WO2020013479A1

WO2020013479A1 - Apparatus and method for automatic transport of chemical containers

Info

Publication number: WO2020013479A1
Application number: PCT/KR2019/007567
Authority: WO
Inventors: 송용익; 윤병춘; 조제동; 고병도; 임종우
Original assignee: (주)에스티아이
Priority date: 2018-07-10
Filing date: 2019-06-24
Publication date: 2020-01-16
Also published as: CN112399955A; SG11202013143WA; KR101973503B1; CN112399955B

Abstract

The purpose of the present invention is to provide an apparatus and method for automatic transport of chemical containers, by which a chemical container for which chemical information required by a chemical supply device has been checked can be automatically supplied to the chemical supply device. To realize this, an apparatus for automatic transport of chemical containers comprises: at least one transport line for transporting, to a chemical supply device (5), a chemical container (2) which has been put into an input unit (110); a controller for controlling the supply of the chemical container (2), which is transported through the transport line, to the chemical supply device (5); and a transport car (600) for transferring the chemical container (2) from the transport line to the chemical supply device (5) or for transferring the chemical container (2) from the chemical supply device (5) to the transport line.

Description

Chemical container automatic transfer device and automatic transfer method

The present invention relates to a chemical container automatic transfer device and an automatic transfer method, and more particularly, by inspecting the chemical information of the chemical container can be automatically transferred after checking whether the chemical information matches the chemical information required by the chemical supply device. The present invention relates to a chemical container automatic transfer device and an automatic transfer method.

In general, all kinds of chemicals are used in companies that manufacture semiconductors, semiconductor devices, LCDs, OLEDs, and pharmaceutical and paint companies, and various types of chemicals have been diversified. .

Such chemicals may be supplied in large quantities by Tank Lorry vehicles depending on the chemicals, the amount of use, and process characteristics, but may also be supplied in small quantities in various containers of 20 to 1000 liters.

The chemical container is generally shipped from the chemical manufacturing plant in a packed unit on a pallet that can be moved by a forklift or a hand lift, and unloaded by a forklift at the entrance of the chemical factory. Bring into the building

Afterwards, workers wear safety clothing such as chemical resistant clothing and gas masks, and carry as many chemical containers as they can be mounted on a trolley that can be mounted on a chemical supply device.

The door of the chemical feeder is then opened and mounted with the bogie. In this case, a roller may be installed at the top of the bogie and the bottom of the chemical feeder to mount only the chemical container, or may be mounted outside the chemical feeder.

A coupler (Coupler) with a nozzle is then connected to the chemical inlet / outlet of the chemical vessel inside the chemical feeder. When the connection of the coupler is completed, the chemical transfer pump is driven to transfer the chemical of the chemical container to the destination. In this case, nitrogen gas may be injected into the chemical container to transfer the chemical to the intended place at a set pressure. Through this process, empty chemical containers using all of the chemicals are taken out in the reverse order.

In the conventional chemical container transfer method, since the worker has manually transported the container containing the chemical to the chemical supply device by hand using a hand lift or a cart, there is a problem of threatening the safety of the worker.

Korean Patent Publication No. 10-2017-0017958 is disclosed as such a prior art.

The present invention has been made to solve the above-mentioned problems, and provides a chemical container automatic transfer device and an automatic transfer method that can automatically supply a chemical container in which the chemical information required by the chemical supply device is confirmed to the chemical supply device. The purpose is to.

Another object of the present invention is to provide a chemical container automatic transfer device and an automatic transfer method capable of smoothly transferring and discharging a chemical container by varying an input position and a discharge position of the chemical container using a transfer truck. There is this.

It is another object of the present invention to provide a chemical container automatic transfer device and an automatic transfer method capable of smoothly transferring and discharging a plurality of chemical containers, each of which contains a plurality of different chemicals, to a plurality of chemical supply devices. have.

Chemical container automatic transfer device of the present invention for achieving the above object, at least one transfer line for transferring the chemical container (2) injected into the input unit 110 to the chemical supply device (5); A control unit for controlling the chemical container (2) to be transferred through the transfer line to the chemical supply device (5); A transport vehicle 600 for transferring the chemical container 2 from the transport line to the chemical supply device 5 or for transferring the chemical container 2 from the chemical supply device 5 to the transport line; It includes.

The transport vehicle 600 is provided with an inspection unit 602 for confirming the chemical information of the chemical container 2, the control unit, the chemical information and the chemical supply apparatus 5 confirmed by the inspection unit 602. If it matches with the chemical information required by the, it is possible to control to supply the chemical container (2) to the chemical supply device (5).

The transport vehicle 600 may be provided in plurality.

The plurality of transport vehicles 600 includes a first transport vehicle for introducing the chemical container 2 into the chemical supply device 5, and the chemical container 2 from the chemical supply device 5. It may be made of a second transport vehicle for discharging to the transport line.

The plurality of transport vehicle 600, the first transport vehicle (600-1) for injecting and discharging the first chemical container containing the first chemical to the chemical supply device (5); The second chemical container containing the second chemical may be composed of a second transport vehicle (600-2) for inputting and discharging to the chemical supply device (5).

The chemical supply device 5 comprises a first chemical supply device 5-1 and a second chemical supply device 5-2; The plurality of transport vehicle 600, the first transport vehicle (600-1) for inputting and discharging the first chemical container containing the first chemical to the first chemical supply device; The second chemical container containing the second chemical may be made of a second transport vehicle 600-2 for inputting and discharging to the second chemical supply device.

The chemical supply device (5) consists of a plurality; The chemical container 2 comprises a plurality of chemical containers each containing a plurality of different chemicals; The transport vehicle 600 may be configured to inject or discharge any one of the plurality of chemical containers into any one of the plurality of chemical supply apparatus.

The transport vehicle 600 is provided between the transport line and the chemical supply device 5 to move linearly along a transport rail 500 provided in parallel with at least a portion of the transport line; The chemical container 2 is transferred from the feeding line to the chemical supply device 5 at the feeding position, or at the discharge position at a position spaced apart along the transport rail 500 from the feeding position. ) May be delivered to the transfer line from the chemical supply device (5).

The transport rail 500 may be provided with a waiting place of the transport vehicle 600 on both sides with the chemical supply device 5 therebetween.

The inspection unit 602 may include a chemical container scanner for scanning chemical information on the surface of the chemical container 2.

A pallet (3) is provided along the transfer line in a state where the chemical container (2) is mounted on the upper portion; The inspection unit 602 may include a chemical container scanner for scanning chemical information on the surface of the pallet 3.

The transport vehicle 600, the transport member (601) for injecting the pallet (3) on which the chemical container (2) is loaded on the chemical supply device (5); A lower portion of the transfer member 601 may be provided, and a chemical support 603 may be provided to accommodate the chemical falling from the chemical container 2.

The transport vehicle 600 may be provided with a drain valve 605 for draining the chemical contained in the chemical support 603.

The transport vehicle 600 may be provided with a chemical detection sensor for detecting a chemical falling inside the chemical support 603.

A space for storing and transporting the transport vehicle 600 is formed at one end of the transport rail 500 for moving the transport vehicle 600. When the transport vehicle 600 is stored and waited, A safety bar equipped with a safety sensor may be provided at an entrance side to which the transport vehicle 600 enters to prevent collision with another transport vehicle.

A safety sensor may be provided to detect that the safety bar falls from the support.

The transport vehicle 600, the transport member (601) for loading the pallet 3, the chemical container (2) is mounted on the upper portion; A drive unit for driving the conveying member 601 may be provided to convey the pallet 3 loaded with the chemical container 2 to the chemical supply device 5 or to the conveying line.

The transport vehicle 600 may be provided with an emergency stop switch 604 for stopping the transport vehicle 600 in an emergency.

The emergency stop switch 604 may be provided in plural in the frame 610 provided in the transport vehicle 600.

An end of the transport rail 500 may be provided with a stopper 501 for preventing the transport vehicle 600 from being separated from the transport rail 500.

The stopper 501 may be provided with a shock absorbing portion to mitigate the impact when the transport vehicle 600 collides.

A sensing sensor 502 may be provided at an end of the transport rail 500 to detect whether an object exists between both ends of the transport rail 500.

When the object is detected by the detection sensor 502, the transport vehicle 600 may be stopped.

When the transfer line at the discharge position is broken, the chemical container 2 may be discharged from the chemical supply device 5 through the transfer line at the injection position.

When the transfer line at the feeding position has failed, the chemical container 2 may be introduced into the chemical supply device 5 through the transfer line at the discharge position.

The transport vehicle 600 is provided between the transport line and the chemical supply device 5 to move linearly along a transport rail 500 provided in parallel with at least a portion of the transport line; The transport vehicle rail 500 includes a transport member driven by a driving unit, and the transport member provided in the transport line is driven to transport the chemical container 2 in the direction of the chemical supply device 5. It may be to transfer the chemical container (2) from the transfer line to the chemical supply device (5) by driving the drive unit in the injection position located between the transfer line and the chemical supply device (5).

Chemical container automatic transfer method according to the present invention comprises the steps of: a) chemical container (2) is injected into the injection unit (110); b) transferring the chemical container 2 through at least one transfer line; c) a transport vehicle that moves linearly along a transport rail 500 provided in parallel with at least a portion of the transport line to deliver the chemical container 2 from the transport line to the chemical supply device 5; Positioning 600) at the feeding position; and d) feeding the chemical container 2 located on the transfer line to the chemical supply device 5 via the transfer vehicle 600.

The step b) may further include checking the chemical information of the chemical container 2 in the inspection unit provided on the transfer line.

In step d), if the chemical information identified by the inspection unit and the chemical information required by the chemical supply device 5 match, the chemical supply device 5 moves the chemical container 2 located on the transfer line. ) Can be transferred.

The chemical supply device 5 comprises a plurality of chemical supply devices for supplying a plurality of types of chemicals, respectively; The inspection unit may determine whether the chemical information identified in the chemical container 2 is one of chemical information for the plurality of types of chemicals.

Step d) includes the step of placing the chemical container (2) on the transport vehicle (600) located on the transport line; Confirming chemical information of the chemical container (2) in an inspection unit provided in the transport vehicle (600); If the chemical information identified by the inspection unit and the chemical information required by the chemical supply device 5 is matched, the chemical container 2 located on the transfer line is transferred to the chemical supply device 5. Can be.

Checking the chemical information of the chemical container (2) may consist of checking the chemical information of the surface of the pallet that is loaded on the chemical container (2) along the transfer line.

Chemical container automatic transfer method according to the present invention, e) when the chemical container (2) transferred to the chemical supply device (5) is mounted inside the chemical supply device (5) is completed, the chemical container ( 2) is discharged to the outside of the chemical supply device (5) is loaded on the transport vehicle 600 in the input position; f) With the chemical container 2 loaded on the transport vehicle 600, the transport vehicle 600 is moved along the transport rail 500 to position the discharge container spaced apart from the feed position. step; g) The chemical container 2 on the transport vehicle 600 located at the discharge position may further include the step of being seated on the transport line, transported along the transport line and discharged to the outside.

The chemical supply device (5) comprises a first chemical supply device (5-1) for supplying a first chemical and a second chemical supply device (5-2) for supplying a second chemical; The transport vehicle 600 may include a first transport vehicle 600-1 for injecting the first chemical container containing the first chemical into the first chemical supply device 5-1 and the second chemical. A second transport vehicle 600-2 for introducing a second chemical container into the second chemical supply device 5-2; In step c), the first transport vehicle 600-1 is positioned at an injection position of the first chemical supply device 5-1, or the second transport vehicle 600-2 is positioned at the second position. Located in the feeding position of the chemical supply device 5-2; In step d), the first chemical container is transferred to the first chemical supply device 5-1 via the first transport vehicle 600-1, or the second chemical container is transported to the second transport vehicle. It may be transferred to the second chemical supply device 5-2 via 600-2.

The chemical container comprises a plurality of chemical containers each containing a plurality of chemicals; The chemical supply device (5) comprises a plurality of chemical supply devices into which the plurality of chemical containers are respectively introduced; When the transport vehicle 600 is formed in plural, one transport vehicle may inject the plurality of chemical containers into the plurality of chemical supply devices and then discharge the plurality of chemical containers from the plurality of chemical supply devices.

When there are a plurality of transport vehicles 600, the chemical container is introduced into the chemical supply device 5 using at least one transport vehicle, and the chemical container is supplied to the chemical container using another transport vehicle. It can be discharged from (5).

The chemical supply device (5) comprises a first chemical supply device (5-1) for supplying a first chemical and a second chemical supply device (5-2) for supplying a second chemical; The transport vehicle 600 includes a first transport vehicle 600-1 and a second transport vehicle 600-2; The chemical container includes a first chemical container containing the first chemical and a second chemical container containing the second chemical; The first transport vehicle 600-1 feeds the first chemical container into the first chemical supply device 5-1, and inserts the second chemical container into the second chemical supply device 5-2. Put it in; The second transport vehicle 600-2 discharges the first chemical container from the first chemical supply device 5-1, and discharges the second chemical container from the second chemical supply device 5-2. Can be discharged from

When the transfer line at the discharge position of the position spaced apart from the input position has failed, the chemical container 2 is discharged from the chemical supply device 5 through the transfer line at the input position, or the transfer position is at the discharge position. If the line is out of order, the chemical container 2 can be discharged from the chemical supply device 5 via the transfer line in the input position.

The transport vehicle for transporting the chemical container of the present invention, the chemical container (2) is placed on the transport line for transporting the chemical container (2) to the chemical supply device (5) or the chemical supply device (5) A transfer member driven by a drive unit to discharge the chemical container 2 of the chemical supply device 5 onto the transfer line; Can be moved between an input position for feeding the chemical container 2 into the chemical supply device 5 and a discharge position for discharging the chemical container 2 inside the chemical supply device 5 on the transfer line. It includes a control unit for controlling so that.

An inspection unit for checking chemical information on the chemical container 2 is provided, and when the chemical information confirmed by the inspection unit matches the chemical information required by the chemical supply device 5, the chemical container 2 is provided. To the chemical supply device (5).

A conveying member (601) for feeding the pallet (3), on which the chemical container (2) is stacked, to the chemical supply device (5); A lower portion of the transfer member 601 may be provided, and further include a chemical pedestal 603 for accommodating the chemical falling from the chemical container 2.

A transfer member 601 for loading the pallet 3 on which the chemical container 2 is loaded; The chemical container 2 may include a driving unit for driving the transfer member 601 to transfer the pallet 3 loaded thereon to the chemical supply device 5 or to the transfer line.

The transport vehicle may be provided with an emergency stop switch 604 for stopping in an emergency.

According to the present invention, it is possible to automatically supply the chemical container in which the chemical information required by the chemical supply device is confirmed to the chemical supply device, thereby reducing the labor for supplying the chemical and smoothly supplying the chemical.

In addition, it is possible to smoothly input and discharge the chemical container by changing the input position and the discharge position of the chemical container using a transport truck.

In addition, by providing a plurality of transport vehicles, when one of the transport failures, it is possible to smoothly input and discharge the chemical container by using another transport.

In addition, it is possible to smoothly transfer a plurality of chemical containers each containing a plurality of different chemicals to a plurality of chemical supply devices corresponding to each chemical container, and quickly discharge the used chemical containers.

1 is a perspective view showing a chemical container automatic transfer device according to the present invention

2 is a plan view of the chemical container automatic transfer device shown in FIG.

Figure 3 is a perspective view showing a state in which the chemical container and the pallet is inserted into the input of the automatic chemical container transfer device shown in FIG.

Figure 4 is a perspective view showing the input portion of the chemical container automatic transfer device shown in FIG.

5 is a perspective view showing a carriage and a carriage rail according to the present invention;

FIG. 6 is a perspective view of the transport vehicle and the transport rail shown in FIG. 5 viewed from different directions. FIG.

7 is a cross-sectional view showing a transport member and a chemical support provided in the transport truck

8 is a plan view showing a case where there are a plurality of chemical supply apparatuses and a transport vehicle;

FIG. 9 is a plan view illustrating a path in which a chemical container and a pallet are introduced through an input unit and transferred to a chemical supply device in the automatic chemical container transfer device shown in FIG. 1.

FIG. 10 is a plan view illustrating a path through which empty chemical containers used in the chemical container automatic transfer device shown in FIG. 1 are discharged from the chemical supply device and transferred to the discharge part;

FIG. 11 is a plan view illustrating a path in which a chemical container and a pallet are introduced through a discharge part and transferred to a chemical supply device in the automatic chemical container transfer device shown in FIG. 1.

** Explanation of Codes **

1: chemical container automatic transfer device 2: chemical container

3: pallet 4: forklift

5: chemical supply device 6: pump unit

110: inlet 111: transfer member

120: first alignment unit 130: first inspection unit

140: first connection portion (first transfer line connection)

240: first connection portion (second transfer line connection)

150, 250: second connection portion 160, 260: third connection portion

210: discharge portion 220: second alignment portion

230: second inspection unit 310: air shower unit

320, 420: fourth connection part 330, 430: fifth connection part

340, 440: sixth connection part 500: transport rail

501: stopper 502: ankle detection sensor

510: safety bar 520: support

600: conveying vehicle 601: conveying member

602: second inspection unit 603: chemical support

604: emergency stop switch 605: drain valve

606a, 606b: bumper

Hereinafter, a chemical container automatic transfer device and a transport vehicle for transferring a chemical container will be described in detail with reference to the accompanying drawings.

1 and 2 will be described with respect to the automatic chemical container transfer device of the present invention. Chemical container automatic transfer device 1 of the present invention, at least one transfer line (100,200,300,400) for transferring the chemical container (2) introduced into the input unit 110 to the chemical supply device (5), the transfer line (100,200,300,400) When the chemical information of the chemical container 2 transferred through the received and the received chemical information matches the information required by the chemical supply device (5) the chemical container (2) to the chemical supply device ( 5) a control unit (not shown) for controlling to supply.

The chemical container 2 is mounted in the state where the chemical container 2 is loaded on the pallet 3. When the chemical container 2 and pallet 3 are seated inside the chemical supply device 5, the chemical supply device 5 automatically opens the lid of the chemical container 2 and connects the coupler to the chemical container 2. It is possible to supply the chemical contained in the chemical container (2) to the chemical use. In this case, the chemical contained in the chemical container 2 may be transferred to the chemical use place by pressurization of a transfer pump or nitrogen gas. One side of the chemical supply device 5 may be a pump unit 6 is provided with the transfer pump.

The first inspection unit 130 for inspecting the chemical information of the chemical container (2) supplied from the input unit 110 is provided on the transfer line (100, 200, 300, 400), the control unit from the first inspection unit 130 It may be configured to receive the chemical information.

The at least one

transfer line

100, 200, 300, 400 includes a first transfer line 100 connected to the inlet 110 and formed in a straight line.

The first transfer line 100 defines a path for transporting the pallet 3 on which the chemical container 2 is loaded, and the first transfer line for transporting the chemical container 2 and the pallet 3. The transfer member may be provided from the start to the end of the line 100.

The transfer member may include, for example, a plurality of rollers provided along a length direction of the first transfer line 100 and a roller driving part for rotating the rollers. The pallet 3 on which the chemical container 2 is loaded is seated on the plurality of rollers, and the chemical container 2 and the pallet 3 rotate the first conveying line 100 by the rotation of the roller. Are conveyed accordingly.

In addition, the conveying member may be configured as a conveyor belt instead of a roller, and may be configured as a chain block in which a hoist with wheels attached to both sides of a monorail installed on a ceiling moves by an electric motor.

The conveying member may be provided to enable forward and reverse driving of the chemical container 2 and the pallet 3 to enable bidirectional transport, and may be bidirectionally transported on all the

transport lines

100, 200, 300, and 400 described below. Can be.

In addition, the transport object to be transported along the transport line (100, 200, 300, 400) is a chemical container (2) and a pallet (3) stacked up and down, but for convenience of description, the transport object is referred to as a chemical container (2), the pallet ( When explanation of 3) is needed, it demonstrates, referring to it together with the chemical container 2.

On the first transfer line 100, the input unit 110, the first alignment unit 120, and the first inspection unit 130 may be sequentially provided, and the input unit 110 and the first alignment unit may be provided. 120 and the first inspection unit 130 is provided with a plurality of the conveying member along the conveying direction to convey the chemical container (2).

The input unit 110 is a position where the first transfer line 100 starts, where the forklift 4 feeds the chemical container 2 into the first transfer line 100.

Hereinafter, the rear is referred to as the opposite direction of the traveling direction in which the chemical container 2 is transferred based on the first transfer line 100, and the front is referred to as the chemical container 2 based on the first transfer line 100. ) Means the direction of travel.

When the shutter (not shown) provided in the building is opened, the forklift 4 injects the chemical container 2 into the feeding unit 110 through the opening of the feeding guide.

The first alignment unit 120 is provided to align the twisted state when the chemical container 2 is conveyed in an obliquely twisted state with respect to the first transfer line 100. In this case, the chemical container 2 may be configured to align with the center portion of the first transfer line 100.

The first inspection unit 130 may inspect the chemical information through a unique identifier such as a barcode label or RFID attached to the chemical container 2. The unique identifier attached to the chemical container 2 includes not only a chemical name but also various necessary production information. In addition, the first inspection unit 130 may inspect a unique identifier such as a barcode label or RFID attached to the pallet (3). The unique identifier attached to the pallet 3 includes not only the chemical name but also various necessary production information.

The first inspection unit 130 checks the chemical information by scanning the unique identifier, and the control unit in the chemical supply device 5 from the chemical information of the identified chemical container (2) and pallet (3) You can check whether the chemicals you need are correct. In this case, the first inspection unit 130 may be configured to scan the unique identifier attached to the upper surface of the chemical container (2).

In addition, the at least one transfer line (100, 200, 300, 400) may further include a second transfer line 200 disposed adjacent to parallel to the first transfer line (100).

The discharge part 210, the second alignment part 220, and the second inspection part 230 are sequentially provided on the second transfer line 200. The discharge part 210, the second alignment part 220, and the second inspection part 230 are provided with a plurality of transfer members along the transfer direction to transfer the chemical container 2. In this case, the transfer member may be rotationally driven such that the chemical container 2 may be bidirectionally transferred along the second transfer line 200.

The discharge unit 210 is provided for discharging the chemical container 2 used in the chemical supply device 5 through the second transfer line 200 to be discharged to the outside. The discharge unit 210 may be provided to be adjacent to the side of the input unit (110).

When the chemical container 2 is transferred to the discharge part 210, the forklift 4 lifts the pallet 3 loaded with the chemical container 2 to the outside from the rear of the discharge part 210 and discharges it to the outside. .

Meanwhile, when a problem such as a failure occurs in the input unit 110 or the first transfer line 100, the chemical container 2 may not be input through the input unit 110. In this case, by discharging the chemical container 2 through the discharge unit 210, the discharge unit 210 can be used as a function of the input unit. On the contrary, when a problem such as a failure occurs in the discharge unit 210 or the second transfer line 200, the chemical container 2 may be discharged through the input unit 110.

The second alignment unit 220 performs the same function as the first alignment unit 120. Therefore, in order to align the twisted state when the chemical container 2 introduced through the discharge part 210 is in an obliquely twisted state, the chemical container 2 is moved to the center of the second transfer line 200. Can be configured to align. In addition, in the case of discharging the finished chemical container 2 through the discharge unit 210 may be discharged after the alignment in the second alignment unit 220. The second alignment unit 220 may be provided to be adjacent to the side of the first alignment unit 120.

The second inspection unit 230 is to inspect the chemical information of the chemical container (2) when the chemical container (2) is introduced through the discharge unit 210, it may be made of the same configuration as the first inspection unit (130). have.

A plurality of

connection parts

140, 150, 160, 240, 250, and 260 may be provided on the first transfer line 100 and the second transfer line 200 to connect the first transfer line 100 and the second transfer line 200.

The plurality of

connection parts

140, 150, 160, 240, 250, and 260 are provided at positions corresponding to the

first connection parts

140 and 240 connecting the first inspection part 130 and the second inspection part 230 and the third transfer line 300 to be described later. The

second connection part

150 and 250 and a position corresponding to the fourth transfer line 400 to be described later may include

third connection parts

160 and 260 provided at end portions of the first transfer line 100 and the second transfer line 200. Can be.

The

first connector

140, 240, the

second connector

150, 250, and the

third connector

160, 260 may include the first connector 140, the second connector 150, and the first connector 140 provided on the first transfer line 100. It may be composed of a third connector 160, the first connector 240, the second connector 250 and the third connector 260 provided on the second transfer line 200, respectively.

A transport member such as a roller is provided on the first connection portion 140 (first transfer line connection portion) of the first transfer line 100 and the first connection portion 240 (second transfer line connection portion) of the second transfer line 200. It is provided in plural along the direction perpendicular to the conveying direction of the first conveying line 100 and the second conveying line 200, when the conveying member is driven, it is seated on the conveying member of the first conveying line connecting portion 140 The chemical container 2 may be transferred in the direction of the second transfer line 200 to be seated on the second transfer line connection part 240.

For example, it is determined that the chemical container 2 transferred from the input unit 110 is not chemically required by the chemical supply device 5 as a result of confirming the chemical information in the first inspection unit 130. When the chemical container 2 is transferred, the chemical container 2 of the first transfer line connecting unit 140 is transferred to the second transfer line connecting unit 240, and then the discharge unit 210 is transferred. Can be discharged. It is also possible to transfer in the opposite direction.

The

second connection part

150 and 250 and the

third connection part

160 and 260 may also be configured in the same configuration as the

first connection part

140 and 240, and the chemical container 2 may be moved from the first transfer line 100 to the second transfer line ( Or in the direction of the first transfer line 100 from the second transfer line 200.

When the chemical container 2 is introduced into the second transfer line 200 through the discharge part 210, the chemical container 2 is inspected by the second inspection part 230 and the second connection part ( After passing through the first transfer line 100 in the width direction through the 150,250 is transferred to the third transfer line (300).

The third transfer line 300 is vertically connected to the first transfer line 100 and is connected to the

second connection parts

150 and 250.

The fourth transfer line 400 is disposed adjacent to the parallel to the third transfer line 300 at the end of the first transfer line 100 is vertically connected to the first transfer line 100, It is connected to the third connector (160,260).

In order to transfer the chemical container 2 and the pallet 3 to the third transfer line 300 and the fourth transfer line 400, a transfer member may be provided from the start to the end of each transfer line. Foreign substances are attached to the outside of the chemical container 2 and the pallet 3, such foreign matter is obstructed when transferring along the transfer line, removing the lid of the chemical container in the chemical supply device (5) or remounting the lid This can cause malfunctions and can affect the chemical purity. Therefore, an air shower 310 may be provided on the third transfer line 300 to remove foreign substances from the chemical container 2 and the pallet 3.

When the chemical container 2 enters the air shower 310 through the second connecting portion 150 of the first transfer line 100, the air is opened for the time set by the air shower 310. Spraying to remove the foreign matter on the chemical container (2) and the pallet (3).

At least one

buffer unit

301, 302, 303, 304 is provided on the

transfer lines

100, 200, 300, and 400 to temporarily wait before the chemical container 2 passing through the first inspection unit 130 is supplied to the chemical supply device 5. .

In the present exemplary embodiment, the

buffer units

301, 302, 303, and 304 are illustrated in the third and

fourth transfer lines

300 and 400.

The

buffer units

301, 302, 303 and 304 are provided on the first buffer unit 301, the second buffer unit 302, and the fourth transfer line 400 provided on the third transfer line 300. It consists of a buffer part 303 and a fourth buffer part 304.

The first buffer portion 301 and the fourth buffer portion 304 is provided to be adjacent to the position facing each other, the second buffer portion 302 and the third buffer portion 303 adjacent to the position facing each other It is provided to.

A chemical container inlet port 331 is provided between the first buffer part 301 and the second buffer part 302 to allow the chemical container 2 to be introduced into the chemical supply device 5. The chemical container inlet port 331 refers to a position where the chemical container 2 is injected, the fifth connecting portion 330 to be described later may perform the function of the chemical container inlet port 331.

In addition, a chemical container discharge port 341 for discharging the chemical container 2 discharged from the chemical supply device 5 to the third transfer line 300 may be provided. The chemical container discharge port 341 refers to a position where the chemical container 2 is discharged, and a sixth connection part 340 to be described later may perform a function of the chemical container discharge port 341.

Between the third transfer line 300 and the fourth transfer line 400, the chemical container 2 is transferred from the third transfer line 300 to the fourth transfer line 400, or the fourth transfer At least two connecting

portions

320, 420; 330, 430; 340, 440 are provided to allow the chemical container 2 to be transferred from the line 400 to the third transfer line 300.

The at least two

connection parts

320, 420; 330, 430; 340, 440 may include a fourth connection part connecting the side close to the first connection line 100 in the third transfer line 300 and the fourth transfer line 400. 320, 420, and

sixth connectors

340 and 440 connecting the distal ends of the third and

fourth transfer lines

300 and 400 to the first connection line 100.

In this case, the chemical container 2 used in the chemical supply device 5 is withdrawn from the chemical supply device 5 and then the sixth connection part of the third transfer line 300 through the transport vehicle 600 described later. The chemical container 2 of the sixth connector 340 is transferred to the sixth connector 440 of the fourth transfer line 400. Therefore, the

sixth connection parts

340 and 440 are used to move the chemical container 2 in the direction of the fourth transfer line 400 from the third transfer line 300.

On the other hand, the fourth connecting portion (320, 420) is the chemical vessel (2), which is temporarily waiting in the buffer unit (303, 304) provided on the fourth transfer line 400 through the third transfer line (300) It is used to feed the supply device 5. That is, the chemical container 2 of the third buffer portion 303 or the fourth buffer portion 400 is transferred from the fourth transfer line 400 to the third transfer line 300 through the fourth connecting

portions

320 and 420. After being transferred to the position of the chemical container inlet port 331 along the third transfer line 300, it is introduced into the chemical supply device 5.

The

sixth connectors

340 and 440 are used to move the chemical container 2 used in the chemical supply device 5 in the direction of the fourth transfer line 400 from the third transfer line 300. That is, the chemical container 2 inside the chemical supply device 5 is transferred to the sixth connection portion 340 of the third transfer line 300 and then the sixth connection portion 440 of the fourth transfer line 400. Is transferred to). The chemical container 2 transferred to the sixth connection part 440 is sequentially transferred along the fourth transfer line 400, the

third connection part

160 and 260, and the second transfer line 200, and then the discharge part 210. Is discharged through.

Fifth connectors

330 and 430 may be provided between the

fourth connectors

320 and 420 and the

sixth connectors

340 and 440. When the

sixth connection part

340, 440 cannot transfer the chemical container 2 of the chemical supply device 5 through the

sixth connection part

340, 440 due to a breakdown or the like, the chemical supply device 5 cannot be used. The completed chemical container 2 may be transferred to the fourth transfer line 400 through the

fifth connectors

330 and 430.

That is, when the transfer line at the discharge position is broken, the chemical container 2 may be discharged from the chemical supply device 5 through the transfer line at the injection position. On the contrary, it is also possible to feed the chemical container 2 to the chemical supply device 5 through the transfer line at the discharge position when the transfer line at the input position has failed.

The fifth connection part 330 provided in the third transfer line 300 may function as the chemical container inlet port 331 for injecting the chemical container 2 into the chemical supply device 5.

The fifth connector 330 includes a first driving part for transferring the chemical container 2 in the direction of the third transfer line 300, and a chemical supply device 5 in a direction perpendicular to the third transfer line 300. The second driving unit for conveying in the () direction may be provided.

The first driving unit may be formed of a transfer member such as a roller described above. The second driving part is movable up and down between the transfer members, and when the chemical container 2 is positioned on the fifth connection part 330, the second driving part is driven to drive the chemical container 2 to the first driving part. It can be lifted upward from the conveying member and then conveyed in the direction of the chemical supply device 5.

On the other hand, the first to the

third connection portion

140, 240; 150, 250; 160, 260 described above transfers the chemical container 2 in both directions in the direction opposite to the direction of the second transfer line 200 in the first transfer line 100; It is provided with a conveying member such as a roller. In addition, the fourth to

sixth connectors

320, 420; 330, 430; 340, 440 also rollers to transfer the chemical container 2 in both directions in the direction of the fourth transfer line 400 and the opposite direction in the third transfer line 300 The transfer member is provided.

As such, when the plurality of

buffer units

301, 302, 303, and 304 are provided in the third transfer line 300 and the fourth transfer line 400, the quantity of the chemical container 2 to be injected into the chemical supply device 5 may be secured. It is possible to immediately meet the chemical demands required by the chemical supply device (5).

In addition, a plurality of connecting

portions

320, 420; 330, 430; 340, 440 are provided between the third transfer line 300 and the fourth transfer line 400 to inject the chemical container 2 into the chemical supply device 5 or the chemical supply device. In (5), the operation of discharging the chemical container 2 can be simultaneously performed, thereby reducing the process treatment time.

In addition, by temporarily waiting the chemical container (2) on the transfer line (300, 400) it is possible to continuously transfer without having to provide a separate waiting place.

In addition, it is possible to form the transfer line (100, 200, 300, 400) of the chemical container (2) at right angles and to be able to switch the transfer direction to reduce the area occupied by the automatic chemical container transfer device (1) and the size of the device.

Meanwhile, when the chemical container 2 is transported along the first to

fourth transport lines

100, 200, 300, and 400, a real time position with respect to the chemical container 2 is determined by a sensor (not shown) provided on the transport line. It is possible to check. In other words, when the first inspection unit 130 checks the chemical information of one chemical container 2, the real time position of the chemical container 2 in which the chemical information is confirmed is detected by a sensor provided on the transfer line. Therefore, the chemical information on the chemical container 2 which is temporarily waiting in the

buffer units

301, 302, 303 and 304 can be confirmed. Therefore, the chemical information of the chemical container 2 which is temporarily waiting in the

buffer parts

301, 302, 303 and 304 in order to transfer the chemical container 2 required by the chemical supply device 5 is checked, and the identified chemical container 2 is checked. It can be thrown into the chemical supply apparatus 5.

The chemical container 2 may discharge the empty chemical container 2, which has been put into the chemical supply device 5 or used, through the transport vehicle 600 operated unmannedly, from the chemical supply device 5. . Operation control of the transport vehicle 600 may be made by a control unit.

To this end, a transport rail 500 may be provided between the chemical supply device 5 and the third transport line 300 to allow the transport vehicle 600 to reciprocate.

In this embodiment, but illustrated as having a transport rail 500, the transport vehicle 600 may be configured to travel along a line drawn on the floor, or to travel along a predetermined coordinate.

The transport vehicle 600 has a transport member 601, such as a roller, to be introduced into the chemical supply device 5, or discharged from the inside to the outside in the state in which the chemical container (2) is rested on the upper portion thereof. It may be provided. The transfer member 601 may be rotationally driven by a driving unit (not shown). The transfer member 601 may be made of a conveyor belt instead of a roller. When the transfer member 601 is driven by the driving unit, the chemical container 2 and the pallet 3 stacked on the transfer member 601 are transferred to the chemical supply device 5 or vice versa. It is transferred to the third transfer line (300).

Referring to Figures 3 and 4 will be described in detail the configuration of the input unit 110.

The feeding part 110 is provided with a conveying member 111 on which the pallet 3 on which the chemical container 2 is mounted is seated. The transfer member 111 is made of a roller, the roller is provided with a plurality along the first transfer line (100).

The fork inserting portion 3a having a shape penetrating along the conveying direction is formed in the pallet 3, and the fork protruding forward from the forklift 4 is inserted into the fork inserting portion 3a and then the fork is inserted. The pallet 3 and the chemical container 2 can be lifted up.

The input unit 110 is a pair of side frames 112-1 and 112-respectively supporting a transfer member 111 made up of a plurality of rollers rotated by a driving unit (not shown), and both sides of the transfer member 111. 2), the support frame 113-1, 113-2 for supporting the side or the bottom of the transfer member 111 and the side frame (112-1, 112-2), the inlet provided in the inlet side of the input unit 110 Frame 114.

The transfer member 111 provided in the input unit 110 and the driving unit for rotationally driving the transfer member 111 may be identically provided over the entire first to

fourth transfer lines

100, 200, 300, and 400.

The configuration of the transport vehicle 600 and the transport rail 500 will be described with reference to FIGS. 5 to 7.

The transport vehicle 600 may be provided with a third inspection unit 602 for checking the chemical information of the chemical container (2). The third inspection unit 602 scans the surface of the chemical container 2 or pallet 3 loaded on the transport member 601 of the transport vehicle 600 and transmits the chemical information confirmed by the scan to the controller. do.

The control unit, if the chemical information confirmed by the third inspection unit 602 and the chemical information required by the chemical supply device 5, the chemical container (2) and the pallet (3) to the chemical supply device (5) to control the input.

The transport vehicle 600 may be provided with an upper frame 610 made up of a pair of frames having a ∩ shape and a connection frame connecting the pair of frames.

The transport vehicle 600 is provided with four emergency stop switch 604 for stopping the transport vehicle 600 in the emergency. Thus, if the emergency stop switch 604 is provided at the four corners of the upper frame 610, it is possible to take a quick action in the event of an emergency.

Front and rear of the transport vehicle 600 may be provided with a first bumper 606a and a second bumper 606b, respectively, to mitigate an impact during a collision. In addition, the first bumper 606a and the second bumper 606b may be provided with a collision detection sensor (not shown) capable of detecting the collision.

As shown in FIG. 7, a lower portion of the transfer member 601 is provided with a chemical pedestal 603 for preventing leakage to the outside when the chemical flows out. One side of the chemical pedestal 603 is provided with a drain valve 605 for discharging the chemical contained in the chemical pedestal 603.

The chemical pedestal 603 may be provided with a chemical detection sensor (not shown) for detecting a falling chemical. When the chemical is detected by the chemical detection sensor, the transport vehicle 600 may be stopped.

The stopper 501 may be provided with a shock absorber to mitigate the impact when the transport vehicle 600 collides. The stopper 501 may be formed in a pair spaced apart from each other.

In addition, a detection sensor 502 may be provided between the pair of stoppers 501. The detection sensor 502 may be configured to detect whether there is an object in the transport rail 500 and to stop the transport 600 when the object is detected. For example, when the worker is on the transport rail 500, a safety accident may be prevented by stopping the transport 600 by detecting an ankle part of the worker.

In addition, the detection sensor 502 is composed of a light emitting portion provided at one end of the transport rail 500, and a light receiving portion provided at the other end of the transport rail 500, between the light emitting portion and the light receiving portion. If the worker's body is located, it can be detected.

The transport vehicle 600 may be provided with only one transport vehicle, or a plurality of transport vehicles 600 may be provided on the transport rail 500 in case of a failure.

If one of the transport vehicle 600 is provided, the chemical container 2 located in the chemical container inlet port 331 is introduced into the chemical supply device 5 through the transport vehicle 600, and the chemical supply device ( 5) The empty chemical container 2 is discharged to the chemical container discharge port 341 through the transport vehicle 600.

When the plurality of transport vehicles 600 are provided, one transport vehicle 600-1 or 600-2 may be provided at both ends of the transport rail 500.

As such, when two or more transport vehicles 600-1 and 600-2 are configured, a space for storing and repairing one vehicle may be provided. The repairable space may be one end of the transport rail 500. When storing the failed transport vehicle 600 in this space, the safety bar 510 is provided with a safety sensor for detecting the collision with the transport vehicle 600 at the inlet side of the transport vehicle 600 is entered; When installed, and the safety bar 510 is hanging can be configured to prevent other transport vehicle 600 from entering.

In addition, two or more safety bars 510 may be installed in a vertical direction between a pair of supports 520 installed in a vertical direction to increase safety, and if the worker inadvertently drops the safety bars 510. This may be configured to stop the transport vehicle 600 while driving by detecting the safety sensor.

FIG. 8 is a diagram illustrating a case where the transport vehicle 600 and the chemical supply device 5 are plural in number.

If the transport vehicle 600 is a plurality may be used separately for the input and discharge. That is, the plurality of transport vehicles 600, the first transport vehicle (600-1) for injecting the chemical container (2) to the chemical supply device (5), and the chemical container (2) to the chemical It may be composed of a second transport vehicle (600-2) for discharging from the supply device 5 to the transport line. To this end, the first transport vehicle 600-1 waits at a position near the chemical container inlet port 331, and the second transport vehicle 600-2 waits at a position near the chemical container discharge port 341. can do.

In addition, the transport vehicle 600 may be provided in plural to inject or discharge different chemicals into the chemical supply device 5, respectively. That is, the plurality of transport vehicles 600, the first transport vehicle 600-1 for injecting the first chemical container containing the first chemical into the chemical supply device 5 or discharged from the chemical supply device (5). ), A second transport vehicle 600-2 for introducing a second chemical container containing a second chemical into the chemical supply device 5 or discharging it from the chemical supply device 5.

In this case, the chemical supply device 5 supplies a first chemical supply device 5-1 into which a first chemical container containing a first chemical is inserted, and a second chemical supply into which a second chemical container containing a second chemical is inserted. It may be made of the device (5-2).

Of course, in addition to the first chemical and the second chemical, another chemical supply device for supplying other types of chemical may be further provided.

The first transport vehicle 600-1 injects the first chemical container into the first chemical supply device 5-1, and the second transport vehicle 600-2 injects the second chemical container into the first chemical container. It can be comprised so that it may input into the 2nd chemical supply apparatus 5-2.

In FIG. 8, the second chemical supply device 5-2 is provided at the chemical container discharge port 341, but the present invention is not limited thereto, and the chemical container discharge port 331 and the chemical container discharge port 341 are not limited thereto. The second chemical supply device 5-2 may be provided at various positions.

When the second chemical container is introduced into the second chemical supply device 5-2, the injection position is between the second chemical supply device 5-2 and the third transfer line 300.

On the other hand, as another embodiment of the automatic transfer device of the chemical container of the present invention, when one of the two transport trucks (600-1,600-2) is broken by using the other one of the plurality of chemical containers a plurality of It may also be configured to feed into the chemical supply device and to discharge the plurality of chemical containers from the plurality of chemical supply devices.

That is, the chemical container includes a plurality of chemical containers each containing a plurality of chemicals, and the chemical supply device 5 includes a plurality of chemical supply devices 5-1 and 5- into which the plurality of chemical containers are respectively fed. 2) consists of. When the transport vehicle 600 is formed in plural, one transport vehicle 600-1 of the plurality of transport vehicles 600-1 and 600-2 transfers the plurality of chemical containers to the plurality of chemical supply devices 5-1. And 5-2), and may be configured to discharge the plurality of chemical containers from the plurality of chemical supply devices 5-1 and 5-2, respectively.

In another embodiment, when the transport vehicle 600 is plural, the chemical container is introduced into the chemical supply device 5 using at least one transport vehicle, and the other transport vehicle is used. It may be configured to discharge the chemical container from the chemical supply device (5). In this case, the chemical container and the chemical supply device 5 may each be formed in plural.

This is explained in more detail. The chemical supply device 5 is composed of a first chemical supply device 5-1 for supplying a first chemical and a second chemical supply device 5-2 for supplying a second chemical. In addition, the transport vehicle 600 includes a first transport vehicle 600-1 and a second transport vehicle 600-2. The chemical container includes a first chemical container in which the first chemical is accommodated, and a second chemical container in which the second chemical is contained. In this case, the first transport vehicle 600-1 feeds the first chemical container into the first chemical supply device 5-1 for feeding, and supplies the second chemical container with the second chemical. To the apparatus 5-2. The second transport vehicle 600-1 discharges the first chemical container from the first chemical supply device 5-1 and discharges the second chemical container from the second chemical supply device ( Discharge from 5-2).

Referring to Figure 9 will be described with respect to the path transported when the chemical container (2) and the pallet (3) is put through the input unit (110).

When the forklift 4 puts the chemical container 2 into the inlet 110, the chemical container 2 is transferred along the first transfer line 100 by driving the transfer member.

The chemical container 2 is aligned in the first alignment unit 120. After the inspection is performed on the chemical information and the position abnormality, etc. in the first inspection unit 130, if there is no abnormality in the inspection result, it is transferred along the first transfer line 100, and if an abnormality is found If the operator directly reconfirms and determines that the chemical container 2 and the pallet 3 are recovered as a result of the confirmation, the operator transfers the first conveying line connecting part 140 to the second conveying line connecting part 240 and the second conveying part. After the transfer to the discharge unit 210 along the transfer line 200 is recovered by the forklift (4).

If the operator checks the part where the abnormality is found in the first inspection unit 130 after checking, the first inspection unit 130 performs re-inspection and transfers it along the first transfer line 100 if there is no abnormality.

The chemical container 2, which has been found to have no abnormality in the first inspection unit 130, is transferred to the air shower unit 310 by changing the conveying direction by 90 degrees at the second connection unit 150. In the air shower 310, the air is sprayed for a predetermined time to remove foreign substances on the outside of the chemical container 2 and the pallet 3.

The chemical container 2 passing through the air shower unit 310 is transferred to any one of the first to

fourth buffer units

301, 302, 303, and 304 to temporarily wait.

When the chemical use of the chemical container 2 introduced into the chemical supply device 5 is completed, the control unit inputs the chemical container 2 waiting in the

buffer units

301, 302, 303 and 304 to the chemical supply device 5. In order to drive the transfer member of the third transfer line 300 and the fourth transfer line 400.

In this case, the chemicals of the chemical containers 2 waiting in the first to

fourth buffer parts

301, 302, 303, and 304 may be cured when a long time elapses. It is preferable to inject the chemical container 2 transferred to the

parts

301, 302, 303, 304 into the chemical supply device 5.

To this end, the chemical container 2 transferred through the air shower part 310 may include a first buffer part 301, a second buffer part 302, a third buffer part 303, and a fourth buffer part ( 304 is sequentially transferred to wait.

After that, when the chemical container 2 needs to be introduced into the chemical supply device 5, the chemical container 2 in the fourth buffer unit 304 is first introduced. The chemical container 2 in the fourth buffer portion 304 is sequentially passed through the fourth connecting

portions

320 and 420 and the first buffer portion 301 and then transferred to the fifth connecting portion 330.

The fifth connection part 330 is a chemical container inlet port 331, which is between the chemical supply device 5 and the chemical container inlet port 331 such that the transport vehicle 600 is adjacent to the chemical container inlet port 331. It is located in the feeding position.

The fifth connector 330 drives the second driving unit to transfer the chemical container 2 in the direction of the chemical supply device 5, which is a direction perpendicular to the third transfer line 300, on the transport vehicle 600. Place it in

In this case, the transport vehicle 600 may also check the chemical information of the chemical container 2 and the pallet 3 using the third inspection unit 602.

If the chemical information confirmed by the third inspection unit 602 and the chemical information required by the chemical supply device 5 coincide, the chemical container 2 is chemically driven by rotating the conveying member 601 of the transport vehicle 600. It feeds into the supply apparatus 5.

When the chemical container 2 is seated inside the chemical supply device 5, the chemical supply device 5 opens the lid of the chemical container 2 and connects the coupler to the chemical container 2 to connect the chemical container 2 to the chemical container 2. Allow the supplied chemical to be supplied to the chemical user.

Referring to Figure 10 will be described with respect to the path to be transported when discharging the empty chemical container 2 used in the chemical supply device to the discharge unit 210.

When transferring the empty chemical container 2 used in the chemical supply device 5, the transport vehicle 600 is located between the chemical supply device 5 and the fifth connection portion 330, the empty chemical container 2 is mounted on the conveying member 601 of the conveying vehicle 600.

The transport vehicle 600 on which the chemical container 2 is loaded moves from the position of the fifth connector 330 that is an input position to the positions of the

sixth connectors

340 and 440 that are discharge positions.

The chemical container 2 loaded on the transport vehicle 600 has a sixth connection portion 340 of the third transfer line 300 and a sixth connection portion 440 of the fourth transfer line 400 from the transport vehicle 600. Are sequentially transferred.

The chemical container 2 is transferred along the fourth transfer line 400 by changing the transfer direction at the sixth connection portion 440 and positioned on the second transfer line 200 through the

third connection portions

160 and 260. do. In addition, the chemical container 2 is transferred to the forklift 4 through the discharge unit 210 is transferred along the second transfer line 200 is changed in the transfer direction in the third connecting portion 260.

The chemical supply device 5 is composed of a first chemical supply device 5-1 and a second chemical supply device 5-2, and the transport vehicle 600 is a first transport vehicle 600-1. And a transfer method in the case of the second transport vehicle (600-2).

First, the first transport vehicle 600-1 is positioned at an injection position of the first chemical supply device 5-1, or the second transport vehicle 600-2 is operated at the second chemical supply device ( Position it at the insertion position of 5-2). In this case, the first transport vehicle 600-1 and the second transport vehicle 600-2 may be configured to be positioned at respective injection positions at the same time, or one of the two may be configured to be located at the injection position first. have. In addition, only one of the first transport vehicle 600-1 and the second transport vehicle 600-2 may be configured to be positioned at the input position.

Thereafter, the first chemical container is transferred to be loaded on the first transport vehicle 600-1, and after confirming chemical information in the first transport vehicle 600-1, the first chemical supply device 5-. Transfer to 1). In addition, the second chemical container is transported to be mounted on the second transport vehicle 600-2, and after confirming chemical information in the second transport vehicle 600-2, the second chemical supply device 5-. Transfer to 2).

Referring to Figure 11 will be described with respect to the path transported when the chemical container (2) and the pallet (3) is put through the discharge unit 210.

When the chemical container 2 cannot be transferred through the input unit 110 or the first transfer path 100, the chemical container 2 is introduced into the discharge unit 210.

The chemical container 2 of the discharge unit 210 is aligned in the second alignment unit 220, and after the inspection is performed on the chemical information and the position abnormality in the second inspection unit 230, the inspection result abnormality If not, it is transferred along the second transfer line 200. The second inspection unit 230 may be provided for emergency when an abnormality of the input unit 110 occurs.

The chemical container 2, which has been confirmed that there is no abnormality in the second inspection unit 230, passes through the second connection unit 150 of the first transfer line 100 by shifting the transfer direction by 90 degrees at the second connection unit 250. After it is transferred to the air shower (310). In the air shower 310, the air is sprayed for a predetermined time to remove foreign substances on the outside of the chemical container 2 and the pallet 3.

The process of injecting the chemical container 2 passing through the air shower 310 into the chemical supply device 5 is the same as described with reference to FIG.

According to the present invention, it is possible to automatically supply the chemical container 2 confirmed by the chemical information required by the chemical supply device 5 to the chemical supply device 5 can reduce the number of work for supplying the chemical, Can supply chemicals smoothly. In addition, the input and discharge positions of the chemical container 2 are different from each other by using the transport vehicle 600 to smoothly input and discharge the chemical containers. In addition, by providing a plurality of transport vehicle (600-1,600-2) when one of the transport failure can be smoothly the input and discharge of the chemical container by using another transport. In addition, a plurality of chemical containers each containing a plurality of different chemicals are smoothly transferred to a plurality of chemical supply devices 5-1, 5-2 corresponding to each chemical container, and the used chemical containers are quickly transferred. Can be discharged.

As described above, the present invention has been described in detail with reference to preferred embodiments, but the present invention is not limited to the above-described embodiments, and various modifications are made within the scope of the claims and the detailed description of the invention and the accompanying drawings. It is possible to carry out by this and this also belongs to the present invention.

Claims

At least one transfer line for transferring the chemical container 2 introduced into the input unit 110 to the chemical supply device 5;

A control unit for controlling the chemical container (2) to be transferred through the transfer line to the chemical supply device (5);

A transport vehicle 600 for transferring the chemical container 2 from the transport line to the chemical supply device 5 or for transferring the chemical container 2 from the chemical supply device 5 to the transport line;

Chemical container automatic transfer device including
The method of claim 1,

The transport vehicle 600 is provided with an inspection unit 602 for confirming the chemical information of the chemical container 2, the control unit, the chemical information and the chemical supply apparatus 5 confirmed by the inspection unit 602. In accordance with the chemical information required by the chemical container automatic transfer device, characterized in that the control to supply the chemical container (2) to the chemical supply device (5)
The method of claim 1,

Chemical container automatic transfer device, characterized in that the transfer vehicle 600 is provided in plurality
The method of claim 3,

The plurality of transport vehicle 600,

A first transport vehicle for introducing the chemical container 2 into the chemical supply device 5,

Chemical container automatic transfer device, characterized in that consisting of a second transport vehicle for discharging the chemical container (2) from the chemical supply device (5) to the transfer line
The method of claim 3,

The plurality of transport vehicle 600,

A first transport vehicle 600-1 for inputting and discharging the first chemical container containing the first chemical to the chemical supply device 5;

A second transport vehicle 600-2 for introducing and discharging a second chemical container containing a second chemical into the chemical supply device 5;

Chemical container automatic transfer device, characterized in that consisting of
The method of claim 3,

The chemical supply device 5 comprises a first chemical supply device 5-1 and a second chemical supply device 5-2;

The plurality of transport vehicle 600,

A first transport vehicle 600-1 for inputting and discharging a first chemical container containing a first chemical to the first chemical supply device;

A second transport vehicle 600-2 for inputting and discharging a second chemical container containing a second chemical to the second chemical supply device;

Chemical container automatic transfer device, characterized in that consisting of
The method of claim 1,

The chemical supply device (5) consists of a plurality;

The chemical container 2 comprises a plurality of chemical containers each containing a plurality of different chemicals;

The transport vehicle 600 is a chemical container automatic transport apparatus, characterized in that for inputting or discharging any one of the plurality of chemical containers into any one of the plurality of chemical supply device.
The method of claim 1,

The transport vehicle 600,

A linear movement along a transport rail 500 provided between the transport line and the chemical supply device 5 and provided in parallel with at least a portion of the transport line;

The chemical container 2 is transferred from the feeding line to the chemical supply device 5 at the feeding position, or at the discharge position at a position spaced apart along the transport rail 500 from the feeding position. ) From the chemical supply device (5) to the transfer line;

Chemical container automatic transfer device characterized in that
The method of claim 8,

The transport rail 500 is a chemical container automatic transport device, characterized in that each of the waiting places of the transport vehicle 600 is provided on both sides with the chemical supply device 5 therebetween.
The method of claim 2,

The inspection unit 602, a chemical container automatic transfer device, characterized in that it comprises a chemical container scanner for scanning the chemical information on the surface of the chemical container (2)
The method of claim 2,

A pallet (3) is provided along the transfer line in a state where the chemical container (2) is mounted on the upper portion;

The inspection unit 602, a chemical container automatic transfer device characterized in that it comprises a chemical container scanner for scanning the chemical information on the surface of the pallet (3)
The method of claim 1,

In the transport vehicle 600,

A conveying member (601) for feeding the pallet (3), on which the chemical container (2) is stacked, to the chemical supply device (5);

A chemical pedestal 603 provided below the transfer member 601 to accommodate chemicals falling from the chemical vessel 2;

Chemical container automatic transfer device characterized in that the
The method of claim 12,

In the transport vehicle 600,

Chemical container automatic transfer device is provided with a drain valve 605 for draining the chemical contained in the chemical support 603
The method of claim 12,

In the transport vehicle 600,

Chemical container automatic transfer device, characterized in that the chemical detection sensor for detecting the chemical falling inside the chemical support (603)
The method of claim 1,

At one end of the transport rail 500 for moving the transport vehicle 600, a space for storing and transporting the transport vehicle 600 is formed,

When storing and transporting the transport vehicle 600, a safety bar provided with a safety sensor is provided at the inlet side of the transport vehicle 600 to prevent collision with another transport vehicle. Container automatic transfer device
The method of claim 15,

Chemical container automatic transfer device characterized in that the safety sensor is provided for detecting that the safety rod falls from the support
The method of claim 1,

In the transport vehicle 600,

A transfer member 601 for loading the pallet 3 on which the chemical container 2 is loaded;

A driving unit for driving the conveying member 601 to convey the pallet 3 loaded with the chemical container 2 to the chemical supply device 5 or to the conveying line;

Chemical container automatic transfer device characterized in that the
The method of claim 1,

The transport vehicle 600, the chemical container automatic transfer device, characterized in that the emergency stop switch 604 for stopping the transport vehicle 600 in an emergency
The method of claim 18,

The emergency stop switch 604 is a chemical container automatic transfer device, characterized in that provided in plurality in the frame 610 provided in the transport vehicle 600
The method of claim 8,

Chemical container automatic transfer device, characterized in that the stopper 501 is provided at the end of the transport rail 500 to prevent the transport vehicle 600 from being separated from the transport rail 500.
The method of claim 20,

Chemical stopper automatic transfer device is characterized in that the stopper 501 is provided with a shock absorber to mitigate the impact when the transport vehicle 600 collides
The method of claim 8,

Chemical container automatic transfer device is provided at the end of the transport rail 500 is provided with a detection sensor 502 for detecting whether there is an object between both ends of the transport rail 500.
The method of claim 22,

Chemical container automatic transfer device, characterized in that for stopping the transport vehicle 600 when the sensing sensor 502 detects an object
The method of claim 8,

Chemical container automatic transfer device, characterized in that for discharging the chemical container (2) from the chemical supply device (5) through the transfer line in the input position when the transfer line in the discharge position is broken
The method of claim 8,

Chemical container automatic transfer device, characterized in that the chemical container (2) is put into the chemical supply device (5) through the transfer line in the discharge position when the transfer line in the input position has failed.
The method of claim 1,

The transport vehicle 600 is provided between the transport line and the chemical supply device 5 to move linearly along a transport rail 500 provided in parallel with at least a portion of the transport line;

The transport vehicle rail 500 includes a transport member driven by a driving unit, and the transport member provided in the transport line is driven to transport the chemical container 2 in the direction of the chemical supply device 5. Delivering the chemical container (2) from the transfer line to the chemical supply device (5) by driving the drive unit at an input position located between the transfer line and the chemical supply device (5);

Chemical container automatic transfer device characterized in that
a) a step in which the chemical container (2) is injected into the input unit 110;

b) transferring the chemical container 2 through at least one transfer line;

c) a transport vehicle that moves linearly along a transport rail 500 provided in parallel with at least a portion of the transport line to deliver the chemical container 2 from the transport line to the chemical supply device 5; Positioning 600) at the feeding position;

d) injecting the chemical container (2) located on the transport line to the chemical supply device (5) via the transport vehicle (600);

Chemical container automatic transfer method comprising a
The method of claim 27,

The step b) further includes the step of checking the chemical information of the chemical container (2) in the inspection unit provided on the transfer line;

In step d), if the chemical information identified by the inspection unit and the chemical information required by the chemical supply device 5 match, the chemical supply device 5 moves the chemical container 2 located on the transfer line. Chemical container automatic transfer method characterized in that the transfer to
The method of claim 28,

The chemical supply device 5 comprises a plurality of chemical supply devices for supplying a plurality of types of chemicals, respectively;

The inspection unit checks whether the chemical information identified in the chemical container (2) is one of the chemical information for the plurality of types of chemical containers automatic transfer method
The method of claim 28,

In step d),

Positioning the chemical container (2) on the transport vehicle (600) located on the transport line;

Confirming chemical information of the chemical container (2) in an inspection unit provided in the transport vehicle (600);

Transferring the chemical container (2) located on the transfer line to the chemical supply device (5) if the chemical information identified by the inspection unit and the chemical information required by the chemical supply device (5) match;

Chemical container automatic transfer method characterized in that consisting of
The method of claim 30,

Checking the chemical information of the chemical container (2) is a chemical container automatic transfer, characterized in that the chemical container (2) is loaded on the top to check the chemical information of the pallet surface transferred along the transfer line Way
The method of claim 27,

e) When the chemical container 2 transferred to the chemical supply device 5 is mounted inside the chemical supply device 5 and the chemical use is completed, the chemical container 2 is external to the chemical supply device 5. Is discharged to the step of loading on the transport vehicle 600 in the injection position;

f) With the chemical container 2 loaded on the transport vehicle 600, the transport vehicle 600 is moved along the transport rail 500 to position the discharge container spaced apart from the feed position. step;

g) the chemical container (2) on the transport vehicle 600 located in the discharge position is seated on the transport line, and then transported along the transport line and discharged to the outside;

Chemical container automatic transfer method further comprises a
The method of claim 27,

The chemical supply device (5) comprises a first chemical supply device (5-1) for supplying a first chemical and a second chemical supply device (5-2) for supplying a second chemical;

The transport vehicle 600 may include a first transport vehicle 600-1 for injecting the first chemical container containing the first chemical into the first chemical supply device 5-1 and the second chemical. A second transport vehicle 600-2 for introducing a second chemical container into the second chemical supply device 5-2;

In step c), the first transport vehicle 600-1 is positioned at an injection position of the first chemical supply device 5-1, or the second transport vehicle 600-2 is positioned at the second position. Located in the feeding position of the chemical supply device 5-2;

In step d), the first chemical container is transferred to the first chemical supply device 5-1 via the first transport vehicle 600-1, or the second chemical container is transported to the second transport vehicle. Chemical container automatic transfer method characterized in that the transfer to the second chemical supply device (5-2) via (600-2)
The method of claim 27,

The chemical container comprises a plurality of chemical containers each containing a plurality of chemicals;

The chemical supply device (5) comprises a plurality of chemical supply devices into which the plurality of chemical containers are respectively introduced;

When the transport vehicle 600 is formed of a plurality, the transport vehicle is characterized in that the plurality of chemical containers are discharged from the plurality of chemical supply apparatus after the plurality of chemical containers are supplied to the plurality of chemical supply apparatus. Chemical container automatic transfer method
The method of claim 27,

When there are a plurality of transport vehicles 600, the chemical container is introduced into the chemical supply device 5 using at least one transport vehicle, and the chemical container is supplied to the chemical container using another transport vehicle. (5) the chemical container automatic transfer method characterized in that the discharge from
36. The method of claim 35 wherein

The chemical supply device (5) comprises a first chemical supply device (5-1) for supplying a first chemical and a second chemical supply device (5-2) for supplying a second chemical;

The transport vehicle 600 includes a first transport vehicle 600-1 and a second transport vehicle 600-2;

The chemical container includes a first chemical container containing the first chemical and a second chemical container containing the second chemical;

The first transport vehicle 600-1 feeds the first chemical container into the first chemical supply device 5-1, and inserts the second chemical container into the second chemical supply device 5-2. Put it in;

The second transport vehicle 600-2 discharges the first chemical container from the first chemical supply device 5-1, and discharges the second chemical container from the second chemical supply device 5-2. Chemical container automatic transfer method characterized in that the discharge from
The method of claim 27,

When the transfer line in the discharge position of the position spaced apart from the input position is broken, the chemical container (2) is discharged from the chemical supply device (5) through the transfer line in the input position,

When the transfer line in the discharge position is broken, the chemical container automatic transfer method, characterized in that for discharging the chemical container (2) from the chemical supply device (5) through the transfer line in the input position