WO2020199823A1 - 潜望式摄像模组及多摄模组 - Google Patents

潜望式摄像模组及多摄模组 Download PDF

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Publication number
WO2020199823A1
WO2020199823A1 PCT/CN2020/077492 CN2020077492W WO2020199823A1 WO 2020199823 A1 WO2020199823 A1 WO 2020199823A1 CN 2020077492 W CN2020077492 W CN 2020077492W WO 2020199823 A1 WO2020199823 A1 WO 2020199823A1
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WO
WIPO (PCT)
Prior art keywords
camera module
axis
comb
optical
incident light
Prior art date
Application number
PCT/CN2020/077492
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English (en)
French (fr)
Inventor
姚立锋
陈振宇
Original Assignee
宁波舜宇光电信息有限公司
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Publication of WO2020199823A1 publication Critical patent/WO2020199823A1/zh

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
    • G02B23/08—Periscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
    • G03B13/32—Means for focusing
    • G03B13/34—Power focusing
    • G03B13/36—Autofocus systems
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/682—Vibration or motion blur correction
    • H04N23/685—Vibration or motion blur correction performed by mechanical compensation

Definitions

  • This application relates to photography and camera equipment technology. Specifically, this application relates to compact camera module technology.
  • the lateral position of the lens module can be moved, or the entire camera module can be quickly tilted to offset camera shake during image capture.
  • camera shake has 6 degrees of freedom, including linear movement in the XYZ coordinate system, tilt around the X axis (or called rotation), tilt around the Z axis (or yaw) and around the Y axis The tilt (or pitch).
  • most of the existing OIS anti-shake devices use a combination of magnets and coils to drive the lens in the camera, but as the lens increases, the combination of magnets and coils is increasingly difficult to meet application requirements.
  • the structure of the magnet + coil can no longer fully support the driving behavior of the lens.
  • the cost of the anti-shake device of the magnet + coil remains high.
  • two sets of magnets for focusing and anti-shake The coil structure inevitably occupies the space of the camera module, which makes it difficult to reduce the size of the camera module in the direction perpendicular to the optical axis, which is not conducive to the miniaturization of the camera module.
  • the periscope dual camera module is usually a combination of a periscope camera module and a traditional module.
  • the periscope camera module reflects the light incident vertically to the end of the module by adding a prism or mirror at the front of the traditional module, so it can convert the vertical light into horizontal light and enter the module.
  • the module of the telephoto lens can be placed horizontally and the height of the module can be reduced.
  • the periscope camera module can also be used as a single camera module to avoid the limitation of the terminal device thickness on the z-axis size of the module.
  • the z-axis refers to the coordinate axis that coincides with the direction of the optical axis.
  • the current pressure to reduce the single pixel size of the photosensitive chip causes the imaging of the camera module to be more sensitive to jitter.
  • Periscope single-camera and dual-camera modules also face this problem.
  • the prism or mirror is introduced in the periscope module to deflect the incident light, the prism or mirror also needs to consider the problem of anti-shake.
  • the current solution is to add a set of OIS anti-shake devices for prisms or mirrors.
  • the current periscope module is equipped with a set of OIS mechanisms at the light turning element (such as a prism or a mirror) and the lens end to achieve optical anti-shake.
  • this design is costly, difficult to assemble, production efficiency and yield are all facing challenges.
  • a periscope camera module including: an optical path folding element having a reflective member for refracting incident light propagating along a first optical axis to propagating along a second optical axis , Wherein the first optical axis and the second optical axis are at an angle; an optical lens assembly arranged along the second optical axis to receive incident light deflected by the optical path folding element; a photosensitive assembly, It is arranged along the second optical axis and receives incident light passing through the optical lens assembly, so that the incident light passing through the optical lens assembly forms an image on the photosensitive assembly; wherein, the optical path folding element also has an anti- A shake actuation mechanism, the anti-shake actuation mechanism drives the reflective member to rotate by electrostatic force to compensate for the position change of the incident light due to shaking when the incident light is imaged on the photosensitive assembly.
  • the reflective member is a plane mirror.
  • the anti-shake actuation mechanism is a MEMS drive mechanism.
  • first optical axis and the second optical axis are substantially perpendicular.
  • the periscope camera module further includes: a sensor for detecting the displacement of the periscope camera module due to shaking; a processor for determining according to the detection result of the sensor A compensation amount for compensating the displacement; wherein the anti-shake actuation mechanism drives the reflective member to rotate according to the compensation amount to compensate for the incident light that occurs due to jitter when imaging on the photosensitive component The location changes.
  • the senor includes at least one of an accelerometer, a gyroscope, and a magnetometer.
  • the periscope camera module is shaken, so that the image formed by the incident light on the photosensitive component is shifted, and the anti-shake actuation mechanism is driven in response to the compensation amount.
  • the reflecting member rotates around at least one axis to compensate for the deviation of the incident light on the photosensitive component.
  • the at least one axis includes a first axis and a second axis perpendicular to the first axis.
  • the light path folding element further includes a substrate, and the anti-shake actuation mechanism and the reflective member are formed on the substrate.
  • the substrate includes a first silicon layer, a silicon oxide layer, and a second silicon layer that are sequentially stacked.
  • the anti-shake actuation mechanism includes a vertical comb drive structure.
  • the vertical comb drive structure includes upper and lower comb fingers for driving the reflective member by electrostatic force; wherein the reflective member is etched by etching the second A silicon layer is formed by coating an optically reflective coating on its surface; and wherein the upper comb-shaped fingers are formed by etching the first silicon layer and the lower comb is formed by etching the second silicon layer Like fingers.
  • the light path turning element further includes a supporting frame, and the reflecting member is connected to the supporting frame through a hinge structure, and is positioned between the upper comb-shaped fingers and the lower comb-shaped fingers. Driven by the intermediate electrostatic force, the reflecting mirror is rotated relative to the supporting frame around the first axis.
  • the light path turning element further includes a supporting frame, and the reflecting member is connected to the supporting frame through a hinge structure, and is positioned between the upper comb-shaped fingers and the lower comb-shaped fingers. Driven by the intermediate electrostatic force, the reflecting mirror rotates around the second axis under the driving of the supporting frame.
  • the light path turning element further includes a first electrode connected to the upper comb-shaped fingers and a second electrode connected to the lower comb-shaped fingers, wherein the first The electrode and the second electrode are used to respectively provide the upper comb-shaped fingers and the lower comb-shaped fingers with power to generate the electrostatic force.
  • the periscope camera module further includes a data processing module, which is used to detect the jitter of the image output by the photosensitive component, calculate and output to the anti-shake actuation mechanism for compensating the A control signal for image jitter; the anti-shake actuation mechanism drives the movement of the optical path folding element according to the control signal, so as to compensate for the jitter of the optical path folding element and the optical lens in the imaging process Jitter of components.
  • a data processing module which is used to detect the jitter of the image output by the photosensitive component, calculate and output to the anti-shake actuation mechanism for compensating the A control signal for image jitter; the anti-shake actuation mechanism drives the movement of the optical path folding element according to the control signal, so as to compensate for the jitter of the optical path folding element and the optical lens in the imaging process Jitter of components.
  • the jitter of the image includes an x-axis translation component, a y-axis translation component, a z-axis translation component, an x-axis rotation component, a y-axis rotation component, and/or a z-axis rotation component, wherein the x-axis and the y-axis The rectangular coordinate system of the plane where the imaging surface is formed.
  • the vertical comb driver includes multiple sets of comb fingers, and the multiple sets of comb fingers are distributed around the reflective member.
  • the vertical comb drive structure includes multiple groups of comb fingers, and the multiple groups of comb fingers are distributed on both sides of the reflective member.
  • the plane mirror is formed by splicing and combining multiple sub-mirrors.
  • a periscope multi-camera module is provided, and the periscope multi-camera module includes at least the above-mentioned periscope camera module.
  • the optical lens assembly is a telephoto lens assembly.
  • a method for forming a periscope camera module including: arranging a reflective member in an optical path bending element for propagating incident light along a first optical axis, so as to The incident light propagating on the first optical axis is refracted to propagate along a second optical axis, wherein the first optical axis and the second optical axis are at an angle; an optical lens is arranged along the second optical axis Component to receive the incident light deflected by the optical path folding element; the photosensitive component is arranged along the second optical axis to receive the incident light passing through the optical lens assembly, so that the incident light passing through the optical lens assembly is Imaging on the photosensitive assembly; and an anti-shake actuation mechanism is provided on the optical path folding element, wherein the anti-shake actuation mechanism drives the reflective member to rotate by electrostatic force to compensate for the incident light The position change due to jitter when imaging on the photosensitive component is described.
  • the method for forming a periscope camera module further includes: forming the anti-shake actuation mechanism and the reflective member on the substrate of the optical path folding element.
  • the substrate includes a first silicon layer, a silicon oxide layer, and a second silicon layer stacked in sequence, and the anti-shake actuation mechanism and the reflective member are formed on the substrate of the optical path folding element
  • the steps include: forming the reflective member by etching the first silicon layer and coating an optical reflective coating on its surface; and forming upper comb-shaped fingers by etching the first silicon layer and etching the second silicon layer
  • the silicon layer forms a lower comb-shaped finger, and the upper comb-shaped finger and the lower comb-shaped finger form the anti-shake actuation mechanism.
  • the light path turning element further includes a supporting frame, and the reflecting member is connected to the supporting frame through a hinge structure, and is positioned between the upper comb-shaped fingers and the lower comb-shaped fingers. Driven by the intermediate electrostatic force, the reflecting mirror is rotated relative to the supporting frame around the first axis.
  • the light path turning element further includes a supporting frame, and the reflecting member is connected to the supporting frame through a hinge structure, and is positioned between the upper comb-shaped fingers and the lower comb-shaped fingers. Driven by the intermediate electrostatic force, the reflecting mirror is driven by the supporting frame to rotate around the second axis.
  • All the jitter of the camera module can be converted into the jitter of the mirror, and then the jitter of the camera module can be compensated by the movement of the mirror.
  • the OIS mechanism for anti-shake in the camera module can be omitted, thereby reducing costs.
  • the difficulty of assembling the camera module can be reduced by eliminating the OIS mechanism for anti-shake in the camera module, thereby increasing the yield rate.
  • the volume of the periscope camera module can be reduced by using MEMS drive mechanism.
  • Fig. 1 schematically shows a structural diagram of a periscope camera module according to an embodiment of the present application.
  • Fig. 2 schematically shows an optical path turning element according to an embodiment of the present application.
  • Fig. 3 schematically shows an optical path folding element according to another embodiment of the present application.
  • Fig. 4 schematically shows the reflection of incident light at the reflective member.
  • Fig. 5 schematically shows the change of the position of the emergent light on the imaging surface when the reflecting member rotates around the first axis so that the emergent light enters the imaging surface perpendicularly.
  • Fig. 6 schematically shows the change of the position of the emitted light on the imaging surface when the reflecting member rotates around the first axis so that the emitted light enters the imaging surface at any angle.
  • Fig. 7 schematically shows the change of the position of the emitted light on the imaging surface when the reflecting member rotates around the second axis.
  • first, second, etc. are only used to distinguish one feature from another feature, and do not represent any restriction on the feature. Therefore, without departing from the teachings of this application, the first layer discussed below may also be referred to as the second layer.
  • Fig. 1 shows a schematic structural diagram of a periscope camera module according to an embodiment of the present application.
  • the periscope camera module 100 includes: an optical path turning element 1 and a camera module 2.
  • the camera module 2 may be a telephoto module, which may include an optical lens assembly and a photosensitive assembly (not shown).
  • the optical path folding element 1 has a reflection member (which will be described in detail below) for folding incident light L propagating along a first optical axis (eg, a vertical direction) to a reflection member propagating along a second optical axis (eg, a horizontal direction) ), where the first optical axis and the second optical axis are at an angle.
  • the first optical axis and the second optical axis are approximately perpendicular, that is, the first optical axis and the second optical axis are approximately 90°.
  • the optical lens assembly is arranged along the second optical axis to receive the incident light L refracted by the optical path refracting element 1.
  • the photosensitive assembly is arranged along the second optical axis and arranged to receive incident light L passing through the optical lens assembly. The incident light L passing through the optical lens assembly is imaged on the photosensitive assembly to generate imaging data for output.
  • the optical path folding element 1 also has an anti-shake actuation mechanism (which will be described in detail below), which drives the reflective member to rotate by electrostatic force to compensate for the position of the incident light due to jitter when imaging on the photosensitive component Variety.
  • the anti-shake actuation mechanism may be a MEMS drive mechanism, which is combined with the optical path folding element and drives the reflective member to move (including at least rotation) to compensate for the shaking of the camera module during the imaging process.
  • all the jitter of the camera module can be converted into the jitter of the reflective member, and then the jitter of the camera module can be compensated by controlling the movement (for example, rotation) of the reflective member.
  • the OIS mechanism for anti-shake in the camera module can be eliminated, thereby contributing to the miniaturization of the camera module.
  • the size of the periscope camera module can be made smaller, thereby helping to reduce The size of the terminal device, for example, reduces the size of a mobile phone or other consumer electronic terminal device in the thickness direction.
  • the reflective member in the present application may be a flat mirror.
  • the plane mirror can be replaced by other reflective elements, as long as the replaced reflective element is suitable for refracting incident light propagating along the first optical axis to propagating along the second optical axis.
  • the MEMS driving mechanism can be replaced by other anti-shake actuation mechanisms, and the alternative anti-shake actuation mechanism is adapted to drive the reflective member to move (at least include rotation) to compensate during the imaging process.
  • the jitter of the camera module can be replaced by other anti-shake actuation mechanisms, and the alternative anti-shake actuation mechanism is adapted to drive the reflective member to move (at least include rotation) to compensate during the imaging process. The jitter of the camera module.
  • the periscope camera module further includes a sensor and a processor, wherein the sensor is used for detecting the displacement of the periscope camera module due to shaking, and the processor is used for The result of the detection determines the amount of compensation used to compensate for the displacement. Further, the anti-shake actuation mechanism drives the reflective member to rotate according to the compensation amount to compensate for the position change of the incident light L due to jitter when the incident light L is imaged on the photosensitive assembly.
  • the senor includes at least one of an accelerometer, a gyroscope, and a magnetometer.
  • the sensor is not limited to this, but should include all sensors that can be used to detect the displacement of the periscope camera module due to shaking.
  • the sensor may also be a posture sensor, a magnetic sensor, a MEMS accelerometer, a MEMS gyroscope, and so on.
  • the periscope camera module is jittered so that the image formed by the incident light L on the photosensitive component includes x-axis translation component, y-axis translation component, z-axis translation component, x-axis rotation component, and y-axis rotation component. And/or the movement of the rotation component of the z axis, wherein the x axis and the y axis constitute a rectangular coordinate system of the plane where the imaging surface is located, and the x and y axes are perpendicular to the z axis parallel to the optical axis direction.
  • the anti-shake actuation mechanism drives the reflection member to rotate in response to the compensation amount, and when the reflection member rotates around the a-axis and/or the b-axis, the x, y, and z-direction Pan and/or rotate tilt.
  • the periscope camera module may further include a data processing module configured to detect the jitter of the image output by the photosensitive component, and calculate and A control signal for compensating for the shake of the image is output to the anti-shake actuation mechanism.
  • the anti-shake actuation mechanism drives the movement of the optical path folding element according to the control signal, so as to compensate for the jitter of the optical path folding element and the shake of the optical lens assembly together during the imaging process.
  • the jitter of the image may include an x-axis translation component, a y-axis translation component, a z-axis translation component, an x-axis rotation component, a z-axis rotation component, and/or a y-axis rotation component, where the x-axis and the y-axis constitute the imaging surface
  • the rectangular coordinate system of the plane The z-axis is perpendicular to the x-axis and the y-axis, and the z-axis is parallel to the optical axis of the optical lens assembly.
  • the camera module may cause the displacement or/and rotation (tilt) of the imaging in the x, y, and z directions, which can be caused by the rotation of the reflective member (for example, mirror) around the a and b axis and/or the optical lens assembly
  • the focus of the focusing mechanism compensates for the displacement of the image in the x, y, and z directions, and the rotation and tilt of the image around the x, y, and z directions can be decomposed into y and z, x and z, and x and y directions, respectively Therefore, the rotation of the mirror around the a and b axes and/or the focusing of the focusing mechanism of the optical lens assembly can be used to compensate the rotation and tilt of the image in the x, y, and z directions, as follows:
  • FIGS. 4 and 5 the camera module shown in FIG. 1 is cut longitudinally
  • FIGS. 4 and 5 the camera module shown in FIG. 1 is cut longitudinally
  • rotation around the b axis can compensate for the displacement in the y direction.
  • the incident light I enters the reflective member 21 (for example, a mirror) perpendicular to the horizontal plane H
  • the inclination angle of the mirror 21 is ⁇ (that is, the angle between the mirror 21 and the horizontal plane H
  • the angle between the incident light I and the normal N is a (that is, the incident angle is a).
  • the normal line N is a line perpendicular to the reflector 21.
  • the mirror rotates counterclockwise from the first mirror 21 (first position) to the mirror 21' (second position), and the angle of counterclockwise rotation is ⁇ 1.
  • its normal is also from The initial normal line N1 (first position) rotates counterclockwise to the normal line N2 (second position), and the counterclockwise rotation angle is ⁇ 1, that is, the angle between the normal line N1 and the normal line N2 is ⁇ 1.
  • the incident angle of the incident light I is ⁇ , that is, the angle between the normal line N1 and the incident light I is ⁇
  • the acute angle formed between the incident light I and the reflecting mirror 21' is 90°- ⁇ - ⁇ 1. Since the incident angle is equal to the reflection angle, the angle between the normal line N1 and the outgoing light R1 is ⁇ , and the angle between the normal N2 and the outgoing light R1 is ⁇ - ⁇ 1, and the outgoing light R2 is between the mirror 21'
  • the acute angle formed is also 90°- ⁇ - ⁇ 1.
  • the emergent ray 2 is not perpendicular to the image surface.
  • ⁇ 90°-2( ⁇ + ⁇ 1)
  • the rotation of the mirror 21 around the b axis can cause a displacement in the y direction.
  • the rotation of the mirror 21 around the b axis can also compensate for the rotation of the x axis. Because the x-axis rotation can be decomposed into y-direction and z-direction displacement, the y-direction compensation has been explained above, and the z-direction displacement can be compensated by focusing operation of the optical lens focusing mechanism.
  • the rotation of the mirror 21 around the a-axis can compensate for the translation of the x-axis, as shown in Figure 7 (cross-cutting the camera module shown in Figure 1), the a-axis is perpendicular to the paper, and the incident light I is perpendicular to the paper and enters the mirror. twenty one.
  • the mirror rotates counterclockwise from the first mirror 21 (first position) to the mirror 21' (second position) the counterclockwise rotation angle is w, and the outgoing light is transformed by the outgoing light R1 (first position) To exit light R2 (second position).
  • the optical lens assembly is not equipped with an optical image stabilization mechanism.
  • the periscope camera module can achieve the goal of miniaturization, in particular, can reduce the size in the direction perpendicular to the optical axis (referring to the optical axis of the optical lens assembly). At the same time, it can also reduce the cost of the periscope camera module; reduce the difficulty of assembly, thereby increasing the yield of actual mass production.
  • optical path turning element including the reflective member and the anti-shake actuation mechanism involved in the present application will be further introduced in conjunction with the embodiments.
  • the reflective member and the MEMS driving mechanism are manufactured by photolithography or etching on the same substrate.
  • the MEMS drive mechanism may include a vertical comb drive.
  • Fig. 2 shows an optical path folding element according to an embodiment of the present application.
  • the central axis in the longitudinal direction of the optical path folding element is marked as a-axis (first axis)
  • the central axis in the transverse direction of the optical path folding element is marked as b-axis (second axis).
  • the a-axis is approximately perpendicular to the b-axis.
  • the reflective member 21 and the vertical comb driver are made by using a photolithography alignment process and silicon DRIE (deep reactive ion etching) on a silicon (first layer)-silicon oxide-silicon (second layer) substrate.
  • the first layer of silicon is used to etch the mirror and the upper comb-shaped fingers (described in detail below), and the second layer of silicon is used to etch the lower comb-shaped fingers (described in detail below) Description)
  • the air gap between the comb-shaped fingers is small, and the finger-shaped height is higher, so that a larger mirror rotation angle can be obtained under lower motion.
  • Silicon oxide is mainly used to electrically isolate the two conductive silicon layers. During the etching process, The silicon oxide layer can stop the silicon DRIE etching and prevent further etching to the second layer of silicon.
  • the reflective member 21 is made by etching the first layer of silicon and coating a layer of optical reflective coating on its surface.
  • a lower comb finger 76 and a lower comb finger 77 are mechanically directly connected to the reflective member 21.
  • the reflective member 21 is connected with the support frame 60 through a hinge 61, wherein the hinge 61 is pivotally connected to the support frame 60. This arrangement allows the reflection member 21 to rotate about the a-axis relative to the supporting frame 60.
  • the support frame 60 is mechanically and electrically connected to the electrode 16a through a hinge 63. Therefore, the electrode 16a can be electrically connected to the lower comb fingers 76 and the lower comb fingers 77 through the hinge 63, the support frame 60, the hinge 61, and the extension arm 80.
  • the upper comb-shaped fingers 74 matched with the lower comb-shaped fingers 76 and the upper comb-shaped fingers 75 matched with the lower comb-shaped fingers 77 are both connected to the silicon connection area 70.
  • the silicon connection area 70 forms a circuit and mechanical support structure for fixing the first upper comb finger 74 and the second upper comb finger 75.
  • the silicon connection area 70 is also electrically connected to the fixed electrode 19 a or 20 a through a silicon hinge 62. Therefore, the fixed electrode 19a can be electrically connected to the first upper comb finger 74 through the silicon hinge 62 and the silicon connection area 70, and the fixed electrode 20a can be electrically connected to the second upper comb finger 74 through the silicon hinge 62 and the silicon connection area 70. 75 electrical connection.
  • a trench 13 is formed between the support frame 60 and the silicon connection area 70.
  • the trench 13 is filled with a dielectric material such as silicon oxide and sometimes a cavity filling material such as polysilicon, thereby electrically isolating the support frame 60 from the silicon connection area 70, that is, the silicon connection area 70 and the reflective member 21 and the comb-shaped fingers 76 and 77 provided on the reflective member 21 realize electrical isolation.
  • the support frame 60 is also provided with fixed electrodes 17a and 18a having an upper comb-shaped finger structure.
  • a lower comb-shaped finger structure that cooperates with the upper comb-shaped finger structure of the fixed electrodes 17a and 18a is formed on the support frame 60.
  • the electrodes 17a and 18a may be formed on the same substrate as the support frame 60 by etching. Alternatively, the electrodes 17a and 18a can also be made by etching separate materials.
  • Fig. 3 shows an optical path turning element according to another embodiment of the present application.
  • the central axis in the longitudinal direction of the optical path folding element is marked as a-axis (first axis)
  • the central axis in the transverse direction of the optical path folding element is marked as b-axis (second axis).
  • the a-axis is approximately perpendicular to the b-axis.
  • the fixed comb-shaped fingers 171, 172, 175, and 176, the electrodes 160 and 161 are made of a lower layer of conductive single crystal silicon
  • the reflective member 168, the support frame 169, the flexible hinges 165 and 166, and the movable The comb-shaped finger support arms 170 and 178, the movable comb-shaped fingers 173, 174, 177, and 179, and the electrodes 162, 163, and 164 are made of an upper layer of conductive single crystal silicon.
  • the flexible hinge 166 is pivotally connected to the support frame 169. This arrangement allows the reflection member 168 to rotate about the b axis relative to the support frame 169.
  • An optical reflective film may be deposited on the top surface of the reflective member 168. A certain cavity is left between the reflective member 168 and the supporting frame 169 to provide a space for the reflective member 168 to rotate.
  • the reflective member 168, the support frame 169, the flexible hinges 165 and 166, the movable comb finger support arms 170 and 178, the movable comb fingers 173, 174, 177 and 179 will be at zero potential.
  • the electrode 162 When the electrode 162 is in an electrical ground connection, if a potential/voltage is applied to the electrode 160, an electrostatic force will be established between the movable comb finger 177 and the fixed comb finger 176, which will drive the reflection
  • the member 168, the support frame 169, the flexible hinge 166, the movable comb-shaped finger support arms 170 and 178, and the movable comb-shaped fingers 174 and 179 rotate clockwise about the a-axis.
  • the electrode 162 When the electrode 162 is in an electrical ground connection, if a potential/voltage is applied to the electrode 161, then an electrostatic force will be established between the movable comb finger 173 and the fixed comb finger 171, which will drive the reflection
  • the member 168, the support frame 169, the flexible hinge 166, the movable comb-shaped finger support arms 170 and 178, and the movable comb-shaped fingers 174 and 179 rotate counterclockwise about the a-axis.
  • the electrode 162 When the electrode 162 is in an electrical ground connection, if a potential/voltage is applied to the electrode 163, an electrostatic force will be established between the movable comb finger 174 and the fixed comb finger 172, which will drive the reflective member 168.
  • the movable comb-shaped finger support arm 178 and the movable comb-shaped fingers 174 and 179 rotate counterclockwise around the b axis.
  • the reflective member can also be formed by splicing and combining multiple small mirrors.
  • a complete mirror is composed of two, three or four pieces that are identical or different with MEMS actuators.
  • the lens of the actuator is combined, wherein the MEMS actuating structure corresponding to two, three or four lenses can simultaneously realize the movement in the same direction. This helps reduce the bearing capacity of the MEMS.

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Abstract

本申请提供了一种潜望式摄像模组，包括：光路折转元件，具有反射构件，用于将沿第一光轴传播的入射光折转到沿第二光轴传播，其中，所述第一光轴和所述第二光轴成角度；光学镜头组件，其沿所述第二光轴布置以接收被所述光路折转元件折转的入射光；感光组件，其沿所述第二光轴布置并接收通过所述光学镜头组件的入射光，从而通过所述光学镜头组件的入射光在所述感光组件上成像；其中，所述光路折转元件还具有防抖致动机构，所述防抖致动机构通过静电力驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。

Description

潜望式摄像模组及多摄模组
相关申请的交叉引用
本申请要求于2019年4月3日提交于中国国家知识产权局(CNIPA)的、专利申请号为201910266469.2的中国专利申请的优先权和权益，该中国专利申请通过引用整体并入本文。
技术领域
本申请涉及摄影、摄像器材技术，具体地说，本申请涉及紧凑型摄像模组技术。
背景技术
市场上最求具有更高像素的手机摄像模组，迫于提高像素数的市场需求，厂商往往需要通过减小传感器(在摄像模组中通常指感光芯片)的单像素尺寸来提高分辨率。传感器单像素尺寸的减小导致拍摄需要更长的曝光时间，从而使得成像对摄像模组的抖动更加敏感，需要OIS(Optical Image Stabilization；光学图像稳定)机构来减轻这种影响。在本文中，OIS，也可以称为光学防抖。
现有的OIS相机(或摄像模组)中，可以通过移动镜头模块的横向位置，或者可以通过快速倾斜整个相机模块以在图像捕获期间抵消相机抖动。通常来说，相机抖动具有6个自由度，包括在X-Y-Z坐标系中的线性移动，围绕X轴的倾斜(或称为转动)、围绕Z轴的倾斜(或称为偏摆)和围绕Y轴的倾斜(或称为俯仰)。在具体实现上，现有的OIS防抖装置大多采用磁石+线圈的组合来实现对相机中镜头的驱动，但随着镜头的增大磁石+线圈的组合越来越难以满足应用要求。一方面，随着镜头的增大，磁石+线圈的结构已不能完全支撑镜头的驱动行为，另一方面磁石+线圈的防抖装置成本居高不下，此外，对焦和防抖用的两套磁石线圈结构不可避免地占用摄像模组的空间，导致摄像模组在垂直于光轴的方向上的尺寸难以缩小，不利于摄像模组的小型化。
另一方面，随着智能手机的迅猛发展，用户对手机摄像模组提出 了越来越高的质量要求，尤其是双摄像头模组的设计，不仅要求双摄像头能够实现背景虚化、夜间拍摄清晰，更要求在不增加模组高度的前提下能够实现光学变焦，在此大背景下潜望式的双摄像头模组便应运而生。
潜望式双摄像头模组通常是由潜望式摄像模组和传统模组组合而成。潜望式摄像模组通过在传统模组前端加棱镜或反射镜的方式，对竖直入射到模组端部的光线进行反射，因此可以将竖直光线转变为水平光线入射到模组内部，从而可以将长焦镜头的模组横放，降低模组高度。当然，潜望式摄像模组也可以作为单摄模组使用，以避开终端设备厚度对模组z轴尺寸的限制。这里z轴指与光轴方向一致的坐标轴。
如前文所述，当前减小感光芯片的单像素尺寸的压力，导致摄像模组的成像对抖动更加敏感。潜望式单摄和双摄模组也都面临这一问题。并且，由于潜望式模组中引入了棱镜或反射镜来折转入射光线，导致棱镜或反射镜也需要考虑防抖问题。目前的解决方案是针对棱镜或反射镜增加一套OIS防抖装置。换句话说，目前的潜望式模组在光线转折元件(例如棱镜或反射镜)和镜头端各设置一套OIS机构，以便实现光学防抖。然而这种设计成本高昂、组装难度大、生产效率及良品率均面临考验。
当前迫切需要实现或部分实现潜望式摄像模组的光学防抖的解决方案。
发明内容
本申请提供了一种至少克服或部分克服现有技术的上述至少一个缺陷的解决方案。
根据本申请的一个方面，提供了一种潜望式摄像模组，包括：光路折转元件，具有反射构件，用于将沿第一光轴传播的入射光折转到沿第二光轴传播，其中，所述第一光轴和所述第二光轴成角度；光学镜头组件，其沿所述第二光轴布置以接收被所述光路折转元件折转的入射光；感光组件，其沿所述第二光轴布置并接收通过所述光学镜头组件的入射光，从而通过所述光学镜头组件的入射光在所述感光组件上成像；其中， 所述光路折转元件还具有防抖致动机构，所述防抖致动机构通过静电力驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。
在一个实施方式中，所述反射构件为平面反射镜。
在一个实施方式中，所述防抖致动机构为MEMS驱动机构。
在一个实施方式中，所述第一光轴和所述第二光轴大致垂直。
在一个实施方式中，所述潜望式摄像模组还包括：传感器，用于检测所述潜望式摄像模组由于抖动而产生的位移；处理器，用于根据所述传感器的检测结果确定出用于补偿所述位移的补偿量；其中，所述防抖致动机构根据所述补偿量驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。
在一个实施方式中，所述传感器包括加速度计、陀螺仪和磁力计中的至少之一。
在一个实施方式中，所述潜望式摄像模组由于受到抖动而使得入射光在所述感光组件上所成的像产生偏移量，所述防抖致动机构响应于所述补偿量驱动所述反射构件绕至少一个轴转动，以补偿所述入射光在所述感光组件上产生的偏移量。
在一个实施方式中，所述至少一个轴包括第一轴和与所述第一轴垂直的第二轴。
在一个实施方式中，所述光路折转元件还包括基底，所述防抖致动机构与所述反射构件形成在所述基底上。
在一个实施方式中，所述基底包括依次层叠的第一硅层、氧化硅层和第二硅层。
在一个实施方式中，所述防抖致动机构包括垂直梳状驱动结构。
在一个实施方式中，所述垂直梳状驱动结构包括用于通过静电力驱动所述反射构件的上梳状指状物和下梳状指状物；其中，所述反射构件通过蚀刻所述第一硅层并在其表面涂覆光学反射涂层制成；以及其中，通过蚀刻所述第一硅层形成所述上梳状指状物并通过蚀刻所述第二硅层形成所述下梳状指状物。
在一个实施方式中，所述光路折转元件还包括支承框架，所述反射 构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜相对于所述支承框架围绕第一轴转动。
在一个实施方式中，所述光路折转元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，所述反射镜在所述支承框架的带动下围绕第二轴转动。
在一个实施方式中，所述光路折转元件还包括与所述上梳状指状物连接的第一电极和与所述下梳状指状物连接的第二电极，其中，所述第一电极和所述第二电极用于分别为所述上梳状指状物和所述下梳状指状物提供产生所述静电力的功率。
在一个实施方式中，所述潜望式摄像模组还包括数据处理模块，其用于检测所述感光组件输出的图像的抖动，计算并向所述防抖致动机构输出用于补偿所述图像的抖动的控制信号；所述防抖致动机构根据所述控制信号驱动所述光路折转元件的移动，以便在成像过程中一并补偿所述光路折转元件的抖动和所述光学镜头组件的抖动。
在一个实施方式中，所述图像的抖动包括x轴平移分量、y轴平移分量、z轴平移分量、x轴旋转分量、y轴旋转分量和/或z轴旋转分量，其中x轴和y轴构成成像面所在平面的直角坐标系。
在一个实施方式中，所述垂直梳状驱动器包括多组梳状指状物，所述多组梳状指状物分布在所述反射构件的四周。
在一个实施方式中，所述垂直梳状驱动结构包括多组梳状指状物，所述多组梳状指状物分布在所述反射构件的两侧。
在一个实施方式中，所述平面反射镜由多个子反射镜拼接组合而成。
根据本申请的一个方面，提供了一种潜望式多摄模组，所述潜望式多摄模组中至少包括如上所述的潜望式摄像模组。
在一个实施方式中，所述光学镜头组件为长焦镜头组件。
根据本申请的另一个方面，提供了一种用于形成潜望式摄像模组的方法，包括：在用于沿第一光轴传播入射光的光路折转元件中设置反射构件，以将沿所述第一光轴传播的所述入射光折转到沿第二光轴传播， 其中，所述第一光轴和所述第二光轴成角度；沿所述第二光轴布置光学镜头组件以接收被所述光路折转元件折转的入射光；沿所述第二光轴布置感光组件，以接收通过所述光学镜头组件的入射光，从而通过所述光学镜头组件的入射光在所述感光组件上成像；以及在所述光路折转元件上设置防抖致动机构，其中，所述防抖致动机构通过静电力驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。
在一个实施方式中，用于形成潜望式摄像模组的方法还包括：在所述光路折转元件的基底上形成所述防抖致动机构与所述反射构件。
在一个实施方式中，所述基底包括依次层叠的第一硅层、氧化硅层和第二硅层，在所述光路折转元件的基底上形成所述防抖致动机构与所述反射构件的步骤包括：通过蚀刻所述第一硅层并在其表面涂覆光学反射涂层制成所述反射构件；以及通过蚀刻所述第一硅层形成上梳状指状物并通过蚀刻第二硅层形成下梳状指状物，所述上梳状指状物和所述下梳状指状物形成所述防抖致动机构。
在一个实施方式中，所述光路折转元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜相对于所述支承框架围绕第一轴转动。
在一个实施方式中，所述光路折转元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜在所述支承框架的带动下围绕第二轴转动。
与现有技术相比，本申请具有下列至少一个技术效果：
1、可以将摄像模组的所有抖动折算为反射镜的抖动，进而通过反射镜的移动来补偿所述摄像模组的抖动。
2、可以省去摄像模组内防抖用的OIS机构，从而降低成本。
3、可以通过省去摄像模组内防抖用的OIS机构来降低摄像模组的组装难度，从而提升良率。
4、可以通过采用MEMS驱动机构来减小潜望式摄像模组的体 积。
5、可以使潜望式摄像模组具有良好的光学防抖性能。
6、可以通过将反射镜设计成由多个子反射镜拼接而成来降低对MEMS的承载力要求，进而整体上提升光学防抖性能。
附图说明
在参考附图中示出示例性实施例。本文中公开的实施例和附图应被视作说明性的，而非限制性的。
图1示意性示出了本申请的一个实施例的潜望式摄像模组的结构图。
图2示意性示出了根据本申请的一个实施方式的光路折转元件。
图3示意性示出了根据本申请的另一个实施方式的光路折转元件。
图4示意性示出了入射光在反射构件处的反射情况。
图5示意性示出了在反射构件绕第一轴转动使得出射光线垂直入射成像面时，出射光线在成像面上的位置变化情况。
图6示意性示出了在反射构件绕第一轴转动使得出射光线以任意角度入射成像面时，出射光线在成像面上的位置变化情况。
图7示意性示出了在反射构件绕第二轴转动时，出射光线在成像面上的位置变化情况。
具体实施方式
为了更好地理解本申请，将参考附图对本申请的各个方面做出更详细的说明。应理解，这些详细说明只是对本申请的示例性实施方式的描述，而非以任何方式限制本申请的范围。在说明书全文中，相同的附图标号指代相同的元件。表述“和/或”包括相关联的所列项目中的一个或多个的任何和全部组合。
应注意，在本说明书中，第一、第二等的表述仅用于将一个特征与另一个特征区分开来，而不表示对特征的任何限制。因此，在不背离本申请的教导的情况下，下文中讨论的第一层也可被称作第二层。
在附图中，为了便于说明，已稍微夸大了物体的厚度、尺寸和形状。 附图仅为示例而并非严格按比例绘制。
还应理解的是，用语“包括”、“包括有”、“具有”、“包含”和/或“包含有”，当在本说明书中使用时表示存在所陈述的特征、整体、步骤、操作、元件和/或部件，但不排除存在或附加有一个或多个其它特征、整体、步骤、操作、元件、部件和/或它们的组合。此外，当诸如“...中的至少一个”的表述出现在所列特征的列表之后时，修饰整个所列特征，而不是修饰列表中的单独元件。此外，当描述本申请的实施方式时，使用“可以”表示“本申请的一个或多个实施方式”。并且，用语“示例性的”旨在指代示例或举例说明。
如在本文中使用的，用语“基本上”、“大约”以及类似的用语用作表近似的用语，而不用作表程度的用语，并且旨在说明将由本领域普通技术人员认识到的、测量值或计算值中的固有偏差。
除非另外限定，否则本文中使用的所有用语(包括技术用语和科学用语)均具有与本申请所属领域普通技术人员的通常理解相同的含义。还应理解的是，用语(例如在常用词典中定义的用语)应被解释为具有与它们在相关技术的上下文中的含义一致的含义，并且将不被以理想化或过度正式意义解释，除非本文中明确如此限定。
需要说明的是，在不冲突的情况下，本申请中的实施例及实施例中的特征可以相互组合。下面将参考附图并结合实施例来详细说明本申请。
图1示出了本申请的一个实施例的潜望式摄像模组的结构示意图。参考图1，本实施例中，潜望式摄像模组100包括：光路折转元件1和摄像模组2。摄像模组2可以是长焦模组，其可包括光学镜头组件和感光组件(未示出)。光路折转元件1具有用于将沿第一光轴(如，竖直方向)传播的入射光L折转到沿第二光轴(如，水平方向)传播的反射构件(在下文中将详细描述)，其中第一光轴和第二光轴成角度。在示例性实施方式中，第一光轴和第二光轴大致垂直，即第一光轴和第二光轴大致成90°。光学镜头组件沿第二光轴布置以接收被光路折转元件1折转的入射光L。感光组件沿第二光轴布置并被布置成接收通过光学镜头组件的入射光L。通过光学镜头组件的入射光L在感光组件 上成像，以生成用于输出的成像数据。光路折转元件1还具有防抖致动机构(在下文中将详细描述)，该防抖致动机构通过静电力驱动反射构件转动，以补偿入射光在感光组件上成像时由于抖动而发生的位置变化。防抖致动机构可以是MEMS驱动机构，MEMS驱动机构结合于光路折转元件并通过驱动反射构件移动(至少包含转动)来在成像过程中补偿摄像模组的抖动。
上述实施例中，可以将摄像模组的所有抖动折算为反射构件的抖动，进而通过控制反射构件的移动(例如，旋转)来补偿所述摄像模组的抖动。这样，摄像模组中用于防抖的OIS机构可以被取消，从而有助于摄像模组的小型化。同等成像品质要求下，由于上述实施例的潜望式摄像模组可以取消摄像模组中用于防抖的OIS机构，所以该潜望式摄像模组的尺寸可以做到更小，从而帮助缩小终端设备的尺寸，例如缩小手机或其它消费电子终端设备的例如厚度方向上的尺寸。
本申请中的反射构件可以是平面反射镜。该平面反射镜可以由其它反射元件代替，只要替代的反射元件适于将沿第一光轴传播的入射光折转到沿第二光轴传播即可。
需注意，本申请的其他示例中，MEMS驱动机构可以由其它防抖致动机构代替，替代的防抖致动机构适于通过驱动所述反射构件移动(至少包含转动)来在成像过程中补偿所述摄像模组的抖动。
在示例性实施方式中，所述潜望式摄像模组还包括传感器和处理器，其中，传感器用于检测所述潜望式摄像模组由于抖动而产生的位移，处理器用于根据所述传感器的检测结果确定出用于补偿所述位移的补偿量。进一步地，防抖致动机构根据所述补偿量驱动所述反射构件转动，以补偿所述入射光L在所述感光组件上成像时由于抖动而发生的位置变化。
在示例性实施方式中，传感器包括加速度计、陀螺仪和磁力计中的至少之一。但是，本领域技术人员应当理解，传感器并不限于此，而是应当包括所有能够用于检测所述潜望式摄像模组由于抖动而产生的位移的传感器。在本申请的其他实施方式中，传感器还可以是姿势传感器、磁性传感器、MEMS加速度计、MEMS陀螺仪，等等。
潜望式摄像模组由于受到抖动而使得入射光L在所述感光组件上所 成的像产生包括x轴平移分量、y轴平移分量、z轴平移分量、x轴旋转分量、y轴旋转分量和/或z轴旋转分量的移动，其中，所述x轴和所述y轴构成成像面所在平面的直角坐标系，x、y轴垂直于与光轴方向平行的z轴。进一步地，所述防抖致动机构响应于所述补偿量驱动所述反射构件旋转，当所述反射构件围绕a轴和/或b轴旋转时，可补偿所述x、y、z向的平移和/或旋转倾斜。
另一方面，在本申请的另一个实施例中，所述的潜望式摄像模组还可包括数据处理模块，所述数据处理模块用于检测所述感光组件输出的图像的抖动，计算并向所述防抖致动机构输出用于补偿所述图像的抖动的控制信号。所述防抖致动机构根据所述控制信号驱动所述光路折转元件的移动，以便在成像过程中一并补偿所述光路折转元件的抖动和所述光学镜头组件的抖动。其中，所述图像的抖动可以包括x轴平移分量、y轴平移分量、z轴平移分量、x轴旋转分量、z轴旋转分量和/或y轴旋转分量，其中x轴和y轴构成成像面所在平面的直角坐标系。所述z轴垂直于所述x轴和所述y轴，且所述z轴平行于光学镜头组件的光轴。
由于摄像模组的抖动，可能引起成像在x，y,z方向的位移或/和旋转(倾斜)，可以通过反射构件(例如，反射镜)围绕a、b轴的旋转和/或光学镜头组件的对焦机构的对焦，补偿像在x、y、z方向的位移，而像在围绕x、y、z方向的旋转倾斜，又可以分别分解为y和z、x和z、以及x和y方向的平移，所以可以通过反射镜围绕a、b轴的旋转和/或光学镜头组件的对焦机构的对焦，补偿像在x、y、z方向的旋转倾斜，具体如下：
反射镜围绕b轴旋转时，可以补偿y方向的位移。参照图4和图5(其中纵切图1所示的摄像模组)，举例说明绕b轴的旋转可以补偿y向的位移。如图4所示，在入射光线I垂直于水平面H入射反射构件21(例如，反射镜)的情况下，假设反射镜21的倾斜角度为θ(即，反射镜21与水平面H之间的夹角为θ)，入射光线I与法线N的夹角为a(即，入射角为a)。法线N是垂直于反射镜21的线，在由反射镜21、法线N的反向延长线以及水平面H构成的三角形ABC中，∠ BAC＝θ；由入射光线I、法线N的反向延长线以及水平面H构成的三角形BDC中，由对角相等，可知∠DBC＝a。在直角三角形ABD中，∠ADB＝90°，则∠ABD＝90°-θ。在直角三角形ABC中，∠ABC＝90°，则∠ABD+∠DBC＝90°，即90°-θ+a＝90°，则a＝θ，即入射角a等于反射镜21的倾斜角度θ。
如图5所示，反射镜由最开始的反射镜21(第一位置)逆时针旋转至反射镜21’(第二位置)，逆时针旋转的角度为θ1，相应的，其法线也从最初的法线N1(第一位置)逆时针旋转至法线N2(第二位置)，逆时针旋转角度为θ1，即法线N1与法线N2之间的夹角为θ1。入射光线I经过反射镜最开始的反射镜21(第一位置)后，形成出射光线R1，假设入射光线I的入射角为θ，即法线N1与入射光线I之间的夹角为θ，则入射光线I和反射镜21’之间形成的锐角为90°-θ-θ1。由入射角等于反射角，法线N1与出射光线R1之间的夹角为θ，则法线N2与出射光线R1之间的夹角为θ-θ1，出射光线R2与反射镜21’之间形成的锐角也为90°-θ-θ1，假设出射光线R1和出射光线R2的夹角为θ2，则由法线N2垂直反射镜21’可知，90°-θ-θ1+θ2+θ-θ1＝90°，θ2＝2θ1。
同一束入射光线，当反射镜从最初的反射镜21(第一位置)逆时针旋转θ1时，出射光线在像面IMG上的入射位置将竖直下移y，出射光线R1与出射光线R2的夹角为θ2，特殊情况下，假设出射光线R2垂直射在像面IMG，出射光线R2从反射镜21’出射位置至像面IMG之间的垂直距离为d，则有以下公式成立，y/d＝tan(θ2)＝tan(2θ1)，即y＝d·tan(2θ1)，即当反射镜21围绕b轴旋转一定角度时，就会在y方向产生一定的位移，所以可以通过绕b轴的旋转，来实现y向的补偿。
一般情况下，出射光线2并非垂直射在像面，如图6所示，假设出射光线2不是垂直射在像面IMG，并且出射光线R2与水平面H之间具有夹角β，则可以得到β＝90°-2(θ+θ1)，y＝tan(θ2+β)·d-tan(β)·d＝tan(θ2+90°-2θ-2θ1)·d-tan(90°-2θ-2θ1)·d，同样，反射镜21围绕b轴的旋转可引起y向的位移。
反射镜21围绕b轴的旋转，也可以补偿x轴的旋转。因为x轴的 旋转可以分解为y向和z向的位移，其中，y向的补偿已经在上述中阐明，而z向的位移可以通过光学镜头的对焦机构进行对焦操作来实现补偿。
尽管以上推论是建立在入射光线垂直于水平面入射反射构件这一特殊情况下而得出的，但是，基于以上推论，本领域技术人员应当能够理解，对于入射光线以任意角度入射反射构件的普遍情况而言，MEMS反射镜均能够具有相应的补偿能力。
反射镜21围绕a轴的旋转，可以补偿x轴的平移，如图7所示(横切图1所示的摄像模组)，a轴垂直纸面，入射光线I垂直纸面射入反射镜21。当反射镜由最开始的反射镜21(第一位置)逆时针旋转至反射镜21’(第二位置)时，逆时针旋转的角度为w，出射光线由出射光线R1(第一位置)变换至出射光线R2(第二位置)。当出射光线R1垂直入射至像面IMG时，出射光线R1和出射光线R2之间的夹角为w，假设出射光线R1在反射镜21的出射点至像面IMG的垂直距离为d，则以下公式成立：d/x＝tan(w)，其中x表示在反射镜由反射镜21(第一位置)旋转至反射镜21’(第二位置)时，出射光学在像面IMG的x方向上移动的距离。由此可知，当反射镜21围绕a轴旋转一角度时，可以补偿x方向的位移。
由图7所示，反射镜21围绕a轴旋转时，同样，在z方向产生位移，可以补偿像在z向的位移。需要注意的是，反射镜21围绕a轴旋转时，在y方向也会产生位移，对像在z方向的偏移量也可以进行补偿。
进一步地，根据本申请的一个实施例，所述潜望式摄像模组中，所述光学镜头组件不安装光学图像稳定机构。这样，该潜望式摄像模组可以实现小型化的目标，尤其是可以减小垂直于光轴(指光学镜头组件的光轴)方向的尺寸。同时，还可以降低潜望式摄像模组的成本；降低组装难度，进而提升实际批量生产的良率。
下面，结合实施例进一步地介绍本申请所涉及的包括反射构件和防抖致动机构的光路折转元件的各项细节。
根据本申请的实施方式，在所述潜望式摄像模组中，所述反射构件与所述MEMS驱动机构通过对同一块基材的光刻或蚀刻制成。其中，所述MEMS驱动机构可包括垂直梳状驱动器。图2示出了根据本申请的一个实施方式的光路折转元件。为便于描述，将位于光路折转元件的纵向方向的中心轴线标记为a轴(第一轴)，并将位于光路折转元件的横向方向的中心轴线标记为b轴(第二轴)。a轴与b轴大致垂直。
参考图2，其中反射构件21、垂直梳状驱动器是通过在硅(第一层)-氧化硅-硅(第二层)基材上使用光刻对准工艺和硅DRIE(深反应离子刻蚀)的方法制得，第一层硅用于蚀刻出反射镜和上梳状指状物(在下文中将详细描述)，第二层硅用于蚀刻出下梳状指状物(在下文中将详细描述)，梳状指之间的空气间隙较小，指状高度较高，从而在较低动作下获得更大的镜面转动角度，氧化硅主要用来电隔离两导电硅层，在蚀刻过程中，氧化硅层能够起到硅DRIE蚀刻的停止作用，防止进一步的蚀刻到第二层硅。
反射构件21通过蚀刻第一层硅并在其表面涂覆一层光学反射涂层而制得。与反射构件21实现机械直连的有下梳状指状物76和下梳状指状物77。反射构件21通过铰链61与支承框架60连接，其中，铰链61可枢转地连接到支承框架60。这样的设置使得反射构件21可以相对于支承框架60绕a轴转动。支承框架60通过铰链63与电极16a实现机械和电连接。因此，电极16a可通过铰链63、支承框架60、铰链61、延伸臂80与下梳状指状物76和下梳状指状物77电连接。
与下梳状指状物76配合的上梳状指状物74和与下梳状指状物77配合的上梳状指状物75均与硅连接区域70连接。硅连接区域70形成用于固定第一上梳状指状物74和第二上梳状指状物75的电路和机械支撑结构。硅连接区域70还通过硅铰链62电连接到固定电极19a或20a。因此，固定电极19a可通过硅铰链62、硅连接区域70与第一上梳状指状物74电连接，固定电极20a可通过硅铰链62、硅连接区域70与第二上梳状指状物75电连接。
在支承框架60与硅连接区域70之间形成沟槽13。沟槽13填充有诸如氧化硅之类的电介质材料，有时还填充有诸如多晶硅之类的腔填 充材料，从而将支承框架60与硅连接区域70电隔离，即，将硅连接区域70与反射构件21以及设置在反射构件21上的梳状指状物76和77实现电隔离。
支承框架60的周围还设置有具有上梳状指状物结构的固定电极17a和18a。相应地，在支承框架60上形成有与固定电极17a和18a的上梳状指状物结构配合的下梳状指状物结构。电极17a和18a可与支承框架60通过蚀刻形成在同一基材上。可选地，电极17a和18a还可以通过蚀刻单独的材料制得。
如果将电接地施加到固定电极16a，并且将电势施加到固定电极18a，那么在固定电极18a上的固定上梳齿与支承框架60上的下梳齿之间将产生静电力。在该静电力的作用下，支承框架60将带动反射构件21绕b轴顺时针转动。
如果将电接地施加到固定电极16a，并且将电势施加到固定电极17a，那么在固定电极17a上的固定上梳齿与支承框架60上的下梳齿之间将产生静电力。在该静电力的作用下，支承框架60将带动反射构件21绕b轴逆时针转动。
如果将电接地施加到固定电极16a，并且将电势施加到固定电极19a，那么在与硅连接区域70固定连接的上梳状指状物74和与反射构件21的延伸臂80连接的下梳状指状物76之间将产生静电力。在该静电力的作用下，反射构件21将绕a轴顺时针转动。
如果将电接地施加到固定电极16a，并且将电势施加到固定电极20a，那么在与硅连接区域70固定连接的上梳状指状物75和与反射构件21的延伸臂80连接的下梳状指状物77之间将产生静电力。在该静电力的作用下，反射构件21将绕a轴逆时针转动。
图3示出了本申请另一实施方式的光路折转元件。为便于描述，将位于光路折转元件的纵向方向的中心轴线标记为a轴(第一轴)，并将位于光路折转元件的横向方向的中心轴线标记为b轴(第二轴)。a轴与b轴大致垂直。
在该实施方式中，固定梳状指状物171、172、175和176、电极160和161由导电单晶硅的下层制造，而反射构件168、支承框架169、 柔性铰链165和166、可动梳状指状物支撑臂170和178、可动梳状指状物173、174、177和179、电极162、163和164由导电单晶硅的上层制成。其中，柔性铰链166可枢转地连接到支承框架169。这样的设置使得反射构件168可以相对于支承框架169绕b轴转动。可以在反射构件168的顶表面上沉积光学反射薄膜。反射构件168和支承框架169之间留有一定的空腔，以提供反射构件168转动用的空间。
当电接地连接到电极162时，反射构件168、支承框架169、柔性铰链165和166、可动梳状指指状物支撑臂170和178、可动梳状指状物173、174、177和179将处于零电位。
在电极162处于电接地连接时，如果在电极160上施加电势/电压，那么在可动梳状指状物177和固定梳状指状物176之间将建立静电力，该静电力将驱动反射构件168、支承框架169、柔性铰链166、可动梳状指状物支撑臂170和178、以及可动梳状指状物174和179绕a轴顺时针转动。
在电极162处于电接地连接时，如果在电极161上施加电势/电压，那么在可动梳状指状物173和固定梳状指状物171之间将建立静电力，该静电力将驱动反射构件168、支承框架169、柔性铰链166、可动梳状指状物支撑臂170和178、以及可动梳状指状物174和179绕a轴逆时针转动。
在电极162处于电接地连接时，如果在电极164上施加电势/电压，那么在可动梳状指状物179和固定梳状指状物175之间将建立静电力，该静电力将驱动反射构件168、可动梳状指状物支撑臂178以及可动梳状指状物174和179绕b轴顺时针转动。
在电极162处于电接地连接时，如果在电极163上施加电势/电压，那么可动梳状指状物174和固定梳状指状物172之间将建立静电力，该静电力将驱动反射构件168、可动梳状指状物支撑臂178以及可动梳状指状物174和179绕b轴逆时针转动。
在一个实施方式中，反射构件还可以是由多个小的反射镜拼接组合而成，比如一个完整的反射镜是由两片、三片或者是四片完全相同的或者不同的带有MEMS致动装置的镜片组合而成，其中，由两片、三片或者四片镜片对应的MEMS致动结构可以同时实现相同方向的运动。这样有助于减轻MEMS的承载力。
以上描述仅为本申请的较佳实施方式以及对所运用技术原理的说明。本领域技术人员应当理解，本申请中所涉及的发明范围，并不限于上述技术特征的特定组合而成的技术方案，同时也应涵盖在不脱离所述发明构思的情况下，由上述技术特征或其等同特征进行任意组合而形成的其它技术方案。例如上述特征与本申请中公开的(但不限于)具有类似功能的技术特征进行互相替换而形成的技术方案。

Claims (27)

  1. 潜望式摄像模组，包括：
    光路折转元件，具有反射构件，用于将沿第一光轴传播的入射光折转到沿第二光轴传播，其中，所述第一光轴和所述第二光轴成角度；
    光学镜头组件，其沿所述第二光轴布置以接收被所述光路折转元件折转的入射光；
    感光组件，其沿所述第二光轴布置并接收通过所述光学镜头组件的入射光，从而通过所述光学镜头组件的入射光在所述感光组件上成像；
    其中，所述光路折转元件还具有防抖致动机构，所述防抖致动机构通过静电力驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。
  2. 根据权利要求1所述的潜望式摄像模组，其中，所述反射构件为平面反射镜。
  3. 根据权利要求1所述的潜望式摄像模组，其中，所述防抖致动机构为MEMS驱动机构。
  4. 根据权利要求1所述的潜望式摄像模组，其中，所述第一光轴和所述第二光轴垂直。
  5. 根据权利要求1至4中任一项所述的潜望式摄像模组，其中，所述潜望式摄像模组还包括：
    传感器，用于检测所述潜望式摄像模组由于抖动而产生的位移；
    处理器，用于根据所述传感器的检测结果确定出用于补偿所述位移的补偿量；
    其中，所述防抖致动机构根据所述补偿量驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。
  6. 根据权利要求5所述的潜望式摄像模组，其中，所述传感器包括加速度计、陀螺仪和磁力计中的至少之一。
  7. 根据权利要求5所述的潜望式摄像模组，其中，所述潜望式摄像模组由于受到抖动而使得入射光在所述感光组件上所成的像产生偏移量，所述防抖致动机构响应于所述补偿量驱动所述反射构件绕至少一个轴转动，以补偿所述入射光在所述感光组件上产生的偏移量。
  8. 根据权利要求7所述的潜望式摄像模组，其中，所述至少一个轴包括第一轴和与所述第一轴垂直的第二轴。
  9. 根据权利要求5所述的潜望式摄像模组，其中，所述光路折转元件还包括基底，所述防抖致动机构与所述反射构件形成在所述基底上。
  10. 根据权利要求9所述的潜望式摄像模组，其中，所述基底包括依次层叠的第一硅层、氧化硅层和第二硅层。
  11. 根据权利要求10所述的潜望式摄像模组，其中，所述防抖致动机构包括垂直梳状驱动结构。
  12. 根据权利要求11所述的潜望式摄像模组，其中，所述垂直梳状驱动结构包括用于通过静电力驱动所述反射构件的上梳状指状物和下梳状指状物；
    其中，所述反射构件通过蚀刻所述第一硅层并在其表面涂覆光学反射涂层制成；以及
    其中，通过蚀刻所述第一硅层形成所述上梳状指状物并通过蚀刻所述第二硅层形成所述下梳状指状物。
  13. 根据权利要求12所述的潜望式摄像模组，其中，所述光路折转 元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜相对于所述支承框架围绕第一轴转动。
  14. 根据权利要求12所述的潜望式摄像模组，其中，所述光路折转元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜在所述支承框架的带动下围绕第二轴转动。
  15. 根据权利要求12所述的潜望式摄像模组，其中，所述光路折转元件还包括与所述上梳状指状物连接的第一电极和与所述下梳状指状物连接的第二电极，其中，所述第一电极和所述第二电极用于分别为所述上梳状指状物和所述下梳状指状物提供产生所述静电力的功率。
  16. 根据权利要求1所述的潜望式摄像模组，其中，所述潜望式摄像模组还包括数据处理模块，其用于检测所述感光组件输出的图像的抖动，计算并向所述防抖致动机构输出用于补偿所述图像的抖动的控制信号；
    所述防抖致动机构根据所述控制信号驱动所述光路折转元件的移动，以在成像过程中补偿所述光路折转元件的抖动和所述光学镜头组件的抖动。
  17. 根据权利要求16所述的潜望式摄像模组，其中，所述图像的抖动包括x轴平移分量、y轴平移分量、z轴平移分量、x轴旋转分量、y轴旋转分量和/或z轴旋转分量，其中x轴和y轴构成成像面所在平面的直角坐标系。
  18. 根据权利要求11所述的潜望式摄像模组，其中，所述垂直梳状驱动器包括多组梳状指状物，所述多组梳状指状物分布在所述反射构件的四周。
  19. 根据权利要求11所述的潜望式摄像模组，其中，所述垂直梳状驱动结构包括多组梳状指状物，所述多组梳状指状物分布在所述反射构件的两侧。
  20. 根据权利要求2所述的潜望式摄像模组，其中，所述平面反射镜由多个子反射镜拼接组合而成。
  21. 潜望式多摄模组，其中，所述潜望式多摄模组中至少包括一个如权利要求1-20中任一项所述的潜望式摄像模组。
  22. 根据权利要求21所述的潜望式多摄模组，其中，所述光学镜头组件为长焦镜头组件。
  23. 用于形成潜望式摄像模组的方法，包括：
    在用于沿第一光轴传播入射光的光路折转元件中设置反射构件，以将沿所述第一光轴传播的所述入射光折转到沿第二光轴传播，其中，所述第一光轴和所述第二光轴成角度；
    沿所述第二光轴布置光学镜头组件以接收被所述光路折转元件折转的入射光；
    沿所述第二光轴布置感光组件，以接收通过所述光学镜头组件的入射光，从而通过所述光学镜头组件的入射光在所述感光组件上成像；以及
    在所述光路折转元件上设置防抖致动机构，其中，所述防抖致动机构通过静电力驱动所述反射构件转动，以补偿所述入射光在所述感光组件上成像时由于抖动而发生的位置变化。
  24. 根据权利要求23所述的方法，还包括：
    在所述光路折转元件的基底上形成所述防抖致动机构与所述反射构件。
  25. 根据权利要求24所述的方法，其中，所述基底包括依次层叠的 第一硅层、氧化硅层和第二硅层，在所述光路折转元件的基底上形成所述防抖致动机构与所述反射构件的步骤包括：
    通过蚀刻所述第一硅层并在其表面涂覆光学反射涂层制成所述反射构件；以及
    通过蚀刻所述第一硅层形成上梳状指状物并通过蚀刻第二硅层形成下梳状指状物，所述上梳状指状物和所述下梳状指状物形成所述防抖致动机构。
  26. 根据权利要求25所述的方法，其中，所述光路折转元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜相对于所述支承框架围绕第一轴转动。
  27. 根据权利要求25所述的方法，其中，所述光路折转元件还包括支承框架，所述反射构件通过铰链结构与所述支承框架连接，在所述上梳状指状物与所述下梳状指状物之间的静电力的驱动下，使所述反射镜在所述支承框架的带动下围绕第二轴转动。
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