WO2022050453A1 - Cartridge aligner apparatus for multi prober - Google Patents

Cartridge aligner apparatus for multi prober Download PDF

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Publication number
WO2022050453A1
WO2022050453A1 PCT/KR2020/011914 KR2020011914W WO2022050453A1 WO 2022050453 A1 WO2022050453 A1 WO 2022050453A1 KR 2020011914 W KR2020011914 W KR 2020011914W WO 2022050453 A1 WO2022050453 A1 WO 2022050453A1
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WO
WIPO (PCT)
Prior art keywords
cartridge
contact
prober
base plate
transfer
Prior art date
Application number
PCT/KR2020/011914
Other languages
French (fr)
Korean (ko)
Inventor
남경태
모승기
이승준
이광희
추성원
Original Assignee
한국생산기술연구원
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Application filed by 한국생산기술연구원 filed Critical 한국생산기술연구원
Publication of WO2022050453A1 publication Critical patent/WO2022050453A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0466—Details concerning contact pieces or mechanical details, e.g. hinges or cams; Shielding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Definitions

  • the present invention relates to an aligner device for combining a probe card, a wafer and an individual chuck into a cartridge or disassembling the cartridge in a multi prober.
  • wafers In general, a single prober method and a multi prober method are known as a system for inspecting semiconductor wafers (hereinafter referred to as wafers).
  • the single prober method electrically tests one wafer at a time. After fixing one probe card on the stage, a number of wafers are put into the stage one by one to perform the test process.
  • the multi-prover method a plurality of cartridges are individually loaded into multi-stage channels provided in the inspection unit through a method of converting a probe card and a wafer into cartridges, unlike the single prober method in which a wafer is tested one by one with a prober probe. Then, it is a method to test several wafers at once at the same time.
  • the multi-probe system is a probe card 10 having a plurality of probes, which are each component that is set and incorporated into a cartridge, a wafer 20 that is an inspection object, and an individual chuck 30.
  • the cassette 100 is individually loaded and temporarily stored, and an aligner 200 that combines the components into one set to make the cartridge 1 or disassembles the tested cartridge 1 and separates the components into components ), a multi-stage channel space 310 is provided, and the cartridge 1 incorporated in the aligner 200 is individually loaded into the channel space by a robot handler (not shown), and then a test process for a plurality of wafers is performed. It consists of a configuration including the inspection unit 300 that is performed at the same time.
  • the body chamber 210 forming the inner space of the aligner includes an alignment robot 220 that transports the individual chuck 30 on which the wafer 20 is mounted in the x-axis, y-axis, z-axis and ⁇ -axis, and , between the aligner and the inspection unit is provided with a standby unit 400 that temporarily waits inside the standby chamber before the cartridge is charged into the inspection unit.
  • the cartridge 1 including the wafer, which has undergone the test process in the inspection unit is re-supplied to the body chamber of the aligner by the robot handler so that the probe card, the wafer, and the individual chuck are separated from each other in the aligner.
  • the probe card, wafer and individual chuck are combined into one cartridge and combined, or one cartridge is individually disassembled for each component after wafer inspection.
  • a separate interface means was needed to smoothly and safely reciprocate the cartridge to the pickup position of the robot handler that moves the cartridge into and out of the inspection unit.
  • the present invention is to solve the problems as described above, the purpose of which is to reciprocate the cartridge between the position where the cartridge is merged or the cartridge is disassembled and the pickup position of the robot handler that advances the cartridge.
  • An object of the present invention is to provide a cartridge aligner device for a multi prober that performs a function of fixing a cartridge in place along with a function.
  • a preferred embodiment of the present invention includes: a body chamber having a working space for combining a probe card, a wafer, and an individual chuck into a cartridge or disassembling the cartridge; an upper chamber provided on the upper plate of the main chamber through which the cartridge is disposed, the upper chamber having an inner space in which the cartridge is moved and accommodated; a locking module for releasing by clamping or unclamping a portion of the cartridge located in the arrangement; Including, the cartridge unclamped in the locking module is supplied to the inspection unit by the robot handler or the cartridge inspected in the inspection unit is supplied to the upper chamber by the robot handler and clamped and fixed in the locking module, multi-pro A cartridge aligner device for burrs is provided.
  • a first transfer for transferring the cartridge so that the cartridge is selectively positioned at a first position corresponding to the disposition portion, and a second position spaced apart from the first position by a predetermined distance so that the cartridge can be discharged to the outside. module; and a second transfer module for moving the cartridge so that the cartridge is selectively positioned at the second position and a third position for a robot handler for moving the cartridge into and out of the channel space of the inspection unit to pick up the cartridge can do.
  • the locking module includes a fixed clamper and a movable clamper that is moved relative to the fixed clamper, and the outer rim of the base plate of the probe card constituting the cartridge is positioned between the fixed clamper and the movable clamper. It can be clamped or unclamped.
  • the first transfer module includes a first driving motor that rotates a first screw shaft of a predetermined length provided perpendicular to the upper chamber in a forward or reverse direction, and a female screw part screwed with the first screw shaft. It may include a rack guide provided in the first transfer block provided with a guide groove in which a portion of the first transfer block and the cartridge correspondingly inserted according to the rotational direction of the first screw shaft moving up and down.
  • the upper plate may be provided with at least one leveler in contact with a part of the cartridge and the flat surface so as to check the flatness of the cartridge at the first position.
  • the second transfer module includes a second drive motor for rotating a second screw shaft of a predetermined length horizontally provided in the upper chamber in a forward or reverse direction, and a female screw screw-coupled to the second screw shaft. It may include a second transfer block horizontally moved according to the rotational direction of the second screw shaft, and a contact guide provided in the second transfer block so that a portion of the cartridge and the lower end are in contact with and restrained.
  • the contact end of the contact guide is fixedly installed on the second transfer block of the second transfer module so as to be in contact with the base plate of the cartridge moving upwards in a stationary state, or the base plate of the cartridge is stopped after being moved upwards; It can be moved up and down by a driving source so as to be in contact.
  • the contact end of the contact guide is formed as a locking part that is recessed into a recess in the upper surface of the base plate of the cartridge or comes into contact with a locking part protruding into a convex part to generate a locking force, or on the upper surface of the base plate of the cartridge. It may be made of a friction surface that is in contact with a friction surface provided to have a predetermined roughness and generates a friction force.
  • the first transfer module is disposed at each line of both sides of the rim of the cartridge, and each corner of the upper chamber corresponding to the rear end, and a plurality of the first transfer module may be arranged in a set of four in the upper chamber.
  • the plurality of first transfer modules may be synchronously controlled when the cartridge is vertically upwardly moved from the first position to the second position.
  • the plurality of first transfer modules may be asynchronously controlled when a portion of the cartridge is brought into contact with the leveler provided on the upper plate while moving the cartridge down from the second position to the first position.
  • the cartridge which is an object to be merged and an object to be disassembled, can be safely reciprocally transferred between the aligner and the robot handler, thereby increasing work productivity.
  • the entire system can be simplified by solving the transfer interface between each module in the path of integrating the cartridge in the body chamber of the aligner and mounting it in the channel of the inspection unit using a robot handler.
  • a plurality of transfer modules can be operated in synchronous mode when the cartridge is moved upwards, so there is no need for a separate horizontal flat device. By doing so, the cartridge can be easily fixed with only the rack guide without the need to add a separate locking device, thereby simplifying the overall device structure.
  • FIG. 1 is a schematic diagram showing a general multiprobe system.
  • FIG. 2 is a schematic diagram illustrating a cartridge aligner device for a multi prober according to an embodiment of the present invention.
  • FIG. 3 is a block diagram of a cartridge aligner device for a multi prober, viewed from the front, in a state in which a cartridge is positioned at a first position according to an embodiment of the present invention.
  • FIG. 4 is a block diagram of the cartridge aligner device for a multi prober as viewed from the front in a state in which the cartridge is positioned at a second position according to an embodiment of the present invention.
  • FIG. 5 is a block diagram of a cartridge aligner device for a multi prober, viewed from the side, in a state in which the cartridge is positioned at a first position according to an embodiment of the present invention.
  • FIG. 6 is a block diagram of the cartridge aligner device for a multi prober according to an embodiment of the present invention, viewed from the side, in a state in which the cartridge is positioned at the second position.
  • FIG. 7 is a plan view illustrating a cartridge aligner device for a multi prober according to an embodiment of the present invention.
  • FIG. 8 is a view showing a state in which the base plate is in contact with the leveler when the cartridge is assembled and disassembled in the cartridge aligner for a multi prober according to an embodiment of the present invention
  • the cartridge aligner apparatus 1000 for a multi prober includes a body chamber 210, an upper chamber 230, a locking module 240, and a first transfer module ( 250 ) and a second transfer module 260 .
  • the body chamber 210 sequentially stacks the probe card 10, the wafer 20, and the individual chuck 30 to perform the inspection process in the inspection unit.
  • a working space is provided for individually disassembling the probe card 10 , the wafer 20 , and the individual chuck 30 from the cartridge after combining them into a single cartridge 1 or inspecting the wafer.
  • the working space of the body chamber 210 may include an alignment robot 220 that transports the individual chuck 30 on which the wafer 20, which is the inspection object, is mounted in the x-axis, y-axis, z-axis, and ⁇ -axis. .
  • the upper chamber 230 is provided on the upper plate 212 of the main body chamber 210 in which the arrangement part 214 in which the cartridge, which is the object to be merged and disassembled, is disposed, as shown in FIGS. 2, 3 and 4 . can be
  • the cartridge that has completed the electrical test process in the inspection unit is temporarily accommodated or the probe card 10 , the wafer 20 and the individual chuck 30 are temporarily accommodated in the main chamber 210 .
  • the arrangement unit 214 has a size so that the probe card 10, the wafer 20, and the individual chuck 30 can be arranged without interference when the cartridge is assembled and disassembled, and is placed on the upper plate 212 toward the robot handler. It is preferable to be provided in an open form.
  • the locking module 240 clamps and restrains a part of the cartridge 1 located in the arrangement unit, or unclamps and releases it to release at least the left and right upper plates of the body chamber. It may be provided as a pair disposed on both sides, respectively.
  • a part of the cartridge clamped or unclamped by the locking module 240 may be the outer edge of the base plate 11 on which the probe card constituting the cartridge is provided on the lower surface.
  • the locking module 240 includes a fixed clamper 241 and a movable clamper 242 that is moved relative to the fixed clamper, and between the fixed clamper and the movable clamper of the base plate 11 which is a part of the cartridge. As the outer edge is positioned, it is clamped to constrain it or unclamped to release it.
  • the outer rim of the base plate 11 provided on the lower surface of the probe card 10 is clamped by a locking module and firmly restrained, thereby combining the probe card 10, the wafer 20 and the individual chuck 30.
  • the process of uniting into one cartridge and the process of separately separating and disassembling the probe card, wafer and individual chuck from the cartridge after wafer inspection can be stably performed.
  • the locking module 240 may be formed of a moving structure that is horizontally moved so as to be close to or spaced apart from both sides of the base plate of the probe card by a driving source (not shown).
  • the cartridge unclamped in the locking module is discharged through the entrance and exit of the upper chamber by the robot handler provided between the body chamber and the inspection unit and supplied to the inspection unit, or the cartridge inspected by the inspection unit is the robot handler is supplied to the inner space through the entrance and exit of the upper chamber by the locking module can be clamped and fixed.
  • the upper chamber includes a separate transport module for transporting the cartridge to a position for picking up the cartridge by a robot handler for moving the cartridge into and out of the channel space of the inspection unit.
  • the robot handler may perform a function of transporting the cartridge, which is an object to be merged and disassembled, between the upper chamber and the inspection unit, and may perform a function of transporting the probe card temporarily stored in the cassette, but is not limited thereto. It can be used with a separate dedicated robot handler that transports only the components temporarily stored in the cassette.
  • the first transfer module 250 includes a first corresponding to the arrangement part 214 formed in the upper plate 212 of the body chamber 210 . It is to transport the cartridge so that the cartridge is selectively positioned in a second position spaced apart from the first position by a predetermined distance from the first position and the cartridge can be discharged to the outside.
  • the first transfer module 250 may include a first driving motor 251 , a first screw shaft 252 , a first transfer block 253 , and a rack guide 254 .
  • the first driving motor 251 is a motor member that generates a driving force for rotationally driving the first screw shaft 252 having a predetermined length perpendicular to the upper chamber in the forward or reverse direction when power is applied.
  • the first transfer block 253 has a female threaded portion screw-coupled to the first screw shaft through the body, and a guide rod is slidably assembled in guide holes formed through the female screw portion on both sides of the first screw shaft. According to the forward rotation or the reverse rotation, along the guide rod fixedly installed in the upper chamber, it rises to a certain height away from the placement unit 214 or descends to approach the placement unit 214 and returns.
  • the rack guide 254 is formed by recessing a guide groove positioned so that the outer rim of the base plate 11 for fixing the probe card 10 constituting the cartridge to the lower surface is inserted and hooked to the first transfer. It is provided in the block 253 .
  • rack guide 254 has been illustrated and described as being fixedly installed on one side of the lower end of the first transfer block, it may be provided as a structure movable vertically with respect to the first transfer block by an actuator not shown.
  • the rack guide 254 has been illustrated and described as having a guide groove having a width equal to or greater than the plate thickness of the base plate, but is not limited thereto. It may be provided with a fixed clamper and a movable clamper to release the restraint.
  • the first transfer block descends directly below the rack guide.
  • the cartridge which is engaged with the outer rim of the base plate, is disposed at a first position corresponding to the arrangement portion of the upper plate.
  • the cartridge disposed in the first position is clamped by the locking module to perform the disassembly process or the assembly process is firmly fixed.
  • the locking module 240 is unclamped to release the restraint on the base plate, which is a part of the cartridge.
  • the cartridge disposed at a second position spaced apart from the first position corresponding to the arrangement unit is stopped and waits until it is horizontally moved to a third position where pickup of the robot handler is possible by a second transfer module 260 to be described later. .
  • the upper plate 212 forming the opening of the arrangement part 214 has the lower surface of the base plate 11, which is a part of the cartridge, so as to check the flatness of the cartridge 1, which is an object to be disassembled or an object to be merged at the first position.
  • At least one leveler 270 to which the flat upper surface is in contact may be provided.
  • the leveler 270 is a metal provided on the upper plate through a horizontal flatness check in advance with respect to the upper surface, which is a surface in contact with the lower surface of the base plate, which is a part of the cartridge, so as to confirm the horizontal state of the cartridge, which is an object to be disassembled or an object to be merged. It is a block body.
  • the leveler 270 is preferably fixedly installed to face and correspond to the base plate 11 of the cartridge in the vicinity of the arrangement portion 214 that is opened in the upper plate.
  • the second transfer module 260 is spaced apart from the first position by a predetermined distance from the second position in which the cartridge can be discharged to the outside; It is possible to move the cartridge within the upper chamber so that a robot handler that moves the cartridge 1 into and out of the channel space of the inspection unit can selectively position the cartridge at a third position for picking up the cartridge.
  • the second transfer module 260 may include a second driving motor 261 , a second screw shaft 262 , a second transfer block 263 , and a contact guide 264 .
  • the second driving motor 261 is a motor member that generates a driving force for rotationally driving the second screw shaft 262 of a predetermined length horizontally provided in the upper chamber in the forward or reverse direction when power is applied.
  • the second transfer block 263 is slidably assembled in contact with the upper surface of the ceiling surface of the upper chamber and the upper surface of the upper chamber by forming a female threaded portion screwed with the second screw shaft through the body to rotate the second screw shaft in the forward direction.
  • the robot handler is horizontally moved along the ceiling surface of the upper chamber so as to move away from the inlet 234 corresponding to the robot handler or move horizontally so as to be close to the inlet and outlet.
  • the entry/exit opening 234 is an opening formed in a predetermined size on one side of the chamber to enable pickup of the cartridge by the robot handler.
  • the contact guide 264 is provided on the second transfer block 263 so that the upper surface of the base plate 11, which is a part of the cartridge, and the contact end, which is the lower end, come into contact with each other to generate a locking force to constrain the cartridge.
  • the contact end which is the lower end of the contact guide 264, is fixed to the second transfer block so as to be in contact with the base plate, which is a part of the cartridge, which is moved upward by the driving force of the first driving motor of the first transfer module, in a stationary state.
  • the present invention is not limited thereto, and the contact end of the contact guide 264 is moved upwardly and then a part of the stationary cartridge base plate 11 is in contact with a cylinder and not shown. It may be provided as an operating structure that moves vertically by the same driving source.
  • the contact end which is the lower end of the contact guide 264 in contact with the base plate 11 of the cartridge, is engaged in contact with the engaging portion that is recessed into a recess or protruded with a convex portion at an arbitrary position on the upper surface of the base plate 11. It may be made of a part to be caught for generating a force, or it may be made of a surface to be rubbed that generates a friction force in contact with a friction surface provided to have a predetermined roughness on the upper surface of the base plate 11 .
  • the cartridge disposed at the second position is lowered to the first position without interference with the second transfer module so that the disassembly process or the assembly process can be performed by the first transfer module.
  • the second transfer block moves backward to the right side in the drawing so as to be close to the entrance and exit of the upper chamber, and the cartridge is a robot handler. It is arranged in the third position where the pickup and transfer of the cartridge is possible.
  • first transfer block 253 and the second transfer block 263 are rotated in the forward or reverse direction of the first screw shaft and the second screw shaft by the first drive motor 251 and the second drive motor 261 .
  • first and second transfer blocks are cylinders that are actuators replacing the first and second driving motors and the screw shaft. It may be provided in a configuration connected to the rod end of the member and coupled to the guide rod to reciprocate in vertical and horizontal directions.
  • the first transfer module 250 moves the cartridge upward from the first position to the second position or moves downward from the second position to the first position.
  • This first transfer module 250 is shown in FIG.
  • a plurality of lines may be disposed and provided for each corner of the upper chamber 230 corresponding to each line and rear end of both sides of the edge of the base plate 11, which is a part of the cartridge.
  • a plurality of first transfer modules 250 arranged in a set of four can be synchronously controlled when vertically upwardly moving a cartridge having a base plate constrained to the rack guide 254 from the first position to the second position. there is.
  • the plurality of second transfer modules 250 are provided on the upper plate 212 for opening the base plate arrangement portion while moving the cartridge in which the base plate is restrained by the rack guide 254 from the second position to the first position. It can be controlled asynchronously when making contact with the leveler 270 .
  • Figure 8 (a) shows a single driving method of the first transfer module, while the first screw shaft of the first transfer module is arranged in a single structure at the center of both sides of the cartridge in a single structure, the outer rim of the base plate is a rack
  • the cartridge is vertically moved between the first position and the second position by the driving force of the first driving motor in a state in which it is engaged with the guide groove of the guide 254 .
  • This single driving method is to engage and connect one edge of the base plate to one rack guide 254 at one edge of the cartridge so that it has one contact part, and the base plate of the cartridge descends from the second position to the first position ( 11)
  • the flatness of the base plate is poor when it comes into contact with the upper surface of the leveler 270, one side of the base plate is in line contact with one side of the leveler while the other side of the base plate is not in contact with the other side of the leveler
  • a phenomenon of lifting may occur, and a locking error may occur when clamping and fixing the base plate by the locking module due to this float phenomenon.
  • Figure 8 (b) shows the dual driving method of the first transfer module
  • the first screw shaft of the first transfer module is arranged in a double structure on both sides of both sides of the cartridge
  • the outer rim of the base plate is a rack
  • the cartridge is vertically moved between the first position and the second position by the driving force of the first driving motor in a state in which it is engaged with the guide groove of the guide 254 .
  • This double driving method is to engage and connect one edge of the base plate to the two rack guides 254 at one edge of the cartridge so as to have two contact parts, and the base plate of the cartridge descends from the second position to the first position ( 11) is in contact with the upper surface of the leveler 270, even if the flatness of the base plate is poor, one side and the other side of the base plate 11 are in contact with the one side and the other side of the leveler so that they are in close contact with each other at the same time. Plate lifting phenomenon can be fundamentally prevented.
  • the base plate of the cartridge can be clamped without defective locking by the locking module at the first position corresponding to the arrangement portion, thereby stably performing the coalescing process and the disassembling process of the cartridge.
  • first transfer modules by arranging two first transfer modules on one side edge of the cartridge, and symmetrically on the left and right sides of the cartridge, a total of four first transfer modules are arranged in a double structure to configure the first position in the second position.
  • the first drive motor provided in the four first transfer modules is asynchronously controlled and the base plate of the lowered cartridge is lifted on the upper surface of the leveler. It can be perfectly adhered and contacted without any need.
  • the first transfer module is individually driven in this asynchronous control method, when one side of the base plate is in line contact with one side of the leveler, the driving of the corresponding first driving motor is stopped, and the other side of the first driving motor is driven to the base plate.
  • the other side is brought into contact with the other side of the leveler after the entire area of one side of the base plate is in close contact with the upper surface of the leveler, and in this state, flatness correction for the base plate of the cartridge can be precisely performed.
  • the first transport module disposed on one side of the cartridge has been illustrated and described as being disposed by two, but is not limited thereto, and may be provided with two or more installed numbers according to the size of the cartridge as an object.
  • the cartridge aligner device 1000 for a multi prober having the above configuration transfers the cartridge from the inside of the device to the outside in the order of the first position, the second position, and the third position, or transfers the cartridge to the third position and the second position.
  • the transfer function of transferring from the outside to the inside of the device is stably performed, and at the same time, the fixing function of firmly fixing the cartridge, which is the transfer object, at the first position is performed.
  • the process of separately disassembling the cartridge on which the inspection process of the wafer has been completed at the first position into a probe card, a wafer, and an individual chuck, and a process of combining the probe card, the wafer and the individual chuck into one cartridge are performed. perform stably.
  • the probe card in which the base plate is clamped by the locking module and fixed in position is combined with the individual chuck on which the wafer is seated at the first position corresponding to the arrangement unit to be combined into one cartridge.
  • the cartridge released by unclamping of the locking module drives the first driving motor of the first transfer module in a state in which both edges of the base plate are hooked and connected to the rack guide of the first transfer module, the first transfer block It rises to a certain height from the first position to the second position along with the upward movement and then waits for a stop.
  • the cartridge moved upward by the first transfer module is controlled by setting the height corresponding to the second position in advance so that the cartridge is positioned at a height corresponding to the inlet and the inlet opening formed on one side of the upper chamber in advance. It is preferable to do
  • the cartridge When the second driving motor of the second transfer module is driven in this state, the cartridge is horizontally moved toward the entrance and exit along with the horizontal movement of the second transfer block, and stops at the third position, which is a position where pickup by the robot handler is possible. wait
  • the contact guide of the second transfer module and the base plate of the cartridge are spaced apart from the contact guide by the upward and return operation of the contact guide to obtain restraint. It is preferable to release
  • the cartridge waiting to be stopped at the third position is entered into the inspection channel space of the inspection unit by a robot handler to perform an electrical inspection process on the wafer in a multi-probe method.
  • the cartridge entering the inspection unit and the inspection process for the wafer is completed is horizontally moved from the third position to the second position by the second transfer module in the reverse order of the process sequence, and to the first transfer module It is moved downward from the second position to the first position and is located in the arrangement part.

Abstract

Provided is a cartridge aligner apparatus for a multi prober. The present invention comprises: a main body chamber having a working space for combining a probe card, a wafer, and an individual chuck into a cartridge or disassembling the cartridge; an upper chamber provided on the upper plate of the main body chamber, through which an arrangement part having the cartridge arranged is formed, the upper chamber having an inner space in which the cartridge is moved and accommodated; and a locking module which clamps and restrains a portion of the cartridge located in the arrangement part, or unclamps and releases same, wherein the unclamped cartridge in the locking module is supplied to an inspection unit by a robot handler, or the cartridge that has been inspected in the inspection unit is supplied to the upper chamber by the robot handler and clamped and fixed in the locking module.

Description

멀티 프로버용 카트리지 얼라이너 장치Cartridge Aligner Unit for Multi Prover
본 발명은 멀티 프로버에서 프로브 카드, 웨이퍼 및 개별척을 카트리지로 합체하거나 카트리지를 분해하는 얼라이너 장치에 관한 것이다. The present invention relates to an aligner device for combining a probe card, a wafer and an individual chuck into a cartridge or disassembling the cartridge in a multi prober.
일반적으로 반도체 웨이퍼(이하 웨이퍼이라함.)를 검사하는 시스템에는 싱글 프로버 방식과 멀티 프로버 방식이 알려져 있다. In general, a single prober method and a multi prober method are known as a system for inspecting semiconductor wafers (hereinafter referred to as wafers).
싱글 프로버 방식은 한번에 1장의 웨이퍼를 전기시험하는 방식으로, 하나의 프로브 카드를 스테이지 위에 고정시킨 다음, 다수의 웨이퍼를 1장씩 스테이지로 투입하여 테스트공정을 수행하는 것이다.The single prober method electrically tests one wafer at a time. After fixing one probe card on the stage, a number of wafers are put into the stage one by one to perform the test process.
그리고, 멀티 프로버 방식은 프로버의 탐침을 가지고 웨이퍼를 한장씩 테스트하는 싱글 프로버 방식과 다르게 프로브 카드와 웨이퍼를 카트리지화하는 방식을 통해 복수의 카트리지를 검사 유닛에 구비되는 다단 채널에 개별적으로 장입한 다음 한번에 여러 장의 웨이퍼를 동시에 테스트하는 방식이다.In the multi-prover method, a plurality of cartridges are individually loaded into multi-stage channels provided in the inspection unit through a method of converting a probe card and a wafer into cartridges, unlike the single prober method in which a wafer is tested one by one with a prober probe. Then, it is a method to test several wafers at once at the same time.
즉, 멀티 프로버 시스템은 도 1에 도시한 바와 같이, 카트리지로 세트화하여 합체되는 각 구성요소인 복수개의 탐침을 갖는 프로브 카드(10), 검사대상물인 웨이퍼(20) 및 개별척(30)이 각각 개별적으로 적재되어 임시 보관되는 카세트(100), 상기 구성요소들을 하나의 세트로 합체하여 카트리지(1)로 만들거나 테스트완료된 카트리지(1)를 해체하여 구성요소들로 분리하는 얼라이너(200), 다단의 채널공간(310)을 갖추어 얼라이너(200)에서 합체된 카트리지(1)를 로봇 핸들러(미도시)에 의해서 상기 채널공간에 개별적으로 장입한 다음, 복수개의 웨이퍼에 대한 테스트공정을 동시에 수행하는 검사 유닛(300)을 포함하는 구성으로 이루어진다.That is, as shown in FIG. 1, the multi-probe system is a probe card 10 having a plurality of probes, which are each component that is set and incorporated into a cartridge, a wafer 20 that is an inspection object, and an individual chuck 30. The cassette 100 is individually loaded and temporarily stored, and an aligner 200 that combines the components into one set to make the cartridge 1 or disassembles the tested cartridge 1 and separates the components into components ), a multi-stage channel space 310 is provided, and the cartridge 1 incorporated in the aligner 200 is individually loaded into the channel space by a robot handler (not shown), and then a test process for a plurality of wafers is performed. It consists of a configuration including the inspection unit 300 that is performed at the same time.
상기 얼라이너의 내부공간을 형성하는 본체 챔버(210)에는 상기 웨이퍼(20)가 올려지는 개별척(30)을 x축,y축,z축 및 θ축으로 이송시키는 정렬로봇(220)을 포함하고, 상기 얼라이너와 검사 유닛과의 사이에는 카트리지가 검사 유닛으로 장입되기 전에 대기챔버의 내부에서 임시 대기하는 대기 유닛(400)을 구비한다. The body chamber 210 forming the inner space of the aligner includes an alignment robot 220 that transports the individual chuck 30 on which the wafer 20 is mounted in the x-axis, y-axis, z-axis and θ-axis, and , between the aligner and the inspection unit is provided with a standby unit 400 that temporarily waits inside the standby chamber before the cartridge is charged into the inspection unit.
그리고, 상기 검사 유닛에서 테스트 공정이 마무리된 웨이퍼를 포함하는 카트리지(1)는 상기 얼라이너에서 프로브 카드, 웨이퍼 및 개별척이 서로 분리되도록 로봇 핸들러에 의해서 상기 얼라이너의 본체 챔버에 재공급된다. Then, the cartridge 1 including the wafer, which has undergone the test process in the inspection unit, is re-supplied to the body chamber of the aligner by the robot handler so that the probe card, the wafer, and the individual chuck are separated from each other in the aligner.
한편, 이러한 멀티프로버 시스템의 얼라이너를 구성함에 있어서, 프로브 카드, 웨이퍼 및 개별척을 하나의 카트리지로 결합하여 합체하거나 웨이퍼 검사후 하나의 카트리지를 구성요소별로 개별적으로 분해하는 기능을 수행함과 동시에 상기 검사 유닛으로 카트리지를 진출입시키는 로봇 핸들러의 픽업위치까지 카트리지를 원활하고 안전하게 왕복 이송할 수 있는 별도의 인터페이스 수단이 필요하였다.On the other hand, in configuring the aligner of such a multi-probe system, the probe card, wafer and individual chuck are combined into one cartridge and combined, or one cartridge is individually disassembled for each component after wafer inspection. A separate interface means was needed to smoothly and safely reciprocate the cartridge to the pickup position of the robot handler that moves the cartridge into and out of the inspection unit.
즉, 반도체 사업장 특성상 공간의 제약이 있기 때문에 얼라이너와 로봇 핸들러를 서로 직접적으로 연결하는 형태로 구성하면 효율적이고 바람직하지만, 기능상 로봇 핸들러는 동적영역이고 얼라이너는 정적영역으로 서로 다른 기능을 수행하기 때문에 카트리지의 합체 및 분해가 이루어지는 얼라이너의 상부위치와 상기 검사 유닛으로 카트리지를 진출입시키는 로봇 핸들러의 픽업위치와의 사이에서 카트리지를 이송하는 기능과 더불어 얼라이너에서 카트리지를 위치고정하는 기능을 동시에 수행하는 멀티 프로버용 얼라이너를 구현할 필요성이 대두되었다.In other words, since there is a space constraint due to the nature of the semiconductor business, it is efficient and desirable to configure the aligner and the robot handler in a form that directly connects to each other. A multi-pro that simultaneously performs the function of transferring the cartridge between the upper position of the aligner, where the coalescence and disassembly is made, and the pickup position of the robot handler that advances the cartridge into and out of the inspection unit, as well as the function of fixing the position of the cartridge in the aligner. The need to implement an aligner for the burr emerged.
따라서, 본 발명은 전술한 바와 같은 문제점을 해결하기 위한 것으로, 그 목적은 카트리지의 합체가 이루어지거나 카트리지의 분해가 이루어지는 위치와 카트리지를 진출입시키는 로봇 핸들러의 픽업위치와의 사이에서 카트리지를 왕복이송하는 기능과 더불어 카트리지를 정위치 고정하는 기능을 수행하는 멀티 프로버용 카트리지 얼라이너 장치를 제공하고자 한다.Therefore, the present invention is to solve the problems as described above, the purpose of which is to reciprocate the cartridge between the position where the cartridge is merged or the cartridge is disassembled and the pickup position of the robot handler that advances the cartridge. An object of the present invention is to provide a cartridge aligner device for a multi prober that performs a function of fixing a cartridge in place along with a function.
본 발명에서 이루고자 하는 기술적 과제들은 이상에서 언급한 기술적 과제들로 제한되지 않으며, 언급하지 않은 또 다른 기술적 과제들은 아래의 기재로부터 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 명확하게 이해될 수 있을 것이다.The technical problems to be achieved in the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those of ordinary skill in the art to which the present invention belongs from the description below. will be able
상기한 목적을 달성하기 위한 구체적인 수단으로서, 본 발명의 바람직한 실시예는, 프로브 카드, 웨이퍼, 개별척을 카트리지로 결합하거나 상기 카트리지를 분해하는 작업공간을 구비하는 본체 챔버; 상기 카트리지가 배치되는 배치부를 관통형성한 본체 챔버의 상판에 구비되며, 상기 카트리지가 이동되어 수용되는 내부공간을 구비하는 상부 챔버; 상기 배치부에 위치하는 카트리지의 일부를 클램핑하여 구속하거나 언클램핑하여 해제하는 록킹 모듈; 을 포함하여, 상기 록킹 모듈에서 언클램핑된 카트리지가 로봇 핸들러에 의해서 검사 유닛 측으로 공급되거나 상기 검사 유닛에서 검사완료된 카트리지가 로봇 핸들러에 의해서 상기 상부 챔버에 공급되어 상기 록킹 모듈에서 클램핑 고정되는, 멀티 프로버용 카트리지 얼라이너 장치를 제공한다. As a specific means for achieving the above object, a preferred embodiment of the present invention includes: a body chamber having a working space for combining a probe card, a wafer, and an individual chuck into a cartridge or disassembling the cartridge; an upper chamber provided on the upper plate of the main chamber through which the cartridge is disposed, the upper chamber having an inner space in which the cartridge is moved and accommodated; a locking module for releasing by clamping or unclamping a portion of the cartridge located in the arrangement; Including, the cartridge unclamped in the locking module is supplied to the inspection unit by the robot handler or the cartridge inspected in the inspection unit is supplied to the upper chamber by the robot handler and clamped and fixed in the locking module, multi-pro A cartridge aligner device for burrs is provided.
이때, 상기 배치부와 대응하는 제1위치와, 상기 제1위치로부터 소정 거리 이격되어 상기 카트리지가 외부로 배출될 수 있는 제2위치에 상기 카트리지가 선택적으로 위치되도록 상기 카트리지를 이송시키는 제1이송 모듈; 및 상기 제2위치와, 상기 카트리지를 검사 유닛의 채널 공간으로 진출입시키는 로봇 핸들러가 상기 카트리지를 픽업하기 위한 제3위치에 상기 카트리지가 선택적으로 위치되도록 상기 카트리지를 이동시키는 제2이송 모듈;을 포함할 수 있다. At this time, a first transfer for transferring the cartridge so that the cartridge is selectively positioned at a first position corresponding to the disposition portion, and a second position spaced apart from the first position by a predetermined distance so that the cartridge can be discharged to the outside. module; and a second transfer module for moving the cartridge so that the cartridge is selectively positioned at the second position and a third position for a robot handler for moving the cartridge into and out of the channel space of the inspection unit to pick up the cartridge can do.
이때, 상기 록킹 모듈은, 고정 클램퍼 및 상기 고정 클램퍼에 대하여 상대이동되는 가동클램퍼를 포함하고, 상기 고정 클램퍼와 가동클램퍼와의 사이에 상기 카트리지를 구성하는 프로브 카드의 베이스판의 외측테두리가 위치되어 클램핑되거나 언클램핑될 수 있다. At this time, the locking module includes a fixed clamper and a movable clamper that is moved relative to the fixed clamper, and the outer rim of the base plate of the probe card constituting the cartridge is positioned between the fixed clamper and the movable clamper. It can be clamped or unclamped.
이때, 상기 제1이송 모듈은, 상기 상부 챔버에 수직하게 구비되는 일정길이의 제1스크류축을 정방향 또는 역방향으로 회전구동시키는 제1구동모터와, 상기 제1스크류축과 나사결합되는 암나사부를 갖추어 상기 제1스크류축의 회전방향에 따라 상하이동되는 제1이송 블럭 및 상기 카트리지의 일부가 대응삽입되는 가이드홈을 갖추어 상기 제1이송 블럭에 구비되는 랙가이드를 포함할 수 있다. In this case, the first transfer module includes a first driving motor that rotates a first screw shaft of a predetermined length provided perpendicular to the upper chamber in a forward or reverse direction, and a female screw part screwed with the first screw shaft. It may include a rack guide provided in the first transfer block provided with a guide groove in which a portion of the first transfer block and the cartridge correspondingly inserted according to the rotational direction of the first screw shaft moving up and down.
이때, 상기 상판에는 상기 제1위치에서 카트리지의 평탄도를 확인할 수 있도록 카트리지의 일부와 평탄한 표면이 접해지는 적어도 하나의 레벨러가 구비될 수 있다. At this time, the upper plate may be provided with at least one leveler in contact with a part of the cartridge and the flat surface so as to check the flatness of the cartridge at the first position.
이때, 상기 제2이송 모듈은, 상기 상부 챔버에 수평하게 구비되는 일정길이의 제2스크류축을 정방향 또는 역방향으로 회전구동시키는 제2구동모터와, 상기 제2스크류축과 나사결합되는 암나사부를 갖추어 상기 제2스크류축의 회전방향에 따라 수평이동되는 제2이송 블럭 및 상기 카트리지의 일부와 하부단이 접하여 구속되도록 상기 제2이송 블럭에 구비되는 접촉가이드를 포함할 수 있다. In this case, the second transfer module includes a second drive motor for rotating a second screw shaft of a predetermined length horizontally provided in the upper chamber in a forward or reverse direction, and a female screw screw-coupled to the second screw shaft. It may include a second transfer block horizontally moved according to the rotational direction of the second screw shaft, and a contact guide provided in the second transfer block so that a portion of the cartridge and the lower end are in contact with and restrained.
이때, 상기 접촉가이드의 접촉단은 상승이동되는 상기 카트리지의 베이스판과 정지상태에서 접하도록 상기 제2이송 모듈의 제2이송 블럭에 고정설치되거나, 상승이동된후 정지되는 상기 카트리지의 베이스판과 접하도록 구동원에 의해서 상하이동될 수 있다. At this time, the contact end of the contact guide is fixedly installed on the second transfer block of the second transfer module so as to be in contact with the base plate of the cartridge moving upwards in a stationary state, or the base plate of the cartridge is stopped after being moved upwards; It can be moved up and down by a driving source so as to be in contact.
이때, 상기 접촉가이드의 접촉단은 상기 카트리지의 베이스판 상부면에 요홈으로 함몰형성되거나 철부로 돌출형성되는 걸림부와 접하여 걸림력을 발생시키는 피걸림부로 이루어지거나, 상기 카트리지의 베이스판 상부면에 소정의 거칠기를 갖도록 구비되는 마찰면과 접하여 마찰력을 발생시키는 피마찰면으로 이루어질 수 있다. At this time, the contact end of the contact guide is formed as a locking part that is recessed into a recess in the upper surface of the base plate of the cartridge or comes into contact with a locking part protruding into a convex part to generate a locking force, or on the upper surface of the base plate of the cartridge. It may be made of a friction surface that is in contact with a friction surface provided to have a predetermined roughness and generates a friction force.
이때, 상기 카트리지의 양측 테두리의 각 선,후단과 대응하는 상기 상부 챔버의 모서리부마다 상기 제1이송 모듈이 배치되고, 상기 제1이송 모듈은 상부 챔버에 4개 1조로 복수개 배치될 수 있다. At this time, the first transfer module is disposed at each line of both sides of the rim of the cartridge, and each corner of the upper chamber corresponding to the rear end, and a plurality of the first transfer module may be arranged in a set of four in the upper chamber.
이때, 복수개의 제1이송 모듈은 상기 제1위치에서 제2위치로 카트리지를 수직방향으로 상승이동시킬 때 동기식으로 제어될 수 있다. At this time, the plurality of first transfer modules may be synchronously controlled when the cartridge is vertically upwardly moved from the first position to the second position.
이때, 복수개의 제1이송 모듈은 상기 제2위치에서 제1위치로 카트리지를 하강이동시키면서 카트리지의 일부를 상판에 구비되는 레벨러와 접촉시킬 때 비동기식으로 제어될 수 있다. At this time, the plurality of first transfer modules may be asynchronously controlled when a portion of the cartridge is brought into contact with the leveler provided on the upper plate while moving the cartridge down from the second position to the first position.
상기한 바와 같은 본 발명의 바람직한 실시 예에 의하면 다음과 같은 효과가 있다. According to the preferred embodiment of the present invention as described above, there are the following effects.
멀티프로버 시스템에서 얼라이너와 로봇 핸들러와의 사이에서 합체대상물이고 분해대상물인 카트리지를 안전하게 왕복이송할 수 있어 작업생산성을 높일 수 있다. In the multi-prover system, the cartridge, which is an object to be merged and an object to be disassembled, can be safely reciprocally transferred between the aligner and the robot handler, thereby increasing work productivity.
카트리지를 얼라이너의 본체 챔버에서 합체하여 로봇 핸들러를 이용하여 검사 유닛의 채널에 탑재하는 경로에 있어 각 모듈간 이송 인터페이스를 해결할 수 있어 전체적인 시스템을 단순화시킬 수 있다. The entire system can be simplified by solving the transfer interface between each module in the path of integrating the cartridge in the body chamber of the aligner and mounting it in the channel of the inspection unit using a robot handler.
독립적인 개별 이송 메커니즘을 적용하여 카트리지의 상승이송시에는 복수개의 이송 모듈을 동기 모드로 동작시킬 수 있어 별도의 수평 평탄장치가 필요없고 또한 고정시에는 복수개의 이송 모듈을 비동기 모드로 개별제어가 가능함으로써 별도의 록킹장치를 부가할 필요가 없이 랙가이드만으로도 쉽게 카트리지를 고정할 수 있어 전체적인 장치 구조가 간단해질 수 있다. By applying an independent individual transfer mechanism, a plurality of transfer modules can be operated in synchronous mode when the cartridge is moved upwards, so there is no need for a separate horizontal flat device. By doing so, the cartridge can be easily fixed with only the rack guide without the need to add a separate locking device, thereby simplifying the overall device structure.
독립적인 개별 제어구조로 동기모드와 비동기모드의 전환이 가능하여 카트리지의 고정시 들뜸현상이 없는 평탄화를 가능하게 하여 카트리지의 합체 및 분해작업을 불량없이 원활하게 수행할 수 있는 효과가 있다.It is possible to switch between synchronous mode and asynchronous mode with an independent individual control structure, enabling flattening without lifting phenomenon when fixing the cartridge, which has the effect of smoothly performing cartridge assembly and disassembly work without defects.
도 1 은 일반적인 멀티프로버 시스템을 도시한 개략도이다. 1 is a schematic diagram showing a general multiprobe system.
도 2 는 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치를 도시한 개략도이다. 2 is a schematic diagram illustrating a cartridge aligner device for a multi prober according to an embodiment of the present invention.
도 3 은 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치에 카트리지가 제1위치에 위치되는 상태를 정면에서 바라본 구성도이다.3 is a block diagram of a cartridge aligner device for a multi prober, viewed from the front, in a state in which a cartridge is positioned at a first position according to an embodiment of the present invention.
도 4 는 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치에 카트리지가 제2위치에 위치되는 상태를 정면에서 바라본 구성도이다.4 is a block diagram of the cartridge aligner device for a multi prober as viewed from the front in a state in which the cartridge is positioned at a second position according to an embodiment of the present invention.
도 5 는 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치에 카트리지가 제1위치에 위치되는 상태를 측면에서 바라본 구성도이다.5 is a block diagram of a cartridge aligner device for a multi prober, viewed from the side, in a state in which the cartridge is positioned at a first position according to an embodiment of the present invention.
도 6 은 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치에 카트리지가 제2위치에 위치되는 상태를 측면에서 바라본 구성도이다.6 is a block diagram of the cartridge aligner device for a multi prober according to an embodiment of the present invention, viewed from the side, in a state in which the cartridge is positioned at the second position.
도 7 은 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치를 도시한 평면도이다. 7 is a plan view illustrating a cartridge aligner device for a multi prober according to an embodiment of the present invention.
도 8 은 본 발명의 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치에서 카트리지의 합체 및 분해시 베이스판을 레벨러에 접촉시키는 상태를 도시한 것으로서, 8 is a view showing a state in which the base plate is in contact with the leveler when the cartridge is assembled and disassembled in the cartridge aligner for a multi prober according to an embodiment of the present invention;
(a)는 제1이송 모듈의 단일 구동방식이고,(a) is a single driving method of the first transfer module,
(b)는 제1이송 모듈의 이중 구동방식이다. (b) shows the dual driving method of the first transfer module.
이하 첨부된 도면을 참조하여 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자가 본 발명을 용이하게 실시할 수 있는 바람직한 실시 예를 상세히 설명한다. 다만, 본 발명의 바람직한 실시 예에 대한 구조 원리를 상세하게 설명함에 있어 관련된 공지 기능 또는 구성에 대한 구체적인 설명이 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우에는 그 상세한 설명을 생략한다.Hereinafter, with reference to the accompanying drawings, a preferred embodiment in which a person of ordinary skill in the art to which the present invention pertains can easily practice the present invention will be described in detail. However, in the detailed description of the structural principle of a preferred embodiment of the present invention, if it is determined that a detailed description of a related well-known function or configuration may unnecessarily obscure the gist of the present invention, the detailed description thereof will be omitted.
또한, 도면 전체에 걸쳐 유사한 기능 및 작용을 하는 부분에 대해서는 동일한 도면 부호를 사용한다.In addition, the same reference numerals are used throughout the drawings for parts having similar functions and functions.
덧붙여, 명세서 전체에서, 어떤 부분이 다른 부분과 '연결'되어 있다고 할때, 이는 '직접적으로 연결'되어 있는 경우뿐만 아니라, 그 중간에 다른 소자를 사이에 두고 '간접적으로 연결'되어 있는 경우도 포함한다. 또한 어떤 구성 요소를 '포함'한다는 것은, 특별히 반대되는 기재가 없는 한 다른 구성요소를 제외하는 것이 아니라, 다른 구성요소를 더 포함할 수 있는 것을 의미한다.In addition, throughout the specification, when it is said that a part is 'connected' with another part, it is not only 'directly connected' but also 'indirectly connected' with another element interposed therebetween. include In addition, 'including' a certain component does not exclude other components unless otherwise stated, but means that other components may be further included.
본 발명의 바람직한 실시예에 따른 멀티 프로버용 카트리지 얼라이너 장치(1000)는 도 2에 도시한 바와 같이, 본체 챔버(210), 상부 챔버(230), 록킹 모듈(240), 제1이송 모듈(250) 및 제2이송 모듈(260)을 포함할 수 있다.As shown in FIG. 2, the cartridge aligner apparatus 1000 for a multi prober according to a preferred embodiment of the present invention includes a body chamber 210, an upper chamber 230, a locking module 240, and a first transfer module ( 250 ) and a second transfer module 260 .
상기 본체 챔버(210)는 도 2, 도 3 및 도 4 도시한 바와 같이, 프로브 카드(10), 웨이퍼(20), 개별척(30)을 순차적으로 적층하여 검사 유닛에서의 검사공정을 수행할 수 있도록 하나의 카트리지(1)로 결합하거나 웨이퍼 검사후 상기 카트리지로부터 프로브 카드(10), 웨이퍼(20), 개별척(30)을 개별적으로 분해하는 작업공간을 제공한다.As shown in FIGS. 2, 3, and 4, the body chamber 210 sequentially stacks the probe card 10, the wafer 20, and the individual chuck 30 to perform the inspection process in the inspection unit. A working space is provided for individually disassembling the probe card 10 , the wafer 20 , and the individual chuck 30 from the cartridge after combining them into a single cartridge 1 or inspecting the wafer.
이러한 본체 챔버(210)의 작업공간에는 검사대상물인 웨이퍼(20)가 올려지는 개별척(30)을 x축,y축,z축 및 θ축으로 이송시키는 정렬로봇(220)을 포함할 수 있다. The working space of the body chamber 210 may include an alignment robot 220 that transports the individual chuck 30 on which the wafer 20, which is the inspection object, is mounted in the x-axis, y-axis, z-axis, and θ-axis. .
상기 상부 챔버(230)는 도 2, 도 3 및 도 4 도시한 바와 같이, 합체 및 분해 대상물인 카트리지가 배치되는 배치부(214)를 개구형성한 본체 챔버(210)의 상판(212)에 구비될 수 있다.The upper chamber 230 is provided on the upper plate 212 of the main body chamber 210 in which the arrangement part 214 in which the cartridge, which is the object to be merged and disassembled, is disposed, as shown in FIGS. 2, 3 and 4 . can be
이러한 상부 챔버(230)는 상기 검사 유닛에서 전기적인 테스트공정을 완료한 카트리지가 내부로 진입되어 임시 수용되거나 상기 본체 챔버(210)에서 프로브 카드(10), 웨이퍼(20) 및 개별척(30)이 합체된 카트리지가 외부로 진출되기까지 임시 수용되도록 일정크기의 내부공간을 갖는 상부 구조물이다. In the upper chamber 230 , the cartridge that has completed the electrical test process in the inspection unit is temporarily accommodated or the probe card 10 , the wafer 20 and the individual chuck 30 are temporarily accommodated in the main chamber 210 . It is an upper structure having an internal space of a certain size so that the combined cartridge is temporarily accommodated until it advances to the outside.
상기 배치부(214)는 상기 카트리지의 합체 및 분해시 프로브 카드(10), 웨이퍼(20), 개별척(30)이 간섭없이 배치될 수 있는 크기를 갖추어 상기 상판(212)에 로봇 핸들러 측으로 향하여 개방된 형태로 구비되는 것이 바람직하다.The arrangement unit 214 has a size so that the probe card 10, the wafer 20, and the individual chuck 30 can be arranged without interference when the cartridge is assembled and disassembled, and is placed on the upper plate 212 toward the robot handler. It is preferable to be provided in an open form.
상기 록킹 모듈(240)은 도 2, 도 3 및 도 4 도시한 바와 같이, 상기 배치부에 위치하는 카트리지(1)의 일부를 클램핑하여 구속하거나 언클램핑하여 해제할 수 있도록 적어도 본체 챔버의 상판 좌우양측에 각각 배치되는 한쌍으로 구비될 수 있다.As shown in FIGS. 2, 3 and 4, the locking module 240 clamps and restrains a part of the cartridge 1 located in the arrangement unit, or unclamps and releases it to release at least the left and right upper plates of the body chamber. It may be provided as a pair disposed on both sides, respectively.
이때, 상기 록킹 모듈(240)에 의해서 클램핑되거나 언클램핑되는 카트리지의 일부는 상기 카트리지를 구성하는 프로브 카드가 하부면에 구비되는 베이스판(11)의 외측테두리일 수 있다.In this case, a part of the cartridge clamped or unclamped by the locking module 240 may be the outer edge of the base plate 11 on which the probe card constituting the cartridge is provided on the lower surface.
이러한 록킹 모듈(240)은 고정 클램퍼(241) 및 상기 고정 클램퍼에 대하여 상대이동되는 가동 클램퍼(242)를 포함하고, 상기 고정 클램퍼와 가동 클램퍼와의 사이에 상기 카트리지의 일부인 베이스판(11)의 외측테두리가 위치되면서 이를 클램핑하여 구속하거나 언클램핑하여 구속해제한다.The locking module 240 includes a fixed clamper 241 and a movable clamper 242 that is moved relative to the fixed clamper, and between the fixed clamper and the movable clamper of the base plate 11 which is a part of the cartridge. As the outer edge is positioned, it is clamped to constrain it or unclamped to release it.
상기 프로브 카드(10)가 하부면에 구비되는 베이스판(11)의 외측테두리가 록킹 모듈에 의해서 클램핑되어 확고히 구속고정됨으로써 프로브 카드(10), 웨이퍼(20) 및 개별척(30)을 결합하여 하나의 카트리지로 합체하는 공정과, 웨이퍼 검사후 카트리지로부터 프로브 카드, 웨이퍼 및 개별척을 개별적으로 분리하여 분해하는 공정을 안정적으로 수행할 수 있다. The outer rim of the base plate 11 provided on the lower surface of the probe card 10 is clamped by a locking module and firmly restrained, thereby combining the probe card 10, the wafer 20 and the individual chuck 30. The process of uniting into one cartridge and the process of separately separating and disassembling the probe card, wafer and individual chuck from the cartridge after wafer inspection can be stably performed.
상기 록킹 모듈(240)은 미도시된 구동원에 의해서 상기 프로브 카드의 베이스판 양측테두리에 근접하거나 이격되도록 수평이동되는 이동구조물로 이루어질 수 있다. The locking module 240 may be formed of a moving structure that is horizontally moved so as to be close to or spaced apart from both sides of the base plate of the probe card by a driving source (not shown).
이에 따라 상기 록킹 모듈에서 언클램핑된 카트리지는 본체 챔버와 검사 유닛과의 사이에 구비되는 로봇 핸들러에 의해서 상부 챔버의 진출입구를 통하여 배출되어 검사 유닛 측으로 공급되거나 상기 검사 유닛에서 검사완료된 카트리지는 로봇 핸들러에 의해서 상기 상부 챔버의 진출입구를 통하여 내부공간으로 공급되어 상기 록킹 모듈에서 클램핑 고정될 수 있다.Accordingly, the cartridge unclamped in the locking module is discharged through the entrance and exit of the upper chamber by the robot handler provided between the body chamber and the inspection unit and supplied to the inspection unit, or the cartridge inspected by the inspection unit is the robot handler is supplied to the inner space through the entrance and exit of the upper chamber by the locking module can be clamped and fixed.
상기 상부 챔버에는 카트리지를 검사 유닛의 채널 공간으로 진출입시키는 로봇 핸들러가 카트리지를 픽업하기 위한 위치까지 이송하기 위한 별도의 이송 모듈을 구비하는 것이 바람직하다.Preferably, the upper chamber includes a separate transport module for transporting the cartridge to a position for picking up the cartridge by a robot handler for moving the cartridge into and out of the channel space of the inspection unit.
여기서, 상기 로봇 핸들러는 합체 및 분해 대상물인 카트리지를 상부 챔버와 검사 유닛와의 사이에서 운반하는 기능을 수행하면서 카세트에 임시보관된 프로브 카드를 이송하는 기능을 수행할 수 있지만 이에 한정되는 것은 아니며, 상기 카세트에 임시보관된 구성부품만을 이송하는 별도의 전용 로봇 핸들러를 구비하여 사용할 수 있다. Here, the robot handler may perform a function of transporting the cartridge, which is an object to be merged and disassembled, between the upper chamber and the inspection unit, and may perform a function of transporting the probe card temporarily stored in the cassette, but is not limited thereto. It can be used with a separate dedicated robot handler that transports only the components temporarily stored in the cassette.
상기 제1이송 모듈(250)은 도 3, 도 4, 도 5 및 도 6 에 도시한 바와 같이, 상기 본체 챔버(210)의 상판(212)에 개구형성된 배치부(214)와 대응하는 제1위치와, 상기 제1위치로부터 소정 거리 이격되어 상기 카트리지가 외부로 배출될 수 있는 제2위치에 상기 카트리지가 선택적으로 위치되도록 상기 카트리지를 이송시키는 것이다.As shown in FIGS. 3, 4, 5 and 6 , the first transfer module 250 includes a first corresponding to the arrangement part 214 formed in the upper plate 212 of the body chamber 210 . It is to transport the cartridge so that the cartridge is selectively positioned in a second position spaced apart from the first position by a predetermined distance from the first position and the cartridge can be discharged to the outside.
이러한 제1이송 모듈(250)은 제1구동모터(251), 제1스크류축(252), 제1이송 블럭(253) 및 랙가이드(254)를 포함할 수 있다. The first transfer module 250 may include a first driving motor 251 , a first screw shaft 252 , a first transfer block 253 , and a rack guide 254 .
상기 제1구동모터(251)는 전원인가시 상부 챔버에 수직하게 구비되는 일정길이의 제1스크류축(252)을 정방향 또는 역방향으로 회전구동시키는 구동력을 발생시키는 모터부재이다. The first driving motor 251 is a motor member that generates a driving force for rotationally driving the first screw shaft 252 having a predetermined length perpendicular to the upper chamber in the forward or reverse direction when power is applied.
상기 제1이송 블럭(253)은 상기 제1스크류축과 나사결합되는 암나사부를 몸체에 관통형성하고, 상기 암나사부의 양측에 관통형성되는 안내공에 안내봉이 활주이동가능하게 조립됨으로써 상기 제1스크류축의 정방향 회전 또는 역방향 회전에 맞추어 상부 챔버에 고정설치된 안내봉을 따라 상기 배치부(214)로부터 멀어지도록 일정높이 상승되거나 상기 배치부(214)에 근접하도록 하강되어 복귀된다.The first transfer block 253 has a female threaded portion screw-coupled to the first screw shaft through the body, and a guide rod is slidably assembled in guide holes formed through the female screw portion on both sides of the first screw shaft. According to the forward rotation or the reverse rotation, along the guide rod fixedly installed in the upper chamber, it rises to a certain height away from the placement unit 214 or descends to approach the placement unit 214 and returns.
상기 랙가이드(254)는 상기 카트리지를 구성하는 프로브 카드(10)를 하부면에 고정하는 베이스판(11)의 외측테두리가 대응삽입되어 걸림연결되도록 위치하는 가이드홈을 함몰형성하여 상기 제1이송 블럭(253)에 구비된다.The rack guide 254 is formed by recessing a guide groove positioned so that the outer rim of the base plate 11 for fixing the probe card 10 constituting the cartridge to the lower surface is inserted and hooked to the first transfer. It is provided in the block 253 .
이러한 랙가이드(254)는 제1이송 블럭의 하부단 일측에 고정설치되는 것으로 도시하고 설명하였지만 미도시된 엑추에이터에 의해서 제1이송 블럭에 대하여 상하이동가능한 구조물로 구비될 수 있다. Although the rack guide 254 has been illustrated and described as being fixedly installed on one side of the lower end of the first transfer block, it may be provided as a structure movable vertically with respect to the first transfer block by an actuator not shown.
상기 랙가이드(254)는 베이스판의 판두께와 동일하거나 큰 크기의 폭을 갖는 가이드홈을 구비되는 것으로 도시하고 설명하였지만 이에 한정되는 것은 아니며, 베이스판의 외측테두리를 클램핑하여 구속하거나 언클램핑하여 구속해제할 수 있도록 고정클램퍼와 가동클램퍼로 구비될 수 있다. The rack guide 254 has been illustrated and described as having a guide groove having a width equal to or greater than the plate thickness of the base plate, but is not limited thereto. It may be provided with a fixed clamper and a movable clamper to release the restraint.
이에 따라, 도 3과 도 5에 도시한 바와 같이, 상기 제1구동모터의 회전구동력에 의해서 상기 제1스크류축이 정방향으로 회전구동되면, 상기 제1이송 블럭은 직하부로 하강되면서 상기 랙가이드에 베이스판의 외측테두리가 대응되어 걸림연결된 카트리지는 상판의 배치부와 대응하는 제1위치에 배치된다. Accordingly, as shown in FIGS. 3 and 5, when the first screw shaft is rotationally driven in the forward direction by the rotational driving force of the first driving motor, the first transfer block descends directly below the rack guide. The cartridge, which is engaged with the outer rim of the base plate, is disposed at a first position corresponding to the arrangement portion of the upper plate.
그리고, 상기 제1위치에 배치되는 카트리지는 분해공정이나 합체공정을 수행할 수 있도록 상기 록킹 모듈에 의해서 클램핑되어 확고히 위치고정된다. And, the cartridge disposed in the first position is clamped by the locking module to perform the disassembly process or the assembly process is firmly fixed.
반면에, 도 4와 도 6에 도시한 바와 같이, 상기 제1구동모터(251)의 회전구동력에 의해서 상기 제1스크류축이 역방향으로 회전구동되면, 상기 제1이송 블럭은 직상부로 상승되면서 상기 랙가이드에 베이스판의 외측테두리가 대응되어 걸림연결된 카트리지는 상판의 배치부와 대응하는 제1위치로부터 직상부로 일정거리 이격된 제2위치로 이동되어 배치된다. On the other hand, as shown in FIGS. 4 and 6 , when the first screw shaft is rotationally driven in the reverse direction by the rotational driving force of the first driving motor 251, the first transfer block is raised to the upper part while The cartridge, which is engaged with the outer rim of the base plate corresponding to the rack guide, is moved and disposed to a second position spaced a predetermined distance from the first position corresponding to the arrangement part of the upper plate to the second position.
이때, 상기 카트리지를 제2위치로 상승이동시키기 위한 제1이송 블럭의 상승작동시 상기 록킹 모듈(240)은 언클램핑되어 상기 카트리지의 일부인 베이스판에 대한 구속을 해제한다. At this time, during the lifting operation of the first transfer block for moving the cartridge upward to the second position, the locking module 240 is unclamped to release the restraint on the base plate, which is a part of the cartridge.
그리고, 상기 배치부와 대응하는 제1위치로부터 이격된 제2위치에 배치되는 카트리지는 후술하는 제2이송 모듈(260)에 의해서 로봇 핸들러의 픽업이 가능한 제3위치로 수평이동되기까지 정지대기한다. Then, the cartridge disposed at a second position spaced apart from the first position corresponding to the arrangement unit is stopped and waits until it is horizontally moved to a third position where pickup of the robot handler is possible by a second transfer module 260 to be described later. .
상기 배치부(214)를 개구형성하는 상판(212)에는 상기 제1위치에서 분해대상물이거나 합체대상물인 카트리지(1)의 평탄도를 확인할 수 있도록 상기 카트리지의 일부인 베이스판(11)의 하부면과 평탄한 상부면이 접해지는 적어도 하나의 레벨러(270)를 구비할 수 있다. The upper plate 212 forming the opening of the arrangement part 214 has the lower surface of the base plate 11, which is a part of the cartridge, so as to check the flatness of the cartridge 1, which is an object to be disassembled or an object to be merged at the first position. At least one leveler 270 to which the flat upper surface is in contact may be provided.
상기 레벨러(270)는 분해대상물이거나 합체대상물인 카트리지의 수평상태를 확인할 수 있도록 상기 카트리지의 일부인 베이스판의 하부면과 접해지는 표면인 상부면에 대하여 사전에 수평 평탄확인을 거쳐서 상판에 구비되는 금속블럭체이다. The leveler 270 is a metal provided on the upper plate through a horizontal flatness check in advance with respect to the upper surface, which is a surface in contact with the lower surface of the base plate, which is a part of the cartridge, so as to confirm the horizontal state of the cartridge, which is an object to be disassembled or an object to be merged. It is a block body.
이러한 레벨러(270)는 상기 상판에 개구형성되는 배치부(214)의 근방에 상기 카트리지의 베이스판(11)과 마주하여 대응하도록 고정설치되는 것이 바람직하다. The leveler 270 is preferably fixedly installed to face and correspond to the base plate 11 of the cartridge in the vicinity of the arrangement portion 214 that is opened in the upper plate.
상기 제2이송 모듈(260)은 도 3, 도 4, 도 5 및 도 6 에 도시한 바와 같이, 상기 제1위치로부터 소정 거리 이격되어 상기 카트리지가 외부로 배출될 수 있는 제2위치와, 상기 카트리지(1)를 검사 유닛의 채널 공간으로 진출입시키는 로봇 핸들러가 상기 카트리지를 픽업하기 위한 제3위치에 상기 카트리지를 선택적으로 위치시킬 수 있도록 상기 상부 챔버의 내부에서 카트리지를 이동시킬 수 있는 것이다. As shown in FIGS. 3, 4, 5 and 6, the second transfer module 260 is spaced apart from the first position by a predetermined distance from the second position in which the cartridge can be discharged to the outside; It is possible to move the cartridge within the upper chamber so that a robot handler that moves the cartridge 1 into and out of the channel space of the inspection unit can selectively position the cartridge at a third position for picking up the cartridge.
이러한 제2이송 모듈(260)은 제2구동모터(261), 제2스크류축(262), 제2이송 블럭(263) 및 접촉가이드(264)를 포함할 수 있다. The second transfer module 260 may include a second driving motor 261 , a second screw shaft 262 , a second transfer block 263 , and a contact guide 264 .
상기 제2구동모터(261)는 전원인가시 상부 챔버에 수평하게 구비되는 일정길이의 제2스크류축(262)을 정방향 또는 역방향으로 회전구동시키는 구동력을 발생시키는 모터부재이다.The second driving motor 261 is a motor member that generates a driving force for rotationally driving the second screw shaft 262 of a predetermined length horizontally provided in the upper chamber in the forward or reverse direction when power is applied.
상기 제2이송 블럭(263)은 상기 제2스크류축과 나사결합되는 암나사부를 몸체에 관통형성하고, 상기 상부 챔버의 천정면에 상부면에 접하여 활주이동가능하게 조립됨으로써 상기 제2스크류축의 정방향 회전 또는 역방향 회전에 맞추어 상부 챔버의 천정면을 따라 상기 로봇 핸들러와 대응하는 진출입구(234)로부터 멀어지도록 수평이동되거나 상기 진출입구에 근접하도록 수평이동된다.The second transfer block 263 is slidably assembled in contact with the upper surface of the ceiling surface of the upper chamber and the upper surface of the upper chamber by forming a female threaded portion screwed with the second screw shaft through the body to rotate the second screw shaft in the forward direction. Alternatively, according to the reverse rotation, the robot handler is horizontally moved along the ceiling surface of the upper chamber so as to move away from the inlet 234 corresponding to the robot handler or move horizontally so as to be close to the inlet and outlet.
상기 진출입구(234)는 상기 로봇 핸들러에 의한 카트리지의 픽업이 가능하도록 상기 챔버의 일측면에 일정크기로 절개형성되는 개구부이다.The entry/exit opening 234 is an opening formed in a predetermined size on one side of the chamber to enable pickup of the cartridge by the robot handler.
상기 접촉가이드(264)는 상기 카트리지의 일부인 베이스판(11)의 상부면과 하부단인 접촉단이 접하여 걸림력을 발생시켜 카트리지를 구속하도록 상기 제2이송 블럭(263)에 구비된다. The contact guide 264 is provided on the second transfer block 263 so that the upper surface of the base plate 11, which is a part of the cartridge, and the contact end, which is the lower end, come into contact with each other to generate a locking force to constrain the cartridge.
이때, 상기 접촉가이드(264)의 하부단인 접촉단은 상기 제1이송 모듈의 제1구동모터에 구동력에 의해서 상승이동되는 카트리지의 일부인 베이스판과 정지상태에서 접하도록 상기 제2이송 블럭에 고정설치되는 고정구조물로 구비되는 것으로 도시하고 설명하였지만 이에 한정되는 것은 아니며, 상기 접촉가이드(264)의 접촉단은 상승이동된후 정지된 카트리지의 일부인 베이스판(11)과 접하도록 미도시된 실린더와 같은 구동원에 의해서 상하이동되는 작동구조물로 구비될 수 있다. At this time, the contact end, which is the lower end of the contact guide 264, is fixed to the second transfer block so as to be in contact with the base plate, which is a part of the cartridge, which is moved upward by the driving force of the first driving motor of the first transfer module, in a stationary state. Although illustrated and described as being provided as a fixed structure to be installed, the present invention is not limited thereto, and the contact end of the contact guide 264 is moved upwardly and then a part of the stationary cartridge base plate 11 is in contact with a cylinder and not shown. It may be provided as an operating structure that moves vertically by the same driving source.
상기 카트리지의 베이스판(11)과 접해지는 접촉가이드(264)의 하부단인 접촉단은 상기 베이스판(11)의 상부면 임의위치에 요홈으로 함몰형성되거나 철부로 돌출형성되는 걸림부와 접하여 걸림력을 발생시키는 피걸림부로 이루어지거나, 상기 베이스판(11)의 상부면에 소정의 거칠기를 갖도록 구비되는 마찰면과 접하여 마찰력을 발생시키는 피마찰면으로 이루어질 수 있다. The contact end, which is the lower end of the contact guide 264 in contact with the base plate 11 of the cartridge, is engaged in contact with the engaging portion that is recessed into a recess or protruded with a convex portion at an arbitrary position on the upper surface of the base plate 11. It may be made of a part to be caught for generating a force, or it may be made of a surface to be rubbed that generates a friction force in contact with a friction surface provided to have a predetermined roughness on the upper surface of the base plate 11 .
이에 따라, 도 4와 도 6에 도시한 바와 같이, 상기 접촉가이드의 하부단인 접촉단과 상기 카트리지의 베이스판이 서로 접하여 구속된 상태에서, 상기 제2구동모터의 회전구동력에 의해서 상기 제2스크류축이 정방향으로 회전구동되면, 상기 제2이송 블럭은 상부 챔버의 진출입구로부터 멀어지도록 도면상 좌측으로 전진되면서 상기 카트리지는 상판의 배치부와 대응하는 제1위치로부터 일정높이 이격된 제2위치에 배치된다. Accordingly, as shown in FIGS. 4 and 6, in a state where the contact end, which is the lower end of the contact guide, and the base plate of the cartridge are in contact with each other and are restrained, the second screw shaft by the rotational driving force of the second driving motor When rotationally driven in this forward direction, the second transfer block advances to the left in the drawing so as to move away from the entrance and exit of the upper chamber, and the cartridge is disposed at a second position spaced apart from the first position by a predetermined height from the first position corresponding to the arrangement of the upper plate. do.
그리고, 상기 제2위치에 배치되는 카트리지는 상기 제1이송 모듈에 의해서 분해공정이나 합체공정을 수행할 수 있도록 제2이송 모듈과의 간섭없이 제1위치로 하강된다. And, the cartridge disposed at the second position is lowered to the first position without interference with the second transfer module so that the disassembly process or the assembly process can be performed by the first transfer module.
반면에, 상기 제2구동모터의 회전구동력에 의해서 상기 제2스크류축이 역방향으로 회전구동되면, 상기 제2이송 블럭은 상부 챔버의 진출입구에 근접하도록 도면상 우측으로 후진되면서 상기 카트리지는 로봇 핸들러에 의한 카트리지의 픽업이송이 가능한 제3위치에 배치된다. On the other hand, when the second screw shaft is rotationally driven in the reverse direction by the rotational driving force of the second driving motor, the second transfer block moves backward to the right side in the drawing so as to be close to the entrance and exit of the upper chamber, and the cartridge is a robot handler. It is arranged in the third position where the pickup and transfer of the cartridge is possible.
여기서, 상기 제1이송 블럭(253)과 제2이송 블럭(263)은 상기 제1구동모터(251)와 제2구동모터(261)에 의한 제1스크류축과 제2스크류축의 정방향 또는 역방향 회전구동력에 의해서 수직방향으로 상하이동되고, 수평방향으로 전후진이동되는 것으로 도시하고 설명하였지만 이에 한정되는 것은 아니며, 상기 제1,2이송 블럭은 제1,2구동모터와 스크류축을 대체하는 엑추에이터인 실린더부재의 로드선단에 연결되고 안내봉에 결합되어 수직방향 및 수평방향으로 왕복이동되는 구성으로 구비될 수 있다. Here, the first transfer block 253 and the second transfer block 263 are rotated in the forward or reverse direction of the first screw shaft and the second screw shaft by the first drive motor 251 and the second drive motor 261 . Although it has been illustrated and described as moving vertically in the vertical direction and moving forward and backward in the horizontal direction by the driving force, it is not limited thereto, and the first and second transfer blocks are cylinders that are actuators replacing the first and second driving motors and the screw shaft. It may be provided in a configuration connected to the rod end of the member and coupled to the guide rod to reciprocate in vertical and horizontal directions.
한편, 상기 제1이송 모듈(250)은 카트리지를 제1위치에서 제2위치로 상승이동하거나 상기 제2위치에서 제1위치로 하강이동시키는 것으로, 이러한 제1이송 모듈(250)은 도 7에 도시한 바와 같이, 상기 카트리지의 일부인 베이스판(11)의 양측 테두리의 각 선,후단과 대응하는 상부 챔버(230)의 각 모서리부 마다 복수개 배치되어 구비될 수 있다. On the other hand, the first transfer module 250 moves the cartridge upward from the first position to the second position or moves downward from the second position to the first position. This first transfer module 250 is shown in FIG. As shown, a plurality of lines may be disposed and provided for each corner of the upper chamber 230 corresponding to each line and rear end of both sides of the edge of the base plate 11, which is a part of the cartridge.
4개 1조로 배치되는 복수개의 제1이송 모듈(250)은 상기 제1위치에서 제2위치로 상기 랙가이드(254)에 베이스판이 구속된 카트리지를 수직방향으로 상승이동시킬 때 동기식으로 제어될 수 있다.A plurality of first transfer modules 250 arranged in a set of four can be synchronously controlled when vertically upwardly moving a cartridge having a base plate constrained to the rack guide 254 from the first position to the second position. there is.
복수개의 제2이송 모듈(250)은 상기 제2위치에서 제1위치로 상기 랙가이드(254)에 베이스판이 구속된 카트리지를 하강이동시키면서 베이스판을 배치부를 개구형성하는 상판(212)에 구비되는 레벨러(270)와 접촉시킬 때 비동기식으로 제어될 수 있다. The plurality of second transfer modules 250 are provided on the upper plate 212 for opening the base plate arrangement portion while moving the cartridge in which the base plate is restrained by the rack guide 254 from the second position to the first position. It can be controlled asynchronously when making contact with the leveler 270 .
도 8의 (a)는 제1이송 모듈의 단일 구동방식을 도시한 것으로, 제1이송 모듈의 제1스크류축이 카트리지의 양측 테두리 중앙에 1개씩 단일구조로 배치되면서 베이스판의 외측테두리가 랙가이드(254)의 가이드홈에 걸림연결된 상태에서 제1구동모터의 구동력에 의해서 카트리지를 제1위치와 제2위치와의 사이에서 상하이동시키는 것이다.Figure 8 (a) shows a single driving method of the first transfer module, while the first screw shaft of the first transfer module is arranged in a single structure at the center of both sides of the cartridge in a single structure, the outer rim of the base plate is a rack The cartridge is vertically moved between the first position and the second position by the driving force of the first driving motor in a state in which it is engaged with the guide groove of the guide 254 .
이러한 단일구동 방식은 카트리지의 일측 테두리에서 1개의 랙가이드(254)에 베이스판의 일측테두리를 하나의 접촉부위를 갖도록 걸림연결하는 것으로, 제2위치에서 제1위치로 하강하는 카트리지의 베이스판(11)이 레벨러(270)의 상부면에 접해질 때 베이스판의 평탄도가 불량인 경우, 베이스판의 일측은 레벨러의 일측과 선접촉되는 반면에 베이스판의 타측은 레벨러의 타측과 접촉되지 않으면서 들뜨게 되는 현상을 발생할 수 있으며, 이러한 뜰뜸현상에 기인하여 록킹 모듈에 의한 베이스판의 클램핑 고정시 록킹오류를 발생시킬 수 있다. This single driving method is to engage and connect one edge of the base plate to one rack guide 254 at one edge of the cartridge so that it has one contact part, and the base plate of the cartridge descends from the second position to the first position ( 11) When the flatness of the base plate is poor when it comes into contact with the upper surface of the leveler 270, one side of the base plate is in line contact with one side of the leveler while the other side of the base plate is not in contact with the other side of the leveler A phenomenon of lifting may occur, and a locking error may occur when clamping and fixing the base plate by the locking module due to this float phenomenon.
도 8의 (b)는 제1이송 모듈의 이중 구동방식을 도시한 것으로, 제1이송 모듈의 제1스크류축이 카트리지의 양측 테두리 양측에 2개씩 이중구조로 배치되면서 베이스판의 외측테두리가 랙가이드(254)의 가이드홈에 걸림연결된 상태에서 제1구동모터의 구동력에 의해서 카트리지를 제1위치와 제2위치와의 사이에서 상하이동시키는 것이다.Figure 8 (b) shows the dual driving method of the first transfer module, the first screw shaft of the first transfer module is arranged in a double structure on both sides of both sides of the cartridge, the outer rim of the base plate is a rack The cartridge is vertically moved between the first position and the second position by the driving force of the first driving motor in a state in which it is engaged with the guide groove of the guide 254 .
이러한 이중구동 방식은 카트리지의 일측 테두리에서 2개의 랙가이드(254)에 베이스판의 일측테두리를 두개의 접촉부위를 갖도록 걸림연결하는 것으로, 제2위치에서 제1위치로 하강하는 카트리지의 베이스판(11)이 레벨러(270)의 상부면에 접해질 때 베이스판의 평탄도가 불량하더라도 상기 베이스판(11)의 일측과 타측은 레벨러의 일측과 타측에 각각 동시에 밀착되도록 접촉되면서 평탄도가 불량한 베이스판의 들뜸현상을 근본적으로 방지할 수 있다.This double driving method is to engage and connect one edge of the base plate to the two rack guides 254 at one edge of the cartridge so as to have two contact parts, and the base plate of the cartridge descends from the second position to the first position ( 11) is in contact with the upper surface of the leveler 270, even if the flatness of the base plate is poor, one side and the other side of the base plate 11 are in contact with the one side and the other side of the leveler so that they are in close contact with each other at the same time. Plate lifting phenomenon can be fundamentally prevented.
이에 따라, 상기 배치부와 대응하는 제1위치에서 카트리지의 베이스판을 록킹 모듈에 의해서 록킹불량없이 클램핑할 수 있으며, 이로 인하여 카트리지의 합체공정 및 분해공정을 안정적으로 수행할 수 있다.Accordingly, the base plate of the cartridge can be clamped without defective locking by the locking module at the first position corresponding to the arrangement portion, thereby stably performing the coalescing process and the disassembling process of the cartridge.
즉, 카트리지의 일측테두리에 2개의 제1이송 모듈을 각각 배치하고, 카트리지의 좌우 양측을 좌우대칭으로 하여 총 4개의 제1이송 모듈을 이중 구조로 배치하여 구성함으로써 상기 제2위치에서 제1위치로 카트리지를 하강이동시키면서 카트리지의 일부를 상판에 구비되는 레벨러와 접촉시킬 때 4개의 제1이송 모듈에 구비된 제1구동모터가 비동기식으로 제어되면서 하강되는 카트리지의 베이스판이 레벨러의 상부표면에 들뜸현상없이 완벽하게 밀착되어 접촉될 수 있는 것이다.That is, by arranging two first transfer modules on one side edge of the cartridge, and symmetrically on the left and right sides of the cartridge, a total of four first transfer modules are arranged in a double structure to configure the first position in the second position. When a part of the cartridge is brought into contact with the leveler provided on the upper plate while moving the cartridge downward, the first drive motor provided in the four first transfer modules is asynchronously controlled and the base plate of the lowered cartridge is lifted on the upper surface of the leveler. It can be perfectly adhered and contacted without any need.
이러한 비동기식 제어 방식으로 제1이송 모듈이 개별적으로 구동됨으로써 베이스판의 일측이 레벨러의 일측에 선접촉되면 이에 대응하는 제1구동모터의 구동은 정지되고, 타측 제1구동모터를 구동시켜 베이스판의 타측을 레벨러의 타측에 후접촉시켜 베이스판의 일측테두리 전체영역을 레벨러의 상부표면에 전체적으로 밀착시켜 접촉하며, 이러한 상태에서 카트리지의 베이스판에 대한 평탄보정을 정밀하게 수행할 수 있다. As the first transfer module is individually driven in this asynchronous control method, when one side of the base plate is in line contact with one side of the leveler, the driving of the corresponding first driving motor is stopped, and the other side of the first driving motor is driven to the base plate. The other side is brought into contact with the other side of the leveler after the entire area of one side of the base plate is in close contact with the upper surface of the leveler, and in this state, flatness correction for the base plate of the cartridge can be precisely performed.
여기서, 카트리지의 일측테두리에 배치되는 제1이송 모듈은 2개씩 배치되는 것으로 도시하고 설명하였지만 이에 한정되는 것은 아니며 대상물인 카트리지의 사이즈에 맞추어 2개이상의 설치갯수로 구비될 수 있다. Here, the first transport module disposed on one side of the cartridge has been illustrated and described as being disposed by two, but is not limited thereto, and may be provided with two or more installed numbers according to the size of the cartridge as an object.
상기한 구성을 갖는 멀티 프로버용 카트리지 얼라이너 장치(1000)는 상기 카트리지를 제1위치, 제2위치 및 제3위치 순으로 하여 장치의 내부에서 외부로 이송하거나 상기 카트리지를 제3위치, 제2위치 및 제1위치 순으로 하여 장치의 외부에서 내부로 이송하는 이송기능을 안정적으로 수행함과 동시에 이송대상물인 카트리지를 제1위치에서 확고히 고정하는 고정기능을 수행한다.The cartridge aligner device 1000 for a multi prober having the above configuration transfers the cartridge from the inside of the device to the outside in the order of the first position, the second position, and the third position, or transfers the cartridge to the third position and the second position. In the order of position and first position, the transfer function of transferring from the outside to the inside of the device is stably performed, and at the same time, the fixing function of firmly fixing the cartridge, which is the transfer object, at the first position is performed.
이에 따라, 상기 제1위치에서 웨이퍼의 검사공정이 완료된 카트리지를 프로브 카드, 웨이퍼 및 개별척으로 각각 개별적으로 분해하는 공정과, 프로브 카드, 웨이퍼 및 개별척을 결합하여 하나의 카트리지로 합체하는 공정을 안정적으로 수행한다. Accordingly, the process of separately disassembling the cartridge on which the inspection process of the wafer has been completed at the first position into a probe card, a wafer, and an individual chuck, and a process of combining the probe card, the wafer and the individual chuck into one cartridge are performed. perform stably.
즉, 상기 록킹 모듈에 의해서 베이스판이 클램핑되어 위치고정된 프로브 카드는 배치부와 대응하는 제1위치에서 웨이퍼가 안착된 개별척와 결합하여 하나의 카트리지로 합체한다.That is, the probe card in which the base plate is clamped by the locking module and fixed in position is combined with the individual chuck on which the wafer is seated at the first position corresponding to the arrangement unit to be combined into one cartridge.
상기 록킹 모듈의 언클램핑에 의해서 구속해제된 카트리지는 제1이송 모듈의 랙가이드에 베이스판의 양측테두리가 걸림연결된 상태에서 상기 제1이송 모듈의 제1구동모터를 구동시키면, 제1이송블럭의 상승이동과 더불어 제1위치에서 제2위치로 일정높이 상승된 후 정지대기한다.When the cartridge released by unclamping of the locking module drives the first driving motor of the first transfer module in a state in which both edges of the base plate are hooked and connected to the rack guide of the first transfer module, the first transfer block It rises to a certain height from the first position to the second position along with the upward movement and then waits for a stop.
이때, 상기 제1이송 모듈에 의해서 상승이동되는 카트리지는 상기 상부챔버의 일측면에 개구형성되는 진출입구와 서로 대응하는 높이에 정지되어 위치되도록 상기 제2위치와 대응하는 높이를 사전에 설정하여 제어하는 것이 바람직하다. At this time, the cartridge moved upward by the first transfer module is controlled by setting the height corresponding to the second position in advance so that the cartridge is positioned at a height corresponding to the inlet and the inlet opening formed on one side of the upper chamber in advance. It is preferable to do
그리고, 상기 제2위치까지 상승이동된 카트리지의 베이스판은 제2이송 모듈의 접촉가이드와 접촉되어 카트리지를 일시적으로 구속한다.And, the base plate of the cartridge upwardly moved to the second position comes into contact with the contact guide of the second transfer module to temporarily constrain the cartridge.
이러한 상태에서 상기 제2이송 모듈의 제2구동모터를 구동시키면, 상기 카트리지는 제2이송블럭의 수평이동과 더불어 진출입구 측으로 수평이동되며, 로봇 핸들러에 의한 픽업이 가능한 위치인 제3위치에서 정지대기한다.When the second driving motor of the second transfer module is driven in this state, the cartridge is horizontally moved toward the entrance and exit along with the horizontal movement of the second transfer block, and stops at the third position, which is a position where pickup by the robot handler is possible. wait
이때, 상기 제2위치에서 제3위치로 카트리지가 수평이동되어 정지되면, 상기 제2이송 모듈의 접촉가이드와 카트리지의 베이스판은 상기 접촉가이드의 상승복귀 작동에 의해서 접촉가이드와 서로 이격되어 구속을 해제하는 것이 바람직하다. At this time, when the cartridge is horizontally moved from the second position to the third position and stopped, the contact guide of the second transfer module and the base plate of the cartridge are spaced apart from the contact guide by the upward and return operation of the contact guide to obtain restraint. It is preferable to release
최종적으로, 상기 제3위치에서 정지대기하는 카트리지는 로봇 핸들러에 의해서 검사 유닛의 검사 채널공간으로 진입되어 멀티 프로버 방식으로 웨이퍼에 대한 전기검사공정을 수행한다.Finally, the cartridge waiting to be stopped at the third position is entered into the inspection channel space of the inspection unit by a robot handler to perform an electrical inspection process on the wafer in a multi-probe method.
한편, 상기 검사 유닛에 진입되어 웨이퍼에 대한 검사공정이 종료된 카트리지는 상기한 공정순서의 역순으로 상기 제2이송 모듈에 의해서 제3위치에서 제2위치로 수평이동되고, 상기 제1이송 모듈에 의해서 제2위치에서 제1위치로 하강이동되어 상기 배치부에 위치된다.On the other hand, the cartridge entering the inspection unit and the inspection process for the wafer is completed is horizontally moved from the third position to the second position by the second transfer module in the reverse order of the process sequence, and to the first transfer module It is moved downward from the second position to the first position and is located in the arrangement part.
그리고, 상기 록킹 모듈에 의해서 베이스판이 클램핑되어 배치부에 카트리지가 확고히 위치고정된 상태에서, 프로브카드, 웨이퍼 및 개별척을 개별적으로 서로 분해하는 공정을 수행하여 검사완료된 웨이퍼를 수거한다.Then, in a state in which the base plate is clamped by the locking module and the cartridge is firmly positioned in the placement unit, a process of individually disassembling the probe card, the wafer and the individual chuck is performed to collect the inspected wafer.
이상에서 설명한 본 발명은 전술한 실시예 및 첨부된 도면에 의해 한정되는 것이 아니고, 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 여러 가지 치환, 변형 및 변경이 가능함은 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자에게 명백할 것이다.The present invention described above is not limited by the above-described embodiments and the accompanying drawings, and it is common in the technical field to which the present invention pertains that various substitutions, modifications and changes can be made within the scope without departing from the technical spirit of the present invention. It will be clear to those who have the knowledge of

Claims (11)

  1. 프로브 카드, 웨이퍼, 개별척을 카트리지로 결합하거나 상기 카트리지를 분해하는 작업공간을 구비하는 본체 챔버;a body chamber having a working space for combining a probe card, a wafer, and an individual chuck into a cartridge or disassembling the cartridge;
    상기 카트리지가 배치되는 배치부를 관통형성한 본체 챔버의 상판에 구비되며, 상기 카트리지가 이동되어 수용되는 내부공간을 구비하는 상부 챔버; an upper chamber provided on the upper plate of the main chamber through which the cartridge is disposed, the upper chamber having an inner space in which the cartridge is moved and accommodated;
    상기 배치부에 위치하는 카트리지의 일부를 클램핑하여 구속하거나 언클램핑하여 해제하는 록킹 모듈; 을 포함하여, a locking module for releasing by clamping or unclamping a portion of the cartridge located in the arrangement; including,
    상기 록킹 모듈에서 언클램핑된 카트리지가 로봇 핸들러에 의해서 검사유닛 측으로 공급되거나 상기 검사유닛에서 검사완료된 카트리지가 로봇 핸들러에 의해서 상기 상부 챔버에 공급되어 상기 록킹 모듈에서 클램핑 고정되는, 멀티 프로버용 카트리지 얼라이너 장치.A cartridge unclamped in the locking module is supplied to the inspection unit by a robot handler or a cartridge that has been inspected in the inspection unit is supplied to the upper chamber by a robot handler and clamped and fixed in the locking module, cartridge aligner for a multi prober Device.
  2. 제1항에 있어서,According to claim 1,
    상기 배치부와 대응하는 제1위치와, 상기 제1위치로부터 소정 거리 이격되어 상기 카트리지가 외부로 배출될 수 있는 제2위치에 상기 카트리지가 선택적으로 위치되도록 상기 카트리지를 이송시키는 제1이송 모듈; 및 a first transport module for transporting the cartridge so that the cartridge is selectively positioned in a first position corresponding to the disposition unit and a second position spaced apart from the first position by a predetermined distance to allow the cartridge to be discharged to the outside; and
    상기 제2위치와, 상기 카트리지를 검사 유닛의 채널 공간으로 진출입시키는 로봇 핸들러가 상기 카트리지를 픽업하기 위한 제3위치에 상기 카트리지가 선택적으로 위치되도록 상기 카트리지를 이동시키는 제2이송 모듈;을 포함하는, 멀티 프로버용 카트리지 얼라이너 장치. A second transfer module for moving the cartridge so that the cartridge is selectively positioned at the second position and a third position for picking up the cartridge by a robot handler for moving the cartridge into and out of the channel space of the inspection unit , cartridge aligner device for multi prober.
  3. 제1항에 있어서,According to claim 1,
    상기 록킹 모듈은, 고정 클램퍼 및 상기 고정 클램퍼에 대하여 상대이동되는 가동클램퍼를 포함하고, The locking module includes a fixed clamper and a movable clamper that is moved relative to the fixed clamper,
    상기 고정 클램퍼와 가동클램퍼와의 사이에 상기 카트리지를 구성하는 프로브 카드의 베이스판의 외측테두리가 위치되어 클램핑되거나 언클램핑되는, 멀티 프로버용 카트리지 얼라이너 장치. The cartridge aligner device for a multi prober, wherein the outer edge of the base plate of the probe card constituting the cartridge is positioned between the fixed clamper and the movable clamper to be clamped or unclamped.
  4. 제2항에 있어서, 3. The method of claim 2,
    상기 제1이송 모듈은, 상기 상부 챔버에 수직하게 구비되는 일정길이의 제1스크류축을 정방향 또는 역방향으로 회전구동시키는 제1구동모터와, 상기 제1스크류축과 나사결합되는 암나사부를 갖추어 상기 제1스크류축의 회전방향에 따라 상하이동되는 제1이송 블럭 및 상기 카트리지의 일부가 대응삽입되는 가이드홈을 갖추어 상기 제1이송 블럭에 구비되는 랙가이드를 포함하는, 멀티 프로버용 카트리지 얼라이너 장치. The first transfer module includes a first driving motor for rotationally driving a first screw shaft of a predetermined length perpendicular to the upper chamber in a forward direction or a reverse direction, and a female screw part screwed with the first screw shaft, the first A cartridge aligner device for a multi prober, comprising: a first transport block that moves vertically according to the rotational direction of the screw shaft; and a rack guide provided in the first transport block by having a guide groove into which a part of the cartridge is inserted correspondingly.
  5. 제2항에 있어서, 3. The method of claim 2,
    상기 상판에는 상기 제1위치에서 카트리지의 평탄도를 확인할 수 있도록 카트리지의 일부와 평탄한 표면이 접해지는 적어도 하나의 레벨러가 구비되는, 멀티 프로버용 카트리지 얼라이너 장치. The upper plate is provided with at least one leveler in contact with a part of the cartridge and a flat surface so as to check the flatness of the cartridge at the first position, the cartridge aligner device for a multi prober.
  6. 제2항에 있어서, 3. The method of claim 2,
    상기 제2이송 모듈은, 상기 상부 챔버에 수평하게 구비되는 일정길이의 제2스크류축을 정방향 또는 역방향으로 회전구동시키는 제2구동모터와, 상기 제2스크류축과 나사결합되는 암나사부를 갖추어 상기 제2스크류축의 회전방향에 따라 수평이동되는 제2이송 블럭 및 상기 카트리지의 일부와 하부단이 접하여 구속되도록 상기 제2이송 블럭에 구비되는 접촉가이드를 포함하는, 멀티 프로버용 카트리지 얼라이너 장치.The second transfer module includes a second driving motor that rotates a second screw shaft of a predetermined length horizontally provided in the upper chamber in a forward or reverse direction, and a female screw part screwed with the second screw shaft, the second A cartridge aligner device for a multi prober, comprising: a second transfer block horizontally moved according to the rotational direction of the screw shaft;
  7. 제6항에 있어서, 7. The method of claim 6,
    상기 접촉가이드의 접촉단은 상승이동되는 상기 카트리지의 베이스판과 정지상태에서 접하도록 상기 제2이송 모듈의 제2이송 블럭에 고정설치되거나, 상승이동된후 정지되는 상기 카트리지의 베이스판과 접하도록 구동원에 의해서 상하이동되는, 멀티 프로버용 카트리지 얼라이너 장치. The contact end of the contact guide is fixedly installed on the second transfer block of the second transfer module so as to be in contact with the base plate of the cartridge being moved upwardly in a stationary state, or to come into contact with the base plate of the cartridge which is stopped after moving upwards. A cartridge aligner device for multi-prover that is vertically moved by a driving source.
  8. 제6항에 있어서, 7. The method of claim 6,
    상기 접촉가이드의 접촉단은 상기 카트리지의 베이스판 상부면에 요홈으로 함몰형성되거나 철부로 돌출형성되는 걸림부와 접하여 걸림력을 발생시키는 피걸림부로 이루어지거나, 상기 카트리지의 베이스판 상부면에 소정의 거칠기를 갖도록 구비되는 마찰면과 접하여 마찰력을 발생시키는 피마찰면으로 이루어지는, 멀티 프로버용 카트리지 얼라이너 장치. The contact end of the contact guide is formed as a locking part that is recessed into a recess in the upper surface of the base plate of the cartridge or comes into contact with a locking part protruding into a convex part to generate a locking force, or is formed in a predetermined position on the upper surface of the base plate of the cartridge. A cartridge aligner device for a multi prober, comprising a friction surface that is in contact with a friction surface provided to have roughness and generates a friction force.
  9. 제2항에 있어서, 3. The method of claim 2,
    상기 카트리지의 양측 테두리의 각 선,후단과 대응하는 상기 상부 챔버의 모서리부마다 상기 제1이송 모듈이 배치되고, 상기 제1이송 모듈은 상부 챔버에 4개 1조로 복수개 배치되는, 멀티 프로버용 카트리지 얼라이너 장치. The first transfer module is disposed at each edge of the upper chamber corresponding to each line of both sides of the border of the cartridge, the rear end, and the first transfer module is arranged in a plurality of four in one set in the upper chamber, a cartridge for a multi prober aligner device.
  10. 제9항에 있어서, 10. The method of claim 9,
    복수개의 제1이송 모듈은 상기 제1위치에서 제2위치로 카트리지를 수직방향으로 상승이동시킬 때 동기식으로 제어되는, 멀티 프로버용 카트리지 얼라이너 장치.The plurality of first transfer modules are synchronously controlled when vertically upwardly moving the cartridge from the first position to the second position.
  11. 제9항에 있어서, 10. The method of claim 9,
    복수개의 제1이송 모듈은 상기 제2위치에서 제1위치로 카트리지를 하강이동시키면서 카트리지의 일부를 상판에 구비되는 레벨러와 접촉시킬 때 비동기식으로 제어되는, 멀티 프로버용 카트리지 얼라이너 장치. A plurality of first transfer modules are asynchronously controlled when a portion of the cartridge is brought into contact with the leveler provided on the upper plate while moving the cartridge down from the second position to the first position, a cartridge aligner device for a multi prober.
PCT/KR2020/011914 2020-09-03 2020-09-04 Cartridge aligner apparatus for multi prober WO2022050453A1 (en)

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