WO2023074942A1

WO2023074942A1 - Cartridge transport device for multi-prober

Info

Publication number: WO2023074942A1
Application number: PCT/KR2021/015277
Authority: WO
Inventors: 남경태; 모승기; 추성원
Original assignee: 한국생산기술연구원
Priority date: 2021-10-28
Filing date: 2021-10-28
Publication date: 2023-05-04
Also published as: KR20230060669A

Abstract

A cartridge transport device for a multi-prober is provided. The present invention comprises: a first transport unit for moving a body frame in a Y axis direction parallel to the width direction of an inspection chamber by a first driving source; a second transport unit for moving an inner frame in a Z axis direction parallel to the height direction of the inspection chamber by a second driving source; a third transport unit for moving a reciprocating support in an X axis direction orthogonal to the Y axis direction by a third driving source; and a handler including a first sub-driving source and a second sub-driving source, the first sub-driving source having an upper carrier plate slidably assembled with a first sub-rail provided on the reciprocating support and moving the upper carrier plate in the Z axis direction, the second sub-driving source having a lower carrier plate slidably assembled with a second sub-rail provided on the upper carrier plate, and moving the lower carrier plate in the X axis direction, the lower carrier plate having a first and a second arm provided at a front end and a rear end thereof, respectively, the first and the second arm being selectively and correspondingly engaged and connected with a first and a second arm hole formed through the front and the rear end of the cartridge, respectively, so that the handler carries, in the X axis direction, the cartridge held by to the first and the second arm.

Description

Cartridge feeder for multi prober

The present invention relates to a device for transferring cartridges in a multi-prover, and more particularly, to a cartridge transfer device for a multi-prover that reciprocally transfers a cartridge including a probe card, a wafer, and an individual chuck between an aligner and an inspection chamber. It is about.

In general, a single prober method and a multi-prover method are known as a system for inspecting a semiconductor wafer (hereinafter referred to as a wafer).

The single prober method electrically tests one wafer at a time. After fixing one probe card on the stage, a plurality of wafers are put into the stage one by one to perform the test process.

In addition, the multi-prover method is different from the single prober method in which wafers are tested one by one with a prober probe, and a plurality of cartridges are individually loaded into a multi-stage channel provided in the inspection unit through a method of converting a probe card and a wafer into a cartridge. Then, several wafers are tested at the same time.

That is, as shown in FIG. 1, the multi-prover system combines a probe card having a plurality of probes, a wafer as an inspection object, and an individual chuck and sets them into one cartridge 1 or a cartridge including a test-completed wafer. An aligner 2 that performs a function of disassembling and separating the components into components, and a plurality of inspection channels 4a that perform a test process on wafers included in the combined cartridge 1 in multiple stages. The chamber 4 and the combined cartridge are transferred from the aligner 2 to the inspection channel 4a of the inspection chamber 4, or the cartridge 1 containing the inspected wafer is transferred to the inspection channel 4a of the inspection chamber 4. It consists of a configuration including a cartridge transfer device 3 such as a transfer robot handler that transfers from ) to the aligner 2.

That is, the cartridge transfer device includes a wafer that has undergone a test process in the inspection channel 4a of the inspection chamber 4 in order to separate the probe card, wafer, and individual chuck from the aligner 2 ( 1) is drawn from the inside of the inspection channel and transferred to the inside of the aligner 2, or the probe card and wafer in the aligner 2 to perform a test process on the wafer in the inspection channel 4a of the inspection chamber. and to perform a function of taking out the cartridge 1 in which the individual chucks are combined from the inside of the aligner 2 and transferring it to the inspection channel 4a side of the inspection chamber.

On the other hand, since there is a space limitation due to the nature of the semiconductor workplace, it is efficiently arranged in a narrow space formed between the aligner and the inspection chamber, and a passage through which the cartridge enters and exits from the aligner and is arranged in multiple stages in the inspection chamber A need for a cartridge transfer device capable of stably and smoothly reciprocating a heavy cartridge containing a wafer between a plurality of inspection channels in a state in which vibration is reduced has emerged.

(Patent Document 1) KR 10-2049413 B1

Therefore, the present invention is to solve the above problems, and its object is to stably move a cartridge containing a wafer from the inspection channel of the inspection chamber to the aligner side in a narrow space formed between the aligner and the inspection chamber. An object of the present invention is to provide a cartridge transfer device for a multi prober capable of stably transferring a cartridge from an aligner to an inspection channel side of an inspection chamber.

The technical problems to be achieved in the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the description below. You will be able to.

As a specific means for achieving the above object, a preferred embodiment of the present invention is a device for transferring a cartridge between an aligner for disassembling or assembling a cartridge and an inspection chamber having a plurality of inspection channels, wherein the aligner It has a fixed base fixedly installed between you and the inspection chamber, and has a first guide rail provided horizontally on the fixed base and a body frame assembled so as to be able to slide, and the body frame is moved to the inspection chamber by a first driving source. A first transfer unit for moving in the Y-axis direction parallel to the width direction of; a second transfer unit having an inner frame slidably assembled with a second guide rail provided perpendicular to the body frame and moving the inner frame in a Z-axis direction parallel to the height direction of the inspection chamber by a second driving source; It has a pair of right and left inner walls fixedly installed on the inner frame, a third guide rail provided horizontally on the pair of left and right inner walls, and a carriage assembled to be able to slide, and the carriage is operated by a third driving source. a third transfer unit for moving in the X-axis direction orthogonal to the Y-axis direction; and a first sub-drive source having an upper carrier plate slidably assembled with a first sub-rail provided on the carriage and moving the upper carrier plate in the Z-axis direction, and a second sub-drive source provided on the upper carrier plate. Equipped with a lower carrier plate slidably assembled with a sub-rail, and provided with first and second arms at the front and rear ends of the cartridge that are selectively hooked in correspondence with the first and second arm holes formed respectively through the front and rear ends of the cartridge. A handler for transporting the cartridges bound to the first and second arms in the X-axis direction, including a second sub-drive source for moving the lower carrier plate in the X-axis direction; including, inspection of any one of the plurality of inspection channels. Provided is a cartridge transfer device for a multi-prover that transfers a cartridge inside a channel to the inside of the aligner or transfers a cartridge inside the aligner to the inside of any one test channel among the plurality of test channels.

At this time, the body frame includes a pair of left and right outer side wall plates having a pair of left and right first moving units slidably assembled with the first guide rail, and a lower portion of which both ends are connected to the pair of left and right first moving units. It may include a connection plate and an upper connection plate to which the upper ends and both ends of each of the pair of left and right outer side wall plates are connected.

At this time, the first driving source includes a linear motor module including a linear stator of a predetermined length provided along the first guide rail and a linear mover provided on the lower surface of the body frame to correspond and interact with the linear stator. can do.

In this case, the first transfer unit may include a first encoder for controlling the movement of the body frame by detecting a scale tape provided in parallel with the first guide rail when the body frame moves horizontally in the Y-axis direction.

At this time, the inner frame has a pair of left and right inner side wall plates having a pair of left and right second moving units slidably assembled with the second guide rail, and an internal connection in which both ends are connected to the pair of left and right inner side wall plates. Plates may be included.

At this time, the second driving source may include a drive motor for rotationally driving a vertical screw shaft of a predetermined length screwed with a screw block fixed to an outer surface of one inner side wall plate of the pair of left and right inner side wall plates in a forward or reverse direction. can

In this case, the second transfer unit may include a second encoder for controlling the movement of the inner frame by sensing a scale tape provided in parallel with the second guide rail when the inner frame vertically moves in the Z-axis direction.

At this time, the carriage is provided with a pair of left and right third movable units at lower ends of both sides assembled to slide with the third guide rail, the handler is provided in the middle of the length, and the first aligner is recognized as an image. A camera and a second camera for recognizing the inspection chamber as an image may be included.

At this time, the third driving source may include a drive motor for rotationally driving a horizontal screw shaft of a predetermined length screwed with a screw block fixed to one side of the carriage in a forward or reverse direction.

In this case, the third transfer unit may include a third encoder for controlling the movement of the carriage by sensing a scale tape provided in parallel with the third guide rail when the carriage is horizontally moved in the X-axis direction.

At this time, the first sub-drive source includes a drive motor for rotationally driving a vertical sub-screw shaft of a predetermined length screwed with a sub-screw block fixedly installed on the upper carrier plate in a forward or reverse direction, and the second sub-drive source includes the A drive motor connected to any one of a plurality of operation pulleys rotatably provided at each corner of the upper carrier plate to rotate and drive the operation pulley in a forward or reverse direction, and fixedly installed on the lower carrier plate It may include an actuating belt that is connected to the belt clamp and is wound around the plurality of actuating pulleys to transmit driving force.

At this time, the handler includes a first sub-encoder for controlling the movement of the upper carrier plate by detecting a scale tape provided in parallel with the first sub-rail when the upper carrier plate vertically moves in the Z-axis direction, and the lower carrier plate It may include a second sub-encoder for controlling the movement of the lower carrier plate by sensing the scale tape provided in parallel with the second guide rail when the horizontal movement of the X-axis direction.

At this time, a fourth transfer unit for reciprocating a moving frame having a connector electrically connected to a connection terminal provided in the cartridge in the Z-axis direction by a fourth driving source, the moving frame includes side walls of the third transfer unit. A fourth guide rail provided on a pair of left and right inner walls forming a right and left pair of fourth moving units slidably assembled, the left and right pair of fourth moving units are provided at both ends, and the connector is attached to the upper part. It includes a moving plate provided on the surface, and the fourth driving source rotates a screw block fixed to one of the left and right fourth moving units and a vertical screw shaft of a predetermined length screwed with a female screw hole in a forward or reverse direction. A driving motor may be included.

According to the preferred embodiment of the present invention as described above, there are the following effects.

In the multi-prover system, it is possible to reciprocate safely between the aligner and the inspection chamber to increase work productivity, and it simplifies the entire transport path of the cartridge in the narrow installation space formed between the aligner and the inspection chamber. It is possible to increase the efficiency of transporting the cartridge in the transport system.

1 is a schematic diagram showing a general multi-prover system.

2A and 2B are overall perspective views illustrating a multi-prover system to which a cartridge transfer device for a multi-prover according to an embodiment of the present invention is applied.

3A and 3B are overall perspective views illustrating a multi-prover cartridge transfer device according to an embodiment of the present invention.

4 is a cross-sectional perspective view of a coupled state between a body frame and a fixed base in a first transfer unit applied to a multi-prover cartridge transfer device according to an embodiment of the present invention.

5 is a perspective view of a coupled state of a body frame and an internal frame in a second transfer unit applied to a multi-prover cartridge transfer device according to an embodiment of the present invention.

6A, 6B, and 6C are perspective views illustrating first and third transfer units and handlers applied to the multi-prover cartridge transfer device according to an embodiment of the present invention.

7A and 7B are perspective views illustrating a handler applied to a multi-prover cartridge transfer device according to an embodiment of the present invention.

8A and 8B are perspective views illustrating a coupled state of an upper carrier plate and a lower carrier plate of a handler applied to a cartridge transfer device for a multi-prover according to an embodiment of the present invention.

9A and 9B are perspective views illustrating an operating state of a lower carrier plate of a handler applied to a cartridge transfer device for a multi-prover according to an embodiment of the present invention.

10 is a perspective view showing a coupled state of a handler and a fourth transfer unit applied to a multi-prover cartridge transfer device according to an embodiment of the present invention.

11 is an operating state diagram illustrating a state in which a cartridge is transported using a handler applied to a multi-prover cartridge transport device according to an embodiment of the present invention.

Hereinafter, a preferred embodiment in which a person skilled in the art can easily practice the present invention will be described in detail with reference to the accompanying drawings. However, in the detailed description of the structural principle of a preferred embodiment of the present invention, if it is determined that a detailed description of a related known function or configuration may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted.

In addition, the same reference numerals are used for parts having similar functions and actions throughout the drawings.

In addition, throughout the specification, when a part is 'connected' to another part, it is not only 'directly connected', but also 'indirectly connected' with another element in between. include In addition, 'including' a certain component means that other components may be further included, not excluding other components unless otherwise stated.

As shown in FIGS. 2A and 2B, the multi-probe cartridge transfer device 100 according to a preferred embodiment of the present invention combines a probe card, a wafer, and individual chucks into a cartridge 1 or the cartridges for each component. It is disposed between the aligner 2 that performs the function of disassembling and the inspection chamber 4 having a plurality of inspection channels 4a in multiple stages to perform the inspection process on the wafer, and repeatedly moves the cartridge, which is a transfer object. It may include a first transfer unit 10, a second transfer unit 20, a third transfer unit 30, and a handler 40 so as to be reciprocated.

As shown in FIGS. 2A, 2B, 3A, and 3B, the first transfer unit 10 is a fixed base fixed to the floor between the aligner 2 and the inspection chamber 4. (11), and may include a main body frame (10a) that is slidably assembled with a first guide rail (12) of a fixed ring provided horizontally on the upper surface of the fixed base (11).

The body frame 10a moves left and right along the first guide rail 12 in the Y-axis direction parallel to the width direction of the inspection chamber 4 by the first driving source 13 generating a driving force when power is applied. It can be.

The fixing base 11 has a substantially rectangular plate-shaped upper plate 11a on an upper surface in which a plurality of first guide rails 12 are arranged in parallel, and has a plurality of legs 11b at a lower end, and the aligner ( 2) and one side is connected via a connecting member and the inspection chamber and the other side are connected via another connecting member so that the frame structure is fixedly installed on the floor.

The body frame 10a has a pair of left and right outer sides having a pair of left and right first moving units 14a having a first slider 12a slidably assembled with the first guide rail 12 at a lower end thereof. It includes a side wall plate 14, and a lower connection plate 15 to which both ends are connected to the left and right pair of first moving tables 14a, respectively, and each upper end and both ends of the left and right pair of outer side wall plates are respectively connected. It may include an upper connecting plate 16 connected thereto.

At this time, the first guide rail 12 has been shown and described as being composed of a total of four rail arrangement structures of two sets of a pair of left and right rail members, but is not limited thereto, and the Y axis of the body frame 10a It can be provided in various ways in consideration of straightness and flatness during directional left and right reciprocating transfer.

As shown in FIG. 4 , the first driving source 13 may be formed of a motor member that provides a driving force for reciprocating left and right movement of the body frame 10a in the Y-axis direction.

The first driving source 13 is mutually connected with the linear stator 13a having a predetermined length fixed to the upper plate 11a constituting the upper surface of the fixed base 11 along the first guide rail, and the linear stator 13a. It may be provided as a linear motor module including a linear mover 13b fixed to the lower connecting plate 15 corresponding to the lower surface of the body frame to act.

Both ends of the linear mover 13b are connected to a pair of left and right first movers 14a and correspond to the linear stator 113a on the lower surface of the lower connecting plate 15 constituting the lower surface of the body frame. It is desirable that it be fixedly installed so as to do so.

In addition, the first transfer unit 10 is fixed to a structure such as an upper base having another guide rail parallel to the first guide rail on the upper portion of the body frame 10a, and corresponding to the upper surface of the body frame. A linear motor module comprising a linear stator and a linear mover is applied between the upper base and the body frame, including a slider assembled to be slidably assembled with the guide rail on the upper connecting plate, thereby increasing the driving force of the first driving source. When the main body frame moves left and right in the Y-axis direction, the reciprocating transfer can be performed more smoothly.

The first transfer unit 10 includes a first sensing bar 17 having a predetermined length having a scale tape on the upper surface of the fixed base in parallel with a first guide rail, and the main body by the driving force of the first driving source. A first encoder 18 provided on the body frame may be included to sense the scale tape when the frame moves horizontally in the Y-axis direction.

The first encoder 18 detects a scale tape provided on one side of the first sensing bar to control the moving speed and position of the body frame, so that the first one side of the pair of left and right first moving tables 14a is controlled. It may be provided to be replaceable in the encoder holder provided on the moving table.

In addition, both ends of the fixing base 11 corresponding to both ends of the first guide rail 12 are subjected to impact force upon contact with a pair of left and right first moving units 14a provided on both sides of the body frame 10a. It is preferable to have a first stopper 19 having a shock absorbing damper member on one side facing the first moving table to prevent the body frame from coming off the rail while absorbing the shock.

Accordingly, the body frame of the first transfer unit, which is a heavy object including the second transfer unit, the third transfer unit, and the handler, is horizontally moved in the Y-axis direction from the upper surface of the fixed base by the driving force of the first driving source, and is horizontally moved. The position of the body frame is sensed in real time by the first encoder, and based on the detection signal of the first encoder, the body is placed in a column corresponding to an arbitrary test channel selected from among a plurality of test channels arranged in rows and columns in the test chamber. Precise and accurate positioning can be controlled so that the frame is in place or the body frame is in place at the entrance and exit of the aligner, which is the only passage through which the cartridge is moved in and out.

As shown in FIGS. 2A, 2B, 3A, and 3B, the second transfer part 20 is located inside each pair of left and right outer side wall plates 14 forming both side walls of the body frame 10a. It may include a second guide rail 22 provided perpendicularly to the surface and an inner frame 20a that is slidably assembled.

The inner frame 20a moves up and down in the Z-axis direction parallel to the height direction of the inspection chamber 4 along the second guide rail 22 by the second driving source 23 that generates a driving force when power is applied. It can be.

The inner frame 20a has a pair of left and right inner sides having a pair of left and right second moving tables 24a having a second slider 22a slidably assembled with the second guide rail 22 on an outer surface thereof. It may include a side wall plate 24, and an internal connection plate 25 to which each lower end and both ends of the pair of left and right inner side wall plates 24 are respectively connected.

At this time, the second guide rail 22 has been shown and described as consisting of a total of four rail arrangement structures of two sets of one pair of left and right rail members, but is not limited thereto, and reciprocating transfer in the Z-axis direction of the inner frame. It may be provided in various ways in consideration of straightness and flatness.

As shown in FIG. 5 , the second driving source 23 may be formed of a motor member that provides a driving force for reciprocating the inner frame 20a in the Z-axis direction.

The second driving source 23 is a vertical screw shaft 23a having a certain length that is screwed into a female screw hole formed in a screw block 23b fixed to an outer surface of one inner side wall plate among a pair of left and right inner side wall plates 24. It may be provided with a drive motor for rotationally driving the forward or reverse direction.

A bearing block 23c rotatably supported at the upper and lower ends of the vertical screw shaft is fixedly installed on the inner surface of one of the left and right outer side wall plates 14 corresponding to the vertical screw shaft 23a. And, it is preferable to fix and install the second driving source 23 made of a driving motor. .

In addition, the second transfer unit 20 arranges the second sensing bar 27 having a certain length and having a scale tape on the inner surface of one outer side wall plate of the pair of left and right outer side wall plates parallel to the second guide rail 22. and a second encoder 28 provided on the inner frame to sense the scale tape when the inner frame moves up and down in the Z-axis direction by the driving force of the second driving source.

The second encoder 28 senses a scale tape provided on one side of the second sensing bar to control the moving speed and position of the inner frame, so as to control the moving speed and position of the left and right pair of second moving tables 24a. It may be provided to be replaceable in the encoder holder provided on the moving table.

In addition, the upper and lower ends of the outer side wall plate 14 corresponding to the upper and lower ends of the second guide rail have an impact force upon contact with a pair of left and right second moving units 24a provided on both sides of the inner frame 20a. It is preferable to have a second stopper 29 having a shock absorbing damper member on one side facing the second moving table to prevent the rail from coming off while absorbing the shock.

Accordingly, the inner frame of the second transfer unit, which is a heavy object including the third transfer unit and the handler, is vertically moved in the Z-axis direction on the vertical inner surface of the body frame by the driving force of the second driving source, and the inner frame is vertically moved. The position of is sensed in real time by the second encoder, and based on the detection signal of the second encoder, an internal frame in a row corresponding to an arbitrary test channel selected from among a plurality of test channels arranged in rows and columns in the test chamber based on the detection signal of the second encoder. It is possible to precisely and accurately control the position so as to place the inner frame in place or to place the inner frame at the entrance and exit of the aligner, which is the only passage through which the cartridge enters and exits.

As shown in FIGS. 2A, 2B, 3A, 3B, 6A, 6B, and 6C, the third transfer unit 30 is a pair of left and right inner portions forming both side walls of the inner frame 20a. It includes a pair of left and right inner walls 31 coupled to the side wall plates 24 and is assembled to slide with the third guide rail 32 provided horizontally at each upper end of the pair of left and right inner walls. (34) may be included.

At this time, the left and right pair of inner walls 31 are each inner surface of the left and right pair of inner side wall plates 24 so as to form a predetermined interval for securing a space for installing a fourth driving source of a fourth transfer unit to be described later. And it can be fixedly installed via the spacer (31a).

The carriage 34 has an X axis orthogonal to the Y axis direction, which is the width direction of the inspection chamber 4, along the third guide rail 32 by a third drive source 33 generating a driving force when power is applied. It can be moved back and forth in the direction.

The carriage 34 has a pair of left and right third moving units 34a having third sliders 32a slidably assembled with the third guide rail 32 at both lower ends, which will be described later. It is a structure in which the handler 40 including the upper carrier plate 42 and the lower carrier plate 46 is provided in the middle of its length and moved back and forth along with the handler in the X-axis direction by the driving force of the third driving source.

As shown in FIGS. 7A and 7B , the third driving source 33 may be formed of a motor member that provides a driving force for moving the carriage 34 forward and backward in the X-axis direction.

The third driving source 33 rotates a horizontal screw shaft 33a having a predetermined length, which is screwed with a female screw hole formed in a screw block 33b fixed to one side of the carriage 34, in a forward or reverse direction. It may be equipped with a motor.

A bearing block 33c rotatably supported at the front and rear ends of the horizontal screw shaft is fixedly installed on one inner wall of the left and right pair of inner walls 31 corresponding to the vertical screw shaft 33a, and driven by a driving motor. The third driving source 33 formed is fixedly installed.

At this time, a belt member such as a timing belt is connected between the drive pulley provided on the drive shaft of the third drive source 33 and the driven pulley provided on one end of the horizontal screw shaft 33a to move the horizontal screw shaft forward or Although shown and described as being rotated in the reverse direction, it is not limited thereto, and the drive shaft of the third drive source and one end of the horizontal screw shaft are directly connected or indirectly connected through a coupler to rotate the horizontal screw shaft in the forward or reverse direction. can

In addition, when the carriage 34 is horizontally moved in the X-axis direction by the driving force of the third driving source, the third transfer unit 30 detects a scale tape provided on one inner wall of the pair of left and right inner walls. A third encoder 38 provided on the table 34 may be included.

The third encoder 38 senses a scale tape provided in parallel with a third rail on one inner wall of the left and right pair of inner walls to control the moving speed and position of the carriage. (34a) can be provided in a replaceable manner in the encoder holder provided in the third moving table on one side.

In addition, the carriage 34 includes a first camera 37a provided on the upper surface of the aligner 2 and recognizing and confirming the entrance 2a, which is a passage through which the cartridge enters and exits, as an image, It may include a second camera 37b for recognizing and confirming an entrance and exit of an inspection channel 4a selected from among a plurality of inspection channels of the inspection chamber 4 as an image.

Accordingly, the carriage of the third transfer unit, which is a heavy object including the handler, is horizontally moved in the X-axis direction from the upper end of the inner wall by the driving force of the third driving source, and the position of the horizontally moved carriage is determined by the third encoder. It is sensed in real time and based on the detection signal of the third encoder, the carriage is positioned so as to approach an arbitrary test channel selected from among a plurality of test channels arranged in rows and columns in the test chamber, or the cartridge enters and exits. It is possible to accurately and accurately control the position of the carriage so as to approach the entrance and exit of the aligner, which is a passage.

As shown in FIGS. 2A, 2B, 3A, 3B, and 7A and 7B, the handler 40 slides with the first subrail 41 provided perpendicularly to the carriage 34. A first sub that includes an upper carrier plate 42 having a substantially rectangular plate shape having a first sub slider 43 assembled thereto, and providing a driving force for vertically reciprocating the upper carrier plate 42 in the Z-axis direction. A drive source 44 may be included.

The first sub-rail 41 is fixedly installed on one side of a vertical board 41a fixed vertically in the middle of the length of the carriage, and the first sub-slider 43 is installed on the upper surface of the upper carrier plate. It may be fixedly installed on one side of another vertical plate that is vertically fixedly installed.

The first sub driving source 44 may be formed of a motor member that provides a driving force for reciprocating the upper carrier plate 42 up and down in the Z-axis direction.

The first sub-drive source 44 is a drive motor for rotationally driving a vertical sub-screw shaft 44a having a predetermined length, which is screwed with a female screw hole formed in a sub-screw block 44b fixed to the upper carrier plate, in a forward or reverse direction. can be provided with

Bearing blocks for rotatably supporting upper and lower ends of the vertical sub-screw shaft are fixedly installed on the carriage 34, and a first sub-driving source composed of a driving motor is fixedly installed.

It is preferable to form an opening of a predetermined size through the upper carrier plate 42 corresponding to the first sub-drive source so that the vertical sub-screw shaft 44a can be vertically disposed without interference.

The handler 40 is provided with a sub vertical bar 49b having a scale tape on one surface parallel to the first sub rail 41 on the carriage 34, and the driving force of the first sub driving source A first sub-encoder 49a provided on the upper carrier plate may be included to detect the scale tape when the upper carrier plate moves vertically in the Z-axis direction.

Here, the first sub-encoder 49a may be provided in a replaceable manner in an encoder holder that is coupled to and fixedly installed with the upper carrier plate or the sub-screw block.

In addition, the handler 40 includes a lower carrier plate 46 having a second sub-rail 45 provided on the lower surface of the upper carrier plate 42 and a second sub-slider 47 slidably assembled. Including, at the front and rear ends of the lower carrier plate 46, the first and second female holes H1 and H2 formed through each of the front and rear ends of the substantially rectangular plate-shaped base plate 1a constituting the cartridge 1 Correspondingly, the lower end may include first and second arms P1 and P2 that are selectively engaged.

A second sub driving source 48 may be provided to provide a driving force for moving the lower carrier plate 46 having the first and second arms at the front and rear ends, respectively, in the X-axis direction.

The second sub-rails 45 are horizontally fixed to the lower surfaces of both left and right sides of the upper carrier plate, and the second sub-sliders 47 are fixed to the upper surfaces of both left and right sides of the lower carrier plate so that the horizontal rail can be combined with

The second sub driving source 48 may be formed of a motor member providing a driving force for reciprocating the lower carrier plate 46 forward and backward in the X-axis direction.

The second sub driving source 48 is connected to any one of the plurality of operating pulleys 48a rotatably provided at each corner of the upper carrier plate to rotate and drive the operating pulley in a forward or reverse direction. It is provided as a motor and includes an actuating belt 48b such as a timing belt that is wound so that the outer and inner surfaces of the plurality of actuating pulleys are in contact with each other to transmit driving force of the second sub-drive source 48, and the actuating belt ( 48b) may be connected to the lower carrier plate 46 via a belt clamp 48c fixed to the upper surface of the lower carrier plate.

At this time, the lower carrier plate 46 includes a tension-adjusting pulley 48d for adjusting the tension of the operating belt by being circumscribed with an outer surface midway through the length of the operating belt, and the axis of the tension-adjusting pulley penetrates the lower carrier plate. It may include an adjusting member that is assembled to be reciprocally movable in the formed long hole, coupled to be orthogonal to an axis of the tension adjusting pulley, and adjusts the tension of the operating belt by changing the position of the tension adjusting pulley located in the long hole.

The handler 40 is provided with a sub horizontal bar 49d having a scale tape on one side of the upper surface of one side of the lower carrier plate 46 in parallel with the second sub rail 45, and the second sub driving source. A second sub encoder 49c provided on the upper carrier plate 42 may be included to detect the scale tape when the lower carrier plate 46 is horizontally moved in the X-axis direction by the driving force of (48).

The second sub encoder 49c is an encoder provided on one edge of the upper carrier plate 42 to control the moving speed and position of the lower carrier plate by detecting a scale tape provided on one side of the sub horizontal bar. The holder may be provided interchangeably.

Accordingly, the upper carrier plate is moved up and down in the Z-axis direction on the carriage by the driving force of the first sub driving source, and the position of the upper carrier plate vertically moved is detected in real time by the first sub encoder. Based on the detection signal of the first sub-encoder, one of the first and second arms of the lower carrier plate is inserted into any one of the first and second female holes of the cartridge to be precisely and accurately positioned so that it is engaged or released. You can control it.

In addition, the lower carrier plate is horizontally moved in the X-axis direction from the lower part of the upper carrier plate by the driving force of the second sub driving source, and the position of the horizontally moved lower carrier plate is sensed in real time by the second sub encoder, Based on the detection signal of the first sub-encoder, one of the first and second arms of the lower carrier plate is caught in any one of the first and second female holes of the cartridge and moves the restrained cartridge in the X-axis direction. It is possible to precisely and accurately control the horizontal movement of the lower carrier plate so as to move.

On the other hand, the moving frame (50a) having a connector 55 electrically connected to the connection terminal provided on the lower surface of the cartridge (1) to transmit and receive electrical signals and supply power to the fourth moving frame (50a) in the Z-axis direction. A transfer unit 50 may be included.

The fourth transfer unit 50 is slidably assembled with a fourth guide rail 52 provided perpendicularly to a pair of left and right inner walls 31 forming side walls of the third transfer unit 30, It may include a moving frame (50a) having a connection terminal provided on the lower surface of the cartridge and a connector corresponding to the upper surface.

The moving frame 50a may be moved up and down in the Z-axis direction along the fourth guide rail so that the connection terminal and the connector of the cartridge are connected or separated by the fourth driving source 53 that generates a driving force when power is applied. .

The moving frame 50a has a pair of left and right fourth moving tables 54a having fourth guide rails 52 provided perpendicularly to each inner surface of the pair of left and right inner walls, and It may include a moving plate 54 having a moving table at both ends and having a connector 54a electrically connected to an external power source on an upper surface.

As shown in FIG. 10, the fourth driving source 53 may be formed of a motor member that provides a driving force for vertically reciprocating the moving frame 50a in the Z-axis direction.

The fourth driving source 53 includes a vertical screw shaft 53a having a certain length that is screwed with a female screw hole formed in a screw block 53b fixed to the outer surface of one of the left and right fourth moving units 54a. It may be provided with a driving motor that rotates in a forward or reverse direction.

A bearing block rotatably supported by the upper and lower ends of the vertical screw shaft is fixedly installed on the outer surface of one inner wall of the pair of left and right inner walls 31 corresponding to the vertical screw shaft 53a, and driven by a driving motor. It is preferable to fixedly install the fourth driving source 53 formed.

In addition, the fourth transfer unit 50 is provided with a scale tape on an inner surface of one inner wall of the pair of left and right inner walls parallel to the fourth guide rail, and the Z of the moving frame by the driving force of the fourth driving source. A fourth encoder provided in the moving frame may be included to sense the scale tape when it moves up and down in the axial direction.

The fourth encoder 58 is provided on one side of the fourth moving table among the pair of left and right fourth moving tables 54a to control the moving speed and position of the moving frame by sensing the scale tape provided on the inner wall. It may be provided interchangeably in the encoder holder.

Accordingly, the inner frame having the connector is vertically moved in the Z-axis direction between a pair of left and right inner walls by the driving force of the fourth driving source, and the position of the vertically moving moving frame is sensed in real time by the fourth encoder. And, based on the detection signal of the fourth encoder, the moving frame can be accurately and accurately positioned so that the connector provided on the moving frame is connected to or separated from the connection terminal provided on the lower surface of the cartridge.

Using the multi-prover cartridge transfer device 100 having the above configuration, the cartridges united in the aligner are taken out and transported into an arbitrary test channel among a plurality of test channels of the test chamber, or when the test is completed in the test channel. The process of taking out the cartridge including the wafer and transferring it to the inside of the entrance 2a of the aligner may be performed in a narrow space between the aligner and the inspection channel.

That is, by horizontally moving the body frame along with the handler in the Y-axis direction by the first driving source 13 of the first transfer unit 10, an arbitrary test channel selected from among a plurality of test channels arranged in rows and columns in the test chamber Position the body frame in the column corresponding to .

Then, by vertically moving the inner frame along with the handler in the Z-axis direction by the second driving source of the second transfer unit, the inner frame is placed in a row corresponding to an arbitrary test channel selected from among a plurality of test channels arranged in rows and columns in the test chamber. position the frame.

In this state, the step of transporting the cartridge to take out the cartridge that has been inspected from the inside of the inspection channel and supply it to the inlet and outlet of the aligner is performed by the third transfer unit and the handler as follows, and the integration inside the aligner A process of transferring the cartridge to withdraw the cartridge and supply the cartridge to the inside of the test channel may be performed in a reverse order.

As shown in FIG. 11 (a), the handler 40 facing each other among the plurality of inspection channels is horizontally moved along with the carriage toward the inspection channel by the third driving source of the third transfer unit, When the first arm of the lower carrier plate provided in the handler horizontally moving in the X-axis direction corresponds to the second arm hole penetrated through the base plate of the cartridge located inside the test channel, forward operation of the third driving source occurs. Stops the horizontal movement of the handler in the X-axis direction by

In this state, the lower carrier plate and the cartridge are constrained to each other by lowering the upper carrier plate in the Z-axis direction by the first sub driving source.

At this time, if the first arm of the lower carrier plate and the second arm hole of the base plate do not match, the position of the first arm may be adjusted by finely adjusting the lower carrier plate in a horizontal direction by the second sub-drive source.

As shown in FIG. 11(b), the handler 40 having the lower carrier plate constrained to the cartridge is horizontally moved along with the carriage toward the aligner by the third driving source of the third transfer unit, and the inspection channel When the rest of the body of the cartridge, from which a part of the body is withdrawn from the inside, enters between the pair of left and right inner walls, the horizontal movement of the handler in the X-axis direction by the reverse operation of the third driving source is stopped.

As shown in (c) of FIG. 11, the cartridge constrained to the lower carrier plate of the handler moves horizontally together with the lower carrier plate horizontally moved toward the aligner by the first sub driving source, and the base of the cartridge moves horizontally. The plate is guided while being supported along a support rail provided on the inner surface of a pair of left and right inner walls.

The upper carrier plate is moved upward by the first sub driving source to separate the cartridge and the lower carrier plate disposed between the pair of left and right inner walls, thereby separating the cartridge and the handler from each other.

In this state, as shown in (d) of FIG. 11, the handler is horizontally moved toward the inspection channel by the third driving source and the first and second arms of the lower carrier plate provided in the handler are horizontally moved in the X-axis direction. When the first and second arm holes of the base plate correspond to each other one-to-one, the horizontal movement of the handler in the X-axis direction by the forward operation of the third driving source is stopped.

Continuously, by lowering the upper carrier plate in the Z-axis direction by the first sub-drive source, the lower ends of the first and second arms of the lower carrier plate are inserted into the first and second female holes of the base plate in correspondence with each other, thereby correspondingly inserting the lower carrier plate into the lower carrier plate. and the cartridge are constrained to each other.

At this time, if the first and second arms of the lower carrier plate and the first and second arm holes of the base plate do not match, the second sub-drive source finely adjusts the lower carrier plate in the horizontal direction to form the first and second arms. position can be adjusted.

As shown in (e) of FIG. 11, the handler 40 having the lower carrier plate constrained to the cartridge is horizontally moved along with the carriage toward the aligner by the third driving source of the third transport unit, thereby removing the cartridge. When it approaches the aligner side as much as possible, the horizontal movement of the handler in the X-axis direction by the reverse operation of the third driving source is stopped.

The upper carrier plate is moved upward by the first sub driving source to separate the cartridge and the lower carrier plate from each other, thereby releasing the cartridge and the handler from each other.

In this state, as shown in (f) of FIG. 11, the handler is horizontally moved toward the inspection channel by the third driving source, and the second arm of the lower carrier plate provided in the handler horizontally moves in the X-axis direction. When the first female hole of the base plate corresponds to each other one-to-one, the horizontal movement of the handler in the X-axis direction by the forward operation of the third driving source is stopped.

In this state, by lowering the upper carrier plate in the Z-axis direction by the first sub driving source in the same manner as above, the lower end of the second arm of the lower carrier plate is inserted into the first female hole of the base plate in correspondence with the lower carrier plate and Constrain the cartridges to each other.

At this time, if the second arm of the lower carrier plate and the first arm hole of the base plate do not match, the position of the second arm may be adjusted by finely adjusting the lower carrier plate in a horizontal direction by the second sub-drive source.

Finally, as shown in FIG. 11(g), the cartridge constrained to the lower carrier plate of the handler is horizontally moved together with the lower carrier plate horizontally moved toward the aligner by the second sub driving source, and the cartridge is horizontally moved. is entered into the entrance provided at the top of the aligner.

When the cartridge is completely entered into the entrance and exit, the upper carrier plate is moved upward by the first sub driving source to separate the cartridge and the lower carrier plate from each other, and then the lower carrier plate is moved to the inspection channel by the second sub driving source. At the same time, the handler is horizontally moved to the test channel side by the third driving source, and returns to the initial state to perform a post-process.

The present invention described above is not limited by the foregoing embodiments and the accompanying drawings, and various substitutions, modifications, and changes are possible within a range that does not deviate from the technical spirit of the present invention. will be clear to those who have knowledge of

[Description of code]

1: cartridge 1a: base plate

2: aligner 2a: entrance

4: inspection chamber 4a: inspection channel

10: first transfer unit 20: second transfer unit

30: third transfer unit 40: handler

50: 4th transfer unit

Claims

In the device for transporting the cartridge between an aligner for disassembling or assembling the cartridge and an inspection chamber having a plurality of inspection channels,

It has a fixing base fixedly installed between the aligner and the inspection chamber, and has a first guide rail provided horizontally on the fixing base and a body frame assembled so as to be slidable, and the main body frame is moved by a first driving source. a first transfer unit that moves in the Y-axis direction parallel to the width direction of the inspection chamber;

a second transfer unit having an inner frame slidably assembled with a second guide rail provided perpendicular to the body frame and moving the inner frame in a Z-axis direction parallel to the height direction of the inspection chamber by a second driving source;

It has a pair of right and left inner walls fixedly installed on the inner frame, a third guide rail provided horizontally on the pair of left and right inner walls, and a carriage assembled to be able to slide, and the carriage is operated by a third driving source. a third transfer unit for moving in the X-axis direction orthogonal to the Y-axis direction; and

A second sub provided on the upper carrier plate having an upper carrier plate assembled to be slidably assembled with a first subrail provided in the carriage and having a first sub driving source for moving the upper carrier plate in the Z-axis direction Equipped with a lower carrier plate slidably assembled with a rail, and having first and second arms selectively engaged at the front and rear ends corresponding to the first and second arm holes formed through the front and rear ends of the cartridge, respectively. A handler having a second sub driving source for moving the lower carrier plate in the X-axis direction and transporting the cartridges bound to the first and second arms in the X-axis direction; including,

Cartridge transfer for multi prober, which transports a cartridge inside any one of the plurality of test channels to the inside of the aligner or transfers a cartridge inside the aligner to the inside of any one of the plurality of test channels Device.
According to claim 1,

The body frame includes a pair of left and right outer side wall plates having a pair of left and right first moving units slidably assembled with the first guide rail, and a lower connecting plate having both ends connected to the pair of left and right first moving units. and an upper connecting plate to which upper ends and both ends of the pair of left and right outer sidewall plates are connected.
According to claim 1,

The first driving source includes a linear motor module including a linear stator of a predetermined length provided along the first guide rail and a linear mover provided on the lower surface of the body frame to correspond and interact with the linear stator. Cartridge transfer device for multi prober.
According to claim 1,

The first transfer unit includes a first encoder for controlling the movement of the body frame by detecting a scale tape provided in parallel with the first guide rail when the body frame moves horizontally in the Y-axis direction, a multi-prover cartridge transport device .
According to claim 1,

The inner frame includes a pair of left and right inner side wall plates having a pair of left and right second moving units slidably assembled with the second guide rail, and an inner connecting plate having both ends connected to the pair of left and right inner side wall plates. Cartridge transfer device for a multi-prover, comprising:
According to claim 1,

The second driving source includes a driving motor for rotationally driving a vertical screw shaft of a predetermined length screwed with a screw block fixed to an outer surface of one inner side wall plate of the pair of left and right inner side wall plates in a forward or reverse direction. Cartridge transfer device for prober.
According to claim 1,

The second transfer unit includes a second encoder for controlling the movement of the inner frame by detecting a scale tape provided in parallel with the second guide rail when the inner frame is vertically moved in the Z-axis direction.
According to claim 1,

The carriage includes a pair of left and right third moving tables assembled to slide with the third guide rail at lower ends of both sides, the handler is provided in the middle of the length, and a first camera for recognizing the aligner as an image; Cartridge transfer device for a multi-prover, including a second camera for recognizing the inspection chamber as an image.
According to claim 1,

The third driving source includes a drive motor for rotationally driving a horizontal screw shaft of a predetermined length screwed with a screw block fixed to one side of the carriage in a forward or reverse direction.
According to claim 1,

The third transfer unit includes a third encoder for controlling the movement of the carriage by detecting a scale tape provided in parallel with the third guide rail when the carriage is horizontally moved in the X-axis direction.
According to claim 1,

The first sub-drive source includes a drive motor for rotationally driving a vertical sub-screw shaft of a predetermined length screwed with a sub-screw block fixedly installed on the upper carrier plate in a forward or reverse direction;

The second sub driving source includes a drive motor connected to one of a plurality of operation pulleys rotatably provided at each corner of the upper carrier plate and rotationally driving the operation pulley in a forward or reverse direction; Cartridge transport device for a multi-prover comprising an actuating belt connected to a belt clamp fixedly installed on the lower carrier plate and wound around the plurality of actuating pulleys to transmit driving force.
According to claim 1,

The handler includes a first sub-encoder for controlling the movement of the upper carrier plate by detecting a scale tape provided in parallel with the first sub-rail when the upper carrier plate vertically moves in the Z-axis direction,

And a second sub-encoder for controlling the movement of the lower carrier plate by detecting a scale tape provided in parallel with the second guide rail when the lower carrier plate is horizontally moved in the X-axis direction.
According to any one of claims 1 to 12,

A fourth transfer unit for reciprocating a moving frame having a connector electrically connected to a connection terminal provided in the cartridge in a Z-axis direction by a fourth driving source,

The moving frame includes a pair of left and right fourth moving units slidably assembled with a fourth guide rail provided on a pair of left and right inner walls forming both side walls of the third transfer unit, and It includes a moving plate having a moving table at both ends and having the connector on an upper surface,

The fourth drive source includes a screw block fixed to one of the left and right fourth movers and a drive motor for rotating and driving a vertical screw shaft of a predetermined length screwed with a female screw hole in a forward or reverse direction, and a multi-prover cartridge. transfer device.