WO2020213874A1 - Electronic component test handler - Google Patents

Electronic component test handler Download PDF

Info

Publication number
WO2020213874A1
WO2020213874A1 PCT/KR2020/004721 KR2020004721W WO2020213874A1 WO 2020213874 A1 WO2020213874 A1 WO 2020213874A1 KR 2020004721 W KR2020004721 W KR 2020004721W WO 2020213874 A1 WO2020213874 A1 WO 2020213874A1
Authority
WO
WIPO (PCT)
Prior art keywords
test tray
test
tray
opening module
insert opening
Prior art date
Application number
PCT/KR2020/004721
Other languages
French (fr)
Korean (ko)
Inventor
이택선
여동현
유일하
Original Assignee
주식회사 아테코
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 아테코 filed Critical 주식회사 아테코
Publication of WO2020213874A1 publication Critical patent/WO2020213874A1/en

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67271—Sorting devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices

Definitions

  • the present invention relates to an electronic component test handler.
  • the electronic component test handler is a device that inspects a plurality of electronic components, for example, semiconductor devices, modules, and SSDs after being manufactured.
  • the electronic component test handler is configured to connect electronic components to a test device and artificially create various environments to inspect whether the electronic components operate normally, and to classify them into good, re-inspection, and defective products according to the inspection results.
  • distribution is performed by exchanging the user tray in which the device to be tested or the device that has been tested is loaded with the outside, and distribution with the outside must be performed at an appropriate cycle so that the inspection can be continuously performed.
  • Korean Patent Registration No. 1,734,397 (registered on May 02, 2017), filed and registered by the present applicant, is disclosed for such a test handler.
  • An object of the present invention is to provide a test tray capable of minimizing the downtime of the sorting operation due to replacement of the test tray during sorting by solving the above-described conventional problems.
  • the first test tray transfer unit provided in the inverter and configured to move the test tray loaded inside the inverter, and the second configured to transport the empty test tray discharged to the outside of the insert opening module to the loading site. It may include a test tray transfer unit.
  • the insert opening module is composed of a mask and a presizer that are formed to be spaced apart in the vertical direction, and the mask is formed with a plurality of openings so that one side of the hand can pass and pick up the device loaded on the test tray.
  • the presizer may include a plurality of support pins configured to be raised while supporting the lower surface of each insert.
  • the presizer may be configured to support the insert and the test tray while allowing the insert to be closely contacted inside the test tray.
  • test tray may be configured to accommodate a memory chip or a memory module.
  • the electronic component test handler divides a device into a divided area on a flat area from a test tray and transfers the test tray in a divided area unit, and performs classification, thus minimizing the waiting time for hand classification. Therefore, there is an effect that can maximize the efficiency of classification.
  • FIG. 1 is a conceptual diagram of an electronic component test handler according to the present invention divided into spaces according to functions.
  • FIG. 2 is a conceptual diagram of a test handler body of FIG. 1 divided according to functions on a plane.
  • FIG 3 is a conceptual diagram showing movement of a device and a test tray in a test handler body.
  • FIG. 4 is a partial perspective view of a stacker of an electronic component test handler according to the present invention.
  • FIG. 5 is an enlarged perspective view showing an enlarged portion of the configuration of FIG. 4.
  • 6A, 6B, 6C, 6D, and 6E are operational state diagrams showing the transfer of the user tray between the first loading unit and the second loading unit.
  • FIG. 7 is a conceptual diagram showing an operation concept of the stacker during distribution between the first loading unit and the outside.
  • FIG. 8 is a conceptual diagram showing the logistics inside the stacker.
  • FIG. 9 is a perspective view showing a part of an unloading site according to the present invention.
  • 10 is a perspective view of an inverter.
  • FIG. 11 is a perspective view of an insert opening module and a test tray.
  • 12A, 12B, 12C, 13A, 13B and 13C are operational state diagrams showing the movement of the test tray at the unloading site.
  • FIG. 14A and 14B are diagrams showing the operation of each component over time in the present invention.
  • the user tray refers to a tray in which a plurality of loading grooves configured to load semiconductor elements are arranged in a certain arrangement, and the loading groove of the user tray is configured such that the device is fixed inside the groove by gravity without a separate fixing function.
  • FIG. 1 is a perspective view of a test handler according to the present invention.
  • the test handler 1 is configured to carry in the device 20 from the outside, perform a test, and selectively take it out according to the grade.
  • the test handler 1 moves the stacker and device 20 for carrying in or carrying out a plurality of user trays 10 from the outside according to spatially functional functions from the user tray 10, performing a test, and then performing a test by grade. It may be classified into a test handler body 100, which is an area that is classified and loaded into the user tray 10.
  • the stacker 2 refers to an area in which the user tray 10 can be loaded in a large amount.
  • the stacker may be classified into a loading stacker, an unloading stacker, and an empty stacker according to the loaded device 20.
  • the loading stacker is configured to load the user tray 10 in which devices 20 that need to be tested and sorted are loaded.
  • the loading stacker is configured to have a size in which a plurality of user trays 10 carried from the outside can be stacked in units of 1 lot.
  • the unloading stacker is configured to load a plurality of user trays 10 loaded with a device 20 for carrying out to the outside among the devices 20 that have been tested and sorted before being taken out in units of one lot.
  • the empty stacker is configured so that a plurality of empty user trays 10 can be loaded, and the empty user tray 10 is transferred from the loading stacker after the transfer of the device 20 is completed, or the empty user tray 10 is transferred to the unloading stacker. It may be configured to be able to transport the user tray 10.
  • the loading stacker, the unloading stacker, and the empty stacker may be classified according to logistics to the outside, logistics and loading purpose inside the test handler 1, but their configurations may be the same or similar to each other.
  • Each stacker module 500 may be configured to stack and stack a plurality of user trays 10 in a vertical direction for efficient use of space.
  • each stacker module 500 is configured to be opened and closed by moving horizontally in the y direction of FIG. 1, and distribution with the outside is performed at a position carried out to the outside.
  • a plurality of user trays 10 may be transferred to a loading stacker from an automatic guided vehicle (AGV), or an unmanned vehicle may collect a plurality of user trays 10 from the unloading stacker.
  • AGV automatic guided vehicle
  • the stacker 2 may be configured such that each of the loading stacker, the unloading stacker, and the empty stacker may be set in plural, and internal logistics can be continuously performed even while any one is logistics with the outside.
  • test handler body 100 will be schematically described with reference to FIGS. 2 and 3.
  • FIG. 2 is a conceptual diagram showing the test handler body 100 of FIG. 1 divided according to functions on a plane
  • FIG. 3 is a conceptual diagram showing movement of the device 20 and the test tray 130 in the test handler body 100 .
  • the test handler body 100 tests a plurality of devices 20, classifies the devices 20 after the test, and transfers and loads the devices 20 before and after the test.
  • the test handler body 100 may be functionally classified, including a loading site (L), a test site (T), and an unloading site (UL).
  • the loading site L is configured to pick up a plurality of devices 20 from the user tray 10 and place them on the test tray 130.
  • the loading site L may be provided with a hand 110 for transferring the device 20 from the user tray 10 to the test tray 130, a loading shuttle 120, and a scanner (not shown) for inspection. .
  • the user trays 10 loaded in the loading stacker may be alternately supplied to the pickup position one by one, and the hand 110, which will be described later, removes only the plurality of devices 20 from the user tray 10 and transfers them.
  • the empty user tray 10 and the user tray 10 in which the devices are loaded are replaced and positioned so that the device 20 can be continuously supplied.
  • the pickup position a plurality of user trays 10 are provided so that the device 20 can be continuously supplied even when all the user trays 10 loaded in any one stacker module 500 have been consumed or a failure occurs. It can be exposed.
  • the other user tray 10 may be configured to wait in a standby state or be replaced with a new user tray 10.
  • the hand 110 is configured to pick up and transfer the plurality of devices 20 and then load them onto the test tray 130 or the loading shuttle 120.
  • the hand 110 may be configured to be in charge of logistics for each transport section.
  • the hand 110 may be installed on a rail capable of horizontal movement of the upper side, and is configured so that the attachment can be viewed toward the lower side, and a linear actuator (not shown) is provided to enable length adjustment in the vertical direction. I can.
  • the attachment may be configured such that a plurality of vacuum ports are provided to vacuum-adsorb the plurality of devices 20.
  • the attachment may be configured to be replaceable in consideration of the type, size, and shape of the device 20.
  • the test tray 130 is provided with an insert for each loading groove in consideration of thermal deformation when fixing the device 20 and performing a test, and the interval between the loading grooves may be different from that of the user tray 10.
  • the spacing between the loading grooves of the test tray 130 is configured to be larger than that of the user tray 10. Therefore, after picking up the plurality of devices 20 from the user tray 10 at the pickup position by using the hand 110, the space between the devices 20 is widened and then loaded onto the test tray 130.
  • two interval adjustments may be performed to increase the interval in two directions of xy, and for this purpose, a loading shuttle 120 is provided between the pickup position and the test tray 130, and a loading shuttle from the user tray 10
  • the distance in one direction can be adjusted while being transferred to 120, and the distance in the other direction can be adjusted while transferring from the loading shuttle 120 to the test tray 130.
  • the loading shuttle 120 is provided between the user tray 10 and the test tray 130, and the space between the loading grooves is the user tray 10 so that the plurality of devices 20 can be loaded in a state that is primarily aligned. It may be configured in an array that is widened in one direction. In addition, the loading shuttle 120 may be positioned in consideration of the positions of the user tray 10, the test tray 130, and the hand 110 for efficiency of distribution.
  • a scanner (not shown) is provided to identify barcodes if they are present on the device 20 to be transferred.
  • the scanner (not shown) may be configured to recognize a barcode on a path through which the hand 110 picks up and transfers the device 20.
  • the scanner may be provided in various positions to facilitate the recognition of barcodes according to the shape, size and type of the device 20.
  • test tray 130 In the place position, an empty test tray 130 is supplied, and the device 20 is transferred and stacked.
  • the test tray 130 is transferred to the test site T afterwards, and a new empty test tray 130 is supplied.
  • a mask and a preciser configured to prevent separation of the device 20 after the device 20 is seated on the test tray 130 may be provided at the place position.
  • the test tray 130 is provided with an insert for each loading groove, and each insert is provided with a locking portion capable of preventing the device 20 from being separated.
  • the basic position of each of the locking portions is set to a position that prevents the device 20 from being separated.
  • the loading of the device 20 in the test tray 130 is performed by expanding the engaging portion of the insert with a mask while pressing the insert with a presizer, and the hand 110 transferring the device 20 to the loading groove.
  • the mask is configured in a shape corresponding to the test tray 130, and a plurality of protrusions 312 are provided to expand the locking portions of each insert when in close contact with the test tray 130.
  • the presizer is configured to temporarily fix the insert provided in the test tray 130 in a somewhat spaced state.
  • the presizer is provided with a plurality of pressing pins corresponding to the position of each insert, and the presizer is in close contact with the test tray 130 to press the insert to temporarily fix it with the test tray 130. Therefore, it is possible to minimize the position error when the device 20 is seated on the insert.
  • an elevating unit for independently elevating the mask and the presizer may be additionally provided.
  • the test site T is configured to perform a test on a plurality of devices 20 loaded on the test tray 130 in units of the test tray 130 and transmit the test results.
  • a thermal load test may be performed in which the device 20 is changed to a temperature of -40°C to 130°C to check the function.
  • a test chamber 160 and a buffer chamber 150 provided before and after the test chamber 160 may be provided at the test site T.
  • the buffer chamber 150 may be configured to be loaded with a plurality of test trays 130, and may be configured to perform preheating or post-heat treatment before and after performing a heat load test.
  • the test tray 130 may be configured to be transported and tested while the test tray 130 is upright, so that the overall size of the equipment may be reduced. Meanwhile, although the configuration is not shown in detail, an inverter 140 may be provided before and after the buffer chamber 150 to change the posture of the test tray 130 to an upright state.
  • the unloading site UL is configured to sort, transport, and load the device 20 according to the test result from the test tray 130 transferred from the test site T.
  • the unloading site UL may be provided with elements similar to the configuration of the loading site L, and may be performed in an order opposite to the transfer of the device 20 at the loading site L.
  • a plurality of sorting shuttles 170 may be provided to temporarily collect from the test tray 130 according to grades. In order to improve the efficiency of distribution, when a predetermined number of devices 20 of the same grade are loaded in the sorting shuttle 170, a plurality of devices may be simultaneously picked up and transferred to the user tray 10.
  • a control unit for controlling driving of the above-described components may be separately provided.
  • FIG. 4 is a partial perspective view of a stacker of the electronic component test handler 1 according to the present invention
  • FIG. 5 is an enlarged perspective view showing a partial configuration of FIG. 4.
  • the stacker may be configured to continuously supply or retrieve the device 20 from the lower side of the base 101 of the test handler body 100.
  • the stacker may include a stacker module 500 and a buffer stacker 300.
  • the stacker module 500 may be configured in plural, each independently opened and closed to exchange the user tray 10 with the outside.
  • the plurality of stacker modules 500 may be provided in a number corresponding to 1:1 with the second loading unit 310 inside the buffer stacker 300 to be described later.
  • the stacker module 500 may be configured to be opened while moving in a horizontal direction.
  • the stacker module 500 includes a frame 200, a first loading part 510, a first loading part lifting part 520, a slider 530, a linear actuator 550, a guide 610, and a sensor part 620. And it may be configured to include a door 540.
  • the frame 200 may be configured to constitute an overall skeleton.
  • the first loading unit 510 refers to a space in which a plurality of user trays 10 can be stacked and loaded.
  • the first loading unit 510 may be loaded with an external user tray 10 transfer means, for example, 1 lot, which is a unit that is exchanged with a robot at a time.
  • 1 lot which is a unit that is exchanged with a robot at a time.
  • the space of the first loading unit 510 may be formed corresponding to the shape and size of the user tray 10.
  • the first loading part lifting part 520 is configured to lift the plurality of user trays 10 in the vertical direction.
  • the first loading part lifting part 520 may include a support plate 521, a support part 522, and a lifting drive part 523.
  • the support plate 521 is configured to support the user tray 10 loaded on the first loading part 510 to the upper surface.
  • the support plate 521 is of a size that does not cause interference due to the protrusion 312 when moving between the first loading part 510 and the second loading part 310 even when the protrusion 312 of the holder 311 is closed. Can be configured.
  • the support part 522 is provided on the frame side, and may be configured to support a lower surface of the support plate 521 when the stacker module 500 is closed.
  • the elevating driving part 523 is connected to the support part 522 to move the support support part 522 in the vertical direction.
  • the elevating driver 523 may be configured to enable height adjustment of the support portion 522 from the lower side of the first loading portion 510 to the lower side of the second loading portion 310.
  • the slider 530 may be provided under the stacker module 500 and may be configured such that the stacker module 500 is slid to move relative to the frame 200.
  • the slider 530 may be configured to stably support the stacker module 500 by being configured in plural, and may also constrain the stacker module 500 to be moved to a predetermined reciprocating position.
  • the linear actuator 550 is configured to move the stacker module 500 in the horizontal direction.
  • One side of the linear actuator 550 may be connected to the frame 200 and the other side may be connected to one side of the stacker module 500 to open and close the stacker module 500 according to an input.
  • the linear actuator 550 has been described as an example, but may be modified and applied in various configurations for reciprocating movement of the stacker module 500.
  • the guide 610 is configured to prevent the user tray 10 from being separated from the first loading unit 510 in a state in which the plurality of user trays 10 are stacked.
  • the guide 610 is formed to extend in a vertical direction at a plurality of points along the circumference of the first loading portion 510.
  • two guides 610 adjacent to each corner of the user tray 10 may be provided, and a total of eight guides 610 may be provided.
  • the length of the guide 610 may be formed to extend to a length such that it does not deviate laterally when the second loading part 310 and the user tray 10 are exchanged. That is, a separation distance between the upper end of the guide 610 of the first loading portion 510 and the second loading portion 310 of the upper side may be formed to be shorter than the thickness of the user tray 10.
  • the sensor unit 620 may be configured to determine the presence or absence of the user tray 10 in the first loading unit 510 and whether loading is complete.
  • the sensor unit 620 may be configured to determine the presence or absence of the user tray 10 positioned at the uppermost side and the lowermost side when the user tray 10 is loaded on the first loading unit 510.
  • the uppermost sensor detects that the user tray 10 is present, it is determined that the loading of the user tray 10 in the first loading unit 510 is completed, and subsequent operations may be controlled.
  • the first loading unit 510 is empty, and an operation thereafter may be controlled.
  • the above-described sensor unit 620 may be applied in various configurations capable of determining the presence or absence of the user tray 10 at a spaced point such as a laser sensor, an infrared sensor, and an ultrasonic sensor.
  • the door 540 is configured to shield the outside when the stacker module 500 is moved to the inside of the stacker and is inserted.
  • the buffer stacker 300 is provided above the stacker module 500.
  • the buffer stacker 300 is configured so that even if each of the stacker modules 500 performs distribution of the user tray 10 to the outside, distribution of the user tray 10 can be continuously performed from the inside.
  • the buffer stacker 300 may include a second loading unit 310, a guide 610, a sensor unit 620, a holder 311, a transfer 410, and a set plate 320.
  • the second loading part 310 may be defined as a space in which the user tray 10 can be loaded.
  • the second loading part 310 is configured to exchange the first loading part 510 and the user tray 10 downward.
  • the second loading part 310 may be formed in the same number as the number of the stacker modules 500 described above and may be provided in parallel on the upper side of the stacker module 500.
  • the guide 610 and the sensor unit 620 may be provided on the second loading portion 310 in the same manner as the configuration of the first loading portion 510 described above.
  • the guide 610 may be provided with a length similar to the height in which one lot is loaded.
  • the transfer 410 is configured to grip and transfer the user tray 10 inside the buffer stacker 300.
  • the transfer 410 may be configured in plural, and may include at least one transfer 410 involved in loading and one or more transfer 410 involved in unloading.
  • the transfer 410 may be provided with a plurality of actuators (not shown) to enable horizontal movement and vertical movement.
  • the transfer 410 may be controlled such that the transfer of the user tray 10 is performed between any one of the second loading units 310 and any one of the set plate 320. In addition, it may be controlled to perform the distribution of the user tray 10 between the second loading unit 310.
  • the transfer 410 may be controlled to withdraw the user trays 10 one by one from the upper side of the second loading unit 310 or stack them one by one to the lower side.
  • the set plate 320 is configured to expose the transferred user tray 10 to the test handler body 100.
  • the set plate 320 is configured to be raised and lowered while the user tray 10 is loaded, and when it is raised, the hand 110 of the test handler body 100 is moved to a position where it can pick up the device 20 When descending, the transfer unit 410 may be moved to a position where the user tray 10 can be replaced.
  • the set plate 320 may be provided in plural at the loading site L and the unloading site UL.
  • the holder 311 may be configured to selectively pass or support the user tray 10 between the second loading part 310 and the first loading part 510.
  • the holders 311 may be provided in a pair on each of the second loading portions 310, and each holder 311 may include a protrusion 312.
  • the protrusion 312 may be configured asymmetrically along the rotation direction so as to selectively interfere with the movement path of the user tray 10 when the holder 311 is rotated.
  • the protrusion 312 may be configured to substantially support the lower surface of the user tray 10.
  • the frame 200 is opened at the lower side of the second loading unit 310 so that the user tray 10 can enter and exit, and when the holder 311 is opened, the user tray 10 is configured to pass.
  • the holder 311 may include a protrusion 312 protruding over a moving path of the user tray 10 between the first loading portion 510 and the second loading portion 310 when closed. When the holder 311 is opened, the protrusion 312 may be rotated so that interference does not occur on the moving path of the user tray 10.
  • 6A, 6B, 6C, 6D, and 6E are operational state diagrams showing the transfer of the user tray 10 between the first loading part 510 and the second loading part 310. As shown, in the case of transferring the user tray 10 from the first loading portion 510 to the second loading portion 310, the upper side while supporting the stacked user trays 10 from the first loading portion 510 side Will be transferred.
  • the elevation height of the first loading part lifting part 520 may be determined as a position in which the height of the bottom of the lowermost user tray 10 is higher than the support height of the holder 311. Thereafter, referring to FIG. 6D, the holder 311 is closed to prevent the user tray 10 from being returned to the first loading unit 510 again. Thereafter, referring to FIG. 6E, when the first loading part lifting part 520 is lowered, the bottom surface of the lowermost user tray 10 which was loaded is supported by the holder 311, and thus the entire user tray 10 is increased. The second loading portion 310 is loaded, and the first loading portion elevating portion 520 is in its original position and is ready to load a new user tray 10 from the outside. At this time, the difference between the height of the upper surface of the first loading part lifting part 520 and the support height of the holder 311 may be minimized, thereby minimizing impact when handing over the user tray 10.
  • the control is performed in the opposite of the above-described order, and the plurality of user trays 10 are transferred from the second loading unit 310. It can be transferred to the first loading unit 510.
  • FIG. 7 is a conceptual diagram showing an operation concept of the stacker during distribution between the first loading unit 510 and the outside.
  • the first loading part 510 when the first loading part 510 is empty, the user tray 10 can be supplied from the outside. At this time, even if the stacker module 500 is opened, the user tray 10 remains in the second loading unit 310 inside the buffer stacker 300, so that the user tray 10 can be continuously supplied to the set plate 320 from this. There will be.
  • the first loading section 510 and the second loading section 310 for supply are arranged in two or more rows so that the user tray 10 is When all of them are exhausted, the user tray 10 loaded in another row can be used.
  • a plurality of stacker modules 500 may be simultaneously loaded.
  • the user tray 10 can be independently stacked on the second loading unit 310 even while opening and closing the stacker module 500 even when the user tray 10 needs to be taken out. do.
  • one stacking portion and the second stacking portion 310 are configured in one row, and may include a plurality of rows of stacking portions.
  • the first loading portion 510 and the second loading portion 310 are configured to exchange the user tray 10 (1) and also from the second loading portion 310 to the set plate 320.
  • the user tray 10 can be transferred (2), and conversely, the user tray 10 can be transferred from the set plate 320 to the second loading unit 310 (3). Also, if necessary, the user tray 10 may be transferred between the second loading units 310 (4).
  • the first loading unit 510 is able to perform distribution with the outside as the stacker module 500 is individually opened and closed even if the user tray 10 of various paths is transferred inside the buffer stacker 300 described above.
  • each of the loading units provided in the stacker module 500 and the buffer stacker 300 may be set to perform the functions of loading, unloading, and empty freely according to a user's input.
  • the stacker module can independently perform logistics between the external and user trays even while exchanging user trays with the outside, and it is possible to operate stably by preventing the interruption of the test handler operation due to exhaustion of the user tray. There is an effect.
  • FIG. 9 is a perspective view showing a part of the unloading site according to the present invention
  • FIG. 10 is a perspective view of the inverter 140
  • FIG. 11 is a perspective view of the insert opening module 190.
  • the frame of the main body and some of the hand 110 are omitted.
  • the unloading site UL is configured to individually classify each device according to the test result from the test tray 130 that has been tested.
  • a plurality of test trays 130 that have been tested may be stacked side by side while being erected in a vertical direction.
  • the test tray 130 is transferred in a first-in, first-out manner in which the test tray 130, which has first entered the buffer chamber from the test chamber, is first drawn out.
  • the test tray 130 rises upward from one side of the buffer chamber 150 and exits to the outside.
  • the inverter 140 converts the posture to receive the test tray 130 in the vertical direction, and then receives the test tray 130.
  • the first test tray 130 and the transfer unit support one side of the test tray 130 and rise together, so that the test tray 130 may be completely accommodated into the inverter 140.
  • the unloading site may include components including an inverter 140, an insert opening module 190, a second test tray 130, a transfer unit, a sorting shuttle, and a hand 110.
  • the inverter 140 is configured to change the direction of the test tray 130 received from the buffer chamber.
  • the inverter 140 may include a shaft 144, an inverter frame 141, and a first test tray transfer unit 180.
  • Both sides of the shaft 144 are fixed to the test handler body frame, and the inverter 140 is configured to rotate around the shaft 144.
  • the inverter frame 141 constitutes the overall appearance of the inverter 140 and is configured such that the test tray 130 can be temporarily accommodated.
  • the inverter 140 is loaded with a frame and a test tray 130 configured in a flat shape as a whole, and a space is provided so that it can be moved in a linear direction in the loaded state, and a half configured to prevent departure in other directions. It may be configured to include an electric guide 142.
  • the inverter 140 is provided with a pair of shaft connection portions 143 provided on both edges, and may be configured to be rotatable by being connected to the shaft 144 described above.
  • the inverter 140 is configured to be rotatable about the shaft 144.
  • a rotation driving unit of the inverter 140 may be provided in the connection portion to generate power to rotate the inverter 140.
  • the first test tray transfer unit 145 is configured to selectively support the test tray 130 on the inverter frame 141 and perform linear motion.
  • the first test tray transfer unit 145 may include a first driving unit 146, a second driving unit 148 and a traction pin 149.
  • the first driving unit 146 provides a driving force through which the test tray 130 can be transferred in a direction parallel to the inverter frame 141.
  • the first driving unit 146 may be connected to the belt to transmit driving force.
  • the second driving unit 148 and the traction pin 149 to be described later are linearly moved together.
  • the second driving unit 148 provides a driving force for adjusting the position of the traction pin 149 so that the traction pin 149 to be described later can selectively support the test tray 130.
  • One side of the second driving unit 148 is connected to the first driving unit belt 147, and the other side is connected to a traction pin 149.
  • the position of the traction pin 149 may be relatively adjusted with the first driving unit belt 147.
  • the traction pin 149 is configured to be inserted into a traction groove formed in the test tray 130 to support the test tray 130.
  • the first test tray transfer unit 145 is moved while supporting the test tray 130 raised to a predetermined length by an elevating unit (not shown) of the buffer chamber 150, so that it is moved to a proper position inside the inverter 140. Drive so that it can be placed.
  • the inverter 140 is driven when the test tray 130 is converted to the horizontal direction and transferred to the insert opening module 190 to be described later.
  • the stroke is configured to be equal to or longer than the length of the test tray 130, so that the position before and after the inverter 140 and the transfer of the test tray 130 are made smoothly. I can.
  • the test tray 130 may be configured to include a sensor capable of determining whether or not the test tray 130 is fully loaded on the inverter 140, and the test tray 130 If it is not placed in the position, it may be controlled to re-perform the exact position transfer operation of the test tray 130.
  • the insert opening module 190 is configured to selectively open a plurality of inserts provided in the test tray 130.
  • the insert opening module 190 may be configured to have a size corresponding to one divided area Ad when dividing the test tray 130 into a plurality of divided areas Ad on a plane.
  • the divided area Ad is divided into two along the traveling direction of the test tray 130, and therefore, the insert opening module 190 may have a half size of the test tray 130.
  • the insert opening module 190 first opens the insert so that the device can be withdrawn from the first half of the test tray 130, and when all devices are withdrawn from the first half, the test tray 130 is moved to open the insert of the second half. , The device placed in the second half is withdrawn.
  • each of the elements may be connected to the driving unit so that such an operation may be performed, and driving may be performed by receiving a driving signal from the control unit.
  • the insert opening module 190 may include a mask 191 and a presizer 192.
  • the mask 191 and the presizer 192 are arranged in a vertical direction, and a test tray 130 may be positioned therebetween.
  • the mask 191 is composed of about half the size of the test tray 130, and a plurality of openings on the mask 191 correspond to the size and arrangement of the loading grooves formed in the divided area Ad of the test tray 130. Can be formed.
  • the insert may be opened by pressing an open link (not shown) provided in the insert (not shown) downward. In this state, the hand 110 enters from the opening side of the mask 191 to the lower side to pick up the device disposed in the loading groove of the test tray 130.
  • the presizer 192 is configured to be in close contact while adjusting the inserts that are coupled with clearance on the test tray 130 to an accurate position.
  • the presizer 192 is provided with a plurality of insert support pins 193 corresponding to the plurality of inserts.
  • the presizer 192 may be configured to be elevated by being connected to the elevating unit 194 at the lower side.
  • the presizer 192 descends to a predetermined height, and after the test tray 130 moves, it rises again to open the test tray 130 to the insert opening module 190 ).
  • test tray 130 is inserted between the mask 191 and the presizer 192.
  • the mask 191 and the presizer 192 are It can be applied after being transformed into a configuration that is arranged both on the lower side or on the upper side.
  • the second test tray 130 transfer unit is configured to transfer the empty test tray 130 passing through the insert opening module 190 to the loading site.
  • the second test tray 130 transfer unit is provided with a traction pin 149 extending a predetermined length upward, similar to the transfer unit of the first test tray 130, and is drawn out from the insert opening module 190 It may be configured to perform an operation in the y direction for performing and an operation in the x direction for transferring from the unloading site to the loading site.
  • the second test tray 130 transfer unit may be configured to move along the linear guide 181 formed while crossing the loading site and the unloading site.
  • the sorting shuttle is provided in a position adjacent to the insert opening module 190, and is provided to be loaded for a while according to the grade according to the inspection result. Specifically, when sorting shuttles are picked up one by one for each class and transferred to the user tray, they have a very inefficient movement line, so when a certain amount of devices of the same class are sorted and loaded, the device transfer of the hand 110 before transferring to the user tray at once. It is structured to be collected in units. When a certain amount is loaded, the sorting shuttle is moved to the user tray to shorten the pickup and place movement of the hand 110.
  • the sorting shuttle 170 may be configured in such a manner that a plurality of sorting shuttles 170 may be configured to classify and load devices classified by several classes.
  • Each sorting shear may be provided with a plurality of loading grooves so that a plurality of devices can be loaded. Meanwhile, each sorting shuttle may have a different loading position depending on the overall loading condition of the sorting shuttle. For example, when one sorting shuttle is moved to the user tray, it can be loaded onto another sorting shuttle without stopping the operation. Therefore, classification is performed while appropriately changing the loading position for each class without waiting for the return of the sorting shuttle, so that classification can be continuously performed without stopping the operation of the hand 110.
  • the hand 110 is configured to be able to pick up and transport the device and load it on a tray or shuttle as described above.
  • 12a, 12b, 12c, 13a, 13b and 13c are operational state diagrams showing the movement of the test tray 130 at the unloading site.
  • the second half of the first test tray 131 is positioned in the insert opening unit to complete unloading.
  • the second test tray 132 in which the device is loaded is loaded in the inverter 140.
  • the second test tray 132 is moved while the transfer unit of the first test tray 131 moves to the right from the inversion part.
  • the first test tray 131 is supported by the second test tray 132 and is pushed out of the insert opening module 190.
  • the transfer unit of the first test tray 131 preferentially moves only half of the length of the second test tray 132.
  • the first half of the divided area Ad of the second test tray 132 is positioned in the insert opening module 190 and the second half is positioned in the inverter 140.
  • the first half of the second test tray 132 is positioned on the insert opening module 190 and the insert opening module 190 is operated to open a plurality of inserts positioned on the first half.
  • the hand 110 picks up and classifies the device.
  • the first test tray 131 may be moved to the loading site side by the transfer unit of the second test tray 132 (not shown).
  • the first test tray transfer unit 145 is operated, and the insert opening module 190 is operated at the second half of the second test tray 130. ). Even at this time, the insert opening module 190 is operated so that the insert can be opened.
  • the next test tray 130 is prepared in the inverter 140.
  • the inverter 140 is inverted in a vertical direction and supports the third test tray 133 rising from the buffer chamber with a pull pin 149.
  • the first test tray transfer unit 145 is driven to completely load the third test tray 133 into the inverter 140.
  • the device may still be classified in the second test tray 132.
  • FIG. 13C by rotating the inverter 140 counterclockwise by 90 degrees, the third test tray 133 is placed in a ready state.
  • the next test tray 130 can be sufficiently supplied to the insert opening module 190 continuously. Thereafter, the operation may be repeatedly performed from FIGS. 12A to 13C.
  • FIG. 14A and 14B are diagrams showing the operation of each component over time in the present invention.
  • FIG. 14A it is a diagram of an operation in an existing device performed in units of the test tray 130.
  • the empty test tray 130 is discharged to the outside of the insert opening module 190, and a new test tray 130 is opened. It flows into the inside of the module 190.
  • the time required for replacement with the new test tray 130 is much larger than the time for the hand 110 to pick up the last device 20, sort it, and return to the standby state. That is, a time loss occurs in the classification by this time difference.
  • the waiting time of the hand 110 can be minimized.
  • the insert opening module 190 descends, and the test tray 130 moves.
  • the hand 110 sorts and doubles the devices that have been picked up and waits in a pickup ready state.
  • the test tray 130 moves half by half from the first half to the second half and from the second half to the first half of the next test tray 130, and then the insert opening module 190 operates to open the insert. Therefore, it is possible to minimize the waiting time of the hand 110 that occurs during the movement of the test tray 130.
  • the hand 110 when moving all the test trays 130 at once as shown in FIG. 14A, the hand 110 can perform the sorting operation of the last device only once, and there is an inefficient aspect of waiting until the next tray is supplied. .
  • the present invention moves twice by half until all sorting of one test tray 130 is completed, and when moving twice, the hand 110 can perform two operations, thereby minimizing time loss I can make it.
  • the present invention divides the test tray 130 into divided areas (Ad) when classifying in the test tray 130, transfers the test tray 130 in units of divided areas (Ad), and performs classification, so that the hand 110's classification waiting time Can be minimized. Therefore, there is an effect that can maximize the efficiency of classification.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Robotics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

The present invention relates to an electronic component test handler comprising: a test tray provided with a plurality of inserts configured to selectively secure a device; an insert opening module configured to open the plurality of inserts disposed in a partition region of the test tray; a hand configured to pick up a device from the plurality of inserts and sort the same; and a control unit for controlling the insert opening module and the hand so as to open the plurality of inserts disposed in different partition regions when the classification of the device has been completed in the partition region. When a device is classified, an electronic component test handler according to the present invention divides a flat region in a test tray into a partition region, transfers the test tray to each partition region, and performs classification, thereby minimizing the waiting time for classification of a hand. Accordingly, the efficiency of classification can be maximized.

Description

전자부품 테스트 핸들러Electronic component test handler
본 발명은 전자부품 테스트 핸들러에 관한 것이다.The present invention relates to an electronic component test handler.
전자부품 테스트 핸들러는 복수의 전자부품, 예를 들어 반도체 소자나 모듈, SSD이 제조된 이후 검사하는 장치이다. 전자부품 테스트 핸들러는 전자부품을 테스트 장치에 접속시키고 다양한 환경을 인위적으로 조성하여 전자부품의 정상작동여부를 검사하고 검사 결과에 따라 양품, 재검사, 불량품 등과 같이 구별하여 분류하도록 구성된다. The electronic component test handler is a device that inspects a plurality of electronic components, for example, semiconductor devices, modules, and SSDs after being manufactured. The electronic component test handler is configured to connect electronic components to a test device and artificially create various environments to inspect whether the electronic components operate normally, and to classify them into good, re-inspection, and defective products according to the inspection results.
전자부품 테스트 핸들러는 테스트해야 할 디바이스 또는 테스트가 완료된 디바이스가 적재되어 있는 유저 트레이를 외부와 교환하는 방식으로 물류가 이루어지며, 지속적으로 검사가 이루어질 수 있도록 적절한 주기로 외부와 물류가 수행되어야 한다.In the electronic component test handler, distribution is performed by exchanging the user tray in which the device to be tested or the device that has been tested is loaded with the outside, and distribution with the outside must be performed at an appropriate cycle so that the inspection can be continuously performed.
이와 같은 테스트 핸들러에 대하여 본 출원인에 의해 출원되어 등록된 대한민국 등록특허 제1,734,397호(2017. 05. 02. 등록)가 개시되어 있다.Korean Patent Registration No. 1,734,397 (registered on May 02, 2017), filed and registered by the present applicant, is disclosed for such a test handler.
그러나 이와같은 테스트 핸들러는 테스트가 완료된 테스트 트레이에서 디바이스의 분류시 테스트 트레이의 교체에 따른 시간이 많이 소요되며, 교체시간동안 디바이스의 분류가 중단되는 문제점이 있었다.However, such a test handler takes a lot of time according to the replacement of the test tray when the device is classified in the test tray where the test is completed, and there is a problem that the classification of the device is stopped during the replacement time.
본 발명은 전술한 종래의 문제점을 해결하여 분류시 테스트 트레이의 교체에 따른 분류작업 중단시간을 최소화 할 수 있는 테스트 트레이를 제공하는 것에 그 목적이 있다.An object of the present invention is to provide a test tray capable of minimizing the downtime of the sorting operation due to replacement of the test tray during sorting by solving the above-described conventional problems.
성될 수 있다.Can be created.
또한 반전기에 구비되며 반전기 내부에 적재된 테스트 트레이를 이동시킬 수 있도록 구성되는 제1 테스트 트레이 이송 유닛 및 인서트 개방 모듈의 외부로 배출된 빈 테스트 트레이를 로딩 사이트 측으로 이송시킬 수 있도록 구성되는 제2 테스트 트레이 이송 유닛을 포함할 수 있다.In addition, the first test tray transfer unit provided in the inverter and configured to move the test tray loaded inside the inverter, and the second configured to transport the empty test tray discharged to the outside of the insert opening module to the loading site. It may include a test tray transfer unit.
한편, 인서트 개방 모듈은 상하방향으로 이격되어 형성되는 마스크 및 프리사이저를 포함하여 구성되며, 마스크는 핸드의 일측이 통과하여 테스트 트레이에 적재되어 있는 디바이스를 픽업할 수 있도록 복수의 개구가 형성되며, 프리사이저는 각 인서트의 하면을 지지하면서 상승될 수 있도록 구성되는 복수의 지지핀을 포함할 수 있다.On the other hand, the insert opening module is composed of a mask and a presizer that are formed to be spaced apart in the vertical direction, and the mask is formed with a plurality of openings so that one side of the hand can pass and pick up the device loaded on the test tray. , The presizer may include a plurality of support pins configured to be raised while supporting the lower surface of each insert.
또한 프리사이저는 인서트 및 테스트 트레이를 지지하면서 인서트를 테스트 트레이 내부에서 밀착시킬 수 있도록 구성될 수 있다.In addition, the presizer may be configured to support the insert and the test tray while allowing the insert to be closely contacted inside the test tray.
한편, 테스트 트레이는 메모리 칩 또는 메모리 모듈이 수용될 수 있도록 구성될 수 있다.Meanwhile, the test tray may be configured to accommodate a memory chip or a memory module.
본 발명에 따른 전자부품 테스트 핸들러는 디바이스의 분류시 테스트 트레이에서 평면영역상의 분할영역으로 구분하고 분할영역 단위로 테스트 트레이를 이송하고 분류를 수행하므로 핸드의 분류 대기 시간을 최소화 할 수 있다. 따라서 분류의 효율을 극대화 할 수 있는 효과가 있다.The electronic component test handler according to the present invention divides a device into a divided area on a flat area from a test tray and transfers the test tray in a divided area unit, and performs classification, thus minimizing the waiting time for hand classification. Therefore, there is an effect that can maximize the efficiency of classification.
도 1은 본 발명에 따른 전자부품 테스트 핸들러를 기능에 따른 공간으로 구분한 개념도이다. 1 is a conceptual diagram of an electronic component test handler according to the present invention divided into spaces according to functions.
도 2는 도1 의 테스트 핸들러 본체를 평면상에서 기능에 따라 구분한 개념도이다.FIG. 2 is a conceptual diagram of a test handler body of FIG. 1 divided according to functions on a plane.
도 3은 테스트 핸들러 본체에서의 디바이스 및 테스트 트레이의 이동을 나타낸 개념도이다.3 is a conceptual diagram showing movement of a device and a test tray in a test handler body.
도 4는 본 발명에 따른 전자부품 테스트 핸들러의 스태커의 부분사시도이다.4 is a partial perspective view of a stacker of an electronic component test handler according to the present invention.
도 5는 도 4의 일부 구성을 확대하여 나타낸 확대사시도이다. 5 is an enlarged perspective view showing an enlarged portion of the configuration of FIG. 4.
도 6a, 6b, 6c, 6d 및 6e는 제1 적재부와 제2 적재부간 유저 트레이의 이송을 나타낸 작동상태도이다.6A, 6B, 6C, 6D, and 6E are operational state diagrams showing the transfer of the user tray between the first loading unit and the second loading unit.
도 7은 제1 적재부와 외부와의 물류시 스태커의 작동 개념을 나타낸 개념도이다.7 is a conceptual diagram showing an operation concept of the stacker during distribution between the first loading unit and the outside.
도 8은 스태커 내부의 물류를 나타낸 개념도이다.8 is a conceptual diagram showing the logistics inside the stacker.
도 9는 본 발명에 따른 언로딩 사이트의 일부가 나타난 사시도이다.9 is a perspective view showing a part of an unloading site according to the present invention.
도 10은 반전기의 사시도이다.10 is a perspective view of an inverter.
도 11은 인서트 개방 모듈과 테스트 트레이의 사시도이다.11 is a perspective view of an insert opening module and a test tray.
도 12a, 12b, 12c, 13a, 13b 및 도 13c는 언로딩 사이트에서 테스트 트레이의 이동이 나타난 작동상태도이다.12A, 12B, 12C, 13A, 13B and 13C are operational state diagrams showing the movement of the test tray at the unloading site.
도 14a 및 도 14b는 본 발명에서 시간에 따른 각 구성요소의 작동을 나타낸 도표이다.14A and 14B are diagrams showing the operation of each component over time in the present invention.
이하, 본 발명의 실시 예에 따른 전자부품 테스트 핸들러에 대하여, 첨부된 도면을 참조하여 상세히 설명한다. 그리고 이하의 실시예의 설명에서 각각의 구성요소의 명칭은 당업계에서 다른 명칭으로 호칭될 수 있다. 그러나 이들의 기능적 유사성 및 동일성이 있다면 변형된 실시예를 채용하더라도 균등한 구성으로 볼 수 있다. 또한 각각의 구성요소에 부가된 부호는 설명의 편의를 위하여 기재된다. 그러나 이들 부호가 기재된 도면상의 도시 내용이 각각의 구성요소를 도면내의 범위로 한정하지 않는다. 마찬가지로 도면상의 구성을 일부 변형한 실시예가 채용되더라도 기능적 유사성 및 동일성이 있다면 균등한 구성으로 볼 수 있다. 또한 당해 기술 분야의 일반적인 기술자 수준에 비추어 보아, 당연히 포함되어야 할 구성요소로 인정되는 경우, 이에 대하여는 설명을 생략한다.Hereinafter, an electronic component test handler according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In addition, in the description of the following embodiments, the names of each component may be referred to as different names in the art. However, if they have functional similarities and identity, even if a modified embodiment is employed, it can be viewed as an even configuration. In addition, symbols added to each component are described for convenience of description. However, the content illustrated on the drawings in which these symbols are indicated does not limit each component to the range within the drawings. Likewise, even if an embodiment in which some of the configurations in the drawings are modified is employed, it can be viewed as an equivalent configuration if there are functional similarities and identity. In addition, in view of the level of a general technician in the relevant technical field, if it is recognized as a component that should be included, a description thereof will be omitted.
이하에서의 디바이스는 반도체 소자, 반도체 모듈, SSD 등 전기적으로 기능을 수행하는 소자를 뜻함을 전제로 설명하도록 한다. 또한 이하에서 유저 트레이란 반도체 소자가 적재될 수 있도록 구성된 적재홈이 일정한 배열로 복수개 구성되어 있는 트레이를 뜻하며, 유저 트레이의 적재홈에는 별도의 고정기능 없이 중력에 의해 디바이스가 홈 내부에 정착되도록 구성될 수 있음을 전제로 설명하도록 한다.Hereinafter, a device will be described on the premise that it refers to a device that electrically functions, such as a semiconductor device, a semiconductor module, and an SSD. In addition, hereinafter, the user tray refers to a tray in which a plurality of loading grooves configured to load semiconductor elements are arranged in a certain arrangement, and the loading groove of the user tray is configured such that the device is fixed inside the groove by gravity without a separate fixing function. Explain that it can be done.
이하에서는 본 발명에 따른 테스트 핸들러의 전체적인 구성에 대하여 도 1 내지 도 3을 참조하여 설명하도록 한다. Hereinafter, the overall configuration of the test handler according to the present invention will be described with reference to FIGS. 1 to 3.
도 1은 본 발명에 따른 테스트 핸들러의 사시도이다. 1 is a perspective view of a test handler according to the present invention.
도 1에 도시된 바와 같이, 본 발명에 따른 테스트 핸들러(1)는 외부로부터 디바이스(20)를 반입하고 테스트를 수행하여 등급별에 따라 선택적으로 외부에 반출할 수 있도록 구성된다.As shown in FIG. 1, the test handler 1 according to the present invention is configured to carry in the device 20 from the outside, perform a test, and selectively take it out according to the grade.
테스트 핸들러(1)는 공간적으로 기능에 따라 복수의 유저 트레이(10)를 외부로부터 반입하거나 외부로 반출하기 위한 스태커 및 디바이스(20)를 유저 트레이(10)로부터 옮겨 담고 테스트를 수행한 뒤 등급별로 분류하여 유저 트레이(10)로 적재하는 영역인 테스트 핸들러 본체(100)로 구분될 수 있다.The test handler 1 moves the stacker and device 20 for carrying in or carrying out a plurality of user trays 10 from the outside according to spatially functional functions from the user tray 10, performing a test, and then performing a test by grade. It may be classified into a test handler body 100, which is an area that is classified and loaded into the user tray 10.
스태커(2)는 유저 트레이(10)를 대량으로 적재해 놓을 수 있는 영역을 뜻한다. 스태커는 적재되어 있는 디바이스(20)에 따라 로딩 스태커(loading stacker), 언로딩 스태커(unloading stacker), 엠프티 스태커(empty stacker)로 구분될 수 있다.The stacker 2 refers to an area in which the user tray 10 can be loaded in a large amount. The stacker may be classified into a loading stacker, an unloading stacker, and an empty stacker according to the loaded device 20.
로딩 스태커는 테스트 및 분류가 필요한 디바이스(20)들이 적재되어 있는 유저 트레이(10)를 적재할 수 있도록 구성된다. 로딩 스태커는 외부로부터 반입되는 유저 트레이(10)가 복수개 적층된 1 lot의 단위로 적재될 수 있는 크기로 구성된다. 언로딩 스태커는 테스트 및 분류가 완료된 디바이스(20) 중 외부로 반출하기 위한 디바이스(20)가 적재된 유저 트레이(10)를 1 lot의 단위로 반출하기 전 복수로 적재해 놓을 수 있도록 구성된다. 엠프티 스태커는 비어있는 유저 트레이(10)가 복수로 적재될 수 있도록 구성되며, 로딩 스태커로부터 디바이스(20)의 이송이 완료된 후 비어있는 유저 트레이(10)를 이송받거나, 언로딩 스태커로 비어있는 유저 트레이(10)를 이송할 수 있도록 구성될 수 있다. The loading stacker is configured to load the user tray 10 in which devices 20 that need to be tested and sorted are loaded. The loading stacker is configured to have a size in which a plurality of user trays 10 carried from the outside can be stacked in units of 1 lot. The unloading stacker is configured to load a plurality of user trays 10 loaded with a device 20 for carrying out to the outside among the devices 20 that have been tested and sorted before being taken out in units of one lot. The empty stacker is configured so that a plurality of empty user trays 10 can be loaded, and the empty user tray 10 is transferred from the loading stacker after the transfer of the device 20 is completed, or the empty user tray 10 is transferred to the unloading stacker. It may be configured to be able to transport the user tray 10.
한편 로딩 스태커, 언로딩 스태커, 엠프티 스태커는 외부와의 물류, 테스트 핸들러(1) 내부에서의 물류 및 적재 목적에 따라 구분될 수 있으나, 자체의 구성은 서로 동일하거나 유사하게 구성될 수 있다.On the other hand, the loading stacker, the unloading stacker, and the empty stacker may be classified according to logistics to the outside, logistics and loading purpose inside the test handler 1, but their configurations may be the same or similar to each other.
각각의 스태커 모듈(500)은 공간의 효율적인 활용을 위하여 복수의 유저 트레이(10)를 수직방향으로 쌓아 적재할 수 있도록 구성될 수 있다. 또한 각각의 스태커 모듈(500)은 도 1의 y 방향으로 수평이동하여 개폐될 수 있도록 구성되며, 외부로 반출된 위치에서 외부와 물류가 이루어지게 된다. 일 예로서 무인운반차(AGV; Automatic Guided Vehicle)로부터 로딩 스태커에 복수의 유저 트레이(10)를 이송받거나, 무인운반차가 복수의 유저 트레이(10)를 언로딩 스태커로부터 회수해 갈 수 있다. Each stacker module 500 may be configured to stack and stack a plurality of user trays 10 in a vertical direction for efficient use of space. In addition, each stacker module 500 is configured to be opened and closed by moving horizontally in the y direction of FIG. 1, and distribution with the outside is performed at a position carried out to the outside. As an example, a plurality of user trays 10 may be transferred to a loading stacker from an automatic guided vehicle (AGV), or an unmanned vehicle may collect a plurality of user trays 10 from the unloading stacker.
또한, 스태커(2)는 로딩 스태커, 언로딩 스태커, 엠프티 스태커 각각이 복수로 설정될 수 있으며, 어느 하나가 외부와 물류하는 동안에도 내부적인 물류가 연속적으로 진행될 수 있도록 구성될 수 있다. In addition, the stacker 2 may be configured such that each of the loading stacker, the unloading stacker, and the empty stacker may be set in plural, and internal logistics can be continuously performed even while any one is logistics with the outside.
이하에서는 도 2 및 도 3을 참조하여 테스트 핸들러 본체(100)의 구성 및 동작에 대하여 개략적으로 설명하도록 한다.Hereinafter, the configuration and operation of the test handler body 100 will be schematically described with reference to FIGS. 2 and 3.
도 2는 도1 의 테스트 핸들러 본체(100)를 평면상에서 기능에 따라 구분한 개념도이며, 도 3은 테스트 핸들러 본체(100)에서의 디바이스(20) 및 테스트 트레이(130)의 이동을 나타낸 개념도이다.FIG. 2 is a conceptual diagram showing the test handler body 100 of FIG. 1 divided according to functions on a plane, and FIG. 3 is a conceptual diagram showing movement of the device 20 and the test tray 130 in the test handler body 100 .
테스트 핸들러 본체(100)에서는 복수의 디바이스(20)를 테스트하며, 테스트 이후 디바이스(20)를 분류하며, 테스트 전후과정에서 디바이스(20)의 이송 및 적재가 수행될 수 있다. 테스트 핸들러 본체(100)는 로딩 사이트(L), 테스트 사이트(T), 언로딩 사이트(UL)를 포함하여 기능적으로 분류될 수 있다. The test handler body 100 tests a plurality of devices 20, classifies the devices 20 after the test, and transfers and loads the devices 20 before and after the test. The test handler body 100 may be functionally classified, including a loading site (L), a test site (T), and an unloading site (UL).
로딩 사이트(L)는 유저 트레이(10)로부터 복수의 디바이스(20)를 픽업(pick up)하여 테스트 트레이(130)로 플레이스(place)할 수 있도록 구성된다. 로딩 사이트(L)에는 유저 트레이(10)로부터 테스트 트레이(130)로 디바이스(20)를 이송하기 위한 핸드(110), 로딩 셔틀(120) 및 검사를 위한 스캐너(미도시)가 구비될 수 있다.The loading site L is configured to pick up a plurality of devices 20 from the user tray 10 and place them on the test tray 130. The loading site L may be provided with a hand 110 for transferring the device 20 from the user tray 10 to the test tray 130, a loading shuttle 120, and a scanner (not shown) for inspection. .
픽업위치에는 로딩 스태커에 적재되어 있던 유저 트레이(10)가 하나씩 교대로 공급될 수 있으며, 후술할 핸드(110)가 복수의 디바이스(20)만을 유저 트레이(10)로부터 빼내어 이송을 수행한다. 적재되어 있던 모든 디바이스(20)가 이송된 경우 빈 유저 트레이(10)와 디바이가 적재된 유저 트레이(10)가 교체되어 위치되어 지속적으로 디바이스(20)를 공급할 수 있도록 구성된다. 한편, 픽업위치에는 어느 하나의 스태커 모듈(500)에서 적재되어 있던 유저 트레이(10)를 모두 소비하였거나, 고장이 난 경우에도 지속적으로 디바이스(20)를 공급할 수 있도록 복수의 유저 트레이(10)가 노출될 수 있다. 이 경우 어느 하나의 유저 트레이(10)로부터 디바이스(20)를 이송중인 경우 다른 유저 트레이(10)는 스탠바이 상태로 대기하거나 새로운 유저 트레이(10)로 교체되도록 구성될 수 있다. The user trays 10 loaded in the loading stacker may be alternately supplied to the pickup position one by one, and the hand 110, which will be described later, removes only the plurality of devices 20 from the user tray 10 and transfers them. When all the devices 20 that were loaded are transferred, the empty user tray 10 and the user tray 10 in which the devices are loaded are replaced and positioned so that the device 20 can be continuously supplied. On the other hand, in the pickup position, a plurality of user trays 10 are provided so that the device 20 can be continuously supplied even when all the user trays 10 loaded in any one stacker module 500 have been consumed or a failure occurs. It can be exposed. In this case, when the device 20 is being transferred from one of the user trays 10, the other user tray 10 may be configured to wait in a standby state or be replaced with a new user tray 10.
핸드(110)는 복수의 디바이스(20)를 픽업하고 이송한 뒤 테스트 트레이(130) 또는 로딩 셔틀(120)에 적재할 수 있도록 구성된다. 핸드(110)는 복수로 구성되어 이송구간마다의 물류를 담당할 수 있도록 구성될 수 있다. 핸드(110)는 상측의 수평방향이동이 가능한 레일에 설치될 수 있으며, 하측을 향하여 어태치먼트가 바라볼 수 있도록 구성되며, 수직방향으로의 길이조절이 가능할수 있도록 리니어 액추에이터(미도시)가 구비될 수 있다. 어태치먼트는 일 예로 복수의 진공 포트가 구비되어 복수의 디바이스(20)를 진공흡착할 수 있도록 구성될 수 있다. 또한 어태치먼트는 디바이스(20)의 종류, 크기 및 형상을 고려하여 교체가 가능하도록 구성될 수 있다. The hand 110 is configured to pick up and transfer the plurality of devices 20 and then load them onto the test tray 130 or the loading shuttle 120. The hand 110 may be configured to be in charge of logistics for each transport section. The hand 110 may be installed on a rail capable of horizontal movement of the upper side, and is configured so that the attachment can be viewed toward the lower side, and a linear actuator (not shown) is provided to enable length adjustment in the vertical direction. I can. As an example, the attachment may be configured such that a plurality of vacuum ports are provided to vacuum-adsorb the plurality of devices 20. In addition, the attachment may be configured to be replaceable in consideration of the type, size, and shape of the device 20.
한편, 테스트 트레이(130)는 디바이스(20)의 고정 및 테스트 수행시 열변형 등을 고려하여 적재홈마다 인서트가 구비되며, 적재홈 간의 간격이 유저 트레이(10)와 다를 수 있다. 일반적으로 테스트 트레이(130)의 적재홈 간의 간격이 유저 트레이(10)보다 크게 구성된다. 따라서 핸드(110)를 이용하여 픽업위치의 유저 트레이(10)로부터 복수의 디바이스(20)를 픽업한 이후 디바이스(20)간 간격을 넓혀 테스트 트레이(130)에 적재하게 된다. 구체적으로 x-y 의 2방향으로 간격을 넓히기 위해 2번의 간격조절이 수행될 수 있으며, 이를 위해 픽업위치와 테스트 트레이(130) 사이에 로딩 셔틀(120)이 구비되며, 유저 트레이(10)로부터 로딩 셔틀(120)로 이송하면서 일방향으로의 간격을 조절하고, 로딩 셔틀(120)로부터 테스트 트레이(130)로 이송하면서 나머지 방향으로의 간격을 조절할 수 있다.On the other hand, the test tray 130 is provided with an insert for each loading groove in consideration of thermal deformation when fixing the device 20 and performing a test, and the interval between the loading grooves may be different from that of the user tray 10. In general, the spacing between the loading grooves of the test tray 130 is configured to be larger than that of the user tray 10. Therefore, after picking up the plurality of devices 20 from the user tray 10 at the pickup position by using the hand 110, the space between the devices 20 is widened and then loaded onto the test tray 130. Specifically, two interval adjustments may be performed to increase the interval in two directions of xy, and for this purpose, a loading shuttle 120 is provided between the pickup position and the test tray 130, and a loading shuttle from the user tray 10 The distance in one direction can be adjusted while being transferred to 120, and the distance in the other direction can be adjusted while transferring from the loading shuttle 120 to the test tray 130.
로딩 셔틀(120)은 유저 트레이(10)와 테스트 트레이(130) 사이에 구비되며, 복수의 디바이스(20)가 1차적으로 정렬된 상태로 적재될 수 있도록 적재 홈의 간격이 유저 트레이(10)보다 일 방향으로 넓혀진 배열로 구성될 수 있다. 또한 로딩 셔틀(120)은 물류의 효율을 위해 유저 트레이(10), 테스트 트레이(130) 및 핸드(110)의 위치를 고려하여 위치가 제어될 수 있다.The loading shuttle 120 is provided between the user tray 10 and the test tray 130, and the space between the loading grooves is the user tray 10 so that the plurality of devices 20 can be loaded in a state that is primarily aligned. It may be configured in an array that is widened in one direction. In addition, the loading shuttle 120 may be positioned in consideration of the positions of the user tray 10, the test tray 130, and the hand 110 for efficiency of distribution.
스캐너(미도시)는 이송되는 디바이스(20)에 바코드가 있는 경우 이를 식별하기 위해 구비된다. 스캐너(미도시)는 핸드(110)가 디바이스(20)를 픽업하여 이송하는 경로상에서 바코드를 인식할 수 있도록 구성될 수 있다. 스캐너는 디바이스(20)의 형상, 크기 및 종류에 따라 바코드의 인식이 용이할 수 있도록 다양한 위치에 구비될 수 있다.A scanner (not shown) is provided to identify barcodes if they are present on the device 20 to be transferred. The scanner (not shown) may be configured to recognize a barcode on a path through which the hand 110 picks up and transfers the device 20. The scanner may be provided in various positions to facilitate the recognition of barcodes according to the shape, size and type of the device 20.
플레이스 위치에서는 비어있는 테스트 트레이(130)가 공급되며, 디바이스(20)가 이송되어 적재가 이루어진다. 플레이스 위치에서 디바이스(20)의 적재가 완료되면 이후 테스트 사이트(T)로 테스트 트레이(130)를 이송하며, 비어있는 새로운 테스트 트레이(130)를 공급받을 수 있도록 구성된다.In the place position, an empty test tray 130 is supplied, and the device 20 is transferred and stacked. When loading of the device 20 is completed at the place position, the test tray 130 is transferred to the test site T afterwards, and a new empty test tray 130 is supplied.
한편, 도시되지는 않았으나, 플레이스 위치에서는 테스트 트레이(130)에 디바이스(20)가 안착된 이후 디바이스(20)의 이탈을 방지할 수 있도록 구성되는 마스크 및 프리사이저(preciser)가 구비될 수 있다. 전술한 바와 같이, 테스트 트레이(130)에는 각 적재홈마다 인서트가 구비되며, 각각의 인서트에는 디바이스(20)의 이탈을 방지할 수 있는 걸림부가 구비되어 있다. 각각의 걸림부의 기본위치는 디바이스(20)의 이탈을 방지하는 위치로 설정된다. Meanwhile, although not shown, a mask and a preciser configured to prevent separation of the device 20 after the device 20 is seated on the test tray 130 may be provided at the place position. . As described above, the test tray 130 is provided with an insert for each loading groove, and each insert is provided with a locking portion capable of preventing the device 20 from being separated. The basic position of each of the locking portions is set to a position that prevents the device 20 from being separated.
테스트 트레이(130)에서 디바이스(20)의 적재는 프리사이저로 인서트를 가압한 상태에서 마스크로 인서트의 걸림부를 확장하고 핸드(110)가 디바이스(20)를 적재홈으로 이송하여 이루어진다. The loading of the device 20 in the test tray 130 is performed by expanding the engaging portion of the insert with a mask while pressing the insert with a presizer, and the hand 110 transferring the device 20 to the loading groove.
마스크는 테스트 트레이(130)와 대응되는 형상으로 구성되며, 테스트 트레이(130)에 밀착되었을 때 각각의 인서트의 걸림부를 확장시킬 수 있도록 복수의 돌출부(312)가 구비된다. The mask is configured in a shape corresponding to the test tray 130, and a plurality of protrusions 312 are provided to expand the locking portions of each insert when in close contact with the test tray 130.
프리사이저는 전술한 바와 같이 테스트 트레이(130)에 구비된 다소 유격이 있는 상태의 인서트를 일시적으로 고정하기 위해 구성된다. 프리사이저에는 각각의 인서트의 위치에 대응하는 복수의 가압핀이 구비되며, 프리사이저가 테스트 트레이(130)에 밀착되면서 인서트를 가압하여 테스트 트레이(130)와 일시적으로 고정시킬 수 있게 된다. 따라서 디바이스(20)를 인서트에 안착시킬 때 위치오차를 최소화 할 수 있게 된다.As described above, the presizer is configured to temporarily fix the insert provided in the test tray 130 in a somewhat spaced state. The presizer is provided with a plurality of pressing pins corresponding to the position of each insert, and the presizer is in close contact with the test tray 130 to press the insert to temporarily fix it with the test tray 130. Therefore, it is possible to minimize the position error when the device 20 is seated on the insert.
다만 도시되는 않았으나 마스크와 프리사이저를 독립적으로 승강시키기 위한 승강부가 추가로 구비될 수 있다.However, although not shown, an elevating unit for independently elevating the mask and the presizer may be additionally provided.
테스트 사이트(T)는 테스트 트레이(130)에 적재된 복수의 디바이스(20)를 테스트 트레이(130) 단위로 시험을 수행하며, 시험결과를 전송할 수 있도록 구성된다. 테스트 챔버(160)에서는 일 예로 디바이스(20)를 -40℃ 내지 130℃의 온도로 변화시켜 기능을 점검하는 열부하 테스트가 진행될 수 있다. The test site T is configured to perform a test on a plurality of devices 20 loaded on the test tray 130 in units of the test tray 130 and transmit the test results. In the test chamber 160, for example, a thermal load test may be performed in which the device 20 is changed to a temperature of -40°C to 130°C to check the function.
테스트 사이트(T)에는 테스트 챔버(160)와 테스트 챔버(160) 전후에 구비되는 버퍼 챔버(150)가 구비될 수 있다. 버퍼 챔버(150)에는 복수의 테스트 트레이(130)가 적재될 수 있도록 구성되며, 열부하 테스트의 수행 전후에 예열 또는 후열처리가 이루어질 수 있도록 구성될 수 있다. A test chamber 160 and a buffer chamber 150 provided before and after the test chamber 160 may be provided at the test site T. The buffer chamber 150 may be configured to be loaded with a plurality of test trays 130, and may be configured to perform preheating or post-heat treatment before and after performing a heat load test.
테스트 사이트(T)에서는 테스트 트레이(130)를 직립으로 세운 상태에서 테스트의 이송 및 테스트가 수행되도록 구성될 수 있어 전체적인 장비의 크기를 감소시킬 수 있다. 한편 구성이 상세히 도시되지 않았으나, 버퍼 챔버(150)의 전후에는 테스트 트레이(130)를 직립상태로 자세전환시키는 반전기(140)가 구비될 수 있다. In the test site T, the test tray 130 may be configured to be transported and tested while the test tray 130 is upright, so that the overall size of the equipment may be reduced. Meanwhile, although the configuration is not shown in detail, an inverter 140 may be provided before and after the buffer chamber 150 to change the posture of the test tray 130 to an upright state.
언로딩 사이트(UL)는 테스트 사이트(T)로부터 이송받는 테스트 트레이(130)로부터 디바이스(20)를 테스트 결과에 따라 분류하고 이송하여 적재할 수 있도록 구성된다. 언로딩 사이트(UL)는 로딩 사이트(L)의 구성과 유사한 요소들이 구비될 수 있으며, 로딩 사이트(L)에서의 디바이스(20)의 이송과 반대순서로 이루어 질 수 있다. 다만, 언로딩 사이트(UL)에서는 테스트 트레이(130)로부터 등급에 따라 일시적으로 모아둘 수 있도록 복수의 소팅 셔틀(170)이 구비될 수 있다. 물류의 효율을 향상시키기 위해 소팅 셔틀(170)에 동일한 등급의 디바이스(20)가 소정개수로 적재된 경우 복수개를 동시에 픽업하여 유저 트레이(10)로 이송시킬 수 있도록 제어될 수 있다. 또한, 도시되지는 않았으나, 전술한 구성요소들의 구동을 제어하는 제어부가 별도로 구비될 수 있다.The unloading site UL is configured to sort, transport, and load the device 20 according to the test result from the test tray 130 transferred from the test site T. The unloading site UL may be provided with elements similar to the configuration of the loading site L, and may be performed in an order opposite to the transfer of the device 20 at the loading site L. However, in the unloading site (UL), a plurality of sorting shuttles 170 may be provided to temporarily collect from the test tray 130 according to grades. In order to improve the efficiency of distribution, when a predetermined number of devices 20 of the same grade are loaded in the sorting shuttle 170, a plurality of devices may be simultaneously picked up and transferred to the user tray 10. Further, although not shown, a control unit for controlling driving of the above-described components may be separately provided.
다만 이와 같은 언로딩 사이트(UL)의 구성요소 및 작동은 차후 도 9 내지 도 13c을 참조하여 상세히 설명하도록 한다.However, the components and operation of the unloading site (UL) will be described in detail later with reference to FIGS. 9 to 13C.
이하에서는 도 4 내지 도 8을 참조하여 본 발명에 따른 스태커에 대하여 상세히 설명하도록 한다.Hereinafter, a stacker according to the present invention will be described in detail with reference to FIGS. 4 to 8.
도 4는 본 발명에 따른 전자부품 테스트 핸들러(1)의 스태커의 부분사시도이며, 도 5는 도 4의 일부 구성을 확대하여 나타낸 확대사시도이다. 4 is a partial perspective view of a stacker of the electronic component test handler 1 according to the present invention, and FIG. 5 is an enlarged perspective view showing a partial configuration of FIG. 4.
도시된 바와 같이, 본 발명에 따른 스태커는 테스트 핸들러 본체(100)의 베이스(101)의 하측에서 디바이스(20)를 지속적으로 공급하거나 회수할 수 있도록 구성될 수 있다. 스태커는 스태커 모듈(500)과 버퍼 스태커(300)를 포함하여 구성될 수 있다.As shown, the stacker according to the present invention may be configured to continuously supply or retrieve the device 20 from the lower side of the base 101 of the test handler body 100. The stacker may include a stacker module 500 and a buffer stacker 300.
스태커 모듈(500)은 복수로 구성되며, 각각 독립적으로 개폐되어 외부와 유저 트레이(10)를 주고받을 수 있도록 구성될 수 있다. 복수의 스태커 모듈(500)은 후술할 버퍼 스태커(300) 내부의 제2 적재부(310)와 1:1로 대응되는 개수로 구비될 수 있다. 스태커 모듈(500)은 수평방향으로 이동되면서 개방될 수 있도록 구성될 수 있다. 스태커 모듈(500)은 프레임(200), 제1 적재부(510), 제1 적재부 승강부(520), 슬라이더(530), 리니어 액추에이터(550), 가이드(610), 센서부(620) 및 도어(540)를 포함하여 구성될 수 있다.The stacker module 500 may be configured in plural, each independently opened and closed to exchange the user tray 10 with the outside. The plurality of stacker modules 500 may be provided in a number corresponding to 1:1 with the second loading unit 310 inside the buffer stacker 300 to be described later. The stacker module 500 may be configured to be opened while moving in a horizontal direction. The stacker module 500 includes a frame 200, a first loading part 510, a first loading part lifting part 520, a slider 530, a linear actuator 550, a guide 610, and a sensor part 620. And it may be configured to include a door 540.
프레임(200)은 전체적인 골격을 구성하도록 구성될 수 있다.The frame 200 may be configured to constitute an overall skeleton.
제1 적재부(510)는 복수의 유저 트레이(10)가 적층된 상태로 적재될 수 있는 공간을 뜻한다. 제1 적재부(510)는 외부의 유저 트레이(10) 이송수단, 예를 들어 로봇과 한 번에 주고받는 단위인 1 lot 이 적재될 수 있다. 다만 1 lot을 구성하는 유저 트레이(10)의 개수는 디바이스(20)의 종류에 따라 다양하게 달라질 수 있으므로 상세한 예의 설명은 생략하도록 한다. 한편, 제1 적재부(510)의 공간은 유저 트레이(10)의 형상 및 크기에 대응되어 형성될 수 있다.The first loading unit 510 refers to a space in which a plurality of user trays 10 can be stacked and loaded. The first loading unit 510 may be loaded with an external user tray 10 transfer means, for example, 1 lot, which is a unit that is exchanged with a robot at a time. However, since the number of user trays 10 constituting one lot may vary depending on the type of device 20, a detailed example will be omitted. Meanwhile, the space of the first loading unit 510 may be formed corresponding to the shape and size of the user tray 10.
제1 적재부 승강부(520)는 복수의 유저 트레이(10)를 수직방향으로 승강시킬 수 있도록 구성된다. 제1 적재부 승강부(520)는 지지판(521), 지지부(522) 및 승강구동부(523)를 포함하여 구성될 수 있다. 지지판(521)은 제1 적재부(510)에 적재되어 있는 유저 트레이(10)를 상면으로 지지할 수 있도록 구성된다. 지지판(521)은 홀더(311)의 돌출부(312)가 닫혀있는 경우에도 제1 적재부(510)와 제2 적재부(310)사이에서 이동시 돌출부(312)에 의한 간섭이 발생하지 않는 크기로 구성될 수 있다. 지지부(522)는 프레임측에 구비되며, 스태커 모듈(500)이 닫혔을 때 지지판(521)의 하면을 지지할 수 있도록 구성될 수 있다. 승강구동부(523)는 지지부(522)와 연결되어 지지지부(522)를 상하방향으로 이동시킬 수 있게 된다. 승강구동부(523)는 제1 적재부(510)의 하측으로부터 제2 적재부(310)하측까지 지지부(522)의 높이조절이 가능하도록 구성될 수 있다.The first loading part lifting part 520 is configured to lift the plurality of user trays 10 in the vertical direction. The first loading part lifting part 520 may include a support plate 521, a support part 522, and a lifting drive part 523. The support plate 521 is configured to support the user tray 10 loaded on the first loading part 510 to the upper surface. The support plate 521 is of a size that does not cause interference due to the protrusion 312 when moving between the first loading part 510 and the second loading part 310 even when the protrusion 312 of the holder 311 is closed. Can be configured. The support part 522 is provided on the frame side, and may be configured to support a lower surface of the support plate 521 when the stacker module 500 is closed. The elevating driving part 523 is connected to the support part 522 to move the support support part 522 in the vertical direction. The elevating driver 523 may be configured to enable height adjustment of the support portion 522 from the lower side of the first loading portion 510 to the lower side of the second loading portion 310.
슬라이더(530)는 스태커 모듈(500)의 하측에 구비되어 스태커 모듈(500)이 슬라이딩되어 프레임(200)과 상대적으로 이동될 수 있도록 구성될 수 있다. 슬라이더(530)는 복수로 구성되어 스태커 모듈(500)을 안정적으로 지지하도록 구성될 수 있으며, 또한 스태커 모듈(500)을 정해진 왕복위치로 이동될 수 있도록 구속 할 수 있다. The slider 530 may be provided under the stacker module 500 and may be configured such that the stacker module 500 is slid to move relative to the frame 200. The slider 530 may be configured to stably support the stacker module 500 by being configured in plural, and may also constrain the stacker module 500 to be moved to a predetermined reciprocating position.
리니어 액추에이터(550)는 스태커 모듈(500)을 수평방향으로 이동시킬 수 있도록 구성된다. 리니어 액추에이터(550)의 일측은 프레임(200)에, 타측은 스태커 모듈(500)의 일측과 연결되어 입력에 따라 스태커 모듈(500)을 개폐할 수 있도록 구성될 수 있다. 다만, 본 실시예에서는 리니어 액추에이터(550)를 예를 들어 설명하였으나, 스태커 모듈(500)의 왕복이동을 위한 다양한 구성으로 변형되어 적용될 수 있다.The linear actuator 550 is configured to move the stacker module 500 in the horizontal direction. One side of the linear actuator 550 may be connected to the frame 200 and the other side may be connected to one side of the stacker module 500 to open and close the stacker module 500 according to an input. However, in the present embodiment, the linear actuator 550 has been described as an example, but may be modified and applied in various configurations for reciprocating movement of the stacker module 500.
가이드(610)는 복수의 유저 트레이(10)가 적층된 상태에서 제1 적재부(510)로부터 유저 트레이(10)가 이탈하는 것을 방지할 수 있도록 구성된다. 가이드(610)는 제1 적재부(510)의 둘레를 따라 복수의 지점에서 수직방향으로 연장되어 형성된다. 일 예로 유저 트레이(10)의 각 모서리마다 인접한 2개의 가이드(610)가 구비될 수 있으며, 총 8개의 가이드(610)가 구비될 수 있다. 가이드(610)의 길이는 제2 적재부(310)와 유저 트레이(10)를 주고받을 때 측방향으로 이탈되지 않을 정도의 길이로 연장되어 형성될 수 있다. 즉 제1 적재부(510)의 가이드(610)의 상측 단부와 상측의 제2 적재부(310) 사이는 유저 트레이(10)의 두께보다 이격거리가 짧게 형성될 수 있다.The guide 610 is configured to prevent the user tray 10 from being separated from the first loading unit 510 in a state in which the plurality of user trays 10 are stacked. The guide 610 is formed to extend in a vertical direction at a plurality of points along the circumference of the first loading portion 510. For example, two guides 610 adjacent to each corner of the user tray 10 may be provided, and a total of eight guides 610 may be provided. The length of the guide 610 may be formed to extend to a length such that it does not deviate laterally when the second loading part 310 and the user tray 10 are exchanged. That is, a separation distance between the upper end of the guide 610 of the first loading portion 510 and the second loading portion 310 of the upper side may be formed to be shorter than the thickness of the user tray 10.
센서부(620)는 제1 적재부(510)에 유저 트레이(10)의 유무 및 적재완료 여부를 판단할 수 있도록 구성될 수 있다. 센서부(620)는 제1 적재부(510)상에서 유저 트레이(10)가 적재 되었을 때 최상측과 최하측에 위치하는 유저 트레이(10)의 존재 유무를 판단할 수 있도록 구성될 수 있다. 최상측의 센서로부터 유저 트레이(10)가 있는 것으로 센싱되는 경우에는 제1 적재부(510)에 유저 트레이(10)의 적재가 완료된 것으로 판단하여 이후 동작을 제어할 수 있다. 반면 최하측의 센서로부터 유저 트레이(10)가 없는 것으로 센싱되는 경우에는 제1 적재부(510)가 비어있는 것으로 판단하고 이후 동작을 제어할 수 있다. 한편, 1 lot 의 단위로 외부로부터 적재되는 경우 최하측의 센서에서 유저 트레이(10)가 측정되는 경우 제1 적재부(510)에 유저 트레이(10)가 꽉 찬 것으로 판단할 수 있으며, 반대로 유저 트레이(10)가 측정되지 않는 경우 제1 적재부(510)가 소진되어 비어있는 것으로 판단할 수 있게 된다. 한편 전술한 센서부(620)는 레이저 센서, 적외선 센서, 초음파 센서와 같은 이격된 지점의 유저 트레이(10) 존재 유무를 판단할 수 있는 다양한 구성으로 적용될 수 있다.The sensor unit 620 may be configured to determine the presence or absence of the user tray 10 in the first loading unit 510 and whether loading is complete. The sensor unit 620 may be configured to determine the presence or absence of the user tray 10 positioned at the uppermost side and the lowermost side when the user tray 10 is loaded on the first loading unit 510. When the uppermost sensor detects that the user tray 10 is present, it is determined that the loading of the user tray 10 in the first loading unit 510 is completed, and subsequent operations may be controlled. On the other hand, when sensing that the user tray 10 is absent from the lowermost sensor, it is determined that the first loading unit 510 is empty, and an operation thereafter may be controlled. On the other hand, in the case of loading from the outside in a unit of 1 lot, when the user tray 10 is measured by the sensor on the lowermost side, it can be determined that the user tray 10 is full in the first loading unit 510. Conversely, the user When the tray 10 is not measured, it can be determined that the first loading portion 510 is exhausted and empty. Meanwhile, the above-described sensor unit 620 may be applied in various configurations capable of determining the presence or absence of the user tray 10 at a spaced point such as a laser sensor, an infrared sensor, and an ultrasonic sensor.
도어(540)는 스태커 모듈(500)이 스태커 내측으로 이동하여 삽입완료 되었을 때 외부를 차폐할 수 있도록 구성된다.The door 540 is configured to shield the outside when the stacker module 500 is moved to the inside of the stacker and is inserted.
버퍼 스태커(300)는 스태커 모듈(500)의 상측에 구비된다. 버퍼 스태커(300)는 스태커 모듈(500) 각각이 외부와 유저 트레이(10)의 물류가 수행되더라도 지속적으로 내부에서 유저 트레이(10)의 물류가 수행될 수 있도록 구성된다. 버퍼 스태커(300)는 제2 적재부(310), 가이드(610), 센서부(620), 홀더(311), 트랜스퍼(410) 및 셋 플레이트(320)를 포함하여 구성될 수 있다.The buffer stacker 300 is provided above the stacker module 500. The buffer stacker 300 is configured so that even if each of the stacker modules 500 performs distribution of the user tray 10 to the outside, distribution of the user tray 10 can be continuously performed from the inside. The buffer stacker 300 may include a second loading unit 310, a guide 610, a sensor unit 620, a holder 311, a transfer 410, and a set plate 320.
제2 적재부(310)도 제1 적재부(510)와 마찬가지로 유저 트레이(10)가 적재될 수 있는 공간으로 정의될 수 있다. 제2 적재부(310)는 하측으로 제1 적재부(510)와 유저 트레이(10)를 주고받을 수 있도록 구성된다. 제2 적재부(310)는 전술한 스태커 모듈(500)의 개수와 동일한 수로 구성되어 스태커 모듈(500)의 상측에 나란하게 구비될 수 있다.Like the first loading part 510, the second loading part 310 may be defined as a space in which the user tray 10 can be loaded. The second loading part 310 is configured to exchange the first loading part 510 and the user tray 10 downward. The second loading part 310 may be formed in the same number as the number of the stacker modules 500 described above and may be provided in parallel on the upper side of the stacker module 500.
한편, 가이드(610) 및 센서부(620)는 전술한 제1 적재부(510)의 구성과 동일하게 제2 적재부(310)에 구비될 수 있다. 단, 가이드(610)는 1 lot이 적재된 높이와 유사한 길이로 구비될 수 있다.Meanwhile, the guide 610 and the sensor unit 620 may be provided on the second loading portion 310 in the same manner as the configuration of the first loading portion 510 described above. However, the guide 610 may be provided with a length similar to the height in which one lot is loaded.
트랜스퍼(410)는 버퍼 스태커(300) 내부에서 유저 트레이(10)를 파지하여 이송시킬 수 있도록 구성된다. 트랜스퍼(410)는 복수로 구성되며, 로딩에 관여하는 트랜스퍼(410) 및 언로딩에 관여하는 트랜스퍼(410)를 각각 하나 이상을 포함하여 구성될 수 있다. 트랜스퍼(410)에는 수평이동과 수직이동이 가능하도록 복수의 액추에이터(미도시)가 구비될 수 있다. 트랜스퍼(410)는 제2 적재부(310) 중 어느 하나와 셋 플레이트(320) 중 어느 하나 사이에서 유저 트레이(10)의 이송이 수행되도록 제어될 수 있다. 또한 제2 적재부(310) 사이에서 유저 트레이(10)의 물류가 수행되도록 제어될 수 있다. 트랜스퍼(410)는 제2 적재부(310)의 상측으로부터 하나씩 유저 트레이(10)를 인출하거나, 반대로 하측으로 하나씩 쌓아가면서 적재하도록 제어될 수 있다.The transfer 410 is configured to grip and transfer the user tray 10 inside the buffer stacker 300. The transfer 410 may be configured in plural, and may include at least one transfer 410 involved in loading and one or more transfer 410 involved in unloading. The transfer 410 may be provided with a plurality of actuators (not shown) to enable horizontal movement and vertical movement. The transfer 410 may be controlled such that the transfer of the user tray 10 is performed between any one of the second loading units 310 and any one of the set plate 320. In addition, it may be controlled to perform the distribution of the user tray 10 between the second loading unit 310. The transfer 410 may be controlled to withdraw the user trays 10 one by one from the upper side of the second loading unit 310 or stack them one by one to the lower side.
셋 플레이트(320; set plate)는 이송받은 유저 트레이(10)를 테스트 핸들러 본체(100)로 노출시킬 수 있도록 구성된다. 셋 플레이트(320)는 유저 트레이(10)를 적재한 상태로 승강될 수 있도록 구성되며, 상승시 테스트 핸들러 본체(100)의 핸드(110)가 디바이스(20)를 픽업할 수 있는 위치로 이동되며, 하강시 트랜스퍼(410) 유닛이 유저 트레이(10)를 교체할 수 있는 위치로 이동될 수 있다. 셋 플레이트(320)는 로딩 사이트(L)와 언로딩 사이트(UL)에 복수로 구비 될수 있다.The set plate 320 is configured to expose the transferred user tray 10 to the test handler body 100. The set plate 320 is configured to be raised and lowered while the user tray 10 is loaded, and when it is raised, the hand 110 of the test handler body 100 is moved to a position where it can pick up the device 20 When descending, the transfer unit 410 may be moved to a position where the user tray 10 can be replaced. The set plate 320 may be provided in plural at the loading site L and the unloading site UL.
홀더(311)는 제2 적재부(310)와 제1 적재부(510) 사이에서 유저 트레이(10)의 통과나 지지가 선택적으로 이루어질 수 있도록 구성될 수 있다. 홀더(311)는 제2 적재부(310) 각각에 한 쌍으로 구비될 수 있으며, 각각의 홀더(311)는 돌출부(312)를 포함할 수 있다. 돌출부(312)는 홀더(311)의 회전시 선택적으로 유저 트레이(10)의 이동경로에 간섭을 발생시킬 수 있도록 회전방향을 따라 비대칭적으로 구성될 수 있다. 돌출부(312)는 실질적으로 유저 트레이(10)의 하면을 지지할 수 있도록 구성될 수 있다. 제2 적재부(310)의 하측은 유저 트레이(10)가 드나들 수 있도록 프레임(200)이 뚫려 있으며, 홀더(311)가 열리는 경우 유저 트레이(10)가 통과할 수 있도록 구성된다. 홀더(311)는 닫혔을 때 제1 적재부(510)와 제2 적재부(310) 간의 유저 트레이(10)의 이동경로 상으로 돌출되는 돌출부(312)를 포함하여 구성될 수 있다. 홀더(311)는 열렸을 때에는 돌출부(312)가 회전하여 유저 트레이(10)의 이동경로상에서 간섭이 발생하지 않도록 구성될 수 있다. The holder 311 may be configured to selectively pass or support the user tray 10 between the second loading part 310 and the first loading part 510. The holders 311 may be provided in a pair on each of the second loading portions 310, and each holder 311 may include a protrusion 312. The protrusion 312 may be configured asymmetrically along the rotation direction so as to selectively interfere with the movement path of the user tray 10 when the holder 311 is rotated. The protrusion 312 may be configured to substantially support the lower surface of the user tray 10. The frame 200 is opened at the lower side of the second loading unit 310 so that the user tray 10 can enter and exit, and when the holder 311 is opened, the user tray 10 is configured to pass. The holder 311 may include a protrusion 312 protruding over a moving path of the user tray 10 between the first loading portion 510 and the second loading portion 310 when closed. When the holder 311 is opened, the protrusion 312 may be rotated so that interference does not occur on the moving path of the user tray 10.
이하에서는 도 6a 내지 8을 참조하여 본 발명에 따른 스태커의 작동에 대하여 설명하도록 한다.Hereinafter, the operation of the stacker according to the present invention will be described with reference to FIGS. 6A to 8.
도 6a, 6b, 6c, 6d 및 6e는 제1 적재부(510)와 제2 적재부(310)간 유저 트레이(10)의 이송을 나타낸 작동상태도이다. 도시된 바와 같이, 제1 적재부(510)로부터 제2 적재부(310)로 유저 트레이(10)를 이송시키는 경우 제1 적재부(510)측에서 적층된 유저 트레이(10)를 지지하면서 상측으로 이송시키게 된다.6A, 6B, 6C, 6D, and 6E are operational state diagrams showing the transfer of the user tray 10 between the first loading part 510 and the second loading part 310. As shown, in the case of transferring the user tray 10 from the first loading portion 510 to the second loading portion 310, the upper side while supporting the stacked user trays 10 from the first loading portion 510 side Will be transferred.
먼저, 도 6a를 참조하면, 제1 적재부 승강부(520)와 홀더(311)의 동작을 살펴보면, 제1 적재부(510)에 외부로부터 1 lot의 유저 트레이(10)가 적재되고 스태커 모듈(500)이 원위치로 삽입된다. 이 상태로 제2 적재부(310)에 적재되어 있는 유저 트레이(10)가 모두 소진될 때까지 대기할 수 있다. 이후 도 6b를 참조하면, 제2 적재부(310)에 유저 트레이(10)가 모두 소진된 경우 홀더(311)를 개방한다. 이후 도 6c를 참조하면, 제1 적재부 승강부(520)를 상승시켜 적층된 유저 트레이(10)를 제2 적재부(310)로 상승시킨다. 이때 제1 적재부 승강부(520)의 승강높이는 최하측의 유저 트레이(10)의 저면의 높이가 홀더(311)의 지지높이보다 높은 위치가 될수 있는 위치로 결정될 수 있다. 이후 도 6d를 참조하면, 홀더(311)를 닫아서 유저 트레이(10)가 다시 제1 적재부(510)로 되돌아가는 것을 방지한다. 이후 도 6e를 참조하면, 제1 적재부 승강부(520)를 하강시키면 적재되어 있던 최하측의 유저 트레이(10)의 저면이 홀더(311)에 의해 지지되면서 적증된 유저 트레이(10) 전체는 제2 적재부(310)에 적재되고, 제1 적재부 승강부(520)는 원위치되어 외부로부터 새로운 유저 트레이(10)를 적재할 준비를 마치게 된다. 이때 제1 적재부 승강부(520)의 상면의 높이와 홀더(311)의 지지높이의 차이를 최소화하여 유저 트레이(10)를 인계할 때 충격을 최소화할 수 있다.First, referring to FIG. 6A, looking at the operation of the first loading part lifting part 520 and the holder 311, 1 lot of the user tray 10 is loaded from the outside in the first loading part 510, and the stacker module 500 is inserted into the original position. In this state, it is possible to wait until all of the user trays 10 loaded on the second loading unit 310 are exhausted. Thereafter, referring to FIG. 6B, when the user tray 10 in the second loading part 310 is exhausted, the holder 311 is opened. Thereafter, referring to FIG. 6C, the stacked user tray 10 is raised to the second loading portion 310 by raising the first loading portion lifting portion 520. In this case, the elevation height of the first loading part lifting part 520 may be determined as a position in which the height of the bottom of the lowermost user tray 10 is higher than the support height of the holder 311. Thereafter, referring to FIG. 6D, the holder 311 is closed to prevent the user tray 10 from being returned to the first loading unit 510 again. Thereafter, referring to FIG. 6E, when the first loading part lifting part 520 is lowered, the bottom surface of the lowermost user tray 10 which was loaded is supported by the holder 311, and thus the entire user tray 10 is increased. The second loading portion 310 is loaded, and the first loading portion elevating portion 520 is in its original position and is ready to load a new user tray 10 from the outside. At this time, the difference between the height of the upper surface of the first loading part lifting part 520 and the support height of the holder 311 may be minimized, thereby minimizing impact when handing over the user tray 10.
한편, 도시되지는 않았으나, 언로딩 측에서 테스트를 마친 유저 트레이(10)가 외부로 반출되어야 하는 경우 전술한 순서와 반대로 제어가 이루어져 복수의 유저 트레이(10)를 제2 적재부(310)로부터 제1 적재부(510)로 이송시킬 수 있게 된다.On the other hand, although not shown, when the user tray 10 that has been tested on the unloading side is to be taken out, the control is performed in the opposite of the above-described order, and the plurality of user trays 10 are transferred from the second loading unit 310. It can be transferred to the first loading unit 510.
도 7은 제1 적재부(510)와 외부와의 물류시 스태커의 작동 개념을 나타낸 개념도이다. 도 6e와 같이 제1 적재부(510)가 비어있는 경우 외부로부터 유저 트레이(10)를 공급받을 수 있게 된다. 이때 스태커 모듈(500)을 열더라도 버퍼 스태커(300) 내부의 제2 적재부(310)에는 유저 트레이(10)가 남아있어 이로부터 셋 플레이트(320)로 지속적으로 유저 트레이(10)를 공급할 수 있게 된다. 한편, 외부로부터 유저 트레이(10)의 공급주기가 길어지는 경우에는 공급용 제1 적재부(510) 및 제2 적재부(310)를 2열 이상으로 배치하여 한 열에서 유저 트레이(10)가 모두 소진된 경우 다른 열에 적재되어 있는 유저 트레이(10)를 사용할 수 있게 된다. 이러한 경우 외부로부터 유저 트레이(10)를 공급받는 경우 복수의 스태커 모듈(500)에 동시에 적재가 이루어질 수 있다. 다만, 도시되지는 않았으나, 유저 트레이(10)를 외부로 반출해야 하는 경우에도 스태커 모듈(500)을 개폐하는 동안에도 제2 적재부(310)에는 독립적으로 유저 트레이(10)가 적층될 수 있게 된다.7 is a conceptual diagram showing an operation concept of the stacker during distribution between the first loading unit 510 and the outside. As shown in FIG. 6E, when the first loading part 510 is empty, the user tray 10 can be supplied from the outside. At this time, even if the stacker module 500 is opened, the user tray 10 remains in the second loading unit 310 inside the buffer stacker 300, so that the user tray 10 can be continuously supplied to the set plate 320 from this. There will be. On the other hand, when the supply cycle of the user tray 10 from the outside is prolonged, the first loading section 510 and the second loading section 310 for supply are arranged in two or more rows so that the user tray 10 is When all of them are exhausted, the user tray 10 loaded in another row can be used. In this case, when the user tray 10 is supplied from the outside, a plurality of stacker modules 500 may be simultaneously loaded. However, although not shown, the user tray 10 can be independently stacked on the second loading unit 310 even while opening and closing the stacker module 500 even when the user tray 10 needs to be taken out. do.
도 8은 스태커 내부의 물류를 나타낸 개념도이다. 도시된 바와 같이, 본 발명에 따른 스태커는 1 적재부와 제2 적재부(310)가 하나의 열로 구성되며, 복수의 열의 적재부를 포함하여 구성될 수 있다. 각각의 열에서는 제1 적재부(510)와 제2 적재부(310)가 유저 트레이(10)를 주고받을 수 있게 구성된다(①) 또한 제2 적재부(310)로부터 셋 플레이트(320)로 유저 트레이(10)를 이송시킬 수 있으며(②), 반대로 셋 플레이트(320)로부터 제2 적재부(310)로 유저 트레이(10)를 이송시킬 수 있다(③). 또한 필요시 제2 적재부(310) 사이에서 유저 트레이(10)의 이송이 이루어질 수 있다(④). 여기서 제1 적재부(510)는 전술한 버퍼 스태커(300) 내부에서 다양한 경로의 유저 트레이(10)의 이송이 이루어지더라도 스태커 모듈(500)이 개별적으로 개폐되면서 외부와 물류가 이루어질 수 있게 된다. 한편, 스태커 모듈(500)과 버퍼 스태커(300)에 구비된 각각의 적재부가 사용자의 입력에 의해 자유롭게 로딩, 언로딩, 엠프티의 기능을 수행하도록 설정될 수 있다. 8 is a conceptual diagram showing the logistics inside the stacker. As shown, in the stacker according to the present invention, one stacking portion and the second stacking portion 310 are configured in one row, and may include a plurality of rows of stacking portions. In each row, the first loading portion 510 and the second loading portion 310 are configured to exchange the user tray 10 (①) and also from the second loading portion 310 to the set plate 320. The user tray 10 can be transferred (②), and conversely, the user tray 10 can be transferred from the set plate 320 to the second loading unit 310 (③). Also, if necessary, the user tray 10 may be transferred between the second loading units 310 (④). Here, the first loading unit 510 is able to perform distribution with the outside as the stacker module 500 is individually opened and closed even if the user tray 10 of various paths is transferred inside the buffer stacker 300 described above. . Meanwhile, each of the loading units provided in the stacker module 500 and the buffer stacker 300 may be set to perform the functions of loading, unloading, and empty freely according to a user's input.
이와같이 스태커가 구성되는 경우 외부와 유저 트레이를 주고받는 동안에도 스태커 모듈이 독립적으로 외부와 유저 트레이의 물류를 수행할 수 있으며, 유저 트레이 소진에 따른 테스트 핸들러의 작동중단을 방지하여 안정적으로 운용할 수 있는 효과가 있다.When the stacker is configured in this way, the stacker module can independently perform logistics between the external and user trays even while exchanging user trays with the outside, and it is possible to operate stably by preventing the interruption of the test handler operation due to exhaustion of the user tray. There is an effect.
또한, 설계시 유저 트레이를 적재하는 각각의 적재부의 기능이 결정되지 않고 필요에 따라 기능을 설정할 수 있으므로 운용 자유도를 높일 수 있는 효과가 있다.In addition, since the function of each loading unit for loading the user tray is not determined at the time of design, and functions can be set as necessary, there is an effect of increasing the degree of freedom of operation.
이하에서는 도9 내지 도 13c을 참조하여 언로딩 사이트의 구성 및 작동에 대하여 상세히 설명하도록 한다.Hereinafter, the configuration and operation of the unloading site will be described in detail with reference to FIGS. 9 to 13C.
도 9는 본 발명에 따른 언로딩 사이트의 일부가 나타난 사시도이며, 도 10은 반전기(140)의 사시도이고, 도 11은 인서트 개방 모듈(190)의 사시도이다. 설명의 편의를 위하여 본체의 프레임과 핸드(110)의 일부는 생략되어 있다.9 is a perspective view showing a part of the unloading site according to the present invention, FIG. 10 is a perspective view of the inverter 140, and FIG. 11 is a perspective view of the insert opening module 190. For convenience of description, the frame of the main body and some of the hand 110 are omitted.
도시된 바와 같이, 언로딩 사이트(UL)는 테스트를 마친 테스트 트레이(130)로부터 시험결과에 따라 각각의 디바이스를 개별적으로 분류할 수 있도록 구성된다.As shown, the unloading site UL is configured to individually classify each device according to the test result from the test tray 130 that has been tested.
전술한 버퍼 챔버(150)는 테스트를 마친 복수의 테스트 트레이(130)가 수직방향으로 세워진 채로 나란하게 적재될 수 있다. 버퍼 챔버(150)에서는 테스트 챔버로부터 버퍼 챔버에 먼저 들어온 테스트 트레이(130)가 먼저 외부로 인출되는 선입선출 방식으로 테스트 트레이(130)의 이송이 이루어지게 된다. 테스트 트레이(130)는 버퍼 챔버(150)의 일측에서 상측 방향으로 상승되면서 외부로 빠져나가게 된다. 여기서 반전기(140)는 세로방향으로 테스트 트레이(130)를 인수받을 수 있도록 자세를 변환하며, 이후 테스트 트레이(130)를 인수받게 된다. 인수시 제1 테스트 트레이(130) 이송 유닛이 테스트 트레이(130)의 일측을 지지하면서 함께 상승하여 테스트 트레이(130)가 반전기(140) 내부로 완전히 수용될 수 있다.In the above-described buffer chamber 150, a plurality of test trays 130 that have been tested may be stacked side by side while being erected in a vertical direction. In the buffer chamber 150, the test tray 130 is transferred in a first-in, first-out manner in which the test tray 130, which has first entered the buffer chamber from the test chamber, is first drawn out. The test tray 130 rises upward from one side of the buffer chamber 150 and exits to the outside. Here, the inverter 140 converts the posture to receive the test tray 130 in the vertical direction, and then receives the test tray 130. When receiving, the first test tray 130 and the transfer unit support one side of the test tray 130 and rise together, so that the test tray 130 may be completely accommodated into the inverter 140.
언로딩 사이트는 반전기(140), 인서트 개방 모듈(190), 제2 테스트 트레이(130) 이송 유닛, 소팅 셔틀 및 핸드(110)를 포함한 구성요소들이 구비될 수 있다.The unloading site may include components including an inverter 140, an insert opening module 190, a second test tray 130, a transfer unit, a sorting shuttle, and a hand 110.
반전기(140)는 버퍼 챔버로부터 인수받은 테스트 트레이(130)의 방향을 전환할 수 있도록 구성된다. 반전기(140)는 샤프트(144), 반전기 프레임(141) 및 제1 테스트 트레이 이송 유닛(180)을 포함하여 구성될 수 있다.The inverter 140 is configured to change the direction of the test tray 130 received from the buffer chamber. The inverter 140 may include a shaft 144, an inverter frame 141, and a first test tray transfer unit 180.
샤프트(144)는 테스트 핸들러 본체 프레임에 양측이 고정되며, 반전기(140)가 샤프트(144)를 중심으로 회전할 수 있도록 구성된다. Both sides of the shaft 144 are fixed to the test handler body frame, and the inverter 140 is configured to rotate around the shaft 144.
반전기 프레임(141)은 반전기(140)의 전체적인 외형을 구성하며, 테스트 트레이(130)가 일시적으로 수용될 수 있도록 구성된다. 반전기(140)는 전체적으로 평면 형상으로 구성된 프레임과 테스트 트레이(130)가 적재되며, 적재된 상태에서 직선 방향으로 이동될 수 있도록 공간이 마련되며, 다른 방향으로 이탈을 방지할 수 있도록 구성되는 반전기 가이드(142)를 포함하여 구성될 수 있다. The inverter frame 141 constitutes the overall appearance of the inverter 140 and is configured such that the test tray 130 can be temporarily accommodated. The inverter 140 is loaded with a frame and a test tray 130 configured in a flat shape as a whole, and a space is provided so that it can be moved in a linear direction in the loaded state, and a half configured to prevent departure in other directions. It may be configured to include an electric guide 142.
반전기(140)는 양 테두리에 한쌍으로 구비되는 샤프트 연결부(143)가 구비되며, 전술한 샤프트(144)와 연결되어 회전가능하도록 구성될 수 있다. 반전기(140)는 샤프트(144)를 중심으로 회전가능하도록 구성된다. 한편 도시되지는 않았으나 연결부에 반전기(140) 회전 구동부가 구비되어 반전기(140)를 회전시키는 동력을 발생시킬 수 있다.The inverter 140 is provided with a pair of shaft connection portions 143 provided on both edges, and may be configured to be rotatable by being connected to the shaft 144 described above. The inverter 140 is configured to be rotatable about the shaft 144. Meanwhile, although not shown, a rotation driving unit of the inverter 140 may be provided in the connection portion to generate power to rotate the inverter 140.
제1 테스트 트레이 이송 유닛(145)은 반전기 프레임(141)상에서 테스트 트레이(130)를 선택적으로 지지하며 직선운동 할 수 있도록 구성된다. 제1 테스트 트레이 이송 유닛(145)은 제1 구동부(146), 제2 구동부(148) 및 견인핀(149)을 포함하여 구성될 수 있다.The first test tray transfer unit 145 is configured to selectively support the test tray 130 on the inverter frame 141 and perform linear motion. The first test tray transfer unit 145 may include a first driving unit 146, a second driving unit 148 and a traction pin 149.
제1 구동부(146)는 테스트 트레이(130)가 반전기 프레임(141)과 평행한 방향으로 이송될 수 있는 구동력을 제공한다. 제1 구동부(146)는 벨트와 연결되어 구동력을 전달할 수 있다. 제1 구동부(146)의 구동에 따라 후술할 제2 구동부(148) 및 견인핀(149)이 함께 직선운동하게 된다.The first driving unit 146 provides a driving force through which the test tray 130 can be transferred in a direction parallel to the inverter frame 141. The first driving unit 146 may be connected to the belt to transmit driving force. As the first driving unit 146 is driven, the second driving unit 148 and the traction pin 149 to be described later are linearly moved together.
제2 구동부(148)는 후술할 견인핀(149)이 선택적으로 테스트 트레이(130)를 지지할 수 있도록 견인핀(149)의 위치를 조절하는 구동력을 제공한다. 제2 구동부(148)의 일측은 제1 구동부 벨트(147)와 연결되며, 타측은 견인핀(149)이 연결된다. 제2 구동부(148)의 구동에 따라 견인핀(149)의 위치는 제1 구동부 벨트(147)와 상대적으로 조절될 수 있다. The second driving unit 148 provides a driving force for adjusting the position of the traction pin 149 so that the traction pin 149 to be described later can selectively support the test tray 130. One side of the second driving unit 148 is connected to the first driving unit belt 147, and the other side is connected to a traction pin 149. As the second driving unit 148 is driven, the position of the traction pin 149 may be relatively adjusted with the first driving unit belt 147.
견인핀(149)은 테스트 트레이(130)에 형성된 견인홈에 삽입되어 테스트 트레이(130)를 지지할 수 있도록 구성된다. The traction pin 149 is configured to be inserted into a traction groove formed in the test tray 130 to support the test tray 130.
제1 테스트 트레이 이송 유닛(145)은 버퍼 챔버(150)의 승강유닛(미도시)에 의해 소정길이로 상승된 테스트 트레이(130)를 지지하면서 이동시키게 되어 반전기(140) 내측의 정위치에 배치될 수 있도록 구동한다. 또한 반전기(140)가 테스트 트레이(130)를 수평방향으로 전환한 후 후술할 인서트 개방 모듈(190)측으로 이송시 구동하게 된다. 한편, 견인핀(149)의 경우 스트로크(stroke)가 테스트 트레이(130)의 길이만큼 또는 길이 이상이 되도록 구성되어 반전기(140)의 전후의 위치와 테스트 트레이(130)의 이송이 원활하게 이루어질 수 있다.The first test tray transfer unit 145 is moved while supporting the test tray 130 raised to a predetermined length by an elevating unit (not shown) of the buffer chamber 150, so that it is moved to a proper position inside the inverter 140. Drive so that it can be placed. In addition, the inverter 140 is driven when the test tray 130 is converted to the horizontal direction and transferred to the insert opening module 190 to be described later. On the other hand, in the case of the traction pin 149, the stroke is configured to be equal to or longer than the length of the test tray 130, so that the position before and after the inverter 140 and the transfer of the test tray 130 are made smoothly. I can.
한편 도시되지는 않았으나, 테스트 트레이(130)가 반전기(140)에 완전히 적재되었는지 여부를 판단할 수 있는 센서를 포함하여 구성될 수 있으며, 테스트 트레이(130)가 반전기(140) 내측의 정위치에 배치되지 않은 경우 테스트 트레이(130)의 정위치 이송 동작을 재수행하도록 제어될 수 있다. Meanwhile, although not shown, the test tray 130 may be configured to include a sensor capable of determining whether or not the test tray 130 is fully loaded on the inverter 140, and the test tray 130 If it is not placed in the position, it may be controlled to re-perform the exact position transfer operation of the test tray 130.
도 11은 인서트 개방 모듈(190)과 테스트 트레이(130)의 사시도이다. 도시된 바와 같이, 인서트 개방 모듈(190)은 테스트 트레이(130)에 구비된 복수의 인서트를 선택적으로 개방할 수 있도록 구성된다. 인서트 개방 모듈(190)은 테스트 트레이(130)를 평면상에서 복수의 분할영역(Ad)으로 구분할 때 하나의 분할영역(Ad)에 대응되는 크기로 구성될 수 있다. 본 실시예에서는 분할영역(Ad)이 테스트 트레이(130)의 진행방향을 따라 두 개로 구분되며, 따라서 인서트 개방 모듈(190)은 테스트 트레이(130)의 절반 크기로 구성될 수 있다. 인서트 개방 모듈(190)은 먼저 테스트 트레이(130)의 전반부 측에서 디바이스의 인출이 가능하도록 인서트를 개방하며, 전반부에서 모든 디바이스가 인출된 경우 테스트 트레이(130)를 이동시켜 후반부의 인서트를 개방하며, 후반부에 배치된 디바이스를 인출하게 된다. 한편 이과 같은 동작이 이루어질 수 있도록 각각의 요소들은 구동부와 연결될 수 있으며, 제어부로부터 구동신호를 수신하여 구동이 이루어질 수 있다.11 is a perspective view of the insert opening module 190 and the test tray 130. As shown, the insert opening module 190 is configured to selectively open a plurality of inserts provided in the test tray 130. The insert opening module 190 may be configured to have a size corresponding to one divided area Ad when dividing the test tray 130 into a plurality of divided areas Ad on a plane. In the present embodiment, the divided area Ad is divided into two along the traveling direction of the test tray 130, and therefore, the insert opening module 190 may have a half size of the test tray 130. The insert opening module 190 first opens the insert so that the device can be withdrawn from the first half of the test tray 130, and when all devices are withdrawn from the first half, the test tray 130 is moved to open the insert of the second half. , The device placed in the second half is withdrawn. Meanwhile, each of the elements may be connected to the driving unit so that such an operation may be performed, and driving may be performed by receiving a driving signal from the control unit.
한편 본 실시예에서는 테스트 트레이(130)와 인서트 개방 모듈(190)간의 상대적인 거리의 조절을 위해 테스트 트레이(130)를 이송시키는 구성이 나타나 있으나 별도의 이송부가 구비되어 인서트 개방 모듈(190)을 이동시키는 구정으로 변형되어 적용될 수 있다.On the other hand, in this embodiment, a configuration for transferring the test tray 130 to adjust the relative distance between the test tray 130 and the insert opening module 190 is shown, but a separate transfer unit is provided to move the insert opening module 190 It can be applied after being transformed into a Chinese New Year.
인서트 개방 모듈(190)은 마스크(191)와 프리사이저(192)를 포함하여 구성될 수 있다. 마스크(191)와 프리사이저(192)는 상하방향으로 배열되며, 그 사이로 테스트 트레이(130)가 위치될 수 있다. The insert opening module 190 may include a mask 191 and a presizer 192. The mask 191 and the presizer 192 are arranged in a vertical direction, and a test tray 130 may be positioned therebetween.
마스크(191)는 테스트 트레이(130)의 절반정도의 크기로 구성되며, 테스트 트레이(130)의 분할영역(Ad)에 형성된 적재홈의 크기 및 배열에 대응하여 마스크(191) 상에 복수의 개구가 형성될 수 있다. 마스크(191)는 테스트 트레이(130)와 밀착시 하측으로 인서트(미도시)에 구비된 개방링크(미도시)를 가압하여 인서트가 개방될 수 있다. 이 상태에서 핸드(110)는 마스크(191)의 개구측에서부터 하측으로 진입하여 테스트 트레이(130)의 적재홈에 배치된 디바이스를 픽업하게 된다.The mask 191 is composed of about half the size of the test tray 130, and a plurality of openings on the mask 191 correspond to the size and arrangement of the loading grooves formed in the divided area Ad of the test tray 130. Can be formed. When the mask 191 is in close contact with the test tray 130, the insert may be opened by pressing an open link (not shown) provided in the insert (not shown) downward. In this state, the hand 110 enters from the opening side of the mask 191 to the lower side to pick up the device disposed in the loading groove of the test tray 130.
프리사이저(Preciser, 192)는 테스트 트레이(130)상에서 유격이 있게 결합되어 있는 인서트를 정확한 위치로 조절하면서 밀착시킬 수 있도록 구성된다. 프리사이저(192)는 복수의 인서트에 대응하여 복수의 인서트 지지핀(193)이 구비되어 있다. 프리사이저(192)는 하측에 승강부(194)와 연결되어 승강될 수 있도록 구성될 수 있다. The presizer 192 is configured to be in close contact while adjusting the inserts that are coupled with clearance on the test tray 130 to an accurate position. The presizer 192 is provided with a plurality of insert support pins 193 corresponding to the plurality of inserts. The presizer 192 may be configured to be elevated by being connected to the elevating unit 194 at the lower side.
테스트 트레이(130)에서 인출영역을 변경해야 하는 경우 프리사이저(192)는 소정높이로 하강하게 되며, 테스트 트레이(130)가 이동한 뒤 다시 상승하여 테스트 트레이(130)를 인서트 개방 모듈(190)에 고정하게 된다.When it is necessary to change the drawing area in the test tray 130, the presizer 192 descends to a predetermined height, and after the test tray 130 moves, it rises again to open the test tray 130 to the insert opening module 190 ).
다만 본 실시예에서는 마스크(191)와 프리사이저(192) 사이로 테스트 트레이(130)가 삽입되는 구성으로 예를 들었으나, 마스크(191)와 프리사이저(192)가 테스트 트레이(130)의 하측에 모두 배치되거나 상측에 모두 배치되는 구성으로 변형되어 적용될 수 있다.However, in this embodiment, the test tray 130 is inserted between the mask 191 and the presizer 192. However, the mask 191 and the presizer 192 are It can be applied after being transformed into a configuration that is arranged both on the lower side or on the upper side.
제2 테스트 트레이(130) 이송 유닛은 인서트 개방 모듈(190)을 통과한 빈 테스트 트레이(130)를 로딩사이트로 이송시킬 수 있도록 구성된다. 제2 테스트 트레이(130) 이송 유닛은 제1 테스트 트레이(130) 이송 유닛과 유사하게 상측 방향으로 소정길이 연장되어 형성되는 견인핀(149)이 구비되며, 인서트 개방 모듈(190)으로부터 외부로 인출하기 위한 y 방향의 동작 및 언로딩 사이트로부터 로딩 사이트로 이송시키기 위한 x 방향의 작동이 이루어지도록 구성될 수 있다. 제2 테스트 트레이(130) 이송 유닛은 로딩사이트와 언로딩 사이트를 가로지르며 형성되는 리니어 가이드(181)를 따라 이동되도록 구성될 수 있다.The second test tray 130 transfer unit is configured to transfer the empty test tray 130 passing through the insert opening module 190 to the loading site. The second test tray 130 transfer unit is provided with a traction pin 149 extending a predetermined length upward, similar to the transfer unit of the first test tray 130, and is drawn out from the insert opening module 190 It may be configured to perform an operation in the y direction for performing and an operation in the x direction for transferring from the unloading site to the loading site. The second test tray 130 transfer unit may be configured to move along the linear guide 181 formed while crossing the loading site and the unloading site.
소팅 셔틀은 인서트 개방 모듈(190)과 인접한 위치에 구비되며, 검사결과에 따른 등급별로 잠시동안 적재될 수 있도록 구비된다. 구체적으로 소팅 셔틀은 등급별로 하나하나 픽업하여 유저 트레이로 이송하는 경우에 매우 비효율적인 동선을 갖게 되므로 동일한 등급의 디바이스가 일정량 분류되어 적재된 경우 한꺼번에 유저 트레이로 이송하기 전 핸드(110)의 디바이스 이송 단위로 모아둘 수 있도록 구성된다. 일정수량이 적재된 경우 소팅 셔틀은 유저 트레이 측으로 이동되어 핸드(110)의 픽업앤 플레이스 동선을 단축 시키게 된다. The sorting shuttle is provided in a position adjacent to the insert opening module 190, and is provided to be loaded for a while according to the grade according to the inspection result. Specifically, when sorting shuttles are picked up one by one for each class and transferred to the user tray, they have a very inefficient movement line, so when a certain amount of devices of the same class are sorted and loaded, the device transfer of the hand 110 before transferring to the user tray at once. It is structured to be collected in units. When a certain amount is loaded, the sorting shuttle is moved to the user tray to shorten the pickup and place movement of the hand 110.
소팅 셔틀(170)은 복수로 구성되어 여러 등급별로 구분된 디바이스를 구분하여 적재할 수 있도록 구성될 수 있다. 각각의 소팅 셔을에는 복수의 디바이스가 적재될 수 있도록 복수의 적재홈이 구비될 수 있다. 한편 각각의 소팅 셔틀에는 소팅 셔틀의 전체적인 적재 상태에 따라 적재위치가 달라질 수 있다. 예를 들어 어느 하나의 소팅 셔틀이 유저 트레이 측으로 이동된 경우 동작을 멈추지 않고 다른 소팅 셔틀에 적재할 수 있게 된다. 따라서 소팅 셔틀의 복귀를 기다리지 않고 등급별로 적재위치를 적절하게 바꾸어가면서 분류가 이루어지므로 핸드(110)의 작동의 중단없이 지속적으로 분류를 수행할 수 있다.The sorting shuttle 170 may be configured in such a manner that a plurality of sorting shuttles 170 may be configured to classify and load devices classified by several classes. Each sorting shear may be provided with a plurality of loading grooves so that a plurality of devices can be loaded. Meanwhile, each sorting shuttle may have a different loading position depending on the overall loading condition of the sorting shuttle. For example, when one sorting shuttle is moved to the user tray, it can be loaded onto another sorting shuttle without stopping the operation. Therefore, classification is performed while appropriately changing the loading position for each class without waiting for the return of the sorting shuttle, so that classification can be continuously performed without stopping the operation of the hand 110.
핸드(110)는 전술한 바와 같이 디바이스를 픽업하여 이송하고 트레이 또는 셔틀에 적재할 수 있도록 구성된다. The hand 110 is configured to be able to pick up and transport the device and load it on a tray or shuttle as described above.
이하에서는 도 12a, 12b, 12c, 13a, 13b 및 13c를 참조하여 본 발명에 따른 테스트 핸들러의 언로딩시 작동에 대하여 상세히 설명하도록 한다.Hereinafter, with reference to FIGS. 12a, 12b, 12c, 13a, 13b, and 13c, an operation when unloading the test handler according to the present invention will be described in detail.
도 12a, 12b, 12c, 13a, 13b 및 13c는 언로딩 사이트에서 테스트 트레이(130)의 이동이 나타난 작동상태도이다. 도 12a를 참조하면, 에 도시된 바와 같이 앞서 제1 테스트 트레이(131)의 후반부가 인서트 개방유닛에 위치하여 언로딩이 완료된다. 한편, 제1 테스트 트레이(131)의 후반부에서 디바이스의 언로딩이 수행되는 동안 반전기(140)에서는 디바이스가 적재된 제2 테스트 트레이(132)가 적재된다. 이후 도 12b를 참조하면, 제1 테스트 트레이(131)의 배출을 위해 반전부에서 제1 테스트 트레이(131) 이송부가 오른쪽으로 이동하면서 제2 테스트 트레이(132)를 이동시킨다. 따라서 제1 테스트 트레이(131)는 제2 테스트 트레이(132)에 의해 지지되면서 인서트 개방 모듈(190) 밖으로 밀려나게 된다. 여기서 제1 테스트 트레이(131) 이송부는 제2 테스트 트레이(132)의 길이의 절반만 우선적으로 이동시킨다. 이때 제2 테스트 트레이(132)의 분할영역(Ad)중 전반부는 인서트 개방 모듈(190)에 위치하게 되며, 후반부는 반전기(140)에 위치하게 된다. 제2 테스트 트레이(132)의 전반부가 인서트 개방 모듈(190)에 위치함과 동시에 인서트 개방 모듈(190)이 작동하여 전반부에 위치하는 복수의 인서트를 개방하게 된다. 이후 핸드(110)는 디바이스를 픽업하여 분류한다. 한편, 제1 테스트 트레이(131)는 제2 테스트 트레이(132) 이송유닛에 의해 로딩 사이트 측으로 이동될 수 있다(미도시). 12a, 12b, 12c, 13a, 13b and 13c are operational state diagrams showing the movement of the test tray 130 at the unloading site. Referring to FIG. 12A, as shown in FIG. 12, the second half of the first test tray 131 is positioned in the insert opening unit to complete unloading. Meanwhile, while the device is unloaded in the second half of the first test tray 131, the second test tray 132 in which the device is loaded is loaded in the inverter 140. Thereafter, referring to FIG. 12B, in order to discharge the first test tray 131, the second test tray 132 is moved while the transfer unit of the first test tray 131 moves to the right from the inversion part. Accordingly, the first test tray 131 is supported by the second test tray 132 and is pushed out of the insert opening module 190. Here, the transfer unit of the first test tray 131 preferentially moves only half of the length of the second test tray 132. At this time, the first half of the divided area Ad of the second test tray 132 is positioned in the insert opening module 190 and the second half is positioned in the inverter 140. The first half of the second test tray 132 is positioned on the insert opening module 190 and the insert opening module 190 is operated to open a plurality of inserts positioned on the first half. Thereafter, the hand 110 picks up and classifies the device. Meanwhile, the first test tray 131 may be moved to the loading site side by the transfer unit of the second test tray 132 (not shown).
이후 도 12c를 참조하면, 제2 테스트 트레이(132)의 전반부에서 모든 디바이스가 분류된 경우 제1 테스트 트레이 이송 유닛(145)이 작동하여 제2 테스트 트레이(130)의 후반부를 인서트 개방 모듈(190)에 위치시킨다. 이때에도 인서트 개방 모듈(190)이 작동하여 인서트의 개방이 이루어 질 수 있다.Thereafter, referring to FIG. 12C, when all devices are sorted in the first half of the second test tray 132, the first test tray transfer unit 145 is operated, and the insert opening module 190 is operated at the second half of the second test tray 130. ). Even at this time, the insert opening module 190 is operated so that the insert can be opened.
이때, 도 13a를 참조하면, 제2 테스트 트레이(132)에서 디바이스의 분류가 이루어짐과 동시에 반전기(140)에서는 다음 테스트 트레이(130)를 준비하게 된다. 반전기(140)는 수직방향으로 반전되며, 버퍼 챔버로부터 상승하는 제3 테스트 트레이(133)를 견인핀(149)으로 지지한다. 이후 도 13b를 참조하면, 제1 테스트 트레이 이송 유닛(145)을 구동시켜 제3 테스트 트레이(133)를 반전기(140) 내부로 완전히 적재시킨다. 한편 반전기(140)의 작동과 별도로 제2 테스트 트레이(132)에서는 여전히 디바이스의 분류가 이루어질 수 있다. 이후 도 13c를 참조하면, 반전기(140)를 반 시계방향으로 90도 회전시켜 제3 테스트 트레이(133)를 준비상태로 대기시킨다. 한편, 디바이스의 분류작업이 반전기(140)의 테스트 트레이(130) 반전 동작보다 많은 시간이 소요되므로 충분히 다음 테스트 트레이(130)를 연속적으로 인서트 개방 모듈(190)에 공급할 수 있게 된다. 이후 작동은 도 12a 내지 도 13c까지 반복적으로 수행될 수 있다.In this case, referring to FIG. 13A, while the device is classified in the second test tray 132, the next test tray 130 is prepared in the inverter 140. The inverter 140 is inverted in a vertical direction and supports the third test tray 133 rising from the buffer chamber with a pull pin 149. Thereafter, referring to FIG. 13B, the first test tray transfer unit 145 is driven to completely load the third test tray 133 into the inverter 140. On the other hand, separate from the operation of the inverter 140, the device may still be classified in the second test tray 132. Thereafter, referring to FIG. 13C, by rotating the inverter 140 counterclockwise by 90 degrees, the third test tray 133 is placed in a ready state. Meanwhile, since the sorting operation of the device takes more time than the inversion operation of the test tray 130 of the inverter 140, the next test tray 130 can be sufficiently supplied to the insert opening module 190 continuously. Thereafter, the operation may be repeatedly performed from FIGS. 12A to 13C.
도 14a 및 도 14b는 본 발명에서 시간에 따른 각 구성요소의 작동을 나타낸 도표이다.14A and 14B are diagrams showing the operation of each component over time in the present invention.
도 14a를 참조하면, 테스트 트레이(130) 단위로 수행되는 기존 장치에서의 작동에 관한 도표이다. 도시된 바와 같이, 핸드(110)가 테스트 트레이(130)에 남은 마지막 디바이스를 픽업한 이후 빈 테스트 트레이(130)는 인서트 개방 모듈(190)의 외부로 배출되고 새로운 테스트 트레이(130)가 인서트 개방 모듈(190)의 내측으로 유입된다. 이때 새로운 테스트 트레이(130)로 교체시에 소요되는 시간은 핸드(110)가 마지막 디바이스(20)를 픽업하여 분류하고 다시 복귀하여 대기상태로 돌아오는 시간보다 훨씬 큰 시간이 소요된다. 즉 이 시간차이만큼 분류작업에 time loss가 발생한다.Referring to FIG. 14A, it is a diagram of an operation in an existing device performed in units of the test tray 130. As shown, after the hand 110 picks up the last device remaining in the test tray 130, the empty test tray 130 is discharged to the outside of the insert opening module 190, and a new test tray 130 is opened. It flows into the inside of the module 190. At this time, the time required for replacement with the new test tray 130 is much larger than the time for the hand 110 to pick up the last device 20, sort it, and return to the standby state. That is, a time loss occurs in the classification by this time difference.
그러나 도 14b를 참조하면, 테스트 트레이(130)를 테스트 트레이(130)가 진행하는 방향에 따라 복수로 분할되어 분류가 진행되므로 핸드(110)의 대기시간을 최소화 할 수 있다. 핸드(110)가 테스트 트레이(130)로부터 마지막 디바이스를 픽업한 이후 인서트 개방 모듈(190)이 하강하게 되며, 테스트 트레이(130)가 이동하게 된다. 테스트 트레이(130)의 이동 중 핸드(110)는 픽업했던 디바이스를 분류하고 복쉬하여 픽업 준비상태로 대기한다. 이때 테스트 트레이(130)는 전반부에서 후반부, 후반부에서 다음 테스트 트레이(130)의 전반부로 절반씩 이동한 뒤 인서트 개방 모듈(190)이 작동하여 인서트를 개방하게 된다. 따라서 테스트 트레이(130)의 이동중 발생하는 핸드(110)의 대기시간을 최소화 할 수 있게 된다. 다른 측면으로, 도 14a와 같이 한번에 테스트 트레이(130)를 모두 이동시키는 경우 핸드(110)는 마지막 디바이스의 분류 동작을 한번만 수행가능하며, 다음 트레이가 공급될 때 까지 대기하게 되는 비효율적인 측면이 있다. 그러나 도 14b와 같이 본 발명은 하나의 테스트 트레이(130)의 모든 분류가 끝나기까지 절반씩 두 번 이동하게 되며, 두 번 이동시에 핸드(110)는 두 번의 동작을 수행할 수 있어 time loss를 최소화 시킬 수 있다.However, referring to FIG. 14B, since the test tray 130 is divided into a plurality according to the direction in which the test tray 130 proceeds and classification proceeds, the waiting time of the hand 110 can be minimized. After the hand 110 picks up the last device from the test tray 130, the insert opening module 190 descends, and the test tray 130 moves. During the movement of the test tray 130, the hand 110 sorts and doubles the devices that have been picked up and waits in a pickup ready state. At this time, the test tray 130 moves half by half from the first half to the second half and from the second half to the first half of the next test tray 130, and then the insert opening module 190 operates to open the insert. Therefore, it is possible to minimize the waiting time of the hand 110 that occurs during the movement of the test tray 130. On the other hand, when moving all the test trays 130 at once as shown in FIG. 14A, the hand 110 can perform the sorting operation of the last device only once, and there is an inefficient aspect of waiting until the next tray is supplied. . However, as shown in FIG. 14B, the present invention moves twice by half until all sorting of one test tray 130 is completed, and when moving twice, the hand 110 can perform two operations, thereby minimizing time loss I can make it.
전술한 바와 같이 본 발명은 테스트 트레이(130)에서 분류시 분할영역(Ad)으로 구분하고 분할영역(Ad) 단위로 테스트 트레이(130)를 이송하고 분류를 수행하므로 핸드(110)의 분류 대기 시간을 최소화 할 수 있다. 따라서 분류의 효율을 극대화 할 수 있는 효과가 있다.As described above, the present invention divides the test tray 130 into divided areas (Ad) when classifying in the test tray 130, transfers the test tray 130 in units of divided areas (Ad), and performs classification, so that the hand 110's classification waiting time Can be minimized. Therefore, there is an effect that can maximize the efficiency of classification.

Claims (14)

  1. 디바이스를 선택적으로 고정하도록 구성되는 복수의 인서트가 구비된 테스트 트레이;A test tray provided with a plurality of inserts configured to selectively fix the device;
    상기 테스트 트레이의 분할영역에 배치된 복수의 인서트를 개방할 수 있도록 구성되는 인서트 개방 모듈; An insert opening module configured to open a plurality of inserts disposed in a divided area of the test tray;
    상기 복수의 인서트로부터 상기 디바이스를 픽업하여 소팅할 수 있도록 구성되는 핸드; 및A hand configured to pick up and sort the device from the plurality of inserts; And
    상기 분할영역에서 디바이스의 분류가 완료된 경우 다른 분할영역에 배치된 복수의 인서트를 개방하도록 상기 인서트 개방 모듈 및 핸드를 제어하는 제어부를 포함하는 전자부품 테스트 핸들러.And a control unit for controlling the insert opening module and the hand so as to open a plurality of inserts arranged in other divided regions when classification of devices in the divided regions is completed.
  2. 제1 항에 있어서,The method of claim 1,
    상기 테스트 트레이는 평면상으로 분할된 적어도 두 개의 분할영역을 포함하여 구성되며, The test tray is configured to include at least two divided areas divided in a plane,
    상기 제어부는 상기 분할영역별로 순차적으로 디바이스의 소팅이 이루어질 수 있도록 상기 인서트 개방 모듈 및 상기 핸드를 제어하는 것을 특징으로 하는 전자부품 테스트 핸들러.And the control unit controls the insert opening module and the hand to sequentially sort devices for each of the divided regions.
  3. 제2 항에 있어서,The method of claim 2,
    상기 분할영역은 상기 테스트 트레이가 상기 인서트 개방 모듈을 통과하는 방향으로 분할된 두 개의 분할영역으로 구성되는 것을 특징으로 하는 전자부품 테스트 핸들러.Wherein the divided area comprises two divided areas divided in a direction in which the test tray passes through the insert opening module.
  4. 제3 항에 있어서,The method of claim 3,
    상기 인서트 개방 모듈은,The insert opening module,
    상기 테스트 트레이의 복수의 인서트 중 절반을 동시에 개방할 수 있도록 상기 테스트 트레이의 절반 크기인 분할영역에 대응되어 형성되는 것을 특징으로 하는 전자부품 테스트 핸들러.The electronic component test handler, characterized in that it is formed to correspond to a divided area that is half the size of the test tray so that half of the plurality of inserts of the test tray can be simultaneously opened.
  5. 제4 항에 있어서,The method of claim 4,
    상기 제어부는,The control unit,
    상기 분할영역 중 상기 인서트 개방 모듈으로 먼저 진입한 전반 분할영역부터 디바이스가 픽업될 수 있도록 상기 인서트 개방 모듈 및 상기 핸드를 제어하는 것을 특징으로 하는 전자부품 테스트 핸들러.And controlling the insert opening module and the hand so that a device can be picked up from a first half of the divided regions, which first enters the insert opening module.
  6. 제5 항에 있어서, The method of claim 5,
    상기 인서트 개방 모듈은 평면위치가 고정되며,The insert opening module has a fixed flat position,
    상기 테스트 트레이가 이동하면서 후반 분할영역이 상기 인서트 개방 모듈으로 위치하여 상기 디바이스의 픽업이 이루어지도록 제어되는 전자부품 테스트 핸들러.The electronic component test handler is controlled so that the device is picked up by moving the test tray so that a second half portion is positioned as the insert opening module.
  7. 제6 항에 잇어서,Following paragraph 6,
    상기 테스트 트레이를 상기 인서트 개방 모듈을 경유하여 이송시키는 테스트 트레이 이송 유닛을 더 포함하는 것을 특징으로 하는 전자부품 테스트 핸들러.And a test tray transfer unit transferring the test tray via the insert opening module.
  8. 제7 항에 있어서,The method of claim 7,
    상기 인서트 개방 모듈의 전단에 구비되며,It is provided at the front end of the insert opening module,
    상기 테스트 트레이의 시험을 수행하는 테스트 챔버로부터 수직방향으로 인수받은 테스트 트레이를 수평방향으로 회전시킬 수 있도록 구성되는 반전기를 더 포함하며,Further comprising an inverter configured to rotate in the horizontal direction the test tray received in the vertical direction from the test chamber performing the test of the test tray,
    상기 테스트 트레이 이송 유닛은 상기 반전기에 구비되는 것을 특징으로 하는 전자부품 테스트 핸들러.The test tray transfer unit is an electronic component test handler, characterized in that provided in the inverter.
  9. 제8 항에 있어서,The method of claim 8,
    상기 제어부는The control unit
    상기 반전기로부터 상기 인서트 개방 모듈으로 상기 테스트 트레이를 이송시킬 때 상기 분할영역 단위로 진입될 수 있도록 상기 테스트 트레이 이송 유닛을 제어하는 것을 특징으로 하는 전자부품 테스트 핸들러.And controlling the test tray transfer unit so that when the test tray is transferred from the inverter to the insert opening module, the test tray transfer unit can be entered in units of the divided areas.
  10. 제9 항에 있어서,The method of claim 9,
    상기 반전기는,The inverter,
    상기 반전기로부터 인출되어 나오는 테스트 트레이가 디바이스의 픽업이 완료된 테스트 트레이를 상기 인서트 개방 모듈의 외부로 밀어낼 수 있도록 구성되는 것을 특징으로 하는 전자부품 테스트 핸들러.The electronic component test handler, characterized in that the test tray, which is drawn out from the inverter, is configured to push the test tray on which pickup of the device is completed to the outside of the insert opening module.
  11. 제10 항에 있어서,The method of claim 10,
    상기 반전기에 구비되며 상기 반전기 내부에 적재된 테스트 트레이를 이동시킬 수 있도록 구성되는 제1 테스트 트레이 이송 유닛; 및A first test tray transfer unit provided in the inverter and configured to move a test tray loaded in the inverter; And
    상기 인서트 개방 모듈의 외부로 배출된 빈 테스트 트레이를 로딩 사이트 측으로 이송시킬 수 있도록 구성되는 제2 테스트 트레이 이송 유닛을 포함하는 것을 특징으로 하는 전자부품 테스트 핸들러.And a second test tray transfer unit configured to transfer the empty test tray discharged to the outside of the insert opening module to a loading site.
  12. 제6 항에 있어서,The method of claim 6,
    상기 인서트 개방 모듈은 상하방향으로 이격되어 형성되는 마스크 및 프리사이저를 포함하여 구성되며,The insert opening module includes a mask and a presizer formed to be spaced apart in the vertical direction,
    상기 마스크는 상기 핸드의 일측이 통과하여 상기 테스트 트레이에 적재되어 있는 디바이스를 픽업할 수 있도록 복수의 개구가 형성되며,The mask has a plurality of openings so that one side of the hand can pass through and pick up a device loaded on the test tray,
    상기 프리사이저는 각 인서트의 하면을 지지하면서 상승될 수 있도록 구성되는 복수의 지지핀을 포함하는 것을 특징으로 하는 전자부품 테스트 핸들러.The electronic component test handler, wherein the presizer includes a plurality of support pins configured to be raised while supporting a lower surface of each insert.
  13. 제12 항에 있어서,The method of claim 12,
    상기 프리사이저는 상기 인서트 및 상기 테스트 트레이를 지지하면서 상기 인서트를 상기 테스트 트레이 내부에서 밀착시킬 수 있도록 구성되는 것을 특징으로 하는 전자부품 테스트 핸들러.The electronic component test handler, wherein the presizer is configured to support the insert and the test tray and to make the insert in close contact with the inside of the test tray.
  14. 제6 항에 있어서,The method of claim 6,
    상기 테스트 트레이는 메모리 칩 또는 메모리 모듈이 수용될 수 있도록 구성되는 것을 특징으로 하는 전자부품 테스트 핸들러.The test tray is an electronic component test handler, characterized in that configured to accommodate a memory chip or memory module.
PCT/KR2020/004721 2019-04-15 2020-04-08 Electronic component test handler WO2020213874A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2019-0043945 2019-04-15
KR1020190043945A KR102249305B1 (en) 2019-04-15 2019-04-15 Electronic device test handler

Publications (1)

Publication Number Publication Date
WO2020213874A1 true WO2020213874A1 (en) 2020-10-22

Family

ID=72838323

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2020/004721 WO2020213874A1 (en) 2019-04-15 2020-04-08 Electronic component test handler

Country Status (2)

Country Link
KR (1) KR102249305B1 (en)
WO (1) WO2020213874A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220189805A1 (en) * 2020-12-15 2022-06-16 Rokko Systems Pte Ltd Method and apparatus for ic unit singulation and sorting
TWI817370B (en) * 2021-03-26 2023-10-01 韓商泰克元股份有限公司 Handler for testing electronic components
CN117079709A (en) * 2023-09-07 2023-11-17 广东长兴半导体科技有限公司 Flash memory test equipment and test method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080008661A (en) * 2006-07-20 2008-01-24 (주)테크윙 Test handler
KR20100013057A (en) * 2008-07-30 2010-02-09 세크론 주식회사 Clamping unit and apparatus for transferring a device having the same
KR20150096912A (en) * 2014-02-17 2015-08-26 (주)테크윙 Handler for semiconductor device test and operating method thereof
KR20150129904A (en) * 2014-05-12 2015-11-23 (주)테크윙 Test handler and electronic device test method using the same
KR20180067811A (en) * 2016-12-13 2018-06-21 주식회사 에스에프에이 Test System for Memory Card

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101734397B1 (en) 2015-05-18 2017-05-12 주식회사 아테코 Apparatus for loading electronic component for testing and for testing electronic component

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20080008661A (en) * 2006-07-20 2008-01-24 (주)테크윙 Test handler
KR20100013057A (en) * 2008-07-30 2010-02-09 세크론 주식회사 Clamping unit and apparatus for transferring a device having the same
KR20150096912A (en) * 2014-02-17 2015-08-26 (주)테크윙 Handler for semiconductor device test and operating method thereof
KR20150129904A (en) * 2014-05-12 2015-11-23 (주)테크윙 Test handler and electronic device test method using the same
KR20180067811A (en) * 2016-12-13 2018-06-21 주식회사 에스에프에이 Test System for Memory Card

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220189805A1 (en) * 2020-12-15 2022-06-16 Rokko Systems Pte Ltd Method and apparatus for ic unit singulation and sorting
US11791183B2 (en) * 2020-12-15 2023-10-17 Rokko Systems Pte Ltd Method and apparatus for IC unit singulation and sorting
TWI817370B (en) * 2021-03-26 2023-10-01 韓商泰克元股份有限公司 Handler for testing electronic components
CN117079709A (en) * 2023-09-07 2023-11-17 广东长兴半导体科技有限公司 Flash memory test equipment and test method

Also Published As

Publication number Publication date
KR20200121189A (en) 2020-10-23
KR102249305B1 (en) 2021-05-07

Similar Documents

Publication Publication Date Title
WO2020213874A1 (en) Electronic component test handler
WO2022035133A1 (en) Process automation system for determining battery cell grades and integrating battery module assembly process
WO2016068491A1 (en) Device for transferring cell jig of tabbing device
WO2020251127A1 (en) Inspection equipment and inspection method of secondary battery
JPH10232262A (en) Testing conveyor for semiconductor device
WO2020213873A1 (en) Electronic component test handler having flying scan function
WO2019240379A1 (en) Mobile temperature measuring instrument for secondary battery and charging/discharging device comprising same
WO2012144703A1 (en) Led chip classifying apparatus
WO2020213961A1 (en) Tray transfer apparatus
WO2020213878A1 (en) Stacker of electronic component test handler and electronic component test handler comprising same
WO2020213880A1 (en) Stacker of electronic component test handler, and electronic component test handler including same
WO2019203544A1 (en) Device handler
WO2020213876A1 (en) Electronic component test handler having test tray vision inspection function
WO2022050453A1 (en) Cartridge aligner apparatus for multi prober
WO2020213879A1 (en) Electronic component test handler having hand teaching function and hand teaching method using same
WO2020213960A1 (en) Electronic component test handler
KR20000053458A (en) Testing apparatus for substrate of electronic device
JP5282032B2 (en) Tray storage device, electronic component testing device, and tray storage method
WO2021006627A1 (en) Apparatus for inspecting element
KR102227346B1 (en) Electronic device test handler
WO2020213923A1 (en) Semiconductor device test apparatus
WO2023239219A1 (en) Battery cell inspection system
JP2002255315A (en) Tray accommodation device
WO2024172548A1 (en) Electrode plate inspection device and electrode plate inspection method
WO2019177326A1 (en) Device inspecting apparatus

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20791754

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20791754

Country of ref document: EP

Kind code of ref document: A1