KR102169248B1 - Automatic transfer apparatus of chemical container and the method thereof - Google Patents

Abstract

Provided in the present invention are an automatic transport apparatus for a chemical container and an automatic transport method thereof, which can minimize the time required for replacing an empty chemical container of a chemical supply device with a new chemical container. To this end, the automatic transport apparatus for a chemical container of the present invention comprises: a chemical supply device supplying a chemical accommodated in a first chemical container to a chemical consumer; a standby unit (230) provided such that a second chemical container to be inserted into the chemical supply device may temporarily be on standby, and functioning as a route through which the first chemical container is discharged; an evacuation unit (220) provided to allow the first chemical container to be evacuated such that, in case the first chemical container which is completely used in the chemical supply device is discharged from the chemical supply device, the second chemical container may be inserted into the chemical supply device; an entrance unit (210) provided at the entrance side of the chemical supply device and functioning as a route through which the first chemical container is discharged and as a route into which the second chemical container is inserted; and a control unit controlling the transport of the first chemical container and the second chemical container individually at the standby unit, the evacuation unit and the entrance unit.

Description

TECHNICAL FIELD [0001] Automatic transfer apparatus of chemical container and the method thereof

The present invention relates to a chemical container automatic transfer device and an automatic transfer method, and more particularly, to a chemical container automatic transfer device and an automatic transfer method capable of reducing the time to put the chemical container into the chemical supply device.

In general, companies that manufacture semiconductors, semiconductor devices, LCDs, and OLEDs, and all companies that use hazardous chemicals, such as pharmaceutical companies and paint companies, use various types of chemicals, and the ways to safely supply these chemicals are also diversifying. .

These chemicals are supplied in large quantities by tank lorry vehicles depending on the chemicals, usage, and process characteristics, but are also supplied in small quantities in various containers of 20 to 1000 ℓ.

The chemical containers are generally packaged in bundles on pallets that can be moved by a forklift or hand lift, and are shipped from a chemical manufacturing factory.When unloading with a forklift at the entrance of the factory using chemicals, the operator uses a handlift. Bring it into the building.

After that, the worker wears chemical-resistant clothing and safety protective equipment such as a gas mask, and transfers the amount of chemical containers that can be installed on a vehicle that can be mounted on the chemical supply device.

After that, open the door of the chemical supply unit and mount it with a balance. In this case, only the chemical container may be installed by installing rollers on the top of the bogie and on the bottom of the chemical supply device, or it may be installed outside the chemical supply device.

After that, a coupler with a nozzle is connected to the chemical injection/discharge port of the chemical container inside the chemical supply device. When the connection of the coupler is completed, the chemical transfer pump is driven to transfer the chemicals of the chemical container to the place of use. In this case, nitrogen gas can be injected into the chemical container to transfer the chemical to the place of use at the set pressure. Through this process, empty chemical containers using all of the chemicals are taken out in the reverse order.

This conventional chemical container transfer method has a problem that threatens the safety of the worker since the worker has manually transferred the container containing the chemical to the chemical supply device by hand using a hand lift or a bogie.

As a prior art for solving this problem, Korean Patent Registration No. 10-1947450 is disclosed.

According to the automatic chemical container transfer device according to the prior art, it takes a lot of time to discharge the empty chemical container that has been used in the chemical supply device and to put a new chemical container stored in a random storage place into the chemical supply device. There was a problem.

The present invention was devised to solve the above-described problems, and to provide an automatic chemical container transfer device and an automatic transfer method capable of minimizing the time required to replace an empty chemical container of a chemical supply device with a new chemical container. There is a purpose.

Another object of the present invention is to provide an automatic chemical container transfer device and an automatic transfer method capable of minimizing the area occupied by the automatic chemical container transfer device.

A chemical container automatic transfer device of the present invention for achieving the above object comprises: a chemical supply device for supplying a chemical contained in a first chemical container to a chemical use place; A standby unit provided to temporarily wait for a second chemical container for input into the chemical supply device; When the first chemical container used in the chemical supply device is discharged from the chemical supply device, the first chemical container can be evacuated so that the second chemical container can be injected into the chemical supply device. Shelter; An inlet portion provided at an inlet side of the chemical supply device and serving as a path through which the first chemical container is discharged and a path for inputting the second chemical container; And a control unit for controlling the transfer of the first chemical container and the second chemical container in each of the waiting part, the evacuation part, and the inlet part.

At least one transfer line for transferring the chemical container to the chemical supply device is provided; The standby unit may be provided between the transfer line and the chemical supply device.

The chemical supply device and the inlet and the evacuation part are provided on a straight path; The waiting part may be connected to the inlet part, and may be provided so as to be perpendicular to the evacuation part based on the inlet part.

The inlet portion is provided with a first transfer member for transferring the chemical container from the inlet to the evacuation portion, and a second transfer member for transferring from the inlet to the waiting portion; The transfer direction of the first transfer member and the second transfer member may be vertical.

A transfer vehicle rail provided in parallel with at least a portion of the transfer line; A discharge position at a position that moves linearly along the transport vehicle rail, but transfers the chemical container from the transport line to the chemical supply device at an input position adjacent to the waiting part, or is spaced apart from the input position along the transport vehicle rail In may further include a transfer vehicle for transferring the chemical container from the chemical supply device to the transfer line.

The control unit receives chemical information of the chemical container transferred through the transfer line, and supplies the chemical container to the chemical supply device when the received chemical information matches the information required by the chemical supply device. It can be controlling.

The chemical supply device is made in a pair so that the inlets face each other; A pair of the inlet portions is provided on the inlet side of the pair of chemical supply devices; The waiting portion is provided with a pair of adjacent to each of the pair of inlet portions; Each of the pair of inlet portions may function as an evacuation portion from which the first chemical container discharged from the chemical supply device of the other side is evacuated.

The waiting portion may be provided at a position perpendicular to a straight path connecting the inlet of the chemical supply device and the inlet portion.

The waiting part may be a path through which the first chemical container is discharged.

The waiting part and the evacuation part may be provided on both sides of the inlet part, respectively.

A first transport vehicle linearly moving along a first transport vehicle rail provided on an opposite side of the inlet part with respect to the waiting part; A second transport vehicle linearly moving along a second transport vehicle rail provided on the opposite side of the inlet part with respect to the evacuation part; A second chemical container loaded on the first transport vehicle is introduced into the chemical supply device through the inlet part through the waiting part; The first chemical container inside the chemical supply device may be transported to the second transport vehicle through the inlet and the evacuation part and then discharged to the outside through a transport line.

The automatic transfer method of a chemical container according to the present invention comprises the steps of: a) discharging a used first chemical container from a chemical supply device to an inlet portion located at an inlet side of the chemical supply device; b) transferring the first chemical container of the inlet part to the evacuation part; c) introducing a second chemical container, which is a new chemical container waiting in the waiting part, into the chemical supply device through the inlet part; d) transferring the first chemical container that was evacuated to the evacuation unit to a transfer line.

In step d), the first chemical container may be transferred to the transfer line after passing through the inlet part and the waiting part sequentially in the evacuation part.

The first chemical container may be loaded onto a transport vehicle that moves a transport vehicle rail provided in parallel with at least a portion of the transport line and then discharged to the outside through the transport line.

According to the present invention, empty chemicals of the chemical supplying device are provided by providing a waiting part for waiting for a new chemical container to be injected into the chemical supplying device and an evacuation part for temporarily evacuating the empty chemical container discharged after chemical use in the chemical supplying device is completed It is possible to minimize the time required to replace the container with a new chemical container.

In addition, it is possible to minimize the area occupied by the automatic chemical container transfer device by providing the waiting part and the evacuation part in a vertical position with respect to the inlet part, which is provided at the inlet side of the chemical supply device and becomes the transfer path of the chemical container.

1 is a perspective view showing a chemical container automatic transfer device according to the present invention
Figure 2 is a perspective view showing a state in which a waiting unit and an evacuation unit are provided in the chemical supply device according to the present invention
Figure 3 is a plan view of Figure 2
4 to 12 are views showing a process of replacing a chemical container
13 is a view showing an automatic chemical container transfer device according to another embodiment of the present invention

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Referring to Figure 1, the automatic chemical container transfer device 1 of the present invention, at least for transferring the chemical container (not shown) put in the input / discharge unit 10 to the chemical supply device (100-1, 100-2) One transfer line 30, the chemical information of the chemical container transferred through the transfer line 30 is received, and the received chemical information is the information required by the chemical supplying devices 100-1 and 100-2 and If matched, it includes a control unit (not shown) that controls to supply the chemical container to the chemical supply device (100-1, 100-2).

A chemical container is mounted on a pallet (not shown) in the interior of the chemical supplying devices 100-1 and 100-2. When the chemical container and the pallet are seated inside the chemical supply devices 100-1,100-2, the chemical supply devices 100-1,100-2 automatically open the lid of the chemical container and connect the coupler to the chemical container to Accepted chemicals can be supplied to chemical users. In this case, the chemical contained in the chemical container can be transferred to the chemical use place by pressurization of a transfer pump or nitrogen gas. At one side of the chemical supply devices 100-1 and 100-2, a pump unit having the transfer pump may be installed.

On the transfer line 30, an input/discharge unit 10, an inspection unit 20, a first buffer unit 40, and a second buffer unit 50 are provided. The transfer line 30 defines a path for transferring the pallet loaded with the chemical container, and a transfer member may be provided from the start to the end of the transfer line 30 for transferring the chemical container and the pallet. .

The transfer member may include, for example, a plurality of rollers provided along the longitudinal direction of the transfer line 30 and a roller drive unit for rotating the roller. The pallet loaded with the chemical container is seated on the plurality of rollers, and the chemical container and the pallet are transferred along the transfer line 30 by rotation of the rollers. Such a transfer member may be provided to enable forward and reverse driving to enable bidirectional transfer of the chemical container and pallet, and may be provided to enable bidirectional transfer on all transfer lines 30.

In addition, the object to be transported along the transport line 30 is a chemical container and a pallet stacked up and down, but hereinafter, the object to be transported is referred to as a chemical container for convenience of explanation. Explain while referring.

The input/discharge unit 10 is in which a forklift puts a chemical container into the transfer line 30 or transfers a chemical container that has been used in the chemical supply device 100-1,100-2 through the transfer line 30. It is for discharging to the outside afterwards.

The inspection unit 20 may inspect chemical information through a barcode label attached to the chemical container or a unique identifier such as RFID. The unique identifier attached to the chemical container includes a chemical name as well as various necessary production information. In addition, the inspection unit 20 may inspect a barcode label attached to the pallet or a unique identifier such as RFID. The unique identifier attached to the pallet also includes a chemical name as well as various necessary production information. The inspection unit 20 checks the unique identifier, and the control unit may check whether the chemical required by the chemical supplying devices 100-1 and 100-2 is correct from the identified chemical container and the chemical information of the pallet.

The first buffer unit 40 and the second buffer unit 50 are provided to temporarily wait before the chemical container that has passed through the inspection unit 20 is supplied to the chemical supply devices 100-1 and 100-2. will be. The first buffer part 40 is provided on the first floor, and the second buffer part 50 is provided on the second floor, and there is a chemical between the first buffer part 40 and the second buffer part 50. An elevating device may be provided to elevate the container.

The chemical container is injected into the chemical supplying device (100-1,100-2) through an unmanned transport vehicle (400) or used to discharge the empty chemical container from the chemical supplying device (100-1,100-2). I can.

To this end, a transport vehicle rail 300 may be provided between the chemical supply devices 100-1 and 100-2 and the transport line 30 so that the transport vehicle 400 can reciprocate. In the present embodiment, it is exemplified that the transport vehicle rail 300 is provided, but the transport vehicle 400 may be configured to travel along a line drawn on the floor or along a predetermined coordinate.

In the transfer vehicle 400, a chemical container is inserted into the chemical supplying device 100-1,100-2 or a transfer line 30 from the chemical supplying device 100-1,100-2 while the chemical container is seated thereon. ) May be provided with a conveying member such as a roller to be discharged to the side.

Two or more of the transport vehicles 400 may be provided on the transport vehicle rail 300 in case a failure occurs. In this way, when the transport vehicle 300 is configured with two or more, a space for storing and repairing one of the transport vehicles 300 may be provided if one is broken.

Referring to Figures 2 and 3, the chemical container automatic transfer device 1 of the present invention, a first chemical supply device (100-1), a second chemical supply device (100-2), a transfer vehicle rail (300) , A transport vehicle 400, and the first to fourth transport units 210, 220, 230, 240.

The first chemical supply device 100-1 and the second chemical supply device 100-2 are provided with doors that open and close to input or discharge a chemical container. In FIG. 2, only the door 110-1 provided in the first chemical supply device 100-1 is shown, but the second chemical supply device 100-2 also faces the door 110-1. A door (not shown) is provided. A position in which the door is provided is defined as an inlet side of the first chemical supply device 100-1 or the second chemical supply device 100-2.

The first chemical supply device 100-1 or the second chemical supply device 100-2 is referred to as a first chemical container, and the first chemical supply device 100-1 or the first 2 A chemical container waiting in the third transfer unit 230 or the fourth transfer unit 240 to be introduced into the chemical supply device 100-2 is referred to as a second chemical container. The first chemical container refers to a chemical container that is supplying chemicals or an empty chemical container that has been supplied with chemicals, and the second chemical container is a new chemical input to the first and second chemical supply devices (100-1, 100-2). It means courage.

A first transfer part 210 is provided at an inlet side of the first chemical supplying device 100-1, and a second transfer part 220 is provided at an inlet side of the second chemical supplying device 100-2. In addition, a third transfer unit 230 is provided at a position adjacent from the first transfer unit 210 to the transfer rail 300 side, and is adjacent to the transfer car rail 300 side from the second transfer unit 220 A fourth transfer unit 240 is provided at the location.

From the inlet of the first chemical supplying device 100-1, the third conveying part is at a position perpendicular to the linear path connecting the first and second conveying parts 210 and 220 and the second chemical supplying device 100-2 ( 230) and a fourth transfer unit 240 are provided, respectively.

That is, the third transfer unit 230 is provided at a position perpendicular to the second transfer unit 220 with respect to the first transfer unit 210, and the fourth transfer unit 240 is the second transfer unit 220 ) Is provided at a position perpendicular to the first transfer unit 210.

Each of the first transfer unit 210 and the second transfer unit 220 is provided with a transfer member such as a roller to transfer the chemical container loaded thereon.

The first transfer unit 210 is provided with a first transfer member to transfer the chemical container in the y direction, which is a longitudinal direction connecting the first transfer unit 210 and the second transfer unit 220. In addition, the first transfer unit 210 is provided with a second transfer member to transfer the chemical container in the x direction, which is a longitudinal direction connecting the first transfer unit 210 and the third transfer unit 230. That is, the transfer direction of the chemical container by the driving of the first transfer member and the transfer direction of the chemical container by the drive of the second transfer member are vertical.

The second transfer unit 220 is provided with a first transfer member to transfer the chemical container in the y direction, which is a longitudinal direction connecting the first transfer unit 210 and the second transfer unit 220. In addition, the second transfer unit 220 is provided with a second transfer member to transfer the chemical container in the x direction, which is a longitudinal direction connecting the second transfer unit 220 and the fourth transfer unit 240. That is, the transfer direction of the chemical container by the driving of the first transfer member and the transfer direction of the chemical container by the drive of the second transfer member are vertical.

In addition, in the first transfer unit 210 and the second transfer unit 220, the first transfer member is provided to enable bidirectional transfer in the y direction, and the second transfer member is provided to enable transfer in both directions in the x direction. .

Each of the third transfer unit 230 and the fourth transfer unit 240 is provided with a transfer member so as to transfer the chemical container in the x direction.

The first transfer part 210 becomes a path through which the first chemical container inside the first chemical supply device 100-1 is discharged, and the second chemical container waiting in the third transfer part 230 is transferred to the Since it serves as a path for inputting into the first chemical supply device 100-1, it is referred to as a'inlet' (first inlet).

The second transfer unit 220 serves as a path through which the first chemical container in the second chemical supply device 100-2 is discharged, and the second chemical container waiting in the fourth transfer unit 240 is transferred to the Since it becomes a path for inputting into the second chemical supply device 100-1, it is referred to as a'inlet' (a second inlet).

The third transfer unit 230 is provided to temporarily wait for a second chemical container for input into the first chemical supply device 100-1, and is referred to as a'waiting unit' (first waiting unit). Called. In this case, the third transfer unit 230 also functions as a path through which the first chemical container inside the first chemical supply device 100-1 is discharged.

The fourth transfer unit 240 is provided to temporarily wait for a second chemical container for input into the second chemical supply device 100-2, and is referred to as a'waiting unit' (a second waiting unit). Called. In this case, the fourth transfer unit 240 also functions as a path through which the second chemical container inside the second chemical supply device 100-2 is discharged.

Meanwhile, the first chemical container in the first chemical supply device 100-1 is discharged, and the second chemical container in the third transfer unit 230 is transferred to the first chemical supply device 100-1. ), the second transfer unit 220 is referred to as a “evacuation unit” (first evacuation unit) because the first chemical container performs a function of temporarily evacuating.

In addition, the first chemical container in the second chemical supply device 100-2 is discharged, and the second chemical container in the fourth transfer unit 240 is transferred to the second chemical supply device 100-2. ), the first transfer unit 210 is referred to as a'evacuation unit' (a second evacuation unit) because the first chemical container performs a function of temporarily evacuating.

Therefore, when the inlet of the chemical supplying device 100-1 and 100-2 is formed as a pair so as to face each other as described above, the second inlet portion functions as an evacuation unit with respect to the first chemical supplying device 100-1, and the first The inlet portion functions as an evacuation portion for the second chemical supply device 100-2.

According to the configuration as described above, the empty chemical container of the chemical supply device is replaced with a new chemical container by providing a waiting part for waiting for a new chemical container and an evacuation part for temporarily evacuating the empty chemical container discharged after chemical use is completed. The time required can be minimized. In addition, the waiting part and the evacuation part are provided in a vertical position based on the inlet part provided on the inlet side of the chemical supplying devices 100-1,100-2, and the waiting part is located in the direction of the transfer vehicle rail 300 The area occupied by the automatic container transfer device can be minimized.

In the above embodiment, a case in which a pair of chemical supply devices 100-1 is provided is illustrated, but only the first chemical supply device 100-1 is provided, and the second chemical supply device 100-2 is not provided. In this case, the fourth transfer unit 240 may be configured as not provided.

Hereinafter, a method for automatically transferring a chemical container according to the present invention will be described with reference to FIGS. 4 to 12.

Referring to FIG. 4, a first chemical container 510 is inserted into a first chemical supply device 100-1, and chemicals contained in the first chemical container 510 are supplied to a chemical use place.

When the use of the first chemical container 510 is completed, a plurality of second chemical containers 520 to be injected into the first chemical supply device 100-1 are waiting in the first waiting unit 230. .

It shows a state in which the first chemical container 530 is inserted into the second chemical supply device 100-2, and the chemical contained in the first chemical container 530 is supplied to a chemical use place.

The transport vehicle 400 moving along the transport vehicle rail 300 is located on the side of the fourth transport unit 240, and the transport vehicle 400 has a second chemical supply device 100-2. 2 The chemical container 540 is loaded.

A plurality of first chemical containers 510 in the first chemical supply device 100-1 are provided, respectively, and the plurality of first chemical containers 510 are supported by a pallet 511. The first chemical container 530 in the second chemical supply device 100-2, and the second chemical container 520 and 540 in the second transfer unit 220 and the transfer vehicle 400 are also respectively It is supported.

Referring to FIG. 5, in the state of FIG. 4, the second chemical container 540 in the transfer vehicle 400 is transferred to the fourth transfer unit 240. The transfer member provided on the upper part of the transfer vehicle 400 is driven by a driving part, and the transfer member provided in the fourth transfer part 240 is driven by the driving part, so that the second chemical container 540 is moved in the x direction. It is transferred and is positioned on the fourth transfer unit 240.

Referring to FIG. 6, the first chemical container 510 that has become an empty container after chemical use of the first chemical container 510 in the first chemical supply device 100-1 is completed is a first chemical supply device ( It is discharged from 100-1) and is loaded on the first transfer unit 210.

Referring to FIG. 7, the first chemical container 510 loaded on the first transfer unit 210 in the state of FIG. 6 is transferred to the second transfer unit 220, which is a first evacuation unit. As a result, the second chemical container 520 on the third transfer unit 230 can be put into the first chemical supply device 100-1.

Referring to FIG. 8, the second chemical container 520 loaded on the third transfer unit 230 in the state of FIG. 7 is transferred to the first transfer unit 210. Thereafter, as shown in FIG. 9, the second chemical container 520 in the first transfer unit 210 is put into the first chemical supply device 100-1 and is positioned so as to supply chemicals to the chemical use place.

After that, the first chemical container 510 that was evacuated to the second transfer unit 220, which is the first evacuation unit, is transferred to the first transfer unit 210 as shown in FIG. 10, and the first transfer unit as shown in FIG. It is transferred from 210 to the third transfer unit 230.

The first chemical container 510 transferred to the third transfer part 230 is transferred to the upper part of the transfer vehicle 400 located at the side of the third transfer part 230 as shown in FIG. 12. The transport vehicle 400 loaded with the first chemical container 510 moves along the transport vehicle rail 300 and then loads the first chemical container 510 on the transport line 30. The first chemical container 510 transferred on the transfer line 30 is transferred along the transfer line 30 and then discharged to the outside.

Another embodiment of the present invention will be described with reference to FIG. 13.

The chemical container automatic transfer device shown in the embodiment of FIG. 13 includes a chemical supply device 100-3, a first transfer part 210-2 provided at an inlet side of the chemical supply device 100-3, and the first 1 It includes a second transfer unit 220-2 and a third transfer unit 230-2 provided on both sides of the transfer unit 210-2 in the x-axis direction.

In addition, the automatic chemical container transfer device includes a first transfer vehicle rail 300-1 provided on an opposite side of the first transfer part 210-2 based on the third transfer part 230-2, and the second A second transfer vehicle rail 300-2 provided on the opposite side of the first transfer unit 210-2 based on the transfer unit 220-2 may be further included. In other words, a third transfer unit 230-2 and a first transfer vehicle rail 300-1 are sequentially provided on one side based on the first transfer unit 210-2, and a second transfer unit 220-2 on the other side. And a second transfer rail 300-2 are sequentially provided.

The first transfer part 210-2 becomes an inlet part, the second transfer part 220-2 becomes an evacuation part, and the third transfer part 230-2 becomes a standby part.

The first chemical container 510 in the chemical supply device 100-3 is discharged from the chemical supply device 100-3 to the first transfer unit 210-2. The first chemical container 510 discharged to the first transfer unit 210-2 is transferred to the second transfer unit 220-2, and the first chemical container 510 of the second transfer unit 220-2 is After being transported to a transport vehicle (not shown) of the first transport vehicle rail 300-1, it is discharged to the outside through a transport line.

In this case, when the first chemical container 510 is transferred from the first transfer unit 210-2 to the second transfer unit 220-2, the second chemical container that is waiting in the third transfer unit 230-2 ( After 520 is transferred to the first transfer unit 210-2, it is introduced into the chemical supply device 100-2.

In the above-described embodiments, the chemical container is configured to be transferred to a transfer line through a transfer vehicle, but the transfer vehicle is not provided, and the third transfer unit 230 / the fourth transfer unit 240 / the second transfer unit 220-2 / It may be configured to be transferred directly from the third transfer unit 230-2 to the transfer line.

As described above, the present invention has been described in detail with reference to preferred embodiments, but the present invention is not limited to the above-described embodiments, and various modifications within the scope of the claims and the detailed description of the invention and the accompanying drawings. It is possible to do so, and this also belongs to the present invention.

1: chemical container automatic transfer device 10: input/discharge unit
20: inspection unit 30: transfer line
40: first buffer part 50: second buffer part
100-1: first chemical supply device 100-2: second chemical supply device
110-1: door 210: first transfer unit
220: second transfer unit 230: third transfer unit
240: fourth transfer unit 300: transfer vehicle rail
400: transport vehicle

Claims (15)

An evacuation unit provided so that the first chemical container is discharged from the chemical supply device to evacuate;
A standby unit provided to temporarily wait for the second chemical container;
An inlet portion serving as a path through which the first chemical container is discharged and a path for introducing the second chemical container into the chemical supply device;
A control unit for controlling the transfer of the first chemical container and the second chemical container in each of the waiting part, the evacuation part, and the inlet part;
At least one transfer line for transferring the second chemical container to the chemical supply device;
Including,
The standby unit is provided between the transfer line and the chemical supply device, the evacuation unit is connected to one side of the inlet, and the standby unit is connected to another position of the inlet unit. The method of claim 1,
The standby unit is provided between the transfer line and the chemical supply device;
Chemical container automatic transfer device, characterized in that The method of claim 1,
The chemical supply device and the inlet and the evacuation part are provided on a straight path;
The waiting part is connected to the inlet part, and is provided so as to be perpendicular to the evacuation part based on the inlet part;
Chemical container automatic transfer device, characterized in that The method of claim 1,
The inlet portion is provided with a first transfer member for transferring the chemical container from the inlet to the evacuation portion, and a second transfer member for transferring from the waiting portion to the inlet portion;
Automatic chemical container transfer device, characterized in that the transfer direction of the first transfer member and the second transfer member are vertical The method of claim 2,
A transfer vehicle rail provided in parallel with at least a portion of the transfer line;
A discharge position at a position that moves linearly along the transport vehicle rail, but transfers the chemical container from the transport line to the chemical supply device at an input position adjacent to the waiting part, or is spaced apart from the input position along the transport vehicle rail A transfer vehicle for transferring the chemical container from the chemical supply device to the transfer line;
Chemical container automatic transfer device, characterized in that it further comprises The method of claim 2,
The control unit,
Receiving chemical information of the chemical container transferred through the transfer line, and controlling to supply the chemical container to the chemical supply device when the received chemical information matches the information required by the chemical supply device Chemical container automatic transfer device The method of claim 1,
The chemical supply device is made in a pair so that the inlets face each other;
A pair of the inlet portions is provided on the inlet side of the pair of chemical supply devices;
The waiting portion is provided with a pair of adjacent to each of the pair of inlet portions;
Each of the pair of inlet portions serves as an evacuation unit for evacuating the first chemical container discharged from the other side of the chemical supply device;
Chemical container automatic transfer device, characterized in that The method of claim 7,
The standby unit is provided at a position perpendicular to a linear path connecting the inlet of the chemical supply device and the inlet unit. The method of claim 1,
The standby part is an automatic chemical container transfer device, characterized in that the path through which the first chemical container is discharged. The method of claim 1,
Automatic chemical container transfer device, characterized in that the waiting part and the evacuation part are provided on both sides of the inlet part The method of claim 10,
A first transport vehicle linearly moving along a first transport vehicle rail provided on an opposite side of the inlet part with respect to the waiting part;
A second transport vehicle linearly moving along a second transport vehicle rail provided on the opposite side of the inlet part with respect to the evacuation part;
A second chemical container loaded on the first transport vehicle is introduced into the chemical supply device through the inlet part through the waiting part;
The first chemical container inside the chemical supply device is transferred to the second transfer vehicle through the inlet and the evacuation part and then discharged to the outside through a transfer line;
Chemical container automatic transfer device, characterized in that a) discharging the used first chemical container from the chemical supply device to an inlet portion located at the inlet side of the chemical supply device;
b) transferring the first chemical container of the inlet to a shelter connected to one side of the inlet;
c) introducing a second chemical container, which is a new chemical container, which has been transferred through at least one transfer line and is waiting in a waiting part connected to another position of the inlet part, to the chemical supply device through the inlet part;
Chemical container automatic transfer method comprising a The method of claim 12,
d) Automatic chemical container transfer method further comprising the step of transferring the first chemical container evacuated to the evacuation unit to a transfer line The method of claim 13,
In step d), the first chemical container is transferred to the transfer line after passing through the inlet part and the waiting part sequentially at the evacuation part. The method of claim 13,
The first chemical container automatic transfer method, characterized in that the first chemical container is loaded on a transfer car that moves straight through a transfer car rail provided in parallel with at least a portion of the transfer line and then discharged to the outside through the transfer line.

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