WO2021066172A1 - 易破砕性ダイヤモンド砥粒及びその製造方法 - Google Patents
易破砕性ダイヤモンド砥粒及びその製造方法 Download PDFInfo
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- WO2021066172A1 WO2021066172A1 PCT/JP2020/037635 JP2020037635W WO2021066172A1 WO 2021066172 A1 WO2021066172 A1 WO 2021066172A1 JP 2020037635 W JP2020037635 W JP 2020037635W WO 2021066172 A1 WO2021066172 A1 WO 2021066172A1
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- diamond
- abrasive grains
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- 239000006061 abrasive grain Substances 0.000 title claims abstract description 117
- 239000010432 diamond Substances 0.000 title claims abstract description 108
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 105
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 239000002245 particle Substances 0.000 claims abstract description 53
- 238000005530 etching Methods 0.000 claims abstract description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 31
- 238000010438 heat treatment Methods 0.000 claims abstract description 31
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 26
- 230000001590 oxidative effect Effects 0.000 claims abstract description 17
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 12
- 230000003068 static effect Effects 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 230000003647 oxidation Effects 0.000 claims description 11
- 238000007254 oxidation reaction Methods 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 10
- 239000012298 atmosphere Substances 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 9
- 238000000227 grinding Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 238000005498 polishing Methods 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 229910000000 metal hydroxide Inorganic materials 0.000 claims description 4
- 150000004692 metal hydroxides Chemical class 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000002344 surface layer Substances 0.000 claims 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims 1
- 238000004320 controlled atmosphere Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 238000000691 measurement method Methods 0.000 claims 1
- 230000001788 irregular Effects 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 6
- 239000007858 starting material Substances 0.000 abstract description 3
- 230000003628 erosive effect Effects 0.000 abstract 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 14
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 12
- 238000005520 cutting process Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 11
- 239000007800 oxidant agent Substances 0.000 description 8
- 239000002994 raw material Substances 0.000 description 8
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 229910052742 iron Inorganic materials 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 229910052573 porcelain Inorganic materials 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000005755 formation reaction Methods 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- ZODDGFAZWTZOSI-UHFFFAOYSA-N nitric acid;sulfuric acid Chemical compound O[N+]([O-])=O.OS(O)(=O)=O ZODDGFAZWTZOSI-UHFFFAOYSA-N 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- TWRXJAOTZQYOKJ-UHFFFAOYSA-L Magnesium chloride Chemical compound [Mg+2].[Cl-].[Cl-] TWRXJAOTZQYOKJ-UHFFFAOYSA-L 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000014413 iron hydroxide Nutrition 0.000 description 2
- NCNCGGDMXMBVIA-UHFFFAOYSA-L iron(ii) hydroxide Chemical compound [OH-].[OH-].[Fe+2] NCNCGGDMXMBVIA-UHFFFAOYSA-L 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 238000004438 BET method Methods 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-N ammonia Natural products N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000010437 gem Substances 0.000 description 1
- 238000005087 graphitization Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 1
- -1 iron group metal oxides Chemical class 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 229910001629 magnesium chloride Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 150000002927 oxygen compounds Chemical class 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/25—Diamond
- C01B32/28—After-treatment, e.g. purification, irradiation, separation or recovery
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/06—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies
- B01J3/062—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies characterised by the composition of the materials to be processed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2203/00—Processes utilising sub- or super atmospheric pressure
- B01J2203/06—High pressure synthesis
- B01J2203/065—Composition of the material produced
- B01J2203/0655—Diamond
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/40—Electric properties
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/90—Other properties not specified above
Definitions
- the present invention relates to diamond abrasive grains, particularly diamond abrasive grains having a unique particle structure and exhibiting friability and other combined suitable effects in the polishing process.
- Diamond synthesis technology has already reached the stage of completion, and it is possible to use high-quality diamonds of the gem class for industrial abrasive grains.
- the amount of machining per hour is larger than the long life of the tool derived from the toughness of the abrasive grains, and a finer finished surface can be obtained for high-speed and precision machining.
- Specialized abrasive grains are also required.
- abrasive grains for microfabrication that simultaneously satisfy the requirements that the amount of processing per unit time, that is, the amount of work material removed is large and the surface roughness of the processed surface is small
- primary particles with a particle size of 10 nm are strongly aggregated and grains.
- Polycrystalline type abrasive grains, which form secondary particles with a diameter of several microns, are preferably used.
- a non-diamond carbon layer is formed on the surface of the abrasive grains by heating the diamond abrasive grains to 1000 ° C. or higher in a non-oxidizing atmosphere, and at the same time, fine cracks are formed inside the abrasive grains.
- the technology is shown.
- the carbon layer on the surface functions as a lubricant or shock absorber between the material to be processed and as a material for reducing the protrusion height of the cutting edge, and fine cracks induce minute crushing near the cutting edge and deep polishing scratches. It is understood that it has the effect of preventing the occurrence of new cutting edges and allowing new cutting edges to grow naturally.
- Patent Document 2 discloses a method in which a diamond abrasive grain is brought into contact with a Group 8 metal and heated to form an irregular shape on the surface of the abrasive grain by an etching action by the metal.
- the metal in contact with the abrasive grains promotes graphitization of diamond at high temperatures, and the graphitized portion is oxidized and removed after heat treatment, thereby reducing the abrasive grain mass, increasing the surface roughness, and increasing the specific surface area. Increase occurs.
- this document exemplifies a method of heating nickel-coated abrasive grains to 825 to 1000 ° C. and a method of mixing abrasive grains and iron powder to form a green compact and heating at 700 ° C. There is.
- the subject of the present invention is to combine each element of an abrasive grain having the advantages of both of the above known techniques, that is, fine cracks in the diamond abrasive grain and an irregular shape of the abrasive grain surface, or a non-diamond carbon layer covering the abrasive grain surface. It is an object of the present invention to provide an abrasive grain having the above-mentioned, and a method for producing the same.
- the gist of the present invention is that the diamond particles are composed of diamond particles synthesized by a static high-pressure / high-temperature method, and fine cracks generated by heating in the particles and irregularities formed on the particle surface by oxidative etching at a high temperature are formed. It is in the diamond abrasive grains having improved crushability.
- Such diamond abrasive grains are basically effectively manufactured as follows. That is, by subjecting the starting diamond particles synthesized by the static high-pressure / high-temperature method to heat treatment at a heating temperature of 800 ° C. or higher in close contact with the oxidation etching agent, fine cracks are generated in the diamond particles and at the same time. The surface of the particles is eroded and recovered as treated diamond having a rugged surface.
- a fine grinding abrasive grain that simultaneously satisfies the requirement of obtaining a finely processed surface while maintaining the machining amount per unit time depending on the apparent size of the abrasive grain.
- each protrusion generated on the surface of the abrasive grain functions as a minute cutting edge, and when an overload is applied, a new cutting edge is generated by microcrushing along the crack in the abrasive grain, and the sharpness is maintained. Demonstrate.
- FIG. 1 is an SEM photograph showing an example of the surface state of diamond abrasive grains produced according to the present invention (Example 3).
- FIG. 2 is an SEM photograph showing another example of the surface state of the diamond abrasive grains produced according to the present invention (Example 3).
- FIG. 3 is an SEM photograph showing still another example of the surface state of the diamond abrasive grains produced according to the present invention (Example 3).
- FIG. 4 is an SEM photograph showing still another example of the surface state of the diamond abrasive grains produced according to the present invention (Example 3).
- FIG. 5 is an SEM photograph showing the surface state of diamond abrasive grains as a starting material for comparison.
- the diamond particles in the present invention are diamond abrasive grains synthesized at ultra-high pressure and high temperature by static pressurization using a press, and crushed particles of such diamond abrasive grains, mainly in a size range of 0.1 ⁇ m to 300 ⁇ m. Is targeted.
- a method of keeping the abrasive grains at a temperature of 1000 ° C. or higher in contact with an oxidizing gas or a solid oxidant as a preferable condition for simultaneously forming fine cracks in the diamond abrasive grains and an irregular shape on the surface of the abrasive grains. Can be mentioned.
- cracks are observed inside the heated diamond abrasive grains according to the present invention because black spots are formed by non-diamond carbon or cloudiness is formed by a collection of fine black spots. Can be estimated.
- the generation of cracks is incorporated into the crystal as an inclusion during the diamond synthesis reaction, or a part of diamond is transferred to the graphite structure by the catalytic action of metal elements, especially nickel, which have entered between the diamond lattices in the order of atoms. It is understood that it occurs by doing. It is thought that the volume expansion accompanying the transition causes strain in the crystal, which is the starting point of crack formation.
- the mechanical strength of the abrasive grains decreases due to crack formation, it can be used to modify the abrasive grains to be suitable for resin bond diamond tools. That is, in the grinding of relatively sticky materials represented by cemented carbide, when a large load is applied to the cutting edge of the abrasive grains, the vicinity of the cutting edge is crushed into small pieces, and the sharp cutting edge appears to maintain the grinding performance. Required.
- the crack formation reaction is preferably heated at 1000 ° C. or higher, preferably 1200 ° C. to 1300 ° C. in a non-oxidizing atmosphere, and the heating temperature and heating holding time can be arbitrarily set according to the target strength value. it can.
- the tentative goal is to reduce the mechanical strength value by 10% or more, including reproducibility.
- the test was performed before the heat treatment.
- the crushability was improved by 20% and 30%, respectively, to 65.7, 1300 ° C, and 70.7 when heated at 1100 ° C for 2 hours in a nitrogen atmosphere with respect to the crushing strength value of 54.4.
- the etching operation for oxidatively etching the surface of the diamond abrasive grains to change the shape into an irregular shape can be performed by gas etching using an oxidizing gas or solid contact etching using a solid oxidizing agent.
- oxidizing gas used for gas etching examples include water vapor, carbon dioxide, and oxygen, which are used alone or in combination, or added to an inert gas such as nitrogen to form abrasive grains heated to 800 ° C. or higher. Make contact.
- the heating temperature in the range of 1000 ° C to 1200 ° C is effective from the viewpoint of oxidation rate and reaction control.
- a metal oxide and / or a metal hydroxide can be used as the solid oxidizing agent, and iron group metal oxides and alkaline earth metal oxides such as iron oxide, calcium oxide, and magnesium oxide are easy to handle.
- the oxide fine powder can be uniformly sprinkled by a dry operation and heat-treated as a green compact.
- fine powder of carbonate can also be used as an oxidizing agent.
- a wet operation is used to evenly adhere the oxide fine powder to the surface of the abrasive grains.
- the surface of the abrasive grains is wetted with an acidic metal salt solution, and alkali is added to attach the metal hydroxide. This is dried in air at about 400 ° C. (below the diamond oxidation starting temperature) before being subjected to the reaction.
- the etching reaction is carried out by a method of maintaining 800 ° C or higher in a non-oxidizing atmosphere.
- the heating temperature is preferably 1000 ° C. or higher, and the preferred range is 1100 to 1300 ° C.
- the treated product is dissolved and removed with dilute hydrochloric acid, washed with water and dried to recover diamond.
- the holding force of the bonding agent is improved as the surface area increases, which contributes to the improvement of tool life.
- the state of the etched surface can be indirectly evaluated by the bulk density value for mesh-sized diamonds.
- the goal is a treatment method that changes to so-called bulky abrasive grains by forming irregularities, and causes a change of more than 10% compared to the abrasive grains before treatment.
- the specific surface area value by the BET method is suitable for relative evaluation. Since micron-sized diamonds that have been sized and classified mainly through crushing operations have an irregular shape, the average value or median value (D 50 value) obtained from particle size distribution measurement is treated as a representative value for convenience. ing.
- the specific surface area value displayed as the total area of the surface of the abrasive grains, including the pores extending inward from the surface and the inner wall surface of the cavity leading to the surface is a sphere whose diameter is the D 50 value of the name. It is much larger than the converted surface area, and is usually about three times as large as commercially available micron-sized diamonds of 10 ⁇ m or less.
- fine irregularities are generated on the surface of the irregularly shaped abrasive grains by the etching operation, so that the specific surface area value is further increased.
- a remarkable effect is observed in terms of machined surface roughness. Since the degree of etching varies depending on various conditions such as the type, concentration, processing temperature, and holding time of the oxidizing agent, setting the value to 3.5 times or more of the sphere conversion value is a tentative guideline for setting the reaction conditions.
- iron oxide of 10% by mass in terms of metallic iron is attached to abrasive grains with an average particle size of 5.7 ⁇ m (specific surface area value 0.849 m 2 / g) by heating at 400 ° C. further reducing iron oxide to metallic iron by 800 ° C. heating in a hydrogen atmosphere, at the same time was held for 2 hours at 1200 ° C. in an argon atmosphere, iron oxide deposited products in the specific surface area is 1.58 m 2 / g, metallic iron adheres products There was a difference of 1.08 m 2 / g, which matched the comparison result of the surface condition by SEM, and it was confirmed that the etching effect of the oxide-adhered product was large.
- Various methods can be used for forming the three elements of the abrasive grains according to the present invention, that is, fine cracks in the abrasive grains, irregular shapes on the surface of the abrasive grains, and a non-diamond carbon layer on the surface of the abrasive grains.
- One-step operation in which solid oxidant contact etching or gas etching is performed at a high temperature of 1200 ° C or higher.
- a two-step operation in which solid oxidant contact etching or gas etching is performed at 800 ° C or higher and 1100 ° C or lower, and then intragranular cracks and surface carbon layers are formed by heating at 1200 ° C or higher in an inert atmosphere.
- Intragranular cracks and surface carbon layer are formed by heating at a high temperature of 1200 ° C or higher, and if necessary, part or all of the surface carbon layer is removed, and etching is performed by heating at 1100 ° C or lower. It is possible to use a combination of various methods such as.
- a wet oxidation treatment in which the mixture is heated to 100 to 150 ° C, preferably 120 to 140 ° C in a sulfuric acid-nitric acid mixed solution is suitable.
- a hydrophilic functional group can be attached to the surface of the abrasive grains at the same time.
- an oxidation treatment method in which the mixture is heated to 250 ° C or higher in a sulfuric acid-nitric acid mixed solution is used, and the amount of weight loss is regarded as non-diamond carbon on the surface of the decomposed abrasive grains.
- a solid oxidizing agent such as KNO 3 , CrO 3 , or KMnO 4 may be used in combination during the oxidation treatment.
- a method of comparing the peak heights of the diffraction lines of diamond and graphite by X-ray diffraction , the peak height around 1330 cm -1 attributable to diamond by Raman spectroscopy, and graphite or non-graphite A method of comparing the peak height around 1500 to 1600 m -1 attributed to standard carbon can also be used.
- the electric resistance value of the green compact under a pressure of 10 MPa it can be obtained from the electric resistance value of the green compact under a pressure of 10 MPa. That is, the diamond powder of the sample filled in the tubular sample holder made of alumina is sandwiched between copper electrodes and attached to the pressurizing device, and the electric resistance value in a state where a pressure of about 10 MPa is applied between the electrodes is as simple as obtaining the electric resistance value. It is a law.
- the resistivity value obtained by this method was found to correlate with the amount of carbon on the surface of the abrasive grains, and was 10 -3 ⁇ ⁇ m at 5% carbon content, 10 4 ⁇ ⁇ m at 0.3%, and 10 6 ⁇ at 0.2%. ⁇ It is on the order of m.
- the preferred amount of carbon is generally in the range of 1 to 5% by mass.
- free carbon generated during polishing may be disliked.
- the carbon layer removal treatment step in the post-treatment can be strengthened to reduce the amount of carbon on the surface to 0.2% or less.
- abrasive grains Two 20 g of the obtained abrasive grains were taken as a sample, and the first sample was kept at 1000 ° C. for 2 hours in a CO 2 atmosphere to obtain abrasive grains with a crushing value of 54.0, and the second sample had an H 2 O atmosphere. Abrasive grains with a crushing value of 58.6 were obtained by keeping the temperature at 1000 ° C. for 2 hours.
- micron size diamond ⁇ [1] Surface oxidation by solid etching agent
- the raw material was the company's micron-sized diamond abrasive grains (IRM5-10; D 50 value (average particle size) 5.730 ⁇ m, specific surface area value 0.849 m 2 / g).
- a wet operation was used to evenly attach the fine powder of oxide, which is an etching agent, to the surface of the abrasive grains.
- the surface of the abrasive grains was first wetted with an acidic metal salt solution (solution of iron chloride, magnesium chloride, etc.), and alkali was added to attach the metal hydroxide. Further, the whole was dried and molded into pellets to prepare a sample.
- an acidic metal salt solution solution of iron chloride, magnesium chloride, etc.
- Each sample was placed in an alumina crucible and kept at 1300 ° C or 1200 ° C for 2 hours in an inert atmosphere.
- the recovered sample was washed with water and dried to dissolve and remove metal components using dilute hydrochloric acid, and diamond particles were recovered. Further, surface observation, particle size and specific surface area measurement were carried out in a state where the carbon layer formed on the particle surface was oxidized and removed using a sulfuric acid-nitric acid mixed solution.
- the diamond abrasive grains of the present invention can be applied to various fine grinding and polishing processes as abrasive grains that simultaneously satisfy the requirements that the amount of work material removed per unit time is large and the surface roughness of the machined surface is small.
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- Chemical Kinetics & Catalysis (AREA)
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Abstract
Description
一方ダイヤモンド砥粒を用いた研磨・研削加工現場では、砥粒のタフネスに由来する工具の長寿命よりも、時間当たりの加工量が大きく、より細かな仕上げ面が得られる、高速・精密加工に特化した砥粒も求められている。
即ち砥粒表面に生じた各々の突起が微小刃先として機能し、過負荷が加わった際には、砥粒内のクラックに沿った微小破砕によって新たな切れ刃が生じ、切れ味が持続するという効果を発揮する。
(1)固形酸化剤接触エッチング又はガスエッチングを、1200℃以上の高温で行う一段操作。
(2)固形酸化剤接触エッチング又はガスエッチングを800℃以上1100℃以下で行い、次いで不活性雰囲気中1200℃以上の加熱により、粒内クラックならびに表面カーボン層を形成するという二段操作。
(3)1200℃以上の高温加熱によって粒内クラック並びに表面カーボン層を形成し、必要に 応じて表面カーボン層の一部または全部を除去し、1100℃以下の加熱によってエッチングを行う。
といった各種の手法の組合せを用いることができる。
市販品のレジンボンド用ダイヤモンド砥粒(トーメイダイヤ(株)製IRV3、170/200、破砕値54.4、嵩密度1.62g/cm3)を原料として、以下の各方法で処理することによって破砕性向上を図った。
磁製ボートに20gの上記原料を入れ、管状炉中で毎分約40mLの二酸化炭素ガスを流しながら、980℃に12時間保持した。
処理後のダイヤモンド粒子は破砕値65.8、嵩密度1.37g/cm3を示し、砥粒内にクラックの発生、粒子表面に荒れが見られ、破砕性は21%増加した。また砥粒表面の荒れによって嵩密度は18%低下した。
磁製ボートに20gの上記原料を入れ、管状炉中で毎分約20mLの水蒸気を窒素ガスと共に送入し、900℃に6時間保持した。
処理後のダイヤモンド粒子は破砕値63.4、嵩密度1.42g/cm3を示した。
鉄片1gを塩酸に溶かした溶液中に20gの原料ダイヤモンドを浸し、アンモニア水を滴下して中和し、水酸化鉄を析出させた。全体を約400℃で乾燥させ試料とした。
磁製るつぼに入れた上記試料を窒素雰囲気中で950℃に5時間保持することで、破砕値68.1、嵩密度1.44g/cm3の砥粒を得た。
市販品のメタルボンド用砥粒(トーメイダイヤ(株)製IMS;325/400、破砕値20.0)を原料として、以下の処理操作によって破砕性の向上を図った。
原料ダイヤモンドをアルミナ製るつぼに入れ、窒素雰囲気中で1300℃に6時間保った。ダイヤモンド粒子は表面に薄いグラファイト層が形成されて灰色を呈し、破砕値として35.0を得た。
[1] (固体エッチング剤による表面酸化)
同社のミクロンサイズダイヤモンド砥粒(IRM5-10;D50値(平均粒径)5.730μm、比表面積値0.849m2/g)を原料とした。
回収した試料は、希塩酸を用いて金属成分を溶解除去し、水洗・乾燥し、ダイヤモンド粒子を回収した。これはさらに、粒子表面に形成されたカーボン層を硫酸-硝酸混液を用いて酸化除去した状態において、表面観察、粒径及び比表面積測定を行った。
磁製ボートに各10gの原料ダイヤモンド粒子を入れ、管状炉中で毎分約20mLの二酸化炭素ガス、または約20mLの水蒸気と窒素との混合ガスを流しながら1000℃以上に2時間保った。
Claims (26)
- 静的高圧・高温法で合成されたダイヤモンド粒子からなり、粒子内に加熱によって生じた微細クラック、及び粒子表面に高温下での酸化エッチングによって形成された凹凸を有する、破砕性の向上したダイヤモンド砥粒。
- 前記ダイヤモンド粒子が、さらに粒子表面に粒子母材の転化によって形成された非ダイヤモンドカーボン層を有する、請求項1に記載のダイヤモンド砥粒。
- 前記非ダイヤモンドカーボン量が、質量比において砥粒全体の0.2%以上である、請求項2に記載のダイヤモンド砥粒。
- 前記非ダイヤモンドカーボン量が、質量比において砥粒全体の0.5乃至10%である、請求項2又は3に記載のダイヤモンド砥粒。
- 前記ダイヤモンド粒子のD50平均粒径が150μm以下の整粒された粒子である、請求項1乃至4のいずれか一項に記載のダイヤモンド砥粒。
- 比表面積値がBET測定法において真球換算値の3.5倍以上である、請求項1乃至5のいずれか一項に記載のダイヤモンド砥粒。
- 前記粒子の表層部が親水性を示す、請求項1乃至6のいずれか一項に記載のダイヤモンド砥粒。
- 前記非ダイヤモンド相に基づいて制御された比電気抵抗を示す請求項1乃至7のいずれか一項に記載のダイヤモンド砥粒。
- バルク粉体としての前記比電気抵抗が10MPaの加圧下での測定において10-3Ω/m以上である、請求項1乃至8のいずれか一項に記載のダイヤモンド砥粒。
- バルク粉体としての前記比電気抵抗が10MPaの加圧下での測定において106Ω/m以下である、請求項1乃至9のいずれか一項に記載のダイヤモンド砥粒。
- 静的高圧・高温法で合成された出発ダイヤモンド粒子を、酸化エッチング剤と密に接して800℃以上の加熱温度での加熱処理に供することによって、ダイヤモンド粒子内に微細クラックを生起せしめると共に、粒子表面を侵食せしめて起伏に富んだ表面を有する処理ダイヤモンドとして回収する、請求項1乃至10のいずれか一項に記載のダイヤモンド砥粒の製造方法。
- 前記酸化エッチング剤がガス状であり、加熱処理を制御された雰囲気中(温度・ガス組成)で行う、請求項11に記載のダイヤモンド砥粒の製造方法。
- 前記酸化エッチング剤種がH2O、CO2、O2から選ばれる一種以上を含有する請求項11又は12に記載の方法。
- 前記雰囲気が非酸化性ガスを含有し、加熱処理を酸化エッチング剤と非酸化性ガスとの混合ガス中で行う、請求項11乃至13のいずれか一項に記載の方法。
- 前記エッチング剤が固形である、請求項11に記載の方法。
- 前記酸化エッチング剤が粒子状乃至粉状であり、ダイヤモンド粒子と一様に混合して加熱に供する、請求項11又は15に記載の方法。
- 前記固形の酸化エッチング剤が、炭素で還元可能な金属酸化物、金属水酸化物及び金属炭酸塩から選ばれる1種以上を含有する、請求項11、15又は16に記載の方法。
- 前記加熱処理温度が800℃以上1500℃以下である、請求項11乃至17のいずれか一項に記載の方法。
- 前記処理温度が1000℃以上1400℃以下である、請求項11乃至18のいずれか一項に記載の方法。
- 前記加熱処理によって、ダイヤモンド粒子内に微細クラックを生起せしめると共に粒子表面を侵食せしめて、起伏に富んだ表面を有する処理ダイヤモンドとして回収する、請求項11乃至19のいずれか一項に記載の方法。
- 前記加熱処理において、出発ダイヤモンド粒子の粒子母材の表層を非ダイヤモンドカーボンに転化せしめる、請求項11乃至20のいずれか一項に記載の方法。
- 前記出発ダイヤモンド粒子がメッシュサイズ級の粒度を有し、かつ処理ダイヤモンドが出発ダイヤモンドに比し破砕強度値において10%以上の低下を示す、請求項11乃至21のいずれか一項に記載の方法。
- 前記出発ダイヤモンド粒子がD50平均粒度において10μm以下の粒度を有し、かつ処理ダイヤモンドが出発ダイヤモンドに比し、比表面積値において10%以上の増加を示す、請求項11乃至22のいずれか一項に記載の方法。
- 請求項1乃至10のいずれか一項に記載のダイヤモンド砥粒を含有する工具。
- 請求項1乃至10のいずれか一項に記載のダイヤモンド砥粒を含有する研磨工具。
- 請求項1乃至10のいずれか一項に記載のダイヤモンド砥粒を含有する研削工具。
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US17/766,033 US20220348470A1 (en) | 2019-10-04 | 2020-10-02 | Easily crushable diamond abrasive grains and method for manufacturing same |
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JPWO2021066172A1 (ja) | 2021-04-08 |
EP4039766A1 (en) | 2022-08-10 |
US20220348470A1 (en) | 2022-11-03 |
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