KR101188723B1 - Apparatus for injecting fluid - Google Patents

Abstract

The present invention relates to a fluid injection device that can ensure uniformity in the fluid flow toward the final outlet end and thereby maximize the cleaning effect.

To this end, the present invention, the inlet formed on one side of the upper, and connected to the inlet, the fluid introduced through the inlet has a horizontal fluid flow primarily after the inflow, and secondly after the horizontal fluid flow It provides a fluid injection device comprising a clearance inlet with a vertical fluid flow in the direction of the outlet end.

Fluid injectors, fluids, flow stagnation points

Description

Fluid injection device {APPARATUS FOR INJECTING FLUID}

1 is a diagram illustrating a general photo pre-cleaning process.

2A to 2C are cross-sectional views showing a perspective view and an internal shape of a conventional aqua knife described in the final rinse process of FIG.

Figure 3 is a graph showing the non-uniformity of the fluid flow in the gap inlet when using the conventional aqua knife shown in Figures 2a to 2c.

4A to 4C are diagrams illustrating non-uniformity of fluid flow in a buffer portion when using a conventional aqua knife.

5A and 5B are views illustrating the generation of wake and flow stagnation points according to an elliptic shape of a gap inlet hole in a conventional aqua knife.

6A to 6C are diagrams illustrating an aqua knife according to a first embodiment of the present invention.

7A to 7C are diagrams illustrating an aqua knife according to a second embodiment of the present invention.

8A and 8B illustrate an aqua knife according to a third embodiment of the present invention.

DESCRIPTION OF THE RELATED ART [0002]

200, 600, 700: aqua knife 210, 610, 710: inlet

200a, 600a: main body 200b, 600b, 800b: support part

230, 630, 730: clearance inlet 630a: clearance inlet body

631: horizontal clearance inlet 631a: horizontal clearance inlet body

632: vertical clearance inlet 632a: vertical clearance inlet body

The present invention relates to a fluid injector, and more particularly, to a fluid injector capable of ensuring uniformity in the fluid flow in the direction of the final outlet end and thereby maximizing the cleaning effect.

In flat panel display (FPD) manufacturing process such as LCD (Liquid Crystal Display), contamination of substrate or film surface and particles are removed in advance to prevent defects, or to enhance adhesion of thin film to be deposited and improvement of FPD characteristics. Hazardous cleaning is performed.

The configuration of the scrubber used for the cleaning is slightly different depending on the main processes such as the deposition process, the etching process, the developing process, the strip process, and the like.

1 is a diagram illustrating a general photo pre-cleaning process.

As shown in FIG. 1, the configuration of the photo pre-cleaner 100 includes an in-conveyor 10, an excimer UV 20, a roll brush 30, and a bubble jet 40. ), A final rinse 50, an air knife 60, and an out conveyor 70.

Here, the photo pre-cleaning process according to each component of the photo pre-cleaner 100 as follows.

First, the in-conveyor 10 is an area where the substrate 1 is seated in order to transfer the substrate 1 to the cleaning process, and pre-cleans the photo according to an in-line process.

Thereafter, an Excimer UV (Ultra Violet) process 20 is performed to remove organic substances present on the surface of the substrate 1.

Here, an excimer UV lamp is used to irradiate a surface of the substrate 1 with ultraviolet light of a predetermined nm to separate oxygen in the air and excitation oxygen of ozone, thereby chemically bonding the organic material on the substrate to the atmosphere. Since it volatilizes, the organic substance which exists on the surface of the board | substrate 1 is removed.

Thereafter, the roll brush 30 process of removing particles deposited on the surface of the substrate 1 by applying a physical force using a brush is performed.

In addition, the roll brush 30 process is effective for removing particles and organics having a relatively large size.

In addition, in consideration of the warpage of the large-sized substrate 1, roll brushes are provided to face each other up and down.

In addition, the roll brush process is not always used, It is used or not determined by a process.

For example, cleaning is performed through a roll brush process where the flattening pattern is made, but the roll brush process is not used where the pattern form may damage the pattern.

Thereafter, water droplets are generated by mixing the liquid and gas with the pressure of the high pressure pump in the nozzle, and the water droplets are accelerated and sprayed by a high speed gas flow to remove foreign substances on the surface by the elasticity of the fluid on the substrate 1. The bubble jet 40 process is performed.

Subsequently, the nozzle 1 is finally rinsed by performing a nozzle shower on the substrate 1, and an aqua shower which evenly sprays the fluid onto the entire surface of the substrate 1 through an aqua knife in the same area is performed. Finally, the final rinse 50 step of removing the foreign matter is performed.

Here, the final rinse 50 process is disposed at the rear end of the cleaning process, by spraying at an angle during aqua shower to generate a flow of fluid on the substrate 1, thereby removing the retention particles on the substrate 1. There is.

Thereafter, an air knife 60 process of completely removing and drying the water (Wet) remaining on the substrate 1 is performed.

Thereafter, all of the photo pre-cleaning processes are finished, and the process is completed by bringing out the substrate 1 from the out conveyor 70 to the next process facility.

2A to 2C are cross-sectional views showing a perspective view and an internal shape of a conventional aqua knife described in the final rinse process of FIG.

FIG. 2A illustrates a process of cleaning the substrate 1 using the AquaKnife 200. The AquaKnife 200 uniformly fluids the entire surface of the substrate 1 through the final outlet end (outlet groove) of the lower portion. The particles are sprayed to remove particles on the substrate 1.

Figure 2b is a side cross-sectional view of the aqua knife 200, Figure 2c is a cross-sectional view showing the internal shape of the aqua knife 200, when the aqua knife 200 shown in Figure 2b is cut in the Y-Y 'direction It shows one side.

As shown in FIG. 2B and FIG. 2C, the aqua knife 200 has an inlet 210 formed on one side thereof so that the fluid injected from the fluid supply device (not shown) flows into the substrate, and one side of the inlet 210. And a chamber 220 in which fluid introduced from the inlet 210 is primarily stored.

Here, the fluid may be water (pure water) or a cleaning liquid which is typically used for cleaning.

In addition, the gap inlet 230, which is an internal passage through which the fluid temporarily stored in the chamber 220 moves, is formed in the lower portion of the chamber 220, and the fluid vertically lowered through the gap inlet 230 is formed at the final outlet end. It includes a buffer 240 that is stored secondary before outflow.

In addition, the gap inlet 230 adjusts the gap of the final outlet end and serves as an intermediate support for the entire fluid injection device.

In addition, the aqua knife 200 is configured such that the main body 200a is coupled to the support portion 200b to be supported. When cutting in the Y-Y 'direction, the cut right side is referred to as the main body 200a. This is called the support portion 200b (see FIG. 2B).

Here, the main body 200a is connected to the inlet 210 and the chamber main body 220a which is a space in which the inflowed fluid is primarily stored, and the gap inlet main body 230a through which the fluid stored in the chamber main body 220a moves. The gap inlet 230a includes a buffer body 240a in which the fluid moving on the main body is secondarily stored.

In addition, a plurality of chamber bodies 220a are formed in the main body 200a at predetermined intervals, and the diaphragm 250 protrudes by a predetermined thickness in a space between the plurality of chamber main bodies 220a and the chamber main body 220a. To form.

In addition, in order to couple the main body 200a and the support 200b, a plurality of gap coupling holes 231 are formed on the gap inlet main body 230a at predetermined intervals, and the plurality of gap coupling holes 231 are provided. Is formed to protrude on the gap inlet 230 by a predetermined thickness.

Here, the gap coupling hole 231 has an ellipse in cross section, when the long diameter (diameter) of the ellipse is a and the short diameter of the ellipse is b, the ratio is b / a = 3/5. have.

Since the gap coupling hole 231 and the diaphragm 250 protrude on the main body 200a by a predetermined thickness, the predetermined thickness protruding when the main body 200a and the support part 200b are coupled to the gap between the final exit ends. In this case, the fluid introduced into the chamber 220 flows between the created gap spaces.

In addition, in the main body 200a, a plurality of edge holes 261 are formed in the rectangular rim 260 to be firmly coupled to the support 200b, and also on the diaphragm 250 and the gap inlet main body 230a. A plurality of diaphragm holes 251, the gap coupling hole 231 is formed.

In addition, a plurality of coupling holes (not shown) are formed symmetrically with the main body 200a on the support part 200b, and thus, a plurality of edge holes 261, diaphragm holes 251, and gap coupling holes 231. By screwing or screwing the coupling holes on the support portion 200b which are respectively symmetrical with each other, the fluid injection device 200 has a shape in which the main body 200a is coupled to the support portion 200b and supported as shown in FIG. 2B. Can be configured.

Figure 3 is a graph showing the non-uniformity of the fluid flow in the gap inlet when using the conventional aqua knife shown in Figures 2a to 2c.

Fluid introduced through the inlet of the Aquaknife is stored in the chamber once as shown in Figures 2b and 2c is distributed to the gap inlet in the Z-axis direction.

That is, the fluid stored in the chamber supplies fluid to the aqua knife at a supply flow rate and a supply pressure continuously flowing from the inlet.

At this time, the fluid flowing from the inlet to the chamber is an incompressible fluid such as water (pure water) or a cleaning liquid, and the influence of the supply pressure in the inner chamber is not uniform.

As such, first, the pressure at the inlet side is higher according to the pressure of the fluid introduced into the inlet, so that the flow at the inlet side is more active. As shown in FIG. 3, the flow component at the inlet side is the flow component around the inlet side. Compared to the big trend.

In addition, since the diaphragm is formed between the chambers by the unit length in the Z-axis direction, the interaction between the inlets also greatly affects the nonuniformity of the fluid flow in each part of the gap inlet.

FIG. 3 is a graph showing the moving speed of fluid in each part along a predetermined interval in the gap inlet, and the fluid moving speed (0.8 m / s) at the inlet side at the gap inlet and the fluid movement between the surrounding parts such as the diaphragm. At speeds (0.2 m / s) there will be speed deviations of up to 0.6 m / s.

4A to 4C are diagrams illustrating non-uniformity of fluid flow in a buffer portion when using a conventional aqua knife.

4A is a view showing that vortices occur when the fluid passing through the gap inlet 230 is stored in the buffer 240, and FIG. 4B is a view of the fluid passing through the gap inlet 230 in the buffer 240. When stored and flows to the final outlet stage 270 is a view showing that there is also a flow in the Z-axis direction instead of descending only in the Y-axis direction.

Figure 4c is a graph showing the flow component (moving speed) of the fluid in the Y-axis direction in accordance with the distance traveled in the Z-axis direction in the buffer of the conventional Aquaknife, the standard deviation is about 0.12 (m / s) Have

5A and 5B are views illustrating the generation of wake and flow stagnation points according to an elliptic shape of a gap inlet hole in a conventional aqua knife.

In the conventional aquaknife, the gap adjustment of the final exit end has been made by using an ellipse-shaped gap coupling hole 231 and a diaphragm having a predetermined thickness on the gap inlet body 230a.

Here, when the cross section of the gap coupling hole 231 has an elliptic shape, it greatly affects the internal flow when the fluid moves on the gap inlet body 230a at high speed.

That is, when the fluid flows out of the elliptic shape of the gap coupling hole 231, as shown in FIGS. 5A and 5B, a wake and a flow stagnation point are generated at the rear surface of the elliptic gap coupling hole 231.

As the Reynolds number increases, the wake becomes unstable and regular vortex (carman vortex) occurs in the rear, and when the Reynolds number becomes larger, the vortex generation becomes violent and becomes turbulent. This will have a big impact and will have a big negative impact on the uniformity of AquaKnife as a whole.

As described above, in the case of using the conventional aquaknife, since uniform fluid is not discharged at the gap inlet, the buffer, and the final outlet end, the aquaknife has a nonuniformity in the fluid flow during the fluid injection onto the substrate. Will be imported.

This ultimately results in poor cleaning of the substrate, causing problems with FPD performance.

The present invention has been made in order to solve the above problems, to form an L-shaped inlet inlet as an internal moving passage of the fluid, through which the dispersion using the gap in the existing chamber form in the fluid flow to the final outlet end It is an object of the present invention to provide a fluid ejection apparatus which can improve the nonuniformity of the fluid flow by converting the form.

It is also an object of the present invention to provide a fluid injecting apparatus configured to have a lateral concentrated flow inducing structure having an acute angle close to a right angle of the final outlet end, to ensure the line of movement of the fluid and to stabilize the main flow component of the fluid.

In addition, to provide a fluid injection device that can prevent the generation of wake and flow stagnation in the rear of the gap coupling hole by forming a gap coupling hole of the airfoil shape on the gap inlet portion for the gap adjustment and intermediate support of the final exit end. For the purpose of

In order to achieve the above object, according to an aspect of the present invention,

An inlet formed on one side of the upper portion, and connected to the inlet, the fluid introduced through the inlet has a horizontal fluid flow primarily after the inflow, and secondly perpendicular to the direction of the final outlet after the horizontal fluid flow. Provided is a fluid injection device comprising a clearance inlet with a fluid flow.

In addition, the clearance inlet is a horizontal clearance inlet, which is a horizontal movement passage of the fluid introduced from the inlet, and a vertical clearance inlet, which is a vertical movement passage of the fluid connected to one side of the horizontal clearance inlet, to move the fluid to the final outlet end. It is characterized by including a wealth.

In addition, the horizontal clearance inlet is connected to the inlet in the upper surface, the interior is a cavity, the side of the last outlet end side open and the side opposite the final outlet end is closed, the movement of the fluid introduced through the inlet Direction is made towards the final outlet end.

In addition, a predetermined thickness of the gap coupling hole formed on the vertical gap inlet is characterized in that it corresponds to the gap of the final outlet end.

In addition, the gap coupling hole is characterized in that the cross section of the airfoil form.

Further, when the long radius of the head of the airfoil is d, the short diameter is e, and the long radius of the tail of the airfoil is c, the configuration of the clearance coupling hole is (e / 2) / d = 3 / 5 or less, c / (e / 2) / d = 30 or more characterized in that the airfoil form.

In addition, the exit angle of the final outlet end is characterized in that 70 ~ 90 °.

Another preferred embodiment,

One side of the upper portion is connected to the inlet, and the fluid introduced through the inlet has a horizontal fluid flow primarily after the inflow, and after the horizontal fluid flow secondly has a vertical fluid flow in the direction of the final outlet end; It provides a fluid injection device comprising a support portion coupled to the main body for supporting the main body.

In addition, the main body has an upper surface connected to the inlet, the inside is a cavity, the end side in the last outlet end is opened and the side opposite the end outlet end is closed so that the flow direction of the introduced fluid toward the final outlet end When the horizontal fluid inlet body which is a horizontal movement passage of the fluid, and the horizontal fluid inlet body connected to the side of the last outlet end direction of the horizontal gap inlet body in the vertical state while supporting the horizontal gap inlet body, the horizontally moved fluid And a vertical clearance inlet body, which is a vertical movement passage of fluid for moving to a final outlet end connected to the lower part of the gap.

In addition, the outermost point in the direction opposite to the final outlet end in the inlet circular tube, and the outermost point in the direction opposite to the final outlet end in the horizontal clearance inlet body is characterized in that the same.

In addition, a plurality of body coupling holes are formed on the vertical gap inlet body at predetermined intervals.

In addition, it is characterized in that for forming a plurality of support portion coupling holes symmetrical to the plurality of body coupling holes on the support portion.

In addition, the main body coupling hole or the support coupling hole has a hole formed at the center thereof, and a portion surrounding the hole protrudes by a predetermined thickness on the main body or the supporting portion, and the predetermined predetermined thickness is the final exit end. Characterized in that corresponds to the gap.

In addition, the body coupling hole or the support portion coupling hole is characterized in that the cross section of the airfoil form.

Further, when the long radius of the head of the airfoil is d, the short diameter is e, and the long radius of the tail of the airfoil is c, the configuration of the clearance coupling hole is (e / 2) / d = 3 / 5 or less, c / (e / 2) / d = 30 or more characterized in that the airfoil form.

In addition, the outlet angle of the final outlet end of the fluid injection device is characterized in that 70 ~ 90 °.

Another preferred embodiment,

In the fluid injection device for injecting the fluid flowing from the fluid supply device to the cleaning object, the gap coupling hole for adjusting the gap of the final outlet end for injecting the fluid to the cleaning object is characterized in that the cross section of the airfoil form.

Further, when the long radius of the head of the airfoil is d, the short diameter is e, and the long radius of the tail of the airfoil is c, the configuration of the clearance coupling hole is (e / 2) / d = 3 / 5 or less, c / (e / 2) / d = 30 or more characterized in that the airfoil form.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in the following description with reference to the accompanying drawings, the same or corresponding components are denoted by the same reference numerals, regardless of the reference numerals. Duplicate explanations will be omitted.

6A to 6C are diagrams illustrating an aqua knife 600 according to a first embodiment of the present invention.

6A is a perspective view illustrating an aqua knife 600 according to a first embodiment of the present invention.

As shown in FIG. 6A, the aqua knife 600 according to the first embodiment of the present invention includes an inlet 610, a passage through which a fluid flows from a fluid supply device (not shown), and the inlet 610. Is connected to adjust the gap of the final outlet end of the fluid flowing through the inlet 610 is discharged to the outside and the gap inlet portion 630 for supporting the aqua knife as an inner movement passage of the L-shape to move the fluid do.

Here, the aqua knife 600 according to the first embodiment of the present invention is connected to the chamber inlet is provided on one side, unlike the conventional supply of fluid from the side, is installed on the top of the aqua knife 600 fluid supply device Intra-tube flow of the fluid supplied through the (pump) can be sprayed uniformly in the Z-axis direction when flowing on the gap inlet portion 630 of the L-shape according to the upper pressure.

In addition, the letter-shaped gap inlet 630 is connected to one side of the horizontal clearance inlet 631 and the horizontal clearance inlet 631, which is a horizontal movement passage of the fluid introduced from the inlet 610, the final outlet end. It consists of a vertical gap inlet 632, which is a vertical movement passage of the fluid for moving the fluid to.

In addition, the horizontal gap inlet portion 631 has a top surface connected to the inlet 610 to allow fluid to flow through the inlet 610, and open the left side (final outlet end direction) and the right side (the opposite end end end). ) Is closed so that the direction of movement of the introduced fluid is towards the final outlet end, and the interior is a horizontal passage of fluid into the cavity having a diameter of up to 5 mm.

In addition, the vertical clearance inlet 632 is connected to the left side (final exit end direction) of the horizontal clearance inlet 663 to support the horizontal clearance inlet 631, and the horizontal clearance inlet 631 is in a horizontal state. The vertical moving passage of the fluid moved to the vertical descending and connected to the bottom end connected to the bottom.

In addition, the vertical clearance inlet 632 adjusts the clearance of the final outlet end for injecting the fluid to the cleaning object (substrate, etc.) and supports the aqua knife as a whole.

In addition, the gap of the final outlet end is a gap space created by the gap coupling hole protruded by a predetermined thickness on the vertical gap inlet 632, the gap of the final outlet end is adjusted according to the predetermined thickness.

6B and 6C are exploded perspective views of FIG. 6A.

6B and 6C, the aqua knife 600 according to the first embodiment of the present invention has a shape in which the main body 600a is coupled to the support 600b and supported. When cutting in the direction, the cut right side is called the main body 600a, and the left side is called the support part 600b.

Here, the main body 600a has an L-shape as an inner movement passage through which the upper surface is connected to the inlet 610 and the fluid flowing through the inlet 610 moves.

In addition, the L-shaped body 600a includes a horizontal clearance inlet body 631a and a vertical clearance inlet body 632a. The horizontal clearance inlet body 631a has a hollow interior, and has a left side ( The final outlet stage direction is opened and the right side (opposite the final outlet stage) is closed so that the direction of movement of the introduced fluid is towards the final outlet stage.

In addition, the horizontal clearance inlet body 631a is a cavity having an internal diameter within a maximum of 5 mm, and is an internal horizontal moving passage through which the fluid passes immediately upon fluid inflow through the inlet 610.

In addition, an inlet 610 is formed on the upper surface of the horizontal clearance inlet main body 631a as an inflow passage for the fluid supplied from the fluid supply device (pump), and the inlet 610 of the horizontal clearance inlet main body 631a is formed. It is formed at the outermost side of the right side (opposite the final outlet end), and the right side is blocked by the outer wall for the flow of fluid from the inlet 610 circular tube to eliminate the loss in the opposite direction of the final outlet end. Maximize fluid movement in one direction.

That is, the right outermost point of the inlet 610 of the circular tube coincides with the right outermost point of the horizontal clearance inlet body 631a to minimize the flow of fluid in the opposite direction of the final exit stage travel.

In addition, the vertical clearance inlet main body 632a is connected to the left side (final exit end direction) of the horizontal clearance inlet main body 631a to support the vertical clearance inlet main body 632a, and the horizontal clearance inlet main body 631a is provided. ) Is a vertical passage of the fluid that moves the fluid in a horizontal state is vertically lowered to the final outlet connected to the bottom.

In addition, in order to couple the main body 600a and the support 600b, a plurality of main body coupling holes 633a are formed on the vertical gap inlet main body 632a at predetermined intervals.

In addition, the vertical gap inlet portion 632a forms a plurality of body edge holes 634a in the rectangular edge portion for firm coupling with the support portion 600b.

In addition, a plurality of support part coupling holes 634b and support part edge holes 634b are formed on the support part 600b symmetrically with the main body 200a, and a plurality of main body coupling holes 633a and support parts are respectively symmetrical through the support part 600b. By screwing or screwing the coupling hole 634b, the plurality of main frame edge holes 634a and the support frame edge holes 634b, the fluid injection device 600 has a main body 600a as shown in FIG. 6A. It may be configured in a form that is coupled to and supported).

Here, since the support part coupling hole 633b has a hole formed at the center thereof as a coupling part and the part surrounding the hole protrudes by a predetermined thickness on the support part 600b, the main body 600a and the support part 600b are provided. ), The predetermined thickness of the protrusions corresponds to the gap of the final outlet end, and the fluid flows between the created gap spaces.

In addition, the cross-section of the support coupling hole (633b) may be configured in various ways, when the ellipse shape of the long diameter (diameter) of the ellipse a and the short diameter of the ellipse b, the ratio is b / a = It may consist of 3/5.

In addition, the support part 600b forms a support part groove 631b in a symmetrical part when the horizontal gap inlet part main body 631a is coupled to the support part 600b, and temporarily stores the introduced fluid before vertically descending into the gap space of the vertical gap inlet part. Let's do it.

As described above, the aquaknife according to the first embodiment of the present invention does not have the fluid flowing in the inlet 610 once stored in the chamber and then dispersed. It is configured to pass through within 5mm).

In addition, the aquaknife according to the first embodiment of the present invention, unlike the prior art, the first storage passage of the fluid supplied from the fluid supply device, the diaphragm, the second storage passage of the buffer does not exist, and thus the fluid In the movement of the fluid delivered from the supply device (pump) to the final outlet end, it is possible to attenuate the local nonuniformity of the fluid flow, such as pulsations in the chamber layer and the buffer layer.

This allows a uniform flow rate supply in the Z-axis direction.

That is, conventionally configured as a chamber supply type when the fluid is introduced through the inlet, since the influence of the supply pressure in the inner chamber is not uniform, it has a great adverse effect on the uniform flow at the final outlet, but the present invention is a chamber The direct flow of feed flow was changed from chamber to dispersion using gaps through numerical changes in the internal structure, and the flow of flows is uniformly distributed in the gaps, and the dispersed flows are uniformly supplied to the Aquaknife. To be.

Figure 6d is a graph showing the fluid movement speed in the gap inlet of the aqua knife according to the first embodiment of the present invention.

As shown in FIG. 6D, the supply pressure of the fluid flowing into the gap inlet is well distributed in the Z-axis direction, indicating that the flow in the Z-axis direction of the fluid is uniform.

That is, in the conventional case, the standard deviation of the moving speed in the Z axis direction on the gap inlet is about 0.6 m / s, but in the present invention, the standard deviation is about 0.2 m / s in the nonuniformity of the fluid flow in the Z axis direction. This was improved.

7A to 7C are diagrams illustrating an aqua knife 700 according to a second embodiment of the present invention.

7A and 7B are side cross-sectional views of an aqua knife 700 according to a second embodiment of the present invention.

As shown in Figs. 7A and 7B, the aqua knife 700 according to the second embodiment of the present invention is similar to the aqua knife 600 according to the first embodiment of the present invention shown in Figs. 6A to 6C. Since it is a configuration method, it demonstrates centering around the difference.

That is, the aqua knife 700 according to the second embodiment of the present invention adjusts the gap of the final outlet end 770 through which the fluid is discharged to the outside, and is a fluid injection as the inner movement passage of the L-shape in which the fluid moves. A gap inlet 730 for supporting the device and an inlet formed in an upper surface of the gap inlet 730 to allow a fluid to flow into the gap inlet 730 from a fluid supply device (not shown). 710).

Here, the aqua knife 700 according to the second embodiment of the present invention is inclined at a predetermined angle on the lower surface 735 of the gap inlet connected to the final outlet end 770.

That is, the lower part of the clearance inlet connecting the lowest point of the left side 737 of the clearance inlet 730 and the lowest point of the right side 738 with the right side 738 of the clearance inlet 730 as a rotation center axis. The surface 735 has an angle made in the counterclockwise direction (hereinafter referred to as the outflow angle of the final outlet end) to have an acute angle (?) Close to a right angle.

In addition, since the exit angle of the final outlet end is an acute angle close to the right angle, 70 ~ 90 ° is preferred.

As described above, the aqua knife 700 according to the second embodiment of the present invention forms the bottom surface 735 of the gap inlet so that the outflow angle of the final outlet end is close to the right angle, and passes through the gap inlet 730. A fluid flows in a concentrated manner on the right side (final exit end direction) when moving to the final outlet end (side concentrated flow induction structure, see FIGS. 7A and 7B).

This is because, in the conventional case, the pulsation phenomenon in the dense incompressible flow in the tube flow leads directly to the final outlet stage, so that the expansion of any buffer space does not disturb the main flow component as a result of the numerical analysis, but also destroys the streamline. Will act as.

Accordingly, the aquaknife 700 according to the second embodiment of the present invention removes the buffer and guides the main flow component of the fluid into a centralized form in consideration of the directionality so that the streamline of the fluid is not destroyed, and the final exit However, by using the acute angle close to the right angle to serve as a conventional buffer as well as to stabilize the main flow component of the fluid.

FIG. 7A illustrates a side-centered flow guide structure of an aquaknife 700 according to a second embodiment of the present invention, and FIG. 7B illustrates an end inlet end of an aquaknife 700 according to a second embodiment of the present invention. It shows the fluid velocity contour in (Contour).

As shown therein, in the second embodiment of the present invention, the pulsation phenomenon coming from the fluid supply device (pump) is removed by designing the outlet angle at the clearance inlet and thus designing the outlet angle of the final outlet end at an acute angle close to the vertical. Recoil to the pump without affecting the final outlet stage.

This eliminates flow conditions that hinder vortices and main flow in the pulsation chamber that occurs in the conventional case.

FIG. 7C is a graph illustrating a fluid moving speed according to a predetermined distance in the Z-axis direction to represent the Y-axis flow component with respect to the Z-axis direction at the inlet of the final outlet in the aqua knife 700 according to the second embodiment of the present invention. to be.

As shown in FIG. 7C, the nonuniformity of the Y-axis component with respect to the Z-axis flowing into the final exit gap Gap is more than four times improved from the conventional (standard deviation 0.12) to the present invention (standard deviation 0.028) and thus the fluid The nonuniformity of the flow was improved.

8A and 8B show an aqua knife 800 according to a third embodiment of the present invention.

As shown in FIGS. 8A and 8B, since the configuration is similar to that of the aquaknife according to the first embodiment of the present invention illustrated in FIGS. 6A to 6C, the differences will be mainly described.

Aquaknife according to the third embodiment of the present invention may be configured in the form that the main body is coupled to the support portion, as shown in Figure 8a, the support portion coupling hole of the aquaknife according to the third embodiment of the present invention 834b is an airfoil shape (wing shape) in which a hole is formed as a coupling portion of the main body and the support portion in the center thereof, and a portion surrounding the hole protrudes by a predetermined thickness on the support portion 800b.

In addition, a predetermined thickness protruding when the main body and the support portion 800b are coupled corresponds to a gap of the final exit end, and the fluid flowing between the generated gap spaces flows.

In addition, the support portion coupling hole (834b) has a cross-section of the airfoil shape, the long radius of the head of the airfoil d and the short diameter (diameter) is e, the long radius of the tail portion of the airfoil is c, the present invention The configuration of the support portion coupling hole 834 according to the third embodiment of (e / 2) / d = 3/5 or less, c / (e / 2) / d = 30 or more can be configured in the airfoil form. .

As such, the airfoil shape of the support coupling hole 834b is an intermediate support shape capable of maximally eliminating the influence of the wake upon fluid flow on the support coupling hole 834b, and does not destroy the stream line during the fluid flow.

In addition, although the coupling hole is formed in the airfoil shape on the support part 800b in FIG. 8A, the coupling hole may be formed in the airfoil shape on the main body.

In addition, although the shape of the coupling hole in the L-shape aqua-knife according to the first and second embodiments of the present invention has been described, the present invention is not limited thereto. Aquaknife can also be applied to the case where the shape of the crevice coupling hole is not an elliptical shape but an airfoil shape.

In other words, the cross section of the coupling hole to determine the gap of the final exit end will be applicable to the case of forming the airfoil shape instead of the existing elliptic shape.

As shown in FIG. 8B, when the airfoil coupling hole according to the third embodiment of the present invention is applied to an aqua knife, the flow characteristics are determined through numerical analysis regarding the internal flow of the fluid. Support had no significant effect on internal flow, and no impact on wake and flow stagnation occurred.

In the conventional case, an arbitrary ellipse was used to obtain smooth flow of the intermediate support shape adjusting the gap of the final exit end in the Aqua Knife. These phenomena have had a major negative impact on the uniformity of aquaknife.

Therefore, in the present invention, the air gap at the final inlet end and the gap inlet for intermediate support are used to prevent the wake and flow stagnation at the rear end of the airfoil shape by using the intermediate support of the airfoil shape. Uniformity was ensured.

In the above description, the LCD substrate cleaning aqua knife according to the present invention has been described. However, the present invention is not limited thereto and may be applied to various types of fluid injection devices and various types of flat panel display (FPD) cleaning devices using the same.

Therefore, the present invention is not limited to the above-described embodiments, and a person having ordinary skill in the art may change the design or avoid the design without departing from the scope of the technical idea of the present invention. Will be in range.

As described above, the fluid injection device according to the present invention forms an L-shaped gap inlet as an internal moving passage of the fluid, and in this manner, the fluid injection device is distributed in the form of a dispersion using the gap in the conventional chamber in the fluid flow to the final outlet end. By switching, it is possible to improve the nonuniformity of the fluid flow occurring in the conventional fluid ejection apparatus.

In addition, the outflow angle of the final outlet stage is composed of a lateral concentrated flow inducing structure having acute angle close to the right angle, so that the streamline of the fluid is not broken and the main flow component of the fluid is stabilized.

In addition, air gap formation holes in the form of airfoils are formed on the gap inlet portion for interfacing and intermediate support of the final outlet end so that the wake and flow stagnation points do not occur at the rear side of the airfoil form, and fluid flow at the final end end Ensure uniformity of

As such, it is possible to maximize the cleaning effect of the fluid injection device by ensuring uniformity of fluid flow at the final outlet end of the fluid injection device.

Claims (18)

An inlet formed on one side of the upper portion, A fluid inlet connected to the inlet, the fluid flowing through the inlet having a horizontal fluid flow primarily after inflow, and having a vertical fluid flow secondly after the horizontal fluid flow in the direction of the final outlet end; Characterized in that the fluid injection device. The method of claim 1, The clearance inlet is a horizontal clearance inlet that is connected to the inlet and is a horizontal movement passage of fluid introduced from the inlet, and is connected to one side of the horizontal clearance inlet, and is a vertical movement passage of fluid that moves the fluid to the final outlet end. Fluid injection device comprising a vertical clearance inlet. The method of claim 2, The horizontal clearance inlet has an upper surface connected to the inlet, the interior is hollow, the side toward the final outlet end is opened and the side opposite the final outlet end is closed, so that the direction of the fluid flowing through the inlet is Fluid injection device, characterized in that it is made toward the final outlet end. The method of claim 2, The fluid injection device, characterized in that the predetermined thickness of the gap coupling hole formed on the vertical gap inlet corresponds to the gap of the final outlet end. The method of claim 4, wherein The gap coupling hole is a fluid injection device, characterized in that the cross section of the airfoil form. 6. The method of claim 5, When the long radius of the head portion of the airfoil is d, the short diameter is e, and the long radius of the tail portion of the airfoil is c, the configuration of the gap coupling hole is (e / 2) / d = 3/5 A fluid injection device, characterized in that the airfoil form is below, c / (e / 2) / d = 30 or more. The method of claim 1, The fluid injection device, characterized in that the outlet angle of the final outlet end is 70 ~ 90 °. One side of the upper portion is connected to the inlet, and the fluid introduced through the inlet has a horizontal fluid flow primarily after the inflow, and after the horizontal fluid flow secondly has a vertical fluid flow in the direction of the final outlet end; ; And a support part coupled to the main body to support the main body. 9. The method of claim 8, The main body has an upper surface connected to the inlet, the interior is a cavity, the side of the final outlet end is opened and the side opposite the final outlet end is closed, so that the flow direction of the inflowed fluid is made toward the final outlet end. A horizontal clearance inlet body that is a horizontal movement passage of the fluid, Vertical movement of the fluid which is connected to the side of the last outlet end direction of the horizontal clearance inlet main body to support the horizontal clearance inlet main body, and moves the fluid moved in the horizontal state to the final outlet connected to the bottom by vertically descending. And a vertical clearance inlet body that is a passage. The method of claim 9, And an outermost point in a direction opposite to a final outlet end in the inlet circular tube and an outermost point in a direction opposite to a final outlet end in the horizontal clearance inlet body. The method of claim 9, And a plurality of body coupling holes formed at predetermined intervals on the vertical gap inlet body. The method of claim 11, And a plurality of support part coupling holes symmetrical to the plurality of main body coupling holes on the support part. 13. The method of claim 12, The main body coupling hole or the support coupling hole has a hole formed as a coupling portion at the center thereof, and a portion surrounding the hole protrudes by a predetermined thickness on the main body or the supporting portion, and the protruding predetermined thickness is a gap between the final exit end. Fluid injection device, characterized in that. 13. The method of claim 12, The body coupling hole or the support coupling portion of the fluid injection device, characterized in that the cross section of the airfoil form. 15. The method of claim 14, When the long radius of the head portion of the airfoil is d, the short diameter is e, and the long radius of the tail portion of the airfoil is c, the configuration of the gap coupling hole is (e / 2) / d = 3/5 A fluid injection device, characterized in that the airfoil form is below, c / (e / 2) / d = 30 or more. 9. The method of claim 8, A fluid injector, characterized in that the outlet angle of the final outlet end of the fluid injector is 70 ~ 90 °. delete delete

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