WO2020004868A1

WO2020004868A1 - Gate valve system

Info

Publication number: WO2020004868A1
Application number: PCT/KR2019/007458
Authority: WO
Inventors: 최대규
Original assignee: (주) 엔피홀딩스
Priority date: 2018-06-27
Filing date: 2019-06-20
Publication date: 2020-01-02

Abstract

The present invention relates to a mono-type gate valve system in which a sealing member is formed to have a stepped shape so that a path can be opened and closed by means of only a raising operation of a door. The mono-type gate valve system may comprise: a valve housing that includes a path formed in at least one portion thereof and a door replacement region formed in another portion thereof, the path having a first lower surface and a second lower surface; a mono-type door in which a first sealing member corresponding to the first lower surface and the second lower surface of the path is installed to enable the path to be opened and closed; an ascending/descending stand that supports the door; a raising/lowering shaft for raising and lowering the ascending/descending stand; and a movement device for door replacement, which moves the door from a first position to a second position so that the door can open and close the path when raised and lowered at the first position and can be moved to the door replacement region when raised and lowered at the second position.

Description

Gate valve system

The present invention relates to a gate valve system, and more particularly to a gate valve system that can be replaced the door without breaking the overall vacuum.

In general, chambers are industrial facility facilities used to manufacture advanced semiconductor devices, display devices or other medical devices such as semiconductor chips, wafers, LCD panels, OLED panels, etc. that require a vacuum or high clean working environment. The gate valve attached to the gate valve serves as an entrance and exit of the chamber. The gate valve is a kind of device that opens a door to move a semiconductor chip or wafer into the chamber space and closes the door to maintain the airtight state in the chamber.

On the other hand, such a conventional gate valve generally maintains the airtight state using the O-ring, the O-ring made of elastic material is easily worn or deformed by the internal process environment or adverse conditions such as vacuum, high pressure, high temperature, and periodically replaced There was a hassle to do.

As a related art to solve this problem, as disclosed in Korean Patent Laid-Open Publication No. 10-2006-0069287, a technique of opening and closing a cover installed in a part of a valve housing and exchanging only a sealing member (O-ring) from a valve body. This has been developed.

However, the conventional technology of replacing only this O-ring cannot be used in a door with an integrated O-ring, which is a recent trend. The damaged or incomplete installation of the O-rings had problems that were difficult to maintain confidentiality.

In addition, such a conventional O-ring exchange technology requires a very large area to be opened in order to exchange the O-rings. This large area increases the volume of the equipment, which increases the manufacturing cost of the equipment, and also increases the internal space of the equipment. There have been many problems such as time and cost to build a vacuum pressure.

On the other hand, conventionally, a mono-type gate valve system having a relatively simple structure and excellent operability since the sealing member is stepped so that the passage can be opened and closed only by the upward movement of the door has been widely applied.

The idea of the present invention is to solve these problems, it is possible to replace the entire door including the O-ring even in the mono-type door can greatly reduce the replacement cost and time, and reduce the volume of the equipment to reduce the cost and equipment cost Pneumatic formation time and cost can be reduced, for example, to provide a gate valve system that allows for door replacement without breaking the overall vacuum of the valve housing. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

According to an aspect of the present invention, a mono-type gate valve system includes: a valve housing having a first lower surface and a second lower surface formed in at least a portion thereof, and a door replacement area formed in the other portion; A mono type door having a first sealing member corresponding to the first lower surface and the second lower surface of the passage so as to open and close the passage; Lifting platform for supporting the door; An elevating shaft for elevating the elevating platform; And a door replacement to move the door from the first position to the second position so that the door can be opened and closed when the door is moved up and down in the first position, and the door can be moved to the door replacement area when the door is moved up and down in the second position. For mobile device; may include.

In addition, according to the present invention, the valve housing is the door replacement area is disposed above the passage, the opening and closing door is installed in a portion of the door replacement area, the entrance or the lifting platform of the door replacement area A second sealing member for sealing the door replacement area may be installed.

Further, according to the present invention, the door replacement moving device may be installed on the elevating shaft, the elevating platform forward and backward devices for advancing the elevating platform.

In addition, according to the present invention, the door replacement moving device, the lifting shaft forward and backward apparatus for advancing the lifting shaft up and down; may include.

In addition, according to the present invention, the door replacement moving device, the lifting shaft guide hole formed in the valve housing to guide the forward and backward movement of the lifting shaft; And a bellows pipe installed in the valve housing so as to surround the elevating shaft guide hole to protect the elevating shaft and the inside of the valve housing.

In addition, according to the present invention, the door replacement moving device, the lifting shaft angle adjusting device for adjusting the angle of the lifting shaft in accordance with the direction of the door replacement area; may include.

In addition, according to the present invention, the door replacement moving device is installed on the lifting platform, it may be a door forward and backward device for moving the door forward and backward.

In addition, according to the present invention, the door forward and backward devices may be a sliding type sliding along the lifting platform or an extension type that is extended or contracted from the lifting platform.

In addition, according to the present invention, the valve housing has the door replacement area disposed below the passage, the opening and closing door is formed in a part of the door replacement area, the door replacement in the inlet portion of the door replacement area A temporary closure device may be installed to temporarily seal the door replacement area.

Further, according to the present invention, the temporary sealing device may be a flexible sealing device in which the sealing door is extended or contracted or a rotary sealing device in which the sealing door is rotated.

On the other hand, the door circulation replaceable gate valve system according to the spirit of the present invention for solving the above problems, the valve housing is formed, the valve housing is formed in the door replacement area; A door in which a sealing member is installed to open and close the passage; A movable table supporting the door; A door moving device capable of moving the door in the passage direction; And a door circulation replacement device installed in the door replacement area and configured to take over the old door from the movable table and to move the new door waiting in the movable table direction by using the conveyor device.

In addition, according to the present invention, the conveyor apparatus, the first sprocket wheel capable of driving rotation; A second sprocket wheel capable of driven rotation; And a belt wound to circulate between the first sprocket wheel and the second sprocket wheel.

According to the present invention, the door circulation replacement device may further include a door fastening device installed on the belt and fastened to the dropping spherical door to seat the spherical door on the belt.

In addition, according to the present invention, the door fastening device may be an insertion protrusion which can be inserted into an insertion groove of the door or an accommodation groove portion into which the door can be inserted.

On the other hand, the gate valve system according to the spirit of the present invention for solving the above problems, the valve housing is formed at least a portion, the door replacement area is formed in the other portion; A door provided with a first sealing member to open and close the passage, the door having a shape corresponding to the passage; A bracket installed in the door replacement area and having a plurality of door accommodating grooves for loading the plurality of doors, the bracket being installed to be able to move forward and backward along the forward and backward rails; Bracket forward and backward devices for advancing the bracket forward and backward; A fastening device selectively fastened to at least one door positioned on a moving line among the doors accommodated in the bracket; And an elevating device capable of elevating the door engaged with the fastening device in the passage direction.

According to the present invention, the valve housing has at least a portion of the passage having a first lower surface and a second lower surface, and the door is configured to open and close the passage. The door may be a mono type in which the first sealing member corresponding to the second lower surface is installed.

In addition, according to the present invention, the bracket, when receiving the door, the guide inclined surface may be formed in the door receiving groove so as to guide the door to the home position.

In addition, the gate valve system according to the present invention further comprises a separator installed between the door receiving groove of the bracket and the door receiving groove of the bracket so as to prevent contamination of the door by the contaminated door or the external environment. can do.

Further, according to the present invention, the bracket forward and backward apparatus, the front end is bitten-coupled to the clearance groove formed on the lower surface of the bracket, the rear end is rotated by the rotation axis shaft member; And a rotating device for axially rotating the camshaft member.

In addition, according to the present invention, the fastening device may include a connecting block formed with at least one insertion protrusion that can be forcibly inserted into a fastening hole formed in the lower surface of the door.

In addition, according to the present invention, the insertion protrusion of the fastening device, the branch groove is formed so that the tip is elastically deformed, the inclined guide surface may be formed so that the insertion position can be guided.

In addition, according to the present invention, the bracket may be disposed below the center of the door, and the connecting block may be disposed below the left and right ends of the door, respectively.

In addition, the gate valve system according to the present invention may further include a temporary fixing device for temporarily fixing the door to the bracket so that the door is fixed to the door receiving groove of the bracket does not shake.

On the other hand, the door replacement method of the gate valve system according to the spirit of the present invention for solving the above problems, using a bracket forward and backward device for advancing the bracket forward or forward the bracket on which the plurality of the door is mounted to the first position or Reversing; Selectively fastening at least one door positioned on a moving line among the doors accommodated in the bracket positioned at the first position by using a fastening device; Separating the door engaged with the fastening device from the bracket by using a lifting device to move up and down in the passage direction; Separating the door, which is finished using the elevating device, from the fastening device and re-receiving the door in the bracket; Advancing or retracting the bracket to a second position by using a bracket forward and backward device for advancing the bracket; Selectively fastening at least one door positioned on a moving line among the doors accommodated in the bracket located at the second position by using the fastening device; And elevating the door engaged with the fastening device in the passage direction by using the elevating device.

According to some embodiments of the present invention made as described above, it is possible to replace the entire door including the O-ring in the mono-type door can greatly reduce the replacement cost and time, reducing the volume of equipment and It is possible to reduce the time and cost of vacuum pressure formation, and to improve the durability and performance of the equipment by simplifying the operation and operation of the equipment by, for example, replacing the door without breaking the entire vacuum of the valve housing. . Of course, the scope of the present invention is not limited by these effects.

1 and 2 are operational diagrams illustrating a mono type gate valve system in accordance with some embodiments of the present invention.

3 and 4 are operational diagrams illustrating a mono type gate valve system in accordance with some other embodiments of the present invention.

5 and 6 are operational diagrams illustrating a mono type gate valve system in accordance with some further embodiments of the present invention.

7 and 8 are operational diagrams illustrating a mono type gate valve system in accordance with some further embodiments of the present invention.

9 and 10 are operational diagrams illustrating a mono type gate valve system in accordance with some further embodiments of the present invention.

11 and 12 are operational diagrams illustrating a mono type gate valve system in accordance with some further embodiments of the present invention.

13 and 14 are operational diagrams illustrating a mono type gate valve system in accordance with some further embodiments of the present invention.

15 and 16 are operational diagrams illustrating a mono type gate valve system in accordance with some further embodiments of the present invention.

17 is a perspective view illustrating an example of a door of a mono type gate valve system in accordance with some other embodiments of the present invention.

18 is a cross-sectional view illustrating a door circulation replaceable gate valve system in accordance with some embodiments of the present disclosure.

It is a top view which shows an example of the door removal apparatus of the door rotation replaceable gate valve system of FIG.

20 is a plan view illustrating another example of the door detachment device of the door circulation replaceable gate valve system of FIG. 18.

FIG. 21 is a perspective view illustrating a door circulation replacing device of the door circulation replacing gate valve system of FIG. 18.

FIG. 22 is a cross-sectional view illustrating an operation process of the door rotation replaceable gate valve system of FIG. 18.

FIG. 23 is a cross-sectional view illustrating an example of a door circulation replacing apparatus of the door circulation replacing gate valve system of FIG. 18.

24 is a cross-sectional view illustrating another example of the door circulation replacing apparatus of the door circulation replacing gate valve system of FIG. 18.

FIG. 25 is a cross-sectional view illustrating still another example of the door circulation replacing apparatus of the door circulation replacing gate valve system of FIG. 18.

26 is an external perspective view illustrating a gate valve system in accordance with some embodiments of the present disclosure.

FIG. 27 is an exploded perspective view of parts illustrating the gate valve system of FIG. 26.

FIG. 28 is a cross-sectional view illustrating the gate valve system of FIG. 26.

FIG. 29 is a perspective view illustrating the bracket and the fastening device of the gate valve system of FIG. 26.

30 is an enlarged perspective view illustrating an enlarged fastening device of the gate valve system of FIG. 29.

FIG. 31 is a cross-sectional view illustrating a fastening device of the gate valve system of FIG. 30.

32 is a perspective view illustrating a bracket of the gate valve system of FIG. 30.

FIG. 33 is a front view illustrating the bracket of the gate valve system of FIG. 30.

FIG. 34 is a side view illustrating the advanced state of the bracket of the gate valve system of FIG. 30.

FIG. 35 is a side view illustrating a reverse state of the bracket of the gate valve system of FIG. 30.

36 is a perspective view illustrating the bracket and the bracket forward and backward devices of the gate valve system of FIG. 29.

FIG. 37 is a cross-sectional view illustrating a process of back and forth of a bracket of the gate valve system of FIG. 26.

FIG. 38 is a cross-sectional view illustrating an example of a temporary fixing device of the gate valve system of FIG. 26.

FIG. 39 is a cross-sectional view illustrating another example of the temporary fixing device of the gate valve system of FIG. 26.

40 is a cross-sectional view illustrating a stopper of the gate valve system of FIG. 26.

41 is a cross-sectional view illustrating a door replacement process of a gate valve system in accordance with some embodiments of the present disclosure.

42 is a cross-sectional view illustrating a door replacement process of a gate valve system in accordance with some other embodiments of the present disclosure.

43 is a cross-sectional view illustrating a door replacement process of a gate valve system in accordance with some other embodiments of the present invention.

44 is a flowchart illustrating a door replacing method of the gate valve system according to some embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art, and the following examples can be modified in various other forms, and the scope of the present invention is It is not limited to an Example. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of description.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. Also, as used herein, "comprise" and / or "comprising" specifies the presence of the mentioned shapes, numbers, steps, actions, members, elements and / or groups of these. It is not intended to exclude the presence or the addition of one or more other shapes, numbers, acts, members, elements and / or groups.

Embodiments of the present invention will now be described with reference to the drawings, which schematically illustrate ideal embodiments of the present invention. In the figures, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, embodiments of the inventive concept should not be construed as limited to the specific shapes of the regions shown herein, but should include, for example, changes in shape resulting from manufacturing.

Hereinafter, a mono type gate valve system 100 to 800 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 and 2 are operational diagrams illustrating a mono type gate valve system 100 in accordance with some embodiments of the present invention.

First, as shown in FIG. 1 and FIG. 2, the mono type gate valve system 100 according to some embodiments of the present invention has a valve housing 10, a mono type door 20, Steel strip 30, the lifting shaft 40 and the door replacement moving device 50 may be included.

For example, as shown in FIGS. 1 and 2, the valve housing 10 has a mono type passage 10a having a first lower surface F1 and a second lower surface F2 at least partially formed therein. A hollow box-like structure in which a door replacement area A is formed at another part, wherein the door 20, the lifting platform 30, the lifting shaft 40, and the door replacement moving device are described above. 50 and the like, and may be a structure having sufficient strength and durability to be connected to various chambers, vacuum lines, gas lines, and the like. However, the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and various types and types of passages or valve housings may be applied.

More specifically, for example, as shown in FIGS. 1 and 2, in the valve housing 10, the door replacement area A is disposed above the passage 10a and the door replacement area is provided. An opening / closing door (D) is installed in a portion of (A), the second sealing member (S2) for sealing the door replacement area (A) to the entrance of the door replacement area (A) or the lifting platform (30). Can be installed.

For example, as illustrated in FIGS. 1 and 2, the door 20 has the first lower surface F1 and the second lower surface of the passage 10a so as to open and close the passage 10a. It may be a mono type door 20 formed in a shape corresponding to F2 and provided with a first sealing member S1 such as an O-ring or a gasket for airtightness.

17 is a perspective view illustrating an example of a door 20 of a mono type gate valve system in accordance with some other embodiments of the present invention.

More specifically, for example, as shown in FIG. 17, the first sealing member S1 applied to the mono type door 20 may have the passage formed in the horizontal direction only by the lifting operation of the door 20. It may be formed to be stepped in three dimensions to open and close 10a). However, the door 20 is not limited to FIG. 17, and all the doors of the mono type that can open and close the passage with a single operation may be applied.

In addition, for example, as shown in Figures 1 and 2, the lifting platform 30 may be a table-like structure that is formed to extend in the horizontal direction to support the door 20. However, the present invention is not necessarily limited to the drawings and may be formed in a wide variety of shapes.

In addition, for example, as shown in FIGS. 1 and 2, the lifting shaft 40 extends in a vertical direction from a lower surface of the lifting platform 30 so that the lifting platform 30 can be lifted. It may be a structure of a form. However, the present invention is not necessarily limited to the drawings and may be formed in a wide variety of shapes.

Meanwhile, as illustrated in FIGS. 1 and 2, the door replacement moving apparatus 50 may open and close the passage 10a when the door 20 moves up and down from the first position, and the second position. It may be a device for moving the door 20 from the first position to the second position so as to be moved to the door replacement area (A) when descending from.

1 and 2, the door replacement moving device 50 is installed on the elevating shaft 40, and the elevating platform forward and backward devices for advancing the elevating platform 30 forward and backward ( 51).

The above-described lifting platform forward and backward device 51 may be applied to various hydraulic or pneumatic cylinder devices, various driving devices and actuators such as solenoids, motors or linear motors, and detailed description thereof will be omitted.

Therefore, referring to the operation of the mono type gate valve system 100 according to some embodiments of the present invention, first, as shown in (a) of FIG. 1, when the door is opened, the door 20 is opened. Waits in the state where the passage 10a is opened by the lowering of the lifting shaft 40, and as shown in FIG. 1B, the door 20 is the lifting shaft 40. The passage 10a may be closed by a rising operation, that is, a single operation.

Subsequently, as shown in FIG. 2C, when the door is replaced, the lifting platform 30 may be reversed from the first position to the second position by the lifting platform forward and backward device 51. . At this time, as shown in (d) of FIG. 2, the door 20 may also be reversed to the second position.

Subsequently, as shown in FIG. 2E, when the door 20 reaches the second position, the door 20 is moved toward the door replacement area A by the lifting shaft 40. And the door replacement area A may be sealed by the second sealing member S2 installed at the inlet of the door replacement area A, and thus not break the vacuum environment of the valve housing 10. It is possible to replace the door 20 with a new one by making only the door replacement area A in a standby state.

Therefore, it is possible to replace the entire door including the O-ring in the mono type door, which can greatly reduce the replacement cost and time, and reduce the unit cost and the vacuum pressure forming time and cost by reducing the volume of the equipment, for example, By simply lowering the movable platform, the door can be replaced without breaking the overall vacuum of the valve housing, simplifying the operation and operation of the machine and improving the durability and performance of the machine.

3 and 4 are operational diagrams illustrating a mono type gate valve system 200 in accordance with some other embodiments of the present invention.

As shown in FIGS. 3 and 4, the door replacement moving device 50 of the mono type gate valve system 200 according to some other embodiments of the present invention is configured to move the lifting shaft 40 forward and backward. The elevating shaft forward and backward device 52 and the elevating shaft guide hole 53 formed in the valve housing 10 to guide the forward and backward movement of the elevating shaft 40 and the elevating shaft 40 and the It may include a bellows pipe 54 installed in the valve housing 10 in a shape surrounding the elevating shaft guide hole 53 so as to protect the inside of the valve housing 10.

Therefore, referring to the operation of the mono type gate valve system 200 according to some embodiments of the present invention, first, as shown in FIG. Waits in a state where the passage 10a is opened by the lowering of the lifting shaft 40, and as shown in FIG. 3B, the door 20 is the lifting shaft 40. The passage 10a may be closed by a rising operation, that is, a single operation.

Subsequently, as illustrated in FIG. 4C, when the door is replaced, the elevating shaft 40 may be reversed from the first position to the second position by the elevating shaft forward and backward device 52. . At this time, as shown in (d) of FIG. 4, the door 20 may also be reversed to the second position.

Subsequently, as shown in FIG. 4E, when the door 20 reaches the second position, the door 20 is moved toward the door replacement area A by the lifting shaft 40. And the door replacement area A may be sealed by the second sealing member S2 installed at the inlet of the door replacement area A, and thus not break the vacuum environment of the valve housing 10. It is possible to replace the door 20 with a new one by making only the door replacement area A in a standby state.

5 and 6 are operational diagrams illustrating a mono type gate valve system 300 in accordance with some further embodiments of the present invention.

5 and 6, the door replacement moving device 50 of the mono type gate valve system 300 according to some other embodiments of the present invention is directed in the direction of the door replacement area A. FIG. It may include a lifting shaft angle adjusting device 55 to adjust the angle of the lifting shaft 40 in accordance with.

Therefore, referring to the operation of the mono type gate valve system 300 according to some embodiments of the present invention, first, as shown in (a) of FIG. 5, when the door is opened, the door 20 is opened. Waits in the state where the passage 10a is opened by the lowering of the lifting shaft 40, and as shown in FIG. 5B, the door 20 is the lifting shaft 40. The passage 10a may be closed by a rising operation, that is, a single operation.

Subsequently, as shown in (c) of FIG. 6, when the door is replaced, the lifting shaft 40 vertically erected by the lifting shaft angle adjusting device 55 is as shown in FIG. 6 (d). Likewise, it can be tilted from the first position (first angle) to the second position (second angle).

Subsequently, as shown in FIG. 6E, when the door 20 is inclined to the second position (angle), the door 20 is moved by the lifting shaft 40 to the door replacement area ( Raised in the direction A), by the second sealing member S2 provided at the inlet of the door replacement area (A), the door replacement area (A) can be sealed, the vacuum of the valve housing 10 It is possible to replace the door 20 with a new one by making only the door replacement area A stand by without breaking the environment.

7 and 8 are operational diagrams illustrating a mono type gate valve system 400 in accordance with some further embodiments of the present invention.

As shown in FIGS. 7 and 8, the door replacement moving device 50 of the mono type gate valve system 400 according to some other embodiments of the present invention is installed on the lifting platform 30. And, it may include a door forward and backward device 56 for moving forward and backward the door 20.

Therefore, referring to the operation of the mono type gate valve system 400 according to some other embodiments of the present invention, first, as shown in FIG. 20 waits in a state where the passage 10a is opened by the lowering of the lifting shaft 40, and as shown in FIG. 7B, the door 20 has the lifting shaft ( The passage 10a can be closed by the upward motion of the 40, i.e., a single motion.

Subsequently, as illustrated in FIG. 8C, when the door is replaced, the door 20 may be retracted from the first position to the second position by the door back and forth device 56.

Subsequently, as shown in FIG. 8E, when the door 20 reaches the second position, the door 20 is moved toward the door replacement area A by the lifting shaft 40. By the second sealing member S2 installed in the lifting platform 30, the door replacement area A may be sealed, and the door replacement may be performed without breaking the vacuum environment of the valve housing 10. Only the area A can be made standby so that the door 20 can be replaced with a new one.

Here, the door forward and backward device 56 may be a sliding type door forward and backward device 56-1 sliding in connection with the lower end of the door 20 along the lifting platform 30.

9 and 10 are operational diagrams illustrating a mono type gate valve system 500 in accordance with some further embodiments of the present invention.

As shown in FIGS. 9 and 10, the door forward and rearward device 56 of the mono type gate valve system 500 according to some other embodiments of the present invention may include the door along the platform 30. It may be a sliding type door forward and backward device 56-2 sliding in connection with the middle portion of the (20).

11 and 12 are operational diagrams illustrating a mono type gate valve system 600 in accordance with some further embodiments of the present invention.

In addition, as shown in FIGS. 11 and 12, the door forward and rearward device 56 of the mono type gate valve system 600, according to some other embodiments of the present invention, or in the middle of the door 20. It may be a stretch type door forward and backward device 56-3 which is connected to a portion and is extended or contracted from the lifting platform 30.

Accordingly, the door forward and backward devices 56 are not necessarily limited to the drawings, and various power transmission devices having a wide variety of shapes, and a wide variety of actuators such as cylinders, motors, and linear motors may be applied.

13 and 14 are operational diagrams illustrating a mono type gate valve system 700 in accordance with some further embodiments of the present invention.

As shown in FIGS. 13 and 14, the valve housing 10 of the mono type gate valve system 700 according to some other embodiments of the present invention has the door replacement area A in the passage 10a. It is disposed on the basis of the lower side, the opening and closing door (D) is formed in a part of the door replacement area (A), the temporary sealing to temporarily seal the door replacement area when replacing the door at the entrance of the door replacement area (A) Device 60 may be installed.

13 and 14, the temporary sealing device 60 may be a flexible sealing device 61 in which the sealing door G is extended or contracted.

Therefore, referring to the operation of the mono type gate valve system 700 according to some other embodiments of the present invention, first, as shown in FIG. 13A, when the door is opened, the door ( 20 waits in a state where the passage 10a is opened by the lowering of the lifting shaft 40, and as shown in FIG. 13B, the door 20 has the lifting shaft ( The passage 10a can be closed by the upward motion of the 40, i.e., a single motion.

Subsequently, as shown in (c) of FIG. 14, when the door is replaced, the door 20 as shown in FIG. ) Is lowered to the second position, and as shown in FIG. 14E, the sealing door G of the temporary sealing device 60 is extended to temporarily seal the door replacement area A. The door 20 may be replaced with a new one by bringing only the door replacement area A into a standby state without breaking the vacuum environment of the valve housing 10.

15 and 16 are operational diagrams illustrating a mono type gate valve system 800 in accordance with some further embodiments of the present invention.

As shown in FIGS. 15 and 16, the temporary closure device 60 of the mono type gate valve system 800 according to some other embodiments of the present invention is a rotary closure device in which the closure door G is rotated. (62).

Therefore, referring to the operation of the mono type gate valve system 800 according to some other embodiments of the present invention, first, as shown in (a) of FIG. 15, when the door is opened, the door ( 20 waits in a state where the passage 10a is opened by the lowering of the lifting shaft 40, and as shown in FIG. 15B, the door 20 has the lifting shaft ( The passage 10a can be closed by the upward motion of the 40, i.e., a single motion.

Subsequently, as shown in (c) of FIG. 16, when the door is replaced, the door 20 as shown in (d) of FIG. ) Is lowered to the second position, and as shown in (e) of FIG. 16, the sealing door G of the temporary sealing device 60 is rotated to temporarily seal the door replacement area A. The door 20 may be replaced with a new one by bringing only the door replacement area A into a standby state without breaking the vacuum environment of the valve housing 10.

Hereinafter, a door circulation replaceable gate valve system 1100 according to various embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Here, the door circulation replaceable gate valve system illustrated in the drawings exemplifies the L type, but may be equally applicable to the mono type described above.

18 is a cross-sectional view illustrating a door circulation replaceable gate valve system 1100 according to some embodiments of the present disclosure. 19 is a plan view showing an example of the door disconnecting device 160 of the door circulation replaceable gate valve system 1100 of FIG. 18, and FIG. 20 is a door of the door circulation replaceable gate valve system 1100 of FIG. 18. It is a top view which shows another example of the separating apparatus 160, and FIG. 21 is a perspective view which shows the door circulation replacing apparatus 150 of the door circulation replacing gate valve system 1100 of FIG.

First, as shown in FIGS. 18 and 21, the door circulation replaceable gate valve system 1100 according to some embodiments of the present invention includes a valve housing 10, a door 20, and a movable table. 30, the door movement device 40, and the door circulation replacement device 150 may be included.

For example, as shown in FIG. 18, the valve housing 10 is a hollow box-shaped structure in which a passage 10a is formed and a door exchange area A is formed at a portion thereof. And, to support the movable table 30, the door moving device 40 and the door circulation replacement device 150, etc., and sufficient strength and durability to be connected to various chambers, vacuum lines or gas lines, etc. It may be a structure having. However, the valve housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and various kinds and types of passages or valve housings may be applied.

For example, as shown in FIG. 18, the door 20 is provided with a sealing member S to open and close the passage 10a and is detachably installed with the movable table 30. It may be a structure formed in a shape corresponding to the passage 10a. However, the door 20 is not necessarily limited to the drawings, and all kinds of doors may be applied.

For example, as illustrated in FIG. 18, the movable table 30 may be a structure that detachably supports the door 20. However, the movable table 30 is not necessarily limited to the drawings, all of the movable devices of a wide variety of shapes can be applied.

For example, as illustrated in FIG. 18, the door moving device 40 is a device capable of moving the door 20 in the direction of the passage 10a by using the lifting shaft 41. Although not illustrated, various actuators including various power transmission devices or driving devices, such as various cylinders, motors, or linear motors, may all be applied.

On the other hand, for example, as shown in Fig. 18, the door circulation replacement device 150 is installed in the door exchange area (A), take over the spherical door 20-2 from the movable table 30, the conveyor By using the device 151 may be a device for advancing the new door (20-1) in the direction of the movable table (30).

More specifically, for example, as shown in FIG. 18, the conveyor device 151 of the door circulation replacement device 150 includes a first sprocket wheel 152 capable of driving rotation and the first sprocket wheel. A second sprocket wheel 153 capable of driven rotation by 152 and a belt 154 wound to be circulated between the first sprocket wheel 152 and the second sprocket wheel 153 may be included.

Here, the conveyor apparatus 151 is not necessarily limited to the drawings, and a wide variety of conveyor apparatuses such as a belt type conveyor, a roller type conveyor, a chain type conveyor, a crawler type conveyor, a timing belt type conveyor, and the like may all be applied.

For example, as illustrated in FIG. 18, the door circulation replacing apparatus 150 may be installed on the belt 154 and may be engaged with the spherical door 20-2 falling down to allow the spherical door 20-20 to fall. It may further include a door fastening device 155 for seating 2) on the belt 154.

More specifically, for example, as illustrated in FIG. 18, the door fastening device 155 may include an insertion protrusion 155-1 that may be inserted into the insertion groove 20a of the door 20. have.

Here, as shown in FIG. 18, the insertion protrusion 155-1 is selectively extended when coupled with the door 20 to be inserted into the insertion groove 20a of the door 20, and the door ( After being separated from 20), when the belt 154 is moved, a stretchable insertion protrusion 155-1a may be applied so as to use a space.

However, the present invention is not necessarily limited thereto. For example, a wide variety of door fastening devices, such as a general insertion protrusion or a magnet magnet attachment device, which are not stretchable to support the door 20, may be applied.

Also, for example, as shown in FIGS. 18 and 19, the door circulation replaceable gate valve system 1100 according to some embodiments of the present invention separates the door 20 from the movable table 30. It may further include a door separation device 160 to fall in the direction of the door circulation replacement device 150.

More specifically, for example, as illustrated in FIGS. 19 and 20, the door separation device 160 may be installed on the movable table 30 so as to be able to expand and contract, and may be engaged with the door 20. The door 20 is installed to be extended and contracted to the at least one bite shaft 161 and the movable table 30 to be coupled, and to separate the door 20 from the bite shaft 161. It may include at least one pressing shaft 162 for pressing.

Here, for example, as shown in (a) of FIG. 19, when the two pressing shafts 162 are respectively provided on both sides of the movable table 30, and the biting shaft 161 is installed at the center thereof. As shown in (b) of FIG. 19, when the two pressing shafts 162 pressurize the door 20, the engagement shaft 161 loses the binding force, thereby causing the door 20 to close. ) May be separated from the movable table 30 by gravity and fall downward.

For example, as shown in FIG. 20A, when the two pinch shafts 161 are respectively provided at both sides of the movable table 30, and the pressing shaft 162 is installed at the center thereof. As shown in (b) of FIG. 20, when the pressing shaft 162 in the center presses the door 20, the two chucking shafts 161 lose the coupling force, and thus the door 20 may be separated from the movable table 30 by gravity and fall downward.

FIG. 22 is a cross-sectional view illustrating a step by step operation of the door rotation replaceable gate valve system 1100 of FIG. 18.

Therefore, as shown in FIG. 22, step by step operation of the door circulation replaceable gate valve system 1100 according to some exemplary embodiments of the present invention will be described first, as shown in FIG. 22A. Likewise, when the door is closed, the door 20 may be advanced in the direction of the passage 10a to close the passage 10a.

Subsequently, repeating this process, as shown in (b) of FIG. 22, the door 20 is a spherical door 20 in the new door 20-1 such that the sealing member S is worn or deformed. When the state is changed to -2), the door 20 may be separated using the above-described door separation device 160 to naturally fall in the direction of the door circulation replacement device 150.

Subsequently, as shown in FIG. 22C, the movable table 30 is engaged with the new door 20-1 that is waiting in the door circulation replacement device 150 by the door moving device 40. Can be.

Subsequently, as shown in (d) of FIG. 22, the spherical door 20-2 dropped using the door circulation replacing apparatus 150 is moved in the direction of the door replacing area A, and at the same time, the air is waiting. By advancing the new door 20-1 and the accommodated old door 20-2, the space for accommodating the new door 20-2 to be newly generated can be secured in advance.

Subsequently, as shown in (e) of FIG. 22, the state of the door 20 is changed from the new door 20-1 to the old door 20-2 such that the sealing member S is worn or deformed. If changed, the above-described processes can be repeated.

Subsequently, when all the doors 20 accommodated in the door circulation replacement device 150 are spherical, they may be unloaded to the outside and new doors may be loaded into the door rotation replacement device 150 in a packaged state.

Therefore, by advancing the plurality of doors 20 simultaneously in the form of a conveyor, the old door 20-2 can be replaced with the new door 20-1, thereby greatly reducing the replacement cost and time, By reducing the volume of the equipment, it is possible to reduce the cost of the equipment and the time and cost of the vacuum pressure forming, for example, the quick replacement of the door 20 without breaking the overall vacuum of the valve housing 10.

FIG. 23 is a cross-sectional view illustrating an example of the door circulation replacing apparatus 150 of the door circulation replacing gate valve system 1100 of FIG. 18.

That is, as shown in (a) of FIG. 23, the door circulation replacing apparatus 150 accommodates the spherical door 20-2 and advances it forward to secure a new space, and again the spherical door 20. A plurality of new doors 20-1 can be used for a long time without breaking the internal vacuum while repeating a series of steps to accommodate -2).

FIG. 24 is a cross-sectional view illustrating another example of the door circulation replacing apparatus 150 of the door circulation replacing gate valve system 1100 of FIG. 18.

As shown in FIG. 24, as another example of the door circulation replacement device 150 of the door circulation replacement gate valve system 1100 of FIG. 18, the insertion protrusion 155-1 is connected to the guide member G. It may be a folding insertion protrusion 155-1b that can be folded by.

Here, the folding direction may be folded at various angles, such as front and rear or left and right directions or inclined directions.

Therefore, the insertion protrusions 155-1 may be advantageously expanded and contracted in a narrow space at the time of conveying the conveyor, and thus may be advantageous in terms of securing space.

FIG. 25 is a cross-sectional view illustrating still another example of the door circulation replacing apparatus 150 of the door circulation replacing gate valve system 1100 of FIG. 18.

As shown in FIG. 25, as another example of the door circulation replacement device 150 of the door circulation replacement gate valve system 1100, the door rotation replacement device 150 may include the door 20 inserted therein. It may include a receiving groove 155-2.

Therefore, the door 20 may be freely fallen and guided and supported by the accommodation groove 155-2.

Meanwhile, as illustrated in FIG. 18, the door circulation replaceable gate valve system 1100 according to some embodiments of the present disclosure may include an identifier installed in the door 20 to allow operation only when matching identification information. 81 may further include an identification device 80 capable of identifying the identification information.

As shown in FIG. 18, the identification device 80 of the door circulation replaceable gate valve system 1100 according to some other embodiments of the present invention may allow the operation of the door (eg, only when identification information is matched). As an apparatus capable of identifying identification information of the identifier 81 of 20), for example, the identifier 81 may be an RFID tag or the like, and the identification apparatus 80 may include an RFID sensor or an RFID control apparatus. can do.

Therefore, the operation of the equipment can be enabled only when the doors 20 are identified as genuine to ensure the stability and smooth operation of the product.

FIG. 26 is an external perspective view illustrating the gate valve system 2100 according to some embodiments of the present disclosure, FIG. 27 is an exploded perspective view illustrating components of the gate valve system 2100 of FIG. 26, and FIG. 28 is a gate of FIG. 26. 29 is a cross-sectional view illustrating the valve system 2100, and FIG. 29 is a perspective view illustrating the bracket 70 and the fastening device 90 of the gate valve system 2100 of FIG. 26.

First, as shown in FIGS. 26 to 29, the gate valve system 2100 according to some embodiments of the present invention may include a valve housing 10, a door 20, a bracket 70, and a bracket. It may include a forward and backward device 80, a fastening device 90 and a lifting device 57.

For example, as illustrated in FIGS. 26 to 29, the valve housing 10 may have a generally cylindrical or frame shape in which a passage 10a is formed at least in part and a door replacement area A is formed in another part. It may be a structure.

More specifically, for example, as shown in FIG. 28, the valve housing 10 has the passage 10a having a first lower surface F1 and a second lower surface F2 formed in at least a portion thereof. In general, it may be a mono type gate valve housing installed between the transfer chamber and the process chamber or inside the transfer chamber.

For example, as illustrated in FIGS. 26 to 29, the door 20 is provided with a first sealing member S1 to open and close the passage 10a, and corresponds to the passage 10a. A kind of sealing plate is formed in a shape that is, more specifically, for example, the door 20, the first lower surface (F1) and the first of the passage (10a) to open and close the passage (10a) 2 may be a mono type door in which the first sealing member S1 corresponding to the lower surface F2 is installed. Here, the mono type door may be formed in a stepped or bent shape in a three-dimensional shape, as shown in FIG.

For example, as illustrated in FIGS. 27 to 29, the bracket 70 is installed in the door replacement area A, and accommodates a plurality of doors so that the plurality of doors 20 can be loaded. The groove portion 71 is formed, and may be a kind of movable body installed to be able to move forward and backward along the forward and backward rails R.

For example, as illustrated in FIGS. 27 to 29, the bracket forward and backward apparatus 80 is a device for advancing and retreating the bracket 70, and the fastening device 90 is the bracket 70. Among the doors 20 accommodated in the at least one door 20 positioned on the moving line is selectively fastened, the elevating device 57 is the door (fastened with the fastening device 90) It may include a lifting device 57 that can lift 20 in the direction of the passage (10a).

Further, for example, as shown in FIGS. 27 and 28, the gate valve system 2100 according to some embodiments of the present invention may prevent the bracket from being contaminated by the contaminated door or the external environment. The separator 70 may further include a separator SP installed in the groove H4 between the door accommodating groove 71 and the neighboring door accommodating groove 71.

Here, the shape of the separator SP may be similar to the shape of the door replacement area A or the shape of the door 20 so as to distinguish a part of the door replacement area A. FIG.

In addition, as shown in FIG. 29, the bracket 70 is disposed below the center of the door 20, and the fastening device 90 is stably disposed below the left and right ends of the door 20, respectively. Can be. However, the present invention is not limited thereto, and for example, the brackets 70 are disposed below the left and right ends of the door 20, and the fastening device 90 is disposed below the center of the door 20. Batch forms can be applied.

A more detailed description of these devices may be made through various components, as shown in FIGS. 30-37. However, these devices are not necessarily limited to the drawings, and various changes and modifications are possible.

FIG. 30 is an enlarged perspective view showing an enlarged fastening device 90 of the gate valve system 2100 of FIG. 29, and FIG. 31 is a cross-sectional view illustrating the fastening device 90 of the gate valve system 2100 of FIG. 30.

As shown in FIGS. 30 and 31, the fastening device 90 is provided with at least one insertion protrusion 92 that can be forcibly inserted into the fastening hole H2 formed on the lower surface of the door 20. The connecting block 91 may be included.

More specifically, for example, as shown in Figure 31, the insertion protrusion 92 of the fastening device 90, the branch groove (H3) is formed so that the tip is elastically deformed, the insertion position is guided An inclined guide surface GF may be formed to be.

Therefore, the door 20 may open and close the passage 10a of the valve housing 10 while being engaged with the fastening device 90.

At this time, even if the door 20 is initially loosely fastened to the fastening device 90, the door 20 is in close contact with the passage 10a while the insertion protrusion 92 is completely connected to the fastening hole H2 of the door 20. It can be firmly fixed by being inserted and forced into the bite.

32 is a perspective view illustrating the bracket 70 of the gate valve system 2100 of FIG. 30, FIG. 33 is a front view illustrating the bracket 70 of the gate valve system 2100 of FIG. 30, and FIG. 34 is a view of FIG. 30. FIG. 35 is a side view showing the advanced state of the bracket 70 of the gate valve system 2100, FIG. 35 is a side view showing the reverse state of the bracket 70 of the gate valve system 2100 of FIG. 30, and FIG. 36 is shown in FIG. It is a perspective view which shows the bracket 70 and the bracket back and forth apparatus 80 of the gate valve system 2100, and FIG. 37 is sectional drawing which shows the process of back and forth of the bracket 70 of the gate valve system 2100 of FIG. admit.

32 to 37, the bracket 70 may have a guide inclined surface formed on the door accommodating groove 71 to guide the door 20 to a proper position when the door is accommodated. .

Here, the bracket 70 is capable of forward and backward along the forward and backward rails (R) formed with a long hole in the forward and backward direction, the bracket 70 can minimize the frictional force with the forward and backward rails (R) For example, a plurality of bearings, two bearings (B), or the like may be installed. When the two bearings B are installed, the angle of the bracket 70 can be kept constant at all times when the bracket 70 is moved back and forth to facilitate the horizontal movement of the door 20. have.

For example, as shown in FIG. 36, the front and rear propagating device 80 of the bracket, the front end projection (T) is bite coupled to the clearance groove (H1) formed on the lower surface of the bracket 70, the rear end of the rotary shaft The camshaft member 81 rotated by 82 and the rotating device 83 which axially rotates the camshaft member 81 can be included.

Accordingly, as shown in FIG. 36A, when the camshaft member 81 rotates forward, the bracket 70 moves forward or as shown in FIG. 36B, the camshaft member 81. When the reverse rotation of the bracket 70 can be reversed.

Therefore, as shown in FIG. 37, for example, when the three doors 20 are stacked, as shown in FIG. 37A, when the chamfer member 81 is 0 degrees, the first above The door 20 may be used, and as shown in (b) of FIG. 37, when the chamfer member 81 is 90 degrees, the second door 20 may be used, and FIG. 37 (c) As shown in FIG. 3, when the chamfer member 81 is 180 degrees, the bracket 70 may be moved back and forth step by step to use the third door 20.

Therefore, even when the gate valve of the mono type can be replaced easily, even if it is a mono type gate valve, it can be used for a long time.

FIG. 38 is a cross-sectional view illustrating an example of the temporary fixing device E of the gate valve system 2100 of FIG. 26, and FIG. 39 illustrates another example of the temporary fixing device E of the gate valve system 2100 of FIG. 26. It is a cross section.

38 and 39, in the gate valve system 2100 according to some embodiments of the present invention, the door 20 is fixed to the door receiving groove 71 of the bracket 70. It may further include a temporary fixing device (E) for temporarily fixing the door 20 to the bracket 70 so as not to shake, as shown in Figure 38, the temporary fixing device (E), the valve It may be an elastic body E1 installed in the housing 10 and elastically pressing the door 20.

Accordingly, unnecessary collision between components may be prevented by temporarily fixing the doors 20 waiting in the door replacement area A to the bracket 70.

In addition, as shown in FIG. 39, the temporary fixing device E is installed in the valve housing 10 or the bracket 70, and is formed by the magnetic material M installed in the door 20 and the magnetic force. It may be a magnetic member E2 to be coupled.

Therefore, by temporarily fixing the doors 20 waiting in the door replacement area A by the magnetic force of the magnetic member E2, unnecessary collision between components can be prevented.

40 is a cross-sectional view illustrating the stopper ST of the gate valve system 2100 of FIG. 26.

As shown in FIG. 40, a stopper ST may be installed in the passage 10a of the valve housing 10 to prevent the door 20 from being pushed. Therefore, it is possible to prevent the sliding phenomenon and the separation phenomenon of the door 20 to improve the durability and precision of the device.

41 through 43 are cross-sectional views illustrating a door replacement process of gate valve systems according to various embodiments of the present disclosure.

41 to 43, step by step description of the door replacement process of the gate valve system according to various embodiments of the present invention, first, as shown in Figure 41, the three doors 20 In the case of (1 Plate), by using the bracket forward and backward device 80 for advancing and retracting the bracket 70, the bracket 70 having the plurality of doors 20 mounted thereon is moved forward or to the first position. Can be reversed.

Subsequently, at least one first door positioned on a moving line among the doors 20 accommodated in the bracket 70 positioned at the first position by using the fastening device 90 in the process of (1 Plate Up). (20) is selectively fastened, and the door (20) fastened with the fastening device (90) by using the elevating device (57) is separated from the bracket (70) to move in the direction of the passage (10a). Can be lowered.

Subsequently, the door 20, which is finished using the elevating device in the (1 Plate Down) process, may be separated from the fastening device 90 and re-received in the bracket 70.

Subsequently, in the process of (rotating 90 degrees), the bracket 70 may be advanced or retracted to the second position by using the bracket forward and backward device 80 which moves forward and backward the bracket 70.

Subsequently, at least one second positioned on a moving line among the doors 20 accommodated in the bracket 70 positioned at the second position using the fastening device 90 in the process of (2 Plate Up) The door 20 may be selectively fastened, and the door 20 fastened to the fastening device 90 may be lifted up and down in the direction of the passage 10a by using the lifting device.

Subsequently, the door 20, which is finished using the elevating device in the (2 Plate Down) process, may be separated from the fastening device 90 and re-received in the bracket 70.

Subsequently, in the process of rotation rotation of 180 degrees, the bracket 70 may be advanced or retracted to the third position by using the bracket forward and backward device 80 which moves forward and backward the bracket 70.

Subsequently, at least one third of the doors 20 positioned on the moving line among the doors 20 accommodated in the bracket 70 positioned at the second position using the fastening device 90 in the process of (3 Plate Up) The door 20 may be selectively fastened, and the door 20 fastened to the fastening device 90 may be lifted up and down in the direction of the passage 10a by using the lifting device.

Therefore, it is not necessary to break the vacuum and replace the door until all three doors 20 are used, which can greatly improve productivity by reducing downtime of the equipment.

On the other hand, FIG. 42 is a case where the direction of the passage 10a is applied to the valve housing 10 in which the direction of the passage 10a is reversed while accommodating the two doors 20. In this case, (1 Plate Up), One of the two doors 20 may be selected and used through a series of processes such as (1 Plate Down), (Push-Change), (2 Plate Up), and (2 Plate Down).

However, the present invention is not necessarily limited thereto, and as shown in FIG. 43, a series of processes such as (1 Plate Up), (1 Plate Down), (Push-Change), (2 Plate Up), and (2 Plate Down) It is also possible to raise and lower both of the two doors 20 through the left one of the door replacement area A and to select and use the remaining doors 20.

The number and use of the doors 20 may be applied in various numbers and shapes according to the working environment or various equipments.

44 is a flow chart illustrating a door replacement method of the gate valve system 2100 in accordance with some embodiments of the present invention.

Thus, as shown in FIGS. 26 to 44, the door replacement method of the gate valve system according to some embodiments of the present invention uses a plurality of bracket forward and backward devices 80 to move the bracket 70 forward and backward. Advancing or retracting the brackets 70 on which the two doors 20 are loaded to the first position (S100), and received in the brackets 70 located at the first position by using the fastening device 90. Selectively fastening at least one door 20 positioned on a moving line among the doors 20 (S200) and the fastening device 90 fastened with the lifting device 57; Separating the door 20 from the bracket 70 to move up and down in the direction of the passage 10a (S300), and the fastening device 90 using the door 20 after the use of the lifting device is finished. ) And re-receiving the bracket (70) to the bracket (70) and the Advancing or retracting the bracket 70 to the second position using the bracket forward and backward device 80 for advancing and retracting the bracket 70 (S500), and using the fastening device 90, the second Selectively fastening at least one door 20 positioned on a moving line among the doors 20 accommodated in the bracket 70 positioned at a position (S600) and the fastening using the lifting device It may include the step (S700) of lifting the door 20 coupled to the device 90 in the direction of the passage (10a).

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

Claims

A valve housing having a first lower surface and a second lower surface at least partially formed therein, and a door replacing area formed at another portion thereof;

A mono type door having a first sealing member corresponding to the first lower surface and the second lower surface of the passage so as to open and close the passage;

Lifting platform for supporting the door;

An elevating shaft for elevating the elevating platform; And

For replacing the door to open and close the passage when the door is moved up and down in the first position, and to move the door from the first position to the second position so that the door can be moved to the door replacement area when moving up and down in the second position; Mobile devices;

Including, a mono type gate valve system.
The method of claim 1,

In the valve housing, the door replacement area is disposed above the passage, an opening / closing door is installed at a part of the door replacement area, and the door replacement area is sealed at the entrance of the door replacement area or the lifting platform. A second sealing member for

The door replacement moving device,

A mono type gate valve system, which is provided on the elevating shaft, and which is an elevating device for elevating platform for advancing the elevating platform.
The method of claim 2,

The door replacement moving device,

A lifting shaft forward and backward apparatus for advancing the lifting shaft forward and backward;

A lifting shaft guide hole portion formed in the valve housing to guide the forward and backward movement of the lifting shaft; And

A bellows pipe installed in the valve housing so as to surround the elevating shaft guide hole to protect the elevating shaft and the inside of the valve housing;

Further comprising, the mono type gate valve system.
The method of claim 2,

The door replacement moving device,

And an elevator shaft angle adjusting device for adjusting an angle of the elevator shaft in accordance with a direction of the door replacement area.
The method of claim 2,

The door replacement moving device,

Is installed in the lifting platform, and the door forward and backward device for advancing the door forward,

And the door forward and backward device is a sliding type sliding along the lifting platform or an expansion type contracting with or extending from the lifting platform.
The method of claim 1,

The valve housing has the door replacement area disposed below the passage, an opening / closing door is formed in a part of the door replacement area, and temporarily seals the door replacement area when the door is replaced at an entrance of the door replacement area. Mono type gate valve system, with temporary sealing device installed.
A valve housing in which a passage is formed and in which a door exchange area is formed;

A door in which a sealing member is installed to open and close the passage;

A movable table supporting the door;

A door moving device capable of moving the door in the passage direction; And

A door circulation replacement device installed in the door exchange area and configured to take over the old door from the movable table and to move the waiting new door toward the movable table using a conveyor device;

Including a door circulation replaceable gate valve system.
The method of claim 7, wherein

The conveyor device,

A first sprocket wheel capable of driving rotation;

A second sprocket wheel capable of driven rotation; And

A belt wound to circulate between the first sprocket wheel and the second sprocket wheel;

Including a door circulation replaceable gate valve system.
The method of claim 8,

The door circulation replacement device,

A door fastening device installed on the belt and fastened to the falling spherical door to seat the spherical door on the belt;

The door fastening device,

Is an insertion protrusion that can be inserted into the insertion groove of the door or the receiving groove portion can be inserted into the door,

The insertion protrusion is a door rotation replaceable gate valve system, the expansion and contraction is a flexible insertion projection or a collapsible folding insertion projection.
The method of claim 7, wherein

And a door separating device that separates the door from the movable table and falls in the direction of the door circulation replacement device.

The door separation device,

At least one pinch shaft which is installed on the movable table so as to be stretched and contracted and is bitably coupled to the door; And

At least one pressurizing shaft installed on the movable table so as to extend and contract and pressurize the door to separate the door from the bite shaft;

Including a door circulation replaceable gate valve system.
The method of claim 7, wherein

An identification device capable of identifying identification information of the door to allow operation only when matching identification information;

Further comprising, door circulation replaceable gate valve system.
A valve housing having a passage formed in at least a portion thereof and a door replacing area formed in the other portion thereof;

A door provided with a first sealing member to open and close the passage, the door having a shape corresponding to the passage;

A bracket installed in the door replacement area and having a plurality of door accommodating grooves for loading the plurality of doors, the bracket being installed to be able to move forward and backward along the forward and backward rails;

Bracket forward and backward devices for advancing the bracket forward and backward;

A fastening device selectively fastened to at least one door positioned on a moving line among the doors accommodated in the bracket; And

An elevating device capable of elevating the door engaged with the fastening device in the passage direction;

Including, the gate valve system.
The method of claim 1,

The valve housing is provided with the passage having at least a portion having a first lower surface and a second lower surface,

The door is a gate valve system of the mono type door is provided with the first sealing member corresponding to the first lower surface and the second lower surface of the passage so as to open and close the passage.
The method of claim 1,

A separator installed between the door accommodating groove of the bracket and a neighboring door accommodating groove to prevent contamination of the door by a contaminated door or an external environment;

The gate valve system further comprises.
The method of claim 1,

The bracket forward and backward devices,

A camshaft member whose front end is bittenly coupled to a marginal groove formed on the bottom surface of the bracket, and the rear end is rotated by a rotation shaft; And

A rotating device for axially rotating the camshaft member;

Including, the gate valve system.
The method of claim 1,

The fastening device,

A connecting block having at least one insertion protrusion formed on the door to be inserted into a fastening hole formed in a lower surface of the door;

Including, gate valve system.
The method of claim 16,

The insertion projection of the fastening device, the branch groove is formed so that the tip is elastically deformed, the inclined guide surface is formed so that the insertion position can be guided, the gate valve system.
The method of claim 1,

A temporary fixing device for temporarily fixing the door to the bracket so that the door is fixed to the door receiving groove of the bracket and not shaken;

Further comprising, the gate valve system.
The method of claim 18,

The temporary fixing device is a gate valve system, which is provided in the valve housing and is an elastic body elastically pressurizing the door or a magnetic member installed in the valve housing or the bracket and coupled by a magnetic force to a magnetic body installed in the door.
Advancing or retracting the bracket on which the plurality of doors are mounted to a first position by using a bracket forward and backward device for advancing the bracket;

Selectively fastening at least one door positioned on a moving line among the doors accommodated in the bracket positioned at the first position by using a fastening device;

Separating the door engaged with the fastening device from the bracket by using a lifting device to move up and down in the passage direction;

Separating the door, which is finished using the elevating device, from the fastening device and re-receiving the door in the bracket;

Advancing or retracting the bracket to a second position by using a bracket forward and backward device for advancing the bracket;

Selectively fastening at least one door positioned on a moving line among the doors accommodated in the bracket located at the second position by using the fastening device; And

Elevating the door engaged with the fastening device in the passage direction by using the elevating device;

Including, the door replacement method of the gate valve system.