WO2020095778A1

WO2020095778A1 - Slit nozzle for liquid

Info

Publication number: WO2020095778A1
Application number: PCT/JP2019/042501
Authority: WO
Inventors: 邦明須之内
Original assignee: スプレーイングシステムスジャパン合同会社
Priority date: 2018-11-09
Filing date: 2019-10-30
Publication date: 2020-05-14
Also published as: TWI704965B; JP2020075223A; TW202023689A; JP7014697B2

Abstract

This slit nozzle for liquid is provided with: a plate-shaped laterally elongated first plate (2) having a predetermined thickness; and a second plate (3) opposed and joined to the inner surface (2a) of the first plate (2). The second plate (3) has formed at the center section thereof a hole-like inlet section (5a) for supplying a liquid agent to the inside. The inner surface (2a) of the first plate (2) has formed therein a recessed storage section (2b) for storing the liquid agent supplied from the inlet section (5a). The storage section (2b) has a substantially dogleg shape disposed laterally in the longitudinal direction of the second plate 2. The storage section (2b) has tapered upper sides (a) tilted from the center section toward ends (c) thereof, and has tapered lower sides (b) located below the upper sides (a) and tilted more gently than the upper sides (a). The ends (c) of the upper sides (a) and ends (c) of the lower sides (b) are joined, the width of the storage section (2b) decreases from the center section towards the ends (c), and the depth of the storage section (2b) is formed to become smaller toward the ends (c). The ends (c) has tapered sections (2d) which extend from the ends (c) toward ends (4a) of orifices (4) formed at front ends located between the first and second plates (2, 3) and which guide the liquid agent so that the liquid agent flows toward the ends (4a).

Description

Liquid slit nozzle

The present invention relates to a liquid slit nozzle suitable for use when applying a liquid having a relatively high viscosity, such as applying a liquid agent to the surface of a road.

Conventionally, for example,

Patent Documents

1 and 2 as shown below exist as slit nozzles for applying a treatment liquid to the surface of an object. ‥

Patent No. 4619139 Patent No. 4315787

The slit nozzle of Patent Document 1 is a slit nozzle in which two nozzle halves are coupled to each other and a slit-shaped discharge port that opens downward is formed in one of the two nozzle halves. A first storage part for the liquid is formed, and a second storage part, which is shallower than the first storage part, is formed on the lower side continuous with the first storage part based on the thickness direction of the nozzle half, and the second storage part is formed. A flat surface that forms an orifice whose lower end is a slit-shaped discharge port is provided between the other half of the nozzle and the first storage part at the center in the width direction of the half of the nozzle. The portion communicating with the formed coating liquid supply hole is the highest, and is formed in a mountain shape so that both ends are low, and the lower side of the second storage part is the lowest in the widthwise central part of the nozzle half and goes to both ends. The V-shaped inclined surface Further starting point of both ends of the V-shaped inclined surface, when the lower side of the second reservoir portion in a straight line, and is configured to flow down the amount of the most coating solution is increased.

In Patent Document 1, as shown in FIGS. 1 and 2, the coating liquid supply hole 6 is provided in the central portion of the upper surface of the slit nozzle, the air vent hole 7 is provided, and the first storage portion 4, Two storage parts 5 are provided, and spraying is performed from the slit-shaped discharge port 10 at the lower end.

In addition, as shown in FIG. 3, a V-shaped inclined surface 8 is formed in the lower part of the second storage part 5, and as shown in FIG. The structure is

An apparatus having a slit nozzle of Patent Document 2 includes a holding table that holds a substrate, a slit nozzle that discharges a predetermined processing liquid, and a moving unit that moves the slit nozzle in a substantially horizontal direction along the surface of the substrate. A processing liquid supply means for supplying the predetermined processing liquid from a predetermined processing liquid supply source to the slit nozzle,
The predetermined treatment is performed by moving the slit nozzle in the substantially horizontal direction to cause the slit nozzle to scan the surface of the substrate and discharging the predetermined treatment liquid filled in the slit nozzle. A substrate processing apparatus for applying a liquid to a substrate, wherein the slit nozzle comprises:
The treatment liquid supply means is connected, and a supply port for supplying the predetermined treatment liquid to the manifold of the slit nozzle is provided at at least one side end portion of both side end portions in the longitudinal direction of the manifold. Cage,
A discharge port for discharging the gas existing in the slit nozzle and the treatment liquid mixed with the gas to the outside of the slit nozzle is provided at the upper end of the manifold, and the discharge port is more than the supply port. It is installed in a high position,
A discharge path connected to the discharge port,
A detection unit that is disposed in the middle of the discharge path and detects a filling state and a gas mixing state of the processing liquid in the discharge path,
Judgment means for judging the filling degree of the predetermined processing liquid into the slit nozzle, and judging the degree of mixing of gas into the predetermined processing liquid,
Further equipped with,
The discharge path includes an optically transparent bent portion bent in a U shape, a sensing portion including a vertex portion in which the bent portion faces upward, and Until reaching the sensing unit, the apex is provided at the highest position,
The detection means is disposed in the vicinity of the bent portion, emits a first light beam to the apex portion, and emits a second light beam from the apex portion with irradiation of the first light beam. To receive
The determining means is configured to determine the filling degree and the mixing degree of the gas based on the variation of the light intensity of the second light beam received by the detecting means.

The device of Patent Document 2 is a large-scale facility as a whole. Further, as shown in FIGS. 3 and 4 of Patent Document 2, the slit nozzle 4 has a structure in which supply ports 46a and 46b are provided at end portions in the length direction. In addition, an air bleeder 47 for gas mixed in the supply liquid supplied to the inside is provided, and the gap 41a in the slit nozzle is linear and sprayed from the lower end.

The structures of

Patent Documents

1 and 2 are more complicated than the product of the present invention described later.

Also, as shown in Fig. 7, the spray from the lower end of the slit nozzle does not spread due to the contracted flow, and the spray becomes a tapered spray. For this reason, even if the spray nozzles are connected to increase the length, there is a problem in that the spray between the connections is interrupted, unevenness occurs, and a continuous spray cannot be obtained.

The present invention has been proposed in view of the above, and an object thereof is to spray a wide range even when used as a single item, and to connect a spray nozzle in a long length to spray a wider range. Even if it is, the spray nozzle for liquids which does not have a discontinuity of spray between connection and has reduced maintenance is also provided.

The liquid slit nozzle according to the first aspect of the present invention is a plate-shaped first plate 2 having a predetermined thickness and a horizontally long first plate 2, and an inner surface 2a of the first plate 2 that faces and is joined to the first plate 2. And a plate 3 of 2,
A hole-shaped inflow portion 5a for supplying a liquid agent therein is formed in the center of the second plate 3, and an inner surface 2a of the first plate 2 has a concave shape for storing the liquid agent from the inflow portion 5a. A storage portion 2b is formed, and the storage portion 2b has a substantially doglegged shape arranged laterally along the lengthwise direction of the second plate 2 and is inclined from the central portion toward each end portion c. Has a tapered upper side a and a tapered lower side b located below the upper side a and gently inclined from the upper side a, and the ends c of the upper side a and the lower side b are joined, and The width of the storage portion 2b is narrower from the central portion toward each end portion c, the depth of the storage portion 2b is formed shallower toward each end portion c, and the end portion c extends from the end portion c to the first portion. , Extending toward the end 4a of the orifice 4 formed at the tip between the

second plates

2 and 3, Wherein the tapered portion 2d which guide to flow towards the agent to the end portion 4a is formed.
According to a second aspect of the present invention, in the liquid slit nozzle according to the first aspect, a circular cross-section that forms a flow path 8 below the storage portion 2b formed on the inner surface 2a of the first plate 2 is used. It is characterized in that the protrusions 9 are provided at appropriate intervals, and the protrusion 2c for forming an orifice is formed in the lower portion thereof.

According to the first aspect of the present invention, the storage portion 2b for flowing the liquid agent toward the orifice 4 is formed on the inner surface 2a of the first plate 2, and the shape of the storage portion 2b is narrowed toward the end portion c. A taper portion 2d for spray diffusion is formed which is tapered and has the deepest central portion of the storage portion 2b, is shallower toward the end portion c, and guides the liquid agent flowing to the end portion c to the orifice end portion 4a. Therefore, the liquid agent is discharged from the orifice 4 while maintaining the fluid velocity, and the spray S from the orifice 4 can be spread and sprayed without contracting. In this case, the spray can be spread even for a high-viscosity liquid agent. Therefore, even if the liquid slit nozzles are connected in the length direction, the spray is not interrupted at the connecting portion, and the spray can be performed uniformly over the entire area. Further, this reduces liquid pools and accumulations, which dramatically reduces maintenance.
According to the second aspect of the present invention, the inner surface 2a of the first plate 2 is provided with the projection 9 for forming a flow path between the inner surface 2a of the first plate 2 and the inner surface of the second plate 3 which is opposed to the inner surface 2a. Since the protrusion 2c for forming the orifice is formed, the gap between the orifices 4 becomes constant, and it becomes unnecessary to adjust the dimensions of the orifice 4 when assembling.

1 is an external perspective view of a liquid slit nozzle according to an embodiment of the present invention. FIG. Explanatory drawing which looked at the outer surface side of one plate which comprises the slit nozzle for liquids from the plane. The perspective view of the left half of the other plate. The right half perspective view. Explanatory drawing which shows the spray state in this invention product. Explanatory drawing which shows the spray state in a conventional product.

A preferred embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows an external perspective view of a liquid slit nozzle 1 according to an embodiment of the present invention. In the illustrated state, the liquid slit nozzle 1 has a substantially plate-shaped first plate 2 that is long in the lateral direction and has a predetermined thickness, and a substantially same shape that is integrated with the first plate. Second plate 3 of In the illustrated state, the liquid slit nozzle 1 is shown obliquely, but it can be seen that the orifice 4 is formed at the V-shaped tip portions of the first and

second plates

2 and 3. As illustrated. The orifice 4 is formed over the entire first and second lengthwise directions.

In FIG. 1, 5 is a hole for liquid agent supply formed in the substantially central portion of the

second plate

3, 6 is a fixing screw inserted from the outer surface side of the

second plate

3, and 7 is another member ( It is a mounting hole for (not shown).

FIG. 2 shows a side cross-section of the central portion in the longitudinal direction of the integrated first and

second plates

2 and 3.
The integration is performed by joining the inner surface 2a of the first plate 2 and the inner surface 3a of the second plate 3 to each other by facing each other and joining the ends of the fixing screws 5 inserted from the second plate 3 side to the first surface. It is screwed and coupled to the fixed screw receiving portion 6a on the plate 2 side. The hole 5 provided in the substantially central portion of the second plate 3 serves as a liquid agent inflow portion 5a in the second plate 3, and the liquid agent is supplied to the inside.
The inflow part 5a communicates with a concave storage part 2b formed on the first plate inner surface 2a side. The concave storage part 2b has the deepest central portion. Then, the liquid agent that has entered the reservoir portion 2b from the inflow portion 5a is sprayed to the outside from the orifice 4 through the flow path 8.

The flow path 8 is formed by projections 9 having a substantially circular cross section, which are provided at appropriate positions on the lower portion of the inner surface 2a of the first plate 2 along the length direction at appropriate intervals. That is, the flow path 8 is formed by joining the tip end surfaces of the protrusions 9 to the inner surface 3a of the second plate 3 which is arranged to face each other.

The projection size of the projection 9 is arbitrarily determined according to the purpose and application of the liquid slit nozzle 1, and the gap width of the flow path 8 is set. The protrusion 9 may be provided on the inner surface 3a side of the second plate 3 so as to protrude.

The gap of the orifice 4 is narrower than the gap of the flow path 8. The gap of the orifice 4 is formed by the protrusion 2b formed on the lower portion of the inner surface of the first plate 2 being arranged close to the inner surface 3a of the second plate 3 which is oppositely arranged. As a result, the gap between the orifices 4 becomes constant, so that it is not necessary to adjust the dimensions of the orifices 4 during assembly.

FIG. 3 is a front view of the outer surface of the second plate 3. As described above, the holes 5 for supplying the liquid agent are provided in substantially the center of the third plate 3.

The first plate 2 is coupled to the inner surface side of the second plate 3, and the liquid agent supplied via the inflow part 5a is supplied to the concave storage part 2b formed on the second plate 2 side.

The storage portion 2b has a substantially doglegged shape arranged laterally along the lengthwise direction of the first plate 2, and has an upper side a which is tapered from the central portion toward each end portion c, It is formed on the lower side of the upper side a and is formed by a lower side b that is gently inclined with respect to the upper side a, and the ends c of the upper side a and the lower side b are connected in an arc shape. The upper side a is inclined downward toward the end portion c, and the width of the upper side a and the lower side b is tapered toward the end portion c. Further, the concave depth of the storage portion 2b is formed so that the flow path depth becomes gradually shallower toward the end portion c.

4 shows a left half of the first plate 2, and FIG. 5 shows a perspective view of a part of the right half of the first plate 2.

Below the both sides of the inner surface of the first plate 2, stepwise tapered portions for spray diffusion 2d are formed. Each taper portion 2d is a step portion that is cut in a concave shape toward the inside, the upper end portion thereof is located at the end portion c of the storage portion 2b, and the lower end portion thereof projects below the inner surface of the first plate 2. It is located above the orifice-forming projection 2 c provided and serves as a guide for flowing the liquid agent flowing from the central portion of the reservoir 2 b toward the end c toward the end 4 a of the orifice 4.

In the operation, as shown by the arrow in FIG. 3, the liquid agent supplied from the inflow portion 5a to the storage portion 2b flows from the lower side b of the storage portion 2b to the orifice 4 side, and a part thereof is at the end portion c of the storage portion 2b. Flows toward. In this case, since the storage portion 2b is formed in a tapered shape and is narrow and inclined toward the end portion c, the fluid that is the liquid agent is discharged while the fluid velocity of the liquid agent is maintained, and the spray S is Sa. As shown in, it can be sprayed to the outside in a spread state without contraction, and even when used alone, it can spray a wider range than conventional ones.

The liquid agent can be sprayed uniformly over the entire area of the orifice 4, and the decrease in the speed of the liquid agent to the end portion 4a can be suppressed, so that the liquid agent is prevented from accumulating and accumulating. Due to the reduction of the liquid pool, maintenance frequency is drastically reduced.

Further, since the spray S does not contract and spreads to the outside, even if a plurality of liquid slit nozzles 1 are connected in the longitudinal direction by an appropriate connecting means for lengthening, the spray S between the connections is not interrupted and long. It can be sprayed continuously and evenly over the entire length.

In addition, since the depth of the storage portion 2b is also gradually reduced toward the end portion c, in combination with the fact that the width is gradually narrowed toward the end portion c, discharge is performed while maintaining the fluid velocity of the liquid agent. You can

FIG. 6 is a conceptual diagram showing the state of the spray S of the product of the present invention. The spray state is shown with a slit length of 100 mm, a slit width of 0.5 mm, and a water pressure of 0.03 MPa. Unlike the conventional product shown in FIG. 7, the spray is spread without being contracted.

The present invention is not limited to the application of a liquid agent for road construction, and can be applied to various fields such as food application, electronics industry, development, etching, chemical coating, cleaning rinse, pigment, coating of glaze, cleaning, and coating. In addition, it is particularly suitable for use with a liquid having a relatively high viscosity.

Examples of the high-viscosity liquid agent include chocolate in the food industry, a developing solution used in the electronics industry, an etching solution, a moisture-proof coating solution, and an adhesive in other cases. When such a liquid agent is used, the spray does not spread especially when the nozzle is used, but the spray can be spread according to the present invention.

1 Liquid Slit Nozzle 2 First Plate 2a First Plate Inner Surface 2b Reservoir 2c Projection 2d Tapered Part 3 Second Plate 3a Second Plate Inner Surface 4 Orifice 4a Orifice End 5 Hole 5a Inlet 6 Fixed screw 6a Fixed screw receiver 7 Mounting hole 8 Flow path 9 Projection

Claims

A horizontally elongated first plate 2 having a predetermined thickness, and a second plate 3 facing and joined to the inner surface 2a of the first plate 2,
A hole-shaped inflow portion 5a for supplying a liquid agent therein is formed in the center of the second plate 3, and an inner surface 2a of the first plate 2 has a concave shape for storing the liquid agent from the inflow portion 5a. A storage portion 2b is formed, and the storage portion 2b has a substantially doglegged shape arranged laterally along the lengthwise direction of the second plate 2 and is inclined from the central portion toward each end portion c. Has a tapered upper side a and a tapered lower side b located below the upper side a and gently inclined from the upper side a, and the ends c of the upper side a and the lower side b are joined, and The width of the storage portion 2b is narrower from the central portion toward each end portion c, the depth of the storage portion 2b is formed shallower toward each end portion c, and each end portion c extends from the end portion c to the first portion. , Extending toward the end 4a of the orifice 4 formed at the tip between the second plates 2 and 3, Liquid slit nozzle, wherein the tapered section 2d which guide to flow towards the end portion 4a is formed a.
The liquid slit nozzle according to claim 1, wherein a protrusion 9 having a circular cross-section that forms a flow path 8 is provided below the storage portion 2b formed on the inner surface 2a of the first plate 2 at appropriate intervals. And a slit 2c for forming an orifice is formed in the lower portion of the slit slit for liquid.