combined with another known technique, and is one of the configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
PCT/JP2020/037275 2019-10-16 2020-09-30 加工ヘッドおよびレーザ加工装置 WO2021075266A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021552305A JP7118286B2 (ja) 2019-10-16 2020-09-30 加工ヘッドおよびレーザ加工装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019189236 2019-10-16
JP2019-189236 2019-10-16

Publications (1)

Publication Number Publication Date
WO2021075266A1 true WO2021075266A1 (ja) 2021-04-22

Family

ID=75537826

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/037275 WO2021075266A1 (ja) 2019-10-16 2020-09-30 加工ヘッドおよびレーザ加工装置

Country Status (2)

Country Link
JP (1) JP7118286B2 (enrdf_load_stackoverflow)
WO (1) WO2021075266A1 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023162397A1 (ja) * 2022-02-22 2023-08-31 三菱電機株式会社 レーザ加工ヘッドおよびレーザ加工機
WO2023162398A1 (ja) * 2022-02-22 2023-08-31 三菱電機株式会社 レーザ加工ヘッドおよびレーザ加工機

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6426184U (enrdf_load_stackoverflow) * 1987-08-07 1989-02-14
JPH0419086A (ja) * 1990-05-15 1992-01-23 Honda Motor Co Ltd 工業用ロボットの連結構造

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60166483U (ja) * 1984-04-06 1985-11-05 児玉化学工業株式会社 レ−ザロボツトのノズル
JP2514810Y2 (ja) * 1990-05-25 1996-10-23 株式会社アマダ レーザ加工機における加工ヘッド
JP2012139691A (ja) * 2009-04-28 2012-07-26 Mitsubishi Electric Corp 加工ヘッド保持機構
CN113891778B (zh) * 2019-06-03 2023-07-21 三菱电机株式会社 加工头及使用该加工头的3维激光加工机

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6426184U (enrdf_load_stackoverflow) * 1987-08-07 1989-02-14
JPH0419086A (ja) * 1990-05-15 1992-01-23 Honda Motor Co Ltd 工業用ロボットの連結構造

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023162397A1 (ja) * 2022-02-22 2023-08-31 三菱電機株式会社 レーザ加工ヘッドおよびレーザ加工機
WO2023162398A1 (ja) * 2022-02-22 2023-08-31 三菱電機株式会社 レーザ加工ヘッドおよびレーザ加工機
JP7558448B2 (ja) 2022-02-22 2024-09-30 三菱電機株式会社 レーザ加工ヘッドおよびレーザ加工機
JP7558447B2 (ja) 2022-02-22 2024-09-30 三菱電機株式会社 レーザ加工ヘッドおよびレーザ加工機

Also Published As

Publication number Publication date
JPWO2021075266A1 (enrdf_load_stackoverflow) 2021-04-22
JP7118286B2 (ja) 2022-08-15

Similar Documents

Publication Publication Date Title
WO2021075266A1 (ja) 加工ヘッドおよびレーザ加工装置
US20100243617A1 (en) Printed circuit board via drilling stage assembly
JP6014927B2 (ja) 位置保持装置
JP7357748B2 (ja) 脱着装置、加工機および加工ヘッド
JP2005156976A5 (enrdf_load_stackoverflow)
JPS63501174A (ja) 機械的振動から最小の隔離しか必要としないコンパクトで高剛性の干渉計
JP2010537834A (ja) 円筒状コンポーネントを機械加工する機械における高精度案内デバイス
US7327644B2 (en) Optical pickup and disc drive apparatus
JPH064886A (ja) 光学ヘッドアクチュエータ
CN116441703A (zh) 激光加工头
US20240261895A1 (en) System For Moving An Optical Element In A Laser Processing System
CN212311253U (zh) 一种小型机械臂焊接头
WO2017072883A1 (ja) 光調節装置及び光調節装置を搭載する光学機器
JP2008227587A (ja) アンテナ駆動用ジンバル装置、及びアンテナ装置
CN1685404A (zh) 光盘装置
JP2009120397A (ja) 部品搬送装置
WO2023162398A1 (ja) レーザ加工ヘッドおよびレーザ加工機
JPH11344682A (ja) 光偏向装置
JPS6316427A (ja) 光ピツクアツプの送り装置
JP2004014903A (ja) ボンディングツール、および電子部品の接合装置
WO2016208078A1 (ja) 光調節装置及び光調節装置を搭載する光学機器
JPH11127563A (ja) 回転操作装置
JP2007333978A (ja) 旋回ステージ装置及び監視カメラ装置
JPH05250697A (ja) 光ピックアップ用アクチュエータ
EP2375414A1 (en) Disk device

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20876077

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2021552305

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20876077

Country of ref document: EP

Kind code of ref document: A1