WO2020155728A1 - 电火花加工的微细亲水探针操作微液滴方法及装置 - Google Patents

电火花加工的微细亲水探针操作微液滴方法及装置 Download PDF

Info

Publication number
WO2020155728A1
WO2020155728A1 PCT/CN2019/115756 CN2019115756W WO2020155728A1 WO 2020155728 A1 WO2020155728 A1 WO 2020155728A1 CN 2019115756 W CN2019115756 W CN 2019115756W WO 2020155728 A1 WO2020155728 A1 WO 2020155728A1
Authority
WO
WIPO (PCT)
Prior art keywords
micro
probe
fine metal
hydrophilic
metal probe
Prior art date
Application number
PCT/CN2019/115756
Other languages
English (en)
French (fr)
Inventor
佟浩
普玉彬
李俊杰
李勇
姬波林
Original Assignee
清华大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 清华大学 filed Critical 清华大学
Publication of WO2020155728A1 publication Critical patent/WO2020155728A1/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H11/00—Auxiliary apparatus or details, not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation

Definitions

  • This application belongs to the technical field of special processing, and in particular relates to a method and device for operating micro-droplets with micro-hydrophilic probes for electrical discharge machining.
  • Micro-droplets have the characteristics of small size, large specific surface area, and internal stability, which make their role in the current chemical and biological fields more and more important.
  • the application of micro-droplet technology in the experiment can reduce the amount of special reagents, reduce the cost of the experiment, and can also avoid the dilution of ultra-micro samples, and achieve the chemical analysis requirements that are difficult to complete with conventional dosages.
  • Micro-droplet technology plays an important role in the fields of controlled drug release, virus detection, particle material synthesis, catalysts and other fields. But the prerequisite for the application of micro-droplets is to be able to accurately extract and manipulate micro-droplets.
  • the formation mechanism of droplets is that when the applied force is greater than the interfacial tension of the liquid surface, a small amount of liquid will break through the interfacial tension to form droplets.
  • the capillary force-based micro-droplet extraction and operation method is simple and low-cost. It is widely used in chemistry, biology and other related tests. Its main forms are dip-in, capillary and immersion. In biological and chemical experiments, the most commonly used method of microdroplet operation is to manually extract, move and spot individual microdroplets through a pipette. The size of the microdroplets is poorly controllable, and it is difficult to achieve particularly small quantitative droplets. Accurate and quick operation, and the straw is made of rubber, glass, etc., has a certain service life, and it is difficult to meet the needs of large-scale and efficient micro-droplet operation.
  • a robot system that uses clip-type slit capillary force to extract micro-droplets and release micro-droplets by using the surface energy of the spotted substrate to release micro-droplets, which can realize the spotting operation of micro-droplets with a diameter of ⁇ 200 ⁇ m.
  • a method for picking up micro-droplets by a probe that uses the affinity of the probe end surface and the sidewall surface does not have affinity, and can realize the precise extraction operation of the micro-droplets below the epithelium on the plane.
  • a micro-droplet operation method and device that utilizes liquid storage in a liquid cavity to supply liquid and a piezoelectric nozzle to eject and spot samples can realize continuous spotting operation of micro-droplets with a volume of 1 nL.
  • micro-droplet operation method and system also have some disadvantages such as complicated micro-droplet mechanism, additional driving energy for droplet extraction, poor operating environment adaptability, and corrosion of rubber and other materials by droplet reagents.
  • disadvantages such as complicated micro-droplet mechanism, additional driving energy for droplet extraction, poor operating environment adaptability, and corrosion of rubber and other materials by droplet reagents.
  • This application aims to solve one of the technical problems in the related technology at least to a certain extent.
  • one purpose of the present application is to propose a method for operating micro-droplets with a micro-hydrophilic probe for electrical discharge machining, which uses the hydrophilic surface of the micro-metal probe to automatically absorb and manipulate micro-droplets, which is energy-saving, Convenient operation and low system cost.
  • Another purpose of the present application is to provide an EDM micro-hydrophilic probe operating micro-droplet device.
  • one embodiment of the present application proposes a method for operating microdroplets with a fine hydrophilic probe for EDM, which includes inserting a fine metal probe into the liquid to be operated, and controlling the fine metal probe
  • the horizontal movement of the needle utilizes the hydrophilic property of the surface of the sidewall of the fine metal probe to automatically absorb the microdroplets in the liquid to be operated onto the sidewall of the fine metal probe;
  • the metal probe and the micro-droplet are moved to the position where the liquid needs to be instilled; the micro-droplet is released onto the substrate that needs to be liquid-filled by blowing out the gas with pressure along the axial direction of the micro-metal probe .
  • the method for manipulating micro-droplets with micro-hydrophilic probes for electrical discharge machining in the embodiments of the present application uses the probe diameter and surface hydrophilic properties to adjust the size of the extracted droplets, which is convenient to operate and easy to quantitatively control.
  • Metal materials are used as micro-probes.
  • the needle can be made into a slender or even sharp probe, which not only has the advantages of high rigidity, corrosion resistance, and long working life, but also can be used for puncture extraction, such as cell puncture extraction sample solution.
  • the method for manipulating micro-droplets with a micro-hydrophilic probe for EDM may also have the following additional technical features:
  • the micro-morphology of the surface of the micro-metal probe is adjusted to obtain a single rod with hydrophilic characteristics. Or multiple or arrays of the fine metal probes.
  • the horizontal movement of the fine metal probe is movement in one or more directions of left and right, front and rear, rotation, and shaking.
  • the extracted surface is changed by adjusting one or more of the diameter of the fine metal probe, the surface hydrophilicity, the depth of the liquid surface inserted into the liquid to be operated, and the time. State the droplet size.
  • the speed and size of releasing the micro-droplets are adjusted by adjusting the gas pressure of the gas.
  • an EDM micro-hydrophilic probe operating micro-droplet device including: a micro metal probe for inserting the liquid to be operated, and controlling the micro
  • the horizontal movement of the metal probe uses the hydrophilic property of the surface of the side wall of the fine metal probe to automatically absorb the micro droplets in the liquid to be operated onto the side wall of the fine metal probe; the moving device is used To control the fine metal probe and the micro droplets to move to the position where the liquid is needed; a gas supply system for supplying gas; a blowing structure, the blowing nozzle of the blowing structure and the gas supply system
  • the connection is used to release the micro-droplets onto the substrate that needs to be instilled by blowing a gas under pressure along the axial direction of the micro-metal probe.
  • the micro-hydrophilic probe operation micro-droplet device for electric discharge machining in the embodiment of the present application uses the diameter of the probe and the surface hydrophilic characteristics to adjust the size of the extracted droplet, which is convenient to operate and easy to quantitatively control.
  • Metal materials are used as the micro-probe.
  • the needle can be made into a slender or even sharp probe, which not only has the advantages of high rigidity, corrosion resistance, and long working life, but also can be used for puncture extraction, such as cell puncture extraction sample solution.
  • micro-hydrophilic probe-operated micro-droplet device for electrical discharge machining may also have the following additional technical features:
  • the micro-morphology of the surface of the micro-metal probe is adjusted to obtain a single rod with hydrophilic characteristics. Or multiple or arrays of the fine metal probes.
  • the horizontal movement of the fine metal probe is movement in one or more directions of left and right, front and rear, rotation, and shaking.
  • the extracted surface is changed by adjusting one or more of the diameter of the fine metal probe, the surface hydrophilicity, the depth of the liquid surface inserted into the liquid to be operated, and the time. State the droplet size.
  • the speed and size of releasing the micro-droplets are adjusted by adjusting the gas pressure of the gas.
  • FIG. 1 is a flow chart of a method for operating micro-droplets with a micro-hydrophilic probe for EDM according to an embodiment of the present application
  • Fig. 2 is a schematic diagram of a single-, multi-, and array micro-probe process for micro-EDM machining according to an embodiment of the present application;
  • FIG. 3 is a schematic diagram of a micro-droplet operating system of a fine hydrophilic probe according to an embodiment of the present application
  • FIG. 4 is a schematic diagram of the micro-droplet operation and dispensing process of the micro-hydrophilic probe according to an embodiment of the present application
  • Fig. 5 is a schematic diagram of the structure of an EDM micro-hydrophilic probe operating micro-droplet device according to an embodiment of the present application.
  • Fig. 1 is a flow chart of a method for operating micro-droplets by a micro-hydrophilic probe for electrical discharge machining according to an embodiment of the present application.
  • the method for operating micro-droplets with a micro-hydrophilic probe for EDM includes the following steps:
  • step S101 the fine metal probe is inserted into the liquid to be operated, and by controlling the horizontal movement of the fine metal probe, the hydrophilic property of the side wall surface of the fine metal probe is used to automatically absorb the micro droplets in the liquid to be operated. On the side wall of the fine metal probe.
  • the horizontal movement of the fine metal probe is movement in one or more directions of left and right, front and rear, rotation, and shaking.
  • the micro-morphology of the surface of the micro-metal probe is adjusted to obtain a single or multi-rod with hydrophilic characteristics. Root or array of fine metal probes.
  • the size of the extracted microdroplets is changed by adjusting one or more of the diameter of the fine metal probe, the surface hydrophilicity, the depth of the liquid surface inserted into the liquid to be operated, and the time.
  • step S102 the fine metal probe and the micro droplet are moved to the position where the liquid is needed to be injected by operation.
  • a moving operating platform or a manipulator is used to achieve precise movement of the micro-droplets to the target position.
  • step S103 the gas under pressure is blown along the axial direction of the fine metal probe to release the micro droplets onto the substrate to be instilled.
  • a gas supply system is used to provide a certain pressure gas
  • a blowing nozzle is used to blow a certain pressure gas to release the micro droplets on the micro probe.
  • the speed and size of the released micro-droplets are adjusted by adjusting the gas pressure of the gas.
  • the embodiments of the application use the existing micro-EDM technology to prepare single/multiple/array micro probes, which can prepare probes of various metal materials, and the shape and dimensional accuracy of the probes are easily guaranteed.
  • the hydrophilic properties of the surface are easily controlled by electrical parameters, and the surface of the hydrophilic surface probe can automatically extract droplets.
  • the extraction process does not require additional energy and driving mechanism, and has energy saving, compactness and low cost.
  • Fig. 2 is a schematic diagram of a single-, multi-, and array micro-probe process for micro-EDM machining according to an embodiment of the present application, showing the processing method of single-, multi-, and array micro-probes in micro-EDM, as shown in Fig. 2 Shown in (a): The positive pole of the pulse power supply is connected to the initial rod-shaped electrode, and the negative pole is connected to the metal center to conduct the current to the moving wire electrode wire, and the wire electrode discharge grinding is realized by the micro EDM to prepare a single micro probe.
  • FIG. 2(b1) The method of processing multiple micro-probes is shown in Figure 2(b1): the positive pole of the pulse power supply is connected to the initial electrode, and the negative pole is connected to the metal tip to conduct the current to the moving wire electrode wire; moving the initial electrode in two horizontal directions is consistent with the moving wire electrode.
  • the wire electrode wire is subjected to micro-EDM machining at different positions, and multiple micro-probes can be processed by wire-cutting as shown in Figure 2(b2).
  • FIG. 2(c) The machining process of the array micro-probe is shown in Figure 2(c): a single micro-electrode is prepared by wire-electrode electric discharge grinding as shown in Figure 2(c1); a single micro-electrode is used to perform electric spark on the reverse copy sheet
  • the perforated and processed array micro-holes are shown in Figure 2(c2); then the micro-EDM micro-probe is processed by the reverse-copy hole on the reverse-copy sheet as shown in Figure 2(c3). 2(c4) shown.
  • FIG. 2(d) The processing technology is shown in Figure 2(d): a single micro-electrode is prepared by wire-electrode discharge grinding as shown in Figure 2(d1); the prepared micro-electrode is reversed The array reverse copy holes of the "TH" pattern on the copy film are shown in Figure 2 (d2), and then the reverse copy holes on the reverse copy film are used for the micro EDM reverse copy processing to pattern multiple fine needles as shown in Figure 2 (d3) ), the processed array microneedle is shown in Figure 2(d4).
  • the micro-hydrophilic probe micro-droplet operating system mainly includes: single or multiple micro-metal probes or arrays, a motion operating platform or manipulator, a blowing nozzle and an air supply system.
  • the micro hydrophilic probe is used to immerse a certain amount of liquid in the liquid taking tank; the moving operating platform or manipulator is used to realize the precise movement of the micro droplets to the target position; the blowing nozzle is used to blow out a certain pressure gas to release the pressure on the micro probe Micro droplets; the gas supply system is used to provide a certain pressure gas; the liquid taking tank is used to store the liquid to be operated.
  • the process of manipulating micro droplets and spotting liquids for the micro hydrophilic probe is as follows: immerse the microprobe in the liquid or puncture the flexible membrane, and use the movement and rotation of the electrode and its hydrophilicity to extract a certain amount of liquid as shown in Figure 4(a1); Position the operating platform and accurately align the micro probe to the target position as shown in Figure 4(b1); the air supply system supplies air to the nozzle and ejects the micro droplets along the axis of the micro probe as shown in Figure 4(c1); The droplets are released on the determined target position on the substrate as shown in Figure 4(d1).
  • the process of operating the micro-droplet with multiple or patterned array micro-probes is as follows: immerse multiple patterned or arrayed micro-probes in the liquid, and extract a certain amount of liquid by the translational movement or shaking of the electrode and its hydrophilicity as shown in Figure 4(a2). Show; use the motion positioning operating platform to move multiple patterned or array micro probes as a whole to accurately align the target position as shown in Figure 4 (b2); the air supply system supplies air to the nozzles along the multiple or array micro probes Air jets uniformly in the axial direction at the same time to release multiple or array micro-droplets at the same time as shown in Figure 4(c2); the final liquid is released on the substrate to determine the target position as shown in Figure 4(d2).
  • the size of the extracted droplets is adjusted by using the diameter of the probe and the hydrophilic characteristics of the surface.
  • Micro probes can be made into slender or even sharp probes, which not only have the advantages of high rigidity, corrosion resistance, and long working life, but also can be applied to puncture extraction, such as cell puncture extraction sample solution.
  • Fig. 5 is a schematic diagram of the structure of an EDM micro-hydrophilic probe operating micro-droplet device according to an embodiment of the present application.
  • the micro-hydrophilic probe operated micro-droplet device for EDM includes: micro-metal probe, moving device, air supply system and blowing structure.
  • the fine metal probe is used to insert the liquid to be operated.
  • the hydrophilic property of the sidewall surface of the fine metal probe is used to automatically absorb the micro droplets in the liquid to be operated to the fine metal probe. Needle on the side wall.
  • the moving device is used to control the movement of the fine metal probe and the droplet to the position where the liquid is needed.
  • the gas supply system is used to supply gas.
  • the blowing structure, the blowing nozzle of the blowing structure is connected with the gas supply system, and is used to blow out the gas with pressure along the axial direction of the fine metal probe to release the micro droplets onto the substrate to be instilled.
  • the EDM micro-hydrophilic probe operating micro-droplet device utilizes the hydrophilic surface of the micro-metal probe to automatically absorb and operate micro-droplets, and has the advantages of energy saving, convenient operation, low system cost and the like.
  • the micro-morphology of the surface of the micro-metal probe is adjusted to obtain a single or multi-rod with hydrophilic characteristics. Root or array of fine metal probes.
  • the horizontal movement of the fine metal probe is movement in one or more directions of left and right, front and rear, rotation, and shaking.
  • the size of the extracted microdroplets is changed by adjusting one or more of the diameter of the fine metal probe, the surface hydrophilicity, the depth of the liquid surface inserted into the liquid to be operated, and the time.
  • the speed and size of the released micro-droplets are adjusted by adjusting the gas pressure of the gas.
  • the size of the extracted droplet is adjusted by using the diameter of the probe and the hydrophilic characteristics of the surface, which is convenient to operate and easy to quantitatively control.
  • Metal materials are used as the micro-droplets.
  • the probe can be made into a slender or even sharp probe, which not only has the advantages of high rigidity, corrosion resistance, and long working life, but also can be used for puncture extraction, such as cell puncture extraction sample solution.
  • first and second are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with “first” and “second” may explicitly or implicitly include at least one of the features. In the description of this application, "a plurality of” means at least two, such as two, three, etc., unless otherwise specifically defined.
  • the terms “installed”, “connected”, “connected”, “fixed” and other terms should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection , Or into a whole; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, it can be the internal communication of two components or the interaction relationship between two components, unless otherwise specified The limit.
  • installed can be a fixed connection or a detachable connection , Or into a whole; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, it can be the internal communication of two components or the interaction relationship between two components, unless otherwise specified The limit.
  • the “on” or “under” of the first feature on the second feature may be in direct contact with the first and second features, or indirectly through an intermediary. contact.
  • the "above”, “above” and “above” of the first feature on the second feature may mean that the first feature is directly above or obliquely above the second feature, or it simply means that the first feature is higher in level than the second feature.
  • the “below”, “below” and “below” of the second feature of the first feature may mean that the first feature is directly below or obliquely below the second feature, or it simply means that the level of the first feature is smaller than the second feature.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Micromachines (AREA)

Abstract

一种电火花加工的微细亲水探针操作微液滴方法及装置，其中，该方法包括：将微细金属探针插入待操作液体中，通过控制微细金属探针的水平方向运动，利用微细金属探针侧壁表面的亲水特性自动吸取待操作液体中的微液滴到微细金属探针的侧壁上；通过操作将微细金属探针和微液滴移动到需要点液的位置；通过沿微细金属探针的轴向方向吹出带有压力的气体，将微液滴释放到需要点液的基片上。该方法利用微细金属探针的亲水表面能自动吸取和操作微液滴，具有节能、操作便捷、系统成本低等优点。

Description

电火花加工的微细亲水探针操作微液滴方法及装置
相关申请的交叉引用
本申请要求清华大学于2019年02月01日提交的、发明名称为“电火花加工微细亲水探针操作微液滴方法及装置”的、中国专利申请号“201910103034.6”的优先权。
技术领域
本申请属于特种加工技术领域，特别涉及一种电火花加工的微细亲水探针操作微液滴方法及装置。
背景技术
微液滴具有体积小、比表面积大、内部稳定等特性，使其在当前化学和生物领域中作用也来越重要。试验中应用微液滴技术可降低特种试剂用量、降低实验成本，还可避免对超微量样品的稀释，实现常规剂量难以完成的化学分析要求。微液滴技术在药物控释、病毒检测、颗粒材料合成、催化剂等领域具有重要作用。但微液滴应用的前提是能够对微液滴进行精确的提取和操作。
液滴的形成机理是当某处施加的力大于其液面界面张力时，该处微量液体会突破界面张力形成液滴。基于毛细力的微液滴提取和操作方法简单、成本低，在化学、生物等相关试验中被广泛应用，其主要形式为蘸取式、毛细式和浸润式。生物和化学试验中，最常用的微液滴操作方法是通过吸管手工对单个微液滴提取、移动和点样操作，其微液滴大小可控性较差，难以实现特别微小定量液滴的准确、快捷操作，而且吸管由橡胶、玻璃等制成，具有一定的使用寿命，难于满足大批量化高效微液滴操作需求。
为实现高效提取和快速自动化操作微液滴，机械式微液滴操作方法及系统逐渐被开发和应用。一种采用夹子式狭缝毛细力提取微液滴、利用被点样基片表面能吸附来释放微液滴的机器人系统，可实现直径<200μm微液滴的点样操作。一种利用探针端部表面亲和性和侧壁表面不具有亲和性的探针拾取微液滴方法，可实现平面上皮升以下微量液滴精确提取操作。一种利用液体腔储液给液、压电喷嘴喷射点样的微液滴操作方法和装置，可实现体积为1nL的微液滴连续点样操作。
但现有的微液滴操作方法及系统还有微液滴机构较为复杂、液滴提取需要外加驱动能量、操作环境适应性较差、液滴试剂对橡胶等材料腐蚀等一些不足。目前尚缺乏一种耐腐 蚀、长寿命、自动化、低成本的微液滴操作方法及系统。
发明内容
本申请旨在至少在一定程度上解决相关技术中的技术问题之一。
为此，本申请的一个目的在于提出一种电火花加工的微细亲水探针操作微液滴方法，该方法利用微细金属探针的亲水表面能自动吸取和操作微液滴，具有节能、操作便捷、系统成本低等优点。
本申请的另一个目的在于提出一种电火花加工的微细亲水探针操作微液滴装置。
为达到上述目的，本申请一方面实施例提出了一种电火花加工的微细亲水探针操作微液滴方法，包括：将微细金属探针插入待操作液体中，通过控制所述微细金属探针的水平方向运动，利用所述微细金属探针侧壁表面的亲水特性自动吸取所述待操作液体中的微液滴到所述微细金属探针的侧壁上；通过操作将所述微细金属探针和所述微液滴移动到需要点液的位置；通过沿所述微细金属探针的轴向方向吹出带有压力的气体，将所述微液滴释放到需要点液的基片上。
本申请实施例的电火花加工的微细亲水探针操作微液滴方法，通过利用探针直径和表面亲水特性来调控提取液滴大小，操作便捷、易于定量调控，采用金属材料作为微细探针，可制作出细长甚至尖端的探针，不仅具有刚度高、耐腐蚀、长工作寿命的优点，而且可以应用于穿刺提取，比如细胞的穿刺提取样液等。
另外，根据本申请上述实施例的电火花加工的微细亲水探针操作微液滴方法还可以具有以下附加的技术特征：
进一步地，在本申请的一个实施例中，通过改变微细电火花加工制备过程中的电参数和工作液条件，调控所述微细金属探针表面的微观形貌，获得具有亲水特性的单根或多根或阵列的所述微细金属探针。
进一步地，在本申请的一个实施例中，所述微细金属探针的水平方向运动为左右、前后、旋转、摇动中的一个或多个方向的运动。
进一步地，在本申请的一个实施例中，通过调节所述微细金属探针直径、表面亲水特性、插入所述待操作液体的液面深度和时间中的一个或多个来改变提取的所述微液滴大小。
进一步地，在本申请的一个实施例中，通过调节气体的气体压力来调控释放所述微液滴的速度和大小。
为达到上述目的，本申请另一方面实施例提出了一种电火花加工的微细亲水探针操作微液滴装置，包括：微细金属探针，用于插入待操作液体，通过控制所述微细金属探针的水平方向运动，利用所述微细金属探针侧壁表面的亲水特性自动吸取所述待操作液体中的 微液滴到所述微细金属探针的侧壁上；移动装置，用于控制所述微细金属探针和所述微液滴移动到需要点液的位置；供气系统，用于提供气体；吹气结构，所述吹气结构的吹气喷嘴与所述供气系统连接，用于通过沿所述微细金属探针的轴向方向吹出带有压力的气体，将所述微液滴释放到需要点液的基片上。
本申请实施例的电火花加工的微细亲水探针操作微液滴装置，通过利用探针直径和表面亲水特性来调控提取液滴大小，操作便捷、易于定量调控，采用金属材料作为微细探针，可制作出细长甚至尖端的探针，不仅具有刚度高、耐腐蚀、长工作寿命的优点，而且可以应用于穿刺提取，比如细胞的穿刺提取样液等。
另外，根据本申请上述实施例的电火花加工的微细亲水探针操作微液滴装置还可以具有以下附加的技术特征：
进一步地，在本申请的一个实施例中，通过改变微细电火花加工制备过程中的电参数和工作液条件，调控所述微细金属探针表面的微观形貌，获得具有亲水特性的单根或多根或阵列的所述微细金属探针。
进一步地，在本申请的一个实施例中，所述微细金属探针的水平方向运动为左右、前后、旋转、摇动中的一个或多个方向的运动。
进一步地，在本申请的一个实施例中，通过调节所述微细金属探针直径、表面亲水特性、插入所述待操作液体的液面深度和时间中的一个或多个来改变提取的所述微液滴大小。
进一步地，在本申请的一个实施例中，通过调节气体的气体压力来调控释放所述微液滴的速度和大小。
本申请附加的方面和优点将在下面的描述中部分给出，部分将从下面的描述中变得明显，或通过本申请的实践了解到。
附图说明
本申请上述的和/或附加的方面和优点从下面结合附图对实施例的描述中将变得明显和容易理解，其中：
图1为根据本申请一个实施例的电火花加工的微细亲水探针操作微液滴方法流程图；
图2为根据本申请一个实施例的微细电火花加工单根、多根、阵列微细探针工艺示意图；
图3为根据本申请一个实施例的微细亲水探针微液滴操作系统示意图；
图4为根据本申请一个实施例的微细亲水探针微液滴操作和点液过程示意图；
图5为根据本申请一个实施例的电火花加工的微细亲水探针操作微液滴装置结构示意图。
具体实施方式
下面详细描述本申请的实施例，实施例的示例在附图中示出，其中自始至终相同或类似的标号表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施例是示例性的，旨在用于解释本申请，而不能理解为对本申请的限制。
下面参照附图描述根据本申请实施例提出的电火花加工的微细亲水探针操作微液滴方法及装置。
首先将参照附图描述根据本申请实施例提出的电火花加工的微细亲水探针操作微液滴方法。
图1为根据本申请一个实施例的电火花加工的微细亲水探针操作微液滴方法流程图。
如图1所示，该电火花加工的微细亲水探针操作微液滴方法包括以下步骤：
在步骤S101中，将微细金属探针插入待操作液体中，通过控制微细金属探针的水平方向运动，利用微细金属探针侧壁表面的亲水特性自动吸取待操作液体中的微液滴到微细金属探针的侧壁上。
其中，微细金属探针的水平方向运动为左右、前后、旋转、摇动中的一个或多个方向的运动。
进一步地，在本申请的一个实施例中，通过改变微细电火花加工制备过程中的电参数和工作液条件，调控微细金属探针表面的微观形貌，获得具有亲水特性的单根或多根或阵列的微细金属探针。
进一步地，多根或阵列微细金属探针通过空间位置分布和设计，可实现图形化、阵列多微液滴的提取、移动和点液操作，多根微细金属探针之间的距离要求足够大，避免提取的液滴相互接触。
进一步地，在本申请的一个实施例中，通过调节微细金属探针直径、表面亲水特性、插入待操作液体的液面深度和时间中的一个或多个来改变提取的微液滴大小。
在步骤S102中，通过操作将微细金属探针和微液滴移动到需要点液的位置。
在本申请的实施例中，利用运动操作平台或机械手用于实现微液滴精确移动到目标位置。
在步骤S103中，通过沿微细金属探针的轴向方向吹出带有压力的气体，将微液滴释放到需要点液的基片上。
在本申请的实施例中，使用供气系统用于提供一定压力气体，利用吹气喷嘴吹出一定压力气体来释放微细探针上的微液滴。
进一步地，在本申请的一个实施例中，通过调节气体的气体压力来调控释放微液滴的 速度和大小。
本申请的实施例利用现有的微细电火花加工技术制备单根/多根/阵列微细探针，可制备各种金属材料的探针，而且探针的形状和尺寸精度易于保证，探针的表面亲水特性易于通过电参数调控，并且采用亲水表面特性探针的表面能自动提取液滴，提取过程无需外加能量和驱动机构，具有节能、小巧和成本低。
下面结合附图和实施实例来描述本申请的系统组成和具体操作步骤。
图2为根据本申请一个实施例的微细电火花加工单根、多根、阵列微细探针工艺示意图，展示了微细电火花加工单根、多根、阵列微细探针加工工艺方法，如图2(a)所示：脉冲电源正极接初始棒状电极，负极通过接金属顶尖将电流导到运动的线电极丝上，利用微细电火花加工实现线电极放电磨削制备单根微细探针。加工多根微细探针方法如图2(b1)所示：脉冲电源正极接初始电极，负极通过接金属顶尖将电流导到运动的线电极丝上；沿水平两方向移动初始电极，与运动的线电极丝在不同位置进行微细电火花加工，可实现电火花线切割加工出多根微细探针如图2(b2)所示。阵列微细探针加工工艺如图2(c)所示：利用线电极放电磨削先制备出单根微细电极如图2(c1)所示；使用制备单根微细电极在反拷片上进行电火花穿孔加工出阵列微孔如图2(c2)所示；再利用反拷片上反拷孔进行微细电火花反拷加工阵列微细探针如图2(c3)，加工获得的阵列微细探针如图2(c4)所示。以“TH”图形阵列微细探针为例，其加工工艺如图2(d)所示：利用线电极放电磨削制备出单根微细电极如图2(d1)；使用制备的微细电极在反拷片上进行微细电火花加工出“TH”图形的阵列反拷孔如图2(d2)，再利用反拷片上反拷孔进行微细电火花反拷加工图形化多个微细针如图2(d3)，加工获得的阵列微针如图2(d4)所示。
如图3所示，微细亲水探针微液滴操作系统主要包括：单根或多根或阵列的微细金属探针、运动操作平台或机械手、吹气喷嘴及供气系统组成。微细亲水探针用于浸入取液槽内吸取一定量液体；运动操作平台或机械手用于实现微液滴精确移动到目标位置；吹气喷嘴用于吹出一定压力气体来释放微细探针上的微液滴；供气系统用于提供一定压力气体；取液槽用于存储待操作液体。
如图4所示，为微细亲水探针操作微液滴和点液过程。单根微细探针操作微液滴过程为：将微细探针浸入液体或刺破柔性膜，利用电极的移动和旋转以及自身亲水性提取一定量液体如图4(a1)所示；利用运动定位操作平台，将微细探针精确对准目标位置如图4(b1)所示；供气系统向喷嘴供气，沿微细探针轴向喷气释放微液滴如图4(c1)；最终微液滴被释放在基板的确定目标位置上如图4(d1)所示。多根或图形阵列微细探针操作微液滴过程为：将多根图形化或阵列微细探针浸入液体，利用电极平移运动或摇动以及自身亲水性提取一定量液体如图4(a2)所示；利用运动定位操作平台，将多根图形化或阵列微细探针 整体移动精确对准目标位置如图4(b2)所示；供气系统向喷嘴供气，沿多个或阵列微细探针轴向同时均匀喷气，同时释放多个或阵列微液滴如图4(c2)；最终液体被释放在基板上确定目标位置上如图4(d2)所示。
根据本申请实施例提出的电火花加工的微细亲水探针操作微液滴方法，通过利用探针直径和表面亲水特性来调控提取液滴大小，操作便捷、易于定量调控，采用金属材料作为微细探针，可制作出细长甚至尖端的探针，不仅具有刚度高、耐腐蚀、长工作寿命的优点，而且可以应用于穿刺提取，比如细胞的穿刺提取样液等。
其次参照附图描述根据本申请实施例提出的电火花加工的微细亲水探针操作微液滴装置。
图5为根据本申请一个实施例的电火花加工的微细亲水探针操作微液滴装置结构示意图。
如图5所示，该电火花加工的微细亲水探针操作微液滴装置包括：微细金属探针、移动装置、供气系统和吹气结构。
其中，微细金属探针用于插入待操作液体，通过控制微细金属探针的水平方向运动，利用微细金属探针侧壁表面的亲水特性自动吸取待操作液体中的微液滴到微细金属探针的侧壁上。
移动装置用于控制微细金属探针和微液滴移动到需要点液的位置。
供气系统用于提供气体。
吹气结构，吹气结构的吹气喷嘴与供气系统连接，用于通过沿微细金属探针的轴向方向吹出带有压力的气体，将微液滴释放到需要点液的基片上。
该电火花加工的微细亲水探针操作微液滴装置利用微细金属探针的亲水表面能自动吸取和操作微液滴，具有节能、操作便捷、系统成本低等优点。
进一步地，在本申请的一个实施例中，通过改变微细电火花加工制备过程中的电参数和工作液条件，调控微细金属探针表面的微观形貌，获得具有亲水特性的单根或多根或阵列的微细金属探针。
进一步地，在本申请的一个实施例中，微细金属探针的水平方向运动为左右、前后、旋转、摇动中的一个或多个方向的运动。
进一步地，在本申请的一个实施例中，通过调节微细金属探针直径、表面亲水特性、插入待操作液体的液面深度和时间中的一个或多个来改变提取的微液滴大小。
进一步地，在本申请的一个实施例中，通过调节气体的气体压力来调控释放微液滴的速度和大小。
需要说明的是，前述对火花加工的微细亲水探针操作微液滴方法实施例的解释说明也 适用于该实施例的装置，此处不再赘述。
根据本申请实施例提出的火花加工的微细亲水探针操作微液滴装置，通过利用探针直径和表面亲水特性来调控提取液滴大小，操作便捷、易于定量调控，采用金属材料作为微细探针，可制作出细长甚至尖端的探针，不仅具有刚度高、耐腐蚀、长工作寿命的优点，而且可以应用于穿刺提取，比如细胞的穿刺提取样液等。
在本申请的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”、“轴向”、“径向”、“周向”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本申请的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本申请中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系，除非另有明确的限定。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本申请中的具体含义。
在本申请中，除非另有明确的规定和限定，第一特征在第二特征“上”或“下”可以是第一和第二特征直接接触，或第一和第二特征通过中间媒介间接接触。而且，第一特征在第二特征“之上”、“上方”和“上面”可是第一特征在第二特征正上方或斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”可以是第一特征在第二特征正下方或斜下方，或仅仅表示第一特征水平高度小于第二特征。
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不必须针对的是相同的实施例或示例。而且，描述的具体特征、结构、材料或者特点可以在任一个或多个实施例或示例中以合适的方式结合。此外，在不相互矛盾的情况下，本领域的技术人员可以将本说明书中描述的不同实施例或示例以及不同实施例或示例的特征进行结合和组合。
尽管上面已经示出和描述了本申请的实施例，可以理解的是，上述实施例是示例性的，不能理解为对本申请的限制，本领域的普通技术人员在本申请的范围内可以对上述实施例进行变化、修改、替换和变型。

Claims (10)

  1. 一种电火花加工的微细亲水探针操作微液滴方法，其特征在于，包括以下步骤：
    将微细金属探针插入待操作液体中，通过控制所述微细金属探针的水平方向运动，利用所述微细金属探针侧壁表面的亲水特性自动吸取所述待操作液体中的微液滴到所述微细金属探针的侧壁上；
    通过操作将所述微细金属探针和所述微液滴移动到需要点液的位置；
    通过沿所述微细金属探针的轴向方向吹出带有压力的气体，将所述微液滴释放到需要点液的基片上。
  2. 根据权利要求1所述的电火花加工的微细亲水探针操作微液滴方法，其特征在于，
    通过改变微细电火花加工制备过程中的电参数和工作液条件，调控所述微细金属探针表面的微观形貌，获得具有亲水特性的单根或多根或阵列的所述微细金属探针。
  3. 根据权利要求1所述的电火花加工的微细亲水探针操作微液滴方法，其特征在于，
    所述微细金属探针的水平方向运动为左右、前后、旋转、摇动中的一个或多个方向的运动。
  4. 根据权利要求1所述的电火花加工的微细亲水探针操作微液滴方法，其特征在于，
    通过调节所述微细金属探针直径、表面亲水特性、插入所述待操作液体的液面深度和时间中的一个或多个来改变提取的所述微液滴大小。
  5. 根据权利要求1所述的电火花加工的微细亲水探针操作微液滴方法，其特征在于，通过调节气体的气体压力来调控释放所述微液滴的速度和大小。
  6. 一种电火花加工的微细亲水探针操作微液滴装置，其特征在于，包括：
    微细金属探针，用于插入待操作液体，通过控制所述微细金属探针的水平方向运动，利用所述微细金属探针侧壁表面的亲水特性自动吸取所述待操作液体中的微液滴到所述微细金属探针的侧壁上；
    移动装置，用于控制所述微细金属探针和所述微液滴移动到需要点液的位置；
    供气系统，用于提供气体；
    吹气结构，所述吹气结构的吹气喷嘴与所述供气系统连接，用于通过沿所述微细金属探针的轴向方向吹出带有压力的气体，将所述微液滴释放到需要点液的基片上。
  7. 根据权利要求6所述的电火花加工的微细亲水探针操作微液滴装置，其特征在于，
    通过改变微细电火花加工制备过程中的电参数和工作液条件，调控所述微细金属探针表面的微观形貌，获得具有亲水特性的单根或多根或阵列的所述微细金属探针。
  8. 根据权利要求6所述的电火花加工的微细亲水探针操作微液滴装置，其特征在于，
    所述微细金属探针的水平方向运动为左右、前后、旋转、摇动中的一个或多个方向的运动。
  9. 根据权利要求6所述的电火花加工的微细亲水探针操作微液滴装置，其特征在于，
    通过调节所述微细金属探针直径、表面亲水特性、插入所述待操作液体的液面深度和时间中的一个或多个来改变提取的所述微液滴大小。
  10. 根据权利要求6所述的电火花加工的微细亲水探针操作微液滴装置，其特征在于，通过调节气体的气体压力来调控释放所述微液滴的速度和大小。
PCT/CN2019/115756 2019-02-01 2019-11-05 电火花加工的微细亲水探针操作微液滴方法及装置 WO2020155728A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201910103034.6A CN109865904B (zh) 2019-02-01 2019-02-01 电火花加工微细亲水探针操作微液滴方法及装置
CN201910103034.6 2019-02-01

Publications (1)

Publication Number Publication Date
WO2020155728A1 true WO2020155728A1 (zh) 2020-08-06

Family

ID=66918491

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2019/115756 WO2020155728A1 (zh) 2019-02-01 2019-11-05 电火花加工的微细亲水探针操作微液滴方法及装置

Country Status (2)

Country Link
CN (1) CN109865904B (zh)
WO (1) WO2020155728A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109865904B (zh) * 2019-02-01 2020-11-03 清华大学 电火花加工微细亲水探针操作微液滴方法及装置
CN110315464B (zh) * 2019-08-06 2020-09-29 哈尔滨理工大学 一种基于电化学沉积的金属微构件拾取方法
CN111151314B (zh) * 2020-01-15 2021-07-27 杭州电子科技大学 一种仿蚂蚁口器功能结构的微液滴制备装置及方法
CN113597107B (zh) * 2021-07-28 2022-08-05 广东工业大学 一种微小液滴辅助式纳米金属精细线路的加工方法
CN114850792B (zh) * 2022-04-28 2023-04-25 中国电子科技集团公司第十三研究所 一种触针式表面轮廓仪探针系统的制备方法及调校方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002286736A (ja) * 2001-03-28 2002-10-03 Canon Inc プローブ担体の製造方法およびプローブ担体の製造装置
JP2005017226A (ja) * 2003-06-27 2005-01-20 Shimadzu Corp 液体クロマトグラフのフラクションコレクタ
CN1576838A (zh) * 2003-07-08 2005-02-09 株式会社岛津制作所 用于液相色谱的分离装置
CN101799486A (zh) * 2009-02-10 2010-08-11 京元电子股份有限公司 探针的制作方法及其探针阵列
CN104492508A (zh) * 2014-11-13 2015-04-08 浙江大学 一种基于液体残留的超微量液滴操控装置及方法
CN106568982A (zh) * 2016-10-31 2017-04-19 浙江大学 一种用于二维液滴阵列形成和筛选的装置及其使用方法
CN208109479U (zh) * 2018-09-28 2018-11-16 湖南乐准智芯生物科技有限公司 一种微量定量取样系统
CN109865904A (zh) * 2019-02-01 2019-06-11 清华大学 电火花加工微细亲水探针操作微液滴方法及装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101653847A (zh) * 2009-09-15 2010-02-24 天津大学 一种微纳放电加工孔的方法和系统
EP2997126A4 (en) * 2013-05-16 2017-01-18 Advanced Liquid Logic, Inc. Droplet actuator for electroporation and transforming cells
CN105498869B (zh) * 2015-11-27 2017-06-09 中国石油大学(华东) 一种微纳米液滴制备方法
CN106824317A (zh) * 2017-02-27 2017-06-13 重庆大学 一种利用微电磁棒操控液滴的方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002286736A (ja) * 2001-03-28 2002-10-03 Canon Inc プローブ担体の製造方法およびプローブ担体の製造装置
JP2005017226A (ja) * 2003-06-27 2005-01-20 Shimadzu Corp 液体クロマトグラフのフラクションコレクタ
CN1576838A (zh) * 2003-07-08 2005-02-09 株式会社岛津制作所 用于液相色谱的分离装置
CN101799486A (zh) * 2009-02-10 2010-08-11 京元电子股份有限公司 探针的制作方法及其探针阵列
CN104492508A (zh) * 2014-11-13 2015-04-08 浙江大学 一种基于液体残留的超微量液滴操控装置及方法
CN106568982A (zh) * 2016-10-31 2017-04-19 浙江大学 一种用于二维液滴阵列形成和筛选的装置及其使用方法
CN208109479U (zh) * 2018-09-28 2018-11-16 湖南乐准智芯生物科技有限公司 一种微量定量取样系统
CN109865904A (zh) * 2019-02-01 2019-06-11 清华大学 电火花加工微细亲水探针操作微液滴方法及装置

Also Published As

Publication number Publication date
CN109865904A (zh) 2019-06-11
CN109865904B (zh) 2020-11-03

Similar Documents

Publication Publication Date Title
WO2020155728A1 (zh) 电火花加工的微细亲水探针操作微液滴方法及装置
US7160511B2 (en) Liquid pipetting apparatus and micro array manufacturing apparatus
CN1315913A (zh) 用于微量液体移液的管尖设计和随机存取系统
US6808683B2 (en) Droplet dispensing system
US7736591B2 (en) Method and apparatus for liquid dispensing
US6686299B2 (en) Nanosyringe array and method
JP3598066B2 (ja) フォーマット変換機能を有する流体制御装置
JP2002214244A (ja) 液体サンプルを吸入し分配する装置
WO2019144894A1 (zh) 运动控制机构、吐液枪头、微液滴生成装置及生成方法、流体驱动机构及流体驱动方法、微液滴生成方法以及吐液枪头表面处理方法
CN112444530A (zh) 一种用于冷冻电镜的微量样品制备装置及其制样方法
CN209109198U (zh) 基于喷墨打印技术的压电式点样装置
CN1986229A (zh) 基因芯片点样喷头
CN216224463U (zh) 数字pcr液滴或单细胞液滴的生成装置及液滴生成管
EP2848306B1 (en) Dispenser system for mass spectrometric sample preparations
JP2000329771A (ja) 分注装置
CZ20023316A3 (cs) Způsob vytváření biopolymerních polí a zařízení k jeho provádění
JP2001228162A (ja) 液体吐出装置、液体吐出ヘッド及び吐出方法
CN106423696B (zh) 多通道电流体喷射扫描系统
JP3878667B2 (ja) 分注システム
JP2007000832A (ja) 液体吐出方法及び液体吐出装置
JP4166690B2 (ja) 液滴供給システム
CN115518703A (zh) 液滴生成装置、系统及生成液滴的方法
JP2004226321A (ja) 液滴吐出ヘッド及びディスペンサ並びにそれらの製造方法並びにバイオチップ製造方法
CN1896744B (zh) 一种非接触式微量点样头
JP2008185516A (ja) 細胞の電気生理現象の測定装置およびこれを用いた測定方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19912369

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19912369

Country of ref document: EP

Kind code of ref document: A1