WO2022233289A1 - 摄像模组、光学致动器、感光组件及其制造方法 - Google Patents

摄像模组、光学致动器、感光组件及其制造方法 Download PDF

Info

Publication number
WO2022233289A1
WO2022233289A1 PCT/CN2022/090872 CN2022090872W WO2022233289A1 WO 2022233289 A1 WO2022233289 A1 WO 2022233289A1 CN 2022090872 W CN2022090872 W CN 2022090872W WO 2022233289 A1 WO2022233289 A1 WO 2022233289A1
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever
piezoelectric
piezoelectric element
photosensitive
axis
Prior art date
Application number
PCT/CN2022/090872
Other languages
English (en)
French (fr)
Inventor
赵波杰
王明珠
叶林敏
戎琦
阙嘉耀
傅强
黄桢
方银丽
陈卓
袁栋立
郑雪莹
冯心如
Original Assignee
宁波舜宇光电信息有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CN202110496375.1A external-priority patent/CN115390341A/zh
Priority claimed from CN202110534392.XA external-priority patent/CN115379072B/zh
Priority claimed from CN202110539951.6A external-priority patent/CN115379074B/zh
Priority claimed from CN202110610689.XA external-priority patent/CN115426448B/zh
Priority claimed from CN202110616207.1A external-priority patent/CN115440749A/zh
Application filed by 宁波舜宇光电信息有限公司 filed Critical 宁波舜宇光电信息有限公司
Priority to CN202280032521.8A priority Critical patent/CN117255969A/zh
Publication of WO2022233289A1 publication Critical patent/WO2022233289A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B5/02—Lateral adjustment of lens
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules

Definitions

  • the invention relates to the field of camera modules, in particular to a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof.
  • OIS optical image stabilization
  • the method used is to provide a reflector and a base supporting the reflector, use different pivots to support the reflector, and use magnets, coils, Hall sensors, and shrapnel/suspended wire/balls and other components. Control the mirror to avoid jitter during use.
  • this solution has a complex structure, a large number of parts, and is difficult to produce and maintain. Coils and magnets are also generally larger in size, which is not suitable for the trend of gradual miniaturization of portable terminals.
  • the existing traditional anti-shake drive mechanism is insufficient in thrust, and it is difficult to meet the future development trend.
  • a main advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the camera module is a periscope camera module, and the periscope camera module includes at least A piezoelectric driving device and a reflecting prism are used to drive the reflecting prism to move through the piezoelectric driving device, which is beneficial to improve the force required for the moving of the reflecting prism.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the driving shaft in the reflective prism base of the periscope camera module and the driving shaft of the piezoelectric driving device They are arranged on the same side, parallel to the optical axis of the lens group and located on the same plane, which is beneficial to reduce the overall volume of the periscope camera module, realize the compact package of the module structure, and make the module structure more miniaturized.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the circuit arrangement of the periscope camera module in the continuous zoom module structure is optimized, so that the wiring space is Narrower and more integrated.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the periscope camera module utilizes a piezoelectric structure combined with a reflective prism, and utilizes the large size of the piezoelectric motor. Driving force and small size to drive the reflective prism for higher precision anti-shake function.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the piezoelectric motor adopted by the periscope camera module has a large driving force and a small size, and the piezoelectric motor can Instead of large-sized structures such as coils and magnets in the existing anti-shake solution, and the traditional anti-shake drive mechanism often has insufficient thrust, the use of piezoelectric motors can better solve this problem, which is conducive to improving the stability of the module. sex.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the circuit wiring of the periscope camera module is arranged inside the bottom of the casing or attached to the casing On the surface of the second long side inside the body, the internal space problem of the camera module is effectively improved, and the space for the driving element is better provided, which can make the module structure more miniaturized and realize the compact package of the module structure.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a method for manufacturing the same, wherein the periscope camera module directly drives the lens group by using piezoelectric elements, further reducing the number of components required. The required size is reduced, and the lateral size is reduced, thereby reducing the overall volume and size of the module, and the structure tends to be miniaturized.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a method for manufacturing the same, wherein the periscope camera module is further simplified by optimizing the circuit arrangement in the continuous zoom module structure.
  • the structure is convenient for assembly, the assembly process is less, and the cost is saved.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the driving device of the periscope camera module directly drives the focusing/focusing lens group, reducing the number of driving components desired size.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, wherein the active element of the periscope camera module is disposed adjacent to the driving focusing/focusing lens group, reducing the module size or achieve compact packaging.
  • Another advantage of the present invention is to provide a camera module, an optical actuator, a photosensitive component and a manufacturing method thereof, which further simplifies the assembly structure of the periscope camera module, facilitates assembly, and has fewer assembly steps. Conducive to improving production and processing efficiency.
  • a periscope camera module of the present invention that can achieve the foregoing object and other objects and advantages includes:
  • a reflection prism wherein the camera module body has an optical axis, and the reflection prism is disposed on the light incident side of the camera module body along the optical axis direction of the camera module body, so as to provide the the reflecting prism reflects external light to the camera module body;
  • a prism drive device wherein the reflecting prism is drivably connected to the prism drive device, wherein the prism drive device includes a prism drive shaft and a piezoelectric driver, wherein the piezoelectric driver and the prism drive The shafts are fixedly connected, and the prism drive shaft is parallel to the optical axis direction of the camera module body, wherein the prism drive shaft is driven in a straight line along the optical axis direction by the piezoelectric driver Movement to change the direction of the light emitted from the reflecting prism and compensate for the optical jitter of the camera module body; and
  • At least one lens driving device wherein the lens driver is drivingly connected with the lens group, and the lens group is driven by the lens driver to move in a specific direction
  • the lens driving device includes a piezoelectric driving shaft and a A vibration component, wherein the piezoelectric drive shaft is parallel to the optical axis of the camera module body, and one end of the piezoelectric drive shaft is fixed, wherein the prism drive shaft of the prism drive device is connected to the lens
  • the piezoelectric driving axis of the driving device is located on the same side of the positive direction of the X-axis of the reference axis inside the housing, and is parallel to the optical axis of the lens group.
  • it further includes a prism seat, wherein the reflecting prism is arranged on the prism seat, the prism seat is drivingly connected with the prism driving device, and the prism seat is driven by the prism driving device. The prism seat is then driven by the prism seat to move the reflecting prism synchronously.
  • the reflecting prism further has an inclined surface
  • the prism base has a supporting surface
  • the inclined surface of the reflecting prism is supported on the supporting surface of the prism base
  • the The inclined surface of the reflecting prism is in contact with the supporting surface of the prism base.
  • it further comprises a transmission device, wherein the transmission device is drivably connected to the prism driving device and the prism base, wherein the transmission device can be driven by the prism driving device,
  • the prism seat is driven in a rotational manner by the transmission device.
  • the prism drive shaft is vertically connected to the transmission device, the prism drive shaft and the transmission device are in a vertical state, and the transmission device converts the linear motion of the prism drive shaft It is a rotational movement around the reference axis X-axis direction, so as to change the outgoing light direction of the reflecting prism.
  • the transmission device further comprises a shaft seat and a transmission shaft arranged on the shaft seat, wherein the shaft seat is arranged on the prism seat, and the shaft seat is located on the The supporting surface of the prism seat and the corresponding surface of the reflecting prism.
  • the transmission shaft of the transmission device is driven by the prism drive shaft as a guide mechanism, and is converted into a driving force for driving the rotation of the prism seat, so as to drive the prism seat to rotate around Rotation is performed in the direction perpendicular to the reference axis X-axis.
  • the piezoelectric driver includes a piezoelectric element, the piezoelectric element is in a laminated structure, and the piezoelectric element includes a plurality of piezoelectric stretch bodies and a plurality of internal electrodes, the inner The electrodes are formed by alternately stacking a plurality of piezoelectric stretchable bodies, and a plurality of piezoelectric stretchable bodies and a plurality of internal electrodes are stacked on each other.
  • the prism driving device includes a piezoelectric motor and a crank-slider mechanism, wherein the piezoelectric motor is drivingly connected with the crank-slider mechanism, wherein the crank-slider mechanism is driveably connected to the prism base, and the piezoelectric motor drives the prism base and the reflection prism to move through the crank-slider mechanism.
  • the crank-slider mechanism further comprises a crank, a slider and a connecting shaft, wherein the slider is drivingly connected with the piezoelectric motor and driven by the piezoelectric motor The slider moves linearly along the optical axis direction.
  • connection axis is parallel to the reference axis X axis
  • crank is parallel to the plane where the optical axis of the lens group and the reference axis Y axis are located.
  • the prism driving device further includes a guiding element, wherein one end of the guiding element is connected with the slider, and the other end is connected with the prism seat.
  • the main body of the camera module includes a lens group, an image sensor arranged along the direction of the optical axis, and a casing for fixing the lens group and the image sensor.
  • the circuit wiring of the camera module is arranged on the inner side of the bottom of the casing; or the circuit of the camera module is attached to a side surface inside the casing.
  • the main body of the camera module further includes at least one lens driving device, wherein the lens driver is drivingly connected with the lens group, and the lens group is driven by the lens driver in a specific direction move to adjust the focus of the entire system.
  • the lens group further includes a first lens group, a second lens group and a third lens group, wherein the reflective prism is located at the object of the first lens group of the lens group side end, wherein the light reflected by the reflecting prism passes through the first lens group to the second lens group, the second lens group is located on the light-emitting side of the first lens group, and the third lens group is located on the first lens group The light-emitting side of the two lens groups.
  • the lens driving device further includes a first lens driving unit and a second lens driving unit, wherein the first lens driving unit is drivingly connected with the second lens assembly, and is driven by the The first lens driving unit drives the second lens assembly to move horizontally and laterally along the direction of the optical axis to adjust the focal length of the entire system; the second lens driving unit is connected to the third lens assembly in a driving manner, and is driven by the The second lens driving unit drives the third lens assembly to move horizontally and laterally along the optical axis direction, so that the camera module plays a role of continuous zooming.
  • the lens driving device includes a piezoelectric driving shaft and a vibration component, wherein the piezoelectric driving shaft is parallel to the optical axis of the camera module body, and the piezoelectric driving shaft is One end is fixed, and the other end is fixedly connected with the vibrating component through adhesive, so that the vibrating component drives the piezoelectric drive shaft to vibrate.
  • the prism drive shaft of the prism drive device and the piezoelectric drive shaft of the lens drive device are located on the same side of the positive direction of the X-axis of the reference axis inside the housing, and both are the same as The optical axes of the lens groups are parallel to each other.
  • At least one magnetic sensor is further included, wherein the magnetic sensor is disposed between the lens group and the housing.
  • Another advantage of the present application is to provide a camera module, wherein the camera module adopts a novel MEMS driver as a piezoelectric element to drive the displacement of the photosensitive chip to realize optical anti-shake.
  • a photosensitive component which includes:
  • a base plate comprising: a fixed part, a movable part, and at least two cantilever arms extending between the fixed part and the movable part, the movable part being suspended by the at least two cantilever arms
  • the fixed part, the fixed part, the movable part and the at least two suspension arms have an integrated structure
  • a photosensitive chip disposed on and electrically connected to the movable portion, the photosensitive chip is provided with a photosensitive shaft;
  • the at least one piezoelectric element is disposed on at least one of the at least two cantilever arms, and is configured to actuate the said at least one through its own deformation after being turned on
  • the cantilever arm is warped along the direction set by the photosensitive axis to drive the movable part and the photosensitive chip so that the photosensitive chip generates a certain inclination angle with respect to the fixed part. Perform optical image stabilization.
  • each of the suspension arms has an opposite first end and a second end, the first end is fixed to the fixing portion, and the second end is fixed to the Movable part.
  • the at least two suspension arms include a first suspension arm and a second suspension arm, and the first suspension arm and the second suspension arm are movable relative to the The parts are arranged symmetrically.
  • the at least one piezoelectric element includes a first piezoelectric element, wherein the first piezoelectric element is disposed on the first suspension arm and configured to be guided After passing through, the first suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation to drive the movable part and the photosensitive chip, so that the photosensitive surface of the photosensitive chip is relatively opposite to the photosensitive chip.
  • the fixed part generates a certain inclination angle, and in this way, optical image stabilization is performed.
  • the at least one piezoelectric element further includes a second piezoelectric element, wherein the second piezoelectric element is disposed on the second suspension arm and configured to be After being turned on, the second suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation to drive the movable part and the photosensitive chip, so that the photosensitive surface of the photosensitive chip is relative to the photosensitive surface.
  • the fixed portion generates a certain inclination angle, and in this way, optical image stabilization is performed.
  • the first piezoelectric element and the second piezoelectric element are arranged symmetrically with respect to the movable portion.
  • the first piezoelectric element and the second piezoelectric element are suitable for conducting conduction with different voltages, so that the photosensitive surface of the photosensitive chip has a certain amount of voltage relative to the fixing portion. angle of inclination.
  • the first cantilever arm includes a first cantilever body and a separation groove at least partially penetrating the first cantilever body, wherein the first cantilever body passes through the separation groove is divided into a mutually movable first cantilever portion and a second cantilever portion, wherein the first piezoelectric element includes a first piezoelectric region provided on the first cantilever portion and a second piezoelectric region provided on the second cantilever portion.
  • the first piezoelectric region is configured to act on the first cantilever portion through its own deformation after being turned on, so that the first cantilever portion is relative to the
  • the second cantilever portion is warped, and the second piezoelectric region is configured to act on the second cantilever portion through its own deformation after being turned on, so that the second cantilever portion is relative to the first cantilever portion.
  • a cantilever is warped.
  • the first suspension arm has a "back"-shaped structure.
  • the first cantilever portion has a first cantilever sub-section and a second cantilever sub-section divided by the first end
  • the second cantilever portion has a second cantilever sub-section divided by the first end.
  • the third cantilever sub-section and the fourth cantilever sub-section are divided into ends, wherein the first piezoelectric region includes the first piezoelectric sheet disposed in the first cantilever sub-section and the first piezoelectric sheet disposed in the the second piezoelectric sheet of the second cantilever sub-section
  • the second piezoelectric region includes the third piezoelectric sheet disposed on the third cantilever sub-section and the fourth cantilever sub-section the fourth piezoelectric sheet.
  • the first piezoelectric sheet extends along a first direction on the first cantilever sub-section
  • the second piezoelectric sheet extends along a second direction on the second cantilever sub-section
  • the direction arrangement is such that the first piezoelectric sheet and the second piezoelectric sheet are adapted to be turned on to drive the first cantilever portion to warp along the direction set by the photosensitive axis to Generates travel in the height direction.
  • the at least two suspension arms further include a third suspension arm and a fourth suspension arm, wherein the first suspension arm and the second suspension arm are relative to the The movable part is arranged symmetrically with the X axis as the axis of symmetry, the third suspension arm and the fourth suspension arm are arranged symmetrically with respect to the movable part with the Y axis as the axis of symmetry, the first The suspension arm is arranged adjacent to the third suspension arm, and the second suspension arm is arranged adjacent to the fourth suspension arm.
  • the at least one piezoelectric element further includes a third piezoelectric element, wherein the third piezoelectric element is disposed on the third suspension arm and is configured to be After being turned on, the third suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation to drive the movable part and the photosensitive chip.
  • Optical image stabilization is a third piezoelectric element, wherein the third piezoelectric element is disposed on the third suspension arm and is configured to be After being turned on, the third suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation to drive the movable part and the photosensitive chip.
  • the at least one piezoelectric element further includes a fourth piezoelectric element, wherein the fourth piezoelectric element is disposed on the fourth suspension arm and configured to be After being turned on, the fourth suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation to drive the movable part and the photosensitive chip.
  • Optical image stabilization is a fourth piezoelectric element, wherein the fourth piezoelectric element is disposed on the fourth suspension arm and configured to be After being turned on, the fourth suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation to drive the movable part and the photosensitive chip.
  • the first piezoelectric element is configured to drive the first suspension arm to warp along the direction set by the photosensitive axis through its own deformation after being turned on to Drive the movable part and the photosensitive chip to move up or down so that the photosensitive surface of the photosensitive chip generates a certain inclination angle relative to the fixed part, and in this way, the optical anti-shake in the u direction is performed;
  • the second piezoelectric element is configured to drive the second suspension arm to warp along the direction set by the photosensitive axis through its own deformation after being turned on, so as to drive the movable part and the The photosensitive chip moves up or down so that the photosensitive surface of the photosensitive chip generates a certain inclination angle with respect to the fixing portion, and in this way, optical image stabilization in the u-direction is performed.
  • the first cantilever arm includes a first cantilever segment extending along the X-axis direction and a second cantilever segment extending along the Y-axis direction, wherein the at least one piezoelectric element including a first piezoelectric element and a second piezoelectric element, the first piezoelectric element is disposed on the first cantilever segment of the first cantilever arm, and the second piezoelectric element is disposed on the first cantilever arm
  • the second cantilever segment of the cantilever arm wherein the first piezoelectric element is configured to drive the first cantilever arm to warp along the direction set by the photosensitive axis through self-deformation after being turned on To drive the movable part and the photosensitive chip to move up or down, in this way, optical anti-shake in the v direction is performed; the second piezoelectric element is configured to pass through after being turned on. self-deformation to drive the first suspension arm to warp along the direction set by the photosensitive
  • the second cantilever arm includes a third cantilever segment extending along the X-axis direction and a fourth cantilever segment extending along the Y-axis direction, wherein the at least one piezoelectric element It also includes a third piezoelectric element and a fourth piezoelectric element, wherein the third piezoelectric element is disposed on the third cantilever segment of the second cantilever arm, and the fourth piezoelectric element is disposed on the The fourth cantilever segment of the second cantilever arm, wherein the third piezoelectric element is configured to drive the second cantilever arm along the photosensitive axis through self-deformation after being turned on.
  • the direction is warped to drive the movable part and the photosensitive chip to move up or down, and in this way, optical image stabilization in the v direction is performed;
  • the fourth piezoelectric element is configured to be guided
  • the second suspension arm is driven to warp along the direction set by the photosensitive axis through its own deformation, so as to drive the movable part and the photosensitive chip to move upward or downward. In this way , to perform optical image stabilization in the u direction.
  • the first suspension arm has an "L"-shaped structure
  • the second suspension arm has an "L"-shaped structure
  • the thickness of the suspension arm ranges from 0.1 mm to 0.3 mm.
  • the substrate has an upper surface and a lower surface opposite to the upper surface, and the substrate further has a hollow structure at least partially penetrating between the lower surface and the upper surface , wherein, through the hollow structure, the base plate forms the fixed portion, the movable portion, and the at least two suspension arms extending between the fixed portion and the movable portion.
  • the photosensitive assembly further includes a reinforcing plate provided on the lower surface of the semiconductor substrate.
  • the photosensitive assembly further includes a filter element held on the photosensitive path of the photosensitive chip.
  • a method for preparing a photosensitive component comprising:
  • a substrate structure is provided, wherein the substrate structure has circuits preset on its surface;
  • the substrate structure is etched to form a hollow structure at least partially extending between a lower surface and an upper surface of the substrate structure to form a substrate, wherein the substrate includes a fixed portion, a movable portion and a portion extending from the substrate At least two suspension arms between the fixed part and the movable part, the movable part is suspended in the fixed part by the at least two suspension arms, wherein the at least one piezoelectric element is formed on at least one of the at least two cantilever arms;
  • the hydrolyzed glue is removed to obtain a photosensitive assembly.
  • a camera module comprising:
  • An optical lens held on the photosensitive path of the photosensitive component is an optical lens held on the photosensitive path of the photosensitive component.
  • Another advantage of the present application is to provide a camera module, wherein the camera module adopts a novel MEMS actuator as a driving element to drive the displacement of the photosensitive chip to realize optical focusing.
  • a photosensitive component which includes:
  • a base plate comprising: a fixed part, a movable part and at least one pair of suspension arms extending between the fixed part and the movable part, the movable part is suspended by the at least one pair of suspension arms is arranged in the fixed part, the at least one pair of suspension arms are symmetrically arranged with respect to the movable part;
  • each piezoelectric element of the at least one pair of piezoelectric elements is provided to each cantilever arm of the at least one pair of cantilever arms, respectively, and is configured to be turned on after
  • the at least one pair of suspension arms is actuated by its own deformation to generate the same height of warpage from the opposite first and second sides of the movable portion, so that the photosensitive surface of the photosensitive chip is relatively
  • the fixed portion generates a stroke in the height direction, and optical focusing is performed in this way.
  • each of the suspension arms has an opposite first end and a second end, the first end is fixed to the fixing part, and the second end is fixed to the Movable part.
  • the at least one pair of suspension arms includes a first suspension arm and a second suspension arm, and the first suspension arm and the second suspension arm are relative to the The moving parts are arranged symmetrically;
  • the at least one pair of piezoelectric elements includes a first piezoelectric element and a second piezoelectric element, wherein the first piezoelectric element is arranged on the first suspension arm, the first piezoelectric element Two piezoelectric elements are disposed on the second cantilever arm.
  • the first piezoelectric element is configured to actuate the first suspension arm relative to the fixing portion along the photosensitive chip through its own deformation after being turned on.
  • the direction set by the photosensitive shaft is warped to drive the movable part and the photosensitive chip from the first side of the movable part
  • the second piezoelectric element is configured to pass itself after being turned on Deformed to actuate the second suspension arm to warp relative to the fixed portion along the direction set by the photosensitive axis of the photosensitive chip to drive the movable portion and the movable portion from the second side of the movable portion.
  • the photosensitive chip wherein the height at which the first piezoelectric element drives the photosensitive chip from the first side of the movable part to rise or fall is equal to the height of the second piezoelectric element from the first side of the movable part.
  • the two sides drive the height of the photosensitive chip to rise or fall, and in this way, the photosensitive surface of the photosensitive chip generates a stroke in the height direction relative to the fixed portion to perform optical focusing.
  • the first cantilever arm includes a first cantilever body and a first separation groove at least partially penetrating the first cantilever body, wherein, through the first separation groove, the The first cantilever body is divided into a mutually movable first cantilever part and a second cantilever part, the first cantilever part has a first cantilever sub-section and a second cantilever sub-section divided by the first end , the second cantilever part has a third cantilever sub-section and a fourth cantilever sub-section divided by the second end, wherein the first piezoelectric element includes a set of the first cantilever sub-section The first piezoelectric sheet, the second piezoelectric sheet disposed on the second cantilever subsection, the third piezoelectric sheet disposed in the third cantilever subsection, and the The fourth piezoelectric sheet of the fourth cantilever subsection.
  • the second cantilever arm includes a second cantilever body and a second separation groove at least partially penetrating the second cantilever body, wherein through the second separation groove the The second cantilever body is divided into mutually movable third and fourth cantilever parts, the third cantilever part having a fifth cantilever sub-section and a sixth cantilever sub-section divided by the first end,
  • the fourth cantilever portion has a seventh cantilever sub-section and an eighth cantilever sub-section divided by the second end, wherein the second piezoelectric element includes a The fifth piezoelectric sheet, the sixth piezoelectric sheet provided on the sixth cantilever subsection, the seventh piezoelectric sheet provided on the seventh cantilever subsection, and the sixth piezoelectric sheet provided on the sixth cantilever subsection The eighth piezoelectric sheet of the eight cantilever subsections.
  • the first cantilever arm includes a first cantilever body and a first separation groove and a second separation groove at least partially penetrating the first cantilever body, wherein through the first cantilever body A dividing groove and the second dividing groove
  • the first cantilever body is divided into a first cantilever part, a second cantilever part and a third cantilever part movable with each other, the first cantilever part has a a first cantilever sub-section and a second cantilever sub-section divided by the first dividing groove, the second cantilever sub-section having a third cantilever sub-section and a fourth cantilever sub-section divided by the first dividing groove,
  • the third cantilever part has a fifth cantilever sub-section and a sixth cantilever sub-section divided by the first separation groove and the second separation groove, wherein the first piezoelectric element includes a the first piezoelectric sheet of the first cantilever sub-section, the second piezoelectric sheet
  • the first separation groove has a cross shape.
  • the second cantilever arm includes a second cantilever body and a third separation groove and a fourth separation groove at least partially penetrating the second cantilever body, wherein through the second cantilever body Three separation grooves and the fourth separation groove
  • the second cantilever body is divided into a fourth cantilever part, a fifth cantilever part and a sixth cantilever part that are movable with each other
  • the fourth cantilever part has the third cantilever part by the third cantilever part a seventh cantilever sub-section and an eighth cantilever sub-section divided by a separation groove
  • the fifth cantilever section has a ninth cantilever sub-section and a tenth cantilever sub-section divided by the third separation groove
  • the The sixth cantilever portion has an eleventh cantilever sub-section and a twelfth cantilever sub-section divided by the third separation groove and the fourth separation groove
  • the second piezoelectric element includes a the seventh piezoelectric sheet of the seventh
  • the third separation groove has a cross shape.
  • the at least one pair of suspension arms further includes a third suspension arm and a fourth suspension arm, wherein the first suspension arm and the second suspension arm are relative to
  • the movable part is arranged symmetrically with the X axis as the axis of symmetry, and the third suspension arm and the fourth suspension arm are arranged symmetrically with respect to the movable part with the Y axis as the axis of symmetry.
  • the at least one pair of piezoelectric elements further includes a third piezoelectric element and a fourth piezoelectric element, wherein the third piezoelectric element is disposed on the third suspension arm , the fourth piezoelectric element is arranged on the fourth suspension arm; wherein, the third piezoelectric element and the fourth piezoelectric element are configured to be turned on by their own deformation after being turned on. Actuating the third suspension arm and the fourth suspension arm respectively to simultaneously raise or lower the movable part from the opposite third and fourth sides of the movable part to make the photosensitive chip The photosensitive surface of the camera is raised or lowered, and optical focusing is performed in this way.
  • the third piezoelectric element is configured to actuate the third suspension arm relative to the fixing portion along the photosensitive chip through its own deformation after being turned on.
  • the direction set by the photosensitive shaft is warped to drive the movable part and the photosensitive chip from the third side of the movable part
  • the second piezoelectric element is configured to pass itself after being turned on Deformed to actuate the fourth cantilever arm to warp relative to the fixed portion along the direction set by the photosensitive axis of the photosensitive chip to drive the movable portion and the movable portion from the fourth side of the movable portion.
  • the photosensitive chip wherein the height at which the third piezoelectric element drives the photosensitive chip from the third side of the movable part to rise or fall is equal to the height of the fourth piezoelectric element from the third side of the movable part.
  • the four sides drive the height of the photosensitive chip to rise or fall, and in this way, optical focusing is performed.
  • the first cantilever arm includes a first cantilever section extending along the X-axis direction and a second cantilever section extending along the Y-axis direction
  • the second cantilever arm includes a A third cantilever segment extending along the X-axis direction and a fourth cantilever segment extending along the Y-axis direction
  • the at least one pair of piezoelectric elements includes a first piezoelectric element and a second piezoelectric element, the first piezoelectric element
  • the piezoelectric element is arranged on the first cantilever segment of the first cantilever arm
  • the second piezoelectric element is arranged on the third cantilever segment of the second cantilever arm, wherein the first piezoelectric element
  • the element is configured to actuate the first suspension arm through self-deformation after being turned on to drive the movable part and the photosensitive chip from the first side of the movable part, the second pressure
  • the electrical element is configured to actuate the second
  • the at least one pair of piezoelectric elements further includes a third piezoelectric element and a fourth piezoelectric element, and the third piezoelectric element is disposed on the first side of the first suspension arm.
  • Two cantilever segments the fourth piezoelectric element is disposed on the fourth cantilever segment of the second cantilever arm; wherein the third piezoelectric element is configured to act through self-deformation after being turned on
  • the first suspension arm is used to drive the movable part and the photosensitive chip from the first side of the movable part; the fourth piezoelectric element is configured to perform self-deformation after being turned on.
  • the second suspension arm is moved to drive the movable part and the photosensitive chip from a second side of the movable part opposite to the first side, wherein the third piezoelectric element is driven from the second side of the movable part.
  • the height at which the first side of the movable part drives the photosensitive chip to rise or fall is equal to the height at which the fourth piezoelectric element drives the photosensitive chip from the second side of the movable part to rise or fall. In the way, the photosensitive surface of the photosensitive chip produces a stroke in the height direction relative to the fixed portion to perform optical focusing.
  • the first cantilever beam has an "L"-shaped structure
  • the second cantilever beam has an "L"-shaped structure
  • the thickness of the cantilever beam ranges from 0.1 mm to 0.3 mm.
  • the substrate has an upper surface and a lower surface opposite to the upper surface, and the substrate further has a hollow structure at least partially penetrating between the lower surface and the upper surface , wherein, through the hollow structure, the base plate forms the fixed part, the movable part and the at least one pair of suspension arms extending between the fixed part and the movable part.
  • the fixed part, the movable part and the at least one pair of suspension arms have an integrated structure.
  • the photosensitive assembly further includes a reinforcing plate provided on the lower surface of the substrate.
  • the photosensitive assembly further includes a filter element held on the photosensitive path of the photosensitive chip.
  • a camera module comprising:
  • An optical lens held on the photosensitive path of the photosensitive component is an optical lens held on the photosensitive path of the photosensitive component.
  • One objective of the present invention is to overcome the deficiencies of the prior art, and to provide a solution for a piezoelectric optical actuator and a corresponding camera module that occupies a small space and has a large driving force.
  • an optical actuator which includes: a casing; a lens carrier, the inner side of which is suitable for installing a lens or a lens group, and the outer side of which has at least two mutually parallel plane supports surface (the two bearing surfaces are respectively provided on both sides of the lens carrier); an outer frame, which is installed between the lens carrier and the housing, the outer frame includes at least two mutually parallel first side walls , each of the first side walls is arranged opposite to one of the bearing surfaces; and at least two piezoelectric driving devices, each of which is arranged on one of the bearing surfaces and the outer between a first side wall of the frame opposite to the bearing surface.
  • each of the piezoelectric driving devices includes a linear piezoelectric element, a mover, a friction part and an excitation source;
  • the longitudinal direction of the linear piezoelectric element is consistent with the optical axis direction of the lens or the lens group , and the linear piezoelectric element includes at least three polarization region segments polarized along its thickness direction, the polarization region segment is a first polarization region segment or a second polarization region segment, the first polarization region segment The polarization directions of a polarization region segment and the second polarization region segment are opposite, and the first polarization region segment and the second polarization region segment are along the length direction of the linear piezoelectric element Alternately arranged; the mover is fixed on the bearing surface, the friction part is installed between the inner surface of the linear piezoelectric element and the mover; and the friction part is in the initial state Both ends of the linear piezoelectric element are squeezed by the linear piezoelectric element and the mover, and the surface of the
  • the driving signal includes a first driving voltage applied to the first polarized region segment and a second driving voltage applied to the second polarized region segment, the first driving voltage and the second driving voltage
  • the phase difference of the driving voltage is ⁇ /2 or - ⁇ /2.
  • the friction parts are uniformly arranged on the inner surface of the linear piezoelectric element along the longitudinal direction of the linear piezoelectric element.
  • the lens carrier and the outer frame are connected by elastic elements, so as to form a pre-tightening force between the lens carrier and the outer frame.
  • the lens carrier and the outer frame are respectively provided with magnets and coils to form a pre-tightening force between the lens carrier and the outer frame.
  • an elastic layer is arranged between the outer surface of the linear piezoelectric element and the outer frame, and the elastic layer is pressed to generate stress, and the linear piezoelectric element and the friction part are pressed against each other. the mover surface.
  • one friction part is provided on the inner surface of each of the first polarized region segment and each of the second polarized region segment.
  • the lens carrier is a lens barrel, and the outer side surface of the lens barrel is rectangular.
  • the lens carrier is a lens barrel, and the outer side surface of the lens barrel is in the shape of a cut circle.
  • the lens carrier is an inner frame
  • the inner frame is mounted on the outer side surface of the lens barrel
  • the inner frame has at least two flat plate-shaped second side walls arranged opposite to each other and parallel to each other.
  • the length of the linear piezoelectric element is less than 20 mm, the width is less than 1 mm, and the sum of the thickness of the linear piezoelectric element and the thickness of the friction portion is less than 1.5 mm.
  • the length of the linear piezoelectric element is less than 10 mm, the width is less than 0.7 mm, and the sum of the thickness of the linear piezoelectric element and the thickness of the friction portion is less than 1 mm.
  • the piezoelectric driving device further includes a friction layer, the friction layer is arranged on the inner surface of the linear piezoelectric element, and the friction part is arranged on the friction layer.
  • the length of the linear piezoelectric element is greater than the length of the friction layer.
  • the piezoelectric driving device further includes a friction layer, and the friction layer is disposed on the outer surface of the mover, or the mover is made of a friction material.
  • the thickness of the elastic layer is 10-50 ⁇ m.
  • both ends of the linear piezoelectric element are provided with fixed parts made of non-piezoelectric materials, and the fixed parts are fixed with the outer frame; the back of the linear piezoelectric element is connected to the outer frame. There are gaps between the frames.
  • a camera module which includes: a lens or a lens group; a photosensitive component; and the aforementioned optical actuator; the lens or lens group is mounted on the optical actuator. the inner side of the lens carrier; the optical actuator is mounted on the top surface of the photosensitive component.
  • the outer side of the lens barrel is designed as a rectangle, an outer frame is arranged between the lens barrel and the actuator housing, and the linear piezoelectric element and the mover are arranged on the outer frame and the lens barrel.
  • the mover rests on the outer side of the lens barrel
  • the back of the linear piezoelectric element rests on the outer frame
  • a pre-tightening force is applied between the outer frame and the lens barrel to make the two approach each other, so that the linear pressure
  • the electric element and the mover are coupled to drive the movement of the lens barrel relative to the actuator housing along the direction of the optical axis by surface fluctuations of the linear piezoelectric element (such as fluctuations in the form of traveling waves).
  • This design has the advantages of a small footprint and a large driving force, especially in the direction perpendicular to the optical axis, the piezoelectric driving device has a small footprint.
  • the piezoelectric driving device can be symmetrically arranged on both sides of the lens barrel. Compared with the piezoelectric driving device only arranged on one side, this design can make the axial direction of the carrier of the optical axis actuator. Movement is more balanced.
  • an elastic layer can be arranged between the back surface of the linear piezoelectric element and the outer frame, and then the linear piezoelectric element and its friction part are pressed against the mover through the elastic layer,
  • the preload force required for the traveling wave piezoelectric drive device can be achieved with a very small footprint.
  • the side wall of the outer frame for bearing against the piezoelectric driving device may be made of metal, and the side wall may have a flat inner surface, so as to be a linear piezoelectric element.
  • the back side provides a flat bearing surface to ensure the surface fluctuation of the linear piezoelectric element with higher precision.
  • the purpose of the present invention is to overcome the deficiencies of the prior art, and to provide a solution for an optical actuator and a corresponding camera module with large driving force, small footprint and high reliability without electromagnetic crosstalk.
  • the present invention provides an optical actuator, which includes: a housing; a carrier, which is suitable for installing a lens, a lens group or a photosensitive component; a suspension part, which is used for connecting the carrier with the The shell is movably connected; the cantilever beam includes a strip-shaped substrate and a piezoelectric layer attached to the surface of the strip-shaped substrate, one end of the cantilever beam is fixed to the shell, the other end of the cantilever beam is a free end, and the cantilever beam A gap is provided between the housing and the carrier.
  • the length direction of the piezoelectric layer is consistent with the length direction of the strip-shaped substrate, and the piezoelectric layer is adapted to expand or contract along its length direction when a driving voltage is applied to bend the cantilever beam , thereby causing the free end to be displaced in a direction perpendicular to the surface of the piezoelectric layer, and pushing the carrier to move through the displacement of the free end.
  • the casing is rectangular, and the cantilever beam is disposed on at least one side surface of the casing.
  • the casing is rectangular, and the cantilever beams are arranged on at least two intersecting sides of the casing.
  • At least two of the cantilever beams are symmetrically arranged on the same side of the casing, and the cantilever beams are mounted on the casing through the fixing part, and are arranged on at least two of the same side of the casing
  • the cantilever beams share the same fixed portion.
  • the fixing portion is located at the middle position of the side surface of the casing corresponding to it.
  • the outer contour of the carrier is rectangular.
  • the outer side of the carrier includes at least one flat surface adapted to the cantilever beam, the flat surface is suitable for contacting the free end when the cantilever beam is bent inward, and the carrier is suitable for The pushing of the free end follows the displacement of the free end, wherein the inward bending is the direction in which the free end of the cantilever beam moves from the housing to the carrier.
  • the piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer, and the first piezoelectric layer and the second piezoelectric layer are respectively attached to the inner surface and the outer surface of the strip-shaped substrate.
  • the optical actuator further includes a driving unit for applying a driving voltage to the first piezoelectric layer and the second piezoelectric layer, so that the first piezoelectric layer is at its length direction, and the second piezoelectric layer stretches in its length direction, so that the cantilever beam is bent inward.
  • the piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer, and the first piezoelectric layer and the second piezoelectric layer are respectively attached to the inner surface and the outer surface of the strip-shaped substrate;
  • the optical actuator further includes a driving unit for applying a driving voltage to the first piezoelectric layer and the second piezoelectric layer so that the first piezoelectric layer is in the length direction thereof contraction, and the second piezoelectric layer is stretched in its length direction, so that the cantilever beam is bent inward; and the driving unit is also used to make at least two The cantilever beam is simultaneously bent inward to push the carrier to move.
  • the piezoelectric layer is disposed on the inner surface or the outer surface of the strip-shaped substrate, and the optical actuator further includes a driving unit, and the driving unit is used for aligning the The piezoelectric layer applies a driving voltage to bend the cantilever beam and push the carrier to move by the free end of the cantilever beam.
  • the suspending part is an elastic piece
  • the elastic piece is arranged at the four corners of the casing, and two ends of the elastic piece are respectively connected to the casing and the carrier.
  • the piezoelectric layer stretches along its length direction to bend the cantilever beam , the bending of the cantilever beam causes its free end to abut and push the carrier to move.
  • the strip-shaped substrate is a metal sheet
  • the thickness of the piezoelectric layer is 50%-80% of the thickness of the metal sheet.
  • the strip-shaped substrate is a metal sheet
  • the piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer
  • the first piezoelectric layer and the second piezoelectric layer are respectively attached to the The inner surface and the outer surface of the metal sheet
  • the thickness of the first piezoelectric layer is 50%-80% of the thickness of the metal sheet
  • the thickness of the second piezoelectric layer is 50% of the thickness of the metal sheet %-80%.
  • the thicknesses of the first piezoelectric layer and the second piezoelectric layer are equal.
  • the thickness of the metal sheet is 50-300 ⁇ m.
  • the cantilever beam includes an x-axis movable cantilever beam and a y-axis movable cantilever beam
  • the x-axis movable cantilever beam is arranged on a side surface of the housing that is perpendicular to the x-axis
  • the x-axis movable cantilever beam is the length of the cantilever beam.
  • the direction is parallel to the y-axis; the y-axis moving cantilever beam is arranged on the side of the casing that is perpendicular to the y-axis, and the length direction of the y-axis moving cantilever beam is parallel to the x-axis; wherein, the x-axis and The y-axis is two mutually perpendicular coordinate axes on a reference plane; the reference plane is perpendicular to the optical axis of the lens or the lens group, or the reference plane is parallel to the photosensitive surface of the photosensitive component.
  • the two x-axis cantilever beams are symmetrically arranged on the side surface of the casing perpendicular to the x-axis, and the two x-axis cantilever beams share the same fixing part and are installed through the fixing part on the casing;
  • the two y-axis cantilever beams are symmetrically arranged on the side surface of the casing that is perpendicular to the y-axis, and the two y-axis cantilever beams share the same fixed part and pass through the
  • the fixing part is attached to the casing.
  • the optical actuator further includes a driving unit for applying a driving voltage to the piezoelectric layer to bend the two x-axis cantilever beams on the same side, and the two The free ends of each of the x-axis cantilever beams push the carrier to translate along the x-axis; the driving unit is also used to apply a driving voltage to the piezoelectric layer, so that the two The y-axis cantilever beams are bent inward, and the carrier is pushed to translate along the y-axis by the free ends of the two y-axis cantilever beams.
  • the driving unit is further configured to apply a driving voltage to the piezoelectric layer, so that the two x-axis cantilever beams sharing the same fixed part are respectively bent inward and outward, and the two cantilever beams sharing the same
  • the two y-axis cantilever beams of the fixing part are respectively bent inward and outward, so that the carrier rotates around the z-axis; wherein the z-axis is parallel to the optical axis.
  • the cantilever beam includes an x-axis movable cantilever beam and a y-axis movable cantilever beam
  • the x-axis movable cantilever beam is arranged on a side surface of the housing that is perpendicular to the x-axis
  • the x-axis movable cantilever beam is the length of the cantilever beam.
  • the direction is parallel to the z-axis;
  • the y-axis moving cantilever beam is arranged on the side of the casing that is perpendicular to the y-axis, and the length direction of the y-axis moving cantilever beam is parallel to the z-axis;
  • the x-axis and The y-axis is a coordinate axis perpendicular to the optical axis of the optical actuator, the x-axis and the y-axis are perpendicular to each other, and the z-axis is parallel to the optical axis.
  • the cantilever beam is arranged in the gap between the top surface of the carrier and the outer shell, and/or is arranged in the gap between the bottom surface of the carrier and the outer shell; in a top view, the cantilever beam is located at In the edge region of the carrier, the surface of the piezoelectric layer of the cantilever beam is parallel to the top or bottom surface of the carrier.
  • the cantilever beam is arranged in the gap between the outer side surface of the carrier and the inner side surface of the casing, and a fixed part is arranged at the center of the same inner side surface of the outer casing;
  • the cantilever beams extend from the fixing portion to different directions to form an "X"-shaped cantilever beam group.
  • the cantilever beam is arranged in the gap between the outer side surface of the carrier and the inner side surface of the housing; in a side view, the longitudinal direction of the cantilever beam is arranged in an inclined state relative to the reference plane.
  • a camera module which includes: the optical actuator described in any one of the foregoing solutions; an optical lens; and a photosensitive assembly.
  • the optical lens and/or the photosensitive component are mounted on the carrier of the optical actuator.
  • a cantilever beam composed of a metal sheet and a piezoelectric layer attached to it is arranged between the carrier and the shell, and the bending of the metal sheet is driven by the extension and contraction of the piezoelectric layer in the length direction, thereby realizing the outward movement of the free end of the cantilever beam.
  • the movement inside to achieve the effect of driving the carrier to move.
  • this driving method which utilizes its lengthwise expansion and contraction combined with the bendable properties of the metal sheet, can provide greater driving force and anti-shake movement stroke.
  • the application can avoid the use of friction parts, which not only has the advantages of small occupied volume and large driving force of the piezoelectric motor, but also can avoid the loss of friction parts, and has high reliability.
  • the optical actuator of the present application is especially suitable for realizing the anti-shake function of the camera module.
  • two cantilever beams can be symmetrically arranged on the same side of the housing, and this design can make the cantilever beam have better balance when driving the carrier to move.
  • two cantilever beams can be symmetrically arranged on the same side of the housing, and by applying different kinds of driving voltage combinations to the two cantilever beams on both sides of the fixed portion, the two cantilever beams can be Bending inward to realize the translational drive of the x-axis or y-axis of the carrier, and also can make the two cantilever beams bend inward and outward respectively to realize the driving of rotation around the z-axis.
  • This design can achieve three-axis movement freedom at a small space cost.
  • two symmetrical cantilever beams on the same side of the housing can be set in a vertical state, that is, the length direction of the two cantilever beams is parallel to the z-axis, when the two cantilever beams are applied
  • both cantilever beams can be bent inward to realize the translational driving of the x-axis or y-axis of the carrier, and the two cantilever beams can be bent inward and outward respectively to realize the translational driving of the carrier's x-axis or y-axis.
  • Drives that rotate around the x-axis or around the y-axis i.e. tilt). This design can achieve the freedom of movement of four-axis movement at a small space cost.
  • FIG. 1 is an overall schematic diagram of a periscope camera module according to a first preferred embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a camera module body of the periscope camera module according to the first preferred embodiment of the present invention.
  • FIG 3 is a schematic diagram of a reflective prism structure of the periscope camera module according to the first preferred embodiment of the present invention.
  • FIG. 4 is a schematic structural diagram of a vibrating component of the periscope camera module according to the first preferred embodiment of the present invention.
  • FIG. 5 is a schematic diagram of an alternative embodiment of another driving structure of a reflecting prism of the periscope camera module according to the first preferred embodiment of the present invention.
  • FIG. 6 is a schematic perspective view of the driving structure of the periscope camera module according to the first preferred embodiment of the present invention.
  • FIG. 7 illustrates a schematic diagram of a camera module according to an embodiment of the present application.
  • FIG. 8 illustrates a schematic diagram of a photosensitive component of the camera module according to an embodiment of the present application.
  • FIG. 9A illustrates a schematic diagram of a substrate and at least one piezoelectric element of the photosensitive assembly according to an embodiment of the present application.
  • FIG. 9B illustrates another schematic diagram of the substrate and at least one piezoelectric element of the photosensitive assembly according to an embodiment of the present application.
  • FIG. 10 illustrates a schematic top view of the substrate and at least one piezoelectric element of the photosensitive assembly according to an embodiment of the present application.
  • FIG 11 illustrates a schematic diagram of the suspension arm of the substrate being moved according to an embodiment of the present application.
  • FIG 12A illustrates one of the schematic diagrams of the movement of the substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • 12B illustrates the second schematic diagram of the movement of the substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • FIG. 12C illustrates a third schematic diagram of the movement of the substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • FIG. 12D illustrates a fourth schematic diagram of the movement of the substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • FIG. 12E illustrates a fifth schematic diagram of the movement of the substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • FIG. 12F illustrates a sixth schematic diagram of the movement of the substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • FIG. 13 illustrates a schematic diagram of a variant implementation of the substrate according to embodiments of the present application.
  • FIG. 14 illustrates a schematic diagram of another variant implementation of the substrate according to an embodiment of the present application.
  • FIG. 15 illustrates a schematic diagram of a variant implementation of the camera module according to an embodiment of the present application.
  • FIG. 16 illustrates a schematic diagram of another variant implementation of the camera module according to an embodiment of the present application.
  • FIG. 17 illustrates a schematic diagram of a camera module according to an embodiment of the present application.
  • FIG. 18 illustrates a schematic diagram of a photosensitive component of the camera module according to an embodiment of the present application.
  • 19A illustrates a schematic diagram of a substrate and at least one pair of piezoelectric elements of the photosensitive assembly according to an embodiment of the present application.
  • 19B illustrates another schematic diagram of the substrate and the at least one pair of piezoelectric elements of the photosensitive assembly according to an embodiment of the present application.
  • FIG. 20 illustrates a schematic top view of the substrate and the at least one pair of piezoelectric elements of the photosensitive assembly according to an embodiment of the present application.
  • FIG. 21 illustrates a schematic diagram of the cantilever arm of the substrate being actuated according to an embodiment of the present application.
  • 22A illustrates one of the schematic diagrams of the movement of the semiconductor substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • 22B illustrates the second schematic diagram of the movement of the semiconductor substrate and the at least one piezoelectric element according to an embodiment of the present application.
  • Figure 23 illustrates a schematic diagram of a variant implementation of the suspension arm according to embodiments of the present application.
  • FIG. 24 illustrates a schematic diagram of another variant implementation of the substrate according to an embodiment of the present application.
  • FIG. 25 illustrates a schematic diagram of yet another variant implementation of the substrate according to an embodiment of the present application.
  • FIG. 26 shows a schematic longitudinal cross-sectional view of a camera module according to an embodiment of the present application.
  • FIG. 27 shows a schematic top view of a camera module according to an embodiment of the present application.
  • FIG. 28 shows a linear piezoelectric driving device in an embodiment of the present application.
  • FIG. 29 shows the moving direction of the mover in an embodiment of the present application.
  • Fig. 30a shows a schematic diagram of the action relationship between the mover, the friction part, and the linear piezoelectric element when the surface of the linear piezoelectric element fluctuates in an embodiment of the present application.
  • Fig. 30b is a schematic diagram showing the action relationship between the mover, the friction part and the linear piezoelectric element in the second state.
  • FIG. 31 shows the direction of motion of the slightly elliptical motion of a particle on the surface of the linear piezoelectric element.
  • FIG. 32 shows a linear piezoelectric driving device in another embodiment of the present application.
  • FIG. 33 shows a schematic diagram of the structure and connection relationship between the linear piezoelectric device and the outer frame in an embodiment of the present application.
  • FIG. 34 shows a schematic diagram of the structure and connection relationship between the linear piezoelectric device and the outer frame in another embodiment of the present application.
  • FIG. 35 shows a schematic top view of an optical actuator in an embodiment of the present application.
  • FIG. 36 shows a schematic top view of an optical actuator in another embodiment of the present application.
  • FIG. 37 shows a schematic perspective view of one of the sub-frames in FIG. 36 .
  • FIG. 38 shows a schematic top view of an optical actuator according to a modified embodiment of the present application.
  • FIG. 39 shows a schematic top view of an optical actuator according to another modified embodiment of the present application.
  • FIG. 40 shows a schematic top view of an optical actuator according to yet another modified embodiment of the present application.
  • FIG. 41 shows a schematic structural diagram of a piezoelectric driving device in a modified embodiment of the present application.
  • FIG. 42 shows a schematic longitudinal cross-sectional view of a camera module with a lens stabilization function according to an embodiment of the present application.
  • FIG. 43 shows a schematic top view of the optical actuator for lens stabilization in the embodiment of FIG. 42 .
  • FIG. 44 shows a schematic diagram of the y-axis moving cantilever beam bending inward to push the lens carrier to move in an embodiment of the present application.
  • Figure 45a shows a schematic side view of the structure of the cantilever beam.
  • Figure 45b shows a schematic diagram of the bending and free end displacement of a cantilever beam.
  • Figure 45c shows a schematic top view of a cantilever beam.
  • Figure 45d shows a schematic diagram of a cantilever with a piezoelectric layer on only one surface.
  • FIG. 46 shows a schematic diagram of the cantilever beam driving the lens carrier to rotate around the z-axis in an embodiment of the present application.
  • Figure 47 shows a schematic top view of an optical actuator in another embodiment of the present application.
  • FIG. 48 shows a schematic top view of an optical actuator according to a modified embodiment of the present application.
  • FIG. 49 shows a schematic longitudinal cross-sectional view of a camera module with chip anti-shake function in another embodiment of the present application.
  • FIG. 50 shows a schematic top view of the optical actuator of the camera module of FIG. 49 .
  • FIG. 51 shows a schematic side view of an optical actuator with multiple cantilevers on a single side of an embodiment of the present application.
  • FIG. 52 shows a schematic side view of an optical actuator with tilt adjustment function in an embodiment of the present application.
  • FIG. 53 shows a schematic top view of an optical actuator with tilt adjustment function in an embodiment of the present application.
  • FIG. 54 shows a schematic side view of an optical actuator with tilt adjustment function in another embodiment of the present application.
  • FIG. 55 shows a schematic top view of an optical actuator with tilt adjustment function in another embodiment of the present application.
  • the periscope camera module includes a camera module body 10, a reflection prism 20, and a prism driving device 30, wherein the reflection prism 20 is drivably connected to the prism driving device 30, and is driven by the The prism driving device 30 drives the reflecting prism 20 to move.
  • the camera module main body 10 has an optical axis O, and the reflecting prism 20 is disposed on the light incident side of the camera module main body 10 along the direction of the optical axis O of the camera module main body 10 .
  • the reflecting prism 20 has a light entrance 201, a light exit 202 and a light reflecting surface 203, wherein the light exit 202 of the reflecting prism 20 is facing the camera module body 10, and the light is reflected by the
  • the light entrance 201 of the prism 20 enters the light reflecting surface 203 , is reflected by the light reflecting surface 203 and then exits the camera module body 10 through the light exit 202 .
  • the external light is reflected to the camera module body 10 through the reflection prism 20 , and the camera module body 10 reflects the reflection prism 20 into the camera module body 10 . light imaging.
  • the prism driving device 30 drives the reflective prism 20 to move, wherein the reflective prism 20 is driven by the prism driving device 30 on the light incident side of the camera module body 10 to move in a rotational motion, thereby changing the
  • the reflecting prism 20 reflects the direction of the light, thereby changing the imaging effect of the camera module main body 10 . It is worth mentioning that, when the camera module shakes when shooting, the camera module main body 10 will have poor imaging effect due to the shake. Therefore, when the camera module main body 10 shakes, based on the principle of shake compensation, the prism driving device 30 drives the reflective prism 20 to rotate in a specific direction, thereby changing the amount of external light incident on the camera module main body 10 . The incident angle is used to compensate for the imaging effect of the camera module main body 10 due to shaking, so as to realize the anti-shake effect of the periscope camera module.
  • the periscope camera module further includes a prism seat 40 , wherein the reflecting prism 20 is arranged on the prism seat 40 , and the prism seat 40 is driven with the prism driving device 30 .
  • the prism seat 40 is driven by the prism drive device 30 , and then the reflecting prism 20 is driven by the prism seat 40 to move synchronously.
  • the reflecting prism 20 is fixed to the prism base 40 , so that the reflecting prism 20 rotates as the prism base 40 is driven by the prism driving device 30 .
  • the reflecting prism 20 further has an inclined surface 204
  • the prism base 40 has a supporting surface 401
  • the inclined surface 204 of the reflecting prism 20 is supported on the supporting surface 401 of the prism base 40 .
  • the inclined surface 204 of the reflecting prism 20 is in contact with the supporting surface 401 of the prism base 40 .
  • Two mutually parallel triangular surfaces adjacent to the hypotenuse of the inclined surface 204 of the reflecting prism 20 are in contact with the two side surfaces of the prism base 40 , and have the functions of supporting and positioning the reflecting prism 20 .
  • the periscope camera module further includes a transmission device 50, wherein the transmission device 50 is drivably connected to the prism driving device 30 and the prism base 40, wherein the transmission device 50 can be driven by the The prism drive device 30 is driven, and the prism base 40 is driven by the transmission device 50 in a rotational manner.
  • the prism driving device 30 includes a prism driving shaft 31 and a piezoelectric driver 32, wherein the piezoelectric driver 32 and the prism driving shaft 31 are fixedly connected, and the prism driving is driven by the piezoelectric driver 32.
  • the prism drive shaft 31 is parallel to the direction of the optical axis O of the camera module body 10 , wherein the prism drive shaft 31 is driven along the optical axis O by the piezoelectric driver 32 .
  • Direction of linear movement More preferably, the prism drive shaft 31 is vertically connected to the transmission device 50 , that is, the prism drive shaft 31 and the transmission device 50 are in a vertical state.
  • the prism drive shaft 31 moves linearly along the direction of the optical axis O under the driving action of the piezoelectric driver 32 .
  • the transmission device 50 converts the linear motion of the prism drive shaft 31 into a rotational motion around the optical axis O direction.
  • the direction of the light emitted from the reflection prism 20 is changed, so as to realize the optical anti-shake effect of the periscope camera module.
  • the transmission device 50 further includes a shaft seat 51 and a transmission shaft 52 arranged on the shaft seat 51 , wherein the shaft seat 51 is arranged on the prism seat 40 , and the shaft seat 51
  • the supporting surface 401 of the prism base 40 and the corresponding surface of the reflecting prism 20 are located.
  • the transmission shaft 52 is perpendicular to the optical axis O of the camera module body 10 , and one end of the transmission shaft 52 is located in the shaft hole inside the shaft seat 51 , and the other end of the transmission shaft 52 is
  • the shaft hole of the shaft seat 51 extends outward and is vertically connected with the prism drive shaft 31 .
  • the prism drive axis is parallel to the optical axis O of the camera module body 10 .
  • the other end of the prism drive shaft 31 is fixedly connected to the piezoelectric driver 32 through adhesive.
  • the transmission shaft 52 of the transmission device 50 is driven by the prism drive shaft 31 as a guiding mechanism, and is converted into a driving force that drives the prism base 40 to rotate, so as to drive the prism base 40 to rotate around perpendicular to the prism base 40 .
  • the optical axis O rotates in the direction to change the direction of the light emitted from the reflection prism 20 to achieve an optical anti-shake effect.
  • the periscope camera module has a reference axis (Y axis) perpendicular to the optical axis O (Z axis) of the camera module main body 10, and the reference axis (Y axis) is shared with the optical axis O.
  • the plane where the reference axis (Y axis) and the optical axis O are located is perpendicular to the reflection surface, and the camera module also has a plane perpendicular to the optical axis (Z axis) of the lens group 10.
  • a reference axis (X axis), the reference axis (X axis) and the optical axis O are coplanar, and the plane where the reference axis (X axis) and the optical axis O are located is parallel to the reflection surface.
  • the transmission shaft 51 is used as a guiding mechanism to convert linear motion into rotational motion, so that the prism base 40 and the reflecting prism 20 obtain a certain inclination angle, Then, the reflecting prism 20 is rotated around the reference axis (X-axis) to change the direction of the light emitted by the reflecting prism 20, so as to realize the effect of optical anti-shake.
  • the piezoelectric driver 32 of the prism drive device 30 is implemented as a piezoelectric device, wherein the prism drive shaft of the prism drive device 30 is implemented as a piezoelectric device. 31 is parallel to the optical axis O of the camera module main body 10 .
  • the piezoelectric driver 32 includes a piezoelectric element 321, the piezoelectric element 321 is in a laminated structure, and the piezoelectric element 321 includes a plurality of piezoelectric stretch bodies 3211 and a plurality of internal electrodes 3212, the internal electrodes 3212 A plurality of electrodes formed by alternately stacking a plurality of piezoelectric stretchable bodies 3211, and a plurality of piezoelectric stretchable bodies 3211 and a plurality of internal electrodes 3212 are stacked on each other, which greatly reduces the horizontal space occupied by the piezoelectric elements 321.
  • the cross-sectional area, and the laminated structure can also have the same displacement distance under the condition of applying a small electric field.
  • the upper and lower surfaces of the piezoelectric stretching body 3211 form an upper layer electrode 32111 and a lower layer electrode 32112, and the electrodes located on the side of the piezoelectric stretching body 3211 are called side electrodes 3213; when the piezoelectric stretching body 3211 is single, A positive electrode and a negative electrode are connected to the surfaces of the upper electrode 32111 and the lower electrode 32112 of the piezoelectric stretchable body 3211, and the side electrode 3213 is connected to an external circuit.
  • the connection method can be in the form of welding, which can ensure the connection strength.
  • the prism drive shaft 31 and the piezoelectric driver 32 are fixed by adhesive, and the prism drive shaft 31 is fixed on the middle portion of the upper surface of the piezoelectric element 321 .
  • the reflecting prism 20 is a right-angled triangular prism and is installed on the light incident side of the camera module.
  • the prism seat 40 is an integral structural accessory and has a supporting surface opposite to the reflective prism 20.
  • the reflective prism 20 and the prism seat 40 are bonded together by glue, so that the reflective prism 20 is fixed on the supporting surface of the prism seat 40, The relative sliding of the reflection prism 20 and the prism base 40 is avoided.
  • the camera module body 10 includes a lens group 11 , an image sensor 12 arranged along the direction of the optical axis O, and a housing for fixing the lens group 11 and the image sensor 12 13.
  • the prism base 40 , the lens group 11 and the image sensor 12 are all mounted on the casing 13 .
  • the casing 13 has a rectangular structure as a whole.
  • the light surface enters the reflecting prism 20 and is reflected by the reflecting surface to the light exit surface to the lens group 11 , and the light passing through the lens group 11 can be further transmitted to the image sensor 12 .
  • the image sensor 12 is installed on the light-emitting side of the reflective prism 20 , and the light-emitting side of the periscope camera module includes the image sensor 12 that converts the light passing through the lens group 11 into electrical signals, and the image sensor 12 installed thereon. circuit board.
  • the prism drive shaft 31 is parallel to the optical axis of the lens group 11, and this design structure reduces the width of the housing 13, thereby reducing the overall size of the module volume, reasonable use of the internal space of the shell, easy installation, and the miniaturized design of the module.
  • the camera module body 10 further includes at least one lens driving device 14 , wherein the lens driving device 14 is disposed in the casing 13 , and the lens driving device 14 is connected to the The lens group 11 is connected in a phase-driven manner, and the lens group is driven by the lens driving device 14 to move in a specific direction, so as to adjust the focal length of the entire system.
  • the lens driving device 14 drives the lens group 11 to shake, so as to compensate for the image shake caused by the overall shake of the camera module, thereby realizing the optical image stabilization of the periscope camera module.
  • the lens group 11 further includes a first lens group 111 , a second lens group 112 and a third lens group 113 , wherein the first lens group 111 , the second lens group 112 and the third lens group
  • the groups 113 are sequentially arranged along the optical axis O direction from the object side to the image side.
  • the reflection prism 20 is located at the object side end of the first lens group 111 of the lens group 10 , wherein the light reflected by the reflection prism 20 passes through the first lens group 111 to the second lens group 113 .
  • the second lens group 112 is located on the light-emitting side of the first lens group 111
  • the third lens group 113 is located on the light-emitting side of the second lens group 112 .
  • the first lens group 111 includes a first lens frame 1111 and at least one first lens unit 1112 fixed by the first lens frame 1111, wherein the first lens unit 1112 is supported by the first lens frame 1111, and fixed on the inner side of the casing 13 .
  • the second lens group 112 includes a second lens frame 1121 and at least one second lens unit 1122 fixed by the second lens frame 1121, wherein the second lens group 112 is drivably connected to the lens
  • the driving device 14, the second lens group 112 is driven by the lens driving device 14 to move horizontally and laterally along the optical axis O direction.
  • the second lens group 112 is driven by the lens driving device 14 as a zoom lens to adjust the focal length of the entire system.
  • the third lens group 113 includes a third lens frame 1131 and at least one third lens unit 1132 fixed by the third lens frame 1131, wherein the third lens group 113 is drivably connected to the lens
  • the driving device 14, the second lens group 112 is driven by the lens driving device 14 to move horizontally and laterally along the optical axis O direction.
  • the third lens group 113 serves as a focusing lens and is located at the end of the lens group 10, adjacent to the image sensor 12, so that the camera module can perform continuous zooming effect.
  • the casing 13 has a first long side and a second long side.
  • the first long side is provided with two guide rails with the same height as the lens frame, which can provide the lens group 11 to slide back and forth.
  • the housing 13 is also provided with a first fixed connection part and a second fixed connection part (not shown in the figure) that can clamp the lens frame, which are respectively clamped as the corresponding parts of the second lens frame 1121 and the third lens.
  • the fixed connection parts are located on one side in the positive direction of the reference axis X axis corresponding to the lens frame.
  • the fixed connection part is connected to the lens driving device 14 by transmission, that is, one end of the fixed connection part clamps the second lens frame 1121 or the lens frame 1131 corresponding to the third lens, and the other end clamps the lens driving device 14 .
  • the fixed connection portion plays a transmission role, which facilitates the friction between the lens driving device 14 and the fixed connection portion to drive the second lens frame 1121 or the lens frame 1131 corresponding to the third lens to vibrate, further causing the lens group 10 to vibrate.
  • Implement dithering It is worth mentioning that the lens group 10 can achieve continuous zooming by fixing and moving the internal lens.
  • the image sensor 12 is located on the light-emitting side of the third lens assembly 113, and is disposed on the short side of the casing 13.
  • the center positions of the lens group 11, the reflection prism 20, and the image sensor 12 are all located on the optical axis. O, which in turn transmits the received light to the image sensor 12 .
  • the lens driving device 14 further includes a first lens driving unit 14a and a second lens driving unit 14b, wherein the first lens driving unit 14a is drivingly connected with the second lens assembly 112, and is driven by the first lens driving unit 14a.
  • a lens driving unit 14a drives the second lens assembly 112 to move.
  • the second lens driving unit 14b is drivingly connected with the third lens assembly 113, and the third lens assembly 113 is driven by the second lens driving unit 14b to move.
  • the lens driving device 14 is implemented as a piezoelectric device. More preferably, in this preferred embodiment of the present invention, the first lens driving unit 14a and the second lens driving unit 14b of the lens driving device 14 have the same structure.
  • the lens driving device 14 includes a piezoelectric drive shaft 141 and a vibration member 142, wherein the piezoelectric drive shaft 141 is parallel to the optical axis O of the camera module body 10, and the piezoelectric drive shaft 141 is parallel to the optical axis O of the camera module body 10.
  • One end is fixed by the fixed connection part, and the other end is fixedly connected with the vibration member 142 through adhesive, so that the vibration member 142 drives the piezoelectric drive shaft 141 to vibrate.
  • the first lens driving unit 14a and the second lens driving unit 14b of the lens driving device 14 are disposed opposite to each other, that is, the first lens driving unit 14a
  • the vibrating member 142 and the vibrating member 142 of the second lens driving unit 14b are arranged face-to-face to facilitate internal circuit wiring, and at the same time, the face-to-face arrangement will also create more internal space, thereby facilitating compact packaging.
  • the structure of the vibration member 142 is the same as that of the piezoelectric driver 32 .
  • the vibrating member 142 includes a piezoelectric element, the piezoelectric element is in a laminated structure, and the laminated structure includes a plurality of piezoelectric stretching bodies and a plurality of internal electrodes, and the internal electrodes are alternately superimposed with a plurality of piezoelectric A plurality of electrodes formed by a telescopic body, and a plurality of piezoelectric stretchable bodies and a plurality of internal electrodes are stacked on each other, which greatly reduces the cross-sectional area occupied by the piezoelectric element, and the laminated structure is applied with a small electric field.
  • the upper and lower surfaces of the piezoelectric stretchable body form an upper layer electrode and a lower layer electrode, and the electrodes located on the side of the piezoelectric stretchable body are called side electrodes; when the piezoelectric stretchable body is single, the upper and lower layer electrodes of the piezoelectric stretchable body are formed.
  • the surface of the electrode is connected to the positive electrode and the negative electrode, and the side electrode is connected to the external circuit; when there are multiple piezoelectric stretchers, the electrode layers of the same polarity are connected through the side electrodes, so that the positive and negative electrodes can be connected.
  • the electrode layers are drawn out on two sides; among them, the connection method can be in the form of welding, which can ensure the connection strength.
  • the piezoelectric drive shaft and the vibration component are fixed by adhesive, and are located in the middle section of the upper surface of the piezoelectric element,
  • the piezoelectric drive shafts 141 of the first lens driving unit 14a and the second lens driving unit 14b are installed inside the housing 13 near the second long side surface
  • the side of the lens group 11 is parallel to the optical axis O (Z axis) of the lens group 11, and the piezoelectric driving axis of the first lens driving unit 14a and the piezoelectric driving axis of the second lens driving unit 14b are driven
  • the positions of the two axes are set relative to each other. Since the vibration member 142 is located at one end of the piezoelectric drive shaft 141, the vibration member 142 of the first lens driving unit 14a and the vibration member of the second lens driving unit 14b are also disposed opposite to each other .
  • the piezoelectric telescopic body when a pulse voltage is applied to the lens driving device 14, the piezoelectric telescopic body will be deformed to form an inverse piezoelectric effect, thereby causing the entire vibration member 142 to vibrate up and down continuously.
  • the piezoelectric element using this laminated structure has the advantages of small size, large thrust and high precision, and the driving structure is relatively simple as a whole, which is suitable for the camera module with compact space, and only needs a small capacitance to provide a large driving force.
  • the prism base 40 and the reflecting prism 20 are disposed on the casing 13 together. Since the prism drive shaft 31 performs linear motion, the transmission shaft 52 is connected to the prism drive shaft 31 perpendicularly, and the transmission shaft 52 acts as a guide mechanism to convert the linear motion into rotational motion, so that the The prism base 40 and the reflecting prism 20 obtain a certain inclination angle.
  • the reflection prism 20 rotates around the reference axis (X-axis) to change the direction of the light emitted by the reflection prism 20 to achieve the effect of optical anti-shake.
  • the prism drive shaft 31 of the prism drive device 30 and the piezoelectric drive shaft 141 of the lens drive device 14 are located at the reference axis inside the housing 13
  • the same side in the positive direction of the X-axis is parallel to the optical axis O of the lens group 11 .
  • This design structure reduces the width of the casing 13, thereby reducing the overall volume of the module, rationally utilizing the internal space of the casing, facilitating installation, and facilitating the miniaturized design of the module.
  • the periscope camera module further includes at least one magnetic sensor 60, wherein the magnetic sensor 60 is disposed between the fixed connection portion of the lens group 11 and the housing 13, and the magnetic sensor 60 is used for To detect the change degree of the magnetic field intensity in the camera module main body 10 of the periscope camera module.
  • the magnetic sensor 60 can be, but is not limited to, a magnetoresistive sensor.
  • the periscope camera module further includes at least one circuit board 70 , wherein the circuit board 70 is electrically connected to the magnetic sensor 60 .
  • the circuit board 70 is arranged around the magnetic sensor 60, and one end of the circuit board 70 is electrically connected to the magnetic sensor 60, and the circuit board 70 is close to the second long side inside the casing
  • the inner surface extends out, and the other end of the circuit board 70 is electrically connected with the circuit of the vibration part 142 in the lens driving device 14 .
  • the circuit board 70 is implemented as a flexible circuit board (FPC). It will be understood that the types of circuit boards described herein are merely exemplary and not limiting.
  • the circuits of the lens driving device 14 and the prism driving device 30 are connected to each other.
  • the number of the magnetic sensors 60 and the circuit boards 70 is two, which is the same as the number of the lens driving devices 14 , and the directions of the circuit boards 70 are opposite to each other.
  • the circuit board 70 is disposed between the vibration member 142a of the first lens driving unit 14a and the vibration member 142b of the second lens driving unit 14b.
  • the circuit board 70 is attached to the surface of the second long side inside the casing 13, which can make the interior space of the module more compact. system integration.
  • the circuit board 70 is provided in the bottom area of the housing 13, does not occupy the inner space of the housing 13, and does not need to be attached to the side surface inside the housing On the surface, it provides better space for other components, which further makes the overall volume and size of the module tend to be miniaturized, and the package is more compact.
  • the circuit wiring of the periscope camera module is arranged inside the bottom of the casing or attached to the surface of the second long side inside the casing.
  • the prism driving device 30A includes a piezoelectric motor 31A and a crank-slider mechanism 32A, wherein the piezoelectric motor 31A is drivingly connected with the crank-slider mechanism 32A, wherein the crank-slider mechanism 32A is operably connected.
  • the piezoelectric motor 31A drives the prism base 40 and the reflection prism 20 to move through the crank-slider mechanism 32A, so as to realize the periscope camera module.
  • Optical image stabilization is Optical image stabilization.
  • the piezoelectric motor 31A is disposed on the side close to the second long side inside the casing 13, so as to reduce the prism driving device 30A occupying the casing The space in the width direction of the body 13 .
  • the crank-slider mechanism 32A further includes a crank 321A, a slider 322A and a connecting shaft 323A, wherein the slider 322A is drivingly connected with the piezoelectric motor 31A, and is driven by the piezoelectric motor 31A.
  • the slider 322A moves linearly along the optical axis O direction.
  • the slider 322A can be driven by the piezoelectric motor 322A as a driven member, the crank 321A and the slider 322A are connected through the connecting shaft 323A, wherein the other end of the crank 321A is connected to the The prism base 40 is connected.
  • the connecting shaft 323A is parallel to the reference axis X axis
  • the crank 321A is connected to the optical axis O (Z axis) of the lens group 11 and the reference axis Y axis
  • the planes are parallel.
  • the prism driving device 30A further includes a guide element 33A, wherein one end of the guide element 33A is connected with the slider 322A, and the other end is connected with the prism seat 40, when the piezoelectric motor 31A applies a driving force.
  • crank 321A drives the prism base 40 to form a certain inclination angle around the reference axis (X-axis), and the guide element 33A can convert linear motion into rotational motion, further enabling the prism base 40 and the reflection prism 20 rotates around the reference axis (X axis).
  • the guide element 33A has an "L"-shaped structure.
  • the number of the prism driving devices 30A is two, and the two prism driving devices 30A are arranged in a symmetrical structure near the first length inside the casing. side of the side.
  • the two prism driving devices 30A are in a symmetrical state with the optical axis O (Z axis) of the lens group 11 as the central axis, so that the prism seat 40 and the reflecting prism 20 can perform better rotational motion, and further make the The overall prism structure is more stable during movement.
  • Image Stabilization plays a key role in improving the shooting performance of mobile electronic devices.
  • OIS Optical Image Stabilization
  • EIS Electronic Image Stabilization
  • electromagnetic drivers such as voice coil motors (Voice Coil Actuator, VCM) are usually used to move the optical lens in the camera module or Photosensitive components to compensate for the shake that occurs when shooting.
  • VCM Voice Coil Actuator
  • the existing electromagnetic drivers such as voice coil motor have gradually satisfied the driving requirements of the camera module. requirements and meet the package size requirements.
  • the new type of driver can not only meet the driving requirements for the optical performance adjustment of the camera module, but also meet the development of light weight and thinning of the camera module. need.
  • the technical idea of the present application is to use a MEMS (Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems) driver as a driving element to perform sensor shift (Sensor shift) to achieve optical anti-shake.
  • MEMS Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems
  • the optical anti-shake technology based on MEMS driver adopts the principle of sensor displacement, that is, the MEMS driver is used to drive the image sensor to translate and/or rotate to compensate the mobile electronic device during shooting. jitter that occurs. It has many advantages: high performance, sub-micron precision positioning within 10ms, response to the jitter of mobile electronic devices within 15ms, small size, and no electromagnetic interference. Moreover, compared with voice coil motors, its cost is low, and it can be mass-produced based on semiconductor technology.
  • the present application provides a photosensitive assembly, which includes a substrate, including: a fixed part, a movable part, and at least two suspension arms extending between the fixed part and the movable part, the movable part The part is suspended in the fixed part by the at least two suspension arms; the photosensitive chip is provided and electrically connected to the movable part, the photosensitive chip is provided with a photosensitive shaft; and at least one pressure an electrical element, wherein the at least one piezoelectric element is disposed on at least one of the at least two cantilever arms, and is configured to actuate the cantilever arm through its own deformation after being turned on The fixed portion is warped along the direction set by the photosensitive axis to drive the movable portion and the photosensitive chip. In this way, optical image stabilization is performed.
  • a camera module As shown in FIG. 7 , a camera module according to an embodiment of the present application is illustrated, which includes: a photosensitive assembly 10 and a lens assembly 20 held on a photosensitive path of the photosensitive assembly 10 .
  • the photosensitive component 10 uses a MEMS driver as a driving element and utilizes the displacement principle of an image sensor to perform optical anti-shake.
  • the lens assembly 20 includes a lens carrier 21 and an optical lens 22 mounted on the lens carrier 21 , wherein the optical lens 22 is provided with an optical axis.
  • the optical lens 22 includes a lens barrel and at least one optical lens mounted in the lens barrel.
  • the optical lens 22 can be implemented as an integrated lens, or a split lens, wherein, when the optical lens 22 is implemented as an integrated lens, the optical lens 22 includes a lens barrel, All the optical lenses are installed in the lens barrel; and when the optical lens 22 is implemented as a split optical lens, the optical lens 22 is assembled from at least two parts of a single lens.
  • the lens carrier 21 is a fixed carrier, that is, when the optical lens 22 is installed on the lens carrier 21, the relative relationship between the lens carrier 21 and the optical lens 22 The positional relationship does not change. It should be understood that in other examples of the present application, the lens carrier 21 may also be implemented as a driving carrier, so as to change the relative positional relationship between the optical lens 22 and the photosensitive assembly 10 through the driving carrier to Autofocus is performed, which is not limited by this application.
  • the photosensitive assembly 10 includes a substrate 11 , a photosensitive chip 12 electrically connected to the substrate 11 , at least one piezoelectric element 13 disposed on the substrate 11 , and a piezoelectric element 13 disposed on the substrate. 11 and the filter element 17 disposed on the support 14 , wherein the photosensitive chip 12 is provided with a photosensitive axis, and the photosensitive axis is coaxial with the optical axis of the optical lens 22 .
  • the bracket 14 is disposed on the fixing portion 111 of the base plate 11
  • the lens assembly 20 is mounted on the bracket 14 .
  • the bracket 14 is implemented as a plastic bracket 14 , which is fixed to the fixing portion 111 of the base plate 11 by an adhesive. It should be understood that, in other examples of the present application, the bracket 14 may also be implemented as other types of brackets 14 , for example, a molded bracket, which is not limited by the present application.
  • the base plate 11 includes a fixed part 111 and a movable part 112 suspended in the fixed part 111 .
  • the movable part 112 of the base plate 11 is suitable for any
  • the at least one piezoelectric element 13 can be displaced relative to the fixing portion 111 under the action of the at least one piezoelectric element 13 .
  • the photosensitive chip 12 is disposed on and electrically connected to the movable portion 112 , so that the photosensitive chip 12 can be displaced relative to the fixed portion 111 for optical protection. shake.
  • the substrate 11 further includes at least two suspension arms 113 disposed between the fixed part 111 and the movable part 112 , so that the movable The moving part 112 is suspended in the fixed part 111 . That is, in this embodiment, the movable part 112 is suspended inside the fixed part 111 by the at least two suspension arms 113 to allow the movable part 112 to be relative to the fixed part 111 is displaced for optical image stabilization. More specifically, in this embodiment, each of the suspension arms includes an opposite first end 1131 and a second end 1132, wherein the first end 1131 is fixed to the fixing portion 111, and the second end 1131 is fixed to the fixing portion 111.
  • the end 1132 is fixed to the movable part 112 , and in this way, the movable part 112 is suspended inside the fixed part 111 by the at least two suspension arms 113 .
  • the at least one piezoelectric element 13 is disposed on at least one of the at least two cantilever arms 113 to form a MEMS actuator, and is configured In order to actuate the cantilever arm to warp upward or downward relative to the fixed portion 111 through its own deformation after being turned on to drive the movable portion 112 and the photosensitive chip 12 to move for optical Anti-shake.
  • the at least one piezoelectric element 13 is disposed on the upper surface of at least one of the at least two suspension arms 113 .
  • the substrate 11 is implemented as a semiconductor substrate, eg, as illustrated in FIGS. 9A and 3B .
  • the substrate 11 includes a silicon base layer, a silicon oxide layer and a silicon crystal layer from bottom to top, that is, the substrate 11 includes a silicon base layer, a stack of The silicon oxide layer on the silicon base layer and the silicon crystal layer stacked on the silicon oxide layer, wherein the lower surface of the silicon base layer forms the lower surface of the substrate 11, and the upper surface of the silicon crystal layer The surface forms the upper surface of the substrate 11 .
  • the substrate 11 may be made of an SOI silicon wafer (Silicon-on-insulator).
  • an SOI silicon wafer is a mature semiconductor device.
  • an integrated circuit is provided in the silicon crystal layer of the substrate 11 , for example, a standard SOI CMOS process is used to complete the fabrication of the integrated circuit on the circuit layer of the SOI silicon wafer.
  • the substrate 11 further includes a passivation layer stacked on the silicon crystal layer, so that the integrated circuit disposed on the silicon crystal layer can be processed by the passivation layer.
  • the electrical connection structures 16 such as pads and wires may also be attached to the silicon crystal layer through a surface mount process.
  • the substrate 11 has opposite upper and lower surfaces, and a hollow structure at least partially penetrating between the lower surface and the upper surface 110, wherein, through the hollow structure 110, the substrate 11 forms the fixed part 111, the movable part 112, and the at least two parts extending between the fixed part 111 and the movable part 112.
  • Cantilever arm 113 that is, through the hollow structure 110 , the base plate 11 is divided into two parts: a fixed part 111 and a movable part 112 , and the movable part 112 is suspended from the fixed part 112 by the at least two suspension arms 113 . inside the fixing portion 111 .
  • the fixed portion 111 , the movable portion 112 and the at least two suspension arms 113 have an integrated structure.
  • the thickness of the at least two cantilever arms 113 is smaller than the thickness of the fixing portion 111 , so that the at least two cantilever arms 113 can be driven along the photosensitive axis by the at least one piezoelectric element 13 . Warp in the set direction.
  • the photosensitive assembly 10 further includes a reinforcing plate 15 disposed on the lower surface of the substrate 11 .
  • the reinforcing plate 15 can be implemented as a metal plate, for example, a steel plate or the like.
  • an electrical connection structure 16 may be provided between the fixed portion 111 and the movable portion 112 of the substrate 11 (for example, when the substrate 11 is a semiconductor substrate
  • the electrical connection structure 16 is a part of the integrated circuit
  • the circuit of the camera module is realized through the electrical connection structure 16 .
  • the electrical connection structures 16 such as pads and wires may be attached to the upper surface of the substrate 11 by a surface mount process;
  • An LDS tank is arranged on the surface, and a conductive coating (for example, a nickel-palladium-gold coating) is plated on the surface of the LDS tank, and the circuit is connected to the conductive coating in the LDS tank through a connecting circuit, so as to derive the circuit;
  • Injection molding Injection molding
  • the upper surface of the movable part 112 is provided with the electrical connection structure 16 , so that when the photosensitive chip 12 is mounted on the upper surface of the movable part 112 , the photosensitive The chip 12 can be electrically connected to the movable portion 112 through the electrical connection structure 16 formed on the upper surface of the movable portion 112 .
  • the at least one piezoelectric element 13 is mounted on at least one of the at least two cantilever arms 113 , it can also pass through the electrical connection structure formed on the surface of the at least two cantilever arms 113 . 16 enables the at least one piezoelectric element 13 to be electrically connected to the cantilever arm.
  • the electrical connection structure 16 may also be disposed on the upper surface of the fixing portion 111 , and the electrical connection structure 16 is used to achieve conduction with an external circuit.
  • the electrical connection structure 16 of the fixed portion 111 , the movable portion 112 and the surfaces of the at least two cantilever arms 113 may be an integral structure or a split structure.
  • the substrate 11 may also be implemented as other types of substrates 11 , including but not limited to: a plastic substrate 11 , a metal substrate 11 , and the like.
  • the substrate 11 is implemented as a semiconductor substrate as an example.
  • the at least two suspension arms 113 include a first suspension arm 114 , a second suspension arm 115 , a third suspension arm 116 and a fourth suspension arm 116
  • the holding arm 117 wherein the first cantilever arm 114 and the second cantilever arm 115 are symmetrically arranged with respect to the movable part 112 with the X-axis as the axis of symmetry, and the third cantilever arm 116 and The fourth cantilever arm 117 is arranged symmetrically with respect to the movable part 112 with the Y-axis as the axis of symmetry, the first cantilever arm 114 is arranged adjacent to the third cantilever arm 116, and the first cantilever arm 114 is arranged adjacent to the third cantilever arm 116.
  • the two suspension arms 115 are arranged adjacent to the fourth suspension arm 117 .
  • the first suspension arm 114 , the second suspension arm 115 , the third suspension arm 116 and the fourth suspension arm 117 are provided on the movable portion 112 so that the photosensitive chip 12 can rotate along two rotation axes to change the inclination angle of the photosensitive chip 12 in two directions.
  • the at least one piezoelectric element 13 includes a first piezoelectric element 131 , a second piezoelectric element 132 , a third piezoelectric element 133 and a fourth piezoelectric element 134 , wherein the first piezoelectric element 131 is configured to drive the first suspension arm 114 up or down along the direction set by the photosensitive axis (ie, the direction set by the optical axis) through its own deformation after being turned on warping to drive the movable part 112 and the photosensitive chip 12 to move up or down, so that the positional relationship of the photosensitive surface of the photosensitive chip 12 relative to the fixed part 111 is adjusted.
  • the photosensitive axis ie, the direction set by the optical axis
  • the second piezoelectric element 132 is configured to drive the second suspension arm 115 upward along the direction set by the photosensitive axis through its own deformation after being turned on or Warp downward to drive the movable part 112 and the photosensitive chip 12 to move up or down, so that the positional relationship of the photosensitive surface of the photosensitive chip 12 relative to the fixed part 111 is adjusted.
  • the third piezoelectric element 133 is disposed on the third suspension arm 116 and is configured to drive the third suspension through self-deformation after being turned on
  • the arm 116 is warped upward or downward along the direction set by the photosensitive axis, so as to drive the movable part 112 and the photosensitive chip 12 to move upward or downward, so that the photosensitive surface of the photosensitive chip 12 is relatively
  • the positional relationship of the fixing portion 111 is adjusted, and in this way, optical image stabilization in the v-direction is performed
  • the fourth piezoelectric element 134 is disposed on the fourth cantilever arm 117 and is configured to After being turned on, the fourth suspension arm 117 is driven to warp upward or downward along the direction set by the photosensitive axis through its own deformation, so as to drive the movable part 112 and the photosensitive chip 12 upward or downward. Move downward, so that the positional relationship of the photosensitive surface of the photosensitive chip 12 relative to the fixed portion 111
  • each of the cantilever arms has two opposite long sides and two opposite short sides, and the first end 1131 and the second end 1132 form on the two long sides.
  • each of the cantilever arms has a cantilever main body and a partition groove at least partially penetrating the cantilever main body, wherein the cantilever main body is divided into two cantilever parts movable with each other by the partition groove, The edge of the cantilever portion forms the long side, and, in the embodiment of the present application, each cantilever portion is divided into two cantilever sub-portions by the first end 1131 and the second end 1132 .
  • the first cantilever arm 114 includes a first cantilever body 1141 and a separation groove 1142 at least partially penetrating the first cantilever body 1141 , wherein, The first cantilever body 1141 is divided into a first cantilever portion 1143 and a second cantilever portion 1144 that are movable with each other by the dividing groove.
  • the first piezoelectric element 131 includes a first piezoelectric region disposed on the first cantilever portion 1143 and a second piezoelectric region disposed on the second cantilever portion 1144 region, the first piezoelectric region is configured to act on the first cantilever portion 1143 through its own deformation after being turned on, so that the first cantilever portion 1143 is relative to the second cantilever portion 1144 warping occurs, the second piezoelectric region is configured to act on the second cantilever portion 1144 through its own deformation after being turned on, so that the second cantilever portion 1144 is relative to the first cantilever The portion 1143 is warped.
  • first cantilever portion 1143 of the first cantilever arm 114 is divided into a first cantilever sub-section 1145 and a second cantilever sub-section 1146 through the first end 1131 , and the second cantilever portion 1144 passes through the The second end 1132 is divided into a third cantilever sub-section 1147 and a fourth cantilever sub-section 1148 , wherein the first piezoelectric region includes the first piezoelectric region disposed on the first cantilever sub-section 1145 A sheet 1311 and a second piezoelectric sheet 1312 provided on the second cantilever sub-portion 1146, the second piezoelectric region includes the third piezoelectric sheet 1313 provided on the third cantilever sub-portion 1147 and the fourth piezoelectric sheet 1314 disposed on the fourth cantilever sub-section 1148 .
  • the first piezoelectric sheet 1311 , the second piezoelectric sheet 1312 and the third piezoelectric sheet 1313 are disposed on the first cantilever sub-section 1145 and the second cantilever the upper surfaces of the sub-section 1146, the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148, so as to drive the first cantilever section 1143 and/or through the contraction or relaxation of the four piezoelectric sheets
  • the second cantilever portion 1144 is warped upward or downward, as shown in FIG. 11 .
  • the cantilever arm and the piezoelectric element may also be divided in other ways. Still taking the cantilever arm as the first cantilever arm 114 as an example, in other examples, the first cantilever arm 114 is divided into a first cantilever arm by the first end 1131 and the second end 1132 part 1143 and a second cantilever part 1144, the first cantilever part 1143 is divided into a first cantilever sub-part 1145 and a second cantilever sub-part 1146 by the separation groove 1142, the first cantilever sub-part 1145 is connected to the At the first end 1131 , the second cantilever sub-section 1146 is connected to the second end 1132 .
  • the first piezoelectric sheet 1311 is disposed on the first cantilever sub-section 1145
  • the second piezoelectric sheet 1312 is disposed on the second cantilever sub-section 1146
  • the first piezoelectric sheet 1311 is along the first direction Extending
  • the second piezoelectric sheet 1312 extends along a second direction
  • the first direction and the second direction are the positive and negative directions along the direction of the x-axis.
  • the first cantilever sub-section 1145 and the second cantilever sub-section 1146 of the first cantilever section 1143 are driven by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 to generate edge travel in the height direction.
  • the height direction is the direction set by the photosensitive axis.
  • the second cantilever portion 1144 is divided into a third cantilever sub-portion 1147 and a fourth cantilever sub-portion 1148 by the separation groove 1142 , and the third cantilever sub-portion 1147 is connected to the first end 1131 , so The fourth cantilever sub-section 1148 is connected to the second end 1132 .
  • the third piezoelectric sheet 1313 is disposed on the third cantilever sub-section 1147, the fourth piezoelectric sheet 1314 is disposed on the fourth cantilever sub-section 1148, and the third piezoelectric sheet 1313 is along the first direction Extending, the fourth piezoelectric sheet 1314 extends along the second direction.
  • the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 of the second cantilever section 1144 are driven by the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 to generate edge travel in the height direction.
  • the short side of each cantilever arm and the turning corner between the short side and the long side are not provided with the piezoelectric sheet, that is, after power-on, the short side of the cantilever arm And no deformation occurs at the long and short corners.
  • the first suspension arm 114 , the second suspension arm 115 , the third suspension arm 116 and the fourth suspension arm 117 have the same symmetry Therefore, after the first cantilever arm 114 is used for description, the detailed description of other cantilever arms will not be expanded.
  • the first pressure of the first piezoelectric element 131 provided on the first suspension arm 114 is The electric sheet 1311 and the second piezoelectric sheet 1312 contract under the action of a certain voltage, which drives the first cantilever sub-section 1145 and the second cantilever sub-section 1146 to warp upward; the first piezoelectric element 131 The third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 contract under the action of a certain voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 to warp upward.
  • the voltages set by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312, the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 may be the same or different, wherein , when the voltage is the same, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward; when the voltage is different Meanwhile, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is different from the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward.
  • the first suspension arm 114 is warped upward, so that the height of the side connected to the photosensitive chip 12 increases.
  • the four piezoelectric sheets of the second piezoelectric element 132 of the second cantilever arm 115 which are disposed opposite to the first cantilever arm 114 in the same direction, may not be energized, and warp upward relative to the first cantilever arm 114 .
  • the height of the side of the second suspension arm 115 connected to the photosensitive chip 12 remains unchanged, so that the plane where the photosensitive chip 12 is located forms a certain inclination angle relative to the fixed portion 111, so that the movable portion
  • the photosensitive chip 12 on the 112 rotates along the x-axis direction, thereby realizing the optical anti-shake in the u-direction.
  • the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 of the second piezoelectric element 132 disposed on the second suspension arm 115 are The contraction occurs under the action of a certain voltage, which drives the first cantilever sub-section 1145 and the second cantilever sub-section 1146 of the second cantilever arm 115 to warp upward; the third pressure of the second piezoelectric element 132
  • the electric sheet 1313 and the fourth piezoelectric sheet 1314 contract under the action of a certain voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 to warp upward.
  • the voltages set by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 , the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 of the second piezoelectric element 132 may be the same or different.
  • the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward; when the voltage is different, the The height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is different from the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward.
  • the voltage passed by the piezoelectric sheet of the second cantilever arm 115 is lower than the voltage passed by the voltage layer of the first cantilever arm 114 , that is to say, the height of the second cantilever arm 115 to warp upward is smaller than that of the first cantilever arm 115 .
  • the height at which the suspension arm 114 warps upward that is, the height of the side of the second suspension arm 115 connected to the photosensitive chip 12 is smaller than the height of the side of the first suspension arm 114 connected to the photosensitive chip 12 , so that the plane where the photosensitive chip 12 is located forms a certain inclination angle relative to the fixed portion 111, so that the photosensitive chip 12 on the movable portion 112 rotates along the x-axis direction, so as to realize the optical image stabilization in the u-direction .
  • the voltage layer of the second piezoelectric element 132 disposed on the second cantilever arm 115 may pass an opposite voltage, that is, the voltage layer disposed on the second cantilever arm 115
  • the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 of the first cantilever sub-section 1145 and the second cantilever sub-section 1146 of 115 relax under the action of a certain voltage, driving the first cantilever sub-section 1145 and the second piezoelectric sheet 1312
  • the cantilever sub-section 1146 warps downward;
  • the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 disposed on the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 of the second cantilever arm 115 are at a certain
  • the relaxation occurs under the action of the voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 to warp downward, wherein the first piezo
  • the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the third cantilever sub-section 1147 and The height at which the fourth cantilever sub-section 1148 warps downward is the same; when the voltages are different, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1147 The heights at which the subsections 1148 warp downward are different. And due to the above deformation, the second suspension arm 115 is warped downward, so that the height of the side connected to the photosensitive chip 12 is reduced.
  • the height of the side of the second suspension arm 115 connected to the photosensitive chip 12 decreases, so that the plane where the photosensitive chip 12 is located is opposite to the fixed portion.
  • 111 forms a certain inclination angle, so that the photosensitive chip 12 on the movable part 112 rotates along the x-axis direction, so as to realize the optical anti-shake in the u-direction.
  • the deformations of the first suspension arm 114 and the second suspension arm 115 can be exchanged relatively, that is, the height of the side of the second suspension arm 115 connected to the photosensitive chip 12 is greater than The first suspension arm 114 is connected to the height of one side of the photosensitive chip 12 .
  • the heights of the third cantilever arm 116 and the fourth cantilever arm 117 are also adjusted accordingly.
  • the warped height of the third suspension arm 116 and the fourth suspension arm 117 is the warped height of the first suspension arm 114 and the warped height of the second suspension arm 115 Half of the sum of the warped heights.
  • the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 of the third piezoelectric element 133 of the third suspension arm 116 The contraction occurs under the action of a certain voltage, which drives the first cantilever sub-section 1145 and the second cantilever sub-section 1146 of the third cantilever arm 116 to warp upward; the third piezoelectric element of the third piezoelectric element 133
  • the sheet 1313 and the fourth piezoelectric sheet 1314 contract under the action of a certain voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 of the third cantilever arm 116 to warp upward.
  • the voltages set by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312, the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 of the third piezoelectric element 133 may be the same or different.
  • the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward; when the voltage is different, the first The height at which the cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is different from the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward.
  • the third cantilever arm 116 is warped upward, so that the height of the side connected to the photosensitive chip 12 increases.
  • the four piezoelectric sheets of the fourth cantilever arm 117 disposed opposite to the third cantilever arm 116 in the same direction may not be energized, and the fourth cantilever arm 116 warps upward relative to the third cantilever arm 116 .
  • the height of the side of the holding arm 117 connected to the photosensitive chip 12 is constant, so that the plane where the photosensitive chip 12 is located forms a certain inclination angle with respect to the fixed portion 111 , so that the photosensitive chip 12 on the movable portion 112 has an inclination angle. Rotation along the y-axis direction achieves optical image stabilization in the v-direction.
  • the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 of the fourth piezoelectric element 134 disposed on the fourth suspension arm 117 act on a certain voltage
  • the first and second cantilever sub-sections 1145 and 1146 of the fourth cantilever arm 117 are shrunk upward; the third piezoelectric sheet 1313 and the fourth
  • the piezoelectric sheet 1314 contracts under the action of a certain voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 to warp upward.
  • the voltages set by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 , the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 of the fourth piezoelectric element 134 may be the same or different, wherein, when the voltages are the same, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 of the fourth cantilever arm 117 warp upward is the same as the height at which the third cantilever sub-section 1147 and the third cantilever sub-section 1147 and the The height at which the four cantilever sub-sections 1148 warp upward is the same; when the voltages are different, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height of the third cantilever sub-section 1147 and the fourth cantilever sub-section 1147 1148 The height at which the upward warping occurs is different.
  • the voltage passed by the piezoelectric sheet of the fourth cantilever arm 117 is smaller than the voltage passed by the voltage difference of the third cantilever arm 116 , that is to say, the height at which the fourth cantilever arm 117 warps upward is smaller than the voltage passed by the voltage difference of the third cantilever arm 116 .
  • the height at which the three suspension arms 116 warp upward that is, the height of the side of the fourth suspension arm 117 connected to the photosensitive chip 12 is smaller than the height of the side of the third suspension arm 116 connected to the photosensitive chip 12 , so that the plane of the photosensitive chip 12 forms a certain inclination angle relative to the fixed part 111, so that the photosensitive chip 12 on the movable part 112 rotates along the y-axis direction, so as to realize the optical anti-shake in the v-direction .
  • the fourth piezoelectric element 134 disposed on the fourth cantilever arm 117 may pass an opposite voltage, that is, the fourth piezoelectric element 134 disposed on the fourth cantilever arm 117
  • the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 of the fourth piezoelectric element 134 relax under the action of a certain voltage, driving the first cantilever sub-section 1145 and the second cantilever of the fourth cantilever arm 117
  • the sub-section 1146 warps downward; and the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 of the fourth piezoelectric element 134 relax under the action of a certain voltage, driving the fourth cantilever arm 117
  • the third cantilevered sub-section 1147 and the fourth cantilevered sub-section 1148 are warped downward.
  • the voltages set by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 , the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 of the fourth piezoelectric element 134 may be the same or different.
  • the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward; when When the voltage is different, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is different from the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward. And due to the above deformation, the fourth cantilever arm 117 is warped downward, so that the height of the side connected to the photosensitive chip 12 is reduced.
  • the height of the side of the fourth suspension arm 117 connected to the photosensitive chip 12 is decreased, so that the plane where the photosensitive chip 12 is located is opposite to the fixed portion.
  • 111 forms a certain inclination angle, so that the photosensitive chip 12 on the movable part 112 rotates along the y-axis direction, thereby realizing optical image stabilization in the v-direction.
  • the deformations of the third suspension arm 116 and the fourth suspension arm 117 can be exchanged relatively, that is, the height of the side where the fourth suspension arm 117 is connected to the photosensitive chip 12 is greater than
  • the third suspension arm 116 is connected to the height of one side of the photosensitive chip 12 .
  • the warped height of the first suspension arm 114 and the third suspension arm 116 is the warped height of the third suspension arm 116 and the fourth suspension arm 117 Half of the sum of the warped heights.
  • At least two cantilever arms 113 are respectively disposed on opposite sides of the movable portion 112, a piezoelectric element is disposed on at least one of the at least two cantilever arms 113, and different voltages are input to
  • the piezoelectric elements on opposite sides of the movable portion 112 are arranged so that the photosensitive chip 12 has a certain inclination angle relative to the fixed portion 111 , so as to realize the optical anti-shake of the photosensitive chip 12 .
  • the input voltage is stopped, and the piezoelectric sheet will not be deformed without being energized, so that the cantilever arm can return to its original position (the original position is the initial position before power-on) .
  • the angle at which the photosensitive chip 12 can realize tilt stabilization is 1°-3°.
  • the cantilever arm has a relatively small thickness.
  • the thickness dimension of the cantilever arm ranges from 0.1 mm to 0.3 mm.
  • the piezoelectric element may be implemented as a material having excellent piezoelectric properties doped with PZT.
  • the thickness of the piezoelectric element is between 1 um and 0.5 mm, so that the cantilever arm has good reliability when the piezoelectric element has a large driving force.
  • an elastic element (not shown) may also be arranged between the at least one piezoelectric element 13 and the at least two suspension arms 113, so as to pass the The elastic element increases the movable stroke of the movable portion 112 and the photosensitive chip 12 .
  • the at least two cantilever arms 113 also Can be implemented as other numbers of cantilever arms
  • the at least one piezoelectric element 13 can also be implemented as other numbers of piezoelectric elements.
  • the at least two cantilever arms 113 only include two cantilever arms: the first cantilever arm 114 and the second cantilever arm 115 , and the at least one piezoelectric element 13 only includes one Piezoelectric element, wherein the piezoelectric element is disposed on the first suspension arm 114 or the second suspension arm 115, and is configured to drive the first suspension arm through its own deformation after being turned on
  • the suspension arm 114 or the second suspension arm 115 is bent upward or downward to drive the movable portion 112 and the photosensitive chip 12 to move upward or downward so that the photosensitive surface of the photosensitive chip 12 is relatively
  • the positional relationship of the fixing portion 111 is adjusted, and in this way, optical image stabilization is performed, which is not limited by this application.
  • FIG. 13 illustrates a schematic diagram of a variant implementation of the substrate 11 according to an embodiment of the present application.
  • the at least two suspension arms 113 include a first suspension arm 114 and a second suspension arm 115 which are symmetrical with respect to the center of the movable portion 112 .
  • the shape of the suspension arm is adjusted.
  • the first cantilever arm 114 includes a first cantilever segment 1143A extending along the X-axis direction and a second cantilever segment 1144A extending along the Y-axis direction.
  • the at least one piezoelectric element 13 includes a first piezoelectric element 131 and a second piezoelectric element 132 , and the first piezoelectric element 131 is disposed on the first cantilever section of the first cantilever arm 114 1143A, the second piezoelectric element 132 is disposed on the second cantilever section 1144A of the first cantilever arm 114, wherein the first piezoelectric element 131 is configured to deform by itself after being turned on.
  • the second piezoelectric element 132 is configured to drive the second cantilever segment 1144A to warp upward or downward through its own deformation after being turned on, so as to drive the movable portion 112 and the photosensitive chip 12 to move upward. Or move down, and in this way, perform optical image stabilization in the u direction.
  • the second cantilever arm 115 includes a third cantilever segment 1145A extending along the X-axis direction and a fourth cantilever segment 1146A extending along the Y-axis direction.
  • the at least one piezoelectric element 13 further includes a third piezoelectric element 133 and a fourth piezoelectric element 134 , wherein the third piezoelectric element 133 is disposed on the third cantilever of the second cantilever 115 Section 1145A, the fourth piezoelectric element 134 is disposed in the fourth cantilever section 1146A of the second cantilever arm 115, wherein the third piezoelectric element 133 is configured to deform by itself after being turned on to drive the second cantilever segment 1145A to warp up or down to drive the movable part 112 and the photosensitive chip 12 to move up or down, and in this way, the optical image stabilization in the v direction is performed.
  • the fourth piezoelectric element 134 is configured to drive the fourth cantilever segment 1146A to warp upward or downward through its own deformation after being turned on to drive the movable portion 112 and the photosensitive chip 12 to perform Move up or down, and in this way, perform optical image stabilization in the u direction.
  • the first suspension arm 114 has an "L"-shaped structure
  • the second suspension arm 115 has an "L"-shaped structure. That is, the first suspension arm 114 and/or the second suspension arm 115 are L-shaped arms.
  • FIG. 14 illustrates a schematic diagram of another variant implementation of the substrate 11 according to an embodiment of the present application. Different from the variant embodiment shown in FIG. 13 , in this variant embodiment, the shape of the cantilever arm is further adjusted.
  • the first cantilever arm 114 and the second cantilever arm 115 have a three-section structure, which includes a second cantilever section 1144A extending along the Y-axis direction and Two first cantilever segments 1143A extending along the X-axis direction.
  • the shape of the cantilever arm may also be isomerized in other ways, which is not limited by the present application.
  • the piezoelectric element is disposed on the upper surface of the cantilever arm. It should be understood that in other examples of the present application, the piezoelectric element may be disposed on the upper surface of the cantilever arm at the same time. The upper surface and the lower surface of the cantilever arm, or only the lower surface of the cantilever arm, is not limited by this application.
  • the camera module based on the embodiments of the present application is clarified, wherein the camera module adopts a new type of MEMS driver as a driving element to drive the displacement of the photosensitive chip 12 to realize optical anti-shake.
  • the MEMS driver is formed by a piezoelectric element disposed on the substrate 11 .
  • the optical anti-shake technology based on the MEMS driver adopts a sensor The principle of displacement, that is, the image sensor is driven to translate and/or rotate by a MEMS driver to compensate for the shake that occurs when the mobile electronic device is photographed.
  • FIG. 15 illustrates a schematic diagram of another variant implementation of the camera module according to an embodiment of the present application.
  • the installation method of the bracket 14 is adjusted.
  • the reinforcing plate 15 has relatively long length and width dimensions to protrude from the lower surface of the base plate 11 , wherein the reinforcing plate 15 has a relatively long length and width.
  • the portion of the board 15 protruding from the base plate 11 forms a mounting table.
  • the bracket 14 is installed on the portion of the reinforcing plate 15 that protrudes from the base plate 11 .
  • the reinforcing plate 15 has relatively high flatness and hardness. Therefore, installing the bracket 14 on the reinforcing plate 15 is beneficial to the bracket 14 installation flatness. Moreover, when the bracket 14 is installed on the reinforcing plate 15, the overall height dimension of the photosensitive assembly 10 can be reduced, so that the overall dimension of the camera module can be reduced.
  • FIG. 16 illustrates a schematic diagram of still another variant implementation of the camera module according to the embodiment of the present application.
  • the bracket 14 is implemented as a one-piece bracket that is integrally formed on the base plate 11 , for example, the bracket 14 is implemented as an integrated bracket through a molding process. Molded support 14 of base plate 11 .
  • the camera module is taken as an example of a traditional vertical camera module, those of ordinary skill in the art should understand that the piezoelectric
  • the actuator 100 can also be used as a driver in a periscope camera module, which is not limited by the present application.
  • a method for manufacturing the photosensitive assembly 10 is also provided.
  • the manufacturing method of the photosensitive assembly 10 includes: providing a substrate structure, wherein the substrate structure has circuits preset on its surface.
  • the substrate structure is that the semiconductor structure includes a silicon base layer structure, a silicon oxide layer structure and a silicon crystal layer structure from bottom to top, and the silicon crystal layer structure has a circuit preset therein.
  • the semiconductor structure is made of SOI silicon wafer (Silicon-on-insulator), and those skilled in the art should know that SOI silicon wafer is a mature semiconductor device.
  • the silicon crystal layer of the substrate 11 is a circuit layer, for example, the fabrication of an integrated circuit is completed by using a standard SOI CMOS process on the circuit layer of the SOI silicon wafer.
  • At least one piezoelectric element 13 , an electrical connection structure 16 and an electronic component are mounted on predetermined positions on the upper surface of the substrate structure, respectively.
  • the substrate structure is etched to form a hollow structure 110 at least partially penetrating between the lower surface and the upper surface of the substrate structure to form a substrate 11, wherein the substrate 11 includes a fixed portion 111, a movable part 112 and at least two suspension arms 113 extending between the fixed part 111 and the movable part 112 , the movable part 112 is suspended from the at least two suspension arms 113 In the fixing portion 111 , the at least one piezoelectric element 13 is formed on at least one of the at least two suspension arms 113 .
  • the at least one piezoelectric element 13 is disposed on at least one of the at least two cantilever arms 113 , and is configured to deform through its own deformation after being turned on. Actuating the suspension arm to warp upward or downward relative to the fixed portion 111 to drive the movable portion 112 and the photosensitive chip 12 to move for optical image stabilization
  • the reinforcing plate 15 is attached to the lower surface of the semiconductor structure.
  • the reinforcing plate 15 may be a steel plate or a glass plate with relatively high strength.
  • hydrolyzate is filled in the hollow structure 110 to pre-fix the movable portion 112 .
  • hydrolyzate is injected into the hollow structure 110 to pre-fix the movable portion 112 .
  • the photosensitive chip 12 is mounted and electrically connected to the movable portion 112 .
  • optical focusing plays a key role in improving the shooting performance of mobile electronic devices.
  • This technology mainly uses the driver to move the optical lens along the optical axis to change the distance between it and the photosensitive chip, so as to improve the sharpness of shooting.
  • the optical lens in the camera module is usually moved by electromagnetic drivers such as voice coil motors (Voice Coil Actuator, VCM). for optical focusing.
  • VCM Voice Coil Actuator
  • the new type of driver can not only meet the driving requirements for the optical performance adjustment of the camera module, but also meet the development of light weight and thinning of the camera module. need.
  • the technical idea of the present application is to use a MEMS (Micro-Electro-Mechanical Systems, Micro-Electro-Mechanical Systems) driver as a driving element to perform sensor shift (Sensor shift) to achieve optical focusing.
  • the driver used in this application is a MEMS actuator, and secondly, the actuation object of the MEMS actuator is a photosensitive chip.
  • driving the image sensor to move along the optical axis through the MEMS actuator for optical focusing has many advantages: high performance, sub-micron precision positioning within 10ms, 15ms Internal response to the jitter of mobile electronic devices, small size, and no electromagnetic interference. Also, compared with the voice coil motor, its cost is low, and when the substrate is implemented as a semiconductor substrate, mass production is possible.
  • the present application provides a photosensitive assembly, which includes: a base plate, including: a fixed part, a movable part, and at least a pair of suspension arms extending between the fixed part and the movable part, the The movable part is suspended in the fixed part by the at least one pair of suspension arms, the at least one pair of suspension arms are arranged symmetrically with respect to the movable part; the photosensitive chip of the movable portion; and, at least one pair of piezoelectric elements, wherein each piezoelectric element of the at least one pair of piezoelectric elements is respectively disposed on each cantilever arm of the at least one pair of cantilever arms , and is configured to actuate the at least one pair of suspension arms through its own deformation after being turned on to simultaneously raise or lower the movable portion from opposite first and second sides of the movable portion
  • the moving part enables the photosensitive surface of the photosensitive chip to be raised or lowered to perform optical focusing in this way.
  • a camera module As shown in FIG. 17 , a camera module according to an embodiment of the present application is illustrated, which includes: a photosensitive assembly 10 and a lens assembly 20 held on a photosensitive path of the photosensitive assembly 10 .
  • the camera module uses a MEMS actuator as a driver and selects a photosensitive chip of the photosensitive component 10 as a driving object to perform optical focusing.
  • the lens assembly 20 includes a lens carrier 21 and an optical lens 22 mounted on the lens carrier 21 , wherein the optical lens 22 is provided with an optical axis.
  • the optical lens 22 includes a lens barrel and at least one optical lens mounted in the lens barrel.
  • the optical lens 22 may be implemented as an integrated lens or a split lens, wherein, when the optical lens 22 is implemented as an integrated lens, the optical lens 22 includes a lens barrel and All the optical lenses are installed in the lens barrel; and when the optical lens is implemented as a split optical lens 22 , the optical lens 22 is assembled from at least two parts of a single lens.
  • the lens carrier 21 is a fixed carrier, that is, when the optical lens 22 is installed on the lens carrier 21 , there is a gap between the lens carrier 21 and the optical lens 22 .
  • the relative positional relationship will not change.
  • the optical lens may also be implemented as a “bare lens”, that is, the optical lens 22 only includes at least one optical lens 22 and the lens carrier 21 is formed
  • the bearing member of the at least one optical lens is not limited by this application.
  • the photosensitive assembly 10 includes a substrate 11 , a photosensitive chip 12 electrically connected to the substrate 11 , and at least one pair of piezoelectric elements disposed on the substrate 11 .
  • the photosensitive chip 12 is provided with a photosensitive axis, and the photosensitive axis is coaxial with the optical axis of the optical lens 22 , that is, the optical axis of the optical lens 22 and the photosensitive axis
  • the photosensitive axes of the chip 12 are the same axis.
  • the base plate 11 includes a fixed part 111 and a movable part 112 suspended in the fixed part 111 .
  • the movable part 112 of the base plate 11 is suitable for any
  • the at least one pair of piezoelectric elements 13 can be displaced relative to the fixing portion 111 .
  • the photosensitive chip 12 is disposed on and electrically connected to the movable portion 112 , so that the photosensitive chip 12 is suitable for displacement with the fixed portion 111 to perform optical focusing .
  • the bracket 14 is provided on the fixing portion 111 of the base plate 11 and the lens assembly 20 is mounted on the bracket 14 .
  • the bracket 14 is implemented as a plastic bracket, which is fixed to the fixing portion 111 of the base plate 11 by an adhesive. It should be understood that, in other examples of the present application, the bracket 14 may also be implemented as other types of brackets 14 , for example, a molded bracket, which is not limited by the present application.
  • the photosensitive assembly 10 further includes a filter element 17 disposed on the bracket 14 , wherein the filter element 17 is held on the photosensitive path of the photosensitive chip 12 for compromising the light entering the photosensitive chip 12 . The imaging light of the photosensitive chip 12 is filtered.
  • the base plate 11 further includes at least one pair of suspension arms 113 disposed between the fixed portion 111 and the movable portion 112 so as to be suspended by the at least one pair of suspension arms 113 .
  • the movable part 112 of the arm 113 is suspended in the fixed part 111 . That is, in this embodiment, the movable part 112 is suspended inside the fixed part 111 by the at least one pair of suspension arms 113 to allow the movable part 112 to be fixed relative to the fixed part 111 .
  • the portion 111 is displaced for optical focusing.
  • each of the suspension arms includes an opposite first end 1131 and a second end 1132, wherein the first end 1131 is fixed to the fixing portion 111, and the second end 1131 is fixed to the fixing portion 111.
  • the end 1132 is fixed to the movable part 112 in such a way that the movable part 112 is suspended inside the fixed part 111 by the at least one pair of suspension arms 113 .
  • the at least one pair of suspension arms 113 are arranged symmetrically with respect to the movable part 112 .
  • each piezoelectric element of the at least one pair of piezoelectric elements 13 is respectively disposed on each cantilever arm of the at least one pair of cantilever arms 113 to form the MEMS actuator , and is configured to actuate the at least one pair of the suspension arms 113 through its own deformation after being turned on to simultaneously raise or lower the at least one pair of the suspension arms 113 from the opposite first and second sides of the movable portion 112
  • the movable part 112 is used so that the photosensitive surface of the photosensitive chip 12 is raised or lowered, and optical focusing is performed in this way.
  • each piezoelectric element of the at least one pair of piezoelectric elements 13 is respectively disposed on each cantilever arm of the at least one pair of cantilever arms 113, and is configured to be After being turned on, the at least one pair of cantilever arms 113 is actuated through its own deformation to generate the same height of warpage from the first side and the second side opposite to the movable portion 112, so that the photosensitive chip is The photosensitive surface of 12 produces a stroke in the height direction relative to the fixed portion 111, and optical focusing is performed in this way.
  • the piezoelectric element provided on the suspension arm forms a MEMS actuator.
  • each piezoelectric element in the at least one pair of piezoelectric elements 13 is respectively disposed on the upper surface of each cantilever arm of the at least one pair of cantilever arms 113 .
  • the substrate 11 is implemented as a semiconductor substrate, eg, as illustrated in FIGS. 19A and 19B .
  • the substrate 11 includes a silicon base layer, a silicon oxide layer and a silicon crystal layer from bottom to top, that is, the substrate 11 includes a silicon base layer, a stack of The silicon oxide layer on the silicon base layer and the silicon crystal layer stacked on the silicon oxide layer, wherein the lower surface of the silicon base layer forms the lower surface of the substrate 11, and the upper surface of the silicon crystal layer The surface forms the upper surface of the substrate 11 .
  • the substrate 11 may be made of an SOI silicon wafer (Silicon-on-insulator).
  • an SOI silicon wafer is a mature semiconductor device.
  • an integrated circuit is provided in the silicon crystal layer of the substrate 11 , for example, a standard SOI CMOS process is used to complete the fabrication of the integrated circuit on the circuit layer of the SOI silicon wafer.
  • the substrate 11 further includes a passivation layer stacked on the silicon crystal layer, so that the integrated circuit disposed on the silicon crystal layer can be processed by the passivation layer.
  • the electrical connection structures 16 such as pads and wires may also be attached to the silicon crystal layer through a surface mount process.
  • the substrate 11 has opposite upper and lower surfaces, and a hollow structure at least partially penetrating between the lower surface and the upper surface 110, wherein, through the hollow structure 110, the substrate 11 forms the fixed portion 111, the movable portion 112, and the at least one extending between the fixed portion 111 and the movable portion 112.
  • the base plate 11 is divided into two parts: a fixed part 111 and a movable part 112 , wherein the movable part 112 passes through the at least one pair of suspension arms 113 Suspended in the fixing portion 111 .
  • the fixed part 111 , the movable part 112 and the at least one pair of suspension arms 113 are formed by processing the semiconductor substrate. Therefore, the fixed part 111 , the movable part 112 and the at least one pair of suspension arms 113 have an integral structure.
  • the thickness of each cantilever arm in the pair of cantilever arms is smaller than the thickness of the fixing portion 111 , so that the cantilever arm can move along the direction set by the photosensitive axis under the action of the piezoelectric element. warping.
  • the photosensitive assembly 10 further includes a reinforcing plate disposed on the lower surface of the substrate 11 .
  • the reinforcing plate may be implemented as a metal plate, for example, a steel plate or the like.
  • an electrical connection structure 16 may be provided between the fixed portion 111 and the movable portion 112 of the substrate 11 (for example, when the substrate 11 is a semiconductor substrate
  • the electrical connection structure 16 is a part of the integrated circuit
  • the circuit of the camera module is realized through the electrical connection structure 16 .
  • the electrical connection structures 16 such as pads and wires may be attached to the upper surface of the substrate 11 by a surface mount process;
  • An LDS tank is arranged on the surface, and a conductive coating (for example, a nickel-palladium-gold coating) is plated on the surface of the LDS tank, and the circuit is connected to the conductive coating in the LDS tank through a connecting circuit, so as to derive the circuit;
  • Injection molding Injection molding
  • the upper surface of the movable part 112 is provided with the electrical connection structure 16 , so that when the photosensitive chip 12 is mounted on the upper surface of the movable part 112 , the photosensitive The chip 12 can be electrically connected to the movable portion 112 through the electrical connection structure 16 formed on the upper surface of the movable portion 112 .
  • the piezoelectric elements of the at least one pair of piezoelectric elements 13 are respectively disposed on the respective suspension arms of the at least one pair of suspension arms 113, they can also be formed on the at least one pair of suspension arms 113.
  • the electrical connection structure 16 on the surface of the holding arm 113 enables the at least one pair of piezoelectric elements 13 to be electrically connected to the at least one pair of the cantilevering arms 113 .
  • the electrical connection structure 16 may also be disposed on the upper surface of the fixing portion 111 , and the electrical connection structure 16 is used to achieve conduction with an external circuit.
  • the electrical connection structure 16 of the fixed portion 111 , the movable portion 112 and the surfaces of the at least one pair of suspension arms 113 may be an integral structure or a split structure, which is not limited by the present application.
  • the substrate 11 may also be implemented as other types of substrates, including but not limited to: plastic substrates, metal substrates, and the like.
  • the substrate 11 is implemented as a semiconductor substrate as an example.
  • the at least one pair of suspension arms 113 includes a first suspension arm 114 , a second suspension arm 115 , a third suspension arm 116 and a fourth suspension arm 114 .
  • the cantilever arm 117 wherein the first cantilever arm 114 and the second cantilever arm 115 are arranged symmetrically with respect to the movable part 112 with the X-axis as the axis of symmetry, and the third cantilever arm 116 and the fourth cantilever arm 117 is arranged symmetrically with respect to the movable part 112 with the Y axis as the axis of symmetry, the first cantilever arm 114 is arranged adjacent to the third cantilever arm 116, the The second suspension arm 115 is arranged adjacent to the fourth suspension arm 117 .
  • the at least one pair of suspension arms 113 includes two pairs of suspension parts, wherein the first suspension arm 114 and the second suspension arm 115 form a pair of suspension parts
  • the third cantilever arm 116 and the fourth cantilever arm 117 form a pair of cantilever arms.
  • the first suspension arm 114 , the second suspension arm 115 , the third suspension arm 116 and the fourth suspension arm 117 are provided on the movable portion 112 four sides of the photosensitive chip 12 to allow the photosensitive chip 12 to be raised or lowered simultaneously from the X-axis direction or the Y-axis direction of the photosensitive chip 12 for optical focusing.
  • the side where the first cantilever arm 114 is located is the first side
  • the side where the second cantilever arm 115 is located is the second side
  • the side where the fourth suspension arm 117 is located is the third side
  • the side where the fourth suspension arm 117 is located is the fourth side.
  • the at least one pair of piezoelectric elements 13 includes a first piezoelectric element 131, a second piezoelectric element 132, a third piezoelectric element 133 and a fourth piezoelectric element 134, wherein the first piezoelectric element 131
  • the element 131 is arranged on the first suspension arm 114
  • the second piezoelectric element 132 is arranged on the second suspension arm 115
  • the third piezoelectric element 133 is arranged on the third suspension arm 115 .
  • the holding arm 116 and the fourth piezoelectric element 134 are disposed on the fourth suspension arm 117 .
  • the at least one pair of piezoelectric elements 13 includes two pairs of piezoelectric elements, wherein the first piezoelectric element 131 and the second piezoelectric element 132 form a pair of piezoelectric elements , the third piezoelectric element 133 and the fourth piezoelectric element 134 form another pair of piezoelectric elements.
  • the first piezoelectric element 131 is configured to actuate the first suspension arm 114 relative to the fixing portion 111 along the photosensitive chip 12 through its own deformation after being turned on.
  • the direction set by the photosensitive axis ie, the direction set by the optical axis
  • the second piezoelectric element 132 is configured to actuate the second suspension arm 115 relative to the fixing portion 111 along the photosensitive axis of the photosensitive chip 12 through its own deformation after being turned on.
  • Warp to drive the movable part 112 and the photosensitive chip 12 from the second side of the movable part 112 , wherein the first piezoelectric element 131 is driven from the first side of the movable part 112
  • the height at which the photosensitive chip 12 rises or falls is equal to the height at which the second piezoelectric element 132 drives the photosensitive chip 12 from the second side of the movable part 112 to rise or fall.
  • the The photosensitive surface of the photosensitive chip 12 produces a stroke in the height direction relative to the fixing portion 111 to perform optical focusing.
  • the same voltage can be input to the first piezoelectric element 131 and the second piezoelectric element 132 , so that the first piezoelectric element 131 is connected from the first side of the movable part 112
  • the height at which the photosensitive chip 12 is driven to rise or fall is equal to the height at which the second piezoelectric element 132 drives the photosensitive chip 12 from the second side of the movable portion 112 to rise or fall.
  • the same voltage is input to the first piezoelectric element 131 and the second piezoelectric element 132, so that the first piezoelectric element 131 and the second piezoelectric element 132 drive the first piezoelectric element 131 and the second piezoelectric element 132.
  • the suspension arm 114 and the second suspension arm 115 are warped at the same height from the opposite first and second sides of the movable portion 112, so that the photosensitive surface of the photosensitive chip 12 is fixed relative to the The portion 111 generates a stroke in the height direction, and optical focusing is performed in this way.
  • the third piezoelectric element 133 is configured to actuate the third suspension arm 116 relative to the fixing portion 111 along the photosensitive chip 12 through its own deformation after being turned on.
  • the direction set by the photosensitive axis is warped to drive the movable portion 112 and the photosensitive chip 12 from the third side of the movable portion 112
  • the second piezoelectric element 132 is configured to be turned on when Then, through its own deformation, the fourth suspension arm 117 is actuated relative to the fixed portion 111 to warp along the direction set by the photosensitive axis of the photosensitive chip 12 so as to be free from the fourth suspension arm 112 of the movable portion 112 .
  • the fourth piezoelectric element 134 drives the photosensitive chip 12 to rise or fall from the fourth side of the movable portion 112 , and in this way, optical focusing is performed.
  • the same voltage can be input to the third piezoelectric element 133 and the fourth piezoelectric element 134 , so that the third piezoelectric element 133 is connected from the third side of the movable part 112
  • the height at which the photosensitive chip 12 is driven to rise or fall is equal to the height at which the fourth piezoelectric element 134 drives the photosensitive chip 12 from the fourth side of the movable portion 112 to rise or fall.
  • the first piezoelectric element 131 and the second piezoelectric element 132 work simultaneously, and the third piezoelectric element 133 and the fourth piezoelectric element 134 work simultaneously . That is, during the working process, at least one pair of piezoelectric elements 13 works to drive at least one pair of suspension arms 113 to perform optical focusing.
  • a pair of piezoelectric elements can be controlled to work, for example, the first piezoelectric element 131 and the second piezoelectric element 132 can be controlled to work at the same time, or two pairs of piezoelectric elements can be controlled to work at the same time, that is, The first piezoelectric element 131 , the second piezoelectric element 132 , the third piezoelectric element 133 and the fourth piezoelectric element 134 are controlled to work simultaneously.
  • the at least one pair of piezoelectric elements 13 are disposed on opposite sides of the movable portion 112 , and each piezoelectric element in the at least one pair of piezoelectric elements 13 is electrically connected to each other.
  • the same voltage causes the photosensitive surface of the photosensitive chip 12 to move along the height direction of the optical axis, so as to realize optical focusing.
  • the auto focus of the camera module is formed to be 200um to 600um, preferably, 400um. That is, the photosensitive chip 12 is driven by a MEMS actuator formed by a piezoelectric element to perform optical focusing, which has a relatively long focusing stroke.
  • each of the cantilever arms has two opposite long sides and two opposite short sides, wherein the first end 1131 of the cantilever arm and the The second end 1132 is formed on the two long sides. That is, in the embodiment of the present application, the first end 1131 and the second end 1132 of the cantilever arm respectively extend outward from the two long sides of the cantilever arm, and are respectively connected to the fixing portion 111 and the second end 1132 . the movable part 112 .
  • each of the cantilever arms has a cantilever body and a separation groove at least partially penetrating the cantilever body, wherein, through the separation groove, the The cantilever body is divided into two cantilever parts movable with each other, wherein the edge of the cantilever part forms the long side, and, in the embodiment of the present application, each cantilever part is surrounded by the first end 1131 and the second end 1132 is divided into two cantilevered subsections.
  • the first cantilever arm 114 includes a first cantilever main body 1141 and a first separation groove 1142 at least partially penetrating the first cantilever main body 1141 , wherein through the first cantilever main body 1141 A dividing groove, the first cantilever body 1141 is divided into a first cantilever part 1143 and a second cantilever part 1144 that are movable with each other, the first cantilever part 1143 has a second cantilever part 1143 divided by the first end 1131 A cantilever sub-section 1145 and a second cantilever sub-section 1146 , the second cantilever section 1144 has a third cantilever sub-section 1147 and a fourth cantilever sub-section 1148 divided by the second end 1132 .
  • the second cantilever arm 115 includes a second cantilever body 1151 and a second separation groove 1152 at least partially penetrating the second cantilever body 1151 , wherein the second cantilever body passes through the second separation groove 1152 1151 is divided into a third cantilever portion 1153 and a fourth cantilever portion 1154 that are movable with each other, the third cantilever portion 1153 has a fifth cantilever sub-section 1155 and a sixth cantilever sub-section 1155 and a sixth cantilever sub-section divided by the first end 1131 Part 1156 , the fourth cantilever part 1154 has a seventh cantilever sub-part 1157 and an eighth cantilever sub-part 1158 divided by the second end 1132 .
  • the third cantilever arm 116 includes a third cantilever body 1161 and a third separation groove 1162 at least partially penetrating the third cantilever body 1161 , wherein, through the third separation groove 1162 , the third cantilever
  • the main body 1161 is divided into a fifth cantilever part 1163 and a sixth cantilever part 1164 which are movable with each other, and the fifth cantilever part 1163 has a ninth cantilever sub-section 1165 and a tenth cantilever divided by the first end 1131 Sub-section 1166 , the sixth cantilever section 1164 has an eleventh cantilever sub-section 1167 and a twelfth cantilever sub-section 1168 divided by the second end 1132 .
  • the fourth cantilever arm 117 includes a fourth cantilever body 1171 and a fourth separation groove 1172 at least partially penetrating the fourth cantilever body 1171 , wherein the fourth cantilever body passes through the fourth separation groove 1172 1171 is divided into a mutually movable seventh cantilever portion 1173 and an eighth cantilever portion 1174, the seventh cantilever portion 1173 having a thirteenth cantilever sub-section 1175 and a fourteenth cantilever subsection 1175 divided by the first end 1131
  • the cantilever subsection 1176 , the eighth cantilever section 1174 has a fifteenth cantilever subsection 1177 and a sixteenth cantilever subsection 1178 divided by the second end 1132 .
  • the first piezoelectric element 131 includes the first piezoelectric sheet 1311 disposed on the first cantilever sub-section 1145 and the second cantilever sub-section 1146
  • the contraction or relaxation of the four piezoelectric sheets drives the first cantilever portion 1143 and/or the second cantilever portion 1144 to warp upward or downward, as shown in FIG. 21 .
  • the first piezoelectric sheet 1311, the second piezoelectric sheet 1312, the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 are disposed on the first piezoelectric sheet 1311.
  • the upper surfaces of a cantilever sub-section 1145 , a second cantilever sub-section 1146 , the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 are used to drive all the piezoelectric sheets through the contraction or relaxation of the four piezoelectric sheets.
  • the first cantilever portion 1143 and/or the second cantilever portion 1144 warp upward or downward to drive the movable portion 112 and the photosensitive chip 12 from the first side of the photosensitive chip 12 .
  • the second piezoelectric element 132 includes the fifth piezoelectric sheet 1321 disposed on the fifth cantilever sub-section 1155 and the sixth cantilever sub-section 1156
  • the contraction or relaxation of the four piezoelectric sheets drives the third cantilever portion 1153 and/or the fourth cantilever portion 1154 to warp upward or downward.
  • the fifth piezoelectric sheet 1321, the sixth piezoelectric sheet 1322, the seventh piezoelectric sheet 1323 and the eighth piezoelectric sheet 1324 are disposed on the first piezoelectric sheet
  • the upper surfaces of the fifth cantilever sub-section 1155 , the sixth cantilever sub-section 1156 , the seventh cantilever sub-section 1157 and the eighth cantilever sub-section 1158 are formed by the contraction or relaxation of the four piezoelectric sheets.
  • the third cantilever portion 1153 and/or the fourth cantilever portion 1154 are driven to warp upward or downward, thereby driving the movable portion 112 and the photosensitive chip 12 from the second side of the photosensitive chip 12 .
  • the height at which the first piezoelectric element 131 drives the photosensitive chip 12 from the first side of the movable portion 112 to rise or fall is equal to the height of the second piezoelectric element 132 from the first side of the movable portion 112 .
  • the second side of the movable portion 112 drives the height of the photosensitive chip 12 to rise or fall, and in this way, optical focusing is performed.
  • the same voltage is set to the first piezoelectric element 131 and the second piezoelectric element 132 so that the first piezoelectric element 131 and the second piezoelectric element 132 can be warped the same Therefore, the photosensitive surface of the photosensitive chip 12 produces a stroke in the height direction relative to the fixed portion 111 , and optical focusing is performed in this way.
  • the third piezoelectric element 133 includes the ninth piezoelectric sheet 1331 disposed on the ninth cantilever sub-section 1165 and the tenth cantilever sub-section 1166
  • the ninth piezoelectric sheet 1331 , the tenth piezoelectric sheet 1332 , the eleventh piezoelectric sheet 1333 and the twelfth piezoelectric sheet 1334 are arranged on the The upper surfaces of the ninth cantilever sub-section 1165, the tenth cantilever sub-section 1166, the eleventh cantilever sub-section 1167, and the twelfth cantilever sub-section 1168 can pass through the contraction of the four piezoelectric sheets or stretching to drive the fifth cantilever portion 1163 and/or the sixth cantilever portion 1164 to warp upward or downward to drive the movable portion 112 and the photosensitive chip from the third side of the photosensitive chip 12 12.
  • the fourth piezoelectric element 134 includes the thirteenth piezoelectric sheet 1341 disposed on the thirteenth cantilever sub-section 1175 , the thirteenth piezoelectric sheet 1341 disposed on the fourteenth cantilever The fourteenth piezoelectric sheet 1342 of the subsection 1176 , the fifteenth piezoelectric sheet 1343 provided in the fifteenth cantilever subsection 1177 , and the tenth piezoelectric sheet 1343 provided in the sixteenth cantilever subsection 1178 Six piezoelectric sheets 1344, so as to drive the seventh cantilever portion 1173 and/or the eighth cantilever portion 1174 to warp upward or downward through the contraction or relaxation of the four piezoelectric sheets.
  • the thirteenth piezoelectric sheet 1341, the fourteenth piezoelectric sheet 1342, the fifteenth piezoelectric sheet 1343 and the sixteenth piezoelectric sheet 1344 are provided on the upper surfaces of the thirteenth cantilever sub-section 1175 , the fourteenth cantilever sub-section 1176 , the fifteenth cantilever sub-section 1177 and the sixteenth cantilever sub-section 1178 to pass the four
  • the contraction or relaxation of the piezoelectric sheet drives the seventh cantilever portion 1173 and/or the eighth cantilever portion 1174 to warp upward or downward to drive the movable portion from the fourth side of the photosensitive chip 12 112 and the photosensitive chip 12 .
  • the height at which the third piezoelectric element 133 drives the photosensitive chip 12 from the third side of the movable portion 112 to rise or fall is equal to the height of the fourth piezoelectric element 134 from The fourth side of the movable portion 112 drives the height of the photosensitive chip 12 to rise or fall, and in this way, optical focusing is performed. That is, the same voltage is set to the third piezoelectric element 133 and the fourth piezoelectric element 134 so that the third piezoelectric element 133 and the fourth piezoelectric element 134 can be warped the same the height of.
  • the first piezoelectric sheet 1311 and the second piezoelectric sheet 1311 of the first piezoelectric element 131 disposed on the first suspension arm 114 The piezoelectric sheet 1312 shrinks under the action of a certain voltage, which drives the first cantilever sub-section 1145 and the second cantilever sub-section 1146 to warp upward; the third piezoelectric sheet of the first piezoelectric element 131 1313 and the fourth piezoelectric sheet 1314 shrink under the action of a certain voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 to warp upward.
  • the first side of the movable part 112 and the photosensitive chip 12 are raised.
  • the fifth piezoelectric sheet 1321 and the sixth piezoelectric sheet 1322 of the second piezoelectric element 132 disposed on the second suspension arm 115 act on a certain voltage
  • the fifth cantilever sub-section 1155 and the sixth cantilever sub-section 1156 of the second cantilever arm 115 are driven to warp upward; the seventh piezoelectric sheets 1323 and 1323 of the second piezoelectric element 132
  • the eighth piezoelectric sheet 1324 contracts under the action of a certain voltage, which drives the seventh cantilever sub-section 1157 and the eighth cantilever sub-section 1158 to warp upward. In this way, the movable part 112 and the photosensitive chip 12 are lifted from the second side of the photosensitive chip 12 .
  • the first piezoelectric element 131 drives the photosensitive chip 12 to rise from the first side of the movable portion 112 to a height is equal to the height at which the second piezoelectric element 132 drives the photosensitive chip 12 from the second side of the movable portion 112 .
  • the photosensitive surface of the photosensitive chip 12 is relatively opposite to the fixed portion 111 . The travel in the height direction is generated, and optical focusing is performed in this way.
  • the voltages set by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312, the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 may be the same or different, wherein , when the voltage is the same, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is the same as the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward; when the voltage is different Meanwhile, the height at which the first cantilever sub-section 1145 and the second cantilever sub-section 1146 warp upward is different from the height at which the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 warp upward.
  • the voltages set by the fifth piezoelectric sheet 1321 and the sixth piezoelectric sheet 1322, the seventh piezoelectric sheet 1323 and the eighth piezoelectric sheet 1324 of the second piezoelectric element 132 may be the same or different, wherein, When the voltages are the same, the height at which the fifth cantilever sub-section 1155 and the sixth cantilever sub-section 1156 warp upward is the same as the height at which the seventh cantilever sub-section 1157 and the eighth cantilever sub-section 1158 warp upward; when the voltages are different, The height at which the fifth cantilever sub-section 1155 and the sixth cantilever sub-section 1156 warp upward is different from the height at which the seventh cantilever sub-section 1157 and the eighth cantilever sub-section 1158 warp upward.
  • the first piezoelectric sheet 1311 and the first piezoelectric sheet 1311 of the first piezoelectric element 131 disposed on the first suspension arm 114 The two piezoelectric sheets 1312 relax under the action of a certain voltage, which drives the first cantilever sub-section 1145 and the second cantilever sub-section 1146 to warp downward; the third pressure of the first piezoelectric element 131
  • the electric sheet 1313 and the fourth piezoelectric sheet 1314 relax under the action of a certain voltage, which drives the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 to warp downward. In this way, from the The first side of the photosensitive chip 12 lowers the movable part 112 and the photosensitive chip 12 .
  • the fifth piezoelectric sheet 1321 and the sixth piezoelectric sheet 1322 of the second piezoelectric element 132 disposed on the second suspension arm 115 act on a certain voltage Downward relaxation occurs, and the fifth cantilever sub-section 1155 and the sixth cantilever sub-section 1156 of the second cantilever arm 115 are driven to warp downward; the seventh piezoelectric sheet 1323 of the second piezoelectric element 132 And the eighth piezoelectric sheet 1324 relaxes under the action of a certain voltage, which drives the seventh cantilever sub-section 1157 and the eighth cantilever sub-section 1158 to warp downward. In this way, the movable part 112 and the photosensitive chip 12 are lowered from the second side of the photosensitive chip 12 .
  • the first piezoelectric element 131 drives the photosensitive chip 12 from the first side of the movable portion 112 to drop the height It is equal to the height at which the second piezoelectric element 132 drives the photosensitive chip 12 from the second side of the movable portion 112 to descend. In this way, optical focusing is performed.
  • the camera module according to the embodiment of the present application can also be driven in other driving modes, for example, through the first piezoelectric element 131 , the second piezoelectric element 132 , and the third piezoelectric element 133 and the fourth piezoelectric element 134 raise the photosensitive chip 12 or lower the photosensitive chip 12 at the same time. Stroke, in this way to carry out optical focusing.
  • the suspension arm has a relatively small thickness.
  • the thickness dimension of the cantilever arm ranges from 0.1 mm to 0.3 mm.
  • the piezoelectric element may be implemented as a material having excellent piezoelectric properties doped with PZT.
  • the thickness of the piezoelectric element is between 1 um and 0.5 mm, so that the cantilever arm has good reliability when the piezoelectric element has a large driving force.
  • an elastic member (not shown) may also be disposed between the at least one piezoelectric element and the at least one pair of suspension arms 113 , and the movable portion 112 and the The movable stroke of the photosensitive chip 12 .
  • the at least one pair of suspension arms 113 Can also be implemented as other logarithms of cantilever arms, the at least one pair of piezoelectric elements 13 can also be implemented as other logarithms of piezoelectric elements.
  • the at least one pair of cantilever arms 113 includes only one pair of cantilever arms: the first cantilever arm 114 and the second cantilever arm 115 , and the at least one pair of piezoelectric elements 13 only includes It includes a pair of piezoelectric elements, wherein the first piezoelectric element 131 is configured to actuate the first suspension arm 114 relative to the fixed portion 111 along the The direction set by the photosensitive axis of the photosensitive chip 12 is warped to drive the movable portion 112 and the photosensitive chip 12 from the first side of the movable portion 112 , and the second piezoelectric element 132 is configured as After being turned on, the second cantilever arm 115 is actuated by its own deformation relative to the fixed portion 111 to warp in the direction set by the photosensitive axis of the photosensitive chip 12 to move away from the movable portion The second side of the movable part 112 drives the movable part 112 and the photosensitive chip 12
  • the first suspension arm 114 and the first piezoelectric element 131 may also be divided in other ways.
  • the first cantilever arm 114 is divided into a first cantilever part 1143 and a second cantilever part 1144 by the first end 1131 and the second end 1132 , and the first cantilever part 1143 is divided by the separation groove It is divided into a first cantilever sub-section 1145 and a second cantilever sub-section 1146 .
  • the first cantilever sub-section 1145 is connected to the first end 1131
  • the second cantilever sub-section 1146 is connected to the second end 1132 .
  • the first piezoelectric sheet 1311 is disposed on the first cantilever sub-section 1145
  • the second piezoelectric sheet 1312 is disposed on the second cantilever sub-section 1146
  • the first piezoelectric sheet 1311 is along the first direction Extending
  • the second piezoelectric sheet 1312 extends along a second direction
  • the first direction and the second direction are the positive and negative directions along the direction of the x-axis.
  • the first cantilever sub-section 1145 and the second cantilever sub-section 1146 of the first cantilever section 1143 are driven by the first piezoelectric sheet 1311 and the second piezoelectric sheet 1312 to generate edge travel in the height direction.
  • the height direction is the direction set by the photosensitive axis. Since the movable stroke of the moving part and the photosensitive chip 12 is a superimposed stroke of the first cantilever sub-section 1145 and the second cantilever sub-section 1146 , a larger optical focusing stroke will be generated.
  • the second cantilever portion 1144 is divided into a third cantilever sub-section 1147 and a fourth cantilever sub-section 1148 by the dividing groove.
  • the third cantilever sub-section 1147 is connected to the first end 1131
  • the fourth cantilever sub-section 1147 The subsection 1148 is connected to the second end 1132 .
  • the third piezoelectric sheet 1313 is disposed on the third cantilever sub-section 1147
  • the fourth piezoelectric sheet 1314 is disposed on the fourth cantilever sub-section 1148
  • the third piezoelectric sheet 1313 is along the first direction Extending, the fourth piezoelectric sheet 1314 extends along the second direction.
  • the third cantilever sub-section 1147 and the fourth cantilever sub-section 1148 of the second cantilever section 1144 are driven by the third piezoelectric sheet 1313 and the fourth piezoelectric sheet 1314 to generate edge travel in the height direction.
  • Figure 23 illustrates a schematic diagram of a variant implementation of the suspension arm according to embodiments of the present application.
  • the at least one pair of suspension arms 113 includes a first suspension arm 114A and a second suspension arm 115A that are symmetrical with respect to the center of the movable portion 112 .
  • the shape of the cantilever arm is adjusted.
  • the first cantilever arm 114A includes a first cantilever body 1141A and at least partially penetrates through the first cantilever arm 1141A.
  • a first separation groove 1142A and a second separation groove 1152A of a cantilever body 1141A wherein the first cantilever body 1141A is divided into mutually movable through the first separation groove 1142A and the second separation groove 1152A
  • the first cantilever part 1143A, the second cantilever part 1144A and the third cantilever part 1153A wherein the first cantilever part 1143A has a first cantilever sub-part 1145A and a second cantilever sub-part 1145A divided by the first separation groove 1142A
  • the cantilever sub-section 1146A, the second cantilever section 1144A has a third cantilever sub-section 1147A and a fourth cantilever sub-section 1148A divided by the first separation groove 1142A
  • the third cantilever section 1153A has the The fifth cantilever sub-section 1155A and the sixth cantilever sub-section 1156A are divided by the first separation groove 1142A and the second separation groove 1152A.
  • the cantilever arm includes three mutually movable cantilever parts, so that the cantilever part is additionally added to increase the cantilever part.
  • the first separation groove 1142A has a cross shape, which divides the first suspension main body 1141A in the longitudinal direction and the transverse direction, so as to form a first cantilevered arm.
  • the second separation groove 1152A and the first separation groove 1142A cooperate to further divide the second cantilever portion 1144A to form a fifth cantilever sub-section 1155A and a sixth cantilever sub-section 1156A.
  • the first piezoelectric element 131A includes the first piezoelectric sheet 1311A disposed on the first cantilever sub-section 1145A, and the second cantilever sub-section disposed on the second cantilever sub-section.
  • the second piezoelectric sheet 1312A of 1146A, the third piezoelectric sheet 1313A provided in the third cantilever sub-section 1147A, and the fourth piezoelectric sheet 1314A provided in the fourth cantilever sub-section 1148A are
  • the fifth piezoelectric sheet 1321A provided in the fifth cantilever sub-section 1155A and the sixth piezoelectric sheet 1322A provided in the sixth cantilever sub-section 1156A pass through the first piezoelectric sheet 1311A and the second piezoelectric sheet 1322A.
  • the piezoelectric sheet 1312A, the third piezoelectric sheet 1313A, and the fourth piezoelectric sheet 1314A, and the fifth piezoelectric sheet 1321A and the sixth piezoelectric sheet 1322A contract or relax from the The first side of the photosensitive chip 12 drives the movable part 112 and the photosensitive chip 12 .
  • the second cantilever arm 115A paired with the first cantilever arm 114A includes: a second cantilever body 1151A and a second cantilever body 1151A at least partially penetrating through the second cantilever body 1151A Three separation grooves 1162A and fourth separation grooves 1172A, wherein the second cantilever body 1151A is divided into mutually movable fourth cantilever parts 1154A, A fifth cantilever portion 1163A and a sixth cantilever portion 1164A, the fourth cantilever portion 1154A has a seventh cantilever sub-section 1157A and an eighth cantilever sub-section 1158A divided by the third separation groove 1162A, the fifth cantilever sub-section 1158A
  • the part 1163A has a ninth cantilever sub-section 1165A and a tenth cantilever sub-section 1166A divided by the third separation groove 1162A, and the sixth cantilever part 1164A has the third separation groove 1162A and the fourth cantile
  • the third separation groove 1162A has a cross shape, which divides the second cantilever main body 1151A in the longitudinal direction and the lateral direction, so that the A fourth cantilevered portion 1154A having a seventh cantilevered sub-portion 1157A and an eighth cantilevered sub-portion 1158A and the fifth cantilevered portion 1163A having a ninth cantilevered sub-portion 1165A and a tenth cantilevered sub-portion 1166A are formed.
  • the fourth separation groove 1172A and the third separation groove 1162A cooperate to further divide the fifth cantilever portion 1163A to form an eleventh cantilever sub-section 1167A and a twelfth cantilever sub-section
  • the sixth cantilever portion 1164A of 1168A is a sixth cantilever portion 1164A of 1168A.
  • the second piezoelectric element 132A includes the seventh piezoelectric sheet 1323A disposed on the seventh cantilever sub-section 1157A, and the eighth piezoelectric sheet disposed on the eighth cantilever sub-section 1158A 1324A, the ninth piezoelectric sheet 1331A provided on the ninth cantilever sub-portion 1165A, the tenth piezoelectric sheet 1332A provided on the tenth cantilever sub-portion 1166A, the eleventh piezoelectric sheet 1332A provided on the tenth cantilever sub-portion 1166A
  • the eleventh piezoelectric sheet 1333A of the cantilever sub-section 1167A and the twelfth piezoelectric sheet 1334A are provided on the twelfth cantilever sub-section 1168A to pass through the seventh piezoelectric sheet 1323A and the twelfth piezoelectric sheet 1334A.
  • the eighth piezoelectric sheet 1324A, the ninth piezoelectric sheet 1331A, and the tenth piezoelectric sheet 1332A, and the eleventh piezoelectric sheet 1333A and the twelfth piezoelectric sheet 1334A contract or relax.
  • the movable part 112 and the photosensitive chip 12 are driven from the second side of the photosensitive chip 12 .
  • the height at which the first piezoelectric element 131A drives the photosensitive chip 12 from the first side of the movable part 112 to rise or fall is equal to the height of the second piezoelectric element 132 from the movable part 112 .
  • the second side drives the height of the photosensitive chip 12 to rise or fall, and in this way, optical focusing is performed.
  • FIG. 24 illustrates a schematic diagram of another variant implementation of the substrate 11 according to an embodiment of the present application.
  • the shape of the cantilever arm is changed again.
  • the first cantilever arm 114B includes a first cantilever segment 1141B extending along the X-axis direction and a second cantilever segment 1142B extending along the Y-axis direction.
  • the arm 115B includes a third cantilever segment 1151B extending along the X-axis direction and a fourth cantilever segment 1152B extending along the Y-axis direction, wherein the at least one pair of piezoelectric elements 13 includes a first piezoelectric element 131 and a second piezoelectric element 131 Piezoelectric element 132, the first piezoelectric element 131 is disposed on the first cantilever section 1141B of the first cantilever arm 114, and the second piezoelectric element 132 is disposed on the second cantilever arm 115
  • the second side of the movable portion 112 drives the movable portion 112 and the photosensitive chip 12 , wherein the first piezoelectric element 131 drives the photosensitive chip 12 from the first side of the movable portion 112 to rise or
  • the descending height is equal to the height that the second piezoelectric element 132 drives the photosensitive chip 12 to rise or fall from the second side of the movable portion 112 .
  • the photosensitive surface of the photosensitive chip 12 is relatively
  • the fixed portion 111 generates a stroke in the height direction, and optical focusing is performed in this way.
  • the at least one pair of piezoelectric elements 13 further includes a third piezoelectric element 133 and a fourth piezoelectric element 134, and the third piezoelectric element 133 is disposed on the first suspension.
  • the second cantilever section 1142B of the holding arm 114B, the fourth piezoelectric element 134 is disposed on the fourth cantilever section 1152B of the second cantilever arm 115B; wherein the third piezoelectric element 133 is configured to be in the After being turned on, the first suspension arm 114B is actuated by its own deformation to drive the movable part 112 and the photosensitive chip 12 from the first side of the movable part 112; the fourth piezoelectric The element 134 is configured to actuate the second suspension arm 115B by deforming itself after being turned on to drive the movable portion 112 from the second side of the movable portion 112 opposite to the first side part 112 and the photosensitive chip 12 , wherein the height of the third piez
  • the first suspension arm 114B has an "L"-shaped structure
  • the second suspension arm 115B has an "L"-shaped structure. That is, the first suspension arm 114 and/or the second suspension arm 115B are L-shaped arms.
  • the first ends 1131 of the first suspension arm 114B and the second suspension arm 115B connected to the movable portion 112 are located at the movable portion 112 respectively. at the midpoint of opposite sides.
  • FIG. 25 illustrates a schematic diagram of another variant implementation of the substrate 11 according to an embodiment of the present application.
  • the shape of the cantilever arm is adjusted again.
  • the first cantilever arm 114B and the second cantilever arm 115B have a three-section structure, which includes a second cantilever section 1142B extending along the Y-axis direction and Two first cantilever segments 1141B extending along the X-axis direction.
  • the shape of the cantilever arm may also be isomerized in other ways, which is not limited by the present application.
  • the one or more pairs of piezoelectric elements may be arranged on the first cantilever section 1141B and the second cantilever section 1142B based on the principles described above, so as to perform optical focusing.
  • the piezoelectric element is set on the upper surface of the cantilever arm as an example. It should be understood that in other examples of the present application, the piezoelectric element may be It is arranged on the upper surface and the lower surface of the cantilever arm at the same time, or only on the lower surface of the cantilever arm, which is not limited by this application.
  • the camera module based on the embodiment of the present application is clarified, wherein the camera module adopts a novel MEMS actuator as a driving element to drive the displacement of the photosensitive chip 12 to realize optical focusing.
  • the MEMS actuator is formed by a piezoelectric element disposed on the substrate 11. Compared with the traditional optical focusing technology based on a voice coil motor, the MEMS actuator is used to actuate the The technical solution of the photosensitive chip 12 for optical focusing has many advantages: high performance, sub-micron precision positioning within 10ms, larger optical focusing stroke, small size, and no electromagnetic interference.
  • FIG. 26 shows a schematic longitudinal cross-sectional view of a camera module according to an embodiment of the present application.
  • the camera module includes a photosensitive assembly 100 and an optical actuator 200 installed on the top surface of the photosensitive assembly 100, and an optical lens 300 installed in the optical actuator 200.
  • FIG. 27 shows a schematic top view of a camera module according to an embodiment of the present application.
  • the optical lens 300 includes a lens barrel 310 and at least one optical lens 320 installed in the lens barrel 310 (for example, the number of optical lenses in FIG. 26 is four) .
  • the outer side of the lens barrel 310 is rectangular, and its inner side is circular, that is, a circular through hole can be provided inside the lens barrel 310 to accommodate and install the optical lens 320 on the inner side of the lens barrel 310 .
  • the optical actuator 200 includes a housing 210 (also referred to as an actuator housing), an outer frame 220 disposed between the housing 210 and the lens barrel 310, and the outer frame 220 has at least two mutually parallel first frames. One side wall 221 , and the two first side walls 221 are both parallel to the optical axis of the optical lens 300 .
  • a linear piezoelectric driving device 230 is disposed between the first side wall 221 of the outer frame 220 and the outer side surface of the lens barrel 310 .
  • FIG. 28 shows a linear piezoelectric driving device in an embodiment of the present application.
  • the linear piezoelectric driving device 230 includes a linear piezoelectric element 231 , a mover 232 and a friction portion 233 .
  • the mover 232 can bear against and be fixed on the outer surface of the lens barrel 310 , and the friction part 233 is arranged between the mover 232 and the linear piezoelectric element 231 .
  • the mover 232 , the friction part 233 and the linear piezoelectric element 231 are arranged in order from the inside to the outside.
  • a spring elastic sheet 240 (or other types of elastic elements) is provided between the lens barrel 310 and the outer frame 220, and the lens barrel 310 and the outer frame 220 are connected by the spring elastic sheet 240.
  • the spring elastic sheet 240 provides elastic force and is linear Piezoelectric drive 230 provides a preload (or preload).
  • the housing 210 accommodates the optical lens 300 , the outer frame 220 and the optical actuator 200 inside, and the outer shape of the housing 210 is substantially rectangular.
  • the top of the housing 210 may have a circular opening so that light can pass through the housing 210 and enter the optical lens 300 .
  • the linear piezoelectric element 231 has a first polarized region segment A1 and a second polarized region segment A2, and the first polarized region segment A1 and the second polarized region segment A2 may be There are multiple and two types of polarization region segments alternately arranged along the length direction of the linear piezoelectric element 231 . Both the first polarized region segment A1 and the second polarized region segment A2 are polarized along the thickness direction of the linear piezoelectric element 231 , and their polarized directions are opposite.
  • the linear piezoelectric element 231 When the first driving voltage is applied to the first polarized region segment A1, and the second driving voltage is applied to the second polarized region segment A2, the linear piezoelectric element 231 will change its surface shape under the action of the inverse piezoelectric effect. Specifically, when the phase difference between the first driving voltage and the second driving voltage is ⁇ /2, the particles on the surfaces of the first polarized region segment A1 and the second polarized region segment A2 both vibrate, and the vibration is A kind of ultrasonic microscopic vibration, which can also be called micro elliptical motion.
  • the slight elliptical motion of the particles on the surface of the linear piezoelectric element 231 can make the surface of the linear piezoelectric element 231 appear undulating as a whole, and the surfaces of the first polarized region segment A1 and the second polarized region segment A2
  • the wave directions of the linear piezoelectric elements 231 are consistent with each other, so that the surface of the linear piezoelectric element 231 can be coupled into a wave state of traveling wave type.
  • the piezoelectric element 231 When the surface of the linear piezoelectric element 231 performs a traveling wave motion, the piezoelectric element has a tendency to move relative to the mover, and the friction part between the linear piezoelectric element and the mover can generate static friction to prevent The movement trend, and the static friction force can drive the mover to move, and its moving direction is a direction parallel to the optical axis, and this direction can be marked as the positive direction of the optical axis, for example.
  • each particle on the surface of the first polarized region segment A1 and the second polarized region segment A2 produces a slight elliptical motion
  • the direction of the particle's slight elliptical motion is opposite to that when the phase difference is ⁇ /2.
  • FIG. 29 shows the moving direction of the mover in one embodiment of the present application. Referring to FIG. 29 , in this embodiment, the moving direction of the mover 232 is parallel to the length direction of the linear piezoelectric element 231 .
  • FIG. 30a shows a schematic diagram of the action relationship between the mover, the friction part and the linear piezoelectric element when the surface of the linear piezoelectric element fluctuates in an embodiment of the present application.
  • a first driving voltage is applied to the first polarized region segment A1
  • a second driving voltage is applied to the second polarized region segment A2
  • the first driving voltage and the second driving voltage are made
  • the phase difference is ⁇ /2, so that each particle on the surface of the linear piezoelectric element 231 forms a slight elliptical motion with an ellipse trajectory
  • Fig. 31 shows a slight ellipse of a particle on the surface of the linear piezoelectric element 231).
  • the slightly elliptical motion of each particle appears macroscopically as a wave-like wave on the surface of the linear piezoelectric element 231 , and the wave moves along the first direction D1 in a traveling wave manner. That is, during the application of the above driving voltage combination (in this driving voltage combination, the phase difference between the first driving voltage and the second driving voltage is ⁇ /2), the peaks and valleys of the wave-shaped surface of the linear piezoelectric element 231 are move in the first direction D1.
  • the friction part 233 is fixed to the surface of the linear piezoelectric element 231 , when the traveling wave on the surface of the linear piezoelectric element 231 moves along the first direction D1 , the friction part 231 also moves along the first direction D1 Or a movement trend of moving along the first direction D1 is generated.
  • the surface of the first polarized area segment A1 is in a wave crest state, that is, the first polarized area segment A1 is arched toward the side close to the lens 300 (that is, arched toward the inner side of the module), so that the first polarized area segment A1 is arched toward the inner side of the module.
  • the friction part 233 at the region segment A1 is in close contact with the mover 232 , so that a friction force (usually static friction force) is formed on the contact surface of the friction part 233 and the stator 232 , and the direction of the friction force is the same as that of the wave crest of the linear piezoelectric element 231 .
  • the direction of movement is opposite, so that the mover is driven to move in the opposite direction, that is, along the second direction D2.
  • the second polarized region segment A2 because in the state shown in FIG. 30a, the surface of the second polarized region segment A2 is in a trough state, that is, the surface of the second polarized region segment A2 is arched toward the side away from the lens 300.
  • Fig. 30b is a schematic diagram showing the action relationship between the mover, the friction part and the linear piezoelectric element in the second state. Referring to FIG.
  • the mover 232 Since the mover 232 is fixed on the outer side of the lens barrel, under the action of the first driving voltage combination (that is, the phase difference between the first driving voltage and the second driving voltage is ⁇ /2), the lens barrel And the optical lens 300 can move along the second direction D2 under the driving of the mover 232, so as to realize the movement of the optical lens 300 in the positive direction of the optical axis.
  • the first driving voltage combination that is, the phase difference between the first driving voltage and the second driving voltage is ⁇ /2
  • the length of the linear piezoelectric element may be less than 20 mm, the width may be less than 1 mm, and the thickness may be less than 1.5 mm.
  • the thickness may be the total thickness of the linear piezoelectric element itself plus the thickness of the friction part, that is, the total thickness of the linear piezoelectric element and the friction part may be less than 1.5 mm.
  • the linear piezoelectric element can be directly arranged in the gap between the outer side of the lens barrel and the inner side of the housing, and there is no need to make a special driving element on the lens barrel. installation structure. Specifically, in some existing piezoelectric driving solutions, a special mounting boss needs to be made on one side of the lens barrel, so that the piezoelectric driving device can exert force on the lens barrel through the mounting boss, and then drive the optical The lens moves axially. The mounting boss is bound to increase the thickness of the lens barrel, resulting in an increase in the volume of the camera module. In the solution of the present application, linear piezoelectric elements (as shown in Fig. 26 and Fig.
  • the camera module can be Keeping the volume small, on the other hand, arranging linear piezoelectric elements in symmetrical positions can make the force of the lens barrel more balanced, improve the accuracy of the axial movement of the lens barrel, and avoid tilting of the axial movement of the lens barrel.
  • the length of the linear piezoelectric element may be less than 10 mm (for example, 6 mm or 4.2 mm), the width may be less than 0.7 mm, and the thickness may be less than 1 mm (referring to the linear piezoelectric element). plus the total thickness of the friction part).
  • the number of polarization region segments of a single linear piezoelectric element is at least three (the polarization region segments include the first or second polarization region segments, the polarization region
  • the number of region segments refers to the sum of the number of first and second polarized region segments), thereby facilitating the formation of traveling wave motion of the surface of the linear piezoelectric element.
  • the number of polarization region segments of the linear piezoelectric element is small, for example, when the number of polarization region segments is three, a set phase difference is applied to adjacent polarization region segments with different polarization directions.
  • the driving voltage of the linear piezoelectric element can make the surface of the linear piezoelectric element form the desired wave shape, and at the same time, due to the fewer number of polarization regions, this design also helps to reduce the length of the linear piezoelectric element.
  • the length direction of the linear piezoelectric element is consistent with the optical axis direction of the camera module. Therefore, reducing the length of the linear piezoelectric element will help reduce the height of the camera module.
  • both the first polarized region segment A1 and the second polarized region segment A2 are provided with friction parts 233, but it is necessary to Note that the present application is not limited to this.
  • FIG. 32 shows a linear piezoelectric driving device in another embodiment of the present application.
  • the friction part 233 may be provided only in the first polarized region segment A1 or only in the second polarized region segment A2.
  • the friction part 233 of the first polarized region segment A1 or the second polarized region segment A2 presses
  • the mover is tightened, a friction force opposite to the moving direction of the traveling wave formed by the slight elliptical motion of the surface particles can be generated, and the mover 232 can be driven to move along the optical axis.
  • the friction part 233 is only provided in the first polarized region segment A1 or only in the second polarized region segment A2, compared with the embodiments corresponding to FIG. 30a and FIG.
  • the driving time is relatively short, so the moving speed of the mover 232 is relatively slow.
  • FIG. 41 shows a schematic structural diagram of a piezoelectric driving device in a modified embodiment of the present application.
  • a friction layer 234 is provided on the surface of the linear piezoelectric element 231 on the side close to the mover 232 (ie, the front surface, or the inner surface), and the friction portion 233 is provided on the friction layer. 234 on.
  • the length of the linear piezoelectric element 231 is greater than the length of the friction layer to ensure the linearity of the linear piezoelectric element and the driving stroke of the piezoelectric driving device.
  • the friction layer may also be disposed on the surface of the mover on the side close to the linear piezoelectric element, or the mover may be made of a friction material (ie, a friction material). materials with high friction).
  • FIG. 33 shows a schematic diagram of the structure and connection relationship between the linear piezoelectric device and the outer frame in an embodiment of the present application.
  • the linear piezoelectric element 231 can be fixed together with the outer frame 220 so as to be used as a stator of the piezoelectric driving device 230 .
  • the back surface of the linear piezoelectric element 231 referring to the outer surface of the linear piezoelectric element, that is, the side close to the casing
  • the elastic layer 212 with reference to 26 and 27.
  • the thickness of the elastic layer 212 may be 10-50 ⁇ m.
  • a 10-50 ⁇ m thick glue material can be coated on the inner side of the side wall of the outer frame, and then the back of the linear piezoelectric element is pasted. After the glue material is cured, an elastic layer with elasticity can be formed. The layer is located between the backside of the linear piezoelectric element and the sidewall of the outer frame.
  • FIG. 34 shows a schematic diagram of the structure and connection relationship between the linear piezoelectric device and the outer frame in another embodiment of the present application.
  • the elastic layer on the back of the linear piezoelectric element 231 can also be eliminated.
  • the two ends of the linear piezoelectric element 231 are provided with fixing parts 235 (the fixing parts 235 can be made of non-piezoelectric materials), and the fixing parts 235 are fixed with the outer frame 220 .
  • the linear piezoelectric element 231 can be fixed to the outer frame 220 by the fixing portions 235 at both ends thereof, so as to be used as a stator of the piezoelectric driving device 230 .
  • the linear piezoelectric element 231 when the linear piezoelectric element 231 is not powered on, the linear piezoelectric element 231 is linear and has a certain rigidity, so the pre-pressure of the spring elastic sheet 240 between the outer frame 220 and the lens barrel 310 can be transmitted to the linear pressure On the electrical element 231 and its friction part 233, so that the friction part 233 can press the mover 232, so that the optical lens 300 can be kept at its original position when the power is not turned on.
  • the backside of the linear piezoelectric element may not be provided with an elastic layer, so the deformation of the backside of the linear piezoelectric element will not be disturbed by the elastic layer.
  • the actual situation of the elliptical motion is more consistent with the theoretical value, which helps to improve the control accuracy of the axial movement of the lens.
  • the spring clips can also be replaced by electromagnetic components.
  • the electromagnetic assembly may include a magnet and a coil, and the magnet and the coil may be disposed on the lens barrel and the outer frame, respectively.
  • the interaction of the magnet coils can provide a pre-pressure for the piezoelectric drive.
  • the housing may be made of a magnetic conductive material, and the magnetic conductive material may be, for example, a ferromagnetic material, including iron, nickel, cobalt, or alloys thereof.
  • the housing may have six pins extending along a direction parallel to the optical axis for maintaining magnetism and enhancing magnetic force.
  • an elastic layer is provided on the back of the linear piezoelectric elements, the number of the linear piezoelectric elements may be an even number, and each pair of linear piezoelectric elements is provided separately
  • the elastic layer can be pressed toward the center by the two opposite side walls of the outer frame to form a pre-tightening force, so that the elastic layer presses the linear piezoelectric element inward, and then the friction part presses the mover .
  • the spring elastic sheet can be omitted, and the preload applied to the piezoelectric driving device can be provided by the elastic layer on the back of the linear piezoelectric element.
  • the solution of this embodiment can omit the spring shrapnel, simplify the device structure and assembly process, and help improve production efficiency and production yield.
  • FIG. 35 shows a schematic top view of an optical actuator in an embodiment of the present application.
  • four linear piezoelectric elements may be arranged around the rectangular lens barrel 310 .
  • the outer frame 220 may have four first side walls, and the corners of the outer frame 220 are provided with spring elastic pieces 240, the spring elastic pieces 240 connect the outer frame 220 and the lens barrel 310 so as to be positioned between the two.
  • the piezoelectric drive device 230 applies a preload.
  • each piezoelectric driving device 230 realizes its driving function based on a linear piezoelectric element, and the driving principle thereof is referred to the above description, which will not be repeated here.
  • FIG. 36 shows a schematic top view of an optical actuator in another embodiment of the present application.
  • FIG. 37 shows a schematic perspective view of one of the sub-frames in FIG. 36 .
  • this embodiment is basically the same as the embodiment shown in FIG. 35 , except that the outer frame 220 of this embodiment is composed of a first sub-frame and a second sub-frame.
  • two opposite first side walls may be provided on two sides of the first sub-frame, while the other two sides are hollowed out.
  • the hollow side 222 in FIG. 37 shows the Openworked on both sides.
  • the shape of the second subframe may be the same as that of the first subframe.
  • the combination of these two sub-frames can make the four sides of the optical actuator housing have corresponding outer frame side walls (ie, the first side walls 221 ), so as to facilitate the installation and preload of the corresponding piezoelectric driving device force.
  • the shape of the outer side surface of the lens barrel is not limited to a rectangle.
  • the outer side of the lens barrel may take other shapes.
  • FIG. 38 shows a schematic top view of an optical actuator according to a modified embodiment of the present application.
  • the outer side surface 311 of the lens barrel of the optical lens 300 may be cut in a circular shape.
  • the cut circle shape refers to a shape formed by cutting a circle shape by a straight line.
  • the outer side surface of the lens barrel has two planes parallel to each other, and these two planes can be used as the bearing surfaces 311a of the movers of the two piezoelectric driving devices.
  • the outer surface of the lens barrel has an even number of planes symmetrically arranged as the bearing surfaces of the mover.
  • the outer surface of the lens barrel may also be in the shape of a hexagon, an octagon, or the like.
  • the piezoelectric driving device may be disposed at the four corner regions of the optical actuator housing.
  • FIG. 39 shows a schematic top view of an optical actuator according to another modified embodiment of the present application.
  • the outer side surface 311a of the lens barrel is substantially circular, and at two diagonal positions corresponding to the housing, the outer side surface 311 of the lens barrel protrudes outward to form two symmetrical parallel bearing surfaces 311a.
  • An outer frame 220 may be disposed between the housing and the bearing surface 311a of the lens barrel 310, and the outer frame 220 has two first side walls arranged at an angle of 45 degrees.
  • the piezoelectric driving device 230 may be disposed between the first side wall of the outer frame 220 and the bearing surface 311a of the lens barrel.
  • each piezoelectric driving device 230 provides a driving force based on a linear piezoelectric element 231 , and the driving principle thereof is described above, and will not be repeated here.
  • the piezoelectric driving device 230 can be arranged in the gap between the rectangular housing and the substantially circular lens barrel at the four corners of the housing, thus effectively reducing the distance between the optical actuator and the camera module.
  • Radial dimension. The radial direction refers to the direction perpendicular to the optical axis.
  • FIG. 40 shows a schematic top view of the optical actuator according to yet another modified embodiment of the present application.
  • the outer side surface 311 of the lens barrel is substantially circular, and at the four corner positions corresponding to the housing, the outer side surface 311 of the lens barrel protrudes outward to form four bearing surfaces, each diagonal line The two bearing surfaces are symmetrically arranged and parallel to each other.
  • An outer frame may be disposed between the housing 210 and the bearing surface 311a of the lens barrel, and the outer frame 220 has four first side walls arranged at an angle of 45 degrees.
  • the piezoelectric driving device 230 may be disposed between the first side wall of the outer frame 220 in the four-corner area and the bearing surface of the lens barrel.
  • each piezoelectric driving device 230 provides a driving force based on a linear piezoelectric element, and the driving principle thereof is described in the foregoing description, which will not be repeated here.
  • the piezoelectric driving device can be arranged in the gap between the rectangular housing and the substantially circular lens barrel at the four corners of the housing, so the diameters of the optical actuator and the camera module can be effectively reduced to size.
  • the radial direction refers to the direction perpendicular to the optical axis.
  • the optical actuator may further include an inner frame.
  • the inner frame can be fixed on the outer side of the lens barrel.
  • the inner frame may have a side wall (which may be referred to as a second side wall) corresponding to the outer frame, and the piezoelectric driving device may be disposed on the side wall of the outer frame and the side wall of the inner frame between.
  • the spring elastic piece connects the outer frame and the inner frame, so as to exert a pre-tightening force on the piezoelectric driving device.
  • each piezoelectric driving device provides a driving force based on a linear piezoelectric element, and the driving principle thereof is described above, and will not be repeated here.
  • the linear piezoelectric element may be formed by splicing a plurality of piezoelectric ceramic sheets end to end. Specifically, the end faces of any two adjacent piezoelectric ceramic sheets can be bonded by glue, so that the two are spliced together end to end. Wherein, the piezoelectric ceramic sheet is polarized along its thickness direction, and the polarization directions of any two adjacent piezoelectric ceramic sheets are opposite.
  • the linear piezoelectric element is a traveling wave linear piezoelectric element, which can be formed by bonding two identical piezoelectric bodies staggered by half the length of the polarization region. made in one piece.
  • each of the first polarized region segment A1 and the second polarized region segment A2 of the linear piezoelectric element is connected to a wire, which is further connected to an excitation source.
  • the excitation source applies corresponding piezoelectric driving signals to the first polarized region segment A1 and the second polarized region segment A2 respectively.
  • the excitation source may be arranged in the circuit board of the photosensitive assembly.
  • the wires may connect each of the first polarized area segment A1 and the second polarized area segment A2 from the side.
  • the position of the connection end between the wire and each of the first polarized region segment A1 and the second polarized region segment A2 avoids the surface of the linear piezoelectric element (that is, avoids the linear piezoelectric element that needs to generate a slight elliptical motion). front and back).
  • the other end of the wire is connected to the circuit board of the photosensitive assembly, or can also be connected to the circuit board arranged in other areas of the camera module, and the excitation source can be arranged on the circuit board.
  • the surfaces of the linear piezoelectric elements all exhibit a traveling wave wave state.
  • the surface wave mode of the linear piezoelectric element may also be configured as a standing wave wave mode.
  • the first polarization region segment A1 and the second polarization region segment A2 may have the same polarization direction, wherein the linear piezoelectric element is After being turned on, by inputting alternating voltage signals in the first polarized region segment A1 and the second polarized region segment A2, multiple groups of the first polarized region segment A1 and the second polarized region are alternately arranged with each other.
  • the segment A2 is deformed in different directions, so as to drive the friction part to move along a preset direction in the form of a standing wave, thereby driving the mover to move along the direction of the optical axis.
  • the photosensitive component includes a circuit board, a photosensitive chip mounted on the surface of the circuit board, a filter holder mounted on the surface of the circuit board and surrounding the photosensitive chip, and a filter holder mounted on the surface of the circuit board.
  • the top surface of the filter holder may be a flat surface for mounting the base of the optical actuator.
  • the photosensitive component can also be fabricated based on the MOC process, that is, the filter holder can be replaced by a molded support portion, and the molded support portion can be directly molded on the circuit board based on the module process, and the The molding support portion extends inward and covers the edge region of the photosensitive chip.
  • the optical filter is mounted on the molding support, and the top surface of the molding support is suitable for mounting the optical actuator.
  • the photosensitive component can also be fabricated based on the MOB process, which is different from the MOC process in that the molding support portion does not contact the photosensitive chip.
  • the piezoelectric driving device can be arranged in the gap between the housing and the lens barrel, which occupies a small space and has a large driving force, which can realize the driving of a large-weight lens.
  • the number of linear piezoelectric elements is greater than or equal to two, and the length of each linear piezoelectric element is less than 2 mm, it is possible to drive a lens with a mass of more than 400 mg.
  • FIG. 42 shows a schematic longitudinal cross-sectional view of a camera module with a lens anti-shake function according to an embodiment of the present application
  • FIG. 43 shows a schematic top view of the optical actuator for lens anti-shake in the embodiment of FIG. 42
  • a camera module with a lens stabilization function includes a lens 100 , an optical actuator 200 and a photosensitive assembly 300 .
  • the lens 100 is installed in the optical actuator 200
  • the bottom surface of the optical actuator 200 is fixed to the top surface of the photosensitive component 300 .
  • the photosensitive component 300 has a photosensitive chip 310 for receiving the imaging light transmitted through the lens 100 and outputting imaging data.
  • the lens 100 may include a lens barrel and a lens group installed in the lens barrel.
  • the outer side of the lens barrel is connected and fixed with the lens carrier 210 .
  • the lens barrel may be omitted, and the lens group may be directly installed in the lens carrier 210 .
  • the optical actuator 200 includes a housing 220 , a lens carrier 210 , a suspension portion 230 and at least two cantilever beams 240 .
  • the housing 220 has an accommodating cavity surrounded by four side walls for accommodating the lens carrier 210 , the suspension portion 230 and the at least two cantilever beams 240 , and the lens carrier 210 passes through the lens carrier 210 .
  • the suspension portion 230 is suspended in the accommodating cavity of the casing 220 , and the at least two cantilever beams 240 are fixed to the side walls of the casing 220 on two adjacent sides. Specifically, in this embodiment, the cantilever beam 240 is disposed in the gap between the outer side surface of the lens carrier 210 and the inner side surface of the housing 220 .
  • the suspension portion 230 is implemented as an elastic element 231 (eg, a spring or an elastic sheet) fixed at the four corners of the lens carrier and the housing.
  • the elastic element 231 may include an upper elastic piece and a lower elastic piece, and the upper elastic piece and the lower elastic piece may be respectively fixed with the top and bottom of the lens carrier 210, so as to suspend the lens carrier 210 on the lens carrier 210 more stably. in the shell.
  • the cantilever beam 240 may include a strip substrate 241 and a piezoelectric layer 242 attached to the surface of the strip substrate 241. One end of the cantilever beam 240 is fixed to the housing 220, and the other end is a free end 249, and the cantilever beam 240 is disposed in the gap between the housing 220 and the lens carrier 210, and the surface of the piezoelectric layer 242 thereof may be parallel to the inner side surface of the housing 220.
  • the piezoelectric layer 242 can be polarized along its thickness direction, the length direction of the piezoelectric layer 242 is consistent with the length direction of the strip substrate 241, and the piezoelectric layer 242 is suitable for being applied
  • the cantilever beam 240 is stretched (expanded) or contracted along its length direction to bend the cantilever beam 240, thereby causing the free end 249 to be displaced in a direction perpendicular to the surface of the piezoelectric layer 242, and pass the The displacement of the free end 249 pushes the lens carrier 210 to move.
  • the displacement direction of the free end is actually approximately perpendicular to the surface of the piezoelectric layer, and as long as it is within the tolerance range, the free end can be regarded as moving in a direction perpendicular to the surface of the piezoelectric layer.
  • the maximum displacement of the free end can meet the requirements.
  • the cantilever beam 240 may include two types based on the direction of the provided driving force, namely the x-axis moving cantilever beam 240a and The y-axis moving cantilever beam 240b (refer to FIG.
  • the x-axis moving cantilever beam 240a is arranged on the side of the housing 220 perpendicular to the x-axis, and the length direction of the x-axis moving cantilever beam 240a is parallel to y axis;
  • the y-axis moving cantilever beam 240b is arranged on the side of the housing 220 perpendicular to the y-axis, and the length direction of the y-axis moving cantilever beam 240b is parallel to the x-axis; wherein the x-axis and all The y-axis is a coordinate axis perpendicular to the optical axis of the lens 100 or the lens group optical actuator 200 , and the x-axis and the y-axis are perpendicular to each other.
  • the two x-axis movable cantilever beams 240a are symmetrically arranged on the same side of the housing 220 . In a top view, the side surface is parallel to the y-axis, that is, the length direction of the x-axis moving cantilever beam 240a is parallel to the y-axis.
  • the x-axis moving cantilever beams 240 a are all mounted on the housing 220 through the fixing portion 243 . And the two x-axis movable cantilever beams 240a share the same fixed portion 243 .
  • the two y-axis moving cantilever beams 240b are symmetrically arranged on the same side of the housing 220 .
  • the side surface is parallel to the x-axis, that is, the longitudinal direction of the y-axis moving cantilever beam 240b is parallel to the x-axis.
  • the y-axis moving cantilever beam 240b is installed on the housing 220 through the fixing portion 243 .
  • the two y-axis moving cantilever beams 240b share the same fixed portion 243 .
  • the fixing portion 243 is disposed at the middle position of the corresponding side surface of the housing 220 in a plan view.
  • the two x-axis moving cantilever beams 240a are symmetrically arranged on the side surface of the housing 220 perpendicular to the x-axis, and the two x-axis moving cantilever beams 240a share the same fixing part 243 and is mounted on the housing 220 through the fixing part 243;
  • the two y-axis moving cantilever beams 240b are symmetrically arranged on the side of the housing 220 perpendicular to the y-axis, and the two The y-axis moving cantilever beam 240b shares the same fixing portion 243 and is mounted on the housing 220 through the fixing portion 243 .
  • the optical actuator 200 further includes a driving unit, and the driving unit is configured to apply a driving voltage to the piezoelectric layer 242 so that the two x-axis moving cantilevers 240a located on the same side face Bending inward, and the free ends 249 of the two x-axis moving cantilever beams 240a push the carrier to translate along the x-axis; the driving unit is also used to drive the piezoelectric layer 242 voltage so that the two y-axis moving cantilever beams 240b located on the same side are both bent inward, and the free ends 249 of the two y-axis moving cantilever beams 240b push the carrier along the y-axis translation.
  • the inward bending is the direction in which the free end 249 of the cantilever beam 240 moves from the housing 220 to the carrier. That is, in this embodiment, the optical axis can be regarded as the central axis, the side close to the optical axis is regarded as the inner side, and the side away from the optical axis is regarded as the outer side. Further, in a top view, the outer contour of the carrier may be rectangular.
  • the outer side of the carrier includes at least one flat surface adapted to the cantilever beam 240, and the flat surface is suitable for contacting the free end 249 after the cantilever beam 240 is bent inward (the free end 249 will The movement in a direction substantially perpendicular to the surface of the piezoelectric layer 242 thereof occurs due to the inward bending of the cantilever beam 240 ), and the carrier is adapted to be displaced with the free end 249 under the push of the free end 249 .
  • FIG. 44 shows a schematic diagram of the y-axis moving cantilever beam bending inward to push the lens carrier to move in an embodiment of the present application. Referring to FIG.
  • the y-axis moving cantilever beams 240b on both sides of the fixed degree are bent inward, which can symmetrically provide the lens carrier 210 with a driving force on the x-axis, thereby pushing the lens carrier 210 to move in the positive or negative y-axis direction.
  • the piezoelectric layer 242 includes a first piezoelectric layer 242a and a second piezoelectric layer 242b, the first piezoelectric layer 242a and the second piezoelectric layer 242a
  • the electrical layers 242b are respectively attached to the inner surface and the outer surface of the strip substrate 241 .
  • the optical actuator 200 further includes a driving unit, and the driving unit is configured to apply a driving voltage to the first piezoelectric layer 242a and the second piezoelectric layer 242b , so that the first piezoelectric layer 242a contracts in its length direction, and the second piezoelectric layer 242b extends in its length direction, so that the cantilever beam 240 is moved toward the position where the first piezoelectric layer 242a is located. Curved on one side.
  • the driving unit may be integrated into the circuit board of the camera module as firmware.
  • the driving unit may be used to apply a driving voltage to the first piezoelectric layer 242a and the second piezoelectric layer 242b, so that the first piezoelectric layer 242a is The second piezoelectric layer 242b is stretched in the longitudinal direction, so that the cantilever beam 240 is bent toward the side where the first piezoelectric layer 242a is located.
  • the driving unit is also used to bend at least two cantilever beams 240 disposed on the same side of the housing 220 inward at the same time, so as to push the carrier to move.
  • the piezoelectric layer 242 may be provided only on the inner surface of the strip-shaped substrate 241 or only on the outer surface of the strip-shaped substrate 241 .
  • the optical actuator 200 further includes a driving unit, which may be used to apply a driving voltage to the piezoelectric layer 242 located on one side (ie, the inner surface side or the outer surface side) of the strip-shaped substrate 241 to
  • the cantilever beam 240 is bent, and the free end 249 of the cantilever beam 240 pushes the carrier to move.
  • Figure 45d shows a schematic diagram of a cantilever with a piezoelectric layer on only one surface.
  • the camera module and the optical actuator 200 can also implement optical anti-shake in the rotational degree of freedom around the z-axis.
  • the optical actuator 200 may be provided with two x-axis moving cantilever beams 240a and two y-axis moving cantilever beams 240b.
  • the two x-axis movable cantilever beams 240 a share the fixing portion 243
  • the fixing portion 243 is arranged at the middle position of one side surface of the housing 220 .
  • the two y-axis moving cantilever beams 240b also share the fixing portion 243
  • the fixing portion 243 is disposed at the middle position of the other side surface of the housing 220 .
  • the side surfaces corresponding to the two x-axis moving cantilever beams 240a and the side surfaces corresponding to the two y-axis moving cantilever beams 240b are two intersecting side surfaces (ie, the two side surfaces are adjacent side surfaces).
  • the x-axis translation and the y-axis translation of the lens carrier 210 can be realized; on the other hand, the rotation of the lens carrier 210 around the z-axis can also be realized by controlling the direction of the driving voltage.
  • the z-axis is parallel to the optical axis (ie, the optical axis of the lens or lens group).
  • the driving unit is further configured to apply a driving voltage to the piezoelectric layer 242 , so that the two x-axis movable cantilever beams 240 a sharing the same fixed portion 243 are directed toward the Inward and outward bending, and the two y-axis moving cantilever beams 240b that share the same fixed portion 243 are respectively bent inward and outward.
  • FIG. 46 shows a schematic diagram of the cantilever beam driving the lens carrier to rotate around the z-axis in an embodiment of the present application. Referring to FIG.
  • the x-axis moving cantilever beam 240a and the y-axis moving cantilever beam 240b can generate superimposed rotational moments, thereby increasing the driving force for rotating the lens carrier 210 and improving the anti-shake response speed in the z-axis rotational degree of freedom.
  • the suspension portion 230 is an elastic piece, the elastic piece is arranged at four corners of the housing 220, and two ends of the elastic piece are respectively connected to the housing 220 and the vector.
  • the piezoelectric layer 242 stretches along its length to bend the cantilever beam 240, the bending of the cantilever beam 240 causes its free end 249 to abut and push the carrier to move.
  • the strip-shaped substrate 241 in the cantilever beam 240, may be a metal sheet, and the thickness of the piezoelectric layer 242 is 50%-80% of the thickness of the metal sheet %.
  • the thickness of the metal sheet may be 50-300 ⁇ m, for example, may preferably be 100 ⁇ m.
  • the strip-shaped substrate 241 has elasticity, so that the strip-shaped substrate 241 can recover its shape after being bent and deformed, and it can be made of other materials than metal. As long as the strip-shaped substrate 241 has a certain elasticity, it is suitable to be bent in a direction substantially perpendicular to the surface of the piezoelectric layer.
  • the strip-shaped substrate 241 may be a metal sheet
  • the piezoelectric layer 242 includes a first piezoelectric layer 242a and a second piezoelectric layer 242b , the first piezoelectric layer 242a and the second piezoelectric layer 242b are respectively attached to the inner and outer surfaces of the metal sheet;
  • the thickness of the first piezoelectric layer 242a is the thickness of the metal sheet 50%-80% of the thickness of the second piezoelectric layer 242b is 50%-80% of the thickness of the metal sheet.
  • the thicknesses of the first piezoelectric layer 242a and the second piezoelectric layer 242b are equal.
  • the thickness of the metal sheet may be 50-300 ⁇ m, for example, may preferably be 100 ⁇ m.
  • the metal sheet may be a stainless steel sheet.
  • the piezoelectric layer 242 (including the first piezoelectric layer 242a and the second piezoelectric layer 242b) has an inverse piezoelectric effect, and is adapted to contract or expand according to the polarization direction and the electric field direction.
  • the piezoelectric layer 242 can be formed by depositing materials such as single crystal, polycrystalline ceramics or polymers on the strip-shaped substrate 241 (such as a stainless steel sheet), and then making the above materials (single crystal, polycrystalline ceramics) in a certain direction. or polymer, etc.) to polarize the deposition layer, thereby obtaining the desired piezoelectric layer 242.
  • the inverse piezoelectric effect refers to the application of an electric field in the polarization direction of the dielectric to generate a potential difference in the dielectric, which in turn induces mechanical deformation of the dielectric.
  • the first piezoelectric layer 242a and the second piezoelectric layer 242b are both composed of piezoelectric materials and are electrically connected to at least two electrodes (not shown in the figure) respectively, so as to be the first piezoelectric layer 242a and the second piezoelectric layer 242b.
  • a piezoelectric layer 242a and the second piezoelectric layer 242b provide power excitation.
  • the first piezoelectric layer 242a and the second piezoelectric layer 242b fixed on both sides of the strip-shaped substrate 241 shrink and expand respectively after being excited by a power source.
  • the first piezoelectric layer 242a is contracted in the longitudinal direction and the second piezoelectric layer 242b is expanded in the longitudinal direction, so that the strip-shaped substrate 241 and the cantilever beam are suitable for the direction of the first piezoelectric layer.
  • the layer 242a is bent in direction, thereby driving the lens carrier 210 to translate or rotate.
  • the deformation amount of the cantilever beam 240 can be characterized by the displacement amount W of the free end 249 of the cantilever beam 240 .
  • the piezoelectric layer 242 may be directly formed on the strip substrate 241 , or may be pre-formed, and then the piezoelectric layer 242 is attached (eg, bonded) to the surface of the strip substrate 241 .
  • the polarization directions of the first piezoelectric layer 242a and the second piezoelectric layer 242b may be opposite, so as to provide the same power excitation (ie, provide the same driving voltage) ), one piezoelectric layer shrinks in its length direction and the other piezoelectric layer expands in its length direction, so that the cantilever beam is bent, and then the free end 249 of the cantilever beam 240 is driven to push the lens carrier 210 to move.
  • the polarization directions of the first piezoelectric layer 242a and the second piezoelectric layer 242b may be the same, and the polarization directions of the first piezoelectric layer 242a and the second piezoelectric layer 242a may be the same.
  • 242b provides power excitation in the opposite direction, which can also realize that one of the piezoelectric layers shrinks in its length direction and the other piezoelectric layer expands in its length direction, so that the cantilever beam 240 is bent, thereby driving the free end of the cantilever beam 240 249 pushes the lens carrier 210 to move.
  • the thickness of the first piezoelectric layer 242a is h1
  • the thickness of the second piezoelectric layer 242b is h2
  • the thickness of the strip substrate 241 is h3
  • the thickness h1 of the first piezoelectric layer 242a and the thickness h2 of the second piezoelectric layer 242b are both 50%-80% of the thickness h3 of the cantilever beam.
  • the thickness h1 of the first piezoelectric layer 242a and the thickness h2 of the second piezoelectric layer 242b may be equal.
  • the first piezoelectric layer 242a and the second piezoelectric layer 242b may be PZT materials ( lead zirconate titanate piezoelectric ceramics).
  • the thickness h1 of the first piezoelectric layer 242a and the thickness h2 of the second piezoelectric layer 242b are both 70 ⁇ m, and the thickness of the strip-shaped substrate 241 is 100 ⁇ m.
  • the maximum deformation amount of the cantilever beam (that is, the maximum displacement amount W of the free end 249 of the cantilever beam) may be 160 ⁇ m, and the driving force may be greater than or equal to 0.1N, which can meet the performance requirements of lens stabilization.
  • the width of the cantilever beam 240 may be greater than its thickness.
  • Figure 45c shows a cantilever beam from a top view, showing the length and width directions of the cantilever beam.
  • the setting heights of the x-axis moving cantilever beam 240a and the y-axis moving cantilever beam 240b are equal, so as to avoid the occurrence of anti-shake movement when driving the lens carrier 210 Unnecessary tilt.
  • the cantilever beam 240 is preferably disposed in the middle or upper middle of the lens carrier 210, so that the piezoelectric actuator is not easy to generate when driving the lens to translate. tilt.
  • a camera module with an optical anti-shake function which includes a photosensitive component, an optical actuator 200 and a lens 100 mounted on the optical actuator 200 .
  • the optical actuator 200 is a lens stabilization optical actuator.
  • the photosensitive assembly is fixed with the housing 220 of the lens anti-shake piezoelectric actuator, and the lens 100 is fixed in the lens carrier 210 of the lens anti-shake piezoelectric actuator, so that the photosensitive assembly is suitable for in order to obtain the imaging light collected by the lens 100 .
  • the photosensitive assembly includes a circuit board assembly and a filter assembly
  • the circuit board assembly includes a circuit board, a photosensitive chip and electronic components such as capacitors and resistors electrically connected to the circuit board
  • the filter assembly includes a bracket and The filter element fixed on the bracket, the circuit board assembly is fixed to the housing 220 of the lens anti-shake piezoelectric actuator through the filter assembly.
  • FIG. 47 shows a schematic top view of the optical actuator in another embodiment of the present application.
  • cantilever beams 240 are provided on the four side walls of the housing 220 of the optical actuator 200 . That is, in this embodiment, a plurality of cantilever beams 240 are distributed around the lens carrier 210 . The two sides of the lens carrier 210 are the x-axis movable cantilever beam 240a, and the other two sides are the y-axis movable cantilever beam 240b. On each side, the cantilever beams are arranged symmetrically in pairs.
  • FIG. 48 shows a schematic top view of an optical actuator according to a modified embodiment of the present application.
  • the free end 249 of the cantilever beam 240 is connected to the elastic element 231 , and is connected to the lens carrier 210 through the elastic element 231 . That is, both ends of the elastic element 231 for suspending the lens carrier 210 can be connected to the lens carrier 210 and the free end 249 of the cantilever beam 240 respectively (it should be noted that in this embodiment, when the gap between the housing 220 and the outer side of the lens carrier 210 is When the cantilever beam 240 is not arranged, both ends of the elastic element 231 may be connected between the housing 220 and the lens carrier 210).
  • the fixing portion 243 is disposed at the center of the inner side surface of the casing 220 , the two cantilever beams 240 extend from the fixing portion 243 in opposite directions respectively, and the free ends 249 of the two cantilever beams 240 are located at two corners of the casing 220 respectively area.
  • the piezoelectric layer 242 when the piezoelectric layer 242 is excited by the driving voltage, it shrinks or expands in its length direction, so that the cantilever beam 240 is bent (deformed), and the free end 249 extends to a direction substantially perpendicular to the surface of the piezoelectric layer 242 .
  • Direction displacement the displacement is transmitted to the lens carrier 210 by the elastic element, so as to push the lens carrier 210 to translate along the x-axis, the y-axis or rotate around the z-axis.
  • FIG. 49 shows a schematic longitudinal cross-sectional view of a camera module with chip anti-shake function in another embodiment of the present application.
  • FIG. 50 shows a schematic top view of the optical actuator of the camera module of FIG. 49 .
  • the camera module includes a lens 100 , a lens holder 110 , a photosensitive assembly 300 , and an optical actuator 200 for driving the photosensitive assembly.
  • the lens 100 is mounted on the lens holder 110
  • the bottom surface of the lens holder 110 is mounted on the top surface of the housing 220 of the optical actuator 200 .
  • the optical actuator 200 includes a housing 220 , a photosensitive component carrier 290 , and a cantilever beam 240 disposed in a gap between the housing 220 and the photosensitive component carrier 290 .
  • the lens holder 110 may be a structural member for supporting the lens.
  • the above-mentioned lens 100 and the lens holder 110 may together constitute a lens assembly. In other embodiments, the lens holder 110 may also be replaced by other types of lens holders.
  • the lens holder may be a motor (OIS motor or AF motor) that drives the movement of the lens.
  • the photosensitive assembly 300 includes a circuit board assembly 320 and a filter assembly, wherein the circuit board assembly 320 includes a circuit board 321, a photosensitive chip 322 electrically connected to the circuit board 321, and electronic components 323 such as capacitors and resistors.
  • the component 320 is fixed to the photosensitive component carrier 290 through the circuit board 321 .
  • the photosensitive component carrier 290 can be fixed on the front surface of the circuit board 321 , or can be fixed on the side or bottom surface of the circuit board 321 , and the filter component includes a filter element 311 .
  • the filter element 311 is fixed on the photosensitive element carrier 290 .
  • FIG. 51 shows a schematic side view of an optical actuator with multiple cantilevers on a single side of an embodiment of the present application.
  • a fixing portion 243 may be provided at the center of an outer side surface of the carrier 299 (which may be a lens carrier or a photosensitive component carrier), and four cantilever beams 240 extend from the fixing portion 243 to four extending in one direction.
  • the four cantilever beams 240 may be symmetrically arranged in an "X" shape.
  • the fixing portion 243 may be fixed to the inner side surface of the housing 220 .
  • the fixed portion 243 can be used as the rhizome of the cantilever beam 240, and the free end 249 of the cantilever beam 240 is located at the four corner positions of the outer side of the carrier (referring to the four corner positions in a side view).
  • more cantilever beams 240 can be arranged on a single side, so that the optical actuator has a larger driving force.
  • the cantilever beam 240 is arranged obliquely under the side view angle (that is, the length direction of the cantilever beam 240 is inclined with respect to the reference plane, the reference plane is a plane perpendicular to the optical axis, or parallel to the photosensitive component).
  • the plane of the photosensitive surface, the x-axis and the y-axis are two mutually perpendicular coordinate axes on the reference plane), so the cantilever beam 240 can have a larger length, so when it is excited by the driving voltage, the bending amplitude can be relatively Increase (ie, the displacement of the free end 249 of the obliquely arranged cantilever beam 240 can be relatively increased compared to the horizontally arranged cantilever beam 240 ), thereby improving the driving force and driving stroke of the optical actuator.
  • the above-mentioned four cantilever beams 240 located on a single side can form a cantilever beam group, and the cantilever beam group can be used as an x-axis movable cantilever beam group, and can also be used as a y-axis movable cantilever beam group.
  • the cantilever beam group can be used to drive the carrier 299 to perform x-axis translation, that is, the cantilever beam group can be used as an x-axis moving cantilever beam group.
  • the cantilever beam group When the cantilever beam group is arranged on the vertical side of the y-axis, the cantilever beam group can be used to drive the carrier 299 to perform y-axis translation, that is, it can be used as a y-axis moving cantilever beam group.
  • the above-mentioned cantilever beam group can also be used to drive the carrier 299 to rotate in the freedom degree of rotation around the z-axis, and the driving principle can be referred to FIG. 46 and the corresponding embodiments, which will not be repeated here.
  • the number of cantilever beams provided by each cantilever beam group is not limited to two or four, for example, the number of cantilever beams may also be three, five, six, etc.
  • the cantilever beam or the cantilever beam group are all disposed in the annular (eg, rectangular annular) gap between the outer side surface of the carrier 299 and the inner side surface of the housing 220 .
  • the cantilever beam or cantilever beam group of the present application can also be arranged in the gap between the top surface of the carrier 299 and the housing, or in the gap between the bottom surface of the carrier 299 and the housing (for example, the housing may have a base , the cantilever beam can be arranged in the gap between the bottom surface of the carrier 299 and the base of the housing) to realize tilt adjustment (ie, tilt angle adjustment) of the carrier 299 .
  • the tilt adjustment may be an adjustment of the carrier 299 in two degrees of freedom, rotation about the x-axis and rotation about the y-axis. Its rotation center can be set on a reference point located on the optical axis of the lens 100 . The position of the reference point can be determined by adjusting the elastic coefficient of the elastic element (ie, the suspension portion 230 ) and the position and driving force of the cantilever beam.
  • FIG. 52 shows a schematic side view of an optical actuator with tilt adjustment function in an embodiment of the present application.
  • FIG. 53 shows a schematic top view of an optical actuator with tilt adjustment function in an embodiment of the present application.
  • the cantilever beam or the cantilever beam group may be disposed in the gap between the top surface of the carrier 299 and the housing 220 .
  • the cantilever beam 240 (the cantilever beam 240 can be combined with reference to FIGS. 42 , 43 and 44 , and the cantilever beam in FIGS. 52 and 53 is represented by reference numeral 240c or 240d ) can be arranged on the carrier 299 on the edge area of the top surface.
  • the surface of the piezoelectric layer 242 of the cantilever beam 240 may be parallel to the top surface of the carrier 299 .
  • the cantilever beam 240 can be bent downward, so that its free end 249 is displaced from top to bottom, thereby pushing the carrier 299 to tilt toward one side.
  • the optical actuator 200 may include an Rx moving cantilever beam 240c and a Ry moving cantilever beam 240d, and the length direction of the Rx moving cantilever beam 240c is parallel to the x-axis, which is arranged on the top surface of the carrier 299 parallel to the x-axis
  • the edge region of the Ry moving cantilever beam 240d is parallel to the y-axis, which is arranged in the edge region of the top surface of the carrier 299 parallel to the y-axis.
  • the Rx moving cantilever beam 240c is bent and its free end 249 contacts and pushes the carrier 299, so that the carrier 299 can be rotated in the Rx degree of freedom (the Rx degree of freedom is the degree of freedom of rotation around the x-axis).
  • the Ry moving cantilever beam 240d is bent and its free end 249 contacts and pushes the carrier 299, so that the carrier 299 can be rotated in the Ry degree of freedom (the Ry degree of freedom is the degree of freedom of rotation around the y-axis).
  • the structures of the Rx moving cantilever beam 240c and the Ry moving cantilever beam 240d can be the same as the cantilever beams 240 in other embodiments described above, including a strip substrate 241 and a piezoelectric layer 242 attached to the strip substrate 241 .
  • the piezoelectric layer 242 may include a first piezoelectric layer 242a and a second piezoelectric layer 242b located on two surfaces (here, the upper and lower surfaces) of the strip-shaped substrate 241 .
  • the Rx moving cantilever beam and the Ry moving cantilever beam can not only be arranged in the gap between the top surface of the carrier 299 and the housing 220 , but also can be arranged on the bottom surface of the carrier 299 Clearance with housing 220.
  • the structure and arrangement of the Rx moving cantilever beam 240c and the Ry moving cantilever beam 240d located in the gap between the bottom surface of the carrier 299 and the casing 220 can be the same as the Rx moving cantilever beam 240c located in the gap between the top surface of the carrier 299 and the casing 220 in the previous embodiment.
  • the Rx movable cantilever beam 240c may be arranged on an edge region of the carrier 299 parallel to the x-axis
  • the Ry movable cantilever beam 240d may be arranged on an edge region of the carrier 299 parallel to the y-axis.
  • the surface of the piezoelectric layer 242 of the cantilever beam 240 is parallel to the top surface or the bottom surface of the carrier 299 .
  • FIG. 54 shows a schematic side view of an optical actuator with tilt adjustment function in another embodiment of the present application.
  • FIG. 55 shows a schematic top view of an optical actuator with tilt adjustment function in another embodiment of the present application.
  • the Rx movable cantilever beam 240c can be arranged on two edge regions of the carrier 299 parallel to the x-axis
  • the Ry movable cantilever beam 240d can be arranged on the two edges of the carrier 299 parallel to the y-axis area.
  • the rest of the design of this embodiment is the same as that of the embodiment shown in FIG. 52 and FIG. 53 , and details are not repeated here.
  • the carrier 299 may be a photosensitive component carrier 290 or a lens carrier 210 .
  • the piezoelectric motor is used as the driving force for the anti-shake motor of the camera module.
  • the structure of the piezoelectric motor is relatively simple, which can simplify the design of the driving mechanism, thereby reducing the size of the module.
  • the cantilever beam motor based on the piezoelectric layer does not need to rely on electromagnetic force to offset gravity, and has the advantages of greater thrust, greater displacement and lower power consumption, and at the same time, the control accuracy is higher. High, can achieve high-precision dual-axis anti-shake, and there is no problem of magnetic interference.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Lens Barrels (AREA)

Abstract

一摄像模组、光学致动器、感光组件及其制造方法，其中摄像模组是潜望式摄像模组，包括一摄像模组主体（10）、一反射棱镜（20）以及一棱镜驱动装置（30），其中摄像模组主体（10）具有一光轴（O），反射棱镜（20）沿摄像模组主体（10）的光轴（O）方向被设置于摄像模组主体（10）的入光侧，以供反射棱镜（20）反射外界光线至摄像模组主体（10），其中反射棱镜（20）被可传动地连接于棱镜驱动装置（30），并由棱镜驱动装置（30）驱动反射棱镜（20）运动，以改变反射棱镜（20）出射光的方向，补偿摄像模组主体（10）的光学抖动。潜望式摄像模组利用压电结构与反射棱镜（20）相结合，利用压电马达的大驱动力以及小尺寸来驱动反射棱镜（20）进行更高精度的防抖功能。

Description

摄像模组、光学致动器、感光组件及其制造方法 技术领域
本发明涉及摄像模组领域，尤其涉及一摄像模组、光学致动器、感光组件及其制造方法。
背景技术
近些年来，如智能手机等具有摄像功能的终端设备都需要具备光学防抖(OIS)功能，为了避免由于人为因素所形成的摄像设备抖动从而影响图像的清晰程度，故采用防抖技术可以使得图像稳定化。
现有防抖方案中，采用的方式为设有反射镜及支撑反射镜的基座，运用不同的枢轴支撑反射镜，并利用磁铁、线圈、霍尔传感器以及弹片/悬丝/滚珠等元件控制反射镜，避免其在使用过程出现的抖动。但此种方案结构复杂，零件数量较多，生产维修困难。线圈与磁铁也普遍尺寸较大，不适用于便携终端逐渐小型化的趋势。同时，由于当前棱镜或反射镜产品体积逐渐变大、重量逐渐增大趋势，现有传统防抖驱动机构推力不足，难以符合未来发展趋势。
发明内容
本发明的一个主要优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述摄像模组是一潜望式摄像模组，所述潜望式摄像模组包括至少一压电驱动装置和一反射棱镜，通过所述压电驱动装置驱动所述反射棱镜运动，有利于提高所述反射棱镜运动所需的作用力。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组的反射棱镜座内的驱动轴与压电驱动装置的驱动轴设置于同一侧，均与透镜组光轴所平行且位于同一平面，有利于减小了潜望式摄像模组的整体体积，实现模组结构封装紧凑，使得模组结构更加趋于小型化。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组在连续变焦模组结构中的电路设置优化，使得走线空间更窄，集成度更高。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组利用压电结构与反射棱镜相结合，利用压电马达的大驱动力以及小尺寸来驱动反射棱镜进行更高精度的防抖功能。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组采的压电马达的驱动力大和尺寸小，压电马达能够代替现有防抖方案中的线圈、磁铁等大尺寸结构，且传统防抖驱动机构常会出现推力不足的情况，使用压电马达能够更好地解决这一问题，有利于提高使得模组的稳定性。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组的电路走线设于壳体底部的内部或者贴附于壳体内部的第二长边侧面的表面上，有效地改善摄像模组的内部空间问题，更好地为驱动元件提供了空间，能够使得模组结构更加小型化，实现模组结构封装紧凑。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组利用压电元件直接地驱动透镜组，进一步减小了元件所需尺寸，实现横向尺寸减小，从而减小了模组的整体体积和尺寸，结构趋于小型化。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组通过在连续变焦模组结构中的电路设置优化，进一步简化组装结构，利于组装，组装结构工序更少，节约成本。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，其中所述潜望式摄像模组的驱动装置直接驱动对焦/聚焦透镜组，减小驱动件元件所需尺寸。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法组，其中所述潜望式摄像模组的主动元件配置邻近于驱动对焦/聚焦透镜组，减小模组尺寸或实现紧凑化封装。
本发明的另一个优势在于提供一摄像模组、光学致动器、感光组件及其制造方法，进一步地简化了所述潜望式摄像模组的组装结构，利于组装，组装结构工序更少，有利于提高生产加工效率。
依本发明的一个方面，能够实现前述目的和其他目的和优势的本发明的一潜望式摄像模组，包括：
一摄像模组主体；
一反射棱镜，其中所述摄像模组主体具有一光轴，所述反射棱镜沿所述摄像模组主体的所述光轴方向被设置于所述摄像模组主体的入光侧，以供所述反射棱镜反射外界光线至所述摄像模组主体；
一棱镜驱动装置，其中所述反射棱镜被可传动地连接于所述棱镜驱动装置，其中所述棱镜驱动装置包括一棱镜驱动轴和一压电驱动器，其中所述压电驱动器和所述棱镜驱动轴相固定地连接，且所述棱镜驱动轴平行于所述摄像模组主体的所述光轴方向，其中所述棱镜驱动轴在所述压电驱动器的驱动作用下沿所述光轴方向直线运动，以改变所述反射棱镜出射光的方向，补偿所述摄像模组主体的光学抖动；以及
至少一透镜驱动装置，其中所述透镜驱动器与所述透镜组相传动地连接，由所述透镜驱动器驱动所述透镜组沿特定方向移动，其中所述透镜驱动装置包括一压电驱动轴和一振动部件，其中所述压电驱动轴与所述摄像模组主体的光轴平行，且所述压电驱动轴的一端被固定，其中所述棱镜驱动装置的所述棱镜驱动轴与所述透镜驱动装置的所述压电驱动轴位于所述壳体内部基准轴X轴正方向的同一侧，均与所述透镜组的光轴相互平行。
根据本发明的一个实施例，进一步包括一棱镜座，其中所述反射棱镜被设置于所述棱镜座，所述棱镜座与所述棱镜驱动装置相传动地连接，由所述棱镜驱动装置驱动所述棱镜座，再由所述棱镜座带动所述反射棱镜同步移动。
根据本发明的一个实施例，所述反射棱镜进一步具有一斜面，所述棱镜座具有一支撑面，其中所述反射棱镜的所述斜面被支撑在所述棱镜座的所述支撑面，并且所述反射棱镜的所述斜面与所述棱镜座的所述支撑面相贴合。
根据本发明的一个实施例，进一步包括一传动装置，其中所述传动装置被可传动地连接于所述棱镜驱动装置和所述棱镜座，其中所述传动装置可被所述棱镜驱动装置驱动，并 由所述传动装置以旋转的方式驱动所述棱镜座。
根据本发明的一个实施例，所述棱镜驱动轴与所述传动装置相垂直连接，所述棱镜驱动轴与所述传动装置呈垂直状态，并且所述传动装置转换所述棱镜驱动轴的直线运动为绕基准轴X轴方向的旋转运动，以改变所述反射棱镜的出射光方向。
根据本发明的一个实施例，所述传动装置进一步包括一轴座和被设置于所述轴座的一传动轴，其中所述轴座被设置于所述棱镜座，所述轴座位于所述棱镜座的所述支撑面和所述反射棱镜的对应面。
根据本发明的一个实施例，所述传动装置的所述传动轴作为导向机构受所述棱镜驱动轴驱动，而转换成驱动所述棱镜座转动作用的驱动作用力，以驱动所述棱镜座绕着垂直于基准轴X轴方向进行旋转运动。
根据本发明的一个实施例，所述压电驱动器包括一压电元件，所述压电元件呈层叠结构，且所述压电元件包括多个压电伸缩体以及多个内部电极，所述内部电极交替叠加多个压电伸缩体而成的多个电极，并且多个压电伸缩体和多个内部电极互相层叠。
根据本发明的一个实施例，所述棱镜驱动装置包括一压电马达和一曲柄滑块机构，其中所述压电马达与所述曲柄滑块机构相传动地连接，其中所述曲柄滑块机构被可传动地连接于所述棱镜座，由所述压电马达通过所述曲柄滑块机构驱动所述棱镜座和所述反射棱镜运动。
根据本发明的一个实施例，所述曲柄滑块机构进一步包括一曲柄、一滑块以及一连接轴，其中所述滑块与所述压电马达相传动地连接，由所述压电马达驱动所述滑块沿光轴方向直线地运动。
根据本发明的一个实施例，所述连接轴与基准轴X轴平行，所述曲柄与所述透镜组的光轴和基准轴Y轴所在的平面平行。
根据本发明的一个实施例，所述棱镜驱动装置进一步包括一导向元件，其中所述导向元件一端与所述滑块相连接，另一端与所述棱镜座相连接，当所述压电马达施加驱动力时，会带动所述滑块进行直线运动，所述曲柄和连接轴也会随之运动，所述连接轴可以使得所述滑块和所述曲柄之间保持相对运动。
根据本发明的一个实施例，所述摄像模组主体包括一透镜组、沿光轴方向设置的图像传感器、以及固定所述透镜组和所述图像传感器的一壳体。
根据本发明的一个实施例，所述摄像模组的电路走线被设置于所述壳体的底部内侧；或者所述摄像模组的电路被贴附于壳体内部的一侧面。
根据本发明的一个实施例，所述摄像模组主体进一步包括至少一透镜驱动装置，其中所述透镜驱动器与所述透镜组相传动地连接，由所述透镜驱动器驱动所述透镜组沿特定方向移动，以调整整个系统的焦距。
根据本发明的一个实施例，所述透镜组进一步包括一第一透镜组、一第二透镜组以及一第三透镜组，其中所述反射棱镜位于所述透镜组的所述第一透镜组物侧一端，其中所述反射棱镜反射的光线经所述第一透镜组到所述第二透镜组，第二透镜组位于所述第一透镜组出光侧，所述第三透镜组位于所述第二透镜组出光侧。
根据本发明的一个实施例，述透镜驱动装置进一步包括一第一透镜驱动单元和一第二 透镜驱动单元，其中所述第一透镜驱动单元与所述第二透镜组件相传动地连接，由所述第一透镜驱动单元驱动所述第二透镜组件沿光轴方向做水平横向移动，以调整整个系统的焦距；所述第二透镜驱动单元与所述第三透镜组件相传动地连接，由所述第二透镜驱动单元驱动所述第三透镜组件沿光轴方向做水平横向移动，以使得摄像模组起到连续变焦的作用。
根据本发明的一个实施例，所述透镜驱动装置包括一压电驱动轴和一振动部件，其中所述压电驱动轴与所述摄像模组主体的光轴平行，且所述压电驱动轴的一端被固定，另一端与所述振动部件通过粘合剂固定相连，从而使得振动部件带动所述压电驱动轴振动。
根据本发明的一个实施例，所述棱镜驱动装置的所述棱镜驱动轴与所述透镜驱动装置的所述压电驱动轴位于所述壳体内部基准轴X轴正方向的同一侧，均与所述透镜组的光轴相互平行。
根据本发明的一个实施例，进一步包括至少一磁传感器，其中所述磁传感器被设置于所述透镜组和所述壳体之间。
本申请的另一优势在于提供了一种摄像模组，其中，所述摄像模组采用新型的MEMS驱动器作为压电元件来驱动感光芯片位移来实现光学防抖。
通过下面的描述，本申请的其它优势和特征将会变得显而易见，并可以通过权利要求书中特别指出的手段和组合得到实现。
为实现上述至少一优势，本申请提供一种感光组件，其包括：
基板，包括：固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少二悬持臂，所述可移动部通过所述至少二悬持臂被悬持地设置于所述固定部内,所述固定部、所述可移动部及所述至少二悬持臂具有一体式结构；
被设置于且电连接于所述可移动部的感光芯片，所述感光芯片设有一感光轴；以及
至少一压电元件，其中，所述至少一压电元件被设置于所述至少二悬持臂的至少其中之一，并被配置为在被导通后通过其自身的形变来作动所述悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片以使得所述感光芯片相对于所述固定部产生一定的倾斜角度，通过这样方式，来进行光学防抖。
在根据本申请的感光组件中，每一所述悬持臂具有相对的第一端和第二端，所述第一端被固定于所述固定部，所述第二端被固定于所述可移动部。
在根据本申请的感光组件中，所述至少二悬持臂包括第一悬持臂和第二悬持臂，所述第一悬持臂和所述第二悬持臂相对于所述可移动部对称地布置。
在根据本申请的感光组件中，所述至少一压电元件包括第一压电元件，其中，所述第一压电元件被设置于所述第一悬持臂，并被配置为在被导通后通过其自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行光学防抖。
在根据本申请的感光组件中，所述至少一压电元件还包括第二压电元件，其中，所述第二压电元件被设置于所述第二悬持臂，并被配置为在被导通后通过其自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行 光学防抖。
在根据本申请的感光组件中，所述第一压电元件和所述第二压电元件相对于所述可移动部对称地布置。
在根据本申请的感光组件中，所述第一压电元件与所述第二压电元件适于以不同的电压进行导通，以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度。
在根据本申请的感光组件中，所述第一悬持臂包括第一悬臂主体和至少部分地贯穿于所述第一悬臂主体的分隔槽，其中，通过所述分割槽所述第一悬臂主体被分为相互可移动的第一悬臂部和第二悬臂部，其中，所述第一压电元件包括被设置于所述第一悬臂部的第一压电区域和被设置于所述第二悬臂部的第二压电区域，所述第一压电区域被配置为在被导通后通过其自身的形变作动于所述第一悬臂部以使得所述第一悬臂部相对于所述第二悬臂部发生翘曲，所述第二压电区域被配置为在被导通后通过其自身的形变作动于所述第二悬臂部以使得所述第二悬臂部相对于所述第一悬臂部发生翘曲。
在根据本申请的感光组件中，所述第一悬持臂具有“回”字型结构。
在根据本申请的感光组件中，所述第一悬臂部具有由所述第一端划分而成的第一悬臂子部和第二悬臂子部，所述第二悬臂部具有由所述第二端划分而成的第三悬臂子部和第四悬臂子部，其中，所述第一压电区域包括被设置于所述第一悬臂子部的所述第一压电片和被设置于所述第二悬臂子部的第二压电片，所述第二压电区域包括被设置于所述第三悬臂子部的所述第三压电片和被设置于所述第四悬臂子部的第四压电片。
在根据本申请的感光组件中，所述第一压电片在所述第一悬臂子部上沿第一方向延伸，所述第二压电片在所述第二悬臂子部上沿第二方向布置，通过这样的配置使得，所述第一压电片和所述第二压电片适于被导通后驱动所述第一悬臂部沿所述感光轴所设定的方向翘曲以产生高度方向上的行程。
在根据本申请的感光组件中，所述至少二悬持臂还包括第三悬持臂和第四悬持臂，其中，所述第一悬持臂和所述第二悬持臂相对于所述可移动部以X轴为对称轴对称地布置，所述第三悬持臂和所述第四悬持臂相对于所述可移动部以Y轴为对称轴对称地布置，所述第一悬持臂与所述第三悬持臂相邻布置、所述第二悬持臂与所述第四悬持臂相邻布置。
在根据本申请的感光组件中，所述至少一压电元件还包括第三压电元件，其中，所述第三压电元件被设置于所述第三悬持臂，并被配置为在被导通后通过自身形变来驱动所述第三悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片，通过这样的方式，来进行v方向的光学防抖。
在根据本申请的感光组件中，所述至少一压电元件还包括第四压电元件，其中，所述第四压电元件被设置于所述第四悬持臂，并被配置为在被导通后通过自身形变来驱动所述第四悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片，通过这样的方式，来进行v方向的光学防抖。
在根据本申请的感光组件中，所述第一压电元件被配置为在被导通后通过其自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片向上或向下移动以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行u方向的光学防抖；所述第二压电元件被配置为在被导通后通过 其自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片向上或向下移动以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行u方向的光学防抖。
在根据本申请的感光组件中，所述第一悬持臂包括沿着X轴方向延伸的第一悬臂段和沿着Y轴方向延伸的第二悬臂段，其中，所述至少一压电元件包括第一压电元件和第二压电元件，所述第一压电元件被设置于所述第一悬持臂的第一悬臂段，所述第二压电元件被设置于所述第一悬持臂的第二悬臂段，其中，所述第一压电元件被配置为在被导通后通过自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行v方向的光学防抖；所述第二压电元件被配置为在被导通后通过自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行u方向的光学防抖。
在根据本申请的感光组件中，所述第二悬持臂包括沿着X轴方向延伸的第三悬臂段和沿着Y轴方向延伸的第四悬臂段，其中，所述至少一压电元件还包括第三压电元件和第四压电元件，其中，所述第三压电元件被设置于所述第二悬持臂的第三悬臂段，所述第四压电元件被设置于所述第二悬持臂的第四悬臂段，其中，所述第三压电元件被配置为在被导通后通过自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行v方向的光学防抖；所述第四压电元件被配置为在被导通后通过自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行u方向的光学防抖。
在根据本申请的感光组件中，所述第一悬持臂具有“L”型结构，和/或，所述第二悬持臂具有“L”型结构。
在根据本申请的感光组件中，所述悬持臂的厚度尺寸范围为0.1mm-0.3mm。
在根据本申请的感光组件中，所述基板具有上表面和与所述上表面相对的下表面，所述基板进一步具有至少部分地贯穿于所述下表面和所述上表面之间的镂空结构，其中，通过所述镂空结构，所述基板形成所述固定部、所述可移动部和延伸于所述固定部和所述可移动部之间的所述至少二悬持臂。
在根据本申请的感光组件中，所述感光组件进一步包括被设置于所述半导体基板的下表面的补强板。
在根据本申请的感光组件中，所述感光组件进一步包括被保持于所述感光芯片的感光路径上的滤光元件。
根据本申请的另一方面，还提供了一种感光组件的制备方法，其包括：
提供一种基板结构，其中，所述基板结构具有预设于其表面的电路；
将至少一压电元件、电连接结构和电子元器件分别贴装于所述基板结构的上表面的预设位置；
对所述基板结构进行蚀刻以形成至少部分地贯穿于所述基板结构的下表面和上表面之间的镂空结构以形成基板，其中，所述基板包括固定部、可移动部和延伸于所述固定部和 所述可移动部之间的至少二悬持臂，所述可移动部通过所述至少二悬持臂被悬持地设置于所述固定部内，其中，所述至少一压电元件被形成于所述至少二悬持臂的至少其中之一；
贴附一补强板于所述半导体结构的下表面；
在所述镂空结构内填充水解胶以预固定所述可移动部；
将感光芯片贴装并电连接于所述可移动部；以及
去除所述水解胶以获得感光组件。
根据本申请的另一方面，还提供了一种摄像模组，其包括：
如上所述的感光组件；以及
被保持于所述感光组件的感光路径上的光学镜头。
本申请的另一优势在于提供了一种摄像模组，其中，所述摄像模组采用新型的MEMS致动器作为驱动元件来驱动感光芯片位移来实现光学对焦。
通过下面的描述，本申请的其它优势和特征将会变得显而易见，并可以通过权利要求书中特别指出的手段和组合得到实现。
为实现上述至少一优势，本申请提供一种感光组件，其包括：
基板，包括：固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少一对悬持臂，所述可移动部通过所述至少一对悬持臂被悬持地设置于所述固定部内，所述至少一对悬持臂相对于所述可移动部对称地布置；
被设置于且电连接于所述可移动部的感光芯片；以及
至少一对压电元件，其中，所述至少一对压电元件的各个压电元件被分别地设置于所述至少一对悬持臂的各个悬持臂，并被配置为在被导通后通过其自身的形变来作动所述至少一对悬持臂以从所述可移动部相对的第一侧和第二侧产生相同高度的翘曲，以使得所述感光芯片的感光面相对于所述固定部产生沿高度方向的行程，通过这样的方式来进行光学对焦。
在根据本申请的感光组件中，每个所述悬持臂具有相对的第一端和第二端，所述第一端被固定于所述固定部，所述第二端被固定于所述可移动部。
在根据本申请的感光组件中，所述至少一对悬持臂包括第一悬持臂和第二悬持臂，所述第一悬持臂和所述第二悬持臂相对于所述可移动部对称地设置；所述至少一对压电元件包括第一压电元件和第二压电元件，其中，所述第一压电元件被设置于所述第一悬持臂，所述第二压电元件被设置于所述第二悬持臂。
在根据本申请的感光组件中，所述第一压电元件被配置为在被导通后通过其自身形变来作动所述第一悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第一侧带动所述可移动部和所述感光芯片，所述第二压电元件被配置为在被导通后通过其自身形变来作动所述第二悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第二侧带动所述可移动部和所述感光芯片，其中，所述第一压电元件从所述可移动部的第一侧带动所述感光芯片上升或下降的高度等于所述第二压电元件从所述可移动部的第二侧带动所述感光芯片上升或下降的高度，通过这样的方式，使得所述感光芯片的感光面相对于所述固定部产生沿高度方向的行程以进行光学对焦。
在根据本申请的感光组件中，所述第一悬持臂包括第一悬臂主体和至少部分地贯穿于所述第一悬臂主体的第一分隔槽，其中，通过所述第一分隔槽，所述第一悬臂主体被分为相互可移动的第一悬臂部和第二悬臂部，所述第一悬臂部具有由所述第一端划分而成的第一悬臂子部和第二悬臂子部，所述第二悬臂部具有由所述第二端划分而成的第三悬臂子部和第四悬臂子部，其中，所述第一压电元件包括被设置于所述第一悬臂子部的所述第一压电片、被设置于所述第二悬臂子部的第二压电片、被设置于所述第三悬臂子部的所述第三压电片和被设置于所述第四悬臂子部的第四压电片。
在根据本申请的感光组件中，所述第二悬持臂包括第二悬臂主体和至少部分地贯穿于所述第二悬臂主体的第二分隔槽，其中，通过所述第二分隔槽所述第二悬臂主体被分为相互可移动的第三悬臂部和第四悬臂部，所述第三悬臂部具有由所述第一端划分而成的第五悬臂子部和第六悬臂子部，所述第四悬臂部具有由所述第二端划分而成的第七悬臂子部和第八悬臂子部，其中，所述第二压电元件包括被设置于所述第五悬臂子部的所述第五压电片、被设置于所述第六悬臂子部的第六压电片、被设置于所述第七悬臂子部的所述第七压电片和被设置于所述第八悬臂子部的第八压电片。
在根据本申请的感光组件中，所述第一悬持臂包括第一悬臂主体和至少部分地贯穿于所述第一悬臂主体的第一分隔槽和第二分隔槽，其中，通过所述第一分隔槽和所述第二分隔槽所述第一悬臂主体被分为相互之间可移动的第一悬臂部、第二悬臂部和第三悬臂部，所述第一悬臂部具有由所述第一分割槽划分而成的第一悬臂子部和第二悬臂子部，所述第二悬臂部具有由所述第一分隔槽划分而成的第三悬臂子部和第四悬臂子部，所述第三悬臂部具有由所述第一分隔槽和所述第二分隔槽划分而成的第五悬臂子部和第六悬臂子部，其中，所述第一压电元件包括被设置于所述第一悬臂子部的所述第一压电片、被设置于所述第二悬臂子部的第二压电片、被设置于所述第三悬臂子部的所述第三压电片和被设置于所述第四悬臂子部的第四压电片、被设置于第五悬臂子部的第五压电片和被设置于所述第六悬臂子部的第六压电片。
在根据本申请的感光组件中，所述第一分隔槽具有十字型。
在根据本申请的感光组件中，所述第二悬持臂包括第二悬臂主体和至少部分地贯穿于所述第二悬臂主体的第三分隔槽和第四分隔槽，其中，通过所述第三分隔槽和所述第四分隔槽所述第二悬臂主体被分为相互可移动的第四悬臂部、第五悬臂部和第六悬臂部，所述第四悬臂部具有由所述第三分隔槽划分而成的第七悬臂子部和第八悬臂子部，所述第五悬臂部具有由所述第三分隔槽划分而成的第九悬臂子部和第十悬臂子部、所述第六悬臂部具有由所述第三分隔槽和所述第四分隔槽划分而成的第十一悬臂子部和第十二悬臂子部，其中，所述第二压电元件包括被设置于所述第七悬臂子部的所述第七压电片、被设置于所述第八悬臂子部的第八压电片、被设置于所述第九悬臂子部的所述第九压电片、被设置于所述第十悬臂子部的第十压电片、被设置于所述第十一悬臂子部的所述第十一压电片和被设置于所述第十二悬臂子部的第十二压电片。
在根据本申请的感光组件中，所述第三分隔槽具有十字型。
在根据本申请的感光组件中，所述至少一对悬持臂还包括第三悬持臂和第四悬持臂，其中，所述第一悬持臂和所述第二悬持臂相对于所述可移动部以X轴为对称轴对称地布置， 所述第三悬持臂和所述第四悬持臂相对于所述可移动部以Y轴为对称轴对称地布置。
在根据本申请的感光组件中，所述至少一对压电元件进一步包括第三压电元件和第四压电元件，其中，所述第三压电元件被设置于所述第三悬持臂，所述第四压电元件被设置于所述第四悬持臂；其中，所述第三压电元件和所述第四压电元件被配置为在被导通后通过其自身的形变来分别作动所述第三悬持臂和所述第四悬持臂以从所述可移动部相对的第三侧和第四侧同时抬高或降低所述可移动部以使得所述感光芯片的感光面被抬高或降低，通过这样的方式来进行光学对焦。
在根据本申请的感光组件中，所述第三压电元件被配置为在被导通后通过其自身形变来作动所述第三悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第三侧带动所述可移动部和所述感光芯片，所述第二压电元件被配置为在被导通后通过其自身形变来作动所述第四悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第四侧带动所述可移动部和所述感光芯片，其中，所述第三压电元件从所述可移动部的第三侧带动所述感光芯片上升或下降的高度等于所述第四压电元件从所述可移动部的第四侧带动所述感光芯片上升或下降的高度，通过这样的方式，来进行光学对焦。
在根据本申请的感光组件中，所述第一悬持臂包括沿着X轴方向延伸的第一悬臂段和沿着Y轴方向延伸的第二悬臂段，所述第二悬持臂包括沿着X轴方向延伸的第三悬臂段和沿着Y轴方向延伸的第四悬臂段，其中，所述至少一对压电元件包括第一压电元件和第二压电元件，所述第一压电元件被设置于所述第一悬持臂的第一悬臂段，所述第二压电元件被设置于所述第二悬持臂的第三悬臂段，其中，所述第一压电元件被配置为在被导通后通过自身形变来作动所述第一悬持臂以从所述可移动部的第一侧带动所述可移动部和所述感光芯片，所述第二压电元件被配置为在被导通后通过自身形变来作动所述第二悬持臂以从所述可移动部的第二侧带动所述可移动部和所述感光芯片，其中，所述第一压电元件从所述可移动部的第一侧带动所述感光芯片上升或下降的高度等于所述第二压电元件从所述可移动部的第二侧带动所述感光芯片上升或下降的高度，通过这样的方式，来进行光学对焦。
在根据本申请的感光组件中，所述至少一对压电元件还包括第三压电元件和第四压电元件，所述第三压电元件被设置于所述第一悬持臂的第二悬臂段，所述第四压电元件被设置于所述第二悬持臂的第四悬臂段；其中，所述第三压电元件被配置为在被导通后通过自身形变来作动所述第一悬持臂以从所述可移动部的第一侧带动所述可移动部和所述感光芯片；所述第四压电元件被配置为在被导通后通过自身形变来作动所述第二悬持臂以从所述可移动部的与所述第一侧相对的第二侧来带动所述可移动部和所述感光芯片，其中，所述第三压电元件从所述可移动部的第一侧带动所述感光芯片上升或下降的高度等于所述第四压电元件从所述可移动部的第二侧带动所述感光芯片上升或下降的高度，通过这样的方式，使得所述感光芯片的感光面相对于所述固定部产生沿高度方向的行程以进行光学对焦。
在根据本申请的感光组件中，所述第一悬臂梁具有“L”型结构，和/或，所述第二悬持臂具有“L”型结构。
在根据本申请的感光组件中，所述悬臂梁的厚度尺寸范围为0.1mm-0.3mm。
在根据本申请的感光组件中，所述基板具有上表面和与所述上表面相对的下表面，所 述基板进一步具有至少部分地贯穿于所述下表面和所述上表面之间的镂空结构，其中，通过所述镂空结构，所述基板形成所述固定部、所述可移动部和延伸于所述固定部和所述可移动部之间的所述至少一对悬持臂。
在根据本申请的感光组件中，所述固定部、所述可移动部和所述至少一对悬持臂具有一体式结构。
在根据本申请的感光组件中，所述感光组件进一步包括被设置于所述基板的下表面的补强板。
在根据本申请的感光组件中，所述感光组件进一步包括被保持于所述感光芯片的感光路径上的滤光元件。
根据本申请的另一方面，还提供了一种摄像模组，其包括：
如上所述的感光组件；以及
被保持于所述感光组件的感光路径上的光学镜头。
本发明的一个目的，克服现有技术的不足，提供一种占用空间小、驱动力大的压电光学致动器及相应摄像模组的解决方案。
为解决上述技术问题，本发明提供了一种光学致动器，其包括：外壳；镜头载体，其内侧面适于安装镜头或者透镜组，其外侧面具有至少两个互相平行的平面状承靠面(这两个承靠面分别设置在镜头载体的两侧)；外框架，其安装在所述镜头载体与所述外壳之间，所述外框架包括至少两个互相平行的第一侧壁，每个所述第一侧壁与一个所述的承靠面相对设置；以及至少两个压电驱动装置，每个所述压电驱动装置设置在一个所述的承靠面与所述外框架的与所述承靠面相对的一个第一侧壁之间。其中，每个所述压电驱动装置包括一线状压电元件、动子、摩擦部和激励源；所述线状压电元件的长度方向与所述镜头或所述透镜组的光轴方向一致，并且所述线状压电元件包括至少三个沿着其厚度方向极化的极化区域段，所述极化区域段为第一极化区域段或第二极化区域段，所述第一极化区域段和所述第二极化区域段的极化方向相反，且所述第一极化区域段和所述第二极化区域段沿着所述线状压电元件的长度方向交替设置；所述动子固定于所述承靠面，所述摩擦部安装于所述线状压电元件的朝内侧的表面与所述动子之间；并且在初始状态下所述摩擦部的两端分别被所述线状压电元件和所述动子挤压，在向所述线状压电元件输入驱动信号时所述线状压电元件的表面发生形变，以驱动所述动子在所述光轴的方向上移动。
其中，所述驱动信号包括施加于所述第一极化区域段的第一驱动电压和施加于所述第二极化区域段的第二驱动电压，所述第一驱动电压和所述第二驱动电压的相位差为π/2或-π/2。
其中，所述摩擦部具有多个，并且所述摩擦部沿着所述线状压电元件的长度方向均匀地布置在所述线状压电元件的内侧表面。
其中，所述镜头载体与所述外框架通过弹性元件连接，以在所述镜头载体与所述外框架之间形成预紧力。
其中，所述镜头载体与所述外框架分别设置磁石和线圈，以在所述镜头载体与所述外框架之间形成预紧力。
其中，所述线状压电元件的外侧表面与所述外框架之间设置弹性层，所述弹性层受挤 压而产生应力，将所述线状压电元件和所述摩擦部压紧在所述动子表面。
其中，每个所述第一极化区域段和每个所述第二极化区域段的内侧表面均设置一个所述的摩擦部。
其中，所述镜头载体为镜筒，所述镜筒的外侧面呈矩形。
其中，所述镜头载体为镜筒，所述镜筒的外侧面呈切割圆状。
其中，所述镜头载体为内框架，所述内框架安装于镜筒的外侧面，所述内框架具有至少两个相对设置且互相平行的平板状第二侧壁。
其中，所述线状压电元件的长度小于20mm，宽度小于1mm，所述线状压电元件本身的厚度与所述摩擦部的厚度之和小于1.5mm。
其中，所述线状压电元件的长度小于10mm，宽度小于0.7mm，所述线状压电元件本身的厚度与所述摩擦部的厚度之和小于1mm。
其中，所述压电驱动装置还包括摩擦层，所述摩擦层设置在所述线状压电元件的内侧表面，所述摩擦部设置在所述摩擦层上。
其中，所述线状压电元件的长度大于所述摩擦层的长度。
其中，所述压电驱动装置还包括摩擦层，所述摩擦层设置在所述动子的外侧表面，或者所述动子的制作材料是摩擦材料。
其中，所述弹性层的厚度为10-50μm。
其中，所述线状压电元件的两端设置由非压电材料制作的固定部，并且所述固定部与所述外框架固定在一起；所述线状压电元件的背面与所述外框架之间具有间隙。
根据本申请的另一方面，还提供了一种摄像模组，其包括：镜头或透镜组；感光组件；以及前述光学致动器；所述镜头或透镜组安装于所述光学致动器的所述镜头载体的内侧面；所述光学致动器安装于感光组件的顶面。
与现有技术相比，本申请具有下列至少一个技术效果：
1、本申请的一些实施例中，将镜筒的外侧面设计成矩形，在镜筒和致动器壳体之间设置外框架，将线状压电元件及动子设置在外框架与镜筒之间，动子承靠于镜筒的外侧面，线状压电元件的背面承靠于外框架，在外框架与镜筒之间施加使二者互相接近的预紧力，从而使得线状压电元件和动子耦合，达到以线状压电元件的表面波动(例如行波形式的波动)来驱动镜筒相对于致动器壳体沿着光轴方向运动。这种设计具有占用空间小、驱动力大的优势，尤其是在垂直于光轴的方向上，压电驱动装置的占用空间较小。
2、本申请的一些实施例中，压电驱动装置可以对称地设置在镜筒两侧，相比仅单侧设置压电驱动装置，这种设计可以使得光轴致动器的载体的轴向移动更加平衡。
3、本申请的一些实施例中，可以在线状压电元件的背面与外框架之间设置弹性层，进而通过该弹性层来将线状压电元件及其摩擦部压紧在动子上，从而以极小的占用空间实现行波式压电驱动装置所需的预紧力。
4、本申请的一些实施例中，所述外框架的用于承靠压电驱动装置的侧壁可以采用金属制作，所述侧壁可以具有平整的内表面，从而为线状压电元件的背面提供平整的承靠面，以保证线状压电元件的表面波动具有更高的精度。
本发明的目的在于，克服现有技术的不足，提供一种驱动力大、占用体积小且可靠性 高的无电磁串扰的光学致动器及相应摄像模组的解决方案。
为解决上述技术问题，本发明提供了一种光学致动器，其包括：外壳；载体，其适于安装镜头、透镜组或者感光组件；悬持部，其用于将所述载体与所述外壳活动连接；悬臂梁，其包括条形基板和附着于所述条形基板表面的压电层，所述悬臂梁的一端固定于所述外壳，其另一端为自由端，并且所述悬臂梁设置在所述外壳与所述载体之间的间隙。其中，所述压电层的长度方向与所述条形基板的长度方向一致，并且所述压电层适于在被施加驱动电压时沿着其长度方向伸展或收缩以使所述悬臂梁弯曲，进而促使所述自由端在垂直于所述压电层表面的方向上发生位移，并通过所述自由端的位移推动所述载体移动。
其中，在俯视角度下，所述外壳呈矩形，所述悬臂梁设置于所述外壳的至少一个侧面。
其中，在俯视角度下，所述外壳呈矩形，所述悬臂梁设置于所述外壳的至少两个相交的侧面。
其中，至少两个所述的悬臂梁对称地设置于所述外壳的同一个侧面，并且所述悬臂梁通过固定部安装于所述外壳，并且设置于所述外壳的同一个侧面的至少两个所述的悬臂梁共用同一个所述的固定部。
其中，在俯视角度下，所述固定部位于其所对应的所述外壳的侧面的中间位置。
其中，在俯视角度下，所述载体的外轮廓呈矩形。
其中，所述载体的外侧面包括至少一个与所述的悬臂梁适配的平面，所述平面适于在所述悬臂梁向内弯曲时与所述自由端接触，并且所述载体适于在所述自由端的推动下随着所述自由端位移，其中向内弯曲是所述悬臂梁的自由端自所述外壳向所述载体移动的方向。
其中，所述压电层包括第一压电层和第二压电层，所述第一压电层和所述第二压电层分别附着于所述条形基板的内表面和外表面。
其中，所述光学致动器还包括驱动单元，所述驱动单元用于对所述第一压电层和所述第二压电层施加驱动电压，使得所述第一压电层在其长度方向上收缩，且所述第二压电层在其长度方向上伸展，从而使所述悬臂梁向内侧弯曲。
其中，所述压电层包括第一压电层和第二压电层，所述第一压电层和所述第二压电层分别附着于所述条形基板的内表面和外表面；所述光学致动器还包括驱动单元，所述驱动单元用于对所述第一压电层和所述第二压电层施加驱动电压，使得所述第一压电层在其长度方向上收缩，且所述第二压电层在其长度方向上伸展，从而使所述悬臂梁向内侧弯曲；以及所述驱动单元还用于使设置于所述外壳的同一个侧面的至少两个所述的悬臂梁同时向内侧弯曲，以推动所述载体移动。
其中，所述压电层设置于所述条形基板的内表面或外表面，所述光学致动器还包括驱动单元，所述驱动单元用于对位于所述条形基板单侧的所述压电层施加驱动电压以使所述悬臂梁弯曲，并由所述悬臂梁的所述自由端推动所述载体移动。
其中，所述悬持部为弹片，所述弹片设置在所述外壳的四角位置，并且所述弹片的两端分别连接所述外壳和所述载体。
其中，在未施加驱动电压时，所述悬臂梁的所述自由端与所述载体之间具有间隙；在施加驱动电压时，所述压电层沿其长度方向伸缩以使所述悬臂梁弯曲，所述悬臂梁的弯曲使其所述自由端抵靠并推动所述载体移动。
其中，所述条形基板为金属片，所述压电层的厚度是所述金属片的厚度的50％-80％。
其中，所述条形基板为金属片，所述压电层包括第一压电层和第二压电层，所述第一压电层和所述第二压电层分别附接于所述金属片的内表面和外表面；所述第一压电层的厚度是所述金属片的厚度的50％-80％；所述第二压电层的厚度是所述金属片的厚度的50％-80％。
其中，所述第一压电层和所述第二压电层的厚度相等。
其中，所述金属片的厚度为50-300μm。
其中，所述悬臂梁包括x轴移动悬臂梁和y轴移动悬臂梁，所述x轴移动悬臂梁布置在所述外壳的垂直于所述x轴的侧面，所述x轴移动悬臂梁的长度方向平行于y轴；所述y轴移动悬臂梁布置在所述外壳的垂直于所述y轴的侧面，所述y轴移动悬臂梁的长度方向平行于x轴；其中，所述x轴和所述y轴是基准面上的两个相互垂直的坐标轴；所述基准面垂直于所述镜头或所述透镜组的光轴，或者所述基准面平行于所述感光组件的感光面。
其中，两个所述的x轴悬臂梁对称地设置于所述外壳的垂直于所述x轴的侧面，并且两个所述的x轴悬臂梁共用同一个固定部并且通过所述固定部安装于所述外壳；两个所述的y轴悬臂梁对称地设置于所述外壳的垂直于所述y轴的侧面，并且两个所述的y轴悬臂梁共用同一个固定部并且通过所述固定部安装于所述外壳。所述光学致动器还包括驱动单元，所述驱动单元用于对所述压电层施加驱动电压以使位于同一侧面的两个所述的x轴悬臂梁均向内弯曲，并由这两个所述的x轴悬臂梁的所述自由端推动所述载体沿所述x轴平移；所述驱动单元还用于对所述压电层施加驱动电压以使位于同一侧面的两个所述的y轴悬臂梁均向内弯曲，并由这两个所述的y轴悬臂梁的所述自由端推动所述载体沿所述y轴平移。
其中，所述驱动单元还用于对所述压电层施加驱动电压，以使共用同一所述固定部的两个所述的x轴悬臂梁分别向内和向外弯曲，以及使共用同一所述固定部的两个所述的y轴悬臂梁分别向内和向外弯曲，从而使所述载体绕z轴旋转；其中所述z轴平行于所述光轴。
其中，所述悬臂梁包括x轴移动悬臂梁和y轴移动悬臂梁，所述x轴移动悬臂梁布置在所述外壳的垂直于所述x轴的侧面，所述x轴移动悬臂梁的长度方向平行于z轴；所述y轴移动悬臂梁布置在所述外壳的垂直于所述y轴的侧面，所述y轴移动悬臂梁的长度方向平行于z轴；其中，所述x轴和所述y轴为垂直于所述光学致动器的光轴的坐标轴，且所述x轴和所述y轴互相垂直，所述z轴平行于所述光轴。
其中，所述悬臂梁设置于所述载体顶面与所述外壳之间的间隙，和/或设置于所述载体底面与所述外壳之间的间隙；在俯视角度下，所述悬臂梁位于所述载体的边缘区域，所述悬臂梁的所述压电层的表面平行于所述载体的顶面或底面。
其中，所述悬臂梁设置于所述载体外侧面与所述外壳的内侧面之间的间隙，在所述外壳的同一个内侧面的中心设置固定部；在侧视角度下，四个所述悬臂梁自所述固定部向不同方位延伸，形成“X”型的悬臂梁组。
其中，所述悬臂梁设置于所述载体外侧面与所述外壳的内侧面之间的间隙；在侧视角度下，所述悬臂梁的长度方向被配置成相对于基准面呈倾斜状态。
根据本申请的另一方面，还提供了一种摄像模组，其包括：前文中任一项方案所述的 光学致动器；光学镜头；以及感光组件。其中，所述光学镜头和/或所述感光组件安装于所述光学致动器的所述载体。
与现有技术相比，本申请具有下列至少一个技术效果：
1、本申请通过在载体和外壳之间设置由金属片及其上附着的压电层构成的悬臂梁，以压电层长度方向的伸缩来驱动金属片弯曲，进而实现悬臂梁自由端的由外向内的移动，达到驱动载体移动的效果。相比直接驱动压电层在其厚度方向进行伸缩，这种利用其长度方向伸缩并结合金属片可弯曲特性的驱动方式，可以提供更大的驱动力和防抖移动行程。
2、本申请可以避免使用摩擦件，既具有压电马达占用体积小、驱动力大的优势，又可以避免摩擦件的损耗，具备高可靠性。
3、本申请的光学致动器尤其适合用于实现摄像模组的防抖功能。
4、本申请可以避免电磁干扰。
5、本申请的一些实施例中，可以在外壳的同一侧对称地设置两个悬臂梁，这种设计可以使悬臂梁在驱动载体移动时具有更好地平衡性。
6、本申请的一些实施例中，可以在外壳的同一侧对称地设置两个悬臂梁，通过对固定部两侧的两个悬臂梁施加不同种类的驱动电压组合，可以使得两个悬臂梁都向内弯曲以实现对载体的x轴或y轴平移的驱动，也可以使得两个悬臂梁分别向内和向外弯曲，以实现对绕z轴旋转的驱动。这种设计可以以较小的空间代价实现三轴移动的移动自由度。
7、本申请的一些实施例中，可以将外壳同一侧的对称的两个悬臂梁设置成竖直状态，即这两个悬臂梁的长度方向与z轴平行，当对这两个悬臂梁施加不同种类的驱动电压组合时，可以使得两个悬臂梁都向内弯曲以实现对载体的x轴或y轴平移的驱动，也可以使得两个悬臂梁分别向内和向外弯曲，以实现对绕x轴或绕y轴旋转(即tilt调整)的驱动。这种设计可以以较小的空间代价实现四轴移动的移动自由度。
附图说明
图1是根据本发明的第一较佳实施例的一潜望式摄像模组的整体示意图。
图2是根据本发明上述第一较佳实施例的所述潜望式摄像模组的摄像模组主体的示意图。
图3是根据本发明上述第一较佳实施例的所述潜望式摄像模组的一反射棱镜结构的示意图。
图4是根据本发明上述第一较佳实施例的所述潜望式摄像模组的一振动部件的结构示意图。
图5是根据本发明上述第一较佳实施例的所述潜望式摄像模组的一反射棱镜的另一驱动结构的可选实施方式的示意图。
图6是根据本发明上述第一较佳实施例的所述潜望式摄像模组的所述驱动结构的立体示意图。
图7图示了根据本申请实施例的摄像模组的示意图。
图8图示了根据本申请实施例的所述摄像模组的感光组件的示意图。
图9A图示了根据本申请实施例的所述感光组件的基板和至少一压电元件的示意图。
图9B图示了根据本申请实施例的所述感光组件的基板和至少一压电元件的另一示意 图。
图10图示了根据本申请实施例的所述感光组件的基板和至少一压电元件的俯视示意图。
图11图示了根据本申请实施例的所述基板的悬持臂被移动的示意图。
图12A图示了根据本申请实施例的所述基板和所述至少一压电元件的运动的示意图之一。
图12B图示了根据本申请实施例的所述基板和所述至少一压电元件的运动的示意图之二。
图12C图示了根据本申请实施例的所述基板和所述至少一压电元件的运动的示意图之三。
图12D图示了根据本申请实施例的所述基板和所述至少一压电元件的运动的示意图之四。
图12E图示了根据本申请实施例的所述基板和所述至少一压电元件的运动的示意图之五。
图12F图示了根据本申请实施例的所述基板和所述至少一压电元件的运动的示意图之六。
图13图示了根据本申请实施例的所述基板的一个变形实施的示意图。
图14图示了根据本申请实施例的所述基板的另一个变形实施的示意图。
图15图示了根据本申请实施例的所述摄像模组的一个变形实施的示意图。
图16图示了根据本申请实施例的所述摄像模组的另一个变形实施的示意图。
图17图示了根据本申请实施例的摄像模组的示意图。
图18图示了根据本申请实施例的所述摄像模组的感光组件的示意图。
图19A图示了根据本申请实施例的所述感光组件的基板和至少一对压电元件的示意图。
图19B图示了根据本申请实施例的所述感光组件的所述基板和所述至少一对压电元件的另一示意图。
图20图示了根据本申请实施例的所述感光组件的所述基板和所述至少一对压电元件的俯视示意图。
图21图示了根据本申请实施例的所述基板的悬持臂被作动的示意图。
图22A图示了根据本申请实施例的所述半导体基板和所述至少一压电元件的运动的示意图之一。
图22B图示了根据本申请实施例的所述半导体基板和所述至少一压电元件的运动的示意图之二。
图23图示了根据本申请实施例的所述悬持臂的一个变形实施的示意图。
图24图示了根据本申请实施例的所述基板的另一个变形实施的示意图。
图25图示了根据本申请实施例的所述基板的又一个变形实施的示意图。
图26示出了本申请一个实施例的摄像模组的纵向剖面示意图。
图27示出了本申请一个实施例的摄像模组的俯视示意图。
图28示出了本申请一个实施例中的线状压电驱动装置。
图29示出了本申请一个实施例中的动子的移动方向。
图30a示出了本申请一个实施例中线状压电元件表面波动时的动子、摩擦部和线状压电元件的作用关系的示意图。
图30b示出了第二状态下的动子、摩擦部和线状压电元件的作用关系的示意图。
图31示出了线状压电元件的表面的一个质点的微幅椭圆运动的运动方向。
图32示出了本申请另一个实施例中的线状压电驱动装置。
图33示出了本申请一个实施例中的线状压电装置与外框架的结构及连接关系示意图。
图34示出了本申请另一个实施例中的线状压电装置与外框架的结构及连接关系示意图。
图35示出了本申请一个实施例中的光学致动器的俯视示意图。
图36示出了本申请另一个实施例中的光学致动器的俯视示意图。
图37示出了图36中的其中一个子框架的立体示意图。
图38示出了本申请一个变形的实施例的光学致动器的俯视示意图。
图39示出了本申请另一个变形的实施例的光学致动器的俯视示意图。
图40示出了本申请又一个变形的实施例的光学致动器的俯视示意图。
图41示出了本申请一个变形的实施例中的压电驱动装置的结构示意图。
图42示出了本申请一个实施例的具有镜头防抖功能的摄像模组的纵剖面示意图。
图43示出了图42实施例中的用于镜头防抖的光学致动器的俯视示意图。
图44示出了本申请一个实施例中y轴移动悬臂梁向内弯曲进而推动镜头载体移动的示意图。
图45a示出了悬臂梁的侧视结构示意图。
图45b示出了悬臂梁的弯曲及自由端位移的示意图。
图45c示出了悬臂梁的俯视示意图。
图45d示出了仅单侧表面具有压电层悬臂梁的示意图。
图46示出了本申请一个实施例中悬臂梁驱动镜头载体绕z轴旋转的示意图。
图47示出了本申请的另一个实施例中光学致动器的俯视示意图。
图48示出了本申请一个变形的实施例的光学致动器的俯视示意图。
图49示出了本申请另一个实施例中的具有芯片防抖功能的摄像模组的纵剖面示意图；
图50示出了图49的摄像模组的光学致动器的俯视示意图。
图51示出了本申请一个实施例的单个侧面具有多个悬臂梁的光学致动器的侧视示意图。
图52示出了本申请的一个实施例中的具有tilt调整功能的光学致动器的侧视示意图。
图53示出了本申请的一个实施例中的具有tilt调整功能的光学致动器的俯视示意图。
图54示出了本申请的另一个实施例中的具有tilt调整功能的光学致动器的侧视示意图。
图55示出了本申请的另一个实施例中的具有tilt调整功能的光学致动器的俯视示意图。
具体实施方式
以下描述用于揭露本发明以使本领域技术人员能够实现本发明。以下描述中的优选实施例只作为举例，本领域技术人员可以想到其他显而易见的变型。在以下描述中界定的本 发明的基本原理可以应用于其他实施方案、变形方案、改进方案、等同方案以及没有背离本发明的精神和范围的其他技术方案。
本领域技术人员应理解的是，在本发明的揭露中，术语“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系是基于附图所示的方位或位置关系，其仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此上述术语不能理解为对本发明的限制。
可以理解的是，术语“一”应理解为“至少一”或“一个或多个”，即在一个实施例中，一个元件的数量可以为一个，而在另外的实施例中，该元件的数量可以为多个，术语“一”不能理解为对数量的限制。
参照本发明说明书附图之图1至图4所示，依照本发明第一较佳实施例的一潜望式摄像模组在接下来的描述中被阐明。所述潜望式摄像模组包括一摄像模组主体10、一反射棱镜20，以及一棱镜驱动装置30，其中所述反射棱镜20被可传动地连接于所述棱镜驱动装置30，由所述棱镜驱动装置30驱动所述反射棱镜20运动。所述摄像模组主体10具有一光轴O，所述反射棱镜20沿所述摄像模组主体10的所述光轴O方向被设置于所述摄像模组主体10的入光侧。所述反射棱镜20具有一入光口201、一出光口202以及一光反射面203，其中所述反射棱镜20的所述出光口202正对于所述摄像模组主体10，光线经所述反射棱镜20的所述入光口201入射至所述光反射面203，被所述光反射面203反射后经所述出光口202出射至所述摄像模组主体10。
值得一提的是，在本发明的该优选实施例中，外界光线经所述反射棱镜20反射至所述摄像模组主体10，由所述摄像模组主体10对所述反射棱镜20反射进入的光线成像。
所述棱镜驱动装置30驱动所述反射棱镜20运动，其中所述反射棱镜20在所述摄像模组主体10的入光侧被所述棱镜驱动装置30驱动以旋转运动的方式运动，从而改变所述反射棱镜20反射出光线的方向，进而改变所述摄像模组主体10的成像效果。值得一提的是，当摄像模组拍摄时发生抖动时，所述摄像模组主体10因抖动而导致成像效果不佳。因此，所述摄像模组主体10发生抖动时，基于抖动补偿原理，所述棱镜驱动装置30驱动所述反射棱镜20沿特定的方向转动，从而改变外界光线入射到所述摄像模组主体10的入射角度，以弥补由于抖动造成所述摄像模组主体10成像效果，实现所述潜望式摄像模组的防抖效果。
如图3所示，所述潜望式摄像模组进一步包括一棱镜座40，其中所述反射棱镜20被设置于所述棱镜座40，所述棱镜座40与所述棱镜驱动装置30相传动地连接，由所述棱镜驱动装置30驱动所述棱镜座40，再由所述棱镜座40带动所述反射棱镜20同步移动。优选地，在本发明的该优选实施例中，所述反射棱镜20被固定于所述棱镜座40，以使得所述反射棱镜20随所述棱镜座40被所述棱镜驱动装置30驱动而转动。
所述反射棱镜20进一步具有一斜面204，所述棱镜座40具有一支撑面401，其中所述反射棱镜20的所述斜面204被支撑在所述棱镜座40的所述支撑面401。优选地，在本发明的该优选实施例中，所述反射棱镜20的所述斜面204与所述棱镜座40的所述支撑面401相贴合。与所述反射棱镜20的所述斜面204斜边相邻的两个互相平行的三角形面与棱镜座40的两侧面相贴合，具有对反射棱镜20的支撑以及定位作用。
所述潜望式摄像模组进一步包括一传动装置50，其中所述传动装置50被可传动地连接于所述棱镜驱动装置30和所述棱镜座40，其中所述传动装置50可被所述棱镜驱动装置30驱动，并由所述传动装置50以旋转的方式驱动所述棱镜座40。
所述棱镜驱动装置30包括一棱镜驱动轴31和一压电驱动器32，其中所述压电驱动器32和所述棱镜驱动轴31相固定地连接，由所述压电驱动器32驱动所述棱镜驱动轴31。优选地，所述棱镜驱动轴31平行于所述摄像模组主体10的所述光轴O方向，其中所述棱镜驱动轴31在所述压电驱动器32的驱动作用下沿所述光轴O方向直线运动。更优选地，所述棱镜驱动轴31与所述传动装置50相垂直连接，即所述棱镜驱动轴31与所述传动装置50呈垂直状态。所述棱镜驱动轴31在所述压电驱动器32的驱动作用下沿光轴O方向直线运动。所述传动装置50转换所述棱镜驱动轴31的直线运动为绕所述光轴O方向的旋转运动。从而改变所述反射棱镜20的出射光方向，以实现所述潜望式摄像模组的光学防抖效果。
详细地说，所述传动装置50进一步包括一轴座51和被设置于所述轴座51的一传动轴52，其中所述轴座51被设置于所述棱镜座40，所述轴座51位于所述棱镜座40的所述支撑面401和所述反射棱镜20的对应面。所述传动轴52与所述摄像模组主体10的所述光轴O方向垂直，并且所述传动轴52的一端位于所述轴座51内部的轴孔，所述传动轴52的另一端自所述轴座51的所述轴孔向外延伸出，并与棱镜驱动轴31垂直连接。所述棱镜驱动轴与所述摄像模组主体10的所述光轴O相平行。在本发明的一优选实施例中，所述传动轴52与所述棱镜驱动轴31之间有一连接件使二者固定相连，该连接件在图示中并未示出。
优选地，所述棱镜驱动轴31的另一端与所述压电驱动器32通过粘合剂固定相连。
所述传动装置50的所述传动轴52作为导向机构受所述棱镜驱动轴31驱动，而转换成驱动所述棱镜座40转动作用的驱动作用力，以驱动所述棱镜座40绕着垂直于所述光轴O方向进行旋转运动，改变反射棱镜20出射光方向，实现光学防抖效果。
设所述潜望式摄像模组具有一垂直于所述摄像模组主体10光轴O(Z轴)的基准轴(Y轴)，所述基准轴(Y轴)与所述光轴O共面设置，且所述基准轴(Y轴)与所述光轴O所在的平面垂直于所述反射面，所述摄像模组还具有一垂直于所述透镜组10光轴(Z轴)的基准轴(X轴)，所述基准轴(X轴)与所述光轴O共面设置，且所述基准轴(X轴)与所述光轴O所在的平面平行于所述反射面。值得一提的是，在本发明的该优选实施例中，所述传动轴51作为导向机构将直线运动转变成旋转运动，使得所述棱镜座40与所述反射棱镜20获得一定的倾斜角度，进而使得所述反射棱镜20绕着基准轴(X轴)进行旋转运动，改变反射棱镜20出射光的方向，实现光学防抖的效果。
如图4所示，在本发明的该优选实施例中，所述棱镜驱动装置30的所述压电驱动器32被实施为一压电装置，其中所述棱镜驱动装置30的所述棱镜驱动轴31与所述摄像模组主体10的所述光轴O平行。所述压电驱动器32包括一压电元件321，所述压电元件321呈层叠结构，且所述压电元件321包括多个压电伸缩体3211以及多个内部电极3212，所述内部电极3212交替叠加着多个压电伸缩体3211而成的多个电极，并且多个压电伸缩体3211和多个内部电极3212互相层叠，极大限度地减少了所述压电元件321所占的横截面积，且此层叠结构在施以小型电场的条件下，同样能够具备相同的位移距离。
值得一提的是，所述压电伸缩体3211的上下表面形成上层电极32111和下层电极32112， 位于压电伸缩体3211侧面的电极称为侧面电极3213；当压电伸缩体3211为单个时，在所述压电伸缩体3211的上层电极32111与下层电极32112的表面连接正向电极与负向电极，所述侧面电极3213则连接于外部电路。当压电伸缩体3211为多个时，相同极性的电极层通过侧面的电极进行连接，从而能够将正负电极的电极层引出在两个侧面上。可以理解的是，连接方式可采用焊接等形式，能够保证其连接强度。
优选地，所述棱镜驱动轴31与所述压电驱动器32通过粘合剂相固定，且所述棱镜驱动轴31被固定于所述压电元件321上表面的中段部分。
优选地，在本发明的该优选实施例中，所述反射棱镜20为直角三角形棱柱，被安装于摄像模组的入光侧。所述棱镜座40为一体结构式配件，具有与反射棱镜20相对的支撑面，所述反射棱镜20与棱镜座40通过胶水粘合在一起，使得反射棱镜20固定于棱镜座40的支撑面上，避免反射棱镜20与棱镜座40相对滑动。
如图1和图2所示，所述摄像模组主体10包括一透镜组11、沿光轴O方向设置的图像传感器12、以及固定所述透镜组11和所述图像传感器12的一壳体13。所述棱镜座40、透镜组11以及图像传感器12均安装于所述壳体13，所述壳体13整体呈长方形结构，所述壳体在反射棱镜20位置具有一开口，环境光线能够通过入光面射入至反射棱镜20，并被反射面反射到出光面至透镜组11，穿过透镜组11的光线可以进而传送至所述图像传感器12。所述图像传感器12安装于反射棱镜20的出光侧，所述潜望式摄像模组的出光侧包括将穿过透镜组11的光转换为电信号的所述图像传感器12及安装有图像传感器12的线路板。
在本发明的该优选实施例中，所述棱镜驱动轴31与所述透镜组11光轴平行，此种设计结构减小了所述壳体13的宽度尺寸，从而减小了模组的整体体积，合理利用壳体的内部空间，便于安装，利于模组的小型化设计。
如图1和图2所示，所述摄像模组主体10进一步包括至少一透镜驱动装置14，其中所述透镜驱动装置14被设置于所述壳体13，所述透镜驱动装置14与所述透镜组11相传动地连接，由所述透镜驱动装置14驱动所述透镜组沿特定方向移动，以调整整个系统的焦距。值得一提的是，所述透镜驱动装置14驱动所述透镜组11抖动，以补偿所述摄像模组整体抖动带来的成像抖动，进而实现所述潜望式摄像模组的光学防抖。
所述透镜组11进一步包括一第一透镜组111、一第二透镜组112以及一第三透镜组113，其中所述第一透镜组111、所述第二透镜组112以及所述第三透镜组113沿光轴O方向自物侧向像侧依次排列。所述反射棱镜20位于所述透镜组10的所述第一透镜组111物侧一端，其中所述反射棱镜20反射的光线经所述第一透镜组111到所述第二透镜组113。第二透镜组112位于所述第一透镜组111出光侧，所述第三透镜组113位于所述第二透镜组112出光侧。
所述第一透镜组111包括一第一透镜框架1111和被所述第一透镜框架1111固定的至少一第一透镜单元1112，其中所述第一透镜单元1112由第一透镜框架1111所支撑，并固定于所述壳体13内侧。所述第二透镜组112包括一第二透镜框架1121和被所述第二透镜框架1121固定的至少一第二透镜单元1122，其中所述第二透镜组112被可驱动地连接于所述透镜驱动装置14，由所述透镜驱动装置14驱动所述第二透镜组112沿光轴O方向做水平横向移动。换言之，在本发明的该优选实施例中，所述第二透镜组112作为变焦透镜被所述 透镜驱动装置14驱动，以调整整个系统的焦距。
所述第三透镜组113包括一第三透镜框架1131和被所述第三透镜框架1131固定的至少一第三透镜单元1132，其中所述第三透镜组113被可驱动地连接于所述透镜驱动装置14，由所述透镜驱动装置14驱动所述第二透镜组112沿光轴O方向做水平横向移动。换言之，在本发明的该优选实施例中，所述第三透镜组113作为聚焦透镜，且位于所述透镜组10的末端，邻近于所述图像传感器12，可以使得摄像模组起到连续变焦的作用。
所述壳体13内部具有第一长边侧面以及第二长边侧面，所述第一长边侧面设有与所述透镜框架相同高度的两条导轨，能够提供所述透镜组11进行来回滑动。所述壳体13内部还具备可以夹持透镜框架的第一固定连接部以及第二固定连接部(图示中未示出)，分别夹持作第二透镜框架1121和第三透镜所对应的透镜框架1131，所述固定连接部均位于各自对应透镜框架的基准轴X轴正方向一侧。
所述固定连接部与所述透镜驱动装置14相传动相连，即固定连接部一端夹持第二透镜框架1121或第三透镜所对应的透镜框架1131，另一端夹持所述透镜驱动装置14，所述固定连接部起到一个传动作用，便于所述透镜驱动装置14与固定连接部进行摩擦从而带动所述第二透镜框架1121或第三透镜所对应的透镜框架1131抖动，进一步使得透镜组10实现抖动。值得一提的是，所述透镜组10通过内部透镜的固定与移动可以实现连续变焦的作用。
所述图像传感器12位于所述第三透镜组件113的出光侧，被设置于壳体13内部的短边侧面处，所述透镜组11、反射棱镜20、图像传感器12的中心位置都位于光轴O，进而将接收到的光线传递到图像传感器12。
所述透镜驱动装置14进一步包括一第一透镜驱动单元14a和一第二透镜驱动单元14b，其中所述第一透镜驱动单元14a与所述第二透镜组件112相传动地连接，由所述第一透镜驱动单元14a驱动所述第二透镜组件112移动。所述第二透镜驱动单元14b与所述第三透镜组件113相传动地连接，由所述第二透镜驱动单元14b驱动所述第三透镜组件113移动。
优选地，在本发明的该优选实施例中，所述透镜驱动装置14被实施为压电装置。更优选地，在本发明的该优选实施例中，所述透镜驱动装置14的所述第一透镜驱动单元14a和所述第二透镜驱动单元14b的结构相同。
所述透镜驱动装置14包括一压电驱动轴141和一振动部件142，其中所述压电驱动轴141与所述摄像模组主体10的光轴O平行，且所述压电驱动轴141的一端被所述固定连接部所固定，另一端与所述振动部件142通过粘合剂固定相连，从而使得振动部件142带动所述压电驱动轴141进行振动。
优选地，在本发明的该优选实施例中，所述透镜驱动装置14的所述第一透镜驱动单元14a和所述第二透镜驱动单元14b相对设置，即所述第一透镜驱动单元14a的所述振动部件142与所述第二透镜驱动单元14b的所述振动部件142相面对面地设置，便于内部的电路走线，同时面对面设置也会多出一些内部空间，从而便于封装紧凑。
优选地，在本发明的该优选实施例中，所述振动部件142与所述压电驱动器32的结构相同。具体而言，所述振动部件142包括一压电元件，所述压电元件呈层叠结构，所述层叠结构具备多个压电伸缩体以及多个内部电极，内部电极交替叠加着多个压电伸缩体而成的多个电极，并且多个压电伸缩体和多个内部电极互相层叠，极大限度地减少了压电元件 所占的横截面积，且此层叠结构在施以小型电场的条件下，同样能够具备相同的位移距离。所述压电伸缩体的上下表面形成上层电极和下层电极，位于压电伸缩体侧面的电极称为侧面电极；当压电伸缩体为单个时，在所述压电伸缩体的上层电极与下层电极的表面连接正向电极与负向电极，侧面电极则连接于外部电路；当压电伸缩体为多个时，相同极性的电极层通过侧面的电极进行连接，从而能够将正负电极的电极层引出在两个侧面上；其中，连接方式可采用焊接等形式，能够保证其连接强度。所述压电驱动轴与所述振动部件通过粘合剂相固定，位于所述压电元件上表面的中段部分，
在本发明的该优选实施例中，所述第一透镜驱动单元14a和所述第二透镜驱动单元14b的所述压电驱动轴141被安装于所述壳体13内部靠近第二长边侧面的一侧，与所述透镜组11光轴O(Z轴)平行，且所述第一透镜驱动单元14a的所述压电驱动轴和所述第二透镜驱动单元14b的所述压电驱动轴两轴位置相对设置。由于所述振动部件142位于所述压电驱动轴141的一端，故所述第一透镜驱动单元14a的所述振动部件142和所述第二透镜驱动单元14b的所述振动部件彼此也相对设置。
值得一提的是，当对所述透镜驱动装置14施加脉冲电压时，会造成压电伸缩体的形变，形成逆压电效应，进而使得整个的所述振动部件142不断地进行上下振动的现象。采用此种层叠结构的压电元件具备体积小、推力大、精度高的优势，且驱动结构整体较为简单，适用于空间紧凑的摄像模组，仅需较小的电容量便能够提供较大的驱动力。
所述棱镜座40连带反射棱镜20共同设置于所述壳体13上。由于所述棱镜驱动轴31进行的是直线运动，而所述传动轴52相垂直地连接于所述棱镜驱动轴31，并且所述传动轴52作为导向机构将直线运动转变成旋转运动，使得所述棱镜座40与所述反射棱镜20获得一定的倾斜角度。所述反射棱镜20绕着基准轴(X轴)进行旋转运动，改变反射棱镜20出射光的方向，实现光学防抖的效果。
优选地，在本发明的该优选实施例中，所述棱镜驱动装置30的所述棱镜驱动轴31与所述透镜驱动装置14的所述压电驱动轴141位于所述壳体13内部基准轴X轴正方向的同一侧，均与所述透镜组11的光轴O相互平行。此种设计结构减小了壳体13的宽度尺寸，从而减小了模组的整体体积，合理利用壳体的内部空间，便于安装，利于模组的小型化设计。
所述潜望式摄像模组进一步包括至少一磁传感器60，其中所述磁传感器60被设置于所述透镜组11固定连接部的和所述壳体13之间，所述磁传感器60被用于检测所述潜望式摄像模组的所述摄像模组主体10内磁场强度的变化程度。
因此，在本发明的该优选实施例中，当透镜组11中的第二透镜组112与第三透镜组113进行移动时，作为支撑的透镜框架也随之移动，所述磁传感器60便可对于透镜框架移动的距离和方向进行检测，在检测的过程中所述磁传感器60能够表达出磁场强度的变化程度。优选地，在本发明的该优选实施例中，所述磁传感器60可以但不限于磁电阻式传感器。
所述潜望式摄像模组进一步包括至少一电路板70，其中所述电路板70被电气连接于所述磁传感器60。所述电路板70被设置于所述磁传感器60的周围，并且所述电路板70的一端与磁传感器60电气连接，并且所述电路板70紧贴所述壳体内部的第二长边侧面内表面延伸出去，所述电路板70的另一端与所述透镜驱动装置14中的振动部件142的线路相 电气连接。优选地，在本发明的该优选实施例中，所述电路板70被实施为挠性电路板(FPC)。可以理解的是，所述电路板的类型在此仅仅作为示例性质的，而非限制。
更优选地，在本发明的该优选实施例中，所述透镜驱动装置14和所述棱镜驱动装置30的电路相导通。在一种实施方式中，所述磁传感器60以及所述电路板70的数量均为两个，与所述透镜驱动装置14的数量相同，且所述电路板70方向彼此相对。优选地，所述电路板70被设置于所述第一透镜驱动单元14a的所述振动部件142a和所述第二透镜驱动单元14b的所述振动部件142b之间。
优选地，所述电路板70被贴附于所述壳体13内部的第二长边侧面的表面处能够使得模组内部空间更为紧凑，在不影响其他元件所占空间的前提下，提高了系统集成度。可选地，在本发明的其他可选实施方式中，所述电路板70被设于壳体13的底部区域中，不占用壳体13的内部空间，也无需贴附于壳体内部的侧面表面上，更好地为其他元件提供了空间，进一步使得模组的整体体积与尺寸趋于小型化，封装更为紧凑。
值得一提的是，在本发明的该优选实施例中，所述潜望式摄像模组的电路走线设于壳体底部的内部或者贴附于壳体内部的第二长边侧面的表面上，有效地改善摄像模组的内部空间问题，更好地为驱动元件提供了空间，能够使得模组结构更加小型化，实现模组结构封装紧凑。
参照本发明说明书附图之图5和图6所示，依照本发明上述较佳实施例的所述潜望式摄像模组的一棱镜驱动装置30A的另一可选实施方式在接下来的描述中被阐明。所述棱镜驱动装置30A包括一压电马达31A和一曲柄滑块机构32A，其中所述压电马达31A与所述曲柄滑块机构32A相传动地连接，其中所述曲柄滑块机构32A被可传动地连接于所述棱镜座40，由所述压电马达31A通过所述曲柄滑块机构32A驱动所述棱镜座40和所述反射棱镜20运动，以实现所述潜望式摄像模组的光学防抖。
值得一提的是，在本发明的该优选实施例中，压电马达31A被设置于靠近壳体13内部的第二长边侧面的一侧，以减少所述棱镜驱动装置30A占用所述壳体13宽度方向的空间。所述曲柄滑块机构32A进一步包括一曲柄321A、一滑块322A以及一连接轴323A，其中所述滑块322A与所述压电马达31A相传动地连接，由所述压电马达31A驱动所述滑块322A沿光轴O方向直线地运动。所述滑块322A作为从动件可被所述压电马达322A驱动，所述曲柄321A与所述滑块322A之间通过所述连接轴323A相连，其中所述曲柄321A的另一端与所述棱镜座40相连接。
值得一提的是，在本发明的该优选实施例，所述连接轴323A与基准轴X轴平行，所述曲柄321A与所述透镜组11的光轴O(Z轴)和基准轴Y轴所在的平面平行。所述棱镜驱动装置30A进一步包括一导向元件33A，其中所述导向元件33A一端与所述滑块322A相连接，另一端与所述棱镜座40相连接，当所述压电马达31A施加驱动力时，会带动所述滑块322A进行直线运动，所述曲柄321A和连接轴323A也会随之运动，所述连接轴323A可以使得所述滑块322A和所述曲柄321A之间保持相对运动。所述曲柄321A带动所述棱镜座40绕着基准轴(X轴)形成一定的倾斜角度，所述导向元件33A能够使得直线运动转变成旋转运动，进一步使得所述棱镜座40以及所述反射棱镜20绕着基准轴(X轴)进行旋转。
优选地，在本发明的该优选实施例中，所述导向元件33A呈“L”型结构。
可选地，在本发明的其他可选实施方式中，所述棱镜驱动装置30A的数量为二，且两个所述的棱镜驱动装置30A呈对称结构被设置于靠近壳体内部的第一长边侧面的一侧。两个所述棱镜驱动装置30A以所述透镜组11光轴O(Z轴)为中心轴呈对称状态，使得所述棱镜座40以及所述反射棱镜20能够更好地进行旋转运动，进一步使得整体棱镜结构在运动的过程中更加稳定。
申请概述
如上所述，图像稳定技术(Image Stabilization，IS)在提高移动电子设备的拍摄性能方面发挥着关键作用。该技术主要有两种形式：一、光学图像稳定(Optical Image Stabilization，OIS)，俗称光学防抖，其在一帧的曝光时间内直接对摄像模组做机械补偿以消除图像模糊；二、电子图像稳定(Electronic Image Stabilization，EIS)，其通过对拍摄后的多帧图像进行计算机处理以提高清晰度。
目前在一些具有摄像模组的移动电子设备中(例如，智能手机、照相机、摄像机)，通常会通过音圈马达(Voice Coil Actuator，VCM)等电磁式驱动器来移动摄像模组中的光学镜头或感光部件以补偿摄像时发生的抖动。然而，在空间体积狭小的移动电子设备中，安装电磁式驱动器来实现光学防抖是一项重大的技术挑战。
并且，随着移动电子设备的成像系统越来越复杂，摄像模组朝着高像素、大芯片的趋势发展，现有的诸如音圈马达之类的电磁式驱动器已逐渐满足摄像模组的驱动要求且满意封装尺寸要求。
因此，需要一种适配的用于摄像模组的新型驱动方案，且，新型的驱动器不仅能满足摄像模组对于光学性能调整的驱动要求，且能够满足摄像模组轻型化和薄型化的发展需求。
针对上述技术问题，本申请的技术构思是以MEMS(Micro-Electro-Mechanical Systems,微机电系统)驱动器来作为驱动元件来进行传感器位移(Sensor shift)以实现光学防抖。
相较于传统的基于音圈马达的光学防抖技术，基于MEMS驱动器的光学防抖技术采用传感器位移原理，即，通过MEMS驱动器来驱动图像传感器进行平移和/或转动以补偿移动电子设备在拍摄时发生的抖动。其具有诸多优势：高性能、10ms内完成亚微米精度定位、15ms内响应移动电子设备的抖动、尺寸小、没有电磁干扰。并且，与音圈马达相比，其成本低，基于半导体技术可大规模量产。
基于此，本申请提供了一种感光组件，其包括基板，包括：固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少二悬持臂，所述可移动部通过所述至少二悬持臂被悬持地设置于所述固定部内；被设置于且电连接于所述可移动部的感光芯片，所述感光芯片设有一感光轴；以及，至少一压电元件，其中，所述至少一压电元件被设置于所述至少二悬持臂的至少其中之一，并被配置为在被导通后通过其自身的形变来作动所述悬持臂相对于所述固定部沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片，通过这样方式，来进行光学防抖。
在介绍本申请的基本原理之后，下面将参考附图来具体介绍本申请的各种非限制性实施例。
示例性摄像模组
如图7所示，根据本申请实施例的摄像模组被阐明，其包括：感光组件10和被保持于所述感光组件10的感光路径上的镜头组件20。特别地，在本申请实施例中，所述感光组件10以MEMS驱动器作为驱动元件并利用图像传感器位移原理来进行光学防抖。
相应地，所述镜头组件20包括镜头载体21和安装于所述镜头载体21的光学镜头22，其中，所述光学镜头22设有一光轴。在该实施例中，所述光学镜头22包括镜筒和被安装于所述镜筒内的至少一光学透镜。本领域普通技术人员应知晓，所述光学镜头22的解像力在一定范围内与光学透镜的数量成正比，也就是，解像力越高，所述光学透镜的数量越多。在具体实施中，所述光学镜头22可被实施为一体式镜头，或者，分体式镜头，其中，当所述光学镜头22被实施为一体式镜头时，所述光学镜头22包含一个镜筒，所有的所述光学透镜被安装于所述镜筒内；而当所述光学镜头22被实施为分体式光学镜头，所述光学镜头22由至少两部分镜头单体组装而成。
并且，在该实施例中，所述镜头载体21为固定载体，即，当所述光学镜头22被安装于所述镜头载体21时，所述镜头载体21和所述光学镜头22之间的相对位置关系不会发生改变。应可以理解，在本申请其他示例中，所述镜头载体21还可以被实施为驱动载体，以通过所述驱动载体来改变所述光学镜头22与所述感光组件10之间的相对位置关系来进行自动对焦，对此，并不为本申请所局限。
相应地，如图8所示，所述感光组件10包括基板11、电连接于所述基板11的感光芯片12、被设置于所述基板11的至少一压电元件13、设置于所述基板11的支架14和被设置于所述支架14的滤光元件17，其中，所述感光芯片12设有一感光轴，所述感光轴与所述光学镜头22的光轴同轴。相应地，在该实施例中，所述支架14被设置于所述基板11的固定部111，且所述镜头组件20被安装于所述支架14上。在一个具体的示例中，所述支架14被实施为塑料支架14，其通过黏着剂被固定于所述基板11的固定部111。应可以理解，在本申请其他示例中，所述支架14还可以被实施为其他类型的支架14，例如，模塑支架，对此并不为本申请所局限。
如图8所示，所述基板11包括固定部111和悬持地设置于所述固定部111内的可移动部112，通过这样的方式，所述基板11的可移动部112适于在所述至少一压电元件13的作用下能够相对于所述固定部111发生位移。特别地，在本申请实施例中，所述感光芯片12被设置于且电连接于所述可移动部112，以使得所述感光芯片12能够相对于所述固定部111发生位移以进行光学防抖。
在该实施例中，所述基板11进一步包括设置于所述固定部111和所述可移动部112之间的至少二悬持臂113，以通过所述至少二悬持臂113，所述可移动部112被悬持地设置于所述固定部111内。也就是，在该实施例中，所述可移动部112通过所述至少二悬持臂113被悬吊于所述固定部111的内部，以允许所述可移动部112相对于所述固定部111发生位移以进行光学防抖。更具体地，在该实施例中，每一所述悬持臂包括相对的第一端1131和第二端1132，其中，所述第一端1131固定于所述固定部111，所述第二端1132固定于所述可移动部112，通过这样的方式，所述可移动部112通过所述至少二悬持臂113被悬吊于所述固定部111的内部。进一步地，如图8所示，在本申请实施例中，所述至少一压电元件13 被设置于所述至少二悬持臂113的至少其中之一以形成MEMS致动器，并被配置为在被导通后通过其自身的形变来作动所述悬持臂相对于所述固定部111向上或向下翘曲以带动所述可移动部112和所述感光芯片12移动以进行光学防抖。在本申请实施例中，所述至少一压电元件13被设置于所述至少二悬持臂113的至少其中之一的上表面。
在本申请一个具体的示例中，所述基板11被实施为半导体基板，例如，如图9A和3B中所示意的半导体基板。如图9A和图9B所示，在该具体示例中，所述基板11自下而上包括硅基底层、氧化硅层和硅晶体层，也就是，所述基板11包括硅基底层、叠置于所述硅基底层的氧化硅层和叠置于所述氧化硅层的硅晶体层，其中，所述硅基底层的下表面形成所述基板11的下表面，所述硅晶体层的上表面形成所述基板11的上表面。在具体实施中，所述基板11可由SOI硅片(Silicon-on-insulator)制成，本领域普通技术人员应知晓，SOI硅片是成熟的半导体器件。相应地，在本申请实施例中，所述基板11的硅晶体层中设有集成电路，例如，在所述SOI硅片的电路层上采用标准的SOI CMOS工艺完成集成电路的制作。
为了保护所述集成电路，在该具体示例中，所述基板11进一步包括叠置于所述硅晶体层的钝化层以通过所述钝化层对配置于所述硅晶体层的集成电路进行保护。并且，在本申请实施例中，还可以在所述硅晶体层上通过表面贴装工艺贴附焊盘和导线等电连接结构16。
进一步地，如图9A和图9B所示，在该示例中，所述基板11具有相对的上表面和下表面，以及至少部分地贯穿于所述下表面和所述上表面之间的镂空结构110，其中，通过所述镂空结构110，所述基板11形成所述固定部111、所述可移动部112和延伸于所述固定部111和所述可移动部112之间的所述至少二悬持臂113。也就是，通过所述镂空结构110，所述基板11被分成两个部分：固定部111和可移动部112，并且，所述可移动部112通过所述至少二悬持臂113悬持于所述固定部111内。特别地，在该具体示例中，当所述基板11被实施为半导体基板时，所述固定部111、可移动部112及至少二悬持臂113具有一体式结构。特别地，所述至少二悬持臂113的厚度小于所述固定部111的厚度，以使得所述至少二悬持臂113能够在所述至少一压电元件13的驱动下实现沿感光轴所设定的方向的翘曲。
为了对所述基板11进行补强，如图8所示，在本申请实施例中，所述感光组件10进一步包括被设置于所述基板11的下表面的补强板15。在具体实施中，所述补强板15可被实施为金属板，例如，钢板等。
应可以理解，在本申请实施例中，为了满足电连接的需求，所述基板11的固定部111与可移动部112之间可设置电连接结构16(例如，当所述基板11为半导体基板时，所述电连接结构16为集成电路的一部分)，通过该电连接结构16实现所述摄像模组的电路导通。当然，在其他示例中，可以通过表面贴装工艺在所述基板11的上表面贴附焊盘和导线等电连接结构16；或者，通过LDS(激光直接成型技术)在所述基板11的上表面设置LDS槽，在LDS槽表面镀设导电镀层(例如可以是镍钯金的镀层)，通过连接电路与LDS槽中的导电镀层相连接，从而导出电路；又或者，通过Insert Molding(嵌入式注塑)技术，将导线成型在所述基板11，从而将连接电路与导线电连接从而导出电路。
相应地，在本申请实施例中，所述可移动部112的上表面设有电连接结构16，这样当所述感光芯片12贴装于所述可移动部112的上表面时，所述感光芯片12能够通过形成于 所述可移动部112的上表面的电连接结构16电连接于所述可移动部112。同样地，当所述至少一压电元件13被贴装于所述至少二悬持臂113的至少其中之一，其也能够通过形成于所述至少二悬持臂113的表面的电连接结构16使得所述至少一压电元件13被电连接于所述悬持臂。当然，所述电连接结构16也可以设置于所述固定部111的上表面，并通过所述电连接结构16实现与外部的电路导通。所述固定部111、可移动部112与所述至少二悬持臂113表面的电连接结构16可以为一体式结构也可以为分体式结构。
值得一提的是，在本申请其他示例中，所述基板11还可以被实施为其他类型的基板11，其包括但不限于：塑料基板11、金属基板11等。为了便于说明，在本申请实施例中，以所述基板11被实施为半导体基板为示例。
更具体地，如图10所示，在本申请实施例中，所述至少二悬持臂113包括第一悬持臂114、第二悬持臂115、第三悬持臂116和第四悬持臂117，其中，所述第一悬持臂114和所述第二悬持臂115相对于所述可移动部112以X轴为对称轴对称地布置，所述第三悬持臂116和所述第四悬持臂117相对于所述可移动部112以Y轴为对称轴对称地布置，所述第一悬持臂114与所述第三悬持臂116相邻布置、所述第二悬持臂115与所述第四悬持臂117相邻布置。在该实施例中，所述第一悬持臂114、所述第二悬持臂115、所述第三悬持臂116和所述第四悬持臂117被设置于所述可移动部112的四侧，从而使得所述感光芯片12可以沿着两条旋转轴旋转从而改变所述感光芯片12在两个方向上的倾斜角度。
相对应地，所述至少一压电元件13包括第一压电元件131、第二压电元件132、第三压电元件133和第四压电元件134，其中，所述第一压电元件131被配置为在被导通后通过其自身形变来驱动所述第一悬持臂114沿所述感光轴所设定的方向(即，所述光轴所设定的方向)向上或向下翘曲以带动所述可移动部112和所述感光芯片12向上或向下移动，以使得所述感光芯片12的感光面相对于所述固定部111的位置关系发生调整，通过这样的方式，来进行u方向的光学防抖；所述第二压电元件132被配置为在被导通后通过其自身形变来驱动所述第二悬持臂115沿所述感光轴所设定的方向向上或向下翘曲以带动所述可移动部112和所述感光芯片12向上或向下移动，以使得所述感光芯片12的感光面相对于所述固定部111的位置关系发生调整，通过这样的方式，来进行u方向的光学防抖；所述第三压电元件133被设置于所述第三悬持臂116，并被配置为在被导通后通过自身形变来驱动所述第三悬持臂116沿所述感光轴所设定的方向向上或向下地翘曲，以带动所述可移动部112和所述感光芯片12向上或向下移动，以使得所述感光芯片12的感光面相对于所述固定部111的位置关系发生调整，通过这样的方式，来进行v方向的光学防抖；所述第四压电元件134被设置于所述第四悬持臂117，并被配置为在被导通后通过自身形变来驱动所述第四悬持臂117沿所述感光轴所设定的方向向上或向下翘曲，以带动所述可移动部112和所述感光芯片12向上或向下移动，以使得所述感光芯片12的感光面相对于所述固定部111的位置关系发生调整，通过这样的方式，来进行v方向的光学防抖。
进一步地，如图10所示，在本申请实施例中，每一所述悬持臂具有相对的两长边和相对的两短边，所述第一端1131和所述第二端1132形成于两条长边上。并且，每一所述悬持臂具有悬臂主体和至少部分地贯穿于所述悬臂主体的分隔槽，其中，以通过所述分割槽所述悬臂主体被分为相互可移动的两个悬臂部，其中，所述悬臂部的边缘形成所述长边，并 且，在本申请实施例中，每个所述悬臂部被所述第一端1131和所述第二端1132分为两个悬臂子部。
以所述悬持臂为第一悬持臂114为例，所述第一悬持臂114包括第一悬臂主体1141和至少部分地贯穿于所述第一悬臂主体1141的分隔槽1142，其中，通过所述分割槽所述第一悬臂主体1141被分为相互可移动的第一悬臂部1143和第二悬臂部1144。相应地，在该实施例中，所述第一压电元件131包括被设置于所述第一悬臂部1143的第一压电区域和被设置于所述第二悬臂部1144的第二压电区域，所述第一压电区域被配置为在被导通后通过其自身的形变作动于所述第一悬臂部1143以使得所述第一悬臂部1143相对于所述第二悬臂部1144发生翘曲，所述第二压电区域被配置为在被导通后通过其自身的形变作动于所述第二悬臂部1144以使得所述第二悬臂部1144相对于所述第一悬臂部1143发生翘曲。
进一步地，所述第一悬持臂114的第一悬臂部1143通过所述第一端1131被分为第一悬臂子部1145和第二悬臂子部1146，所述第二悬臂部1144通过所述第二端1132被分为第三悬臂子部1147和第四悬臂子部1148，其中，所述第一压电区域包括被设置于所述第一悬臂子部1145的所述第一压电片1311和被设置于所述第二悬臂子部1146的第二压电片1312，所述第二压电区域包括被设置于所述第三悬臂子部1147的所述第三压电片1313和被设置于所述第四悬臂子部1148的第四压电片1314。特别地，在该实施例中，所述第一压电片1311、所述第二压电片1312和所述第三压电片1313被设置于所述第一悬臂子部1145、第二悬臂子部1146、所述第三悬臂子部1147和所述第四悬臂子部1148的上表面，以通过所述4个压电片的收缩或舒张来带动所述第一悬臂部1143和/或所述第二悬臂部1144向上或向下发生翘曲，如图11所示。
当然，本申请中，所述悬持臂与所述压电元件还可以采用其他的方式进行划分。仍以就所述悬持臂为第一悬持臂114为例，在其他示例中，所述第一悬持臂114被所述第一端1131和所述第二端1132分为第一悬臂部1143和第二悬臂部1144，所述第一悬臂部1143被所述分隔槽1142分为第一悬臂子部1145和第二悬臂子部1146，所述第一悬臂子部1145连接于所述第一端1131，所述第二悬臂子部1146连接于所述第二端1132。所述第一压电片1311设置于所述第一悬臂子部1145，所述第二压电片1312设置于所述第二悬臂子部1146，所述第一压电片1311沿第一方向延伸，所述第二压电片1312沿第二方向延伸，所述第一方向与第二方向为沿x轴所在方向的正向和负向。在通电后，所述第一悬臂部1143的所述第一悬臂子部1145和第二悬臂子部1146在所述第一压电片1311和所述第二压电片1312的驱动下产生沿高度方向的行程。所述高度方向即所述感光轴所设定的方向。由于所述移动部112和所述感光芯片12可移动的行程为第一悬臂子部1145和第二悬臂子部1146的叠加行程，因此会产生更大的光学防抖行程。相应地，所述第二悬臂部1144被所述分隔槽1142分为第三悬臂子部1147和第四悬臂子部1148，所述第三悬臂子部1147连接于所述第一端1131，所述第四悬臂子部1148连接于所述第二端1132。所述第三压电片1313设置于所述第三悬臂子部1147，所述第四压电片1314设置于所述第四悬臂子部1148，所述第三压电片1313沿第一方向延伸，所述第四压电片1314沿第二方向延伸。在通电后，所述第二悬臂部1144的所述第三悬臂子部1147和第四悬臂子部1148在所述第三压电片1313和所述第四压电片1314的驱动下产生沿高度方向的行程。
这里，值得一提的是，每个所述悬持臂的短边以及短边与长边的转折角处不设置所述压电片，即，在通电后，所述悬持臂的短边以及长短与长短的转角处不发生形变。应注意到，在本申请实施例中，所述第一悬持臂114、所述第二悬持臂115、所述第三悬持臂116和所述第四悬持臂117具有相同的对称结构，因此，在以所述第一悬持臂114进行说明后，关于其他悬持臂的具体描述不再展开。
更具体地，如图12A所示，在进行u方向(绕x轴旋转)的防抖时，设置于所述第一悬持臂114的所述第一压电元件131的所述第一压电片1311和所述第二压电片1312在一定电压的作用下发生收缩，带动所述第一悬臂子部1145和第二悬臂子部1146发生向上翘曲；所述第一压电元件131的所述第三压电片1313和第四压电片1314在一定电压作用下发生收缩，带动所述第三悬臂子部1147和所述第四悬臂子部1148发生向上翘曲。
值得一提的是，在具体实施中，所述第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，其中，当电压相同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度相同；当电压不同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度不同。
并且由于上述形变，所述第一悬持臂114发生向上的翘曲，使其连接所述感光芯片12的一侧高度增加。与第一悬持臂114同向相对设置的第二悬持臂115的所述第二压电元件132的四个压电片可以不进行通电，相对于第一悬持臂114发生向上的翘曲，所述第二悬持臂115连接所述感光芯片12的一侧高度不变，使得所述感光芯片12所在平面相对于所述固定部111形成一定的倾斜角度，使得所述可移动部112上的感光芯片12发生沿x轴方向的旋转，从而实现u方向的光学防抖。
当然，在其他实施例中，如图12B所示，设置于所述第二悬持臂115的所述第二压电元件132的所述第一压电片1311和第二压电片1312在一定电压的作用下发生收缩，带动所述第二悬持臂115的第一悬臂子部1145和第二悬臂子部1146发生向上翘曲；所述第二压电元件132的所述第三压电片1313和第四压电片1314在一定的电压作用下发生收缩，带动所述第三悬臂子部1147和第四悬臂子部1148发生向上翘曲。这里，所述第二压电元件132的第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，其中，当电压相同时第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度相同；当电压不同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度不同。并且所述第二悬持臂115的压电片通过的电压小于所述第一悬持臂114的电压层通过的电压，也就是说第二悬持臂115发生向上翘曲的高度小于第一悬持臂114发生向上翘曲的高度，也就是所述第二悬持臂115连接所述感光芯片12一侧的高度小于所述第一悬持臂114连接所述感光芯片12一侧的高度，使得所述感光芯片12所在平面相对于所述固定部111形成一定的倾斜角度，使得所述可移动部112上的感光芯片12发生沿x轴方向的旋转，从而实现u方向的光学防抖。
当然，在其他实施例中，如图12C所示，设置于所述第二悬持臂115的第二压电元件 132的电压层可以通相反的电压，即设置于所述第二悬持臂115的第一悬臂子部1145和第二悬臂子部1146的第一压电片1311和第二压电片1312在一定电压的作用下发生舒张，带动所述第一悬臂子部1145和第二悬臂子部1146发生向下翘曲；设置于所述第二悬持臂115的第三悬臂子部1147和第四悬臂子部1148的第三压电片1313和第四压电片1314在一定的电压作用下发生舒张，带动所述第三悬臂子部1147和第四悬臂子部1148发生向下翘曲，其中，第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，当压电相同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向下翘曲的高度相同；当电压不同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向下翘曲的高度不同。并且由于上述形变，所述第二悬持臂115发生向下的翘曲，使其连接所述感光芯片12的一侧高度降低。相对于第一悬持臂114发生向上的翘曲高度增加，所述第二悬持臂115连接所述感光芯片12的一侧高度降低，使得所述感光芯片12所在平面相对于所述固定部111形成一定的倾斜角度，使得所述可移动部112上的感光芯片12发生沿x轴方向的旋转，从而实现u方向的光学防抖。
当然，本申请中，所述第一悬持臂114与所述第二悬持臂115的变形可以相对调换，即使得所述第二悬持臂115连接所述感光芯片12一侧的高度大于所述第一悬持臂114连接所述感光芯片12一侧的高度。在进行u方向防抖时，为了能够使感光芯片12沿x轴方向的一侧能够翘起，所述第三悬持臂116与所述第四悬持臂117的高度也会随之进行调整，使得感光芯片12能够在倾斜状态下保持稳定，并且第三悬持臂116与第四悬持臂117发生翘曲的高度为第一悬持臂114翘曲的高度与第二悬持臂115翘曲的高度之和的一半。
如图12D所示，在进行v方向(绕y轴旋转)的防抖时，所述第三悬持臂116的第三压电元件133的第一压电片1311和第二压电片1312在一定电压的作用下发生收缩，带动所述第三悬持臂116的第一悬臂子部1145和第二悬臂子部1146发生向上翘曲；所述第三压电元件133的第三压电片1313和第四压电片1314在一定的电压作用下发生收缩，带动所述第三悬持臂116的第三悬臂子部1147和第四悬臂子部1148发生向上翘曲。
这里，所述第三压电元件133的第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，其中，当电压相同时第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度相同；当电压不同时第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度不同。并且由于上述形变，所述第三悬持臂116发生向上的翘曲，使其连接所述感光芯片12的一侧高度增加。与第三悬持臂116同向相对设置的第四悬持臂117的所述四个压电片可以不进行通电，相对于第三悬持臂116发生向上的翘曲，所述第四悬持臂117连接所述感光芯片12的一侧高度不变，使得所述感光芯片12所在平面相对于所述固定部111形成一定的倾斜角度，使得所述可移动部112上的感光芯片12发生沿y轴方向的旋转，从而实现v方向的光学防抖。
当然，在其他实施例中，如图12E所示，设置于所述第四悬持臂117的第四压电元件134的第一压电片1311和第二压电片1312在一定电压的作用下发生收缩，带动所述第四悬持臂117的第一悬臂子部1145和第二悬臂子部1146发生向上翘曲；所述第三压电元件133 的第三压电片1313和第四压电片1314在一定的电压作用下发生收缩，带动所述第三悬臂子部1147和第四悬臂子部1148发生向上翘曲。
值得一提的是，在具体实施中，所述第四压电元件134的第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，其中，当电压相同时，所述第四悬持臂117的第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度相同；当电压不同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度不同。
并且，所述第四悬持臂117的压电片通过的电压小于所述第三悬持臂116的电压差通过的电压，也就是说第四悬持臂117发生向上翘曲的高度小于第三悬持臂116发生向上翘曲的高度，也就是所述第四悬持臂117连接所述感光芯片12一侧的小于所述第三悬持臂116连接所述感光芯片12一侧的高度，使得所述感光芯片12所在平面相对于所述固定部111形成一定的倾斜角度，使得所述可移动部112上的感光芯片12发生沿y轴方向的旋转，从而实现v方向的光学防抖。
当然，在其他实施例中，如图12F所示，设置于所述第四悬持臂117的第四压电元件134可以通相反的电压，即设置于所述第四悬持臂117的所述第四压电元件134的第一压电片1311和第二压电片1312在一定电压的作用下发生舒张，带动所述第四悬持臂117的第一悬臂子部1145和第二悬臂子部1146发生向下翘曲；而所述第四压电元件134的第三压电片1313和第四压电片1314在一定的电压作用下发生舒张，带动所述第四悬持臂117的第三悬臂子部1147和第四悬臂子部1148发生向下翘曲。
值得一提的是，所述第四压电元件134的第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，其中，当电压相同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度相同；当电压不同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度不同。并且由于上述形变，所述第四悬持臂117发生向下的翘曲，使其连接所述感光芯片12的一侧高度降低。相对于第三悬持臂116发生向上的翘曲高度增加，所述第四悬持臂117连接所述感光芯片12的一侧高度降低，使得所述感光芯片12所在平面相对于所述固定部111形成一定的倾斜角度，使得所述可移动部112上的感光芯片12发生沿y轴方向的旋转，从而实现v方向的光学防抖。
当然，本申请中，所述第三悬持臂116与所述第四悬持臂117的变形可以相对调换，即使得所述第四悬持臂117连接所述感光芯片12一侧的高度大于所述第三悬持臂116连接所述感光芯片12一侧的高度。在进行v方向防抖时，为了能够使感光芯片12沿y轴方向的一侧能够翘起，所述第一悬持臂114与所述第三悬持臂116的高度也会随之进行调整，使得感光芯片12能够在倾斜状态下保持稳定，并且第一悬持臂114与第三悬持臂116发生翘曲的高度为第三悬持臂116翘曲的高度与第四悬持臂117翘曲的高度之和的一半。
也就是说，在所述可移动部112的相对两侧分别设置至少二悬持臂113，在所述至少二悬持臂113的至少一个上设置一压电元件，并且，输入不同的电压于设置所述可移动部112 相对两侧的所述压电元件，使得所述感光芯片12相对于所述固定部111产生一定的倾斜角度，以实现所述感光芯片12的光学防抖。在完成tilt防抖操作后，停止输入电压，所述压电片在不通电的情况下不会产生形变，从而使得所述悬持臂可以回复到原位(原位为通电前的初始位置)。量化来看，在本申请实施例中，所述感光芯片12能够实现tilt防抖的角度为1°-3°。
值得一提的是，为了便于所述压电元件通过作动所述悬持臂来移动所述可移动部112，优选地，所述悬持臂具有相对较小的厚度。特别地，在该实施例中，所述悬持臂的厚度尺寸范围为0.1mm-0.3mm。在本申请实施例中，所述压电元件可被实施为掺杂PZT的具有极优压电特性的材料。所述压电元件的厚度为1um-0.5mm之间，以在所述压电元件具有较大驱动力的时使得所述悬持臂具有良好的可靠性。
还值得一提的是，在本申请其他示例中，也可以在所述至少一压电元件13与所述至少二悬持臂113之间设置一弹性元件(未有图示意)，以通过所述弹性元件增加所述可移动部112和所述感光芯片12的可移动行程。
也值得一提的是，虽然在本申请实施例中，以包括四条悬持臂和四个压电元件为示例，应可以理解，在本申请其他示例中，所述至少二悬持臂113还可以被实施为其他数量的悬持臂，所述至少一压电元件13还可以被实施为其他数量的压电元件。例如，在本申请其他示例中，所述至少二悬持臂113仅包括两条悬持臂：第一悬持臂114和第二悬持臂115，所述至少一压电元件13仅包括一个压电元件，其中，该压电元件被设置于所述第一悬持臂114或者所述第二悬持臂115，并被配置为在被导通后通过其自身形变来驱动所述第一悬持臂114或所述第二悬持臂115向上或向下翘曲以带动所述可移动部112和所述感光芯片12向上或向下移动以使得所述感光芯片12的感光面相对于所述固定部111的位置关系发生调整，通过这样的方式，来进行光学防抖，对此，并不为本申请所局限。
图13图示了根据本申请实施例的所述基板11的一个变形实施的示意图。如图13所示，在该变形实施例中，所述至少二悬持臂113包括相对于所述可移动部112的中心对称部分的第一悬持臂114和第二悬持臂115。相较于图7至图9所示意的实施例中，在该变形实施例中，所述悬持臂的形状做出了调整。
具体地，如图13所示，在该实施例中，所述第一悬持臂114包括沿着X轴方向延伸的第一悬臂段1143A和沿着Y轴方向延伸的第二悬臂段1144A。相应地，所述至少一压电元件13包括第一压电元件131和第二压电元件132，所述第一压电元件131被设置于所述第一悬持臂114的第一悬臂段1143A，所述第二压电元件132被设置于所述第一悬持臂114的第二悬臂段1144A，其中，所述第一压电元件131被配置为在被导通后通过自身形变来驱动所述第一悬臂段1143A向上或向下翘曲以带动所述可移动部112和所述感光芯片12进行向上或向下进行移动，通过这样的方式，来进行v方向的光学防抖；所述第二压电元件132被配置为在被导通后通过自身形变来驱动所述第二悬臂段1144A向上或向下翘曲以带动所述可移动部112和所述感光芯片12进行向上或向下进行移动，通过这样的方式，来进行u方向的光学防抖。
相应地，如图13所示，所述第二悬持臂115包括沿着X轴方向延伸的第三悬臂段1145A和沿着Y轴方向延伸的第四悬臂段1146A。而所述至少一压电元件13还包括第三压电元件 133和第四压电元件134，其中，所述第三压电元件133被设置于所述第二悬持臂115的第三悬臂段1145A，所述第四压电元件134被设置于所述第二悬持臂115的第四悬臂段1146A，其中，所述第三压电元件133被配置为在被导通后通过自身形变来驱动所述第二悬臂段1145A向上或向下翘曲以带动所述可移动部112和所述感光芯片12进行向上或向下进行移动，通过这样的方式，来进行v方向的光学防抖；所述第四压电元件134被配置为在被导通后通过自身形变来驱动所述第四悬臂段1146A向上或向下翘曲以带动所述可移动部112和所述感光芯片12进行向上或向下进行移动，通过这样的方式，来进行u方向的光学防抖。
更具体地，在该变形实施例中，所述第一悬持臂114具有“L”型结构，和/或，所述第二悬持臂115具有“L”型结构。也就是，所述第一悬持臂114和/所述第二悬持臂115为L型臂。
图14图示了根据本申请实施例的所述基板11的另一个变形实施的示意图。与图13所示意的变形实施例不同的是，在该变形实施例中，所述悬持臂的形状进一步发生调整。
如图14所示，在该实施例中，所述第一悬持臂114和所述第二悬持臂115具有三段式结构，其包括沿着Y轴方向延伸的第二悬臂段1144A和沿着X轴方向延伸的两个第一悬臂段1143A。当然，在本申请其他变形实施例中，所述悬持臂的形状还可以进行其他方式的异构，对此并不为本申请所局限。
还值得一提的是，在上述实施例中，所述压电元件被设置于所述悬持臂的上表面，应可以理解，在本申请其他示例中，所述压电元件可同时设置于所述悬持臂的上表面和下表面，或者，仅设置于悬持臂的下表面，对此，并不为本申请所局限。
综上，基于本申请实施例的所述摄像模组被阐明，其中，所述摄像模组所述摄像模组采用新型的MEMS驱动器作为驱动元件来驱动感光芯片12位移来实现光学防抖。特别地，在本申请实施例中，所述MEMS驱动器通过设置于基板11的压电元件构成，相较于传统的基于音圈马达的光学防抖技术，基于MEMS驱动器的光学防抖技术采用传感器位移原理，即，通过MEMS驱动器来驱动图像传感器进行平移和/或转动以补偿移动电子设备在拍摄时发生的抖动。其具有诸多优势：高性能、10ms内完成亚微米精度定位、15ms内响应移动电子设备的抖动、尺寸小、没有电磁干扰。并且，与音圈马达相比，其成本低，基于半导体技术可大规模量产。
图15图示了根据本申请实施例的所述摄像模组的另一个变形实施的示意图。如图15所示，在该变形实施例中，所述支架14的安装方式做出调整。具体地，在如图15所示，在该变形实施例中，所述补强板15具有相对较长的长度和宽度尺寸，以伸出所述基板11的下表面，其中，所述补强板15中伸出所述基板11的部分形成安装台。特别地，在该变形实施例中，所述支架14被安装于所述补强板15中伸出所述基板11的部分。
应可以理解，相较于所述基板11，所述补强板15具有相对较高的平整度和硬度，因此，将所述支架14安装于所述补强板15上有利于所述支架14的安装平整度。并且，当所述支架14被安装于所述补强板15时，所述感光组件10的整体高度尺寸可得以缩减，以使得所述摄像模组的整体尺寸可被缩减。
图16图示了根据本申请实施例的所述摄像模组的又一个变形实施的示意图。如图16所示，在该变形实施例中，所述支架14被实施为一体成型于所述基板11的一体式支架， 例如，所述支架14被实施为通过模塑工艺一体成型于所述基板11的模塑支架14。
值得一提的是，虽然在本申请实施例中，以所述摄像模组为传统的直立式摄像模组为示例，本领域普通技术人员应可以理解，根据本申请实施例的所述压电致动器100也可以作为驱动器被应用于潜望式摄像模组中，对此，并不为本申请所局限。
根据本申请的另一方面，还提供一种感光组件10的制备方法。
相应地，所述感光组件10的制备方法，包括：提供一种基板结构，其中，所述基板结构具有预设于其表面的电路。在一个具体示例中，所述基板结构为所述半导体结构自下而上包括硅基底层结构、氧化硅层结构和硅晶体层结构，所述硅晶体层结构具有预设于其中的电路。例如，所述半导体结构由SOI硅片(Silicon-on-insulator)制成，本领域普通技术人员应知晓，SOI硅片是成熟的半导体器件。相应地，在本申请实施例中，所述基板11的硅晶体层为电路层，例如，在所述SOI硅片的电路层上采用标准的SOI CMOS工艺完成集成电路的制作。
接着，将至少一压电元件13、电连接结构16和电子元器件分别贴装于所述基板结构的上表面的预设位置。
然后，对所述基板结构进行蚀刻以形成至少部分地贯穿于所述基板结构的下表面和上表面之间的镂空结构110以形成基板11，其中，所述基板11包括固定部111、可移动部112和延伸于所述固定部111和所述可移动部112之间的至少二悬持臂113，所述可移动部112通过所述至少二悬持臂113被悬持地设置于所述固定部111内，其中，所述至少一压电元件13被形成于所述至少二悬持臂113的至少其中之一。特别地，在本申请实施例中，所述至少一压电元件13被设置于所述至少二悬持臂113的至少其中之一，并被配置为在被导通后通过其自身的形变来作动所述悬持臂相对于所述固定部111向上或向下翘曲以带动所述可移动部112和所述感光芯片12移动以进行光学防抖
接着，贴附一补强板15于所述半导体结构的下表面。所述补强板15可以为强度较高的钢板或玻璃板。
然后，在所述镂空结构110内填充水解胶以预固定所述可移动部112。例如，在所述镂空结构110内注入水解胶，以预固定所述可移动部112。
然后，将感光芯片12贴装并电连接于所述可移动部112。
最后，去除所述水解胶以获得感光组件10。
申请概述
如上所述，光学对焦在提高移动电子设备的拍摄性能方面发挥着关键作用。该技术主要是通过驱动器来移动光学镜头沿着光轴方向移动以改变其与感光芯片之间的距离，以提高拍摄的清晰度。
在现有的具有摄像模组的移动电子设备中(例如，智能手机、照相机、摄像机)，通常会通过音圈马达(Voice Coil Actuator，VCM)等电磁式驱动器来移动摄像模组中的光学镜头来进行光学对焦。然而，在空间体积狭小的移动电子设备中，安装电磁式驱动器来实现光学对焦变得越来越困难。
并且，随着移动电子设备的成像系统越来越复杂，摄像模组朝着高像素、大芯片的趋 势发展，现有的诸如音圈马达之类的电磁式驱动器已逐渐难以满足摄像模组的驱动要求和封装尺寸要求。具体地，随着感光芯片朝着大像素和大尺寸方向发展，与其适配的光学镜头的尺寸和重点也逐渐增大，而现有的电磁式马达难以驱动100mg以上的部件。
因此，需要一种适配的用于摄像模组的新型驱动方案，且，新型的驱动器不仅能满足摄像模组对于光学性能调整的驱动要求，且能够满足摄像模组轻型化和薄型化的发展需求。
针对上述技术问题，本申请的技术构思是以MEMS(Micro-Electro-Mechanical Systems,微机电系统)驱动器来作为驱动元件来进行传感器位移(Sensor shift)以实现光学对焦。特别地，本申请所采用的驱动器为MEMS致动器，其次，所述MEMS致动器的作动对象为感光芯片。
相较于传统的基于音圈马达的光学对焦技术，通过MEMS致动器来驱动图像传感器进行沿着光轴方向移动以进行光学对焦具有诸多优势：高性能、10ms内完成亚微米精度定位、15ms内响应移动电子设备的抖动、尺寸小、没有电磁干扰。并且，与音圈马达相比，其成本低，并且当基板被实施为半导体基板时，可进行大规模量产。
基于此，本申请提供了一种感光组件，其包括：基板，包括：固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少一对悬持臂，所述可移动部通过所述至少一对悬持臂被悬持地设置于所述固定部内，所述至少一对悬持臂相对于所述可移动部对称地布置；被设置于且电连接于所述可移动部的感光芯片；以及，至少一对压电元件，其中，所述至少一对压电元件的各个压电元件被分别地设置于所述至少一对悬持臂的各个悬持臂，并被配置为在被导通后通过其自身的形变来作动所述至少一对悬持臂以从所述可移动部相对的第一侧和第二侧同时抬高或降低所述可移动部以使得所述感光芯片的感光面被抬高或降低，通过这样的方式来进行光学对焦。
在介绍本申请的基本原理之后，下面将参考附图来具体介绍本申请的各种非限制性实施例。
示例性摄像模组
如图17所示，根据本申请实施例的摄像模组被阐明，其包括：感光组件10和被保持于所述感光组件10的感光路径上的镜头组件20。特别地，在本申请实施例中，所述摄像模组以MEMS致动器作为驱动器并选择感光组件10的感光芯片作为驱动对象来进行光学对焦。
相应地，如图17所示，所述镜头组件20包括镜头载体21和安装于所述镜头载体21的光学镜头22，其中，所述光学镜头22设有一光轴。通常，所述光学镜头22包括镜筒和被安装于所述镜筒内的至少一光学透镜。本领域普通技术人员应知晓，所述光学镜头22的解像力在一定范围内与光学透镜的数量成正比，也就是，解像力越高，所述光学透镜的数量越多。在具体实施中，所述光学镜头22可被实施为一体式镜头，或者是分体式镜头，其中，当所述光学镜头22被实施为一体式镜头时，所述光学镜头22包含一个镜筒并且所有的所述光学透镜安装于所述镜筒内；而当所述光学镜被实施为分体式光学镜头22，所述光学镜头22由至少两部分镜头单体组装而成。
特别地，在本申请实施例中，所述镜头载体21为固定载体，即，当所述光学镜头22被安装于所述镜头载体21时，所述镜头载体21和所述光学镜头22之间的相对位置关系不 会发生改变。值得一提到的是，在本申请的一些示例中，所述光学透镜还可以被实施为“裸镜头”，即，所述光学镜头22仅包括至少一光学镜头22而所述镜头载体21形成所述至少一光学透镜的承载部件，对此，并不为本申请所局限。
相应地，如图18所示，在本申请实施例中，所述感光组件10包括基板11、电连接于所述基板11的感光芯片12、被设置于所述基板11的至少一对压电元件13和设置于所述基板11的支架14。在本申请实施例中，所述感光芯片12设有一感光轴，并且，所述感光轴与所述光学镜头22的光轴同轴，也就是，所述光学镜头22的光轴与所述感光芯片12的感光轴为同一根轴。
如图18所示，所述基板11包括固定部111和悬持地设置于所述固定部111内的可移动部112，通过这样的方式，所述基板11的可移动部112适于在所述至少一对压电元件13的作用下能够相对于所述固定部111发生位移。特别地，在本申请实施例中，所述感光芯片12被设置于且电连接于所述可移动部112，以使得所述感光芯片12适于与所述固定部111发生位移以进行光学对焦。
应注意到，在该实施例中，所述支架14被设置于所述基板11的固定部111且所述镜头组件20被安装于所述支架14上。在一个具体的示例中，所述支架14被实施为塑料支架，其通过黏着剂被固定于所述基板11的固定部111。应可以理解，在本申请其他示例中，所述支架14还可以被实施为其他类型的支架14，例如，模塑支架，对此并不为本申请所局限。在该实施例中，所述感光组件10进一步包括设置于所述支架14上的滤光元件17，其中，所述滤光元件17被保持于所述感光芯片12的感光路径用于对进入所述感光芯片12的成像光线进行过滤。
更具体地，如图18所示，所述基板11进一步包括设置于所述固定部111和所述可移动部112之间的至少一对悬持臂113，以通过所述至少一对悬持臂113所述可移动部112被悬持地设置于所述固定部111内。也就是，在该实施例中，所述可移动部112通过所述至少一对悬持臂113被悬吊于所述固定部111的内部，以允许所述可移动部112相对于所述固定部111发生位移以进行光学对焦。更具体地，在该实施例中，每一所述悬持臂包括相对的第一端1131和第二端1132，其中，所述第一端1131固定于所述固定部111，所述第二端1132固定于所述可移动部112，通过这样的方式，所述可移动部112通过所述至少一对悬持臂113被悬吊于所述固定部111的内部。
为了实现光学对焦，在本申请实施例中，所述至少一对悬持臂113相对于所述可移动部112对称地布置。并且，在本申请实施例中，所述至少一对压电元件13的各个压电元件被分别地设置于所述至少一对悬持臂113的各个悬持臂以形成所述MEMS致动器，并被配置为在被导通后通过其自身的形变来作动所述至少一对悬持臂113以从所述可移动部112相对的第一侧和第二侧同时抬高或降低所述可移动部112,以使得所述感光芯片12的感光面被抬高或降低，通过这样的方式来进行光学对焦。也就是，在本申请实施例中，所述至少一对压电元件13的各个压电元件被分别地设置于所述至少一对悬持臂113的各个悬持臂，并被配置为在被导通后通过其自身的形变来作动所述至少一对悬持臂113以从所述可移动部112相对的第一侧和第二侧产生相同高度的翘曲，以使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦
这里，在本申请实施例中，设置于所述悬持臂的所述压电元件形成MEMS致动器。优选地，在本申请实施例中，所述至少一对压电元件13中各个压电元件被分别设置于所述至少一对悬持臂113的各个悬持臂的上表面。
在本申请一个具体的示例中，所述基板11被实施为半导体基板，例如，如图19A和19B中所示意的半导体基板。如图19A和图19B所示，在该具体示例中，所述基板11自下而上包括硅基底层、氧化硅层和硅晶体层，也就是，所述基板11包括硅基底层、叠置于所述硅基底层的氧化硅层和叠置于所述氧化硅层的硅晶体层，其中，所述硅基底层的下表面形成所述基板11的下表面，所述硅晶体层的上表面形成所述基板11的上表面。在具体实施中，所述基板11可由SOI硅片(Silicon-on-insulator)制成，本领域普通技术人员应知晓，SOI硅片是成熟的半导体器件。相应地，在本申请实施例中，所述基板11的硅晶体层中设有集成电路，例如，在所述SOI硅片的电路层上采用标准的SOI CMOS工艺完成集成电路的制作。
为了保护所述集成电路，在该具体示例中，所述基板11进一步包括叠置于所述硅晶体层的钝化层以通过所述钝化层对配置于所述硅晶体层的集成电路进行保护。并且，在本申请实施例中，还可以在所述硅晶体层上通过表面贴装工艺贴附焊盘和导线等电连接结构16。
进一步地，如图19A和图19B所示，在该示例中，所述基板11具有相对的上表面和下表面，以及至少部分地贯穿于所述下表面和所述上表面之间的镂空结构110，其中，通过所述镂空结构110，所述基板11形成所述固定部111、所述可移动部112和延伸于所述固定部111和所述可移动部112之间的所述至少一对悬持臂113。也就是，通过对所述基板11进行镂空处理，所述基板11被分成两个部分：固定部111和可移动部112，其中，所述可移动部112通过所述至少一对悬持臂113悬持于所述固定部111内。
值得一提的是，在该具体示例中，所述固定部111、所述可移动部112和所述至少一对悬持臂113通过对所述半导体基板加工而成，因此，所述固定部111、可移动部112及至少一对悬持臂113具有一体式结构。所述一对悬持臂中各个悬持臂的厚度小于所述固定部111的厚度，以使得所述悬持臂能够在所述压电元件的作用下实现沿感光轴所设定的方向进行翘曲。
为了对所述基板11进行补强，如图18所示，在本申请实施例中，所述感光组件10进一步包括被设置于所述基板11的下表面的补强板。在具体实施中，所述补强板可被实施为金属板，例如，钢板等。
应可以理解，在本申请实施例中，为了满足电连接的需求，所述基板11的固定部111与可移动部112之间可设置电连接结构16(例如，当所述基板11为半导体基板时，所述电连接结构16为集成电路的一部分)，通过该电连接结构16实现所述摄像模组的电路导通。当然，在其他示例中，可以通过表面贴装工艺在所述基板11的上表面贴附焊盘和导线等电连接结构16；或者，通过LDS(激光直接成型技术)在所述基板11的上表面设置LDS槽，在LDS槽表面镀设导电镀层(例如可以是镍钯金的镀层)，通过连接电路与LDS槽中的导电镀层相连接，从而导出电路；又或者，通过Insert Molding(嵌入式注塑)技术，将导线成型在所述基板11，从而将连接电路与导线电连接从而导出电路。
相应地，在本申请实施例中，所述可移动部112的上表面设有电连接结构16，这样当 所述感光芯片12贴装于所述可移动部112的上表面时，所述感光芯片12能够通过形成于所述可移动部112的上表面的电连接结构16电连接于所述可移动部112。同样地，当所述至少一对压电元件13的各个压电元件被分别地设置于所述至少一对悬持臂113的各个悬持臂，其也能够通过形成于所述至少一对悬持臂113的表面的电连接结构16使得所述至少一对压电元件13被电连接于所述至少一对悬持臂113。当然，所述电连接结构16也可以设置于所述固定部111的上表面，并通过所述电连接结构16实现与外部的电路导通。所述固定部111、可移动部112与所述至少一对悬持臂113表面的电连接结构16可以为一体式结构也可以为分体式结构，对此，并不为本申请所局限。
值得一提的是，在本申请其他示例中，所述基板11还可以被实施为其他类型的基板，其包括但不限于：塑料基板、金属基板等。为了便于说明，在本申请实施例中，以所述基板11被实施为半导体基板为示例。
更具体地，如图20所示，在本申请实施例中，所述至少一对悬持臂113包括第一悬持臂114、第二悬持臂115、第三悬持臂116和第四悬持臂117，其中，所述第一悬持臂114和所述第二悬持臂115相对于所述可移动部112以X轴为对称轴对称地布置，所述第三悬持臂116和所述第四悬持臂117相对于所述可移动部112以Y轴为对称轴对称地布置，所述第一悬持臂114与所述第三悬持臂116相邻布置、所述第二悬持臂115与所述第四悬持臂117相邻布置。也就是，在本申请实施例中，所述至少一对悬持臂113包括两对悬持部，其中，所述第一悬持臂114和所述第二悬持臂115组成一对悬持臂，所述第三悬持臂116和所述第四悬持臂117组成一对悬持臂。
在该实施例中，所述第一悬持臂114、所述第二悬持臂115、所述第三悬持臂116和所述第四悬持臂117被设置于所述可移动部112的四侧，以允许从所述感光芯片12的X轴方向或Y轴方向同时抬高或降低所述感光芯片12以进行光学对焦。这里，为了便于说明，设定所述第一悬持臂114所在的侧部为第一侧，所述第二悬持臂115所在的侧部为第二侧，所述第三悬持臂116所在的侧部为第三侧，所述第四悬持臂117所在的侧部为第四侧。
相对应地，所述至少一对压电元件13包括第一压电元件131、第二压电元件132、第三压电元件133和第四压电元件134，其中，所述第一压电元件131被设置于所述第一悬持臂114、所述第二压电元件132被设置于所述第二悬持臂115、所述第三压电元件133被设置于所述第三悬持臂116，以及，所述第四压电元件134被设置于所述第四悬持臂117。也就是，在该实施例中，所述至少一对压电元件13包括两对压电元件，其中，所述第一压电元件131和所述第二压电元件132组成一对压电元件，所述第三压电元件133和所述第四压电元件134组成另一对压电元件。
在工作过程中，所述第一压电元件131被配置为在被导通后通过其自身形变来作动所述第一悬持臂114相对于所述固定部111沿所述感光芯片12的感光轴所设定的方向(即，所述光轴所设定的方向)翘曲以从所述可移动部112的第一侧带动所述可移动部112和所述感光芯片12，所述第二压电元件132被配置为在被导通后通过其自身形变来作动所述第二悬持臂115相对于所述固定部111沿所述感光芯片12的感光轴所设定的方向翘曲以从所述可移动部112的第二侧带动所述可移动部112和所述感光芯片12，其中，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第二 压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程以进行光学对焦。
在具体实施中，可给所述第一压电元件131和所述第二压电元件132输入相同的电压，这样，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦。也就是说，给所述第一压电元件131和所述第二压电元件132输入相同的电压，使得所述第一压电元件131和所述第二压电元件132带动所述第一悬持臂114和所述第二悬持臂115从所述可移动部112相对的第一侧和第二侧产生相同高度的翘曲，以使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦。
在工作过程中，所述第三压电元件133被配置为在被导通后通过其自身形变来作动所述第三悬持臂116相对于所述固定部111沿所述感光芯片12的感光轴所设定的方向翘曲以从所述可移动部112的第三侧带动所述可移动部112和所述感光芯片12，所述第二压电元件132被配置为在被导通后通过其自身形变来作动所述第四悬持臂117相对于所述固定部111沿所述感光芯片12的感光轴所设定的方向翘曲以从所述可移动部112的第四侧带动所述可移动部112和所述感光芯片12，其中，所述第三压电元件133从所述可移动部112的第三侧带动所述感光芯片12上升或下降的高度等于所述第四压电元件134从所述可移动部112的第四侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦。
在具体实施中，可给所述第三压电元件133和所述第四压电元件134输入相同的电压，这样，所述第三压电元件133从所述可移动部112的第三侧带动所述感光芯片12上升或下降的高度等于所述第四压电元件134从所述可移动部112的第四侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦。
值得一提的是，在工作过程中，所述第一压电元件131和所述第二压电元件132同时工作，所述第三压电元件133和所述第四压电元件134同时工作。也就是，在工作过程中，至少一对压电元件13工作以驱动至少一对悬持臂113来进行光学对焦。在具体实施中，可控制一对压电元件工作，例如，控制所述第一压电元件131和所述第二压电元件132同时工作，也可以控制两对压电元件同时工作，即，控制所述第一压电元件131、所述第二压电元件132、所述第三压电元件133和所述第四压电元件134同时工作。
相应地，在本申请实施例中，所述至少一对压电元件13设置于所述可移动部112的相对的两侧，并且给所述至少一对压电元件13中各个压电元件通相同的电压，使得所述感光芯片12的感光面沿光轴所在的高度方向上移动，以实现光学对焦。量化来看，在本申请实施例中，所述摄像模组的自动对焦形成为200um至600um，优选地，为400um。也就是，通过压电元件形成的MEMS致动器来驱动感光芯片12进行光学对焦，其具有相对较长的对焦行程。
更具体地，如图20所示，在本申请实施例中，每一所述悬持臂具有相对的两长边和相对的两短边，其中，所述悬持臂的第一端1131和第二端1132形成于两条长边上。也就是，在本申请实施例中，所述悬持臂的第一端1131和第二端1132自所述悬持臂的两条长边分别 往外延伸，并分别连接于所述固定部111和所述可移动部112。
如图20所示，进一步地，在本申请实施例中，每一所述悬持臂具有悬臂主体和至少部分地贯穿于所述悬臂主体的分隔槽，其中，以通过所述分隔槽所述悬臂主体被分为相互可移动的两个悬臂部，其中，所述悬臂部的边缘形成所述长边，并且，在本申请实施例中，每个所述悬臂部被所述第一端1131和所述第二端1132分为两个悬臂子部。
具体地，在本申请实施例中，所述第一悬持臂114包括第一悬臂主体1141和至少部分地贯穿于所述第一悬臂主体1141的第一分隔槽1142，其中，通过所述第一分隔槽，所述第一悬臂主体1141被分为相互可移动的第一悬臂部1143和第二悬臂部1144，所述第一悬臂部1143具有由所述第一端1131划分而成的第一悬臂子部1145和第二悬臂子部1146，所述第二悬臂部1144具有由所述第二端1132划分而成的第三悬臂子部1147和第四悬臂子部1148。
所述第二悬持臂115包括第二悬臂主体1151和至少部分地贯穿于所述第二悬臂主体1151的第二分隔槽1152，其中，通过所述第二分隔槽1152所述第二悬臂主体1151被分为相互可移动的第三悬臂部1153和第四悬臂部1154，所述第三悬臂部1153具有由所述第一端1131划分而成的第五悬臂子部1155和第六悬臂子部1156，所述第四悬臂部1154具有由所述第二端1132划分而成的第七悬臂子部1157和第八悬臂子部1158。
所述第三悬持臂116包括第三悬臂主体1161和至少部分地贯穿于所述第三悬臂主体1161的第三分隔槽1162，其中，通过所述第三分隔槽1162，所述第三悬臂主体1161被分为相互可移动的第五悬臂部1163和第六悬臂部1164，所述第五悬臂部1163具有由所述第一端1131划分而成的第九悬臂子部1165和第十悬臂子部1166，所述第六悬臂部1164具有由所述第二端1132划分而成的第十一悬臂子部1167和第十二悬臂子部1168。
所述第四悬持臂117包括第四悬臂主体1171和至少部分地贯穿于所述第四悬臂主体1171的第四分隔槽1172，其中，通过所述第四分隔槽1172所述第四悬臂主体1171被分为相互可移动的第七悬臂部1173和第八悬臂部1174，所述第七悬臂部1173具有由所述第一端1131划分而成的第十三悬臂子部1175和第十四悬臂子部1176，所述第八悬臂部1174具有由所述第二端1132划分而成的第十五悬臂子部1177和第十六悬臂子部1178。
相应地，在该实施例中，所述第一压电元件131包括被设置于所述第一悬臂子部1145的所述第一压电片1311、被设置于所述第二悬臂子部1146的第二压电片1312、被设置于所述第三悬臂子部1147的所述第三压电片1313和被设置于所述第四悬臂子部1148的第四压电片1314，以通过所述4个压电片的收缩或舒张来带动所述第一悬臂部1143和/或所述第二悬臂部1144向上或向下发生翘曲，如图21所示。特别地，在该实施例中，所述第一压电片1311、所述第二压电片1312、所述第三压电片1313和所述第四压电片1314被设置于所述第一悬臂子部1145、第二悬臂子部1146、所述第三悬臂子部1147和所述第四悬臂子部1148的上表面，以通过所述4个压电片的收缩或舒张来带动所述第一悬臂部1143和/或所述第二悬臂部1144向上或向下发生翘曲进而从所述感光芯片12的第一侧带动所述可移动部112和所述感光芯片12。
相应地，在该实施例中，所述第二压电元件132包括被设置于所述第五悬臂子部1155的所述第五压电片1321、被设置于所述第六悬臂子部1156的第六压电片1322、被设置于所 述第七悬臂子部1157的所述第七压电片1323和被设置于所述第八悬臂子部1158的第八压电片1324，以通过所述4个压电片的收缩或舒张来带动所述第三悬臂部1153和/或所述第四悬臂部1154向上或向下发生翘曲。特别地，在该实施例中，所述第五压电片1321、所述第六压电片1322、所述第七压电片1323和所述第八压电片1324被设置于所述第五悬臂子部1155、所述第六悬臂子部1156、所述第七悬臂子部1157和所述第八悬臂子部1158的上表面，以通过所述4个压电片的收缩或舒张来带动所述第三悬臂部1153和/或所述第四悬臂部1154向上或向下发生翘曲进而从所述感光芯片12的第二侧带动所述可移动部112和所述感光芯片12。
特别地，在本申请实施例中，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦。也就是说，给所述第一压电元件131和所述第二压电元件132设置相同的电压，以使得所述第一压电元件131和所述第二压电元件132能够翘曲相同的高度，从而使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦。
相应地，在该实施例中，所述第三压电元件133包括被设置于所述第九悬臂子部1165的所述第九压电片1331、被设置于所述第十悬臂子部1166的第十压电片1332、被设置于所述第十一悬臂子部1167的所述第十一压电片1333和被设置于所述第十二悬臂子部1168的第十二压电片1334，以通过所述4个压电片的收缩或舒张来带动所述第五悬臂部1163和/或所述第六悬臂部1164向上或向下发生翘曲，如图21所示。特别地，在该实施例中，所述第九压电片1331、所述第十压电片1332、所述第十一压电片1333和所述第十二压电片1334被设置于所述第九悬臂子部1165、第十悬臂子部1166、所述第十一悬臂子部1167和所述第十二悬臂子部1168的上表面，以通过所述4个压电片的收缩或舒张来带动所述第五悬臂部1163和/或所述第六悬臂部1164向上或向下发生翘曲进而从所述感光芯片12的第三侧带动所述可移动部112和所述感光芯片12。
相应地，在该实施例中，所述第四压电元件134包括被设置于所述第十三悬臂子部1175的所述第十三压电片1341、被设置于所述第十四悬臂子部1176的第十四压电片1342、被设置于所述第十五悬臂子部1177的所述第十五压电片1343和被设置于所述第十六悬臂子部1178的第十六压电片1344，以通过所述4个压电片的收缩或舒张来带动所述第七悬臂部1173和/或所述第八悬臂部1174向上或向下发生翘曲。特别地，在该实施例中，所述第十三压电片1341、所述第十四压电片1342、所述第十五压电片1343和所述第十六压电片1344被设置于所述第十三悬臂子部1175、所述第十四悬臂子部1176、所述第十五悬臂子部1177和所述第十六悬臂子部1178的上表面，以通过所述4个压电片的收缩或舒张来带动所述第七悬臂部1173和/或所述第八悬臂部1174向上或向下发生翘曲进而从所述感光芯片12的第四侧带动所述可移动部112和所述感光芯片12。
特别地，在本申请实施例中，所述第三压电元件133从所述可移动部112的第三侧带动所述感光芯片12上升或下降的高度等于所述第四压电元件134从所述可移动部112的第四侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦。也就是说，给所述第三压电元件133和所述第四压电元件134设置相同的电压，以使得所述第三 压电元件133和所述第四压电元件134能够翘曲相同的高度。
更具体地，如图22A所示，在一种驱动模式中，设置于所述第一悬持臂114的所述第一压电元件131的所述第一压电片1311和所述第二压电片1312在一定电压的作用下发生收缩，带动所述第一悬臂子部1145和第二悬臂子部1146发生向上翘曲；所述第一压电元件131的所述第三压电片1313和第四压电片1314在一定电压作用下发生收缩，带动所述第三悬臂子部1147和所述第四悬臂子部1148发生向上翘曲，通过这样的方式，从所述感光芯片12的第一侧抬高所述可移动部112和所述感光芯片12。
与此同时，如图22A所示，设置于所述第二悬持臂115的所述第二压电元件132的所述第五压电片1321和第六压电片1322在一定电压的作用下发生收缩，带动所述第二悬持臂115的第五悬臂子部1155和第六悬臂子部1156发生向上翘曲；所述第二压电元件132的所述第七压电片1323和第八压电片1324在一定的电压作用下发生收缩，带动所述第七悬臂子部1157和第八悬臂子部1158发生向上翘曲。通过这样的方式，从所述感光芯片12的第二侧抬高所述可移动部112和所述感光芯片12。
特别地，如图22A所示，在该实施例中，在本申请实施例中，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12上升的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升的高度，通过这样的方式，使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦。
值得一提的是，在具体实施中，所述第一压电片1311和第二压电片1312、第三压电片1313和第四压电片1314设置的电压可以相同也可以不同，其中，当电压相同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度相同；当电压不同时，第一悬臂子部1145和第二悬臂子部1146发生向上翘曲的高度与第三悬臂子部1147和第四悬臂子部1148发生向上翘曲的高度不同。同样地，所述第二压电元件132的第五压电片1321和第六压电片1322、第七压电片1323和第八压电片1324设置的电压可以相同也可以不同，其中，当电压相同时第五悬臂子部1155和第六悬臂子部1156发生向上翘曲的高度与第七悬臂子部1157和第八悬臂子部1158发生向上翘曲的高度相同；当电压不同时，第五悬臂子部1155和第六悬臂子部1156发生向上翘曲的高度与第七悬臂子部1157和第八悬臂子部1158发生向上翘曲的高度不同。
更具体地，如图22B所示，在另一种驱动模式中，设置于所述第一悬持臂114的所述第一压电元件131的所述第一压电片1311和所述第二压电片1312在一定电压的作用下发生舒张，带动所述第一悬臂子部1145和第二悬臂子部1146发生向下翘曲；所述第一压电元件131的所述第三压电片1313和第四压电片1314在一定电压作用下发生舒张，带动所述第三悬臂子部1147和所述第四悬臂子部1148发生向下翘曲，通过这样的方式，从所述感光芯片12的第一侧降低所述可移动部112和所述感光芯片12。
与此同时，如图22B所示，设置于所述第二悬持臂115的所述第二压电元件132的所述第五压电片1321和第六压电片1322在一定电压的作用下发生舒张，带动所述第二悬持臂115的第五悬臂子部1155和第六悬臂子部1156发生行下翘曲；所述第二压电元件132的所述第七压电片1323和第八压电片1324在一定的电压作用下发生舒张，带动所述第七 悬臂子部1157和第八悬臂子部1158发生向下翘曲。通过这样的方式，从所述感光芯片12的第二侧降低所述可移动部112和所述感光芯片12。
特别地，如图22B所示，在该实施例中，在本申请实施例中，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12下降的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12下降的高度，通过这样的方式，来进行光学对焦。
应可以理解，根据本申请实施例的所述摄像模组还能够其他驱动模式驱动，例如，通过所述第一压电元件131、所述第二压电元件132、所述第三压电元件133和所述第四压电元件134同时抬高所述感光芯片12或降低所述感光芯片12，通过这样的方式使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦。
为了便于所述压电元件通过作动所述悬持臂来移动所述可移动部112，优选地，所述悬持臂具有相对较小的厚度。特别地，在该实施例中，所述悬持臂的厚度尺寸范围为0.1mm-0.3mm。在本申请实施例中，所述压电元件可被实施为掺杂PZT的具有极优压电特性的材料。所述压电元件的厚度为1um-0.5mm之间，以在所述压电元件具有较大驱动力的时使得所述悬持臂具有良好的可靠性。
当然，也可以在所述至少一压电元件与所述至少一对悬持臂113之间设置一弹性构件(未有图示意)，通过所述弹性构件增加所述可移动部112和所述感光芯片12的可移动行程。
值得一提的是，虽然在本申请实施例中，以包括两对悬持部和两对压电元件为示例，应可以理解，在本申请其他示例中，所述至少一对悬持臂113还可以被实施为其他对数的悬持臂，所述至少一对压电元件13还可以被实施为其他对数的压电元件。例如，在本申请其他示例中，所述至少一对悬持臂113仅包括一对悬持臂：第一悬持臂114和第二悬持臂115，所述至少一对压电元件13仅包括一对压电元件，其中，所述第一压电元件131被配置为在被导通后通过其自身形变来作动所述第一悬持臂114相对于所述固定部111沿所述感光芯片12的感光轴所设定的方向翘曲以从所述可移动部112的第一侧带动所述可移动部112和所述感光芯片12，所述第二压电元件132被配置为在被导通后通过其自身形变来作动所述第二悬持臂115相对于所述固定部111沿所述感光芯片12的感光轴所设定的方向翘曲以从所述可移动部112的第二侧带动所述可移动部112和所述感光芯片12，其中，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦，对此，并不为本申请所局限。
当然，本申请中，所述第一悬持臂114与所述第一压电元件131也可以采用其他的方式进行划分。例如：所述第一悬持臂114被所述第一端1131和所述第二端1132分为第一悬臂部1143和第二悬臂部1144，所述第一悬臂部1143被所述分隔槽分为第一悬臂子部1145和第二悬臂子部1146，所述第一悬臂子部1145连接于所述第一端1131，所述第二悬臂子部1146连接于所述第二端1132。所述第一压电片1311设置于所述第一悬臂子部1145，所述第二压电片1312设置于所述第二悬臂子部1146，所述第一压电片1311沿第一方向延伸， 所述第二压电片1312沿第二方向延伸，所述第一方向与第二方向为沿x轴所在方向的正向和负向。在通电后，所述第一悬臂部1143的所述第一悬臂子部1145和第二悬臂子部1146在所述第一压电片1311和所述第二压电片1312的驱动下产生沿高度方向的行程。所述高度方向即所述感光轴所设定的方向。由于所述移动部和所述感光芯片12可移动的行程为第一悬臂子部1145和第二悬臂子部1146的叠加行程，因此会产生更大的光学对焦行程。
所述第二悬臂部1144被所述分隔槽分为第三悬臂子部1147和第四悬臂子部1148，所述第三悬臂子部1147连接于所述第一端1131，所述第四悬臂子部1148连接于所述第二端1132。所述第三压电片1313设置于所述第三悬臂子部1147，所述第四压电片1314设置于所述第四悬臂子部1148，所述第三压电片1313沿第一方向延伸，所述第四压电片1314沿第二方向延伸。在通电后，所述第二悬臂部1144的所述第三悬臂子部1147和第四悬臂子部1148在所述第三压电片1313和所述第四压电片1314的驱动下产生沿高度方向的行程。
图23图示了根据本申请实施例的所述悬持臂的一个变形实施的示意图。如图23所示，在该变形实施例中，所述至少一对悬持臂113包括相对于所述可移动部112的中心对称部分的第一悬持臂114A和第二悬持臂115A。并且，相较于图17至图19B所示意的实施例中，在该变形实施例中，为了进一步地获得更大的对焦行程，对所述悬持臂的形状做出了调整。
以所述第一悬持臂114A为例来说明，如图23所示，在该变形实施例中，所述第一悬持臂114A包括第一悬臂主体1141A和至少部分地贯穿于所述第一悬臂主体1141A的第一分隔槽1142A和第二分隔槽1152A，其中，通过所述第一分隔槽1142A和所述第二分隔槽1152A所述第一悬臂主体1141A被分为相互之间可移动的第一悬臂部1143A、第二悬臂部1144A和第三悬臂部1153A，其中，所述第一悬臂部1143A具有由所述第一分隔槽1142A划分而成的第一悬臂子部1145A和第二悬臂子部1146A，所述第二悬臂部1144A具有由所述第一分隔槽1142A划分而成的第三悬臂子部1147A和第四悬臂子部1148A，所述第三悬臂部1153A具有由所述第一分隔槽1142A和所述第二分隔槽1152A划分而成的第五悬臂子部1155A和第六悬臂子部1156A。也就是，相较于图20所示意的悬持臂，在该变形实施例中，所述悬持臂包括三个相互可移动的悬臂部，以通过额外增加的一个悬臂部来增加所述可移动部112和所述感光芯片12向下或向上移动的行程。
特别地，在该变形实施例中，所述第一分隔槽1142A具有十字型，其在纵向方向上和横向方向上对所述第一悬持主体1141A进行切分，以使得形成具有第一悬臂子部1145A和第二悬臂子部1146A的第一悬臂部1143A和具有第三悬臂子部1147A和第四悬臂子部1148A的所述第二悬臂部1144A。进一步地，所述第二分隔槽1152A和所述第一分隔槽1142A相配合将所述第二悬臂部1144A进一步地切分以形成具有第五悬臂子部1155A和第六悬臂子部1156A的第三悬臂部1153A。
相应地，在该变形实施例中，所述第一压电元件131A包括被设置于所述第一悬臂子部1145A的所述第一压电片1311A、被设置于所述第二悬臂子部1146A的第二压电片1312A、被设置于所述第三悬臂子部1147A的所述第三压电片1313A和被设置于所述第四悬臂子部1148A的第四压电片1314A、被设置于第五悬臂子部1155A的第五压电片1321A和被设置于所述第六悬臂子部1156A的第六压电片1322A，以通过所述第一压电片1311A和所述第二压电片1312A、所述第三压电片1313A和所述第四压电片1314A，以及，所述第五压电 片1321A和所述第六压电片1322A的收缩或舒张来从所述感光芯片12的第一侧带动所述可移动部112和所述感光芯片12。
同样地，在该变形实施例中，与所述第一悬持臂114A配对的第二悬持臂115A，包括：第二悬臂主体1151A和至少部分地贯穿于所述第二悬臂主体1151A的第三分隔槽1162A和第四分隔槽1172A，其中，通过所述第三分隔槽1162A和所述第四分隔槽1172A所述第二悬臂主体1151A被分为相互可移动的第四悬臂部1154A、第五悬臂部1163A和第六悬臂部1164A，所述第四悬臂部1154A具有由所述第三分隔槽1162A划分而成的第七悬臂子部1157A和第八悬臂子部1158A，所述第五悬臂部1163A具有由所述第三分隔槽1162A划分而成的第九悬臂子部1165A和第十悬臂子部1166A、所述第六悬臂部1164A具有由所述第三分隔槽1162A和所述第四分隔槽1172A划分而成的第十一悬臂子部1167A和第十二悬臂子部1168A。
相应地，如图23所示，在该变形实施例中，所述第三分隔槽1162A具有十字型，其在纵向方向上和横向方向上对所述第二悬臂主体1151A进行切分，以使得形成具有第七悬臂子部1157A和第八悬臂子部1158A的第四悬臂部1154A和具有第九悬臂子部1165A和第十悬臂子部1166A的所述第五悬臂部1163A。进一步地，所述第四分隔槽1172A和所述第三分隔槽1162A相配合将所述第五悬臂部1163A进行进一步地切分以形成具有第十一悬臂子部1167A和第十二悬臂子部1168A的第六悬臂部1164A。
相应地，所述第二压电元件132A包括被设置于所述第七悬臂子部1157A的所述第七压电片1323A、被设置于所述第八悬臂子部1158A的第八压电片1324A、被设置于所述第九悬臂子部1165A的所述第九压电片1331A、被设置于所述第十悬臂子部1166A的第十压电片1332A、被设置于所述第十一悬臂子部1167A的所述第十一压电片1333A和被设置于所述第十二悬臂子部1168A的第十二压电片1334A，以通过所述第七压电片1323A和所述第八压电片1324A、所述第九压电片1331A和所述第十压电片1332A，以及，所述第十一压电片1333A和所述第十二压电片1334A的收缩或舒张来从所述感光芯片12的第二侧带动所述可移动部112和所述感光芯片12。
特别地，所述第一压电元件131A从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，来进行光学对焦。
图24图示了根据本申请实施例的所述基板11的另一个变形实施的示意图。在该变形实施例中，所述悬持臂的形状再次发生改变。
具体地，如图24所示，所述第一悬持臂114B包括沿着X轴方向延伸的第一悬臂段1141B和沿着Y轴方向延伸的第二悬臂段1142B，所述第二悬持臂115B包括沿着X轴方向延伸的第三悬臂段1151B和沿着Y轴方向延伸的第四悬臂段1152B，其中，所述至少一对压电元件13包括第一压电元件131和第二压电元件132，所述第一压电元件131被设置于所述第一悬持臂114的第一悬臂段1141B，所述第二压电元件132被设置于所述第二悬持臂115的第三悬臂段1151B，其中，所述第一压电元件131被配置为在被导通后通过自身形变来作动所述第一悬持臂114B以从所述可移动部112的第一侧带动所述可移动部112和所述感光芯片12，所述第二压电元件132被配置为在被导通后通过自身形变来作动所述第二悬 持臂115B以从所述可移动部112的第二侧带动所述可移动部112和所述感光芯片12，其中，所述第一压电元件131从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第二压电元件132从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦。
并且，在该变形实施例中，所述至少一对压电元件13还包括第三压电元件133和第四压电元件134，所述第三压电元件133被设置于所述第一悬持臂114B的第二悬臂段1142B，所述第四压电元件134被设置于所述第二悬持臂115B的第四悬臂段1152B；其中，所述第三压电元件133被配置为在被导通后通过自身形变来作动所述第一悬持臂114B以从所述可移动部112的第一侧带动所述可移动部112和所述感光芯片12；所述第四压电元件134被配置为在被导通后通过自身形变来作动所述第二悬持臂115B以从所述可移动部112的与所述第一侧相对的第二侧来带动所述可移动部112和所述感光芯片12，其中，所述第三压电元件133从所述可移动部112的第一侧带动所述感光芯片12上升或下降的高度等于所述第四压电元件134从所述可移动部112的第二侧带动所述感光芯片12上升或下降的高度，通过这样的方式，使得所述感光芯片12的感光面相对于所述固定部111产生沿高度方向的行程，通过这样的方式来进行光学对焦。
更具体地，在该变形实施例中，所述第一悬持臂114B具有“L”型结构，和/或，所述第二悬持臂115B具有“L”型结构。也就是，所述第一悬持臂114和/所述第二悬持臂115B为L型臂。为使得所述感光芯片12能平稳的移动，所述第一悬持臂114B和所述第二悬持臂115B与所述可移动部112连接的第一端1131分别位于所述可移动部112相对两边的中点处。
图25图示了根据本申请实施例的所述基板11的另一个变形实施的示意图。在该变形实施例中，所述悬持臂的形状再次发生调整。如图25所示，在该实施例中，所述第一悬持臂114B和所述第二悬持臂115B具有三段式结构，其包括沿着Y轴方向延伸的第二悬臂段1142B和沿着X轴方向延伸的两个第一悬臂段1141B。当然，在本申请其他变形实施例中，所述悬持臂的形状还可以进行其他方式的异构，对此并不为本申请所局限。相应地，可基于如上所述的原理在所述第一悬臂段1141B和所述第二悬臂段1142B上设置所述一对或多对压电元件，以进行光学对焦。
还值得一提的是，在上述实施例中，以所述压电元件被设置于所述悬持臂的上表面为示例，应可以理解，在本申请其他示例中，所述压电元件可同时设置于所述悬持臂的上表面和下表面，或者，仅设置于悬持臂的下表面，对此，并不为本申请所局限。
综上，基于本申请实施例的所述摄像模组被阐明，其中，所述摄像模组所述摄像模组采用新型的MEMS致动器作为驱动元件来驱动感光芯片12位移来实现光学对焦。特别地，在本申请实施例中，所述MEMS致动器通过设置于基板11的压电元件构成，相较于传统的基于音圈马达的光学对焦技术，基于MEMS致动器来作动所述感光芯片12以进行光学对焦的技术方案具有诸多优势：高性能、10ms内完成亚微米精度定位、更大的光学对焦行程、尺寸小、没有电磁干扰。
图26示出了本申请一个实施例的摄像模组的纵向剖面示意图。参考图26，本实施例 中，所述摄像模组包括感光组件100和安装于感光组件100顶面的光学致动器200，以及安装于光学致动器200内的光学镜头300。进一步地，图27示出了本申请一个实施例的摄像模组的俯视示意图。结合参考图26和图27，本实施例中，所述光学镜头300包括镜筒310和安装于所述镜筒310内的至少一光学透镜320(例如图26中光学透镜的数目为四个)。在俯视角度下，所述镜筒310的外侧面呈矩形，其内侧面呈圆形，即镜筒310内部设可以置有圆形通孔以在镜筒310的内侧面容纳和安装光学透镜320。所述光学致动器200包括外壳210(也可以称为致动器壳体)、设置在外壳210和镜筒310之间的外框架220，所述外框架220具有至少两个互相平行的第一侧壁221，并且这两个第一侧壁221均平行于所述光学镜头300的光轴。本实施例中，在外框架220的第一侧壁221与镜筒310的外侧面之间设置线状压电驱动装置230。图28示出了本申请一个实施例中的线状压电驱动装置。参考图28，所述线状压电驱动装置230包括线状压电元件231、动子232和摩擦部233。其中动子232可以承靠并固定于所述镜筒310的外侧面，摩擦部233设置在动子232和线状压电元件231之间。也就是说，所述动子232、所述摩擦部233以及所述线状压电元件231由内向外依次排列。在镜筒310与外框架220之间设置弹簧弹片240(或者其他类型的弹性元件)，通过弹簧弹片240连接所述镜筒310与所述外框架220，该弹簧弹片240提供弹力，为线状压电驱动装置230提供预压力(或称为预紧力)。所述外壳210内部容纳所述光学镜头300、所述外框架220及所述光学致动器200，所述外壳210的外形大致成矩形形状。所述外壳210的顶部可以具有圆形开口，以便光线可穿过外壳210入射所述光学镜头300。进一步地，本实施例中，所述的线状压电元件231具有第一极化区域段A1和第二极化区域段A2，第一极化区域段A1和第二极化区域段A2可以具有多个且这两类极化区域段沿着所述线状压电元件231的长度方向交替设置。第一极化区域段A1和第二极化区域段A2均沿所述线状压电元件231的厚度方向极化，且二者极化方向相反。对第一极化区域段A1施加第一驱动电压，对第二极化区域段A2施加第二驱动电压，线状压电元件231将在逆压电效应的作用下改变其表面形状。具体来说，当所述第一驱动电压与第二驱动电压相位差为π/2时，第一极化区域段A1与第二极化区域段A2的表面的质点均发生振动，该振动是一种超声波微观振动，也可以称为微幅椭圆运动。所述线状压电元件231表面质点的微幅椭圆运动可以使线状压电元件231的表面整体上呈波动的波浪状，第一极化区域段A1与第二极化区域段A2的表面的波动方向一致，从而线状压电元件231的表面可以耦合成行波式的波动状态。当线状压电元件231的表面做行波式的运动时，压电元件相对于动子具有一运动趋势，而线状压电元件与动子之间的摩擦部可以产生静摩擦力，以阻止该运动趋势，并且该静摩擦力可以驱动动子移动，其移动方向为平行于光轴的方向，该方向例如可以标记为光轴的正方向。类似地，当所述第一驱动电压与第二驱动电压相位差为-π/2时，第一极化区域段A1与第二极化区域段A2的表面的各个质点产生微幅椭圆运动，此时质点做微幅椭圆运动的方向与相位差为π/2时的运动方向相反。例如，假设当第一驱动电压与第二驱动电压相位差为π/2时，第一极化区域段A1与第二极化区域段A2的表面的质点产生顺时针的微幅椭圆运动，那么当第一驱动电压与第二驱动电压相位差为-π/2时，第一极化区域段A1与第二极化区域段A2的表面的质点则产生逆时针的微幅椭圆运动。本实施例中，当线状压电元件表面的质点产生逆时针运动时，摩擦力将驱动动子反向运动，即沿着光轴负方向运动。图 29示出了本申请一个实施例中的动子的移动方向。参考图29，本实施例中，动子232的移动方向平行于线状压电元件231的长度方向。
进一步地，图30a示出了本申请一个实施例中线状压电元件表面波动时的动子、摩擦部和线状压电元件的作用关系的示意图。参考图30a，本实施例中，对第一极化区域段A1施加第一驱动电压，对第二极化区域段A2施加第二驱动电压，并使所述第一驱动电压与第二驱动电压相位差为π/2，使得线状压电元件231的表面的各个质点形成一运动轨迹为椭圆的微幅椭圆运动(图31示出了线状压电元件的表面的一个质点的微幅椭圆运动的运动方向)，各个质点的微幅椭圆运动在宏观上呈现为线状压电元件231表面的波浪状的波动，并且该波动以行波的方式沿第一方向D1运动。即在施加上述驱动电压组合(该驱动电压组合中，所述第一驱动电压与第二驱动电压相位差为π/2)期间，线状压电元件231的波浪状表面的波峰和波谷均沿着第一方向D1移动。由于摩擦部233固定于线状压电元件231的表面，因此在线状压电元件231的表面的行波沿着第一方向D1移动时，所述摩擦部231也会沿着第一方向D1移动或者产生沿着第一方向D1移动的运动趋势。参考图30a，第一极化区域段A1的表面处于波峰状态，即第一极化区域段A1向靠近镜头300的一侧拱起(即向模组的内侧拱起)，使得第一极化区域段A1处的摩擦部233与动子232紧密接触，从而在摩擦部233和定子232的接触面形成摩擦力(通常是静摩擦力)，该摩擦力的方向与线状压电元件231的波峰移动的方向相反，从而带动动子沿着相反方向，即沿着第二方向D2移动。而对于第二极化区域段A2，由于图30a所示的状态下，第二极化区域段A2的表面处于波谷状态，即第二极化区域段A2的表面向远离镜头300的一侧拱起(即向模组的外侧拱起)，使得第二极化区域段A2处的摩擦部233与动子232脱离接触，因此第二极化区域段A2表面波谷的移动不会作用于动子232。进一步地，当线状压电元件231表面的行波继续移动时，可以使得该线状压电元件231表面的波动进入第二状态。图30b示出了第二状态下的动子、摩擦部和线状压电元件的作用关系的示意图。参考图30b，在第二状态下，第一极化区域段A1的表面处于波谷状态，该位置的摩擦部233与动子232脱离接触，而第二极化区域段A2的表面处于波峰状态，该位置的摩擦部233与动子232紧密接触。此时，第二极化区域段A2处的摩擦部233与动子232的接触面产生摩擦力(通常为静摩擦力)，以克服摩擦部233相对于动子232的向第一方向D1的运动趋势，从而在该摩擦力的作用下促使动子232向相反的方向，即向第二方向D2移动。由于动子232是固定在镜筒的外侧面的，所以在所述的第一驱动电压组合(即所述第一驱动电压与第二驱动电压相位差为π/2)的作用下，镜筒和光学镜头300可以在动子232的带动下沿着第二方向D2移动，从而实现光学镜头300沿着光轴的正方向上的移动。
进一步地，当对第一极化区域段A1和第二极化区域段A2施加第二驱动电压组合，即所述第一驱动电压与第二驱动电压相位差为-π/2，那么线状压电元件231表面的波的运动方向为第二方向D2，此时动子232将沿着第一方向D1移动，从而实现光学镜头沿着光轴的负方向上的移动。其具体原理可参考前文中对第一驱动电压组合驱动下的移动类似，此处不再赘述。
可以看出，基于线状压电元件，对其中第一极化区域段A1和第二极化区域段A2施加第一驱动电压组合和第二驱动电压组合，即可实现对光学镜头光轴方向上的双向驱动。本 申请的一些实施例中，线状压电元件的长度可以小于20mm，宽度可以小于1mm，厚度可以小于1.5mm。其中该厚度可以是线状压电元件本身厚度加上摩擦部厚度的总厚度，即线状压电元件与摩擦部的总厚度可以小于1.5mm。由于该线状压电元件及其附属构件的厚度极小，因此可以直接将线状压电元件设置在镜筒外侧面与外壳内侧面之间的间隙，不必在镜筒上制作专门的驱动元件安装结构。具体来说，在某些现有的压电驱动方案中，需在镜筒的一侧制作专用的安装凸台，以便压电驱动装置通过该安装凸台对镜筒施加作用力，进而驱动光学镜头做轴向移动。该安装凸台势必增加镜筒的厚度，导致摄像模组的体积增加。而本申请的方案中，可以在外壳与镜筒外侧面之间间隙中，在对称的位置上分别设置一线状压电元件(如图26、图27所示)，一方面可以使摄像模组保持较小的体积，另一方面在对称的位置设置线状压电元件，可以使得镜筒的受力更加平衡，提高镜筒轴向移动的精度，避免镜筒的轴向移动出现倾斜。
进一步地，在本申请的一些优选实施例中，所述线状压电元件的长度可以小于10mm(例如6mm或者4.2mm)，宽度可以小于0.7mm，厚度可以小于1mm(指线状压电元件加上摩擦部的总厚度)。
进一步地，在本申请的一些实施例中，单个所述线状压电元件的极化区域段的数目至少为三(所述极化区域段包括第一或第二极化区域段，极化区域段的数目是指第一和第二极化区域段数目的总和)，从而便于形成所述线状压电元件表面的行波运动。所述线状压电元件的极化区域段的数目较少时，例如极化区域段的数目为三时，通过对相邻的具有不同极化方向的极化区域段施加具有设定相位差的驱动电压，可以使得线状压电元件的表面形成所需的波浪状，同时由于具有较少的极化区域段数目，这种设计也有助于缩小该线状压电元件的长度。本申请中，线状压电元件的长度方向与摄像模组的光轴方向一致，因此，缩小该线状压电元件的长度将有助于减小摄像模组的高度。
进一步地，上述图30a、图30b所对应的实施例中，所述线状压电元件231中，第一极化区域段A1和第二极化区域段A2均设置了摩擦部233，但需要注意，本申请并不限于此。例如，图32示出了本申请另一个实施例中的线状压电驱动装置。参考图32，该实施例中，所述摩擦部233可以仅设置在第一极化区域段A1，或者仅设置在第二极化区域段A2。本实施例中，在线状压电元件231通电并施加所述的第一驱动电压组合或第二驱动电压组合时，第一极化区域段A1或第二极化区域段A2的摩擦部233压紧动子时，可以产生与表面质点的微幅椭圆运动所形成的行波移动方向相反的摩擦力，并驱动所述的动子232沿着光轴移动。然而，由于摩擦部233仅设置在第一极化区域段A1或仅设置在第二极化区域段A2，因此相比图30a、图30b所对应的实施例，本实施例对动子232的驱动时间相对较短，因此动子232的移动速度也相对较慢。
进一步地，图41示出了本申请一个变形的实施例中的压电驱动装置的结构示意图。参考图41，本实施例中，在线状压电元件231的靠近动子232一侧的表面(即正面，或称为内侧表面)设置摩擦层234，所述摩擦部233设置在所述摩擦层234上。优选地，所述线状压电元件231的长度大于所述摩擦层的长度，以保证所述线状压电元件的线性度，保证所述压电驱动装置的驱动行程。进一步地，在另一个变形的实施例中，所述摩擦层也可以设置在所述动子的靠近线状压电元件一侧的表面，或者所述动子的制作材料可以是摩擦材料 (即具有较大摩擦力的材料)。
进一步地，图33示出了本申请一个实施例中的线状压电装置与外框架的结构及连接关系示意图。参考图33，本申请的一个实施例中，所述线状压电元件231可以与外框架220固定在一起，从而作为压电驱动装置230的定子使用。其中，线状压电元件231的背面(指该线状压电元件的外表面，即靠近外壳的侧面)可以通过弹性层212承靠于所述外框架220的第一侧壁221(结合参考图26和图27)的内侧面。这样，在线状压电元件231发生形变，其表面质点进入微幅椭圆运动时，由于弹性层212是具有弹性的，所以线状压电元件231背面的形变及其微幅椭圆运动不会受到阻碍。这是因为压电元件形变所产生的应力远大于弹性层212形变所带来的弹力。与此同时，在线状压电元件231未通电时，外框架220与镜筒310(结合参考图26和图27)之间的预压力也可以通过弹性层212传递到线状压电元件及其摩擦部233，从而使得光学镜头300可以保持在其初始位置。本实施例中，所述弹性层212的厚度可以为10-50μm。在制作时，可以在外框架的侧壁的内侧面上涂覆10-50μm厚的胶材，然后将线状压电元件的背面粘贴，待胶材固化后形成具有弹性的弹性层，且该弹性层位于线状压电元件的背面与外框架的侧壁之间。
进一步地，图34示出了本申请另一个实施例中的线状压电装置与外框架的结构及连接关系示意图。在另一实施例中，所述线状压电元件231的背面的弹性层也可以被取消。该实施例中，在线状压电元件231的两端设置固定部235(该固定部235可以由非压电材料制作)，并且固定部235与所述外框架220固定在一起。这样线状压电元件231可以通过其两端的固定部235与外框架220固定，从而作为压电驱动装置230的定子使用。本实施例中，所述线状压电元件231的背面与外框架220之间可以具有间隙(例如空气间隙)。本实施例中，在未通电时，线状压电元件231呈直线状，且其具有一定的刚性，因此弹簧弹片240在外框架220与镜筒310之间的预压力可以被传递到线状压电元件231及其摩擦部233上，从而使摩擦部233可以压住动子232，使得未通电时光学镜头300可以保持在其初始位置。本实施例中，线状压电元件的背面可以不设置弹性层，因此线状压电元件背面的形变不会受到弹性层的任何干扰，也就是说，线状压电元件背面质点的微幅椭圆运动的实际状况与理论值更加一致，从而有助于提升镜头轴向移动的控制精度。
需注意，本申请中，上述通过弹簧弹片产生预压力的方式并不是唯一的。例如，在本申请一个变形的实施例中，所述弹簧弹片也可以被电磁组件代替。电磁组件可以包括磁石和线圈，该磁石和线圈可以分别设置在镜筒与外框架。这种方案中，可以通过磁石线圈的相互作用，为压电驱动装置提供预压力。进一步地，该实施例中，外壳可以用导磁材料制成，导磁材料例如可以是铁磁性材料，包括铁、镍、钴或其合金等。本实施例中，外壳可以具有六个引脚，沿着平行于光轴的方向延伸，用于保磁以及加强磁力。
进一步地，在本申请的另一实施例中，所述线状压电元件的背面设置弹性层，所述线状压电元件的数目可以是偶数个，并且每对线状压电元件分别设置在摄像模组的相对的两个侧面，例如可以参考图26和图27。本实施例中，可以由外框架的两个相对的侧壁向中心挤压弹性层来形成预紧力，从而使弹性层向内侧挤压线状压电元件，进而使摩擦部压紧动子。本实施例的方案中，所述弹簧弹片可以被省略，施加于压电驱动装置的预紧力可以由所述线状压电元件的背面的弹性层来提供。本实施例的方案可以省去弹簧弹片，简化了器 件结构和组装工艺，有助于提升生产效率和生产良率。
进一步地，图35示出了本申请一个实施例中的光学致动器的俯视示意图。参考图35，本实施例中，可以在矩形镜筒310的四周设置四个线状压电元件。该光学致动器中，外框架220可以具有四个第一侧壁，外框架220的角落设置弹簧弹片240，该弹簧弹片240将外框架220与镜筒310连接，以对处于二者之间的压电驱动装置230施加预紧力。本实施例中，每个压电驱动装置230均基于一个线状压电元件实现其驱动功能，其驱动原理参考前文描述，此处不再赘述。
进一步地，图36示出了本申请另一个实施例中的光学致动器的俯视示意图。图37示出了图36中的其中一个子框架的立体示意图。参考图36和图37，本实施例与图35所示的实施例基本一致，区别仅在于本实施例的外框架220由第一子框架和第二子框架组合而成。参考图37，本实施例中，第一子框架的两个侧面可以设置两个相对设置的第一侧壁，而另两个侧面则镂空，图37中的镂空侧面222示出了子框架的两侧镂空的状态。第二子框架的形状可以与第一子框架一致。这两个子框架组合，则可以使光学致动器外壳的四个侧面处均具有对应外框架侧壁(即第一侧壁221)，从而便于安装对应的压电驱动装置并对其施加预紧力。
进一步地，本申请中，所述镜筒的外侧面的形状并不限于矩形。例如在一些实施例中，所述镜筒的外侧面可以采用其他形状。图38示出了本申请一个变形的实施例的光学致动器的俯视示意图。参考图38，本实施例中，光学镜头300的镜筒外侧面311可以是切割圆状。本文中，切割圆状指圆形被直线切割后所形成的形状。本实施例中，镜筒的外侧面具有两个互相平行的平面，这两个平面可以作为两个压电驱动装置的动子的承靠面311a。事实上，本申请中，只要所述镜筒的外侧面具有对称设置的偶数个平面作为动子的承靠面即可。例如镜筒的外侧面也可以是六边形、八边形等形状。
进一步地，本申请的一些实施例中，所述压电驱动装置可以设置在光学致动器外壳的四角区域处。例如图39示出了本申请另一个变形的实施例的光学致动器的俯视示意图。参考图39，本实施例中，镜筒外侧面311a大致呈圆形，在对应于外壳的两个对角位置处，所述镜筒外侧面311向外突出形成两个对称的平行承靠面311a。在外壳与镜筒310的承靠面311a之间可以设置外框架220，所述外框架220具有两个呈45度角设置的第一侧壁。压电驱动装置230可以设置在外框架220的第一侧壁与镜筒的承靠面311a之间。本实施例中，每个压电驱动装置230均基于线状压电元件231来提供驱动力，其驱动原理见前文所述，此处不再赘述。本实施例的方案中，压电驱动装置230可以被布置在矩形外壳和大致呈圆形镜筒之间的位于外壳四角区域的间隙，因此可以有效地减小光学致动器和摄像模组的径向尺寸。其中径向是指垂直于光轴的方向。
进一步地，图40示出了本申请又一个变形的实施例的光学致动器的俯视示意图。参考图40，本实施例中，镜筒外侧面311大致呈圆形，在对应于外壳的四角位置处，所述镜筒外侧面311向外突出形成四个承靠面，每个对角线上的两个承靠面均对称设置且互相平行。外壳210与镜筒的承靠面311a之间可以设置外框架，所述外框架220具有四个呈45度角设置的第一侧壁。压电驱动装置230可以设置在四角区域的外框架220的第一侧壁与镜筒的承靠面之间。本实施例中，每个压电驱动装置230均基于线状压电元件来提供驱动力，其 驱动原理见前文所述，此处不再赘述。本实施例的方案中，压电驱动装置可以被布置在矩形外壳和大致呈圆形镜筒之间的位于外壳四角区域的间隙，因此可以有效地减小光学致动器和摄像模组的径向尺寸。其中径向是指垂直于光轴的方向。
进一步地，在本申请的一些实施例中，所述光学致动器还可以包括内框架。该内框架可以固定于镜筒的外侧面。所述内框架可以具有与所述外框架相对应的侧壁(可称为第二侧壁)，所述压电驱动装置可以设置在所述外框架的侧壁与所述内框架的侧壁之间。所述弹簧弹片连接所述外框架和内框架，从而对所述压电驱动装置施加预紧力。本实施例中，每个压电驱动装置均基于线状压电元件来提供驱动力，其驱动原理见前文所述，此处不再赘述。
本申请的一些实施例中，所述线状压电元件可以通过多个压电陶瓷片首尾相接地拼接而成。具体来说，任意两个相邻压电陶瓷片的端面可以通过胶材粘结，从而将二者首尾相接地拼接在一起。其中，压电陶瓷片沿着其厚度方向极化，且任意两个相邻压电陶瓷片的极化方向是相反的。
在本申请的另一实施例中，所述线状压电元件是行波式线状压电元件来说，其可以由两条相同的压电体相互错开半个极化区长度粘合成一体而成。
本申请的一些实施例中，所述线状压电元件的每个第一极化区域段A1和第二极化区域段A2均连接导线，进而连接激励源。所述激励源对第一极化区域段A1和第二极化区域段A2分别施加对应的压电驱动信号。所述激励源可以设置在感光组件的线路板中。所述导线可以从侧面连接各个第一极化区域段A1和第二极化区域段A2。即导线与各个第一极化区域段A1和第二极化区域段A2的连接端位置避开所述线状压电元件的表面(即避开需要产生微幅椭圆运动的线状压电元件的正面和背面)。导线的另一端则连接至感光组件的线路板，或者也可以连接到布置在摄像模组其他区域的线路板，所述激励源可以设置在所述线路板上。
上述实施例中，所述线状压电元件的表面均呈现行波式的波动状态。但本申请并不限于此，在本申请的一些变形的实施例中，所述线状压电元件的表面波动方式也可以被配置为驻波式的波动状态。具体来说，在一个变形的实施例中，所述第一极化区域段A1和所述第二极化区域段A2可以具有相同的极化方向，其中，在所述线状压电元件被导通后，通过在第一极化区域段A1和第二极化区域段A2输入交替的电压信号，相互交替设置的多组所述第一极化区域段A1和所述第二极化区域段A2发生不同方向的形变，以带动所述摩擦部以驻波的方式沿着预设方向运动，进而带动动子沿着光轴的方向移动。
进一步地，在本申请的一个实施例中，所述感光组件包括线路板、安装于线路板表面的感光芯片、安装在线路板表面且围绕在感光芯片周围的滤光片支架，以及安装于所述滤光片支架的滤光片。所述滤光片支架的顶面可以是平整面，以便安装所述光学致动器的底座。在另一实施例中，所述感光组件也可以基于MOC工艺制作，即滤光片支架可以由模塑支撑部代替，该模塑支撑部可以基于模组工艺直接在线路板上成型，并且所述模塑支撑部向内侧延伸并覆盖所述感光芯片的边缘区域。所述滤光片安装于所述模塑支撑部，并且所述模塑支撑部的顶面适于安装所述光学致动器。在又一实施例中，所述感光组件也可以基于MOB工艺制作，其与MOC工艺的区别在于，所述模塑支撑部不接触所述感光芯片。
本申请的方案中，可以通过在壳体与镜筒之间的间隙处设置线状压电元件，在适当的驱动电压的作用下，使线状压电元件的表面形成波动状态(例如行波状态)，通过设置于该波动的表面的摩擦部，该摩擦部作用于动子以驱动动子沿着所述线状压电元件的长度方向(即光轴方向)移动。该方案中，压电驱动装置可以设置在壳体与镜筒的间隙中，占用空间小，驱动力大，可以实现对较大重量镜头的驱动。例如基于本申请的压电驱动方案，在线状压电元件数目大于等于二，且每条线状压电元件长度小于2mm的前提下，可以实现对质量400mg以上的镜头的驱动。
图42示出了本申请一个实施例的具有镜头防抖功能的摄像模组的纵剖面示意图，图43示出了图42实施例中的用于镜头防抖的光学致动器的俯视示意图。结合参考图42和图43，具有镜头防抖功能的摄像模组包括镜头100、光学致动器200和感光组件300。其中镜头100安装于光学致动器200中，光学致动器200的底面固定于感光组件300的顶面。感光组件300具有感光芯片310，其用于接收透过镜头100的成像光线并输出成像数据。本实施例中，镜头100可以包括镜筒和安装于镜筒内的透镜组。镜筒的外侧面与所述镜头载体210连接固定。需注意，在一些变形的实施例中，可以省去镜筒，而将透镜组直接安装在镜头载体210内。进一步地，本实施例中，所述光学致动器200包括外壳220、镜头载体210、悬持部230及至少二个悬臂梁240。所述外壳220具有一由四个侧壁围成的容置腔以容置所述镜头载体210、所述悬持部230及所述至少二个悬臂梁240，所述镜头载体210通过所述悬持部230悬持于所述外壳220的容置腔内，所述至少二个悬臂梁240固定于所述外壳220的相邻两侧的侧壁。具体来说，本实施例中，所述悬臂梁240设置于所述镜头载体210的外侧面与所述外壳220的内侧面之间的间隙。所述悬持部230被实施为固定在所述镜头载体和所述外壳四角的弹性元件231(例如弹簧或弹片)。进一步地，所述弹性元件231可以包括上弹片和下弹片，上弹片和下弹片可以分别与所述镜头载体210的顶部和底部固定，从而更稳定地将所述镜头载体210悬持于所述外壳中。本实施例中，悬臂梁240可以包括条形基板241和附着于所述条形基板241表面的压电层242，所述悬臂梁240的一端固定于所述外壳220，其另一端为自由端249，并且所述悬臂梁240设置在所述外壳220与所述镜头载体210之间的间隙，其压电层242的表面与外壳220的内侧面可以是平行的。其中，所述压电层242可以沿着其厚度方向极化，所述压电层242的长度方向与所述条形基板241的长度方向一致，并且所述压电层242适于在被施加驱动电压时沿着其长度方向伸展(膨胀)或收缩以使所述悬臂梁240弯曲，进而促使所述自由端249在垂直于所述压电层242表面的方向上发生位移，并通过所述自由端249的位移推动所述镜头载体210移动。实际应用场景中，自由端的位移方向实际上是大致垂直于压电层表面的，只要在公差范围内，均可以视为自由端在垂直于所述压电层表面的方向上移动。一般来说，对于镜头光学防抖(镜头OIS)功能来说，自由端最大位移达到160μm即能够满足需求。
进一步地，参考图42、图43和图44，在本申请的一个实施例中，基于所提供的驱动力的方向，所述悬臂梁240可以包括两种类型，即x轴移动悬臂梁240a和y轴移动悬臂梁240b(参考图44)，所述x轴移动悬臂梁240a布置在所述外壳220的垂直于所述x轴的侧面，所述x轴移动悬臂梁240a的长度方向平行于y轴；所述y轴移动悬臂梁240b布置在所述外壳220的垂直于所述y轴的侧面，所述y轴移动悬臂梁240b的长度方向平行于x轴； 其中，所述x轴和所述y轴为垂直于所述镜头100或所述透镜组光学致动器200的光轴的坐标轴，且所述x轴和所述y轴互相垂直。本实施例中，x轴移动悬臂梁240a和y轴移动悬臂梁240b各具有两个。两个所述的x轴移动悬臂梁240a对称地设置于所述外壳220的同一个侧面。在俯视角度下，该侧面平行于y轴，也就是说，x轴移动悬臂梁240a的长度方向是平行于y轴的。所述x轴移动悬臂梁240a均通过固定部243安装于所述外壳220。并且这两个x轴移动悬臂梁240a共用同一个所述的固定部243。类似地，两个所述的y轴移动悬臂梁240b对称地设置于所述外壳220的同一个侧面。在俯视角度下，该侧面平行于x轴，也就是说，y轴移动悬臂梁240b的长度方向是平行于x轴的。所述y轴移动悬臂梁240b均通过固定部243安装于所述外壳220。并且这两个y轴移动悬臂梁240b共用同一个所述的固定部243。本实施例中，在俯视角度下，该固定部243设置在所述外壳220的对应侧面的中间位置。换句话说，两个所述的x轴移动悬臂梁240a对称地设置于所述外壳220的垂直于所述x轴的侧面，并且两个所述的x轴移动悬臂梁240a共用同一个固定部243并且通过所述固定部243安装于所述外壳220；两个所述的y轴移动悬臂梁240b对称地设置于所述外壳220的垂直于所述y轴的侧面，并且两个所述的y轴移动悬臂梁240b共用同一个固定部243并且通过所述固定部243安装于所述外壳220。进一步地，所述光学致动器200还包括驱动单元，所述驱动单元用于对所述压电层242施加驱动电压以使位于同一侧面的两个所述的x轴移动悬臂梁240a均向内弯曲，并由这两个所述的x轴移动悬臂梁240a的所述自由端249推动所述载体沿所述x轴平移；所述驱动单元还用于对所述压电层242施加驱动电压以使位于同一侧面的两个所述的y轴移动悬臂梁240b均向内弯曲，并由这两个所述的y轴移动悬臂梁240b的所述自由端249推动所述载体沿所述y轴平移。其中，向内弯曲是所述悬臂梁240的自由端249自所述外壳220向所述载体移动的方向。即，本实施例中，可以将光轴视为中心轴，靠近光轴的一侧视为内侧，背离光轴的一侧视为外侧。进一步地，在俯视角度下，所述载体的外轮廓可以呈矩形。所述载体的外侧面包括至少一个与所述的悬臂梁240适配的平面，所述平面适于在所述悬臂梁240向内弯曲后与所述自由端249接触(此时自由端249会因悬臂梁240向内弯曲而发生大致垂直于其压电层242表面的方向移动)，并且所述载体适于在所述自由端249的推动下随着所述自由端249位移。示例性地，图44示出了本申请一个实施例中y轴移动悬臂梁向内弯曲进而推动镜头载体移动的示意图。参考图44，固定度两侧的y轴移动悬臂梁240b向内弯曲，可以对称地向镜头载体210提供x轴上的驱动力，从而推动镜头载体210在y轴正方向或负方向上移动。
进一步地，参考图45a，本申请的一个实施例中，所述压电层242包括第一压电层242a和第二压电层242b，所述第一压电层242a和所述第二压电层242b分别附着于所述条形基板241的内表面和外表面。进一步地，在本申请的一个实施例中所述光学致动器200还包括驱动单元，所述驱动单元用于对所述第一压电层242a和所述第二压电层242b施加驱动电压，使得所述第一压电层242a在其长度方向上收缩，且所述第二压电层242b在其长度方向上伸展，从而使所述悬臂梁240向第一压电层242a所处的一侧弯曲。本实施例中，驱动单元可以作为固件集成在摄像模组的线路板中。
进一步地，在另一实施例中，所述驱动单元可以用于对所述第一压电层242a和所述第二压电层242b施加驱动电压，使得所述第一压电层242a在其长度方向上收缩，且所述第 二压电层242b在其长度方向上伸展，从而使所述悬臂梁240向第一压电层242a所处的一侧弯曲。所述驱动单元还用于使设置于所述外壳220的同一个侧面的至少两个所述的悬臂梁240同时向内侧弯曲，以推动所述载体移动。
进一步地，在一个变形的实施例中，所述压电层242可以仅设置于所述条形基板241的内表面或仅设置于所述条形基板241的外表面。所述光学致动器200还包括驱动单元，所述驱动单元可以用于对位于所述条形基板241单侧(即内表面侧或外表面侧)的所述压电层242施加驱动电压以使所述悬臂梁240弯曲，并由所述悬臂梁240的所述自由端249推动所述载体移动。图45d示出了仅单侧表面具有压电层悬臂梁的示意图。
进一步地，在本申请的一个实施例中，所述摄像模组和光学致动器200还可以实现绕z轴旋转自由度上的光学防抖。具体来说，本实施例中，所述光学致动器200可以设置两个x轴移动悬臂梁240a和两个y轴移动悬臂梁240b。并且两个x轴移动悬臂梁240a共用固定部243，且所述固定部243设置在外壳220一个侧面的中间位置。两个y轴移动悬臂梁240b也共用固定部243，且所述固定部243设置在外壳220另一个侧面的中间位置。两个x轴移动悬臂梁240a所对应的侧面与两个y轴移动悬臂梁240b所对应的侧面是两个相交的侧面(即这两个侧面是相邻的侧面)。基于上述结构，一方面可以实现镜头载体210的x轴平移和y轴平移；另一方面还可以通过控制驱动电压的方向来实现镜头载体210绕z轴旋转。其中所述z轴平行于所述光轴(即镜头或透镜组的光轴)。具体来说，本实施例中，所述驱动单元还用于对所述压电层242施加驱动电压，以使共用同一所述固定部243的两个所述的x轴移动悬臂梁240a分别向内和向外弯曲，以及使共用同一所述固定部243的两个所述的y轴移动悬臂梁240b分别向内和向外弯曲。图46示出了本申请一个实施例中悬臂梁驱动镜头载体绕z轴旋转的示意图。参考图46，对于两个x轴移动悬臂梁240a，通过控制其驱动电压的方向，可以使其中一个向内侧弯曲以推动镜头载体210移动，另一个则向外侧弯曲以为镜头载体210旋转后的状态留下避让空间。类似地，对于两个y轴移动悬臂梁240b，通过控制其驱动电压的方向，也可以使其中一个向内侧弯曲以推动镜头载体210移动，另一个则向外侧弯曲以为镜头载体210旋转后的状态留下避让空间。并且，x轴移动悬臂梁240a和y轴移动悬臂梁240b可以产生叠加的旋转力矩，从而增加推动镜头载体210旋转的驱动力，提高z轴旋转自由度上的防抖响应速度。
进一步地，在本申请的一个实施例中，所述悬持部230为弹片，所述弹片设置在所述外壳220的四角位置，并且所述弹片的两端分别连接所述外壳220和所述载体。
进一步地，在本申请的一个实施例中，在未施加驱动电压时，所述悬臂梁240的所述自由端249与所述载体之间具有间隙；在施加驱动电压时，所述压电层242沿其长度方向伸缩以使所述悬臂梁240弯曲，所述悬臂梁240的弯曲使其所述自由端249抵靠并推动所述载体移动。
进一步地，在本申请的一个实施例中，所述悬臂梁240中，所述条形基板241可以为金属片，所述压电层242的厚度是所述金属片的厚度的50％-80％。所述金属片的厚度可以为50-300μm，例如可以优选为100μm。需注意，在其他实施例中，所述条形基板241具备弹性，从而所述条形基板241可以在弯曲变形后恢复形状，其可以是金属以外的其他材料制作。只要条形基板241具有一定弹性，适于向大致垂直于压电层表面的方向弯曲即可。
进一步地，在本申请的一个实施例中，所述悬臂梁240中，所述条形基板241可以为金属片，所述压电层242包括第一压电层242a和第二压电层242b，所述第一压电层242a和所述第二压电层242b分别附接于所述金属片的内表面和外表面；所述第一压电层242a的厚度是所述金属片的厚度的50％-80％；所述第二压电层242b的厚度是所述金属片的厚度的50％-80％。所述第一压电层242a和所述第二压电层242b的厚度相等。所述金属片的厚度可以为50-300μm，例如可以优选为100μm。
进一步地，在本申请的一个实施例中，所述金属片可以是不锈钢片。压电层242(包括所述第一压电层242a与所述第二压电层242b)具有逆压电效应，并且适于根据极化方向和电场方向收缩或膨胀。具体来说，压电层242可以通过在条形基板241(例如锈钢片)上沉积单晶、多晶陶瓷或聚合物等材料，然后在一定方向上使上述材料(单晶、多晶陶瓷或聚合物等)的沉积层极化，从而得到所需的压电层242。逆压电效应是指在电介质的极化方向施加电场，使电介质产生电势差，进而促使电介质发生机械变形。本实施例中，所述第一压电层242a与所述第二压电层242b均由压电材料组成并分别与至少二个电极(图中未示出)电连接，从而为所述第一压电层242a与所述第二压电层242b提供电源激励。在本实施例中，固设于所述条形基板241两侧的第一压电层242a和第二压电层242b在受到电源激励后分别收缩和膨胀。例如使所述第一压电层242a在长度方向收缩而使所述第二压电层242b在长度方向膨胀，从而所述条形基板241和所述悬臂梁适于向所述第一压电层242a方向弯曲，从而驱动所述镜头载体210平移或者旋转。参考图45b，所述悬臂梁240弯曲的形变量可以由悬臂梁240的自由端249的位移量W来表征。
本申请中，压电层242可以直接在条形基板241上成型，也可以预先成型，然后再将压电层242附接于(例如粘结于)所述条形基板241的表面。
进一步地，在本申请的一个实施例中，所述第一压电层242a与所述第二压电层242b的极化方向可以相反，从而在提供相同的电源激励(即提供相同的驱动电压)时，其中一压电层在其长度方向上收缩而另一压电层在其长度方向上膨胀，使悬臂梁弯曲，进而驱动悬臂梁240的自由端249推动镜头载体210移动。或者，在本申请的另一实施例中，所述第一压电层242a与所述第二压电层242b的极化方向可以相同，并且向第一压电层242a和第二压电层242b提供相反方向的电源激励，同样可以实现其中一压电层在其长度方向上收缩而另一压电层在其长度方向上膨胀，从而使悬臂梁240弯曲，进而驱动悬臂梁240的自由端249推动镜头载体210移动。
仍然参考图45a，在本申请的一个实施例中，所述第一压电层242a的厚度为h1、所述第二压电层242b的厚度为h2、所述条形基板241的厚度为h3，优选地，所述第一压电层242a的厚度h1与所述第二压电层242b的厚度h2均为所述悬臂梁的厚度h3的50％-80％。进一步地，所述第一压电层242a的厚度h1与所述第二压电层242b的厚度h2可以相等。在本申请一个优选实施例中，当所述悬臂梁240中采用不锈钢基材制作所述条形基板241，所述第一压电层242a与所述第二压电层242b可以是PZT材料(锆钛酸铅压电陶瓷)。所述第一压电层242a的厚度h1与所述第二压电层242b的厚度h2均为70μm，条形基板241的厚度为100μm。此时，所述悬臂梁的最大形变量(即悬臂梁自由端249的最大位移量W)可以为160μm，其驱动力可以大于等于0.1N，能够满足镜头防抖的性能要求。本实施例中， 悬臂梁240的宽度可以大于其厚度。图45c示出了俯视角度下的悬臂梁，其中示出了该悬臂梁的长度方向和宽度方向。
优选地，在本申请的一个实施例中，x轴移动悬臂梁240a和y轴移动悬臂梁240b的设置高度(即z轴方向上的位置)相等，从而避免驱动镜头载体210防抖移动时出现不必要的倾斜。进一步地，由于镜头通常凸出于所述压电致动器，因此悬臂梁240优选设置于所述镜头载体210的中部或者中上部，从而使得所述压电致动器驱动镜头平移时不易产生倾斜。
进一步地，在本申请的一个实施例中，提供了一种具有光学防抖功能的摄像模组，其包括感光组件、光学致动器200和安装于光学致动器200的镜头100。即所述光学致动器200为镜头防抖光学致动器。其中所述感光组件与所述镜头防抖压电致动器的外壳220相固定，所述镜头100固定于所述镜头防抖压电致动器的镜头载体210中，从而所述感光组件适于获取经过所述镜头100汇聚的成像光线。所述感光组件包括一线路板组件及滤光组件，所述线路板组件包括一线路板及电连接于线路板上的感光芯片及电容、电阻等电子元件，所述滤光组件包括一支架及固定于支架上的滤光元件，所述线路板组件通过所述滤光组件固定于所述镜头防抖压电致动器的外壳220。
进一步地，图47示出了本申请的另一个实施例中光学致动器的俯视示意图。参考图47，本实施例中，所述光学致动器200的外壳220的四个侧壁均设置悬臂梁240。即本实施例中多个悬臂梁240分布在所述镜头载体210的四周。其中镜头载体210的两侧为x轴移动悬臂梁240a，另两侧为y轴移动悬臂梁240b。在每一个侧面，悬臂梁均成对地对称地布置。
进一步地，图48示出了本申请一个变形的实施例的光学致动器的俯视示意图。参考图48，本实施例中，悬臂梁240的自由端249连接弹性元件231，并通过所述弹性元件231连接所述镜头载体210。即用于悬挂镜头载体210的弹性元件231的两端可以分别连接镜头载体210和悬臂梁240的自由端249(需注意，本实施例中，当外壳220与镜头载体210外侧面之间的间隙未布置悬臂梁240时，弹性元件231的两端可以之间连接外壳220和镜头载体210)。本实施例中，固定部243设置在外壳220内侧面的中央，两个悬臂梁240自固定部243分别向相反的方向延伸，两个悬臂梁240的自由端249分别位于外壳220的两个角落区域。本实施例中，当压电层242受到驱动电压激励时，在其长度方向上收缩或膨胀，使得悬臂梁240弯曲(发生形变)，自由端249向大致垂直于所述压电层242表面的方向位移，该位移由所述弹性元件传递至镜头载体210，从而推动镜头载体210沿x轴、y轴平移或绕z轴旋转。
进一步地，上述基于压电层242的悬臂梁240还可以用于驱动感光芯片移动。例如，图49示出了本申请另一个实施例中的具有芯片防抖功能的摄像模组的纵剖面示意图。图50示出了图49的摄像模组的光学致动器的俯视示意图。结合参考图49和图50，本实施例中，所述摄像模组包括镜头100、镜头支架110、感光组件300和用于驱动感光组件的光学致动器200。其中镜头100安装于镜头支架110，镜头支架110的底面安装于光学致动器200外壳220的顶面。光学致动器200包括外壳220、感光组件载体290以及设置在外壳220和感光组件载体290之间间隙的悬臂梁240。所述悬臂梁240的结构可以参考前文中其他实施例 的描述(仅需把镜头载体210替换为感光组件载体290即可)，此处不再赘述。镜头支架110可以是用于支撑镜头的结构件。上述镜头100和镜头支架110可以共同构成镜头组件。在其他实施例中镜头支架110也可以被其他类型的镜头支持件代替。例如镜头支持件可以是驱动镜头移动的马达(OIS马达或者AF马达)。所述感光组件300包括线路板组件320及滤光组件，其中所述线路板组件320包括线路板321及电连接于线路板321的感光芯片322、电容电阻等电子元器件323，所述线路板组件320通过所述线路板321与所述感光组件载体290相固定。本实施例中，所述感光组件载体290可以固定于所述线路板321的正面，也可以固定于所述线路板321的侧面或者底面，所述滤光组件包括一滤光元件311。本实施例中，所述滤光元件311固定于所述感光组件载体290上。
进一步地，在本申请的一些实施例中，所述光学致动器200的单个侧面可以设置多于两个的悬臂梁240。图51示出了本申请一个实施例的单个侧面具有多个悬臂梁的光学致动器的侧视示意图。参考图51，本实施例中，在载体299(可以是镜头载体或感光组件载体)的一个外侧面的中心位置处，可以设置一个固定部243，四个悬臂梁240自该固定部243向四个方向延伸而形成。这四个悬臂梁240可以对称地布置成“X”状。固定部243可以固定于外壳220的内侧面。所述固定部243可以作为悬臂梁240的根茎部，悬臂梁240的自由端249则位于载体外侧面的四角位置(指侧视角度下的四角位置)。本实施例的方案中，可以在单个侧面设置更多的悬臂梁240，从而使光学致动器具有更大的驱动力。并且，由于在侧视角度下，悬臂梁240是倾斜布置的(即悬臂梁240的长度方向相对于基准面是倾斜的，所述基准面是垂直于光轴的平面，或者是平行于感光组件的感光面的平面，所述的x轴和y轴是基准面上两个相互垂直的坐标轴)，所以悬臂梁240可以有较大的长度，因此其受到驱动电压激励时，弯曲幅度可以相对增大(即相比水平布置的悬臂梁240，这种倾斜布置的悬臂梁240的自由端249的位移可以相对增大)，从而提升光学致动器的驱动力和驱动行程。上述的位于单个侧面的四个悬臂梁240可以构成悬臂梁组，该悬臂梁组既可以作为x轴移动悬臂梁组，也可以作为y轴移动悬臂梁组使用。例如，当该悬臂梁组布置于x轴垂直的侧面时，在该悬臂梁组可以用于驱动载体299进行x轴平移，即作为x轴移动悬臂梁组使用。当该悬臂梁组布置于y轴垂直的侧面时，在该悬臂梁组可以用于驱动载体299进行y轴平移，即作为y轴移动悬臂梁组使用。上述悬臂梁组同样可以用于驱动载体299在绕z轴旋转的自由度上转动，其驱动原理可参考图46及对应的实施例，此处不再赘述。每个所述的悬臂梁组所具有的悬臂梁数目并不限于两个或四个，例如其数目也可以是三个、五个、六个等。
上述实施例中，悬臂梁或悬臂梁组均设置在载体299外侧面与外壳220内侧面之间环状(例如矩形环状)间隙中。但需要注意，本申请的悬臂梁或悬臂梁组还可以设置在载体299顶面与壳体之间的间隙，或者设置在载体299底面与壳体之间的间隙(壳体例如可以具有一底座，悬臂梁可以设置在载体299底面与壳体底座之间的间隙)，以实现载体299的tilt调整(即倾角调整)。倾角调整可以是载体299在绕x轴旋转和绕y轴旋转这两个自由度上的调整。其旋转中心可以设置在位于镜头100光轴的一个基准点上。该基准点的位置可以通过调整弹性元件(即悬持部230)的弹性系数和悬臂梁的位置和驱动力来确定。
图52示出了本申请的一个实施例中的具有tilt调整功能的光学致动器的侧视示意图。 图53示出了本申请的一个实施例中的具有tilt调整功能的光学致动器的俯视示意图。结合参考图52和图53，本实施例中，悬臂梁或悬臂梁组可以设置在载体299顶面与外壳220之间的间隙。具体来说，在俯视角度下，悬臂梁240(悬臂梁240可以结合参考图42、图43和图44等，图52和图53中悬臂梁用附图标记240c或240d代表)可以布置在载体299的顶面的边缘区域。在未通电状态下(即原始状态下)，悬臂梁240的压电层242表面可以平行于载体299的顶面。这样，在对压电层242施加驱动电压时，悬臂梁240可以向下弯曲，使其自由端249自上而下地位移，从而推动载体299朝一侧倾斜。参考图53，所述光学致动器200可以包括Rx移动悬臂梁240c和Ry移动悬臂梁240d，Rx移动悬臂梁240c的长度方向与x轴平行，其布置在载体299顶面的平行于x轴的边缘区域，Ry移动悬臂梁240d的长度方向与y轴平行，其布置在载体299顶面的平行于y轴的边缘区域。Rx移动悬臂梁240c弯曲并使其自由端249接触和推动载体299，可以使载体299在Rx自由度上转动(Rx自由度即绕x轴旋转的自由度)。Ry移动悬臂梁240d弯曲并使其自由端249接触和推动载体299，可以使载体299在Ry自由度上转动(Ry自由度即绕y轴旋转的自由度)。Rx移动悬臂梁240c和Ry移动悬臂梁240d的结构可以与前文中其他实施例中的悬臂梁240一致，既可以包含条形基板241和附着于条形基板241的压电层242。所述压电层242可以包括位于条形基板241两个表面(此处为上下表面)的第一压电层242a和第二压电层242b。
进一步地，仍然参考图52，在本申请的一个实施例中，所述的Rx移动悬臂梁和Ry移动悬臂梁不仅可以布置在载体299顶面与外壳220的间隙，还可以布置在载体299底面与外壳220的间隙。位于载体299底面与外壳220的间隙的Rx移动悬臂梁240c和Ry移动悬臂梁240d的结构和布置方式可以与位于前一实施例的位于载体299顶面与外壳220的间隙的Rx移动悬臂梁240c和Ry移动悬臂梁240d一致，此处不再赘述。本实施例中，在俯视角度下，Rx移动悬臂梁240c可以布置在载体299的一条平行于x轴的边缘区域，Ry移动悬臂梁240d可以布置在载体299的一条平行于y轴的边缘区域。本实施例中，悬臂梁240的所述压电层242的表面平行于所述载体299的顶面或底面。
进一步地，图54示出了本申请的另一个实施例中的具有tilt调整功能的光学致动器的侧视示意图。图55示出了本申请的另一个实施例中的具有tilt调整功能的光学致动器的俯视示意图。本实施例中，在俯视角度下，Rx移动悬臂梁240c可以布置在载体299的两条平行于x轴的边缘区域，Ry移动悬臂梁240d可以布置在载体299的两条平行于y轴的边缘区域。本实施例的其余设计与图52和图53所示的实施例一致，不再赘述。
上述实施例中，所述载体299可以是感光组件载体290，也可以是镜头载体210。
本申请的上述实施例中，通过使用压电马达为摄像模组防抖马达的驱动力。压电马达的结构相对简单，可以简化驱动机构的设计，从而减小模组的尺寸。相较于电磁感应式马达驱动镜头的方案，基于压电层的悬臂梁式马达不需要依靠电磁力来抵消重力，具有更大推力，更大位移和更低功耗的优势，同时控制精度更高，可实现高精度双轴防抖，并且没有磁干扰的问题。
本领域的技术人员应理解，上述描述及附图中所示的本发明的实施例只作为举例而并不限制本发明。本发明的目的已经完整并有效地实现。本发明的功能及结构原理已在实施例中展示和说明，在没有背离所述原理下，本发明的实施方式可以有任何变形或修改。

Claims (107)

  1. 一潜望式摄像模组，其特征在于，包括：
    一摄像模组主体；
    一反射棱镜，其中所述摄像模组主体具有一光轴，所述反射棱镜沿所述摄像模组主体的所述光轴方向被设置于所述摄像模组主体的入光侧，以供所述反射棱镜反射外界光线至所述摄像模组主体；
    一棱镜驱动装置，其中所述反射棱镜被可传动地连接于所述棱镜驱动装置，其中所述棱镜驱动装置包括一棱镜驱动轴和一压电驱动器，其中所述压电驱动器和所述棱镜驱动轴相固定地连接，且所述棱镜驱动轴平行于所述摄像模组主体的所述光轴方向，其中所述棱镜驱动轴在所述压电驱动器的驱动作用下沿所述光轴方向直线运动，以改变所述反射棱镜出射光的方向，补偿所述摄像模组主体的光学抖动；以及
    至少一透镜驱动装置，其中所述透镜驱动器与所述透镜组相传动地连接，由所述透镜驱动器驱动所述透镜组沿特定方向移动，其中所述透镜驱动装置包括一压电驱动轴和一振动部件，其中所述压电驱动轴与所述摄像模组主体的光轴平行，且所述压电驱动轴的一端被固定，其中所述棱镜驱动装置的所述棱镜驱动轴与所述透镜驱动装置的所述压电驱动轴位于所述壳体内部基准轴X轴正方向的同一侧，均与所述透镜组的光轴相互平行。
  2. 根据权利要求1所述的潜望式摄像模组，进一步包括一棱镜座，其中所述反射棱镜被设置于所述棱镜座，所述棱镜座与所述棱镜驱动装置相传动地连接，由所述棱镜驱动装置驱动所述棱镜座，再由所述棱镜座带动所述反射棱镜同步移动。
  3. 根据权利要求2所述的潜望式摄像模组，其中所述反射棱镜进一步具有一斜面，所述棱镜座具有一支撑面，其中所述反射棱镜的所述斜面被支撑在所述棱镜座的所述支撑面，并且所述反射棱镜的所述斜面与所述棱镜座的所述支撑面相贴合。
  4. 根据权利要求2所述的潜望式摄像模组，进一步包括一传动装置，其中所述传动装置被可传动地连接于所述棱镜驱动装置和所述棱镜座，其中所述传动装置可被所述棱镜驱动装置驱动，并由所述传动装置以旋转的方式驱动所述棱镜座。
  5. 根据权利要求4所述的潜望式摄像模组，其中所述棱镜驱动轴与所述传动装置相垂直连接，所述棱镜驱动轴与所述传动装置呈垂直状态，并且所述传动装置转换所述棱镜驱动轴的直线运动为绕基准轴X轴方向的旋转运动，以改变所述反射棱镜的出射光方向。
  6. 根据权利要求4所述的潜望式摄像模组，其中所述传动装置进一步包括一轴座和被设置于所述轴座的一传动轴，其中所述轴座被设置于所述棱镜座，所述轴座位于所述棱镜座的所述支撑面和所述反射棱镜的对应面。
  7. 根据权利要求6所述的潜望式摄像模组，其中所述传动装置的所述传动轴作为导向机构受所述棱镜驱动轴驱动，而转换成驱动所述棱镜座转动作用的驱动作用力，以驱动所述棱镜座绕着垂直于所述基准轴X轴方向进行旋转运动。
  8. 根据权利要求4所述的潜望式摄像模组，其中所述压电驱动器包括一压电元件，所述压电元件呈层叠结构，且所述压电元件包括多个压电伸缩体以及多个内部电极，所述内部电极交替叠加多个压电伸缩体而成的多个电极，并且多个压电伸缩体和多个内部电极互相层叠。
  9. 根据权利要求3所述的潜望式摄像模组，其中所述棱镜驱动装置包括一压电马达和 一曲柄滑块机构，其中所述压电马达与所述曲柄滑块机构相传动地连接，其中所述曲柄滑块机构被可传动地连接于所述棱镜座，由所述压电马达通过所述曲柄滑块机构驱动所述棱镜座和所述反射棱镜运动。
  10. 根据权利要求9所述的潜望式摄像模组，其中所述曲柄滑块机构进一步包括一曲柄、一滑块以及一连接轴，其中所述滑块与所述压电马达相传动地连接，由所述压电马达驱动所述滑块沿光轴方向直线地运动。
  11. 根据权利要求10所述的潜望式摄像模组，其中所述连接轴与基准轴X轴平行，所述曲柄与所述透镜组的光轴和基准轴Y轴所在的平面平行。
  12. 根据权利要求10所述的潜望式摄像模组，其中所述棱镜驱动装置进一步包括一导向元件，其中所述导向元件一端与所述滑块相连接，另一端与所述棱镜座相连接，当所述压电马达施加驱动力时，会带动所述滑块进行直线运动，所述曲柄和连接轴也会随之运动，所述连接轴可以使得所述滑块和所述曲柄之间保持相对运动。
  13. 根据权利要求4或9所述的潜望式摄像模组，其中所述摄像模组主体包括一透镜组、沿光轴方向设置的图像传感器、以及固定所述透镜组和所述图像传感器的一壳体。
  14. 根据权利要求13所述的潜望式摄像模组，其中所述摄像模组的电路走线被设置于所述壳体的底部内侧；或者所述摄像模组的电路被贴附于壳体内部的一侧面。
  15. 根据权利要求13所述的潜望式摄像模组，其中所述透镜组进一步包括一第一透镜组、一第二透镜组以及一第三透镜组，其中所述反射棱镜位于所述透镜组的所述第一透镜组物侧一端，其中所述反射棱镜反射的光线经所述第一透镜组到所述第二透镜组，第二透镜组位于所述第一透镜组出光侧，所述第三透镜组位于所述第二透镜组出光侧。
  16. 根据权利要求15所述的潜望式摄像模组，其中述透镜驱动装置进一步包括一第一透镜驱动单元和一第二透镜驱动单元，其中所述第一透镜驱动单元与所述第二透镜组件相传动地连接，由所述第一透镜驱动单元驱动所述第二透镜组件沿光轴方向做水平横向移动，以调整整个系统的焦距；所述第二透镜驱动单元与所述第三透镜组件相传动地连接，由所述第二透镜驱动单元驱动所述第三透镜组件沿光轴方向做水平横向移动，以使得摄像模组起到连续变焦的作用。
  17. 根据权利要求15所述的潜望式摄像模组，其中所述透镜驱动装置的所述第一透镜驱动单元和所述第二透镜驱动单元的所述雅典驱动器为相对地和面对面地设置。
  18. 根据权利要求17所述的潜望式摄像模组，进一步包括至少一磁传感器，其中所述磁传感器被设置于所述透镜组和所述壳体之间。
  19. 一感光组件，其特征在于，包括：
    基板，包括：固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少二悬持臂，所述可移动部通过所述至少二悬持臂被悬持地设置于所述固定部内,所述固定部、所述可移动部及所述至少二悬持臂具有一体式结构；
    被设置于且电连接于所述可移动部的感光芯片，所述感光芯片设有一感光轴；以及
    至少一压电元件，其中，所述至少一压电元件被设置于所述至少二悬持臂的至少其中之一，并被配置为在被导通后通过其自身的形变来作动所述悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片以使得所述感光芯片相对于所述固定部产生 一定的倾斜角度，通过这样方式，来进行光学防抖。
  20. 根据权利要求19所述的感光组件，其中，每一所述悬持臂具有相对的第一端和第二端，所述第一端被固定于所述固定部，所述第二端被固定于所述可移动部。
  21. 根据权利要求20所述的感光组件，其中，所述至少二悬持臂包括第一悬持臂和第二悬持臂，所述第一悬持臂和所述第二悬持臂相对于所述可移动部对称地布置。
  22. 根据权利要求21所述的感光组件，其中，所述至少一压电元件包括第一压电元件，其中，所述第一压电元件被设置于所述第一悬持臂，并被配置为在被导通后通过其自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行光学防抖。
  23. 根据权利要求22所述的感光组件，其中，所述至少一压电元件还包括第二压电元件，其中，所述第二压电元件被设置于所述第二悬持臂，并被配置为在被导通后通过其自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行光学防抖。
  24. 根据权利要求23所述的感光组件，其中，所述第一压电元件和所述第二压电元件相对于所述可移动部对称地布置。
  25. 根据权利要求24所述的感光组件，其中，所述第一压电元件与所述第二压电元件适于以不同的电压进行导通，以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度。
  26. 根据权利要求22所述的感光组件，其中，所述第一悬持臂包括第一悬臂主体和至少部分地贯穿于所述第一悬臂主体的分隔槽，其中，通过所述分割槽所述第一悬臂主体被分为相互可移动的第一悬臂部和第二悬臂部，其中，所述第一压电元件包括被设置于所述第一悬臂部的第一压电区域和被设置于所述第二悬臂部的第二压电区域，所述第一压电区域被配置为在被导通后通过其自身的形变作动于所述第一悬臂部以使得所述第一悬臂部相对于所述第二悬臂部发生翘曲，所述第二压电区域被配置为在被导通后通过其自身的形变作动于所述第二悬臂部以使得所述第二悬臂部相对于所述第一悬臂部发生翘曲。
  27. 根据权利要求26所述的感光组件，其中，所述第一悬持臂具有“回”字型结构。
  28. 根据权利要求26所述的感光组件，其中，所述第一悬臂部具有由所述第一端划分而成的第一悬臂子部和第二悬臂子部，所述第二悬臂部具有由所述第二端划分而成的第三悬臂子部和第四悬臂子部，其中，所述第一压电区域包括被设置于所述第一悬臂子部的所述第一压电片和被设置于所述第二悬臂子部的第二压电片，所述第二压电区域包括被设置于所述第三悬臂子部的所述第三压电片和被设置于所述第四悬臂子部的第四压电片。
  29. 根据权利要求28所述的感光组件，其中，所述第一压电片在所述第一悬臂子部上沿第一方向延伸，所述第二压电片在所述第二悬臂子部上沿第二方向布置，通过这样的配置使得，所述第一压电片和所述第二压电片适于被导通后驱动所述第一悬臂部沿所述感光轴所设定的方向翘曲以产生高度方向上的行程。
  30. 根据权利要求23所述的感光组件，其中，所述至少二悬持臂还包括第三悬持臂和 第四悬持臂，其中，所述第一悬持臂和所述第二悬持臂相对于所述可移动部以X轴为对称轴对称地布置，所述第三悬持臂和所述第四悬持臂相对于所述可移动部以Y轴为对称轴对称地布置，所述第一悬持臂与所述第三悬持臂相邻布置、所述第二悬持臂与所述第四悬持臂相邻布置。
  31. 根据权利要求30所述的感光组件，其中，所述至少一压电元件还包括第三压电元件，其中，所述第三压电元件被设置于所述第三悬持臂，并被配置为在被导通后通过自身形变来驱动所述第三悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片，通过这样的方式，来进行v方向的光学防抖。
  32. 根据权利要求31所述的感光组件，其中，所述至少一压电元件还包括第四压电元件，其中，所述第四压电元件被设置于所述第四悬持臂，并被配置为在被导通后通过自身形变来驱动所述第四悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片，通过这样的方式，来进行v方向的光学防抖。
  33. 根据权利要求32所述的感光组件，其中，所述第一压电元件被配置为在被导通后通过其自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片向上或向下移动以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行u方向的光学防抖；所述第二压电元件被配置为在被导通后通过其自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片向上或向下移动以使得所述感光芯片的感光面相对于所述固定部产生一定的倾斜角度，通过这样的方式，来进行u方向的光学防抖。
  34. 根据权利要求21所述的感光组件，其中，所述第一悬持臂包括沿着X轴方向延伸的第一悬臂段和沿着Y轴方向延伸的第二悬臂段，其中，所述至少一压电元件包括第一压电元件和第二压电元件，所述第一压电元件被设置于所述第一悬持臂的第一悬臂段，所述第二压电元件被设置于所述第一悬持臂的第二悬臂段，其中，所述第一压电元件被配置为在被导通后通过自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行v方向的光学防抖；所述第二压电元件被配置为在被导通后通过自身形变来驱动所述第一悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行u方向的光学防抖。
  35. 根据权利要求34所述的感光组件，其中，所述第二悬持臂包括沿着X轴方向延伸的第三悬臂段和沿着Y轴方向延伸的第四悬臂段，其中，所述至少一压电元件还包括第三压电元件和第四压电元件，其中，所述第三压电元件被设置于所述第二悬持臂的第三悬臂段，所述第四压电元件被设置于所述第二悬持臂的第四悬臂段，其中，所述第三压电元件被配置为在被导通后通过自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行v方向的光学防抖；所述第四压电元件被配置为在被导通后通过自身形变来驱动所述第二悬持臂沿所述感光轴所设定的方向翘曲以带动所述可移动部和所述感光芯片进行向上或向下进行移动，通过这样的方式，来进行u方向的光学防抖。
  36. 根据权利要求35所述的感光组件，其中，所述第一悬持臂具有“L”型结构，和/ 或，所述第二悬持臂具有“L”型结构。
  37. 根据权利要求20所述的感光组件，其中，所述悬持臂的厚度尺寸范围为0.1mm-0.3mm。
  38. 根据权利要求19所述的感光组件，其中，所述基板具有上表面和与所述上表面相对的下表面，所述基板进一步具有至少部分地贯穿于所述下表面和所述上表面之间的镂空结构，其中，通过所述镂空结构，所述基板形成所述固定部、所述可移动部和延伸于所述固定部和所述可移动部之间的所述至少二悬持臂。
  39. 根据权利要求38所述的感光组件，进一步包括被设置于所述半导体基板的下表面的补强板。
  40. 根据权利要求19所述的感光组件，进一步包括被保持于所述感光芯片的感光路径上的滤光元件。
  41. 一感光组件的制备方法，其特征在于，包括：
    提供一种基板结构，其中，所述基板结构具有预设于其表面的电路；
    将至少一压电元件、电连接结构和电子元器件分别贴装于所述基板结构的上表面的预设位置；
    对所述基板结构进行蚀刻以形成至少部分地贯穿于所述基板结构的下表面和上表面之间的镂空结构以形成基板，其中，所述基板包括固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少二悬持臂，所述可移动部通过所述至少二悬持臂被悬持地设置于所述固定部内，其中，所述至少一压电元件被形成于所述至少二悬持臂的至少其中之一；
    贴附一补强板于所述半导体结构的下表面；
    在所述镂空结构内填充水解胶以预固定所述可移动部；
    将感光芯片贴装并电连接于所述可移动部；以及
    去除所述水解胶以获得感光组件。
  42. 一摄像模组，其特征在于，包括：
    如权利要求19至40任一所述的感光组件；以及
    被保持于所述感光组件的感光路径上的光学镜头。
  43. 一感光组件，其特征在于，包括：
    基板，包括：固定部、可移动部和延伸于所述固定部和所述可移动部之间的至少一对悬持臂，所述可移动部通过所述至少一对悬持臂被悬持地设置于所述固定部内，所述至少一对悬持臂相对于所述可移动部对称地布置；
    被设置于且电连接于所述可移动部的感光芯片；以及
    至少一对压电元件，其中，所述至少一对压电元件的各个压电元件被分别地设置于所述至少一对悬持臂的各个悬持臂，并被配置为在被导通后通过其自身的形变来作动所述至少一对悬持臂以从所述可移动部相对的第一侧和第二侧产生相同高度的翘曲，以使得所述感光芯片的感光面相对于所述固定部产生沿高度方向的行程，通过这样的方式来进行光学对焦。
  44. 根据权利要求43所述的感光组件，其中，每个所述悬持臂具有相对的第一端和第二端，所述第一端被固定于所述固定部，所述第二端被固定于所述可移动部。
  45. 根据权利要求44所述的感光组件，其中，所述至少一对悬持臂包括第一悬持臂和第二悬持臂，所述第一悬持臂和所述第二悬持臂相对于所述可移动部对称地设置；所述至少一对压电元件包括第一压电元件和第二压电元件，其中，所述第一压电元件被设置于所述第一悬持臂，所述第二压电元件被设置于所述第二悬持臂。
  46. 根据权利要求45所述的感光组件，其中，所述第一压电元件被配置为在被导通后通过其自身形变来作动所述第一悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第一侧带动所述可移动部和所述感光芯片，所述第二压电元件被配置为在被导通后通过其自身形变来作动所述第二悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第二侧带动所述可移动部和所述感光芯片，其中，所述第一压电元件从所述可移动部的第一侧带动所述感光芯片上升或下降的高度等于所述第二压电元件从所述可移动部的第二侧带动所述感光芯片上升或下降的高度，通过这样的方式，使得所述感光芯片的感光面相对于所述固定部产生沿高度方向的行程以进行光学对焦。
  47. 根据权利要求46所述的感光组件，其中，所述第一悬持臂包括第一悬臂主体和至少部分地贯穿于所述第一悬臂主体的第一分隔槽，其中，通过所述第一分隔槽，所述第一悬臂主体被分为相互可移动的第一悬臂部和第二悬臂部，所述第一悬臂部具有由所述第一端划分而成的第一悬臂子部和第二悬臂子部，所述第二悬臂部具有由所述第二端划分而成的第三悬臂子部和第四悬臂子部，其中，所述第一压电元件包括被设置于所述第一悬臂子部的所述第一压电片、被设置于所述第二悬臂子部的第二压电片、被设置于所述第三悬臂子部的所述第三压电片和被设置于所述第四悬臂子部的第四压电片。
  48. 根据权利要求47所述的感光组件，其中，所述第二悬持臂包括第二悬臂主体和至少部分地贯穿于所述第二悬臂主体的第二分隔槽，其中，通过所述第二分隔槽所述第二悬臂主体被分为相互可移动的第三悬臂部和第四悬臂部，所述第三悬臂部具有由所述第一端划分而成的第五悬臂子部和第六悬臂子部，所述第四悬臂部具有由所述第二端划分而成的第七悬臂子部和第八悬臂子部，其中，所述第二压电元件包括被设置于所述第五悬臂子部的所述第五压电片、被设置于所述第六悬臂子部的第六压电片、被设置于所述第七悬臂子部的所述第七压电片和被设置于所述第八悬臂子部的第八压电片。
  49. 根据权利要求46所述的感光组件，其中，所述第一悬持臂包括第一悬臂主体和至少部分地贯穿于所述第一悬臂主体的第一分隔槽和第二分隔槽，其中，通过所述第一分隔槽和所述第二分隔槽所述第一悬臂主体被分为相互之间可移动的第一悬臂部、第二悬臂部和第三悬臂部，所述第一悬臂部具有由所述第一分割槽划分而成的第一悬臂子部和第二悬臂子部，所述第二悬臂部具有由所述第一分隔槽划分而成的第三悬臂子部和第四悬臂子部，所述第三悬臂部具有由所述第一分隔槽和所述第二分隔槽划分而成的第五悬臂子部和第六悬臂子部，其中，所述第一压电元件包括被设置于所述第一悬臂子部的所述第一压电片、被设置于所述第二悬臂子部的第二压电片、被设置于所述第三悬臂子部的所述第三压电片和被设置于所述第四悬臂子部的第四压电片、被设置于第五悬臂子部的第五压电片和被设置于所述第六悬臂子部的第六压电片。
  50. 根据权利要求49所述的感光组件，其中，所述第一分隔槽具有十字型。
  51. 根据权利要求50所述的感光组件，其中，所述第二悬持臂包括第二悬臂主体和至少部分地贯穿于所述第二悬臂主体的第三分隔槽和第四分隔槽，其中，通过所述第三分隔槽和所述第四分隔槽所述第二悬臂主体被分为相互可移动的第四悬臂部、第五悬臂部和第六悬臂部，所述第四悬臂部具有由所述第三分隔槽划分而成的第七悬臂子部和第八悬臂子部，所述第五悬臂部具有由所述第三分隔槽划分而成的第九悬臂子部和第十悬臂子部、所述第六悬臂部具有由所述第三分隔槽和所述第四分隔槽划分而成的第十一悬臂子部和第十二悬臂子部，其中，所述第二压电元件包括被设置于所述第七悬臂子部的所述第七压电片、被设置于所述第八悬臂子部的第八压电片、被设置于所述第九悬臂子部的所述第九压电片、被设置于所述第十悬臂子部的第十压电片、被设置于所述第十一悬臂子部的所述第十一压电片和被设置于所述第十二悬臂子部的第十二压电片。
  52. 根据权利要求51所述的感光组件，其中，所述第三分隔槽具有十字型。
  53. 根据权利要求46所述的感光组件，其中，所述至少一对悬持臂还包括第三悬持臂和第四悬持臂，其中，所述第一悬持臂和所述第二悬持臂相对于所述可移动部以X轴为对称轴对称地布置，所述第三悬持臂和所述第四悬持臂相对于所述可移动部以Y轴为对称轴对称地布置。
  54. 根据权利要求53所述的感光组件，其中，所述至少一对压电元件进一步包括第三压电元件和第四压电元件，其中，所述第三压电元件被设置于所述第三悬持臂，所述第四压电元件被设置于所述第四悬持臂；其中，所述第三压电元件和所述第四压电元件被配置为在被导通后通过其自身的形变来分别作动所述第三悬持臂和所述第四悬持臂以从所述可移动部相对的第三侧和第四侧同时抬高或降低所述可移动部以使得所述感光芯片的感光面被抬高或降低，通过这样的方式来进行光学对焦。
  55. 根据权利要求54所述的感光组件，其中，所述第三压电元件被配置为在被导通后通过其自身形变来作动所述第三悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第三侧带动所述可移动部和所述感光芯片，所述第二压电元件被配置为在被导通后通过其自身形变来作动所述第四悬持臂相对于所述固定部沿所述感光芯片的感光轴所设定的方向翘曲以从所述可移动部的第四侧带动所述可移动部和所述感光芯片，其中，所述第三压电元件从所述可移动部的第三侧带动所述感光芯片上升或下降的高度等于所述第四压电元件从所述可移动部的第四侧带动所述感光芯片上升或下降的高度，通过这样的方式，来进行光学对焦。
  56. 根据权利要求44所述的感光组件，其中，所述第一悬持臂包括沿着X轴方向延伸的第一悬臂段和沿着Y轴方向延伸的第二悬臂段，所述第二悬持臂包括沿着X轴方向延伸的第三悬臂段和沿着Y轴方向延伸的第四悬臂段，其中，所述至少一对压电元件包括第一压电元件和第二压电元件，所述第一压电元件被设置于所述第一悬持臂的第一悬臂段，所述第二压电元件被设置于所述第二悬持臂的第三悬臂段，其中，所述第一压电元件被配置为在被导通后通过自身形变来作动所述第一悬持臂以从所述可移动部的第一侧带动所述可移动部和所述感光芯片，所述第二压电元件被配置为在被导通后通过自身形变来作动所述第二悬持臂以从所述可移动部的第二侧带动所述可移动部和所述感光芯片，其中，所述第一压电元件从所述可移动部的第一侧带动所述感光芯片上升或下降的高度等于所述第二 压电元件从所述可移动部的第二侧带动所述感光芯片上升或下降的高度，通过这样的方式，来进行光学对焦。
  57. 根据权利要求56所述的感光组件，其中，所述至少一对压电元件还包括第三压电元件和第四压电元件，所述第三压电元件被设置于所述第一悬持臂的第二悬臂段，所述第四压电元件被设置于所述第二悬持臂的第四悬臂段；其中，所述第三压电元件被配置为在被导通后通过自身形变来作动所述第一悬持臂以从所述可移动部的第一侧带动所述可移动部和所述感光芯片；所述第四压电元件被配置为在被导通后通过自身形变来作动所述第二悬持臂以从所述可移动部的与所述第一侧相对的第二侧来带动所述可移动部和所述感光芯片，其中，所述第三压电元件从所述可移动部的第一侧带动所述感光芯片上升或下降的高度等于所述第四压电元件从所述可移动部的第二侧带动所述感光芯片上升或下降的高度，通过这样的方式，使得所述感光芯片的感光面相对于所述固定部产生沿高度方向的行程以进行光学对焦。
  58. 根据权利要求57所述的感光组件，其中，所述第一悬臂梁具有“L”型结构，和/或，所述第二悬持臂具有“L”型结构。
  59. 根据权利要求43所述的感光组件，其中，所述悬臂梁的厚度尺寸范围为0.1mm-0.3mm。
  60. 根据权利要求59所述的感光组件，其中，所述基板具有上表面和与所述上表面相对的下表面，所述基板进一步具有至少部分地贯穿于所述下表面和所述上表面之间的镂空结构，其中，通过所述镂空结构，所述基板形成所述固定部、所述可移动部和延伸于所述固定部和所述可移动部之间的所述至少一对悬持臂。
  61. 根据权利要求60所述的感光组件，其中，所述固定部、所述可移动部和所述至少一对悬持臂具有一体式结构。
  62. 根据权利要求60所述的感光组件，进一步包括被设置于所述基板的下表面的补强板。
  63. 根据权利要求43所述的感光组件，进一步包括被保持于所述感光芯片的感光路径上的滤光元件。
  64. 一摄像模组，其特征在于，包括：
    如权利要求43至63任一所述的感光组件；以及
    被保持于所述感光组件的感光路径上的光学镜头。
  65. 一光学致动器，其特征在于，包括：
    外壳；
    镜头载体，其内侧面适于安装镜头或者透镜组，其外侧面具有至少两个互相平行的平面状承靠面；
    外框架，其安装在所述镜头载体与所述外壳之间，所述外框架包括至少两个互相平行的第一侧壁，每个所述第一侧壁与一个所述的承靠面相对设置；以及
    至少两个压电驱动装置，每个所述压电驱动装置设置在一个所述的承靠面与一个该承靠面相对的所述第一侧壁之间的间隙；
    其中，每个所述压电驱动装置包括一线状压电元件、动子、摩擦部和激励源；所述线 状压电元件的长度方向与所述镜头或所述透镜组的光轴方向一致，并且所述线状压电元件包括至少三个沿着其厚度方向极化的极化区域段，所述极化区域段为第一极化区域段或第二极化区域段，所述第一极化区域段和所述第二极化区域段的极化方向相反，且所述第一极化区域段和所述第二极化区域段沿着所述线状压电元件的长度方向交替设置；所述动子固定于所述承靠面，所述摩擦部安装于所述线状压电元件的朝内侧的表面与所述动子之间；并且在初始状态下所述摩擦部的两端分别被所述线状压电元件和所述动子挤压，在向所述线状压电元件输入驱动信号时所述线状压电元件的表面发生形变，以驱动所述动子在所述光轴的方向上移动。
  66. 根据权利要求65所述的光学致动器，其特征在于，所述驱动信号包括施加于所述第一极化区域段的第一驱动电压和施加于所述第二极化区域段的第二驱动电压，所述第一驱动电压和所述第二驱动电压的相位差为π/2或-π/2。
  67. 根据权利要求65所述的光学致动器，其特征在于，所述摩擦部具有多个，并且所述摩擦部沿着所述线状压电元件的长度方向均匀地布置在所述线状压电元件的内侧表面。
  68. 根据权利要求65所述的光学致动器，其特征在于，所述镜头载体与所述外框架通过弹性元件连接，以在所述镜头载体与所述外框架之间形成预紧力。
  69. 根据权利要求65所述的光学致动器，其特征在于，所述镜头载体与所述外框架分别设置磁石和线圈，以在所述镜头载体与所述外框架之间形成预紧力。
  70. 根据权利要求65所述的光学致动器，其特征在于，所述线状压电元件的外侧表面与所述外框架之间设置弹性层，所述弹性层受挤压而产生应力，将所述线状压电元件和所述摩擦部压紧在所述动子表面。
  71. 根据权利要求67所述的光学致动器，其特征在于，每个所述第一极化区域段和每个所述第二极化区域段的内侧表面均设置一个所述的摩擦部。
  72. 根据权利要求65所述的光学致动器，其特征在于，所述镜头载体为镜筒，所述镜筒的外侧面呈矩形。
  73. 根据权利要求65所述的光学致动器，其特征在于，所述镜头载体为镜筒，所述镜筒的外侧面呈切割圆状。
  74. 根据权利要求65所述的光学致动器，其特征在于，所述镜头载体为内框架，所述内框架安装于镜筒的外侧面，所述内框架具有至少两个相对设置且互相平行的平板状第二侧壁。
  75. 根据权利要求65所述的光学致动器，其特征在于，所述线状压电元件的长度小于20mm，宽度小于1mm，所述线状压电元件本身的厚度与所述摩擦部的厚度之和小于1.5mm。
  76. 根据权利要求65所述的光学致动器，其特征在于，所述线状压电元件的长度小于10mm，宽度小于0.7mm，所述线状压电元件本身的厚度与所述摩擦部的厚度之和小于1mm。
  77. 根据权利要求65所述的光学致动器，其特征在于，所述压电驱动装置还包括摩擦层，所述摩擦层设置在所述线状压电元件的内侧表面，所述摩擦部设置在所述摩擦层上。
  78. 根据权利要求77所述的光学致动器，其特征在于，所述线状压电元件的长度大于所述摩擦层的长度。
  79. 根据权利要求77所述的光学致动器，其特征在于，所述压电驱动装置还包括摩擦 层，所述摩擦层设置在所述动子的外侧表面，或者所述动子的制作材料是摩擦材料。
  80. 根据权利要求70所述的光学致动器，其特征在于，所述弹性层的厚度为10-50μm。
  81. 根据权利要求68所述的光学致动器，其特征在于，所述线状压电元件的两端设置由非压电材料制作的固定部，并且所述固定部与所述外框架固定在一起；所述线状压电元件的背面与所述外框架之间具有间隙。
  82. 一摄像模组，其特征在于，包括：
    镜头或透镜组；
    感光组件；以及
    权利要求65-81中任一项所述的光学致动器；所述镜头或透镜组安装于所述光学致动器的所述镜头载体的内侧面；所述光学致动器安装于感光组件的顶面。
  83. 一光学致动器，其特征在于，包括：
    外壳；
    载体，其适于安装镜头、透镜组或者感光组件；
    悬持部，其用于将所述载体与所述外壳活动连接；
    悬臂梁，其包括条形基板和附着于所述条形基板表面的压电层，所述悬臂梁的一端固定于所述外壳，其另一端为自由端，并且所述悬臂梁设置在所述外壳与所述载体之间的间隙；
    其中，所述压电层的长度方向与所述条形基板的长度方向一致，并且所述压电层适于在被施加驱动电压时沿着其长度方向伸展或收缩以使所述悬臂梁弯曲，进而促使所述自由端在垂直于所述压电层表面的方向上发生位移，并通过所述自由端的位移推动所述载体移动。
  84. 根据权利要求83所述的光学致动器，其特征在于，在俯视角度下，所述外壳呈矩形，所述悬臂梁设置于所述外壳的至少一个侧面。
  85. 根据权利要求83所述的光学致动器，其特征在于，在俯视角度下，所述外壳呈矩形，所述悬臂梁设置于所述外壳的至少两个相交的侧面。
  86. 根据权利要求84或85所述的光学致动器，其特征在于，至少两个所述的悬臂梁对称地设置于所述外壳的同一个侧面，并且所述悬臂梁通过固定部安装于所述外壳，并且设置于所述外壳的同一个侧面的至少两个所述的悬臂梁共用同一个所述的固定部。
  87. 根据权利要求86所述的光学致动器，其特征在于，在俯视角度下，所述固定部位于其所对应的所述外壳的侧面的中间位置。
  88. 根据权利要求87所述的光学致动器，其特征在于，在俯视角度下，所述载体的外轮廓呈矩形。
  89. 根据权利要求87所述的光学致动器，其特征在于，所述载体的外侧面包括至少一个与所述的悬臂梁适配的平面，所述平面适于在所述悬臂梁向内弯曲时与所述自由端接触，并且所述载体适于在所述自由端的推动下随着所述自由端位移，其中向内弯曲是所述悬臂梁的自由端自所述外壳向所述载体移动的方向。
  90. 根据权利要求83所述的光学致动器，其特征在于，所述压电层包括第一压电层和 第二压电层，所述第一压电层和所述第二压电层分别附着于所述条形基板的内表面和外表面。
  91. 根据权利要求90所述的光学致动器，其特征在于，所述光学致动器还包括驱动单元，所述驱动单元用于对所述第一压电层和所述第二压电层施加驱动电压，使得所述第一压电层在其长度方向上收缩，且所述第二压电层在其长度方向上伸展，从而使所述悬臂梁向内侧弯曲。
  92. 根据权利要求86所述的光学致动器，其特征在于，所述压电层包括第一压电层和第二压电层，所述第一压电层和所述第二压电层分别附着于所述条形基板的内表面和外表面；所述光学致动器还包括驱动单元，所述驱动单元用于对所述第一压电层和所述第二压电层施加驱动电压，使得所述第一压电层在其长度方向上收缩，且所述第二压电层在其长度方向上伸展，从而使所述悬臂梁向内侧弯曲；以及所述驱动单元还用于使设置于所述外壳的同一个侧面的至少两个所述的悬臂梁同时向内侧弯曲，以推动所述载体移动。
  93. 根据权利要求83所述的光学致动器，其特征在于，所述压电层设置于所述条形基板的内表面或外表面，所述光学致动器还包括驱动单元，所述驱动单元用于对位于所述条形基板单侧的所述压电层施加驱动电压以使所述悬臂梁弯曲，并由所述悬臂梁的所述自由端推动所述载体移动。
  94. 根据权利要求83所述的光学致动器，其特征在于，所述悬持部为弹片，所述弹片设置在所述外壳的四角位置，并且所述弹片的两端分别连接所述外壳和所述载体。
  95. 根据权利要求83所述的光学致动器，其特征在于，在未施加驱动电压时，所述悬臂梁的所述自由端与所述载体之间具有间隙；在施加驱动电压时，所述压电层沿其长度方向伸缩以使所述悬臂梁弯曲，所述悬臂梁的弯曲使其所述自由端抵靠并推动所述载体移动。
  96. 根据权利要求95所述的光学致动器，其特征在于，所述条形基板为金属片，所述压电层的厚度是所述金属片的厚度的50％-80％。
  97. 根据权利要求95所述的光学致动器，其特征在于，所述条形基板为金属片，所述压电层包括第一压电层和第二压电层，所述第一压电层和所述第二压电层分别附接于所述金属片的内表面和外表面；所述第一压电层的厚度是所述金属片的厚度的50％-80％；所述第二压电层的厚度是所述金属片的厚度的50％-80％。
  98. 根据权利要求97所述的光学致动器，其特征在于，所述第一压电层和所述第二压电层的厚度相等。
  99. 根据权利要求96或97所述的光学致动器，其特征在于，所述金属片的厚度为50-300μm。
  100. 根据权利要求85所述的光学致动器，其特征在于，所述悬臂梁包括x轴移动悬臂梁和y轴移动悬臂梁，所述x轴移动悬臂梁布置在所述外壳的垂直于所述x轴的侧面，所述x轴移动悬臂梁的长度方向平行于y轴；所述y轴移动悬臂梁布置在所述外壳的垂直于所述y轴的侧面，所述y轴移动悬臂梁的长度方向平行于x轴；其中，所述x轴和所述y轴是基准面上的两个相互垂直的坐标轴；所述基准面垂直于所述镜头或所述透镜组的光轴，或者所述基准面平行于所述感光组件的感光面。
  101. 根据权利要求100所述的光学致动器，其特征在于，两个所述的x轴悬臂梁对称 地设置于所述外壳的垂直于所述x轴的侧面，并且两个所述的x轴悬臂梁共用同一个固定部并且通过所述固定部安装于所述外壳；两个所述的y轴悬臂梁对称地设置于所述外壳的垂直于所述y轴的侧面，并且两个所述的y轴悬臂梁共用同一个固定部并且通过所述固定部安装于所述外壳；
    所述光学致动器还包括驱动单元，所述驱动单元用于对所述压电层施加驱动电压以使位于同一侧面的两个所述的x轴悬臂梁均向内弯曲，并由这两个所述的x轴悬臂梁的所述自由端推动所述载体沿所述x轴平移；所述驱动单元还用于对所述压电层施加驱动电压以使位于同一侧面的两个所述的y轴悬臂梁均向内弯曲，并由这两个所述的y轴悬臂梁的所述自由端推动所述载体沿所述y轴平移。
  102. 根据权利要求101所述的光学致动器，其特征在于，所述驱动单元还用于对所述压电层施加驱动电压，以使共用同一所述固定部的两个所述的x轴悬臂梁分别向内和向外弯曲，以及使共用同一所述固定部的两个所述的y轴悬臂梁分别向内和向外弯曲，从而使所述载体绕z轴旋转；其中所述z轴平行于所述光轴。
  103. 根据权利要求85所述的光学致动器，其特征在于，所述悬臂梁包括x轴移动悬臂梁和y轴移动悬臂梁，所述x轴移动悬臂梁布置在所述外壳的垂直于所述x轴的侧面，所述x轴移动悬臂梁的长度方向平行于z轴；所述y轴移动悬臂梁布置在所述外壳的垂直于所述y轴的侧面，所述y轴移动悬臂梁的长度方向平行于z轴；其中，所述x轴和所述y轴为垂直于所述光学致动器的光轴的坐标轴，且所述x轴和所述y轴互相垂直，所述z轴平行于所述光轴。
  104. 根据权利要求83所述的光学致动器，其特征在于，所述悬臂梁设置于所述载体顶面与所述外壳之间的间隙，和/或设置于所述载体底面与所述外壳之间的间隙；在俯视角度下，所述悬臂梁位于所述载体的边缘区域，所述悬臂梁的所述压电层的表面平行于所述载体的顶面或底面。
  105. 根据权利要求84所述的光学致动器，其特征在于，所述悬臂梁设置于所述载体外侧面与所述外壳的内侧面之间的间隙，在所述外壳的同一个内侧面的中心设置固定部；在侧视角度下，四个所述悬臂梁自所述固定部向不同方位延伸，形成“X”型的悬臂梁组。
  106. 根据权利要求84所述的光学致动器，其特征在于，所述悬臂梁设置于所述载体外侧面与所述外壳的内侧面之间的间隙；在侧视角度下，所述悬臂梁的长度方向被配置成相对于基准面呈倾斜状态。
  107. 一摄像模组，其特征在于，包括：
    权利要求83-106中任一项所述的光学致动器；
    光学镜头；以及
    感光组件；
    其中，所述光学镜头和/或所述感光组件安装于所述光学致动器的所述载体。
PCT/CN2022/090872 2021-05-07 2022-05-05 摄像模组、光学致动器、感光组件及其制造方法 WO2022233289A1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202280032521.8A CN117255969A (zh) 2021-05-07 2022-05-05 摄像模组、光学致动器、感光组件及其制造方法

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
CN202110496375.1A CN115390341A (zh) 2021-05-07 2021-05-07 潜望式摄像模组
CN202110496375.1 2021-05-07
CN202110534392.X 2021-05-17
CN202110534392.XA CN115379072B (zh) 2021-05-17 2021-05-17 光学致动器及相应的摄像模组
CN202110539951.6 2021-05-18
CN202110539951.6A CN115379074B (zh) 2021-05-18 2021-05-18 光学致动器及相应的摄像模组
CN202110610689.X 2021-06-01
CN202110610689.XA CN115426448B (zh) 2021-06-01 2021-06-01 感光组件、摄像模组和感光组件的制备方法
CN202110616207.1 2021-06-02
CN202110616207.1A CN115440749A (zh) 2021-06-02 2021-06-02 感光组件和摄像模组

Publications (1)

Publication Number Publication Date
WO2022233289A1 true WO2022233289A1 (zh) 2022-11-10

Family

ID=83932004

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/090872 WO2022233289A1 (zh) 2021-05-07 2022-05-05 摄像模组、光学致动器、感光组件及其制造方法

Country Status (2)

Country Link
CN (1) CN117255969A (zh)
WO (1) WO2022233289A1 (zh)

Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1623240A (zh) * 2001-11-02 2005-06-01 1...有限公司 弧形的电激活致动器
CN1677151A (zh) * 2004-04-02 2005-10-05 奥林巴斯株式会社 移动部件移动装置和透镜镜筒
CN1837882A (zh) * 2005-03-23 2006-09-27 索尼株式会社 透镜驱动机构、镜头单元以及图像拾取装置
JP2008040240A (ja) * 2006-08-08 2008-02-21 Stanley Electric Co Ltd 光偏向器及びその製造方法
JP2008145894A (ja) * 2006-12-12 2008-06-26 Sony Corp 撮像装置、移動装置及び圧電バイモルフアクチュエータ
US20100245966A1 (en) * 2009-03-31 2010-09-30 Stanley Electric Co., Ltd. Actuator device for optical deflector
CN102998795A (zh) * 2011-09-08 2013-03-27 富士胶片株式会社 反射镜驱动设备、驱动该反射镜驱动设备的方法和制造该反射镜驱动设备的方法
JP2013083769A (ja) * 2011-10-07 2013-05-09 Stanley Electric Co Ltd 光偏向器
CN103246059A (zh) * 2012-02-14 2013-08-14 富士胶片株式会社 镜驱动设备和控制该设备的方法
CN105793753A (zh) * 2014-04-08 2016-07-20 奥林巴斯株式会社 驱动装置和图像设备
CN107462963A (zh) * 2017-08-11 2017-12-12 南京航空航天大学 一种压电驱动的可变光阑调光装置及方法
CN107783243A (zh) * 2016-08-24 2018-03-09 宁波舜宇光电信息有限公司 潜望式摄像模组
CN108353131A (zh) * 2016-10-17 2018-07-31 华为技术有限公司 获取图像的方法和终端设备
CN108777761A (zh) * 2018-08-02 2018-11-09 Oppo广东移动通信有限公司 成像模组和电子装置
CN110730285A (zh) * 2019-10-14 2020-01-24 Oppo广东移动通信有限公司 摄像头模组和终端设备
CN110839120A (zh) * 2018-08-15 2020-02-25 宁波舜宇光电信息有限公司 防抖摄像模组和防抖感光组件及其制造方法以及电子设备
CN110959136A (zh) * 2018-01-15 2020-04-03 维克多哈苏有限公司 调整装置、拍摄组件及拍摄设备
CN111355872A (zh) * 2018-12-24 2020-06-30 华为技术有限公司 摄像模组、防抖组件及终端
CN111474670A (zh) * 2019-01-24 2020-07-31 格科微电子（上海）有限公司 摄像头模组的驱动装置
CN111698398A (zh) * 2019-03-15 2020-09-22 宁波舜宇光电信息有限公司 摄像装置、sma驱动器及其驱动方法
CN112055102A (zh) * 2019-06-06 2020-12-08 华为技术有限公司 一种摄像头模组、摄像机以及移动终端
CN112351158A (zh) * 2019-08-06 2021-02-09 中芯集成电路（宁波）有限公司 成像模组及其形成方法、镜头组件

Patent Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1623240A (zh) * 2001-11-02 2005-06-01 1...有限公司 弧形的电激活致动器
CN1677151A (zh) * 2004-04-02 2005-10-05 奥林巴斯株式会社 移动部件移动装置和透镜镜筒
CN1837882A (zh) * 2005-03-23 2006-09-27 索尼株式会社 透镜驱动机构、镜头单元以及图像拾取装置
JP2008040240A (ja) * 2006-08-08 2008-02-21 Stanley Electric Co Ltd 光偏向器及びその製造方法
JP2008145894A (ja) * 2006-12-12 2008-06-26 Sony Corp 撮像装置、移動装置及び圧電バイモルフアクチュエータ
US20100245966A1 (en) * 2009-03-31 2010-09-30 Stanley Electric Co., Ltd. Actuator device for optical deflector
CN102998795A (zh) * 2011-09-08 2013-03-27 富士胶片株式会社 反射镜驱动设备、驱动该反射镜驱动设备的方法和制造该反射镜驱动设备的方法
JP2013083769A (ja) * 2011-10-07 2013-05-09 Stanley Electric Co Ltd 光偏向器
CN103246059A (zh) * 2012-02-14 2013-08-14 富士胶片株式会社 镜驱动设备和控制该设备的方法
CN105793753A (zh) * 2014-04-08 2016-07-20 奥林巴斯株式会社 驱动装置和图像设备
CN107783243A (zh) * 2016-08-24 2018-03-09 宁波舜宇光电信息有限公司 潜望式摄像模组
CN108353131A (zh) * 2016-10-17 2018-07-31 华为技术有限公司 获取图像的方法和终端设备
CN107462963A (zh) * 2017-08-11 2017-12-12 南京航空航天大学 一种压电驱动的可变光阑调光装置及方法
CN110959136A (zh) * 2018-01-15 2020-04-03 维克多哈苏有限公司 调整装置、拍摄组件及拍摄设备
CN108777761A (zh) * 2018-08-02 2018-11-09 Oppo广东移动通信有限公司 成像模组和电子装置
CN110839120A (zh) * 2018-08-15 2020-02-25 宁波舜宇光电信息有限公司 防抖摄像模组和防抖感光组件及其制造方法以及电子设备
CN111355872A (zh) * 2018-12-24 2020-06-30 华为技术有限公司 摄像模组、防抖组件及终端
CN111474670A (zh) * 2019-01-24 2020-07-31 格科微电子（上海）有限公司 摄像头模组的驱动装置
CN111698398A (zh) * 2019-03-15 2020-09-22 宁波舜宇光电信息有限公司 摄像装置、sma驱动器及其驱动方法
CN112055102A (zh) * 2019-06-06 2020-12-08 华为技术有限公司 一种摄像头模组、摄像机以及移动终端
CN112351158A (zh) * 2019-08-06 2021-02-09 中芯集成电路（宁波）有限公司 成像模组及其形成方法、镜头组件
CN110730285A (zh) * 2019-10-14 2020-01-24 Oppo广东移动通信有限公司 摄像头模组和终端设备

Also Published As

Publication number Publication date
CN117255969A (zh) 2023-12-19

Similar Documents

Publication Publication Date Title
US8040623B2 (en) Compact auto focus lens module with piezoelectric actuator
JP2006209136A (ja) 可変焦点ミラー及びこれを応用するカメラモジュール
WO2022214084A1 (zh) 潜望式摄像模组和可变焦摄像模组
WO2022233289A1 (zh) 摄像模组、光学致动器、感光组件及其制造方法
WO2022228111A1 (zh) 摄像模组
CN115202130A (zh) 潜望式摄像模组
CN115379074B (zh) 光学致动器及相应的摄像模组
CN114879336A (zh) 可变焦摄像模组
CN115268167A (zh) 摄像模组
CN115699787A (zh) 相机致动器和包括该相机致动器的相机设备
CN115426448B (zh) 感光组件、摄像模组和感光组件的制备方法
WO2024037631A1 (zh) 压电马达及其摄像模组
JP2006101611A (ja) カメラモジュールとその駆動用ピエゾ素子モジュール及びこのカメラモジュールを備えた携帯端末
CN115379072B (zh) 光学致动器及相应的摄像模组
CN115052083B (zh) 驱动集成式摄像模组
CN115268008B (zh) 可变焦摄像模组
WO2022193930A1 (zh) 潜望式摄像模组
CN114942505B (zh) 可变焦摄像模组
CN114942504A (zh) 可变焦摄像模组
WO2022166677A1 (zh) 摄像模组及其光学防抖方法和电子设备
WO2023051117A1 (zh) 驱动装置、摄像头模组以及电子设备
WO2022228112A1 (zh) 摄像模组
WO2023051118A1 (zh) 驱动器及其制作方法、驱动装置、摄像头模组、电子设备
CN114879335A (zh) 潜望式摄像模组
CN117676283A (zh) 压电致动器及其摄像模组

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22798630

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 202280032521.8

Country of ref document: CN

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 22798630

Country of ref document: EP

Kind code of ref document: A1