WO2020183998A1 - インダクタおよびその製造方法 - Google Patents

インダクタおよびその製造方法 Download PDF

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Publication number
WO2020183998A1
WO2020183998A1 PCT/JP2020/004240 JP2020004240W WO2020183998A1 WO 2020183998 A1 WO2020183998 A1 WO 2020183998A1 JP 2020004240 W JP2020004240 W JP 2020004240W WO 2020183998 A1 WO2020183998 A1 WO 2020183998A1
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WIPO (PCT)
Prior art keywords
wiring
inductor
magnetic
end portion
magnetic layer
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Application number
PCT/JP2020/004240
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English (en)
French (fr)
Japanese (ja)
Inventor
圭佑 奥村
佳宏 古川
Original Assignee
日東電工株式会社
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Application filed by 日東電工株式会社 filed Critical 日東電工株式会社
Priority to CN202080016864.6A priority Critical patent/CN113474855A/zh
Publication of WO2020183998A1 publication Critical patent/WO2020183998A1/ja

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/04—Fixed inductances of the signal type  with magnetic core
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H01F27/29—Terminals; Tapping arrangements for signal inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils

Definitions

  • the present invention relates to an inductor and a method for manufacturing the inductor.
  • inductors are mounted on electronic devices and used as passive elements such as voltage conversion members.
  • an inductor having an internal conductor such as copper and a chip main body formed of a magnetic material by burying the conductor has been proposed (see, for example, Patent Document 1 below).
  • Patent Document 1 both end faces of the internal conductor and both end faces of the chip main body are formed flush with each other.
  • a probe inspection terminal
  • the internal conductor to evaluate magnetic characteristics such as the inductance of the inductor and / or to conduct the internal conductor. It is necessary to carry out inspections such as the presence or absence of
  • the present invention provides an inductor and a method for manufacturing the inductor, which can easily and surely carry out evaluation of magnetic characteristics and continuity inspection of wiring, and can manufacture an inductor at low cost.
  • the first step of preparing the wiring, the magnetic layer from the magnetic composition containing the magnetic particles covers the outer peripheral surface of the middle portion of the wiring, and the end portion of the wiring is 2 mm.
  • the present invention includes a method for manufacturing an inductor, which comprises a second step of forming the wiring so as to be exposed from the magnetic layer in a range of less than 100 mm, and a third step of removing the end portion of the wiring.
  • the magnetic layer is formed so that the end of the wiring is exposed from the magnetic layer by 2 mm or more. Therefore, after that, the terminal can be easily brought into contact with the end of the wiring. Yes, the electrical connection between the terminals and the wiring is secure. Therefore, it is possible to easily and surely evaluate the magnetic characteristics and inspect the continuity of the wiring.
  • the magnetic layer is formed so that the end of the wiring is exposed from the magnetic layer by less than 100 mm, and in the third step, the end of the wiring is removed.
  • the length can be suppressed to a range of less than 100 mm. Therefore, the amount of wiring to be removed can be suppressed, and as a result, the inductor can be manufactured at low cost.
  • the inductor can be manufactured at low cost while easily and surely performing the evaluation of the magnetic characteristics and the continuity inspection of the wiring.
  • the present invention (2) includes the method for manufacturing an inductor according to (1), wherein the length of the wiring in the inductor in the thickness direction is 1000 ⁇ m or less.
  • the length of the wiring inductor in the thickness direction is as short as 1000 ⁇ m or less, a thin inductor can be manufactured.
  • the magnetic layer is formed so that the end of the wiring is exposed from the magnetic layer in a range of 2 mm or more, so that even if the length in the thickness direction of the inductor of the wiring is increased. Even if it is as short as 1000 ⁇ m or less, the terminal can be easily brought into contact with the end of the wiring thereafter.
  • the present invention (3) includes the method for manufacturing an inductor according to (1) or (2), wherein in the second step, both ends of the wiring are exposed from the magnetic layer.
  • both ends of the wiring are exposed from the magnetic layer, so that after the second step, each of the two terminals can be easily brought into contact with each of the both ends of the wiring, and the two terminals and the wiring The electrical connection is secure.
  • the wiring including the lead wire and the insulating layer covering the outer peripheral surface of the lead wire is prepared, and after the second step and before the third step.
  • the wiring including the lead wire and the insulating layer covering the outer peripheral surface of the lead wire is prepared, the short circuit between the lead wire and the magnetic layer can be suppressed by the insulating layer.
  • the terminal and the wire at the end of the wiring can be easily brought into contact with each other, and the electrical connection between the terminal and the wire can be established. It's certain.
  • the present invention (5) includes a plurality of wirings and a magnetic layer formed in the middle of each of the plurality of wirings.
  • the magnetic layer contains magnetic particles, and each end of the plurality of wirings is Includes an inductor that is exposed from the magnetic layer in the range of 2 mm or more and less than 100 mm.
  • each end of a plurality of wires is exposed from the magnetic layer by 2 mm or more. Therefore, the terminal can be easily brought into contact with the end of the wiring, and the electrical connection between the terminal and the wiring is reliable. Therefore, it is possible to easily and surely evaluate the magnetic characteristics of the inductor and the like and check the continuity of the wiring.
  • the inductor is manufactured by separating the inductor corresponding to each of the plurality of wirings so as to remove the end. As a result, the amount of wiring to be removed can be suppressed, and as a result, a plurality of inductors can be manufactured at low cost.
  • the inductor of the present invention can be manufactured at low cost while easily and surely performing the evaluation of the magnetic characteristics and the continuity inspection of the wiring.
  • FIG. 1A to 1D show manufacturing process diagrams of the first embodiment of the method for manufacturing an inductor of the present invention.
  • 1A to 1B show the first step
  • FIG. 1A is a plan view
  • FIG. 1B is a front view of the arrow in FIG. 1A.
  • 1C to 1D show a second step
  • FIG. 1C shows a plan view
  • FIG. 1D shows a front view.
  • FIG. 2 shows a manufacturing process diagram of the first embodiment following FIG. 1D.
  • 2E to 2F show a fourth step and an evaluation inspection step
  • FIG. 2E shows a plan view
  • FIG. 2F shows a front view.
  • 2G to 2H show a third step
  • FIG. 2G shows a plan view of the inductor
  • FIG. 2H shows a front view of the inductor.
  • FIG. 3 shows a flowchart of the manufacturing method of the first embodiment shown in FIGS. 1A to 2H.
  • 4A to 4C are examples of detailed process perspective views of the second step shown in FIGS. 1C to 1D.
  • FIG. 4A is a step of preparing a wiring and a first magnetic sheet
  • FIG. 4B is a step of preparing the first magnetic sheet.
  • FIG. 4C shows the second magnetic sheet and the third magnetic sheet pressed to the first magnetic sheet and the wiring.
  • the process of forming a magnetic sheet is shown.
  • FIG. 5 is a perspective view illustrating the evaluation inspection process shown in FIGS.
  • FIG. 6 is a perspective view illustrating a modified example of the evaluation inspection step of the first embodiment shown in FIG.
  • FIG. 7 shows a perspective view of a modified example of the inductor of the first embodiment shown in FIGS. 1C and 1D.
  • FIG. 8 shows a plan view of an inductor and an inductor as a modification of the third step of the first embodiment shown in FIG. 2G.
  • FIG. 9 shows a plan view of an inductor and an inductor as a modification of the third step of the first embodiment shown in FIG. 2G.
  • FIG. 10 shows a plan view of an inductor and an inductor as a modification of the third step of the first embodiment shown in FIG. 2G.
  • FIG. 11A to 11B are plan views of a modified example of the third step of the first embodiment shown in FIG. 2G.
  • FIG. 11A shows a modified example of cutting the wiring without cutting the magnetic layer
  • FIG. 11B shows a modified example of cutting the wiring.
  • FIG. 12 shows a plan view illustrating a third step of the second embodiment of the method for manufacturing an inductor of the present invention
  • FIG. 13 shows a plan view illustrating a third step of the third embodiment of the method for manufacturing an inductor of the present invention.
  • the method for manufacturing the inductor 1 includes the first step of preparing the wiring 2, the magnetic layer 3 covering the intermediate portion 10 of the wiring 2, and the first end 8 and the second of the wiring 2.
  • a second step of forming the end portion 9 so as to be exposed from the magnetic layer 3 and a third step of removing the first end portion 8 and the second end portion 9 of the wiring 2 are provided.
  • the first step, the second step, and the third step are carried out in order.
  • this manufacturing method includes a fourth step of exposing the lead wire 6 from the insulating layer 7 at the first end 8 and the second end 9 of the wiring 2 after the second step and before the third step, and the second step.
  • the evaluation inspection step of evaluating the inductance of the plurality of inductors 1 and performing the continuity inspection of the plurality of wirings 2 is further provided. That is, in this manufacturing method, as shown in FIG. 3, the first step, the second step, the fourth step, the evaluation inspection step, and the third step are carried out in order.
  • a plurality of wirings 2 are prepared in the first step.
  • the plurality of wirings 2 include, for example, a first wiring 4 and a second wiring 5.
  • the first wiring 4 includes a lead wire 6 and an insulating layer 7 that covers the lead wire 6.
  • the lead wire 6 extends long in the direction in which electricity flows, and has, for example, a substantially U-shape in a plan view.
  • the first wiring 4 is placed on a horizontal table (not shown) so as to have a substantially U-shape in a plan view, so that the lead wire 6 has the above-mentioned plan view shape.
  • the lead wire 6 has a substantially circular shape in cross section that shares the central axis with the first wiring 4.
  • the material of the lead wire 6 is, for example, a metal conductor such as copper, silver, gold, aluminum, nickel, and an alloy thereof, and copper is preferable.
  • the conducting wire 6 may have a single-layer structure, or may have a multi-layer structure in which the surface of a core conductor (for example, copper) is plated (for example, nickel).
  • the radius R1 of the lead wire 6 is the distance from the center of the lead wire 6 to the first outer peripheral surface 12, for example, 25 ⁇ m or more, preferably 50 ⁇ m or more, and for example, 2000 ⁇ m or less, preferably 250 ⁇ m or less. is there.
  • the insulating layer 7 is a layer for protecting the lead wire 6 from chemicals and water and preventing a short circuit of the lead wire 6.
  • the insulating layer 7 is arranged so as to cover the entire surface of the first outer peripheral surface 12 as an example of the outer peripheral surface of the conducting wire 6.
  • the insulating layer 7 has a substantially annular shape in cross section that shares the central axis (center) with the first wiring 4.
  • Examples of the material of the insulating layer 7 include insulating resins such as polyvinylformal, polyester, polyesterimide, polyamide (including nylon), polyimide, polyamideimide, and polyurethane. These may be used alone or in combination of two or more.
  • the insulating layer 7 may be composed of a single layer or may be composed of a plurality of layers.
  • the thickness T1 of the insulating layer 7 is a distance from the first outer peripheral surface 12 of the lead wire 6 to the second outer peripheral surface 13 as an example of the outer peripheral surface of the first wiring 4 (wiring 2), whichever is in the circumferential direction.
  • the position is also substantially uniform in the radial direction of the wiring 2, for example, 1 ⁇ m or more, preferably 3 ⁇ m or more, and for example, 100 ⁇ m or less, preferably 50 ⁇ m or less.
  • the radius R2 of the first wiring 4 is the sum (R1 + T1) of the radius R1 of the conducting wire 6 and the thickness T1 of the insulating layer 7, and specifically, the second outer peripheral surface 13 from the center of the first wiring 4 The length up to R2.
  • the radius R2 of the first wiring 4 is, for example, 25 ⁇ m or more, preferably 50 ⁇ m or more, and for example, 2000 ⁇ m or less, preferably 250 ⁇ m or less, more preferably 200 ⁇ m or less, still more preferably 150 ⁇ m or less. ..
  • the diameter D of the first wiring 4 (corresponding to the thickness of the inductor 1 of the first wiring 4) is a double value (2 ⁇ R2) of the radius R2 of the first wiring 4 described above, and specifically, for example, It is 50 ⁇ m or more, preferably 100 ⁇ m or more, and for example, 4000 ⁇ m or less, preferably 1000 ⁇ m or less, more preferably 500 ⁇ m or less, still more preferably 400 ⁇ m or less, and particularly preferably 300 ⁇ m or less.
  • the radius R2 and / or the diameter D of the first wiring 4 is equal to or greater than the above lower limit, an excellent inductance can be obtained. If the radius and / or diameter of the first wiring 4 is equal to or less than the above upper limit, the thin inductor 1 can be obtained.
  • the first wiring 4 also has the first end 8 and the second end 9 arranged at both ends in the current flow direction, and in the middle of the flow direction (between them). It integrally has an intermediate portion 10 located at.
  • the first end portion 8 and the second end portion 9 are used, for example, as electrical contacts (terminal portions) in the evaluation inspection process described later.
  • the intermediate portion 10 connects the first end portion 8 and the second end portion 9 in the flow direction.
  • the intermediate portion 10 has, for example, a curved portion 11 having a substantially semicircular arc shape in a plan view at the center of the current flow direction. Further, the intermediate portion 10 has a first connecting portion 19 connected (continuous) to the first end portion 8 and a second connecting portion 29 connected (continuous) to the second end portion 9.
  • the first connecting portion 19 is arranged and formed in a straight line with the first end portion 8 in a plan view. Further, although the first connecting portion 19 is not drawn in FIGS. 1A to 1B, the first connecting portion 19 is arranged and formed in line with the first end portion 8 in a cross section along the direction of electricity flow. One end of the first connecting portion 19 is connected to the first end portion 8, and the other end of the first connecting portion 19 is connected to one end of the curved portion 11.
  • the second connecting portion 29 is arranged and formed in a straight line with the second end portion 9 in a plan view. Further, although the second connecting portion 29 is not drawn in FIGS. 1A to 1B, the second connecting portion 29 is arranged and formed in line with the second end portion 9 in the cross section along the direction of electricity flow. One end of the second connecting portion 29 is connected to the second end portion 9, and the other end of the second connecting portion 29 is connected to the other end of the curved portion 11.
  • the middle portion 10 is the entire portion of the wiring 2 except for the first end portion 8 and the second end portion 9.
  • the flat area of the intermediate portion 10 of each of the plurality of wirings 2 is, for example, 60% or more, preferably 80% or more, and for example, 99% or less, preferably 95% or less. is there.
  • the distance L2 between the centers in the cross-sectional view (or front view) of the first end portion 8 and the second end portion 9 is, for example, 20 ⁇ m or more, preferably 50 ⁇ m or more, and for example, 3000 ⁇ m or less, preferably 2000 ⁇ m. It is as follows.
  • the second wiring 5 has the same shape as the first wiring 4 and has the same configuration and material.
  • the distance L1 between the centers of the second end portion 9 of the first wiring 4 and the first end portion 8 of the second wiring 5 is, for example, 20 ⁇ m or more, preferably 50 ⁇ m or more, and for example, 3000 ⁇ m or less. It is preferably 2000 ⁇ m or less.
  • the magnetic layer 3 covers the second outer peripheral surface 13 of the intermediate portion 10 of the wiring 2, and the first end portion 8 and the second end of the wiring 2 are covered. It is formed so that the portion 9 is exposed.
  • the magnetic layer 3 is formed from a magnetic composition containing magnetic particles.
  • the magnetic composition contains magnetic particles and a binder.
  • Examples of the magnetic material constituting the magnetic particles include a soft magnetic material and a hard magnetic material.
  • a soft magnetic material is preferably used from the viewpoint of inductance.
  • the soft magnetic material examples include a single metal body containing one kind of metal element in a pure substance state, for example, one or more kinds of metal elements (first metal element) and one or more kinds of metal elements (second metal element).
  • first metal element one or more kinds of metal elements
  • second metal element one or more kinds of metal elements
  • the single metal body examples include a single metal composed of only one kind of metal element (first metal element).
  • the first metal element is appropriately selected from, for example, iron (Fe), cobalt (Co), nickel (Ni), and other metal elements that can be contained as the first metal element of the soft magnetic material. ..
  • the single metal body includes, for example, a core containing only one kind of metal element and a surface layer containing an inorganic substance and / or an organic substance that modifies a part or all of the surface of the core, for example.
  • examples thereof include an organic metal compound containing a first metal element and a form in which an inorganic metal compound is decomposed (thermal decomposition, etc.).
  • thermal decomposition etc.
  • iron powder obtained by thermally decomposing an organic iron compound (specifically, carbonyl iron) containing iron as the first metal element (sometimes referred to as carbonyl iron powder). And so on.
  • the position of the layer containing the inorganic substance and / or the organic substance that modifies the portion containing only one kind of metal element is not limited to the above-mentioned surface.
  • the organometallic compound or inorganic metal compound capable of obtaining a single metal body is not particularly limited, and a known or commonly used organometallic compound or inorganic metal compound capable of obtaining a soft magnetic single metal body is not particularly limited. Can be appropriately selected from.
  • the alloy body is a eutectic of one or more kinds of metal elements (first metal element) and one or more kinds of metal elements (second metal element) and / or non-metal elements (carbon, nitrogen, silicon, phosphorus, etc.). It is not particularly limited as long as it is a body and can be used as an alloy body of a soft magnetic material.
  • the first metal element is an essential element in the alloy body, and examples thereof include iron (Fe), cobalt (Co), and nickel (Ni). If the first metal element is Fe, the alloy body is an Fe-based alloy, and if the first metal element is Co, the alloy body is a Co-based alloy, and the first metal element is Ni. For example, the alloy body is a Ni-based alloy.
  • the second metal element is an element (sub-component) secondarily contained in the alloy body, and is a metal element that is compatible (cofusable) with the first metal element.
  • iron (Fe) the first. 1 When the metal element is other than Fe), Cobalt (Co) (when the first metal element is other than Co), Nickel (Ni) (when the first metal element is other than Ni), Chromium (Cr), Aluminum (Al), silicon (Si), copper (Cu), silver (Ag), manganese (Mn), calcium (Ca), barium (Ba), titanium (Ti), zirconium (Zr), ruthenium (Hf), vanadium (V), Niob (Nb), Tantal (Ta), Molybdenum (Mo), Tungsten (W), Ruthenium (Ru), Rodium (Rh), Zinc (Zn), Gallium (Ga), Indium (In), Germanium Examples thereof include (Ge), tin (Sn), lead (Pb), scandium (Sc), rut
  • the non-metal element is an element (sub-component) secondarily contained in the alloy body, and is a non-metal element that is compatible (combined) with the first metal element.
  • boron (B) and carbon examples thereof include (C), nitrogen (N), silicon (Si), phosphorus (P) and sulfur (S). These can be used alone or in combination of two or more.
  • Fe-based alloys examples include magnetic stainless steel (Fe-Cr-Al-Si alloy) (including electromagnetic stainless steel), sentust (Fe-Si-Al alloy) (including super sentust), and permalloy (including supersendust).
  • magnetic stainless steel Fe-Cr-Al-Si alloy
  • sentust Fe-Si-Al alloy
  • permalloy including supersendust
  • Fe-Ni alloy Fe-Ni alloy
  • Fe-Ni-Mo alloy Fe-Ni-Mo-Cu alloy
  • Fe-Ni-Co alloy Fe-Cr alloy
  • Fe-Cr-Al alloy Fe-Ni-Cr alloy
  • Fe- Ni—Cr—Si alloy silicon copper (Fe—Cu—Si alloy)
  • Fe—Si alloy Fe—Si—B (—Cu—Nb) alloy
  • Fe—B—Si—Cr alloy Fe—Si—Cr -Ni alloy
  • Fe-Si-Cr alloy Fe-Si-Al-Ni-Cr alloy
  • Fe-Ni-Si-Co alloy Fe-N alloy, Fe-C alloy, Fe-B alloy, Fe-P alloy
  • Ferrites stainless ferrites, Mn-Mg-based ferrites, Mn-Zn-based ferrites, Ni-Zn-based ferrites, Ni-Zn-Cu-based ferrites, Cu-Zn-based ferrites, Cu-Mg-Zn-based
  • Co-based alloys examples include Co-Ta-Zr and cobalt (Co) -based amorphous alloys.
  • Ni-based alloys which are examples of alloys, include Ni—Cr alloys.
  • an alloy body is preferable, an Fe-based alloy is more preferable, and Sendust (Fe—Si—Al alloy) is more preferable, from the viewpoint of magnetic properties.
  • the soft magnetic material preferably a single metal body, more preferably a single metal body containing an iron element in a pure substance state, still more preferably iron alone or iron powder (carbonyl iron powder). Can be mentioned.
  • the volume ratio of the magnetic particles in the magnetic composition is, for example, 40% by volume or more, preferably 50% by volume or more, more preferably 60% by volume or more, and for example, 95% by volume or less, preferably 90% by volume. It is less than or equal to the volume.
  • the shape of the magnetic particles is not particularly limited, and examples thereof include an anisotropic shape such as a flat shape (plate shape) and a needle shape, and a non-anisotropic shape such as a spherical shape, which are oriented. From the viewpoint, an anisotropic shape can be mentioned, and more preferably, a flat shape can be mentioned from the viewpoint of having a good relative magnetic permeability in the plane direction (two-dimensional).
  • the flatness (flatness) of the flat magnetic particles is, for example, 8 or more, preferably 15 or more, and for example, 500 or less, preferably 450 or less.
  • the flatness is calculated as, for example, an aspect ratio obtained by dividing the average particle diameter (average length) (described later) of the flat magnetic particles by the average thickness of the flat magnetic particles.
  • the average particle diameter (average length) of the flat magnetic particles is, for example, 3.5 ⁇ m or more, preferably 10 ⁇ m or more, and for example, 200 ⁇ m or less, preferably 150 ⁇ m or less. If the flat magnetic particles are flat, the average thickness thereof is, for example, 0.1 ⁇ m or more, preferably 0.2 ⁇ m or more, and for example, 3.0 ⁇ m or less, preferably 2.5 ⁇ m or less. Is.
  • the average particle size of the non-anisotropic magnetic particles is, for example, 0.1 ⁇ m or more, preferably 0.5 ⁇ m or more, and for example, 200 ⁇ m or less, preferably 150 ⁇ m or less.
  • binder examples include resins, and examples of such resins include thermosetting resins such as epoxy resins and phenol resins, and thermoplastic resins such as acrylic resins. These can be used alone or in combination.
  • thermosetting resin and a thermoplastic resin A combination of a thermosetting resin and a thermoplastic resin is preferable, and a combination of an acrylic resin, an epoxy resin and a phenol resin is more preferable.
  • additives such as a thermosetting catalyst, inorganic particles (excluding magnetic particles), organic particles, and a cross-linking agent can be added to the magnetic composition.
  • the proportion of binder and additive in the magnetic composition is the rest of the magnetic particles described above.
  • a magnetic sheet 20 having a substantially rectangular sheet shape is produced from the above-mentioned magnetic composition.
  • the magnetic sheet 20 has one side and the other side that face each other in the thickness direction, are parallel to each other, and are flat.
  • the magnetic sheet 20 is preferably prepared by first preparing a varnish of a magnetic composition and applying it to a release sheet (not shown) to prepare an A stage sheet, and then heating this to obtain a B stage sheet. Prepare.
  • the magnetic sheet 20 covers the second outer peripheral surface 13 of each of the intermediate portions 10 (intermediate portions 10 including the curved portion 11) of the plurality of wirings 2.
  • the intermediate portion 10 of each of the plurality of wirings 2 is embedded in the magnetic sheet 20 of the B stage sheet.
  • the magnetic sheet 20 of the B stage sheet is embedded with the intermediate portion 10 of each of the plurality of wirings 2.
  • the magnetic sheet 20 in which the intermediate portion 10 is embedded forms the magnetic layer 3.
  • a magnetic sheet 20 having the first magnetic sheet 21, the second magnetic sheet 22, and the third magnetic sheet 23 independently is prepared (manufactured). ..
  • the plan-view shapes of the first magnetic sheet 21, the second magnetic sheet 22, and the third magnetic sheet 23 are the same as those of the magnetic sheet 20 described above. Further, the plane view dimensions of the first magnetic sheet 21, the second magnetic sheet 22, and the third magnetic sheet 23 are the same as each other.
  • a plurality of wirings 2 are separately placed on a horizontal table (not shown) in the above arrangement. Specifically, the first end portion 8 and the second end portion 9 of each of the plurality of wirings 2 are arranged so as to overlap each other when projected in the adjacent directions thereof.
  • the first magnetic sheet 21 (preferably the first magnetic sheet 21 of the B stage) is then used to cover each intermediate portion 10 of the plurality of wirings 2. Specifically, the first magnetic sheet 21 is pressed from one side in the thickness direction toward the intermediate portion 10. As a result, the entire surface of the second outer peripheral surface 13 (other than the other end edge in the thickness direction) of the intermediate portion 10 is covered with the first magnetic sheet 21.
  • the first magnetic sheet 21 after pressing is still in the B stage, for example, when the magnetic composition contains a thermosetting resin.
  • the first magnetic sheet 21 has a curved surface corresponding to the wiring 2 on one surface in the thickness direction in the front view (or cross-sectional view).
  • the second magnetic sheet 22 and the third magnetic sheet 23 are provided on one side and the other side in the thickness direction of the intermediate portion 10 and the first magnetic sheet 21, respectively.
  • the second magnetic sheet 22 and the third magnetic sheet 23 of the B stage are arranged, and the second magnetic sheet 22 and the third magnetic sheet 23 are placed in the middle portion 10 and the third magnetic sheet 23. 1 Press against the magnetic sheet 21.
  • the second magnetic sheet 22 and the third magnetic sheet 23 after pressing are still in the B stage, for example, when the magnetic composition contains a thermosetting resin.
  • the magnetic sheet 20 including the second magnetic sheet 22, the first magnetic sheet 21, and the third magnetic sheet 23 in order from one side to the other in the thickness direction covers the second outer peripheral surface 13 of the plurality of wirings 2.
  • the boundaries between the second magnetic sheet 22, the first magnetic sheet 21, and the third magnetic sheet 23 are clearly drawn.
  • One surface of the magnetic sheet 20 in the thickness direction has a flat surface.
  • first end 8 and the second end 9 of the plurality of wirings 2 are exposed from the magnetic sheet 20.
  • first end portion 8 and the second end portion 9 project from one end surface (tip surface) 16 of the four peripheral end surfaces of the magnetic sheet 20.
  • the length L of each of the first end portion 8 and the second end portion 9 exposed from the magnetic sheet 20 is in the range of 2 mm or more and less than 100 mm.
  • the terminal 25 (described later) can be easily attached to the first end 8 and the second end 9 of the wiring 2 in the evaluation inspection step (described later).
  • the electrical connection between the terminal 25 and the wiring 2 becomes uncertain. Therefore, it is not possible to easily and surely evaluate the magnetic characteristics of the inductor 1 and check the continuity of the wiring 2.
  • the length L is 100 mm or more, as shown in FIG. 2G, it is removed in consideration of removing the first end portion 8 and the second end portion 9 of the wiring 2 in the third step (described later).
  • the length L of the first end portion 8 and the second end portion 9 to be formed cannot be suppressed to a range of less than 100 mm. Therefore, the amount of wiring to be removed cannot be suppressed, and therefore the yield of wiring 2 is lowered, and as a result, the inductor 1 cannot be manufactured at low cost.
  • the range of the length L is preferably 3 mm or more, more preferably 4 mm or more, further preferably 5 mm or more, further preferably 10 mm or more, and preferably 99 mm or less, more preferably. , 95 mm or less, more preferably 75 mm or less, particularly preferably 50 mm or less, most preferably 40 mm or less, and further preferably 25 mm or less.
  • the magnetic layer 3 made of the magnetic sheet 20 exposes the first end 8 and the second end 9 of the plurality of wirings 2, respectively, and the plurality of wirings 2 are exposed. It is formed so as to cover each intermediate portion 10.
  • an inductor 30 including a plurality of wirings 2 and a magnetic layer 3 forming an intermediate portion 10 of each of the plurality of wirings 2 can be obtained.
  • the magnetic layer 2 contains magnetic particles, and the first end 8 and the second end 9 of the plurality of wirings 2 are formed from the magnetic layer 3 in a range of 2 mm or more and less than 100 mm.
  • the magnetic layer 3 is exposed in a direction orthogonal to the thickness direction.
  • the inductor 30 is an aggregate sheet for obtaining an inductor 1, which will be described later, and is not the inductor 1 itself, but the first end portion 8 and the inductor 1 in addition to the plurality of inductors 1. Includes the second end 9.
  • the inductor 30 is a device that is distributed independently and can be used industrially.
  • the thickness of the inductor 30 is the same as the thickness of the magnetic layer 3, specifically, for example, 5000 ⁇ m or less, preferably 1000 ⁇ m or less, and 100 ⁇ m or more, for example.
  • the lead wire 6 is exposed from the insulating layer 7 at the first end 8 and the second end 9 of the plurality of wirings 2, respectively.
  • the insulating layer 7 facing the one end portion in the thickness direction of the first outer peripheral surface 12 of the lead wire 6 is provided at the first end portion 8 and the second end portion 9. It is removed to expose one end of the first outer peripheral surface 12 of the lead wire 6 in the thickness direction from the insulating layer 7.
  • one end of the first outer peripheral surface 12 of the lead wire 6 in the thickness direction can be exposed from the insulating layer 7 by polishing.
  • evaluation inspection process for example, evaluation of inductance of a plurality of inductors 1 and continuity inspection of a plurality of wirings 2 are performed.
  • a pair of terminals 25 are arranged on one side of the first end portion 8 and the second end portion 9 in the thickness direction, and the other surface of the pair of terminals 25 in the thickness direction is arranged on the first end portion 8 and At the second end portion 9, the lead wire 6 exposed from the insulating layer 7 is brought into contact with the first outer peripheral surface 12.
  • the shape of the terminal 25 is not particularly limited, and examples thereof include a substantially cylindrical shape having a relatively wide flat surface on the other end surface in the thickness direction, for example, a needle shape extending long in the thickness direction of the inductor 30, convenience and a lead wire. From the viewpoint of securing a wide contact area with 6, a substantially cylindrical shape can be mentioned.
  • the terminal 25 is connected to an inspection device (specifically, an LCR meter, a vector network analyzer, an impedance analyzer, etc.) via a connection line (not shown).
  • an inspection device specifically, an LCR meter, a vector network analyzer, an impedance analyzer, etc.
  • impedance is measured while applying a weak current to a pair of terminals 25, and the measured value is substituted into a theoretical formula to determine the inductance determined by one wiring 2 and the magnetic layer 3 around it. Is calculated.
  • the first end portion 8 and the second end portion 9 of the wiring 2 are removed in the third step.
  • the inductor 30 is cut to obtain the inductor 1 so as to correspond to each of the plurality of wirings 2 and to be separated from the first end portion 8 and the second end portion 9.
  • the wiring 2 and the magnetic layer 3 are cut so that the first cutting line 26 inside the peripheral end surface of the magnetic layer 3 is formed, and the adjacent first wiring 4 and second wiring 5 are formed.
  • the magnetic layer 3 is cut so that the second cutting line 27 passing between the two is formed.
  • dicing, laser treatment, punching, and the like are used for the above cutting.
  • the inductor 1 is separated (cut out) from the inductor 30 so that the first end portion 8 and the second end portion 9 remain on the inductor 30. That is, the inductor 1 is obtained so as to remove the first end portion 8 and the second end portion 9.
  • the inductor 1 preferably includes only one wiring 2 and one magnetic layer 3.
  • This inductor 1 has, for example, a rectangular flat plate shape, and specifically, has a plurality of (four) flat peripheral end faces.
  • the inductor 1 does not include the first end 8 and the second end 9.
  • the inductor 1 is a device that is distributed independently and can be used industrially.
  • the thickness of the inductor 1 is the same as the thickness of the magnetic layer 3 described above.
  • the magnetic layer 3 is provided, and the first end 8 and the second end 9 of the wiring 2 are 2 mm or more. Form so that it is exposed from. Therefore, as shown in FIGS. 2E to 2F, in the evaluation inspection step after the second step, the terminal 25 can be easily brought into contact with the first end portion 8 and the second end portion 9 of the wiring 2, and the terminal 25 can be brought into contact with the terminal 25.
  • the electrical connection between the wire and the wiring 2 is secure. Therefore, the inductance of the inductors 1 and 30 and the continuity inspection of the wiring 2 can be easily and surely performed.
  • terminals 25 having various shapes can be brought into contact with the lead wire 6, and FIGS. 2F and 5
  • the needle-shaped terminal 25 solid line
  • the substantially cylindrical terminal 25 virtual wire
  • the contact between the terminal 25 and the wiring 2 can be easily and surely achieved regardless of the shape and / or size of the terminal 25. That is, the degree of freedom of the terminal 25 that can be used is high, and therefore inspection and evaluation by the terminal 25 are easy.
  • the magnetic layer 3 is formed so that the first end portion 8 and the second end portion 9 of the wiring 2 are exposed from the magnetic layer 3 with less than 100 mm.
  • the first end portion 8 and the second end portion 9 of the wiring 2 are removed in the third step.
  • the length L of the can be suppressed to a range of less than 100 mm. Therefore, the amount (or length) of the wiring 2 to be removed can be suppressed, so that the yield of the wiring 2 is excellent, and as a result, the inductor 1 can be manufactured at low cost.
  • the inductor 1 can be manufactured at low cost while evaluating the inductance of the inductor 1 and inspecting the continuity of the wiring 2 easily and surely.
  • the thin inductor 1 when the diameter D of the wiring 2 is as small as 1000 ⁇ m or less, the thin inductor 1 can be manufactured.
  • the magnetic layer 3 is exposed from the magnetic layer 3 in a range where the first end 8 and the second end 9 of the wiring 2 are 2 mm or more. Therefore, even if the diameter D of the wiring 2 is as small as 500 ⁇ m or less, the terminal 25 can be easily brought into contact with the first end portion 8 and the second end portion 9 thereafter. ..
  • the thin inductor 1 can be manufactured while the terminal 25 can easily come into contact with the first end portion 8 and the second end portion 9 of the wiring 2.
  • each of the two terminals 25 can be easily brought into contact with each of the first end 8 and the second end 9 of the wiring 2, and the electricity between the two terminals 25 and the wiring 2 can be easily contacted. Connection is reliable.
  • FIG. 1B in the first step of the first embodiment, even if the wiring 2 including the lead wire 6 and the insulating layer 7 covering the first outer peripheral surface 12 of the lead wire 6 is prepared, FIG. 2F and FIG. As shown in FIG. 5, in the fourth step, the lead wire 6 is exposed from the insulating layer 7 at the first end 8 and the second end 9 of the wiring 2, so that the terminal 25 and the first end 8 of the wiring 2 are exposed. And the lead wire 6 at the second end 9 can be easily brought into contact with each other, and the electrical connection between the terminal 25 and the lead wire 6 is secure.
  • the first end portion 8 and the second end portion 9 of the plurality of wirings 2 are exposed from the magnetic layer 3 by 2 mm or more. Therefore, as shown in FIGS. 2E to 2F, the terminal 25 can be easily brought into contact with the first end portion 8 and the second end portion 9 of the wiring 2, and the electrical connection between the terminal 25 and the wiring 2 can be established. It is certain. Therefore, the evaluation of the inductance of the inductor 1 and the continuity inspection of the wiring 2 can be easily and surely performed.
  • the first end portion 8 and the second end portion 9 of the plurality of wirings 2 are exposed from the magnetic layer 3 in a range of less than 100 mm, the first end portion 8 and the second end portion 9 should be removed. Even if the inductor 30 is made into individual pieces corresponding to each of the plurality of wirings 2 to manufacture the inductor 1, the amount of wiring to be removed can be suppressed, and as a result, the plurality of inductors 1 can be manufactured at low cost. Can be done.
  • the first end portion 8 and the second end portion 9 are insulated so as to face one end portion of the first outer peripheral surface 12 of the lead wire 6 in the thickness direction.
  • the layer 7 is removed to expose one end of the first outer peripheral surface 12 of the lead wire 6 in the thickness direction from the insulating layer 7.
  • the insulating layer 7 facing the entire surface of the first outer peripheral surface 12 of the lead wire 6 is removed, and the entire surface of the first outer peripheral surface 12 of the lead wire 6 is exposed from the insulating layer 7. You can also do it. That is, in the fourth step, all of the insulating layer 7 at the first end portion 8 and the second end portion 9 can be removed.
  • both the first end portion 8 and the second end portion 9 are exposed from the magnetic layer 3.
  • only one of the first end portion 8 and the second end portion 9 can be exposed from the magnetic layer 3.
  • the cross-sectional view shape of the wiring 2 (or the front view shape of the first end portion 8 and the second end portion 9) is a substantially circular shape, but in a modified example, as shown in FIG. In addition, it has a substantially rectangular shape. Specifically, in the inductor 30, each of the first end portion 8 and the second end portion 9 has a substantially box shape.
  • the thickness T2 of the wiring 2 in this modification is the same as the diameter D of the wiring 2 in the first embodiment.
  • the corner portion of the wiring 2 in the cross-sectional view (for example, one surface in the thickness direction and both outer surfaces in the adjacent direction (direction in which the first wiring 4 and the second wiring 5 are adjacent) are formed.
  • the corners may have a curved shape, for example.
  • the magnetic layer 3 is used as a laminated sheet of three magnetic sheets (first magnetic sheet 21, second magnetic sheet 22 and third magnetic sheet 23). Although formed, the number is not limited and may be 1, 2, or 4 or more.
  • the wiring 2 is covered with the magnetic sheet 20 (magnetic layer 3) formed in a sheet shape.
  • the magnetic sheet 20 magnetic layer 3
  • a varnish of a magnetic composition is applied to the wiring 2.
  • the magnetic composition can be formed into a sheet shape to form the magnetic layer 3.
  • the intermediate portion 10 embedded in the magnetic layer 3 is cut in the wiring 2. That is, the inductor 30 is cut so that the first cutting line 26 is formed.
  • the portion of the wiring 2 that is not embedded in the magnetic layer 3 (specifically, the boundary portion between the wiring 2 and the intermediate portion 10) can be cut.
  • the wiring 2 is cut so that a third cutting line 28 along the end face of the inductor 30 is formed.
  • the magnetic layer 3 is cut so as to separate the plurality of wirings 2 into individual pieces, that is, to form the second cutting line 27.
  • the magnetic layer 3 is cut so that the plurality of wirings 2 are not separated into individual pieces, that is, the second cutting line 27 is not formed.
  • the inductor 1 obtained in the third step includes a plurality of wirings 2.
  • an inductor 30 including a plurality of wirings 2 is manufactured.
  • the inductor preparation sheet 15 including one wiring 2 can be manufactured.
  • the wiring 2 and the magnetic layer 3 are cut so that the first cutting line 26 is formed.
  • the wiring 2 is cut so that the third cutting line 28 is formed.
  • both the evaluation of the inductance of the inductor 1 and the continuity inspection of the wiring 2 are carried out, but either one may be used.
  • the proportion of magnetic particles in the magnetic layer 3 may be uniform in the magnetic layer 3, and may increase or decrease as the distance from each wiring 2 increases.
  • the ratio of the magnetic particles in the magnetic layer 3 increases as the distance from the wiring 2 increases, for example, as shown in FIG. 3.
  • the abundance ratio of the magnetic particles in the magnetic sheet 23 is set higher than the abundance ratio of the magnetic particles in the first magnetic sheet 21.
  • the wiring 2 shown in FIG. 1A and prepared in the first step (see FIG. 1A) and the wiring 2 in the inductor 30 (FIG. 1C) shown in FIG. 1C and manufactured in the second step. Has a substantially U-shape in plan view.
  • plan view shape of the wiring 2 is not limited to the above.
  • the wiring 2 described above has a substantially knotted shape in a plan view.
  • the middle portion 10 of the wiring 2 also has a substantially knotted shape in a plan view, and more specifically, it has a bent portion 14 that bends in a plan view.
  • a plurality of bent portions 14 are arranged in the middle portion 10 at intervals in the direction of electricity flow.
  • the entire flow direction is embedded in the magnetic layer 3.
  • a part of the flow direction in the intermediate portion 10 can be exposed from the magnetic layer 3.
  • the curved portion 11 corresponding to the substantially central portion 18 in the flow direction is exposed from the other end surface 17 of the magnetic layer 3 in the intermediate portion 10 (wiring 2).
  • the terminal 25 is not brought into contact with the curved portion 11, but the terminal 25 is brought into contact with the first end portion 8 and the second end portion 9.
  • the wiring 2 and the magnetic layer 3 are cut so that the first end portion 8 and the second end portion 9 are removed while the curved portion 11 remains. That is, the curved portion 11 is attached to the inductor 1.
  • the inductor 1 including the magnetic layer 3, the curved portion 11 exposed from the magnetic layer 3, and the wiring 2 having a portion (a portion other than the curved portion 11 in the intermediate portion 10) embedded in the magnetic layer 3 is provided. To get.
  • Examples and comparative examples are shown below, and the present invention will be described in more detail.
  • the present invention is not limited to Examples and Comparative Examples.
  • specific numerical values such as the compounding ratio (content ratio), physical property values, and parameters used in the following description are the compounding ratios corresponding to those described in the above-mentioned "Form for carrying out the invention".
  • Content ratio can be replaced with the upper limit (numerical value defined as “less than or equal to” or “less than”) or lower limit (numerical value defined as "greater than or equal to” or “excess”). it can.
  • Example 1 As shown in FIGS. 1A to 2D, the first step and the second step were carried out in order to obtain the inductor 30 shown in FIGS. 1C and 1D.
  • a plurality of wirings 2 having a diameter D of 220 ⁇ m (radius R2 of 110 ⁇ m) were prepared. Specifically, a plurality of wirings 2 having a lead wire 6 having a radius R1 of 100 ⁇ m and an insulating layer 7 having a thickness T1 of 10 ⁇ m are prepared, and they are placed on a horizontal table (not shown) so as to have a U-shape in a plan view. It was placed.
  • a magnetic sheet 20 containing magnetic particles and a binder (more specifically, a laminated sheet of the first magnetic sheet 21, the second magnetic sheet 22, and the third magnetic sheet 23 (see FIGS. 4A to 4C) is used to conduct a wire.
  • the middle portion 10 of No. 6 was covered.
  • the magnetic sheet 20 was formed in a sheet shape so that the first end portion 8 and the second end portion 9 were exposed.
  • the length L of each of the first end portion 8 and the second end portion 9 was 10 mm.
  • the fourth step and the third step were subsequently carried out in order to obtain an inductor 1.
  • Example 2 to Comparative Example 2 The inductor 30 was produced in the same manner as in Example 1 except that the length L was changed according to the description in Table 1, and then the inductor 1 was obtained.
  • the columnar terminal 25 having a diameter of 5 mm could not come into contact with the first end portion 8 and the second end portion 9, the inductance of the inductor 1 could not be measured, and the continuity check of the wiring 2 could not be performed.
  • the needle-shaped terminal 25 having a diameter of 5 mm nor the cylindrical terminal 25 having a diameter of 5 mm can contact the first end portion 8 and the second end portion 9, and the inductance of the inductor 1 cannot be measured. , The continuity inspection of the wiring 2 could not be carried out.
  • the inductor is mounted on, for example, an electronic device.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
PCT/JP2020/004240 2019-03-12 2020-02-05 インダクタおよびその製造方法 WO2020183998A1 (ja)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868913A (ja) * 1981-10-19 1983-04-25 Taiyo Yuden Co Ltd インダクタンス素子及びその製造方法
JPS5889807A (ja) * 1981-11-20 1983-05-28 Matsushita Electric Ind Co Ltd インダクタの製造方法
JPH01266705A (ja) * 1988-04-18 1989-10-24 Sony Corp コイル部品
JPH0236014U (zh) * 1988-09-02 1990-03-08
JPH0714720A (ja) * 1993-06-23 1995-01-17 Taiyo Yuden Co Ltd チップインダクタなどの電子部品とその製造方法
JPH08306536A (ja) * 1995-05-02 1996-11-22 Taiyo Yuden Co Ltd チップ状インダクタ及びインダクタ・アレイ並びにその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61177704A (ja) * 1985-02-02 1986-08-09 Tdk Corp チツプ型インダクタの製造方法
JPH01302712A (ja) * 1988-05-30 1989-12-06 Tokin Corp 小型コイルの製造方法
JPH0485159U (zh) * 1990-11-29 1992-07-23
JPH06260869A (ja) * 1993-03-04 1994-09-16 Nippon Telegr & Teleph Corp <Ntt> ノイズフィルタ
JPH1140426A (ja) * 1997-07-18 1999-02-12 Tdk Corp インダクタンス素子
US7751205B2 (en) 2006-07-10 2010-07-06 Ibiden Co., Ltd. Package board integrated with power supply

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868913A (ja) * 1981-10-19 1983-04-25 Taiyo Yuden Co Ltd インダクタンス素子及びその製造方法
JPS5889807A (ja) * 1981-11-20 1983-05-28 Matsushita Electric Ind Co Ltd インダクタの製造方法
JPH01266705A (ja) * 1988-04-18 1989-10-24 Sony Corp コイル部品
JPH0236014U (zh) * 1988-09-02 1990-03-08
JPH0714720A (ja) * 1993-06-23 1995-01-17 Taiyo Yuden Co Ltd チップインダクタなどの電子部品とその製造方法
JPH08306536A (ja) * 1995-05-02 1996-11-22 Taiyo Yuden Co Ltd チップ状インダクタ及びインダクタ・アレイ並びにその製造方法

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TW202109561A (zh) 2021-03-01

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