WO2020129757A1 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- WO2020129757A1 WO2020129757A1 PCT/JP2019/048343 JP2019048343W WO2020129757A1 WO 2020129757 A1 WO2020129757 A1 WO 2020129757A1 JP 2019048343 W JP2019048343 W JP 2019048343W WO 2020129757 A1 WO2020129757 A1 WO 2020129757A1
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- Prior art keywords
- polishing
- unit
- axis
- wafer
- polishing head
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- 238000012545 processing Methods 0.000 title claims abstract description 98
- 239000000758 substrate Substances 0.000 title claims abstract description 63
- 238000005498 polishing Methods 0.000 claims abstract description 390
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/04—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor involving a rotary work-table
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/16—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces performing a reciprocating movement, e.g. during which the sense of rotation of the working-spindle is reversed
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Definitions
- the present disclosure relates to a substrate processing apparatus.
- Patent Document 1 discloses a substrate processing apparatus for polishing the back surface of a substrate.
- This substrate processing apparatus includes a sliding member that rotates around a vertical axis to perform processing by sliding on the back surface of the substrate, a revolution mechanism that revolves a sliding member that is rotating around a vertical revolution axis, and a substrate. And a relative movement mechanism for moving the relative position of the orbit of the sliding member in the horizontal direction.
- the present disclosure provides a substrate processing apparatus that is effective in reducing polishing unevenness that occurs when a substrate is polished.
- the substrate processing apparatus includes a polishing unit.
- the polishing section includes a polishing head that polishes the main surface of the substrate, a first drive section that rotates the polishing head around a first axis, and a first track along a circular orbit about a second axis parallel to the first axis.
- a second drive unit for moving the shaft.
- the center position of the polishing head is different from the first axis.
- the outer diameter of the polishing head is smaller than the diameter of the movable range of the polishing head around the first axis.
- a substrate processing apparatus that is effective in reducing polishing unevenness that occurs when a substrate is polished.
- FIG. 1 is a diagram showing a schematic configuration of a substrate processing system according to an exemplary embodiment.
- FIG. 2 is a schematic diagram showing the internal configuration of the substrate processing apparatus according to one exemplary embodiment.
- FIG. 3 is a schematic plan view illustrating the schematic configuration of the polishing apparatus.
- FIG. 4 is a schematic side view illustrating the schematic configuration of the polishing apparatus.
- 5A and 5B are schematic diagrams showing a configuration example of the polishing head.
- FIG. 6 is a block diagram illustrating a hardware configuration of the control device.
- FIG. 7 is a flowchart showing an example of a processing procedure by the polishing apparatus.
- FIG. 8A is a diagram for explaining an example of central polishing.
- FIG. 8B is a diagram for explaining an example of peripheral polishing.
- FIG. 9A is a flowchart showing an example of central polishing control.
- FIG. 9B is a flowchart showing an example of the outer periphery polishing control.
- FIG. 10 is a diagram for explaining an operation example of the polishing head along a locus that traverses the outer peripheral region.
- FIG. 11 is a diagram for explaining an example of a polishing processing result by the substrate processing apparatus.
- the substrate processing system 1 is a system that forms a photosensitive coating on a substrate, exposes the photosensitive coating, and develops the photosensitive coating.
- the substrate to be processed is, for example, a semiconductor wafer W.
- the photosensitive film is, for example, a resist film.
- the substrate processing system 1 includes a coating/developing apparatus 2 and an exposure apparatus 3.
- the exposure device 3 performs an exposure process on a resist film (photosensitive film) formed on the wafer W (substrate). Specifically, the exposure apparatus 3 irradiates the exposed portion of the resist film with energy rays by a method such as liquid immersion exposure.
- the coating/developing device 2 performs a process of forming a resist film on the surface of the wafer W (substrate) before the exposure process by the exposure device 3 and a developing process of the resist film after the exposure process.
- the coating/developing apparatus 2 includes a carrier block 4, a processing block 5, an interface block 6, a polishing unit 20, and a control device 100 (control unit).
- the carrier block 4 introduces the wafer W into the coating/developing apparatus 2 and guides the wafer W from the coating/developing apparatus 2.
- the carrier block 4 can support a plurality of carriers C for the wafer W and incorporates the transfer arm A1.
- the carrier C accommodates a plurality of circular wafers W, for example.
- the transfer arm A1 takes out the wafer W from the carrier C, transfers it to the processing block 5, receives the wafer W from the processing block 5, and returns the wafer W into the carrier C.
- the processing block 5 has a plurality of processing modules 11, 12, 13, and 14.
- the processing modules 11, 12, and 13 have a coating unit U1, a thermal processing unit U2, and a transfer arm A3 that transfers a wafer W to these units.
- the processing module 11 forms a lower layer film on the surface of the wafer W by the coating unit U1 and the heat treatment unit U2.
- the coating unit U1 of the processing module 11 coats the processing liquid for forming the lower layer film on the wafer W.
- the heat treatment unit U2 of the treatment module 11 performs various heat treatments associated with the formation of the lower layer film.
- the processing module 12 forms a resist film on the lower layer film by the coating unit U1 and the heat treatment unit U2.
- the coating unit U1 of the processing module 12 coats the processing liquid for forming the resist film on the lower layer film.
- the heat treatment unit U2 of the treatment module 12 performs various heat treatments associated with the formation of the resist film.
- the processing module 13 forms an upper layer film on the resist film by the coating unit U1 and the heat treatment unit U2.
- the coating unit U1 of the processing module 13 coats the liquid for forming the upper layer film on the resist film.
- the heat treatment unit U2 of the treatment module 13 performs various heat treatments associated with the formation of the upper layer film.
- the processing module 14 includes a developing unit U3, a heat treatment unit U4, and a transfer arm A3 that transfers the wafer W to these units.
- the processing module 14 develops the resist film after exposure by the developing unit U3 and the thermal processing unit U4.
- the developing unit U3 applies a developing solution onto the exposed surface of the wafer W and then rinses it off with a rinsing solution to develop the resist film.
- the heat treatment unit U4 performs various heat treatments associated with the development processing. Specific examples of the heat treatment include heat treatment before the development treatment (PEB: Post Exposure Bake), heat treatment after the development treatment (PB: Post Bake), and the like.
- a shelf unit U10 is provided on the carrier block 4 side in the processing block 5.
- the shelf unit U10 is divided into a plurality of cells arranged in the vertical direction.
- a lifting arm A7 is provided near the shelf unit U10. The elevating arm A7 elevates and lowers the wafer W between the cells of the shelf unit U10.
- a shelf unit U11 is provided on the interface block 6 side in the processing block 5.
- the shelf unit U11 is divided into a plurality of cells arranged in the vertical direction.
- the interface block 6 transfers the wafer W to and from the exposure apparatus 3. Further, in the present embodiment, the polishing unit 20 for polishing the wafer W is arranged in the interface block 6.
- the interface block 6 has a built-in transfer arm A8 and is connected to the exposure apparatus 3.
- the transfer arm A8 conveys the wafer W arranged on the shelf unit U11 to the polishing unit 20, and transfers the wafer W polished by the polishing unit 20 to the exposure apparatus 3.
- the transfer arm A8 receives the wafer W from the exposure apparatus 3 and returns it to the shelf unit U11.
- the control device 100 controls the coating/developing device 2 so as to execute the coating/developing process in the following procedure, for example.
- the controller 100 controls the transfer arm A1 so as to transfer the wafer W in the carrier C to the shelf unit U10, and controls the elevating arm A7 so as to arrange the wafer W in the cell for the processing module 11.
- control device 100 controls the transfer arm A3 so as to transfer the wafer W on the shelf unit U10 to the coating unit U1 and the heat treatment unit U2 in the processing module 11. Further, the control device 100 controls the coating unit U1 and the heat treatment unit U2 so as to form the lower layer film on the surface of the wafer W. After that, the control device 100 controls the transfer arm A3 so as to return the wafer W on which the lower layer film is formed to the shelf unit U10, and controls the elevating arm A7 so as to arrange the wafer W in the cell for the processing module 12. ..
- control device 100 controls the transfer arm A3 so as to transfer the wafer W of the shelf unit U10 to the coating unit U1 and the heat treatment unit U2 in the processing module 12.
- the controller 100 also controls the coating unit U1 and the heat treatment unit U2 so as to form a resist film on the lower layer film of the wafer W.
- control device 100 controls the transfer arm A3 so as to return the wafer W to the shelf unit U10, and controls the elevating arm A7 so as to arrange the wafer W in the cell for the processing module 13.
- control device 100 controls the transfer arm A3 to transfer the wafer W of the shelf unit U10 to each unit in the processing module 13. Further, the control device 100 controls the coating unit U1 and the heat treatment unit U2 so as to form an upper layer film on the resist film of the wafer W. After that, the control device 100 controls the transfer arm A3 to transfer the wafer W to the shelf unit U11.
- the controller 100 controls the transfer arm A8 so that the wafer W on the shelf unit U11 is carried into the polishing unit 20 and the wafer W polished by the polishing unit 20 is sent to the exposure apparatus 3.
- the control device 100 receives the wafer W that has been subjected to the exposure processing from the exposure device 3 and controls the transfer arm A8 to arrange the wafer W in the cell for the processing module 14 in the shelf unit U11.
- the controller 100 controls the transfer arm A3 so as to transfer the wafer W of the shelf unit U11 to each unit in the processing module 14, and the developing unit U3 and the developing unit U3 to perform the developing process on the resist film of the wafer W.
- the heat treatment unit U4 is controlled.
- the control device 100 controls the transfer arm A3 to return the wafer W to the shelf unit U10, and controls the elevating arm A7 and the transfer arm A1 to return the wafer W into the carrier C. With the above, the coating/developing process is completed.
- the specific configuration of the substrate processing apparatus is not limited to the configuration of the coating/developing apparatus 2 illustrated above.
- the substrate processing apparatus may be any apparatus as long as it includes the polishing unit 20 and the control device 100 that can control the polishing unit 20.
- the coating/developing device 2 may perform the polishing process of the wafer W by the polishing unit 20 at any timing before the exposure process by the exposure device 3.
- the coating/developing apparatus 2 polishes the wafer W before and after the processing by the coating unit U1 and the thermal processing unit U2 in the processing modules 11 and 12, or before the processing by the coating unit U1 and the thermal processing unit U2 in the processing module 13. You may go.
- the polishing unit 20 may be arranged in the carrier block 4 or the processing modules 11, 12, 13.
- the polishing unit 20 shown in FIG. 3 is a device for polishing the back surface (main surface) of the wafer W opposite to the surface on which the resist film is formed.
- the polishing unit 20 roughens the back surface of the wafer W by polishing the back surface of the wafer W with a sliding member (for example, a grindstone).
- the polishing unit 20 may divide, for example, the back surface of the wafer W formed into a circle into a central region and an outer peripheral region, and polish each region with a sliding member.
- the central region is a region defined by a circle having an arbitrarily set radius from the center of the wafer W in plan view, and the outer peripheral region is a peripheral region other than the central region of the wafer W in plan view.
- the radius of the central region may be set to about 1/3 to 1/2 of the radius of the wafer W.
- the radius of the central region may be, for example, about 60 to 70 mm.
- the polishing unit 20 polishes the back surface of the wafer W and then cleans the back surface of the wafer W in order to remove foreign matter generated during polishing.
- the polishing process will be described as including polishing and cleaning of the back surface of the wafer W unless otherwise specified.
- the polishing process (polishing) by the polishing unit 20 is performed to reduce the contact area between the back surface of the wafer W and the stage when the wafer W is installed on the stage provided in the exposure apparatus 3, for example.
- the polishing unit 20 includes a housing 21, a substrate holding mechanism 30, a switching unit 60, and a roughening mechanism 70 (polishing unit).
- the housing 21 houses the substrate holding mechanism 30, the switching unit 60, and the roughening mechanism 70.
- the housing 21 has an internal space and is formed in, for example, a substantially rectangular parallelepiped shape.
- An opening is provided at one end of the housing 21, and the transfer arm A8 carries the wafer W into or out of the polishing unit 20.
- the direction of the long side of the outer edge of the housing 21 in plan view is referred to as the “front-back direction”
- the direction of the short side is referred to as the “left-right direction”. I will explain.
- the substrate holding mechanism 30 holds the back surface of the wafer W when the wafer W is polished. Specifically, when the central region of the wafer W is polished (hereinafter referred to as “central polishing”), the outer peripheral region of the wafer W is held and the peripheral region of the wafer W is polished (hereinafter referred to as “peripheral polishing”). That is, the central region of the wafer W is held and the wafer W is rotated.
- the substrate holding mechanism 30 includes a rotation holding unit 40 and a peripheral edge holding unit 50.
- the rotation holding unit 40 holds the central region on the back surface of the wafer W when the outer periphery of the wafer W is polished.
- the rotation holding unit 40 may be fixed at a predetermined position in plan view.
- the rotation holding unit 40 includes a spin chuck 41, a shaft 42, and a rotation driving unit 43 (see FIG. 4).
- the spin chuck 41 horizontally supports the wafer W by adsorbing the central region on the back surface of the wafer W.
- the spin chuck 41 may be configured to attract the wafer W by negative pressure.
- the shaft 42 is connected below the spin chuck 41 and is formed so as to extend in the vertical direction.
- the rotation drive unit 43 is configured to rotate the spin chuck 41 via the shaft 42.
- the rotation drive unit 43 is a rotation actuator.
- the rotation drive unit 43 rotates the spin chuck 41 around the vertical axis Ax0. With the rotation of the spin chuck 41 by the rotation driving unit 43, the wafer W supported by the spin chuck 41 rotates about the axis Ax0.
- the peripheral edge holding unit 50 holds the outer peripheral area on the back surface of the wafer W when the center polishing of the wafer W is performed.
- the peripheral edge holding unit 50 includes two fixed chucks 53.
- the two fixed chucks 53 support the wafer W horizontally by adsorbing the outer peripheral area on the back surface of the wafer W.
- the fixed chuck 53 may be configured to attract the wafer W by negative pressure.
- the two fixed chucks 53 are arranged on the left and right sides of the spin chuck 41 so as to sandwich the spin chuck 41 in the left-right direction.
- the two fixed chucks 53 are arranged so as to be located in the outer peripheral region (periphery) of the wafer W in a state where the center position of the wafer W is aligned with the intermediate position of the two fixed chucks 53 in the left-right direction.
- the switching unit 60 switches the arrangement state of the wafer W. Specifically, the switching unit 60 arranges the arrangement state of the wafer W such that the wafer W is arranged so that the center polishing of the wafer W is performed or the outer periphery polishing of the wafer W is performed. Switch to the specified state. In the present embodiment, the switching unit 60 moves the peripheral edge holding unit 50 in order to switch the arrangement state of the wafer W. The switching unit 60 switches the position of the peripheral edge holding unit 50 to a position where the center polishing of the wafer W is performed or a position where the outer periphery polishing of the wafer W is performed. It should be noted that FIGS. 3 and 4 show an arrangement state of the peripheral edge holding unit 50 when the outer periphery of the wafer W is polished.
- the switching unit 60 includes a horizontal drive mechanism 61 and a lift drive mechanism 62.
- the horizontal drive mechanism 61 reciprocates the fixed chuck 53 along the front-rear direction.
- the horizontal drive mechanism 61 includes a linear actuator.
- the horizontal drive mechanism 61 moves the fixed chuck 53 to move the wafer W supported by the fixed chuck 53 in the front-rear direction.
- the horizontal drive mechanism 61 has a position where the wafer W is delivered to and from the spin chuck 41 (hereinafter referred to as “delivery position”) and a position where center polishing of the wafer W is performed (hereinafter referred to as “center”).
- delivery position a position where the wafer W is delivered to and from the spin chuck 41
- center polishing of the wafer W hereinafter referred to as “center”.
- the fixed chuck 53 is moved to and from the polishing position.
- the lifting drive mechanism 62 moves the fixed chuck 53 up and down.
- the lift drive mechanism 62 includes a lift actuator.
- the elevation drive mechanism 62 is between a height lower than the spin chuck 41 (hereinafter referred to as “standby height”) and a height above the spin chuck 41 (hereinafter referred to as “holding height”).
- the fixed chuck 53 is moved up and down. When the fixed chuck 53 is positioned at the holding height by the lifting drive mechanism 62, the fixed chuck 53 holds the wafer W.
- the spin chuck 41 holds the wafer W when the fixed chuck 53 is positioned at the standby height by the lifting drive mechanism 62.
- the roughening mechanism 70 is a mechanism for roughening the back surface of the wafer W. Specifically, the back surface of the wafer W held by the substrate holding mechanism 30 is polished, and the back surface of the polished wafer W is washed.
- the roughening mechanism 70 includes a polishing mechanism 71, a cleaning mechanism 72 (processing unit), and a turning mechanism 74.
- the polishing mechanism 71 polishes the back surface of the wafer W.
- the polishing mechanism 71 has a polishing head 75, a rotating mechanism 76, a rotating mechanism 77, and a lifting mechanism 78.
- the polishing head 75, the rotating mechanism 76, the rotating mechanism 77, and the lifting mechanism 78 are arranged in this order from above.
- the polishing head 75 is a member that polishes the wafer W by contacting and sliding on the wafer W.
- the polishing head 75 is formed in, for example, a cylindrical shape or a cylindrical shape. A detailed example of the polishing head 75 will be described later.
- the rotating mechanism 76 supports and rotates the polishing head 75. Specifically, the rotation mechanism 76 is configured to rotate the polishing head 75 around the vertical axis Ax1 (first axis).
- the rotation mechanism 76 includes a rotation stage 81 and a rotation drive unit 82 (first drive unit).
- the rotary stage 81 supports the polishing head 75.
- the rotary stage 81 may be formed in a disc shape.
- the center position of the disc-shaped rotary stage 81 may substantially coincide with the axis Ax1.
- the rotary stage 81 is arranged such that the surface (support surface) that supports the polishing head 75 is along the horizontal direction.
- the diameter of the rotary stage 81 may be, for example, about 60 mm to 70 mm.
- the diameter of the rotary stage 81 is larger than the outer diameter Dh of the polishing head 75 (see FIG. 5A).
- the polishing head 75 is provided on the rotary stage 81 so that the axis Ax1 (the center position of the rotary stage 81) and the center position of the polishing head 75 are different from each other.
- the center position of the polishing head 75 is eccentric to the axis Ax1.
- the polishing head 75 may be provided on the peripheral portion of the support surface of the rotary stage 81 so that the outer edge of the polishing head 75 and the outer edge of the rotary stage 81 are substantially aligned in a plan view.
- the rotation drive unit 82 is configured to rotate the rotation stage 81 around the axis Ax1.
- the rotation drive unit 82 is connected to the back surface of the rotation stage 81 opposite to the support surface.
- the rotation drive unit 82 is a rotation actuator.
- the rotary drive unit 82 rotates the rotary stage 81, the polishing head 75 rotates around the axis Ax1.
- the outer diameter Dh of the polishing head 75 is smaller than the diameter of the movable range of the polishing head 75 around the axis Ax1.
- the movable range of the polishing head 75 around the axis Ax1 is a range that at least a part of the polishing surface (contact surface with the wafer W) of the polishing head 75 can be reached by driving the rotating mechanism 76.
- the outer diameter Dh of the polishing head 75 is smaller than the diameter of the outer edge of the movement locus of the polishing head 75 by the rotary drive unit 82.
- the outer edge of the movable range of the polishing head 75 around the axis Ax1 is substantially the same as the outer edge of the rotary stage 81. Match.
- the rotating mechanism 77 moves the axis Ax1 along a circular orbit around the axis Ax2 (second axis) parallel to the axis Ax1.
- the rotation mechanism 77 is configured to support the rotation mechanism 76 and rotate it about the axis Ax2.
- the rotation mechanism 77 rotates the rotation mechanism 76 around the axis Ax2, whereby the polishing head 75 moves along a circular orbit centered on the axis Ax2 while being rotated by the rotation mechanism 76. If the rotating mechanism 77 is driven while the rotating operation of the polishing head 75 by the rotating mechanism 76 is stopped, the polishing head 75 rotates along the circumference around the axis Ax2.
- the rotation mechanism 77 includes a rotation stage 83 and a rotation drive unit 84 (second drive unit).
- the rotation stage 83 supports the rotation mechanism 76 (rotation drive unit 82).
- the rotary stage 83 may be formed in a disc shape.
- the center position of the disc-shaped rotary stage 83 may be substantially aligned with the axis Ax2.
- the size (area) of the rotary stage 83 may be larger than that of the rotary stage 81 of the rotary mechanism 76 in a plan view.
- the rotation stage 83 is arranged such that the surface (support surface) that supports the rotation mechanism 76 extends in the horizontal direction.
- the rotation drive unit 84 is configured to rotate the rotation stage 83 about the axis Ax2.
- the rotation drive unit 84 is connected to the back surface of the rotation stage 83, which is on the opposite side of the support surface.
- the rotation drive unit 84 is a rotation actuator.
- the polishing head 75 moves in the entire area defined by the outer edge of the rotary stage 83 in plan view. Since the rotary stage 81 does not move even when the rotary mechanism 76 rotates, the rotary stage 81 rotates on its axis, but the central position of the polishing head 75 is eccentric with respect to the axis Ax1, and therefore the polishing head 75 revolves around the sun. Since the center (axis Ax1) of the rotary stage 81 is eccentric with respect to the axis Ax2, the rotation of the rotating mechanism 77 causes the rotary stage 81 to revolve around the axis Ax2 while rotating on its axis.
- the polishing mechanism 71 is configured such that the axis Ax2 is located within the movable range of the polishing head 75 around the axis Ax1. As shown in FIG. 3, a single polishing head 75 may be provided on the rotation mechanism 76 (rotation stage 81). Alternatively, a plurality of polishing heads 75 may be provided on the rotating mechanism 76. In the polishing mechanism 71, the polishing head 75 may be provided in the rotating mechanism 76 so as to be asymmetrical about the axis Ax1 in a plan view. The size of the polishing head 75 in plan view (the area of the region defined by the outer edge of the polishing head 75) may be smaller than that of the rotary stage 81.
- the maximum width of all contact portions of the sliding member (polishing head 75) that comes into contact with the wafer W at a certain moment during polishing of the wafer W is compared with the outer edge of the movable range of the polishing head 75 around the axis Ax1. And become smaller.
- the elevating mechanism 78 elevates the rotating mechanism 77.
- the elevating mechanism 78 supports the rotating mechanism 77.
- the lifting mechanism 78 includes a lifting actuator. As the rotating mechanisms 76 and 77 move up and down by the elevating mechanism 78, the polishing head 75 supported by the rotating mechanism 76 moves up and down.
- the cleaning mechanism 72 cleans the back surface of the wafer W polished by the polishing mechanism 71.
- the cleaning mechanism 72 includes a cleaning head 79, a rotating mechanism 96, a rotating mechanism 97, and a lifting mechanism 98.
- the rotating mechanisms 96 and 97 and the elevating mechanism 98 have the same functions and configurations as the rotating mechanisms 76 and 77 and the elevating mechanism 78, respectively, and thus description thereof will be omitted.
- the axes Ax4 and Ax5 correspond to the axes Ax1 and Ax2 of the polishing mechanism 71, respectively.
- the cleaning head 79 slides on the wafer W to remove particles adhering to the back surface of the wafer W.
- the cleaning head 79 is composed of a brush.
- the cleaning head 79 may have substantially the same size (area) as the rotation mechanism 96 (rotation stage) in plan view.
- the roughening mechanism 70 may include a processing unit that performs a process other than cleaning other than polishing on the back surface of the wafer W.
- the rotating mechanism 74 has a state in which the polishing mechanism 71 is arranged at a position for polishing processing on the back surface of the wafer W (hereinafter, referred to as a “processing position”) and a state in which the cleaning mechanism 72 is arranged at the processing position. Switch.
- the turning mechanism 74 is configured to move the polishing mechanism 71 and the cleaning mechanism 72 along a circular orbit centered on an axis Ax3 (third axis) parallel to the axis Ax1 (axis Ax2).
- the turning mechanism 74 is configured to move the axis Ax2 and the axis Ax5 with a part of the circumference around the axis Ax3 as a movement locus.
- the polishing mechanism 71 moves along a circular orbit centered on the axis Ax3 by the turning mechanism 74, so that the polishing head 75 moves along a circular orbit centered on the axis Ax3. If the turning mechanism 74 is driven while the rotating operation of the polishing head 75 by the rotating mechanisms 76 and 77 is stopped, the polishing head 75 rotates along the circumference around the axis Ax3.
- the axis Ax0 (the rotation center of the rotation holding unit 40) and the axis Ax3 (the rotation center of the rotation mechanism 74) are the polishing mechanism 71 and the polishing mechanism 71 in the outer peripheral region of the wafer W when the wafer W is placed on the spin chuck 41.
- the cleaning mechanisms 72 are spaced apart from each other so that the cleaning mechanism 72 can be arranged.
- the distance L between the axis Ax0 and the axis Ax3 is such that, in a state where the rotation mechanism 76 is closest to the spin chuck 41, a part of the peripheral edge of the rotation stage 81 of the rotation mechanism 76 overlaps with the central region of the wafer W. Is set as follows.
- the distance L between the axes Ax0 and Ax3 satisfies the condition of the expression (1). That is, the distance L is smaller than the distance obtained by adding the distance L1 and the value twice the distance L2.
- the polishing head 75 moves the center of the wafer W. The area is moved across the area and the outer peripheral area. L ⁇ L1+2 ⁇ L2 (1)
- L2 Diameter of movable range of polishing head 75 around axis Ax1
- the turning mechanism 74 includes a turning stage 86 and a turning driving unit 87 (third driving unit).
- the turning stage 86 supports the polishing mechanism 71 and the cleaning mechanism 72 side by side in the circumferential direction around the axis Ax3. In other words, the polishing mechanism 71 and the cleaning mechanism 72 are arranged apart from each other on the turning stage 86.
- the turning stage 86 may be formed in a disc shape.
- the center position of the disc-shaped turning stage 86 may be substantially aligned with the axis Ax3.
- the size (area) of the turning stage 86 may be larger than that of the rotary stage 83 of the rotary mechanism 77.
- Elevating mechanisms 78 and 98 for the polishing mechanism 71 and the cleaning mechanism 72 are provided on the turning stage 86.
- the revolving stage 86 is arranged such that the surface (supporting surface) that supports the lifting mechanism 78 is along the horizontal direction.
- the turning drive unit 87 is configured to rotate the turning stage 86 around the axis Ax3.
- the turning drive unit 87 is connected to the back surface of the turning stage 86 opposite to the supporting surface.
- the turning drive unit 87 is a rotary actuator.
- the turning drive unit 87 moves the turning stage 86 along a circumference around the axis Ax3, so that the turning drive unit 87 moves the axes Ax2 and Ax5 along the circumference.
- the turning drive unit 87 moves the cleaning mechanism 72 along with the axis Ax2 along the circular orbit around the axis Ax3.
- FIG. 4 shows a schematic side view of the polishing unit 20 when the axes Ax1, Ax2, Ax3 are aligned.
- the distance D1 between the axis Ax1 and the axis Ax2 may be shorter than the distance D2 between the axis Ax2 and the axis Ax3.
- the distance D1 between the axis Ax1 and the axis Ax2 may be less than or equal to the radius of the movable range of the polishing head 75 around the axis Ax1.
- the radius of the rotary stage 83 may be smaller than the diameter of the rotary stage 81.
- the polishing head 75 comes into contact with the back surface of the wafer W and slides on the wafer W when the polishing process of the wafer W is performed.
- the polishing head 75 may be composed of a grindstone.
- the polishing head 75 may be a diamond grindstone. Diamond having a grain size of 60,000 may be used as the diamond grindstone.
- the polishing head 75 may be formed in a hollow cylindrical shape, that is, a ring shape (annular shape) in a plan view.
- the center position of the ring-shaped polishing head 75 is defined by the ring center.
- the ring-shaped polishing head 75 has only to be formed so as to substantially surround the center of the ring in plan view, and a part of the ring shape may be missing.
- the ring-shaped polishing head 75 may be composed of a plurality of (for example, six or more) pillars arranged at intervals along the circumference of the ring center as an annular shape partially lacking.
- the polishing head 75 may be formed in a solid columnar shape.
- the outer diameter Dh of the polishing head 75 may be about 3% to 8% of the radius of the wafer W.
- the outer diameter Dh may be 5 mm to 12 mm.
- the outer diameter Dh may be 6 mm to 11 mm.
- the outer diameter Dh may be 8 mm to 10 mm.
- the thickness Th of the polishing head 75 may be about 1/3 to 1/2 of the outer diameter Dh.
- the inner diameter of the polishing head 75 may be about 1/3 to 2/3 of the outer diameter Dh.
- the outer diameter Dh of the polishing head 75 may be defined by the outer diameter of the upper surface of the polishing head 75, which is the contact surface with the wafer W.
- the roughening mechanism 70 may further include a cushion member 92 and a mounting member 93.
- the cushion member 92 is interposed between the polishing head 75 and the rotary stage 81.
- the cushion member 92 is made of a material softer than the polishing head 75.
- the cushion member 92 has a hardness that allows the cushion head 92 to expand and contract along the vertical direction when a downward force is applied to the polishing head 75.
- the cushion member 92 may be made of sponge or rubber.
- the cushion member 92 expands and contracts so that the polishing head 75 can follow the warp.
- the cushion member 92 is formed in a ring shape.
- the outer diameter of the cushion member 92 may be approximately the same as the outer diameter Dh, and the inner diameter of the cushion member 92 may be smaller than the inner diameter of the polishing head 75.
- the thickness Ts of the cushion member 92 may be smaller than the thickness Th of the polishing head 75.
- the thickness Ts may be, for example, 1/3 or less of the thickness Th, or may be half or less of the thickness Th.
- the maximum value of the outer diameter Dh of the polishing head 75 may be set by verifying whether or not the warp of the wafer W can be followed by the expansion and contraction of the cushion member 92.
- the minimum value of the outer diameter Dh of the polishing head 75 may be set by verifying whether or not the polishing head 75 tilts with respect to the back surface of the wafer W when polishing the wafer W.
- the attachment member 93 attaches the polishing head 75 and the cushion member 92 to the rotary stage 81.
- the mounting member 93 has a shaft portion 93c and flange portions 93a and 93b formed at both ends of the shaft portion 93c.
- the shaft portion 93c is passed through the cushion member 92 and the hole in the peripheral portion of the rotary stage 81.
- the flange portions 93a and 93b sandwich the rotary stage 81 and the cushion member 92 in the vertical direction. As a result, the cushion member 92 is held on the rotary stage 81.
- the upper surface of the flange portion 93 a is bonded to the lower surface of the polishing head 75. As a result, the polishing head 75 is held on the rotary stage 81.
- the mounting member 93 may be composed of two members. A hole penetrating in the vertical direction is formed in the mounting member 93. Thus, the ring-shaped polishing head 75 and the mounting member 93 each have a through hole that opens vertically and vertically, and polishing slag generated during polishing can escape downward from the through hole.
- Control device 100 The polishing unit 20 configured as described above is controlled by the control device 100.
- the control device 100 is configured to execute a central polishing control that causes the polishing head 75 to polish the central region of the wafer W and an outer peripheral polishing control that causes the polishing head 75 to polish the outer peripheral region of the wafer W.
- the control device 100 is composed of one or a plurality of control computers.
- the controller 100 has a circuit 120.
- the circuit 120 includes one or more processors 121, a memory 122, a storage 123, and an input/output port 124.
- the storage 123 has a computer-readable storage medium such as a hard disk.
- the storage medium stores a program for causing the polishing unit 20 to execute a substrate processing procedure described later.
- the storage medium may be a removable medium such as a non-volatile semiconductor memory, a magnetic disk or an optical disk.
- the memory 122 temporarily stores the program loaded from the storage medium of the storage 123 and the calculation result by the processor 121.
- the processor 121 configures each functional module described above by executing the above program in cooperation with the memory 122.
- the input/output port 124 inputs/outputs electric signals between the substrate holding mechanism 30, the switching unit 60, and the roughening mechanism 70 according to a command from the processor 121.
- each functional module of the control device 100 may be configured by a dedicated logic circuit or an ASIC (Application Specific Integrated Circuit) in which the logic circuit is integrated.
- ASIC Application Specific Integrated Circuit
- the polishing operation command and the cleaning operation command for the wafer W may be stored in the storage 123 of the control device 100.
- the polishing operation command may include an operation command related to central polishing, an operation command related to outer peripheral polishing, and an operation command related to cleaning operation.
- the operation command regarding the center polishing may include information about the rotation speeds of the rotating mechanisms 76 and 77 and the polishing time.
- the operation command related to the outer periphery polishing may include the rotation speeds of the rotation mechanisms 76 and 77, the rotation speed of the wafer W (rotation drive unit 43), and the movement speed of the rotation drive unit 87.
- step S01 the controller 100 controls the transfer arm A8 so that the wafer W to be polished is carried into the polishing unit 20.
- the control device 100 places the wafer W on the spin chuck 41 by the transfer arm A8.
- step S02 the controller 100 raises the fixed chuck 53 from the standby height to the holding height by the elevating and lowering drive mechanism 62 to place the wafer W on the fixed chuck 53, and then to the fixed chuck 53.
- the outer peripheral area of the wafer W is held.
- the control device 100 moves the fixed chuck 53 from the standby position to the central polishing position by the horizontal drive mechanism 61.
- step S03 the control device 100 executes central polishing control for causing the roughening mechanism 70 to polish the central region of the wafer W held by the peripheral edge holding unit 50.
- the controller 100 slides the central region of the wafer W while rotating the polishing head 75 by the rotating mechanisms 76 and 77 while holding the wafer W on the peripheral edge holding unit 50. Details of central polishing control will be described later.
- the control device 100 causes the turning drive unit 87 to move the polishing mechanism 71 (polishing head 75) from the state where the polishing mechanism 71 (polishing head 75) is disposed at the processing position for polishing processing to the cleaning mechanism 72 (cleaning head 79) at the processing position. ) May be switched to the arranged state.
- step S04 the control device 100 executes center cleaning control for causing the roughening mechanism 70 to clean the center region of the wafer W held by the peripheral holding unit 50.
- the controller 100 slides the central area of the wafer W while rotating the cleaning head 79 by the rotating mechanisms 96 and 97 while holding the wafer W on the peripheral edge holding unit 50.
- the driving procedure of the cleaning head 79 in the central cleaning control is the same as the driving procedure of the polishing head 75 in the central polishing control.
- the controller 100 may supply the cleaning water to the back surface of the wafer W by a cleaning water supply unit (not shown) while the cleaning head 79 is being driven.
- step S04 the control device 100 causes the turning drive unit 87 to move the cleaning mechanism 72 (cleaning head 79) from the state where the cleaning mechanism 72 is positioned at the processing position to the polishing mechanism 71 (polishing head 75) at the processing position. You may switch to a state in which it is turned on.
- step S05 the control device 100 causes the switching unit 60 to move the wafer W held by the peripheral edge holding unit 50 (fixed chuck 53).
- the control device 100 drives the horizontal drive mechanism 61 of the switching unit 60 to move the fixed chuck 53 holding the wafer W from the central polishing position to the delivery position, as shown in FIG. 8B. To move.
- the control device 100 drives the up-and-down drive mechanism 62 to lower the fixed chuck 53 from the holding height to the standby height while releasing the suction of the wafer W by the fixed chuck 53. As a result, the wafer W is placed on the spin chuck 41.
- the controller 100 causes the spin chuck 41 to adsorb the wafer W after the wafer W is placed on the spin chuck 41.
- the rotation holding unit 40 holds the central region of the back surface of the wafer W.
- the switching unit 60 arranges the axis line Ax2 in the central region of the wafer W held by the peripheral edge holding unit 50 and the axial line Ax2 in the outer peripheral region of the wafer W held by the rotation holding unit 40. Switch between the status and the status.
- control device 100 executes step S06.
- step S ⁇ b>06 control device 100 executes outer periphery polishing control in which the outer peripheral region of wafer W rotated by rotation holding unit 40 is polished by roughening mechanism 70.
- the control device 100 causes the outer peripheral region of the wafer W to be polished by sliding the polishing head 75 on the back surface of the wafer W while rotating the wafer W by the rotation holding unit 40. Details of the peripheral polishing control will be described later.
- the control device 100 causes the turning drive unit 87 to dispose the cleaning mechanism 72 (cleaning head 79) at the processing position from the state where the polishing mechanism 71 (polishing head 75) is disposed at the processing position. You may switch to a state in which it is turned on.
- step S7 the control device 100 executes step S07.
- step S ⁇ b>07 the control device 100 executes outer periphery cleaning control for causing the roughening mechanism 70 to clean the outer peripheral region of the wafer W rotated by the rotation holding unit 40.
- the controller 100 cleans the outer peripheral region of the wafer W by sliding the cleaning head 79 on the back surface of the wafer W while rotating the wafer W by the rotation holding unit 40.
- the driving procedure (sliding method) of the cleaning head 79 in the outer periphery cleaning control is the same as the driving procedure of the polishing head 75 in the outer periphery polishing control.
- the controller 100 may supply the cleaning water to the back surface of the wafer W by a cleaning water supply unit (not shown) while the cleaning head 79 slides on the wafer W.
- control device 100 executes step S08.
- step S08 control device 100 causes wafer W, for which polishing and cleaning (polishing processing) have been completed, to be carried out from polishing unit 20.
- the control device 100 controls the transfer arm A8 to carry out the wafer W to be carried out from the polishing unit 20 to the outside.
- steps S01 to 08 a series of processes including the polishing process for one wafer W is completed.
- Control device 100 repeats steps S01 to S08 for each wafer W.
- FIG. 9A shows a flowchart showing an example of central polishing control.
- the control device 100 first executes step S31.
- step S31 for example, the control device 100 moves the axis Ax2 by the turning mechanism 74 to place the axis Ax2 (polishing mechanism 71) at the initial position.
- the controller 100 may arrange the polishing mechanism 71 at the initial position so that the polishing mechanism 71 is located in the central region of the wafer W held by the fixed chuck 53.
- the axis Ax2 and the center of the wafer W held by the fixed chuck 53 may be substantially aligned with each other.
- step S32 the control device 100 starts the rotation drive of the polishing head 75 by the rotation mechanisms 76 and 77. That is, the control device 100 rotates the polishing head 75 about the axis Ax1 and moves the axis Ax1 (rotation stage 81) along a circular orbit about the axis Ax2.
- the control device 100 drives the rotation driving units 82 and 84 based on the rotation operation command stored in the storage 123 so that the rotation stages 81 and 83 respectively rotate at a predetermined rotation speed (rotation speed). ..
- step S33 for example, the control device 100 raises the polishing head 75 by the elevating mechanism 78 until the polishing head 75 contacts the back surface of the wafer W while rotating the polishing head 75.
- step S34 for example, the controller 100 stops the rotation of the rotating mechanisms 76 and 77, thereby stopping the rotational driving of the polishing head 75.
- the control device 100 may stop the rotational drive of the polishing head 75 after a predetermined time has elapsed after the polishing head 75 contacts the wafer W.
- FIG. 9B shows a flowchart showing an example of the outer peripheral polishing control.
- the control device 100 first executes step S61.
- step S61 for example, the control device 100 arranges the polishing head 75 at the initial position by the turning mechanism 74 and the rotating mechanisms 76 and 77.
- the initial position is set such that the distance D3 between the axis Ax1 and the axis Ax3 is larger than the distance D2 between the axis Ax2 and the axis Ax3, and at least a part of the polishing head 75 overlaps the central region of the wafer W.
- the initial position may be set so that the polishing head 75 is farthest from the axis Ax3.
- step S61 may be performed in parallel with the processing of step S05 described above.
- step S62 the control device 100 starts the rotation of the wafer W by the rotation drive unit 43.
- the control device 100 causes the rotation driving unit 43 to rotate the wafer W at a predetermined rotation speed based on the operation command stored in the storage 123.
- step S63 for example, the control device 100 raises the polishing head 75 by the elevating mechanism 78 until the polishing head 75 contacts the wafer W.
- the control device 100 raises the polishing head 75 to bring it into contact with the outer peripheral region of the rotating wafer W in a state where the rotation drive of the polishing head 75 by the rotating mechanisms 76 and 77 is stopped.
- step S64 the control device 100 controls the turning mechanism 74 and the rotation mechanisms 76 and 77 (roughening mechanism 70) so as to move the polishing head 75 along a trajectory that traverses the outer peripheral region of the wafer W.
- the locus that traverses the outer peripheral region of the wafer W (hereinafter referred to as “traverse locus”) is from an arbitrary point in the central region of the wafer W to a region outside the wafer W (hereinafter referred to as “outer wafer region”). It is a line that extends.
- the controller 100 moves the polishing head 75 along the traverse path so that the distance D3 between the axis Ax1 and the axis Ax3 is larger than the distance D2 between the axis Ax2 and the axis Ax3.
- 70 may be controlled.
- the control device 100 may drive the turning mechanism 74 so that the polishing head 75 moves along the traverse trajectory while the rotation drive by the rotation mechanisms 76 and 77 is stopped.
- the polishing mechanism 71 (axis lines Ax1, Ax2) is arranged in a state where the distance D3 is larger than the distance D2. Therefore, if the rotating mechanisms 76 and 77 are fixed, the distance D3 is larger than the distance D2. The state is maintained.
- the control device 100 adjusts the movement trajectory of the polishing head 75 by combining the drive of the turning mechanism 74 and the movement of the polishing head 75 by the rotating mechanisms 76 and 77. Good.
- the control device 100 may repeat the rotating operation by at least one of the rotating mechanism 76 and the rotating mechanism 77 when moving the polishing head 75 along the traverse trajectory. In this case, the polishing head 75 moves along the transverse locus while vibrating in the directions parallel to and orthogonal to the transverse locus.
- step S65 the control device 100 stops the rotational drive of the wafer W when the movement of the polishing head 75 along the traverse trajectory by the turning mechanism 74 ends one way from the central region of the wafer W toward the outer region of the wafer W. To do.
- the control device 100 controls the turning mechanism 74 and the rotating mechanisms 76 and 77 so as to move the polishing head 75 along the transverse trajectory by one way from the outer wafer region toward the central region. May be.
- the control device 100 may control the turning mechanism 74 and the rotation mechanisms 76 and 77 so as to reciprocate the polishing head 75 along the transverse locus between the central region of the wafer W and the region outside the wafer. ..
- the controller 100 does not overlap the wafer W when the polishing head 75 moved from the outer wafer region toward the central region is folded back toward the outer wafer region.
- the movement direction of the polishing head 75 may be reversed at the position. As a result, it is possible to prevent the polishing head 75 from staying at a specific portion of the wafer W for a long time due to the reversal operation of the movement direction of the polishing head 75 at the time of folding back.
- the movement operation of the polishing head 75 along the traverse trajectory at the time of polishing the outer periphery in step S64 will be described including examples of other operations.
- the operation when the polishing head 75 is moved along the trajectories is illustrated.
- the controller 100 may move the polishing head 75 along the traverse trajectory so that the moving speed is maintained within a predetermined range.
- the controller 100 may move the polishing head 75 (axis Ax1) along the traverse trajectory so that the moving speed becomes constant.
- the control device 100 drives and controls the rotation driving unit 84 to rotate the polishing head 75 around the axis Ax2, thereby moving the polishing head 75 along the transverse trajectory. I am making it.
- the control device 100 may move the polishing head 75 along the traverse trajectory by controlling the rotating mechanisms 76 and 77.
- the control device 100 drives and controls the turning drive unit 87 to turn the polishing mechanism 71 about the axis Ax3 as the center of rotation, thereby causing the polishing head 75 to traverse the trajectories. Are moving.
- This turning operation corresponds to the processing of the control device 100 in step S64 described above.
- the polishing head 75 (axis Ax2) is moved substantially linearly in the radial direction of the wafer W, whereby the polishing head 75 moves along the traverse trajectory. That is, in this case, the traverse trajectory and the radial direction of the wafer W substantially match.
- the polishing unit 20 may include a linear movement mechanism for moving the polishing mechanism 71 in the front-rear direction, instead of the turning mechanism 74.
- the linear movement mechanism may include a movement stage that supports the polishing mechanism 71 and a linear movement unit (third drive unit) that reciprocates the movement stage (axis Ax2) in the front-rear direction.
- control device 100 controls the polishing unit including the polishing head 75, the rotation mechanisms 76 and 77, and the straight-ahead drive unit during execution of the outer periphery polishing control, thereby traversing the polishing head 75 (axis Ax2). You may move along.
- the rectilinear movement mechanism may be arranged so that the movement stage supports the elevating mechanism 78.
- the orbiting operation, the turning operation, and the rectilinear operation are close to the trajectory along the radial direction of the wafer W in this order.
- the controller 100 may control the turning mechanism 74 and the rotating mechanism 77 to bring the movement of the polishing head 75 closer to the trajectory of the wafer W in the radial direction by a combination of the revolving operation and the turning operation.
- the coating/developing apparatus 2 includes a polishing head 75 that polishes the main surface of the wafer W, a rotation drive unit 82 that rotates the polishing head 75 around the axis Ax1, and a rotation axis Ax2 that is parallel to the axis Ax1.
- a roughening mechanism 70 having a rotation drive unit 84 for moving the axis Ax1 along a circular orbit.
- the center position of the polishing head 75 is different from the axis Ax1.
- the outer diameter of the polishing head 75 is smaller than the diameter of the movable range of the polishing head 75 around the axis Ax1.
- the polishing head may not be able to follow the warp. As a result, there is a possibility that unevenness of polishing having different degrees of polishing may occur.
- the outer diameter Dh of the polishing head 75 is smaller than the diameter of the outer edge of the movement locus of the polishing head 75 by the rotary drive unit 82, so It's hard to do. Therefore, the wafer W can be polished by contacting the wafer W in the polishing head 75 with a substantially uniform contact condition. As a result, in the coating/developing apparatus 2, it becomes possible to reduce the polishing unevenness generated when the wafer W is polished.
- the center position of the polishing head 75 is eccentric with respect to the axis Ax1.
- the polishing head 75 can be moved in a wider range as compared with the case where the center position of the polishing head 75 is substantially aligned with the axis Ax1. .. Therefore, it becomes possible to achieve both the uniformity of the polishing condition and the production efficiency.
- the center position of the polishing head 75 substantially coincides with the axis Ax1
- the center position of the polishing head 75 is eccentric with respect to the axis Ax1 because it is effective for at least reducing the above-mentioned polishing unevenness. That is not mandatory.
- the outer diameter Dh of the polishing head 75 is 5 mm to 12 mm.
- the polishing head 75 is prevented from contacting (sliding) the wafer W with the polishing head 75 partially hitting.
- the polishing head 75 may be tilted too much with respect to the back surface of the wafer W, and the polishing head 75 may be partially hit. Suppressed. As a result, it becomes possible to reduce polishing unevenness that occurs when the wafer W is polished.
- the polishing head 75 is formed in a ring shape. Therefore, it is possible to reduce the contact area of the wafer W in the polishing head 75 as compared with a solid columnar polishing head having the same outer diameter while suppressing the inclination of the polishing head during polishing. As a result, the entire polishing surface of the polishing head 75 can be more firmly brought into contact with the wafer W, so that it becomes possible to further reduce the polishing unevenness that occurs when the wafer W is polished.
- the distance D1 between the axis Ax1 and the axis Ax2 is less than or equal to the radius of the movable range of the polishing head 75 around the axis Ax1.
- the entire central region of the wafer W can be polished without moving the axis Ax2.
- the production efficiency of the wafer W can be improved.
- the coating/developing apparatus 2 includes a rotation holding unit 40 that holds and rotates the central region of the wafer W, a peripheral holding unit 50 that holds the outer peripheral region of the wafer W, and a wafer holding unit 50 while holding the wafer W.
- a control device 100 that executes central polishing control for polishing the central region of W by the polishing head 75 and peripheral polishing control for polishing the peripheral region of the wafer W by the polishing unit 75 while rotating the wafer W by the rotation holding unit 40. , are further provided.
- the control device 100 controls the roughening mechanism 70 so as to move the polishing head 75 along a trajectory that traverses the outer peripheral region. In this case, since the outer peripheral polishing is performed without the polishing head 75 remaining in one position in the radial direction of the wafer W, it is possible to reduce polishing unevenness when the wafer W is polished.
- the roughening mechanism 70 further includes a turning drive unit 87 that moves the axis Ax2 or a straight moving mechanism.
- the control device 100 controls the roughening mechanism 70 so as to move the axis Ax2 by the turning drive unit 87 or the linear movement mechanism.
- the polishing head 75 moves along a trajectory closer to the radial direction of the wafer W than the movement of the polishing head 75 along the traverse trajectory by the rotating mechanisms 76 and 77, so that polishing spots can be further reduced.
- the turning drive unit 87 moves the axis Ax2 along a circular orbit around the axis Ax3 parallel to the axis Ax2. In this case, since the turning head 87 moves the polishing head 75 along the traverse path, the structure of the polishing unit 20 can be simplified.
- the roughening mechanism 70 further includes a cleaning mechanism 72 that performs a process other than polishing on the back surface of the wafer W.
- the turning drive unit 87 is configured to move the cleaning mechanism 72 along with the axis Ax2.
- the control device 100 switches between the state in which the polishing head 75 is arranged at a predetermined processing position and the state in which the cleaning mechanism 72 is arranged at the processing position by the turning drive unit 87.
- the polishing head 75 can be moved along the traverse trajectory by using the turning drive unit 87 that switches the arrangement positions of the polishing mechanism 71 and the mechanism that performs processing different from polishing. Therefore, the structure of the polishing unit 20 is further simplified.
- the control apparatus 100 controls the distance D3 between the axis Ax1 and the axis Ax3 and the distance D2 between the axis Ax2 and the axis Ax3.
- the turning mechanism 74 and the rotation mechanisms 76 and 77 are controlled so that the larger state is maintained.
- the radius of the movement locus of the polishing head 75 in the circular orbit around the axis Ax3 becomes large, the movement of the polishing head 75 by the turning mechanism 74 can be made closer to the radial direction of the wafer W. Therefore, the difference in the degree of polishing in the radial direction can be further reduced.
- the control device 100 controls the rotation mechanisms 76 and 77 to move the axis Ax1 by the rotation driving unit 84. ..
- the polishing head 75 is moved along the trajectories by using the rotating mechanism 77, the turning mechanism 74 is unnecessary when performing the outer periphery polishing, for example, and the structure of the polishing unit 20 can be simplified.
- the polishing mechanism 75 is moved along the traverse trajectory using the rotation mechanism 77 in addition to the turning mechanism 74, the movement trajectory of the polishing head 75 can be adjusted so as to approach the radial direction of the wafer W. ..
- FIG. 11 shows an example of the evaluation result of the polishing process on the back surface of the wafer W.
- a polishing head having an outer diameter (65 mm) substantially the same as the outer edge of the movement locus of the polishing head by the rotary drive unit 82 was used for the verification.
- the verification was performed by using, as the polishing head, a polishing head 75 having an outer diameter (9 mm) smaller than the outer shape of the movement trajectory of the polishing head by the rotary drive unit 82.
- the polishing head was moved along the radial direction by the revolution motion, and in the example, the polishing head was moved along the radial direction by the turning motion for verification.
- the polishing processing results were verified for the two wafers W under the same conditions.
- the difference in the change tendency of the index value between the first wafer W and the second wafer W is smaller than that in the comparative example. That is, it is understood that the coating/developing device 2 (polishing unit 20) described above is effective for reducing polishing unevenness.
- the substrate to be processed is not limited to a semiconductor wafer, and may be, for example, a glass substrate, a mask substrate, an FPD (Flat Panel Display), or the like.
- the specific example described above also includes the following configurations.
- Appendix 1 A polishing head for polishing the main surface of the substrate, a first drive unit for rotating the polishing head around a first axis, and a first axis along a circular orbit around a second axis parallel to the first axis.
- Appendix 2 The substrate processing apparatus according to appendix 1, wherein the polishing head has an outer diameter of 6 to 11 mm.
- Appendix 3) The substrate processing apparatus according to appendix 2, wherein the polishing head has an outer diameter of 8 to 10 mm.
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Abstract
Description
基板処理システム1は、基板に対し、感光性被膜の形成、当該感光性被膜の露光、及び当該感光性被膜の現像を施すシステムである。処理対象の基板は、例えば半導体のウェハWである。感光性被膜は、例えばレジスト膜である。基板処理システム1は、塗布・現像装置2と露光装置3とを備える。露光装置3は、ウェハW(基板)上に形成されたレジスト膜(感光性被膜)の露光処理を行う。具体的には、露光装置3は、液浸露光等の方法によりレジスト膜の露光対象部分にエネルギー線を照射する。塗布・現像装置2は、露光装置3による露光処理の前に、ウェハW(基板)の表面にレジスト膜を形成する処理を行い、露光処理後にレジスト膜の現像処理を行う。
以下、基板処理装置の一例として、塗布・現像装置2の構成を説明する。図1及び図2に示されるように、塗布・現像装置2は、キャリアブロック4と、処理ブロック5と、インタフェースブロック6と、研磨ユニット20と、制御装置100(制御部)とを備える。
続いて、図3~図5の(b)を参照して、研磨ユニット20の詳細構成の一例を説明する。なお、図4、図5の(a)及び図5の(b)では、図3に示される要素の一部が省略されている。図3に示される研磨ユニット20は、ウェハWにおけるレジスト膜が形成される表面とは反対側の裏面(主面)を研磨する装置である。研磨ユニット20は、ウェハWの裏面を摺動部材(例えば砥石)により研磨することで、ウェハWの裏面を粗面化する。研磨ユニット20は、例えば円形に形成されたウェハWの裏面を中心領域と外周領域とに分けて、それぞれの領域を摺動部材により研磨してもよい。中心領域は、平面視において、ウェハWの中心から任意に設定された半径を有する円により区画される領域であり、外周領域は、平面視におけるウェハWの中心領域以外の周縁の領域である。例えば中心領域の半径は、ウェハWの半径の1/3~1/2程度に設定されてもよい。中心領域の半径は、一例として60~70mm程度であってもよい。
L<L1+2×L2 ・・・(1)
L1:軸線Ax2と軸線Ax3との距離
L2:軸線Ax1周りの研磨ヘッド75の可動範囲の直径
以上のように構成された研磨ユニット20は、制御装置100により制御される。制御装置100は、ウェハWの中心領域を研磨ヘッド75に研磨させる中心研磨制御と、ウェハWの外周領域を研磨ヘッド75に研磨させる外周研磨制御とを実行するように構成されている。
続いて、図7を参照して、基板処理方法の一例として、研磨ユニット20において実行される研磨及び洗浄の処理手順例を説明する。なお、初期状態において固定チャック53は待機位置及び待機高さに配置されているとして説明を行う。
本実施形態に係る塗布・現像装置2は、ウェハWの主面を研磨する研磨ヘッド75と、軸線Ax1周りに研磨ヘッド75を回転させる回転駆動部82と、軸線Ax1に平行な軸線Ax2周りの円軌道に沿って軸線Ax1を移動させる回転駆動部84と、を有する粗面化機構70を備える。研磨ヘッド75の中心位置は、軸線Ax1と異なっている。軸線Ax1周りの研磨ヘッド75の可動範囲の直径に比較して、研磨ヘッド75の外径が小さい。
(付記1)
基板の主面を研磨する研磨ヘッドと、第一軸周りに前記研磨ヘッドを回転させる第一駆動部と、前記第一軸に平行な第二軸周りの円軌道に沿って前記第一軸を移動させる第二駆動部と、を有する研磨部を備え、
前記研磨ヘッドの外径は5mm~12mmである、基板処理装置。
(付記2)
前記研磨ヘッドの外径は6~11mmである、付記1記載の基板処理装置。
(付記3)
前記研磨ヘッドの外径は8~10mmである、付記2記載の基板処理装置。
Claims (10)
- 基板の主面を研磨する研磨ヘッドと、第一軸周りに前記研磨ヘッドを回転させる第一駆動部と、前記第一軸に平行な第二軸周りの円軌道に沿って前記第一軸を移動させる第二駆動部と、を有する研磨部を備え、
前記研磨ヘッドの中心位置は、前記第一軸と異なっており、
前記第一軸周りの前記研磨ヘッドの可動範囲の直径に比較して、前記研磨ヘッドの外径が小さい、基板処理装置。 - 前記研磨ヘッドの外径は5mm~12mmである、請求項1記載の基板処理装置。
- 前記研磨ヘッドはリング状に形成されている、請求項1又は2記載の基板処理装置。
- 前記第一軸と前記第二軸との間隔は、前記可動範囲の半径以下である、請求項1~3のいずれか一項記載の基板処理装置。
- 前記基板の中心領域を保持して回転させる回転保持部と、
前記基板の外周領域を保持する周縁保持部と、
前記周縁保持部に前記基板を保持させながら前記基板の前記中心領域を前記研磨ヘッドにより研磨させる中心研磨制御と、前記回転保持部によって前記基板を回転させながら前記基板の前記外周領域を前記研磨ヘッドに研磨させる外周研磨制御とを実行する制御部と、を更に備え、
前記外周研磨制御において、前記制御部は、前記外周領域を横断する軌跡に沿って前記研磨ヘッドを移動させるように前記研磨部を制御する、請求項1~4のいずれか一項記載の基板処理装置。 - 前記研磨部は、前記第二軸を移動させる第三駆動部を更に備え、
前記外周領域を横断する軌跡に沿って前記研磨ヘッドを移動させる際に、前記制御部は、前記第三駆動部によって前記第二軸を移動させるように前記研磨部を制御する、請求項5記載の基板処理装置。 - 前記第三駆動部は、前記第二軸に平行な第三軸周りの円軌道に沿って前記第二軸を移動させる、請求項6記載の基板処理装置。
- 前記外周領域を横断する軌跡に沿って前記研磨ヘッドを移動させる際に、前記制御部は、前記第一軸と前記第三軸との間隔が前記第二軸と前記第三軸との間隔よりも大きい状態を保つように前記研磨部を制御する、請求項7記載の基板処理装置。
- 前記研磨部は、前記主面に対して研磨とは別の処理を施す処理部を更に備え、
前記第三駆動部は、前記第二軸と共に前記処理部を移動させるように構成されており、
前記制御部は、前記第三駆動部により、所定の処理位置に前記研磨ヘッドが配置される状態と、前記処理位置に前記処理部が配置される状態とを切り替える、請求項6~8のいずれか一項記載の基板処理装置。 - 前記外周領域を横断する軌跡に沿って前記研磨ヘッドを移動させる際に、前記制御部は、前記第二駆動部によって前記第一軸を移動させるように前記研磨部を制御する、請求項5~9のいずれか一項記載の基板処理装置。
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