WO2021044710A1 - Dispositif de commande de position de platine et procédé de commande de position de platine - Google Patents

Dispositif de commande de position de platine et procédé de commande de position de platine Download PDF

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Publication number
WO2021044710A1
WO2021044710A1 PCT/JP2020/024531 JP2020024531W WO2021044710A1 WO 2021044710 A1 WO2021044710 A1 WO 2021044710A1 JP 2020024531 W JP2020024531 W JP 2020024531W WO 2021044710 A1 WO2021044710 A1 WO 2021044710A1
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Prior art keywords
axis
drive system
thrust
stage
command
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PCT/JP2020/024531
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English (en)
Japanese (ja)
Inventor
隼太 境
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パナソニックＩｐマネジメント株式会社
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Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Priority to JP2021543967A priority Critical patent/JP7507355B2/ja
Priority to KR1020227004731A priority patent/KR20220054588A/ko
Priority to CN202080058134.2A priority patent/CN114270286B/zh
Publication of WO2021044710A1 publication Critical patent/WO2021044710A1/fr

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction

Definitions

  • the present invention relates to a stage position control device for controlling the position of a stage and a stage position control method.
  • Patent Document 1 discloses a method of controlling the stage position in the gantry mechanism, which suppresses the movement of the stage in the yawing direction.
  • the stage position control method disclosed in Patent Document 1 is a control method that detects the stage position and feeds back the detected stage position information to a command for moving the stage. Therefore, in this control method, the position of the stage can be controlled so as to suppress the generated movement of the stage in the yawing direction. However, it is difficult to suppress the occurrence of the yawing direction motion of the stage itself when the yawing direction motion of the stage is not generated.
  • an object of the present disclosure is to provide a stage position control device and a stage position control method capable of suppressing the movement of the stage in the yawing direction in the gantry mechanism, as compared with the conventional case.
  • the stage position control device includes a Y1 axis and a Y2 axis parallel to each other, an X axis perpendicular to the Y1 axis and the Y2 axis, and a Y1 axis which is a drive position in the Y1 axis drive system on the Y1 axis.
  • a stage in a gantry mechanism having a position and a stage whose position is determined by the Y2 axis position which is the drive position in the Y2 axis drive system on the Y2 axis and the X axis position which is the drive position in the X axis drive system on the X axis.
  • a stage position control device that controls the position of the Y-axis center of gravity thrust command output unit and a Y-axis center of gravity thrust command output unit that outputs a first Y-axis center of gravity thrust command that commands the center of gravity thrust of the Y1 axis drive system and the Y2 axis drive system.
  • the Y-axis differential thrust command output unit that outputs the first Y-axis differential thrust command that commands the differential thrust between the axis drive system and the Y2-axis drive system, the X-axis position command that commands the X-axis position, and the Y1 axis position.
  • the Y-axis center of gravity position command that commands the position of the center of gravity of the Y2 axis position is fed forward to the first Y-axis differential thrust command, and the second Y-axis differential thrust command is output.
  • a thrust conversion unit that controls the position of the stage by using the Y-axis center of gravity thrust command and the second Y-axis differential thrust command is provided.
  • the stage position control method includes a Y1 axis and a Y2 axis parallel to each other, an X axis perpendicular to the Y1 axis and the Y2 axis, and a Y1 axis which is a drive position in the Y1 axis drive system on the Y1 axis.
  • a stage in a gantry mechanism having a position and a stage whose position is determined by the Y2 axis position which is the drive position in the Y2 axis drive system on the Y2 axis and the X axis position which is the drive position in the X axis X axis drive system.
  • a stage position control method for controlling the position in which a first Y-axis center of gravity thrust command for commanding the center of gravity thrust of the Y1-axis drive system and the Y2-axis drive system is calculated, and the Y1-axis drive system and the Y2-axis drive system are used.
  • the first Y-axis differential thrust command for commanding the differential thrust is calculated, and the X-axis position command for commanding the X-axis position and the Y-axis center of gravity position command for commanding the center of gravity positions of the Y1 axis position and the Y2 axis position are obtained.
  • Feed forward to the first Y-axis differential thrust command calculate the second Y-axis differential thrust command, and use the first Y-axis center of gravity thrust command and the second Y-axis differential thrust command. Control the position of the stage.
  • stage position control device and the stage position control method it is possible to suppress the movement of the stage in the yawing direction in the gantry mechanism as compared with the conventional case.
  • FIG. 1 is a schematic view showing the configuration of the gantry mechanism according to the first embodiment.
  • FIG. 2 is a block diagram showing a configuration of the stage position control device according to the first embodiment.
  • FIG. 3 is a schematic diagram showing an example of an inertia function calculated by the inertia function calculation unit according to the first embodiment.
  • FIG. 4 is a flowchart of the inertia function calculation process according to the first embodiment.
  • FIG. 5 is a flowchart of the stage position control process according to the first embodiment.
  • FIG. 6 is a block diagram showing a configuration of the stage position control device according to the second embodiment.
  • the gantry mechanism suppresses the occurrence of the yawing direction motion of the stage itself at the time when the yawing direction motion of the stage is not generated. It is difficult.
  • the inventor conducted a diligent study and experiment in order to suppress the occurrence of the yawing direction motion of the stage itself at the time when the yawing direction motion of the stage was not generated in the gantry mechanism.
  • the inventor feeds forward the position command that commands the position of the stage to the thrust command that moves the stage, and reduces the component that causes the motion in the yawing direction of the stage from the thrust command in advance. It was found that the occurrence of the stage yawing direction motion itself can be suppressed when the stage yawing direction motion does not occur.
  • the inventor further conducted diligent studies and experiments, and came up with the stage position detection device and the stage position detection method according to one aspect of the present disclosure below.
  • the stage position control device includes a Y1 axis and a Y2 axis parallel to each other, an X axis perpendicular to the Y1 axis and the Y2 axis, and a Y1 axis which is a drive position in the Y1 axis drive system on the Y1 axis.
  • a stage in a gantry mechanism having a position and a stage whose position is determined by the Y2 axis position which is the drive position in the Y2 axis drive system on the Y2 axis and the X axis position which is the drive position in the X axis drive system on the X axis.
  • a stage position control device that controls the position of the Y-axis center of gravity thrust command output unit and a Y-axis center of gravity thrust command output unit that outputs a first Y-axis center of gravity thrust command that commands the center of gravity thrust of the Y1 axis drive system and the Y2 axis drive system.
  • the Y-axis differential thrust command output unit that outputs the first Y-axis differential thrust command that commands the differential thrust between the axis drive system and the Y2-axis drive system, the X-axis position command that commands the X-axis position, and the Y1 axis position.
  • the Y-axis center of gravity position command that commands the position of the center of gravity of the Y2 axis position is fed forward to the first Y-axis differential thrust command, and the second Y-axis differential thrust command is output.
  • a thrust conversion unit that controls the position of the stage by using the Y-axis center of gravity thrust command and the second Y-axis differential thrust command is provided.
  • the first Y-axis differential thrust command that may include a component that causes movement in the yawing direction of the stage includes an X-axis position command and a Y-axis center of gravity position command that command the position of the stage. Can be fed forward to generate a second Y-axis differential thrust command with reduced components that cause the stage to move in the yawing direction.
  • the position of the stage is controlled by using the generated second Y-axis differential thrust command. Therefore, according to the stage position control device having the above configuration, it is possible to suppress the movement of the stage in the yawing direction in the gantry mechanism as compared with the conventional case.
  • the feed forward unit stores an inertia function indicating the relationship between the inertia difference of the Y1 axis drive system and the inertia of the Y2 axis drive system and the X-axis position, and is commanded by the X-axis position command.
  • the inertia difference may be calculated from the X-axis position and the inertia function, and the feed forward value to be fed forward to the first Y-axis difference thrust command may be calculated from the calculated inertia difference and the Y-axis center of gravity position command.
  • the Y-axis center-of-gravity thrust command output unit may output the first Y-axis center-of-gravity thrust command based on the Y-axis center-of-gravity position command.
  • a Y1 axis position detecting unit for detecting the Y1 axis position and a Y2 axis position detecting unit for detecting the Y2 axis position are further provided, and the Y axis center of gravity thrust command output unit is detected by the Y1 axis position detecting unit.
  • the first Y-axis center of gravity thrust command is output and the first The Y-axis differential thrust command output unit feeds back the Y-axis difference position indicating the difference position between the Y1 axis position detected by the Y1 axis position detection unit and the Y2 axis position detected by the Y2 axis position detection unit.
  • the first Y-axis differential thrust command may be output.
  • the thrust conversion unit has a Y1-axis drive system thrust command and a Y2-axis drive that command the thrust of the Y1-axis drive system based on the first Y-axis center of gravity thrust command and the second Y-axis differential thrust command.
  • the Y2-axis drive system thrust command that commands the thrust of the system is calculated, the Y1-axis drive system is driven using the Y1-axis drive system thrust command, and the Y2-axis drive system is driven using the Y2-axis drive system thrust command. By doing so, the position of the stage may be controlled.
  • the X-axis position detecting unit that detects the X-axis position, the X-axis position detected by the X-axis position detecting unit, and the difference position are fed back to the first Y-axis center of gravity thrust command
  • the second A feedback unit that outputs a Y-axis center-of-gravity thrust command may be further provided, and the thrust conversion unit may control the position of the stage by using the second Y-axis center-of-gravity thrust command.
  • the feedback unit stores the inertia function, calculates the inertia difference from the X-axis position and the inertia function detected by the X-axis position detection unit, and calculates the inertia difference from the calculated inertia difference and the difference position, and the first Y-axis center of gravity.
  • the feedback value to be fed back to the thrust command may be calculated.
  • the thrust conversion unit has a Y1-axis drive system thrust command and a Y2-axis drive that command the thrust of the Y1-axis drive system based on the second Y-axis center of gravity thrust command and the second Y-axis differential thrust command.
  • the Y2-axis drive system thrust command that commands the thrust of the system is calculated, the Y1-axis drive system is driven using the Y1-axis drive system thrust command, and the Y2-axis drive system is driven using the Y2-axis drive system thrust command. By doing so, the position of the stage may be controlled.
  • a Y1 axis position detection unit that detects the Y1 axis position
  • a Y2 axis position detection unit that detects the Y2 axis position
  • a Y1 axis drive system thrust command that commands the thrust of the Y1 axis drive system
  • a Y2 axis drive system that controls the thrust of the Y1 axis drive system
  • the Y2-axis drive system thrust command that commands the thrust is output, and (a) the Y1-axis drive system thrust command and the Y2-axis drive system thrust command that are output when the stage position is determined by the first X-axis position, (B) The Y1 axis position detected by the Y1 axis position detection unit and the Y2 axis position detected by the Y2 axis position detection unit when the stage position is determined by the first X-axis position, and (c) the stage.
  • An inertia function calculation unit that calculates an inertia function based on the Y1 axis position detected by the position detection unit and the Y2 axis position detected by the Y2 axis position detection unit may be further provided.
  • the stage position control method includes a Y1 axis and a Y2 axis parallel to each other, an X axis perpendicular to the Y1 axis and the Y2 axis, and a Y1 axis which is a drive position in the Y1 axis drive system on the Y1 axis.
  • a stage in a gantry mechanism having a position and a stage whose position is determined by the Y2 axis position which is the drive position in the Y2 axis drive system on the Y2 axis and the X axis position which is the drive position in the X axis X axis drive system.
  • a stage position control method for controlling the position in which a first Y-axis center of gravity thrust command for commanding the center of gravity thrust of the Y1-axis drive system and the Y2-axis drive system is calculated, and the Y1-axis drive system and the Y2-axis drive system are used.
  • the first Y-axis differential thrust command for commanding the differential thrust is calculated, and the X-axis position command for commanding the X-axis position and the Y-axis center of gravity position command for commanding the center of gravity positions of the Y1 axis position and the Y2 axis position are obtained.
  • Feed forward to the first Y-axis differential thrust command calculate the second Y-axis differential thrust command, and use the first Y-axis center of gravity thrust command and the second Y-axis differential thrust command. Control the position of the stage.
  • the X-axis position command and Y that command the position of the stage are added to the first Y-axis differential thrust command that may contain a component that causes movement in the yawing direction of the stage.
  • a second Y-axis differential thrust command can be generated by feeding forward the axial center of gravity position command and reducing the components that cause the stage to move in the yawing direction.
  • the position of the stage is controlled using the generated second Y-axis differential thrust command. Therefore, according to the stage position control method having the above configuration, it is possible to suppress the movement of the stage in the yawing direction in the gantry mechanism as compared with the conventional method.
  • stage position control device according to one aspect of the present disclosure will be described with reference to the drawings. It should be noted that all of the embodiments described below show comprehensive or specific examples.
  • the numerical values, shapes, materials, components, arrangement positions and connection forms of the components, etc. shown in the following embodiments are examples, and are not intended to limit the present disclosure. Further, among the components in the following embodiments, the components not described in the independent claims indicating the highest level concept are described as arbitrary components.
  • the coordinate system may be shown in the drawings used for explanation in the following embodiments.
  • the z direction in the coordinate system is the direction perpendicular to the paper surface.
  • the x-direction and the y-direction are directions orthogonal to each other in a plane perpendicular to the z-direction.
  • This stage position control device is a device that controls the position of the stage of the gantry mechanism.
  • FIG. 1 is a schematic view showing the configuration of the gantry mechanism 100 according to the first embodiment.
  • the gantry mechanism 100 has a stage whose position is controlled by the stage position control device.
  • the gantry mechanism 100 includes a Y1 axis 110, a Y2 axis 120, an X axis 130, a stage 140, a first X-axis support portion 135, and a second X-axis support portion 136. , Y1 axis drive system 111, Y2 axis drive system 121, and X-axis drive system 131.
  • the Y1 axis 110 and the Y2 axis 120 are axes extending in the y direction shown in FIG. 1, respectively. That is, the Y1 axis 110 and the Y2 axis 120 are axes parallel to each other.
  • the Y1 axis 110 and the Y2 axis 120 are realized by, for example, a metal quadrangular prism extending in the y direction shown in FIG.
  • the X-axis 130 is an axis extending in the x-direction shown in FIG. That is, the X-axis 130 is an axis perpendicular to the Y1 axis 110 and the Y2 axis 120.
  • the X-axis 130 is realized, for example, by a metal quadrangular prism extending in the x-direction shown in FIG.
  • the first X-axis support portion 135 is a support member that supports the X-axis 130 at one end of the X-axis 130.
  • the first X-axis support 135 is realized, for example, by metal.
  • the second X-axis support portion 136 is a support member that supports the X-axis 130 at the other end of the X-axis 130.
  • the second X-axis support 136 is realized, for example, by metal.
  • the Y1 axis drive system 111 is a drive system that is arranged on the Y1 axis 110 and drives the first X-axis support portion 135 so as to be able to travel straight in the y direction shown in FIG.
  • the Y1 axis drive system 111 is realized by, for example, a linear motor that can move along the y direction shown in FIG.
  • the Y1 axis drive system 111 is realized by, for example, a rotary motor and a pole screw extending along the y direction shown in FIG.
  • the Y2-axis drive system 121 is a drive system that is arranged on the Y2-axis 120 and drives the second X-axis support portion 136 so as to be able to travel straight in the y direction shown in FIG.
  • the Y2-axis drive system 121 is realized by, for example, a linear motor that can move along the y direction shown in FIG.
  • the Y2-axis drive system 121 is realized by, for example, a rotary motor and a pole screw extending along the y direction shown in FIG.
  • the stage 140 is a flat plate.
  • the stage 140 is realized by, for example, a metal plate.
  • the X-axis drive system 131 is a drive system that is arranged on the X-axis 130 and drives the stage 140 linearly in the x direction shown in FIG.
  • the X drive system 131 is realized by, for example, a linear motor that can move along the x direction shown in FIG.
  • the X-axis drive system 131 is realized by, for example, a rotary motor and a pole screw extending in the x direction shown in FIG.
  • the Y1 axis drive system 111 and the Y2 axis drive system 121 translate the first X-axis support portion 135 and the second X-axis support portion 136 to drive the X-axis 130 in the y direction shown in FIG. Drives to slide.
  • the X-axis drive system 131 drives the stage so as to be able to travel straight in the x direction shown in FIG.
  • the gantry mechanism 100 sets the stage 140 in the Y1 axis position, which is the drive position in the Y1 axis drive system 111, and in the Y2 axis drive system 121, in the plane defined by the x direction and the y direction shown in FIG. It can be moved to a position determined by the Y2 axis position, which is the drive position, and the X-axis position, which is the drive position in the X-axis drive system 131.
  • the inertia of the Y1-axis drive system 111 and the inertia of the Y2-axis drive system 121 change according to the position of the stage 140 on the X-axis 130. Therefore, even if the same thrust is applied to the Y1 axis drive system 111 depending on whether the position of the stage 140 on the X axis 130 is the first X axis position or the second X axis position, Y1 The drive speeds of the first X-axis support portion 135 by the shaft drive system 111 are different from each other.
  • the stage At 140 when the drive speed of the first X-axis support portion 135 by the Y1-axis drive system 111 and the drive speed of the second X-axis support portion 136 by the Y2-axis drive system 121 are different from each other, the stage At 140, a motion in the yawing direction, which is the rotation direction around the z direction shown in FIG. 1, occurs.
  • the drive speed of the first X-axis support portion 135 by the Y1-axis drive system 111 and the drive speed of the second X-axis support portion 136 by the Y2-axis drive system 121 are set. The difference needs to be suppressed.
  • FIG. 2 is a block diagram showing the configuration of the stage position control device 1 according to the first embodiment. However, FIG. 2 does not show all the components of the stage position control device 1.
  • the components for outputting the Y1 axis drive system thrust command for commanding the thrust for driving the Y1 axis drive system 111 and the Y2 axis drive system 121 are shown.
  • the components for outputting the Y2-axis drive system thrust command for commanding the thrust to be driven are illustrated.
  • FIG. 2 does not show the components of the stage position control device 1 for outputting the X-axis drive system thrust command for commanding the thrust for driving the X-axis drive system 131.
  • the stage position control device 1 includes components (not shown in FIG. 2) for outputting an X-axis drive system thrust command for commanding a thrust for driving the X-axis drive system 131.
  • the stage position control device 1 includes a feed forward unit 10, a Y-axis differential thrust command output unit 20, a Y-axis center of gravity thrust command output unit 30, a Y1 axis position detection unit 41, and a Y2 axis.
  • the phase lag compensation unit 83 is a feed forward unit 10, a Y-axis differential thrust command output unit 20, a Y-axis center of gravity thrust command output unit 30, a Y1 axis position detection unit 41, and a Y2 axis.
  • the Y1 axis position detection unit 41 detects the Y1 axis position, which is the drive position in the Y1 axis drive system 111.
  • the Y1 axis position detection unit 41 is realized by, for example, an encoder installed in a linear motor or a rotary motor of the Y1 axis drive system 111.
  • the Y1 axis position is referred to as y1.
  • the Y2 axis position detection unit 42 detects the Y2 axis position, which is the drive position in the Y2 axis drive system 121.
  • the Y2-axis position detection unit 42 is realized by, for example, an encoder installed in a linear motor or a rotary motor of the Y2-axis drive system 121.
  • the Y2 axis position is referred to as y2.
  • the X-axis position detection unit 43 detects the X-axis position, which is the drive position in the X-axis drive system 131.
  • the X-axis position detection unit 43 is realized by, for example, an encoder installed in a linear motor or a rotary motor of the X-axis drive system 131.
  • the X-axis position is referred to as x.
  • the X-axis position command acquisition unit 81 acquires the X-axis position command that commands the X-axis position.
  • the X-axis position command may be, for example, a function showing the relationship between the commanded X-axis position and time, or a correspondence table in which the commanded X-axis position and time are associated with each other.
  • the Y-axis center-of-gravity position command acquisition unit 82 acquires a Y-axis center-of-gravity position command that commands the center-of-gravity positions of the Y1 axis position and the Y2 axis position.
  • the sum of the Y1 axis position and the Y2 axis position is referred to as the Y axis center of gravity position.
  • the position of the center of gravity of the Y axis is referred to as Y1.
  • the Y-axis center-of-gravity position command may be, for example, a function indicating the relationship between the commanded Y-axis center-of-gravity position and time, or a correspondence table in which the commanded Y-axis center-of-gravity position and time are associated with each other. ..
  • the position conversion unit 70 indicates the sum of the Y1 axis position and the Y2 axis position from the Y1 axis position detected by the Y1 axis position detection unit 41 and the Y2 axis position detected by the Y2 axis position detection unit 42.
  • the position of the center of gravity of the axis and the Y-axis difference position indicating the difference between the Y1 axis position and the Y2 axis position are calculated.
  • the difference between the Y1 axis position and the Y2 axis position is referred to as a Y-axis difference position.
  • the Y-axis difference position is referred to as Y2.
  • the phase delay compensation unit 83 is commanded by the Y-axis center of gravity position command acquisition unit 82 when feeding back the Y-axis center of gravity position calculated by the position conversion unit 70 described later in the Y-axis center of gravity thrust command output unit 30 described later. Compensates for the phase difference between the Y-axis center of gravity position and the Y-axis center of gravity position calculated by the position conversion unit 70.
  • the Y-axis center of gravity thrust command output unit 30 calculates and outputs a first Y-axis center of gravity thrust command F1 that commands the center of gravity thrust of the Y1-axis drive system 111 and the Y2-axis drive system 121.
  • F1 the sum of the Y1-axis drive system thrust and the Y2-axis drive system thrust
  • F1 the Y-axis center of gravity thrust command
  • f1 The Y1-axis drive system thrust command that commands the thrust of the Y1-axis drive system 111
  • f2 The Y2-axis drive system thrust command that commands the thrust of the Y2-axis drive system 121 is referred to as f2.
  • the Y-axis center-of-gravity thrust command output unit 30 receives the Y-axis center-of-gravity position calculated by the position conversion unit 70 as a feedback value in response to the Y-axis center-of-gravity position command whose phase difference is compensated by the phase delay compensation unit 83.
  • the hood back process is performed, and the first Y-axis center of gravity thrust command F1 is output.
  • the Y-axis center of gravity thrust command output unit 30 includes a position feedback unit 31 and a speed feedback unit 32.
  • the position feedback unit 31 feeds back the Y-axis center-of-gravity position calculated by the position conversion unit to the Y-axis center-of-gravity position command whose phase difference is compensated by the phase delay compensation unit 83, and performs PID (Proportional Integral Differential) processing. Then, the Y-axis center-of-gravity velocity command for commanding the center-of-gravity velocity of the Y1-axis drive system 111 and the Y2-axis drive system 121 is output.
  • the sum of the Y1-axis drive system speed and the Y2-axis drive system speed is referred to as the Y-axis center of gravity speed.
  • the Y-axis center of gravity velocity command is referred to as V1.
  • the speed feedback unit 32 is the first derivative based on the time of the Y-axis center of gravity position calculated by the position conversion unit with respect to the Y-axis center-of-gravity velocity command V1 output by the position feedback unit 31.
  • the Y-axis differential thrust command output unit 20 calculates and outputs a first Y-axis differential thrust command that commands a differential thrust between the Y1-axis drive system 111 and the Y2-axis drive system 121.
  • a first Y-axis differential thrust command that commands a differential thrust between the Y1-axis drive system 111 and the Y2-axis drive system 121.
  • the difference between the Y1-axis drive system thrust f1 and the Y2-axis drive system thrust f2 is referred to as a Y-axis differential thrust.
  • the first Y-axis differential thrust command is referred to as F2.
  • the Y1 axis drive system 111 and the Y2 axis drive system 121 are X by translationally driving the first X-axis support portion 135 and the second X-axis support portion 136.
  • the shaft 130 is slidably driven in the y direction shown in FIG. Therefore, the Y-axis difference position command for commanding the difference position between the Y1 axis position and the Y2 axis position becomes 0 at any time. Therefore, the Y-axis difference thrust command output unit 20 receives the Y-axis difference position calculated by the position conversion unit 70 as a feedback value in response to the Y-axis difference position command that becomes 0 at any time, thereby hooding back. Processing is performed, and the second Y-axis differential thrust command F2 is output.
  • the Y-axis differential thrust command output unit 20 includes a position feedback unit 21 and a speed feedback unit 22.
  • the position feedback unit 21 feeds back the Y-axis difference position calculated by the position conversion unit to perform PID processing in response to the Y-axis difference position command that becomes 0 at any time, and performs PID processing on the Y1 axis drive system 111 and Outputs a Y-axis differential speed command that commands a differential speed with the Y2-axis drive system 121.
  • the difference between the Y1-axis drive system speed and the Y2-axis drive system speed is referred to as a Y-axis difference speed.
  • the Y-axis differential velocity command is referred to as V2.
  • the speed feedback unit 22 is the first derivative based on the time of the Y-axis difference position calculated by the position conversion unit with respect to the Y-axis difference velocity command V2 output by the position feedback unit 21.
  • the inertia function calculation unit 60 calculates an inertia function indicating the relationship between the inertia difference, which is the difference between the inertia of the Y1 axis drive system 111 and the inertia of the Y2 axis drive system 121, and the X-axis position.
  • the inertia of the Y1 axis drive system 111 is referred to as m1.
  • the inertia of the Y2-axis drive system 121 is referred to as m2.
  • FIG. 3 is a schematic diagram showing an example of the inertia function calculated by the inertia function calculation unit 60 according to the first embodiment.
  • the inertia function is a function showing the relationship between the inertia difference m1-m2 and the X-axis position x.
  • the inertia function is a function in which the inertia difference m1-m2 is expressed by a linear expression of the X-axis position x, as shown in FIG.
  • the inertia function is not necessarily limited to a function in which the inertia difference m1-m2 is represented by a linear expression of the X-axis position x, as long as it is a function showing the relationship between the inertia difference m1-m2 and the X-axis position x. No need.
  • the inertia difference m1-m2 may be a function expressed by an expression other than the linear expression of the X-axis position x.
  • the inertia function calculation unit 60 includes a Y1-axis drive system thrust command f1 that commands the thrust of the Y1-axis drive system 111, a Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121, and an X-axis drive system 131.
  • the X-axis thrust command fx which commands the thrust of, is output.
  • the inertia function calculation unit 60 includes a Y1 axis position y1 detected by the Y1 axis position detection unit 41, a Y2 axis position y2 detected by the Y2 axis position detection unit 42, and an X detected by the X axis position detection unit 43.
  • the inertia function calculation unit 60 has the output Y1 axis drive system thrust command f1, the output Y2 axis drive system thrust command f2, the acquired Y1 axis position y1, the acquired Y2 axis position y2, and the acquired X axis position. Calculate the inertia function based on x.
  • FIG. 4 is a flowchart of the inertia function calculation process according to the first embodiment.
  • the inertia function calculation process is an example of a process performed by the inertia function calculation unit 60 to calculate the inertia function.
  • the inertia function calculation unit 60 When the inertia function calculation process is started, the inertia function calculation unit 60 outputs an X-axis thrust command fx to the gantry mechanism 100 and moves the stage 140 to the first X-axis position (step S100). At this time, the inertia function calculation unit 60 acquires the X-axis position x from the X-axis position detection unit 43, and moves the stage 140 to the first X-axis position while checking the X-axis position of the stage 140.
  • the inertia function calculation unit 60 When the stage 140 is moved to the first X-axis position, the inertia function calculation unit 60 outputs the Y1-axis drive system thrust command f1 and the Y2-axis drive system thrust command f2, which are synchronized with each other, to the gantry mechanism 100.
  • the Y1 axis drive system 111 and the Y2 axis drive system 121 are vibrated (step S110).
  • the inertia function calculation unit 60 receives the Y1 axis position detection unit 41 and the Y2 axis position detection unit 42 from the Y1 axis position detection unit 41 and the Y2 axis position detection unit 42, respectively. Acquire the position y2 (step S120).
  • the inertia function calculation unit 60 When the Y1 axis position y1 and the Y2 axis position y2 are acquired, the inertia function calculation unit 60 outputs the Y1 axis drive system thrust command f1 and the Y2 axis drive system thrust command f2, and the acquired Y1 axis positions y1 and Y2 axis positions. From y2, the thrust m1 of the Y1 axis drive system 111 and the thrust m2 of the Y2 axis drive system 121 are calculated.
  • the inertia function calculation unit 60 calculates the inertia m1 of the Y1-axis drive system 111 and the inertia m2 of the Y2-axis drive system 121 when the stage 140 is located at the first X-axis position (step S130).
  • the inertia function calculation unit 60 outputs the X-axis thrust command fx to the gantry mechanism 100 and moves the stage 140 to the second X-axis position (step S140). At this time, the inertia function calculation unit 60 acquires the X-axis position x from the X-axis position detection unit 43, and moves the stage 140 to the second X-axis position while checking the X-axis position of the stage 140.
  • the inertia function calculation unit 60 When the stage 140 is moved to the second X-axis position, the inertia function calculation unit 60 outputs the Y1-axis drive system thrust command f1 and the Y2-axis drive system thrust command f2, which are synchronized with each other, to the gantry mechanism 100.
  • the Y1 axis drive system 111 and the Y2 axis drive system 121 are vibrated (step S150).
  • the inertia function calculation unit 60 receives the Y1 axis position detection unit 41 and the Y2 axis position detection unit 42 from the Y1 axis position detection unit 41 and the Y2 axis position detection unit 42, respectively. Acquire the position y2 (step S160).
  • the inertia function calculation unit 60 When the Y1 axis position y1 and the Y2 axis position y2 are acquired, the inertia function calculation unit 60 outputs the Y1 axis drive system thrust command f1 and the Y2 axis drive system thrust command f2, and the acquired Y1 axis positions y1 and Y2 axis positions. From y2, the thrust m1 of the Y1 axis drive system 111 and the thrust m2 of the Y2 axis drive system 121 are calculated.
  • the inertia function calculation unit 60 calculates the inertia m1 of the Y1 axis drive system 111 and the inertia m2 of the Y2 axis drive system 121 when the stage 140 is located at the second X-axis position (step S170).
  • the inertia function calculation unit 60 together with the inertia m1 of the Y1-axis drive system 111 and the inertia m2 of the Y2-axis drive system 121 when the stage 140 is located at the first X-axis position calculated in the process of step S130.
  • the inertia function 180 is calculated based on the inertia m1 of the Y1 axis drive system 111 and the inertia m2 of the Y2 axis drive system 121 when the stage 140 is located at the second X-axis position calculated in the process of step S170. (Step S180).
  • step S180 the inertia function calculation unit 60 ends the inertia function calculation process.
  • the inertia function calculation unit 60 outputs a Y1-axis drive system thrust command that commands the thrust of the Y1-axis drive system 111 and a Y2-axis drive system thrust command that commands the thrust of the Y2-axis drive system 121.
  • the inertia function is calculated based on the following (a) to (d).
  • (B) The Y1 axis position detected by the Y1 axis position detection unit 41 and the Y2 axis position detected by the Y2 axis position detection unit 42 when the position of the stage 140 is determined by the first X-axis position.
  • (C) The Y1-axis drive system thrust command and the Y2-axis drive system thrust command output when the position of the stage 140 is determined by the second X-axis position.
  • (D) The Y1 axis position detected by the Y1 axis position detection unit 41 and the Y2 axis position detected by the Y2 axis position detection unit 42 when the position of the stage 140 is determined by the second X-axis position.
  • the feed forward unit 10 outputs a Y-axis differential thrust command output unit for the X-axis position command acquired by the X-axis position command acquisition unit 81 and the Y-axis center of gravity position command acquired by the Y-axis center of gravity position command acquisition unit 82. It feeds forward to the first Y-axis differential thrust command F2 output from 20 and outputs the second Y-axis differential thrust command.
  • F2' the second Y-axis differential thrust command
  • the feedforward unit 10 includes an inertia function storage unit 11 and a calculation unit 12.
  • the inertia function storage unit 11 stores the inertia function calculated by the inertia function calculation unit 60.
  • the calculation unit 12 calculates the inertia difference from the X-axis position commanded by the X-axis position command acquired by the X-axis position command acquisition unit 81 and the inertia function stored in the inertia function storage unit 11.
  • the calculation unit 12 is the first Y-axis difference thrust output by the Y-axis difference thrust command output unit 20 from the calculated inertia difference and the Y-axis center of gravity position command acquired by the Y-axis center of gravity position command acquisition unit 82. Calculate the feed forward value to feed forward to the command.
  • the calculation unit 12 calculates the inertia difference m1-m2 by substituting the X-axis position x commanded by the X-axis position command into the inertia function.
  • the calculation unit 12 divides the calculated inertia difference m1-m2 into the second derivative according to the time of the Y-axis center of gravity position command.
  • the feedforward unit 10 is a feedforward value calculated from the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output unit 20.
  • the thrust conversion unit 50 controls the position of the stage 140 by using the first Y-axis center of gravity thrust command F1 and the second Y-axis differential thrust command F2'. More specifically, the thrust conversion unit 50 has a second Y-axis differential thrust command F2'output by the feed forward unit 10 and a first Y-axis center of gravity thrust output by the Y-axis center of gravity thrust command output unit. Based on the command F1, the Y1-axis drive system thrust command f1 that commands the thrust of the Y1-axis drive system 111 and the Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated.
  • the thrust conversion unit 50 outputs the calculated Y1-axis drive system thrust command f1 and Y2-axis drive system thrust command f2 to the gantry mechanism 100.
  • the thrust conversion unit 50 drives the Y1-axis drive system 111 using the Y1-axis drive system thrust command f1, and drives the Y2-axis drive system 121 using the Y2-axis drive system thrust command f2, thereby driving the position of the stage 140. To control.
  • the stage position control device 1 having the above configuration controls the position of the stage 140 in the gantry mechanism 100.
  • FIG. 5 is a flowchart of the stage position control process according to the first embodiment.
  • the stage position control process is an example of a process performed by the stage position control device 1 to control the position of the stage 140.
  • the Y1 axis position detection unit 41 detects the Y1 axis position, which is the drive position in the Y1 axis drive system 111, and the Y2 axis position detection unit 42 drives the Y2 axis drive system 121.
  • the Y2 axis position, which is the position, is detected (step S200).
  • the position conversion unit 70 calculates the Y axis center of gravity position and the Y axis difference position from the Y1 axis position and the Y2 axis position (step S210).
  • the Y-axis center of gravity thrust command output unit 30 feeds back the Y-axis center of gravity position and outputs the first Y-axis center of gravity thrust command (step S220).
  • the Y-axis differential thrust command output unit 20 feeds back the Y-axis differential position and outputs the first Y-axis differential thrust command (step S230).
  • the feed forward unit 10 uses the X-axis position command acquired by the X-axis position command acquisition unit 81 and the Y-axis position command acquired by the Y-axis center of gravity position command acquisition unit 82.
  • the axis center of gravity position command is fed forward to the first Y-axis differential thrust command, and the second Y-axis differential thrust command is output (step S240).
  • the thrust conversion unit 50 calculates the thrust of the Y1-axis drive system 111 based on the second Y-axis differential thrust command and the first Y-axis center of gravity thrust command.
  • the Y1-axis drive system thrust command to be commanded and the Y2-axis drive system thrust command to command the thrust of the Y2-axis drive system 121 are calculated (step S250).
  • the calculated Y1-axis drive system thrust command and Y2-axis drive system thrust command are output to the gantry mechanism 100 (step S260) to control the position of the stage 140.
  • step S260 When the process of step S260 is completed, the stage position control device 1 proceeds to the process of step S200 again. In this way, the loop processing including the processing of step S200 to the processing of step S260 is repeated.
  • the Y-axis center of gravity velocity which is the first derivative based on the time of the Y-axis center position Y1
  • the Y-axis differential velocity which is the first derivative based on the time of the Y-axis difference position Y2
  • the first-order velocity based on the time of the Y1 axis position y1.
  • the conversion formula between the Y1 axis velocity, which is the derivative, and the Y2 axis velocity, which is the first derivative with time at the Y2 axis position y2, is expressed by the following (Equation 1).
  • Equation 3 The equation of motion of the Y1-axis drive system 111 and the Y2-axis drive system 121 is expressed by the following (Equation 3).
  • the interference term 1 is used, respectively.
  • the drive speed of the first X-axis support portion 135 by the Y1-axis drive system 111 and the Y2-axis drive It is not possible to suppress the difference between the drive speed of the second X-axis support portion 136 and the drive speed of the system 121. That is, movement in the yawing direction occurs on the stage 140.
  • the interference term 1 When the interference term 2 is removed from the expansion formula 2, the interference term 1 naturally converges to 0. Therefore, by removing the interference term 2 from the deployment formula 2, the movement of the stage 140 in the yawing direction can be suppressed.
  • the feed forward unit 10 is based on the X-axis position command acquired by the X-axis position command acquisition unit 81 and the Y-axis center-of-gravity position command acquired by the Y-axis center-of-gravity position command acquisition unit 82.
  • the feed forward unit 10 reduces the calculated feed forward value, the interference term 2, from the first Y-axis differential thrust command F2 output from the Y-axis differential thrust command output unit 20, thereby reducing the second Y-axis difference.
  • the thrust command F2' is calculated and output. Therefore, the component of the interference term 2 is removed from the second Y-axis differential thrust command F2'.
  • the thrust conversion unit 50 commands the thrust of the Y1 axis drive system 111 based on the second Y-axis differential thrust command F2'and the first Y-axis center of gravity thrust command F1 from which the component of the interference term 2 is removed.
  • the Y1-axis drive system thrust command f1 and the Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated and output to the gantry mechanism 100.
  • the stage position control device 1 can suppress the occurrence of the yawing direction motion of the stage 140 itself at the time when the yawing direction motion of the stage 140 is not generated.
  • the stage position control device In addition to removing the component of the interference term 2 from the first Y-axis differential thrust command F2, the stage position control device further positively removes the component of the interference term 1 from the first Y-axis center of gravity thrust command F1. Remove.
  • FIG. 6 is a block diagram showing the configuration of the stage position control device 1a according to the second embodiment. However, as in the case of FIG. 1, FIG. 6 does not show all the components of the stage position control device 1a.
  • the same components as those of the stage position control device 1 according to the first embodiment are designated by the same reference numerals and detailed description thereof will be omitted, and the differences from the stage position control device 1 will be omitted. The explanation will focus on the points.
  • the stage position control device 1a is configured by adding a feedback unit 90 from the stage position control device 1 according to the first embodiment and changing the thrust conversion unit 50 to the thrust conversion unit 50a. ..
  • the feedback unit 90 outputs the X-axis position detected by the X-axis position detection unit 43 and the Y-axis difference position calculated by the position conversion unit 70 from the Y-axis center of gravity thrust command output unit 30.
  • the second Y-axis center of gravity thrust command is output by feeding back to the Y-axis center of gravity thrust command.
  • the second Y-axis center of gravity thrust command is referred to as F1'.
  • the feedback unit 90 includes an inertia function storage unit 11 and a calculation unit 92.
  • the calculation unit 92 calculates the inertia difference from the X-axis position detected by the X-axis position detection unit 43 and the inertia function stored in the inertia function storage unit 11.
  • the calculation unit 92 feeds back the calculated inertia difference and the Y-axis difference position calculated by the position conversion unit 70 to the first Y-axis center-of-gravity thrust command output by the Y-axis center-of-gravity thrust command output unit 30. Calculate the value.
  • the calculation unit 92 calculates the inertia difference m1-m2 by substituting the X-axis position x detected by the X-axis position detection unit into the inertia function, and adds Y to the calculated inertia difference m1-m2. Second-order differential with time at the axis difference position
  • the feedback unit 90 is a feedback value calculated from the first Y-axis center-of-gravity thrust command F1 output from the Y-axis center-of-gravity thrust command output unit 30.
  • the thrust conversion unit 50a has a Y1 axis based on a second Y-axis differential thrust command F2'output by the feed forward unit 10 and a second Y-axis center of gravity thrust command F1' output by the feedback unit 90.
  • the Y1-axis drive system thrust command f1 that commands the thrust of the drive system 111 and the Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated.
  • the thrust conversion unit 50a outputs the calculated Y1 axis drive system thrust command f1 and Y2 axis drive system thrust command f2 to the gantry mechanism 100, and uses the Y1 axis drive system thrust command f1 to output the calculated Y1 axis drive system thrust command f1 to the Y1 axis drive system 111.
  • the position of the stage 140 is controlled by driving the Y2-axis drive system 121 by using the Y2-axis drive system thrust command f2.
  • the feedback unit 90 uses the interference term 1 as a feedback value from the X-axis position detected by the X-axis position detection unit 43 and the Y-axis difference position calculated by the position conversion unit 70.
  • the feedback unit 90 reduces the interference term 1 which is the calculated feedback value from the first Y-axis center of gravity thrust command F1 output from the Y-axis center of gravity thrust command output unit 30, and thereby reduces the second Y-axis center of gravity thrust command. Calculate and output F1'. Therefore, the component of the interference term 2 is removed from the second Y-axis center of gravity thrust command F1'.
  • the thrust conversion unit 50a is based on the second Y-axis differential thrust command F2'from which the component of the interference term 2 has been removed and the second Y-axis center of gravity thrust command F1' from which the component of the interference term 1 has been removed.
  • the Y1-axis drive system thrust command f1 that commands the thrust of the Y1-axis drive system 111 and the Y2-axis drive system thrust command f2 that commands the thrust of the Y2-axis drive system 121 are calculated and output to the gantry mechanism 100.
  • the stage position control device 1a can suppress the occurrence of the yawing direction motion of the stage 140 itself at the time when the yawing direction motion of the stage 140 is not generated.
  • the stage position control device 1 includes an inertia function calculation unit 60 for calculating an inertia function, and the inertia function storage unit 11 stores the inertia function calculated by the inertia function calculation unit.
  • the stage position control device 1 does not necessarily have to calculate the inertia function if the inertia function can be used.
  • the stage position control device 1 may be configured such that the inertia function storage unit 11 acquires and stores the inertia function calculated by the external device from the external device without including the inertia function calculation unit 60. ..
  • the photodetector according to the present disclosure can be widely used as a device for controlling the position of a stage.
  • Stage position control device 10 Feed forward unit 11 Initiator function storage unit 12, 92 Calculation unit 20 Y-axis differential thrust command output unit 21, 31 Position feedback unit 22, 32 Speed feedback unit 30 Y-axis center of gravity thrust command output unit 41 Y1 axis position detection unit 42 Y2 axis position detection unit 43 X-axis position detection unit 50, 50a Thrust conversion unit 60
  • Initial function calculation unit 70
  • Position conversion unit 81 X-axis position command acquisition unit
  • Y-axis center of gravity position command acquisition unit 83 Phase delay Compensation part 90 Feedback part 100
  • Gantry mechanism 110 Y1 axis 111 Y1 axis drive system 120 Y2 axis 121 Y2 axis drive system 130 X axis 131 X axis drive system 135 First X axis support part 136 Second X axis support part 140
  • Stage 1 100

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention supprime le mouvement d'une platine dans une direction de lacet dans un mécanisme de portique.　Un dispositif de commande de position de platine (1), qui commande la position d'une platine dans un mécanisme de portique (100), est pourvu : d'une unité de sortie de commande de poussée de centre de gravité d'axe Y (30) pour délivrer en sortie une première commande de poussée de centre de gravité d'axe Y prescrivant une poussée de centre de gravité d'un système d'entraînement d'axe Y1 et d'un système d'entraînement d'axe Y2 ; d'une unité de sortie de commande de poussée différentielle d'axe Y (20) pour délivrer en sortie une première commande de poussée différentielle d'axe Y prescrivant une poussée différentielle du système d'entraînement d'axe Y1 et du système d'entraînement d'axe Y2 ; d'une unité d'action anticipée (11) pour injecter par anticipation une commande de position d'axe X (x) prescrivant une position d'axe X, et une commande de centre de gravité d'axe Y (Y1) prescrivant une position de centre de gravité d'une position d'axe Y1 et d'une position d'axe Y2, dans la première commande de poussée différentielle d'axe Y (F2), et délivrer en sortie une seconde commande de poussée différentielle d'axe Y (F2') ; et d'une unité de conversion de poussée (50) pour utiliser la première commande de poussée de centre de gravité d'axe Y et la seconde commande de poussée différentielle d'axe Y pour commander la position de la platine.
PCT/JP2020/024531 2019-09-02 2020-06-23 Dispositif de commande de position de platine et procédé de commande de position de platine WO2021044710A1 (fr)

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JP2021543967A JP7507355B2 (ja) 2019-09-02 2020-06-23 ステージ位置制御装置、及びステージ位置制御方法
KR1020227004731A KR20220054588A (ko) 2019-09-02 2020-06-23 스테이지 위치 제어 장치, 및 스테이지 위치 제어 방법
CN202080058134.2A CN114270286B (zh) 2019-09-02 2020-06-23 载物台位置控制装置和载物台位置控制方法

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CN102059573A (zh) * 2010-11-10 2011-05-18 西安交通大学 动梁式龙门机床双驱同步机电耦合特性的建模方法

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JP2000077503A (ja) * 1998-08-28 2000-03-14 Nikon Corp ステージ装置及び露光装置
JP3312297B2 (ja) 1999-07-02 2002-08-05 住友重機械工業株式会社 ステージ位置制御装置
JP3940388B2 (ja) * 2003-08-04 2007-07-04 住友重機械工業株式会社 ステージ装置用の反力処理システム
JP4591136B2 (ja) * 2005-03-14 2010-12-01 株式会社安川電機 ２次元位置決め装置
US8144310B2 (en) * 2008-04-14 2012-03-27 Asml Netherlands B.V. Positioning system, lithographic apparatus and device manufacturing method
KR102082846B1 (ko) * 2011-01-28 2020-02-28 고쿠리츠다이가쿠호우진 도쿄다이가쿠 구동 시스템과 구동 방법, 노광 장치와 노광 방법, 및 구동 시스템 설계 방법
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JP2001238485A (ja) * 2000-02-21 2001-08-31 Sharp Corp ステージ装置
WO2006006449A1 (fr) * 2004-07-14 2006-01-19 Sumitomo Heavy Industries, Ltd. Dispositif de commande d’étage et dispositif à étage utilisant le dispositif
CN102059573A (zh) * 2010-11-10 2011-05-18 西安交通大学 动梁式龙门机床双驱同步机电耦合特性的建模方法

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