WO2020103317A1 - 用于马赛克拼接的快速补值方法 - Google Patents
用于马赛克拼接的快速补值方法Info
- Publication number
- WO2020103317A1 WO2020103317A1 PCT/CN2019/070840 CN2019070840W WO2020103317A1 WO 2020103317 A1 WO2020103317 A1 WO 2020103317A1 CN 2019070840 W CN2019070840 W CN 2019070840W WO 2020103317 A1 WO2020103317 A1 WO 2020103317A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mosaic
- area
- mosaic area
- fast
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
Definitions
- the present disclosure relates to the field of display technology, and in particular, to a fast interpolation method for mosaic mosaic.
- the two mosaic areas are in a complementary form, forming a complete figure through two exposures, but if one of the mosaic areas has poor alignment accuracy, the personnel cannot confirm through the pattern Which mosaic area belongs to the area with poor accuracy, so the machine cannot quickly adjust the compensation value, which will not only reduce the production efficiency, but also cause the splicing Mura phenomenon to increase.
- FIG. 2 is a partial enlarged view 31' of the final obtained pattern 3 'in FIG. 1, which is an ideal white stripe pattern. Therefore, mosaic stitching transforms the originally abrupt stitching line into a gradual transition zone, which can reduce the stitching Mura phenomenon.
- FIGS. 3 and 4 if two complementary first mosaic regions 1 and second mosaic regions 2 are relatively shifted during the stacking process, the resulting pattern 3 will be deformed, as shown in FIG.
- the partially enlarged view 31 of the pattern 3 finally obtained in FIG. 3 cannot form an ideal white stripe pattern.
- it is necessary to add value to the superimposition process but since the smallest unit pattern constituting the first mosaic area 1 and the smallest unit pattern constituting the second mosaic area are no different, it is impossible to pinpoint a certain
- the mosaic position of a mosaic area can be adjusted, but the value can only be compensated by blind compensation. Not only is it inefficient, but it may also increase the mosaic Mura phenomenon.
- the present disclosure provides a fast complementary method for mosaic mosaic, which can solve the problem that in the case of poor mosaic mosaic accuracy, it is impossible to confirm which mosaic area the poor accuracy region belongs to according to the graph, so the machine cannot perform rapid Adjusting the supplementary value leads to technical problems such as reduced production efficiency and increased splicing Mura phenomenon.
- the present disclosure provides a fast complementary method for mosaic mosaic, including the following steps:
- S101 Form a first mosaic area and a second mosaic area, and there is a difference in alignment accuracy between the first mosaic area and the second mosaic area;
- S102 Design the smallest unit constituting the first mosaic area as a special pattern as a mark
- S103 Splicing and superimposing the first mosaic area and the second mosaic area to form a third mosaic area
- S104 Identify according to the special pattern to distinguish the relative positions of the first mosaic area and the second mosaic area in the third mosaic area;
- S105 Compensate the splicing position of the mosaic area identified in the third mosaic area with poor alignment accuracy, thereby finally forming the mosaic area of the display panel.
- the patterns of the first mosaic area and the second mosaic area are complementary.
- the first mosaic area and the second mosaic area are determined The accuracy of the alignment.
- step S102 a groove is formed in the smallest unit of the first mosaic area to form the special pattern.
- step S103 the patterns of the first mosaic area and the second mosaic area are respectively used to perform masking twice after the mask is completed.
- the pattern of the mosaic area finally formed in step S105 is striped.
- the present disclosure provides a fast complementary method for mosaic mosaic, including the following steps:
- S101 forming a first mosaic area and a second mosaic area
- S102 Design the smallest unit constituting the first mosaic area as a special pattern as a mark
- S103 Splicing and superimposing the first mosaic area and the second mosaic area to form a third mosaic area
- S104 Identify according to the special pattern to distinguish the relative positions of the first mosaic area and the second mosaic area in the third mosaic area;
- S105 Compensate the mosaic position of the mosaic mosaic area identified in the third mosaic area with poor alignment accuracy, thereby finally forming the mosaic area of the display panel.
- the patterns of the first mosaic area and the second mosaic area are complementary.
- the first mosaic area and the second mosaic area are determined The size of the contrast accuracy.
- step S102 a groove is formed in the smallest unit of the first mosaic area to form the special pattern.
- step S103 the patterns of the first mosaic area and the second mosaic area are respectively used to perform masking twice after the mask is completed.
- the pattern of the mosaic area finally formed in step S105 is striped.
- the embodiments of the present disclosure provide a fast complement method for mosaic mosaic, including the following steps:
- S202 Design the smallest unit constituting the second mosaic area as a special pattern as a mark
- S203 stitching and superimposing the first mosaic area and the second mosaic area to form a third mosaic area
- S204 identify according to the special pattern to distinguish the relative positions of the first mosaic area and the second mosaic area in the third mosaic area;
- S205 Compensate the splicing position of the identified mosaic area with poor alignment accuracy in the third mosaic area, thereby finally forming the mosaic area of the display panel.
- the patterns of the first mosaic area and the second mosaic area are complementary.
- the first mosaic area and the second mosaic area are determined The size of the contrast accuracy.
- the special pattern in step S202 may be a groove.
- step S203 the patterns of the first mosaic area and the second mosaic area are used to perform masking twice after the mask is completed, respectively.
- the pattern of the mosaic area finally formed in step S205 is striped.
- the embodiments of the present disclosure provide a quick complement method for mosaic mosaic.
- the mosaic mosaic accuracy can be poor Under the circumstance of realizing fast adjustment of the supplementary value, while ensuring the display effect, it improves the splicing Mura phenomenon, improves the production efficiency, and reduces the manufacturing process and production cost of the LCD panel.
- FIG. 1 is a schematic diagram of mosaic mosaic without offset in the prior art
- FIG. 2 is a partial enlarged view of a mosaic mosaic pattern finally obtained without offset in the prior art.
- FIG. 3 is a schematic diagram of mosaic mosaic without offset in the prior art
- FIG. 4 is a partial enlarged view of a mosaic mosaic pattern finally obtained in the case of an offset in the prior art.
- FIG. 5 is a flow chart of a method for fast complementing mosaic mosaic provided by Embodiment 1 of the present disclosure
- FIG. 6 is a schematic diagram of mosaic mosaic provided by Embodiment 1 of the present disclosure.
- FIG. 7 is a partial enlarged view of a mosaic mosaic pattern provided by Embodiment 1 of the present disclosure.
- FIG. 8 is a flowchart of a fast value-adding method for mosaic mosaic provided by Embodiment 2 of the present disclosure.
- Embodiment 9 is a schematic diagram of mosaic mosaic provided by Embodiment 2 of the present disclosure.
- Embodiment 10 is a partial enlarged view of a mosaic mosaic pattern provided by Embodiment 2 of the present disclosure.
- the first and second embodiments can solve the technical problem.
- any one of the smallest cells constituting the mosaic area can be designed as a special pattern for marking to distinguish, therefore, there are two embodiments in the present disclosure.
- this embodiment provides a quick complement method for mosaic mosaic.
- the marking method adopted in this embodiment is to The smallest unit of the first mosaic area 11 is designed as a special pattern, and the quick compensation method specifically includes the following steps:
- a first mosaic area 11 and a second mosaic area 12 are formed separately, and the first mosaic area 11 and the second mosaic area 12 are complementary, so that a complete figure can be formed when stitching is performed subsequently. Since there is a difference in alignment accuracy between the first mosaic area 11 and the second mosaic area 12, after forming the first mosaic area 11 and the second mosaic area 12, the first mosaic area 11 is determined 3. The alignment accuracy of the second mosaic area 12.
- S102 Design the smallest unit constituting the first mosaic area 11 as a special pattern as a mark
- a special pattern can be formed by opening a groove 14 as a mark on the smallest unit of the first mosaic area 11 so that the pattern of the smallest unit constituting the first mosaic area 11 and the smallest of the second mosaic area 12 can be formed
- the patterns of the cells have obvious differences. After the splicing is completed, the specific location of the mosaic area with poor accuracy can be clearly identified.
- the special pattern as a mark is not limited to the method of opening the groove 14, only the smallest unit of the first mosaic area 11 needs to be designed into a pattern that can be clearly identified, and does not affect the first mosaic area The alignment accuracy of 11 can meet the requirements.
- the patterns of the first mosaic area 11 and the second mosaic area 12 are respectively used to perform the photomask twice to complete the splicing, thereby forming the third mosaic area 13. Since there is a mosaic area with poor alignment accuracy, the formed third mosaic area 13 is not the desired ideal pattern.
- S104 Identify according to the special pattern to distinguish the relative positions of the first mosaic area 11 and the second mosaic area 12 in the third mosaic area 13;
- FIG. 7 is a partially enlarged view of a mosaic mosaic pattern obtained by superposition, because the pattern of the smallest unit of the first mosaic area 11 and the pattern of the smallest unit of the second mosaic area 12 are obviously different, so they are superimposed
- the pattern in which the groove 14 exists on the smallest unit belongs to the first mosaic area 11, and the pattern in which the groove 14 does not exist on the smallest unit belongs to the second mosaic area 12.
- S105 Compensate the splicing position of the mosaic area of the third mosaic area 13 where poor alignment accuracy is recognized, so as to finally form the mosaic area of the display panel.
- a mosaic area may have poor alignment accuracy. Therefore, it is necessary to compensate for the mosaic position of the identified mosaic area with poor alignment accuracy , If the alignment accuracy of the first mosaic region 11 is poor, complement the identified first mosaic region 11 that is marked; if the alignment accuracy of the second mosaic region 12 is poor, Then, the identified second mosaic area 12 that has not been marked is compensated. Therefore, the pattern of the third mosaic area 23 formed by splicing is quickly adjusted to an ideal stripe pattern, and finally the mosaic area of the display panel is formed, so as to improve production efficiency, and further reduce and improve the Mura phenomenon of mosaic splicing.
- this embodiment provides a quick complement method for mosaic mosaic.
- the marking method adopted in this embodiment is to The smallest unit of the second mosaic area 22 is designed as a special pattern, and the quick complement method specifically includes the following steps:
- a first mosaic area 21 and a second mosaic area 22 are formed respectively.
- the first mosaic area 21 and the second mosaic area 22 are complementary, so that when a subsequent mosaic is performed, a complete figure can be formed . Since the alignment accuracy of the first mosaic area 21 and the second mosaic area 22 is different, after forming the first mosaic area 21 and the second mosaic area 22, the first mosaic area 21 is determined 3. The alignment accuracy of the second mosaic region 22 is large.
- S202 Design the smallest unit constituting the second mosaic area 22 as a special pattern as a mark
- a special pattern may be formed by opening a groove 24 on the smallest unit of the second mosaic region 22 so that the pattern of the smallest unit constituting the first mosaic region 21 and the smallest unit of the second mosaic region 22
- the patterns have obvious differences, and after the stitching is completed, the specific position of the mosaic area with poor alignment accuracy can be clearly identified.
- the special pattern as a mark is not limited to the method of opening a groove, only the smallest unit of the second mosaic area 22 needs to be designed into a pattern that can be clearly identified, and does not affect the second mosaic area 22 The accuracy of the alignment can meet the requirements.
- the patterns of the first mosaic area 21 and the second mosaic area 22 are used to perform the photomask twice to complete the splicing, thereby forming the third mosaic area 23. Since there is a mosaic area with poor alignment accuracy, the formed third mosaic area 23 is not the desired ideal pattern.
- S204 identify according to the special pattern to distinguish the relative positions of the first mosaic area 21 and the second mosaic area 22 in the third mosaic area 23;
- FIG. 10 is a partially enlarged view of a mosaic mosaic pattern obtained by superposition. Since the pattern of the smallest unit of the first mosaic region 21 is significantly different from the pattern of the smallest unit of the second mosaic region 22, In the superimposed third mosaic area 23, that is, the obtained mosaic mosaic pattern, it can be clearly distinguished which graphics belong to the first mosaic area 21 and which belong to the second mosaic area 22. As shown in FIG. 10, the pattern in which the groove 24 exists on the smallest cell belongs to the second mosaic area 22, and the pattern in which the groove 24 does not exist on the smallest cell belongs to the first mosaic area 21.
- S105 Compensate the splicing position of the first mosaic area 21 in the third mosaic area 23, thereby finally forming a mosaic area of the display panel.
- a mosaic area may have poor alignment accuracy. Therefore, it is necessary to compensate for the mosaic position of the identified mosaic area with poor alignment accuracy , If the alignment accuracy of the first mosaic region 21 is poor, complement the identified first mosaic region 21 that is marked; if the alignment accuracy of the second mosaic region 12 is poor, Then, the identified second mosaic area 22 that has not been marked is compensated. Therefore, the pattern of the third mosaic area 23 formed by splicing is quickly adjusted to an ideal stripe pattern, and finally the mosaic area of the display panel is formed, so as to improve production efficiency, and further reduce and improve the Mura phenomenon of mosaic splicing.
- the present disclosure provides a quick complement method for mosaic mosaic.
- By designing a special mosaic pattern without adding additional processes and equipment it is possible to quickly adjust the complement value under the condition of poor mosaic mosaic accuracy to ensure While displaying the effect, it improves the splicing Mura phenomenon, improves the production efficiency, and reduces the manufacturing process and production cost of the LCD panel.
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Illuminated Signs And Luminous Advertising (AREA)
Abstract
一种用于马赛克拼接的快速补值方法,通过在形成的第一马赛克区域或第二马赛克区域的图案最小单元上设计特殊的马赛克图案,在马赛克拼接精度较差的情况下实现快速调整补值,确保显示效果的同时,并且在不增加额外制程和设备的条件下,改善拼接Mura现象,提高生产效率,降低液晶面板的制作工艺和生产成本。
Description
本揭示涉及显示技术领域,尤其涉及一种用于马赛克拼接的快速补值方法。
由于大尺寸液晶电视能够带来更多的视听冲击,因此越来越得到液晶面板厂商青睐。在传统的8.5世代线上生产55寸以上的液晶面板,由于面板尺寸大于光罩有效曝光区域,因此需采用光罩拼接技术。马赛克拼接是一种将锐利的拼接线转变为模糊的拼接线的光罩拼接技术,由于马赛克拼接造成的面板画面质量不均匀现象(Mura现象)相对轻微并且对曝光机无特殊功能需求,因此在大尺寸面板生产上得到了广泛应用。
传统的马赛克拼接在实际制作过程中,两块马赛克区域是通过互补的形式,通过两次曝光形成一个完整的图形,但若其中某一块马赛克区域出现对位精度较差情况,人员无法通过图形确认该精度较差的区域是属于哪一块马赛克区域,因此机台无法进行快速调整补值,不仅会使生产效率降低,还会导致拼接Mura现象加重。
以8.5世代线光罩马赛克拼接为例,如图1、图2所示,当两块互补的第一马赛克区域1'、第二马赛克区域2'在叠加过程中无偏移的情况下,通过叠加可以得到最终需要的图案3',如图2为图1中最终得到的图案3'的局部放大图31',为理想的白色条纹图案。因此,马赛克拼接将原本突变的一条拼接线转变为一个过渡区域的渐变,可以减轻拼接Mura现象。然而,如图3、图4所示,若两块互补的第一马赛克区域1、第二马赛克区域2在叠加过程中发生相对偏移,则最终得到的图案3会发生变形,如图4为图3中最终得到的图案3的局部放大图31,无法形成理想的白色条纹图案。为得到理想的白色条纹状图案,则需要针对叠加过程加以补值,但由于构成第一马赛克区域1的最小单元图案与构成第二马赛克区域的最小单元图案并无差别,无法针性地对某一马赛克区域拼接位置进行调整,而只能通过盲补进行补值,不仅效率低下,而且可能会加重拼接Mura现象。
本揭示提供一种用于马赛克拼接的快速补值方法,可解决在马赛克拼接精度较差的情况下,无法根据图形确认该精度较差的区域是属于哪一块马赛克区域,因此机台无法进行快速调整补值,导致生产效率降低、拼接Mura现象加重的技术问题。
为解决上述问题,本揭示提供的技术方案如下:
本揭示提供一种用于马赛克拼接的快速补值方法,包括以下步骤:
S101:形成第一马赛克区域、第二马赛克区域,所述第一马赛克区域与所述第二马赛克区域的对位精度存在差异;
S102:将构成所述第一马赛克区域的最小单元设计成特殊图案作为标记;
S103:将所述第一马赛克区域与所述第二马赛克区域进行拼接叠加,形成第三马赛克区域;
S104:根据所述特殊图案进行辨认,以区分所述第三马赛克区域中的所述第一马赛克区域、第二马赛克区域的相对位置;
S105:对所述第三马赛克区域中辨认出的对位精度较差的马赛克区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述第一马赛克区域与所述第二马赛克区域的图案互补。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,在形成所述第一马赛克区域、所述第二马赛克区域之后,判断所述第一马赛克区域、所述第二马赛克区域的对位精度大小。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S102中通过在所述第一马赛克区域的最小单元上开设凹槽以形成所述特殊图案。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S103中分别利用所述第一马赛克区域与所述第二马赛克区域的图案进行两次光罩后完成拼接。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S105中最终形成的马赛克区域的图案为条纹状。
本揭示提供一种用于马赛克拼接的快速补值方法,包括以下步骤:
S101:形成第一马赛克区域、第二马赛克区域;
S102:将构成所述第一马赛克区域的最小单元设计成特殊图案作为标记;
S103:将所述第一马赛克区域与所述第二马赛克区域进行拼接叠加,形成第三马赛克区域;
S104:根据所述特殊图案进行辨认,以区分所述第三马赛克区域中的所述第一马赛克区域、所述第二马赛克区域的相对位置;
S105:对所述第三马赛克区域中的辨认出的对位精度较差的马赛克拼接区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述第一马赛克区域与所述第二马赛克区域的图案互补。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,在形成所述第一马赛克区域、所述第二马赛克区域之后,判断所述第一马赛克区域、所述第二马赛克区域的对比精度大小。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S102中通过在所述第一马赛克区域的最小单元上开设凹槽以形成所述特殊图案。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S103中分别利用所述第一马赛克区域与所述第二马赛克区域的图案进行两次光罩后完成拼接。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S105中最终形成的马赛克区域的图案为条纹状。
本揭示的实施例提供一种用于马赛克拼接的快速补值方法,包括以下步骤:
S201:形成第一马赛克区域、第二马赛克区域;
S202:将构成所述第二马赛克区域的最小单元设计成特殊图案作为标记;
S203:将所述第一马赛克区域与所述第二马赛克区域进行拼接叠加,形成第三马赛克区域;
S204:根据所述特殊图案进行辨认,以区分所述第三马赛克区域中的所述第一马赛克区域、所述第二马赛克区域的相对位置;
S205:对所述第三马赛克区域中的辨认出的对位精度较差的马赛克区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述第一马赛克区域与所述第二马赛克区域的图案互补。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,在形成所述第一马赛克区域、所述第二马赛克区域之后,判断所述第一马赛克区域、所述第二马赛克区域的对比精度大小。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S202中的所述特殊图案可为凹槽。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S203中分别利用所述第一马赛克区域与所述第二马赛克区域的图案进行两次光罩后完成拼接。
在本揭示的实施例提供的用于马赛克拼接的快速补值方法中,所述步骤S205中最终形成的马赛克区域的图案为条纹状。
本揭示的有益效果为:本揭示的实施例提供一种用于马赛克拼接的快速补值方法,在不增加额外制程和设备的条件下,通过设计特殊的马赛克图案,可在马赛克拼接精度较差的情况下实现快速调整补值,确保显示效果的同时,改善拼接Mura现象,提高生产效率,降低液晶面板的制作工艺和生产成本。
为了更清楚地说明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单介绍,显而易见地,下面描述中的附图仅仅是揭示的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。
图1为现有技术中无偏移情况下的一种马赛克拼接示意图;
图2为现有技术中无偏移情况下最终得到的一种马赛克拼接图案局部放大图。
图3为现有技术中无偏移情况下的一种马赛克拼接示意图;
图4为现有技术中有偏移情况下最终得到的一种马赛克拼接图案局部放大图。
图5为本揭示实施例一提供的一种用于马赛克拼接的快速补值方法流程图;
图6为本揭示实施例一提供的一种马赛克拼接示意图;
图7为本揭示实施例一提供的一种马赛克拼接图案局部放大图。
图8为本揭示实施例二提供的一种用于马赛克拼接的快速补值方法流程图;
图9为本揭示实施例二提供的一种马赛克拼接示意图;
图10为本揭示实施例二提供的一种马赛克拼接图案局部放大图。
以下各实施例的说明是参考附加的图示,用以例示本揭示可用以实施的特定实施例。本揭示所提到的方向用语,例如[上]、[下]、[前]、[后]、[左]、[右]、[内]、[外]、[侧面]等,仅是参考附加图式的方向。因此,使用的方向用语是用以说明及理解本揭示,而非用以限制本揭示。在图中,结构相似的单元是用以相同标号表示。
本揭示是针对在马赛克拼接精度较差的情况下,无法根据图形确认该精度较差的区域是属于哪一块马赛克区域,因此机台无法进行快速调整补值,导致生产效率降低、拼接Mura加重的技术问题所提供的一种用于马赛克拼接的快速补值方法,本实施例一、二能够解决该技术问题。
由于存在两块马赛克拼接区域,包括第一马赛克区域与第二马赛克拼接区域,可以将其中任何一块构成马赛克区域的最小单元设计为特殊图案进行标记加以区分,因此,本揭示存在两种实施方式。
实施例一
以8.5世代线光罩马赛克拼接为例,如图5、图6、图7所示,本实施例提供一种用于马赛克拼接的快速补值方法,本实施例采用的标记方式是将构成所述第一马赛克区域11的最小单元设计为特殊图案,所述快速补值方法具体包括以下步骤:
S101:形成第一马赛克区域11、第二马赛克区域12;
分别形成第一马赛克区域11与第二马赛克区域12,所述第一马赛克区域11与所述第二马赛克区域12互补,使得后续进行拼接时能够形成一个完整的图形。由于所述第一马赛克区域11与所述第二马赛克区域12的对位精度存在差异,因此,在形成所述第一马赛克区域11、第二马赛克区域12之后,判断所述第一马赛克区域11、第二马赛克区域12的对位精度大小。
S102:将构成所述第一马赛克区域11的最小单元设计成特殊图案作为标记;
可通过在所述第一马赛克区域11的最小单元上开设凹槽14作为标记以形成特殊图案,使得构成所述第一马赛克区域11的最小单元的图案与构成所述第二马赛克区域12的最小单元的图案具有明显的区别,能够在拼接完成之后,清楚地辨认出精度较差的马赛克区域的具体位置。作为标记的特殊图案并不限于开设所述凹槽14这一种方法,只需将所述第一马赛克区域11的最小单元设计成能够清晰辨认的图案,且并不影响所述第一马赛克区域11的对位精度即可满足要求。
S103:将所述第一马赛克区域11与所述第二马赛克区域12进行拼接叠加,形成第三马赛克区域13;
分别利用所述第一马赛克区域11与所述第二马赛克区域12的图案进行两次光罩后完成拼接,从而形成第三马赛克区域13。由于存在对位精度较差的马赛克区域,因此,所形成的第三马赛克区域13并不是所需要的理想图案。
S104:根据所述特殊图案进行辨认,以区分所述第三马赛克区域13中的所述第一马赛克区域11、所述第二马赛克区域12的相对位置;
如图7为经过叠加得到的一种马赛克拼接图案局部放大图,由于所述第一马赛克区域11的最小单元的图案与所述第二马赛克区域12的最小单元的图案存在明显差别,因此叠加起来第三马赛克区域13,即在得到的马赛克拼接图案中可清楚的辨认区分哪些图形是属于所述第一马赛克区域11,哪些图形是属于所述第二马赛克区域12。如图7所示,在最小单元上存在所述凹槽14的图形属于所述第一马赛克区域11,在最小单元上不存在所述凹槽14的图形属于所述第二马赛克区域12。
S105:对所述第三马赛克区域13中被辨认出对位精度较差的马赛克区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
在马赛克图案拼接过程中,由于对位精度的差异,可能导致某一块马赛克区域出现对位精度较差的情况,因此,需要对辨认出的对位精度较差的马赛克区域的拼接位置进行补值,若所述第一马赛克区域11的对位精度较差,则对辨认出的进行标记的所述第一马赛克区域11进行补值;若所述第二马赛克区域12的对位精度较差,则对辨认出的未进行标记的所述第二马赛克区域12进行补值。从而使拼接形成的所述第三马赛克区域23的图案快速调整为理想的条纹状图案,最终形成显示面板的马赛克区域,以提高生产效率,进一步减轻和改善马赛克拼接Mura现象。
实施例二
以8.5世代线光罩马赛克拼接为例,如图8、图9、图10所示,本实施例提供一种用于马赛克拼接的快速补值方法,本实施例采用的标记方式是将构成所述第二马赛克区域22的最小单元设计为特殊图案,所述快速补值方法具体包括以下步骤:
S201:形成第一马赛克区域21、第二马赛克区域22;
如图9所示,分别形成第一马赛克区域21与第二马赛克区域22,所述第一马赛克区域21与所述第二马赛克区域22互补,使后续进行拼接的时候,能够形成一个完整的图形。由于所述第一马赛克区域21与所述第二马赛克区域22的对位精度存在差异,因此,在形成所述第一马赛克区域21、第二马赛克区域22之后,判断所述第一马赛克区域21、第二马赛克区域22的对位精度大小。
S202:将构成所述第二马赛克区域22的最小单元设计成特殊图案作为标记;
可通过在所述第二马赛克区域22的最小单元上开设凹槽24以形成特殊图案,使得构成所述第一马赛克区域21的最小单元的图案与构成所述第二马赛克区域22的最小单元的图案具有明显的区别,能够在拼接完成之后,清楚地辨认出对位精度较差的马赛克区域的具体位置。所述作为标记的特殊图案并不限于开设凹槽这一种方法,只需将所述第二马赛克区域22的最小单元设计成能够清晰辨认的图案,且并不影响所述第二马赛克区域22的对位精度即可满足要求。
S203:将所述第一马赛克区域21与所述第二马赛克区域22进行拼接叠加,形成第三马赛克区域23;
分别利用所述第一马赛克区域21与所述第二马赛克区域22的图案进行两次光罩后完成拼接,从而形成第三马赛克区域23。由于存在对位精度较差的马赛克区域,因此,所形成的第三马赛克区域23并不是所需要的理想图案。
S204:根据所述特殊图案进行辨认,以区分所述第三马赛克区域23中的所述第一马赛克区域21、第二马赛克区域22的相对位置;
如图10所示为经过叠加得到的一种马赛克拼接图案局部放大图,由于所述第一马赛克区域21的最小单元的图案与所述第二马赛克区域22的最小单元的图案存在明显差别,因此在叠加起来第三马赛克区域23,即得到的马赛克拼接图案中可清楚的辨认区分哪些图形是属于所述第一马赛克区域21,哪些是属于所述第二马赛克区域22。如图10所示,在最小单元上存在所述凹槽24的图形属于所述第二马赛克区域22,在最小单元上不存在所述凹槽24的图形属于所述第一马赛克区域21。
S105:对所述第三马赛克区域23中的所述第一马赛克区域21的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
在马赛克图案拼接过程中,由于对位精度的差异,可能导致某一块马赛克区域出现对位精度较差的情况,因此,需要对辨认出的对位精度较差的马赛克区域的拼接位置进行补值,若所述第一马赛克区域21的对位精度较差,则对辨认出的进行标记的所述第一马赛克区域21进行补值;若所述第二马赛克区域12的对位精度较差,则对辨认出的未进行标记的所述第二马赛克区域22进行补值。从而使拼接形成的所述第三马赛克区域23的图案快速调整为理想的条纹状图案,最终形成显示面板的马赛克区域,以提高生产效率,进一步减轻和改善马赛克拼接Mura现象。
本揭示提供一种用于马赛克拼接的快速补值方法,在不增加额外制程和设备的条件下,通过设计特殊的马赛克图案,可在马赛克拼接精度较差的情况下实现快速调整补值,确保显示效果的同时,改善拼接Mura现象,提高生产效率,降低液晶面板的制作工艺和生产成本。
综上所述,虽然本揭示已以优选实施例揭露如上,但上述优选实施例并非用以限制本揭示,本领域的普通技术人员,在不脱离本揭示的精神和范围内,均可作各种更动与润饰,因此本揭示的保护范围以权利要求界定的范围为准。
Claims (18)
- 一种用于马赛克拼接的快速补值方法,其中包括以下步骤:S101:形成第一马赛克区域、第二马赛克区域,所述第一马赛克区域与所述第二马赛克区域的对位精度存在差异;S102:将构成所述第一马赛克区域的最小单元设计成特殊图案作为标记;S103:将所述第一马赛克区域与所述第二马赛克区域进行拼接叠加,形成第三马赛克区域;S104:根据所述特殊图案进行辨认,以区分所述第三马赛克区域中的所述第一马赛克区域、第二马赛克区域的相对位置;S105:对所述第三马赛克区域中辨认出的对位精度较差的马赛克区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
- 根据权利要求1所述的用于马赛克拼接的快速补值方法,其中所述第一马赛克区域与所述第二马赛克区域的图案互补。
- 根据权利要求2所述的用于马赛克拼接的快速补值方法,其中在形成所述第一马赛克区域、所述第二马赛克区域之后,判断所述第一马赛克区域、所述第二马赛克区域的对位精度大小。
- 根据权利要求1所述的用于马赛克拼接的快速补值方法,其中所述步骤S102中通过在所述第一马赛克区域的最小单元上开设凹槽以形成所述特殊图案。
- 根据权利要求1所述的用于马赛克拼接的快速补值方法,其中所述步骤S103中分别利用所述第一马赛克区域与所述第二马赛克区域的图案进行两次光罩后完成拼接。
- 根据权利要求1所述的用于马赛克拼接的快速补值方法,其中所述步骤S105中最终形成的马赛克区域的图案为条纹状。
- 一种用于马赛克拼接的快速补值方法,其中包括以下步骤:S101:形成第一马赛克区域、第二马赛克区域;S102:将构成所述第一马赛克区域的最小单元设计成特殊图案作为标记;S103:将所述第一马赛克区域与所述第二马赛克区域进行拼接叠加,形成第三马赛克区域;S104:根据所述特殊图案进行辨认,以区分所述第三马赛克区域中的所述第一马赛克区域、第二马赛克区域的相对位置;S105:对所述第三马赛克区域中辨认出的对位精度较差的马赛克区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
- 根据权利要求7所述的用于马赛克拼接的快速补值方法,其中所述第一马赛克区域与所述第二马赛克区域的图案互补。
- 根据权利要求8所述的用于马赛克拼接的快速补值方法,其中在形成所述第一马赛克区域、所述第二马赛克区域之后,判断所述第一马赛克区域、所述第二马赛克区域的对位精度大小。
- 根据权利要求7所述的用于马赛克拼接的快速补值方法,其中所述步骤S102中通过在所述第一马赛克区域的最小单元上开设凹槽以形成所述特殊图案。
- 根据权利要求7所述的用于马赛克拼接的快速补值方法,其中所述步骤S103中分别利用所述第一马赛克区域与所述第二马赛克区域的图案进行两次光罩后完成拼接。
- 根据权利要求7所述的用于马赛克拼接的快速补值方法,其中所述步骤S105中最终形成的马赛克区域的图案为条纹状。
- 一种用于马赛克拼接的快速补值方法,其特征在于,包括以下步骤:S201:形成第一马赛克区域、第二马赛克区域;S202:将构成所述第二马赛克区域的最小单元设计成特殊图案作为标记;S203:将所述第一马赛克区域与所述第二马赛克区域进行拼接叠加,形成第三马赛克区域;S204:根据所述特殊图案进行辨认,以区分所述第三马赛克区域中的所述第一马赛克区域、所述第二马赛克区域的相对位置;S205:对所述第三马赛克区域中的辨认出的对位精度较差的马赛克区域的拼接位置进行补值,从而最终形成显示面板的马赛克区域。
- 根据权利要求13所述的用于马赛克拼接的快速补值方法,其中所述第一马赛克区域与所述第二马赛克区域的图案互补。
- 根据权利要求14所述的用于马赛克拼接的快速补值方法,其中在形成所述第一马赛克区域、所述第二马赛克区域之后,判断所述第一马赛克区域、所述第二马赛克区域的对位精度大小。
- 根据权利要求13所述的用于马赛克拼接的快速补值方法,其中所述步骤S202中的所述特殊图案可为凹槽。
- 根据权利要求13所述的用于马赛克拼接的快速补值方法,其中所述步骤S203中分别利用所述第一马赛克区域与所述第二马赛克区域的图案进行两次光罩后完成拼接。
- 根据权利要求13所述的用于马赛克拼接的快速补值方法,其中所述步骤205中最终形成的马赛克区域的图案为条纹状。
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811395328.2A CN109375404B (zh) | 2018-11-22 | 2018-11-22 | 用于马赛克拼接的快速补值方法 |
| CN201811395328.2 | 2018-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2020103317A1 true WO2020103317A1 (zh) | 2020-05-28 |
Family
ID=65377554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CN2019/070840 Ceased WO2020103317A1 (zh) | 2018-11-22 | 2019-01-08 | 用于马赛克拼接的快速补值方法 |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN109375404B (zh) |
| WO (1) | WO2020103317A1 (zh) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005338621A (ja) * | 2004-05-28 | 2005-12-08 | Hoya Corp | ムラ欠陥検査方法及び装置、並びにフォトマスクの製造方法 |
| JP2006235258A (ja) * | 2005-02-25 | 2006-09-07 | Toppan Printing Co Ltd | フォトマスク及び液晶表示装置用カラーフィルタの製造方法 |
| CN106405891A (zh) * | 2016-10-24 | 2017-02-15 | 深圳市华星光电技术有限公司 | 一种马赛克区域拼接方法及系统 |
| CN106444106A (zh) * | 2016-10-24 | 2017-02-22 | 深圳市华星光电技术有限公司 | 一种马赛克区域拼接方法及系统 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010113195A (ja) * | 2008-11-07 | 2010-05-20 | Tokyo Electron Ltd | 露光用マスク及び半導体装置の製造方法 |
| US20120244459A1 (en) * | 2011-03-24 | 2012-09-27 | Nanya Technology Corp. | Method for evaluating overlay error and mask for the same |
| CN103605263B (zh) * | 2013-09-17 | 2015-11-25 | 京东方科技集团股份有限公司 | 一种检测彩膜基板拼接曝光误差的方法以及掩膜板 |
| CN104035275A (zh) * | 2014-05-21 | 2014-09-10 | 京东方科技集团股份有限公司 | 一种掩模板 |
| CN105988302B (zh) * | 2015-02-04 | 2018-11-16 | 中芯国际集成电路制造(上海)有限公司 | 用于调平验证测试的方法及校准光刻投影设备的方法 |
| CN104808434B (zh) * | 2015-05-21 | 2019-08-02 | 合肥京东方光电科技有限公司 | 基板、掩膜板及显示装置、对位方法 |
-
2018
- 2018-11-22 CN CN201811395328.2A patent/CN109375404B/zh active Active
-
2019
- 2019-01-08 WO PCT/CN2019/070840 patent/WO2020103317A1/zh not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005338621A (ja) * | 2004-05-28 | 2005-12-08 | Hoya Corp | ムラ欠陥検査方法及び装置、並びにフォトマスクの製造方法 |
| JP2006235258A (ja) * | 2005-02-25 | 2006-09-07 | Toppan Printing Co Ltd | フォトマスク及び液晶表示装置用カラーフィルタの製造方法 |
| CN106405891A (zh) * | 2016-10-24 | 2017-02-15 | 深圳市华星光电技术有限公司 | 一种马赛克区域拼接方法及系统 |
| CN106444106A (zh) * | 2016-10-24 | 2017-02-22 | 深圳市华星光电技术有限公司 | 一种马赛克区域拼接方法及系统 |
Non-Patent Citations (1)
| Title |
|---|
| PENG, JIANZHONG ET AL.: "TFT-LCD Color Filter Large Screen Splicing Technology", TECHNOLOGY INNOVATION AND APPLICATION, 31 December 2017 (2017-12-31), pages 18 - 19, ISSN: 2095-2945 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109375404A (zh) | 2019-02-22 |
| CN109375404B (zh) | 2020-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103366648B (zh) | 基板、显示屏、拼接屏及拼接屏的对位方法 | |
| US10241361B2 (en) | Color film substrate, manufacturing method thereof and display device | |
| US9823567B2 (en) | Manufacturing method of mask plate for shielding during sealant-curing | |
| CN103092005B (zh) | 玻璃基板的曝光对位方法 | |
| US20170363922A1 (en) | Liquid crystal display panel, the manufacturing method thereof and a display apparatus | |
| US9989682B2 (en) | Mask plate, method for manufacturing color film substrate and color film substrate | |
| CN106125517B (zh) | 显示基板曝光方法 | |
| CN111025842B (zh) | 掩膜板、拼接曝光方法及基板 | |
| US20170115526A1 (en) | Color resist mask sheet and method of use thereof | |
| US10365523B2 (en) | Display panel and manufacturing method based on BOA technology | |
| JP2007017465A (ja) | 液晶表示装置の製造方法 | |
| US20150185379A1 (en) | Method for manufacturing color filter substrate, color filter substrate and transflective liquid crystal display device | |
| CN104777667A (zh) | 一种显示面板和显示装置 | |
| WO2020143098A1 (zh) | 像素结构及液晶显示面板 | |
| CN105068304B (zh) | 彩膜基板及其制作方法 | |
| WO2019128959A1 (zh) | 液晶显示面板及其制作方法 | |
| US9430976B2 (en) | Detection system and method for automatically adjusting gray scale | |
| WO2018223690A1 (zh) | 曲面显示面板的制作方法、曲面显示面板及曲面显示装置 | |
| CN102736405B (zh) | 一种光罩及其修正方法 | |
| CN110343999A (zh) | 掩模装置及其制造方法、蒸镀方法 | |
| CN104778904A (zh) | 一种显示面板母板及其制备方法 | |
| CN100465672C (zh) | 一种彩色滤光片结构及其制造方法 | |
| CN105116601A (zh) | 彩膜基板及其制作方法 | |
| CN104377209A (zh) | 薄膜晶体管阵列基板及液晶显示装置 | |
| WO2020103317A1 (zh) | 用于马赛克拼接的快速补值方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 19887645 Country of ref document: EP Kind code of ref document: A1 |
|
| NENP | Non-entry into the national phase |
Ref country code: DE |
|
| 122 | Ep: pct application non-entry in european phase |
Ref document number: 19887645 Country of ref document: EP Kind code of ref document: A1 |