WO2020187151A1 - 显示基板及其制造方法、显示装置 - Google Patents
显示基板及其制造方法、显示装置 Download PDFInfo
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- WO2020187151A1 WO2020187151A1 PCT/CN2020/079206 CN2020079206W WO2020187151A1 WO 2020187151 A1 WO2020187151 A1 WO 2020187151A1 CN 2020079206 W CN2020079206 W CN 2020079206W WO 2020187151 A1 WO2020187151 A1 WO 2020187151A1
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- base substrate
- flexible base
- insulating layer
- adhesion enhancement
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/80—Manufacture or treatment specially adapted for the organic devices covered by this subclass using temporary substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/311—Flexible OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- This application relates to the field of display technology, and in particular to a display substrate, a manufacturing method thereof, and a display device.
- the display device includes a display substrate, the display substrate may have a bending area, and the bending area of the display substrate may be bent to achieve various purposes.
- the embodiments of the present application provide a display substrate, a manufacturing method thereof, and a display device.
- the technical solutions are as follows:
- a display substrate in one aspect, includes a flexible base substrate, and a wiring layer, a first adhesion enhancement layer, and a first insulating layer stacked on the flexible base substrate;
- the first adhesion enhancement layer is located between the first insulation layer and the wiring layer, and the first adhesion enhancement layer is respectively adhered to the first insulation layer and the wiring layer Connect
- the flexible base substrate has a bending area, and the area where the orthographic projection of the first adhesion enhancement layer on the flexible base substrate is located and the bending area have an overlapping area;
- the wiring layer has signal wiring, and an area where the orthographic projection of the signal wiring on the flexible base substrate is located and the bending area have an overlap area.
- the material of the first adhesion enhancement layer is one or more of acrylic resin, epoxy resin and polyimide.
- the thickness of the first adhesion enhancement layer ranges from 1 micrometer to 3 micrometers.
- the display substrate includes a second adhesion enhancement layer and a second insulation layer laminated on the flexible base substrate;
- the second insulating layer is located on a side of the wiring layer away from the first insulating layer, the second adhesion enhancing layer is located between the second insulating layer and the wiring layer, and The second adhesion enhancement layer is respectively bonded to the second insulating layer and the wiring layer, and the area where the orthographic projection of the second adhesion enhancement layer on the flexible substrate is located is with the There are overlapping areas in the bending area.
- the material of the second adhesion enhancement layer is one or more of acrylic resin, epoxy resin and polyimide.
- the thickness of the second adhesion enhancement layer ranges from 1 micrometer to 3 micrometers.
- the second insulating layer is located on a side of the wiring layer away from the flexible base substrate;
- the display substrate includes a stress balance layer located on a side of the second insulating layer away from the flexible base substrate, an area where the orthographic projection of the stress balance layer on the flexible base substrate is located and the bending area There are overlapping areas.
- the wiring layer includes source wiring and drain wiring.
- the first insulating layer is an organic layer.
- the second insulating layer is an organic layer.
- the display substrate includes: a second adhesion enhancement layer and a second insulation layer laminated on the flexible base substrate;
- the second insulating layer is located on a side of the wiring layer away from the first insulating layer, the second adhesion enhancing layer is located between the second insulating layer and the wiring layer, and The second adhesion enhancement layer is respectively bonded to the second insulating layer and the wiring layer, and the area where the orthographic projection of the second adhesion enhancement layer on the flexible substrate is located is with the There are overlapping areas in the bending area;
- the material of the first adhesion enhancement layer and the material of the second adhesion enhancement layer are one or more of acrylic resin, epoxy resin and polyimide;
- the range of the thickness of the first adhesion enhancement layer and the thickness of the second adhesion enhancement layer is in the range of 1 micrometer to 3 micrometers.
- a method for manufacturing a display substrate includes:
- a stacked wiring layer, a first adhesion enhancement layer, and a first insulating layer are formed on the flexible base substrate, and the first adhesion enhancement layer is respectively connected to the first insulating layer and the wiring Layer bonding, the area where the orthographic projection of the first adhesion enhancement layer on the flexible base substrate is located overlaps the bending area, and the signal wiring in the wiring layer is in the flexible substrate There is an overlap area between the area where the orthographic projection on the base substrate is located and the bending area.
- the method further includes:
- a laminated second adhesion enhancement layer and a second insulating layer are formed on the flexible base substrate on which the wiring layer is formed, and the second adhesion enhancement layer is connected to the second insulating layer and the The wiring layer is adhered, and the area where the orthographic projection of the second adhesion enhancement layer on the flexible base substrate is located and the bending area are overlapped.
- the forming a stacked wiring layer, a first adhesion enhancement layer, and a first insulating layer on the flexible base substrate includes:
- the first insulating layer, the first adhesion enhancement layer and the wiring layer are sequentially formed on the flexible base substrate.
- the step of sequentially forming the first insulating layer, the first adhesion enhancement layer and the wiring layer on the flexible base substrate includes:
- the acrylic resin layer is processed through a patterning process to obtain the first adhesion enhancement layer.
- the metal material layer is processed by a patterning process to obtain the wiring layer.
- the method further includes:
- a stress balance layer is formed on the flexible base substrate on which the second insulating layer is formed, and the area where the orthographic projection of the stress balance layer on the flexible base substrate is located overlaps with the bending area.
- the obtaining a flexible base substrate, the flexible base substrate having a bending area includes:
- the flexible base substrate is formed on the rigid base substrate, and the flexible base substrate has the bending area.
- a display device in another aspect, includes any of the above-mentioned display substrates.
- FIG. 1 is a front view of a display substrate provided by an embodiment of the present application
- FIG. 2 is a schematic cross-sectional view of the C-D part of the display substrate provided by an embodiment of the present application
- FIG. 3 is a method flowchart of a method for manufacturing a display substrate provided by an embodiment of the present application
- FIG. 4 is a method flowchart of another method for manufacturing a display substrate provided by an embodiment of the present application.
- FIG. 5 is a schematic diagram after forming a third insulating layer on a flexible substrate according to an embodiment of the present application.
- FIG. 6 is a schematic diagram of a first insulating layer, a first adhesion enhancement layer, and a wiring layer are sequentially formed on a flexible substrate according to an embodiment of the present application;
- FIG. 7 is a schematic diagram of a second adhesion enhancement layer and a second insulating layer formed in sequence on a flexible substrate with a wiring layer provided by an embodiment of the present application;
- FIG. 8 is a schematic diagram of an anode, a pixel defining layer, a light-emitting layer, and a cathode after sequentially forming an anode, a pixel defining layer, a light-emitting layer, and a cathode on a flexible base substrate formed with a second insulating layer according to an embodiment of the present application.
- the display substrate is famous for its thin thickness and bendable performance.
- the display substrate has a display surface and a non-display surface.
- the display surface has a display area and a non-display area.
- the non-display area usually includes a binding area.
- the binding area can be bent to the side where the non-display surface is located to achieve a narrow or no border of the display device.
- the display substrate usually includes a plurality of film layers arranged in a stack, the plurality of film layers include a wiring layer, and the plurality of film layers are partially located in the bending area, and the binding area is bent to the side where the non-display surface is located.
- the part of the multiple film layers in the bending area is prone to film layer separation, and as the bending process progresses, the separation will gradually spread, and finally lead to cracks in the film layer (the crack can be observed under a microscope To).
- the crack usually expands and extends to the wiring layer, causing the signal wiring of the wiring layer to break; in addition, the signal wiring in the bending area is prone to fatigue, which also It will cause the signal trace to be broken, which will lead to poor process of the display substrate.
- the signal wiring of the wiring layer can usually include source wiring and drain wiring (referred to as source and drain wiring, also known as SD line or data line).
- source and drain wiring also known as SD line or data line.
- the reliability test may be a high temperature and high humidity test, and the test specification may be 69° C. (degrees Celsius), 90% (percent) relative humidity (English: Relative Humidity; abbreviation: RH), 500 hrs (hour).
- the display substrate can be placed in an environment with a temperature of 69° C. and a relative humidity of 90% for 500 hrs, and in the process, it is tested whether the display substrate will be defective.
- the embodiments of the present application provide a display substrate, a method of manufacturing the same, and a display device.
- an adhesion enhancement layer is provided between the wiring layer and the insulating layer to adhere to the wiring layer and the insulating layer, respectively.
- the adhesion enhancement layer overlaps with the bending area of the display substrate.
- the adhesion enhancement layer can enhance the adhesion between the wiring layer and the insulating layer, and reduce the film separation between the wiring layer and the insulating layer.
- the signal traces of the wire layer may be broken, thereby reducing the probability of poor process of the display substrate.
- the adhesion enhancement layer can reduce the stress of the signal trace and reduce the possibility of the signal trace being broken due to excessive stress.
- FIG. 1 is a front view of a display substrate 01 provided by an embodiment of the present application.
- FIG. 2 is a schematic cross-sectional view of the CD portion of the display substrate 01 shown in FIG. 1.
- the display substrate 01 includes: The base substrate 011 and the wiring layer 012 (not shown in FIG. 1) stacked on the flexible base substrate 011, the first adhesion enhancement layer 013 (not shown in FIG. 1), and the first insulating layer 014 (Not shown in FIG.
- the first insulating layer 014 is located on one side of the wiring layer 012
- the first adhesion enhancement layer 013 is located between the first insulating layer 014 and the wiring layer 012
- the first adhesion The force enhancement layer 013 is bonded to the first insulating layer 014 and the wiring layer 012 respectively.
- the flexible base substrate 011 has a bending area A1, the orthographic projection of the first adhesion enhancement layer 013 on the flexible base substrate 011 is at least in the bending area A1, and the signal wiring 0121 in the wiring layer 012 ( Figure 2 (Not shown in) there is an overlap area in the area where the orthographic projection on the flexible base substrate 011 and the bending area A1 are (that is, the orthographic projection of the signal trace on the flexible base substrate includes the area in the bending area Part, may also include a part outside the bending area), the first adhesion enhancement layer 013 is used to enhance the adhesion between the wiring layer 012 and the first insulating layer 014.
- the display substrate in the flexible base substrate, there is a first adhesion enhancement layer between the wiring layer and the first insulating layer, and the first adhesion enhancement layer is separately connected to the routing layer.
- the wire layer and the first insulating layer are bonded together, and the area where the orthographic projection of the first adhesion enhancement layer on the flexible base substrate is located and the bending area overlap.
- the first adhesion enhancement layer can enhance the adhesion between the wiring layer and the first insulating layer, thereby reducing the film separation between the wiring layer and the first insulating layer, causing the signal wiring of the wiring layer to break Probability, thereby reducing the probability of poor process of the display substrate.
- the flexible base substrate 011 has a display area A2 and a non-display area A3.
- the non-display area A3 includes a bending area A1 and a binding area A4.
- the bending area A1 is located in the display area A2 and Between the binding area A4.
- the display substrate 01 includes: a second adhesion enhancement layer 015 and a second insulating layer 016 laminated on a flexible base substrate 011, and the second insulating layer 016 is located
- the wiring layer 012 is away from the side of the first insulating layer 014.
- the second adhesion enhancement layer 015 is located between the second insulation layer 016 and the wiring layer 012, and the second adhesion enhancement layer 015 is bonded to the second insulation layer 016 and the wiring layer 012, respectively.
- the second adhesion enhancement layer 015 is used to enhance the adhesion between the wiring layer 012 and the second insulating layer 016, and reduce the film separation between the wiring layer 012 and the second insulating layer 016, resulting in the signal of the wiring layer 012 The possibility of wire breakage, thereby reducing the probability of poor process of the display substrate 011.
- the material of the first adhesion enhancement layer 013 and the material of the second adhesion enhancement layer 015 may be acrylic resin, epoxy resin, and polyimide (English: Polyimide ; Abbreviation: PI) one or more, these materials have greater adhesion to the wiring layer 012 and the insulating layer.
- the thickness range of the first adhesion enhancement layer 013 and the thickness of the second adhesion enhancement layer 015 are both in the range of 1 ⁇ m to 3 ⁇ m.
- the first adhesion enhancement layer 013 can be better with The first insulating layer 014 adheres to the wiring layer 012, and the second adhesion enhancing layer 015 can better adhere to the second insulating layer 016 and the wiring layer 012 to enhance the adhesion of the enhanced adhesion layer to the wiring layer 012 Adhesion to the insulating layer.
- the thickness of the first adhesion enhancement layer 013 can be 1 micron, 1.5 microns or 3 microns
- the thickness of the second adhesion enhancement layer 015 can be 1 micron, 2 microns or 3 microns, etc., in the embodiment of the present application There is no restriction on this.
- the first insulating layer 014 is located on the side of the wiring layer 012 close to the flexible base substrate 011
- the second insulating layer 016 is located on the side of the wiring layer 012 away from the flexible base substrate 011.
- the display substrate 01 further includes: a stress balance layer 017 disposed on a side of the second insulating layer 016 away from the flexible base substrate 011.
- the stress-balancing layer 017 has an overlapping area with the bending area A1 in the area where the orthographic projection on the flexible substrate 011 is located, and the stress-balancing layer 017 can balance the orthogonal projection on the flexible substrate with the bending area A1.
- the stress between the film layers in the bending area A1 balances the forces on the film layers.
- the signal traces located in the bending area of the display substrate 01 have less stress, which can reduce the possibility of the signal traces being broken.
- the display substrate 01 further includes: a third insulating layer 018 located between the flexible base substrate 011 and the first insulating layer 014, and the third insulating layer 018 has a bending hole (Figure 2), the orthographic projection of the bending hole on the flexible substrate 011 covers the bending area A1 of the flexible substrate 011, and the first insulating layer 014 is located in the bending hole.
- the orthographic projection of the bending hole on the flexible base substrate 011 coincides with the bending area A1 of the flexible base substrate 011
- the first insulating layer 014 may be an organic filling layer
- the third insulating layer 018 may be an inorganic layer .
- a bending hole is provided on the third insulating layer 018, and the orthographic projection of the bending hole on the flexible base substrate 011 covers the bending area A1 of the flexible base substrate 011.
- the thickness of the inorganic layer in the folding area is small, which is beneficial for bending the display substrate 01.
- the bending area of the display substrate 01 is also the corresponding area of the bending area A1 of the flexible base substrate 011 in the display substrate 01.
- the third insulating layer 018 may be a composite film layer including a plurality of insulating film layers, and the plurality of insulating film layers may all be inorganic layers.
- the material of the plurality of insulating film layers may be at least one of SiOx (silicon oxide) and SiNx (silicon nitride).
- the plurality of insulating film layers may include a buffer layer (not shown in FIG. 2), a gate insulating layer (not shown in FIG. 2), and an interlayer dielectric layer (not shown in FIG. 2); accordingly ,
- the display substrate 01 further includes: an active layer (not shown in FIG.
- the source and drain layers include source and drain electrodes.
- the third insulating layer 018 may be composed of a buffer layer, a gate insulating layer and an interlayer The three film layers of the dielectric layer extend to the non-display area of the display substrate 01.
- the wiring layer 012 may include source-drain wiring, and the source-drain wiring may be connected to the source.
- the arrangement of the first adhesion enhancement layer 013 and the second adhesion enhancement layer 015 can reduce the possibility of the source and drain traces being broken, thereby reducing the occurrence of source and drain traces on the display substrate.
- the bright line in the extending direction of the line affects the probability of the display effect.
- the display substrate 01 provided in the embodiment of the present application may be an organic light-emitting diode (English: Organic Light-Emitting Diode; OLED for short) display substrate
- the second insulating layer 016 may be a flat layer
- the flat layer may be used In order to improve the flatness of the flexible base substrate, it is convenient for subsequent film layer setting.
- the display substrate 01 further includes: an anode (not shown in FIG. 2) and a pixel definition layer (English: Pixel Definition Layer) arranged on the side of the second insulating layer 016 away from the flexible base substrate 011 in sequence.
- Abbreviation: PDL)019 a light-emitting layer (not shown in FIG.
- the light-emitting layer may be an organic light-emitting layer, and the anode, the light-emitting layer and the cathode constitute an OLED unit.
- the material of the second insulating layer 016 and the pixel defining layer 019 can be organic resin
- the anode and cathode can be formed of indium tin oxide (English: Indium Tin Oxide; abbreviated as: ITO)
- the material for forming the light-emitting layer can be It is an organic light-emitting material, which is not repeated in the embodiments of the present application.
- the flexible base substrate 011 may be composed of alternately superimposed inorganic layers and flexible base layers, and the inorganic layer may be an inorganic layer made of silicon nitride, silicon oxide, silicon oxynitride, etc.
- the flexible base layer may be a flexible base layer made of polyimide.
- the flexible base substrate 011 includes a first inorganic layer 0111, a first flexible base layer 0112, a second inorganic layer 0113, and a second flexible base layer 0114 that are sequentially stacked and arranged.
- FIG. 1 and FIG. 2 only describe the structure related to the present application in the display substrate 01. Those skilled in the art can easily understand that the display substrate also includes other structures such as an encapsulation layer. The embodiments of the present application will not be repeated here.
- the display substrate in the flexible base substrate, there is a first adhesion enhancement layer between the wiring layer and the first insulating layer, and the first adhesion enhancement layer is separately connected to the routing layer.
- the wire layer and the first insulating layer are bonded, and the area where the orthographic projection of the first adhesion enhancement layer on the flexible base substrate is located and the bending area overlap, the first adhesion enhancement layer can enhance the wiring layer
- the adhesion between the first insulating layer and the first insulating layer reduces the probability that the signal wiring of the wiring layer will be broken due to film separation between the wiring layer and the first insulating layer, thereby reducing the probability of poor process of the display substrate.
- a second adhesion enhancement layer is provided between the wiring layer and the second insulating layer, and the second adhesion enhancement layer is respectively bonded to the wiring layer and the second insulating layer, and the second adhesion
- the second adhesion enhancement layer can enhance the adhesion between the wiring layer and the second insulating layer, thereby reducing wiring
- the separation of the layer and the second insulating layer causes the possibility of breakage of the signal wiring of the wiring layer, thereby reducing the probability of poor process of the display substrate.
- the wiring layer may include source and drain wirings.
- the solution provided in the embodiments of the present application can reduce the possibility of breakage of the source and drain wirings, thereby reducing the extension of the source and drain wirings in the display substrate during display. The probability of bright lines in the direction improves the display effect of the display substrate.
- the display substrate provided by the embodiment of the present application can be applied to the following method, and the manufacturing method and manufacturing principle of the display substrate in the embodiment of the present application can be referred to the description in the following embodiment.
- FIG. 3 shows a method flowchart of a method for manufacturing a display substrate provided by an embodiment of the present application, and the method may be used for manufacturing the display substrate 01 provided by the foregoing embodiment.
- the method includes the following steps:
- Step 301 A flexible base substrate is formed, and the flexible base substrate has a bending area.
- Step 302 forming a laminated wiring layer, a first adhesion enhancing layer and a first insulating layer on the flexible base substrate, the first adhesion enhancing layer is respectively bonded to the first insulating layer and the wiring layer, and The area where the orthographic projection of an adhesion-enhancing layer on the flexible substrate is located overlaps with the bending area, and the area where the orthographic projection of the signal traces in the wiring layer on the flexible substrate overlaps with the bending area area.
- the first adhesion enhancement layer is used to enhance the adhesion between the wiring layer and the insulating layer.
- a first adhesion enhancement layer is provided between the wiring layer and the first insulating layer, and the first adhesion enhancement The layers are respectively bonded to the wiring layer and the first insulating layer, and the area where the orthographic projection of the first adhesion enhancement layer on the flexible substrate is located overlaps with the bending area, the first adhesion enhancement layer may Enhancing the adhesion between the wiring layer and the first insulating layer, thereby reducing the probability that the wiring layer and the first insulating layer are separated and the signal wiring of the wiring layer will be broken, thereby reducing the display substrate's poor process The probability.
- the method further includes: forming a laminated second adhesion enhancement layer and a second insulating layer on the flexible base substrate with the wiring layer formed, the second adhesion enhancement layer and The second insulating layer is bonded to the wiring layer, the orthographic projection of the second adhesion enhancement layer on the flexible base substrate is at least in the bending area, and the second adhesion enhancement layer is used to strengthen the wiring layer and the second Adhesion between insulating layers.
- the second adhesion enhancement layer can be formed first and then the second insulating layer, or the second insulating layer can be formed first and then the second adhesion enhancement layer.
- the material of the first adhesion enhancement layer and the material of the second adhesion enhancement layer are one or more of acrylic resin, epoxy resin, and polyimide.
- the range of the thickness of the first adhesion enhancement layer and the range of the thickness of the second adhesion enhancement layer are both 1 micrometer to 3 micrometers.
- the method further includes: on the flexible base substrate with the second insulating layer A stress balance layer is formed on the upper surface, and the area where the orthographic projection of the stress balance layer on the flexible substrate is located overlaps the bending area.
- the wiring layer includes source and drain wiring, and both the first insulating layer and the second insulating layer are organic layers.
- the first insulating layer is an organic filling layer.
- the method further includes: forming a third insulating layer on the flexible base substrate, the third insulating layer has a bending hole, and the bending hole is The orthographic projection on the base substrate covers the bending area, and the first insulating layer is located in the bending hole.
- the second insulating layer is a flat layer
- the method further includes: sequentially forming anodes on the flexible substrate with the flat layer. , Pixel defining layer, light emitting layer and cathode.
- forming a stress balance layer on the flexible base substrate on which the second insulating layer is formed includes: forming a stress balance layer on the flexible base substrate on which the cathode is formed.
- FIG. 4 shows a method flow chart of another method for manufacturing a display substrate provided by an embodiment of the present application, and the method can be used to manufacture the display substrate 01 provided by the foregoing embodiment.
- the method includes the following steps:
- Step 401 Obtain a flexible base substrate, where the flexible base substrate has a bending area.
- the flexible base substrate can be directly obtained, or the flexible base substrate can be manufactured.
- the process of manufacturing the flexible base substrate may include: first providing a rigid base substrate, and then forming the flexible base substrate on the rigid base substrate.
- the rigid base substrate may be a substrate made of a material with certain sturdiness such as glass, quartz or transparent resin, for example, the rigid base substrate is a glass substrate.
- the flexible base substrate may include alternately superimposed inorganic layers and flexible base layers. Therefore, forming the flexible base substrate on the rigid base substrate means forming alternately superimposed inorganic layers and layers on the rigid base substrate.
- the material of the flexible base layer may be PI, and the material of the inorganic layer may be SiOx.
- the flexible base substrate 011 includes a first inorganic layer 0111, a first flexible base layer 0112, a second inorganic layer 013, and a second flexible base layer 0114 that are sequentially superimposed.
- the formation of the flexible base substrate 011 on the substrate may include the following 4 steps:
- Step (1) forming a layer of SiOx as the first inorganic layer 0111 on the rigid base substrate by means of a deposition process, a coating process or a sputtering process.
- Step (2) coating a layer of PI solution on the first inorganic layer 0111, and drying the PI solution to remove the solvent of the PI solution, so that the solute of the PI solution remains as the first flexible base layer 0112.
- Step (3) forming a layer of SiOx as the second inorganic layer 0113 on the side of the first flexible base layer 0112 away from the first inorganic layer 0111 by means of a deposition process, a coating process or a sputtering process.
- Step (4) Coating a layer of PI solution on the second inorganic layer 0113, and drying the PI solution to remove the solvent of the PI solution, so that the solute of the PI solution remains as the second flexible base layer 0114.
- Step 402 A third insulating layer is formed on the flexible base substrate.
- the third insulating layer has a bending hole.
- the orthographic projection of the bending hole on the flexible base substrate overlaps the bending area of the flexible base substrate.
- the insulating layer is located in the bending hole.
- FIG. 5 shows a schematic diagram of a third insulating layer 018 formed on a flexible base substrate 011 according to an embodiment of the present application.
- the third insulating layer 018 has a bending hole K and a bending hole K.
- the orthographic projection on the flexible base substrate 011 covers the bending area of the flexible base substrate 011 (not marked in FIG. 5).
- the third insulating layer 018 includes a plurality of insulating film layers, and the plurality of insulating film layers may be inorganic layers.
- the material of the plurality of insulating film layers may be at least one of SiOx and SiNx.
- the plurality of insulating film layers in the third insulating layer may include a buffer layer, a gate insulating layer, and an interlayer dielectric layer.
- the display substrate further includes an active layer located between the buffer layer and the gate insulating layer, a gate located between the gate insulating layer and the interlayer dielectric layer, and a side of the interlayer dielectric layer away from the gate insulating layer.
- the source-drain layer, the source-drain layer includes a source electrode and a drain electrode, and the third insulating layer 018 can be considered to extend from the three layers of the buffer layer, the gate insulating layer and the interlayer dielectric layer to the non-display area of the display substrate Partial composition.
- forming the third insulating layer 018 on the flexible base substrate 011 may include: sequentially forming a buffer layer, an active layer, a gate insulating layer, a gate electrode, an interlayer dielectric layer, and a source and drain layer on the flexible base substrate 011.
- the process of forming any one of the buffer layer, the gate insulating layer, and the interlayer dielectric layer may include: forming a SiOx material layer through a deposition process, a coating process, or a sputtering process, and transforming the SiOx material through a patterning process. Layer for processing.
- Step 403 sequentially forming a first insulating layer, a first adhesion enhancing layer and a wiring layer on the flexible base substrate on which the third insulating layer is formed.
- FIG. 6 shows a first insulating layer 014, a first adhesion enhancement layer 013, and a first insulating layer 014 are sequentially formed on a flexible base substrate 011 formed with a third insulating layer 018 according to an embodiment of the present application.
- the first adhesion enhancement layer 013 is respectively bonded to the first insulating layer 014 and the wiring layer 012, and the orthographic projection of the first adhesion enhancement layer 013 on the flexible base substrate 011 is at least in the flexible In the bending area of the base substrate 011 (not marked in FIG. 6).
- the orthographic projection of the signal traces in the wiring layer 012 on the flexible substrate 011 is located in the bending area of the flexible substrate 011.
- the first adhesion enhancement layer 013 is used to increase the trace layer 012 and the first Adhesion between an insulating layer 014.
- the orthographic projection of the bending hole K on the flexible substrate 011 covers the bending area of the flexible substrate 011, because the orthographic projection of the first adhesion enhancement layer 013 on the flexible substrate 011 is There is an overlap area between the area and the bending area of the flexible base substrate 011, and the area where the orthographic projection of the signal traces in the wiring layer 012 on the flexible base substrate 011 is located and the bending area of the flexible base substrate 011 exist. Therefore, the first adhesion enhancement layer 013 is located at least in the bending hole K, and the signal wiring in the wiring layer 012 is partially located in the bending hole K.
- the wiring layer 012 may include source and drain wiring.
- the material of the wiring layer 012 can be a conductive material such as metal or ITO, and the material of the first adhesion enhancement layer 013 can be one or more of acrylic resin, epoxy resin and PI.
- the thickness of the adhesion enhancement layer 013 can range from 1 micrometer to 3 micrometers, and the material of the first insulating layer 014 can be PI.
- the material of the wiring layer 012 is acrylic resin
- the material of the first insulating layer 014 is PI as an example
- the flexible lining formed with the third insulating layer 018 The process of sequentially forming the first insulating layer 014, the first adhesion enhancing layer 013 and the wiring layer 012 on the base substrate 011 may include the following steps:
- Step (1) coating a layer of PI solution on the flexible base substrate 011 on which the third insulating layer 018 is formed, and drying the PI solution to remove the solvent of the PI solution, so that the solute of the PI solution remains as the first An insulating layer 014.
- Step (2) forming a layer of acrylic resin with a thickness of 1 ⁇ m to 3 ⁇ m on the flexible base substrate 011 with the first insulating layer 014 formed by a deposition process, a coating process or a sputtering process to obtain an acrylic resin layer ,
- the acrylic resin layer is processed through a patterning process to obtain the first adhesion enhancement layer 013.
- Step (3) forming a layer of metal on the flexible base substrate 011 with the first adhesion enhancement layer 013 formed by a deposition process, a coating process or a sputtering process to obtain a metal material layer, and perform a patterning process
- the metal material layer is processed to obtain the wiring layer 012.
- Step 404 sequentially forming a second adhesion enhancement layer and a second insulating layer on the flexible base substrate with the wiring layer formed.
- FIG. 7 shows a schematic diagram of a second adhesion enhancement layer 015 and a second insulating layer 016 formed on a flexible base substrate 011 formed with a wiring layer 012 according to an embodiment of the present application.
- the second insulating layer 016 may be a flat layer, the second adhesion enhancement layer 015 is respectively bonded to the second insulating layer 016 and the wiring layer 012, and the second adhesion enhancement layer 015 is on the flexible base substrate 011.
- step 402 the orthographic projection of the bending hole K on the flexible substrate 011 covers the bending area of the flexible substrate 011, and the orthographic projection of the second adhesion enhancement layer 015 on the flexible substrate 011 is at least Located in the bending area of the flexible base substrate 011, therefore, the second adhesion enhancement layer 015 is located at least in the bending hole K.
- the material of the second adhesion enhancement layer 015 may be one or more of acrylic resin, epoxy resin and PI.
- the thickness of the second adhesion enhancement layer 015 may range from 1 ⁇ m to 3 ⁇ m, and the material of the second insulating layer 016 may be an organic resin.
- the second adhesive is sequentially formed on the flexible base substrate 011 on which the wiring layer 012 is formed.
- the adhesion enhancement layer 015 and the second insulating layer 016 may include the following steps:
- Step (1) forming a layer of epoxy resin with a thickness of 1 ⁇ m to 3 ⁇ m on the flexible base substrate 011 on which the wiring layer 012 is formed by a deposition process, a coating process or a sputtering process, etc., to obtain an epoxy resin Layer
- the epoxy resin layer is processed through a patterning process to obtain the second adhesion enhancement layer 015.
- Step (2) forming a layer of organic resin on the flexible base substrate 011 on which the second adhesion enhancement layer 015 is formed by a deposition process, a coating process, or a sputtering process to obtain an organic resin layer, through a patterning process
- the organic resin layer is processed to obtain the second insulating layer 016.
- Step 405 sequentially forming an anode, a pixel defining layer, a light-emitting layer, and a cathode on the flexible base substrate on which the second insulating layer is formed.
- FIG. 8 shows an embodiment of the present application provides an anode (not shown in FIG. 8 ), a pixel defining layer 019, and a light emitting device are sequentially formed on a flexible substrate 011 formed with a second insulating layer 016.
- the material of the pixel defining layer 019 can be organic resin
- the material of the anode and the cathode can be ITO
- the material for forming the light-emitting layer can be For organic light-emitting materials.
- sequentially forming an anode, a pixel defining layer 019, a light-emitting layer, and a cathode on the flexible base substrate 011 on which the wiring layer 016 is formed may include the following steps:
- Step (1) A layer of ITO is formed on the flexible base substrate 011 with the second insulating layer 016 formed by a deposition process, a coating process or a sputtering process to obtain an ITO material layer, and a patterning process is performed on the ITO material layer. The treatment is performed to obtain the anode.
- Step (2) forming a layer of organic resin on the flexible substrate 011 with the anode formed by a deposition process, coating process or sputtering process to obtain an organic resin layer, and processing the organic resin layer through a patterning process Pixel defining layer 019.
- Step (3) forming a layer of organic light-emitting material on the flexible base substrate 011 on which the pixel defining layer 019 is formed through a deposition process, a coating process or a sputtering process, etc., to obtain an organic light-emitting material layer.
- the organic light-emitting material layer is processed to obtain the light-emitting layer.
- Step (4) forming a layer of ITO as a cathode on the flexible base substrate 011 with the anode formed by a deposition process, a coating process or a sputtering process.
- This step (4) takes the cathode as a planar electrode (that is, the entire display substrate 01 has a cathode) as an example. If the cathode is a bulk electrode, the deposited ITO material can be changed by patterning after ITO is deposited. The layer is processed to obtain a cathode.
- Step 406 A stress balance layer is formed on the flexible base substrate with the cathode formed, and the orthographic projection portion of the stress balance layer on the flexible base substrate is located in the bending area.
- the stress balance layer 017 can be formed on the flexible base substrate 011 with the cathode formed by a deposition process, a coating process, or a sputtering process.
- FIG. 5 to 8 do not show a rigid base substrate. Those skilled in the art can easily understand that in practical applications, the above steps 401 to 406 are usually completed on a rigid base substrate. After step 406 is performed, The flexible base substrate can be separated from the rigid base substrate to obtain the display substrate 01 as shown in FIG. 2.
- the one patterning process involved includes photoresist coating, exposure, development, etching and photoresist stripping, and the material layer is processed through one patterning process.
- the corresponding structure (for example, processing the metal material layer to obtain the wiring layer) may include: coating a layer of photoresist on the material layer (for example, the metal material layer) to form a photoresist layer, and applying a mask to the photoresist The layer is exposed to make the photoresist layer form a fully exposed area and a non-exposed area, and then a development process is used to completely remove the photoresist in the fully exposed area, and all the photoresist in the non-exposed area is retained, using an etching process The area corresponding to the fully exposed area on the material layer (for example, a metal material layer) is etched, and finally the photoresist in the non-exposed area is stripped to obtain a corresponding structure (for example, a wiring
- the photoresist is a positive photoresist as an example.
- the process of one patterning process can refer to the description in this paragraph, and the embodiments of this application will not be omitted here. Repeat.
- the first adhesion enhancement layer is formed between the wiring layer in the flexible base substrate and the first insulating layer, and the first adhesion enhancement layer Adhere to the wiring layer and the first insulating layer respectively, and the orthographic projection of the first adhesion enhancement layer on the flexible base substrate is at least in the bending area, the first adhesion enhancement layer can enhance the wiring layer
- the adhesion between the first insulating layer and the first insulating layer reduces the probability that the signal wiring of the wiring layer will be broken due to film separation between the wiring layer and the first insulating layer, thereby reducing the probability of poor process of the display substrate.
- the wiring layer may include source and drain wirings.
- the solution provided by the embodiment of the present application can prevent the source and drain wiring from breaking, thereby reducing the brightness of the source and drain wiring in the extension direction of the display substrate during display. Line probability improves the display effect of the display substrate.
- the embodiment of the present application also provides a display device.
- the display device includes the display substrate 01 provided in the above embodiment.
- the display substrate 01 provided in the above embodiment has a relatively set display surface (none of which is shown in the figure) and a non-display
- the display surface has a binding area.
- the binding area of the display substrate 01 is bent to the side of the non-display surface of the display substrate 01.
- the display device may be a narrow border display device, a borderless display device, or a full-screen display device.
- the display device may be a display panel, a wearable device such as a watch and a bracelet, a mobile terminal such as a mobile phone or a tablet computer, or , TVs, monitors, notebook computers, digital photo frames, navigators and other products or components with display functions.
Abstract
Description
Claims (19)
- 一种显示基板,所述显示基板(01)包括柔性衬底基板(011)以及层叠设置在所述柔性衬底基板(011)上的走线层(012)、第一粘附力增强层(013)和第一绝缘层(014);所述第一粘附力增强层(013)位于所述第一绝缘层(014)与所述走线层(012)之间,且所述第一粘附力增强层(013)分别与所述第一绝缘层(014)和所述走线层(014)粘接;所述柔性衬底基板(011)具有弯折区域(A1),所述第一粘附力增强层(013)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域;所述走线层(014)中具有信号走线(0121),所述信号走线(0121)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域。
- 根据权利要求1所述的显示基板,所述第一粘附力增强层(013)的材料为亚克力树脂、环氧树脂和聚酰亚胺中的一种或多种。
- 根据权利要求1所述的显示基板,所述第一粘附力增强层(013)的厚度的范围为1微米~3微米。
- 根据权利要求1-3任一所述的显示基板,所述显示基板(01)包括层叠设置在所述柔性衬底基板(011)上的第二粘附力增强层(015)和第二绝缘层(016);所述第二绝缘层(016)位于所述走线层(012)远离所述第一绝缘层(014)的一侧,所述第二粘附力增强层(015)位于所述第二绝缘层(016)与所述走线层(012)之间,且所述第二粘附力增强层(015)分别与所述第二绝缘层(016)和所述走线层(012)粘接,所述第二粘附力增强层(015)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域。
- 根据权利要求4所述的显示基板,所述第二粘附力增强层(015)的材 料为亚克力树脂、环氧树脂和聚酰亚胺中的一种或多种。
- 根据权利要求4所述的显示基板,所述第二粘附力增强层(015)的厚度的范围为1微米~3微米。
- 根据权利要求4-6任一所述的显示基板,所述第二绝缘层(016)位于所述走线层(012)远离所述柔性衬底基板(011)的一侧;所述显示基板(01)包括位于所述第二绝缘层(016)远离所述柔性衬底基板(011)一侧的应力平衡层(017),所述应力平衡层(017)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域。
- 根据权利要求1至7任一所述的显示基板,所述走线层(012)包括源极走线和漏极走线。
- 根据权利要求1-8任一所述的显示基板,所述第一绝缘层(014)、所述所述第一粘附力增强层(013)和所述走线层(012)沿远离所述柔性衬底基板(011)的方向层叠设置。
- 根据权利要求1-3任一所述的显示基板,所述第一绝缘层(014)为有机层。
- 根据权利要求4-7任一所述的显示基板,所述第二绝缘层(016)为有机层。
- 根据权利要求1所述的显示基板,所述显示基板包括:层叠设置在所述柔性衬底基板上的第二粘附力增强层和第二绝缘层;所述第二绝缘层位于所述走线层远离所述第一绝缘层的一侧,所述第二粘附力增强层位于所述第二绝缘层与所述走线层之间,且所述第二粘附力增强层分别与所述第二绝缘层和所述走线层粘接,所述第二粘附力增强层在所述柔性衬底基板上的正投影所在区域与所述弯折区域存在重叠区域;所述第一粘附力增强层的材料和所述第二粘附力增强层的材料均为亚克力树脂、环氧树脂和聚酰亚胺中的一种或多种;所述第一粘附力增强层的厚度的范围和所述第二粘附力增强层的厚度的范围为1微米~3微米。
- 一种显示基板的制造方法,所述方法包括:获取柔性衬底基板(011),所述柔性衬底基板(011)具有弯折区域(A1);在所述柔性衬底基板(011)上形成层叠的走线层(012)、第一粘附力增强层(013)和第一绝缘层(014),所述第一粘附力增强层(013)分别与所述第一绝缘层(014)和所述走线层(012)粘接,所述第一粘附力增强层(013)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域,所述走线层(012)中的信号走线(0121)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域。
- 根据权利要求13所述的方法,在所述柔性衬底基板(011)上形成层叠的走线层(012)、第一粘附力增强层(013)和第一绝缘层(014)之后,所述方法还包括:在形成有所述走线层(012)的柔性衬底基板(011)上形成层叠的第二粘附力增强层(015)和第二绝缘层(016),所述第二粘附力增强层(015)分别与所述第二绝缘层(016)和所述走线层(012)粘接,所述第二粘附力增强层(015)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域。
- 根据权利要求13所述的方法,所述在所述柔性衬底基板(011)上形成层叠的走线层(012)、第一粘附力增强层(013)和第一绝缘层(014),包括:在所述柔性衬底基板(011)上依次形成所述第一绝缘层(014),所述第一粘附力增强层(013)和所述走线层(012)。
- 根据权利要求15所述的方法,所述在所述柔性衬底基板上依次形成所述第一绝缘层,所述第一粘附力增强层和所述走线层,包括:在所述柔性衬底基板(011)上涂覆聚酰亚胺溶液,并对所述聚酰亚胺溶液进行干燥处理以形成所述第一绝缘层(014);通过沉积工艺、涂覆工艺或者溅射工艺在形成有所述第一绝缘层(014)的柔性衬底基板(011)上形成亚克力树脂层;通过构图工艺对所述亚克力树脂层进行处理得到所述第一粘附力增强层(013);通过沉积工艺、涂覆工艺或者溅射工艺在形成有所述第一粘附力增强层(013)的柔性衬底基板(011)上形成金属材质层;通过构图工艺对所述金属材质层进行处理得到所述走线层(012)。
- 根据权利要求13-16任一所述的方法,在形成有所述走线层(012)的所述柔性衬底基板(011)上形成层叠的第二粘附力增强层(015)和第二绝缘层(016)之后,所述方法还包括:在形成有所述第二绝缘层(016)的所述柔性衬底基板(011)上形成应力平衡层(017),所述应力平衡层(017)在所述柔性衬底基板(011)上的正投影所在区域与所述弯折区域(A1)存在重叠区域。
- 根据权利要求13-17任一所述的方法,所述获取柔性衬底基板(011),所述柔性衬底基板(011)具有弯折区域(A1),包括:提供刚性衬底基板;在所述刚性衬底基板上形成所述柔性衬底基板(011),所述柔性衬底基板(011)具有所述弯折区域(A1)。
- 一种显示装置,所述显示装置包括权利要求1至12任一所述的显示基板。
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CN110827685B (zh) * | 2019-10-28 | 2021-05-07 | 武汉华星光电半导体显示技术有限公司 | 显示面板和电子设备 |
CN110752295B (zh) * | 2019-11-29 | 2023-04-28 | 武汉天马微电子有限公司 | 柔性显示面板及其制作方法和显示装置 |
CN111769080B (zh) * | 2020-06-24 | 2022-07-12 | 武汉华星光电半导体显示技术有限公司 | 显示面板 |
CN113690250B (zh) * | 2021-08-09 | 2023-10-17 | Tcl华星光电技术有限公司 | 阵列基板及其制作方法 |
CN114241906A (zh) * | 2021-11-30 | 2022-03-25 | 武汉天马微电子有限公司 | 一种显示装置及其制备方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150137102A1 (en) * | 2013-11-21 | 2015-05-21 | Lg Display Co., Ltd. | Organic light-emitting display device and method for manufacturing organic light-emitting display device |
CN104950535A (zh) * | 2015-07-07 | 2015-09-30 | 京东方科技集团股份有限公司 | 一种柔性阵列基板及显示装置 |
CN105826350A (zh) * | 2015-01-28 | 2016-08-03 | 三星显示有限公司 | 显示装置 |
CN106920829A (zh) * | 2017-03-30 | 2017-07-04 | 京东方科技集团股份有限公司 | 一种柔性显示面板、显示装置及柔性显示面板的制作方法 |
CN106972030A (zh) * | 2017-03-30 | 2017-07-21 | 京东方科技集团股份有限公司 | 一种柔性显示面板、显示装置及柔性显示面板的制作方法 |
CN107818990A (zh) * | 2017-10-19 | 2018-03-20 | 武汉华星光电半导体显示技术有限公司 | 一种柔性基板及其制备方法、显示器 |
CN108470762A (zh) * | 2018-05-28 | 2018-08-31 | 上海天马微电子有限公司 | 一种柔性显示面板和显示装置 |
CN109256400A (zh) * | 2018-11-16 | 2019-01-22 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
CN109887416A (zh) * | 2019-03-15 | 2019-06-14 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140060776A (ko) | 2012-11-12 | 2014-05-21 | 삼성디스플레이 주식회사 | 플렉서블 표시 장치 및 그 제조 방법 |
KR102023945B1 (ko) * | 2012-12-28 | 2019-11-04 | 엘지디스플레이 주식회사 | 플렉서블 유기발광 디스플레이 장치 |
US10764999B2 (en) * | 2014-06-30 | 2020-09-01 | Panasonic Intellectual Property Management Co., Ltd. | Flexible substrate |
US10074826B2 (en) * | 2015-10-06 | 2018-09-11 | Samsung Display Co., Ltd. | Display apparatus and method of manufacturing the same |
KR102589214B1 (ko) * | 2016-06-03 | 2023-10-13 | 삼성디스플레이 주식회사 | 표시 장치 |
KR20180034780A (ko) * | 2016-09-27 | 2018-04-05 | 삼성디스플레이 주식회사 | 디스플레이 장치 및 디스플레이 장치의 제조 방법 |
KR102631257B1 (ko) * | 2016-11-18 | 2024-01-31 | 삼성디스플레이 주식회사 | 디스플레이 장치 |
CN106530973B (zh) * | 2016-12-21 | 2019-06-11 | 上海天马微电子有限公司 | 一种曲面显示装置 |
KR102333671B1 (ko) * | 2017-05-29 | 2021-12-01 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 유기 발광 표시 장치의 제조 방법 |
CN107134538A (zh) * | 2017-06-29 | 2017-09-05 | 京东方科技集团股份有限公司 | 一种显示基板、制作方法及显示装置 |
CN207676908U (zh) * | 2017-07-24 | 2018-07-31 | 昆山国显光电有限公司 | 一种柔性显示面板及显示装置 |
CN108231800B (zh) * | 2018-02-02 | 2019-10-29 | 京东方科技集团股份有限公司 | 一种柔性显示面板及其制备方法、显示装置 |
CN108447403B (zh) * | 2018-04-03 | 2020-07-03 | 武汉华星光电半导体显示技术有限公司 | 柔性显示装置及其制造方法 |
CN108962946B (zh) * | 2018-06-29 | 2020-06-16 | 武汉华星光电半导体显示技术有限公司 | 显示面板及其制造方法 |
CN208422962U (zh) * | 2018-08-09 | 2019-01-22 | 京东方科技集团股份有限公司 | 可折叠的柔性显示面板和显示装置 |
KR102538829B1 (ko) * | 2018-09-18 | 2023-06-02 | 삼성디스플레이 주식회사 | 전자 장치 |
CN109411513B (zh) * | 2018-09-28 | 2021-01-26 | 广州国显科技有限公司 | 柔性显示面板和柔性显示装置 |
CN109411525B (zh) * | 2018-12-13 | 2020-07-31 | 广州国显科技有限公司 | 柔性显示面板及其制备方法 |
-
2019
- 2019-03-15 CN CN201910196423.8A patent/CN109887416B/zh active Active
-
2020
- 2020-03-13 US US17/048,146 patent/US11552263B2/en active Active
- 2020-03-13 WO PCT/CN2020/079206 patent/WO2020187151A1/zh active Application Filing
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150137102A1 (en) * | 2013-11-21 | 2015-05-21 | Lg Display Co., Ltd. | Organic light-emitting display device and method for manufacturing organic light-emitting display device |
CN105826350A (zh) * | 2015-01-28 | 2016-08-03 | 三星显示有限公司 | 显示装置 |
CN104950535A (zh) * | 2015-07-07 | 2015-09-30 | 京东方科技集团股份有限公司 | 一种柔性阵列基板及显示装置 |
CN106920829A (zh) * | 2017-03-30 | 2017-07-04 | 京东方科技集团股份有限公司 | 一种柔性显示面板、显示装置及柔性显示面板的制作方法 |
CN106972030A (zh) * | 2017-03-30 | 2017-07-21 | 京东方科技集团股份有限公司 | 一种柔性显示面板、显示装置及柔性显示面板的制作方法 |
CN107818990A (zh) * | 2017-10-19 | 2018-03-20 | 武汉华星光电半导体显示技术有限公司 | 一种柔性基板及其制备方法、显示器 |
CN108470762A (zh) * | 2018-05-28 | 2018-08-31 | 上海天马微电子有限公司 | 一种柔性显示面板和显示装置 |
CN109256400A (zh) * | 2018-11-16 | 2019-01-22 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
CN109887416A (zh) * | 2019-03-15 | 2019-06-14 | 京东方科技集团股份有限公司 | 柔性显示基板及其制造方法、显示装置 |
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