TW202023689A - Slit nozzle for liquid - Google Patents

Abstract

This slit nozzle for liquid is provided with: a plate-shaped laterally elongated first plate (2) having a predetermined thickness; and a second plate (3) opposed and joined to the inner surface (2a) of the first plate (2). The second plate (3) has formed at the center section thereof a hole-like inlet section (5a) for supplying a liquid agent to the inside. The inner surface (2a) of the first plate (2) has formed therein a recessed storage section (2b) for storing the liquid agent supplied from the inlet section (5a). The storage section (2b) has a substantially dogleg shape disposed laterally in the longitudinal direction of the second plate 2. The storage section (2b) has tapered upper sides (a) tilted from the center section toward ends (c) thereof, and has tapered lower sides (b) located below the upper sides (a) and tilted more gently than the upper sides (a). The ends (c) of the upper sides (a) and ends (c) of the lower sides (b) are joined, the width of the storage section (2b) decreases from the center section towards the ends (c), and the depth of the storage section (2b) is formed to become smaller toward the ends (c). The ends (c) has tapered sections (2d) which extend from the ends (c) toward ends (4a) of orifices (4) formed at front ends located between the first and second plates (2, 3) and which guide the liquid agent so that the liquid agent flows toward the ends (4a).

Description

Slit nozzle for liquid

The present invention relates to a slit nozzle for liquid, which is suitable for coating liquid agents on the surface of roads, etc., for coating liquids with higher viscosity.

For conventional slit nozzles for applying a treatment liquid on the surface of an object, there are, for example, Patent Documents 1 and 2 shown below. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 4619139 [Patent Document 2] Japanese Patent No. 4315787

[The problem to be solved by the invention]

The slit nozzle of Patent Document 1 is configured as follows. In the state where the two nozzle halves are combined, a slit nozzle with a slit-like discharge port opening downward is formed, and a first storage portion of the coating liquid is formed in one of the two nozzle halves, and On the lower side connected to the first storage portion, a second storage portion shallower than the aforementioned first storage portion is formed based on the thickness direction of the nozzle split body. On the lower side connected to the second storage portion, A flat surface with a slit-shaped discharge port formed at the lower end is provided between the nozzle pair and the other nozzle pair, and the first storage portion is configured to correspond to the coating liquid formed at the center of the nozzle pair in the width direction The connecting part of the supply hole is the highest, and the two ends are lowered, and the lower side of the second storage part is composed of: the center part in the width direction of the nozzle split is the lowest, and the V-shape increases as it goes to both ends Furthermore, the starting point at both ends of the V-shaped inclined surface is the point where the amount of the coating liquid flows most when the lower side of the second storage portion is linear.

In Patent Document 1, as shown in FIG. 1 and FIG. 2, a coating liquid supply hole 6 is provided in the center of the upper surface of the slit nozzle, and an exhaust hole 7 is provided, and a first storage portion 4 and a second storage portion are provided inside 5. Spray from the slit-shaped discharge port 10 at the lower end.

Furthermore, as shown in FIG. 3, a V-shaped inclined surface 8 is formed at the lower part of the second storage portion 5. As shown in FIG. 6, the flow rate of the coating liquid is distributed at both ends in the longitudinal direction to increase. .

The device having the slit nozzle of Patent Document 2 is configured as follows. The device is provided with a holding table which holds the substrate; a slit nozzle which discharges a specific processing liquid; a moving means which moves the slit nozzle in a substantially horizontal direction along the surface of the substrate; and a processing liquid supply means, which Supply the aforementioned specific treatment liquid to the aforementioned slit nozzle from a specific treatment liquid supply source; And by moving the slit nozzle in the substantially horizontal direction, the slit nozzle is swept across the surface of the substrate while the slit nozzle is sprayed out the specific processing liquid filled in the slit nozzle, thereby coating the specific processing liquid on the substrate者; And in the aforementioned slit nozzle, The supply port of the manifold connected with the aforementioned processing liquid supply mechanism for supplying the aforementioned specific processing liquid to the aforementioned slit nozzle is provided at the side end of at least one of the both sides of the longitudinal direction of the aforementioned manifold; The discharge port for discharging the gas existing in the slit nozzle and the processing liquid mixed with the gas to the outside of the slit nozzle is provided at the upper end of the manifold; the discharge port is provided at a position higher than the supply port ； More equipped: The discharge path connected to the aforementioned discharge port; The detecting means is arranged in the middle of the discharge path and detects the filling state of the processing liquid and the gas mixing state in the discharge path; and Judging means, which judges the filling degree of the aforementioned specific treatment liquid for the aforementioned slit nozzle, and judges the mixing degree of the gas of the aforementioned specific treatment liquid; The discharge path has a curved portion that is optically transparent and curved in a U-shape, and the curved portion has a sensing portion that includes a vertex portion formed toward the upper side, and extends from the slit nozzle to the sensing portion. Between, set in such a way that the aforementioned apex part is at the highest position; The detection means is arranged near the curved portion, emits a first light beam to the apex portion, and receives the second light beam obtained from the apex portion with the irradiation of the first light beam; The determination means determines the filling degree based on the change in the light intensity of the second light beam received by the detection means, and determines the mixing degree of the gas.

The device of Patent Document 2 is a large-scale device as a whole. Furthermore, as shown in FIG. 3 and FIG. 4 of Patent Document 2, the slit nozzle 4 is configured to provide supply ports 46 a and 46 b at the ends in the longitudinal direction. Furthermore, it is configured to provide an exhaust hole 47 for the gas mixed with the supply liquid supplied to the inside, and the gap 41a in the slit nozzle is linear and sprayed from the lower end.

The structures of the inventions of Patent Documents 1 and 2 described above are more complicated than the products of the present invention described later.

In addition, as shown in Fig. 7, the spray from the lower end of the slit nozzle cannot be expanded due to the contraction flow, and it becomes a spray with a narrow tip. Therefore, even if the spray nozzles are connected for lengthening, the spray between the connections is interrupted and uneven, and continuous spray cannot be obtained.

The present invention was proposed based on the above-mentioned lessons. Its intended purpose is to provide a simple-structured liquid spray nozzle that can spray a wide range even if it is a single piece, and even for a larger range The spray nozzles are connected to a long shape by spraying, and the spraying between the connections is not interrupted, and maintenance can be reduced. [Means to solve the problem]

The liquid slit nozzle of the present invention described in claim 1 is characterized by comprising: a first plate 2 having a plate shape with a predetermined thickness and having a rectangular shape; and a second plate 3 which is the same as the first plate 2 The inner faces 2a of, face and join, A hole-shaped inflow portion 5a for supplying liquid agent to the inside is formed in the center of the second plate 3, and a concave shape for storing the liquid agent from the inflow portion 5a is formed on the inner surface 2a of the first plate 2. The storage portion 2b is formed in a shape in which a substantially U-shaped shape is arranged horizontally along the longitudinal direction of the second plate 2 and has a tapered upper side a inclined from the center to each end c , And a tapered lower side b located below the upper side a and gently inclined than the upper side a. The ends c of the upper side a and the lower side b are combined, and the width of the storage portion 2b is formed from the central portion Each end portion c is narrowed, the depth of the storage portion 2b becomes shallower toward each end portion c, and each end portion c is formed with a taper portion 2d formed from the end portion c toward the first and second The end 4a of the nozzle 4 at the front end between the two plates 2 and 3 extends to guide the liquid agent to flow toward the end 4a. The present invention related to claim 2 is characterized in that in the liquid slit nozzle described in claim 1, the protrusions 9 with a circular cross-section are protrudingly provided at appropriate intervals, and protrusions for forming nozzles are formed in the lower part of the slit nozzle for liquid. 2c, the protrusion 9 forms a flow path 8 on the lower side of the storage portion 2b formed on the inner surface 2a of the first plate 2. [Effects of Invention]

According to the present invention of claim 1, since the inner surface 2a of the first plate 2 is formed with the storage portion 2b that allows the liquid to flow toward the nozzle 4, the storage portion 2b is formed in a tapered shape with a narrower width toward the end c, and The central part of the storage part 2b is the deepest and becomes shallower toward the end c, and the end c is formed with a taper 2d for spray diffusion that guides the flowing liquid to the nozzle end 4a, so it can be used as a holding liquid The agent is discharged from the nozzle 4 under the state of the fluid speed, and the spray S from the nozzle 4 is not contracted and sprayed as a spread. Therefore, even if the slit nozzle for liquid is connected in the longitudinal direction, the spraying is not interrupted at the connected part and can be sprayed uniformly over the entire range. Furthermore, this can reduce liquid storage or accumulation, thereby drastically reducing maintenance. According to the present invention of claim 2, because the protrusion 9 for forming the flow path is protrudingly provided between the inner surface 2a of the first plate 2 and the inner surface of the second plate 3 that faces it, and the nozzle for forming is formed below it Because of the protrusion 2c, the gap of the nozzle 4 is fixed, and there is no need to adjust the size of the nozzle 4 during installation.

[Form to implement the invention]

Hereinafter, a preferred embodiment of the present invention will be described according to the drawings.

Fig. 1 shows a perspective view of the appearance of a slit nozzle 1 for liquid according to an embodiment of the present invention. In the state shown in the figure, the liquid slit nozzle 1 includes: a first plate 2 that is elongated in the lateral direction and has a predetermined thickness and has a substantially plate shape; and the first plate is integrated with the first plate and has substantially the same shape. Board 3. In addition, in the state shown in the figure, the liquid slit nozzle 1 is displayed in a three-dimensional manner. This is to clearly show that the nozzle 4 is formed at the V-shaped tip of the first, second plates 2, and 3. The nozzle 4 is formed over the entire length of the first plate 2 and the second plate 3 in the longitudinal direction.

In addition, in FIG. 1, series 5 is a liquid supply hole, which is formed in the approximate center of the second plate 3; series 6 is a fixing screw, which is inserted from the outer side of the second plate 3; series 7 is for other members (not shown) Show) the mounting holes used.

Fig. 2 shows a side section of the central part of the integrated first plate 2 and second plate 3 in the longitudinal direction. The integration is to make the inner surface 2a of the first plate 2 and the inner surface 3a of the second plate 3 face each other and join, and the tip of the fixing screw 5 inserted from the second plate 3 side is screwed to the first plate 2 side The screw receiving portion 6a is fixed and coupled. The hole 5 provided in the approximate center of the second plate 3 becomes the inflow portion 5a of the liquid in the second plate 3, and the liquid is supplied to the inside. The inflow portion 5a communicates with a concave storage portion 2b formed on the inner surface 2a side of the first plate. The depth of the concave storage part 2b is the deepest in the center part. Then, the liquid agent entering the storage portion 2b from the inflow portion 5a will be sprayed to the outside from the nozzle 4 through the flow path 8.

The flow path 8 is formed by a protrusion 9 having a substantially circular cross-section, and the protrusion 9 is protrudingly provided at an appropriate position in the lower portion of the inner surface 2a of the first plate 2 at appropriate intervals in the longitudinal direction. That is, the front end surface of the protrusion 9 is joined to the inner surface 3a of the second plate 3 arranged facing each other to form the flow path 8.

The protrusion size of the protrusion 9 is arbitrarily determined according to the purpose or application of the liquid slit nozzle 1, and the gap width of the flow path 8 is set. In addition, the protrusion 9 may be protrudingly provided on the inner surface 3a side of the second plate 3.

The gap of the nozzle 4 is narrowed by the gap of the flow path 8. The gap of this nozzle 4 is formed by the protrusion 2b formed in the lower part of the inner surface of the 1st plate 2 and the vicinity of the inner surface 3a of the 2nd plate 3 which is arrange|positioned facing each other, and is formed. In this way, the gap of the nozzle 4 is formed to be fixed, so there is no need to adjust the size of the nozzle 4 during installation.

FIG. 3 is a front view of the outer surface of the second plate 3. The third plate 3 is provided with a hole 5 for supplying the liquid agent and the like in the approximate center.

The first plate 2 is coupled to the inner surface side of the second plate 3, and the liquid system supplied via the inflow portion 5a is supplied to the concave storage portion 2b formed on the second plate 2 side.

The storage portion 2b is a substantially U-shaped shape arranged in a transverse shape along the length direction of the first plate 2, and the upper side a is inclined in a tapered shape from the center to each end c, and the upper side a is located on the upper side a. The lower side is formed by the lower side b which is gently inclined compared to the upper side a, and the ends c of the upper side a and the lower side b are combined in an arc shape. The upper side a is inclined downward toward the end c, and the widths of the upper side a and the lower side b are made into a tapered shape that gradually narrows toward the end c. In addition, the depth of the concave shape of the storage portion 2b is formed so that the depth of the flow path gradually becomes shallower toward the end c.

4 shows a perspective view of the left half of the first board 2 and FIG. 5 shows a partial perspective view of the right half of the first board 2.

At the lower sides of both sides of the inner surface of the first plate 2, taper portions 2d for spray diffusion are formed in a stepped shape, respectively. Each taper portion 2d is formed as a step portion cut inwardly into a concave shape. The upper end portion is located at the end portion c of the storage portion 2b, and the lower end portion is located at the protrusion for forming a nozzle protruding from the lower portion of the inner surface of the first plate 2. The upper part of the portion 2c plays a role of guiding the liquid agent flowing from the center portion of the storage portion 2b toward the end portion c to flow toward the end portion 4a of the nozzle 4.

When in operation, as shown by the arrow in Figure 3, the liquid supplied from the inflow portion 5a to the storage portion 2b flows from the lower side b of the storage portion 2b to the side of the nozzle 4, and a part of it faces the end of the storage portion 2b c mobile. In this case, since the storage portion 2b is tapered and becomes wider and inclined toward the end c, the fluid of the liquid agent is discharged while the fluid velocity of the liquid agent is maintained, and the spray S system can be as shown by Sa It does not shrink the flow but sprays towards the outside in an expanded state. Even if it is used in a single piece, it can spray a wide range more than the conventional one.

Since the liquid can be sprayed uniformly over the entire range of the nozzle 4 and the speed of the liquid reaching the end 4a can be reduced, the liquid can not be stocked or accumulated. Due to the decrease in the stocking liquid, the maintenance frequency is drastically reduced.

Furthermore, since the spray S does not shrink and expands outward, even if a plurality of liquid slit nozzles 1 are connected in the longitudinal direction by an appropriate connecting means for lengthening, the spray S between the connections will not be interrupted. , Can be sprayed continuously and evenly throughout the elongated range.

In addition, since the depth of the storage portion 2b gradually becomes shallower toward the end portion c, it can interact with the case where the width gradually narrows toward the end portion c, and the liquid can be discharged while maintaining the fluid velocity of the liquid.

Fig. 6 is a conceptual diagram showing the state of spray S of the product of the present invention. Shows the spray state with a slit length of 100mm, a slit width of 0.5mm, and a water pressure of 0.03MPa. There will be no contraction like the conventional product shown in Fig. 7, but a spray that expands.

The invention is not limited to the use of liquid coating for road engineering, and can be applied to many fields such as food coating, electronics industry, development, etching, liquid coating, cleaning and flushing, paint, glaze coating, cleaning, and coating. In addition, it is especially suitable for higher viscosity liquids.

For high-viscosity liquids, for example, chocolate in the food industry, developing solutions, etching solutions, and moisture-proof coating solutions used in the electronics industry, and others are adhesives. When such a liquid agent is used in a conventional nozzle, in particular, a contraction flow is formed and the spray cannot be expanded, but the spray can be expanded according to the present invention.

1: Slit nozzle for liquid 2: First board 2a: The inner surface of the first board 2b: Storage section 2c: protrusion 2d: cone 3: 2nd board 3a: The inner surface of the second plate 4: spout 4a: spout end 5: Hole 5a: Inflow part 6: fixing screws 6a: Fixing screw receiving part 7: Mounting hole 8: Flow path 9: protrusion

Fig. 1 is a perspective view of the appearance of a slit nozzle for liquid according to an embodiment of the present invention. Fig. 2 is a longitudinal sectional view of the liquid slit nozzle. Fig. 3 is an explanatory view of the outer surface of a plate constituting the slit nozzle for liquid viewed from above. Figure 4 is a perspective view of the left half of another board. Figure 5 is a perspective view of the right half of the same as above. Fig. 6 is an explanatory diagram showing the spray state when using the product of the present invention. Fig. 7 is an explanatory diagram showing the spray state when a conventional product is used.

2a: The inner surface of the first board

2b: Storage section

2c: protrusion

2d: cone

3: 2nd board

4: spout

4a: spout end

5: Hole

5a: Inflow part

6: fixing screws

7: Mounting hole

9: protrusion

a: top

b: bottom

c: end

S, Sa: spray

Claims (2)

A slit nozzle for liquid, which is characterized by It is provided with: a first plate 2 which is a plate with a predetermined thickness and is rectangular; and a second plate 3 which is opposed to and joined to the inner surface 2a of the first plate 2, A hole-shaped inflow portion 5a for supplying liquid agent to the inside is formed in the center of the second plate 3, and a concave shape for storing the liquid agent from the inflow portion 5a is formed on the inner surface 2a of the first plate 2. The storage portion 2b is formed in a shape in which a substantially U-shaped shape is arranged horizontally along the longitudinal direction of the second plate 2 and has a tapered upper side a inclined from the center to each end c , And a tapered lower side b located below the upper side a and gently inclined than the upper side a. The ends c of the upper side a and the lower side b are combined, and the width of the storage portion 2b is formed from the central portion Each end portion c is narrowed, the depth of the storage portion 2b becomes shallower toward each end portion c, and each end portion c is formed with a taper portion 2d formed on the first plate 2 from the end portion c toward The end 4a of the nozzle 4 at the front end between the second plates 3 extends to guide the liquid to flow toward the end 4a. Such as the slit nozzle for liquid of claim 1, where The protrusions 9 with a circular cross-section are protrudingly arranged at appropriate intervals, and a protrusion 2c for forming a nozzle is formed in the lower part thereof. The protrusions 9 are formed in the storage portion 2b formed on the inner surface 2a of the first plate 2. The flow path 8 is formed on the lower side.

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