WO2020096136A1 - Chemical filter replacement device and replacement method - Google Patents

Abstract

The objective of the present invention is to provide a chemical filter replacement device and replacement method which can prevent a chemical from leaking to the outside when a chemical filter is being replaced, minimize the risk of accidents that may occur when the chemical filter is being replaced, and make the volume of the device compact, and also reduce the labor required to replace the chemical filter. To this end, the chemical filter replacement device (1) of the present invention comprises: a filter assembly mounting portion (300) in which a filter assembly (2) is mounted, wherein the filter assembly (2) comprises a first cartridge (10-1) to be used for filtration of a chemical or a second cartridge (10-2) that has been used for filtration of the chemical, and a filter housing (20) and a filter head (30) that receive the first cartridge (10-1) or the second cartridge (10-2) and are coupled to each other vertically; and a cartridge replacement means configured such that when the filter housing (20) is separated from the filter assembly (2) in a state where the filter assembly (2) is mounted on the filter assembly mounting portion (300), the second cartridge (10-2) is separated from the filter assembly (2), and then the first cartridge (10-1) is coupled to the filter assembly (2) from which the second cartridge (10-2) is separated, the cartridge replacement means couples the separated filter housing (20) to the filter assembly (2).

Description

Chemical filter replacement device and replacement method

The present invention relates to a chemical filter replacement device and a replacement method, and more particularly, to a chemical filter replacement device and replacement method that can easily replace the filter for filtering impurities contained in the chemical.

In general, all types of chemicals are used in companies that manufacture hazardous materials such as semiconductors, semiconductor devices, LCDs, OLEDs, pharmaceutical companies, paint companies, etc., and the methods of safely supplying these chemicals are also diversifying. .

According to the characteristics of the manufacturing process, such chemicals are supplied through a chemical filter for use in a state of high purity with minimal impurities.

The chemical filter may have a different shape and replacement method depending on the type, and the replacement cycle may vary depending on the type of chemical and the required high purity state maintenance criteria.

Conventionally, in order to minimize damage from chemicals, workers have worn chemical protective clothing and gas masks, and have replaced chemical filters manually.

However, if the chemical filter is manually replaced by an operator, chemical and fume (FUME) may be leaked to the outside when the chemical filter is replaced, causing contamination, damage, and damage to the surrounding environment, including manufacturing facilities, as well as workers. Other people around you may also be at risk.

In addition, if there is a mistake in the operator's valve operation, an accident may occur in which various toxic chemicals contained in the filter are leaked to the outside.

In addition, since the chemical filter is manually replaced, there is a problem in that the number of work required to replace the filter increases.

As a device for fixing the chemical filter when the chemical filter is manually replaced, Korean Patent Publication No. 10-2003-0043124 (published on June 2, 2003) is disclosed.

The present invention has been devised to solve the above-mentioned problems, prevents chemicals from leaking out when replacing the chemical filter, minimizes the risk of accidents that can occur when replacing the chemical filter, and compacts the volume of the device. It is an object of the present invention to provide a chemical filter replacement device and a replacement method that can reduce the labor required for chemical filter replacement.

The chemical filter replacement device 1 of the present invention for realizing the above-mentioned object, the first cartridge 10-1 to be used for the filtration of the chemical or the second cartridge 10-2 used for the filtration of the chemical , A filter assembly that accommodates the first cartridge 10-1 or the second cartridge 10-2 and includes a filter housing 20 and a filter head 30 that are coupled up and down and mounted thereon. Mounting unit 300; And in the state that the filter assembly (2) is mounted on the filter assembly mounting portion 300, the filter housing 20 is separated from the filter assembly (2), the second cartridge (10-2) is After being separated from the filter assembly 2, when the first cartridge 10-1 is coupled to the separated filter assembly 2, the second cartridge 10-2 is connected to the separated filter housing 20. Includes; cartridge replacement means coupled to the filter assembly (2).

The first loading part 210 on which the first cartridge 10-1 to be coupled to the filter assembly 2 is loaded, and the second cartridge 10-2 separated from the filter assembly 2 are loaded. 2 may further include a loading unit (220).

The first loading unit 210 includes a first cartridge mounting table 211 on which the first cartridge 10-1 is mounted, and the second loading unit 220 is the second cartridge 10-2 ) May include a second cartridge mount 221 on which it is seated.

The first loading portion 210, the filter assembly mounting portion 300, and the second loading portion 220 may be provided in pairs, respectively, at positions spaced apart from both sides.

A door 110 is provided in front of the first loading part 210, and the first loading part 210, the filter assembly mounting part 300, and the second loading part 220 are provided with the door 110. It may be sequentially arranged at a position spaced a predetermined distance to the rear of the.

The first loading part 210 and the second loading part 220 may be provided to be located within a distance of the operator's hand based on the door 110.

The filter head 30 is coupled to one open end of the filter housing 20, and a plurality of connections 31 to 34 may be formed to allow the chemical to flow in or out.

The filter assembly mounting portion 300 may include a head clamp 310 for clamping and coupling the filter housing 20 and the filter head 30.

The head flange 36 formed along the circumference of one end of the filter head 30 and the housing flange 22 formed along the circumference of one end of the filter housing 20 are coupled in a state in which opposite surfaces face each other. , The head clamp 310 may be configured to press the opposite faces of the head flange 36 and the housing flange 22 in a direction in which they are in close contact with each other and clamp them.

The head flange 36 and the housing flange 22 are respectively formed in an inclined wedge shape opposite to each other, and the head clamp 310 includes the head flange 36 and the housing flange 22. Coupling grooves 311a and 312a having inclined surfaces 311b and 312b may be formed to be in close contact with the inclined surfaces, respectively.

The head clamp 310 includes a first clamp 311 and a second clamp 312 positioned to face each other around the head flange 36 and the housing flange 22, and the first clamp 311 ) And the second clamp 312 may further include a clamp transfer unit 320 for moving in a direction closer to each other or in a direction away from each other.

When the first clamp 311 and the second clamp 312 are moved toward each other, the head flange 36 and the housing flange 22 are in a clamping state, and the first clamp 311 and the first When the two clamps 312 are moved in a direction away from each other, the head flange 36 and the housing flange 22 may be configured to be in a clamping release state.

The head flange 36 and the housing flange 22 may further include clamp locking means for fixing the clamped position of the head clamp 310 to maintain the clamped state.

The clamp locking means, a fixing groove (324) formed in the clamp transfer part 320, the head flange (36) and the housing flange (22) are clamped projections inserted into the fixing groove (324) in a clamped state ( 341) may be provided.

The clamp transfer part 320 may be provided to be reciprocated in the transverse direction, and the clamp fixing part 340 may be provided to be reciprocated in the longitudinal direction.

In the state where the head flange 36 and the housing flange 22 are clamped, the clamp fixing part 340 is moved downward, so that the fixing protrusion 341 is inserted into the fixing groove 324 and the head clamp 310 is a clamp lock state, the clamp fixing part 340 is moved upwards so that the fixing protrusion 341 is located outside the fixing groove 324, the head clamp 310 is a clamp It can be configured to be in the unlocked state.

The cartridge replacing means separates the filter housing 20 surrounding the second cartridge 10-2 from the filter assembly 2 or the filter housing 20 separated from the filter assembly 2 It may include at least one filter housing detachable module 400 for coupling to surround the first cartridge (10-1).

The filter housing detachable module 400 may include a housing fixing part 410 to which the filter housing 20 is fixed, and a housing transporting part 420 moving the housing fixing part 410 in the vertical direction. have.

The filter housing detachable module 400 may further include a housing fixing height adjusting unit 430 for adjusting the height of the housing fixing unit 410 according to the height standard of the filter housing 20.

The cartridge replacement means may include a second cartridge transfer module 500 for transferring the second cartridge 10-2 mounted on the filter assembly mounting portion 300 to the second loading unit 220. Can be.

The second loading unit 220 may be provided at a position spaced apart from one side from the rear of the filter assembly mounting unit 300.

The second cartridge transfer module 500 includes a rotating part 520 rotatable between a first position in which the filter assembly mounting portion 300 is located, and a second position in which the second loading part 220 is located, It is provided in the second lifting unit 530 and the second lifting unit 540 for raising and lowering the second lifting unit 540 in the vertical direction at the first position or the second position, the second cartridge 10-2 ) May include a second gripper 550 that grips.

The filter assembly mounting portion 300 and the second loading portion 220 are provided in pairs in positions spaced apart from each side, and the second cartridge transfer module 500 is provided as a single module, and is provided on both sides of the filter assembly. It may be configured to transfer the second cartridge 10-2 between the filter assembly mounting portion 300 and the second loading portion 220 located in.

The second cartridge transfer module 500, after transferring the second cartridge 10-2 from the filter assembly mounting portion 300 to the second loading unit 220, the second located on both sides It may be configured to return to the standby position located in the middle between the loading unit 220.

The second cartridge transfer module 500, the second lifting unit height adjustment unit 560 for adjusting the height of the second lifting unit 540 according to the height standard of the second cartridge (10-2) It may further include.

The cartridge replacement means may include a first cartridge transfer module 600 for transferring the first cartridge 10-1 loaded on the first loading unit 210 to the filter assembly mounting unit 300. .

The first loading portion 210 and the filter assembly mounting portion 300 may be provided at positions spaced apart on a straight path forward and backward.

The first cartridge transfer module 600 is provided at a lower portion of the first elevating portion 620 and the first elevating and moving portion 610 which elevates the first elevating portion 620 in the vertical direction, and before and after forward and backward movement. A true gripper 630 and a first gripper 640 provided in the front-rear forward feeder 630 to grip the first cartridge 10-1 may be included.

The forward-backward movement unit 630 is coupled to a lower portion of the first elevation unit 620, the first forward-reverse movement unit 630-1 and forward and backward along the first elevation unit 620, and the first It is coupled to the lower part of the forward-backward forwarding unit 630-1, and is forward-backward along the first forward-backward forwarding unit 630-1, and the second forward-backward forwarding unit 630-2 with the first gripper 640 coupled to the lower side. ).

The first cartridge transfer module 600, the first lifting unit height adjustment unit 650 for adjusting the height of the first lifting unit 620 according to the height standard of the first cartridge (10-1) It may further include.

When the second cartridge 10-2 is transferred to the second loading unit 220, or when the operator manually removes the second cartridge 10-2 when the door 110 is opened and the operator manually removes the second cartridge 10-2, the A chemical pedestal 230 for receiving chemicals falling from the second cartridge 10-2 and discharging them to one side may be provided.

The cartridge replacement means, a second cartridge transfer module (500-1) for transferring the second cartridge (10-2) mounted on the filter assembly mounting portion 300 to the second loading unit 220 , A first cartridge transfer module (600-1) for transferring the first cartridge (10-1) loaded on the first loading unit 210 to the filter assembly mounting portion 300, the second cartridge The transfer module 500-1 and the first cartridge transfer module 600-1 may be provided to be able to move forward and backward.

The first cartridge 10-1 and the second cartridge 10-2, the loading portion 200 is loaded, and the filter assembly mounting portion 300 is provided on each side in a pair, the loading portion It includes a cartridge transfer module (600-2) for transferring the filter assembly (2) between the 200 and the filter assembly mounting portion 300, the cartridge transfer module (600-2) is the filter assembly (2) It can be provided to be able to rotate and elevate in both directions to be used in common for two.

The first cartridge 10-1 and the second cartridge 10-2, the loading portion 200 is loaded, and the filter assembly mounting portion 300 is provided on each side in a pair, the loading portion It includes a cartridge transfer module (600-3) for transferring the filter assembly (2) between the (200) and the filter assembly mounting portion 300, the cartridge transfer module (600-3), the lifting transfer unit (610- 3), a first linear transfer unit (620-3) for transferring the lifting transfer unit (610-3) in the front-rear direction between the loading unit 200 and the filter assembly mounting unit 300, and the lifting transfer unit ( 610-3) and a second linear transfer unit for transferring the first linear transfer unit 620-3 in the left-right direction between the loading unit 200 and the filter assembly mounting unit 300 provided in pairs on both sides ( 630-3).

The filter head 30 has a first connection portion 31 through which a chemical flows, a second connection portion 32 through which a chemical passing through the first cartridge 10-1 or the second cartridge 10-2 is discharged, A third connecting portion 33 for discharging the chemical remaining in the space S2 between the first cartridge 10-1 or the second cartridge 10-2 and the inner surface of the filter housing 20, the third A fourth connection portion 34 for discharging chemicals remaining in the interior space S1 of the first cartridge 10-1 or the second cartridge 10-2 is formed, and the filter housing 20 has dry air or A fifth connection 23 for supplying the washing water to the inside of the filter housing 20 may be formed.

The filter assembly mounting portion 300 is spaced on both sides and provided in a pair, and the fifth connection portion 23 of the filter assembly 2 mounted on the pair of filter assembly mounting portions 300 is dried. The air supply line L6, the washing water supply line L7, and the common vent line L8 in communication with the outside air may be configured to be connected.

A bypass line (L9) for selectively supplying chemicals to any one of the pair of filter assemblies (2) may be connected to the pair of filter assemblies (2).

After replacing the first cartridge 10-1 with the filter assembly 2, a pressure sensor P for measuring the pressure inside the filter assembly 2 may be connected.

Method of replacing the chemical filter of the present invention, a) separating the filter housing 20 from the filter assembly (2); b) After the second cartridge 10-2 used for filtration of the chemical inside the filter assembly 2 is separated from the filter assembly 2, a new cartridge, the first cartridge 10-1, is removed. When the two cartridges (10-2) are coupled to the separated filter assembly (2), the step of coupling the separated filter housing (20) to the filter assembly (2).

In step b), the second cartridge 10-2 is separated from the filter assembly 2 by driving the second cartridge desorption module 500, and the first cartridge 10-1 is the first. The second cartridge 10-2 may be coupled to the separated filter assembly 2 by driving the cartridge detachment module 600.

In step b), the second cartridge 10-2 separated from the filter assembly 2 is transferred from the filter assembly holder 300 to the second loading unit 220, and the first cartridge 10- 1) may be transferred from the first loading unit 210 to the filter assembly mounting unit 300.

The second cartridge desorption module 500 transfers the second cartridge 10-2 from the filter assembly holder 300 to the second loading unit 220 by lifting and rotating movements, and the first cartridge The detachable module 600 may transfer the first cartridge 10-1 from the first loading unit 210 to the filter assembly mounting unit 300 by lifting and moving forward and backward.

The first cartridge 10-1 is manually brought into the first loading part 210, and the second cartridge 10-2 loaded on the second loading part 220 is to be taken out manually. Can be.

Prior to the step a), the step of draining the chemicals inside the filter assembly 2 mounted on the filter assembly mounting portion 300 and the step of cleaning and drying the inside of the filter assembly 2 may be further included. have.

Subsequent to the step b), the filter assembly mounted on the filter assembly (300) mounted on the inside of the filter assembly (2) for the normal and smooth supply of the chemical by repeatedly supplying and draining may further include the step of removing bubbles. have.

After the step of removing the bubbles, the step of cleaning the piping and the bottom of the chemical filter replacement device may be further included.

According to the present invention, chemical and fume (FUME) may be leaked to the outside during chemical filter replacement work, or a chemical leakage accident due to an operator's mistake may be prevented from being exposed to danger by workers and others. .

In addition, by fixing the housing and the head of the filter assembly securely with a clamp, chemical leakage can be prevented, and a clamp locking means is provided to maintain the clamped state of the clamp, thereby preventing chemical leakage.

In addition, since the second cartridge used for the filtration of the chemical and the new first cartridge are automatically replaced by a mechanical device, the number of work required to replace the filter can be reduced.

In addition, by automatically cleaning and drying the used second cartridge in the filter assembly mounting portion, it is possible to effectively remove the chemicals on the second cartridge, and there is no need to provide a separate space for cleaning and drying, so that the structure of the device is eliminated. Can be simplified.

In addition, the filter housing maintains the state of being coupled to the filter housing detachable module, and only the used cartridge is recovered, thereby simplifying the separation of the filter housing and the cartridge and reducing the time required for separation.

In addition, a second cartridge transport module for transporting the used second cartridge and a first cartridge transport module for transporting the new first cartridge are separately provided to block contact between the second cartridge and the first cartridge, thereby preventing the first cartridge. Pollution can be prevented.

In addition, the second cartridge transport module is configured to transport the second cartridge by lifting and rotating, and the first cartridge transport module is configured to transport the first cartridge by lifting and moving forward and backward, so that the second cartridge transport module and the first cartridge It is possible to reduce the volume of the device by shortening the path of movement of the transfer module, thereby making it possible to make it compact.

In addition, the second cartridge transfer module is configured to be commonly used in transferring the second cartridge between the filter assembly mounting portion and the second loading portion provided on both sides of the pair, thereby further simplifying the structure of the apparatus.

In addition, by configuring the first loading unit to load the first cartridge and the second loading unit to load the second cartridge is located within the reach of the operator with respect to the door, the first cartridge is carried in and out of the second cartridge. The export operation can be performed easily.

In addition, by configuring the height of the filter assembly to adjust the height of the cartridge replacement means in accordance with the standard, it is possible to replace the filter of the filter assembly of various standards.

In addition, it is possible to prevent the chemicals from falling while transporting the cartridge, thereby preventing the bottom of the device from being contaminated with the chemicals.

1 is a perspective view of the chemical filter replacement device of the present invention as viewed from the front,

Figure 2 is a perspective view of the chemical filter replacement device of the present invention as viewed from the rear,

Figure 3 is a front view of the chemical filter replacement device of the present invention,

Figure 4 is a plan view showing the arrangement structure of the first loading portion and the filter assembly seating portion and the second loading portion provided in pairs on both sides of the door and the chemical filter of the present invention,

5 is a view showing a chemical filter according to an embodiment of the present invention and pipes and valves connected thereto;

6 is a process piping instrumentation diagram of a chemical filter replacement device according to the present invention,

Figure 7 is a perspective view showing a filter assembly is clamped to the clamp, the clamp is locked in the filter assembly mounting portion of the present invention,

Figure 8 is a cross-sectional view showing a state in which the filter assembly of the present invention is clamped to the clamp,

Figure 9 is a perspective view showing a filter assembly is clamped to the clamp, the clamp is unlocked in the filter assembly mounting portion of the present invention,

10 is a perspective view showing a state in which the clamp of the present invention is unlocked and the filter assembly is clamped off from the clamp at the filter assembly mounting part;

11 is a cross-sectional view showing a state where the filter assembly of the present invention is released from the clamp,

12 is a perspective view showing a state in which the filter housing is moved downward by the filter housing removal module of the present invention,

13 is a perspective view showing a state in which the filter housing is moved upward by the filter housing removal module of the present invention,

14 is a side view showing a state in which the height of the housing fixing part is adjusted according to the height standard of the filter housing of the present invention,

15 is a perspective view showing the state of the second cartridge transfer module of the present invention in a standby position state;

Figure 16 is a perspective view showing the state of the first position of the second cartridge transfer module of the present invention located on the upper side of the filter assembly mounting portion,

17 is a perspective view showing a state in which the second cartridge transfer module of the present invention is lowered from the first position,

18 is a perspective view showing the state of the second position of the second cartridge transfer module of the present invention located on the upper side of the second loading unit,

19 is a plan view for explaining a path in which the second cartridge transfer module of the present invention is rotated to the standby position and the first position and the second position,

20 is a side view showing a state in which the height of the second lifting part is adjusted according to the height standard of the second cartridge of the present invention;

21 is a perspective view showing the state of the first cartridge transfer module of the present invention in a forward position state located above the first loading part,

Figure 22 is a perspective view showing the state of the reverse position of the first cartridge transfer module of the present invention located on the upper side of the filter assembly mounting portion,

23 is a perspective view showing a state in which the first cartridge transfer module of the present invention is moved downward from reverse;

24 is a side view showing a state in which the height of the first elevating part is adjusted according to the height standard of the first cartridge by the first cartridge transport module of the present invention;

25 is a view showing the state of the preparation stage when replacing the chemical filter,

26 is a view showing a state in which the first cartridge is brought into the first loading unit;

27 is a view showing a state in which the housing transport portion of the filter housing detachable module is moved upward to separate the filter housing from the filter assembly;

28 is a view showing a state in which the rotating portion of the second cartridge transfer module is rotated to the first position,

29 is a view showing a state in which the second gripper grips the upper portion of the second cartridge due to the downward movement of the second lifting portion of the second cartridge transfer module;

30 is a view showing a state in which the second lifting portion of the second cartridge transfer module is moved upward and moves the second cartridge to the upper side of the filter assembly mounting portion;

31 is a view showing a state in which the rotating portion of the second cartridge transfer module is rotated to the second position,

FIG. 32 is a view showing a state in which the second lifting unit of the second cartridge transport module descends from the second position to seat the second cartridge in the second loading unit;

33 is a view showing a state in which the second lifting portion of the second cartridge transfer module is moved upward from the second position;

34 is a view showing a first gripper gripping the upper portion of the first cartridge by rotating the rotating portion of the second cartridge transfer module to the standby position, and moving the first lifting portion of the first cartridge transfer module downward from the forward position;

35 is a view showing a state in which the first lifting part of the first cartridge transfer module is moved upward and moves the first cartridge upwards of the first loading part;

FIG. 36 is a view showing a state in which the first cartridge transfer module moves backward and forward to move the first cartridge to the reverse position;

37 is a view showing a state in which the first carriage of the first cartridge transfer module descends from the reverse position to seat the first cartridge on the filter assembly mounting portion;

38 is a view showing a state in which the first lifting portion of the first cartridge transfer module moves upward from the reverse position;

39 is a view showing a state in which the forward-backward transfer portion of the first cartridge transfer module has been moved to the forward position;

FIG. 40 is a view showing a state in which the housing transport portion of the filter housing detachment module is moved downward and the filter housing is coupled to the filter assembly;

41 is a view showing a state in which the second cartridge is taken out from the second loading unit,

42 is a plan view showing a first modified embodiment of the chemical filter replacement device of the present invention,

43 is a plan view showing a second modified embodiment of the chemical filter replacement device of the present invention,

44 is a plan view showing a third modified embodiment of the chemical filter replacement device of the present invention.

** Explanation of sign **

1: Chemical filter replacement device 2: Filter assembly

10-1: First cartridge 10-2: Second cartridge

20: filter housing 22: housing flange

23: fifth connection 30: filter head

31 ~ 34: 1st ~ 4th connection 36: head flange

37: cartridge insertion portion 40: O-ring

100: main cover 110: door

200: loading unit 210: first loading unit

211: 1st carriage seat 220: 2nd loading unit

221: Second cartridge seat 230: Chemical stand

300: filter assembly mounting portion 310: head clamp

311: 1st clamp 312: 2nd clamp

311a, 312a: Coupling groove 311b, 312b: Slope

320: clamp transfer part 324: fixing groove

330: filter head mount 331: head support

332: support 340: clamp fixing

341: fixed projection 400: filter housing removal module

410: housing fixing 420: housing transport

430: housing fixing height adjuster 500,500-1: second cartridge transfer module

510: rotating drive unit 520: rotating unit

530: second lifting and moving part 540: second lifting and moving part

550: second gripper 560: second elevation height adjustment

600,600-1: 1st cartridge transfer module 610: 1st lift transfer unit

620: first elevating section 630: forward and backward movement section

630-1: First forward and backward transfer section 630-2: Second forward and backward transfer section

640: first gripper 650: first elevator height adjustment unit

600-2,600-3: Cartridge transfer module 610-3: Elevator transfer

620-3: first straight transfer section 630-3: second straight transfer section

Hereinafter, the configuration and operation of the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 to 3, the chemical filter replacement device 1 of the present invention includes a main body cover 100 and a door 110 provided on the front side of the main body cover 100.

The main body cover 100 is made of a hexahedral shape, inside of which is a first loading part 210 in which a first cartridge 10-1 to be used for filtration of chemicals is loaded, and a second cartridge used for filtration of chemicals ( 10-2) may be provided with a second loading unit 220, the filter assembly mounting unit 300, and the cartridge replacement means 400, 500, 600 to be loaded.

The cartridge replacement means (400,500,600) includes a pair of filter housing desorption modules (400) provided on both sides of the intermediate portion in the front-rear direction of the chemical filter replacement device (1). In addition, the cartridge replacement means (400,500,600) is provided on both front sides of a single second cartridge transfer module 500 provided in the rear middle portion of the chemical filter replacement device 1, and the chemical filter replacement device 1 A pair of first cartridge transfer modules 600 may be included.

In the first loading part 210, a first cartridge 10-1, which is a new cartridge to be used for chemical filtration, is stored. The first loading part 210 may include a first cartridge mounting table 211 on which the first cartridge 10-1 is mounted. The operator opens the door 110 provided on the front surface of the main body cover 100, and brings the first cartridge 10-1 into the interior of the first loading unit 210.

A second cartridge 10-2, which is a waste cartridge used for chemical filtration, is stored in the second loading unit 220. The second loading unit 220 may include a second cartridge mounting table 221 on which the second cartridge 10-2 is mounted.

The second cartridge 10-2 is loaded on the second loading unit 220 by the second cartridge transfer module 500, and the second cartridge 10- loaded by the operator on the second loading unit 220 2) is collected and taken out.

Referring to Figure 25, the second loading unit 220, during the transfer of the second cartridge (10-2), or open the door 110, the second cartridge (10-2) the worker manually When taking out, or when opening the door 110 and manually moving the second cartridge 10-2 by a worker, the chemical falling from the second cartridge 10-2 is received and discharged to one side. A chemical pedestal 230 may be provided. The chemical pedestal 230 communicates with the flat plate portion 231 surrounded by the side walls 231a and an opening 231b formed at one side of the side wall 231a, and the inclined surface portions 232 formed with side walls 232a on both sides. ).

The filter assembly 2 is mounted on the filter assembly mounting portion 300. A plurality of pipes for supplying chemicals to the process in the state where the filter assembly 2 is mounted is connected to the filter assembly 2. Chemicals introduced into the filter assembly 2 through the piping are supplied to a process apparatus that requires chemicals after impurities are filtered while passing through the cartridge inside the filter assembly 2.

When the cartridge is replaced by a cartridge replacement cycle as the chemical filtration proceeds, the filter housing 2 is mounted on the filter assembly mounting portion 300 using the cartridge replacement means 400, 500, 600 ( 20), and after separating the second cartridge 10-2 from the filter assembly 2, the first cartridge 10-1 is separated from the second cartridge 10-2 by the filter assembly ( 2), and the separated filter housing 20 is coupled to the filter assembly 2.

Referring to FIG. 4, the first loading portion 210, the filter assembly mounting portion 300, and the second loading portion 220 may be provided in pairs, respectively, at positions spaced apart from both sides.

The first loading part 210, the filter assembly mounting part 300, and the second loading part 220 are sequentially arranged at a position spaced apart a predetermined distance to the rear of the door 110. The first loading portion 210 and the filter assembly mounting portion 300 are provided at positions spaced apart on the straight path A1 in the front-rear direction, and the second loading portion 220 is provided with the filter assembly mounting portion 300 ) May be provided at a position A2 spaced from the rear side.

The first loading part 210 and the second loading part 220 may be provided to be located within a distance of the operator's hand based on the door 110. In one embodiment, based on the door 110, the first loading part 210 is provided at a position spaced 80 mm apart, the filter assembly mounting part 300 is provided at a position spaced 280 mm apart, the first 2 The loading unit 220 is provided at a position spaced apart from the 468 mm, the operator reaches out the hand to manually bring the first cartridge 10-1 into the first loading unit 210, or from the second loading unit 220 The second cartridge 10-2 can be taken out manually.

The filter assembly 2 and the configuration connected thereto will be described with reference to FIGS. 5 and 6. The filter assembly 2 is coupled to a cartridge 10 for filtering foreign substances contained in the chemical, a filter housing 20 for receiving the cartridge 10 therein, and an open side of the filter housing 20 It includes a filter head (30).

The filter head 30 has a first connection portion 31 through which a chemical supplied from a chemical supply portion (not shown) flows, and a second connection portion 32 for discharging the chemicals passing through the cartridge 10 to be supplied to a process device ), A third connection portion 33 for discharging the chemical remaining in the space S2 between the cartridge 10 and the inner surface of the filter housing 20, remaining in the interior space S1 of the cartridge 10 A fourth connection portion 34 for discharging chemicals is formed.

In addition, the filter head 30 is inserted into one end of the cartridge 10 is inserted into the cartridge insertion portion 37, the cartridge insertion portion 37 concentric structure with the head body 38 in a radial direction An extended head flange 36 is formed.

The filter housing 20 is formed at one end so that the cartridge 10 is in close contact with the head flange 36 in the housing body 21, the housing body 21 is formed with a space to be accommodated therein in the longitudinal direction. It is formed on the other end of the housing flange 22 and the housing body 21, and consists of a fifth connection 23 through which nitrogen gas (N2) or washing water (DI), which is dry air, is introduced.

The head flange 36 and the housing flange 22 are respectively formed with inclined surfaces 36a and 22a on opposite sides of the surfaces (contact surfaces) facing each other, and formed in a wedge shape.

Between the head flange 36 and the opposite surface of the housing flange 22, an O-ring 40 for maintaining airtightness is provided.

A first connection pipe (L1) to which chemical is supplied is connected to the first connection portion (31), and on the first connection pipe (L1), a first valve (1) for controlling the chemical flowing into the filter assembly (2) V1) is provided.

The second connection portion 32 is connected to a second connection pipe (L2) for supply of chemicals to a process device requiring chemical, and on the second connection pipe (L2), the chemical through the second connection pipe (L2) A second valve (V2) for intermittent flow is provided.

A third connection pipe (L3) and a fourth connection pipe (L4) for discharging chemicals are connected to the third connection portion (33) and the fourth connection portion (34), respectively, and the third connection pipe (L3) and the A fourth valve (V3) and a fourth valve (V4) are provided on the four connecting pipes (L4) to control whether the chemical is drained through each pipe.

The fifth connection portion 23 is connected to a fifth connection pipe L5 through which nitrogen gas or washing water is introduced, and a fifth valve V5 for interrupting the flow inside the fifth connection pipe L5 is provided. . A pressure sensor P for measuring the pressure inside the filter assembly 2 when the chemical filter is replaced may be connected to the fifth connection pipe L5.

The fifth connection pipe (L5) is connected to a sixth connection pipe (L6) which is a dry air supply line and a seventh connection pipe (L7) that is a washing water supply line, and is connected to the sixth connection pipe (L6) and a seventh connection Valves (V6, V7, V8, V9) for opening and closing the flow path of the pipe (L7) are provided.

The filter assembly mounting portion 300 is provided in a pair spaced apart on both sides, the filter assembly (2; 2-1, 2-2) of the filter assembly mounted on each of the pair of filter assembly mounting portion 300, respectively A common vent line (L8) communicating with the outside air is connected to the five-connection pipe (L5).

A bypass line (L9) for selectively supplying a chemical to any one of the pair of filter assemblies (2) is connected to the pair of filter assemblies (2), through the bypass line (L9) A valve (V10) for controlling the flow of chemicals is provided.

The third connection pipe (L3) is provided with valves (V11, V12) for opening and closing the tenth and eleventh connection pipes (L10, L11) and their flow paths. The use of the 10th and 11th connection pipes (L10, L11) is a third connection portion, which is a space for chemical discharge of the filter when suddenly supplying a large flow rate to the first connection pipe (L1) having a large pipe size after replacing the filter. Since the air is filled in the space between the 33) and the third valve (V3) and the space between the second connection part (32) and the second valve (V2), the air can be supplied together with air during normal supply of the pipe, so the size of the pipe is relatively The small 10th and 11th connecting pipes (L10, L11) allow the chemical to slowly fill up with a small amount from the bottom to remove air .

In addition, the 12th connection pipe (L12) for supplying the washing water to the bottom of the device when the chemical filter is replaced, and a valve (V13) for opening and closing the flow path are provided.

The operation of the plurality of connection pipes and valves when replacing the chemical filter will be described later.

The filter assembly mounting portion 300 will be described with reference to FIGS. 7 to 11.

The filter assembly mounting portion 300 includes a head clamp 310 for clamping a portion where the filter housing 20 and the filter head 30 are coupled.

The head clamp 310 includes a first clamp 311 and a second clamp 312 positioned to face each other around the head flange 36 and the housing flange 22, and the first clamp 311 ) And the clamp transfer unit 320 for moving the second clamp 312 in a direction closer to each other or in a direction away from each other.

The first clamp 311 and the second clamp 312 are spaced apart from each other, and are moved to move closer to each other or away from each other in a state facing each other by the clamp transfer unit 320. Inside the first clamp 311 and the second clamp 312 facing each other, the inclined surfaces 311b and 312b are in close contact with the inclined surfaces 36a and 22a of the head flange 36 and the housing flange 22, respectively. The coupling grooves 311a and 312a having the grooves are formed.

7 and 8, the first clamp 311 and the second clamp 312 are moved closer to each other, and thus the inclined surfaces 311b of the first clamp 311 and the second clamp 312 are formed. 312b) is pressed to be in close contact with the head flange 36 and the inclined surfaces 36a and 22a of the housing flange 22, respectively, and the surfaces facing each other of the head flange 36 and the housing flange 22 are in close contact, Airtightness is maintained by the O-ring 40.

When the head flange 36, the housing flange 22, and the corresponding portions of the coupling grooves 311a and 312a are formed in a wedge shape, the head flange 36 and the housing flange 22 are coupled grooves 311a. , 312a) Since the force constrained therein can be greatly increased, the airtight retention performance can be improved even if the pressure caused by the chemical acts inside the filter assembly 2.

The filter assembly mounting portion 300 includes a filter head seating table 330 on which the filter head 30 is seated such that the filter housing 20 is located at the top and the filter head 30 is located at the bottom. The filter head restraint 330 is a head restraint 331 that is supported by contacting one side of the filter head 30, and extends downward from the bottom surface of the headrest 331 to a support 332 that is supported on the ground. Is done.

The filter assembly mounting portion 300 includes clamp locking means for fixing the clamped position of the head clamp 310 so that the head flange 36 and the housing flange 22 remain clamped. In one embodiment, the clamp locking means, the fixing groove 324 formed in the clamp transfer unit 320, the head flange 36 and the housing flange 22 in the clamping state in the clamping groove 324 A clamp fixing part 340 having a fixing protrusion 341 to be inserted may be included.

The clamp transfer part 320 may be provided to be reciprocated in the transverse direction, and the clamp fixing part 340 may be provided to be reciprocated in the longitudinal direction.

In the state in which the head flange 36 and the housing flange 22 are clamped as shown in FIG. 7, the clamp fixing part 340 is moved downward and the fixing protrusion 341 is inserted into the fixing groove 324 When the head clamp 310 is in a clamp lock state, as shown in FIG. 9, when the clamp fixing part 340 is moved upward, the fixing protrusion 341 is located outside the fixing groove 324, The head clamp 310 is in a clamp unlock state.

On the other hand, when separating the second cartridge (10-2) from the filter assembly (2), release the clamp lock state, the first clamp 311 and the second clamp 312 by the clamp transfer unit 320 It moves in a direction away from each other and becomes a state as shown in FIGS. 10 and 11.

The clamp transfer unit 320 is made of, for example, parts such as an LM guide or a cylinder, and the configuration for transporting the first clamp 311 is combined and the configuration for transporting the second clamp 312 is coupled. Separately, the first clamp 311 and the second clamp 312 may be configured to be movable in opposite directions by the clamp transfer part 320.

The filter housing desorption module 400 constituting the cartridge replacement means will be described with reference to FIGS. 12 to 14.

The filter housing detachable module 400 separates the filter housing 20 surrounding the second cartridge 10-2 from the filter assembly 2, or the filter housing 20 separated from the filter assembly 2 ) Is coupled so that the first cartridge 10-1 is inserted therein.

To this end, the filter housing detachable module 400 includes a housing fixing part 410 to which the filter housing 20 is fixed, and a housing transporting part 420 to move the housing fixing part 410 in the vertical direction.

The housing fixing part 410 may fix the filter housing 20 in a structure surrounding the outside of the body of the filter housing 20 in two places at the top and bottom of the filter housing 20.

The housing fixing part 410 has one side coupled to the housing transport part 420, and the filter housing 20 is raised from the state of FIG. 12 to the state of FIG. 13 by driving of the housing transport part 420. You can do it, or vice versa.

The filter housing detachable module 400 may further include a housing fixing height adjusting unit 430 for adjusting the height of the housing fixing unit 410 according to the height standard of the filter housing 20. The housing fixing height adjustment part 430 is spaced apart vertically so that one side is coupled to the housing transport part 420, and fastening means such as bolts for fastening the housing fixing part 410 are fastened to the other side. A plurality of fastening holes 431 may be formed. Therefore, in the case of a specification in which the height of the filter housing 20 is low as shown in FIG. 14 (a), the housing fixing part 410 is fastened to the lower part of the housing fixing height adjusting part 430, and with FIG. Likewise, in the case of a specification in which the height of the filter housing 20 'is high, the housing fixing portion 410 can be adjusted to an appropriate height by fastening the housing fixing portion 410 to the upper portion of the housing fixing height adjusting portion 430.

The second cartridge transfer module 500 constituting the cartridge replacement means will be described with reference to FIGS. 15 to 20.

The second cartridge transfer module 500 is configured to transfer the second cartridge 10-2 mounted on the filter assembly mounting portion 300 to the second loading portion 220, and a rotary driving unit (510), the first position (P1-1, P1-2, the positions of FIGS. 16 and 17) in which the filter assembly mounting portion 300 is located by receiving the power of the rotary drive unit 510, and The second position (P2-1, P2-2, the position of FIG. 18) where the second loading part 220 is located, and the standby position (P0) located in the middle between the second loading parts 220 located on both sides , Position in FIG. 15) and a second lifting part (520) that can be rotated in both directions between the first position (P1-1, P1-2) or the second position (P2-1, P2-2). 540) is configured to include a second elevating and moving unit 530 to elevate in the vertical direction, and a second gripper 550 which is provided on the second elevating unit 540 to grip the second cartridge 10-2. .

The filter assembly mounting portion 300 and the second loading portion 220 are provided in pairs in positions spaced apart from each side, and the second cartridge transfer module 500 is provided as a single module, and is provided on both sides of the filter assembly. It is configured to transfer the second cartridge 10-2 between the filter assembly mounting portion 300 and the second loading portion 220 located in the.

The second cartridge transfer module 500, after transferring the second cartridge 10-2 from the filter assembly mounting portion 300 to the second loading unit 220, the second located on both sides It returns to the standby position P0 located in the middle between the loading parts 220.

The second cartridge transfer module 500, the second lifting unit height adjustment unit 560 for adjusting the height of the second lifting unit 540 according to the height standard of the second cartridge (10-2) It may further include. The second elevation height adjustment unit 560 is provided between the second elevation transport unit 530 and the second elevation unit 540. 20 (a), when the height of the second cartridge 10-2 is low, the second lifting portion 540 is fastened to the lower portion of the second lifting height adjusting portion 560, and In the case of a specification in which the height of the second cartridge 10-2 'is low as shown in (b), the second lifting portion (540) is fastened by fastening the second lifting portion 540 to the upper portion of the second lifting portion height adjusting portion 560. 540) can be adjusted to an appropriate height.

The first cartridge transfer module 600 constituting the cartridge replacement means will be described with reference to FIGS. 21 to 24.

The first cartridge transfer module 600 is provided in a pair on both sides to transfer the first cartridge 10-1 loaded on the first loading unit 210 to the filter assembly mounting unit 300 In a configuration, the first elevating and moving unit 610 for elevating the first elevating unit 620 in the vertical direction, and provided in the lower portion of the first elevating unit 620, the forward and backward moving unit 630, and the It includes a first gripper 640 that is provided in the front-rear forward transfer unit 630 to grip the first cartridge 10-1.

The forward-backward movement unit 630 is coupled to a lower portion of the first elevation unit 620, the first forward-reverse movement unit 630-1 and forward and backward along the first elevation unit 620, and the first It is coupled to the lower part of the forward-backward forwarding unit 630-1, and is forward-backward along the first forward-backward forwarding unit 630-1, and the second forward-backward forwarding unit 630-2 with the first gripper 640 coupled to the lower side. ).

Thus, if the forward and backward transfer unit 630 is provided in two stages, such as the first forward-reverse transfer unit 630-1 and the second forward-reverse transfer unit 630-2, the first forward-reverse transfer unit 630-1 is removed. 1 In the state of being transferred to one end of the elevating portion 620, by transferring the second forward and backward conveying portion 630 to one end of the first forward and backward conveying portion 630-1, the forward and backward direction of the forward and backward conveying portion 630 Even if the width of the first gripper 640 is not configured to be large, the forward position located above the first loading part 210 as shown in FIG. 21 and the reverse position located above the filter assembly mounting part 300 as shown in FIG. 22. It becomes possible to move back and forth between positions.

The first cartridge transfer module 600, the first lifting unit height adjustment unit 650 for adjusting the height of the first lifting unit 620 according to the height standard of the first cartridge (10-1) It may further include. The first elevation height adjustment unit 650 is provided between the first elevation transportation unit 610 and the first elevation unit 620. 24 (a), when the height of the first cartridge 10-1 is low, the first elevating portion 620 is fastened to the lower portion of the first elevating portion height adjusting portion 650, and FIG. In the case of a specification in which the height of the first cartridge 10-1 'is low, as shown in (b), the first elevating unit (620) is fastened by fastening the first elevating unit 620 to the upper portion of the first elevating height adjusting unit 650. 620) can be adjusted to an appropriate height.

Hereinafter, a method of replacing the chemical filter of the present invention will be described with reference to FIGS. 25 to 41 and FIG. 6.

When the chemical filter is to be replaced while the chemical is normally supplied as shown in FIG. 25, the operator enters information such as a barcode or QR code or RFID of the first cartridge 10-1, which is a new cartridge, as shown in FIG. Enter to check the product information, remove the packaging, and then load the first cartridge 10-1 into the first loading unit 210. Then, when the filter replacement switch (not shown) provided in the filter replacement device is operated, the cartridge replacement means (400,500,600) automatically performs a filter replacement operation according to a set operation process.

In this case, prior to the operation of the cartridge replacement means (400,500,600), the bypass supply of the chemical is made, and the supply of the chemical to the second cartridge 10-2, which is the replacement target cartridge in the filter assembly mounting unit 300 And the cleaning and drying process for the second cartridge 10-2 is performed.

That is, the first valve provided on both sides of the filter assembly 2-1 to be replaced by supplying the chemical by-pass so that the chemical is supplied only to the filter assembly 2-2 located on the other side by opening the tenth valve V10. (V1) and the second valve (V2) are closed to stop the chemical supply to the filter assembly (2-1). Then, the third valve (V3) and the fourth valve (V4) are opened to drain the remaining chemical inside the filter assembly (2-1), and at the same time, the fifth to seventh valves (V5, V6, V7) are opened to filter. Dry air is supplied into the assembly 2-1.

Then, after supplying the dry air for a predetermined time, the supply of the dry air is stopped by closing the seventh valve V7, and the third to sixth valves V3, V4, V5, and V6 remain open, The ninth valve (V9) is opened to supply the washing water into the filter assembly (2-1), thereby draining the remaining chemical and washing water. At this time, the inside of the filter assembly 2-1 is sufficiently washed with washing water by appropriately opening and closing the third and fourth valves V3 and V4.

After the washing water is supplied for a set time, the supply of the washing water is stopped, and again, the dry air as described above is supplied into the filter assembly 2-1 for a set time.

Next, close the sixth to ninth valves (V6, V7, V8, V9) while maintaining the open state of the third valve (V3), the fourth valve (V4), and the fifth valve (V5) to dry air and wash. The supply of water is stopped, natural draining by communication with the outside air is performed, and when the set time has elapsed, all of the first to ninth valves (V1 to V9) are closed, and the filter assembly (2-) through the pressure sensor (P) 1) After confirming that the internal pressure has been sufficiently relieved, after unlocking the clamp locking means, release the clamping state of the head clamp (310).

Then, as shown in Figure 27, the housing transport part 420 of the filter housing detachable module 400 is moved upward to separate the filter housing 20 from the filter assembly 2.

Thereafter, as shown in FIG. 28, the rotating portion 520 of the second cartridge transfer module 500 is the first position on the filter assembly mounting portion 300 from the standby position P0 by one-way rotating driving of the rotating driving portion 510 ( P1-1), the second lifter 540 of the second cartridge transfer module 500 moves downward as shown in FIG. 29, so that the second gripper 550 moves the upper part of the second cartridge 10-2. Grip.

Then, as shown in FIG. 30, the second lifting part 540 of the second cartridge transport module 500 is moved upward, and the second cartridge 10-2 is moved upward to the filter assembly mounting part 300. As shown in 31, the second position on the second loading part 220 from the first position (P1-1) by the rotation part 520 of the second cartridge transport module 500 is rotated in the opposite direction of the rotation drive part 510 ( P2-1).

Next, as shown in FIG. 32, the second lifting part 540 of the second cartridge transport module 500 moves downward to seat the second cartridge 10-2 on the second loading part 220, and FIG. Likewise, after the second lifting part 540 of the second cartridge transport module 500 is moved upward, the rotating part 520 of the second cartridge transport module 500 rotates in the opposite direction of the rotation driving part 510 as shown in FIG. 34. After the drive is rotated from the second position P2-1 to the standby position P0, it waits.

At the same time, as shown in FIG. 34, the first elevating portion 620 of the first cartridge transfer module 600 is moved downward from the advancing position on the first loading portion 210 so that the first gripper 640 is the first cartridge ( 10-1), the first lifting part 620 of the first cartridge transfer module 600 is moved upward by gripping the upper part of the first cartridge 10-1, as shown in FIG. 35, and the first loading part 210 Moves to the upper side.

Next, as shown in Figure 36, after the forward and backward transfer unit 630 of the first cartridge transfer module 600 is moved backward to move the first cartridge 10-1 to the reverse position on the filter assembly mounting portion 300, As shown in FIG. 37, the first lifting portion 620 of the first cartridge transfer module 600 moves downward from the reverse position to seat the first cartridge 10-1 on the filter assembly mounting portion 300.

Then, after the first lifting portion 620 of the first cartridge transfer module 600 is moved upward from the reverse position as shown in FIG. 38, the forward and backward transfer portion 630 of the first cartridge transfer module 600 as shown in FIG. Moves to the forward position and waits.

Next, as shown in Figure 40, the housing transport part 420 of the filter housing detachable module 400 is moved downward, so that the filter housing 20 is coupled to the filter assembly 2, and the head clamp 310 is clamped and locked. .

When the above steps are completed, a preceding process for normal supply of chemicals to the first cartridge 10-1 newly replaced in the filter assembly mounting portion 300 is performed.

First, the fifth, sixth, and eighth valves V5, V6, and V8 are opened to supply dry air into the filter assembly 2 for a predetermined time, and then the fifth, sixth, and eighth valves V5, V6 , V8) in the closed state through the pressure sensor (P) to measure the pressure inside the filter assembly (2) for a set time, to determine whether there is no pressure loss.

If there is a pressure loss, perform the necessary maintenance work by checking the combined state of the filter assembly (2). If there is no pressure loss, the fifth valve (V5), the eleventh valve (V11), and the twelfth valve (V12) ) To supply a small amount of chemical into the filter assembly (2) for a set time by opening the space between the third connection portion (33) and the third valve (V3), which is the space for the chemical discharge portion of the filter, and the second connection portion (32). After removing the air between the second valve (V2), the fifth valve (V5), the eleventh valve (V11) and the twelfth valve (V12) are closed.

Next, by opening the fifth valve (V5) so that the common vent line communicates with the outside air, the first valve (V1) is opened to supply the chemical for a set period of time, and the first valve (V1) is closed. 2 Open the valve (V2) to remove the bubbles (bubble) is repeated 2-4 times. When the bubble removal operation is completed, the first valve (V1) and the second valve (V2) are opened, and the fifth valve (V5) and the tenth valve (V10) are closed to close the filter assembly (2-1, 2-2) on both sides. ) To supply chemicals normally.

Following the step of removing the bubbles, the step of cleaning the piping and the bottom of the chemical filter replacement device 1 is performed. With the fifth valve (V5) closed, the sixth to seventh valves (V6, V7) are opened to supply dry air to the common vent line (L8) to discharge stagnant chemicals in the piping, and the thirteenth valve (V13) ) To clean the floor by supplying washing water to the bottom of the chemical filter replacement device (1).

When the above steps are completed, as shown in FIG. 41, the operator collects and removes the second cartridge 10-2 loaded on the second loading unit 220, thereby completing the replacement of the chemical filter.

The above-described embodiment is configured by separating the first loading unit 210 and the second loading unit 220, the first cartridge transfer module 600 and the second cartridge transfer module 500 are configured separately, respectively. In order to reduce the space before and after, the case in which the second cartridge transfer module 500 is configured to be commonly used for two filter assemblies 2; 2-1, 2-2 has been described as an example. However, the present invention can be modified as follows.

Referring to FIG. 42, the first modified embodiment of the present invention is configured by separating the first loading part 210 and the second loading part 220, and there is sufficient space before and after, but lacks left / right space. In the case of or in the case where only one filter assembly is configured, the first cartridge transfer module 600-1 and the second cartridge transfer module 500-1 are respectively configured separately, but the first cartridge transfer module 600- 1) and the second cartridge transfer module 500-1 may be configured to be moved forward and backward and lifted in the same manner as the first cartridge transfer module 600 in the above-described embodiment.

In another embodiment, if the left / right space is sufficient but the front / rear space is insufficient, the configuration of FIG. 42 may be rotated 90 degrees clockwise to install.

Referring to Figure 43, the second modified embodiment of the present invention, the first cartridge (10-1) to be used for the filtration of chemicals and the second cartridge (10-2) used for the filtration of the chemical loading part ( 200), the filter assembly mounting unit 300 is provided on each side in a pair, cartridge transport module 600 for transferring the filter assembly 2 between the loading unit 200 and the filter assembly mounting unit 300 -2) is provided. The cartridge transport module 600-2 may be configured to be rotated and lifted in both directions so as to be commonly used for two filter assemblies, like the second cartridge transport module 500 in the above-described embodiment.

Referring to Figure 44, a third modified embodiment of the present invention, the first cartridge (10-1) to be used for the filtration of the chemical and the second cartridge (10-2) used for the filtration of the chemical loading part ( 200), the filter assembly mounting portion 300 is provided on each side in a pair, cartridge transport module 600-3 for transferring the filter assembly between the loading unit 200 and the filter assembly mounting portion 300 It is equipped. The cartridge transfer module 600-3 is configured to include a lift transfer unit 610-3, a first linear transfer unit 620-3, and a second linear transfer unit 630-3.

A gripper (not shown) for gripping the cartridge is mounted to the lower portion of the elevating and transporting unit 610-3, and is provided to be able to elevate in the ground direction in FIG. 44. The first linear transfer unit 620-3 is provided to transfer the lifting transfer unit 610-3 in the front-rear direction between the loading unit 200 and the filter assembly mounting unit 300. The second linear transport unit 630-3 includes a loading unit 200 and a filter assembly mounting unit provided with a pair of the lifting transport unit 610-3 and the first linear transport unit 620-3 on both sides ( 300) is provided to feed in the left and right directions.

On the other hand, in another modified embodiment of the present invention, when the first loading part 210 and the second loading part 220 are configured as one, and there is not enough space, the filter assembly 2 is one as described above. The first cartridge transfer module 600 may be composed of only one, and if there are two filter assemblies 2; 2-1, 2-2, only one of the above-described second cartridge transfer modules 500 may be used. It can also be configured. In this case, the second cartridge 10-2 may be discharged first, and then the first cartridge 10-1 may be brought in.

In addition, in the present specification, the case in which the forward-backward transfer unit 630 of the first cartridge transfer module 600 is composed of two stages of the first and second forward-backward transfer units 630-1,630-2 is exemplified. The true transfer unit 630 may be configured as one stage and driven forward and backward.

As described above, the present invention is not limited to the above-described embodiment, and a modified implementation obvious by a person skilled in the art to which the present invention pertains without departing from the technical spirit of the present invention claimed in the claims It is possible, and such modifications are within the scope of the present invention.

Claims (46)

1. Accommodating the first cartridge 10-1 to be used for chemical filtration or the second cartridge 10-2 used for chemical filtration, and the first cartridge 10-1 or second cartridge 10-2 And a filter assembly mounting portion 300 on which a filter assembly 2 including a filter housing 20 and a filter head 30 coupled vertically is mounted; And

   While the filter assembly 2 is mounted on the filter assembly mounting portion 300, the filter housing 20 is separated from the filter assembly 2, and the second cartridge 10-2 is the filter. After being separated from the assembly 2, when the first cartridge 10-1 is coupled to the filter assembly 2 in which the second cartridge 10-2 is separated, the separated filter housing 20 is removed. Cartridge replacement means coupled to the filter assembly (2);

   Chemical filter replacement device comprising a
2. According to claim 1,

   The first loading part 210 on which the first cartridge 10-1 to be coupled to the filter assembly 2 is loaded, and the second cartridge 10-2 separated from the filter assembly 2 are loaded. 2 Chemical filter replacement device further comprising a loading unit (220)
3. According to claim 2,

   The first loading part 210 includes a first cartridge mounting table 211 on which the first cartridge 10-1 is mounted,

   The second loading unit 220 is a chemical filter replacement device including a second cartridge mounting table 221 on which the second cartridge 10-2 is seated
4. According to claim 2,

   The first loading unit 210, the filter assembly mounting unit 300 and the second loading unit 220, the chemical filter replacement device, characterized in that provided in a pair at each position spaced apart on both sides
5. The method of claim 4,

   The door 110 is provided in front of the first loading unit 210,

   The first loading portion 210, the filter assembly mounting portion 300 and the second loading portion 220, the chemical, characterized in that sequentially arranged at a position spaced a predetermined distance to the rear of the door 110 Filter replacement device
6. The method of claim 5,

   The first loading unit 210 and the second loading unit 220, the chemical filter replacement device, characterized in that provided to be located within the reach of the operator's hand relative to the door 110
7. According to claim 1,

   The filter head 30 is coupled to one open end of the filter housing 20, a chemical filter replacement device characterized in that a plurality of connecting portions 31 to 34 are formed so that the chemical is introduced or discharged
8. According to claim 1,

   The filter assembly mounting portion 300, a chemical filter replacement device comprising a head clamp 310 for clamping and coupling the filter housing 20 and the filter head 30
9. The method of claim 8,

   The head flange 36 formed along the circumference of one end of the filter head 30 and the housing flange 22 formed along the circumference of one end of the filter housing 20 are coupled in a state in which opposing surfaces face each other. ,

   The head clamp 310, the chemical filter replacement device characterized in that the opposing surfaces of the head flange 36 and the housing flange 22 are pressed and clamped in a direction in close contact with each other
10. The method of claim 9,

    The head flange 36 and the housing flange 22 are respectively formed in an inclined wedge shape opposite to each other.

    A chemical filter characterized in that coupling grooves 311a and 312b having inclined surfaces 311b and 312b are formed on the head clamp 310 so as to be in close contact with the inclined surfaces of the head flange 36 and the housing flange 22, respectively. Replacement device
11. The method of claim 9,

    The head clamp 310 includes a first clamp 311 and a second clamp 312 positioned to face each other around the head flange 36 and the housing flange 22,

    A chemical filter replacement device further comprising a clamp transfer part 320 for moving the first clamp 311 and the second clamp 312 in a direction closer to each other or in a direction away from each other.
12. The method of claim 11,

    When the first clamp 311 and the second clamp 312 are moved toward each other, the head flange 36 and the housing flange 22 are in a clamping state,

    When the first clamp 311 and the second clamp 312 are moved away from each other, the head flange 36 and the housing flange 22 are replaced with a chemical filter, characterized in that the clamping is released.
13. The method of claim 9,

    Chemical filter replacement device further comprises a clamp locking means for fixing the clamped position of the head clamp (310) so that the head flange (36) and the housing flange (22) remain clamped.
14. The method of claim 13,

    Further comprising a clamp transfer unit 320 for moving the first clamp 311 and the second clamp 312 in a direction closer to each other, or to move in a direction away from each other,

    The clamp locking means, a fixing groove (324) formed in the clamp transfer part 320, the head flange (36) and the housing flange (22) are clamped projections inserted into the fixing groove (324) in a clamped state ( 341) chemical filter replacement device characterized in that it comprises a clamp fixture (340) with
15. The method of claim 14,

    The clamp transfer part 320 is provided to be able to reciprocate in the transverse direction,

    The clamp fixing part 340 is a chemical filter replacement device, characterized in that provided to be reciprocating in the longitudinal direction
16. The method of claim 15,

    In the state where the head flange 36 and the housing flange 22 are clamped, the clamp fixing part 340 is moved downward, so that the fixing protrusion 341 is inserted into the fixing groove 324 and the head clamp 310 is in the clamp-locked state,

    When the clamp fixing part 340 is moved upward and the fixing protrusion 341 is located outside the fixing groove 324, the head clamp 310 is in a chemical lock characterized in that the clamp is unlocked. Filter replacement device
17. According to claim 1,

    The cartridge replacement means,

    The filter housing 20 surrounding the second cartridge 10-2 is separated from the filter assembly 2 or the filter housing 20 separated from the filter assembly 2 is the first cartridge ( 10-1) Chemical filter replacement device comprising at least one filter housing detachable module 400 to be coupled to surround
18. The method of claim 17,

    The filter housing detachable module 400 includes a housing fixing part 410 to which the filter housing 20 is fixed, and a housing transporting part 420 moving the housing fixing part 410 in the vertical direction. Chemical filter replacement device
19. The method of claim 18,

    The filter housing detachable module 400 further comprises a housing fixing height adjusting unit 430 for adjusting the height of the housing fixing unit 410 in accordance with the height standard of the filter housing 20. Chemical filter replacement device
20. According to claim 2,

    The cartridge replacement means includes a second cartridge transfer module 500 for transferring the second cartridge 10-2 mounted on the filter assembly mounting portion 300 to the second loading unit 220. Chemical filter replacement device characterized in that
21. The method of claim 20,

    The second loading unit 220 is a chemical filter replacement device, characterized in that provided at a position spaced from one side to the rear of the filter assembly mounting portion 300
22. The method of claim 21,

    The second cartridge transfer module 500 includes a rotating part 520 rotatable between a first position in which the filter assembly mounting portion 300 is located, and a second position in which the second loading part 220 is located, It is provided in the second lifting unit 530 and the second lifting unit 540 for raising and lowering the second lifting unit 540 in the vertical direction at the first position or the second position, the second cartridge 10-2 ) A chemical filter replacement device comprising a second gripper 550 for holding
23. The method of claim 22,

    The filter assembly mounting portion 300 and the second loading portion 220 are provided in pairs, respectively, at positions spaced apart from both sides,

    The second cartridge transfer module 500 is provided as a single module to transfer the second cartridge 10-2 between the filter assembly mounting portion 300 and the second loading portion 220 located on both sides. Chemical filter replacement device characterized in that
24. The method of claim 23,

    The second cartridge transfer module 500, after transferring the second cartridge 10-2 from the filter assembly mounting portion 300 to the second loading unit 220, the second located on both sides Chemical filter replacement device characterized in that it returns to the standby position located in the middle between the loading unit 220
25. The method of claim 22,

    The second cartridge transfer module 500, the second lifting unit height adjustment unit 560 for adjusting the height of the second lifting unit 540 according to the height standard of the second cartridge (10-2) Chemical filter replacement device characterized in that it further comprises
26. According to claim 2,

    The cartridge replacement means includes a first cartridge transfer module 600 for transferring the first cartridge 10-1 loaded on the first loading unit 210 to the filter assembly mounting unit 300. Chemical filter replacement device
27. The method of claim 26,

    The first filter unit 210 and the filter assembly mounting unit 300 is a chemical filter replacement device characterized in that provided in a position spaced apart on a straight path in the front and rear
28. The method of claim 27,

    The first cartridge transfer module 600 is provided at a lower portion of the first elevating portion 620 and the first elevating and moving portion 610 which elevates the first elevating portion 620 in the vertical direction, and before and after forward and backward movement. A chemical filter replacement device comprising a true feeder 630 and a first gripper 640 which is provided on the front-rear feeder 630 to hold the first cartridge 10-1.
29. The method of claim 28,

    The forward-backward movement unit 630 is coupled to a lower portion of the first elevation unit 620, the first forward-reverse movement unit 630-1 and forward and backward along the first elevation unit 620, and the first It is coupled to the lower part of the forward-backward forwarding unit 630-1, and is forward-backward along the first forward-backward forwarding unit 630-1, and the second forward-backward forwarding unit 630-2 with the first gripper 640 coupled to the lower side Chemical filter replacement device comprising a)
30. The method of claim 28,

    The first cartridge transfer module 600, the first lifting unit height adjustment unit 650 for adjusting the height of the first lifting unit 620 according to the height standard of the first cartridge (10-1) Chemical filter replacement device characterized in that it further comprises
31. According to claim 2,

    When the second cartridge 10-2 is transferred to the second loading unit 220, or when the operator manually removes the second cartridge 10-2 by opening the door 110, the second cartridge 10-2 2 Chemical filter replacement device, characterized in that provided with a chemical pedestal 230 for receiving a chemical dropping from the cartridge (10-2) and discharged to one side
32. According to claim 2,

    The cartridge replacement means, a second cartridge transfer module (500-1) for transferring the second cartridge (10-2) mounted on the filter assembly mounting portion 300 to the second loading unit 220 , A first cartridge transfer module (600-1) for transferring the first cartridge (10-1) loaded on the first loading unit 210 to the filter assembly mounting unit 300,

    The second cartridge transfer module (500-1) and the first cartridge transfer module (600-1) is a chemical filter replacement device, characterized in that provided to be able to move forward and backward
33. According to claim 1,

    The first cartridge 10-1 and the second cartridge 10-2, the loading unit 200 is loaded, and the filter assembly mounting portion 300 is provided on each side in a pair,

    Includes a cartridge transfer module (600-2) for transferring the filter assembly (2) between the loading unit 200 and the filter assembly mounting unit 300,

    The cartridge transfer module (600-2) is a chemical filter replacement device characterized in that it is provided to be rotatable and lifted in both directions to be commonly used for the two filter assemblies (2)
34. According to claim 1,

    The first cartridge 10-1 and the second cartridge 10-2, the loading unit 200 is loaded, and the filter assembly mounting portion 300 is provided on each side in a pair,

    Includes a cartridge transfer module (600-3) for transferring the filter assembly (2) between the loading unit 200 and the filter assembly mounting unit 300,

    The cartridge transfer module (600-3), the lifting transfer unit 610-3, and the lifting transfer unit (610-3) between the loading unit 200 and the filter assembly mounting portion 300 to transfer in the front-rear direction The loading unit 200 and the filter assembly mounting unit provided with a pair of first linear transport units 620-3 and the elevating transport units 610-3 and the first linear transport units 620-3 on both sides. Chemical filter replacement device comprising a second linear transfer unit (630-3) for transferring in the left and right direction between (300)
35. According to claim 1,

    The filter head 30 has a first connection portion 31 through which a chemical flows, a second connection portion 32 through which a chemical passing through the first cartridge 10-1 or the second cartridge 10-2 is discharged, A third connecting portion 33 for discharging the chemical remaining in the space S2 between the first cartridge 10-1 or the second cartridge 10-2 and the inner surface of the filter housing 20, the third A fourth connection portion 34 is formed for discharging chemicals remaining in the interior space S1 of the first cartridge 10-1 or the second cartridge 10-2,

    The filter housing 20 has a chemical filter replacement device characterized in that a fifth connection portion 23 is formed for supplying dry air or washing water to the inside of the filter housing 20
36. The method of claim 35,

    The filter assembly mounting portion 300 is spaced on both sides and provided in a pair,

    The fifth connection portion 23 of the filter assembly 2 mounted on the pair of filter assembly mounting portions 300, the dry air supply line (L6), the washing water supply line (L7), and the outside air Chemical filter replacement device characterized in that the common vent line (L8) is connected
37. The method of claim 35,

    A chemical filter replacement device characterized in that a bypass line (L9) for selectively supplying chemicals to any one of the pair of filter assemblies (2) is connected to the pair of filter assemblies (2).
38. According to claim 1,

    The filter assembly (2) is replaced with the first cartridge (10-1), a chemical filter replacement device characterized in that a pressure sensor (P) for measuring the pressure inside the filter assembly (2) is connected
39. a) separating the filter housing 20 from the filter assembly 2;

    b) After the second cartridge 10-2 used for filtration of the chemical inside the filter assembly 2 is separated from the filter assembly 2, a new cartridge, the first cartridge 10-1, is removed. 2, when the cartridge 10-2 is coupled to the separated filter assembly 2, coupling the separated filter housing 20 to the filter assembly 2;

    Chemical filter replacement method comprising a
40. The method of claim 39,

    In step b),

    The second cartridge 10-2 is separated from the filter assembly 2 by driving the second cartridge detachable module 500,

    The first cartridge 10-1 is a chemical filter replacement method characterized in that the second cartridge 10-2 is coupled to the separated filter assembly 2 by driving the first cartridge detachment module 600.
41. The method of claim 39,

    In step b),

    The second cartridge 10-2 separated from the filter assembly 2 is transferred from the filter assembly holder 300 to the second loading unit 220,

    The first cartridge (10-1) is a chemical filter replacement method characterized in that the transfer from the first loading unit 210 to the filter assembly mounting portion 300
42. The method of claim 40,

    The second cartridge desorption module 500 transfers the second cartridge 10-2 from the filter assembly holder 300 to the second loading unit 220 by lifting and rotating movements,

    The first cartridge desorption module 600 transfers the first cartridge 10-1 from the first loading unit 210 to the filter assembly mounting unit 300 by lifting and moving forward and backward. How to replace the chemical filter
43. The method of claim 41,

    The first cartridge 10-1 is manually brought into the first loading unit 210,

    The second cartridge 10-2 loaded on the second loading unit 220 is a chemical filter replacement method characterized in that it is carried out manually
44. The method of claim 39,

    Prior to the step a), draining the chemical inside the filter assembly 2 mounted on the filter assembly mounting portion 300, and further comprising washing and drying the inside of the filter assembly 2 How to replace chemical filters
45. The method of claim 39,

    After the step b), further comprising the step of repeatedly removing the bubbles by repeatedly performing supply and drain for the normal and smooth supply of chemicals inside the filter assembly 2 mounted on the filter assembly mounting part 300 How to replace chemical filters
46. The method of claim 45,

    After the step of removing the bubbles, the chemical filter replacement method further comprising the step of cleaning the piping and the bottom of the chemical filter replacement device

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