KR100727825B1 - Injection module for processing surface of fpd - Google Patents

Abstract

The present invention relates to a substrate spray fluid ejection device capable of removing foreign matter in the shaded area generated in the FPD as in the case of the existing pattern is formed.

To this end, the present invention, the inlet for allowing the liquid and gas flows from the supply device, an airflow forming unit for atomizing the liquid by using the high-speed flow of the gas introduced through the inlet, and the airflow to the treatment target A first injection port and a second injection port are provided at both ends so as to be sprayed in both directions, and the first and second injection ports are formed to face each other, and a double injection port is formed on an upper portion of the double injection port and flows in through the inlet port. Comprising a main body for moving the fluid to the double injection port to provide a fluid injection device for cleaning the substrate comprising a main body for moving the fluid introduced through the inlet to the double injection port.

Patterns, Shades, Slits, Bi-Directional Spraying

Description

Substrate cleaning device for jet cleaning {INJECTION MODULE FOR PROCESSING SURFACE OF FPD}

1 is a diagram illustrating a general photo pre-cleaning process.

2 is a view showing a conventional injection module used in the cleaning process of FIG.

3 is a view showing an injection module according to a preferred embodiment of the present invention.

<Description of Major Symbols in Drawing>

210, 310: substrate

220, 320: pattern

230, 330: shaded area

340: double nozzle

350: main body

360: inlet

The present invention relates to a fluid jetting device for cleaning a substrate, and more particularly, to a fluid jetting device for cleaning a substrate that can remove foreign substances in the shaded areas generated in the FPD, such as when the existing pattern is formed.

In flat panel display (FPD) manufacturing process such as LCD (Liquid Crystal Display), contamination of substrate or film surface and particles are removed in advance to prevent defects, or to enhance adhesion of thin film to be deposited and improvement of FPD characteristics. Hazardous cleaning is performed.

The configuration of the scrubber used for the cleaning is slightly different depending on the main processes such as the deposition process, the etching process, the developing process, the strip process, and the like.

1 is a diagram illustrating a general photo pre-cleaning process.

As shown in FIG. 1, the configuration of the photo pre-cleaner 100 includes an in-conveyor 10, an excimer UV 20, a roll brush 30, and a bubble jet 40. It consists of a final rinse (50), an air knife (60), and an out conveyor (70).

Here, the photo pre-cleaning process according to each component of the photo pre-cleaner 100 as follows.

First, the in-conveyor 10 is a region in which the substrate is seated in order to transfer the substrate to a cleaning process, and pre-cleans the photo according to an in-line process.

Thereafter, an Excimer UV (Ultra Violet) process 20 is performed to remove organic matter present on the surface of the substrate.

Here, an excimer UV lamp is used to irradiate a surface of the substrate with ultraviolet light of a predetermined nm to separate oxygen in the air and excitation oxygen from ozone, so that the excited oxygen chemically bonds with the organic material on the substrate and volatilizes to the atmosphere. Remove organics present on the substrate surface.

Subsequently, a roll brush 30 process of removing particles deposited on the substrate surface by applying a physical force using a brush is performed.

In addition, the roll brush 30 process is effective for removing particles and organics having a relatively large size.

In addition, in consideration of the warp of the large substrate, the roll brushes are provided to face each other up and down.

In addition, the roll brush process is not always used, It is used or not determined by a process.

For example, cleaning is performed through a roll brush process where the flattening pattern is made, but the roll brush process is not used where the pattern form may damage the pattern.

Thereafter, water droplets are generated by mixing the liquid and gas with the pressure of the high pressure pump in the nozzle, and the water droplet is accelerated and sprayed by a high speed gas flow to remove foreign substances on the surface by the elasticity of the fluid on the substrate. (40) The process is performed.

Thereafter, a nozzle shower is finally performed on the substrate to rinse, and an aqua shower in which the fluid is evenly sprayed to the front surface of the substrate through an aqua knife in the same area is removed. The final rinse 50 step is performed.

Here, the final rinse 50 process is disposed at the rearmost end of the cleaning process, by spraying at a predetermined angle during aqua shower to generate a flow of fluid on the substrate, thereby removing the retention particles on the substrate.

Thereafter, the air knife 60 process of completely removing and drying the water (Wet) remaining on the substrate is performed.

Thereafter, all pre-photo cleaning processes are completed, and the process is finished by taking the substrate out of the out conveyor 70 to the next process facility.

2 is a view showing a conventional injection module used in the cleaning process of FIG.

As shown in FIG. 2, the conventional injection module 240 injects a cleaning liquid or a process liquid (hereinafter, chemical liquid) in a vertical direction through a spray hole formed at a lower portion thereof, such that the substrate 210 and the fine pattern 220 on the substrate are sprayed. Remove foreign substances present in

However, when spraying the chemical liquid in the vertical position with respect to the traveling direction of the FPD substrate 210 (arrow ①), a dead zone 230 may be generated that is not affected by the chemical liquid injection.

That is, the flat panel display (FPD) is made of a very thin thin layer, when the height of the thin layer formed on the substrate of the FPD, such as when the pattern 220 is formed, the chemical liquid that hits or reflects a relatively high thin layer This causes the fluid flow to be distorted (arrow ②).

Therefore, in this case, despite the injection of the chemical liquid, there is a shade zone 230 in which the chemical liquid is not injected in the side gap portion of the thin layer.

When such a shade zone occurs, despite the chemical liquid injection through the injection module, the cleaning power or process power is dropped, which may result in poor FPD performance.

The present invention has been made to solve the problems described above, by implementing a bi-directional injection through the slit-shaped double injection port having a predetermined injection angle, it is possible to remove the foreign matter in the shade zone that occurs when the existing pattern is formed. An object of the present invention is to provide a fluid jet value for cleaning a substrate.

In addition, an object of the present invention is to provide a fluid jet device for cleaning the substrate which can maximize the cleaning effect by increasing the inertia of the fluid jet toward the substrate through the injection of the mist-type air.

In order to achieve the above object, the substrate jet fluid jet device according to the present invention, the inlet for allowing liquid and gas from the supply device, and the liquid by using the high-speed flow of gas introduced through the inlet Atomizing unit forming part to atomize, and the first injection port and the second injection port is provided at both ends so as to spray the airflow to the processing object in both directions, the first injection port and the second injection port formed to face each other And a main body formed on an upper portion of the double jet port to move the fluid introduced through the inlet port to the double jet port.

delete

In addition, the first and second injection port is characterized in that the slit form.
In addition, the injection angle of the double injection port is characterized in that it has a range of 5 ° ~ 45 ° with respect to the vertical direction.

delete

In addition, the slit widths of the first and second injection ports are 0.1 to 0.15 mm or less in the case of washing, and 0.5 mm or less in the case of stripping.

In addition, the air forming portion is characterized in that it has an adiabatic expansion structure.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 is a view showing the injection module 300 according to an embodiment of the present invention.

As shown in FIG. 3, the injection module 300 according to the preferred embodiment of the present invention includes an inlet port 360 through which the fluid is introduced from the fluid supply device, and a substrate 310 with the fluid introduced through the inlet port. And a main body 350 which is formed at an upper portion of the double injection port and moves the fluid introduced through the inlet to the double injection port, which is the final outlet end.

The double jet port has a first jet port 341 and a second jet port 342 connected to both ends of the main body. In this case, the first and second injection holes are formed to face each other.

Herein, the fluid flowing through the inlet may be a gas carrying the liquid as well as a liquid which is a chemical liquid. In this case, one side of the inlet port 360 may be connected to a liquid supply unit (not shown) to which the liquid liquid is supplied, and the other side may be connected to a gas supply unit (not shown) to which gas such as gas is supplied.

In addition, the liquid may be a chemical treatment for the surface treatment of various FPD, such as cleaning, etching, stripping, such as DIW, cleaning liquid, etching liquid, stripping liquid (striping).

In addition, the gas may be compressed air such as N ₂ and CDA (Clean Dry Air) capable of transporting the introduced liquid at high speed.

In addition, the gas and the liquid introduced through the inlet 360 may form an airflow body. At this time, the air is the atomized liquid in the form of a mist (mist) by using the high-speed flow of the compressed air introduced, it is possible to obtain an accelerated cleaning power than when spraying pure liquid (or fluid).

In addition, an air forming unit (not shown) may be provided in the inlet 360 or on the moving passage 361 of the gas and liquid introduced therein to form the air.

In addition, the air forming unit is formed outside the injection module 300, the already formed air can be supplied through the inlet (360).

In addition, a venturi nozzle may be used as the air forming unit. The venturi nozzle generally has an adiabatic expansion structure formed at an end of the nozzle to improve cleaning power. Here, the adiabatic expansion structure refers to a structure for adiabatic expansion of the cleaning medium (DIW, etc.) at low pressure by the Joule-Thomson effect to solidify it.

The fluid movement passage 361 of the main body is designed to be fluidly analytically optimized so that the fluid introduced into the inlet 360 may be bidirectionally injected onto the substrate. For example, the fluid movement passage may be formed in a fine gap structure in the main body, and the gap structure may form a flow path structure in the injection angle direction of the first and second injection holes 341 and 342.

The fluid moved along the fluid movement path 361 of the main body is injected to the substrate 310 through the first injection port 341 and the second injection port 342 connected to both ends of the main body.

In addition, the first and second injection spheres 341 and 342 are configured in a slit type. When the slits are formed in this way, the impact force and the cleaning effect can be increased when the substrate is sprayed than in the hole or other forms.

Further, the injection angle θ of the first and second injection ports 341 and 342 is preferably in the range of 5 ° to 45 ° with respect to the vertical direction.

In addition, the slit widths of the first and second injection ports 341 and 342 are preferably 0.1 to 0.15 mm or less when used for cleaning, and 0.5 mm or less when used for stripping (PR stripping).

As such, the preferred injection module of the present invention forms the existing two injection nozzles as an integrated nozzle of a double injection port.

That is, even when the height of the thin layer formed on the substrate 310 of the FPD is different, as in the case where the pattern 320 is formed, the fluid is sprayed toward the substrate 310 obliquely in both directions using the double injection hole 340. In this case, foreign matter in the shaded area 330 such as a gap portion between the pattern 320 and the pattern 320 may be removed. At this time, the foreign matter in the shade zone 330 is washed down through the exhaust port (not shown) can maximize the cleaning effect according to the two-way injection (arrow ②).

In the above description, the injection module according to the present invention has been described, but is not limited thereto. The injection module may be applied to various types of flat panel display (FPD) processing injection modules as well as the injection module for surface treatment such as etching and stripping. something to do.

Therefore, the present invention is not limited to the above-described embodiments, and a person having ordinary skill in the art may change the design or avoid the design without departing from the scope of the technical idea of the present invention. Will be in range.

As described above, the fluid jet device for cleaning the substrate according to the present invention implements bidirectional injection through a slit-type double injection port having a predetermined injection angle, thereby preventing foreign substances in the shade zone generated when an existing pattern is formed. To be removed.

In addition, it is possible to maximize the cleaning effect by increasing the inertia of the fluid spray toward the substrate through the injection of the mist-like airflow.

In addition, by integrating the double injection port for bidirectional injection, it is possible to reduce the amount of fluid, such as the chemical liquid used.

Claims (6)

An inlet for introducing liquid and gas from the feeder, An airflow forming part for atomizing the liquid by using a high-speed flow of gas introduced through the inlet; A first injection port and a second injection port are provided at both ends to spray the air in both directions to the object to be treated, and the first injection port and the second injection port are formed to face each other; And a main body formed on an upper portion of the double jet port to move the fluid introduced through the inlet port to the double jet port. The method of claim 1, The first and second injection port is a fluid jet device for cleaning the substrate, characterized in that the slit form. The method according to claim 1 or 2, The spraying angle of the first and second injection port is a substrate jet fluid spraying device, characterized in that it has a range of 5 ° ~ 45 ° with respect to the vertical direction. The method according to claim 1 or 2, The slit widths of the first and second spray holes are 0.1 to 0.15 mm or less for cleaning, and 0.5 mm or less for stripping. The method according to claim 1 or 2, The airflow forming apparatus for substrate cleaning, characterized in that the airflow forming portion has an adiabatic expansion structure. delete

Images