WO2020057058A1 - 承载装置及承载装置的固定方法 - Google Patents

承载装置及承载装置的固定方法 Download PDF

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Publication number
WO2020057058A1
WO2020057058A1 PCT/CN2019/076081 CN2019076081W WO2020057058A1 WO 2020057058 A1 WO2020057058 A1 WO 2020057058A1 CN 2019076081 W CN2019076081 W CN 2019076081W WO 2020057058 A1 WO2020057058 A1 WO 2020057058A1
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WO
WIPO (PCT)
Prior art keywords
module
electromagnet fixing
electromagnet
sub
carrying device
Prior art date
Application number
PCT/CN2019/076081
Other languages
English (en)
French (fr)
Inventor
王威
Original Assignee
武汉华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 武汉华星光电技术有限公司 filed Critical 武汉华星光电技术有限公司
Priority to US16/470,566 priority Critical patent/US11306788B2/en
Publication of WO2020057058A1 publication Critical patent/WO2020057058A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D63/00—Brakes not otherwise provided for; Brakes combining more than one of the types of groups F16D49/00 - F16D61/00
    • F16D63/002—Brakes with direct electrical or electro-magnetic actuation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2049—Exposure; Apparatus therefor using a cantilever
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D2121/00—Type of actuator operation force
    • F16D2121/18—Electric or magnetic
    • F16D2121/20—Electric or magnetic using electromagnets

Definitions

  • the present application relates to the field of display technology, and in particular, to a carrying device and a method for fixing the carrying device.
  • the photolithography process is an indispensable core process, which usually includes processes such as coating photoresist, exposing, developing, and etching.
  • a mask is used, and the mask
  • the membrane plate needs to be transported to the inside of the machine of the exposure machine by transportation means such as a trolley, so as to carry out the subsequent process.
  • foot brakes are usually used to prevent the mechanical arm of the exposure machine from shaking when the mask plate is taken from the transportation means such as the trolley.
  • the inside of the exposure machine is epoxy floor, the level is inconsistent, and the foot brakes of transport vehicles such as trolleys will have different degrees of brake suspension.
  • the robot arm of the exposure machine takes the mask from a transportation vehicle such as a trolley, if there is a slight obstruction in the contact portion of the exposure arm of the exposure machine with the transportation vehicle such as a trolley, and the foot brake is suspended at this time, it will As a result of the micro-movement of transportation vehicles such as trolleys, the sensor cannot detect it, which will cause the exposure machine to go down, resulting in the loss of production capacity.
  • the embodiment of the present application provides a carrying device.
  • the carrying device can be prevented from shaking.
  • an embodiment of the present application provides a bearing device, including:
  • An electromagnet fixing module is provided on the body; wherein, the electromagnet fixing module is used for fixing the carrying device.
  • the electromagnet fixing module includes a first electromagnet fixing sub-module provided on one side of the body, and a second electromagnet fixing provided on the other side of the body. Submodule.
  • the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module.
  • a first telescopic arm is provided on one side of the body, and a second telescopic arm is provided on the other side of the body, wherein the first telescopic arm and the first telescopic arm are provided.
  • An electromagnet fixed sub-module is connected, and the second telescopic arm is connected to the second electromagnet fixed sub-module.
  • a first receiving groove is formed on one side of the body, and a second receiving groove is formed on the other side of the body, wherein the first receiving groove is used to receive the first receiving groove.
  • a first telescopic arm and the first electromagnet fixing sub-module, and the second accommodating slot is used for accommodating the second telescopic arm and the second electromagnet fixing sub-module.
  • the telescopic length of the first telescopic arm is greater than the depth of the first receiving groove
  • the telescopic length of the second telescopic arm is greater than the depth of the second receiving groove
  • the first electromagnet fixing sub-module and the second electromagnet fixing sub-module are disposed in an offset position.
  • the electromagnet fixing module is fixed on the body by a screw connection.
  • a power supply module is provided on the body, and the power supply module is configured to provide a voltage to the electromagnet fixing module, so that the electromagnet fixing module generates magnetism after being energized.
  • an embodiment of the present application further provides a method for fixing a bearing device, which is used for the bearing device of any embodiment of the application, including:
  • the electromagnet fixing module If a trigger operation on the preset button is received, the electromagnet fixing module is energized, and the electromagnet fixing module generates magnetism to fix the bearing device.
  • an embodiment of the present application further provides a bearing device, including:
  • An electromagnet fixing module is disposed on the body; wherein the electromagnet fixing module is used to fix the bearing device, and the electromagnet fixing module includes a first An electromagnet fixing sub-module, and a second electromagnet fixing sub-module provided on the other side of the body; and
  • a power supply module for supplying a voltage to the electromagnet fixing module, so that the electromagnet fixing module generates magnetism after being energized.
  • the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module.
  • a first telescopic arm is provided on one side of the body, and a second telescopic arm is provided on the other side of the body, wherein the first telescopic arm and the first telescopic arm are provided.
  • An electromagnet fixed sub-module is connected, and the second telescopic arm is connected to the second electromagnet fixed sub-module.
  • a first receiving groove is formed on one side of the body, and a second receiving groove is formed on the other side of the body, wherein the first receiving groove is used to receive the first receiving groove.
  • a first telescopic arm and the first electromagnet fixing sub-module, and the second accommodating slot is used for accommodating the second telescopic arm and the second electromagnet fixing sub-module.
  • the telescopic length of the first telescopic arm is greater than the depth of the first receiving groove
  • the telescopic length of the second telescopic arm is greater than the depth of the second receiving groove
  • the first electromagnet fixing sub-module and the second electromagnet fixing sub-module are disposed in an offset position.
  • the electromagnet fixing module is fixed on the body by a screw connection.
  • the carrying device provided in the embodiment of the present application includes: a body; and an electromagnet fixing module, the electromagnet fixing module is disposed on the body; wherein the electromagnet fixing module is used for fixing the carrying device and adopts electromagnetic
  • the iron fixed module fixes the bearing device, which can prevent the exposure of the entire exposure machine due to the shaking of the bearing device when the mechanical arm of the exposure machine takes the mask plate from the bearing device, thereby increasing the production capacity.
  • FIG. 1 is a schematic diagram of a first structure of a bearing device according to an embodiment of the present application.
  • FIG. 2 is a schematic diagram of a second structure of a bearing device according to an embodiment of the present application.
  • FIG. 3 is a third schematic structural diagram of a bearing device according to an embodiment of the present application.
  • FIG. 4 is a schematic diagram of the supporting device shown in FIG. 1 in a fixed state according to an embodiment of the present application.
  • FIG. 5 is a fourth schematic structural diagram of a bearing device according to an embodiment of the present application.
  • FIG. 6 is a schematic diagram of the supporting device shown in FIG. 5 in a fixed state according to an embodiment of the present application.
  • FIG. 7 is a schematic diagram of a scenario in which a carrying device provides a mask plate into an inside of an exposure machine according to an embodiment of the present application.
  • FIG. 8 is a fifth schematic structural diagram of a bearing device according to an embodiment of the present application.
  • FIG. 9 is a schematic flowchart of a method for fixing a bearing device according to an embodiment of the present application.
  • FIG. 10 is a schematic diagram of an operation interface of a bearer device according to an embodiment of the present application.
  • FIG. 1 is a schematic diagram of a first structure of a bearing device according to an embodiment of the present application.
  • the embodiment of the present application provides a carrying device 100 including a main body 10 and an electromagnet fixing module 20.
  • the electromagnet fixing module 20 is disposed on the body 10.
  • the electromagnet fixing module 20 is used for fixing the supporting device 100.
  • the electromagnet fixing module 20 is provided.
  • the electromagnet fixing module 20 can be energized, so that the electromagnet fixing module 20 is magnetically adsorbed on other objects, and the carrying device 100 is not affected. Outside disturbance and shaking.
  • the carrying device 100 can be used to carry a mask and transport it to the inside of a machine of an exposure machine.
  • the carrying device 100 includes a main body 10 and an electromagnet fixing module 20 provided on the main body 10.
  • the electromagnet fixing module 20 is used for fixing the supporting device 100.
  • the embodiment of the present application does not specifically limit the structure of the carrier device 100, and the actual demand shall prevail.
  • the carrying device 100 in the embodiment of the present application is not only used for transporting the mask, but can also be used for transporting other objects, which are not specifically limited here, and the actual demand shall prevail.
  • the electromagnet fixing module 20 includes a first electromagnet fixing sub-module 21 disposed on one side of the body 10 of the carrying device 100, and a second electromagnet fixing sub-module 22 disposed on the other side of the body 10.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 may be oppositely disposed.
  • FIG. 2 is a schematic diagram of a second structure of a bearing device according to an embodiment of the present application.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 may be disposed in offset positions.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 may be provided along the diagonal of the body 10.
  • FIG. 3 is a schematic diagram of a third structure of a bearing device according to an embodiment of the present application.
  • the electromagnet fixing module 20 in the carrying device shown in FIG. 3 further includes: a third electromagnet fixing sub-module 23 and a fourth electromagnetic
  • the iron fixed sub-module 24, the third electromagnet fixed sub-module 23 is disposed on one side of the body 10, and the fourth electromagnet fixed sub-module 24 is disposed on the other side of the body 10.
  • the third electromagnet fixing sub-module 23 and the fourth electromagnet fixing sub-module 24 may be oppositely disposed.
  • the first electromagnet fixing sub-module 21, the second electromagnet fixing sub-module 22, the third electromagnet fixing sub-module 23, and the fourth electromagnet fixing sub-module 24 can be energized, so that The first electromagnet fixing sub-module 21, the second electromagnet fixing sub-module 22, the third electromagnet fixing sub-module 23, and the fourth electromagnet fixing sub-module 24 generate magnetic adsorption on other objects.
  • the carrier device 100 is more fixed, and the carrier device is prevented from shaking due to external interference.
  • FIG. 4 is a schematic diagram of the bearing device shown in FIG. 1 in a fixed state according to an embodiment of the present application.
  • a first telescopic arm 31 is provided on one side of the body 10 of the carrying device 100, and a second telescopic arm 32 is provided on the other side of the body 10 of the carrying device 100, wherein the first telescopic arm 31 is connected to the first electromagnet fixing sub-module 21
  • the second telescopic arm 32 is connected to the second electromagnet fixing sub-module 22.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 can be energized, so that the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22
  • the magnetism is generated, so that the first telescopic arm 31 and the second telescopic arm 32 are extended, so that the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 are attracted to other objects.
  • FIG. 5 is a schematic diagram of a fourth structure of a bearing device according to an embodiment of the present application.
  • a first receiving groove 41 is formed on one side of the body 10 of the carrier device 100, and a second receiving groove 42 is formed on the other side of the body 10 of the carrier device 100.
  • the first receiving groove 41 is used to receive the first telescopic arm 31 and the first electromagnet fixing sub-module 21, and the second receiving groove 42 is used to receive the second telescopic arm 32 and the second electromagnet fixing sub-module 22.
  • the telescopic length of the first telescopic arm 31 is greater than the depth of the first receiving groove 41, and the telescopic length of the second telescopic arm 32 is greater than the depth of the second receiving groove 42.
  • the first telescopic arm 31 and the second telescopic arm 32 may be made of a retractable material, and the telescopic length refers to a length that lengthens the first telescopic arm 31 and the second telescopic arm 32, This includes, but is not limited to, extending the first telescopic arm 31 and the second telescopic arm 32 to a limit length.
  • FIG. 6 is a schematic diagram of the bearing device shown in FIG. 5 in a fixed state according to an embodiment of the present application.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 can be energized, so that the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 generate magnetic properties.
  • the first telescopic arm 31 and the second telescopic arm 32 protrude from the first receiving groove 41 and the second receiving groove 42 respectively, so that the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 are attracted to On other objects.
  • FIG. 7 is a schematic diagram of a scene in which a carrying device sends a mask plate into an exposure machine platform provided by an embodiment of the present application.
  • a power supply module 50 is provided on the body 10 of the carrying device 100, wherein the power supply module 50 is used to provide a voltage to the electromagnet fixing module 20 so that the electromagnet fixing module 20 generates magnetism after being energized.
  • the carrying device 100 when it carries the mask plate into the exposure machine 600, it can control the power supply module 50 to supply voltage to the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22, so that the first When the electromagnet fixed sub-module 21 and the second electromagnet fixed sub-module 22 are energized, magnetism is generated.
  • the first electromagnet fixing sub-module 21 can pull the first telescopic arm 31 to protrude from the first accommodating groove 41, so as to move toward the first guide rail 61 of the exposure machine 600 and be adsorbed on the first guide rail 61.
  • the second electromagnet fixing sub-module 22 can pull the second telescopic arm 32 to protrude from the second accommodating groove 42 and move to the second guide rail 62 of the exposure machine 600, and be adsorbed on the second guide rail 62 to fix the carrying device 100 . Avoiding the problem that the entire exposure machine is down due to the shaking of the carrying device 100 when the mechanical arm of the exposure machine 600 takes the mask plate from the carrying device 100.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 are energized, the first telescopic arm 31 and the second telescopic arm 32 are pulled out from the first receiving groove 41 and the second receiving groove 42 respectively. .
  • the moving distance of the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 depends on the first electromagnet.
  • the positions of the fixed sub-module 21 and the second electromagnet fixed sub-module 22 and the object to be adsorbed are determined, and are not specifically limited herein.
  • the power supply module 50 When the power supply module 50 is controlled to stop supplying voltage to the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22, so that the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 are powered off, The first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 no longer generate magnetism, so that the first telescopic arm 31 and the second telescopic arm 32 are not stretched. Since the first telescopic arm 31 and the second telescopic arm 32 are retractable, at this time, the first telescopic arm 31 and the second telescopic arm 32 will begin to contract.
  • the first telescopic arm 31 and the second telescopic arm 32 respectively pull the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 toward the first receiving groove 41 and the second receiving groove 42 respectively. Therefore, the first electromagnet fixing sub-module 21 and the first telescopic arm 31 are received in the first receiving groove 41, and the second electromagnet fixing sub-module 22 and the second telescopic arm 32 are received in the second receiving groove 42.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 are not energized, the first electromagnet fixing sub-module 21 and the first telescopic arm 31 are accommodated in the first receiving groove 41, and the second electromagnet is fixed.
  • the sub-module 22 and the second telescopic arm 32 are accommodated in the second accommodating groove 42 without affecting the overall aesthetics of the carrying device.
  • the first electromagnet fixing sub-module 21 and the second electromagnet fixing sub-module 22 can be attracted to the first guide rail 61 and the second of the exposure machine 600 after being energized, respectively. On the guide rail 62.
  • FIG. 8 is a schematic diagram of a fifth structure of a bearing device according to an embodiment of the present application.
  • the embodiment of the present application provides a carrying device 100 including a main body 10 and an electromagnet fixing module 20.
  • the electromagnet fixing module 20 is disposed on the body 10.
  • the electromagnet fixing module 20 is used for fixing the supporting device 100.
  • the electromagnet fixing module 20 is fixed on the body 10 by means of screw connection.
  • the electromagnet fixing module 20 can be divided into a first electromagnet fixing sub-module 21 and a second electromagnet fixing sub-module 22.
  • the first electromagnet fixing sub-module 21 is connected and fixed on the body 10 through a first thread 71
  • the second electromagnet fixing sub-module 22 is connected and fixed on the body 10 through a second thread 72.
  • Threaded connection is a detachable fixed connection, which has the advantages of simple structure, reliable connection, and convenient assembly and disassembly.
  • the electromagnet fixing module 20 is fixed on the body 10 by using a screw connection.
  • the electromagnet fixing module 20 can be removed and wiped and cleaned at any time, which greatly improves the usability of the electromagnet fixing module 20.
  • FIG. 9 is a schematic flowchart of a method for fixing a bearing device according to an embodiment of the present application.
  • the embodiment of the present application further provides a method for fixing the carrier device 100, which is used for the carrier device 100 according to the foregoing embodiment, and includes the following processes:
  • FIG. 10 is a schematic diagram of an operation interface of a bearer device according to an embodiment of the present application.
  • the carrier device 100 in this embodiment may further include a display screen, and the display screen may display the operation interface 80 of the carrier device 100.
  • An electromagnet switch button 81 may be provided on the operation interface 80.
  • the carrying device 100 receives a trigger operation on the electromagnet switch button 81.
  • the carrying device 100 receives a trigger operation on the electromagnet switch button 81, it can energize the electromagnet fixing module 20.
  • the electromagnet fixing module 20 When the electromagnet fixing module 20 is energized, it generates magnetism and is attracted to the guide rails on both sides of the exposure machine, thereby fixing the carrying device 100. Avoiding the problem that the entire exposure machine is down due to the shaking of the carrying device 100 when the mask arm of the exposure machine takes the mask plate from the carrying device 100.
  • An embodiment of the present application further provides a bearing device, including:
  • An electromagnet fixing module is disposed on the body; wherein the electromagnet fixing module is used to fix the bearing device, and the electromagnet fixing module includes a first An electromagnet fixing sub-module, and a second electromagnet fixing sub-module provided on the other side of the body; and
  • a power supply module for supplying a voltage to the electromagnet fixing module, so that the electromagnet fixing module generates magnetism after being energized.
  • the first electromagnet fixing sub-module is disposed opposite to the second electromagnet fixing sub-module.
  • a first telescopic arm is provided on one side of the body, and a second telescopic arm is provided on the other side of the body, wherein the first telescopic arm is connected to the first electromagnet fixed sub-module, and the first Two telescopic arms are connected to the second electromagnet fixing sub-module.
  • a first receiving groove is formed on one side of the body, and a second receiving groove is formed on the other side of the body, wherein the first receiving groove is used to receive the first telescopic arm and the first electromagnetic An iron fixed sub-module, and the second receiving slot is used to receive the second telescopic arm and the second electromagnet fixed sub-module.
  • the telescopic length of the first telescopic arm is greater than the depth of the first receiving slot, and the telescopic length of the second telescopic arm is greater than the depth of the second receiving slot.
  • first electromagnet fixing sub-module and the second electromagnet fixing sub-module are disposed in an offset position.
  • the electromagnet fixing module is fixed on the body by means of screw connection.

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Abstract

一种承载装置（100）包括：本体（10）；以及电磁铁固定模块（20），电磁铁固定模块设置在本体上；其中，电磁铁固定模块用于固定承载装置，采用电磁铁固定模块固定承载装置，可以避免曝光机的机械臂从承载装置上取放掩膜板时，因承载装置的晃动导致整个曝光机宕机，进而提升产能。还公开了一种承载装置的固定方法。

Description

承载装置及承载装置的固定方法 技术领域
本申请涉及显示技术领域，具体涉及一种承载装置及承载装置的固定方法。
 背景技术
在显示面板制造领域，光刻工艺是必不可少的核心工艺，通常包括涂布光刻胶、曝光、显影和刻蚀等工艺，其中，在曝光工序中，需要使用到掩膜板，而掩膜板则需要台车等运输工具将其运送到曝光机的机台内部，才能进行后续流程。
目前，台车等运输工具将掩膜板送入曝光机的机台内部后，通常采用脚刹固定，以避免曝光机的机械臂从台车等运输工具上取放掩膜板时晃动。然而，曝光机机台内部为环氧地面，水平度不一致，而台车等运输工具的脚刹会存在不同程度的刹车悬空状态。当曝光机的机械臂从台车等运输工具上取放掩膜板时，若曝光机的机械臂与台车等运输工具的接触部位存在细微阻挡，而此时脚刹处于悬空状态，就会造成台车等运输工具有微动，传感器无法感应到，进而导致曝光机宕机，造成产能的流失。
因此，现有技术存在缺陷，急需改进。
 技术问题
本申请实施例提供一种承载装置，通过在承载装置上设置电磁铁固定模块，可以避免承载装置晃动。
 技术解决方案
第一方面，本申请实施例提供了一种承载装置，包括：
本体；以及
电磁铁固定模块，所述电磁铁固定模块设置在所述本体上；其中，所述电磁铁固定模块用于固定所述承载装置。
在本申请实施例所提供的承载装置中，所述电磁铁固定模块包括设置在所述本体一侧的第一电磁铁固定子模块，以及设置在所述本体另一侧的第二电磁铁固定子模块。
在本申请实施例所提供的承载装置中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块相对设置。
在本申请实施例所提供的承载装置中，所述本体一侧设置有第一伸缩臂，所述本体另一侧设置有第二伸缩臂，其中，所述第一伸缩臂与所述第一电磁铁固定子模块连接，所述第二伸缩臂与所述第二电磁铁固定子模块连接。
在本申请实施例所提供的承载装置中，所述本体一侧形成有第一容纳槽，所述本体另一侧形成有第二容纳槽，其中，所述第一容纳槽用于容纳所述第一伸缩臂和所述第一电磁铁固定子模块，所述第二容纳槽用于容纳所述第二伸缩臂和所述第二电磁铁固定子模块。
在本申请实施例所提供的承载装置中，所述第一伸缩臂的伸缩长度大于所述第一容纳槽的深度，所述第二伸缩臂的伸缩长度大于所述第二容纳槽的深度。
在本申请实施例所提供的承载装置中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块错位设置。
在本申请实施例所提供的承载装置中，所述电磁铁固定模块采用螺纹连接的方式固定在所述本体上。
在本申请实施例所提供的承载装置中，所述本体上设置有供电模块，所述供电模块用于向所述电磁铁固定模块提供电压，以使得所述电磁铁固定模块通电后产生磁性。
第二方面，本申请实施例还提供了一种承载装置的固定方法，用于本申请任一实施例的承载装置，包括：
检测是否接收到对预设按钮的触发操作；
若接收到对预设按钮的触发操作，则对电磁铁固定模块通电，所述电磁铁固定模块产生磁性，以使所述承载装置固定。
第三方面，本申请实施例还提供了一种承载装置，其包括：
本体；
电磁铁固定模块，所述电磁铁固定模块设置在所述本体上；其中，所述电磁铁固定模块用于固定所述承载装置，所述电磁铁固定模块包括设置在所述本体一侧的第一电磁铁固定子模块，以及设置在所述本体另一侧的第二电磁铁固定子模块；以及
供电模块，所述供电模块用于向所述电磁铁固定模块提供电压，以使得所述电磁铁固定模块通电后产生磁性。
在本申请实施例所提供的承载装置中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块相对设置。
在本申请实施例所提供的承载装置中，所述本体一侧设置有第一伸缩臂，所述本体另一侧设置有第二伸缩臂，其中，所述第一伸缩臂与所述第一电磁铁固定子模块连接，所述第二伸缩臂与所述第二电磁铁固定子模块连接。
在本申请实施例所提供的承载装置中，所述本体一侧形成有第一容纳槽，所述本体另一侧形成有第二容纳槽，其中，所述第一容纳槽用于容纳所述第一伸缩臂和所述第一电磁铁固定子模块，所述第二容纳槽用于容纳所述第二伸缩臂和所述第二电磁铁固定子模块。
在本申请实施例所提供的承载装置中，所述第一伸缩臂的伸缩长度大于所述第一容纳槽的深度，所述第二伸缩臂的伸缩长度大于所述第二容纳槽的深度。
在本申请实施例所提供的承载装置中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块错位设置。
在本申请实施例所提供的承载装置中，所述电磁铁固定模块采用螺纹连接的方式固定在所述本体上。
 有益效果
本申请实施例提供的承载装置，包括：本体；以及电磁铁固定模块，所述电磁铁固定模块设置在所述本体上；其中，所述电磁铁固定模块用于固定所述承载装置，采用电磁铁固定模块固定承载装置，可以避免曝光机的机械臂从承载装置上取放掩膜板时，因承载装置的晃动导致整个曝光机宕机，进而提升产能。
 附图说明
为了更清楚地说明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单介绍，显而易见地，下面描述中的附图仅仅是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本申请实施例提供的承载装置的第一种结构示意图。
图2为本申请实施例提供的承载装置的第二种结构示意图。
图3为本申请实施例提供的承载装置的第三种结构示意图。
图4为本申请实施例提供的图1所示的承载装置处于固定状态下的示意图。
图5为本申请实施例提供的承载装置的第四种结构示意图。
图6为本申请实施例提供的图5所示的承载装置处于固定状态下的示意图。
图7为本申请实施例提供的承载装置将掩膜板送入曝光机机台内部的场景示意图。
图8为本申请实施例提供的承载装置的第五种结构示意图。
图9为本申请实施例提供的承载装置的固定方法的流程示意图。
图10为本申请实施例提供的承载装置的操作界面的场景示意图。
 本发明的实施方式
请参阅图1，图1为本申请实施例提供的承载装置的第一种结构示意图。本申请实施例提供一种承载装置100，包括：本体10以及电磁铁固定模块20。电磁铁固定模块20设置在本体10上。电磁铁固定模块20用于固定承载装置100。
本申请实施例通过设置电磁铁固定模块20，当承载装置100移动到指定位置时，可对电磁铁固定模块20通电，使得电磁铁固定模块20产生磁性吸附在其他物体上，避免承载装置100受外界干扰而晃动。
例如，承载装置100可以用于承载掩膜板并将其运送到曝光机的机台内部。承载装置100包括本体10和设置在本体10上的电磁铁固定模块20。电磁铁固定模块20用于固定承载装置100。需要说明的是，本申请实施例所示意的仅仅是承载装置100的一种形式，其还可以是其他形式的。本申请实施例并不对承载装置100的结构作具体限制，以实际需求为准。本申请实施例中的承载装置100不仅仅用于运送掩膜板，还可以用于运送其他物体，此处不作具体限制，以实际需求为准。
在一些实施方式中，电磁铁固定模块20包括设置在承载装置100的本体10一侧的第一电磁铁固定子模块21，以及设置在本体10另一侧的第二电磁铁固定子模块22。第一电磁铁固定子模块21和第二电磁铁固定子模块22可以相对设置。
在一些实施方式中，请参阅图2，图2为本申请实施例提供的承载装置的第二种结构示意图。第一电磁铁固定子模块21和第二电磁铁固定子模块22可以错位设置。比如，可沿着本体10的对角线设置第一电磁铁固定子模块21和第二电磁铁固定子模块22。
请参阅图3，图3为本申请实施例提供的承载装置的第三种结构示意图。其中，图3所示的承载装置与图1所示的承载装置的区别在于：图3所示的承载装置中的电磁铁固定模块20还包括：第三电磁铁固定子模块23和第四电磁铁固定子模块24，第三电磁铁固定子模块23设置在本体10的一侧，第四电磁铁固定子模块24设置在本体10的另一侧。其中，第三电磁铁固定子模块23和第四电磁铁固定子模块24可以相对设置。当承载装置100移动到指定位置时，可对第一电磁铁固定子模块21、第二电磁铁固定子模块22、第三电磁铁固定子模块23和第四电磁铁固定子模块24通电，使得第一电磁铁固定子模块21、第二电磁铁固定子模块22、第三电磁铁固定子模块23和第四电磁铁固定子模块24产生磁性吸附在其他物体上。使得承载装置100更加固定，避免承载装置受外界干扰而晃动。
需要说明的是，以上仅仅是本申请实施例提供的设置在承载装置100的本体10上的电磁铁固定模块20的位置和数量的几种示意，并不用于限制本申请。
请参阅图4，图4为本申请实施例提供的图1所示的承载装置处于固定状态下的示意图。承载装置100的本体10一侧设置有第一伸缩臂31，承载装置100的本体10另一侧设置有第二伸缩臂32，其中，第一伸缩臂31与第一电磁铁固定子模块21连接，第二伸缩臂32与第二电磁铁固定子模块22连接。也即，当需要固定承载装置100时，可对第一电磁铁固定子模块21和第二电磁铁固定子模块22通电，使得第一电磁铁固定子模块21和第二电磁铁固定子模块22产生磁性，进而使得第一伸缩臂31和第二伸缩臂32伸出，使第一电磁铁固定子模块21和第二电磁铁固定子模块22吸附在其他物体上。
请参阅图5，图5为本申请实施例提供的承载装置的第四种结构示意图。承载装置100的本体10一侧形成有第一容纳槽41，承载装置100的本体10另一侧形成有第二容纳槽42。其中，第一容纳槽41用于容纳第一伸缩臂31和第一电磁铁固定子模块21，第二容纳槽42用于容纳第二伸缩臂32和第二电磁铁固定子模块22。需要说明的是，第一伸缩臂31的伸缩长度大于第一容纳槽41的深度，第二伸缩臂32的伸缩长度大于第二容纳槽42的深度。在本申请实施例中，第一伸缩臂31和第二伸缩臂32可以采用可伸缩的材料制成，而伸缩长度则是指将第一伸缩臂31和第二伸缩臂32拉长的长度，包括但不限于将第一伸缩臂31和第二伸缩臂32拉长到极限的长度。
请参阅图6，图6为本申请实施例提供的图5所示的承载装置处于固定状态下的示意图。当需要固定承载装置100时，可对第一电磁铁固定子模块21和第二电磁铁固定子模块22通电，使得第一电磁铁固定子模块21和第二电磁铁固定子模块22产生磁性，进而使得第一伸缩臂31和第二伸缩臂32分别从第一容纳槽41和第二容纳槽42内伸出，使第一电磁铁固定子模块21和第二电磁铁固定子模块22吸附在其他物体上。
请参阅图7，图7为本申请实施例提供的承载装置将掩膜板送入曝光机机台内部的场景示意图。承载装置100的本体10上设置有供电模块50，其中，供电模块50用于向电磁铁固定模块20提供电压，以使得电磁铁固定模块20通电后产生磁性。即当承载装置100承载掩膜板送入曝光机600机台内部时，就可以控制供电模块50向第一电磁铁固定子模块21和第二电磁铁固定子模块22提供电压，以使得第一电磁铁固定子模块21和第二电磁铁固定子模块22通电后产生磁性。第一电磁铁固定子模块21就可以拉动第一伸缩臂31从第一容纳槽41伸出，从而向曝光机600的第一导轨61移动，并吸附在第一导轨61上。第二电磁铁固定子模块22就可以拉动第二伸缩臂32从第二容纳槽42伸出，向曝光机600的第二导轨62移动，并吸附在第二导轨62上从而固定住承载装置100。避免了曝光机600的机械臂从承载装置100上取放掩膜板时，因承载装置100的晃动导致整个曝光机宕机的问题。
其中，当第一电磁铁固定子模块21和第二电磁铁固定子模块22通电，拉动第一伸缩臂31和第二伸缩臂32分别从第一容纳槽41和第二容纳槽42中伸出。使第一电磁铁固定子模块21和第二电磁铁固定子模块22吸附在其他物体上时，第一电磁铁固定子模块21和第二电磁铁固定子模块22的移动距离视第一电磁铁固定子模块21和第二电磁铁固定子模块22与欲吸附的物体的位置而定，此处不作具体限制。
当控制供电模块50停止向第一电磁铁固定子模块21和第二电磁铁固定子模块22提供电压，以使得第一电磁铁固定子模块21和第二电磁铁固定子模块22断电时，第一电磁铁固定子模块21和第二电磁铁固定子模块22不再产生磁性，从而不会拉伸第一伸缩臂31和第二伸缩臂32。而由于第一伸缩臂31和第二伸缩臂32具有可收缩性，此时，第一伸缩臂31和第二伸缩臂32就会开始收缩。第一伸缩臂31和第二伸缩臂32就会分别拉动第一电磁铁固定子模块21和第二电磁铁固定子模块22分别向第一容纳槽41和第二容纳槽42移动。从而使得第一电磁铁固定子模块21和第一伸缩臂31收容在第一容纳槽41内，第二电磁铁固定子模块22和第二伸缩臂32收容在第二容纳槽42内。
由于第一电磁铁固定子模块21和第二电磁铁固定子模块22不通电时，第一电磁铁固定子模块21和第一伸缩臂31容纳于第一容纳槽41内，第二电磁铁固定子模块22和第二伸缩臂32容纳于第二容纳槽42内，不影响承载装置的整体美观性。而且只要曝光机600的机台内部可容承载装置进入即可使得第一电磁铁固定子模块21和第二电磁铁固定子模块22通电后分别吸附在曝光机600的第一导轨61和第二导轨62上。
请参阅图8，图8为本申请实施例提供的承载装置的第五种结构示意图。本申请实施例提供一种承载装置100，包括：本体10以及电磁铁固定模块20。电磁铁固定模块20设置在本体10上。电磁铁固定模块20用于固定承载装置100。其中，电磁铁固定模块20采用螺纹连接的方式固定在本体10上。
电磁铁固定模块20可以分为第一电磁铁固定子模块21和第二电磁铁固定子模块22。第一电磁铁固定子模块21通过第一螺纹71连接固定在本体10上，第二电磁铁固定子模块22通过第二螺纹72连接固定在本体10上。螺纹连接是一种可拆卸的固定连接，其具有结构简单、连接可靠、装拆方便等优点。本实施例采用螺纹连接的方式将电磁铁固定模块20固定在本体10上，可以随时将电磁铁固定模块20取下擦拭、清洗干净，大大提高了电磁铁固定模块20的可用性。
请参阅图9，图9为本申请实施例提供的承载装置的固定方法的流程示意图。本申请实施例还提供了一种承载装置100的固定方法，用于如上述实施例的承载装置100，包括以下流程：
101、检测是否接收到对预设按钮的触发操作。
102、若接收到对预设按钮的触发操作，则对电磁铁固定模块通电，电磁铁固定模块产生磁性，以使承载装置固定。
请参阅图10，图10为本申请实施例提供的承载装置的操作界面的场景示意图。本实施例中的承载装置100还可以包括一显示屏幕，显示屏幕可显示承载装置100的操作界面80。其中，可以在操作界面80上设置一电磁铁开关按钮81，当用户点击电磁铁开关按钮81时，承载装置100即接收到对电磁铁开关按钮81的触发操作。当承载装置100接收到对电磁铁开关按钮81的触发操作时，就可以对电磁铁固定模块20通电。电磁铁固定模块20通电后即产生磁性，吸附在曝光机两侧的导轨上，从而固定住承载装置100。避免了曝光机的机械臂从承载装置100上取放掩膜板时，因承载装置100的晃动导致整个曝光机宕机的问题。
本申请实施例还提供了一种承载装置，其包括：
本体；
电磁铁固定模块，所述电磁铁固定模块设置在所述本体上；其中，所述电磁铁固定模块用于固定所述承载装置，所述电磁铁固定模块包括设置在所述本体一侧的第一电磁铁固定子模块，以及设置在所述本体另一侧的第二电磁铁固定子模块；以及
供电模块，所述供电模块用于向所述电磁铁固定模块提供电压，以使得所述电磁铁固定模块通电后产生磁性。
其中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块相对设置。
其中，所述本体一侧设置有第一伸缩臂，所述本体另一侧设置有第二伸缩臂，其中，所述第一伸缩臂与所述第一电磁铁固定子模块连接，所述第二伸缩臂与所述第二电磁铁固定子模块连接。
其中，所述本体一侧形成有第一容纳槽，所述本体另一侧形成有第二容纳槽，其中，所述第一容纳槽用于容纳所述第一伸缩臂和所述第一电磁铁固定子模块，所述第二容纳槽用于容纳所述第二伸缩臂和所述第二电磁铁固定子模块。
其中，所述第一伸缩臂的伸缩长度大于所述第一容纳槽的深度，所述第二伸缩臂的伸缩长度大于所述第二容纳槽的深度。
其中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块错位设置。
其中，所述电磁铁固定模块采用螺纹连接的方式固定在所述本体上。
以上对本申请实施例提供的承载装置及承载装置的固定方法进行了详细介绍，本文中应用了具体个例对本申请的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本申请。同时，对于本领域的技术人员，依据本申请的思想，在具体实施方式及应用范围上均会有改变之处，综上所述，本说明书内容不应理解为对本申请的限制。

Claims (17)

  1. 一种承载装置，其包括：
    本体；以及
    电磁铁固定模块，所述电磁铁固定模块设置在所述本体上；其中，所述电磁铁固定模块用于固定所述承载装置。
  2. 根据权利要求1所述的承载装置，其中，所述电磁铁固定模块包括设置在所述本体一侧的第一电磁铁固定子模块，以及设置在所述本体另一侧的第二电磁铁固定子模块。
  3. 根据权利要求2所述的承载装置，其中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块相对设置。
  4. 根据权利要求3所述的承载装置，其中，所述本体一侧设置有第一伸缩臂，所述本体另一侧设置有第二伸缩臂，其中，所述第一伸缩臂与所述第一电磁铁固定子模块连接，所述第二伸缩臂与所述第二电磁铁固定子模块连接。
  5. 根据权利要求4所述的承载装置，其中，所述本体一侧形成有第一容纳槽，所述本体另一侧形成有第二容纳槽，其中，所述第一容纳槽用于容纳所述第一伸缩臂和所述第一电磁铁固定子模块，所述第二容纳槽用于容纳所述第二伸缩臂和所述第二电磁铁固定子模块。
  6. 根据权利要求5所述的承载装置，其中，所述第一伸缩臂的伸缩长度大于所述第一容纳槽的深度，所述第二伸缩臂的伸缩长度大于所述第二容纳槽的深度。
  7. 根据权利要求2所述的承载装置，其中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块错位设置。
  8. 根据权利要求1所述的承载装置，其中，所述电磁铁固定模块采用螺纹连接的方式固定在所述本体上。
  9. 根据权利要求1所述的承载装置，其中，所述本体上设置有供电模块，所述供电模块用于向所述电磁铁固定模块提供电压，以使得所述电磁铁固定模块通电后产生磁性。
  10. 一种承载装置的固定方法，用于如权利要求1所述的承载装置，其包括：
    检测是否接收到对预设按钮的触发操作；
    若接收到对预设按钮的触发操作，则对电磁铁固定模块通电，所述电磁铁固定模块产生磁性，以使所述承载装置固定。
  11. 一种承载装置，其包括：
    本体；
    电磁铁固定模块，所述电磁铁固定模块设置在所述本体上；其中，所述电磁铁固定模块用于固定所述承载装置，所述电磁铁固定模块包括设置在所述本体一侧的第一电磁铁固定子模块，以及设置在所述本体另一侧的第二电磁铁固定子模块；以及
    供电模块，所述供电模块用于向所述电磁铁固定模块提供电压，以使得所述电磁铁固定模块通电后产生磁性。
  12. 根据权利要求11所述的承载装置，其中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块相对设置。
  13. 根据权利要求12所述的承载装置，其中，所述本体一侧设置有第一伸缩臂，所述本体另一侧设置有第二伸缩臂，其中，所述第一伸缩臂与所述第一电磁铁固定子模块连接，所述第二伸缩臂与所述第二电磁铁固定子模块连接。
  14. 根据权利要求13所述的承载装置，其中，所述本体一侧形成有第一容纳槽，所述本体另一侧形成有第二容纳槽，其中，所述第一容纳槽用于容纳所述第一伸缩臂和所述第一电磁铁固定子模块，所述第二容纳槽用于容纳所述第二伸缩臂和所述第二电磁铁固定子模块。
  15. 根据权利要求14所述的承载装置，其中，所述第一伸缩臂的伸缩长度大于所述第一容纳槽的深度，所述第二伸缩臂的伸缩长度大于所述第二容纳槽的深度。
  16. 根据权利要求11所述的承载装置，其中，所述第一电磁铁固定子模块与所述第二电磁铁固定子模块错位设置。
  17. 根据权利要求11所述的承载装置，其中，所述电磁铁固定模块采用螺纹连接的方式固定在所述本体上。
PCT/CN2019/076081 2018-09-19 2019-02-25 承载装置及承载装置的固定方法 WO2020057058A1 (zh)

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