WO2020113736A1 - 柔性显示面板及其制作方法 - Google Patents

柔性显示面板及其制作方法 Download PDF

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Publication number
WO2020113736A1
WO2020113736A1 PCT/CN2018/125489 CN2018125489W WO2020113736A1 WO 2020113736 A1 WO2020113736 A1 WO 2020113736A1 CN 2018125489 W CN2018125489 W CN 2018125489W WO 2020113736 A1 WO2020113736 A1 WO 2020113736A1
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WO
WIPO (PCT)
Prior art keywords
metal layer
section
bending
curved section
display panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2018/125489
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English (en)
French (fr)
Inventor
秦芳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Original Assignee
Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
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Filing date
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Application filed by Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd filed Critical Wuhan China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority to US16/343,689 priority Critical patent/US11398504B2/en
Publication of WO2020113736A1 publication Critical patent/WO2020113736A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/301—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements flexible foldable or roll-able electronic displays, e.g. thin LCD, OLED
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01—Manufacture or treatment
    • H10D86/021—Manufacture or treatment of multiple TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H10D86/443—Interconnections, e.g. scanning lines adapted for preventing breakage, peeling or short circuiting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/411—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by materials, geometry or structure of the substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/451—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics

Definitions

  • the present application relates to the field of display, and in particular to a flexible display panel and a manufacturing method thereof.
  • the lower frame of the existing mobile phone display panel generally uses COF (Chip on FPC) or COP (Chip The on Pi) process sets the position of the driving chip, so that the spacing between the lower border of the display panel is smaller, but the process is more difficult and the cost is higher.
  • the bending area of the display panel includes a metal wire for signal transmission, and when the bending rate of the panel reaches a certain value, the metal wire is prone to crack or even break, resulting in the display panel being unable to perform signal transmission.
  • the present application provides a flexible display panel and a manufacturing method thereof to solve the technical problem that the data signal line in the bending area of the existing display panel is easily broken.
  • the present application proposes a flexible display panel, wherein the flexible display panel includes a display area and a non-display area located at the periphery of the display area, and the non-display area includes a bending area;
  • a data signal line is provided in the bending area, and at least one of the data signal lines includes at least one metal layer;
  • At least one of the data signal lines includes at least one stress buffer zone, and a stress relief member is disposed in the stress buffer zone.
  • the stress relief member is a groove.
  • the bending area includes a first bending section, a second bending section, and a third bending section, the first bending section is close to the display area, and the third bending section is far from the A display area, the second curved section is located between the first curved section and the third curved section;
  • the distribution density of the grooves in the first curved section, the second curved section, and the third curved section is different.
  • the radius of curvature of the second curved section is not greater than the radius of curvature of the first curved section, and the radius of curvature of the second curved section is not greater than the radius of curvature of the third curved section .
  • the density of the groove in the second curved section is not less than the density of the groove in the first curved section, and the density of the groove in the second curved section The density is not less than the density of the groove in the third curved section.
  • the thickness of the metal layer of the second bending section is not greater than that of the first bending section, and the thickness of the metal layer of the second bending section is not greater than that of the third bending section Thickness of the metal layer.
  • the thickness of the metal layer of the data signal line gradually decreases
  • the thickness of the metal layer of the data signal line gradually increases.
  • the depth of the groove gradually increases
  • the depth of the groove gradually decreases.
  • the radius of curvature of the second curved section is greater than the radius of curvature of the first curved section, and the radius of curvature of the second curved section is greater than the radius of curvature of the third curved section.
  • the density of the groove in the second curved section is less than the density of the groove in the first curved section, and the density of the groove in the second curved section Less than the density of the groove in the third curved section.
  • the thickness of the metal layer of the second bending section is greater than that of the first bending section, and the thickness of the metal layer of the second bending section is greater than that of the third bending section Layer thickness.
  • the thickness of the metal layer of the data signal line gradually increases
  • the thickness of the metal layer of the data signal line gradually decreases.
  • the depth of the groove gradually decreases
  • the depth of the groove gradually increases.
  • the data signal line includes at least a first metal layer, a second metal layer, and a third metal layer;
  • the stress buffer zone includes at least the first metal layer and the third metal layer.
  • the stress buffer includes the first metal layer and the third metal layer
  • the maximum depth of the groove is not less than the thickness and thickness of the second metal layer The sum of the thickness of the third metal layer.
  • the stress buffer when the stress buffer includes the first metal layer, the second metal layer, and the third metal layer, the maximum depth of the groove is less than the second The sum of the thickness of the metal layer and the thickness of the third metal layer.
  • the present application also proposes a method for manufacturing a flexible display panel.
  • the flexible display panel includes a display area and a non-display area located at the periphery of the display area.
  • the non-display area includes a bending area.
  • the flexible display panel The production methods include:
  • At least one of the data signal lines includes at least one metal layer
  • At least one of the data signal lines includes at least one stress buffer zone, and a stress relief member is disposed in the stress buffer zone.
  • the step of forming at least one data signal line on the organic filling includes:
  • a third metal layer is formed on the second metal layer.
  • the step of forming at least one data signal line on the organic filling includes:
  • the third metal layer, the second metal layer, and the third metal layer corresponding to the stress buffer, or the first metal layer, the second metal layer, and the third metal Performing an etching process on the layer to form the stress relief member in the stress buffer zone;
  • a fourth metal layer is formed on the third metal layer.
  • the stress relief member is a groove
  • the bending area includes a first bending section, a second bending section, and a third bending section, the first bending section is close to the display area, the third bending section is far from the display area, and the second bending section Located between the first curved section and the third curved section;
  • the distribution density of the grooves in the first curved section, the second curved section, and the third curved section is different.
  • the present application not only reduces the bending stress received when the data signal line is bent, but also reduces the impedance of the data signal line by arranging the stress relief member on the data signal line in the bending area, and effectively improves the data signal line after bending
  • the technical problem that the signal line is broken and the signal transmission cannot be carried out increases the service life of the flexible display panel.
  • FIG. 1 is a structural diagram of a flexible display panel of this application.
  • FIG. 3 is a first cross-sectional view along section A-A of a flexible display panel according to an embodiment of the present application in FIG. 2;
  • FIG. 4 is a second cross-sectional view along section A-A of the flexible display panel according to Embodiment 1 of the present application in FIG. 2;
  • FIG. 5 is a third cross-sectional view along section A-A of the flexible display panel according to Embodiment 1 of the present application in FIG. 2;
  • FIG. 6 is a fourth cross-sectional view along section A-A of the flexible display panel according to Embodiment 1 of the present application in FIG. 2;
  • FIG. 7 is a fifth cross-sectional view along section A-A of the flexible display panel according to Embodiment 1 of the present application in FIG. 2;
  • FIG. 8 is a first cross-sectional view along section A-A of the flexible display panel according to Embodiment 2 of the present application in FIG. 2;
  • FIG. 9 is a second cross-sectional view along section A-A of the flexible display panel according to Embodiment 2 of the present application in FIG. 2;
  • FIG. 10 is a third cross-sectional view of the flexible display panel in Embodiment 2 of FIG. 2 along section A-A;
  • FIG. 11 is a step diagram of a method for manufacturing a flexible display panel of the present application.
  • 12A-12D are the first manufacturing process diagrams of the bending area of the flexible display panel of the present application.
  • 13A to 13E are the first manufacturing process diagrams of the bending area of the flexible display panel of the present application.
  • FIG. 1 is a structural diagram of a flexible display panel of the present application.
  • FIG. 2 is a plan development view of the bending area of the flexible display panel of the present application.
  • the flexible display panel 100 includes a substrate 10 and a light emitting device layer 20 and an encapsulation layer 30 on the substrate 10.
  • the substrate 10 is a flexible substrate, and the material of the flexible substrate may be polyimide (PI).
  • PI polyimide
  • the flexible display panel 100 includes a display area 200 and a non-display area 300 located at the periphery of the display area 200.
  • the non-display area 300 includes a bending area 40 close to the display area 200 and a binding area 50 far from the display area 200.
  • the bending area 40 is located between the display area 200 and the binding area 50.
  • a plurality of data signal lines 60 are provided in the bending area 40, and the data signal lines 60 extend from the display area 200 to the binding area 50 through the bending area.
  • the flexible display panel 100 bends the driving chip and part of the signal traces to the back of the display area 200 through the bending area 40 to reduce the lower border of the flexible display panel 100, as shown by the spacing L in FIG. 1 .
  • FIG. 3 is a first cross-sectional view of the flexible display panel according to the embodiment of the present application in FIG. 2 along section A-A.
  • At least one of the data signal lines 60 includes at least one metal layer. At least one of the data signal lines 60 includes at least one stress buffer 70.
  • a stress relief member 701 is provided in the stress buffer 70.
  • the stress relief member 701 may be a groove.
  • the data signal line 60 includes at least a first metal layer 601, a second metal layer 602, and a third metal layer 603.
  • the first metal layer 601 may be metallic titanium
  • the second metal layer 602 may be metallic aluminum
  • the third metal layer 603 may be metallic titanium
  • the thickness of the first metal layer 601 may be the same as the thickness of the third, and the thickness of the second metal layer 602 is greater than that of the first metal layer 601 or the third metal layer 603 thickness.
  • the stress buffer zone 70 includes at least the first metal layer 601 and the third metal layer 603.
  • the stress buffer zone 70 includes the first metal layer 601 and the third metal layer 603, and the maximum depth of the groove is not less than the thickness of the second metal layer 602 and the first The sum of the thicknesses of the three metal layers 603.
  • FIG. 4 is a second cross-sectional view of the flexible display panel according to the embodiment of the present application in FIG. 2 along section A-A.
  • the stress buffer zone 70 includes the first metal layer 601, the second metal layer 602, and the third metal layer 603, the maximum depth of the groove is less than the thickness of the second metal layer 602 and The sum of the thicknesses of the third metal layer 603.
  • the depth of the groove of the stress buffer zone 70 can be adjusted according to actual conditions, and is not limited to the solutions of FIGS. 3 and 4 in this embodiment.
  • the bending zone 40 includes a first bending section 401, a second bending section 402 and a third bending section 403.
  • the first curved section 401 is close to the display area 200
  • the third curved section 403 is far from the display area 200
  • the second curved section 402 is located between the first curved section 401 and the third curved section Between 403.
  • the distribution density of the grooves in the first curved section 401, the second curved section 402, and the third curved section 403 is different.
  • the radius of curvature of the second curved section 402 is not greater than the radius of curvature of the first curved section 401, and the radius of curvature of the second curved section 402 is not greater than the radius of curvature of the third curved section 403 .
  • the radius of curvature of the second curved section 402 is smaller than the radius of curvature of the first curved section 401, and the radius of curvature of the second curved section 402 is smaller than the radius of curvature of the third curved section 403 .
  • the bending stress experienced by the second bending section 402 is the largest, and the second bending section 402 is the region where the flexible substrate is most likely to break.
  • the bending stress of the second bending section 402 is greater than the bending stress of the first bending section 401, and the bending stress of the second bending section 402 is greater than the bending stress of the third bending section 403.
  • FIG. 5 is a third cross-sectional view of the flexible display panel according to the embodiment of the present application in FIG. 2 along section A-A.
  • the density of the grooves in the second bending section 402 is greater than the density of the grooves in the first bending section 401, and the density of the grooves in the second bending section 402 is greater than the third bending The density of the groove in section 403.
  • the density of the groove gradually increases in the direction of the first curved section 401 to the second curved section 402, the density of the groove gradually increases. In the direction from the second curved section 402 to the third curved section 403, the density of the groove gradually decreases.
  • the grooves corresponding to areas with greater bending stress are denser, and the grooves corresponding to areas with less bending stress are sparse, reducing the bending stress in each area, avoiding stress concentration, and improving the flexible substrate Bending performance.
  • FIG. 6 is a fourth cross-sectional view of the flexible display panel according to the embodiment of the present application in FIG. 2 along section A-A.
  • the thickness of the metal layer of the second bending section 402 is not greater than that of the first bending section 401, and the thickness of the metal layer of the second bending section 402 is not greater than the thickness of the metal layer of the third bending section 403.
  • the thickness of the metal layer of the data signal line 60 gradually decreases. In the direction from the second bending section 402 to the third bending section 403, the thickness of the metal layer of the data signal line 60 gradually increases.
  • the area of greater bending stress corresponds to a smaller thickness of the metal layer, and the area of lower bending stress corresponds to a greater thickness of the metal layer, to ensure that the neutral axis of the bending area 40 is a smooth transition arc, The stress concentration in some areas is avoided, and the bending resistance of the bending area 40 is improved.
  • FIG. 7 is a fifth cross-sectional view of the flexible display panel according to the embodiment of the present application in FIG. 2 along section A-A.
  • the depth of the groove gradually increases. In the direction from the second curved section 402 to the third curved section 403, the depth of the groove gradually decreases.
  • the area corresponding to a larger bending stress corresponds to a greater depth of the groove, and the area corresponding to a lower bending stress corresponds to a smaller depth of the groove, which reduces the bending stress in each area and avoids stress concentration in some areas.
  • the bending performance of the flexible substrate is improved.
  • the bending zone 40 is bent into a circular arc when bending, and the arc at both ends will be smaller than the arc in the middle of the bending zone 40.
  • the radius of curvature of the second curved section 402 is greater than the radius of curvature of the first curved section 401, and the radius of curvature of the second curved section 402 is greater than the third curved section The radius of curvature of 403.
  • first bending section 401 and the third bending section 403 are subjected to the highest bending stress, and the first bending section 401 and the third bending section 403 are the most easily broken by the flexible substrate Area.
  • the bending stress of the second bending section 402 is less than the bending stress of the first bending section 401, and the bending stress of the second bending section 402 is less than the bending stress of the third bending section 403.
  • FIG. 8 is a first cross-sectional view of the flexible display panel according to the second embodiment of the present application in FIG. 2 along section A-A.
  • the density of the groove in the second curved section 402 is less than the density of the groove in the first curved section 401, and the density of the groove in the second curved section 402 is less than the density of the third curved section The density of the groove in section 403.
  • the density of the groove gradually decreases. In the direction from the second curved section 402 to the third curved section 403, the density of the groove gradually increases.
  • the groove corresponding to the region with greater bending stress is denser, and the groove corresponding to the region with less bending stress is sparse, reducing the bending stress in each region, avoiding stress concentration, and improving the flexibility The bending performance of the substrate.
  • FIG. 9 is a second cross-sectional view of the flexible display panel according to the second embodiment of the present application in FIG. 2 along section A-A.
  • the thickness of the metal layer of the second bending section 402 is greater than that of the first bending section 401, and the thickness of the metal layer of the second bending section 402 is greater than the thickness of the metal layer of the third bending section 403.
  • the thickness of the metal layer of the data signal line 60 gradually increases in the direction of the first curved section 401 to the second curved section 402, the thickness of the metal layer of the data signal line 60 gradually increases. In the direction from the second bending section 402 to the third bending section 403, the thickness of the metal layer of the data signal line 60 gradually decreases.
  • the area of greater bending stress corresponds to a smaller thickness of the metal layer, and the area of lower bending stress corresponds to a greater thickness of the metal layer, ensuring that the neutral axis of the bending area 40 is a smooth transition arc, The stress concentration in some areas is avoided, and the bending resistance of the bending area 40 is improved.
  • FIG. 10 is a third cross-sectional view of the flexible display panel according to the second embodiment of the present application in FIG. 2 along section A-A.
  • the depth of the groove gradually decreases. In the direction from the second curved section 402 to the third curved section 403, the depth of the groove gradually increases.
  • the area with greater bending stress corresponds to a greater depth of the groove, and the area with less bending stress corresponds to a smaller depth of the groove, which reduces the bending stress in each area and avoids stress concentration in some areas.
  • the bending performance of the flexible substrate is improved.
  • the stress relief member 701 is further provided on the data signal line 60 close to the first curved section 401 and the third curved section 403. Providing the stress relief member 701 on the data signal line 60 that has not been deformed improves the bending resistance of the flexible substrate better.
  • the shape of the groove is not specifically limited.
  • FIG. 11 is a step diagram of a method for manufacturing a flexible display panel of the present application.
  • the flexible display panel 100 includes a display area 200 and a non-display area 300 located at the periphery of the display area 200.
  • the non-display area 300 includes a bending area 40 close to the display area 200 and a binding area 50 far from the display area 200.
  • the bending area 40 is located between the display area 200 and the binding area 50.
  • the manufacturing method of the flexible display panel includes:
  • the substrate is a flexible substrate, and the material of the flexible substrate may be polyimide (PI).
  • PI polyimide
  • a thin film transistor layer and an organic filling layer are formed on the substrate;
  • This step is mainly to form a thin film transistor layer (not shown) and an organic filling layer on the substrate 10.
  • the organic layer is filled with organic material by digging holes in the bending region to form an organic filled layer.
  • the organic filling layer may be the same material as the flexible substrate.
  • the material of the organic filling layer may be polyimide (PI).
  • FIGS. 12A-12D are the first manufacturing process diagrams of the bending area of the flexible display panel of the present application.
  • At least one of the data signal lines 60 includes at least one metal layer. At least one of the data signal lines 60 includes at least one stress buffer 70, and a stress relief member 701 is disposed in the stress buffer 70.
  • the stress relief member 701 is a groove.
  • Step S30 includes steps:
  • a first metal layer 601 and a second metal layer 602 are sequentially formed on the organic filling layer;
  • the first metal layer 601 may be titanium metal, and the second metal layer 602 may be aluminum metal.
  • the second metal layer 602 corresponding to the stress buffer zone 70 is processed by an etching process, and the depth of the etching does not exceed the thickness of the second metal layer 602.
  • the second metal layer 602 and the first metal layer 601 corresponding to the stress buffer zone 70 are processed by an etching process, and the depth of the etching does not exceed the first metal layer 601 and the thickness of the second metal layer 602.
  • the etching process may be one of dry etching or wet etching.
  • the third metal layer 603 may be titanium metal.
  • the thickness of the first metal layer 601 may be the same as the thickness of the third, and the thickness of the second metal layer 602 is greater than that of the first metal layer 601 or the third metal layer 603 thickness.
  • FIG. 13A to FIG. 13E are the first manufacturing process diagrams of the bending area of the flexible display panel of the present application.
  • Step S30 may also include steps:
  • S3021 Form a first metal layer 601, a second metal layer 602, and a third metal layer 603 on the organic filling layer in sequence;
  • the first metal layer 601 may be metallic titanium
  • the second metal layer 602 may be metallic aluminum
  • the third metal layer 603 may be metallic titanium
  • the third metal layer 603 corresponding to the stress buffer zone 70 is processed by an etching process, and the depth of the etching does not exceed the thickness of the third metal layer 603.
  • the second metal layer 602 and the third metal layer 603 corresponding to the stress buffer zone 70 are processed by an etching process, and the depth of the etching does not exceed the third metal layer 603 and the thickness of the second metal layer 602.
  • the first metal layer 601, the second metal layer 602, and the third metal layer 603 corresponding to the stress buffer zone 70 are processed by an etching process.
  • the depth of the etching The thickness of the third metal layer 603, the second metal layer 602, and the first metal layer 601 are not exceeded.
  • the etching process may be one of dry etching or wet etching.
  • the fourth metal layer may be titanium metal.
  • the thickness of the first metal layer 601 and the thickness of the third metal layer 603 may be the same as the thickness of the fourth, and the thickness of the second metal layer 602 is greater than that of the first The thickness of the metal layer or the fourth metal layer of the third metal layer 603.
  • the bending area 40 includes a first bending section 401, a second bending section 402, and a third bending section 403, the first bending section 401 is close to the display area 200, and the third bending section 403 is far from the display area 200.
  • the second curved section 402 is located between the first curved section 401 and the third curved section 403.
  • the distribution density of the grooves in the first curved section 401, the second curved section 402, and the third curved section 403 is different.
  • the radius of curvature of the second curved section 402 is not greater than that of the first curved section 401, and the radius of curvature of the second curved section 402 is not greater than that of the third curved section 403 Radius of curvature.
  • the density of the grooves in the second curved section 402 is not less than the density of the grooves in the first curved section 401, and the density of the grooves in the second curved section 402 Not less than the density of the groove in the third curved section 403.
  • the thickness of the metal layer of the second bending section 402 is not greater than that of the first bending section 401, and the thickness of the metal layer of the second bending section 402 is not greater than that of the third bending The metal layer thickness of section 403.
  • the thickness of the metal layer of the data signal line 60 gradually decreases.
  • the thickness of the metal layer of the data signal line 60 gradually increases.
  • the depth of the groove gradually increases.
  • the depth of the groove gradually decreases.
  • the radius of curvature of the second curved section 402 is greater than the radius of curvature of the first curved section 401, and the radius of curvature of the second curved section 402 is greater than the radius of curvature of the third curved section 403.
  • the density of the grooves in the second curved section 402 is less than the density of the grooves in the first curved section 401, and the density of the grooves in the second curved section 402 is less than The density of the groove in the third curved section 403.
  • the thickness of the metal layer of the second bending section 402 is greater than that of the first bending section 401, and the thickness of the metal layer of the second bending section 402 is greater than the thickness of the metal layer of the third bending section 403.
  • the thickness of the metal layer of the data signal line 60 gradually increases.
  • the thickness of the metal layer of the data signal line 60 gradually decreases.
  • the depth of the groove gradually decreases.
  • the depth of the groove gradually increases.
  • a display module is also provided.
  • the display module includes the flexible display panel 100, and further includes a touch layer, a polarizing layer, and a touch layer that are sequentially disposed on the flexible display panel 100. Cover layer.
  • an electronic device includes the display module; the electronic device includes but is not limited to a mobile phone, a tablet computer, a computer monitor, a game console, a television, Display screens, wearable devices, and other household appliances or household appliances with display functions.
  • the working principle of the display module and the working principle of the electronic device are similar to the working principle of the flexible display panel.
  • the working principle of the display module and the working principle of the electronic device please refer to the flexible display
  • the working principle of the panel will not be repeated here.
  • the present application proposes a flexible display panel and a manufacturing method thereof.
  • the flexible display panel includes a bending area, and the bending area is provided with a data signal line.
  • At least one of the data signal lines includes at least one metal layer, and at least one of the data signal lines includes at least one stress buffer, and a stress relief member is disposed in the stress buffer.
  • the present application not only reduces the bending stress received when the data signal line is bent, but also reduces the impedance of the data signal line by arranging the stress relief member on the data signal line in the bending area, and effectively improves the data signal line after bending
  • the technical problem that the signal line is broken and the signal transmission cannot be carried out increases the service life of the flexible display panel.

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Abstract

一种柔性显示面板（100）及其制作方法，柔性显示面板（100）包括弯曲区（40），弯曲区（40）设置有数据信号线（60）。至少一条数据信号线（60）包括至少一金属层，至少一条数据信号线（60）包括至少一应力缓冲区（70），应力缓冲区（70）内设置有缓解应力构件（701）。

Description

柔性显示面板及其制作方法 技术领域
本申请涉及显示领域，特别涉及一种柔性显示面板及其制作方法。
 背景技术
随着显示行业技术的发展，用户对显示面板的外观设计要求越来越高，比如窄边框的设计。
现有手机显示面板的下边框一般采用COF（Chip on FPC）或COP（Chip on Pi）的工艺设置驱动芯片的位置，使得显示面板的下边框间距更小，但工艺难度较大，成本较高。显示面板的弯曲区中包括用于信号传输的金属线，而当面板的弯曲率达到一定数值时，该金属线容易产生裂纹甚至断裂，导致显示面板无法进行信号传输。
因此，目前亟需一种柔性显示面板以解决上述问题。
 技术问题
本申请提供一种柔性显示面板及其制作方法，以解决现有显示面板弯曲区数据信号线易断裂的技术问题。
 技术解决方案
本申请提出了一种柔性显示面板，其中，所述柔性显示面板包括显示区域和位于所述显示区域外围的非显示区域，所述非显示区域包括弯曲区；
所述弯曲区内设置有数据信号线，至少一条所述数据信号线包括至少一金属层；
其中，至少一条所述数据信号线包括至少一应力缓冲区，所述应力缓冲区内设置有缓解应力构件。
在本申请的柔性显示面板中，所述缓解应力构件为凹槽。
在本申请的柔性显示面板中，所述弯曲区包括第一弯曲段、第二弯曲段以及第三弯曲段，所述第一弯曲段靠近所述显示区域，所述第三弯曲段远离所述显示区域，所述第二弯曲段位于所述第一弯曲段与所述第三弯曲段之间；
所述凹槽在所述第一弯曲段、所述第二弯曲段以及所述第三弯曲段的分布密度不同。
在本申请的柔性显示面板中，所述第二弯曲段的曲率半径不大于所述第一弯曲段的曲率半径，所述第二弯曲段的曲率半径不大于所述第三弯曲段的曲率半径。
在本申请的柔性显示面板中，所述第二弯曲段内所述凹槽的密度不小于所述第一弯曲段内所述凹槽的密度，所述第二弯曲段内所述凹槽的密度不小于所述第三弯曲段内所述凹槽的密度。
在本申请的柔性显示面板中，所述第二弯曲段的金属层厚度不大于所述第一弯曲段的金属层厚度，所述第二弯曲段的金属层厚度不大于所述第三弯曲段的金属层厚度。
在本申请的柔性显示面板中，在所述第一弯曲段至所述第二弯曲段的方向上，所述数据信号线的金属层厚度逐渐减小；
在所述第二弯曲段至所述第三弯曲段的方向上，所述数据信号线的金属层厚度逐渐增加。
在本申请的柔性显示面板中，在所述第一弯曲段至所述第二弯曲段的方向上，所述凹槽的深度逐渐增加；
在所述第二弯曲段至所述第三弯曲段的方向上，所述凹槽的深度逐渐减小。
在本申请的柔性显示面板中，所述第二弯曲段的曲率半径大于所述第一弯曲段的曲率半径，所述第二弯曲段的曲率半径大于所第三弯曲段的曲率半径。
在本申请的柔性显示面板中，所述第二弯曲段内所述凹槽的密度小于所述第一弯曲段内所述凹槽的密度，所述第二弯曲段内所述凹槽的密度小于所述第三弯曲段内所述凹槽的密度。
在本申请的柔性显示面板中，所述第二弯曲段的金属层厚度大于所述第一弯曲段的金属层厚度，所述第二弯曲段的金属层厚度大于所述第三弯曲段的金属层厚度。
在本申请的柔性显示面板中，在所述第一弯曲段至所述第二弯曲段的方向上，所述数据信号线的金属层厚度逐渐增加；
在所述第二弯曲段至所述第三弯曲段的方向上，所述数据信号线的金属层厚度逐渐减小。
在本申请的柔性显示面板中，在所述第一弯曲段至所述第二弯曲段的方向上，所述凹槽的深度逐渐减小；
在所述第二弯曲段至所述第三弯曲段的方向上，所述凹槽的深度逐渐增加。
在本申请的柔性显示面板中，所述数据信号线至少包括第一金属层、第二金属层及第三金属层；
其中，所述应力缓冲区至少包括所述第一金属层及所述第三金属层。
在本申请的柔性显示面板中，当所述应力缓冲区包括所述第一金属层及所述第三金属层时，所述凹槽的最大深度不小于所述第二金属层的厚度与所述第三金属层的厚度的和。
在本申请的柔性显示面板中，当所述应力缓冲区包括所述第一金属层、所述第二金属层及所述第三金属层时，所述凹槽的最大深度小于所述第二金属层的厚度与所述第三金属层的厚度的和。
本申请还提出了一种柔性显示面板的制作方法，所述柔性显示面板包括显示区域和位于所述显示区域外围的非显示区域，所述非显示区域包括弯曲区，其中，所述柔性显示面板的制作方法包括：
提供一基板；
所述基板上形成薄膜晶体管层及有机填充层；
在所述薄膜晶体管层及所述有机填充层上形成至少一条数据信号线，
至少一条所述数据信号线包括至少一金属层；
其中，至少一条所述数据信号线包括至少一应力缓冲区，所述应力缓冲区内设置有缓解应力构件。
在本申请的制作方法中，在所述有机填充上形成至少一条数据信号线的步骤包括：
在所述有机填充层上依次形成第一金属层、第二金属层；
对所述应力缓冲区所对应的所述第二金属层、或所述第一金属层和所述第二金属层进行蚀刻工艺，在所述应力缓冲区形成所述缓解应力构件；
在所述第二金属层上形成第三金属层。
在本申请的制作方法中，在所述有机填充上形成至少一条数据信号线的步骤包括：
在所述有机填充层上依次形成第一金属层、第二金属层及第三金属层；
对所述应力缓冲区所对应的所述第三金属层、所述第二金属层及所述第三金属层、或所述第一金属层、所述第二金属层及所述第三金属层进行蚀刻工艺，在所述应力缓冲区形成所述缓解应力构件；
在所述第三金属层上形成第四金属层。
在本申请的制作方法中，所述缓解应力构件为凹槽；
所述弯曲区包括第一弯曲段、第二弯曲段以及第三弯曲段，所述第一弯曲段靠近所述显示区域，所述第三弯曲段远离所述显示区域，所述第二弯曲段位于所述第一弯曲段与所述第三弯曲段之间；
所述凹槽在所述第一弯曲段、所述第二弯曲段以及所述第三弯曲段的分布密度不同。
 有益效果
本申请通过在弯曲区中的数据信号线上设置缓解应力构件，不仅减小了数据信号线弯折时受到的弯曲应力，而且降低了数据信号线的阻抗，有效改善了数据信号线弯折后信号线断裂而无法进行信号传输的技术问题，提高柔性显示面板的使用寿命。
 附图说明
为了更清楚地说明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单介绍，显而易见地，下面描述中的附图仅仅是发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本申请柔性显示面板的结构图；
图2为本申请柔性显示面板弯曲区的平面展开图；
图3为图2中本申请实施例一柔性显示面板沿截面A-A的第一种剖面图；
图4为图2中本申请实施例一柔性显示面板沿截面A-A的第二种剖面图；
图5为图2中本申请实施例一柔性显示面板沿截面A-A的第三种剖面图；
图6为图2中本申请实施例一柔性显示面板沿截面A-A的第四种剖面图；
图7为图2中本申请实施例一柔性显示面板沿截面A-A的第五种剖面图；
图8为图2中本申请实施例二柔性显示面板沿截面A-A的第一种剖面图；
图9为图2中本申请实施例二柔性显示面板沿截面A-A的第二种剖面图；
图10为图2中本申请实施例二柔性显示面板沿截面A-A的第三种剖面图；
图11为本申请柔性显示面板的制作方法步骤图；
图12A~图12D为本申请柔性显示面板弯曲区的第一种制作工艺图；
图13A~图13E为本申请柔性显示面板弯曲区的第一种制作工艺图。
 本发明的实施方式
以下各实施例的说明是参考附加的图示，用以例示本申请可用以实施的特定实施例。本申请所提到的方向用语，例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本申请，而非用以限制本申请。在图中，结构相似的单元是用以相同标号表示。
请参阅图1，图1为本申请柔性显示面板的结构图。
请参阅图2，图2为本申请柔性显示面板弯曲区的平面展开图。
所述柔性显示面板100包括基板10及位于所述基板10上的发光器件层20、封装层30。
在一种实施例中，所述基板10为柔性基板，所述柔性基板的材料可以为聚酰亚胺(PI)。
所述柔性显示面板100包括显示区域200和位于所述显示区域200外围的非显示区域300。所述非显示区域300包括靠近所述显示区域200的弯曲区40、及远离所述显示区域200的绑定区50，所述弯曲区40位于所述显示区域200与绑定区50之间。
所述弯曲区40内设置有多条数据信号线60，所述数据信号线60从所述显示区域200经过所述弯折区域向绑定区50延伸。
所述柔性显示面板100通过所述弯曲区40将驱动芯片以及部分信号走线弯折至所述显示区域200的背面，减小所述柔性显示面板100的下边框，如图1中的间距L。
请参阅图3，图3为图2中本申请实施例一柔性显示面板沿截面A-A的第一种剖面图。
至少一条所述数据信号线60包括至少一金属层。至少一条所述数据信号线60包括至少一应力缓冲区70。
在一种实施例中，所述应力缓冲区70内设置有缓解应力构件701。
在一种实施例中，所述缓解应力构件701可以为凹槽。
在一种实施例中，所述数据信号线60至少包括第一金属层601、第二金属层602及第三金属层603。
在一种实施例中，所述第一金属层601可以为金属钛，所述第二金属层602可以为金属铝，所述第三金属层603可以为金属钛。
在一种实施例中，所述第一金属层601的厚度可以与所述第三的厚度相同，所述第二金属层602的厚度大于所述第一金属层601或所述第三金属层603的厚度。
在一种实施例中，所述应力缓冲区70至少包括所述第一金属层601及所述第三金属层603。
请参阅图3，所述应力缓冲区70包括所述第一金属层601及所述第三金属层603，所述凹槽的最大深度不小于所述第二金属层602的厚度与所述第三金属层603的厚度的和。
请参阅图4，图4为图2中本申请实施例一柔性显示面板沿截面A-A的第二种剖面图。
所述应力缓冲区70包括所述第一金属层601、所述第二金属层602及所述第三金属层603时，所述凹槽的最大深度小于所述第二金属层602的厚度与所述第三金属层603的厚度的和。
在一种实施例中，所述应力缓冲区70的凹槽的深度可以根据实际情况进行调节，并不局限于本实施例中图3和图4的方案。
请参阅图1和图2，所述弯曲区40包括第一弯曲段401、第二弯曲段402以及第三弯曲段403。所述第一弯曲段401靠近所述显示区域200，所述第三弯曲段403远离所述显示区域200，所述第二弯曲段402位于所述第一弯曲段401与所述第三弯曲段403之间。
在一种实施例中，所述凹槽在所述第一弯曲段401、所述第二弯曲段402以及所述第三弯曲段403的分布密度不同。
请参阅图1，所述第二弯曲段402的曲率半径不大于所述第一弯曲段401的曲率半径，所述第二弯曲段402的曲率半径不大于所述第三弯曲段403的曲率半径。
在一种实施例中，所述第二弯曲段402的曲率半径小于所述第一弯曲段401的曲率半径，所述第二弯曲段402的曲率半径小于所述第三弯曲段403的曲率半径。
从力学分析中可知，所述第二弯曲段402所受到的弯曲应力是最大，所述第二弯曲段402为所述柔性基板最易断裂的区域。所述第二弯曲段402的弯曲应力大于所述第一弯曲段401的弯曲应力，所述第二弯曲段402的弯曲应力大于所述第三弯曲段403的弯曲应力。
请参阅图5，图5为图2中本申请实施例一柔性显示面板沿截面A-A的第三种剖面图。
所述第二弯曲段402内所述凹槽的密度大于所述第一弯曲段401内所述凹槽的密度，所述第二弯曲段402内所述凹槽的密度大于所述第三弯曲段403内所述凹槽的密度。
在一种实施例中，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述凹槽的密度逐渐增加。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述凹槽的密度逐渐减小。
弯曲应力较大的区域对应的所述凹槽较密集，弯曲应力较小的区域对应的所述凹槽较稀疏，减小了各区域的弯曲应力，避免了应力集中，提高了所述柔性基板的弯折性能。
请参阅图6，图6为图2中本申请实施例一柔性显示面板沿截面A-A的第四种剖面图。
所述第二弯曲段402的金属层厚度不大于所述第一弯曲段401的金属层厚度，所述第二弯曲段402的金属层厚度不大于所述第三弯曲段403的金属层厚度。
在一种实施例中，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述数据信号线60的金属层厚度逐渐减小。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述数据信号线60的金属层厚度逐渐增加。
弯曲应力较大的区域对应的所述金属层厚度较小，弯曲应力较小的区域对应的所述金属层厚度较大，保证所述弯曲区40的中性轴为一平滑过渡的弧线，避免了部分区域应力集中，提高了所述弯曲区40的抗弯折性能。
请参阅图7，图7为图2中本申请实施例一柔性显示面板沿截面A-A的第五种剖面图。
在所述第一弯曲段401至所述第二弯曲段402的方向上，所述凹槽的深度逐渐增加。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述凹槽的深度逐渐减小。
弯曲应力较大的区域对应的所述凹槽的深度较大，弯曲应力较小的区域对应的所述凹槽的深度较小，减小了各区域的弯曲应力，避免了部分区域应力集中，提高了所述柔性基板的弯折性能。
为了获得更窄的边框，在弯折时所述弯曲区40被弯折成一段圆弧，在两端的弧度会小于所述弯曲区40中部的弧度。
在一种实施例中，请参阅图1，所述第二弯曲段402的曲率半径大于所述第一弯曲段401的曲率半径，所述第二弯曲段402的曲率半径大于所第三弯曲段403的曲率半径。
从力学分析中可知，所述第一弯曲段401及所述第三弯曲段403受到的弯曲应力最大，所述第一弯曲段401及所述第三弯曲段403为所述柔性基板最易断裂的区域。所述第二弯曲段402的弯曲应力小于所述第一弯曲段401的弯曲应力，所述第二弯曲段402的弯曲应力小于所述第三弯曲段403的弯曲应力。
请参阅图8，图8为图2中本申请实施例二柔性显示面板沿截面A-A的第一种剖面图。
所述第二弯曲段402内所述凹槽的密度小于所述第一弯曲段401内所述凹槽的密度，所述第二弯曲段402内所述凹槽的密度小于所述第三弯曲段403内所述凹槽的密度。
在一种实施例中，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述凹槽的密度逐渐减小。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述凹槽的密度逐渐增加。
即弯曲应力较大的区域对应的所述凹槽较密集，弯曲应力较小的区域对应的所述凹槽较稀疏，减小了各区域的弯曲应力，避免了应力集中，提高了所述柔性基板的弯折性能。
请参阅图9，图9为图2中本申请实施例二柔性显示面板沿截面A-A的第二种剖面图。
所述第二弯曲段402的金属层厚度大于所述第一弯曲段401的金属层厚度，所述第二弯曲段402的金属层厚度大于所述第三弯曲段403的金属层厚度。
在一种实施例中，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述数据信号线60的金属层厚度逐渐增加。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述数据信号线60的金属层厚度逐渐减小。
弯曲应力较大的区域对应的所述金属层厚度较小，弯曲应力较小的区域对应的所述金属层厚度较大，保证所述弯曲区40的中性轴为一平滑过渡的弧线，避免了部分区域应力集中，提高了所述弯曲区40的抗弯折性能。
请参阅图10，图10为图2中本申请实施例二柔性显示面板沿截面A-A的第三种剖面图。
在所述第一弯曲段401至所述第二弯曲段402的方向上，所述凹槽的深度逐渐减小。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述凹槽的深度逐渐增加。
弯曲应力较大的区域对应的所述凹槽的深度较大，弯曲应力较小的区域对应的所述凹槽的深度较小，减小了各区域的弯曲应力，避免了部分区域应力集中，提高了所述柔性基板的弯折性能。
在一种实施例中，靠近所述第一弯曲段401及所述第三弯曲段403的数据信号线60上还设置有所述缓解应力构件701。在未发生形变的所述数据信号线60上设置所述缓解应力构件701，更好的提升了所述柔性基板的抗弯折性能。
在一种实施例中，所述凹槽的形状没有具体的限制。
请参阅图11，图11为本申请柔性显示面板的制作方法步骤图。
所述柔性显示面板100包括显示区域200和位于所述显示区域200外围的非显示区域300。所述非显示区域300包括靠近所述显示区域200的弯曲区40、及远离所述显示区域200的绑定区50，所述弯曲区40位于所述显示区域200与绑定区50之间。
所述柔性显示面板的制作方法包括：
S10、提供一基板；
在一种实施例中，所述基板为柔性基板，所述柔性基板的材料可以为聚酰亚胺(PI)。
S20、所述基板上形成薄膜晶体管层及有机填充层；
本步骤主要为在所述基板10上形成薄膜晶体管层（未画出）及有机填充层。所述有机层在形成所述薄膜晶体管层后，通过对弯曲区挖孔，填充有机材料以形成有机填充层。
在一种实施例中，所述有机填充层可以与所述柔性基板的材料相同。
在一种实施例中，所述有机填充层的材料可以为聚酰亚胺(PI)。
S30、在所述薄膜晶体管层及所述有机填充层上形成至少一条数据信号线；
请参阅图12A~图12D，图12A~图12D为本申请柔性显示面板弯曲区的第一种制作工艺图。
在一种实施例中，至少一条所述数据信号线60包括至少一金属层。至少一条所述数据信号线60包括至少一应力缓冲区70，所述应力缓冲区70内设置有缓解应力构件701。
在一种实施例中，所述缓解应力构件701为凹槽。
步骤S30包括步骤：
S3011、在所述有机填充层上依次形成第一金属层601、第二金属层602；
请参阅图12A，所述第一金属层601可以为金属钛，所述第二金属层602可以为金属铝。
S3012、对所述应力缓冲区70所对应的所述第二金属层602、或所述第一金属层601和所述第二金属层602进行蚀刻工艺，在所述应力缓冲区70形成所述缓解应力构件701；
请参阅图12B，利用蚀刻工艺，对所述应力缓冲区70所对应的所述第二金属层602进行处理，所述蚀刻的深度不超过所述第二金属层602的厚度。
请参阅图12C，利用蚀刻工艺，对所述应力缓冲区70所对应的所述第二金属层602及所述第一金属层601进行处理，所述蚀刻的深度不超过所述第一金属层601及所述第二金属层602的厚度。
在一种实施例中，所述蚀刻工艺的可以为干法蚀刻或湿法蚀刻中的一种。
S3013、在所述第二金属层602上形成第三金属层603。
请参阅图12D，所述第三金属层603可以为金属钛。
在一种实施例中，所述第一金属层601的厚度可以与所述第三的厚度相同，所述第二金属层602的厚度大于所述第一金属层601或所述第三金属层603的厚度。
请参阅图13A~图13E，图13A~图13E为本申请柔性显示面板弯曲区的第一种制作工艺图。
步骤S30还可以包括步骤：
S3021、在所述有机填充层上依次形成第一金属层601、第二金属层602及第三金属层603；
请参阅图13A，所述第一金属层601可以为金属钛，所述第二金属层602可以为金属铝，所述第三金属层603可以为金属钛。
S3022、对所述应力缓冲区70所对应的所述第三金属层603、所述第二金属层602及所述第三金属层603、或所述第一金属层601、所述第二金属层602及所述第三金属层603进行蚀刻工艺，在所述应力缓冲区70形成所述缓解应力构件701；
请参阅图13B，利用蚀刻工艺，对所述应力缓冲区70所对应的所述第三金属层603进行处理，所述蚀刻的深度不超过所述第三金属层603的厚度。
请参阅图13C，利用蚀刻工艺，对所述应力缓冲区70所对应的所述第二金属层602及所述第三金属层603进行处理，所述蚀刻的深度不超过所述第三金属层603及所述第二金属层602的厚度。
请参阅图13D，利用蚀刻工艺，对所述应力缓冲区70所对应的所述第一金属层601、所述第二金属层602及所述第三金属层603进行处理，所述蚀刻的深度不超过所述第三金属层603、所述第二金属层602及所述第一金属层601的厚度。
在一种实施例中，所述蚀刻工艺的可以为干法蚀刻或湿法蚀刻中的一种。
S3023、在所述第三金属层603上形成第四金属层。
请参阅图13E，所述第四金属层可以为金属钛。
在一种实施例中，所述第一金属层601的厚度、所述第三金属层603的厚度可以与所述第四的厚度相同，所述第二金属层602的厚度大于所述第一金属层或、所述第三金属层603所述第四金属层的厚度。
所述弯曲区40包括第一弯曲段401、第二弯曲段402以及第三弯曲段403，所述第一弯曲段401靠近所述显示区域200，所述第三弯曲段403远离所述显示区域200，所述第二弯曲段402位于所述第一弯曲段401与所述第三弯曲段403之间。
在一种实施例中，所述凹槽在所述第一弯曲段401、所述第二弯曲段402以及所述第三弯曲段403的分布密度不同。
在一种实施例中，所述第二弯曲段402的曲率半径不大于所述第一弯曲段401的曲率半径，所述第二弯曲段402的曲率半径不大于所述第三弯曲段403的曲率半径。
请参阅图5，所述第二弯曲段402内所述凹槽的密度不小于所述第一弯曲段401内所述凹槽的密度，所述第二弯曲段402内所述凹槽的密度不小于所述第三弯曲段403内所述凹槽的密度。
在一种实施例中，所述第二弯曲段402的金属层厚度不大于所述第一弯曲段401的金属层厚度，所述第二弯曲段402的金属层厚度不大于所述第三弯曲段403的金属层厚度。
请参阅图6，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述数据信号线60的金属层厚度逐渐减小。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述数据信号线60的金属层厚度逐渐增加。
请参阅图7，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述凹槽的深度逐渐增加。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述凹槽的深度逐渐减小。
在一种实施例中，所述第二弯曲段402的曲率半径大于所述第一弯曲段401的曲率半径，所述第二弯曲段402的曲率半径大于所第三弯曲段403的曲率半径。
请参阅图8，所述第二弯曲段402内所述凹槽的密度小于所述第一弯曲段401内所述凹槽的密度，所述第二弯曲段402内所述凹槽的密度小于所述第三弯曲段403内所述凹槽的密度。
所述第二弯曲段402的金属层厚度大于所述第一弯曲段401的金属层厚度，所述第二弯曲段402的金属层厚度大于所述第三弯曲段403的金属层厚度。
请参阅图9，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述数据信号线60的金属层厚度逐渐增加。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述数据信号线60的金属层厚度逐渐减小。
请参阅图10，在所述第一弯曲段401至所述第二弯曲段402的方向上，所述凹槽的深度逐渐减小。在所述第二弯曲段402至所述第三弯曲段403的方向上，所述凹槽的深度逐渐增加。
根据本申请的另一个方面，还提供了一种显示模组，所述显示模组包括所述柔性显示面板100，还包括在所述柔性显示面板100上依次设置的触控层、偏光层和盖板层。
根据本申请的又一个方面，还提供了一种电子装置，所述电子装置包括所述显示模组；所述电子装置包括但不限定于手机、平板电脑、计算机显示器、游戏机、电视机、显示屏幕、可穿戴设备及其他具有显示功能的生活电器或家用电器等。
所述显示模组的工作原理、所述电子装置的工作原理与所述柔性显示面板的工作原理相似，所述显示模组的工作原理以及所述电子装置的工作原理具体可以参考所述柔性显示面板的工作原理，这里不做赘述。
本申请提出了一种柔性显示面板及其制作方法，所述柔性显示面板包括弯曲区，所述弯曲区设置有数据信号线。至少一条所述数据信号线包括至少一金属层，至少一条所述数据信号线包括至少一应力缓冲区，所述应力缓冲区内设置有缓解应力构件。本申请通过在弯曲区中的数据信号线上设置缓解应力构件，不仅减小了数据信号线弯折时受到的弯曲应力，而且降低了数据信号线的阻抗，有效改善了数据信号线弯折后信号线断裂而无法进行信号传输的技术问题，提高柔性显示面板的使用寿命。
综上所述，虽然本申请已以优选实施例揭露如上，但上述优选实施例并非用以限制本申请，本领域的普通技术人员，在不脱离本申请的精神和范围内，均可作各种更动与润饰，因此本申请的保护范围以权利要求界定的范围为准。

Claims (20)

  1. 一种柔性显示面板，其中，所述柔性显示面板包括显示区域和位于所述显示区域外围的非显示区域，所述非显示区域包括弯曲区；
    所述弯曲区内设置有数据信号线，至少一条所述数据信号线包括至少一金属层；
    其中，至少一条所述数据信号线包括至少一应力缓冲区，所述应力缓冲区内设置有缓解应力构件。
  2. 根据权利要求1所述的柔性显示面板，其中，所述缓解应力构件为凹槽。
  3. 根据权利要求2所述的柔性显示面板，其中，所述弯曲区包括第一弯曲段、第二弯曲段以及第三弯曲段，所述第一弯曲段靠近所述显示区域，所述第三弯曲段远离所述显示区域，所述第二弯曲段位于所述第一弯曲段与所述第三弯曲段之间；
    所述凹槽在所述第一弯曲段、所述第二弯曲段以及所述第三弯曲段的分布密度不同。
  4. 根据权利要求3所述的柔性显示面板，其中，所述第二弯曲段的曲率半径不大于所述第一弯曲段的曲率半径，所述第二弯曲段的曲率半径不大于所述第三弯曲段的曲率半径。
  5. 根据权利要求4所述的柔性显示面板，其中，所述第二弯曲段内所述凹槽的密度不小于所述第一弯曲段内所述凹槽的密度，所述第二弯曲段内所述凹槽的密度不小于所述第三弯曲段内所述凹槽的密度。
  6. 根据权利要求4所述的柔性显示面板，其中，所述第二弯曲段的金属层厚度不大于所述第一弯曲段的金属层厚度，所述第二弯曲段的金属层厚度不大于所述第三弯曲段的金属层厚度。
  7. 根据权利要求6所述的柔性显示面板，其中，在所述第一弯曲段至所述第二弯曲段的方向上，所述数据信号线的金属层厚度逐渐减小；
    在所述第二弯曲段至所述第三弯曲段的方向上，所述数据信号线的金属层厚度逐渐增加。
  8. 根据权利要求4所述的柔性显示面板，其中，在所述第一弯曲段至所述第二弯曲段的方向上，所述凹槽的深度逐渐增加；
    在所述第二弯曲段至所述第三弯曲段的方向上，所述凹槽的深度逐渐减小。
  9. 根据权利要求3所述的柔性显示面板，其中，所述第二弯曲段的曲率半径大于所述第一弯曲段的曲率半径，所述第二弯曲段的曲率半径大于所第三弯曲段的曲率半径。
  10. 根据权利要求9所述的柔性显示面板，其中，所述第二弯曲段内所述凹槽的密度小于所述第一弯曲段内所述凹槽的密度，所述第二弯曲段内所述凹槽的密度小于所述第三弯曲段内所述凹槽的密度。
  11. 根据权利要求9所述的柔性显示面板，其中，所述第二弯曲段的金属层厚度大于所述第一弯曲段的金属层厚度，所述第二弯曲段的金属层厚度大于所述第三弯曲段的金属层厚度。
  12. 根据权利要求11所述的柔性显示面板，其中，在所述第一弯曲段至所述第二弯曲段的方向上，所述数据信号线的金属层厚度逐渐增加；
    在所述第二弯曲段至所述第三弯曲段的方向上，所述数据信号线的金属层厚度逐渐减小。
  13. 根据权利要求9所述的柔性显示面板，其中，在所述第一弯曲段至所述第二弯曲段的方向上，所述凹槽的深度逐渐减小；
    在所述第二弯曲段至所述第三弯曲段的方向上，所述凹槽的深度逐渐增加。
  14. 根据权利要求2所述的柔性显示面板，其中，所述数据信号线至少包括第一金属层、第二金属层及第三金属层；
    其中，所述应力缓冲区至少包括所述第一金属层及所述第三金属层。
  15. 根据权利要求14所述的柔性显示面板，其中，当所述应力缓冲区包括所述第一金属层及所述第三金属层时，所述凹槽的最大深度不小于所述第二金属层的厚度与所述第三金属层的厚度的和。
  16. 根据权利要求14所述的柔性显示面板，其中，当所述应力缓冲区包括所述第一金属层、所述第二金属层及所述第三金属层时，所述凹槽的最大深度小于所述第二金属层的厚度与所述第三金属层的厚度的和。
  17. 一种柔性显示面板的制作方法，所述柔性显示面板包括显示区域和位于所述显示区域外围的非显示区域，所述非显示区域包括弯曲区，其中，所述柔性显示面板的制作方法包括：
    提供一基板；
    在所述基板上形成薄膜晶体管层及有机填充层；
    在所述薄膜晶体管层及所述有机填充层上形成至少一条数据信号线，
    至少一条所述数据信号线包括至少一金属层；
    其中，至少一条所述数据信号线包括至少一应力缓冲区，所述应力缓冲区内设置有缓解应力构件。
  18. 根据权利要求17所述的制作方法，其中，在所述有机填充上形成至少一条数据信号线的步骤包括：
    在所述有机填充层上依次形成第一金属层、第二金属层；
    对所述应力缓冲区所对应的所述第二金属层、或所述第一金属层和所述第二金属层进行蚀刻工艺，在所述应力缓冲区形成所述缓解应力构件；
    在所述第二金属层上形成第三金属层。
  19. 根据权利要求17所述的制作方法，其中，在所述有机填充上形成至少一条数据信号线的步骤包括：
    在所述有机填充层上依次形成第一金属层、第二金属层及第三金属层；
    对所述应力缓冲区所对应的所述第三金属层、所述第二金属层及所述第三金属层、或所述第一金属层、所述第二金属层及所述第三金属层进行蚀刻工艺，在所述应力缓冲区形成所述缓解应力构件；
    在所述第三金属层上形成第四金属层。
  20. 根据权利要求19所述的制作方法，其中，所述缓解应力构件为凹槽；
    所述弯曲区包括第一弯曲段、第二弯曲段以及第三弯曲段，所述第一弯曲段靠近所述显示区域，所述第三弯曲段远离所述显示区域，所述第二弯曲段位于所述第一弯曲段与所述第三弯曲段之间；
    所述凹槽在所述第一弯曲段、所述第二弯曲段以及所述第三弯曲段的分布密度不同。
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