WO2020062365A1 - 一种用于显示面板的制造设备和清洗方法 - Google Patents

一种用于显示面板的制造设备和清洗方法 Download PDF

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Publication number
WO2020062365A1
WO2020062365A1 PCT/CN2018/111184 CN2018111184W WO2020062365A1 WO 2020062365 A1 WO2020062365 A1 WO 2020062365A1 CN 2018111184 W CN2018111184 W CN 2018111184W WO 2020062365 A1 WO2020062365 A1 WO 2020062365A1
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WO
WIPO (PCT)
Prior art keywords
liquid supply
supply device
liquid
machine
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2018/111184
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English (en)
French (fr)
Inventor
刘重阳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
Original Assignee
HKC Co Ltd
Chongqing HKC Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HKC Co Ltd, Chongqing HKC Optoelectronics Technology Co Ltd filed Critical HKC Co Ltd
Priority to US16/313,896 priority Critical patent/US11513378B2/en
Publication of WO2020062365A1 publication Critical patent/WO2020062365A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0652—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in parallel

Definitions

  • the present application relates to the field of display technology, and in particular, to a manufacturing device and a cleaning method for a display panel.
  • liquid crystal displays have become mainstream products due to their thin body, power saving and low radiation, which have been widely used.
  • Most of the liquid crystal displays known to the inventors are backlight type liquid crystal displays, which include a liquid crystal panel and a backlight module.
  • the working principle of a liquid crystal panel is to place liquid crystal molecules in two parallel glass substrates, and apply a driving voltage to the two glass substrates to control the rotation direction of the liquid crystal molecules so as to refract the light of the backlight module to generate a picture.
  • the thin film transistor liquid crystal display includes a liquid crystal panel and a backlight module.
  • the liquid crystal panel includes a color filter substrate (Color Filter Substrate, also called a color filter substrate), and a thin film transistor array substrate (Thin Film Transistor Substrate, TFT Substrate).
  • a mask a transparent conductive film exists on the opposite inner side of the color filter substrate and the array substrate.
  • the present application provides a manufacturing apparatus and a cleaning method for a display panel, which improve the stability of the display panel process.
  • the present application provides a manufacturing device for a display panel, including:
  • a working pipe is provided in the first direction of the machine and is configured to transport materials to act on the glass substrate;
  • a gas supply device in communication with the working pipeline through a gas supply pipeline
  • a liquid supply device which communicates with the working pipeline through a liquid supply pipeline
  • the machine is provided with a detection device configured to detect the state of the glass substrate conveyed on the machine
  • the gas supply pipeline is provided with a first automatic valve
  • the liquid supply pipeline is provided with a second automatic valve.
  • Valve the detection device is coupled to the first automatic valve and the second automatic valve.
  • the liquid supply device includes a first liquid supply device, and the first liquid supply device includes a first liquid inlet and a first manual valve disposed between the first liquid inlet and the second automatic valve.
  • a valve, the first liquid inlet and the first manual valve are arranged on the liquid supply pipeline, and the first liquid supply device outputs the first material liquid to the working pipeline through the liquid supply pipeline.
  • the liquid supply device includes a second liquid supply device, and the second liquid supply device includes a second liquid inlet and a second hand disposed between the second liquid inlet and the second automatic valve.
  • the valve is operated, the second liquid inlet and the second manual valve are arranged on the liquid supply pipeline, and the second liquid supply device outputs the second material liquid to the working pipeline through the liquid supply pipeline.
  • the air supply device includes an air inlet, a pressure regulating valve, and a third manual valve, and the air inlet, the pressure regulating valve, and a third manual valve are provided on the air supply line, and the air regulating device
  • the pressure valve is close to the air inlet
  • the third manual valve is close to the working pipeline
  • the first automatic valve is located between the pressure regulating valve and the third manual valve
  • the air supply device passes through
  • the gas supply pipeline outputs compressed gas to the working pipeline.
  • an air knife is provided on a side of the working pipe near the machine, and a distance between an end of the working pipe near the machine and the machine is greater than a thickness of the glass substrate, and the wind
  • the knife edge is a strip-shaped opening, and the air knife edge is consistent with the installation direction of the working pipe.
  • the length of the air knife edge is greater than the length of the glass substrate and the air knife edge in the corresponding direction, and smaller than the length of the working pipe.
  • a distance between an end of the working pipe near the machine and the machine is greater than a thickness of the glass substrate, and a stopper for dividing the working pipe into two independent pipes is provided inside the working pipe.
  • the working pipe includes a first pipe and a second pipe, a side of the first pipe near the machine is provided with an air knife, and a side of the second pipe near the machine is provided with a group of communication channels. Hole, the first pipe and the second pipe do not work at the same time.
  • the present application further provides a manufacturing device for a display panel, including: a machine set configured to carry and transfer a glass substrate;
  • a working pipe is provided in the first direction of the machine, and is configured to transport materials to act on the glass substrate.
  • a side of the working pipe near the machine is provided with an air knife, and the working pipe is close to the machine.
  • the distance between one end of the table and the machine is greater than the thickness of the glass substrate, the air knife edge is a long opening, the air knife edge is consistent with the direction of the working pipe, and the length of the air knife edge is greater than A length of the glass substrate corresponding to the direction of the wind knife edge, and less than a length of the working pipe;
  • An air supply device communicates with the working pipeline through an air supply line.
  • the air supply device includes an air inlet, a pressure regulating valve, a first automatic valve, and a third manual valve.
  • the air inlet, the pressure regulating valve, the first An automatic valve and a third manual valve are provided on the air supply line, the pressure regulating valve is close to the air inlet, the third manual valve is close to the working pipe, and the first automatic valve is located in the adjusting pipe.
  • the air supply device outputs compressed gas to the working pipeline through the air supply line;
  • the liquid supply device communicates with the working pipeline through a liquid supply pipeline, and the liquid supply pipeline is provided with a second automatic valve;
  • the liquid supply device includes a first liquid supply device.
  • the first liquid supply device includes a first liquid inlet and a first manual valve provided between the first liquid inlet and the second automatic valve.
  • a first liquid inlet and a first manual valve are arranged on the liquid supply pipeline, and the first liquid supply device outputs a first material liquid to the working pipeline through the liquid supply pipeline;
  • the liquid supply device includes a second liquid supply device, and the second liquid supply device includes a second liquid inlet and a second manual valve provided between the second liquid inlet and the second automatic valve.
  • the second liquid inlet and the second manual valve are arranged on the liquid supply pipeline, and the second liquid supply device outputs the second material liquid to the working pipeline through the liquid supply pipeline;
  • the machine is provided with a detection device configured to detect the state of the glass substrate conveyed on the machine, and the detection device is coupled to the first automatic valve and the second automatic valve.
  • the present application provides a cleaning method including the above-mentioned manufacturing equipment for a display panel, including:
  • the detection device detects the running status of the machine and outputs a control signal
  • Opening or closing the first automatic valve and the second automatic valve according to the control signal.
  • the operating state includes a state of a carrier board, and when the detecting device detects that the machine is in a carrier board state, the first automatic valve and the second automatic valve are controlled to be opened or closed according to the control signal.
  • the methods include:
  • the detection device outputs the control signal to the first automatic valve to turn on the air supply device
  • the detection device outputs the control signal to the second automatic valve to close the liquid supply device
  • the air supply device delivers compressed gas to the working pipeline, the compressed gas is blown out to the surface of the glass substrate through the air knife port, and the compressed gas blows the residual chemical solution on the glass substrate Take off.
  • the chemical solution includes an etching solution.
  • the running state includes a no-load state
  • the detecting device detects that the machine is in a no-load state
  • the detection device outputs the control signal to the first automatic valve to close the air supply device
  • the detection device outputs the control signal to the second automatic valve to turn on the liquid supply device
  • the first manual valve is in a closed state
  • the second liquid supply device sends the second material liquid to the working pipeline
  • the second material liquid flows from the air knife port to the machine, so
  • the second material liquid is deionized water.
  • oxalic acid When wet-etching the transparent conductive film on the glass substrate, oxalic acid is used to etch the transparent conductive film. Because oxalic acid reacts with the transparent conductive film, it is easy to crystallize.
  • the gas supply device supplies gas to the working pipe, the gas During the processing of the etched glass substrate, the residual chemical liquid on the glass substrate is easily splashed and adsorbed on the outlet of the working pipe, and crystallizes on the outlet, causing the outlet to be blocked.
  • the gas pressure in the working pipe after the blockage becomes large, making the effect The force on the glass substrate becomes large, which easily causes the photoresist on the glass substrate to fall off.
  • a detection device is provided.
  • the detection device is coupled to the first automatic valve of the gas supply device and the second automatic valve of the liquid supply device.
  • the detection device can control the working state of the first automatic valve or the second automatic valve, thereby controlling The working state of the gas supply device or liquid supply device.
  • the liquid supply device provides cleaning liquid to the working pipeline
  • the machine and the working pipeline can be cleaned to slow down the crystallization speed at the outlet of the working pipeline or remove the crystallization at the outlet of the working pipeline. Therefore, the occurrence of crystallization of the working pipeline is reduced, the photoresist on the glass substrate is reduced, and finally the stability of the display panel process is improved and the production cost of the display panel is saved.
  • FIG. 1 is a schematic diagram of a manufacturing device according to an embodiment of the present application.
  • FIG. 2 is a schematic diagram of a working pipeline according to an embodiment of the present application.
  • FIG. 3 is a schematic cross-sectional view of a working pipe according to an embodiment of the present application.
  • FIG. 4 is a schematic cross-sectional view of another working pipeline according to an embodiment of the present application.
  • FIG. 5 is a schematic diagram of an opening of a working pipe according to an embodiment of the present application.
  • FIG. 6 is a schematic cross-sectional view of another working pipeline according to an embodiment of the present application.
  • FIG. 7 is a schematic flowchart of a cleaning method according to an embodiment of the present application.
  • FIG. 8 is a schematic flowchart of another cleaning method according to an embodiment of the present application.
  • an embodiment of the present application discloses a manufacturing device 100 for a display panel, including:
  • the machine 101 is configured to carry and transfer the glass substrate 102;
  • the working pipe 103 is provided in the first direction of the machine table 101 and is configured to transport materials to act on the glass substrate 102;
  • the gas supply device 104 communicates with the working pipe 103 through the gas supply line 106, and
  • the liquid supply device 105 communicates with the working pipe 103 through the liquid supply pipe 107;
  • the machine 101 is provided with a detection device 108 configured to detect the state of the glass substrate 102 on the machine 101.
  • the gas supply line 106 is provided with a first automatic valve 110 and the liquid supply line 107 is provided with a second automatic valve 111.
  • the detection device 108 is coupled to the first automatic valve 110 and the second automatic valve 111.
  • the first direction is above the machine.
  • the transparent conductive film on the glass substrate 102 is wet-etched, the transparent conductive film is etched with oxalic acid. Because the oxalic acid reacts with the transparent conductive film, it is easy to crystallize.
  • the gas supply device 104 supplies gas to the working pipe 103, the working pipe 103
  • the internal gas is used to process the etched glass substrate 102, the residual chemical liquid on the glass substrate 102 is easily splashed and adsorbed on the outlet of the work pipe 103, and crystallizes on the outlet, causing the outlet to be blocked.
  • a detection device 108 is provided.
  • the detection device 108 is coupled to the first automatic valve 110 of the gas supply device 104 and the second automatic valve 111 of the liquid supply device 105.
  • the detection device 108 can control the first automatic valve 110 or the second automatic valve 110.
  • the working state of the automatic valve 111 controls the working state of the gas supply device 104 or the liquid supply device 105.
  • the crystallization speed at the outlet of the working pipe 103 or the crystallization at the outlet of the working pipe 103 is removed, thereby reducing the occurrence of crystallization of the working pipe 103, reducing the photoresist on the glass substrate 102, and ultimately saving costs and improving the stability of the display panel process.
  • the liquid supply device 105 includes a first liquid supply device 112, and the first liquid supply device 112 includes a first liquid inlet 113 and a first liquid inlet 113 disposed between the first liquid inlet 113 and the second automatic valve 111.
  • the first manual valve 114, the first liquid inlet 113, and the first manual valve 114 are disposed on the liquid supply pipe 107.
  • the first liquid supply device 112 outputs the first material liquid 115 to the working pipe 103 through the liquid supply pipe 107.
  • the second automatic valve 111 When the second automatic valve 111 receives a signal from the detection device 108 coupled thereto, the second automatic valve 111 opens the first liquid supply device 112, and the first manual valve 114 is provided on the liquid supply line 107, and the first Between a liquid inlet 113 and the second automatic valve 111, according to the needs of the working pipeline 103, the first manual valve 114 adjusts the flow rate of the first material liquid 115 input from the first liquid inlet 113 into the liquid supply pipeline.
  • the first liquid supply device 112 is opened and used during the maintenance of the machine 101, and the working pipe 103 and the machine 101 are cleaned at the same time.
  • the first material liquid 115 includes hydrochloric acid or other acidic liquid.
  • an air knife edge 124 is provided on a side of the working pipe 103 near the machine 101.
  • the distance between the end of the working pipe 103 near the machine 101 and the machine 101 is greater than the thickness of the glass substrate 102.
  • the air knife 124 is long.
  • the strip-shaped openings, the air knife edge 124 and the working pipe 103 are arranged in the same direction.
  • the length of the air knife edge 124 is greater than the length of the glass substrate 102 and the air knife edge 124 in the corresponding direction, and smaller than the length of the work pipe 103.
  • the glass substrate 102 moves between the work pipe 103 and the machine 101.
  • the height of the end of the work pipe 103 near the machine 101 and the machine 101 is greater than the thickness of the glass substrate 102. Avoid the glass substrate 102. Stuck or unable to pass under the working pipe 103, causing damage to the glass substrate 102 or the working pipe 103.
  • the length of the air knife edge 124 is greater than the length of the corresponding direction of the glass substrate 102 and the air knife edge 124, which can ensure that the glass substrate 102 can completely contact the wind from the air knife edge 124 when passing through the work pipe 103, and avoid the glass substrate 102 passing through the work pipe 103.
  • the length of the air knife edge 124 should be less than the length of the work pipe 103, and reduce idleness, because it is equal to or exceeds the length of the work pipe 103, it will cause most of the air knife to be idle, and it will also waste a lot of compressed air. In the outside world, it affects the operation of the machine and reduces production efficiency.
  • the length of the working pipe 103 is 2 meters, and the opening width of the air knife edge 124 is 2 mm.
  • the distance between one end of the machine 101 and the machine 101 is greater than the thickness of the glass substrate 102.
  • the inside of the working pipe 103 is provided with a baffle 129 that divides the working pipe 103 into two independent pipes.
  • the working pipe 103 includes a first pipe 125 and a second pipe. Duct 126, a side of the first duct 125 near the machine 101 is provided with a wind knife edge 124, a side of the second duct 126 near the machine 101 is provided with a set of through holes 127, the first pipe 125 and the second pipe 126 do not work at the same time .
  • the working pipe 103 is divided into two by providing a baffle 129 inside the working pipe 103, namely a first pipe 125 and a second pipe 126, the first pipe 125 is provided with an air knife edge 124, and the second pipe 126 is provided with a through hole 127.
  • the main function of the first pipe 125 is to blow the compressed gas 123 provided by the gas supply device 104 through the air knife port 124 to remove the residual chemical liquid on the glass substrate 102, so as to prevent the residual chemical liquid from staying on the glass substrate 102 due to corrosion resistance or other structures.
  • the second pipe 126 is used to spray the liquid provided by the liquid supply device 105 through the through hole 127. If the liquid supply device 105 is provided with an etching liquid, the etching liquid can be sprayed through the through hole 127 to the glass substrate 102. When etching is performed, if the cleaning device is provided by the liquid supply device 105, the machine 101 can be cleaned by spraying the cleaning liquid touched through the through hole 127, and the working pipe 103 can also be cleaned at the same time.
  • the above two pipelines realize the multifunctionalization of the working pipeline 103, and the two sets of pipelines are switched without affecting each other.
  • the working pipe 103 can also be divided into a first pipe 125, a second pipe 126, and a third pipe 128 that are not connected to each other through three baffles 129.
  • the first pipe 125 is provided with a through hole 127
  • the second pipe 126 is provided with an air knife edge 124
  • the third pipe 128 is provided with an air knife edge 124 and a through hole 127.
  • the working pipe 103 can be rotated around the center of the pipe.
  • the working pipe 103 is adjusted so that the through hole 127 of the first pipe 125 corresponds to the machine 101, the air knife edge 124 of the second pipe 126 corresponds to the machine 101, or the through hole 127 of the third pipe 128 and the air knife 124 and the machine 101, respectively.
  • the multifunctionalization of the working pipeline 103 was realized, and the three groups of pipelines were switched without affecting each other.
  • the liquid supply device 105 further includes a second liquid supply device 116, and the second liquid supply device 116 includes a second liquid inlet 117 and a device.
  • a second manual valve 118 between the second liquid inlet 117 and the second automatic valve 111, the second liquid inlet 117 and the second manual valve 118 are provided on the liquid supply pipeline 107, and the second liquid supply device 116 outputs the second material liquid 119 to the working pipe 103 through the liquid supply pipe 107.
  • the second automatic valve 111 When the second automatic valve 111 receives a signal from the detection device 108 coupled thereto, the second automatic valve 111 can also open the second liquid supply device 116, and the second manual valve 118 is provided on the liquid supply line 107. And between the second liquid inlet 117 and the second automatic valve 111, according to the needs of the working pipe 103, the second manual valve 118 adjusts the flow rate of the second material liquid 119 input to the liquid supply pipe by the second liquid inlet 117 .
  • the second liquid supply device 116 is turned on and used when the chemical liquid is changed in other sections of the machine 101 or the glass substrate 102 is still in other sections, and the second material liquid 119 includes deionized water.
  • the air supply device 104 includes an air inlet 120, a pressure regulating valve 121, and a third manual valve 122.
  • the pressure valve 121 and the third manual valve 122 are arranged on the air supply line 106.
  • the pressure regulating valve 121 is close to the air inlet 120
  • the third manual valve 122 is close to the working pipe 103
  • the first automatic valve 110 is located on the pressure regulating valve 121 and the first
  • the gas supply device 104 outputs the compressed gas 123 to the working pipeline 103 through the gas supply line 106.
  • the first automatic valve 110 When the first automatic valve 110 receives a signal from the detection device 108 coupled to the first automatic valve 110, the first automatic valve 110 opens the air supply device 104, and the pressure regulating valve 121 on the air supply line 106 is used to adjust the air inlet 120 to the input supply.
  • the third manual valve 122 is used to adjust the flow of the compressed gas 123, so that the compressed gas 123 input to the working pipeline 103 meets the needs, which is enough to blow away the residual chemical liquid on the glass substrate 102 and to Avoid wind off the photoresist on the Brown glass substrate 102.
  • the compressed gas 123 includes clean compressed air.
  • a manufacturing apparatus 100 for a display panel including:
  • the machine 101 is configured to carry and transfer the glass substrate 102;
  • the working pipe 103 is provided in the first direction of the machine table 101 and is configured to transport materials to act on the glass substrate 102.
  • the side of the working pipe 103 near the machine table 101 is provided with an air knife edge 124.
  • One end of the working pipe 103 near the machine table 101 and The distance of the machine 101 is greater than the thickness of the glass substrate 102.
  • the air knife edge 124 is a long opening.
  • the air knife edge 124 is in the same direction as the working pipe 103.
  • the length of the air knife edge 124 is longer than the length of the glass substrate 102 and the air knife edge 124 in the corresponding direction. And less than the length of the working pipe 103;
  • the air supply device 104 communicates with the working pipe 103 through the air supply line 106.
  • the air supply device 104 includes an air inlet 120, a pressure regulating valve 121, a first automatic valve 110, and a third manual valve 122.
  • the valve 121, the first automatic valve 110 and the third manual valve 122 are arranged on the air supply line 106.
  • the pressure regulating valve 121 is close to the air inlet 120
  • the third manual valve 122 is close to the working pipe 103
  • the first automatic valve 110 is located at the pressure regulating
  • the gas supply device 104 outputs the compressed gas 123 to the working pipe 103 through the gas supply line 106;
  • the liquid supply device 105 communicates with the working pipeline 103 through a liquid supply pipeline 107, and a second automatic valve 111 is provided on the liquid supply pipeline 107;
  • the liquid supply device 105 includes a first liquid supply device 112.
  • the first liquid supply device 112 includes a first liquid inlet 113 and a first manual valve 114 disposed between the first liquid inlet 113 and the second automatic valve 111.
  • a liquid inlet 113 and a first manual valve 114 are provided on the liquid supply pipe 107, and the first liquid supply device 112 outputs the first material liquid 115 to the working pipe 103 through the liquid supply pipe 107;
  • the liquid supply device 105 includes a second liquid supply device 116.
  • the second liquid supply device 116 includes a second liquid inlet 117 and a second manual valve 118 provided between the second liquid inlet 117 and the second automatic valve 111.
  • the second liquid inlet 117 and the second manual valve 118 are provided on the liquid supply pipe 107, and the second liquid supply device 116 outputs the second material liquid 119 to the working pipe 103 through the liquid supply pipe 107;
  • the machine 101 is provided with a detection device 108 configured to detect the state of the glass substrate 102 on the machine 101, and the detection device 108 is coupled to the first automatic valve 110 and the second automatic valve 111.
  • a detection device 108 is provided to detect the running state of the glass substrate 102 on the machine 101.
  • the detection device 108 is coupled to the first automatic valve 110 of the gas supply device 104 and the second automatic valve 111 of the liquid supply device 105. According to the detected The operating state of the machine 101, the detection device 108 can control the working state of the first automatic valve 110 or the second automatic valve 111 by transmitting a control signal 109 to the first automatic valve 110 or the second automatic valve 111, thereby controlling the air supply device 104 or the working state of the liquid supply device 105.
  • the machine 101 and the working pipe 103 can be cleaned to slow down the crystallization speed at the outlet of the working pipe 103 or remove the crystallization at the outlet of the working pipe 103, thereby reducing the working pipe.
  • the occurrence of 103 crystallization can reduce the photoresist on the glass substrate 102, which ultimately saves costs and improves the stability of the display panel process.
  • the first automatic valve 110 When the first automatic valve 110 receives a signal from the detection device 108 coupled to the first automatic valve 110, the first automatic valve 110 opens the air supply device 104, and the pressure regulating valve 121 on the air supply line 106 is used to adjust the air inlet 120 to the input supply.
  • the third manual valve 122 is used to adjust the flow of the compressed gas 123, so that the compressed gas 123 input to the working pipeline 103 meets the needs, which is enough to blow away the residual chemical liquid on the glass substrate 102 and to Avoid wind off the photoresist on the Brown glass substrate 102.
  • the second automatic valve 111 When the second automatic valve 111 receives a signal from the detection device 108 coupled thereto, the second automatic valve 111 opens the first liquid supply device 112, and the first manual valve 114 is provided on the liquid supply line 107, and the first Between a liquid inlet 113 and a second automatic valve 111, according to the needs of the working pipe 103, the first manual valve 114 adjusts the flow rate of the first material liquid 115 input from the first liquid inlet 113 into the liquid supply pipe.
  • the liquid 115 includes a hydrochloric acid solution or other acidic solution.
  • the second automatic valve 111 When the second automatic valve 111 receives a signal from the detection device 108 coupled thereto, the second automatic valve 111 can also open the second liquid supply device 116, and the second manual valve 118 is provided on the liquid supply line 107. And between the second liquid inlet 117 and the second automatic valve 111, according to the needs of the working pipe 103, the second manual valve 118 adjusts the flow rate of the second material liquid 119 input to the liquid supply pipe by the second liquid inlet 117
  • the second material liquid 119 includes deionized water. Passing the deionized water into the working pipe 103 can delay the crystallization time of the drug attached to the air knife 124 and reduce the occurrence of crystallization.
  • the temperature of the deionized water is 35 ° C to 45 ° C, and the effect of delaying the crystallization of the drug is the best when the temperature of the deionized water is 40 ° C.
  • a cleaning method including the above-mentioned manufacturing equipment 100 for a display panel including:
  • the detection device 108 detects the running state of the machine 101 and outputs a control signal 109;
  • S200 Control the opening or closing of the doors of the first automatic valve 110 and the second automatic valve 111 according to the control signal 109.
  • the opening of the first automatic valve 110 and the second automatic valve 111 are opened or closed, thereby realizing automatic control, reducing manpower input, and saving production costs.
  • the operating state includes a carrier board state.
  • the detection device 108 detects that the machine 101 is in the carrier board state, the opening or closing of the doors of the first automatic valve 110 and the second automatic valve 111 is controlled according to the control signal 109.
  • Methods include S300:
  • the detection device 108 outputs a control signal 109 to the first automatic valve 110 to turn on the air supply device 104;
  • the detection device 108 outputs a control signal 109 to the second automatic valve 111 to close the liquid supply device 105;
  • the gas supply device 104 sends gas to the working pipe 103, the gas is blown out to the surface of the glass substrate 102 through the wind knife edge 124, and the gas blows off the residual chemical solution on the glass substrate 102.
  • the chemical solution includes an etching solution.
  • the machine 101 transfers the glass substrate 102 to the second direction of the working pipe 103.
  • the surface is purged to remove residual chemical liquid, so the detection device 108 needs to output a control signal 109 to the first automatic valve 110 to turn on the gas supply device 104, and at the same time output a control signal 109 to the second automatic valve 111 to turn off the liquid supply device 105.
  • the second direction is below the working pipe.
  • the running state includes a no-load state.
  • the detection device 108 detects that the machine 101 is in a no-load state, the opening or closing of the doors of the first automatic valve 110 and the second automatic valve 111 is controlled according to the control signal 109.
  • Methods include S400:
  • the detection device 108 outputs a control signal 109 to the first automatic valve 110 to close the gas supply device 104;
  • the detection device 108 outputs a control signal 109 to the second automatic valve 111 to turn on the liquid supply device 105;
  • the first manual valve 114 is in a closed state
  • the second liquid supply device 116 sends the second material liquid 119 to the working pipe 103
  • the second material liquid 119 flows from the air knife 124 to the machine 101
  • the second material liquid 119 is deionized water.
  • the glass substrate 102 will not move in the second direction of the working pipe 103 because the residual chemical liquid on the glass substrate 102 was processed before, so that the chemical liquid from the air knife edge 124 of the working pipe 103 remains, which is easy Crystallization.
  • Inputting deionized water to the working pipe 103 through the liquid supply device 105 can delay the crystallization time of the liquid at the blade 124 and reduce the occurrence of crystallization. Therefore, in the no-load state, it is necessary to output the control signal 109 to the first automatic valve 110 to close.
  • the gas supply device 104 and the detection device 108 simultaneously output a control signal 109 to the second automatic valve 111 to turn on the liquid supply device 105.
  • the machine 101 needs to be maintained at one time interval.
  • the method for controlling the opening or closing of the first and second automatic valves 110 and 111 according to the control signal 109 includes S400:
  • the detection device 108 outputs a control signal 109 to the first automatic valve 110 to close the gas supply device 104;
  • the detection device 108 outputs a control signal 109 to the second automatic valve 111 to turn on the liquid supply device 105;
  • the second manual valve 118 is in a closed state, the first liquid supply device 112 sends the first material liquid 115 to the working pipe 103, the first material liquid 115 flows from the air knife 124 to the machine 101, and the first material liquid 115 is hydrochloric acid Solution or other acidic solution.
  • the first liquid supply device 112 does not need to be additionally installed.
  • the maintenance of the machine 101 uses the first liquid supply device 112 to clean the machine 101. Therefore, in this embodiment, the first liquid supply device 112 is used to clean the working pipe 103 and the air knife edge. 124 does not require additional equipment investment, saving production costs.
  • the panel of the present application may be a TN panel (full name is Twisted Nematic, that is, a twisted nematic panel), an IPS panel (In-Pane Switching, plane conversion), a VA panel (Multi-domain Vertical Alignment), Of course, other types of panels can also be used, as long as they are applicable.
  • TN panel full name is Twisted Nematic, that is, a twisted nematic panel
  • IPS panel In-Pane Switching, plane conversion
  • VA panel Multi-domain Vertical Alignment

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Abstract

用于显示面板的制造设备(100)，包括：机台(101)，用于承载和传送玻璃基板(102)；工作管道(103)设在机台的上方，用于输送物料作用于玻璃基板；供气装置(104)，与工作管道通过供气管路(106)连通；供液装置(105)，与工作管道通过供液管路(107)连通；机台上设有用于检测机台上传送玻璃基板状态的检测装置(108)，供气管路上设有第一自动阀(110)，供液管路上设有第二自动阀(111)，检测装置与第一自动阀和第二自动阀耦接。清洗时，检测装置检测机台的运行状态，输出控制信号；根据控制信号(109)控制第一自动阀和第二自动阀的开启或关闭。通过上述结构减缓工作管道出口上的结晶速度或除掉工作管道出口的结晶，从而减少工作管道结晶情况的发生。

Description

一种用于显示面板的制造设备和清洗方法
本申请要求于2018年9月30日提交中国专利局、申请号为CN 201811158805.3、发明名称为“一种用于显示面板的制造设备和清洗方法”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及显示技术领域，尤其涉及一种用于显示面板的制造设备和清洗方法。
背景技术
这里的陈述仅提供与本申请有关的背景信息，而不必然地构成现有技术。
随着科技的发展和进步，液晶显示器由于具备机身薄、省电和辐射低等热点而成为显示器的主流产品，得到了广泛应用。发明人知晓的液晶显示器大部分为背光型液晶显示器，其包括液晶面板及背光模组(backlight module)。液晶面板的工作原理是在两片平行的玻璃基板当中放置液晶分子，并在两片玻璃基板上施加驱动电压来控制液晶分子的旋转方向，以将背光模组的光线折射出来产生画面。
其中，薄膜晶体管液晶显示器(Thin Film Transistor-Liquid Crystal Display，TFT-LCD)由于具有低的功耗、优异的画面品质以及较高的生产良率等性能，目前已经逐渐占据了显示领域的主导地位。同样，薄膜晶体管液晶显示器包含液晶面板和背光模组，液晶面板包括彩膜基板(Color Filter Substrate，CF Substrate，也称彩色滤光片基板)、薄膜晶体管阵列基板(Thin Film Transistor Substrate，TFT Substrate)和光罩(Mask)，上述彩膜基板和阵列基板的相对内侧存在透明导电薄膜。
在液晶显示面板的制造过程，制造设备上有些管道的出料口或出风口容易被制造过程中的药液附着结晶，堵塞出料口或出风口，严重影响显示面板制程的稳定性，从而降低了显示面板的良率，最终造成成本 增大。
技术解决方案
本申请提供一种提高显示面板制程的稳定性的用于显示面板的制造设备和清洗方法。
为实现上述目的，本申请提供了一种用于显示面板的制造设备，包括：
机台，设置为承载和传送玻璃基板；
工作管道，设在所述机台的第一方向，设置为输送物料作用于所述玻璃基板；
供气装置，与所述工作管道通过供气管路连通,以及
供液装置，与所述工作管道通过供液管路连通；
其中，所述机台上设有设置为检测所述机台上传送所述玻璃基板状态的检测装置，所述供气管路上设有第一自动阀，所述供液管路上设有第二自动阀，所述检测装置与所述第一自动阀和所述第二自动阀耦接。
可选的，所述供液装置包括第一供液装置，所述第一供液装置包括第一进液口和设置在第一进液口和所述第二自动阀之间的第一手动阀，所述第一进液口和第一手动阀设置在所述供液管路上，所述第一供液装置通过所述供液管路向所述工作管道输出第一料液。
可选的，所述供液装置包括第二供液装置，所述第二供液装置包括第二进液口和设置在第二进液口和所述第二自动阀之间的第二手动阀，所述第二进液口和第二手动阀设置在所述供液管路上，所述第二供液装置通过所述供液管路向所述工作管道输出第二料液。
可选的，所述供气装置包括进气口、调压阀、和第三手动阀，所述进气口、调压阀、和第三手动阀设置在所述供气管路上，所述调压阀靠近所述进气口，所述第三手动阀靠近所述工作管道，所述第一自动阀位于所述调压阀和所述第三手动阀之间，所述供气装置通过所述供气管路向所述工作管道输出压缩气体。
可选的，所述工作管道靠近所述机台的一侧设置有风刀口，所述工作管道靠近所述机台的一端与所述机台的距离大于所述玻璃基板的 厚度，所述风刀口为长条状开口，所述风刀口与所述工作管道的设置方向一致，所述风刀口的长度大于所述玻璃基板与所述风刀口对应方向的长度，且小于所述工作管道的长度。
可选的，所述工作管道靠近所述机台的一端与所述机台的距离大于所述玻璃基板的厚度，所述工作管道的内部设置有将所述工作管道分成两个独立管道的挡板，所述工作管道包括第一管道和第二管道，所述第一管道靠近所述机台的一侧设置有风刀口，所述第二管道靠近所述机台的一侧设置有一组通孔，所述第一管道和所述第二管道不同时工作。
为实现上述目的，本申请还提供了一种用于显示面板的制造设备，包括：机台，设置为承载和传送玻璃基板；
工作管道，设在所述机台的第一方向，设置为输送物料作用于所述玻璃基板，所述工作管道靠近所述机台的一侧设置有风刀口，所述工作管道靠近所述机台的一端与所述机台的距离大于所述玻璃基板的厚度，所述风刀口为长条状开口，所述风刀口与所述工作管道的设置方向一致，所述风刀口的长度大于所述玻璃基板与所述风刀口对应方向的长度，且小于所述工作管道的长度；
供气装置，与所述工作管道通过供气管路连通，所述供气装置包括进气口、调压阀、第一自动阀和第三手动阀，所述进气口、调压阀、第一自动阀和第三手动阀设置在所述供气管路上，所述调压阀靠近所述进气口，所述第三手动阀靠近所述工作管道，所述第一自动阀位于所述调压阀和所述第三手动阀之间，所述供气装置通过所述供气管路向所述工作管道输出压缩气体；
供液装置，与所述工作管道通过供液管路连通，所述供液管路上设有第二自动阀；
所述供液装置包括第一供液装置，所述第一供液装置包括第一进液口和设置在第一进液口和所述第二自动阀之间的第一手动阀，所述第一进液口和第一手动阀设置在所述供液管路上，所述第一供液装置通过所述供液管路向所述工作管道输出第一料液；
所述供液装置包括第二供液装置，所述第二供液装置包括第二进 液口和设置在第二进液口和所述第二自动阀之间的第二手动阀，所述第二进液口和第二手动阀设置在所述供液管路上，所述第二供液装置通过所述供液管路向所述工作管道输出第二料液；
其中，所述机台上设有设置为检测所述机台上传送所述玻璃基板状态的检测装置，所述检测装置与所述第一自动阀和所述第二自动阀耦接。
为实现上述目的，本申请提供了一种包括以上所述用于显示面板的制造设备的清洗方法，包括：
检测装置检测机台的运行状态，输出控制信号；
根据所述控制信号控制所述第一自动阀和第二自动阀门的开启或关闭。
可选的，所述运行状态包括载板状态，当所述检测装置检测所述机台处于载板状态时，所述根据所述控制信号控制第一自动阀和第二自动阀门的开启或关闭的方法包括：
所述检测装置向所述第一自动阀输出所述控制信号开启所述供气装置；
所述检测装置向所述第二自动阀输出所述控制信号关闭所述供液装置；
其中，所述供气装置将压缩气体输送到所述工作管道，所述压缩气体经所述风刀口向所述玻璃基板的表面吹出，所述压缩气体将所述玻璃基板上的残余药液吹脱。
具体的，所述药液包括刻蚀液。
可选的，所述运行状态包括空载状态，当所述检测装置检测所述机台处于空载状态时，所述根据所述控制信号控制所述第一自动阀和第二自动阀门的开启或关闭的方法包括：
所述检测装置向所述第一自动阀输出所述控制信号关闭所述供气装置；
所述检测装置向所述第二自动阀输出所述控制信号开启所述供液装置；
其中，所述第一手动阀处于关闭状态，所述第二供液装置输送所述第二料液至所述工作管道，所述第二料液从所述风刀口流向所述机台，所述第二料液为去离子水。
采用湿法刻蚀玻璃基板上的透明导电薄膜时，使用草酸对透明导电薄膜进行蚀刻,因草酸与透明导电薄膜反应后易结晶,供气装置对工作管道供气后，工作管道内的气体对刻蚀后的玻璃基板处理时，玻璃基板上的残留药液容易溅起来吸附在工作管道的出口上,并在出口上结晶，导致出口堵塞，堵塞后工作管道内的气体压强变大,使得作用在玻璃基板上的力变大，易造成玻璃基板上的光阻脱落。本申请通过设置一检测装置，检测装置和供气装置的第一自动阀、供液装置的第二自动阀耦接，检测装置可以控制第一自动阀或第二自动阀的工作状态，从而控制供气装置或供液装置的工作状态，当供液装置向工作管道提供的是清洗液体时可以对机台和工作管道进行清洗，减缓工作管道出口上的结晶速度或除掉工作管道出口的结晶，从而减少工作管道结晶情况的发生，减少玻璃基板上的光阻脱落，最终提高显示面板制程的稳定性且节约显示面板的生产成本。
附图说明
所包括的附图用来提供对本申请实施例的进一步的理解，其构成了说明书的一部分，用于例示本申请的实施方式，并与文字描述一起来阐释本申请的原理。显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其他的附图。在附图中：
图1是本申请实施例一种制造设备的示意图；
图2是本申请实施例一种工作管道的示意图；
图3是本申请实施例一种工作管道的截面示意图；
图4是本申请实施例另一种工作管道的截面示意图；
图5是本申请实施例一种工作管道开口处的示意图；
图6是本申请实施例另一种工作管道的截面示意图；
图7是本申请实施例一种清洗方法的流程示意图；
图8是本申请实施例另一种清洗方法的流程示意图。
本发明的实施方式
这里所公开的具体结构和功能细节仅仅是代表性的，并且是用于描述本申请的示例性实施例的目的。但是本申请可以通过许多替换形式来具体实现，并且不应当被解释成仅仅受限于这里所阐述的实施例。
在本申请的描述中，需要理解的是，术语“中心”、“横向”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本申请和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本申请的限制。此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本申请的描述中，除非另有说明，“多个”的含义是两个或两个以上。另外，术语“包括”及其任何变形，意图在于覆盖不排他的包含。
在本申请的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本申请中的具体含义。
这里所使用的术语仅仅是为了描述具体实施例而不意图限制示例性实施例。除非上下文明确地另有所指，否则这里所使用的单数形式“一个”、“一项”还意图包括复数。还应当理解的是，这里所使用的术语“包括”和/或“包含”规定所陈述的特征、整数、步骤、操作、单元和/或组件的存在，而不排除存在或添加一个或更多其他特征、整数、步骤、操作、单元、组件和/或其组合。
下面结合附图和实施例对本申请作进一步的说明。
如图1至图3所示，本申请实施例公布了一种用于显示面板的制造设备100，包括：
机台101，设置为承载和传送玻璃基板102；
工作管道103，设在机台101的第一方向，设置为输送物料作用于玻璃基板102；
供气装置104，与工作管道103通过供气管路106连通，以及
供液装置105，与工作管道103通过供液管路107连通；
其中，机台101上设有设置为检测机台101上传送玻璃基板102状态的检测装置108，供气管路106上设有第一自动阀110，供液管路107上设有第二自动阀111，检测装置108与第一自动阀110和第二自动阀111耦接。本申请中，第一方向是机台的上方。
采用湿法刻蚀玻璃基板102上的透明导电薄膜时，使用草酸对透明导电薄膜进行蚀刻,因草酸与透明导电薄膜反应后易结晶,供气装置104对工作管道103供气后，工作管道103内的气体对刻蚀后的玻璃基板102处理时，玻璃基板102上的残留药液容易溅起来吸附在工作管道103的出口上,并在出口上结晶，导致出口堵塞，堵塞后工作管道103内的气体压强变大,使得作用在玻璃基板102上的力变大，易造成玻璃基板102上的光阻脱落。本申请通过设置一检测装置108，检测装置108和供气装置104的第一自动阀110、供液装置105的第二自动阀111耦接，检测装置108可以控制第一自动阀110或第二自动阀111的工作状态，从而控制供气装置104或供液装置105的工作状态，当供液装置105向工作管道103提供的是清洗液体时可以对机台101和工作管道103进行清洗，减缓工作管道103出口上的结晶速度或除掉工作管道103出口的结晶，从而减少工作管道103结晶情况的发生，减少玻璃基板102上的光阻脱落，最终节约成本且提高显示面板制程的稳定性。
本实施例可选的，供液装置105包括第一供液装置112，第一供液装置112包括第一进液口113和设置在第一进液口113和第二自动阀111之间的第一手动阀114，第一进液口113和第一手动阀114设置在供液管路107上，第一供液装置112通过供液管路107向工作管道103 输出第一料液115。
当第二自动阀111接收到与之耦接的检测装置108的信号时，第二自动阀111开启第一供液装置112，第一手动阀114设置在供液管路107上，并且在第一进液口113与第二自动阀111之间，根据工作管道103的需要，第一手动阀114调节第一进液口113输入供液管道的第一料液115的流量大小。
具体的，第一供液装置112在机台101进行保养时开启使用，对工作管道103以及机台101同时清洗，第一料液115包括盐酸或其他酸性液体。
本实施例可选的，工作管道103靠近机台101的一侧设置有风刀口124，工作管道103靠近机台101的一端与机台101的距离大于玻璃基板102的厚度，风刀口124为长条状开口，风刀口124与工作管道103的设置方向一致，风刀口124的长度大于玻璃基板102与风刀口124对应方向的长度，且小于工作管道103的长度。
机台101工作时,玻璃基板102在工作管道103与机台101之间移动,工作管道103靠近机台101的一端与机台101的距离的高度要大于玻璃基板102的厚度,避免玻璃基板102卡住或者无法从工作管道103下通过,造成玻璃基板102或者工作管道103的损坏。另外风刀口124的长度大于玻璃基板102与风刀口124对应方向的长度，可以保证玻璃基板102经过工作管道103时能够完全与风刀口124出来的风接触，避免玻璃基板102经过工作管道103后还残留大量药液，腐蚀光阻，影响玻璃基板102的制程。风刀口124的长度要小于工作管道103的长度，减小闲置，因为等于或者超过工作管道103的长度，会造成风刀大部分的闲置，也会浪费大量的压缩空气，另外超过工作管道103暴露在外界，影响工作人员对机器的操作，降低生产效率。
具体的，工作管道103的长度为2米，风刀口124的开口宽度为2毫米。
参考图4和图5所示，与上述实施例不同在于，工作管道103靠近
机台101的一端与机台101的距离大于玻璃基板102的厚度，工作管道 103的内部设置有将工作管道103分成两个独立管道的挡板129，工作管道103包括第一管道125和第二管道126，第一管道125靠近机台101的一侧设置有风刀口124，第二管道126靠近机台101的一侧设置有一组通孔127，第一管道125和第二管道126不同时工作。
机台101工作时,玻璃基板102在工作管道103与机台101之间移动,工作管道103靠近机台101的一端与机台101的距离的高度要大于玻璃基板102的厚度,避免玻璃基板102卡住或者无法通过,造成玻璃基板102或者工作管道103的损坏。通过在工作管道103内部设置挡板129将工作管道103一分为二，分别是第一管道125和第二管道126，第一管道125设置风刀口124，第二管道126设置通孔127。
第一管道125的主要功能是通过风刀口124将供气装置104提供的压缩气体123吹走玻璃基板102上的残留药液，避免残留药液滞留在玻璃基板102上腐蚀光阻或其他结构导致其脱落；第二管道126的作用是通过通孔127将供液装置105提供的液体喷洒出来，若供液装置105提供的是刻蚀液，可以通过通孔127喷洒刻蚀液对玻璃基板102进行蚀刻，若供液装置105提供的是清洗液，可以通过通孔127喷洒触的清洗液对机台101进行清洗，同时也是对工作管道103的清洗。以上两个管道实现了工作管道103多功能化，且两组管道切换工作，互不影响。
参考图6所示，与上述实施例不同的在于，工作管道103还可以通过三个挡板129将工作管道103分为互不连通的第一管道125、第二管道126和第三管道128，第一管道125上设置通孔127，第二管道126上设置风刀口124，第三管道128上设置风刀口124和通孔127，工作管道103可以以管道中心为中心转动，根据不同的需求将工作管道103分别调节到第一管道125的通孔127与机台101对应、第二管道126的风刀口124与机台101对应或者第三管道128的通孔127以及风刀口124与机台101对应，实现了工作管道103多功能化，且三组管道切换工作，互不影响。
作为本申请的另一实施例，参考图1所示，与上述实施例不同在于，供液装置105还包括第二供液装置116，第二供液装置116包括第二进 液口117和设置在第二进液口117和第二自动阀111之间的第二手动阀118，第二进液口117和第二手动阀118设置在供液管路107上，第二供液装置116通过供液管路107向工作管道103输出第二料液119。
当第二自动阀111接收到与之耦接的检测装置108的信号时，第二自动阀111还可以开启第二供液装置116，第二手动阀118设置在供液管路107上，并且在第二进液口117与第二自动阀111之间，根据工作管道103的需要，第二手动阀118调节第二进液口117输入供液管道的第二料液119的流量大小。
具体的，第二供液装置116在机台101的其他工段更换药液或玻璃基板102还处于其他工段时开启使用，第二料液119包括去离子水。
作为本申请的另一实施例，参考图1所示，与上述实施例不同在于，供气装置104包括进气口120、调压阀121、和第三手动阀122，进气口120、调压阀121、和第三手动阀122设置在供气管路106上，调压阀121靠近进气口120，第三手动阀122靠近工作管道103，第一自动阀110位于调压阀121和第三手动阀122之间，供气装置104通过供气管路106向工作管道103输出压缩气体123。
当第一自动阀110接收到与之耦接的检测装置108的信号时，第一自动阀110开启供气装置104，供气管路106上的调压阀121用于调节进气口120输入供气管道的压缩气体123的压强，第三手动阀122用于调节压缩气体123的流量，使输入到工作管道103的压缩气体123满足需要，足以将玻璃基板102上的残余药液吹走又能避免风力过大使玻璃基板102上的光阻脱落。
具体的，压缩气体123包括洁净的压缩空气。
作为本申请的另一实施例，参考图1至图3所示，公开了一种用于显示面板的制造设备100，包括：
机台101，设置为承载和传送玻璃基板102；
工作管道103，设在机台101的第一方向，设置为输送物料作用于玻璃基板102，工作管道103靠近机台101的一侧设置有风刀口124，工 作管道103靠近机台101的一端与机台101的距离大于玻璃基板102的厚度，风刀口124为长条状开口，风刀口124与工作管道103的设置方向一致，风刀口124的长度大于玻璃基板102与风刀口124对应方向的长度，且小于工作管道103的长度；
供气装置104，与工作管道103通过供气管路106连通，供气装置104包括进气口120、调压阀121、第一自动阀110和第三手动阀122，进气口120、调压阀121、第一自动阀110和第三手动阀122设置在供气管路106上，调压阀121靠近进气口120，第三手动阀122靠近工作管道103，第一自动阀110位于调压阀121和第三手动阀122之间，供气装置104通过供气管路106向工作管道103输出压缩气体123；
供液装置105，与工作管道103通过供液管路107连通，供液管路107上设有第二自动阀111；
供液装置105包括第一供液装置112，第一供液装置112包括第一进液口113和设置在第一进液口113和第二自动阀111之间的第一手动阀114，第一进液口113和第一手动阀114设置在供液管路107上，第一供液装置112通过供液管路107向工作管道103输出第一料液115；
供液装置105包括第二供液装置116，第二供液装置116包括第二进液口117和设置在第二进液口117和第二自动阀111之间的第二手动阀118，第二进液口117和第二手动阀118设置在供液管路107上，第二供液装置116通过供液管路107向工作管道103输出第二料液119；
其中，机台101上设有设置为检测机台101上传送玻璃基板102状态的检测装置108，检测装置108与第一自动阀110和第二自动阀111耦接。
通过设置检测装置108检测机台101上传送玻璃基板102的运行状态，检测装置108和供气装置104的第一自动阀110、供液装置105的第二自动阀111耦接，根据检测到的机台101的运行状态，检测装置108可以通过向第一自动阀110或者第二自动阀111传输控制信号109分别控制第一自动阀110或第二自动阀111的工作状态，从而控制供气装置104或供液装置105的工作状态。当供液装置105向工作管道103提供 的是清洗液体时可以对机台101和工作管道103进行清洗，减缓工作管道103出口上的结晶速度或除掉工作管道103出口的结晶，从而减少工作管道103结晶情况的发生，减少玻璃基板102上的光阻脱落，最终节约成本且提高显示面板制程的稳定性。
当第一自动阀110接收到与之耦接的检测装置108的信号时，第一自动阀110开启供气装置104，供气管路106上的调压阀121用于调节进气口120输入供气管道的压缩气体123的压强，第三手动阀122用于调节压缩气体123的流量，使输入到工作管道103的压缩气体123满足需要，足以将玻璃基板102上的残余药液吹走又能避免风力过大使玻璃基板102上的光阻脱落。
当第二自动阀111接收到与之耦接的检测装置108的信号时，第二自动阀111开启第一供液装置112，第一手动阀114设置在供液管路107上，并且在第一进液口113与第二自动阀111之间，根据工作管道103的需要，第一手动阀114调节第一进液口113输入供液管道的第一料液115的流量大小，第一料液115包括盐酸溶液或其他酸性溶液，第一料液115从风刀口124出来后即实现对机台101的清洗也实现了对工作管道103和风刀口124本身的清洗，避免了出风口被玻璃基板102上溅起附着的药物结晶堵塞造成风刀口124的出风方向和施加到玻璃基板102上的风力的改变，保证了工作管道103的正常工作，且避免了玻璃基板102上包括光阻在内的结构被破坏。
当第二自动阀111接收到与之耦接的检测装置108的信号时，第二自动阀111还可以开启第二供液装置116，第二手动阀118设置在供液管路107上，并且在第二进液口117与第二自动阀111之间，根据工作管道103的需要，第二手动阀118调节第二进液口117输入供液管道的第二料液119的流量大小，第二料液119包括去离子水，向工作管道103内通去离子水可以延缓附着在风刀口124上的药物结晶时间，减少结晶状况的发生。
具体的，去离子水的温度为35℃至45℃，当去离子水的温度为40℃时延缓药物结晶的效果最佳。
作为本申请的另一实施例，参考图7和图8所示，公开了一种包括上述用于显示面板的制造设备100的清洗方法，包括：
S100：检测装置108检测机台101的运行状态，输出控制信号109；
S200：根据控制信号109控制第一自动阀110和第二自动阀111门的开启或关闭。
通过检测机台101的运行状态输出控制信号109第一自动阀110和第二自动阀111门的开启或关闭，实现了自动化控制，减少了人力投入，节约了生产成本。
本实施例可选的，运行状态包括载板状态，当检测装置108检测机台101处于载板状态时，根据控制信号109控制第一自动阀110和第二自动阀111门的开启或关闭的方法包括S300：
检测装置108向第一自动阀110输出控制信号109开启供气装置104；
检测装置108向第二自动阀111输出控制信号109关闭供液装置105；
其中，供气装置104将气体输送到工作管道103，气体经风刀口124向玻璃基板102的表面吹出，气体将玻璃基板102上的残余药液吹脱。药液包括刻蚀液。
载板状态时，机台101向工作管道103的第二方向传送玻璃基板102，此时玻璃基板102上有刻蚀后的残余药液，需要通过供气装置104提供压缩气体123对玻璃基板102的表面进行吹扫，去除残余药液，故此时检测装置108需要向第一自动阀110输出控制信号109开启供气装置104，同时向第二自动阀111输出控制信号109关闭供液装置105。在本申请中，第二方向为工作管道的下方。
本实施例可选的，运行状态包括空载状态，当检测装置108检测机台101处于空载状态时，根据控制信号109控制第一自动阀110和第二自动阀111门的开启或关闭的方法包括S400：
检测装置108向第一自动阀110输出控制信号109关闭供气装置104；
检测装置108向第二自动阀111输出控制信号109开启供液装置105；
其中，第一手动阀114处于关闭状态，第二供液装置116输送第 二料液119至工作管道103，第二料液119从风刀口124流向机台101，第二料液119为去离子水。
空载状态时，工作管道103第二方向不会有玻璃基板102移动，因为此前处理玻璃基板102上的残余药液使得工作管道103的风刀口124有溅起的药液残留，该药液容易结晶，通过供液装置105向工作管道103输入去离子水，可以延缓风刀口124药液的结晶时间，减少结晶状况的发生，故空载状态时需要向第一自动阀110输出控制信号109关闭供气装置104，同时检测装置108向第二自动阀111输出控制信号109开启供液装置105。
本实施例可选的，机台101间隔一端时间需要进行保养，在机台101保养期间，根据控制信号109控制第一自动阀110和第二自动阀111门的开启或关闭的方法包括S400：
检测装置108向第一自动阀110输出控制信号109关闭供气装置104；
检测装置108向第二自动阀111输出控制信号109开启供液装置105；
其中，第二手动阀118处于关闭状态，第一供液装置112输送第一料液115至工作管道103，第一料液115从风刀口124流向机台101，第一料液115为盐酸溶液或其他酸性溶液。
机台101保养期间，工作管道103第二方向不会有玻璃基板102移动，此前处理玻璃基板102上的残余药液使得工作管道103的风刀口124有溅起的药液残留结晶，该结晶严重影响了风刀口124的出风方向以及对玻璃基板102表面的吹扫力度，容易造成玻璃基板102上的残余药液去除不完全或造成玻璃基板102上的光阻脱落，故需要对风刀口124的结晶进行去除，通过第一供液装置112向工作管道103输送盐酸溶液或者其它酸性溶液，可以有效的去除结晶，保证风刀口124正常工作。
具体的，第一供液装置112不需要额外设置，机台101保养均采用第一供液装置112对机台101进行清洗，故本实施例采用第一供液装 置112清洗工作管道103和风刀口124不需要额外的设备投入，节约了生产成本。
本申请的面板可以是TN面板(全称为Twisted Nematic，即扭曲向列型面板)、IPS面板(In-Pane Switching，平面转换)、VA面板(Multi-domain Vertical Alignment，多象限垂直配向技术)，当然，也可以是其他类型的面板，适用即可。
以上内容是结合具体的优选实施方式对本申请所作的进一步详细说明，不能认定本申请的具体实施只局限于这些说明。对于本申请所属技术领域的普通技术人员来说，在不脱离本申请构思的前提下，还可以做出若干简单推演或替换，都应当视为属于本申请的保护范围。

Claims (17)

  1. 一种用于显示面板的制造设备，包括：
    机台，设置为承载和传送玻璃基板；
    工作管道，设在所述机台的第一方向，设置为输送物料作用于所述玻璃基板；
    供气装置，与所述工作管道通过供气管路连通，以及
    供液装置，与所述工作管道通过供液管路连通；
    其中，所述机台上设有设置为检测所述机台上传送所述玻璃基板状态的检测装置，所述供气管路上设有第一自动阀，所述供液管路上设有第二自动阀，所述检测装置与所述第一自动阀和所述第二自动阀耦接。
  2. 如权利要求1所述的一种用于显示面板的制造设备，其中，所述供液装置包括第一供液装置，所述第一供液装置包括第一进液口和设置在第一进液口与所述第二自动阀之间的第一手动阀，所述第一进液口和第一手动阀设置在所述供液管路上，所述第一供液装置通过所述供液管路向所述工作管道输出第一料液。
  3. 如权利要求1所述的一种用于显示面板的制造设备，其中，所述供液装置包括第二供液装置，所述第二供液装置包括第二进液口和设置在第二进液口与所述第二自动阀之间的第二手动阀，所述第二进液口和第二手动阀设置在所述供液管路上，所述第二供液装置通过所述供液管路向所述工作管道输出第二料液。
  4. 如权利要求1所述的一种用于显示面板的制造设备，其中，所述供气装置包括进气口、调压阀和第三手动阀，所述进气口、调压阀和第三手动阀设置在所述供气管路上，所述调压阀靠近所述进气口，所述第三手动阀靠近所述工作管道，所述第一自动阀位于所述调压阀和所述第三手动阀之间，所述供气装置通过所述供气管路向所述工作管道输出压缩气体。
  5. 如权利要求1所述的一种用于显示面板的制造设备，其中，所述工作管道靠近所述机台的一侧设置有风刀口，所述工作管道靠近所述机台的一端与所述机台的垂直距离大于所述玻璃基板的厚度，所述风刀口为长条 状开口，所述风刀口与所述工作管道的设置方向一致，所述风刀口的长度大于所述玻璃基板与所述风刀口对应方向的长度，且小于所述工作管道的长度。
  6. 如权利要求1所述的一种用于显示面板的制造设备，其中，所述工作管道靠近所述机台的一端与所述机台的垂直距离大于所述玻璃基板的厚度，所述工作管道的内部设置有将所述工作管道分成两个独立管道的挡板，所述工作管道包括第一管道和第二管道，所述第一管道靠近所述机台的一侧设置有风刀口，所述第二管道靠近所述机台的一侧设置有一组通孔，所述第一管道和所述第二管道切换工作。
  7. 一种用于显示面板的制造设备，包括：
    机台，设置为承载和传送玻璃基板；
    工作管道，设在所述机台的第一方向，设置为输送物料作用于所述玻璃基板，所述工作管道靠近所述机台的一侧设置有风刀口，所述工作管道靠近所述机台的一端与所述机台的距离大于所述玻璃基板的厚度，所述风刀口为长条状开口，所述风刀口与所述工作管道的设置方向一致，所述风刀口的长度大于所述玻璃基板与所述风刀口对应方向的长度，且小于所述工作管道的长度；
    供气装置，与所述工作管道通过供气管路连通，所述供气装置包括进气口、调压阀、第一自动阀和第三手动阀，所述进气口、调压阀、第一自动阀和第三手动阀设置在所述供气管路上，所述调压阀靠近所述进气口，所述第三手动阀靠近所述工作管道，所述第一自动阀位于所述调压阀和所述第三手动阀之间，所述供气装置通过所述供气管路向所述工作管道输出压缩气体；
    供液装置，与所述工作管道通过供液管路连通，所述供液管路上设有第二自动阀，以及
    所述供液装置包括第一供液装置，所述第一供液装置包括第一进液口和设置在第一进液口和所述第二自动阀之间的第一手动阀，所述第一进液口和第一手动阀设置在所述供液管路上，所述第一供液装置通过所述供液管路向所述工作管道输出第一料液；
    所述供液装置包括第二供液装置，所述第二供液装置包括第二进液口和设置在第二进液口和所述第二自动阀之间的第二手动阀，所述第二进液口和第二手动阀设置在所述供液管路上，所述第二供液装置通过所述供液管路向所述工作管道输出第二料液；
    其中，所述机台上设有设置为检测所述机台上传送所述玻璃基板状态的检测装置，所述检测装置与所述第一自动阀和所述第二自动阀耦接。
  8. 一种用于显示面板的制造设备的清洗方法，显示面板的制造设备包括：
    机台，设置为承载和传送玻璃基板；
    工作管道，设在所述机台的第一方向，设置为输送物料作用于所述玻璃基板；
    供气装置，与所述工作管道通过供气管路连通，以及
    供液装置，与所述工作管道通过供液管路连通；
    其中，所述机台上设有设置为检测所述机台上传送所述玻璃基板状态的检测装置，所述供气管路上设有第一自动阀，所述供液管路上设有第二自动阀，所述检测装置与所述第一自动阀和所述第二自动阀耦接；
    所述清洗方法，包括：
    检测装置检测机台的运行状态，输出控制信号；
    根据所述控制信号控制所述第一自动阀和第二自动阀门的开启或关闭。
  9. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述供液装置包括第一供液装置，所述第一供液装置包括第一进液口和设置在第一进液口与所述第二自动阀之间的第一手动阀，所述第一进液口和第一手动阀设置在所述供液管路上，所述第一供液装置通过所述供液管路向所述工作管道输出第一料液。
  10. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述供液装置包括第二供液装置，所述第二供液装置包括第二进液口和设置在第二进液口与所述第二自动阀之间的第二手动阀，所述第二进液口和第二手动阀设置在所述供液管路上，所述第二供液装置通过所述供液管路向所述工作管道输出第二料液。
  11. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述供气装置包括进气口、调压阀和第三手动阀，所述进气口、调压阀和第三手动阀设置在所述供气管路上，所述调压阀靠近所述进气口，所述第三手动阀靠近所述工作管道，所述第一自动阀位于所述调压阀和所述第三手动阀之间，所述供气装置通过所述供气管路向所述工作管道输出压缩气体。
  12. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述工作管道靠近所述机台的一侧设置有风刀口，所述工作管道靠近所述机台的一端与所述机台的垂直距离大于所述玻璃基板的厚度，所述风刀口为长条状开口，所述风刀口与所述工作管道的设置方向一致，所述风刀口的长度大于所述玻璃基板与所述风刀口对应方向的长度，且小于所述工作管道的长度。
  13. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述工作管道靠近所述机台的一端与所述机台的垂直距离大于所述玻璃基板的厚度，所述工作管道的内部设置有将所述工作管道分成两个独立管道的挡板，所述工作管道包括第一管道和第二管道，所述第一管道靠近所述机台的一侧设置有风刀口，所述第二管道靠近所述机台的一侧设置有一组通孔，所述第一管道和所述第二管道切换工作。
  14. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述运行状态包括载板状态，当所述检测装置检测所述机台处于载板状态时，所述根据所述控制信号控制第一自动阀和第二自动阀门的开启或关闭的方法包括：
    所述检测装置向所述第一自动阀输出所述控制信号开启所述供气装置；
    所述检测装置向所述第二自动阀输出所述控制信号关闭所述供液装置；
    其中，所述供气装置将压缩气体输送到所述工作管道，所述压缩气体经所述风刀口向所述玻璃基板的表面吹出，所述压缩气体将所述玻璃基板上的残余药液吹脱。
  15. 如权利要求8所述的一种用于显示面板的制造设备的清洗方法，其中，所述运行状态包括空载状态，当所述检测装置检测所述机台处于空 载状态时，所述根据所述控制信号控制所述第一自动阀和第二自动阀门的开启或关闭的方法包括：
    所述检测装置向所述第一自动阀输出所述控制信号关闭所述供气装置；
    所述检测装置向所述第二自动阀输出所述控制信号开启所述供液装置；
    其中，所述第一手动阀处于关闭状态，所述第二供液装置输送所述第二料液至所述工作管道，所述第二料液从所述风刀口流向所述机台，所述第二料液为去离子水。
  16. 如权利要求14所述的一种用于显示面板的制造设备的清洗方法，其中，所述药液包括刻蚀液。
  17. 如权利要求14所述的一种用于显示面板的制造设备的清洗方法，其中，所述压缩气体包括压缩空气。
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