WO2020241377A1 - Réfrigérateur à tube émetteur d'impulsions à plusieurs étages et tête froide de réfrigérateur à tube émetteur d'impulsions à plusieurs étages - Google Patents

Réfrigérateur à tube émetteur d'impulsions à plusieurs étages et tête froide de réfrigérateur à tube émetteur d'impulsions à plusieurs étages Download PDF

Info

Publication number
WO2020241377A1
WO2020241377A1 PCT/JP2020/019769 JP2020019769W WO2020241377A1 WO 2020241377 A1 WO2020241377 A1 WO 2020241377A1 JP 2020019769 W JP2020019769 W JP 2020019769W WO 2020241377 A1 WO2020241377 A1 WO 2020241377A1
Authority
WO
WIPO (PCT)
Prior art keywords
pulse tube
stage
temperature end
high temperature
switching valve
Prior art date
Application number
PCT/JP2020/019769
Other languages
English (en)
Japanese (ja)
Inventor
名堯 許
Original Assignee
住友重機械工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友重機械工業株式会社 filed Critical 住友重機械工業株式会社
Priority to CN202080035070.4A priority Critical patent/CN113825958B/zh
Publication of WO2020241377A1 publication Critical patent/WO2020241377A1/fr

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point

Definitions

  • the present invention relates to a multi-stage pulse tube refrigerator and a cold head of a multi-stage pulse tube refrigerator.
  • the pulse tube refrigerator is equipped with a vibration flow source, a regenerator, a pulse tube, and a phase control mechanism as its main components.
  • a vibration flow source for generating oscillating flow.
  • a regenerator for generating oscillating flow.
  • a pulse tube for generating oscillating flow.
  • GM Green-McMahon
  • phase control mechanisms such as a double inlet type, an active buffer type, and a 4-valve type.
  • the 4-valve type pulse tube refrigerator has an intake valve and an exhaust valve connected to the high temperature end of the pulse tube in addition to the intake valve and the exhaust valve connected to the high temperature end of the regenerator. If it is a multi-stage type, an intake valve and an exhaust valve are provided for each pulse pipe in each stage.
  • the 4-valve type pulse tube chiller has a larger number of valves than other types of pulse tube chillers, and therefore the valve configuration tends to be complicated and large.
  • the design of a pulse tube refrigerator in which these intake and exhaust valves are composed of one rotary valve is often adopted.
  • the pair of intake and exhaust valves must be incorporated into the rotary valve to achieve the desired intake and exhaust timing switching.
  • the gas flow path that communicates with the cool storage device and the flow path that communicates with the pulse tube formed in the rotary valve are rotary valves so that the refrigerant gas does not flow directly between the high temperature end of the cold storage device and the high temperature end of the pulse tube. They are placed at different positions from the axis of rotation of.
  • the gas flow path structure within the rotary valve can be quite complex.
  • the communication passages to the pulse tubes of different stages are often arranged at different radial positions.
  • the diameter of the rotary valve can be larger in the two-stage type than in the single-stage type, and even larger in the three-stage type.
  • One of the exemplary objects of an aspect of the present invention is to provide a pulse tube refrigerator having a simple valve configuration.
  • the multi-stage pulse tube chiller includes a compressor having a compressor discharge port and a compressor suction port, a first-stage pulse tube, a second-stage pulse tube, and the first-stage pulse tube. It has a first-stage regenerator having a low-temperature end communicating with the low-temperature end of the pulse tube and a low-temperature end communicating with the low-temperature end of the second-stage pulse tube, and is connected in series with the first-stage regenerator.
  • a cold head including a connected second-stage regenerator, a main pressure switching valve for alternately connecting the high-temperature end of the first-stage regenerator to the compressor discharge port and the compressor suction port, and a pulse tube.
  • An auxiliary pressure switching valve that alternately connects both the high temperature end of the first stage pulse tube and the high temperature end of the second stage pulse tube to the compressor discharge port and the compressor suction port via the communication passage.
  • the pulse pipe connecting passage has a branch portion between the high temperature end of the first stage pulse pipe and the high temperature end of the second stage pulse pipe and the auxiliary pressure switching valve, and the first pulse pipe is formed at the branch portion. It branches into a flow path and a second pulse tube flow path.
  • the first pulse pipe flow path connects the sub pressure switching valve to the high temperature end of the first stage pulse tube
  • the second pulse pipe flow path connects the sub pressure switching valve to the high temperature end of the second stage pulse tube. Connect to.
  • the cold head of the multistage pulse tube refrigerator has a low temperature end communicating with a first stage pulse tube, a second stage pulse tube, and a low temperature end of the first stage pulse tube.
  • a first-stage regenerator having a first-stage regenerator, a second-stage regenerator having a low-temperature end communicating with a low-temperature end of the second-stage pulse tube, and connected in series with the first-stage regenerator, and the first stage regenerator.
  • a chiller communication passage that connects the high temperature end of the stage chiller to the main pressure switching valve, and a pulse that connects both the high temperature end of the first stage pulse pipe and the high temperature end of the second stage pulse pipe to the sub pressure switching valve. It is equipped with a tube connection passage.
  • the pulse pipe connecting passage has a branch portion between the high temperature end of the first stage pulse pipe and the high temperature end of the second stage pulse pipe and the auxiliary pressure switching valve, and the first pulse pipe is formed at the branch portion. It branches into a flow path and a second pulse tube flow path.
  • the first pulse pipe flow path connects the sub pressure switching valve to the high temperature end of the first stage pulse tube
  • the second pulse pipe flow path connects the sub pressure switching valve to the high temperature end of the second stage pulse tube. Connect to.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the rotary valve shown in FIG. 3, respectively.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the rotary valve shown in FIG. 3, respectively.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the rotary valve shown in FIG. 3, respectively.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the rotary valve shown in FIG. 3, respectively.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the rotary valve shown in FIG. 3, respectively.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the rotary valve shown in FIG. 3, respectively.
  • FIG. 4 (a) and 4 (b) are schematic views showing the valve stator and valve rotor of the
  • FIG. 1 is a schematic view showing the pulse tube refrigerator 10 according to the embodiment.
  • the pulse tube refrigerator 10 includes a cold head 11 and a compressor 12.
  • the pulse tube refrigerator 10 is, for example, a GM (Gifford-McMahon) type 4-valve type pulse tube refrigerator. Therefore, the pulse tube refrigerator 10 has a main pressure switching valve 14, a first stage regenerator 16, a first stage pulse tube 18, an auxiliary pressure switching valve 20, and optionally a first flow rate adjusting element 21. It includes a one-stage phase control mechanism.
  • the compressor 12 and the main pressure switching valve 14 form a vibration flow source for the pulse tube refrigerator 10.
  • the compressor 12 is shared by the vibration flow source and the first-stage phase control mechanism.
  • the pulse tube refrigerator 10 is a two-stage refrigerator, and includes a second-stage regenerator 22, a second-stage pulse tube 24, and a second-stage phase control mechanism optionally having a second flow rate adjusting element 27. , Further prepared.
  • the compressor 12 and the auxiliary pressure switching valve 20 are also shared by the second stage phase control mechanism.
  • the flow rate adjusting elements (21, 27) include, for example, a flow path resistance such as an orifice or a throttle valve.
  • the flow path resistance may be fixed or adjustable.
  • the terms vertical direction A and horizontal direction B are used for convenience in order to explain the positional relationship between the components of the pulse tube refrigerator 10.
  • the vertical direction A and the horizontal direction B correspond to the axial direction and the radial direction of the pulse tube (18, 24) and the regenerator (16, 22), respectively.
  • the vertical direction A and the horizontal direction B may be directions that are approximately orthogonal to each other, and strict orthogonality is not required.
  • the notation of the vertical direction A and the horizontal direction B does not limit the posture in which the pulse tube refrigerator 10 is installed at the place of use.
  • the pulse tube refrigerating machine 10 can be installed in a desired posture.
  • the pulse tube refrigerator 10 may be installed so that the vertical direction A and the horizontal direction B face the vertical direction and the horizontal direction, respectively, and vice versa.
  • the lateral direction B may be installed so as to face the horizontal direction and the vertical direction, respectively.
  • it can be installed so that the vertical direction A and the horizontal direction B are oriented in different oblique directions.
  • the two regenerators (16, 22) are connected in series and extend in the vertical direction A.
  • the two pulse tubes (18, 24) extend in the longitudinal direction A, respectively.
  • the first-stage cold storage device 16 is arranged in parallel with the first-stage pulse tube 18 in the lateral direction B
  • the second-stage cold storage device 22 is arranged in parallel with the second-stage pulse tube 24 in the lateral direction B.
  • the first-stage pulse tube 18 has substantially the same length as the first-stage cold storage device 16 in the vertical direction A
  • the second-stage pulse tube 24 has the first-stage cold storage device 16 and the second-stage cold storage device in the vertical direction A. It has approximately the same length as the total length of 22.
  • the regenerators (16, 22) and the pulse tubes (18, 24) are arranged substantially parallel to each other.
  • the first-stage pulse tube 18 and the second-stage pulse tube 24 are arranged on both sides of the regenerators (16, 22), but this is merely for ease of illustration. Absent.
  • the regenerators (16, 22), the first stage pulse tube 18, and the second stage pulse tube 24 can be arranged so as to form a triangle when viewed in the vertical direction A.
  • the compressor 12 has a compressor discharge port 12a and a compressor suction port 12b, and is configured to compress the recovered low-pressure PL working gas to generate a high-pressure PH working gas.
  • Working gas is supplied from the compressor discharge port 12a to the first-stage pulse tube 18 through the first-stage cold storage device 16, and the working gas is supplied from the first-stage pulse tube 18 to the compressor suction port 12b through the first-stage cold storage device 16. Will be recovered. Further, working gas is supplied from the compressor discharge port 12a to the second-stage pulse pipe 24 through the first-stage regenerator 16 and the second-stage regenerator 22, and the second-stage pulse pipe 24 to the second-stage regenerator 22 and the second stage regenerator 22. The working gas is recovered to the compressor suction port 12b through the one-stage cold storage device 16.
  • the compressor discharge port 12a and the compressor suction port 12b function as a high-pressure source and a low-pressure source of the pulse tube refrigerator 10, respectively.
  • the working gas is also called a refrigerant gas, for example, helium gas.
  • both high-pressure PH and low-pressure PL are significantly higher than atmospheric pressure.
  • the main pressure switching valve 14 has a main intake on-off valve V1 and a main exhaust on-off valve V2.
  • the sub-pressure switching valve 20 has a sub-intake on-off valve V3 and a sub-exhaust on-off valve V4.
  • the pulse tube refrigerator 10 is provided with a high pressure line 13a and a low pressure line 13b.
  • the working gas of high pressure PH flows from the compressor 12 to the cold head 11 through the high pressure line 13a.
  • the working gas of the low pressure PL flows from the cold head 11 to the compressor 12 through the low pressure line 13b.
  • the high-pressure line 13a connects the compressor discharge port 12a to the intake on-off valves (V1, V3).
  • the low pressure line 13b connects the compressor suction port 12b to the exhaust on-off valve (V2, V4).
  • the first-stage cold storage device 16 has a first-stage cold storage device high-temperature end 16a and a first-stage cold storage device low-temperature end 16b, and from the first-stage cold storage device high-temperature end 16a to the first-stage cold storage device low-temperature end 16b. It extends in the vertical direction A.
  • the high-temperature end 16a of the first-stage cold storage device and the low-temperature end 16b of the first-stage cold storage device can also be referred to as the first end and the second end of the first-stage cold storage device 16, respectively.
  • the second-stage cold storage device 22 has a second-stage cold storage device high-temperature end 22a and a second-stage cold storage device low-temperature end 22b, and the second-stage cold storage device high-temperature end 22a to the second-stage cold storage device low-temperature end 22a. It extends in the vertical direction A to 22b.
  • the second-stage cold storage device high-temperature end 22a and the second-stage cold storage device low-temperature end 22b can also be referred to as the first end and the second end of the second-stage cold storage device 22, respectively.
  • the low temperature end 16b of the first stage cold storage device communicates with the high temperature end 22a of the second stage cold storage device.
  • the first-stage pulse tube 18 has a first-stage pulse tube high-temperature end 18a and a first-stage pulse tube low-temperature end 18b, and from the first-stage pulse tube high-temperature end 18a to the first-stage pulse tube low-temperature end 18b. It extends in the vertical direction A.
  • the first stage pulse tube high temperature end 18a and the first stage pulse tube low temperature end 18b can also be referred to as the first end and the second end of the first stage pulse tube 18, respectively.
  • the second-stage pulse tube 24 has a second-stage pulse tube high-temperature end 24a and a second-stage pulse tube low-temperature end 24b, and the second-stage pulse tube high-temperature end 24a to the second-stage pulse tube low-temperature end 24a. It extends in the vertical direction A to 24b.
  • the second-stage pulse tube high-temperature end 24a and the second-stage pulse tube low-temperature end 24b can also be referred to as the first end and the second end of the second-stage pulse tube 24, respectively.
  • the cold storage device (16, 22) is a cylindrical tube filled with a cold storage material inside
  • the pulse tube (18, 24) is a cylindrical tube having a hollow inside.
  • Rectifiers may be provided at both ends of the pulse tubes (18, 24) to equalize or adjust the working gas flow velocity distribution in the plane perpendicular to the axial direction of the pulse tubes. .. This rectifier also functions as a heat exchanger.
  • the cold head 11 includes a first stage cooling stage 28 and a second stage cooling stage 30.
  • the first-stage regenerator 16 and the first-stage pulse tube 18 extend in the same direction from the first-stage cooling stage 28, and the first-stage regenerator high-temperature end 16a and the first-stage pulse tube high-temperature end 18a are the first stage. It is arranged on the same side as the cooling stage 28. In this way, the first-stage regenerator 16, the first-stage pulse tube 18, and the first-stage cooling stage 28 are arranged in a U shape.
  • the second-stage regenerator 22 and the second-stage pulse tube 24 extend in the same direction from the second-stage cooling stage 30, and the second-stage regenerator high-temperature end 22a and the second-stage pulse tube high-temperature end 24a are It is arranged on the same side with respect to the second stage cooling stage 30. In this way, the second-stage cold storage device 22, the second-stage pulse tube 24, and the second-stage cooling stage 30 are arranged in a U shape.
  • the low temperature end 18b of the first stage pulse tube and the low temperature end 16b of the first stage regenerator are structurally connected and thermally coupled by the first stage cooling stage 28.
  • the first-stage communication passage 29 that communicates the working gas between the first-stage regenerator low-temperature end 16b and the first-stage pulse tube low-temperature end 18b so that the working gas can flow. Is formed.
  • the low temperature end 24b of the second stage pulse tube and the low temperature end 22b of the second stage cold storage are structurally connected and thermally coupled by the second stage cooling stage 30.
  • a second-stage communication passage 31 that communicates the working gas between the second-stage cooler low-temperature end 22b and the second-stage pulse tube low-temperature end 24b so that the working gas can flow. Is formed.
  • the cooling stages (28, 30) are made of a metal material having high thermal conductivity such as copper.
  • the cylinder portion and the pulse tube (18, 24) of the regenerator (16, 22) are made of a material having a lower thermal conductivity than that of the cooling stage (28, 30), for example, a metal material such as stainless steel.
  • An object (not shown) to be cooled is thermally coupled to the second stage cooling stage 30.
  • the object may be placed directly on the second stage cooling stage 30 or thermally coupled to the second stage cooling stage 30 via a rigid or flexible heat transfer member.
  • the pulse tube refrigerator 10 can cool an object by conduction cooling from the second stage cooling stage 30.
  • the object cooled by the pulse tube refrigerator 10 may be, for example, not limited to a superconducting electromagnet or other superconducting device, or an infrared imaging element or other sensor.
  • the pulse tube refrigerator 10 can also cool the gas or liquid in contact with the second stage cooling stage 30.
  • an object different from the object cooled by the second-stage cooling stage 30 may be cooled by the first-stage cooling stage 28.
  • the first-stage cooling stage 28 may be thermally coupled with a radiation shield for reducing or preventing heat intrusion into the second-stage cooling stage 30.
  • first-stage cold storage high-temperature end 16a, the first-stage pulse tube high-temperature end 18a, and the second-stage pulse tube high-temperature end 24a are connected by a flange portion 36.
  • the flange portion 36 is attached to a support portion 38 such as a support base or a support wall on which the pulse tube refrigerator 10 is installed.
  • the support 38 may be the wall material or other part of the cooling stage (28, 30) and the heat insulating container or vacuum container accommodating the object to be cooled.
  • a pulse tube (18, 24) and a regenerator (16, 22) extend from one main surface of the flange 36 to the cooling stage (28, 30), and a valve 40 is on the other main surface of the flange 36. It is provided.
  • the valve portion 40 accommodates a main pressure switching valve 14 and a sub pressure switching valve 20. Therefore, when the support 38 forms part of a heat insulating container or vacuum vessel, when the flange 36 is attached to the support 38, the pulse tube (18, 24), the cooler (16, 22), and The cooling stages (28, 30) are housed in the container, and the valve portion 40 is arranged outside the container.
  • the valve portion 40 does not need to be directly attached to the flange portion 36.
  • the valve portion 40 may be arranged separately from the cold head 11 of the pulse tube refrigerator 10 and may be connected to the cold head 11 by a rigid or flexible pipe. In this way, the phase control mechanism of the pulse tube refrigerator 10 may be arranged separately from the cold head 11.
  • the main pressure switching valve 14 is configured to alternately connect the first stage regenerator high temperature end 16a to the compressor discharge port 12a and the compressor suction port 12b in order to generate pressure vibration in the pulse tubes (18, 24). Has been done.
  • the main pressure switching valve 14 is configured such that when one of the main intake on-off valve V1 and the main exhaust on-off valve V2 is open, the other is closed.
  • the main pressure switching valve 14 is connected to the high temperature end 16a of the first stage regenerator via the regenerator communication passage 32.
  • the main intake on-off valve V1 connects the compressor discharge port 12a to the high-temperature end 16a of the first-stage cold storage
  • the main exhaust on-off valve V2 connects the compressor suction port 12b to the high-temperature end 16a of the first-stage cold storage.
  • the auxiliary pressure switching valve 20 alternately connects both the high temperature end 18a of the first stage pulse pipe and the high temperature end 24a of the second stage pulse pipe to the compressor discharge port 12a and the compressor suction port 12b via the pulse pipe communication passage 34.
  • the sub-pressure switching valve 20 is configured such that when one of the sub-intake on-off valve V3 and the sub-exhaust on-off valve V4 is open, the other is closed.
  • the sub intake on-off valve V3 connects the compressor discharge port 12a to both the high temperature end 18a of the first-stage pulse pipe and the high-temperature end 24a of the second-stage pulse pipe, and the sub-exhaust on-off valve V4 connects the compressor suction port 12b to the first stage. It is connected to both the high temperature end 18a of the pulse tube and the high temperature end 24a of the second stage pulse tube.
  • the pulse tube connecting passage 34 has a branch portion 42 between the first stage pulse tube high temperature end 18a and the second stage pulse tube high temperature end 24a and the auxiliary pressure switching valve 20.
  • the pulse pipe connecting passage 34 branches into the first pulse pipe flow path 44 and the second pulse pipe flow path 46 at the branch portion 42.
  • the first pulse pipe flow path 44 connects the auxiliary pressure switching valve 20 to the first stage pulse tube high temperature end 18a
  • the second pulse pipe flow path 46 connects the auxiliary pressure switching valve 20 to the second stage pulse tube high temperature end 24a.
  • the first pulse pipe flow path 44 has a first flow rate adjusting element 21, and the second pulse tube flow path 46 has a second flow rate adjusting element 27.
  • the first-stage pulse tube is passed from the compressor discharge port 12a through the high-pressure line 13a, the sub-intake on-off valve V3, the first pulse tube flow path 44, and the first-stage pulse tube high-temperature end 18a.
  • Working gas is supplied to 18.
  • the sub-exhaust on-off valve V4 is open, the working gas is collected from the first-stage pulse pipe 18 to the compressor suction port 12b through the first-stage pulse pipe high-temperature end 18a, the sub-exhaust on-off valve V4, and the low-pressure line 13b. Will be done.
  • the second stage is passed from the compressor discharge port 12a through the high pressure line 13a, the sub intake on / off valve V3, the second pulse pipe flow path 46, and the second stage pulse pipe high temperature end 24a.
  • Working gas is supplied to the pulse tube 24.
  • the sub-exhaust on-off valve V4 is open, the working gas is collected from the second-stage pulse pipe 24 to the compressor suction port 12b through the second-stage pulse pipe high-temperature end 24a, the sub-exhaust on-off valve V4, and the low-pressure line 13b. Will be done.
  • FIG. 2 is a diagram showing an exemplary valve timing that can be applied to the valve portion 40 of the pulse tube refrigerator 10 shown in FIG.
  • the one-cycle refrigeration cycle of the pulse tube refrigerator 10 is divided into a first standby period W1, an intake period A1, a second standby period W2, and an exhaust period A2.
  • one cycle of the refrigeration cycle is shown as starting from the start timing t 0 of the first standby period W1 and ending at the end timing t 8 of the exhaust period A2.
  • the end timing t 8 of the exhaust period A2 is the start timing t 0 of the refrigeration cycle of the next cycle.
  • the main pressure switching valve 14 is configured to repeat the first standby period W1, the intake period A1, the second standby period W2, and the exhaust period A2 in this order.
  • the sub pressure switching valve 20 is opened prior to the main pressure switching valve 14 and closed prior to the main pressure switching valve 14. In FIG. 2, the shaded section indicates that the valve is open.
  • both the main intake on-off valve V1 and the main exhaust on-off valve V2 are closed, and the first-stage cooler high-temperature end 16a is connected to both the compressor discharge port 12a and the compressor suction port 12b.
  • the main intake on-off valve V1 is opened, the main exhaust on-off valve V2 is closed, and the first-stage cooler high-temperature end 16a is connected to the compressor discharge port 12a.
  • both the main intake on-off valve V1 and the main exhaust on-off valve V2 are closed again, and the first-stage cooler high-temperature end 16a is placed on both the compressor discharge port 12a and the compressor suction port 12b.
  • the main intake on-off valve V1 is closed, the main exhaust on-off valve V2 is opened, and the first-stage cooler high-temperature end 16a is connected to the compressor suction port 12b.
  • the auxiliary pressure switching valve 20 has a high temperature end 18a of the first stage pulse tube and a high temperature end 24a of the second stage pulse tube before 1/2 (or 1/3 or 1/4) of the first standby period W1 elapses. Both are connected to the compressor discharge port 12a. The auxiliary pressure switching valve 20 disconnects this connection by the time the intake period A1 elapses. Further, the auxiliary pressure switching valve 20 has a first-stage pulse tube high-temperature end 18a and a second-stage pulse tube high-temperature end by the time 1/2 (or 1/3, or 1/4) of the second standby period W2 elapses. Both 24a are connected to the compressor suction port 12b. The sub-pressure switching valve 20 disconnects this connection by the time the exhaust period A2 elapses.
  • the timing t 1 for opening the auxiliary intake on-off valve V3 is set between the start timing t 0 and (t 2- t 0 ) / 2 of the first standby period W1.
  • (t 2 -t 0) / 2 is half the difference between the start timing t 2 of the start timing t 0 and the intake period A1 of the first waiting period W1.
  • the timing t 1 to open the auxiliary intake on-off valve V3 may be closer to t 0, for example, between t 0 of (t 2 -t 0) / 3 or (t 2 -t 0) from t 0, It may be set between / 4.
  • Timing t 3 when closing the auxiliary air intake on-off valve V3 is set between the intake period A1 (i.e., between t 2 of t 4).
  • the timing t 5 for opening the sub-exhaust on-off valve V4 is set between the start timing t 4 and (t 6- t 4 ) / 2 of the second standby period W2.
  • (t 6 ⁇ t 4 ) / 2 is half the difference between the start timing t 4 of the second standby period W2 and the start timing t 6 of the exhaust period A2.
  • the timing t 5 to open the auxiliary exhaust on-off valve V4 may be closer to t 4, for example, from t 4 (t 6 -t 4) / 3 between or from t 4 (t 6 -t 4) , It may be set between / 4.
  • Auxiliary exhaust on-off valve V4 to close timing t 7 is set between the exhaust period A2 (i.e., between t 6 of t 8).
  • a typical two-stage pulse tube refrigerator has two sub-pressure switching valves arranged in parallel, one connected to the first stage pulse tube and the other connected to the second stage pulse tube.
  • the refrigeration capacity of the first stage can be maximized by slightly leading the valve timing of the first stage sub-pressure switching valve to the main pressure switching valve.
  • the timing of opening the sub pressure switching valve of the first stage is set to, for example, between t 2 from (t 2 -t 0) / 2 .
  • the sub-pressure switching valve of the first stage is opened after 1/2 of the first standby period W1 elapses, unlike the sub-pressure switching valve 20 according to the embodiment.
  • the auxiliary intake on-off valve V3 is opened by 1/2 (or 1/3, or 1/4) of the first standby period W1, and the sub-exhaust on-off valve V4 is opened. Is released by the time 1/2 (or 1/3, or 1/4) of the second standby period W2 elapses, thereby achieving refrigerating performance equivalent to that of the above-mentioned typical pulse tube refrigerator. Can be done.
  • the auxiliary pressure switching valve 20 is shared by the first stage pulse tube 18 and the second stage pulse tube 24, thereby simplifying the structure of the valve portion 40 and simplifying the structure. , It is advantageous because it can provide good freezing performance.
  • valve timings of these valves (V1 to V4), not only those exemplified in FIG. 2 but also various valve timings applicable to the existing 4-valve type pulse tube refrigerator can be adopted. ..
  • valves There may be various specific configurations of valves (V1 to V4).
  • the group of valves (V1 to V4) may take the form of a plurality of individually controllable valves, such as electromagnetic on-off valves.
  • the valves (V1 to V4) may be configured as rotary valves.
  • FIG. 3 is a schematic view showing an exemplary rotary valve that can be applied to the valve portion 40 of the pulse tube refrigerator 10 shown in FIG. 4 (a) and 4 (b) are schematic views showing the valve stator 48 and the valve rotor 50 of the rotary valve shown in FIG. 3, respectively. 4 (a) and 4 (b) show the flow path arrangement on the valve sliding surface 52 of the rotary valve. As can be seen from the figure, this rotary valve is configured to perform one refrigeration cycle at 180 degree rotation.
  • valve stator 48 and the valve rotor 50 of the rotary valve are housed in the valve housing 54, and both are arranged adjacent to each other so as to be in surface contact with each other on the valve sliding surface 52.
  • the valve stator 48 is fixed to the valve housing 54.
  • the valve drive motor 56 is installed outside the valve housing 54, and the output shaft of the valve drive motor 56 extends through the valve housing 54 to the valve rotor 50.
  • a pressure chamber 58 is formed inside the valve housing 54, and the valve rotor 50 and the valve stator 48 are arranged in the pressure chamber 58.
  • a low pressure line 13b is connected to the pressure chamber 58, and a low pressure PL is introduced.
  • a high-pressure line 13a, a cooler communication passage 32, and a pulse pipe communication passage 34 are connected to the valve stator 48.
  • a high pressure introduction path 48a penetrates the central portion of the valve stator 48 along the rotation axis of the valve rotor 50. Further, on the outer peripheral portion of the valve stator 48, two cooler communication holes 48b and two pulse pipe communication holes 48c penetrate in the direction of the rotation axis of the valve rotor 50.
  • the two regenerator communication holes 48b are arranged at intervals of 180 degrees in the circumferential direction on the circumference centered on the rotation axis of the valve rotor 50.
  • the two pulse tube communication holes 48c are arranged on the same circumference as the cooler storage hole 48b at intervals of 180 degrees in the circumferential direction. However, the cooler communication hole 48b and the pulse tube communication hole 48c are arranged at a desired angle in the circumferential direction.
  • valve rotor 50 is formed with a high pressure recess 50a and two low pressure recesses 50b.
  • the high pressure recess 50a is formed on the valve sliding surface 52 along the diameter of the valve sliding surface 52.
  • the high-pressure recess 50a is sealed from the pressure chamber 58 by surface contact between the valve stator 48 and the valve rotor 50, and does not communicate with the pressure chamber 58.
  • the high pressure line 13a is always connected to the high pressure recess 50a of the valve rotor 50 through the high pressure introduction path 48a of the valve stator 48.
  • the two low-pressure recesses 50b are formed on the outer peripheral portion of the valve rotor 50 and form a part of the pressure chamber 58. Therefore, the low-voltage line 13b is always connected to the low-voltage recess 50b.
  • sealing members for example, O-rings
  • O-rings are mounted between the valve stator 48 and the valve housing 54, and between the high pressure line 13a inside the valve portion 40, the cooler communication passage 32, and the pulse pipe communication passage 34. Direct working gas flow is prevented.
  • the output shaft is rotated by the drive of the valve drive motor 56, whereby the valve rotor 50 rotates and slides with respect to the valve stator 48.
  • the valve rotor 50 rotates (indicated by the arrow R)
  • the flow path connection is periodically switched on the valve sliding surface 52.
  • valve portion 40 Since the high-pressure recess 50a and the low-pressure recess 50b of the valve rotor 50 alternately pass through the regenerator communication hole 48b of the valve stator 48, the valve portion 40 alternately connects the high-pressure line 13a and the low-pressure line 13b to the regenerator communication passage 32. To do. Therefore, the valve unit 40 can operate so as to alternately connect the high temperature end 16a of the first stage cold storage device to the compressor discharge port 12a and the compressor suction port 12b.
  • the valve portion 40 alternates the high pressure line 13a and the low pressure line 13b with the pulse pipe communication passage 34.
  • the pulse pipe connecting passage 34 has a branch portion 42, a first pulse pipe flow path 44, and a second pulse pipe flow path 46. Therefore, the valve unit 40 can operate so that both the high temperature end 18a of the first stage pulse tube and the high temperature end 24a of the second stage pulse tube are alternately connected to the compressor discharge port 12a and the compressor suction port 12b.
  • the specific flow path configuration of the valve portion 40 as a rotary valve is not limited to the above-mentioned specific example, and may be various.
  • the low pressure line 13b is connected to the pressure chamber 58 and the high pressure line 13a is connected to the valve stator 48, but conversely, the low pressure line 13b is connected to the valve stator 48 and the pressure is increased.
  • a high-voltage line 13a may be connected to the chamber 58.
  • the auxiliary pressure switching valve 20 is shared by the first stage pulse tube 18 and the second stage pulse tube 24.
  • the pulse tube connecting passage 34 has a branch portion 42 between the first stage pulse tube high temperature end 18a and the second stage pulse tube high temperature end 24a and the auxiliary pressure switching valve 20.
  • the pulse pipe connecting passage 34 branches into the first pulse pipe flow path 44 and the second pulse pipe flow path 46 at the branch portion 42.
  • the first pulse pipe flow path 44 connects the auxiliary pressure switching valve 20 to the first stage pulse tube high temperature end 18a
  • the second pulse pipe flow path 46 connects the auxiliary pressure switching valve 20 to the second stage pulse tube high temperature end 24a.
  • first pulse pipe flow path 44 is provided with the first flow rate adjusting element 21, and the second pulse pipe flow path 46 is provided with the second flow rate adjusting element 27.
  • the phase control in each of the first stage and the second stage of the pulse tube refrigerator 10 is finely adjusted. be able to. This helps to maximize the refrigerating capacity of each of the first and second stages of the pulse tube refrigerator 10.
  • FIG. 5 is a schematic view showing another example of the pulse tube refrigerator 10 according to the embodiment.
  • the valve portion 40 (that is, the main pressure switching valve 14 and the sub pressure switching valve 20) is detachably connected to the cold head 11.
  • the cold storage connection passage 32 includes a cold storage connecting pipe 60 for connecting the main pressure switching valve 14 to the first stage cold storage 16, and the cold storage connecting pipe 60 includes the main pressure switching valve 14 and the high temperature end of the first stage cold storage. It is removable to each of 16a. Both ends of the regenerator connecting pipe 60 are detachably attached to the main pressure switching valve 14 and the high temperature end 16a of the first stage regenerator via a detachable joint 61 such as a self-sealing coupling.
  • the cooler connecting pipe 60 may be a flexible pipe or a rigid pipe.
  • the pulse pipe connecting passage 34 includes a pulse pipe connecting pipe 62 that connects the sub pressure switching valve 20 to the branch portion 42, and the pulse pipe connecting pipe 62 is detachable from each of the sub pressure switching valve 20 and the branch portion 42. .. Both ends of the pulse pipe connecting pipe 62 are detachably attached to the auxiliary pressure switching valve 20 and the branch portion 42 via a removable joint 63 such as a self-sealing coupling.
  • the pulse pipe connecting pipe 62 may be a flexible pipe or a rigid pipe.
  • a typical two-stage pulse tube refrigerator has two sub-pressure switching valves, one connected to the first stage pulse tube and the other connected to the second stage pulse tube.
  • Such a typical design requires a connecting pipe for the first stage pulse pipe and a connecting pipe for the second stage pulse pipe. Since the volume of the pipe is a dead volume that does not contribute to the refrigerating capacity, it is desirable that the volume be as small as possible.
  • the auxiliary pressure switching valve 20 is shared by the first stage pulse tube 18 and the second stage pulse tube 24. Therefore, the auxiliary pressure switching valve 20 can be connected to the two pulse pipes (18, 24) by one pulse pipe connecting pipe 62. Compared to a typical pulse tube refrigerator, the dead volume of the connecting pipe can be halved, and the refrigerating capacity can be improved. In addition, pressure loss due to piping can be reduced.
  • valve portion 40 can be removed from the cold head 11, the operator can remove the valve portion 40 from the cold head 11 for maintenance. Alternatively, the operator can remove the valve portion 40 from the cold head 11 and replace it with another new or maintained valve portion 40.
  • a circulation path of working gas can be formed including a compressor, a pulse tube and a cold storage device.
  • a gas flow having a DC component which is also called "DC flow”
  • the DC flow can affect the freezing performance of the pulse tube refrigerator.
  • the DC flow includes a working gas flow penetrating from the hot end of the pulse tube to the cold end of the pulse tube, such working gas flow provides significant heat input from the hot end of the pulse tube to the cold end of the pulse tube. Therefore, the refrigerating efficiency of the pulse tube refrigerator may decrease.
  • the pulse tube refrigerator 10 may include a DC flow control flow path 66.
  • the DC flow control flow path 66 is arranged in parallel with the auxiliary pressure switching valve 20, and connects both the high temperature end 18a of the first stage pulse pipe and the high temperature end 24a of the second stage pulse pipe to the compressor suction port 12b.
  • the DC flow control flow path 66 branches from the pulse pipe connecting passage 34 between the auxiliary pressure switching valve 20 and the branch portion 42. In this way, the DC flow control flow path 66 may also be shared by the first-stage pulse tube 18 and the second-stage pulse tube 24.
  • the DC flow control flow path 66 has a DC flow on-off valve 68 and a DC flow adjusting element 70 provided in parallel with the sub-exhaust on-off valve V4 of the sub-pressure switching valve 20.
  • the DC flow on-off valve 68 may be the same as the valve timing of the sub-exhaust on-off valve V4 shown in FIG. 2 (ie, the DC flow on-off valve 68 is between t 5 and t 7 ). It may be open and closed for other periods). Alternatively, the DC flow on-off valve 68 may be temporarily opened while the sub-exhaust on-off valve V4 is open.
  • the DC flow adjusting element 70 includes a flow path resistance such as an orifice or a throttle valve, and the flow path resistance may be fixed or adjustable. May be good.
  • the DC flow control flow path 66 is the auxiliary pressure switching valve 20 and the pulse pipe. It may branch from the pulse pipe connecting passage 34 with the connecting pipe 62 (the joint 63 on the side of the auxiliary pressure switching valve 20). In this way, it is not necessary to provide an additional connecting pipe for the DC flow control flow path 66 in parallel with the pulse pipe connecting pipe 62.
  • the DC flow control flow path 66 may be incorporated in the rotary valve.
  • the valve stator 48 may be provided so as to be adjacent to the pulse pipe communication hole 48c in the radial direction (for example, inward in the radial direction).
  • FIG. 6 is a schematic view showing an example of a connection configuration of a buffer line 72 that can be applied to the pulse tube refrigerator 10 according to the embodiment.
  • a buffer line 72 may be connected to the high temperature end 18a of the first stage pulse tube.
  • the buffer line 72 has a buffer volume 72a such as a buffer tank and a buffer line flow rate adjusting element 72b such as an orifice.
  • the buffer volume 72a acts as an intermediate pressure source for the working gas having an intermediate pressure between the high pressure PH and the low pressure PL (for example, the average pressure between the high pressure PH and the low pressure PL). Therefore, the working gas flows between the first-stage pulse tube 18 and the buffer volume 72a through the buffer line 72 according to the pressure difference between the high-temperature end 18a of the first-stage pulse tube and the buffer volume 72a.
  • a first connection port 74 and a second connection port 76 are provided at the high temperature end 18a of the first stage pulse tube.
  • the first connection port 74 and the second connection port 76 are located at different positions from each other.
  • the first pulse pipe flow path 44 of the pulse pipe connecting passage 34 is connected to the first connection port 74, and the buffer volume 72a is connected to the second connection port 76 by the buffer line 72.
  • the buffer line 72 does not join the pulse pipe connecting passage 34 between the auxiliary pressure switching valve 20 and the first stage pulse pipe high temperature end 18a, but the pulse pipe connecting passage 34 and the buffer line 72 are separated. It is connected to the high temperature end 18a of the first stage pulse tube.
  • the first connection port 74 and the second connection port 76 are located at different positions in the radial direction on the high temperature end 18a of the first stage pulse tube.
  • the first connection port 74 is provided at a position of the first distance C1 radially outward from the center 78 of the first stage pulse tube high temperature end 18a
  • the second connection port 76 is the center of the first stage pulse tube high temperature end 18a. It is provided at a position of a second distance C2 radially outward from 78.
  • the first distance C1 and the second distance C2 indicate the length from the center 78 of the high temperature end 18a of the first stage pulse tube to the center of the first connection port 74 and the second connection port 76.
  • Both the first distance C1 and the second distance C2 are shorter than the radius of the first stage pulse tube 18 so that the first connection port 74 and the second connection port 76 are arranged on the upper surface of the first stage pulse tube high temperature end 18a. ..
  • the first distance C1 is longer than the second distance C2. Therefore, the second connection port 76 is located near the center 78 of the high temperature end 18a of the first stage pulse tube, and the first connection port 74 is the high temperature end 18a of the first stage pulse tube as compared with the second connection port 76. Located near the outer circumference.
  • the first distance C1 may be longer than half the radius of the first stage pulse tube 18.
  • the second distance C2 may be shorter than half the radius of the first stage pulse tube 18.
  • the second connection port 76 may be provided at the center 78 of the high temperature end 18a of the first stage pulse tube. In that case, the second distance C2 becomes zero.
  • Both the first connection port 74 and the second connection port 76 are the high temperature ends of the first stage pulse tube so that the working gas flows in the axial direction of the first stage pulse tube 18 through each of the first connection port 74 and the second connection port 76. It is provided in 18a.
  • the buffer line 72 instead of connecting the buffer line 72 directly to the high temperature end 18a of the first stage pulse tube, joins the pulse tube flow path 34 (eg, the first pulse tube flow path 44). May be done.
  • the working gas flowing through the buffer line 72 from the buffer volume 72a to the high temperature end 18a of the first-stage pulse pipe also draws the working gas from the pulse pipe connecting passage 34, and the working gas is drawn from the high temperature end to the low temperature end of the pulse pipe.
  • DC flow towards can be promoted. Such an effect can be more remarkable as the flow rate of the working gas flowing through the buffer line 72 is larger.
  • the second stage buffer line may be connected to the second stage pulse tube 24, and the first connection port 74 and the second connection port 76 may be provided at the second stage pulse tube high temperature end 24a. ..
  • FIG. 7 is a schematic view showing a further example of the pulse tube refrigerator 10 according to the embodiment.
  • the pulse tube refrigerator 10 is a three-stage pulse tube refrigerator. Therefore, the cold head 11 includes a third-stage regenerator 80 and a third-stage pulse tube 82 in addition to the components described with reference to FIGS. 1 and 5.
  • the third-stage cold storage device 80 is connected in series with the second-stage cold storage device 22.
  • the low temperature end of the third stage regenerator 80 communicates with the low temperature end of the third stage pulse tube 82 through the third stage communication passage 84.
  • the sub-pressure switching valve 20 also alternately connects the high temperature end of the third stage pulse tube 82 to the compressor discharge port 12a and the compressor suction port 12b via the pulse tube communication passage 34.
  • the pulse pipe connecting passage 34 is further branched into the third pulse pipe flow path 86 at the branch portion 42, and the third pulse pipe flow path 86 connects the auxiliary pressure switching valve 20 to the high temperature end of the third stage pulse pipe 82.
  • the third pulse pipe flow path 86 is provided with a third flow rate adjusting element 88.
  • the sub-pressure switching valve 20 is shared not only with the first-stage pulse tube 18 and the second-stage pulse tube 24, but also with the third-stage pulse tube 82. Therefore, it is possible to provide the pulse tube refrigerator 10 having a simple valve structure.
  • the removable valve configuration described with reference to FIG. 5 can be similarly applied to the three-stage pulse tube refrigerator 10 shown in FIG.
  • both the main pressure switching valve 14 and the sub pressure switching valve 20 are removable from the cold head 11. However, when the main pressure switching valve 14 and the sub pressure switching valve 20 are separate valves, at least one of the main pressure switching valve 14 and the sub pressure switching valve 20 is detachably connected to the cold head 11. May be good.
  • the present invention can be used in the field of a multi-stage pulse tube refrigerator and a cold head of a multi-stage pulse tube refrigerator.
  • 10 pulse tube refrigerator 11 cold head, 12 compressor, 12a compressor discharge port, 12b compressor suction port, 14 main pressure switching valve, 16 1st stage regenerator, 18 1st stage pulse tube, 20 sub pressure switching Valve, 21 1st flow adjustment element, 22 2nd stage regenerator, 24 2nd stage pulse tube, 27 2nd flow adjustment element, 32 regenerator communication passage, 34 pulse pipe communication passage, 42 branch part, 44 1st pulse Pipe flow path, 46 second pulse pipe flow path, 62 pulse pipe connection pipe, 66 DC flow control flow path, 80 third stage regenerator, 82 third stage pulse tube, 86 third pulse pipe flow path, A1 intake period , A2 exhaust period, W1 first standby period, W2 second standby period.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Multiple-Way Valves (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)

Abstract

L'invention concerne un réfrigérateur à tube émetteur d'impulsions à plusieurs étages (10) comprenant une vanne de commutation de pression principale (14) pour relier alternativement une extrémité haute température de dispositif de stockage frigorifique de premier étage (16a) à une sortie de compresseur (12a) et une entrée de compresseur (12b), et une valve de commutation de pression secondaire (20) pour connecter alternativement, par l'intermédiaire d'un trajet de communication de tube d'impulsion (34), à la fois une extrémité haute température de tube d'impulsion de premier étage (18a) et une extrémité haute température de tube d'impulsion de second étage (24a) à la sortie de compresseur (12a) et à l'entrée de compresseur (12b). Le trajet de communication de tube d'impulsion (34) a une partie de ramification (42) entre l'extrémité haute température de tube d'impulsion de premier étage (18a) et l'extrémité haute température de tube d'impulsion de second étage (24a) et la valve de commutation de pression secondaire (20), et des branches, au niveau de la partie de ramification (42), à un premier canal de tube d'impulsion (44) et à un second canal de tube d'impulsion (46). Le premier canal de tube d'impulsion (44) connecte la valve de commutation de pression secondaire (20) à l'extrémité haute température du tube d'impulsion de premier étage (18a), et le second canal de tube d'impulsion (46) connecte la valve de commutation de pression secondaire (20) à l'extrémité haute température de tube d'impulsion de second étage (24a).
PCT/JP2020/019769 2019-05-24 2020-05-19 Réfrigérateur à tube émetteur d'impulsions à plusieurs étages et tête froide de réfrigérateur à tube émetteur d'impulsions à plusieurs étages WO2020241377A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202080035070.4A CN113825958B (zh) 2019-05-24 2020-05-19 多级式脉冲管制冷机及多级式脉冲管制冷机的冷头

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019097922A JP7186133B2 (ja) 2019-05-24 2019-05-24 多段式パルス管冷凍機、および多段式パルス管冷凍機のコールドヘッド
JP2019-097922 2019-05-24

Publications (1)

Publication Number Publication Date
WO2020241377A1 true WO2020241377A1 (fr) 2020-12-03

Family

ID=73545845

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/019769 WO2020241377A1 (fr) 2019-05-24 2020-05-19 Réfrigérateur à tube émetteur d'impulsions à plusieurs étages et tête froide de réfrigérateur à tube émetteur d'impulsions à plusieurs étages

Country Status (3)

Country Link
JP (1) JP7186133B2 (fr)
CN (1) CN113825958B (fr)
WO (1) WO2020241377A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112880225A (zh) * 2021-01-26 2021-06-01 中国科学院上海技术物理研究所 多级u型气耦合脉冲管制冷机连管式换热器及实现方法
CN113154714A (zh) * 2021-03-11 2021-07-23 中国科学院上海技术物理研究所 一种气耦合脉冲管制冷机通道式冷端换热器及实现方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001272126A (ja) * 2000-03-24 2001-10-05 Toshiba Corp パルス管冷凍機およびパルス管冷凍機を用いた超電導磁石装置
US6629418B1 (en) * 2002-01-08 2003-10-07 Shi-Apd Cryogenics, Inc. Two-stage inter-phasing pulse tube refrigerators with and without shared buffer volumes
JP2011012925A (ja) * 2009-07-03 2011-01-20 Sumitomo Heavy Ind Ltd 4バルブ型パルスチューブ冷凍機
JP2011094833A (ja) * 2009-10-27 2011-05-12 Sumitomo Heavy Ind Ltd ロータリーバルブおよびパルスチューブ冷凍機
JP2013540979A (ja) * 2011-09-29 2013-11-07 南京柯▲徳▼超低温技▲術▼有限公司 気体流量と位相を自動的に調節する装置を有するパルスチューブ冷凍機
JP2017062064A (ja) * 2015-09-24 2017-03-30 住友重機械工業株式会社 パルス管冷凍機

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101153754A (zh) * 2006-09-29 2008-04-02 住友重机械工业株式会社 脉冲管冷冻机
CN101294752B (zh) * 2007-04-29 2011-07-27 中国科学院理化技术研究所 一种热耦合多级脉冲管制冷机
US9644867B2 (en) * 2009-10-27 2017-05-09 Sumitomo Heavy Industries, Ltd. Rotary valve and a pulse tube refrigerator using a rotary valve

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001272126A (ja) * 2000-03-24 2001-10-05 Toshiba Corp パルス管冷凍機およびパルス管冷凍機を用いた超電導磁石装置
US6629418B1 (en) * 2002-01-08 2003-10-07 Shi-Apd Cryogenics, Inc. Two-stage inter-phasing pulse tube refrigerators with and without shared buffer volumes
JP2011012925A (ja) * 2009-07-03 2011-01-20 Sumitomo Heavy Ind Ltd 4バルブ型パルスチューブ冷凍機
JP2011094833A (ja) * 2009-10-27 2011-05-12 Sumitomo Heavy Ind Ltd ロータリーバルブおよびパルスチューブ冷凍機
JP2013540979A (ja) * 2011-09-29 2013-11-07 南京柯▲徳▼超低温技▲術▼有限公司 気体流量と位相を自動的に調節する装置を有するパルスチューブ冷凍機
JP2017062064A (ja) * 2015-09-24 2017-03-30 住友重機械工業株式会社 パルス管冷凍機

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112880225A (zh) * 2021-01-26 2021-06-01 中国科学院上海技术物理研究所 多级u型气耦合脉冲管制冷机连管式换热器及实现方法
CN112880225B (zh) * 2021-01-26 2022-08-02 中国科学院上海技术物理研究所 多级u型气耦合脉冲管制冷机连管式换热器及实现方法
CN113154714A (zh) * 2021-03-11 2021-07-23 中国科学院上海技术物理研究所 一种气耦合脉冲管制冷机通道式冷端换热器及实现方法

Also Published As

Publication number Publication date
CN113825958A (zh) 2021-12-21
JP2020193726A (ja) 2020-12-03
JP7186133B2 (ja) 2022-12-08
CN113825958B (zh) 2023-02-28

Similar Documents

Publication Publication Date Title
US7497084B2 (en) Co-axial multi-stage pulse tube for helium recondensation
WO2020241377A1 (fr) Réfrigérateur à tube émetteur d'impulsions à plusieurs étages et tête froide de réfrigérateur à tube émetteur d'impulsions à plusieurs étages
CN107328130B (zh) 采用主动调相机构的多级脉管制冷机系统及其调节方法
US7568351B2 (en) Multi-stage pulse tube with matched temperature profiles
JP6759133B2 (ja) パルス管冷凍機、パルス管冷凍機用のロータリーバルブユニット及びロータリーバルブ
JP3702964B2 (ja) 多段低温冷凍機
CN101275793B (zh) 热声磁制冷低温系统
KR102059088B1 (ko) 하이브리드 브레이튼-기퍼드-맥마흔 팽창기
US11649989B2 (en) Heat station for cooling a circulating cryogen
JP3936117B2 (ja) パルス管冷凍機および超電導磁石装置
JP6901964B2 (ja) パルス管冷凍機およびパルス管冷凍機の製造方法
WO2020235554A1 (fr) Réfrigérateur à tuyau d'impulsion, et tête froide pour réfrigérateur à tuyau d'impulsion
US11215385B2 (en) Hybrid Gifford-McMahon-Brayton expander
CN105509361B (zh) 带有阻隔流动的声功传输部件的多级回热式制冷机
JP6087168B2 (ja) 極低温冷凍機
CN111936802B (zh) 冷却循环制冷剂的热站
JP6913039B2 (ja) パルス管冷凍機
JP2019190678A (ja) アクティブバッファパルス管冷凍機
CN112236628B (zh) 脉冲管制冷机
CN110274406B (zh) 一种冷头结构及分体式自由活塞斯特林制冷机
JP2017083156A (ja) Gm冷凍機
JP2002286312A (ja) パルス管冷凍機

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20815261

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20815261

Country of ref document: EP

Kind code of ref document: A1