WO2020134416A1 - 摄像模组、防抖组件及终端 - Google Patents

摄像模组、防抖组件及终端 Download PDF

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Publication number
WO2020134416A1
WO2020134416A1 PCT/CN2019/112611 CN2019112611W WO2020134416A1 WO 2020134416 A1 WO2020134416 A1 WO 2020134416A1 CN 2019112611 W CN2019112611 W CN 2019112611W WO 2020134416 A1 WO2020134416 A1 WO 2020134416A1
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WO
WIPO (PCT)
Prior art keywords
shake
image sensor
camera module
compensation
displacement
Prior art date
Application number
PCT/CN2019/112611
Other languages
English (en)
French (fr)
Inventor
王伟
郭利德
Original Assignee
华为技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to EP19903634.4A priority Critical patent/EP3860106B1/en
Publication of WO2020134416A1 publication Critical patent/WO2020134416A1/zh
Priority to US17/318,958 priority patent/US11930274B2/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
    • G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
    • G02B13/0065—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element having a beam-folding prism or mirror
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/54—Mounting of pick-up tubes, electronic image sensors, deviation or focusing coils
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50—Constructional details
    • H04N23/55—Optical parts specially adapted for electronic image sensors; Mounting thereof
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/681—Motion detection
    • H04N23/6812—Motion detection based on additional sensors, e.g. acceleration sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/682—Vibration or motion blur correction
    • H04N23/685—Vibration or motion blur correction performed by mechanical compensation
    • H04N23/687—Vibration or motion blur correction performed by mechanical compensation by shifting the lens or sensor position

Definitions

  • This application relates to the field of electronic technology, in particular to a camera module, an anti-shake component and a terminal.
  • the zoom magnification of the camera module becomes larger and larger. Due to the longer effective focal length of the optical path required for large-magnification zoom, that is, the telephoto optical path is required. It will cause even a slight jitter during shooting, which will cause a large jitter of the imaging beam of the camera module. Therefore, the anti-shake function of the camera module is particularly important.
  • the camera module includes: an optical folding element, an actuating structure, an inertial element, a lens group (that is, a lens module), and an image sensor that are sequentially arranged.
  • the optical folding element includes a mirror or a prism, etc., and can realize a telephoto optical path in a limited space.
  • a camera module with a telephoto optical path is also called a periscope camera module.
  • the optical folding element is connected to the actuating structure, and when the inertial element detects shaking, the optical folding element can be deflected and/or tilted by the actuating structure, thereby imaging
  • the beam is subjected to shake compensation, that is, to compensate for the displacement (linear displacement and/or angular displacement) generated by the shake.
  • the foregoing compensation process is called an optical image stabilization (OIS) process, and the corresponding actuation structure can be It is called an optical image stabilization (OIS) motor.
  • the present application provides a camera module, an anti-shake component and a terminal, which can solve the problem of low accuracy of the current imaging beam jitter compensation to a certain extent.
  • the technical solution is as follows:
  • a camera module includes:
  • An optical folding element, a mirror group and an image sensor are arranged in this order along the imaging beam transmission direction.
  • the optical folding element is configured to fold and transmit the optical path of the received imaging beam to the mirror group;
  • the mirror group is configured to transmit the received imaging beam to the image sensor;
  • the image sensor has an image acquisition area, and the image sensor is It is configured to collect the received imaging beam through the image acquisition area.
  • the camera module also includes: a front-end anti-shake component and a back-end anti-shake component, the front-end anti-shake component is connected to at least one of the optical folding element and the lens group, the back-end anti-shake component is connected to the image sensor, and the front-end anti-shake component is configured To perform the first shake compensation on the imaging beam, the rear-end anti-shake component is configured to perform the second shake compensation on the imaging beam.
  • the front-end anti-shake component and the back-end anti-shake component can perform the first and second shake compensations on the imaging beam, respectively, through the cooperation of the first and second shake compensations, compared with the traditional one, only one shake is performed
  • the compensation situation improves the final jitter compensation accuracy of the imaging beam.
  • the back-end anti-shake component includes: an image sensor actuation structure and a first shake detection structure, and the image sensor actuation structure is fixedly connected to the image sensor.
  • the first shake detection structure has a photosensitive area
  • the first shake detection structure is disposed around the image acquisition area of the image sensor
  • the first shake detection structure is configured to collect the received imaging beam through the photosensitive area and detect the collection of the photosensitive area Whether the imaging beam of the camera shakes, the frame rate of the first shake detection structure is greater than the frame rate of the image sensor.
  • the first jitter detection structure Since the first jitter detection structure has a photosensitive area and the image sensor has an image acquisition area, both are image acquisition devices, and the higher the frame rate of the image acquisition device, the faster the image acquisition speed. Among them, the first jitter detection structure The speed of the image acquisition of the structure should be greater than the speed of the image sensor of the image sensor, so that the first jitter detection structure can perform image acquisition in the photosensitive region before the image sensor, so as to achieve corresponding jitter on the imaging beam collected by the image sensor make up.
  • the image sensor actuation structure is configured to drive the image sensor to move after the first shake detection structure detects that the imaging light beam collected by the photosensitive region is shaken to perform second shake compensation on the imaging light beam.
  • the image sensor actuation structure includes a microelectromechanical system MEMS actuator.
  • the image sensor actuation structure includes a movable stage, a base, an elastic suspension element and an actuation member.
  • the base is fixedly arranged, the movable carrier and the base are connected by an elastic suspension element, and the movable carrier and the actuator are fixedly connected.
  • the movable stage is used to carry the image sensor and the first shake detection structure, and the actuator is configured to drive the movable stage to move relative to the substrate.
  • the base is a housing with a groove
  • the movable stage is a rectangular plate-shaped structure, and is disposed in the groove
  • at least two first positions in the side wall of the movable stage are respectively passed through elastic suspension elements
  • At least two second positions on the inner wall of the groove are connected in a one-to-one correspondence, and the second position on the inner wall corresponding to each first position on the side wall is the closest position to the side wall in the inner wall of the groove.
  • the above-mentioned at least two first positions are generally evenly distributed on the side wall to ensure that the movable stage is evenly stressed.
  • the opening of the groove is rectangular, round or other shapes.
  • the opening of the groove is rectangular, at least two side walls of the movable stage are respectively one-to-one with at least two inner walls of the groove through elastic suspension elements
  • the inner wall corresponding to each side wall is the inner wall closest to the side wall among the inner walls of the groove, wherein there may be one or more elastic suspension elements between each side wall and the corresponding inner wall.
  • the four side walls of the movable stage are respectively connected to the four inner walls of the groove in a one-to-one correspondence through an elastic suspension element, and the actuator is configured to drive the movable stage to perform around the optical axis of the mirror group in the groove At least one of rotation and translation in a direction perpendicular to the optical axis of the lens group.
  • the actuator may be an electrostatic actuator (electrostatic actuator), an electromagnetic actuator (electromagnetic actuator), an electrothermal actuator (electrothermal actuator), or a piezoelectric actuator (piezoelectric actuator).
  • the first shake detection structure may be fixedly connected to the movable stage.
  • the first shake detection structure is integrated on an area outside the image acquisition area of the image sensor.
  • the first shake detection structure includes at least one image shake sensor.
  • the first shake detection structure may include four image shake sensors.
  • the frame rate of all image shake sensors is the same, and is greater than the frame rate of the image sensor.
  • the image shake sensor can perform accurate image collection in the photosensitive area before the image sensor, so that the shake direction and amount of shake of the collected image can be predicted. Furthermore, jitter compensation is performed.
  • the area of the photosensitive area may be larger than Or equal to the square of the maximum tracking error of the front-end anti-shake component, so that the amount of jitter of the imaging beam sensed is within the range that can be sensed by the image shake sensor, and the maximum tracking error is that the front-end anti-shake component is After the first shake compensation of the imaging beam, the maximum offset distance difference between the position of the imaging beam and the ideal first shake compensation target position.
  • the pixel density of the photosensitive area of the image shake sensor may be greater than or equal to the pixel density of the image acquisition area of the image sensor, thereby, The image shaking sensor is used to image the received imaging light beam more clearly, thereby improving the accuracy of the shake amount of the sensed image.
  • the back-end anti-shake component further includes: a first controller, which is connected to the first shake detection structure and the image sensor actuation structure, respectively.
  • the first controller is configured to perform a control process of the second shake compensation, that is, to obtain the first shake direction and the first shake amount of the imaging beam detected by the first shake detection structure, and based on the first shake direction and the first shake amount
  • a shake amount determines the first shake compensation direction and the first shake compensation displacement, and controls the image sensor actuation structure based on the first shake compensation direction and the first shake compensation displacement to drive the image sensor to move the first shake compensation displacement in the first shake compensation direction.
  • the back-end anti-shake component further includes: a displacement sensor, the displacement sensor is fixedly connected to the image sensor or fixedly connected at a specified position of the image sensor actuation structure, and the specified position is synchronized with the image sensor in the image sensor actuation structure Moving device.
  • the displacement sensor includes at least one of a linear displacement sensor and an angular displacement sensor.
  • the displacement sensor is configured to send a feedback signal indicating the current displacement of the displacement sensor to the first controller during the movement of the image sensor actuation structure to drive the image sensor.
  • the first controller is configured to control the image sensor actuation structure to drive the image sensor to perform shake compensation again based on the feedback signal.
  • the first controller can determine the displacement of the image sensor based on the feedback signal, and when the displacement of the image sensor is different from the first shake compensation displacement, control the image sensor actuation structure to drive the image sensor to perform shake compensation again, that is, to the image sensor
  • the actuation structure sends a control signal instructing the image sensor actuation structure to drive the image sensor to move a first displacement in the first shake compensation direction, the first displacement being the difference between the first shake compensation displacement and the image sensor displacement, where, when the first When a displacement is a positive value, the absolute value of the first displacement is moved in the first shake compensation direction, and when the first displacement is a negative value, the absolute value of the first displacement is moved in the reverse direction of the first shake compensation direction .
  • the first controller may send a control signal to the image sensor actuation structure to indicate the image when the displacement of the image sensor is the same as the first shake compensation displacement
  • the sensor actuation structure drives the image sensor to move a second displacement along the first shake compensation direction, and the second displacement is zero.
  • the jitter process is a continuous process, in actual implementation, the above-mentioned second jitter compensation control process is continuously and repeatedly executed, and the above-mentioned jitter compensation control process is also continuously and repeatedly executed, which can realize the position of the image sensor Real-time adjustment to ensure the final compensation accuracy.
  • the first controller forms a closed-loop feedback control on the image sensor actuation structure through the displacement sensor, that is, a feedback mechanism for the current displacement of the image sensor actuation structure is established through the displacement sensor, which improves the first
  • the precise control of the current displacement of the image sensor actuation structure by the controller improves the compensation accuracy of the back-end anti-shake component.
  • the camera module further includes: a front-end anti-shake component.
  • the front-end anti-shake component may be provided at multiple locations to perform first shake compensation on the imaging beam.
  • the front-end anti-shake component is connected to the optical folding element.
  • the front-end anti-shake component includes: a folding element actuation structure and a second jitter detection structure, and the folding element actuation structure is fixedly connected to the optical folding element.
  • the second shake detection structure is configured to detect whether the camera module generates shake.
  • the folding element actuation structure is configured to drive the optical folding element to move after the second shake detection structure detects that the camera module generates shake to perform first shake compensation on the imaging beam.
  • the front-end anti-shake component further includes: a third controller, which is connected to the second jitter detection structure and the folding element actuation structure, respectively.
  • the third controller is configured to acquire the third shake direction and the third shake amount of the camera module detected by the second shake detection structure, and determine the third shake compensation direction and the third shake amount based on the third shake direction and the third shake amount
  • Three shake compensation displacement, based on the third shake compensation direction and the third shake compensation displacement control folding element actuation structure drives the optical folding element to move the third shake compensation displacement along the third shake compensation direction.
  • the front-end anti-shake assembly further includes: a first feedback sensor, which is fixedly connected to the optical folding element or the folding element actuation structure.
  • the first feedback sensor may be a Hall sensor or a displacement sensor.
  • the first feedback sensor is configured to send a feedback signal indicating the current displacement of the first feedback sensor to the third controller during the movement of the folding element actuation structure driving the optical folding element.
  • the third controller is configured to determine the displacement of the optical folding element based on the feedback signal.
  • the third controller forms a closed-loop feedback control of the folding element actuation structure through the feedback sensor, that is, the feedback sensor establishes a feedback mechanism for the current displacement of the folding element actuation structure, which improves the third controller
  • the precise control of the current displacement of the actuation structure of the folding element improves the compensation accuracy of the front-end anti-shake component.
  • the front-end anti-shake component is connected to the mirror set.
  • the front-end anti-shake component includes:
  • the mirror group actuation structure and the third shake detection structure is fixedly connected to the mirror group, and the mirror group actuation structure is configured to drive the mirror group to move after the third shake detection structure detects the shake of the camera module To perform shake compensation on the imaging beam.
  • the front-end anti-shake component further includes: a fourth controller, which is connected to the third jitter detection structure and the lens group actuation structure, respectively.
  • the front-end anti-shake component further includes: a second feedback sensor, which is fixedly connected to the mirror group or the mirror group actuation structure.
  • the second feedback sensor may be a Hall sensor or a displacement sensor.
  • the front-end anti-shake component is connected to the optical folding element.
  • the front-end anti-shake component further includes: a mirror group actuation structure and a third shake detection structure, the mirror group actuation structure is fixedly connected to the mirror group,
  • the lens group actuation structure is configured to drive the lens group to move after the third shake detection structure detects the shake of the camera module to perform shake compensation on the imaging beam.
  • the front-end anti-shake component further includes: a third controller and a fourth controller, the third controller is respectively connected to the second jitter detection structure and the folding element actuation structure, and the fourth controller is respectively connected to the The three-shake detection structure is connected with the actuating structure of the lens group.
  • the front-end anti-shake component further includes: a first feedback sensor and a second feedback sensor, and the connection relationship between the first feedback sensor and the second feedback sensor and the front-end anti-shake component can refer to the first and second An optional implementation.
  • the third controller and the fourth controller may be one controller. Assuming that the controller may be the second controller, the camera module further includes:
  • the second controller is connected to the second shake detection structure, the third shake detection structure, the image sensor actuation structure, the lens group actuation structure, and the folding element actuation structure, respectively.
  • the second controller is configured to receive the second shake direction and the second shake amount of the camera module detected by the second shake detection structure and the third shake detection structure, and determine the target shake direction and the amount based on the second shake direction and the second shake amount
  • the target jitter amount controls the movement of the lens group actuation structure and the folding element actuation structure, respectively, so that the total displacement of the lens group and the optical folding element moving in the target jitter direction is the target jitter amount.
  • the second jitter detection structure and the third jitter detection structure are both inertial sensors, and the folding element actuation structure and the mirror group actuation structure may be VCM, SMA motor or MEMS actuator.
  • the camera module further includes: a housing with a cavity, the optical folding element, the lens set, the image sensor, the front-end anti-shake component and the rear-end anti-shake component are fixedly disposed in the housing, and one end of the housing is provided with Light entrance opening, the light entrance opening for the imaging beam to enter.
  • a terminal in a second aspect, includes:
  • At least one camera module includes memory, processor and data transmission component.
  • the memory is configured to store programs or instructions
  • the processor is configured to implement various functions by running programs stored in the memory or executing instructions stored in the memory;
  • the data transmission component is configured to transmit data.
  • the data transmission component may be a receiver and a transmitter;
  • the at least one camera module includes any camera module of the first aspect.
  • an anti-shake component includes:
  • the image sensor actuation structure and the first shake detection structure are fixedly connected to the image sensor.
  • the image sensor has an image acquisition area, and the image sensor is configured to collect the received imaging beam through the image acquisition area.
  • the first shake detection structure has a photosensitive area, and the first shake detection structure is disposed around an image acquisition area of the image sensor.
  • the first shake detection structure is configured to collect the received imaging beam through the photosensitive area and detect the imaging beam collected by the photosensitive area Whether there is jitter.
  • the image sensor actuation structure is configured to drive the image sensor to move after the first shake detection structure detects that the imaging light beam collected by the photosensitive region is shaken to perform second shake compensation on the imaging light beam.
  • the image sensor actuation structure includes a microelectromechanical system MEMS actuator
  • the first shake detection structure includes at least one image shake sensor
  • the camera module, the anti-shake component and the terminal provided by the embodiments of the present application, because the front-end anti-shake component and the back-end anti-shake component can perform the first and second shake compensations on the imaging beam, respectively, through the The cooperation between the first shake compensation and the second shake compensation improves the final shake compensation accuracy of the imaging beam compared to the traditional case where only one shake compensation is performed.
  • FIG. 1 is a schematic diagram of an implementation environment of a camera module provided by this application.
  • FIG. 2 is a schematic structural diagram of a camera module provided by this application.
  • FIG. 3 is a schematic structural diagram of a back-end anti-shake component provided by this application.
  • FIG. 4 is a schematic diagram of an actuating structure of an image sensor provided by this application.
  • FIG. 5 is a schematic structural diagram of a back-end anti-shake component provided by this application.
  • FIG. 6 is a schematic structural diagram of a back-end anti-shake component provided by this application.
  • FIG. 7 is a schematic diagram of control logic involved in a second jitter compensation process of a back-end anti-shake component provided by this application;
  • FIG. 8 is a schematic structural diagram of a back-end anti-shake component provided by this application.
  • FIG. 9 is a schematic diagram of control logic involved in a second jitter compensation process of a back-end anti-shake component provided by this application.
  • FIG. 10 is a schematic structural diagram of a front-end anti-shake component provided by this application.
  • FIG. 11 is a schematic diagram of control logic involved in a camera module for jitter compensation process provided by this application.
  • FIG. 12 is a schematic diagram of control logic involved in a camera module for jitter compensation process provided by this application.
  • FIG. 13 is a schematic structural diagram of a front-end anti-shake component provided by this application.
  • FIG. 14 is a schematic diagram of control logic involved in a camera module for a process of jitter compensation provided by this application;
  • 15 is a schematic diagram of control logic involved in a camera module for a process of jitter compensation provided by this application;
  • 16 is a schematic structural diagram of a front-end anti-shake component provided by this application.
  • FIG. 17 is a schematic diagram of control logic involved in a camera module for jitter compensation process provided by this application.
  • 18 is a schematic diagram of control logic involved in a camera module for a process of jitter compensation provided by this application;
  • FIG. 19 is a schematic structural diagram of a camera module provided by this application.
  • FIG. 20 is a schematic structural diagram of a terminal provided in this application.
  • FIG. 1 is a schematic diagram of an implementation environment of a camera module provided by an embodiment of the present application.
  • the camera module may be applied to a terminal, such as a mobile phone, a notebook, a tablet computer, a driving recorder, a camera, or a monitoring device.
  • the terminal may include a rear case and a front cover, and a midplane located between the rear case and the front cover, and the camera module may be electrically connected to the midplane.
  • the camera module Based on the position of the camera module in the terminal, the camera module can be divided into a front camera module and a rear camera module.
  • the front camera module can be placed in the front of the terminal, such as the front cover and the middle plate
  • the front cover can be provided with a lens opening, and the light entrance opening of the front camera module (that is, the opening into which light enters) faces the lens opening;
  • the rear camera module can be set at the rear of the terminal, such as Between the rear case and the middle plate, a lens opening may also be provided on the rear case, and the light entrance opening of the rear camera module faces the lens opening.
  • FIG. 1 is a schematic structural diagram of a rear case of a terminal provided in an exemplary embodiment of the present application.
  • the rear case 1 may be provided with a fixing groove 11 for fixing. Camera module.
  • the periscope camera module is a camera module that can adjust the focal length through the floating of the lens group inside the terminal, and it can realize optical zoom without protruding the terminal body.
  • the periscope camera module usually includes an optical folding element, a lens group, an image sensor, a housing, and a light entrance opening on the housing.
  • the structure of this periscope camera module has little effect on image quality, and The terminal can be made thinner and lighter.
  • the periscope camera module does not need to protrude from the terminal body, it also avoids the situation that the protruding part of the camera module is easily damaged due to accidents during shooting. Therefore, the periscope camera module can be applied to Various terminals.
  • the camera module When the periscope camera module has an anti-shake function, the camera module includes: an optical folding element, an actuating structure, an inertial element, a mirror group, and an image sensor arranged in this order.
  • the optical folding element is connected to the actuating structure.
  • the inertial element detects shaking
  • the optical folding element can perform the imaging beam jitter compensation under the actuation of the actuating structure.
  • the resulting jitter compensation accuracy for the imaging beam is low.
  • a camera module provided by an embodiment of the present application may be a periscope camera module.
  • the structure of the camera module can solve the above-mentioned problems.
  • FIG. 2 is a camera module provided by an embodiment of the present application.
  • a schematic diagram of the structure, the camera module 10 includes: an optical folding element 101, a mirror group 102 and an image sensor 103 that are sequentially arranged along the imaging beam transmission direction.
  • the imaging beam refers to a beam formed by light incident on the camera module.
  • the optical folding element 101 is configured to fold and transmit the optical path of the received imaging beam to the mirror group 102.
  • Optical path folding is also called optical path turning, which refers to changing the transmission path of light.
  • the optical folding element 101 may be a reflective element such as a prism or a mirror.
  • the mirror group 102 may include one or more lenses configured to transmit the received imaging beam to the image sensor 103, and the mirror group 102 may also perform certain processing on the received imaging beam, such as correcting aberrations, eliminating Color difference processing.
  • the image sensor 103 has an image collection area, and the image sensor 103 is configured to collect the received imaging light beam through the image collection area (also called a photosensitive area or a photosensitive surface).
  • the image sensor is a device with photoelectric conversion function, which can convert the optical signal of the imaging beam collected on the image acquisition area into an electric signal in a proportional relationship with the optical signal.
  • the image sensor can be a charge coupled device (charged coupled device) CCD image sensor composed of device, CCD) or CMOS image sensor composed of complementary metal oxide semiconductor (complementary metal oxide semiconductor, CMOS).
  • the camera module 10 further includes: a front-end anti-shake component 104 and a rear-end anti-shake component 105, the front-end anti-shake component 104 is connected to at least one of the optical folding element 101 and the mirror group 102, and the front end is schematically drawn in FIG. 2 The case where the anti-shake component 104 is connected to the optical folding element 101.
  • the back-end anti-shake component 105 is connected to the image sensor 103, the front-end anti-shake component 104 is configured to perform first shake compensation on the imaging beam, and the back-end anti-shake component 105 is configured to perform second shake compensation on the imaging beam, that is, The front-end anti-shake component 104 and the back-end anti-shake component 105 perform a total of two shake compensations on the imaging beam.
  • the front end and the rear end are defined based on the position of the anti-shake component, and the front-end anti-shake component is closer to the entrance of the imaging beam (that is, the aforementioned light entrance opening) than the rear anti-shake component.
  • the compensation accuracy of the second shake compensation is greater than the compensation accuracy of the first shake compensation, where the compensation accuracy is used to reflect the position of the imaging beam after the shake compensation of the imaging beam and the target position of the ideal shake compensation Closeness.
  • the compensation accuracy may be characterized by the distance difference between the position of the imaging beam and the ideal target position of the shake compensation after the image stabilization component performs shake compensation on the imaging beam.
  • the accuracy of the second jitter compensation is greater than the accuracy of the first jitter compensation.
  • the level of compensation accuracy of the second jitter compensation may be sub-pixel level, and the compensation accuracy of the second jitter compensation may be 0.1 ⁇ m, or It is 0.01 micron, the level of compensation accuracy of the first jitter compensation may be a pixel level, and the compensation accuracy of the first jitter compensation may be 1 micron.
  • the front-end anti-shake component and the back-end anti-shake component can perform the first and second shake compensations on the imaging beam, respectively, the first shake compensation and the second shake compensation.
  • the cooperation of the two shake compensations reduces the limitation of the motion accuracy of the optical folding element to the shake compensation of the camera module compared with the traditional case of only one shake compensation, and improves the final shake compensation accuracy of the imaging beam.
  • FIG. 3 is a schematic structural diagram of a back-end anti-shake component provided by an embodiment of the present application.
  • the back-end anti-shake component 105 includes an image sensor actuation structure 1051 and a first jitter detection structure 1052.
  • the image sensor actuation structure 1051 is fixedly connected to the image sensor 103.
  • the first shake detection structure 1052 has a photosensitive area, which is an area for acquiring an image, and can also be considered as an imaging area.
  • the first shake detection structure 1052 is disposed around the image acquisition area of the image sensor 103, and the first shake detection The structure 1052 is configured to collect the received imaging beam through its photosensitive area, and detect whether the imaging beam collected by the photosensitive area generates jitter.
  • the image sensor actuation structure 1051 is configured to drive the image sensor 103 to move after the first shake detection structure 1052 detects that the imaging light beam collected by the photosensitive region is shaken to perform second shake compensation on the imaging light beam.
  • the first jitter detection structure Since the first jitter detection structure has a photosensitive area and the image sensor has an image acquisition area, both are image acquisition devices, and the higher the frame rate of the image acquisition device, the faster the image acquisition speed. Among them, the first jitter detection structure The image acquisition speed of the structure should be greater than the image sensor's image acquisition speed, so that the first jitter detection structure can perform image acquisition in the photosensitive area before the image sensor, so as to achieve corresponding jitter on the imaging beam collected by the image sensor make up. Therefore, the frame rate of the first shake detection structure is greater than the frame rate of the image sensor. For example, the frame rate of the first shake detection structure may be 10 times the frame rate of the image sensor.
  • the camera module provided by the embodiment of the present application has an internal coordinate system (also referred to as internal reference coordinate system), please refer to FIGS. 2 to 4, 6, 8, 10, 13, and 16. 19, the internal coordinate system is a three-dimensional coordinate system, which takes the center of the image sensor as the origin, the internal coordinate system includes: a z-axis parallel to the optical axis L of the mirror group, perpendicular to the z-axis and the height of the mirror group The x axis parallel to the direction and the y axis perpendicular to the z axis and perpendicular to the height direction of the mirror group.
  • rotating around the z-axis is called rolling, also called moving around the roll axis
  • rotating around the x-axis is called pitch, also called moving around the pitch axis
  • rotating around the y-axis is called yaw.
  • movement around the yaw axis is also known as movement around the yaw axis.
  • the embodiments of the present application describe the principle of camera module shake compensation based on the above internal coordinate system.
  • the anti-shake component is based on the optical device to which it is connected (for example, for the front-end anti-shake component, the The optical device is an optical folding element and/or mirror group.
  • the optical device is an image sensor).
  • the direction of the imaging beam received by the imaging device is controlled.
  • the optical device is controlled to move along the direction of the shaking so that the imaging beam The jitter in the direction of the jitter is compensated.
  • the anti-shake component connected to the optical device controls it to move in the positive direction of the x-axis;
  • the jitter direction of the imaging beam received by the optical device is the yaw axis In the clockwise direction, since the movement of the optical device in the positive x-axis direction has the same compensation effect on the imaging beam as the optical device yaw axis rotates clockwise, the anti-shake component connected to the optical device can The optical device is controlled to move in the positive direction of the x-axis to perform equivalent compensation for the jitter.
  • the anti-shake component can control the optical device to move in the negative direction of the y axis to equivalently compensate for the jitter; when the imaging received by the optical device When the jitter direction of the beam is the clockwise direction of the pitch axis, the anti-shake component can control it to move in the positive direction of the y axis to equivalently compensate for the jitter; when the jitter direction of the imaging beam received by the optical device is the counterclockwise direction of the pitch axis , The anti-shake component can control its movement in the negative direction of the y-axis to equivalently compensate for the jitter.
  • the image sensor actuating structure 1051 drives the image sensor 103 to move in various directions, for example, the direction may be the x-axis direction, the y-axis direction, and the yaw axis of the internal coordinate system of the camera module direction.
  • the image sensor actuation structure 1051 can be implemented by a micro-electromechanical system (MEMS) actuator technology, or by a voice coil motor (VCM) technology, or by Shape memory alloy (SMA) motor technology is realized.
  • MEMS micro-electromechanical system
  • VCM voice coil motor
  • SMA Shape memory alloy
  • the image sensor actuation structure is a MEMS actuator, it can control the movement of the image sensor to compare the imaging beam High-precision jitter compensation.
  • FIG. 4 is a schematic diagram of an image sensor actuation structure provided by an embodiment of the present application. Please refer to FIG. 4.
  • the image sensor actuation structure 1051 includes a movable stage 10511, a base 10512, an elastic suspension element 10513, and an actuation member ( (Not shown in the figure).
  • the base 10512 is fixedly arranged, for example, when the camera module includes a housing, the base 10512 may be fixedly arranged on the housing, or the base may be fixedly arranged on a certain structure of the terminal where it is located (such as a midplane) on.
  • the movable stage 10511 and the base 10512 are connected by an elastic suspension element 10513, and the movable stage 10511 and the actuator are fixedly connected.
  • the elastic suspension element 10513 may be a cantilever beam structure with a certain elasticity or the like.
  • the movable stage 10511 is used to carry the image sensor 103 and the first shake detection structure 1052.
  • the actuator is configured to drive the movable stage 10511 to move relative to the base 10512.
  • the base 10512 is a casing with a groove
  • the movable stage 10511 is a rectangular plate-like structure, and is disposed in the groove
  • at least two first positions in the side wall of the movable stage 10511 pass respectively
  • the elastic suspension element 10513 is connected to at least two second positions of the inner wall of the groove in one-to-one correspondence, and the second position on the inner wall corresponding to each first position on the side wall is the closest position to the side wall in the inner wall of the groove .
  • the above-mentioned at least two first positions are generally evenly distributed on the side wall to ensure that the movable stage is evenly stressed.
  • the opening of the groove is rectangular, circular, or other shapes.
  • the opening of the groove is rectangular, at least two side walls of the movable stage 10511 pass through the elastic suspension element 10513 and at least two inner walls of the groove Connected one-to-one, the inner wall corresponding to each side wall is the inner wall closest to the side wall among the inner walls of the groove, wherein there may be one or more elastic suspension elements between each side wall and the corresponding inner wall.
  • the four side walls of the movable stage 10511 in FIG. 4 are respectively connected to the four inner walls of the groove in a one-to-one correspondence through the elastic suspension elements 10513, so as to avoid excessive vibration of the movable stage and thereby avoid overcompensation.
  • the actuator is configured to drive the movable stage 10511 to perform rotation around the optical axis of the lens group (that is, angular displacement) and translation in a direction perpendicular to the optical axis of the lens group (that is, to perform linear displacement) within the groove. At least one action. Please refer to FIG.
  • rotation around the optical axis of the mirror group refers to rotation around the z axis of the internal coordinate system, that is, movement around the roll axis; translation in a direction perpendicular to the optical axis of the mirror group refers to The x-axis translation of the internal coordinate system, or the y-axis translation.
  • the actuator may be an electrostatic actuator, an electromagnetic actuator, an electrothermal actuator, a piezoelectric actuator, or the like.
  • the actuating member can drive the movable stage to move in the groove by adjusting the loaded electrostatic force.
  • the actuating member is an electromagnetic actuating member
  • the actuating member can drive the movable stage to move in the groove by adjusting the positive and negative magnetic properties.
  • the actuating member is an electrothermal actuating member
  • the actuating member can control the driving movable stage to perform a motion in the groove by adjusting the temperature.
  • the actuating member is a piezoelectric actuating member
  • the actuating member can drive the movable stage to move in the groove by adjusting the strength of the applied electric field.
  • the first jitter detection structure 1052 may be fixedly connected to the movable stage; in another implementable manner, as shown in FIG. 5, the first jitter detection structure
  • the structure 1052 can also be integrated in an area other than the image acquisition area of the image sensor 103.
  • the first shake detection structure does not need to be separately installed, which can simplify the overall camera module Installation process;
  • part of the first shake detection structure 1052 is fixedly connected to the movable stage, and the other part is integrated in an area outside the image acquisition area of the image sensor 103.
  • the first shake detection structure includes at least one image shake sensor.
  • the image shake sensor may be a high frame rate image sensor (that is, its frame rate is greater than a specified frame rate).
  • the first shake detection structure may include four image shake sensors.
  • the frame rate of all image shake sensors is the same and is greater than the frame rate of the image sensor, so that when the imaging beam is transmitted from the mirror group to the back-end anti-shake component, the image shake sensor can precede this
  • the image sensor performs accurate image acquisition in the photosensitive area, so that the shaking direction and amount of shaking of the collected image can be predicted, and then the shaking compensation is performed.
  • a tracking error occurs, which is the distance between the position of the imaging beam and the ideal first shake compensation target position after the anti-shake component performs shake compensation on the imaging beam difference.
  • the area of the photosensitive area may be greater than or equal to the square of the maximum tracking error of the front-end anti-shake component.
  • the amount of jitter of the imaging beam is within the range that can be sensed by the image shaking sensor, and the maximum tracking error is the position of the imaging beam after the first front-end anti-shake component performs the first jitter compensation on the imaging beam.
  • the maximum tracking error is obtained in advance through experiment or simulation software simulation.
  • the pixel density of the photosensitive area of the image shake sensor may be greater than or equal to the pixel density of the image acquisition area of the image sensor, thereby, Make the image shake sensor image the received imaging beam more clearly, that is, the image shake sensor can image the received imaging beam more accurately than the image sensor can image the received imaging beam Accuracy, which in turn improves the accuracy of sensing the amount of shake in the image.
  • the back-end anti-shake component 105 further includes: a first controller 1053, a first The controller 1053 is connected to the first shake detection structure 1052 and the image sensor actuation structure 1051, respectively.
  • the first controller 1053 is configured to perform a control process of the second shake compensation, that is, to obtain the first shake direction and the first shake amount of the imaging beam detected by the first shake detection structure 1052, and based on the first shake direction Determine the first shake compensation direction and the first shake compensation displacement with the first shake amount, and control the image sensor actuation structure 1051 based on the first shake compensation direction and the first shake compensation displacement to drive the image sensor 103 to move the first along the first shake compensation direction Jitter compensation displacement.
  • FIG. 7 shows a schematic diagram of control logic involved in the second jitter compensation process performed by the back-end anti-shake component shown in FIG. 6.
  • the first shake detection structure 1052 detects the first shake direction and the first shake amount of the imaging beam through the imaging beam collected by the photosensitive area, and the first controller 1053 obtains the first
  • a shake detection structure detects the first shake direction and the first shake amount of 1052, and determines the first shake compensation direction and the first shake compensation displacement according to the first shake direction and the first shake amount, thereby controlling the image sensor actuation structure 1051 drives the image sensor to move the first shake compensation displacement in the first shake compensation direction.
  • the first shake compensation direction may include at least one direction in the internal coordinate system, and the first shake compensation displacement includes a compensation displacement corresponding to the at least one direction one by one, which may be a linear displacement or an angular displacement.
  • the first shake compensation direction may be the x-axis direction and the roll axis direction of the internal coordinate system.
  • the first shake compensation displacement is a straight line with a length of m (0 ⁇ m ⁇ 1) microns in the x-axis direction Displacement, the angle displacement with the roll axis direction is n (0 ⁇ n ⁇ 1) degree.
  • the back-end anti-shake component 105 further includes:
  • Displacement sensor 1054 displacement sensor 1054 is fixedly connected to an image sensor (not shown in the figure), or fixedly connected at a specified position of the image sensor actuating structure 1051, which is the image sensor actuating structure 1051 synchronized with the image sensor Moving device.
  • the image sensor actuation structure is the structure shown in FIG. 8
  • the designated position is at the movable stage of the image sensor actuation structure, that is, the displacement sensor and the image sensor actuation structure are movable
  • the stage is fixedly connected.
  • the displacement sensor 1054 is configured to send a feedback signal indicating the current displacement of the displacement sensor to the first controller 1053 during the movement of the image sensor actuation structure 1051 to drive the image sensor.
  • the displacement sensor 1054 includes at least one of a linear displacement sensor and an angular displacement sensor.
  • the linear displacement sensor is configured to send a feedback signal indicating the current linear displacement to the first controller during the process of the image sensor actuation structure driving the image sensor;
  • the angular displacement sensor is configured to drive the image sensor in the image sensor actuation structure During the movement, a feedback signal indicating the current angular displacement is sent to the first controller.
  • the first controller 1053 is configured to control the image sensor actuation structure 1051 to drive the image sensor to perform shake compensation again based on the feedback signal.
  • the first controller 1053 can determine the displacement of the image sensor based on the feedback signal.
  • the image sensor actuation structure 1051 is driven to drive the image sensor to perform shake compensation again, that is, to The image sensor actuation structure 1051 sends a control signal instructing the image sensor actuation structure 1051 to drive the image sensor to move a first displacement in the first shake compensation direction, the first displacement being the difference between the first shake compensation displacement and the image sensor displacement,
  • the first displacement is a positive value
  • the absolute value of the first displacement is moved along the first shake compensation direction
  • the first displacement is a negative value
  • the first displacement is moved in the reverse direction of the first shake compensation direction The absolute value of the displacement.
  • the first controller 1053 may send a control signal to the image sensor actuation structure 1051 when the displacement of the image sensor is the same as the first shake compensation displacement, The image sensor actuation structure 1051 is instructed to drive the image sensor to move a second displacement in the first shake compensation direction, and the second displacement is 0.
  • the jitter process is a continuous process, in actual implementation, the above-mentioned second jitter compensation control process is continuously and repeatedly executed, and the above-mentioned jitter compensation control process is also continuously and repeatedly executed, which can realize the position of the image sensor Real-time adjustment to ensure the final compensation accuracy.
  • the first controller forms a closed-loop feedback control on the image sensor actuation structure through the displacement sensor, that is, a feedback mechanism for the current displacement of the image sensor actuation structure is established through the displacement sensor, which improves the first
  • the precise control of the current displacement of the image sensor actuation structure by the controller improves the compensation accuracy of the back-end anti-shake component.
  • FIG. 9 shows a schematic diagram of control logic involved in the second jitter compensation process performed by the back-end anti-shake component shown in FIG. 8.
  • the first controller 1053 controls the image sensor actuation structure 1051 to drive the image sensor to move in the first shake compensation direction.
  • the process of the first shake compensation displacement can refer to FIG. 7, and the working process of the displacement sensor 1054 shown in FIG. 9 can be:
  • the displacement sensor 1054 sends a feedback signal indicating the current displacement of the displacement sensor to the first controller 1053 in real time.
  • the first controller 1053 is based on The feedback signal determines the displacement of the image sensor.
  • the image sensor actuation structure 1051 is controlled to drive the image sensor to perform the shake compensation again, that is, to the image sensor actuation structure 1051.
  • the control signal instructs the image sensor actuation structure 1051 to drive the image sensor to move the first displacement in the first shake compensation direction.
  • the first controller 1053 may send a control signal to the image sensor actuating structure 1051 to instruct the image sensor actuating structure 1051 to drive the image sensor Move the second displacement along the first shake compensation direction, the second displacement is 0;
  • the displacement sensor 1054 may acquire the aforementioned first shake compensation displacement.
  • the displacement sensor 1054 drives the image sensor to move the first shake compensation displacement in the first shake compensation direction
  • the displacement sensor 1054 sends a feedback signal indicating the first shake compensation displacement to the first controller 1053, and then the first controller 1053 determines the displacement of the image sensor when receiving the feedback signal, and continues to perform the back-end prevention shown in FIG. 7 above
  • the jitter component performs the control logic involved in the second jitter compensation process.
  • the first controller 1053 may send a control signal to the image sensor actuation structure 1051 to instruct the image sensor actuation structure 1051 to drive the image sensor to move a second displacement in the first shake compensation direction, the second The displacement is 0.
  • the first controller controls the image sensor actuation structure to perform multi-dimensional movements, and then controls the image sensor to perform multi-dimensional movements, so as to realize the second shake compensation of the imaging beam.
  • the second shake compensation process includes: as shown in FIG. 8, when the shake direction of the imaging beam is in the yaw axis direction, the first controller controls the image sensor actuation structure to drive the image sensor to move in the x-axis direction; When the jitter direction is the x-axis direction, the image sensor actuation structure moves along the x-axis direction; when the imaging beam's jitter direction is the pitch axis direction, the image sensor actuation structure moves along the y-axis direction; when the imaging beam's jitter direction is y In the axial direction, the image sensor actuation structure moves along the y-axis direction; when the imaging beam's jitter direction is the roll axis direction, the image sensor actuation structure drives the image sensor to move around the roll axis direction.
  • the back-end anti-shake component includes: an image shake sensor and a first control Actuator, MEMS actuator and displacement sensor.
  • the displacement sensor is separately provided in the rear anti-shake component.
  • the control logic involved in the back-end anti-shake component's jitter compensation process is:
  • the image shake sensor detects the first shake direction and first shake amount of the imaging beam through the imaging beam collected by the photosensitive area, and the first controller performs the second shake compensation Control process, the first controller acquires the first shake direction and the first shake amount detected by the image shake sensor, and determines the first shake compensation direction and the first shake according to the first shake direction and the first shake amount Compensating the displacement, and then controlling the MEMS actuator to drive the image sensor to move the first shake compensation displacement in the first shake compensation direction.
  • the displacement sensor sends a feedback signal indicating the current displacement of the displacement sensor to the first controller in real time, and the first controller determines the displacement of the image sensor based on the feedback signal.
  • the MEMS actuator When it is different from the first shake compensation displacement, the MEMS actuator is controlled to drive the image sensor to perform shake compensation again, that is, a control signal is sent to the MEMS actuator to instruct the MEMS actuator to drive the image sensor to move the first displacement in the first shake compensation direction.
  • a control signal is sent to the MEMS actuator to instruct the MEMS actuator to drive the image sensor to move the first displacement in the first shake compensation direction.
  • the control process of performing the second shake compensation by the first controller is continued.
  • the first controller may send a control signal to the MEMS actuator to instruct the MEMS actuator to drive the image sensor along the first shake compensation direction Move the second displacement, and the second displacement is 0 to realize the real-time adjustment of the position of the image sensor by the first controller.
  • the displacement sensor can be integrated into the MEMS actuator, then the control logic involved in the second jitter compensation process of the back-end anti-shake component can refer to the first optional implementation above
  • the control logic involved in the second jitter compensation process performed by the back-end anti-shake component is not limited in the embodiment of the present application.
  • the displacement sensor is a linear displacement sensor
  • the image shake sensor detects a linear displacement of the imaging beam with a length of w microns in the positive x-axis direction
  • the first controller obtains the The image shake sensor detects the direction and length of the linear displacement of the imaging beam, and determines that the first shake compensation direction is the positive x-axis direction based on the image shake sensor detection, and the first shake compensation displacement is the length in the positive x-axis direction It is linear displacement of u micron, and then controls the MEMS actuator to drive the image sensor to move u microns in the positive direction of the x-axis.
  • the linear displacement sensor sends an instruction to the first controller in real time.
  • the feedback signal of the current displacement Based on the feedback signal, the first controller determines that the image sensor moves q micrometers in the positive x-axis direction. When q ⁇ u, it controls the MEMS actuator to drive the image sensor to perform shake compensation again, that is, to the MEMS.
  • the actuator sends a control signal instructing the MEMS actuator to drive the image sensor to move p microns in the positive x-axis direction.
  • the MEMS actuator drives the image sensor to move in the positive x-axis direction
  • the MEMS actuator drives the image sensor to move in the negative x-axis direction
  • the control process of the first controller performing the second jitter compensation is continued.
  • the first controller may send a control signal to the MEMS actuator, instructing the MEMS actuator to drive the image sensor to move 0 microns in the positive direction of the x-axis, so as to realize the real-time adjustment of the position of the image sensor by the first controller .
  • the numerical precision of w, u, q and p can all be 0.1, 0.01 or 0.001.
  • the MEMS actuator may be an in-plane translational MEMS actuator.
  • the in-plane translational MEMS actuator means that the MEMS actuator only drives the connected device (that is, the above-mentioned image sensor) on a certain plane. Inward movement, when the MEMS actuator is an in-plane translational MEMS actuator, the connected device can be driven to move linearly in the x-axis and y-axis directions and/or move around the roll axis.
  • the image shake sensor can directly detect the shake direction and the shake amount of the image, the shake amount and shake direction are compared with the shake direction and the shake direction of the camera module detected by the inertial element The amount of jitter is more accurate, therefore, the jitter compensation triggered by the image shake sensor is more accurate.
  • the camera module further includes: a front-end anti-shake component.
  • the front-end anti-shake component may be provided at multiple locations to perform first shake compensation on the imaging beam. In the embodiments of the present application, the following three locations of the front-end anti-shake component are used as an example for description.
  • the front-end anti-shake assembly 104 may be connected to the optical folding element 101.
  • the front-end anti-shake assembly 104 includes: a folding element actuation structure 1041 and a second shake detection Structure 1042.
  • the folding element actuation structure 1041 is fixedly connected to the optical folding element 101, and the second shake detection structure 1042 is fixedly arranged, for example, when the camera module includes a housing, the second shake detection structure 1042 can be fixedly arranged on the housing Or, the substrate may be fixedly arranged on a certain structure (such as a midplane) of the terminal where it is located.
  • the second jitter detection structure 1042 is configured to detect whether the camera module generates jitter.
  • the second jitter detection structure 1042 may be an inertial element, such as a gyroscope or an accelerometer.
  • the folding element actuation structure 1041 is configured to drive the optical folding element 101 to move after the second shake detection structure 1042 detects that the camera module 10 generates shake to perform first shake compensation on the imaging beam.
  • the folding element actuating structure 1041 can drive the optical folding element 101 in multiple directions, for example, the direction can be the pitch axis direction and the yaw axis direction of the internal coordinate system of the camera module.
  • the folding element actuation structure 1041 may be implemented by MEMS actuator technology, VCM technology, or SMA motor technology.
  • the front-end anti-shake component 104 further includes: a third controller 1043, which is connected to the second jitter detection structure 1042 and the folding element actuation structure 1041, respectively.
  • the third controller 1043 is configured to perform the control process of the first shake compensation, that is, to obtain the third shake direction and the third shake amount of the camera module 10 detected by the second shake detection structure 1042, and based on the The three shake directions and the third shake amount determine the third shake compensation direction and the third shake compensation displacement, and control the folding element actuation structure 1041 based on the third shake compensation direction and the third shake compensation displacement to drive the optical folding element 101 along the third shake compensation Move in the third direction to compensate for displacement.
  • FIG. 11 shows a schematic diagram of the control logic involved in the camera module as shown in FIG. 10 for the process of jitter compensation, that is, the front-end anti-shake component cooperates with the back-end anti-shake component to perform the image beam compensation process Schematic diagram of the control logic involved.
  • the second shake detection structure 1042 detects the third shake direction and the third shake amount of the camera module, and the third controller 1043 obtains the second shake detection structure 1042 Detecting the third shaking direction and the third shaking amount, and determining the third shaking compensation direction and the third shaking compensation displacement according to the third shaking direction and the third shaking amount, and then controlling the folding element actuation structure 1041 to drive the optical folding element along Move the third shake compensation displacement in the third shake compensation direction to complete the first shake compensation of the imaging beam by the front-end anti-shake component.
  • the back-end anti-shake component images the first shake-compensated image of the front-end anti-shake component
  • the beam performs second jitter compensation.
  • the third shake compensation direction may include at least one direction in the internal coordinate system, and the third shake compensation displacement includes a compensation displacement corresponding to the at least one direction one-to-one, which may be a linear displacement or an angular displacement.
  • the front-end anti-shake assembly further includes: a first feedback sensor, which is fixedly connected to the optical folding element or the folding element actuation structure.
  • the first feedback sensor may be a Hall sensor or a displacement sensor.
  • the first feedback sensor is configured to send a feedback signal indicating the current displacement of the first feedback sensor to the third controller during the movement of the folding element actuation structure driving the optical folding element.
  • the third controller is configured to control the folding element actuation structure to drive the optical folding element to shake compensation again based on the feedback signal.
  • the third controller can determine the displacement of the optical folding element based on the feedback signal, and when the displacement of the optical folding element is different from the third shake compensation displacement, control the folding element actuation structure to drive the optical folding element to perform the shake compensation again, that is Send a control signal to the actuating structure of the folding element to instruct the actuating structure of the folding element to drive the optical folding element to move a third displacement along the third shake compensation direction, the third displacement being the difference between the third shake compensation displacement and the displacement of the optical folding element
  • the third displacement is a positive value
  • the absolute value of the third displacement is moved along the third shake compensation direction
  • the third displacement is a negative value
  • the first displacement is moved along the reverse direction of the third shake compensation direction
  • the absolute value of the three displacements when the third displacement is a positive value, the absolute value of the third displacement is moved along the third shake compensation direction, and when the third displacement is a negative value, the first displacement is moved along the reverse direction of the third shake compensation direction The absolute value of the three displacements.
  • the third controller may send a control signal to the actuation structure of the folding element when the displacement of the optical folding element is the same as the third jitter compensation displacement.
  • the folding element actuation structure drives the optical folding element to move a fourth displacement along the third shake compensation direction, the fourth displacement being zero.
  • the jitter process is a continuous process, in actual implementation, the above first jitter compensation control process is continuously and repeatedly executed, and the above-mentioned jitter compensation control process is also continuously and repeatedly executed, which can realize the optical folding element
  • the real-time adjustment of the position guarantees the final compensation accuracy.
  • the third controller forms a closed-loop feedback control of the folding element actuation structure through the feedback sensor, that is, the feedback sensor establishes a feedback mechanism for the current displacement of the folding element actuation structure, which improves the third controller
  • the precise control of the current displacement of the actuation structure of the folding element improves the compensation accuracy of the front-end anti-shake component.
  • the first feedback sensor may be integrated on the actuating structure of the folding element.
  • FIG. 12 shows a schematic diagram of control logic involved in the process of performing shake compensation by the camera module when the camera module shown in FIG. 10 includes the first feedback sensor.
  • the third controller 1043 controls the folding element actuation structure 1041 to drive the optical folding element to move along the third shake compensation direction.
  • the process of the third shake compensation displacement can refer to FIG. 11, wherein the working process of the first feedback sensor can refer to FIG. 9 above.
  • the working process of the displacement sensor shown in the embodiment of the present application will not be repeated here.
  • the front-end anti-shake component completes the first shake compensation for the imaging beam
  • the back-end anti-shake component The shake component performs second shake compensation on the imaging beam after the first shake compensation of the front-end anti-shake component.
  • the second jitter detection structure is a gyroscope
  • the first feedback sensor is a Hall sensor
  • the folding element actuation structure is VCM
  • the working process of the Hall sensor is shown in FIG. 9 for the displacement sensor.
  • the working process involved in an optional implementation is described as an example.
  • the control logic involved in the camera module's jitter compensation process includes:
  • the gyroscope detects the third shake direction and the third shake amount of the camera module, and the third controller obtains the third shake direction and the third shake direction detected by the gyroscope The amount of shake, and determine the third shake compensation direction and the third shake compensation displacement according to the third shake direction and the third shake quantity, and then control the VCM to drive the optical folding element to move the third shake compensation displacement in the third shake compensation direction.
  • the Hall sensor sends a feedback signal indicating the current displacement of the Hall sensor to the third controller in real time. Based on the feedback signal, the third controller determines the displacement of the optical folding element.
  • the folding element actuation structure is controlled to drive the optical folding element to perform the shake compensation again, that is, a control signal is sent to the folding element actuation structure to instruct the folding element actuation structure to drive the optical folding element
  • the third displacement is moved in the third shake compensation direction.
  • the third controller may send a control signal to the folding element actuating structure to instruct the folding element actuating structure to drive the optical folding element along
  • the third shake compensation direction moves a fourth displacement, which is 0.
  • the third controller controls the folding element actuation structure to perform multi-dimensional movement, and then controls the optical path folding element to perform multi-dimensional movement, thereby achieving first jitter compensation for the imaging beam .
  • the first shake compensation process includes, as shown in FIG. 10, when the shake direction of the imaging beam is in the yaw axis and/or the x axis direction, the third controller controls the folding element actuation structure to drive the optical folding element along the yaw axis Directional movement; when the jitter direction of the imaging beam is the pitch axis and/or y axis direction, the image sensor actuation structure moves along the pitch axis direction.
  • the front-end anti-shake component 104 may be connected to the mirror group 102.
  • the front-end anti-shake component 104 includes: a mirror group actuation structure 1044 and a third jitter detection structure 1045 .
  • the lens group actuating structure 1044 is fixedly connected to the lens group 102.
  • the third shake detection structure 1045 is fixedly arranged.
  • the third shake detection structure 1045 may be fixedly arranged on the casing, or the substrate may be fixedly arranged on a certain terminal of the terminal On the structure (such as the middle plate).
  • the mirror group actuating structure 1044 is configured to drive the mirror group 102 to move after the third shake detection structure 1045 detects the shake of the camera module 10 to compensate for the shake of the imaging beam.
  • the mirror group actuating structure 1044 can drive the mirror group 102 in multiple directions, for example, the direction may be the x-axis direction, the y-axis direction, the pitch axis direction, and the yaw axis of the internal coordinate system of the camera module direction.
  • the third shake detection structure 1045 may be an inertial element, such as a gyroscope or an accelerometer.
  • the mirror group actuating structure 1044 can be realized by MEMS actuator technology, VCM technology, or SMA motor technology.
  • the front-end anti-shake component 104 further includes: a fourth controller 1046, which is connected to the third jitter detection structure 1045 and the lens group actuation structure 1044, respectively.
  • the fourth controller 1046 is configured to execute the control process of the first shake compensation, that is, to obtain the fourth shake direction and the fourth shake amount of the camera module detected by the third shake detection structure 1045, and based on the fourth shake
  • the direction and the fourth shake amount determine the fourth shake compensation direction and the fourth shake compensation displacement.
  • the mirror group actuating structure 1044 drives the mirror group 102 to move along the fourth shake compensation direction.
  • FIG. 14 shows a schematic diagram of the control logic involved in the camera module shown in FIG. 13 in the process of shake compensation.
  • the fourth controller 1046 controls the mirror group actuation structure 1044 to drive the mirror group to move in the fourth shake compensation direction.
  • the fourth controller compensates for the displacement of the fourth shake compensation displacement process and the third controller controls the folding element actuation structure to drive the optical folding element along the third shake compensation direction
  • the process of moving the third shake compensation displacement is basically the same. Therefore, the control logic involved in the camera module performing the shake compensation process is the same as that in the first possible implementation manner described above, as shown in FIG. 10
  • the control logic involved is the same, which is not described in detail in the embodiments of the present application.
  • the front-end anti-shake component further includes: a second feedback sensor, which is fixedly connected to the mirror group or the mirror group actuation structure.
  • the second feedback sensor may be a Hall sensor or a displacement sensor.
  • the function of the second feedback sensor is basically the same as that of the first feedback sensor described above, and it is configured to send a feedback signal of the current displacement of the mirror group to the fourth controller.
  • the functions of the three controllers are basically the same.
  • FIG. 15 shows a schematic diagram of control logic involved in the process of performing the shake compensation process of the camera module when the camera module shown in FIG. 13 includes the second feedback sensor.
  • the camera module shown in FIG. 10 includes a first feedback sensor mechanism, the camera module's jitter compensation process is involved.
  • the control logic of is not described in detail in the embodiments of the present application.
  • the fourth controller controls the VCM to drive the mirror group to move the fourth in the fourth shake compensation direction
  • the process of shake compensation displacement is basically the same as the process of the third controller controlling the VCM to drive the optical folding element to move along the third shake compensation direction. Therefore, the control logic involved in the camera module for the shake compensation process is the same as the above
  • the control logic mentioned in the example corresponding to the schematic diagram of the control logic shown in FIG. 12 is basically the same, which will not be repeated in the embodiment of the present application.
  • the fourth controller controls the actuation structure of the mirror group to perform multi-dimensional movement, and then controls the mirror group to perform multi-dimensional movement, thereby achieving first jitter compensation for the imaging beam.
  • the first shake compensation process includes: as shown in FIG.
  • the third controller controls the folding element actuation structure to drive the optical folding element to move in the yaw axis direction; when imaging When the beam jitter direction is the x-axis direction, the third controller controls the folding element actuation structure to drive the optical folding element to move along the x-axis direction; when the imaging beam jitter direction is the pitch axis direction, the image sensor actuation structure is along the pitch Moving in the axis direction; when the shaking direction of the imaging beam is in the y-axis direction, the image sensor actuating structure moves in the y-axis direction.
  • the front-end anti-shake component 104 can be connected to the optical folding element 101 and the mirror group 102 at the same time, then the front-end anti-shake component 104 includes the first optional And all the structures in the second optional implementation, that is, the front-end anti-shake component 104 includes: a folding element actuation structure 1041, a second jitter detection structure 1042, a third controller 1043, a mirror group The moving structure 1044, the third jitter detection structure 1045, and the fourth controller 1046.
  • the front-end anti-shake component 104 includes: a folding element actuation structure 1041, a second jitter detection structure 1042, a third controller 1043, a mirror group The moving structure 1044, the third jitter detection structure 1045, and the fourth controller 1046.
  • FIG. 17 shows a schematic diagram of control logic involved in the camera module shown in FIG. 16 in the process of performing shake compensation.
  • the third controller 1043 controls the folding element actuation structure 1041 to drive the optical folding element to move along the third shake compensation direction.
  • the process of the third shake compensation displacement can refer to FIG. 11, and the fourth controller 1046 controls the mirror group actuation structure 1044 to drive
  • the process of moving the fourth jitter compensation displacement in the fourth jitter compensation direction can be referred to FIG. 14, which is not described in detail in the embodiment of the present application.
  • the back-end anti-shake component performs second shake compensation on the first shake-compensated imaging beam of the front end anti-shake component.
  • the front-end anti-shake component further includes: a first feedback sensor and a second feedback sensor, and the connection relationship between the first feedback sensor and the second feedback sensor and the front-end anti-shake component can refer to the first and second An optional implementation.
  • FIG. 18 shows a schematic diagram of control logic involved in the process of performing the shake compensation process of the camera module when the camera module shown in FIG. 16 includes a first feedback sensor and a second feedback sensor.
  • the third controller 1043 controls the folding element actuation structure 1041 to drive the optical folding element to move along the third shake compensation direction.
  • the process of the third shake compensation displacement can refer to FIG. 12, and the fourth controller 1046 controls the mirror group actuation structure 1044 to drive
  • the process of moving the fourth jitter compensation displacement in the fourth jitter compensation direction by the mirror group may refer to FIG. 15, which is not described in detail in the embodiment of the present application.
  • the back-end anti-shake component performs second shake compensation on the first shake-compensated imaging beam of the front end anti-shake component.
  • the control logic involved in the camera module’s shake compensation process includes: in the example corresponding to the control logic diagram shown in FIG. 12 above, the third controller controls the VCM to drive the optical folding element to move the third along the third shake compensation direction Jitter compensation displacement process; in the example corresponding to the control logic diagram shown in FIG.
  • the fourth controller controls the VCM driving mirror group to move the fourth jitter compensation displacement process in the fourth jitter compensation direction; the front-end anti-shake component is completed After the first shake compensation of the imaging beam, the back-end anti-shake component performs second shake compensation on the first shake-compensated imaging beam of the front-end anti-shake component.
  • the third controller and the fourth controller may be one controller, assuming that the controller may be a second controller, the second controller and the second jitter detection structure and the third jitter detection structure respectively , Image sensor actuation structure, mirror group actuation structure and folding element actuation structure are connected.
  • the second controller is configured to receive the second shake direction and the second shake amount of the camera module detected by the second shake detection structure and the third shake detection structure, and determine the target shake direction based on the second shake direction and the second shake amount And the target jitter amount, respectively control the movement of the lens group actuation structure and the folding element actuation structure, so that the total displacement of the lens group and the optical folding element moving in the target jitter direction is the target jitter amount.
  • the control logic involved in the camera module for the process of shake compensation is the same as that shown in FIG. 18 above
  • the control logic involved in the camera module's jitter compensation process is basically the same, wherein the second controller simultaneously obtains the second jitter direction and the second jitter amount detected by the second jitter detection structure and the third jitter detection structure, and converts the The second dithering direction and the second dithering amount are allocated so that the optical folding element and the lens group respectively move in the target dithering direction, and the total displacement of the movement is the target dithering amount, which will not be repeated in the embodiments of the present application.
  • the back-end anti-shake component performs the second jitter compensation process on the imaging beam after the first jitter compensation of the front-end anti-shake component can refer to The back-end anti-shake component shown in FIG. 7 or FIG. 9 performs the second jitter compensation process, which is not described in detail in the embodiment of the present application.
  • optical folding element may also be integrated on the folding element actuation structure
  • the mirror group may also be integrated on the mirror group actuation structure
  • the image sensor may also be integrated on the image sensor actuation structure.
  • the camera module 10 further includes: a housing 106 with a cavity, an optical folding element 101, a lens group 102, an image sensor 103, a front-end anti-shake component 104 and a rear-end anti-shake component 105 is fixedly disposed in the housing 106, and one end of the housing 106 is provided with a light entrance opening 1061, and the light entrance opening 1061 is for the imaging beam to enter.
  • FIG. 19 schematically illustrates a schematic structural diagram of the camera module when the front-end anti-shake component 104 is connected to the optical folding element 101.
  • the front-end anti-shake component and the back-end anti-shake component can perform the first and second shake compensations on the imaging beam, respectively, the first shake compensation and the second shake compensation
  • the cooperation of the two shake compensations compared with the traditional case where only one shake compensation is performed, improves the final shake compensation accuracy of the imaging beam.
  • the range of jitter compensation for the telephoto optical path is expanded, and at the same time, since the accuracy of the second jitter compensation is greater than the accuracy of the first jitter compensation, Optical path jitter compensation accuracy.
  • the front-end anti-shake component can realize four-axis (x, y, pitch and yaw axis) shake compensation, while the back-end anti-shake component can not only pass the higher-precision first jitter detection structure and higher
  • the cooperation of high-precision image sensor actuation structure realizes higher-precision four-axis (x, y, pitch and yaw axes). It can also realize the compensation of the image beam jitter direction as the roll axis through the angular displacement of the image sensor in the roll axis direction , So that the camera module realizes five-axis image stabilization.
  • FIG. 20 shows a schematic structural diagram of a terminal provided by an embodiment of the present application.
  • the terminal 2 includes: a processor 21, a memory 22, a data transmission component, and at least one camera module 25.
  • the data transmission component may be a receiver 23 and a transmitter 24.
  • the at least one camera module 25 includes any camera module provided by the embodiment of the present application.
  • the terminal may be a mobile phone, a notebook, a tablet computer, a driving recorder, a camera, or a monitoring device.
  • the mobile phone when the terminal is a mobile phone, the mobile phone includes a front camera module and a rear camera module.
  • the rear camera module is any camera module provided in the embodiments of the present application.
  • the processor 21 may be the control center of the terminal 2, connect various parts of the entire terminal by using various interfaces and lines, run or execute the programs, instructions and/or software modules stored in the memory 22, and call the stored in the memory
  • the data in 22 executes various functions of terminal 2 and processes data, thereby controlling terminal 2 as a whole.
  • various functions can be realized by running a program stored in the memory 22 or executing instructions stored in the memory 22.
  • the processor 21 may include one or more processing cores, such as a 4-core processor or an 8-core processor.
  • the processor 21 may also adopt at least one hardware form of digital signal processing (Digital Signal Processing, DSP), field programmable gate array (Field-Programmable Gate Array, FPGA) or programmable logic array (Programmable Logic Array, PLA) to fulfill.
  • DSP Digital Signal Processing
  • FPGA field programmable gate array
  • PROM programmable logic array
  • PLA programmable logic array
  • the processor 21 may also integrate an application processor and a modem processor, where the application processor mainly processes an operating system, a user interface, an application program, and the like, and the modem processor mainly processes wireless communication. It can be understood that the foregoing modem processor may not be integrated into the processor 21.
  • the memory 22 may be used to store programs, instructions, software modules, and/or data.
  • the processor 21 executes various functional applications and data processing by running programs and software modules stored in the memory 22.
  • the memory 22 may mainly include a storage program area and a storage data area, wherein the storage program area may store an operating system 221, a detection module 222, a redirection module 223, a reading module 224, a synchronization module 225, a recording module 226, and settings
  • the module 227 and the application programs 228 required for each function (such as image shooting function, image playback function, etc.), etc.
  • the storage data area may store data created according to the use of the terminal 2 (such as image data, phone book, etc.), etc.
  • the memory 22 may be implemented by any type of volatile or non-volatile storage device or a combination thereof, such as static random access memory (Static Random Access Memory, SRAM), electrically erasable programmable read-only memory ( Electrically Erasable Programmable Read-Only Memory (EEPROM), Erasable Programmable Read-Only Memory (EPROM), Programmable Read-Only Memory (PROM), Read-Only Memory (Read Only Memory, ROM), magnetic memory, flash memory, magnetic disk or optical disk.
  • SRAM static random access memory
  • EEPROM Electrically Erasable Programmable Read-Only Memory
  • EPROM Erasable Programmable Read-Only Memory
  • PROM Programmable Read-Only Memory
  • Read Only Memory ROM
  • magnetic memory flash memory
  • magnetic disk or optical disk a memory controller to provide the processor 21 with access to the memory 22.
  • the receiver 23 is configured to receive data, and the data is sent to the processor 21 for processing or sent to the memory 22 for storage.
  • the receiver 23 may be a receiving antenna.
  • the transmitter 24 is configured to send data.
  • the data may be data in the processor 21 or data stored in the memory 22.
  • the transmitter 24 may be a transmitting antenna.
  • the at least one camera module 25 may include a front camera module and/or a rear camera module.
  • the terminal 2 further includes a display screen 26 configured to display data, for example, a user interface (User Interface, UI).
  • the UI may include graphics, text, icons, video, and any combination thereof.
  • the display screen 26 is a touch display screen, the display screen 26 also has the ability to collect touch signals on or above the surface of the display screen 26.
  • the touch signal can be input to the processor 21 as a control signal for processing.
  • the display screen 26 can also be used to provide virtual buttons and/or virtual keyboards, also called soft buttons and/or soft keyboards.
  • the display screen 26 may be one, and the front cover of the terminal 2 is provided.
  • the display screen 26 may also be at least two, which are respectively provided on different surfaces of the terminal 2 or have a folding design.
  • the display screen 26 may also be a flexible display screen. It is provided on the curved surface or folding surface of the terminal 2. Even, the display screen 26 can also be set as a non-rectangular irregular figure, that is, a special-shaped screen.
  • the display screen 26 may be a liquid crystal display (Liquid Crystal) display (LCD) display screen or an organic light-emitting diode (Organic Light-Emitting Diode, OLED) display screen.
  • LCD liquid crystal display
  • OLED Organic Light-Emitting Diode
  • the terminal 2 further includes a power supply (not shown in the figure), which is configured to supply power to various components, wherein the power supply can be logically connected to the processor 21 through the power management system, thereby implementing management through the power management system Charging, discharging, and power management functions.
  • the power supply may include any component such as one or more DC or AC power supplies, a recharging system, a power failure detection circuit, a power converter or inverter, and a power status indicator.
  • terminal structure shown in FIG. 20 does not constitute a limitation on the terminal, and may include more or fewer components than the illustration, or a combination of certain components, or different The arrangement of components is not limited in the embodiments of the present application.
  • an anti-shake component 105 provided by an embodiment of the present application.
  • the anti-shake component 105 includes:
  • the image sensor actuation structure 1051 and the first shake detection structure 1052 are fixedly connected to the image sensor 103, and the first shake detection structure 1052 may be fixedly connected to the image sensor actuation structure 1051 or may be integrated on the image sensor actuation structure 1051.
  • the image sensor 103 has an image acquisition area, and the image sensor 103 is configured to collect the received imaging light beam through the image acquisition area.
  • the first shake detection structure 1052 has a photosensitive region.
  • the first shake detection structure 1052 is disposed around the image acquisition area of the image sensor 103.
  • the first shake detection structure 1052 is configured to collect the received imaging beam through the acquisition area to detect the photosensitive area Whether the collected imaging beam is shaken.
  • the image sensor actuation structure 1051 is configured to drive the image sensor 103 to move after the first shake detection structure 1052 detects that the imaging light beam collected by the photosensitive region is shaken to perform second shake compensation on the imaging light beam.
  • the image sensor actuating structure 1051 drives the image sensor 103 to move in various directions, for example, the direction may be the x-axis direction, the y-axis direction, and the yaw axis of the internal coordinate system of the camera module direction.
  • the actuation structure of the image sensor may be realized by MEMS actuator technology, VCM technology, or SMA motor technology.
  • the MEMS actuator includes a displacement sensor, and the image sensor can be integrated on the MEMS actuator.
  • the first shake detection structure 1052 includes at least one image shake sensor.
  • the first shake detection structure includes four image shake sensors.
  • the four image shake sensors may be fixedly connected to the movable stage 10511 of the sensor driving assembly 1051, or may be integrated into the image sensor 103. On the area outside the image acquisition area.
  • the four image shake sensors are the same as the image shake sensors in the back-end anti-shake component.
  • the anti-shake component 105 has the same structure as the back-end anti-shake component shown in FIG. 6.
  • the anti-shake component 105 further includes a first controller 1053, and the first controller 1053 is Connected to the first shake detection structure 1052 and the image sensor actuation structure 1051 respectively, the first controller 1053 is configured to have the same function as the first controller in the back-end anti-shake component described above. This is not repeated here.
  • the jitter compensation process of the anti-shake component is the same as the back-end anti-shake component shown in FIG. 7 described above. Then, the control logic involved in the jitter compensation process of the anti-shake component can be referred to the above-mentioned FIG. 7
  • the control logic involved in the second back-end anti-shake component performing the second jitter compensation process is not limited in the embodiment of the present application.
  • the anti-shake component 105 has the same structure as the back-end anti-shake component shown in FIG. 8, as shown in FIG. 8, the anti-shake component 105 further includes a displacement sensor 1054, the displacement sensor 1054 and the image sensor 103 or the image
  • the sensor actuating structure 1051 is fixedly connected at a designated position, and the designated position is a device in the image sensor actuating structure 1051 that moves in synchronization with the image sensor 103.
  • the function of the shift sensor 1054 is the same as the function of the shift sensor of the back-end anti-shake component.
  • the function of the first controller 1053 is the same as the first control of the back-end anti-shake component.
  • the configured functions of the device are the same, which will not be repeated in the embodiments of the present application.
  • the jitter compensation process of the anti-shake component is the same as the back-end anti-shake component shown in FIG. 9.
  • the control logic involved in the jitter compensation process of the anti-shake component can be referred to the above-mentioned FIG. 9
  • the control logic involved in the second back-end anti-shake component performing the second jitter compensation process is not limited in the embodiment of the present application.
  • the first controller in the anti-shake component controls the image sensor actuation structure to perform multi-dimensional movement, and then controls the image sensor to perform multi-dimensional movement to realize the process of compensating the imaging beam
  • the The shake compensation process and the first controller in the above back-end anti-shake component control the image sensor actuation structure to perform multi-dimensional movement, and then control the image sensor to perform multi-dimensional movement to achieve the process of the image beam shake compensation process
  • the image shake sensor can directly detect the shake direction and the shake amount of the image, the shake amount and shake direction are compared with those of the camera module detected by the inertial element.
  • the direction and amount of jitter are more precise, so the jitter compensation triggered by the image shake sensor is more accurate.
  • the actuation structure of the image sensor can drive the image sensor to move along the x, y and roll axes
  • the image of the imaging beam imaged on the image sensor can realize five axes (x, y, pitch, yaw and roll) shake compensation.
  • actuating refers to driving an object to move through signals such as electrical signals or magnetic signals.
  • the actuating structure of the image sensor, the actuating structure of the folding element, the actuating structure of the lens group and the actuating member all refer to the structure or device that moves an object through signals such as electrical signals or magnetic signals.
  • first, second, third, and fourth are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
  • plural refers to two or more, and the term “at least one” refers to one or more unless clearly defined otherwise.
  • the term “and/or” in this application is just an association relationship that describes an associated object, indicating that there can be three relationships, for example, A and/or B, which can mean: A exists alone, A and B exist simultaneously, separate There are three cases of B.

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Abstract

本申请涉及一种摄像模组、防抖组件及终端，涉及电子技术领域。该摄像模组包括：沿成像光束传输方向依次排列的光学折叠元件、镜组和图像传感器；光学折叠元件被配置为将接收到的成像光束的光路折叠并传递至镜组；镜组被配置为将接收到的成像光束传输至图像传感器；图像传感器具有图像采集区域，被配置为通过图像采集区域采集接收到的成像光束；摄像模组还包括：前端防抖组件和后端防抖组件，前端防抖组件与光学折叠元件和镜组中的至少一个连接，后端防抖组件与图像传感器连接，前端防抖组件被配置为对成像光束进行第一抖动补偿，后端防抖组件被配置为对成像光束进行第二抖动补偿。本申请能够解决成像光束的抖动补偿精度较低的问题。

Description

摄像模组、防抖组件及终端
本申请要求于2018年12月24日提交的申请号为201811583025.3、发明名称为“摄像模组、防抖组件及终端”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及电子技术领域，特别涉及一种摄像模组、防抖组件及终端。
背景技术
随着人们对远距离和微距离拍摄需求的增加，摄像模组的变焦倍率越来越大，由于大倍率变焦所需光路的有效焦距较长，也即是需要长焦光路，该长焦光路会导致在拍摄时，即使是轻微的抖动，也会使摄像模组的成像光束产生较大的抖动。因此，摄像模组的防抖功能尤为重要。
目前，摄像模组包括：依次排列的光学折叠元件、致动结构、惯性元件、镜组(也即是镜片模组)和图像传感器。该光学折叠元件包括反射镜(mirror)或棱镜(prism)等，能够在有限的空间中实现长焦光路，具有长焦光路的摄像模组也称潜望式摄像模组。在该摄像模组中，将该光学折叠元件与致动结构连接，当惯性元件检测到抖动时，在致动结构的带动下，该光学折叠元件可以进行偏转和/或倾斜运动，从而对成像光束进行抖动补偿，也即是对抖动所产生的位移(直线位移和/或角度位移)进行补偿，前述补偿过程被称为光学图像稳定(optical image stabilization，OIS)过程，相应的致动结构可以称为光学图像稳定(optical image stabilization，OIS)马达。
但是，由于在致动结构的带动下,光学折叠元件的运动精度有限，导致最终对成像光束的抖动补偿精度较低。
发明内容
本申请提供了一种摄像模组、防抖组件及终端，能够在一定程度上解决目前的成像光束的抖动补偿精度较低的问题。技术方案如下：
第一方面，提供了一种摄像模组，该摄像模组包括：
沿成像光束传输方向依次排列的光学折叠元件、镜组和图像传感器。该光学折叠元件被配置为将接收到的成像光束的光路折叠并传递至镜组；该镜组被配置为将接收到的成像光束传输至图像传感器；该图像传感器具有图像采集区域，图像传感器被配置为通过图像采集区域采集接收到的成像光束。
摄像模组还包括：前端防抖组件和后端防抖组件，前端防抖组件与光学折叠元件和镜组中的至少一个连接，后端防抖组件与图像传感器连接，前端防抖组件被配置为对成像光束进行第一抖动补偿，后端防抖组件被配置为对成像光束进行第二抖动补偿。
由于前端防抖组件和后端防抖组件可以对成像光束分别进行第一抖动补偿和第二抖动补偿，通过第一抖动补偿和第二抖动补偿的相互配合，相较于传统的只进行一次抖动补偿的情 况，提高了最终对成像光束的抖动补偿精度。
可选的，后端防抖组件包括：图像传感器致动结构和第一抖动检测结构，图像传感器致动结构与图像传感器固定连接。
其中，该第一抖动检测结构具有感光区域，第一抖动检测结构设置在图像传感器的图像采集区域周围，第一抖动检测结构被配置为通过感光区域采集接收到的成像光束，检测感光区域所采集的成像光束是否产生抖动，第一抖动检测结构的帧率大于图像传感器的帧率。
由于第一抖动检测结构具有感光区域，图像传感器具有图像采集区域，因此两者均为图像采集器件，而图像采集器件的帧率越高，其采集图像的速度越快，其中，第一抖动检测结构的采集图像的速度应该大于图像传感器的采集图像的速度，这样使得第一抖动检测结构可以先于该图像传感器在感光区域进行图像采集，以实现对图像传感器所采集的成像光束进行相应的抖动补偿。
图像传感器致动结构被配置为在第一抖动检测结构检测到感光区域所采集的成像光束产生抖动后，驱动图像传感器移动，以对成像光束进行第二抖动补偿。示例的，该图像传感器致动结构包括微机电系统MEMS执行器。
该图像传感器致动结构包括可动载台、基底、弹性悬挂元件和致动件。该基底固定设置，可动载台与基底通过弹性悬挂元件连接，可动载台与致动件固定连接。该可动载台用于承载图像传感器和第一抖动检测结构，致动件被配置为驱动可动载台相对于基底运动。
可选的，该基底为具有凹槽的壳体，可动载台为矩形板状结构，且设置在凹槽内，可动载台的侧壁中至少两个第一位置分别通过弹性悬挂元件与凹槽的内壁的至少两个第二位置一一对应连接，侧壁上每个第一位置对应的内壁上的第二位置为凹槽的内壁中与该侧壁最近的位置。上述至少两个第一位置通常均匀分布在侧壁上，以保证可动载台受力均匀。
示例的，凹槽的开口呈矩形、圆形或其他形状，当凹槽的开口呈矩形时，可动载台的至少两个侧壁分别通过弹性悬挂元件与凹槽的至少两个内壁一一对应连接，每个侧壁对应的内壁为凹槽的内壁中与该侧壁最近的内壁，其中，每个侧壁与对应的内壁之间的弹性悬挂元件可以为一个或多个。例如，可动载台的四个侧壁分别通过弹性悬挂元件与凹槽的4个内壁一一对应连接，致动件被配置为驱动可动载台在凹槽内执行绕镜组的光轴旋转和沿垂直于镜组的光轴的方向平移中的至少一种动作。示例的，该致动件可以为静电致动件(electrostatic actuator)、电磁致动件(electromagnetic actuator)、电热致动件(electrothermal actuator)或压电致动件(piezoelectric actuator)等。
在一种可实现方式中，第一抖动检测结构可以与可动载台固定连接。另一种可实现方式中，第一抖动检测结构集成在图像传感器的图像采集区域之外的区域上。
可选的，第一抖动检测结构包括至少一个图像晃动感测器。示例的，该第一抖动检测结构可以包括四个图像晃动感测器。其中，所有图像晃动感测器的帧率相同，且大于图像传感器的帧率。这样当成像光束由镜组传输至后端防抖组件时，该图像晃动感测器可以先于该图像传感器在感光区域进行准确的图像采集，从而可以预知采集的图像的抖动方向和抖动量，进而进行抖动补偿。
在不同防抖组件对成像光束进行抖动补偿时，会产生跟踪误差，为了使该图像晃动感测器可以更精确的感测到其接收到的成像光束的抖动量，该感光区域的面积可以大于或等于前端防抖组件的最大跟踪误差的平方，这样感测到的成像光束的抖动量均在图像晃动感测器所 能感测的范围内，最大跟踪误差为所述前端防抖组件在对所述成像光束进行第一抖动补偿后，该成像光束所在位置与理想的第一抖动补偿的目标位置的最大偏移距离差。
进一步的，为了使图像晃动感测器感测图像的抖动量的精确度更高，该图像晃动感测器的感光区域的像素密度可以大于或等于图像传感器的图像采集区域的像素密度，从而，使将该图像晃动感测器对接收到的成像光束进行更清晰的成像，进而提高感测图像的抖动量的精确度。
可选的，该后端防抖组件还包括：第一控制器，该第一控制器分别与第一抖动检测结构和图像传感器致动结构连接。
第一控制器被配置为执行第二抖动补偿的控制过程，也即是：获取第一抖动检测结构检测到的成像光束的第一抖动方向和第一抖动量，并基于第一抖动方向和第一抖动量确定第一抖动补偿方向和第一抖动补位移，基于第一抖动补偿方向和第一抖动补偿位移控制图像传感器致动结构驱动图像传感器沿第一抖动补偿方向移动第一抖动补偿位移。
可选的，该后端防抖组件还包括：位移传感器，位移传感器与图像传感器固定连接或者图像传感器致动结构的指定位置处固定连接，指定位置处为图像传感器致动结构中与图像传感器同步运动的器件处。其中，该位移传感器包括线性位移传感器和角度位移传感器中的至少一种。
位移传感器被配置为在图像传感器致动结构驱动图像传感器移动的过程中，向第一控制器发送指示位移传感器当前位移的反馈信号。
第一控制器被配置为基于反馈信号，控制图像传感器致动结构驱动图像传感器进行再次抖动补偿。
其中，第一控制器可以基于反馈信号确定图像传感器的位移，在图像传感器的位移与第一抖动补偿位移不同时，控制图像传感器致动结构驱动图像传感器进行再次抖动补偿，也即是向图像传感器致动结构发送控制信号，指示图像传感器致动结构驱动图像传感器沿第一抖动补偿方向移动第一位移，该第一位移为第一抖动补偿位移与图像传感器的位移的差值，其中，当第一位移为正值时，则沿第一抖动补偿方向移动该第一位移的绝对值，当第一位移为负值时，则沿第一抖动补偿方向的反方向移动该第一位移的绝对值。
在一种可选方式中，在图像传感器的位移与第一抖动补偿位移相同时，继续执行上述第二抖动补偿控制过程。在另一种可选方式中，为了使得反馈机制的控制逻辑一致，可以在图像传感器的位移与第一抖动补偿位移相同时，第一控制器可以向图像传感器致动结构发送控制信号，指示图像传感器致动结构驱动图像传感器沿第一抖动补偿方向移动第二位移，该第二位移为0。
需要说明的是，由于抖动过程是个连续的过程，实际实现时，上述第二抖动补偿控制过程是连续重复执行的，上述再次抖动补偿的控制过程也是连续重复执行的，这样可以实现对图像传感器位置的实时调节，保证最终的补偿精度。
这样，第一控制器通过该位移传感器对图像传感器致动致动结构形成了闭环反馈控制，也即是，通过该位移传感器建立了对图像传感器致动结构当前位移的反馈机制，提高了第一控制器对该图像传感器致动结构当前位移的精确控制，提高了后端防抖组件的补偿精度。
可选的，该摄像模组还包括：前端防抖组件，该前端防抖组件可以设置在多处，以对成像光束进行第一抖动补偿。
第一种可选的实现方式中，前端防抖组件与光学折叠元件连接，前端防抖组件包括：折叠元件致动结构和第二抖动检测结构，折叠元件致动结构与光学折叠元件固定连接。
第二抖动检测结构被配置为检测摄像模组是否产生抖动。
折叠元件致动结构被配置为在第二抖动检测结构检测到摄像模组产生抖动后，驱动光学折叠元件移动，以对成像光束进行第一抖动补偿。
可选的，该前端防抖组件还包括：第三控制器，该第三控制器分别与第二抖动检测结构和折叠元件致动结构连接。
该第三控制器被配置为获取第二抖动检测结构检测到的摄像模组的第三抖动方向和第三抖动量，并基于第三抖动方向和第三抖动量确定第三抖动补偿方向和第三抖动补偿位移，基于第三抖动补偿方向和第三抖动补偿位移控制折叠元件致动结构驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移。
进一步的，该前端防抖组件还包括：第一反馈传感器，该第一反馈传感器与光学折叠元件或者折叠元件致动结构固定连接。示例的，该第一反馈传感器可以是霍尔传感器，也可以是位移传感器。
第一反馈传感器被配置为在折叠元件致动结构驱动光学折叠元件移动的过程中，向第三控制器发送指示第一反馈传感器当前位移的反馈信号。
第三控制器被配置为基于反馈信号，确定光学折叠元件的位移。
这样，第三控制器通过该反馈传感器对折叠元件致动结构形成了闭环反馈控制，也即是，通过该反馈传感器建立了对折叠元件致动结构当前位移的反馈机制，提高了第三控制器对该折叠元件致动结构当前位移的精确控制，提高了前端防抖组件的补偿精度。
第二种可选的实现方式中，前端防抖组件与镜组连接，前端防抖组件包括：
镜组致动结构和第三抖动检测结构，镜组致动结构与镜组固定连接，镜组致动结构被配置为在第三抖动检测结构检测到摄像模组的抖动后，驱动镜组移动，以对成像光束进行抖动补偿。
可选的，该前端防抖组件还包括：第四控制器，该第四控制器分别与第三抖动检测结构和镜组致动结构连接。
可选的，该前端防抖组件还包括：第二反馈传感器，该第二反馈传感器与镜组或者镜组致动结构固定连接。示例的，该第二反馈传感器可以是霍尔传感器，也可以是位移传感器。
第三种可选的实现方式中，前端防抖组件与光学折叠元件连接，前端防抖组件还包括：镜组致动结构和第三抖动检测结构，镜组致动结构与镜组固定连接，镜组致动结构被配置为在第三抖动检测结构检测到摄像模组的抖动后，驱动镜组移动，以对成像光束进行抖动补偿。
可选的，该前端防抖组件还包括：第三控制器和第四控制器，该第三控制器分别与第二抖动检测结构和折叠元件致动结构连接，该第四控制器分别与第三抖动检测结构和镜组致动结构连接。
可选的，该前端防抖组件还包括：第一反馈传感器和第二反馈传感器，该第一反馈传感器和该第二反馈传感器与前端防抖组件的连接关系可以参考上述第一种和第二种可选的实现方式。
需要说明的是，该第三控制器和第四控制器可以为一个控制器，假设该控制器可为第二控制器，则该摄像模组还包括：
第二控制器，第二控制器分别与第二抖动检测结构、第三抖动检测结构、图像传感器致动结构、镜组致动结构和折叠元件致动结构连接。
第二控制器被配置接收第二抖动检测结构和第三抖动检测结构检测到的摄像模组的第二抖动方向和第二抖动量，基于第二抖动方向和第二抖动量确定目标抖动方向和目标抖动量，分别控制镜组致动结构和折叠元件致动结构移动，使镜组和光学折叠元件在目标抖动方向上移动的总位移为目标抖动量。
需要说明的是，该第二抖动检测结构和第三抖动检测结构均为惯性传感器，该折叠元件致动结构和镜组致动结构可以是VCM、SMA马达或MEMS执行器。
可选的，摄像模组还包括：具有腔体的壳体，光学折叠元件、镜组、图像传感器、前端防抖组件和后端防抖组件固定设置在壳体中，壳体的一端设置有入光开口，入光开口供成像光束入射。
第二方面，提供一种终端，该终端包括：
至少一个摄像模组、存储器、处理器和数据传输组件。
存储器被配置为存储程序或指令；
处理器被配置为通过运行存储在存储器内的程序或执行存储在存储器内的指令，以实现各种功能；
数据传输组件被配置为传输数据，示例的，该数据传输组件可以为接收器和发射器；
其中，该至少一个摄像模组包括上述第一方面任一摄像模组。
第三方面，提供一种防抖组件，该防抖组件包括：
图像传感器致动结构和第一抖动检测结构，图像传感器致动结构与图像传感器固定连接。
图像传感器具有图像采集区域，图像传感器被配置为通过图像采集区域采集接收到的成像光束。
第一抖动检测结构具有感光区域，第一抖动检测结构设置在图像传感器的图像采集区域周围，第一抖动检测结构被配置为通过感光区域采集接收到的成像光束，检测感光区域所采集的成像光束是否产生抖动。
图像传感器致动结构被配置为在第一抖动检测结构检测到感光区域所采集的成像光束产生抖动后，驱动图像传感器移动，以对成像光束进行第二抖动补偿。
可选的，图像传感器致动结构包括微机电系统MEMS执行器，第一抖动检测结构包括至少一个图像晃动感测器。
综上所述，本申请实施例提供的摄像模组、防抖组件及终端，由于前端防抖组件和后端防抖组件可以对成像光束分别进行第一抖动补偿和第二抖动补偿，通过第一抖动补偿和第二抖动补偿的相互配合，相较于传统的只进行一次抖动补偿的情况，提高了最终对成像光束的抖动补偿精度。
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图1为本申请提供的一种摄像模组的实施环境示意图；
图2为本申请提供的一种摄像模组的结构示意图；
图3为本申请提供的一种后端防抖组件的结构示意图；
图4为本申请提供的一种图像传感器致动结构的示意图；
图5为本申请提供的一种后端防抖组件的结构示意图；
图6为本申请提供的一种后端防抖组件的结构示意图；
图7为本申请提供的一种后端防抖组件行第二抖动补偿过程所涉及的控制逻辑示意图；
图8为本申请提供的一种后端防抖组件的结构示意图；
图9为本申请提供的一种后端防抖组件行第二抖动补偿过程所涉及的控制逻辑示意图；
图10为本申请提供的一种前端防抖组件的结构示意图；
图11为本申请提供的一种摄像模组进行抖动补偿过程所涉及的控制逻辑示意图；
图12为本申请提供的一种摄像模组进行抖动补偿过程所涉及的控制逻辑示意图；
图13为本申请提供的一种前端防抖组件的结构示意图；
图14为本申请提供的一种摄像模组进行抖动补偿过程所涉及的控制逻辑示意图；
图15为本申请提供的一种摄像模组进行抖动补偿过程所涉及的控制逻辑示意图；
图16为本申请提供的一种前端防抖组件的结构示意图；
图17为本申请提供的一种摄像模组进行抖动补偿过程所涉及的控制逻辑示意图；
图18为本申请提供的一种摄像模组进行抖动补偿过程所涉及的控制逻辑示意图；
图19为本申请提供的一种摄像模组的结构示意图；
图20为本申请提供的一种终端的结构示意图。
具体实施方式
图1是本申请实施例提供的摄像模组的实施环境示意图，该摄像模组可以应用于终端中，例如手机、笔记本、平板电脑、行车记录仪、相机或者监控设备等。示例的，该终端可以包括后壳和前盖，以及位于后壳和前盖之间的中板，该摄像模组可以与中板电连接。基于摄像模组在终端中的位置的不同，摄像模组可以划分为前置摄像模组和后置摄像模组，前置摄像模组可以设置在终端的前部，如前盖与中板之间，前盖上可以设置有镜头开孔，前置摄像模组的入光开口(也即是光线进入的开口)朝向该镜头开孔；后置摄像模组可以设置在终端的后部，如后壳与中板之间，后壳上也可以设置有镜头开孔，后置摄像模组的入光开口朝向该镜头开孔。可选的，请参考图1，图1是本申请一示意性实施例提供的一种终端的后壳的结构示意图，该后壳1上可以设置有固定槽11，该固定槽11用于固定摄像模组。
为了在实现摄像模组的大倍率变焦的同时，使终端轻薄化，一种潜望式摄像模组应运而生。该潜望式摄像模组是一种可以在终端内部通过镜组的浮动来调节焦距的摄像模组，其无需突出所在终端机身就能够实现光学变焦。该潜望式摄像模组通常包括光学折叠元件、镜组、图像传感器、壳体和位于壳体上的入光开口，这种潜望式摄像模组的结构对画质的影响不大，而且可以使终端做得更轻薄小巧。同时，由于潜望式摄像模组无需凸出终端机身，也避免了拍摄时容易因为意外而导致摄像模组的凸出部分被破坏的情况，因此，该潜望式摄像模组可以适用于多种终端。
当该潜望式摄像模组具有防抖功能时，该摄像模组包括：依次排列的光学折叠元件、致动结构、惯性元件、镜组和图像传感器。将该光学折叠元件与致动结构连接，当惯性元件检测到抖动时，在致动结构的带动下，该光学折叠元件可以进行成像光束的抖动补偿。但是，由于光学折叠元件的运动精度有限，导致最终对成像光束的抖动补偿精度较低。
本申请实施例提供的一种摄像模组，其可以为潜望式摄像模组，该摄像模组的结构可以 解决上述问题，请参考图2，图2是本申请实施例提供的摄像模组的结构示意图，该摄像模组10包括：沿成像光束传输方向依次排列的光学折叠元件101、镜组102和图像传感器103。该成像光束指的是入射至该摄像模组的光线形成的光束。
其中，该光学折叠元件101被配置为将接收到的成像光束的光路折叠并传递至镜组102。光路折叠也称光路转折，指的是改变光线的传输路径，示例的，该光学折叠元件101可以是棱镜或反射镜等反射元件。
镜组102可以包括一个或多个镜片，其被配置为将接收到的成像光束传输至图像传感器103，该镜组102还可以对接收到的成像光束进行一定的处理，例如校正像差、消色差等处理。
图像传感器103具有图像采集区域，图像传感器103被配置为通过图像采集区域(也称感光区域或感光面)采集接收到的成像光束。图像传感器是一种具有光电转换功能的器件，能够将图像采集区域上采集的成像光束的光信号转换为与光信号成相应比例关系的电信号，该图像传感器可以为以电荷耦合器件(charged coupled device，CCD)构成的CCD图像传感器或以互补金属氧化物半导体(complementary metal oxide semiconductor，CMOS)构成的CMOS图像传感器。
该摄像模组10还包括：前端防抖组件104和后端防抖组件105，该前端防抖组件104与光学折叠元件101和镜组102的至少一个连接，图2示意性地绘制了该前端防抖组件104与光学折叠元件101连接的情况。后端防抖组件105与图像传感器103连接，前端防抖组件104被配置为对成像光束进行第一抖动补偿，后端防抖组件105被配置为对成像光束进行第二抖动补偿，也即是前端防抖组件104和后端防抖组件105对成像光束共进行了两次抖动补偿。
其中，前端和后端是基于防抖组件的位置所定义的，前端防抖组件相对于后端防抖组件更靠近成像光束的入口(也即是前述的入光开口)。该第二抖动补偿的补偿精度大于该第一抖动补偿的补偿精度，其中，补偿精度用于反映防抖组件在对成像光束进行抖动补偿后，成像光束所在位置与理想的抖动补偿的目标位置之间的接近程度。例如，该补偿精度可以采用防抖组件在对成像光束进行抖动补偿后，成像光束所在位置与理想的抖动补偿的目标位置之间的距离差表征。通常情况下，第二抖动补偿的精度大于第一抖动补偿的精度，例如，该第二抖动补偿的补偿精度的级别可以为亚像素级别，第二抖动补偿的补偿精度可以是0.1微米，也可以是0.01微米，该第一抖动补偿的补偿精度的级别可以为像素级别，第一抖动补偿的补偿精度可以是1微米。
综上所述，本申请实施例提供的摄像模组中，由于前端防抖组件和后端防抖组件可以对成像光束分别进行第一抖动补偿和第二抖动补偿，通过第一抖动补偿和第二抖动补偿的相互配合，相较于传统的只进行一次抖动补偿的情况，减少了光学折叠元件的运动精度对摄像模组的抖动补偿的局限，提高了最终对成像光束的抖动补偿精度。
请参考图3，图3是本申请实施例提供的一种后端防抖组件的结构示意图，该后端防抖组件105包括：图像传感器致动结构1051和第一抖动检测结构1052。
图像传感器致动结构1051与图像传感器103固定连接。
第一抖动检测结构1052具有感光区域，该感光区域为用于采集图像的区域，也可以认为是成像的区域，第一抖动检测结构1052设置在图像传感器103的图像采集区域周围，第一抖动检测结构1052被配置为通过其感光区域采集接收到的成像光束，检测感光区域所采集的成像光束是否产生抖动。
图像传感器致动结构1051被配置为在第一抖动检测结构1052检测到感光区域所采集的成像光束产生抖动后，驱动图像传感器103移动，以对成像光束进行第二抖动补偿。
由于第一抖动检测结构具有感光区域，图像传感器具有图像采集区域，因此两者均为图像采集器件，而图像采集器件的帧率越高，其采集图像的速度越快，其中，第一抖动检测结构的采集图像的速度应该大于图像传感器的采集图像的速度，这样使得第一抖动检测结构可以先于该图像传感器在感光区域进行图像采集，以实现对图像传感器所采集的成像光束进行相应的抖动补偿。因此，该第一抖动检测结构的帧率大于图像传感器的帧率，示例的，该第一抖动检测结构的帧率可以是图像传感器的帧率的10倍。
需要说明的是，本申请实施例提供的摄像模组具有一个内部坐标系(也称内参坐标系)，请参考图2-图4、图6、图8、图10、图13、图16和图19，该内部坐标系为立体坐标系，其以图像传感器的中心为原点，该内部坐标系包括：与镜组的光轴L平行的z轴，垂直于z轴且与该镜组的高度方向平行的x轴和垂直于z轴且与该镜组的高度方向垂直的y轴。其中，围绕z轴旋转称为滚动(roll)，也称为绕roll轴运动，围绕x轴旋转称为倾斜(pitch)，也称为绕pitch轴运动，围绕y轴旋转称为偏转(yaw)，也称为绕yaw轴运动。为了更清楚的示出该坐标系，图2-图4、图6、图8、图10、图13、图16和图19中所示的内部坐标系的原点相对于实际的坐标系原点进行了平移，但并不表示坐标系的实际位置。
为了便于读者理解，本申请实施例基于上述内部坐标系对摄像模组的抖动补偿原理进行说明，在进行抖动补偿时，防抖组件根据其所连接的光学器件(例如对于前端防抖组件，该光学器件为光学折叠元件和/或镜组，对于后端防抖组件，该光学器件为图像传感器)接收的成像光束的抖动方向，控制该光学器件沿抖动方向移动，以对该成像光束在该抖动方向的抖动进行补偿。例如，当光学器件接收的成像光束的抖动方向为x轴正方向时，与该光学器件相连的防抖组件控制其沿x轴正方向移动；当光学器件接收的成像光束的抖动方向为yaw轴顺时针方向时，由于该光学器件沿x轴正方向的移动对成像光束的抖动补偿效果与该光学器件yaw轴顺时针方向转动的补偿效果相同，因此，与该光学器件相连的防抖组件可以控制该光学器件沿x轴正方向移动，以对该抖动进行等效补偿。同理，当光学器件接收的成像光束的抖动方向为yaw轴逆时针方向时，防抖组件可以控制该光学器件沿y轴负方向移动，以对抖动进行等效补偿；当光学器件接收的成像光束的抖动方向为pitch轴顺时针方向时，防抖组件可以控制其沿y轴正方向移动，以对抖动进行等效补偿；当光学器件接收的成像光束的抖动方向为pitch轴逆时针方向时，防抖组件可以控制其沿y轴负方向移动，以对抖动进行等效补偿。
在本申请实施例中，该图像传感器致动结构1051驱动该图像传感器103移动的方向可以有多种，例如该方向可以为该摄像模组内部坐标系的x轴方向、y轴方向和yaw轴方向。可选的，该图像传感器致动结构1051可以由微机电系统(Micro-Electro-Mechanical System，MEMS)执行器技术实现，也可以由音圈马达(voice coil motor，VCM)技术实现，还可以由形状记忆合金(shape memory alloy，SMA)马达技术实现。
其中，由于该MEMS执行器的运动精度相较于VCM和SMA马达的运动精度较高，因此，当图像传感器致动结构为MEMS执行器时，其可以控制图像传感器移动，以对成像光束进行较高精度的抖动补偿。
图4是本申请实施例提供的一种图像传感器致动结构的示意图，请参考图4，该图像传 感器致动结构1051包括可动载台10511、基底10512、弹性悬挂元件10513和致动件(图中未示处)。
其中，该基底10512固定设置，例如当摄像模组包括壳体时，该基底10512可以固定设置在该壳体上，或者该基底可以固定设置在其所在的终端的某一结构(如中板)上。可动载台10511与基底10512通过弹性悬挂元件10513连接，可动载台10511与致动件固定连接。示例的，该弹性悬挂元件10513可以是具有一定弹性的悬臂梁结构等。
可动载台10511用于承载图像传感器103和第一抖动检测结构1052。
致动件被配置为驱动可动载台10511相对于基底10512运动。
可选的，该基底10512为具有凹槽的壳体，可动载台10511为矩形板状结构，且设置在凹槽内，可动载台10511的侧壁中至少两个第一位置分别通过弹性悬挂元件10513与凹槽的内壁的至少两个第二位置一一对应连接，侧壁上每个第一位置对应的内壁上的第二位置为凹槽的内壁中与该侧壁最近的位置。上述至少两个第一位置通常均匀分布在侧壁上，以保证可动载台受力均匀。
示例的，凹槽的开口呈矩形、圆形或其他形状，当凹槽的开口呈矩形时，可动载台10511的至少两个侧壁分别通过弹性悬挂元件10513与凹槽的至少两个内壁一一对应连接，每个侧壁对应的内壁为凹槽的内壁中与该侧壁最近的内壁，其中，每个侧壁与对应的内壁之间的弹性悬挂元件可以为一个或多个。
例如，图4中可动载台10511的四个侧壁分别通过弹性悬挂元件10513与凹槽的4个内壁一一对应连接，这样可以避免可动载台产生过度震动，从而避免过补偿。致动件被配置为驱动可动载台10511在凹槽内执行绕镜组的光轴旋转(即进行角度位移)和沿垂直于所述镜组的光轴的方向平移(即进行直线位移)中的至少一种动作。请参考图4，绕镜组的光轴旋转指的是绕内部坐标系的z轴旋转，也即是绕roll轴运动；沿垂直于所述镜组的光轴的方向平移，指的是沿内部坐标系的x轴平移，或y轴平移。
示例的，该致动件可以为静电致动件、电磁致动件、电热致动件或压电致动件等。当该致动件为静电致动件时，该致动件可以通过调整加载的静电力，驱动可动载台在凹槽内移动。当该致动件为电磁致动件时，该致动件可以通过调整磁性的正负，驱动可动载台在凹槽内移动。当该致动件为电热致动件时，该致动件可以通过调整温度，从而控制该驱动可动载台在凹槽内执行运动动作。当该致动件为压电致动件时，该致动件可以通过调整外加电场的强度，驱动可动载台在凹槽内移动。
在一种可实现方式中，如图3所示，该第一抖动检测结构1052可以与可动载台固定连接；在另一种可实现方式中，如图5所示，该第一抖动检测结构1052也可以集成在图像传感器103的图像采集区域之外的区域上，当该第一抖动检测结构集成在图像传感器上时，该第一抖动检测结构无需单独安装，可以简化摄像模组的整体安装过程；在再一种可实现方式中，该第一抖动检测结构1052的部分与可动载台固定连接，另一部分集成在图像传感器103的图像采集区域之外的区域。
可选的，该第一抖动检测结构包括至少一个图像晃动感测器。示例的，该图像晃动感测器可以是高帧率图像传感器(即其帧率大于指定帧率)。如图3和图5所示，该第一抖动检测结构可以包括四个图像晃动感测器。可选的，所有图像晃动感测器的帧率相同，且均大于图像传感器的帧率，这样当成像光束由镜组传输至后端防抖组件时，该图像晃动感测器可以先 于该图像传感器在感光区域进行准确的图像采集，从而可以预知采集的图像的抖动方向和抖动量，进而进行抖动补偿。
在不同防抖组件对成像光束进行抖动补偿时，会产生跟踪误差，该跟踪误差为防抖组件在对成像光束进行抖动补偿后，成像光束所在位置与理想的第一抖动补偿的目标位置的距离差。为了使该图像晃动感测器可以更精确的感测到其接收到的成像光束的抖动量，该感光区域的面积可以大于或等于前端防抖组件的最大跟踪误差的平方，这样感测到的成像光束的抖动量均在图像晃动感测器所能感测的范围内，最大跟踪误差为前述前端防抖组件在对所述成像光束进行第一抖动补偿后，该成像光束所在位置与理想的第一抖动补偿的目标位置的最大偏移距离差。该最大跟踪误差是预先通过实验或者模拟软件模拟得到的。
进一步的，为了使图像晃动感测器感测图像的抖动量的精确度更高，该图像晃动感测器的感光区域的像素密度可以大于或等于图像传感器的图像采集区域的像素密度，从而，使该图像晃动感测器对接收到的成像光束进行更清晰的成像，也即是该图像晃动感测器对接收到的成像光束进行成像的精度大于图像传感器对接收到的成像光束进行成像的精度，进而提高感测图像的抖动量的精确度。
可选的，如图6所示，在图3、图4或图5所示的后端防抖组件105的基础上，该后端防抖组件105还包括：第一控制器1053，第一控制器1053分别与第一抖动检测结构1052和图像传感器致动结构1051连接。
第一控制器1053被配置为执行第二抖动补偿的控制过程，也即是：获取第一抖动检测结构1052检测到的成像光束的第一抖动方向和第一抖动量，并基于第一抖动方向和第一抖动量确定第一抖动补偿方向和第一抖动补偿位移，基于第一抖动补偿方向和第一抖动补偿位移控制图像传感器致动结构1051驱动图像传感器103沿第一抖动补偿方向移动第一抖动补偿位移。
请参见图7，图7示出了如图6所示的后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑示意图。当手抖等原因引起摄像模组出现抖动时，第一抖动检测结构1052通过感光区域所采集的成像光束，检测成像光束的第一抖动方向和第一抖动量，该第一控制器1053获取第一抖动检测结构检测1052的该第一抖动方向和第一抖动量，并根据该第一抖动方向和第一抖动量确定第一抖动补偿方向和第一抖动补偿位移，进而控制图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第一抖动补偿位移。其中，第一抖动补偿方向可以包括上述内部坐标系中的至少一个方向，第一抖动补偿位移包括与该至少一个方向一一对应的补偿位移，其可以为直线位移也可以为角度位移。例如，该第一抖动补偿方向可以为上述内部坐标系x轴方向和roll轴方向，相应的，该第一抖动补偿位移为x轴方向上的长度为m(0<m<1)微米的直线位移，和roll轴方向的角度为n(0<n<1)度的角度位移。
进一步的，如图8所示，在图6所示的后端防抖组件105的基础上，该后端防抖组件105还包括：
位移传感器1054，位移传感器1054与图像传感器(图中未示出)固定连接，或者图像传感器致动结构1051的指定位置处固定连接，该指定位置处为图像传感器致动结构1051中与图像传感器同步运动的器件处。例如，当图像传感器致动结构为图8所示的结构时，该指定位置处为图像传感器致动结构的可动载台处，也即是，该位移传感器与图像传感器致动结构的可动载台固定连接。
位移传感器1054被配置为在图像传感器致动结构1051驱动图像传感器移动的过程中， 向第一控制器1053发送指示位移传感器当前位移的反馈信号。
其中，位移传感器1054可以有一个或多个，该位移传感器1054包括线性位移传感器和角度位移传感器中的至少一种。线性位移传感器被配置为在图像传感器致动结构驱动图像传感器移动的过程中，向第一控制器发送指示当前线性位移的反馈信号；该角度位移传感器被配置为在图像传感器致动结构驱动图像传感器移动的过程中，向第一控制器发送指示当前角度位移的反馈信号。
第一控制器1053被配置为基于反馈信号，控制图像传感器致动结构1051驱动图像传感器进行再次抖动补偿。
其中，第一控制器1053可以基于反馈信号确定图像传感器的位移，在图像传感器的位移与第一抖动补偿位移不同时，控制图像传感器致动结构1051驱动图像传感器进行再次抖动补偿，也即是向图像传感器致动结构1051发送控制信号，指示图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第一位移，该第一位移为第一抖动补偿位移与图像传感器的位移的差值，其中，当第一位移为正值时，则沿第一抖动补偿方向移动该第一位移的绝对值，当第一位移为负值时，则沿第一抖动补偿方向的反方向移动该第一位移的绝对值。
在一种可选方式中，在图像传感器的位移与第一抖动补偿位移相同时，继续执行上述第二抖动补偿控制过程。在另一种可选方式中，为了使得反馈机制的控制逻辑一致，可以在图像传感器的位移与第一抖动补偿位移相同时，第一控制器1053可以向图像传感器致动结构1051发送控制信号，指示图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第二位移，该第二位移为0。
需要说明的是，由于抖动过程是个连续的过程，实际实现时，上述第二抖动补偿控制过程是连续重复执行的，上述再次抖动补偿的控制过程也是连续重复执行的，这样可以实现对图像传感器位置的实时调节，保证最终的补偿精度。
由上可知，第一控制器通过该位移传感器对图像传感器致动结构形成了闭环反馈控制，也即是，通过该位移传感器建立了对图像传感器致动结构当前位移的反馈机制，提高了第一控制器对该图像传感器致动结构当前位移的精确控制，提高了后端防抖组件的补偿精度。
请参见图9，图9示出了如图8所示的后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑示意图。第一控制器1053控制图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第一抖动补偿位移的过程可以参考图7，则图9所示的位移传感器1054的工作过程可以为：
在一种可选实现方式中，在图像传感器致动结构1051驱动图像传感器移动的过程中，位移传感器1054实时向第一控制器1053发送指示位移传感器当前位移的反馈信号，第一控制器1053基于该反馈信号，确定图像传感器的位移，在图像传感器的位移与第一抖动补偿位移不同时，控制图像传感器致动结构1051驱动图像传感器进行再次抖动补偿，也即是向图像传感器致动结构1051发送控制信号，指示图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第一位移。在一种可选方式中，在图像传感器的位移与第一抖动补偿位移相同时，继续执行上述图7所示的后端防抖组件进行第二抖动补偿过程。在另一种可选方式中，在图像传感器的位移与第一抖动补偿位移相同时，第一控制器1053可以向图像传感器致动结构1051发送控制信号，指示图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第二位移，该第二位移为0；
在另一种可选实现方式中，位移传感器1054可以获取前述第一抖动补偿位移，当该图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第一抖动补偿位移时，该位移传感器1054向第一控制器1053发送指示该第一抖动补偿位移的反馈信号，则第一控制器1053在接收到该反馈信号时，确定图像传感器的位移，继续执行上述图7所示的后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑。在另一种可选方式中，第一控制器1053可以向图像传感器致动结构1051发送控制信号，指示图像传感器致动结构1051驱动图像传感器沿第一抖动补偿方向移动第二位移，该第二位移为0。
需要说明的是，第一控制器通过控制图像传感器致动结构进行多维度的运动，进而控制图像传感器进行多维度的运动，以实现对该成像光束的第二抖动补偿。该第二抖动补偿过程包括：如图8所示，当成像光束的抖动方向为yaw轴方向时，该第一控制器控制图像传感器致动结构驱动图像传感器沿x轴方向移动；当成像光束的抖动方向为x轴方向时，图像传感器致动结构沿x轴方向移动；当成像光束的抖动方向为pitch轴方向时，图像传感器致动结构沿y轴方向移动；当成像光束的抖动方向为y轴方向时，图像传感器致动结构沿y轴方向移动；当成像光束的抖动方向为roll轴方向时，图像传感器致动结构驱动图像传感器绕roll轴方向移动。
示例的，假设第一抖动检测结构为图像晃动感测器，图像传感器致动结构为MEMS执行器(也称MEMS微马达)，则后端防抖组件包括：图像晃动感测器、第一控制器、MEMS执行器和位移传感器。在第一种可选的实现方式中，位移传感器单独设置在后端防抖组件中。则后端防抖组件进行抖动补偿过程所涉及的控制逻辑为：
当手抖等原因引起摄像模组出现抖动时，图像晃动感测器通过感光区域所采集的成像光束，检测成像光束的第一抖动方向和第一抖动量，第一控制器执行第二抖动补偿的控制过程，该第一控制器获取图像晃动感测器检测的该第一抖动方向和第一抖动量，并根据该第一抖动方向和第一抖动量确定第一抖动补偿方向和第一抖动补偿位移，进而控制MEMS执行器驱动图像传感器沿第一抖动补偿方向移动第一抖动补偿位移。在MEMS执行器驱动图像传感器移动的过程中，位移传感器实时向第一控制器发送指示位移传感器当前位移的反馈信号，第一控制器基于该反馈信号，确定图像传感器的位移，在图像传感器的位移与第一抖动补偿位移不同时，控制MEMS执行器驱动图像传感器进行再次抖动补偿，也即是向MEMS执行器发送控制信号，指示MEMS执行器驱动图像传感器沿第一抖动补偿方向移动第一位移。在一种可选方式中，在图像传感器的位移与第一抖动补偿位移相同时，继续执行第一控制器执行第二抖动补偿的控制过程。在另一种可选方式中，可以在图像传感器的位移与第一抖动补偿位移相同时，第一控制器可以向MEMS执行器发送控制信号，指示MEMS执行器驱动图像传感器沿第一抖动补偿方向移动第二位移，该第二位移为0，实现第一控制器对图像传感器位置的实时调节。
在第二种可选的实现方式中，位移传感器可以集成在MEMS执行器，则该后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑可以参考上述第一种可选的实现方式中，后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑，本申请实施例对此不做限定。
示例的，假设该位移传感器为线性位移传感器，则当摄像模组出现抖动时，图像晃动感测器检测到成像光束在x轴正方向上长度为w微米的直线位移，该第一控制器获取该图像晃动感测器检测到成像光束的直线位移的方向和长度，并根据该图像晃动感测器检测到确定第 一抖动补偿方向为x轴正方向，第一抖动补偿位移为x轴正方向上长度为u微米的直线位移，进而控制该MEMS执行器驱动图像传感器沿x轴正方向移动u微米，在MEMS执行器驱动图像传感器移动的过程中，线性位移传感器实时向第一控制器发送指示位移传感器当前位移的反馈信号，第一控制器基于该反馈信号，确定图像传感器沿x轴正方向移动q微米，在q≠u时，控制MEMS执行器驱动图像传感器进行再次抖动补偿，也即是向MEMS执行器发送控制信号，指示MEMS执行器驱动图像传感器沿x轴正方向移动p微米。其中，p＝u-q，当p>0时，MEMS执行器驱动图像传感器沿x轴正方向移动|p|微米，当p<0时，MEMS执行器驱动图像传感器沿x轴负方向移动|p|微米。在q＝u时，在一种可选方式中，继续执行第一控制器执行第二抖动补偿的控制过程。在另一种可选方式中，第一控制器可以向MEMS执行器发送控制信号，指示MEMS执行器驱动图像传感器沿x轴正方向移动0微米，实现第一控制器对图像传感器位置的实时调节。其中，w、u、q和p的数值精度均可以为0.1、0.01或0.001。
可选的，该MEMS执行器可以是面内平动式MEMS执行器，该面内平动式MEMS执行器是指该MEMS执行器仅驱动其连接的器件(即上述图像传感器)在某一平面内运动，则，当该MEMS执行器为面内平动式MEMS执行器时，可以驱动其连接的器件进行x轴、y轴方向的直线移动和/或绕roll轴运动。
综上所述，上述后端防抖组件中，由于图像晃动感测器可以直接检测图像的抖动方向和抖动量，该抖动量和抖动方向相较于惯性元件检测的摄像模组的抖动方向和抖动量更加精确，因此，根据该图像晃动感测器触发的抖动补偿更加精准。
可选的，该摄像模组还包括：前端防抖组件，该前端防抖组件可以设置在多处，以对成像光束进行第一抖动补偿。本申请实施例以该前端防抖组件设置在以下三处为例进行说明。
在第一种可选的实现方式中，如图10所示，该前端防抖组件104可以与光学折叠元件101连接，该前端防抖组件104包括：折叠元件致动结构1041和第二抖动检测结构1042。该折叠元件致动结构1041与光学折叠元件101固定连接，该第二抖动检测结构1042固定设置，例如当摄像模组包括壳体时，该第二抖动检测结构1042可以固定设置在该壳体上，或者该基底可以固定设置在其所在的终端的某一结构(如中板)上。
其中，该第二抖动检测结构1042被配置为检测摄像模组是否产生抖动。示例的，该第二抖动检测结构1042可以是惯性元件，例如陀螺仪或加速度计。
折叠元件致动结构1041被配置为在第二抖动检测结构1042检测到摄像模组10产生抖动后，驱动光学折叠元件101移动，以对成像光束进行第一抖动补偿。示例的，该折叠元件致动结构1041驱动该光学折叠元件101移动的方向可以有多种，例如该方向可以为该摄像模组内部坐标系的pitch轴方向和yaw轴方向。示例的，该折叠元件致动结构1041可以由MEMS执行器技术实现，也可以由VCM技术实现，还可以由SMA马达技术实现。
可选的，该前端防抖组件104还包括：第三控制器1043，该第三控制器1043分别与第二抖动检测结构1042和折叠元件致动结构1041连接。
该第三控制器1043被配置为执行第一抖动补偿的控制过程，也即是：获取第二抖动检测结构1042检测到的摄像模组10的第三抖动方向和第三抖动量，并基于第三抖动方向和第三抖动量确定第三抖动补偿方向和第三抖动补偿位移，基于第三抖动补偿方向和第三抖动补偿位移控制折叠元件致动结构1041驱动光学折叠元件101沿第三抖动补偿方向移动第三抖动补偿位移。
请参见图11，图11示出了如图10所示的摄像模组进行抖动补偿过程所涉及的控制逻辑示意图,也即是前端防抖组件配合后端防抖组件对成像光束进行抖动补偿过程所涉及的控制逻辑示意图。当由于手抖等原因引起摄像模组出现抖动时，第二抖动检测结构1042检测到该摄像模组的第三抖动方向和第三抖动量，该第三控制器1043获取第二抖动检测结构1042检测的第三抖动方向和第三抖动量，并根据该第三抖动方向和第三抖动量确定第三抖动补偿方向和第三抖动补偿位移，进而控制折叠元件致动结构1041驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移，从而完成该前端防抖组件对该成像光束的第一抖动补偿，之后，该后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿。其中，第三抖动补偿方向可以包括上述内部坐标系中的至少一个方向，第三抖动补偿位移包括与该至少一个方向一一对应的补偿位移，其可以为直线位移也可以为角度位移。
进一步的，该前端防抖组件还包括：第一反馈传感器，该第一反馈传感器与光学折叠元件或者折叠元件致动结构固定连接。示例的，该第一反馈传感器可以是霍尔传感器，也可以是位移传感器。
第一反馈传感器被配置为在折叠元件致动结构驱动光学折叠元件移动的过程中，向第三控制器发送指示该第一反馈传感器当前位移的反馈信号。
第三控制器被配置为基于反馈信号，控制折叠元件致动结构驱动光学折叠元件再次抖动补偿。
其中，第三控制器可以基于反馈信号确定光学折叠元件的位移，在光学折叠元件的位移与第三抖动补偿位移不同时，控制折叠元件致动结构驱动光学折叠元件进行再次抖动补偿，也即是向折叠元件致动结构发送控制信号，指示折叠元件致动结构驱动光学折叠元件沿第三抖动补偿方向移动第三位移，该第三位移为第三抖动补偿位移与光学折叠元件的位移的差值，其中，当第三位移为正值时，则沿第三抖动补偿方向移动该第三位移的绝对值，当第三位移为负值时，则沿第三抖动补偿方向的反方向移动该第三位移的绝对值。
在一种可选方式中，在光学折叠元件的位移与第三抖动补偿位移相同时，继续执行上述第一抖动补偿控制过程。在另一种可选方式中，为了使得反馈机制的控制逻辑一致，可以在光学折叠元件的位移与第三抖动补偿位移相同时，第三控制器可以向折叠元件致动结构发送控制信号，指示折叠元件致动结构驱动光学折叠元件沿第三抖动补偿方向移动第四位移，该第四位移为0。
需要说明的是，由于抖动过程是个连续的过程，实际实现时，上述第一抖动补偿控制过程是连续重复执行的，上述再次抖动补偿的控制过程也是连续重复执行的，这样可以实现对光学折叠元件位置的实时调节，保证最终的补偿精度。
这样，第三控制器通过该反馈传感器对折叠元件致动结构形成了闭环反馈控制，也即是，通过该反馈传感器建立了对折叠元件致动结构当前位移的反馈机制，提高了第三控制器对该折叠元件致动结构当前位移的精确控制，提高了前端防抖组件的补偿精度。
需要说明的是，第一反馈传感器可以集成在折叠元件致动结构上。
请参见图12，图12示出了如图10所示的摄像模组包括第一反馈传感器时，该摄像模组进行抖动补偿过程所涉及的控制逻辑示意图。该第三控制器1043控制折叠元件致动结构1041驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移的过程可以参考图11，其中，第一反馈传感器的工作过程可以参考上述图9所示的位移传感器的工作过程，本申请实施例 对此不在赘述。在第三控制器1043控制折叠元件致动结构1041驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移后，该前端防抖组件完成对该成像光束的第一抖动补偿，后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿。
示例的，假设该第二抖动检测结构为陀螺仪，第一反馈传感器为霍尔传感器，折叠元件致动结构为VCM，其中，该霍尔传感器的工作过程以图9所示的位移传感器的第一种可选实现方式中的涉及的工作过程为例进行说明。则该摄像模组进行抖动补偿过程所涉及的控制逻辑包括：
当由于手抖等原因引起摄像模组出现抖动时，陀螺仪检测到该摄像模组的第三抖动方向和第三抖动量，该第三控制器获取陀螺仪检测的第三抖动方向和第三抖动量，并根据该第三抖动方向和第三抖动量确定第三抖动补偿方向和第三抖动补偿位移，进而控制VCM驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移。在VCM驱动光学折叠元件移动的过程中，霍尔传感器实时向第三控制器发送指示霍尔传感器当前位移的反馈信号，第三控制器基于该反馈信号，确定光学折叠元件的位移，在光学折叠元件的位移与第三抖动补偿位移不同时，控制折叠元件致动结构驱动光学折叠元件进行再次抖动补偿，也即是向折叠元件致动结构发送控制信号，指示折叠元件致动结构驱动光学折叠元件沿第三抖动补偿方向移动第三位移。在一种可选方式中，在光学折叠元件的位移与第三抖动补偿位移相同时，继续执行上述第一抖动补偿控制过程。在另一种可选方式中，在光学折叠元件的位移与第三抖动补偿位移相同时，第三控制器可以向折叠元件致动结构发送控制信号，指示折叠元件致动结构驱动光学折叠元件沿第三抖动补偿方向移动第四位移，该第四位移为0。之后，后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿。
需要说明的是，该前端防抖组件中，第三控制器通过控制折叠元件致动结构进行多维度的运动，进而控制光路折叠元件进行多维度的运动，从而实现对成像光束的第一抖动补偿。该第一抖动补偿的过程包括，如图10所示，当成像光束的抖动方向为yaw轴和/或x轴方向时，该第三控制器控制折叠元件致动结构驱动光学折叠元件沿yaw轴方向移动；当成像光束的抖动方向为pitch轴和/或y轴方向时，图像传感器致动结构沿pitch轴方向移动。
在第二种可选的实现方式中，如图13所示，前端防抖组件104可以与镜组102连接，该前端防抖组件104包括：镜组致动结构1044和第三抖动检测结构1045。镜组致动结构1044与镜组102固定连接。该第三抖动检测结构1045固定设置，例如当摄像模组包括壳体时，该第三抖动检测结构1045可以固定设置在该壳体上，或者该基底可以固定设置在其所在的终端的某一结构(如中板)上。
该镜组致动结构1044被配置为在第三抖动检测结构1045检测到摄像模组10的抖动后，驱动镜组102移动，以对成像光束进行抖动补偿。示例的，该镜组致动结构1044驱动该镜组102移动的方向可以有多种，例如该方向可以为该摄像模组内部坐标系的x轴方向、y轴方向、pitch轴方向和yaw轴方向。示例的，该第三抖动检测结构1045可以是惯性元件，例如陀螺仪或加速度计。该镜组致动结构1044可以由MEMS执行器技术实现，也可以由VCM技术实现，还可以由SMA马达技术实现。
可选的，该前端防抖组件104还包括：第四控制器1046，该第四控制器1046分别与第三抖动检测结构1045和镜组致动结构1044连接。
第四控制器1046被配置为执行第一抖动补偿的控制过程，也即是：获取第三抖动检测结 构1045检测到的摄像模组的第四抖动方向和第四抖动量，并基于第四抖动方向和第四抖动量确定第四抖动补偿方向和第四抖动补偿位移，基于第四抖动补偿方向和第四抖动补偿位移控制镜组致动结构1044驱动镜组102沿第四抖动补偿方向移动第四抖动补偿位移。
请参见图14，图14示出了如图13所示的摄像模组进行抖动补偿过程所涉及的控制逻辑示意图。第四控制器1046控制镜组致动结构1044驱动镜组沿第四抖动补偿方向移动第四抖动补偿位移的过程与第三控制器控制折叠元件致动结构驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移的过程基本相同，因此，该摄像模组进行抖动补偿过程所涉及的控制逻辑与上述第一种可实现方式中，如图10所示的摄像模组进行抖动补偿过程所涉及的控制逻辑相同，本申请实施例对此不在赘述。
进一步的，该前端防抖组件还包括：第二反馈传感器，该第二反馈传感器与镜组或者镜组致动结构固定连接。示例的，该第二反馈传感器可以是霍尔传感器，也可以是位移传感器。
需要说明的是，该第二反馈传感器与上述第一反馈传感器的作用基本相同，其被配置为向第四控制器发送镜组当前位移的反馈信号，相应的，该第四控制器与上述第三控制器的作用基本相同。
请参见图15，图15示出了如图13所示的摄像模组包括第二反馈传感器时，该摄像模组进行抖动补偿过程所涉及的控制逻辑示意图。该摄像模组进行抖动补偿过程所涉及的控制逻辑与上述第一种可实现方式中，如图10所示的摄像模组包括第一反馈传感器构时，该摄像模组进行抖动补偿过程所涉及的控制逻辑，本申请实施例对此不在赘述。
示例的，假设该第三抖动检测结构为陀螺仪，第二反馈传感器为霍尔传感器，镜组致动结构为VCM，则第四控制器控制VCM驱动镜组沿第四抖动补偿方向移动第四抖动补偿位移的过程与第三控制器控制VCM驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移的过程基本相同，因此，该摄像模组进行抖动补偿过程所涉及的控制逻辑与上述图12所示的控制逻辑示意图对应的示例所提及的控制逻辑基本相同，本申请实施例对此不再赘述。
需要说明的是，该前端防抖组件中，第四控制器通过控制镜组致动结构进行多维度的运动，进而控制镜组进行多维度的运动，从而实现对成像光束的第一抖动补偿。该第一抖动补偿的过程包括：如图13所示，当成像光束的抖动方向为yaw轴方向时，该第三控制器控制折叠元件致动结构驱动光学折叠元件沿yaw轴方向移动；当成像光束的抖动方向为x轴方向时，该第三控制器控制折叠元件致动结构驱动光学折叠元件沿x轴方向移动；当成像光束的抖动方向为pitch轴方向时，图像传感器致动结构沿pitch轴方向移动；当成像光束的抖动方向为y轴方向时，图像传感器致动结构沿y轴方向移动。
在第三种可选的实现方式中，如图16所示，前端防抖组件104可以同时与光学折叠元件101和镜组102连接，则，该前端防抖组件104包括上述第一种可选的实现方式和第二种可选的实现方式中所有结构，也即是，前端防抖组件104包括：折叠元件致动结构1041、第二抖动检测结构1042、第三控制器1043、镜组致动结构1044、第三抖动检测结构1045和第四控制器1046。其中，该前端防抖组件104中所有结构的连接关系可以参考上述第一种和第二种可选的实现方式。
请参见图17，图17示出了如图16所示的摄像模组进行抖动补偿过程所涉及的控制逻辑示意图。其中，第三控制器1043控制折叠元件致动结构1041驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移的过程可以参考图11，第四控制器1046控制镜组致动结构 1044驱动镜组沿第四抖动补偿方向移动第四抖动补偿位移的过程可以参考图14，本申请实施例对此不在赘述。在该前端防抖组件完成对该成像光束的第一抖动补偿之后，后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿。
可选的，该前端防抖组件还包括：第一反馈传感器和第二反馈传感器，该第一反馈传感器和该第二反馈传感器与前端防抖组件的连接关系可以参考上述第一种和第二种可选的实现方式。
请参见图18，图18示出了如图16所示的摄像模组包括第一反馈传感器和第二反馈传感器时，该摄像模组进行抖动补偿过程所涉及的控制逻辑示意图。其中，第三控制器1043控制折叠元件致动结构1041驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移的过程可以参考图12，第四控制器1046控制镜组致动结构1044驱动镜组沿第四抖动补偿方向移动第四抖动补偿位移的过程可以参考图15，本申请实施例对此不在赘述。在该前端防抖组件完成对该成像光束的第一抖动补偿之后，后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿。
示例的，假设该第二抖动检测结构和第三抖动检测结构均为陀螺仪，第一反馈传感器和第二反馈传感器均为霍尔传感器，折叠元件致动结构和镜组致动结构均为VCM，则该摄像模组进行抖动补偿过程所涉及的控制逻辑包括：上述图12所示的控制逻辑示意图对应的示例中，第三控制器控制VCM驱动光学折叠元件沿第三抖动补偿方向移动第三抖动补偿位移的过程；上述图15所示的控制逻辑示意图对应的示例中，第四控制器控制VCM驱动镜组沿第四抖动补偿方向移动第四抖动补偿位移的过程；该前端防抖组件完成对该成像光束的第一抖动补偿之后，后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿。
需要说明的是，上述第三控制器和第四控制器可以为一个控制器，假设该控制器可为第二控制器，该第二控制器分别与第二抖动检测结构、第三抖动检测结构、图像传感器致动结构、镜组致动结构和折叠元件致动结构连接。
该第二控制器被配置接收第二抖动检测结构和第三抖动检测结构检测到的摄像模组的第二抖动方向和第二抖动量，基于第二抖动方向和第二抖动量确定目标抖动方向和目标抖动量，分别控制镜组致动结构和折叠元件致动结构移动，使镜组和光学折叠元件在目标抖动方向上移动的总位移为目标抖动量。
在第三控制器和第四控制器为一个控制器，也即是摄像模组包括第二控制器的情况下，该摄像模组进行抖动补偿过程所涉及的控制逻辑与上述图18所示的摄像模组进行抖动补偿过程所涉及的控制逻辑基本相同，其中，该第二控制器同时获取第二抖动检测结构和第三抖动检测结构检测的第二抖动方向和第二抖动量，并将该第二抖动方向和第二抖动量进行分配，以使光学折叠元件和镜组通过分别在目标抖动方向上进行移动，该移动的总位移为目标抖动量，本申请实施例对此不再赘述。
需要说明的是，上述第一、第二和第三种可选的实现方式中，后端防抖组件对该前端防抖组件第一抖动补偿后的成像光束进行第二抖动补偿的过程可以参考上述图7或图9所示的后端防抖组件进行第二抖动补偿过程，本申请实施例对此不做赘述。
还需说明的是，光学折叠元件也可以集成在折叠元件致动结构上，镜组也可以集成在镜组致动结构上，图像传感器也可以集成在图像传感器致动结构上。
可选的，如图19所示，该摄像模组10还包括：具有腔体的壳体106，光学折叠元件101、 镜组102、图像传感器103、前端防抖组件104和后端防抖组件105固定设置在壳体106中，壳体106的一端设置有入光开口1061，入光开口1061供成像光束入射。需要说明的是，图19示意性地绘制了该前端防抖组件104与光学折叠元件101连接的情况下，该摄像模组的结构示意图。
综上所述，本申请实施例提供的摄像模组中，由于前端防抖组件和后端防抖组件可以对成像光束分别进行第一抖动补偿和第二抖动补偿，通过第一抖动补偿和第二抖动补偿的相互配合，相较于传统的只进行一次抖动补偿的情况，提高了最终对成像光束的抖动补偿精度。
进一步的，由于第一抖动补偿和第二抖动补偿的相互配合，扩大了对长焦光路的抖动补偿范围，同时，由于第二抖动补偿的精度大于第一抖动补偿的精度，提高了对长焦光路的抖动补偿精度。
进一步的，该摄像模组中，前端防抖组件可以实现四轴(x、y、pitch和yaw轴)抖动补偿，而后端防抖组件不仅可以通过较高精度的第一抖动检测结构与较高精度的图像传感器致动结构的配合，实现更高精度的四轴(x、y、pitch和yaw轴)还可以通过图像传感器roll轴方向的角度位移实现对成像光束抖动方向为roll轴的抖动补偿，从而使该摄像模组实现五轴防抖。
请参考图20，其示出了本申请实施例提供的终端的结构示意图。该终端2包括：处理器21、存储器22、数据传输组件和至少一个摄像模组25，示例的，该数据传输组件可以为接收器23和发射器24。该至少一个摄像模组25包括本申请实施例提供的任一摄像模组。例如，该终端可以为手机、笔记本、平板电脑、行车记录仪、相机或者监控设备等。示例的，当该终端为手机时，该手机包括前置摄像模组和后置摄像模组，后置摄像模组为本申请实施例提供的任一摄像模组。
其中，处理器21可以是终端2的控制中心，利用各种接口和线路连接整个终端的各个部分，通过运行或执行存储在存储器22内的程序、指令和/或软件模块，以及调用存储在存储器22内的数据，执行终端2的各种功能和处理数据，从而对终端2进行整体控制。例如，通过运行存储在存储器22内的程序或执行存储在存储器22内的指令，以实现各种功能。
示例的，处理器21可以包括一个或多个处理核心，比如4核心处理器或8核心处理器等。处理器21也可以采用数字信号处理(Digital Signal Processing，DSP)、现场可编程门阵列(Field－Programmable Gate Array，FPGA)或可编程逻辑阵列(Programmable Logic Array，PLA)中的至少一种硬件形式来实现。处理器21还可以集成应用处理器和调制解调处理器，其中，应用处理器主要处理操作系统、用户界面和应用程序等，调制解调处理器主要处理无线通信。可以理解的是，上述调制解调处理器也可以不集成到处理器21中。
存储器22可用于存储程序、指令、软件模块和/或数据。处理器21通过运行存储在存储器22的程序以及软件模块，从而执行各种功能应用以及数据处理。示例的，存储器22可主要包括存储程序区和存储数据区，其中，存储程序区可存储操作系统221、检测模块222、重定向模块223、读取模块224、同步模块225、记录模块226和设置模块227以及各个功能所需的应用程序228(比如图像拍摄功能、图像播放功能等)等；存储数据区可存储根据终端2的使用所创建的数据(比如图像数据、电话本等)等。此外，存储器22可以由任何类型的易失性或非易失性存储设备或者它们的组合实现，如静态随机存取存储器(Static Random Access  Memory，SRAM)，电可擦除可编程只读存储器(Electrically Erasable Programmable Read-Only Memory，EEPROM)，可擦除可编程只读存储器(Erasable Programmable Read Only Memory，EPROM)，可编程只读存储器(Programmable Read-Only Memory，PROM)，只读存储器(Read Only Memory，ROM)，磁存储器，快闪存储器，磁盘或光盘。相应地，存储器22还可以包括存储器控制器，以提供处理器21对存储器22的访问。
接收器23被配置为接收数据，该数据被发送到处理器21处理，或者被发送到存储器22中存储，示例的，该接收器23可以为接收天线。
发射器24被配置为发送数据，该数据可以为处理器21中的数据，也可以为存储器22中存储的数据，示例的，该发射器24可以为发射天线。
至少一个摄像模组25可以包括前置摄像模组和/或后置摄像模组。
可选的，终端2还包括显示屏26，显示屏26被配置为显示数据，例如通过用户界面(User Interface，UI)显示数据。该UI可以包括图形、文本、图标、视频及其它们的任意组合。当显示屏26是触摸显示屏时，显示屏26还具有采集在显示屏26的表面或表面上方的触摸信号的能力。该触摸信号可以作为控制信号输入至处理器21进行处理。此时，显示屏26还可以用于提供虚拟按钮和/或虚拟键盘，也称软按钮和/或软键盘。示例的，显示屏26可以为一个，设置终端2的前盖，显示屏26也可以为至少两个，分别设置在终端2的不同表面或呈折叠设计，显示屏26还可以是柔性显示屏，设置在终端2的弯曲表面上或折叠面上。甚至，显示屏26还可以设置成非矩形的不规则图形，也即异形屏。显示屏26可以为液晶显示阵列(Liquid Crystal Display，LCD)显示屏或有机发光二极管(Organic Light-Emitting Diode,OLED)显示屏。
可选的，终端2还包括电源(图中未示出)，该电源被配置为为各个部件供电，其中，该电源可以通过电源管理系统与处理器21逻辑相连，从而通过电源管理系统实现管理充电、放电、以及功耗管理等功能。示例的，电源可以包括一个或一个以上的直流或交流电源、再充电系统、电源故障检测电路、电源转换器或者逆变器、电源状态指示器等任意组件。
需要说明的是，本领域技术人员可以理解，图20中示出的终端结构并不构成对终端的限定，可以包括比图示更多或更少的部件，或者组合某些部件，或者不同的部件布置，本申请实施例对此不做限定。
本申请实施例提供的一种防抖组件105，该防抖组件105的结构可以参考前述的后端防抖组件的结构，请参见图3至图9，该防抖组件105包括：
图像传感器致动结构1051和第一抖动检测结构1052。该图像传感器致动结构1051与图像传感器103固定连接，该第一抖动检测结构1052可以与图像传感器致动结构1051固定连接，也可以集成在该图像传感器致动结构1051上。
图像传感器103具有图像采集区域，图像传感器103被配置为通过图像采集区域采集接收到的成像光束。
该第一抖动检测结构1052具有感光区域，第一抖动检测结构1052设置在图像传感器103的图像采集区域周围，第一抖动检测结构1052被配置为通过采集区域采集接收到的成像光束，检测感光区域所采集的成像光束是否产生抖动。
图像传感器致动结构1051被配置为在第一抖动检测结构1052检测到感光区域所采集的成像光束产生抖动后，驱动图像传感器103移动，以对成像光束进行第二抖动补偿。
在本申请实施例中，该图像传感器致动结构1051驱动该图像传感器103移动的方向可以有多种，例如该方向可以为该摄像模组内部坐标系的x轴方向、y轴方向和yaw轴方向。示例的，该图像传感器致动结构可以由MEMS执行器技术实现，也可以由VCM技术实现，还可以由SMA马达技术实现。其中，该MEMS执行器包括位移传感器，图像传感器可以集成在该MEMS执行器上。
可选的，该第一抖动检测结构1052包括至少一个图像晃动感测器。示例的，该第一抖动检测结构包括四个图像晃动感测器，该四个图像晃动感测器可以分别与传感器驱动组件1051的可动载台10511固定连接，也可以集成在图像传感器103的图像采集区域之外的区域上。其中，该四个图像晃动感测器与上述后端防抖组件中的图像晃动感测器相同。
可选的，该防抖组件105与上述图6所示的后端防抖组件的结构相同，如图6所示，防抖组件105还包括第一控制器1053，该第一控制器1053与分别与第一抖动检测结构1052和图像传感器致动结构1051连接，该第一控制器1053被配置的功能与上述后端防抖组件中第一控制器被配置的功能相同，本申请实施例对此不在赘述。
该防抖组件进行抖动补偿过程与上述图7所示的后端防抖组件进行抖动补偿的过程相同，则，该防抖组件进行抖动补偿过程所涉及的控制逻辑，可以参考上述图7所示的后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑，本申请实施例对此不做限定。
可选的，该防抖组件105与上述图8所示的后端防抖组件的结构相同，如图8所示，防抖组件105还包括位移传感器1054，位移传感器1054与图像传感器103或者图像传感器致动结构1051的指定位置处固定连接，指定位置处为图像传感器致动结构1051中与图像传感器103同步运动的器件处。其中，该移传感器1054被配置的功能与上述后端防抖组件中移传感器被配置的功能相同，相应的，该第一控制器1053被配置的功能与上述后端防抖组件中第一控制器被配置的功能相同，本申请实施例对此不在赘述。
该防抖组件进行抖动补偿过程与上述图9所示的后端防抖组件进行抖动补偿的过程相同，则，该防抖组件进行抖动补偿过程所涉及的控制逻辑，可以参考上述图9所示的后端防抖组件进行第二抖动补偿过程所涉及的控制逻辑，本申请实施例对此不做限定。
需要说明的是，该防抖组件中第一控制器通过控制图像传感器致动结构进行多维度的运动，进而控制图像传感器进行多维度的运动，以实现对该成像光束的抖动补偿的过程，该抖动补偿过程与上述后端防抖组件中第一控制器通过控制图像传感器致动结构进行多维度的运动，进而控制图像传感器进行多维度的运动，以实现对该成像光束的抖动补偿的过程的相同，本申请实施例对此不做赘述。
还需说明的是，由于该防抖组件的结构和工作原理与前述实施例中后端防抖组件的结构和工作原理相同，因此，该防抖组件的实施例可以参考前述后端防抖组件的实施例，本申请实施例对此不做赘述。
综上所述，本申请实施例提供的防抖组件中，由于图像晃动感测器可以直接检测图像的抖动方向和抖动量，该抖动量和抖动方向相较于惯性元件检测的摄像模组的抖动方向和抖动量更加精确，因此，根据该图像晃动感测器触发的抖动补偿更加精准。
进一步的，由于该图像传感器致动结构可以驱动该图像传感器进行x、y和roll轴的移动，从而对该成像光束在图像传感器上成像的图像可以实现五轴(x、y、pitch、yaw和roll)抖动补偿。
本申请实施例中，致动(actuate)指通过电信号或磁信号等信号驱动某物体移动。则上述图像传感器致动结构、折叠元件致动结构、镜组致动结构和致动件均指的是通过电信号或磁信号等信号使某物体移动的结构或器件。
在本申请中，术语“第一”、“第二”、“第三”和“第四”仅用于描述目的，而不能理解为指示或暗示相对重要性。术语“多个”指两个或两个以上，术语“至少一个”表示一个或多个，除非另有明确的限定。本申请中术语“和/或”，仅仅是一种描述关联对象的关联关系，表示可以存在三种关系，例如，A和/或B，可以表示：单独存在A，同时存在A和B，单独存在B这三种情况。

Claims (20)

  1. 一种摄像模组，其特征在于，包括：
    沿成像光束传输方向依次排列的光学折叠元件、镜组和图像传感器；
    所述光学折叠元件被配置为将接收到的成像光束的光路折叠并传递至所述镜组；
    所述镜组被配置为将接收到的成像光束传输至所述图像传感器；
    所述图像传感器具有图像采集区域，所述图像传感器被配置为通过所述图像采集区域采集接收到的成像光束；
    所述摄像模组还包括：前端防抖组件和后端防抖组件，
    所述前端防抖组件与所述光学折叠元件和所述镜组中的至少一个连接，所述后端防抖组件与所述图像传感器连接，所述前端防抖组件被配置为对成像光束进行第一抖动补偿，所述后端防抖组件被配置为对成像光束进行第二抖动补偿。
  2. 根据权利要求1所述的摄像模组，其特征在于，所述后端防抖组件包括：
    图像传感器致动结构和第一抖动检测结构；
    所述图像传感器致动结构与所述图像传感器固定连接；
    所述第一抖动检测结构具有感光区域，所述第一抖动检测结构设置在所述图像传感器的图像采集区域周围，所述第一抖动检测结构被配置为通过所述感光区域采集接收到的成像光束，检测所述感光区域所采集的成像光束是否产生抖动，所述第一抖动检测结构的帧率大于所述图像传感器的帧率；
    所述图像传感器致动结构被配置为在所述第一抖动检测结构检测到所述感光区域所采集的成像光束产生抖动后，驱动所述图像传感器移动，以对所述成像光束进行第二抖动补偿。
  3. 根据权利要求2所述的摄像模组，其特征在于，
    所述图像传感器致动结构包括可动载台、基底、弹性悬挂元件和致动件；
    所述基底固定设置，所述可动载台与所述基底通过弹性悬挂元件连接，所述可动载台与所述致动件固定连接；
    所述可动载台用于承载所述图像传感器和所述第一抖动检测结构，所述致动件被配置为驱动所述可动载台相对于所述基底运动。
  4. 根据权利要求3所述的摄像模组，其特征在于，
    所述基底为具有凹槽的壳体，所述凹槽的开口呈矩形，所述可动载台为矩形板状结构，且设置在所述凹槽内，所述可动载台的四个侧壁分别通过所述弹性悬挂元件与所述凹槽的内壁连接，所述致动件被配置为驱动所述可动载台在所述凹槽内执行绕所述镜组的光轴旋转和沿垂直于所述镜组的光轴的方向平移中的至少一种动作。
  5. 根据权利要求4所述的摄像模组，其特征在于，
    所述致动件为静电致动件、电磁致动件、电热致动件或压电致动件。
  6. 根据权利要求3所述的摄像模组，其特征在于，
    所述第一抖动检测结构与所述可动载台固定连接；或，
    所述第一抖动检测结构集成在所述图像传感器的图像采集区域之外的区域上。
  7. 根据权利要求2至6任一所述的摄像模组，其特征在于，
    所述第一抖动检测结构包括至少一个图像晃动感测器。
  8. 根据权利要求7所述的摄像模组，其特征在于，
    所有所述图像晃动感测器的帧率相同，且大于所述图像传感器的帧率；
    和/或，所述感光区域的面积大于或等于所述前端防抖组件的最大跟踪误差的平方，所述最大跟踪误差为所述前端防抖组件在对所述成像光束进行第一抖动补偿后，所述成像光束所在位置与理想的第一抖动补偿的目标位置的最大偏移距离差；
    和/或，所述图像晃动感测器的感光区域的像素密度大于或等于所述图像传感器的图像采集区域的像素密度。
  9. 根据权利要求2至8任一所述的摄像模组，其特征在于，所述后端防抖组件还包括：
    第一控制器，所述第一控制器分别与所述第一抖动检测结构和所述图像传感器致动结构连接，
    所述第一控制器被配置为获取所述第一抖动检测结构检测到的成像光束的第一抖动方向和第一抖动量，并基于所述第一抖动方向和所述第一抖动量确定第一抖动补偿方向和第一抖动补位移，基于所述第一抖动补偿方向和所述第一抖动补偿位移控制所述图像传感器致动结构驱动所述图像传感器沿第一抖动补偿方向移动所述第一抖动补偿位移。
  10. 根据权利要求9所述的摄像模组，其特征在于，所述后端防抖组件还包括：
    位移传感器，所述位移传感器与所述图像传感器固定连接或者所述图像传感器致动结构的指定位置处固定连接，所述指定位置处为所述图像传感器致动结构中与所述图像传感器同步运动的器件处；
    所述位移传感器被配置为在所述图像传感器致动结构驱动所述图像传感器移动的过程中，向所述第一控制器发送指示所述位移传感器当前位移的反馈信号；
    所述第一控制器被配置为基于所述反馈信号确定所述图像传感器的位移，并在所述图像传感器的位移与所述第一抖动补偿位移不同时，控制所述图像传感器致动结构驱动所述图像传感器进行再次抖动补偿。
  11. 根据权利要求10所述的摄像模组，其特征在于，
    所述位移传感器包括线性位移传感器和角度位移传感器中的至少一种。
  12. 根据权利要求10或11所述的摄像模组，其特征在于，
    所述图像传感器致动结构包括微机电系统MEMS执行器；
    所述位移传感器集成在所述MEMS执行器中。
  13. 根据权利要求1至12任一所述的摄像模组，其特征在于，所述前端防抖组件与所述光学折叠元件连接，所述前端防抖组件包括：
    折叠元件致动结构和第二抖动检测结构；所述折叠元件致动结构与所述光学折叠元件固定连接；
    所述第二抖动检测结构被配置为检测所述摄像模组是否产生抖动；
    所述折叠元件致动结构被配置为在所述第二抖动检测结构检测到所述摄像模组产生抖动后，驱动所述光学折叠元件移动，以对所述成像光束进行第一抖动补偿。
  14. 根据权利要求1至12任一所述的摄像模组，其特征在于，所述前端防抖组件与所述镜组连接，所述前端防抖组件包括：
    镜组致动结构和第三抖动检测结构，所述镜组致动结构与所述镜组固定连接，所述镜组 致动结构被配置为在所述第三抖动检测结构检测到所述摄像模组的抖动后，驱动所述镜组移动，以对所述成像光束进行抖动补偿。
  15. 根据权利要求13所述的摄像模组，其特征在于，所述前端防抖组件与所述光学折叠元件连接，所述前端防抖组件还包括：
    镜组致动结构和第三抖动检测结构，所述镜组致动结构与所述镜组固定连接，所述镜组致动结构被配置为在所述第三抖动检测结构检测到所述摄像模组的抖动后，驱动所述镜组移动，以对所述成像光束进行抖动补偿；
    所述摄像模组还包括：
    第二控制器，所述第二控制器分别与所述第二抖动检测结构、第三抖动检测结构、所述图像传感器致动结构、所述镜组致动结构和所述折叠元件致动结构连接；
    所述第二控制器被配置接收所述第二抖动检测结构和所述第三抖动检测结构检测到的所述摄像模组的第二抖动方向和第二抖动量，基于所述第二抖动方向和所述第二抖动量确定目标抖动方向和目标抖动量，分别控制所述镜组致动结构和所述折叠元件致动结构移动，使所述镜组和所述光学折叠元件在所述目标抖动方向上移动的总位移为所述目标抖动量。
  16. 根据权利要求15所述的摄像模组，其特征在于，
    所述第二抖动检测结构和所述第三抖动检测结构均为惯性传感器；
    和/或，所述折叠元件致动结构和所述镜组致动结构均为MEMS执行器。
  17. 根据权利要求1至16任一所述的摄像模组，其特征在于，所述摄像模组还包括：
    具有腔体的壳体，所述光学折叠元件、所述镜组、所述图像传感器、所述前端防抖组件和所述后端防抖组件固定设置在所述壳体中，所述壳体的一端设置有入光开口，所述入光开口供所述成像光束入射。
  18. 一种终端，其特征在于，包括：
    至少一个摄像模组、存储器、处理器和数据传输组件；
    所述存储器被配置为存储程序或指令；
    所述处理器被配置为通过运行存储在所述存储器内的程序或执行存储在所述存储器内的指令，以实现各种功能；
    所述数据传输组件被配置为传输数据；
    其中，所述至少一个摄像模组包括权利要求1至17任一所述摄像模组。
  19. 一种防抖组件，其特征在于，包括：
    图像传感器致动结构和第一抖动检测结构，
    所述图像传感器致动结构与图像传感器固定连接，
    所述图像传感器具有图像采集区域，所述图像传感器被配置为通过所述图像采集区域采集接收到的成像光束；
    所述第一抖动检测结构具有感光区域，所述第一抖动检测结构设置在所述图像传感器的图像采集区域周围，所述第一抖动检测结构被配置为通过所述感光区域采集接收到的成像光束，检测所述感光区域所采集的成像光束是否产生抖动；
    所述图像传感器致动结构被配置为在所述第一抖动检测结构检测到所述感光区域所采集的成像光束产生抖动后，驱动所述图像传感器移动，以对所述成像光束进行第二抖动补偿。
  20. 根据权利要求19所述的防抖组件，其特征在于，
    所述图像传感器致动结构包括微机电系统MEMS执行器，所述第一抖动检测结构包括至少一个图像晃动感测器。
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