KR20070069479A - Apparatus for injecting fluid - Google Patents

Abstract

A fluid spraying apparatus is provided to maximize a cleaning effect by securing the uniformity in the flow of fluid and preventing the generation of moisture due to adiabatic expansion. A fluid spray apparatus includes a supply port, a single chamber, an intermediate path, and a slit nozzle unit. The supply port(310) is used for receiving a predetermined fluid supplied from a fluid supply apparatus. The single chamber(320) is connected to one side of the supply port to store the predetermined fluid. The intermediate path is formed at a lower portion of the chamber to transfer the predetermined fluid temporarily stored in the chamber along a spray direction. The slit nozzle unit is used for spraying the predetermined fluid transferred through the intermediated path onto a treatment object body.

Description

Fluid Injection Device {APPARATUS FOR INJECTING FLUID}

1 is a view showing a general photo pre-cleaning process.

2A and 2B are diagrams illustrating a conventional air knife described in the pre-photo cleaning process of FIG. 1.

3A and 3B illustrate an air knife according to a preferred embodiment of the present invention.

4 is a cross-sectional view of the air knife in accordance with a preferred embodiment of the present invention.

5A to 5D are diagrams showing a comparison between the supply port of the air knife in the prior art and the present invention.

6A and 6B are views showing a comparison of the structure of the air knife main body according to the prior art and the present invention.

7A and 7B are diagrams showing uniformity in the Z-axis direction of air injected from the nozzle unit in the prior art and the present invention.

<Description of Major Symbols in Drawing>

200, 300: air knife 210, 310: supply port

200a, 300a: main body 200b, 300b: support part

220, 320: chamber 230, 330: intermediate support

231, 331: intermediate support membrane 232, 331a: intermediate support hole

The present invention relates to a fluid spray device, in particular, to ensure uniformity in fluid flow in the final exit direction, to reduce the risk of water generation due to adiabatic expansion, fluid spray that can maximize the cleaning effect Relates to a device.

In flat panel display (FPD) manufacturing process, such as LCD (Liquid Crystal Display), contamination of substrate or film surface and particles are eliminated in advance to prevent defects, or the adhesion of thin films to be deposited and the improvement of FPD characteristics Hazardous cleaning is performed.

The configuration of the scrubber used for the cleaning is somewhat different depending on the main processes such as the deposition process, the etching process, the developing process, the stripping process, and the like.

1 is a view showing a general photo pre-cleaning process.

As shown in FIG. 1, the configuration of the photo pre-cleaner 100 includes an in-conveyor 10, an excimer UV 20, a roll brush 30, and a bubble jet 40. The final rinse 50, the air knife 60, and the out conveyor 70 is composed of.

Here, look at the photo pre-cleaning process according to each component of the photo pre-cleaner 100 as follows.

First, the in-conveyor 10 is an area where the substrate is seated in order to transfer the substrate to the cleaning process, and pre-cleans the photo according to an in-line process.

Thereafter, an Excimer UV (Ultra Violet) process 20 is performed to remove organic matter present on the surface of the substrate.

In this case, by using an excimer UV lamp, a predetermined nm ultraviolet light is irradiated to the surface of the substrate to separate oxygen in the air and excitation oxygen of ozone, and the excited oxygen is chemically bonded to the organic material on the substrate and volatilized into the atmosphere. Remove organics present on the surface.

Subsequently, a roll brush 30 process of removing particles deposited on the substrate surface by applying a physical force using a brush is performed.

In addition, the roll brush 30 process is effective for removing particles and organics having a relatively large size.

In addition, in consideration of the warp of the large substrate, the roll brushes are provided to face each other up and down.

In addition, the roll brush process is not always used, and use or not is determined by a process.

For example, where a flattening pattern is formed, cleaning is performed through a roll brush process, but where a pattern form is formed, the pattern may be damaged, and thus, a roll brush process is not used.

Thereafter, water droplets are generated by mixing the liquid and gas with the pressure of the high pressure pump in the nozzle, and the water droplets are accelerated and sprayed by a high speed gas flow to remove foreign substances on the surface by the elasticity of the fluid on the substrate. (40) The process is performed.

Thereafter, a nozzle shower is finally performed on the substrate to rinse, and an aqua shower is used to evenly spray the fluid onto the front surface of the substrate through an aqua knife in the same area. The final rinse 50 step is performed.

Here, the final rinse (50) process is disposed at the rear end of the cleaning process, by spraying at a predetermined angle during aqua shower to generate a flow of fluid on the substrate, thereby removing the retention particles on the substrate.

Thereafter, an air knife 60 process of completely removing and drying the water (Wet) remaining on the substrate is performed.

Thereafter, all of the photo pre-cleaning processes are completed, and the substrates are taken out of the out conveyor 70 to the next process facility.

2A and 2B illustrate a conventional air knife 200 described in the pre-photo cleaning process of FIG. 1.

2A is a side cross-sectional view of the air knife 200.

As shown in Figure 2a, the air knife 200 is a supply port 210 formed on one side so that the air injected into the substrate from the air supply device (not shown), and is connected to one side of the supply port It is provided with a first chamber (Chamber) 220 in which the air introduced from the supply port 210 is primarily stored.

In addition, a second support 230 which is formed in the lower portion of the first chamber 220 and is an internal passage through which air temporarily stored in the first chamber moves, and a second vertically stored air that is vertically lowered through the intermediate support are stored. The chamber 240 and the nozzle unit 250 are formed at a lower portion of the second chamber and are formed as a final outlet stage for allowing air temporarily stored in the second chamber to be injected onto the substrate.

The drying process in the conventional air knife 200 is as follows.

That is, the compressed air supplied through the supply port 210 undergoes primary expansion in the first chamber 220 and then passes through the flow path of the intermediate support 230. At this time, when the air passes through the region of the intermediate support part 230, the air expanded in the first chamber 220 has a large kinetic energy while passing through a narrow flow path and undergoes a recompression process. Thereafter, the air recompressed in the intermediate support 230 is introduced into the second chamber 240 and undergoes another expansion process. The secondary expanded air is sprayed onto the substrate to be processed through the nozzle unit 250 as the final outlet.

Figure 2b is a cross-sectional view showing the internal shape of a conventional air knife 200, showing one side when the air knife 200 shown in Figure 2a is cut in the direction A-A '.

As shown in Figure 2b, the conventional air knife 200 is configured in the form that the main body 200a is coupled to the support portion 200b and supported, when cutting in the direction A-A ', the left side cut The main body 200a is referred to as the support portion 200b.

Here, the main body 200a may be connected to the supply port 210 and may include a first chamber region 220a in which air introduced therein is primarily stored, and an intermediate support region 230a in which air temporarily stored in the first chamber region may move. And a second chamber region 240a in which air moved on the intermediate support region is secondaryly stored, and a nozzle portion region 250a as a final exit end for allowing air temporarily stored in the second chamber region to be injected onto the substrate. It is provided.

In addition, a plurality of first chamber regions 220a are formed in the main body 200a at predetermined intervals, and a diaphragm 270 protruding by a predetermined thickness is formed in a space between the plurality of first chamber regions.

In addition, the diaphragm 270 prevents sagging or bending of the air knife coming from the long axis design of the Z axis in which the introduced air interferes with each other in the first chamber or in the injection direction.

In addition, an intermediate support layer 231 is formed on the intermediate support region 230a at predetermined intervals, and the intermediate support membrane is formed in an inverse pentagonal shape so as to protrude by a predetermined thickness on the intermediate support region. .

In addition, the predetermined thickness protruding from the intermediate support layer 231 corresponds to a gap between the nozzle unit 250 when the main body 200a and the support unit are coupled to each other. At this time, the air flows between the generated gap spaces until it is injected onto the substrate.

In addition, a plurality of intermediate support holes 232 are formed on the intermediate support layer 231 to couple the main body 200a to the support part.

In addition, a plurality of edge holes 261 may be formed on the rectangular edge 260 at the upper portion of the main body 200a, and the plurality of edge holes 270 and the intermediate support layer 231 may be formed on the rectangular edge 260. The diaphragm hole 271, the intermediate support hole 232 is formed.

In addition, a plurality of coupling holes (not shown) are formed on the support portion symmetrically with the main body 200a. At this time, the conventional air knife 200 by screwing or screwing the coupling holes on the support portion symmetrical with the plurality of edge holes 261, the diaphragm hole 271, and the intermediate support hole 232, respectively, FIG. 2A. As shown in the figure, the main body 200a may be configured to be coupled to and supported by the support 200b.

In the conventional drying process in the air knife 200 described above, the compressed air is expanded (first chamber)-> compression (intermediate support)-> expansion (second chamber)-> compression (nozzle part) and Go to the same process. In this case, moisture may be generated due to the loss of compression energy and condensation due to recompression while the supplied compressed air is repeatedly expanded and compressed.

In addition, the first chamber 220 is divided into a plurality by the diaphragm 270 according to the number of the supply port 210, wherein the pressure in each chamber is different depending on the pressure difference between the supply port (210). Accordingly, the pressure of the air injected through the nozzle unit 250 becomes nonuniform.

As such, moisture generation and non-uniformity in the final exit stage have a significant adverse effect on semiconductor and display processes.

The present invention has been made to solve the above problems, to ensure uniformity in fluid flow in the final exit end direction, to reduce the risk of water generation due to adiabatic expansion, can maximize the cleaning effect It is an object to provide a fluid injection device.

In order to achieve the above object, the present invention, the supply port for allowing the fluid to flow from the supply device, a single chamber is connected to one side of the supply port and stores the fluid introduced through the supply port, the lower portion of the chamber And a slit nozzle portion formed in the intermediate flow path for temporarily moving the fluid temporarily stored in the chamber in the spraying direction, and a slit nozzle part for injecting the fluid moved through the intermediate flow path to a treatment object.

In addition, the fluid is compressed air, the supply port is characterized in that it is formed on the upper side with respect to one side of the chamber to induce downflow during fluid supply.

In addition, the length of the intermediate support membrane for adjusting the gap of the nozzle portion is characterized in that it is set to be 2/3 or more of the length of the intermediate support portion.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in the following description with reference to the accompanying drawings, the same or corresponding components are denoted by the same reference numerals, regardless of the reference numerals. Duplicate explanations will be omitted.

3A and 3B illustrate an air knife 300 according to a preferred embodiment of the present invention.

3A is a side cross-sectional view of an air knife 300 according to a preferred embodiment of the present invention.

As shown in Figure 3a, the air knife 300 according to a preferred embodiment of the present invention, the supply port 310 is formed on one side so that the air injected into the substrate from the air supply (not shown) and A chamber 320 is connected to one side of the supply port and stores the air introduced from the supply port 310.

In addition, the nozzle is formed in the lower part of the chamber 320, the intermediate support part 330, which is an internal passage through which the air temporarily stored in the chamber moves, and the final exit end for injecting the air vertically lowered through the intermediate support part to the substrate. The unit 340 is provided.

Looking at the drying process in the air knife 300 according to a preferred embodiment of the present invention as follows.

That is, compressed air supplied through the supply port 310 undergoes primary expansion in the chamber 320 and then passes through the flow path of the intermediate support part 330. At this time, when the air passes through the intermediate support part 330, the air expanded in the chamber 320 passes through a narrow flow path and has a large kinetic energy and undergoes a recompression process. Thereafter, the air recompressed by the intermediate support part 330 is sprayed onto the substrate to be processed through the nozzle part 340 which is the final exit end along the optimum flow path.

As such, in the air knife 300 according to the preferred embodiment of the present invention, the compressed air is moved in a process such as expansion (chamber)-> compression (intermediate support)-> compression (nozzle). There is no secondary expansion in the second chamber.

That is, when the air moves the intermediate support 330, the compressed state of the compressed air is maintained as it is, it is possible to prevent the loss of unnecessary kinetic energy.

Therefore, it is possible to reduce the risk of water generation that may occur during the air injection through the nozzle portion in accordance with the adiabatic expansion when forming the conventional second chamber.

Figure 3b is a cross-sectional view showing the internal shape of the air knife 300 according to a preferred embodiment of the present invention, showing one side when the air knife 300 shown in Figure 3a is cut in the A-A 'direction. .

As shown in Figure 3b, the air knife 300 according to a preferred embodiment of the present invention is configured in the form that the main body 300a is coupled to the support portion 300b and supported, when cutting in the direction A-A ' The cut left side is called the main body 300a, and the right side is called the support 300b.

Here, the main body 300a is connected to the supply port 310, the chamber region 320a for storing the introduced air, the intermediate support region 330a to move the air temporarily stored in the chamber region, and the intermediate support region The nozzle part area | region 340a is provided as a final exit end which makes the air which moved the phase be injected to a board | substrate.

In addition, a plurality of intermediate support layers 331 are formed on the intermediate support region 330a at predetermined intervals. In this case, the intermediate support membrane is formed to protrude to a predetermined thickness on the intermediate support portion region, the length of the intermediate support membrane is longer than in the prior art to accelerate the flow of the introduced air. In this case, the length of the intermediate support layer 331 is equal to or greater than 2/3 of the length of the entire intermediate support region 330a.

In addition, the predetermined thickness protruding from the intermediate support layer 331 corresponds to a gap between the nozzle unit 340 when the main body 300a and the support unit are coupled to each other. At this time, the air flows between the generated gap spaces until it is injected onto the substrate.

In addition, the intermediate support hole 331a is formed on the intermediate support layer 331 for coupling the main body 300a and the support part 300b.

As such, the air knife 300 according to the preferred embodiment of the present invention does not have a diaphragm and a secondary storage passage (second chamber) unlike the conventional art. In this way, it is possible to attenuate the local nonuniformity of the fluid flow, such as pulsation of the air introduced by the diaphragm and the second chamber in the process of moving the air delivered from the air supply device (pump) to the final outlet end.

In addition, the chamber removes the diaphragm so that the compressed air supplied through the supply port is rapidly diffused, thereby allowing a uniform flow rate supply in the Z-axis direction.

4 is a cross-sectional view of the combination of the air knife 300 according to a preferred embodiment of the present invention.

As shown in FIG. 4, the upper portion of the main body 300a not only forms a plurality of edge holes 361a in the rectangular edge portion for firm coupling with the support portion 300b, but also a plurality of intermediate holes 330a on the intermediate support portion 330a. The intermediate support hole 331a is formed.

In addition, a plurality of coupling holes (not shown) are formed on the support part 300b symmetrically with the main body 300a. At this time, the plurality of edge holes (361a) and the intermediate support hole (331a), respectively, by screw or screw coupling (361b, 331b) of the coupling holes on the support portion, respectively, by air knife according to a preferred embodiment of the present invention ( 300, as shown in FIG. 4, the main body 300a may be configured to be coupled to and supported by the support 300b.

In addition, the outer shape of the support part 300b may be formed symmetrically with the main body 300a as shown in FIG. 4, and may be formed asymmetrically as shown in FIG. 3A.

5A to 5D are diagrams showing a comparison between the supply port of the air knife in the prior art and the present invention.

Figure 5a shows the formation position of the supply port 210 of the conventional air knife, Figure 5b shows the formation position of the supply port 310 of the air knife in the present invention.

Here, the conventional supply port 210 is formed by drilling a hole in an intermediate position in the longitudinal direction (vertical) with respect to the outer side surface of the first chamber 220 of the air knife, the supply port 310 of the present invention Is formed by drilling a hole in the upper end than the conventional intermediate position in the longitudinal direction with respect to the outer side surface of the chamber 320 of the air knife.

That is, in the case of the present invention, when the supply port 310 is formed by raising it upwardly in the longitudinal direction with respect to the outer side than before, when compressed air supplied through the air supply device is introduced into the chamber through the supply port 310. This allows you to induce downflows.

Unlike the related art, this prevents the compressed air flowing into the chamber through the supply port from diffusing upward of the air knife, thereby minimizing the loss of kinetic energy due to the unnecessary flow of the air. As a result, it is possible to prevent the injection pressure of the air from the nozzle from being lost.

5C and 5D are diagrams showing the flow of air introduced into the supply port in the related art and the present invention. In the present invention, the air passing through the supply port 310 is directed downward in the downward direction, which is the final exit end. This is much larger.

In other words, the air introduced through the supply port 310 is prevented from being sprayed upward, and the flow is induced in the downflow so that a uniform distribution in the Z-axis direction is quickly made in the chamber.

6A and 6B are views showing a comparison of the structure of the air knife main body according to the prior art and the present invention.

6A is a side cross-sectional view of a conventional air knife main body 200a, and FIG. 6B is a side cross-sectional view of an air knife main body 300a of the present invention.

Here, the width of the first chamber region 220a of the conventional air knife body 200a is 8 mm or more, whereas the width of the chamber region 320a of the air knife body 300a of the present invention is about 4 mm or less. That is, the width of the chamber area 320a of the present invention is reduced by about 1/2 to reduce the cross-sectional area of the chamber area, thereby reducing the amount of adiabatic expansion of air introduced into the chamber, thereby spraying the substrate through the nozzle unit. Reduces the risk of moisture generation

Also, the length of the nozzle portion, which is the final exit end, is reduced by about 1/2 in the conventional case, but in the present invention, about 2 to 3 mm in the present invention. As such, the length of the nozzle portion is shorter than before, thereby reducing the moving distance of the compressed air in the intermediate support portion and maintaining the compressed state as much as possible, thereby reducing the risk of moisture generation when spraying the substrate through the nozzle portion.

Also, the length of the intermediate support film (not shown) formed on the intermediate support portion is about 15 mm in the related art, but in the case of the present invention, since the second chamber is not formed, the length of the intermediate support film is increased by about 10 mm ( About 25mm). That is, the length of the intermediate support membrane is set to be 2/3 or more of the total length of the intermediate support, so that the introduced air accelerates straight when moving on the intermediate support. This enhances air compression on the intermediate support to reduce the risk of moisture generation during substrate spraying.

7A and 7B are diagrams showing uniformity in the Z-axis direction of air injected from the nozzle unit in the prior art and the present invention.

As shown in Figure 7a and 7b, when comparing the deviation of the moving speed of the air in the Z-axis direction at the final exit, the standard deviation is 0.903 in the conventional case, in the present invention, the standard deviation is about 0.642, Z It shows that the uniformity of air flow in the axial direction is significantly improved.

That is, in the prior art, uniformity was not secured during the air injection at the final outlet stage, thereby reducing the cleaning effect. However, in the present invention, Z is the injection direction by designing an optimal flow path for flowing the compressed air to the final outlet stage. It is possible to secure uniformity of air flow in the axial direction and maximize the cleaning effect.

In the above, the LCD substrate cleaning air knife according to the present invention has been described, but is not limited thereto and may be applied to various types of fluid spray devices and various types of flat panel display (FPD) cleaning devices using the same.

Therefore, the present invention is not limited to the above-described embodiments, and a person having ordinary skill in the art may change the design or avoid the design without departing from the scope of the technical idea of the present invention. Will be in range.

As described above, the fluid injection device according to the present invention prevents local nonuniformity of fluid flow along the diaphragm and the second chamber, and does not undergo an expansion process in the second chamber.

In this way, the air recompressed in the intermediate support portion is sprayed to the substrate through the nozzle portion along the optimum flow path to reduce the risk of water generation during the injection.

In addition, the formation position of the supply port is formed at the upper end in the longitudinal direction of the chamber than in the prior art, thereby inducing the air introduced into the chamber through the supply port to have a down flow structure.

In this way, the air introduced into the chamber through the supply port is prevented from being diffused above the air knife, thereby minimizing the loss of kinetic energy due to unnecessary flow of the air. This prevents the injection pressure of the air at the nozzle from being lost and allows a uniform distribution in the Z-axis direction quickly within the chamber.

In addition, the width of the chamber in which the adiabatic expansion of the introduced air is made is also reduced by about 1/2, thereby reducing the amount of adiabatic expansion of the compressed air and reducing the risk of water generation when spraying the substrate through the nozzle unit.

In addition, the length of the nozzle portion is also reduced by about 1/2, thereby reducing the moving distance of the compressed air in the intermediate support portion, it is possible to reduce the risk of moisture generation during the substrate spray of air through the nozzle portion.

In addition, the length of the intermediate support membrane is increased by about 10 mm, so that the introduced air is accelerated straight when moving the intermediate support portion.

As such, it is possible to maximize the cleaning effect of the fluid spray device by ensuring uniformity of fluid flow at the final outlet end of the fluid spray device and reducing the risk of water generation.

Claims (4)

A supply port through which the fluid flows from the supply device, A single chamber connected to one side of the supply port and storing the fluid introduced through the supply port; A fluid injection device comprising an intermediate flow path formed at a lower portion of the chamber to move the fluid temporarily stored in the chamber in an injection direction, and a slit nozzle unit for injecting fluid moved through the intermediate flow path to a processing target; . The method of claim 1, And said fluid is compressed air. The method of claim 1, The supply port is formed on the upper side with respect to one side of the chamber fluid injection device, characterized in that to induce downflow during fluid supply. The method of claim 1, And the length of the intermediate support membrane for adjusting the gap of the nozzle part is set to be 2/3 or more of the length of the intermediate support part.

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