KR20230130519A - Chemical supply system - Google Patents

Abstract

One embodiment of the present invention includes a chemical loading device into which chemical containers are loaded; a chemical supply device configured to supply the chemicals in the chemical container to the place of use; At least one transfer robot configured to transfer the chemical container to the chemical supply device; and a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device and the chemical supply device.

Description

Chemical supply system{CHEMICAL SUPPLY SYSTEM}

The present invention relates to a chemical supply system.

Various types of chemicals used in semiconductor processing are supplied to appropriate use locations (or process steps) by chemical supply devices. Chemicals are supplied in chemical containers, and therefore, the work of loading chemical containers into a chemical supply device or removing a chemical container whose chemicals are all exhausted from the chemical supply device is performed. During the loading and unloading process of chemical containers, the development of a chemical supply system that can prevent safety accidents and improve work efficiency is required.

One of the problems to be solved by the present invention is to provide a chemical supply system with improved work efficiency.

As a means of solving the above-described problem, an embodiment of the present invention includes a chemical loading device into which a chemical container is loaded; a chemical supply device configured to supply the chemicals in the chemical container to the place of use; At least one transfer robot configured to transfer the chemical container to the chemical supply device; and a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device and the chemical supply device.

In addition, a chemical loading device into which chemical containers are loaded; a chemical supply device configured to supply the chemicals in the chemical container to the place of use; a temporary storage space having at least one storage space in which the chemical container is accommodated; at least one transfer robot configured to transfer the chemical container to the temporary storage and the chemical supply device; and a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device, the chemical supply device, and the temporary storage.

In addition, a chemical loading device into which chemical containers are loaded; a chemical supply device configured to supply the chemicals in the chemical container to the place of use; a temporary storage having at least one storage space in which the chemical container is accommodated, and a tipping-prevention member configured to support the chemical container loaded in the at least one storage space; at least one transfer robot configured to transfer the chemical container to the temporary storage and the chemical supply device; and a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device, the chemical supply device, and the temporary storage.

In addition, a chemical loading device into which chemical containers are loaded; a chemical supply device configured to supply the chemicals in the chemical container to the place of use; At least one transfer robot configured to transfer the chemical container to the chemical supply device and including a load detection sensor to check whether the chemical container is loaded; and a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device and the chemical supply device.

According to embodiments of the present invention, a chemical supply system with improved work efficiency can be provided by automating the loading and unloading operations of chemical containers.

1 is a diagram illustrating a chemical supply system according to an embodiment of the present invention.
2A and 2B are diagrams illustrating a chemical loading device applicable to the chemical supply system of one embodiment.
3A and 3B are diagrams illustrating a first robot applicable to a chemical supply system of one embodiment.
4A and 4B are diagrams illustrating temporary storage applicable to a chemical supply system of one embodiment.
5A and 5B are diagrams illustrating a second robot applicable to a chemical supply system of one embodiment.
6A and 6B are diagrams illustrating a chemical supply device applicable to the chemical supply system of one embodiment.
7A to 7D are diagrams illustrating a third robot applicable to the chemical supply system of one embodiment.
FIG. 8 is a diagram illustrating a chemical supply system comprised of the exemplary devices shown in FIGS. 2A-6B.

Hereinafter, preferred embodiments of the present invention will be described with reference to the attached drawings.

Figure 1 is a diagram illustrating a chemical supply system 100 according to an embodiment of the present invention.

Referring to FIG. 1, the chemical supply system 100 of one embodiment includes a chemical loading device 110, a chemical supply device 130, and at least one transfer robot (e.g., a first robot 140, and/or a second robot). 2 robot 150) may be included. Depending on the embodiment, the chemical supply system 100 may further include a temporary storage 120 in which the chemical container bundle 10 before and after use is stored. In addition, the chemical supply system 100 includes at least one transfer robot (e.g., a first robot 140) so that a chemical replacement operation is performed between the chemical loading device 110, the temporary storage 120, and the chemical supply device 130. ) and/or a control system for controlling the second robot 150) may be further included. The 'control system' includes a chemical loading device 110, a temporary storage 120, a chemical supply device 130, and at least one transfer robot (e.g., the first robot 140 and/or the second robot 150). Various information can be collected and stored, and based on this, each element can be controlled to ensure that the chemical container is transported. The control system may include at least one server for storing the various types of information described above. The chemical supply system 100 according to the present invention uses at least one transfer robot (the first robot 140 and/or the second robot 150) to transfer the chemical container bundle 10 to the chemical loading device 110. By putting it into the chemical supply device 130 or storing it in the temporary storage 120, safety accidents that occur during the loading and unloading of high weight chemical containers can be prevented and the efficiency of the chemical container transfer work can be improved. .

The chemical loading device 110 may be configured to inspect chemical information of chemical containers included in the chemical container bundle 10. The chemical information may include information that can determine whether the chemical in the chemical container is required by the chemical supply device 130 or the place where it is used, for example, material information, expiration date, etc. Chemical information can be checked by scanning the barcode or QR code attached to the surface of the chemical container. Chemical information can be registered and stored in the control system. For example, if the chemical information of the chemical container does not meet the required conditions, the chemical container may be returned to the outside.

Temporary storage 120 may be configured to store chemical containers. The temporary storage may temporarily store the chemical bundle 10 before being brought into the chemical supply device 130 and/or the chemical bundle 10 taken out from the chemical supply device 130 after all chemicals are exhausted. The temporary storage 130 may be placed between the chemical loading device 110 and the chemical supply device 130 in consideration of the movement lines of the first robot 140 and the second robot 150. For example, a chemical loading device 110 may be placed on one side of the temporary storage 130, and a chemical supply device 130 may be placed on the other side of the temporary storage 130.

The chemical supply device 130 may be configured to supply the chemicals in the chemical containers included in the chemical container bundle 10 to the place of use. The chemical supply device 130 may connect a coupler to the discharge port of the chemical container so that the chemicals in the chemical container are supplied to the place of use along the chemical supply pipe. For example, a pump for chemical transfer may be installed in the chemical supply device 130.

At least one transfer robot (e.g., the first robot 140 and/or the second robot 150) stores the chemical container bundle 10 or the chemical container with confirmed chemical information in the temporary storage 120 or chemical supply device. It may be configured to be transferred to (130). At least one transfer robot (the first robot 140 and/or the second robot 150) performs work according to the transfer command, replacement command, etc. of the chemical container (or chemical container bundle 10) transmitted from the control system. can do. At least one transfer robot (first robot 140 and/or second robot 150) approaches the chemical loading device 110, temporary storage 120, or chemical supply device 130 designated by the control system. And, the transfer operation of the chemical container bundle 10 can be performed. For example, the control system uses at least one transfer robot (e.g., the first robot 140 and/or the second robot 150) to transfer the chemical container from the chemical loading device 110 to the chemical supply device 130. )), chemical information on the chemical container (or chemical container bundle 10), location information on the chemical supply device 130, etc. may be provided. At least one transfer robot (e.g., the first robot 140 and/or the second robot 150) transports a chemical container (or a bundle of chemical containers 10) designated based on the chemical information based on the location information. It can be transported to a designated location (for example, temporary storage 120 or chemical supply device 130).

At least one transfer robot (e.g., the first robot 140 and/or the second robot 150) is mounted on a chemical container (or a bundle of chemical containers 10), and the mounted chemical container (or a bundle of chemical containers (10) 10)) a container loading unit (e.g., a forklift or conveyor) configured to move the container loading unit, and a mobile moving unit (e.g., a mobile robot) on which the container loading unit is installed and configured to communicate with the control system and move to a designated location. may include. For example, the mobile mobile unit communicates with the control system to provide chemical information of the chemical container (or chemical container bundle 10) and location information of the chemical loading device 110, temporary storage 120, or chemical supply device 130. field or path information can be obtained. Depending on the embodiment, at least one transfer robot (e.g., the first robot 140 and the second robot 150) may perform a transfer task of a chemical container according to pre-entered position information or path information. there is. For example, the control system may include a storage server for storing the chemical information, the location information, and the route information, and a communication server for communicating with the mobile moving unit.

At least one transfer robot (e.g., the first robot 140 and/or the second robot 150) is at least one that senses various markers to perform a transfer operation of a chemical container (or a bundle of chemical containers 10). may include sensors.

For example, at least one transfer robot (e.g., the first robot 140 and/or the second robot 150) includes a sensor ('marker reader') for sensing a marker having chemical information of a chemical container. can do.

For example, at least one transfer robot (e.g., the first robot 140 and/or the second robot 150) may include a leak detection sensor (not shown) to detect chemicals leaking from a chemical container. there is.

For example, at least one transfer robot (e.g., the first robot 140 and/or the second robot 150) is used in the chemical loading device 110, the chemical supply device 130, and the temporary storage 120. It may include a sensor (not shown) for sensing a marker with location information. At least one transfer robot (e.g., the first robot 140 and/or the second robot 150) acquires the location of the object, the separation distance from the object, and the movement path to the object based on the location information, The above-described information can be received from the control system. The above-mentioned information can be used in various ways to facilitate the transfer of chemical containers. For example, at least one transfer robot (e.g., the first robot 140 and/or the second robot 150) may perform an avoidance maneuver to prevent collision with another object using the above-described information. .

At least one transfer robot (e.g., the first robot 140 and/or the second robot 150) includes various sensors necessary for the transfer operation of a chemical container (or a bundle of chemical containers 10) in addition to the sensors described above. can do.

Depending on the embodiment, at least one transfer robot may include a first robot 140 and a second robot 150. The first robot 140 may be configured to unload the chemical container bundle 10 or the chemical container from the chemical loading device 110 . The second robot 150 may be configured to load the chemical container bundle 10 or the chemical container carried out by the first robot 140 into the chemical supply device 130 . For example, the first robot 140 transfers the chemical container bundle 10 or the chemical container from the chemical loading device 110 to the temporary storage 120 or transfers it to the second robot 150, and the second robot 150 ) can transfer the chemical container bundle 10 or the chemical container delivered to the first robot 140 to the chemical supply device 150. In this way, the first robot 140 and the second robot 150 interact to transfer the chemical container bundle 10 or the chemical container, thereby preventing safety accidents and improving the efficiency of the chemical container transfer operation. there is.

Hereinafter, each component applicable to the chemical supply system 100 of the present invention will be described in detail.

2A and 2B are diagrams illustrating a chemical loading device 110 applicable to a chemical supply system of an embodiment.

Referring to FIGS. 2A and 2B, the chemical loading device 110 of one embodiment may include a transfer member 111 and an inspection member 112. The chemical loading device 110 is a place where a chemical container 11 or a bundle of chemical containers 10 containing chemicals is received. The chemical container bundle 10 may be introduced into the chemical loading device 110 by a forklift or unmanned forklift. The chemical container bundle 10 may include a plurality of chemical containers 11 loaded on a pallet 12. Hereinafter, the 'chemical container 11' may be understood as a single chemical container, a plurality of chemical containers, or a bundle of chemical containers 10 loaded on the pallet 12. The chemical loading device 110 transfers the chemical container 11 received from the outside to the inspection member 112 through the transfer member 111, and uses the inspection member 112 to inspect the chemical container 11 and/or the pallet. It is possible to sense the marker attached to (12) and inspect and obtain chemical information, such as material information and expiration date. The chemical container 11 for which chemical information has been confirmed may be transported from the chemical loading device 110 by a transfer robot (eg, the first robot 140) (see FIG. 3A).

The transfer member 111 may have one side on which the chemical container 11 is seated and the other side on which the chemical container 11 is transferred to inspect chemical information. The transfer member 111 may be configured to transfer the chemical container bundle 10 loaded on one side in one direction. For example, when the pallet 12 on which the chemical container 11 is loaded is seated on one side of the transfer member 111, the transfer member 111 is operated to transfer the pallet 12 to the other side, and the pallet ( 12) is seated on the other side of the transfer member 111, the transfer member 111 may be stopped.

The conveying member 111 may be a conveyor device made of rollers or belts. For example, the transport member 111 may transport the chemical container 11 from one side to the other side or in the opposite direction by rotating a plurality of rollers arranged in one direction.

Depending on the embodiment, a first sensor (not shown) that detects whether the chemical container 11 or the pallet 12 is seated may be disposed on the transfer member 111. For example, in order to check whether the chemical container 11 is seated and the position of the transfer member 111, first sensors may be installed at regular intervals on the side of the transfer member 111 or the tipping prevention guide. The first sensor may be a load detection sensor that detects the presence or absence of the chemical container 11 on the transfer member 111. In addition, the transfer member 111 may be made of a corrosion-resistant material such as corrosion-resistant paint or PTFE, and depending on the embodiment, the transfer member 111 may be equipped with a liquid leak detection device to detect chemical liquid leakage from the chemical container 11. Sensors may be installed.

Meanwhile, the chemical loading device 110 may further include an alignment member 113 configured to align the chemical container bundle 10 on the transfer member 111. The alignment member 113 is disposed on both sides of the transfer member 111 along the moving direction of the pallet 12, so that the chemical container 11 or the pallet 12 can be aligned to the center of the transfer member 111. For example, the alignment member 113 may align the chemical container 11 to the center of the transfer member 111 before the transfer member 111 operates. To prevent the chemical container bundle 10 from falling over, the alignment member 113 is in contact with the pallet 12 or is in contact with the pallet 12 by about 1 mm to 100 mm while the chemical container bundle 10 is loaded on the first robot 140. distance can be maintained. Additionally, guides may be installed on both sides of the transfer member 111 to prevent the chemical container 11 or the chemical container bundle 10 from being separated while the transfer member 111 is operating.

Depending on the transport distance of the chemical container 11 by the transport member 111, either the fall prevention guide or the alignment member 113 may be installed. For example, when the transport distance of the chemical container 11 is in the range of about 3000 mm to about 4000 mm, the chemical container 11 can be stably transported using only a guide and without the alignment member 113.

The inspection member 112 may be configured to inspect chemical information of the chemical container 111 from the other side of the transfer member 111. The transfer member 111 may stop operating when the chemical container 111 arrives at the correct location for chemical inspection. A sensor for checking the position of the chemical container 11 may be installed on the transfer member 111 or the inspection member 112. For example, the chemical loading device 110 may include a second sensor 112a that detects whether the chemical container 11 or the pallet 12 protrudes from the other side of the transfer member 111. The second sensor may be a fork sensor that detects whether the chemical container 11 protrudes so as to prevent it from leaving the chemical inspection position.

The inspection member 112 may include an inspection sensor that inspects chemical information of the chemical container 11. The inspection sensor can scan the QR code or barcode information attached to the top or side of the chemical container 11 to check the material information and expiration date of the chemical container and transmit this to the control system. Additionally, if the chemical information transmitted to the control system does not meet the required specifications, it may be conveyed to the outside by the transfer member 111.

Alignment members 113 may be installed on both sides of the transfer member 111 that passes through the inspection member 112. The alignment member 113 can align the chemical container 11 to a position for chemical information in order to inspect and transfer the chemical information into and out of the chemical container 11 of the transfer robot (e.g., see '140' in FIG. 3A). there is.

The chemical container 11 with confirmed chemical information may be taken out of the chemical loading device 110 by the first robot 140. The chemical loading device 110 may include an air injection module to remove foreign substances before the chemical container 11 is shipped out.

3A and 3B are diagrams illustrating a transfer robot (eg, 'first robot 140') applicable to a chemical supply system of one embodiment. FIG. 3A shows a state in which the first robot 140 unloads a bundle of chemical containers 10 from the chemical loading device. FIG. 3B shows a state in which a bundle of chemical containers 10 is supported on the forklift 141 of the first robot 140.

Referring to FIGS. 3A and 3B, the transfer robot (e.g., 'first robot 140') of one embodiment carries out the chemical container 11 brought into the chemical loading device 110, and stores it in the temporary storage 120, It may be configured to be transported to the chemical supply device 130 or delivered to the second robot 150. The first robot 140 has a container loading unit (hereinafter referred to as a 'lifting unit' or 'fork lift' 141) on which the chemical container 11 is seated and is configured to move the seated chemical container 11 in the vertical direction. ), and a mobile moving unit (hereinafter referred to as 'mobile robot 142') on which the container loading unit is installed. For example, the first robot 140 may be a mobile robot 142 with a forklift 141 . The first robot 140 can lift and lower the chemical container bundle 10 by inserting the fork lift 141 into the fork insertion part of the pallet 12.

The forklift 141 may have a certain level of effective payload to support the pallet 12 on which a plurality of chemical containers 11 are loaded. For example, the forklift 141 may have an effective payload of approximately 1200 kg or more.

The mobile robot 142 may move to the work location according to location information and/or path information input in advance by a command from the control system. The mobile robot 142 can autonomously check the remaining battery capacity and move to a charging location to charge the battery. The mobile robot 142 may include a wheel (WH) disposed below the body on which the forklift 141 is installed, and a wheel cover (CV) that covers at least a portion of the wheel (WH).

The first robot 140 may include a third sensor (see FIG. 4B) that detects the position of the pallet 12, etc. The third sensor is installed on the forklift 141 side and detects the position of the fork insertion part of the pallet 12, the horizontal and vertical alignment status of the pallet 12, etc. It may be a vision sensor, a laser sensor, or a QR reader. . This will be described later with reference to FIGS. 4A and 4B.

The chemical loading device 110 may include a marker that guides the approach of the first robot 140. For example, the first robot 140 approaches the chemical loading device 110 by detecting a repletter or QR code placed on the other side of the transfer member 111, and carries out the chemical loading device 110. Chemical containers (11) can be brought in. Conversely, the chemical container 11 whose chemicals have all been exhausted may be brought into the chemical loading device 110 by the first robot 140 and taken out.

Additionally, the first robot 140 may include an information confirmation sensor (not shown) that can check raw material receipt/disbursement information by scanning a barcode or QR code attached to the chemical container 11 or pallet 12. The information confirmation sensor may be a laser sensor or a QR reader installed on the mobile robot 142 to check receipt and disbursement information of the chemical container.

Depending on the embodiment, the first robot 140 may directly input the chemical container 11 into the chemical supply device 130. In this case, a buffer conveyor line (not shown) on which the chemical container 11 is seated may be installed in the chemical supply device ('130' in FIGS. 6A and 6B). The chemical container 11 is seated on one side of the buffer conveyor line in the chemical supply device ('130' in FIGS. 6A and 6B) and can be moved to the chemical container accommodation space by the buffer conveyor line.

FIGS. 4A and 4B are diagrams illustrating a temporary storage 120 applicable to a chemical supply system of one embodiment. FIGS. 4A and 4B show a state in which the first robot 140 loads a bundle of chemical containers 10 into the temporary storage 120.

Referring to FIGS. 4A and 4B, the temporary storage 120 of one embodiment may have a chemical container storage space 121 in which a bundle of chemical containers 10 is accommodated. The temporary storage 120 provides a place to temporarily store a bundle of chemical containers 10 that have been brought into the chemical loading device and are awaiting replacement, and a bundle of chemical containers 10 that have exhausted all chemicals in the chemical supply device and are waiting to be taken out. The temporary storage 120 may be a two-tier or more pallet rack structure. For example, the temporary storage 120 may include a plurality of storage spaces 121 stacked vertically and horizontally, and markers having location information of the plurality of storage spaces 121. The temporary storage 120 may be made of a corrosion-resistant material such as corrosion-resistant paint or PTFE.

The temporary storage 120 may include a location marker M2 indicating the location of the chemical container storage space 121. For example, the chemical container bundle 10 has a first position marker M1 indicating the position of the pallet 12 or fork insert, and the temporary storage 120 has a first position marker M1 indicating the position of the chemical container storage space 121. 2 May include a position marker (M2). The first position marker (M1) and the second position marker (M2) may include a reflector, QR code, barcode, etc.

At least one transfer robot (e.g., the first robot 140) performs the loading or unloading of the chemical container 11 from the temporary storage 120 according to the transfer command for the chemical container 11 transmitted from the control system. You can. For example, the mobile moving unit (e.g., 'mobile robot 142') is configured to communicate with the control system to obtain the chemical information of the chemical container 11 and the location information of the storage space 121, and the lifting unit ( For example, the 'fork lift 141' may be configured to bring in or take out the chemical container 11 designated based on the chemical information into or out of the storage space 121 designated based on the location information.

At least one transfer robot (e.g., the first robot 140) can access the storage space designated by the control system by sensing the markers (e.g., the second location marker (M2)) of the storage spaces 121. . At least one transfer robot (eg, the first robot 140) may include at least one sensor for sensing the location marker of the temporary storage 120. For example, the first robot 140 may include a third sensor for recognizing the first position marker M1 and the second position marker M2. The third sensor may be installed at the end 141a of the forklift 141. The third sensor may be a vision sensor, a laser sensor, or a QR reader. The third sensor can check chemical information (for example, material information, expiration date, etc.) by scanning a barcode or QR code attached to the chemical container 11 or pallet 12. For example, when the chemical information of the chemical container 11 stored in the control system is deleted, the first robot 140 can restore the corresponding chemical information by sensing the chemical container 11 again.

Depending on the embodiment, the temporary storage 120 may have steps surrounding the chemical container storage space 121 to prevent the chemical container bundle 10 from being separated during the transfer and loading process of the chemical container bundle 10. Steps may be formed at the rear and left and right sides of the chemical container storage space 121, excluding the front where the chemical container bundle 10 is inserted.

Depending on the embodiment, the temporary storage 120 may include a fall prevention member (not shown) that supports and fixes the chemical container bundle 10. The tipping prevention member may include an actuator (hereinafter referred to as 'tipping prevention actuator') (not shown) disposed on at least one side of the storage space 121. The fall prevention actuator presses the chemical container (11) or pallet (12) from the side, blocks the front of the chemical container storage space (121), or docks with the chemical container (11) or pallet (12) to bundle the chemical containers. (10) can be fixed.

Depending on the embodiment, the temporary storage 120 includes a loading detection sensor to detect whether the chemical container bundle 10 is loaded into the chemical container storage space 121 and whether the chemicals in the chemical container bundle 10 are exhausted. can do. The load detection sensor can transmit transfer and load information of the chemical container bundle 10 to the control system. For example, if the load information registered in the control system and the load information transmitted by the load detection sensor are different, an error in the load information of the control system can be corrected or it can be checked whether the chemical container bundle 10 is separated. In addition, the loading detection sensor can be directly linked to the first robot 140 to prevent the first robot 140 from overloading the chemical container bundle 10 in the chemical container storage space 121.

Depending on the embodiment, the temporary storage 120 may include a leak detection sensor. The leak detection sensor can detect whether chemical leakage has occurred in the chemical container 11 stored in the temporary storage 120.

FIGS. 5A and 5B are diagrams illustrating a second robot 150 applicable to a chemical supply system of one embodiment.

Referring to FIGS. 5A and 5B, the transfer robot (eg, the second robot 150) in one embodiment may be configured to input the chemical container 11 into the chemical supply device ('130' in FIG. 6A). The second robot 150 is a container loading unit (hereinafter referred to as 'conveyor') on which the chemical container 11 is seated and which is configured to move the seated chemical container 11 in the horizontal direction (e.g., in one direction or the opposite direction). unit' or 'conveyor' 151), and a mobile moving unit (hereinafter referred to as 'mobile robot 152') on which the container loading unit is installed. For example, the second robot 150 may be a mobile robot 152 having a conveyor 151 that can transport the chemical container 11 in one direction.

Conveyor 151 may be composed of rollers or belts. For example, the conveyor 151 may transport the chemical container 11 in one direction or the opposite direction by rotating a plurality of rollers arranged in one direction.

Depending on the embodiment, a load detection sensor may be placed on the conveyor 151 to detect whether the chemical container 11 or the pallet 12 is seated. For example, in order to check whether the chemical container 11 is seated and the position of the conveyor 151, load detection sensors may be installed at regular intervals on the side of the conveyor 151 or the tipping prevention guide. In addition, the conveyor 151 may be made of a corrosion-resistant material such as corrosion-resistant paint or PTFE, and depending on the embodiment, the conveyor 151 may be equipped with a liquid leak detection sensor to detect chemical liquid leakage from the chemical container 11. Can be installed.

Meanwhile, the second robot 150 may further include an alignment member 153 configured to align the chemical container bundle 10 on the conveyor 151. The alignment member 153 is disposed on both sides of the conveyor 151 spaced apart in a direction perpendicular to the moving direction (the 'one direction') of the pallet 12, and moves the chemical container 11 or the pallet 12 on the conveyor ( 151) can be aligned to the center. For example, the alignment member 153 may align the chemical container 11 to the center of the conveyor 151 before or while the conveyor 151 operates. In addition, while the chemical container bundle 10 is loaded on the second robot 150, the alignment member 153 is in contact with the pallet 12 or is in contact with the pallet 12 to prevent the chemical container bundle 10 from falling. You can wait while maintaining a distance of about 1mm to 100mm. In addition, guides will be installed on both sides of the conveyor 151, extending from at least one side of the alignment member 153 in the direction of movement of the pallet 12 to prevent the chemical container 11 or the chemical container bundle 10 from being separated. You can.

The mobile robot 152 may move to the work location according to location information and/or path information input in advance by a command from the control system. The mobile robot 152 can autonomously check the remaining battery capacity and move to a charging location to charge the battery. The mobile robot 152 may include wheels WH and wheel covers CV, similar to those shown in FIGS. 4A and 4B.

The second robot 150 may include a fourth sensor 152a for recognizing the chemical container accommodation space of the chemical supply device ('130' in FIG. 6A). The fourth sensor is installed on the mobile robot 152 and can detect a reflector or QR code attached to the outside or inside of the chemical supply device ('130' in FIG. 6A). The fourth sensor 152a may be a vision sensor, a laser sensor, or a QR reader. When the first robot 140 uses the forklift 141 to insert a chemical container into the chemical supply device ('130' in FIG. 6A), a buffer conveyor is installed inside the chemical supply device ('130' in FIG. 6A). It is necessary to install a line to prevent damage to internal devices and chemical containers. On the other hand, the second robot 150 directly inputs the chemical container 11 using the conveyor 151 without a conveyor line for a buffer, thereby reducing the manufacturing cost of the chemical supply device ('130' in FIG. 6A) A greater number of chemical supply devices ('130' in FIG. 6A) can be placed.

6A and 6B are diagrams illustrating a chemical supply device 130 applicable to the chemical supply system of one embodiment.

Referring to FIGS. 6A and 6B, the chemical supply device 130 of one embodiment connects the chemical supply pipe 22 to the outlet of the chemical container 11 accommodated in the chemical container accommodation space 131, so that the chemical container 11 The chemicals inside can be supplied to various semiconductor processing steps. A loader unit, an alignment unit, etc. capable of supporting the chemical container 11 and adjusting its position may be disposed in the chemical container accommodation space 131. As shown in the drawing, the pallet 12 and the chemical containers 11 may be brought in together in the chemical supply device 130, but depending on the embodiment, the chemical containers 11 excluding the pallet 12 Only may be imported.

The chemical supply device 130 may include a coupler connection module (not shown) that automatically connects and disconnects the coupler 21 to the outlet of the chemical container 11. One end of the coupler 21 may be connected to a chemical supply pipe 22 for distributing chemicals. The coupler connection module may include an opening and closing unit that opens and closes the cap of the chemical container, a coupler unit that connects and disconnects the coupler 21 to the outlet of the chemical container, and a control unit that controls their operations. Depending on the embodiment, the coupler 21 may be fastened to and separated from the chemical container 11 by a mobile robot having a robot arm (see the embodiment in FIG. 7A).

Additionally, the chemical container 11 whose chemicals have all been exhausted can be replaced with a new chemical container 11 by the second robot 150. The second robot 150 may perform work according to a transfer command or replacement command for a chemical container transmitted from the control system. The second robot 150 may approach the chemical supply device 130 designated by the control system and perform a transfer operation of the chemical container bundle 10. The second robot 150 may perform a transfer task of the chemical container bundle 10 according to previously input location information and/or path information. A reflector or QR code containing location information may be attached to the outside or inside of the chemical supply device 150. The second robot 150 uses a vision sensor, a laser sensor, or a QR reader to identify the chemical supply device 150 and carries out the loading and unloading of the chemical container 11 from the chemical supply device 150 designated by the control system. can be performed. Depending on the embodiment, the chemical supply device may include a communication unit that transmits information on the loading and unloading of chemical containers to the second robot 150.

7A to 7D are diagrams illustrating a third robot 160 applicable to the chemical supply system of one embodiment.

Referring to FIGS. 7A to 7D, the chemical supply device 130a of one embodiment includes a coupler module 135 and a holder 132, and the chemical container 11 carried into the chemical receiving space 131 is operated by a third robot. It can be coupled to and separated from the coupler module 135 by (160). Chemical containers 11 individually brought into the chemical supply device 130a may be fixed to the support member 133 disposed on one side of the third robot 160. The support member 133 may support and secure the chemical container 11 during the process of coupling and disengaging from the coupler module 135. However, depending on the embodiment, the pallet 12 and the chemical containers 11 may be brought in together. The third robot 160 may perform work according to a chemical container replacement command transmitted from the control system. The third robot 160 may approach the chemical supply device 130a designated by the control system and perform a chemical container 11 replacement task. The control system may optimize the movement path and task performance of the third robots 160 using the location information and task information of the plurality of third robots 160.

Meanwhile, the chemical supply device 130a and the third robot 160 of this embodiment do not necessarily constitute a chemical supply system together with the equipment shown in FIGS. 2A to 6B. For example, the chemical supply system of one embodiment has a chemical container accommodation space 131 in which the chemical container 11 with confirmed chemical information is accommodated, and is configured to supply the chemicals in the chemical container 11 to the place of use. a chemical supply device (130a); And it may include a mobile robot 162 configured to fasten and separate the coupler module 135 from the outlet of the chemical container 11 brought into the chemical accommodation space 131.

The holder 132 may be placed on one side of the chemical container accommodation space 131. The holder 132 can store the coupler module 135 that is not fastened to the chemical container 11. The holder 132 may be connected to a chemical drain 132a for removing chemicals remaining in the coupler module 135. In addition, a cap holder 132b that can temporarily mount the cap 11a of the chemical container 11 to which the coupler module 135 is fastened may be installed on one side of the holder 132.

The coupler module 135 includes a gripper 135a held by the gripper 161a of the robot arm 161, a driving force transmission unit 135b that receives driving force from the robot arm 161, and a driving force transmission unit 135b. It may include a coupler drive unit 135c that receives driving force from and couples and disengages the coupler 21 (see FIG. 7C). For example, the driving force transmission unit 135b may be a gear unit that is docked with the gripper 161a or a power transmission link inside the gripper 161a and transmits rotational force.

One end of the coupler 21 may be connected to a chemical supply pipe 22 for distributing chemicals. A key-code may be formed on the fastening portion of the coupler 21. The coupler 21 may be fastened to the outlet of the chemical container 11 on which the corresponding key code is formed.

For example, the coupler 21 may have a key code engraved in relief, and the chemical container 11 may have a key code engraved in engraving. Since the keycode of the chemical container 11 is formed differently depending on the type of chemical, the coupler 21 and the chemical container 11 whose keycodes do not correspond to each other may not be coupled to each other.

The third robot 160 may be a mobile robot 162 having a robot arm 161 configured to grasp the coupler module 135. The third robot 160 may be made of corrosion-resistant material such as corrosion-resistant paint or PTFE. Depending on the embodiment, an air injection module may be installed to prevent the third robot 160 from being exposed to chemicals. The third robot 160 may perform an operation of attaching and disconnecting the coupler module 135 according to commands transmitted from the control system.

The robot arm 161 has a gripper 161a at one end for gripping the coupler module 135, and may be configured to provide driving force for fastening and disengaging the coupler module 135. The robot arm 161 may have a multi-joint arm shape to perform a fastening operation of the coupler module 135 inside the chemical container accommodation space 131. A vision sensor, etc. may be installed along with the gripper 161a at one end of the multi-joint arm.

The mobile robot 162 may move to the work location according to location information and/or path information input in advance by a command from the control system. The mobile robot 162 can access the chemical supply device 130a that requires work by sensing a reflector or a QR code attached to the chemical supply device 130a. The mobile robot 162 can autonomously check the remaining battery capacity and move to a charging location to charge the battery. A labyrinth seal structure that blocks chemical penetration can be applied to the charging terminal of the charging station.

The third robot 160 may be configured to perform tasks such as monitor operation, door opening and closing, cap opening and closing, coupler module coupling, and chemical leak cleaning.

For example, when the third robot 160 approaches the chemical supply device 130a that requires work, the robot arm 161 senses the monitor of the chemical supply device 130a using a vision sensor, and the gripper 161a You can operate the monitor and change to the work mode of the chemical supply device 130a.

For example, when the chemical supply device 130a is switched to the chemical container 11 replacement mode, the third robot 160 may open the door of the chemical supply device 130a using the gripper 161a.

For example, the robot arm 161 can detect the cap 11a and the drum outlet of the chemical container 11 using a vision sensor to check the position information of the cap 11a. The robot arm 161 can perform the cap opening and closing operation using the position information of the cap 11a.

For example, the robot arm 161 may be configured so that the gripper 161a or the power transmission link inside the gripper 161a rotates. The robot arm 161 can grasp the cap 11a using the gripper 161a and transmit rotational force to the cap 11a to separate the cap 11a from the chemical container 11.

For example, a compliance joint is installed on one side of the gripper 161a, so that the cap 11a can be fastened and separated even when the upper surface of the chemical container 11 is tilted somewhat (for example, approximately ±5°) with respect to the horizontal plane. there is.

For example, the robot arm 161 can sense the holder 132 with a vision sensor and mount the cap 11a on the cap holder 132b.

For example, the robot arm 161 may hold the coupler module 135 stored in the holder 132 and fasten the coupler module 135 to the outlet of the chemical container 11 from which the cap 11a has been removed. . The robot arm 161 can couple the coupler module 135 using the location information of the outlet of the chemical container 11 confirmed by the vision sensor. The robot arm 161 can use a vision sensor to check the key codes of each of the coupler 21 and the chemical container 11, align the key codes, or check whether the key codes correspond to each other.

For example, the robot arm 161 can detect chemical leakage occurring while replacing the chemical container 11 and wipe it away. The robot arm 161 can wipe away chemical leaks by holding or docking the cleaning material provided in the chemical supply device 130a.

For example, the robot arm 161 may perform the above-described steps in reverse order to separate the coupler module 135 from the chemical container 11 in which all chemicals have been exhausted and fasten the cap 11a. During the entire process, it is possible to check whether the coupler module 135 and the cap 11a are fastened correctly and with an appropriate torque using the laser sensor and torque sensor included in the robot arm 161.

The robot arm 161 may perform operations such as shaking or flipping the separated coupler module 135 in order to minimize chemical leakage. Additionally, the robot arm 161 can store the separated coupler module 135 on the holder 132.

However, the work of replacing the chemical container 11 of the third robot 160 does not depend only on the vision sensor. Depending on the embodiment, the chemical container 11 replacement work may be performed by recognizing the QR code attached to the holder 132, the coupler module 135, the door of the chemical supply device 130a, the chemical container 11, etc. there is.

FIG. 8 is a diagram illustrating a chemical supply system 100A comprised of the example devices shown in FIGS. 2A-6B.

Referring to FIG. 8, the chemical supply system 100A may perform a chemical container replacement operation using the first robot 140 of FIGS. 3A and 3B and the second robot 150 of FIGS. 5A and 5B. The first robot 140 and the second robot 150 perform each step of work according to work commands transmitted from the control system, thereby preventing safety accidents and improving the efficiency of transferring and replacing chemical containers. You can.

In the first step (S1), a bundle of chemical containers 10 may be loaded into the chemical loading device 110. The chemical loading device 110 may inspect the chemical information of the chemical containers 11 and transmit it to the control system. For example, if the chemical information is inadequate, the chemical loading device 110 may be operated to carry out the chemical container bundle 10 to the outside. The chemical container bundle 10 with confirmed chemical information may be taken out of the chemical loading device 110 by the first robot 140. The first robot 140 may transfer the chemical container bundle 10 from the chemical loading device 110 to the temporary storage 120 or transfer it to the second robot 150.

In the second step (S2), the temporary storage 120 contains a bundle of chemical containers 10 that are brought into the chemical loading device 110 and await replacement, and chemical containers that have exhausted all chemicals in the chemical supply device 130 and are waiting to be taken out. Bundles (10) can be stored. The first robot 140 may transfer a chemical container bundle 10 waiting to be replaced among the chemical container bundles 10 stored in the temporary storage 120 to the second robot 150 . In contrast, the first robot 140 may transfer the chemical container bundle 10 whose chemicals have been exhausted to the chemical loading device 110, and the chemical container bundle 10 returned by the first robot 140 may be It can be carried out to the outside by the chemical loading device 110.

In the third step (S3), the second robot 150 may be configured to bring the chemical container bundle 10 delivered from the first robot 140 into the chemical supply device 130. The second robot 150 may transfer the chemical container bundle 10 or the chemical container delivered from the first robot 140 to the chemical supply device 150. The chemical supply device 130 connects a chemical supply pipe to the discharge port of the introduced chemical container 11, and can supply chemicals in the chemical container 11 to various semiconductor processing steps.

The present invention is not limited by the above-described embodiments and attached drawings, but is intended to be limited by the appended claims. Accordingly, various forms of substitution, modification, and change may be made by those skilled in the art without departing from the technical spirit of the present invention as set forth in the claims, and this also falls within the scope of the present invention. something to do.

Claims (24)

Chemical loading device into which chemical containers are loaded;
a chemical supply device configured to supply the chemicals in the chemical container to the place of use;
At least one transfer robot configured to transfer the chemical container to the chemical supply device; and
A chemical supply system comprising a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device and the chemical supply device.
According to claim 1,
The control system is a chemical supply system that provides chemical information of the chemical container and location information of the chemical supply device to the at least one transfer robot in order to transfer the chemical container from the chemical loading device to the chemical supply device. .
According to clause 2,
The at least one transfer robot is configured to transport the chemical container designated based on the chemical information to a designated location based on the location information.
According to claim 1,
The at least one transfer robot includes a container loading unit on which the chemical container is seated and configured to move the seated chemical container in one direction or in a direction opposite to the one direction, and a mobile moving unit on which the container loading unit is installed. chemical supply system.
According to clause 4,
The container loading unit is disposed on both sides of the container loading unit spaced apart in a direction perpendicular to the one direction and includes an alignment member configured to align the chemical container to the center of the container loading unit.
According to clause 5,
The alignment member is a chemical supply system configured to contact the chemical container mounted on the container loading unit or to be spaced apart from a predetermined distance.
According to clause 5,
The chemical supply system wherein the container loading unit further includes a guide disposed on one side of the alignment member and extending in the one direction.
According to clause 4,
The container loading unit includes a plurality of rollers arranged along the one direction or a belt extending in the one direction,
The chemical supply system wherein the plurality of rollers and the belt are configured to rotate in one direction or in a direction opposite to the one direction.
According to clause 4,
A chemical supply system wherein the mobile moving unit communicates with the control system to acquire chemical information of the chemical container and location information of the chemical supply device.
According to claim 1,
Further comprising a temporary storage space having a storage space in which the chemical container is accommodated,
The control system is a chemical supply system that provides location information of the temporary storage and the storage space to the at least one transfer robot in order to load and unload the chemical container into the storage space of the temporary storage.
According to claim 10,
The control system is a chemical supply system including at least one server that stores the location information of the temporary storage and the storage space.
Chemical loading device into which chemical containers are loaded;
a chemical supply device configured to supply the chemicals in the chemical container to the place of use;
a temporary storage space having at least one storage space in which the chemical container is accommodated;
at least one transfer robot configured to transfer the chemical container to the temporary storage and the chemical supply device; and
A chemical supply system comprising a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device, the chemical supply device, and the temporary storage.
According to claim 12,
The at least one transfer robot is a chemical supply system including a container loading unit on which the chemical container is seated and configured to move the seated chemical container in a vertical direction, and a mobile moving unit on which the container loading unit is installed.
According to claim 13,
The mobile moving unit is configured to communicate with the control system to obtain chemical information of the chemical container and location information of the storage space,
The container loading unit is configured to bring in or take out the chemical container designated based on the chemical information into the storage space designated based on the location information.
According to claim 13,
The at least one storage space includes a plurality of vertically stacked storage spaces, and markers having location information of the plurality of storage spaces,
A chemical supply system in which the container loading unit senses the markers and is configured to access a storage space designated by the control system.
According to claim 13,
The container loading unit is a chemical supply system including a fork lift configured to raise and lower a pallet on which the chemical container is loaded.
According to claim 13,
The mobile moving unit is a chemical supply system including wheels disposed on a lower portion of the body on which the container loading unit is installed, and a wheel cover covering at least a portion of the wheels.
According to claim 12,
A chemical supply system wherein the at least one transfer robot includes a leak detection sensor for detecting chemicals leaking from the chemical container.
According to claim 12,
The at least one transfer robot is a chemical supply device including a sensor for sensing a marker having location information of the chemical loading device, the chemical supply device, and the temporary storage.
According to claim 12,
The at least one transfer robot is a chemical supply system including a marker reader for sensing a marker having chemical information of the chemical container.
According to claim 12,
The temporary storage is a chemical supply system including a leak detection sensor for detecting chemicals leaking from the chemical container.
Chemical loading device into which chemical containers are loaded;
a chemical supply device configured to supply the chemicals in the chemical container to the place of use;
a temporary storage having at least one storage space in which the chemical container is accommodated, and a tipping-prevention member configured to support the chemical container loaded in the at least one storage space;
at least one transfer robot configured to transfer the chemical container to the temporary storage and the chemical supply device; and
A chemical supply system comprising a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device, the chemical supply device, and the temporary storage.
According to clause 22,
The tipping prevention member is disposed on at least one side of the at least one storage space and includes an actuator configured to pressurize or fix the chemical container.
Chemical loading device into which chemical containers are loaded;
a chemical supply device configured to supply the chemicals in the chemical container to the place of use;
At least one transfer robot configured to transfer the chemical container to the chemical supply device and including a loading detection sensor to check whether the chemical container is loaded; and
A chemical supply system comprising a control system that controls the at least one transfer robot to transfer the chemical container between the chemical loading device and the chemical supply device.

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