WO2020170770A1 - 検出装置及びセンサのキャリブレーション方法 - Google Patents

検出装置及びセンサのキャリブレーション方法 Download PDF

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Publication number
WO2020170770A1
WO2020170770A1 PCT/JP2020/003825 JP2020003825W WO2020170770A1 WO 2020170770 A1 WO2020170770 A1 WO 2020170770A1 JP 2020003825 W JP2020003825 W JP 2020003825W WO 2020170770 A1 WO2020170770 A1 WO 2020170770A1
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WIPO (PCT)
Prior art keywords
value
sensor
external force
function
parameter
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Ceased
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PCT/JP2020/003825
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English (en)
French (fr)
Japanese (ja)
Inventor
ティト プラドノ トモ
アレクサンダー シュミッツ
ソフォン ソムロア
重樹 菅野
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Xela Robotics Co Ltd
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Xela Robotics Co Ltd
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Priority to JP2021501802A priority Critical patent/JP7339691B2/ja
Priority to CN202080029026.2A priority patent/CN113748323B/zh
Priority to US17/429,740 priority patent/US11982583B2/en
Publication of WO2020170770A1 publication Critical patent/WO2020170770A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping

Definitions

  • the present invention relates to a detection device and a method for calibrating a sensor, and more specifically, converting an output value from a sensor when a predetermined external force is applied to detect a magnitude of the external force and a physical quantity such as a displacement due to the external force.
  • the present invention relates to a detection device and a sensor calibration method that associate the physical quantity with the output value.
  • a tactile sensor is provided to control the operation of the robot based on the detection values from various sensors including the tactile sensor.
  • a magnetic tactile sensor utilizing a change in a magnetic field due to the action of an external force is known.
  • This magnetic tactile sensor includes an elastic body on the surface on which an external force acts, a magnet fixed inside the elastic body, and a magnetic sensor for detecting the state of the magnetic field generated by the magnet.
  • the positions of the magnets mounted inside the elastic body may vary slightly among the same products. Therefore, in order to improve the accuracy of measuring the external force applied to the robot, it is necessary to calibrate each of the large number of tactile sensors attached to the robot, which is disadvantageous in that the calibration work takes too much time.
  • the tactile sensor is arranged on a curved predetermined portion such as a fingertip of a robot, a slight deformation of the elastic body due to the arrangement causes no external force to act on the elastic body. The position of the magnet in may shift. Therefore, in order to improve the measurement accuracy of the external force, it is necessary to calibrate all the tactile sensors arranged in the predetermined part while the tactile sensor is arranged in the predetermined part.
  • the present invention has been devised in view of the above problems, and an object thereof is to provide a large number of sensors, such as tactile sensors, that detect a physical quantity associated with the action of an external force, at predetermined sites having different surface shapes. Even in such a case, it is an object of the present invention to provide a detection device and a sensor calibration method that can quickly and accurately calibrate each sensor.
  • the present invention is mainly based on a relational expression between an output value from a sensor when a predetermined external force is applied and a physical quantity associated with the action of the external force, and a measured value of the physical quantity from the output value.
  • a calibration unit that specifies the relational expression is provided, and the relational expression includes a predetermined parameter, and an external force is not acting.
  • the offset value that is the output value of the sensor at the time of contact, consisting of a mathematical formula that can calculate the physical quantity from the output value
  • the calibration means a parameter value that is a determined value of the parameter from the offset value.
  • a function deriving unit for deriving a function for obtaining and a parameter value deciding unit for deciding the parameter value from the function wherein the function deriving unit adds a known external force whose magnitude is known in advance.
  • the function is generated from the output value obtained in step S1 and the offset value acquired in the previous step, and the parameter value determination unit acquires the sensor in a state in which the sensor is arranged at a predetermined portion for measuring the external force.
  • the parameter value is obtained from the offset value by the function.
  • the present invention is a method of calibrating a sensor in which an output value from a sensor when a predetermined external force is applied and a physical quantity associated with the action of the external force are associated with each other.
  • Not known external force of which magnitude is known in advance when determining a relational expression that is a mathematical expression capable of calculating the physical quantity from the output value according to an offset value that is the output value of the sensor when not in contact A first step of deriving a function representing the relationship between the parameter value and the offset value from the output value obtained at that time and the offset value measured in advance, The method is such that the offset value is measured again before the physical quantity is measured, and the second step of obtaining the parameter value by the function from the offset value is sequentially performed.
  • the offset value which is the output value of the sensor in the no-load state
  • the relationship between the output value from the sensor and the physical quantity associated with the action of the external force is used.
  • the function of the parameter value and the offset value forming the relational expression is obtained.
  • the parameter value is determined and the relational expression is specified by measuring the offset value again in a state where the sensor is arranged at a predetermined portion having a curved surface.
  • the physical quantity is detected from the output value from the sensor by the specified relational expression.
  • the pre-operation for applying a known external force is sufficient to determine the above-mentioned function, and it is not necessary to perform it for all the large number of force sensors arranged at a predetermined portion.
  • the parameter values of the respective sensors are obtained from the function by simply measuring the offset values of all the sensors, and the relational expression of the respective sensors is automatically specified. To be done. As described above, even in the case where a large number of sensors are arranged at predetermined parts having different surface shapes, it is possible to quickly and accurately perform the calibration work of each sensor.
  • FIG. 1 It is a block diagram showing a schematic structure of a force measuring system including a detecting device concerning the present invention. It is a schematic diagram of a robot hand having a force sensor arranged on the surface.
  • FIG. 1 shows a block diagram showing a schematic configuration of a force measurement system including a detection device according to the present invention.
  • the force measuring system 10 converts a force sensor 11 (sensor) that outputs an electric signal according to the magnitude of an applied external force, and an output value from the force sensor 11 into the magnitude of the external force.
  • the detection device 12 for detecting the measured value of the external force.
  • the force sensor 11 in the present embodiment is not particularly limited, but a magnetic tactile sensor that uses a change in a magnetic field due to the action of an external force is used, and as illustrated in FIG. A large number of sensors are regularly arranged on the palm side surface of the robot hand H.
  • this force sensor 11 detects a change in magnetic field due to displacement of the magnet due to deformation of the elastic body when an external force is applied to a flexible elastic body having a magnet provided inside thereof. And has a known structure in which an electric signal corresponding to the magnitude of the magnetic field is used as an output value.
  • the force sensor 11 can acquire the output values of the magnetic detection element in the predetermined three orthogonal directions of the sensor reference according to the magnitude of the applied external force.
  • the output direction of the magnetic detection element is not limited to the orthogonal three-axis directions, and the method described below can be applied to output values in one-axis direction or more.
  • the detection device 12 includes a predetermined processing circuit and a computer, and at the time of calibration for correlating the magnitude of the external force acting on the force sensor 11 and the output value from the force sensor 11, a calibration for obtaining a relational expression therebetween.
  • Means 14 and force calculating means 15 for calculating the magnitude of the external force acting on the force sensor 11 from the output value from the force sensor 11 by using the relational expression when the force sensor 11 is actually used. There is.
  • the relational expression includes a predetermined parameter, and the output of the force sensor 11 is determined according to an offset value that is an output value of the force sensor 11 in a non-contact state in which no external force is applied and in a non-loaded state.
  • the following mathematical formula capable of calculating the magnitude of the external force from the value can be exemplified.
  • Fx(t), Fy(t), and Fz(t) represent external forces respectively applied in the predetermined three orthogonal axes (x axis, y axis, z axis) at time t.
  • S1(t), S2(t), and S3(t) represent output values from the magnetic detection elements in the orthogonal triaxial directions in the force sensor 11 at time t.
  • a1, a2, a3, b1, b2, b3, c1, c2, c3 (hereinafter simply referred to as “a*, b*, c*”) are parameters that are the determined values of the parameters of the relational expression. Represents a value.
  • d1, d2, and d3 represent offset values of the magnetic detection element in the directions of the three orthogonal axes.
  • the calibration means 14 includes a function derivation unit 17 that derives a function for obtaining the parameter value from the offset value, and a parameter value determination unit 18 that determines the parameter value from the function.
  • Formula (1) can be applied when the relationship between the force acting on the force sensor 11 and the output value of the force sensor 11 is linear, and when the relationship is non-linear, for example, a polynomial is used instead of the formula. Then, it can be treated as a nonlinear regression problem.
  • the function deriving unit 17 derives the function as follows.
  • the force sensor 11 is installed in a posture corresponding to a posture (arrangement posture) at a predetermined portion to be arranged, and then an unloaded state in which no external force is applied to the force sensor 11 is set, and the output value at that time is constant.
  • a plurality of values are acquired every time, and their average value is used as the offset value. This offset value is obtained for each of the three orthogonal directions.
  • the parameter value determination unit 18 determines the parameter values a*, b*, c* as follows. That is, after all the force sensors 11 are attached to the robot hand H, when the force sensors 11 are used for the first time, the force sensors 11 are not loaded in the non-contact state in which the external force is not applied, and Similarly to the above, the initial measurement for obtaining the offset values d1, d2, d3 is performed. After that, from the offset values d1, d2, d3 obtained for each force sensor 11, the parameter values a*, b*, c* are calculated by the above equation (3), and the relational expression of the above equation (1) becomes It is determined for each force sensor 11.
  • the output value of the corresponding force sensor 11 is substituted into the relational expression specified for each force sensor 11 by the calibration means 14, so that the three axial directions of each force sensor 11 are calculated.
  • the external force acting on the palm surface of the robot hand H is determined. That is, here, from the offset values d1, d2, d3 already acquired by the parameter value determination unit 18 and the output values S1(t), S2(t), S3(t) measured at time t, The above formulas (1) and (2) are used to calculate the magnitudes Fx(t), Fy(t), and Fz(t) of the external forces in the three-axis directions at the time t.
  • a plurality (for example, about 10) of the same type of force sensor 11 is prepared, and for each of them, at a position different from the predetermined site to be arranged, It is assumed that the apparatus is installed in a posture corresponding to the arrangement posture (first installation state). Then, as a previous step, the output value is measured several times within a predetermined time under an unloaded state in which no external force is applied, and the average value of these output values is specified as an offset value. After that, a known external force whose magnitude is known in advance is applied to each of the force sensors 11 for which the offset value has been obtained in the first installation state, and the output value at this time is measured.
  • the output value is repeatedly output within a predetermined time under an unloaded state in which no external force is applied. Is measured, and the average value of the measured values is specified as an offset value. Then, the function of each force sensor 11 grouped for each posture specifies the parameter value in the corresponding force sensor 11 from the offset value obtained by each force sensor 11, and the relational expression is the force sensor 11 It is decided for each.
  • the magnitude of the external force is calculated for each force sensor 11 from the acquired output value using the relational expression corresponding to each force sensor 11.
  • the above-mentioned relational expression is not limited to the above expression (1), and is a mathematical expression obtained based on an experiment conducted in advance, and the output values S1(t), S2(t), S3( By multiplying the values obtained by subtracting the offset values d1, d2, d3 from t) by the parameter values a*, b*, c*, the external forces Fx(t), Fy(t) acting on the force sensor 11 are obtained. ), Fz(t) can be used as long as they are mathematical expressions.
  • Fz(t n) give ⁇ , a plurality of output values obtained in those times ⁇ S1 (t 1), ⁇ S1 (t n) ⁇ , ⁇ S2 (t 1), ⁇ S2 (t n) ⁇ , ⁇ S3(t 1 ),... S3(t n ) ⁇ can be used to obtain the parameter values a*, b*, c* by using, for example, the least squares method.
  • the temperature sensor can measure the temperature information around each force sensor 11, and the function derivation unit 17 generates a function that specifies the parameter value using the temperature and the offset value as variables from the acquisition result of the temperature information.
  • the first step is performed under the environment in which the temperature information is obtained, and then the temperature information is obtained when the second step is performed, and the temperature information is also used from the function.
  • the relational expression is specified, and immediately after that, the external force is measured by the force sensor 11 under the same temperature.
  • the mathematical expression (1) can use a mathematical model of multiple regression analysis with two explanatory variables of temperature information and external force.
  • the present invention is not limited to this, and other tactile sensors including piezoelectric type, strain gauge, etc., force sensor, pressure sensor.
  • the present invention can be applied to force sensors in general.
  • the present invention can also be applied to calibration of a displacement sensor that detects a displacement amount of a portion where the external force acts as a physical quantity associated with the action of the external force.
  • each part of the device in the present invention is not limited to the illustrated configuration example, and various modifications can be made as long as substantially the same operation is exhibited.
  • force measuring system 11 force sensor (sensor) 12 detection device 14 calibration means 17 function derivation unit 18 parameter value determination unit

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
PCT/JP2020/003825 2019-02-18 2020-01-31 検出装置及びセンサのキャリブレーション方法 Ceased WO2020170770A1 (ja)

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Application Number Priority Date Filing Date Title
JP2021501802A JP7339691B2 (ja) 2019-02-18 2020-01-31 検出装置及びセンサのキャリブレーション方法
CN202080029026.2A CN113748323B (zh) 2019-02-18 2020-01-31 检测装置以及传感器的校准方法
US17/429,740 US11982583B2 (en) 2019-02-18 2020-01-31 Detection device and sensor calibration method

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JP2019-026954 2019-02-18
JP2019026954 2019-02-18

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Cited By (1)

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CN113074768A (zh) * 2021-03-30 2021-07-06 宁夏计量质量检验检测研究院 电涡流传感器动静态连续校准方法

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JP2023092112A (ja) * 2021-12-21 2023-07-03 株式会社ジャパンディスプレイ 圧力センサの校正方法
FR3136394A1 (fr) * 2022-06-13 2023-12-15 Staubli Faverges Systèmes et procédés pour mettre à jour le coefficient de correction d’un capteur d’effort d’un robot industriel
US12449326B2 (en) 2022-09-16 2025-10-21 Honda Motor Co., Ltd. System and method for providing tactile sensor calibration
CN116593041A (zh) * 2022-12-31 2023-08-15 北京津发科技股份有限公司 一种压力信号拟合方法和装置

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JPS61278728A (ja) * 1985-06-05 1986-12-09 Hitachi Ltd 力・モ−メントの測定方法
JPS63109344A (ja) * 1986-10-27 1988-05-14 Fujitsu Ltd 力検出器の較正システム
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CN113748323A (zh) 2021-12-03
JP7339691B2 (ja) 2023-09-06
US11982583B2 (en) 2024-05-14
JPWO2020170770A1 (ja) 2021-12-16
US20220120630A1 (en) 2022-04-21
CN113748323B (zh) 2023-04-28

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