WO2019230883A1 - Outil d'application de vibrations ultrasonores, dispositif de génération d'ondes progressives et dispositif d'usinage par ultrasons - Google Patents

Outil d'application de vibrations ultrasonores, dispositif de génération d'ondes progressives et dispositif d'usinage par ultrasons Download PDF

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Publication number
WO2019230883A1
WO2019230883A1 PCT/JP2019/021522 JP2019021522W WO2019230883A1 WO 2019230883 A1 WO2019230883 A1 WO 2019230883A1 JP 2019021522 W JP2019021522 W JP 2019021522W WO 2019230883 A1 WO2019230883 A1 WO 2019230883A1
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Prior art keywords
ultrasonic
vibration
mass
ring
peripheral surface
Prior art date
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PCT/JP2019/021522
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English (en)
Japanese (ja)
Inventor
大西　一正
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有限会社Ｕｗａｖｅ
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Application filed by 有限会社Ｕｗａｖｅ filed Critical 有限会社Ｕｗａｖｅ
Priority to KR1020207033995A priority Critical patent/KR20210013694A/ko
Priority to JP2020522589A priority patent/JPWO2019230883A1/ja
Priority to CN201980036456.4A priority patent/CN112188938B/zh
Publication of WO2019230883A1 publication Critical patent/WO2019230883A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B26—HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/08—Means for treating work or cutting member to facilitate cutting

Definitions

  • the present invention relates to an ultrasonic vibration applicator, a traveling wave generator, and an ultrasonic processing apparatus.
  • the present invention is an ultrasonic vibration applicator using a Langevin type ultrasonic vibrator, but an ultrasonic vibration applicator exhibiting a novel vibration mode of ultrasonic vibration, and a progress using the ultrasonic vibration applicator.
  • the present invention relates to a wave generator and an ultrasonic processing apparatus.
  • ultrasonic transducers using piezoelectric elements as ultrasonic wave generation sources are known.
  • a typical configuration is a pair of metal blocks and a polarization fixed between these metal blocks.
  • a Langevin type ultrasonic transducer composed of a processed piezoelectric element is known.
  • a bolted Langevin type ultrasonic transducer with a structure in which a polarized piezoelectric element is connected by a bolt between a pair of metal blocks and fastened at a high pressure can generate high-energy ultrasonic vibrations.
  • use in ultrasonic processing used by attaching to a tool for performing polishing processing, cutting processing, plastic processing, abrasive processing, and the like of various materials has been studied and actually used.
  • ultrasonic vibration generated by the ultrasonic transducers is transmitted via a vibration plate or various vibration means, so that ultrasonic cleaning, metal bonding, plastic welding, ultrasonic waves are performed.
  • Applications of ultrasonic treatments such as atomization, emulsification and dispersion, and use in communication application equipment such as underwater acoustic instruments (sonar) such as fish detectors, ultrasonic flaw detectors, medical echo diagnostic equipment, and flow meters It is considered and used in many fields.
  • Patent Document 1 a method and an apparatus for generating a traveling wave using ultrasonic vibration are already known.
  • a typical traveling wave using this ultrasonic vibration is a method of generating an annular traveling wave in a vibrating body having an annular shape, and this traveling wave is used as an ultrasonic motor, polishing, or the like.
  • Devices and cutting devices have been proposed. However, devices that use an ultrasonic vibration mode that generates traveling waves, and the devices that are actually used are currently limited to motors that are built into cameras with little mechanical load and little fluctuation. Yes.
  • the ultrasonic vibration showing the traveling wave ultrasonic vibration mode is a vibration mode characterized in that no node is generated in the vibration, and a piezoelectric ceramic having an annular plane as a vibration body also serving as a vibration source. It is common to use a plate. However, since the vibration node does not appear in the annular vibrating body in which traveling waves are generated, the vibrating body cannot be supported while maintaining the vibration characteristics. In other words, in order to effectively utilize the ultrasonic vibration appearing in the vibrating body, the normal vibrating body is supported at the position where the ultrasonic vibration node appears, but the ultrasonic vibration node appears. When a traveling wave ultrasonic vibration mode is used, the vibrating body cannot be supported using such a support method.
  • a method of using a molded body made of a soft material such as felt as a support substrate is used for supporting an annular vibrating body that generates ultrasonic vibration of a traveling wave ultrasonic vibration mode that has been put to practical use. This is realized by suspending the vibrating body in the air by such a support method.
  • the molded body of a soft material such as felt is compressed and hardened, so that the ultrasonic vibration of the traveling wave ultrasonic vibration mode generated in the vibrating body propagates to the support substrate. Therefore, there is a problem that smooth traveling wave generation in the vibrating body may not be realized.
  • FIG. 11 of Patent Document 1 discloses a diagram of a traveling wave generation method using a Langevin type ultrasonic transducer. The configuration of the disclosed Langevin type ultrasonic transducer and traveling wave generation are disclosed. There is no specific explanation about the method of supporting the vibrating body for.
  • the expected effect of applying ultrasonic vibration to various tools in an ultrasonic processing device is that the ultrasonic vibration generated by the ultrasonic vibrator is held in a tool holder that is combined with the ultrasonic vibrator.
  • the electrical energy required for the machining operation by the tool is reduced and the machining accuracy is improved.
  • the expected effects are not sufficiently obtained in the ultrasonic machining apparatus manufactured so far and used in actual machining operations. For this reason, it cannot be said that the spread of ultrasonic processing apparatuses is sufficiently advanced even at the present time. Therefore, in order to further promote the spread of ultrasonic processing apparatuses, it is necessary to develop an ultrasonic processing apparatus that transmits ultrasonic vibrations generated by an ultrasonic vibrator to a tool with high efficiency.
  • Patent Document 2 A number of patent applications have been filed. Among these improved inventions, the invention disclosed in Patent Document 2 can be cited as one of the recent inventions. This patent document 2 is filed on August 15, 2018, and the Japanese Patent Application No. 2018-114989 filed on May 30, 2018, claiming priority in this PCT application. It will be released later.
  • Patent Document 2 discloses a cylindrical housing having a contact surface at a lower portion or a bottom portion of an inner peripheral surface and a screw portion at a lower portion of the outer peripheral surface; a disk having a contact surface fitted to the contact surface of the cylindrical housing Langevin type with a bolted structure with a polarization-treated piezoelectric element sandwiched between a front mass including a cylindrical tool attachment having a cylindrical bulge at the top and a rear mass disposed above the front mass
  • an ultrasonic vibration applicator including an ultrasonic vibrator; and a ring-shaped counterweight having a threaded portion into which a threaded portion of a cylindrical housing is screwed on an inner peripheral surface.
  • a lower small-diameter portion whose inner diameter is smaller than the inner diameter of the screw portion is formed below the screw portion, and the inner peripheral surface of the lower small-diameter portion and the cylinder.
  • Patent Document 1 JP 59-122385 (1984-7-14)
  • Patent Document 2 PCT / JP2018 / 004728 (filed on Feb. 9, 2018, published on Aug. 15, 2018 as WO 2018 / 147445A1)
  • the ultrasonic vibration applicator described in Patent Document 2 may be used as an ultrasonic vibration applicator that efficiently generates an annular traveling wave in an annular vibrator. Therefore, the occurrence of an efficient annular traveling wave on the annular vibrator using the ultrasonic vibration applicator having the configuration specifically disclosed in Patent Document 2 was examined. However, the state of occurrence of the annular traveling wave did not necessarily reach a satisfactory level.
  • an object of the present invention is to provide an ultrasonic vibration applicator equipped with a Langevin type ultrasonic transducer, which is particularly suitable for stably applying ultrasonic vibration of traveling wave mode to an annular vibrator.
  • the ultrasonic vibration applicator 1 has a cylindrical housing 2 having a contact surface that extends downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface;
  • the electrode layers 6a and 6b are used between a front mass 4 having a flange portion 3 having a contact surface fitted to the contact surface of the upper mass 4 and a rear mass 5 disposed above the front mass 4.
  • a Langevin type ultrasonic vibrator having a configuration in which a piezoelectric element 6 subjected to polarization processing is sandwiched (bolted) with a bolt 5a;
  • a ring-shaped fishing ring having a threaded surface at the upper part 7a of the inner peripheral surface, an inner peripheral side extension 7c that contacts the lower surface of the flange part 3 at the lower part 7b and does not contact the side surface of the front mass 4 Including the weight 7;
  • the diameter (Hin) of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing 2 and the contact surface of the flange portion 3 are in contact with each other is the inside of the ring-shaped counterweight 7
  • This is an ultrasonic vibration applicator characterized by being larger than the diameter (Nin) of the circumferential circle formed by the inner peripheral surface of the extension 7c.
  • FIG. 3 shows a plan view of the ring-shaped counterweight 7 (FIG. 3A) and a sectional view taken along the line AA in FIG. 3 (FIG. 3B).
  • the ring-shaped counterweight 7 shown in FIG. 3 is of a type having a female screw hole for adjusting the deflection accuracy.
  • an upper region 7 a (on the inner peripheral surface having a screw surface into which a lower thread surface of the outer peripheral surface of the cylindrical housing 2 is screwed) Thickness: 7 at), and has a lower region 7b (thickness: 7bt) having an inner peripheral extension 7c that contacts the lower surface of the flange portion 3 and does not contact the side surface of the front mass 4.
  • the mass of the cylindrical housing has a larger mass than either of the Langevin type ultrasonic vibrator and the ring-shaped counterweight, and the mass of the ring-type counterweight is 0.5 when the mass of the Langevin type ultrasonic vibrator is 1.
  • the Langevin type ultrasonic vibrator is applied by applying electric energy having a frequency for exciting the longitudinal zeroth order vibration of the Langevin type ultrasonic vibrator to the piezoelectric element.
  • the vertical vibration of the flange part protruding in the same direction as the whole vertical vibration of the whole Langevin type ultrasonic transducer and the bending vibration of the flat central part of the flange part occur at the same time.
  • the arc-shaped vibration in the direction opposite to the direction of the protrusion is generated on the outer peripheral surface of the ring-shaped counterweight.
  • FIGS. 4 to 6 of the accompanying drawings schematically show the ultrasonic vibration characteristics described in (1) above.
  • FIG. 5 exaggerates the vibration mode of the Langevin type ultrasonic vibrator and the ring-shaped counterweight shown in FIG.
  • a node (node: indicated by a black dot) 9 appears only near the lower end of the cylindrical housing, and the Langevin type ultrasonic vibrator vibrates up and down as a whole.
  • the flange portion and the ring-shaped counterweight vibrate in the above-described mode, but those vibrations hardly propagate to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates.
  • FIGS. 7 and 8 show a node near the lower end of the cylindrical housing by applying electric energy having a frequency for exciting the longitudinal primary vibration of the Langevin type ultrasonic transducer to the piezoelectric element.
  • longitudinal primary vibration longitudinal stretching vibration
  • node 10 node 10 in the vicinity of the piezoelectric element of the Langevin type ultrasonic transducer
  • the Langevin type ultrasonic transducer has a longitudinal direction. This shows how the expansion and contraction vibration appears.
  • the vibration of the Langevin type ultrasonic vibrator is a stretching vibration in which the front mass and the rear mass vibrate up and down in opposite directions, and at the same time, the center of the flange portion protruding in the same direction as the vibration direction of the front mass 4 A bending vibration of the portion appears, and an arc-shaped vibration in a direction opposite to the direction in which the bending central portion of the flange portion projects is generated on the outer peripheral surface of the ring-shaped counterweight.
  • the vibration of the Langevin type ultrasonic vibrator and the vibration of the ring-shaped counterweight hardly propagate to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates. .
  • the mass of the cylindrical housing has a larger mass than both the Langevin type ultrasonic transducer and the ring-type counterweight, and the ring-type counterweight has a mass of 1 for the Langevin type ultrasonic transducer.
  • FIGS. 9 and 10 are diagrams schematically showing the state of ultrasonic vibration generated by the ultrasonic vibration applicator having the configuration (4). Even in the vibration mode shown in FIGS. 9 and 10, the vibration of the front mass, the flange portion, and the ring-shaped counterweight hardly propagates to the cylindrical housing 2, and therefore the cylindrical housing 2 hardly vibrates.
  • a cylindrical housing having a contact surface extending downward at the lower portion of the inner peripheral surface and a screw surface at the lower portion of the outer peripheral surface; a flange having a contact surface fitted to the contact surface of the cylindrical housing
  • a Langevin type ultrasonic transducer having a structure in which a polarization-treated piezoelectric element is sandwiched between a front mass provided with an upper portion and a rear mass disposed above the front mass; and the above cylindrical shape
  • An inner peripheral side having a screw surface into which the screw surface of the lower outer peripheral surface of the housing is screwed is provided at the upper portion of the inner peripheral surface, contacting the lower surface of the flange portion at the lower portion, and not contacting the side surface of the front mass.
  • a ring-shaped counterweight having an extension; applying the electrical energy to the piezoelectric element causes the front mass to vibrate in the vertical direction and the front mass in the vertical direction.
  • the bending vibration of the flange center portion protruding in the direction occurs, and at the same time, the arc-shaped vibration in the direction opposite to the direction protruding by the bending vibration of the flange center portion of the flange portion is the ring-shaped counterweight.
  • Ultrasonic vibration applicator that occurs on the outer peripheral surface of the.
  • (Invention 2) A cylindrical housing having a contact surface extending downward at the lower portion of the inner peripheral surface and a threaded surface at the lower portion of the outer peripheral surface; a flange having a contact surface fitted to the contact surface of the cylindrical housing
  • a Langevin type ultrasonic transducer having a structure in which a polarization-treated piezoelectric element is sandwiched between a front mass provided with an upper portion and a rear mass disposed above the front mass; and the above cylindrical shape
  • An inner peripheral side having a screw surface into which the screw surface of the lower outer peripheral surface of the housing is screwed is provided at the upper portion of the inner peripheral surface, contacting the lower surface of the flange portion at the lower portion, and not contacting the side surface of the front mass.
  • Ultrasonic vibration applicator that occurs on the outer peripheral surface of the.
  • invention 3 Along the ring of the above-mentioned ring-shaped vibrating body, including the ring-shaped vibrating body and the ultrasonic vibration applicator disposed and connected to the ring-shaped vibrating body at a distance from each other.
  • An apparatus for generating a traveling wave the apparatus using the ultrasonic wave applicator of the invention 1 as an ultrasonic wave applicator.
  • An ultrasonic processing apparatus including an ultrasonic vibration applicator and a tool attached to the ultrasonic vibration applicator, wherein the ultrasonic applicator of the invention 1 is used as the ultrasonic applicator.
  • An ultrasonic processing apparatus including an ultrasonic vibration applicator and a tool attached to the ultrasonic vibration applicator, wherein the ultrasonic applicator of the invention 2 is used as the ultrasonic applicator.
  • the diameter (Hin) of the circumferential circle formed by the upper end of the region where the contact surface of the cylindrical housing and the contact surface of the flange contact each other is the inner peripheral surface of the inner extension of the ring-shaped counterweight Is larger than the diameter (Nin) of the circumference of the circle.
  • the cylindrical housing has a larger mass than both the Langevin type ultrasonic transducer and the ring-shaped counterweight.
  • Ultrasonic vibration applicator of invention 1-The ring-shaped counterweight has a mass in the range of 0.5-1.5, where 1 is the mass of the Langevin type ultrasonic transducer.
  • the ring-shaped counterweight has a mass in the range of 0.25 to 0.75, where the mass of the Langevin type ultrasonic transducer is 1.
  • the support member of the ultrasonic vibration applicator of the ultrasonic processing device from the ultrasonic vibration applicator (support for incorporation into the ultrasonic processing device) Leakage of ultrasonic vibration energy into the member) is significantly reduced. For this reason, it becomes possible to transmit the ultrasonic vibration generated by the Langevin type ultrasonic vibrator to the tool or the vibrator attached to the ultrasonic vibration applicator with high efficiency and high stability. .
  • FIG. 1 It is a top view of the example of the ultrasonic vibration applicator of this invention. It is front sectional drawing of the ultrasonic vibration provision tool shown in FIG. It is a figure which shows the example of a structure of the ring-shaped balance weight which comprises the ultrasonic vibration provision tool of this invention, (a) is a top view, (b) is along the AA line shown to (a).
  • FIG. Each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight generated when electric energy is applied to the ultrasonic vibration applicator of the present invention shown in FIG. It is explanatory drawing shown in figure.
  • This figure shows a state where the Langevin type ultrasonic transducer is in a position lowered by vibration.
  • This figure shows a state in which the Langevin type ultrasonic transducer is in a position raised by vibration.
  • a vibration node appears near the position of the piezoelectric element of the Langevin type ultrasonic transducer.
  • this figure shows the state which exists in the position which the front mass fell by the vibration.
  • FIG. 1 Each of the vibration of the Langevin type ultrasonic vibrator, the vibration of the flange portion of the front mass, and the vibration of the ring-shaped counterweight generated when electric energy is applied to the ultrasonic vibration applicator of the present invention shown in FIG. It is explanatory drawing shown in figure.
  • a vibration node appears near the position of the piezoelectric element of the Langevin type ultrasonic transducer. And this figure shows the state which exists in the position which the front mass raised by the vibration.
  • FIG. 13 is a front sectional view of the polishing apparatus shown in FIG. 12. It is a schematic diagram which shows the mode of the annular traveling wave which generate
  • wearing the cutting tool (annular blade) with the ultrasonic vibration applicator of this invention is shown.
  • the front sectional view of the cutting device shown in Drawing 15 is shown. It is a schematic diagram which shows the mode of the annular traveling wave which generate
  • FIGS. 1 and 2 are diagrams showing a typical configuration example of an ultrasonic vibration applicator capable of generating ultrasonic vibration in a characteristic mode of the present invention.
  • the configuration of the ultrasonic vibration applicator shown in FIGS. 1 and 2 has already been described in this specification. That is, the ultrasonic vibration applicator shown in FIGS. 1 and 2 has the same basic configuration as the ultrasonic vibration applicator described in Patent Document 2.
  • FIG. 11 shows the ultrasonic vibration applicator produced by separately forming the front mass provided with the flange portion and the ring-shaped counterweight, but the front mass provided with the flange portion and A ring-shaped counterweight is a saddle that can produce the same effect even if it is made as one piece.
  • FIG. 11 shows the front mass 4 and the ring-shaped counterweight 7 are integrated as a whole by an extension 7d of the ring-shaped counterweight that connects them, and a flange portion 7e of the front mass integrated with the extension 7d.
  • the ultrasonic vibration applicator shown in FIG. 11 is not practical because it is not easy to produce.
  • the annular traveling wave mode is a traveling wave in a mode that bends in a direction perpendicular to the radial direction of the annular vibrator, as shown in the diagrams schematically illustrated in FIGS. 14 and 17 to be described later.
  • three or more ultrasonic vibration applicators are separated from each other, preferably at the same distance, on the surface of the annular vibrating body. It is necessary to install with. In general, it is necessary to increase the number of ultrasonic vibration applicators to be attached as the size of the vibrator increases.
  • FIG. 12 and FIG. 13 show an example of the configuration of an ultrasonic processing apparatus (polishing apparatus) that performs polishing processing by applying ultrasonic vibration in an annular traveling wave mode.
  • FIG. 12 shows a plan view of the polishing apparatus.
  • FIG. 13 is a front cross-sectional view taken along line AA of the polishing apparatus shown in FIG.
  • a total of four ultrasonic application apparatuses 1 ( 1a, 1b, 1c, 1d) are used, and the housing of each ultrasonic wave applicator 1 is attached to the rotating plate 11 with bolts in a state of being separated from each other by 90 °.
  • the ultrasonic wave application device of the present invention as described above, the ultrasonic vibration generated by the Langevin type ultrasonic transducer hardly leaks into the housing.
  • the ultrasonic provision apparatus equipped with the ring-shaped counterweight shows high rigidity, it is attached to the rotating plate 11 with high rigidity.
  • annular polishing plate 14 having an annular grindstone surface 13 formed on the top surface of the front mass of the Langevin type ultrasonic transducer of each ultrasonic wave imparting device (1a, 1b, 1c, 1d) is bolted. Use to install. Even when a large mechanical load is applied to the annular grinding wheel surface 13 formed on the surface of the annular polishing plate 14 in the polishing operation using the polishing apparatus having such a configuration, the annular traveling wave mode in a stable state. The ultrasonic vibration can be supplied.
  • the grinding liquid is sprayed on the annular grinding wheel surface 13 of the annular grinding plate 14, and then each of the ultrasonic wave application devices 1 (1a, 1b, 1c, 1d) is transmitted from the ultrasonic wave transmission circuit.
  • Electrical energy having a predetermined voltage and frequency is applied to the Langevin type ultrasonic transducer by the following method.
  • the Cos wave voltage is used for the Langevin type ultrasonic transducer of the ultrasonic applicator 1a
  • the Sin wave voltage is used for the Langevin type ultrasonic transducer of the ultrasonic applicator 1b
  • the Langevin type ultrasonic wave of the ultrasonic applicator 1c is used for the Cos wave voltage.
  • a -Cos wave voltage is applied to the vibrator
  • a -Sin wave voltage is applied to the Langevin type ultrasonic vibrator of the ultrasonic wave applying device 1d.
  • the rotating shaft 12 is rotated, and the material to be polished is polished according to a predetermined processing program.
  • the driving circuit can be simplified if the driving phase is actually two-phase. Therefore, instead of applying the -Cos wave voltage to the Langevin type ultrasonic transducer of the ultrasonic wave applying device 1c.
  • a method of applying a Cos wave voltage to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c by arranging the piezoelectric elements attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1c in the reverse direction can be used. .
  • the piezoelectric elements to be attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d are arranged in the opposite direction.
  • vibrator of the ultrasonic application apparatus 1d can also be utilized.
  • FIGS. 15 shows a plan view of the grinding apparatus.
  • FIG. 16 is a front sectional view of the grinding apparatus shown in FIG.
  • the grinding device shown in FIGS. 15 and 16 has a total of four ultrasonic applicators 1 ( 1a, 1b, 1c, 1d) are used. And the housing of each ultrasonic wave applicator 1 is attached to the rotating plate 15 with bolts in a state of being separated from each other by 90 °.
  • the ultrasonic wave application device of the present invention as described above, the ultrasonic vibration generated by the Langevin type ultrasonic transducer hardly leaks into the housing. And since the ultrasonic provision apparatus equipped with the ring-shaped counterweight shows high rigidity, it is attached to the rotating plate 15 with high rigidity.
  • annular cutting grindstone (blade) 16 is attached to the step provided on the top surface of the front mass of the Langevin type ultrasonic transducer of each ultrasonic wave applying device (1a, 1b, 1c, 1d). Even when a large mechanical load is applied to the annular cutting grindstone (blade) 16 in the grinding operation using the grinding apparatus having such a configuration, the ultrasonic vibration of the annular traveling wave mode in a stable state is supplied. Can do.
  • the grinding fluid is sprayed onto the annular cutting grindstone (blade) 16, and then the Langevin type ultrasonic vibration of the ultrasonic wave application device 1 (1 a, 1 b, 1 c, 1 d) from the ultrasonic wave transmission circuit. Electric energy having a predetermined voltage and frequency is applied to the child.
  • a -Cos wave voltage is applied to the vibrator, and a -Sin wave voltage is applied to the Langevin type ultrasonic vibrator of the ultrasonic wave applying device 1d.
  • each of the Langevin type ultrasonic transducers of each ultrasonic wave application device By applying different types of voltages to each of the Langevin type ultrasonic transducers of each ultrasonic wave application device in this way, as shown in the diagram schematically shown in FIG. A traveling wave in a mode of bending in the radial direction is generated on the surface of the annular cutting grindstone (blade) 16.
  • the traveling wave mode shown in FIG. 17 is a traveling wave obtained when six (or twelve) ultrasonic wave application devices are attached.
  • a piezoelectric element to be attached to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d is arranged in the reverse direction, and a Sin wave voltage is applied to the Langevin type ultrasonic transducer of the ultrasonic applicator 1d. It is also possible to use this method. Next, the rotating shaft 15 is rotated, and the material to be ground is ground according to a predetermined machining program.
  • the ultrasonic applicator of the present invention is naturally a mode generally used from the past. It can also be used effectively for applying ultrasonic vibration.
  • the ultrasonic applicator of the present invention can be effectively used also in a feeder, an ultrasonic levitation device, an ultrasonic abrasive processing device, etc. used for conveying articles.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Drilling And Boring (AREA)
  • Turning (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

Le problème décrit par la présente invention consiste à fournir un outil d'application de vibrations ultrasonores comprenant un transducteur ultrasonore de Langevin qui est incorporé dans un dispositif d'usinage par ultrasons et qui est approprié pour générer des ondes progressives circulaires. La solution selon l'invention porte sur un outil d'application de vibrations ultrasonores incluant : un boîtier cylindrique présentant une surface de contact s'élargissant vers le bas sur la partie inférieure de la surface périphérique interne et doté d'une surface filetée sur la partie inférieure de la surface périphérique externe ; un transducteur ultrasonore de Langevin configuré de sorte qu'un élément piézoélectrique traité par polarisation est boulonné dans un état intercalé entre une masse avant, dont la partie supérieure est dotée d'une partie bride présentant une surface de contact ajustée conjointement avec la surface de contact du boîtier, et une masse arrière disposée au-dessus de la masse avant ; et un contrepoids annulaire, dont la partie supérieure de la surface périphérique interne est dotée d'une surface filetée dans laquelle la surface filetée dans la partie inférieure de la surface périphérique externe du boîtier est filetée, et dont la partie inférieure présente une partie étendue périphérique interne qui vient en contact avec la surface inférieure de la partie bride et ne vient pas en contact avec la surface latérale de la masse avant ; une vibration verticale de la masse avant et une vibration de flexion dans la partie centrale d'une surface plate de la partie bride, qui fait saillie dans la même direction que ladite vibration verticale, étant générées par l'application d'énergie électrique à l'élément piézoélectrique, et une vibration arquée dans une direction opposée à la direction de projection par ladite vibration de flexion dans la partie centrale de la surface plate de la partie bride étant simultanément générée dans la surface périphérique externe du contrepoids annulaire par ladite application d'énergie également.
PCT/JP2019/021522 2018-05-30 2019-05-30 Outil d'application de vibrations ultrasonores, dispositif de génération d'ondes progressives et dispositif d'usinage par ultrasons WO2019230883A1 (fr)

Priority Applications (3)

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KR1020207033995A KR20210013694A (ko) 2018-05-30 2019-05-30 초음파 진동 부여구, 진행파 발생 장치 및 초음파 가공 장치
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