WO2019194067A1 - Robinet-vanne - Google Patents

Robinet-vanne Download PDF

Info

Publication number
WO2019194067A1
WO2019194067A1 PCT/JP2019/013600 JP2019013600W WO2019194067A1 WO 2019194067 A1 WO2019194067 A1 WO 2019194067A1 JP 2019013600 W JP2019013600 W JP 2019013600W WO 2019194067 A1 WO2019194067 A1 WO 2019194067A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
urging
opening
movable
movable valve
Prior art date
Application number
PCT/JP2019/013600
Other languages
English (en)
Japanese (ja)
Inventor
慎一 和田
英晃 井上
浩司 柴山
拓也 和出
晴邦 古瀬
治郎 猿渡
幹也 鐸木
真之介 徳平
敬晶 照井
Original Assignee
株式会社アルバック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アルバック filed Critical 株式会社アルバック
Priority to JP2019528147A priority Critical patent/JP6562333B1/ja
Priority to KR1020197025019A priority patent/KR102389986B1/ko
Priority to CN201980001518.8A priority patent/CN110557960B/zh
Publication of WO2019194067A1 publication Critical patent/WO2019194067A1/fr

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/04—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members
    • F16K3/10—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with pivoted closure members with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic

Definitions

  • the present invention relates to a gate valve suitable for a pendulum type, a direct acting type, or the like that slides a valve body in addition to an operation of opening and closing a flow path by a valve body (valve plate).
  • the present invention partitions (closes) a flow path connecting two spaces having different pressures and a flow path connecting two spaces performing different processes in a vacuum apparatus or the like, and opens the partition state.
  • This relates to a gate valve (connecting two spaces).
  • two spaces with different degrees of vacuum such as between the chamber and the piping, between the piping and the piping, or between the piping and the pump, etc. are partitioned and the two partitioned spaces are connected.
  • a partition valve is provided.
  • Various types of valves are known as such partition valves.
  • valve plate is slid to insert the valve plate at the valve opening / closing position of the flow path, and further, the valve plate is operated to partition the flow path (valve closing operation), or the valve plate is operated to open the flow path.
  • valve closing operation There is known a structure in which the valve plate is further slid from the flow path to the retreat position in the valve box by connecting (valve opening operation) and further sliding the valve plate.
  • a pendulum type, a direct acting type, a door type and the like are known.
  • the pendulum type gate valve has a valve box having a first opening and a second opening forming a flow path and having a hollow portion, and a surface fixed to the rotating shaft in the hollow portion and perpendicular to the rotating shaft. It has a structure in which a support body spreading in a parallel direction and a valve body (a valve plate in the case of a structure in which a seal ring plate is provided in the opening) fixed to the support body are arranged.
  • the rotary shaft is rotated to rotate the valve body, and the valve body is inserted into the valve opening / closing position of the opening (flow path), or the valve body is formed by the opening.
  • the conventional pendulum type gate valve is integrally formed in the housing in a hollow portion of the housing, a valve plate that can be rotated on a rotating shaft, a slidable seal ring plate disposed in an opening of the housing, and the housing.
  • a structure in which an actuator for sliding the seal ring plate on a flange is provided is known.
  • the seal ring plate is brought into contact with and pressed against the valve plate to close the flow path, or the seal ring plate is separated from the valve plate to open the flow path (for example, patents). Reference 1).
  • the actuator of this pendulum type gate valve has a structure in which a bolt, an annular chamber (cylinder), a piston, and a spring are arranged in series in the sliding direction of the seal ring plate. Therefore, when closing the flow path, the restoring force generated in the spring is transmitted to the seal ring plate via the piston, cylinder, and bolt.
  • a valve that shuts the flow path hermetically, has excellent wear resistance, and is easy to maintain is disclosed (for example, see Patent Document 2).
  • the outer valve body portion is connected to the drive device by an arm, and the outer valve body portion is moved vertically along the opening axis. Therefore, the starting device that prompts the arm to move vertically by the power transmission device requires a large driving force as the area of the gate valve increases.
  • Patent Document 2 when the structure disclosed in Patent Document 2 is applied to a large gate valve, in addition to an increase in the volume of the O-ring to be crushed, the O-ring is disposed at a position far away from the rotation shaft. For this reason, the rotating shaft must be designed to be rigid with respect to the required moment load, which contributes to an increase in the weight of the gate valve. Therefore, the structure disclosed in Patent Document 2 is effective for a small gate valve but is not suitable for a large gate valve.
  • valve type is a different technology
  • the normal flow (normally closed) as described in Patent Document 4 that is, when the drive power supply or compressed air supply disappears, the flow path is automatically set.
  • This normal close means that the valve is open when the drive power for driving the valve body, etc. is not supplied during valve partitioning or when compressed air (compressed air) is not working. Is automatically closed, and when the valve is in the closed state, it means that the flow path is closed.
  • the gate valve driven by pneumatic pressure described in Patent Document 1 is normally closed using a spring member.
  • the movable portion itself such as the drive portion or the valve body may come into contact with another member when the operation stops.
  • a mechanical means such as a damper may be provided.
  • the gate valve itself is increased in size, so that it is required to increase the output in the driving unit in order to drive a movable part such as a valve body having increased weight. It is done.
  • the volume of each component including the drive unit tends to increase.
  • the electric power required for driving the electric motor becomes large, there has been a demand to reduce this, and to realize space saving and miniaturization of each component constituting the gate valve.
  • the secondary power source is used for driving.
  • a valve usage period and a secondary power source reliability maintaining period are set.
  • the secondary power source and the electric actuator increase in size, weight, and cost. For this reason, there has been a demand for realizing a configuration in which the reliability can be mechanically increased and the valve can be normally closed without using a secondary power source.
  • the present invention has been made in view of such a conventional situation, prevents particles from being generated due to an impact, reduces driving power, saves space for parts, and enables a highly reliable partitioning operation. And it aims at weight reduction of a movable valve part, and providing a gate valve which has a normally closed structure.
  • the gate valve according to the first aspect of the present invention is: A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other; A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening; Between the valve closing position for closing the neutral valve body with respect to the first opening and the valve opening position for opening the neutral valve body withdrawn from the first opening, the neutral valve A rotary shaft that functions as a position switching unit that moves the body and has an axis extending in the flow path direction; A rotating device comprising an electric actuator for rotating the rotating shaft; It comprises.
  • the neutral valve body includes a neutral valve portion connected to the position switching portion, and a movable valve portion connected to the neutral valve portion so that the position in the flow path direction can be changed.
  • the movable valve portion is provided with a seal portion that is provided around the movable valve portion and is in close contact with the inner surface of the valve box around the first opening, and the position in the flow path direction is changed with respect to the neutral valve portion.
  • a first movable valve portion that can be connected, and a second movable valve portion that is slidable in the direction of the flow path with respect to the first movable valve portion.
  • the gate valve includes a plurality of first urging portions built in the valve box, a second urging portion disposed between the first movable valve portion and the second movable valve portion, A third urging unit.
  • the third urging portion connects the first movable valve portion to the neutral valve portion so that the position in the flow passage direction can be changed, and the first movable valve portion is located at a central position in the flow passage direction.
  • the plurality of first urging portions are driven by an incompressible fluid to urge the first movable valve portion toward the first opening portion in the flow path direction, thereby opening the seal portion to the first opening. It has the function of enabling close contact with the inner surface of the valve box around the part.
  • the second urging portion drives the thickness dimension of the first movable valve portion and the second movable valve portion in the flow path direction so as to be adjustable.
  • the gate valve includes an incompressible fluid driving device that drives the plurality of first urging portions with an incompressible fluid.
  • the rotating device sets the neutral valve body to the valve closing position at the time of power interruption, and allows the rotation operation of the rotating shaft and the closing operation of the first urging portion to be sequentially operated.
  • the gate valve according to the second aspect of the present invention is: A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other; A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening; Between the valve closing position for closing the neutral valve body with respect to the first opening and the valve opening position for opening the neutral valve body withdrawn from the first opening, the neutral valve A rotary shaft that functions as a position switching unit that moves the body and has an axis extending in the flow path direction; A rotating device comprising an electric actuator for rotating the rotating shaft; It comprises.
  • the neutral valve body includes a neutral valve portion connected to the position switching portion, and a movable valve portion connected to the neutral valve portion so that the position in the flow path direction can be changed.
  • the movable valve portion is provided with a seal portion that is provided around the movable valve portion and is in close contact with the inner surface of the valve box around the first opening, and the position in the flow path direction is changed with respect to the neutral valve portion.
  • a first movable valve portion that can be connected, and a second movable valve portion that is slidable in the direction of the flow path with respect to the first movable valve portion.
  • the gate valve includes a plurality of first urging portions built in the valve box, and a second urging portion disposed between the first movable valve portion and the second movable valve portion.
  • the plurality of first urging portions are driven by an incompressible fluid to urge the first movable valve portion toward the first opening portion in the flow path direction, thereby opening the seal portion to the first opening.
  • a function enabling close contact with the inner surface of the valve box around the portion, and connecting the first movable valve portion to the neutral valve portion so that the position in the flow path direction can be changed, and the first movable valve portion Has a function of energizing toward the center position in the flow path direction.
  • the second urging portion drives the thickness dimension of the first movable valve portion and the second movable valve portion in the flow path direction so as to be adjustable.
  • the gate valve includes an incompressible fluid driving device that drives the plurality of first urging portions with an incompressible fluid.
  • the rotating device sets the neutral valve body to the valve closing position at the time of power interruption, and allows the rotation operation of the rotating shaft and the closing operation of the first urging portion to be sequentially operated.
  • the rotating device is a rotation-switching device that switches the rotation of the rotating shaft by an electric-power biasing device that places the neutral valve body in the valve closing position by a biasing force during power-off, and the electric actuator and the power-breaking biasing device. It can have a switching device.
  • the rotating device may include a return device that returns the power interruption urging device to a return state when power interruption is recovered.
  • the rotating shaft may be provided with a counterweight for the neutral valve body.
  • the gate valve according to the first aspect of the present invention is: A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other; A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening; Between the valve closing position for closing the neutral valve body with respect to the first opening and the valve opening position for opening the neutral valve body withdrawn from the first opening, the neutral valve A rotary shaft that functions as a position switching unit that moves the body and has an axis extending in the flow path direction; A rotating device comprising an electric actuator for rotating the rotating shaft; It comprises.
  • the neutral valve body includes a neutral valve portion connected to the position switching portion, and a movable valve portion connected to the neutral valve portion so that the position in the flow path direction can be changed.
  • the movable valve portion is provided with a seal portion that is provided around the movable valve portion and is in close contact with the inner surface of the valve box around the first opening, and the position in the flow path direction is changed with respect to the neutral valve portion.
  • a first movable valve portion that can be connected, and a second movable valve portion that is slidable in the direction of the flow path with respect to the first movable valve portion.
  • the gate valve includes a plurality of first urging portions built in the valve box, a second urging portion disposed between the first movable valve portion and the second movable valve portion, A third urging unit.
  • the third urging portion connects the first movable valve portion to the neutral valve portion so that the position in the flow passage direction can be changed, and the first movable valve portion is located at a central position in the flow passage direction.
  • the plurality of first urging portions are driven by an incompressible fluid to urge the first movable valve portion toward the first opening portion in the flow path direction, thereby opening the seal portion to the first opening. It has the function of enabling close contact with the inner surface of the valve box around the part.
  • the second urging portion drives the thickness dimension of the first movable valve portion and the second movable valve portion in the flow path direction so as to be adjustable.
  • the gate valve includes an incompressible fluid driving device that drives the plurality of first urging portions with an incompressible fluid.
  • the rotating device sets the neutral valve body to the valve closing position when power is interrupted.
  • the rotating device can sequentially operate a rotating operation of the rotating shaft and a closing operation of the first urging unit.
  • the electric actuator of the rotating device rotates the neutral valve body.
  • the rotating device can rotationally drive the neutral valve body when power is interrupted abnormally (when supply of driving power is interrupted). Thereby, it can be set as the gate valve which can be normally closed.
  • the third urging portion connects the first movable valve portion to the neutral valve portion so that the position in the flow passage direction can be changed, and the first movable valve portion in the flow passage direction. Energize towards the center position.
  • the plurality of first urging portions are driven by an incompressible fluid drive device, and urge the first movable valve portion toward the first opening in the flow path direction so that the seal portion is It has the function of allowing close contact with the inner surface of the valve box around one opening.
  • the second urging portion is built in the movable valve portion and drives the thickness dimension of the first movable valve portion and the second movable valve portion in the flow path direction so as to be adjustable.
  • the gate valve according to the second aspect of the present invention is: A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other; A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening; Between the valve closing position for closing the neutral valve body with respect to the first opening and the valve opening position for opening the neutral valve body withdrawn from the first opening, the neutral valve A rotary shaft that functions as a position switching unit that moves the body and has an axis extending in the flow path direction; A rotating device comprising an electric actuator for rotating the rotating shaft; It comprises.
  • the neutral valve body includes a neutral valve portion connected to the position switching portion, and a movable valve portion connected to the neutral valve portion so that the position in the flow path direction can be changed.
  • the movable valve portion is provided with a seal portion that is provided around the movable valve portion and is in close contact with the inner surface of the valve box around the first opening, and the position in the flow path direction is changed with respect to the neutral valve portion.
  • a first movable valve portion that can be connected, and a second movable valve portion that is slidable in the direction of the flow path with respect to the first movable valve portion.
  • the gate valve includes a plurality of first urging portions built in the valve box, and a second urging portion disposed between the first movable valve portion and the second movable valve portion.
  • the plurality of first urging portions are driven by an incompressible fluid to urge the first movable valve portion toward the first opening portion in the flow path direction, thereby opening the seal portion to the first opening.
  • a function enabling close contact with the inner surface of the valve box around the portion, and connecting the first movable valve portion to the neutral valve portion so that the position in the flow path direction can be changed, and the first movable valve portion Has a function of energizing toward the center position in the flow path direction.
  • the second urging portion drives the thickness dimension of the first movable valve portion and the second movable valve portion in the flow path direction so as to be adjustable.
  • the gate valve includes an incompressible fluid driving device that drives the plurality of first urging portions with an incompressible fluid.
  • the rotating device sets the neutral valve body to the valve closing position when power is interrupted.
  • the rotating device can sequentially operate a rotating operation of the rotating shaft and a closing operation of the first urging unit. Thereby, at the time of normal power feeding, the electric actuator of the rotating device rotates the neutral valve body. At the same time, the rotating device can rotationally drive the neutral valve body during power interruption. Thereby, it is set as the gate valve which can be normally closed.
  • the plurality of first urging portions are driven by the incompressible fluid driving device, and urge the first movable valve portion toward the first opening portion in the flow path direction so that the seal portion is urged. It has the function of enabling close contact with the inner surface of the valve box around the first opening.
  • the second urging portion connects the first movable valve portion to the neutral valve portion so that the position in the flow path direction can be changed, and the first movable valve portion and the second movable valve portion are connected to each other. It has a function to urge toward the center position in the flow path direction.
  • the second urging portion drives the thickness dimension of the first movable valve portion and the second movable valve portion in the flow path direction so as to be adjustable.
  • the rotating device includes an electric power urging device that sets the neutral valve body to the valve closed position by an urging force when the electric power is interrupted, and a rotation switching device that switches rotation of the rotating shaft by the electric actuator and the electric power urging device. And having.
  • the electric actuator rotates the neutral valve body during normal power feeding, the electric actuator does not need to be driven against the urging force of the power interruption urging device. For this reason, the electric actuator needs only a small output. Therefore, the gate valve can be reduced in size, space-saving, and normally closed.
  • the rotating device includes a return device that brings the power-off urging device into a return state when power is recovered. Thereby, it becomes a gate valve that can be normally closed and maintain safety only by starting the return device at the time of power failure recovery (when power is restored from the power failure state).
  • the rotating shaft is provided with a counterweight for the neutral valve body.
  • each of the plurality of first biasing portions is arranged at a position acting on the first movable valve portion in the valve box, and It may be provided along one movable valve part.
  • the plurality of first biasing portions may apply a tensile force to the first movable valve portion.
  • the plurality of first biasing portions may apply a compressive force to the first movable valve portion.
  • the third urging portion may be a leaf spring or a coil spring.
  • the movable valve portion disposed in the hollow portion of the valve box is constituted by the first movable valve portion and the second movable valve portion.
  • the gate valve includes a first movable valve portion, a second movable valve portion fitted in a state in which the first movable valve portion can be slidably sealed in the axial direction, and a second movable valve portion. And a neutral valve body that is held via the urging portion.
  • the gate valve according to the first aspect of the present invention connects the first movable valve portion to the neutral valve portion so that the position in the flow passage direction can be changed, and the first movable valve portion in the flow passage direction.
  • a third urging portion that urges toward the central position is provided.
  • the gate valve according to the first aspect of the present invention is provided inside the valve box, presses the first movable valve portion toward the seal surface of the valve box inner surface, and is driven by the incompressible fluid driving device.
  • a first urging portion constituting an elevating mechanism that can be expanded and contracted.
  • a valve body is comprised by two 1st movable valve parts and 2nd movable valve parts, and 2nd 2nd urging
  • the first urging portion functions when the valve is opened to the valve closed state, and conversely, when the valve is opened from the valve closed state to the valve opened state, the third urging unit functions.
  • the biasing unit functions.
  • the normal closing operation can be realized by the first urging unit driven by the incompressible fluid driving device.
  • the structure which the 1st energizing part also had the function of the 3rd energizing part is realizable. Thereby, since weight reduction of a valve body structure can be achieved further, it is more preferable.
  • the incompressible fluid drive device for example, a device that can be driven by hydraulic pressure can be employed.
  • the air cylinder is included in the valve body structure, and a supply path for introducing pressurized air to the air cylinder is necessary, which complicates the valve body structure.
  • the 1st energizing part concerning the above-mentioned mode of the present invention is arranged inside the valve box, is not included in the valve body structure, and can be driven by the incompressible fluid driving device. Therefore, simplification of the valve body structure is brought about.
  • the gate valve according to the above aspect of the present invention by adopting a structure in which the first urging portion is arranged inside the valve box, the reaction force of the O-ring to be crushed by the gate valve is received by the valve box. Therefore, the rigid body of the rotating shaft and the neutral valve portion can be designed without considering the reaction force of the O-ring. This brings about a weight reduction of the valve body structure.
  • the gate valve according to the above aspect of the present invention provides a gate valve that can perform a highly reliable partitioning operation, reduce the weight of the movable valve portion, and realize a 100% back pressure cancellation rate. be able to.
  • FIG. 2 is an enlarged cross-sectional view along the flow path showing the main part along line AO in FIG. 1, and showing the case where the valve element is disposed at a retractable position (FREE).
  • FIG. 2 is an enlarged cross-sectional view along a flow path showing a main part along line B-O in FIG. 1, and showing a case where a valve body is arranged at a retractable position (FREE).
  • FIG. 2 is an enlarged cross-sectional view along a flow path showing a main part along a line C—O in FIG. 1, and shows a case where a valve body is arranged at a retractable position (FREE).
  • FIG. 2 is an enlarged cross-sectional view showing a main part of an urging portion C in FIG. 1, showing a case where a valve body is arranged at a retractable position (FREE).
  • It is sectional drawing along the flow path which shows the structure of the gate valve which concerns on embodiment of this invention, and is a figure which shows the case where the valve body is arrange
  • FIG. 2 is an enlarged cross-sectional view along the flow path showing the main part along line AO in FIG.
  • FIG. 2 is an enlarged cross-sectional view along the flow path showing the main part along line B-O in FIG. 1, showing a case where the valve body is arranged at a valve closing position (positive pressure or no differential pressure).
  • FIG. 2 is an enlarged cross-sectional view along the flow path showing the main part along the line C—O in FIG. 1, showing a case where the valve body is arranged at a valve closing position (positive pressure or no differential pressure).
  • FIG. 2 is an enlarged cross-sectional view showing a main part of an urging portion C in FIG.
  • FIG. 1 shows a case where a valve body is arranged at a valve closing position (positive pressure or no differential pressure).
  • FIG. 2 is an enlarged cross-sectional view along a flow path showing a main part along line AO in FIG. 1, and showing a case where a valve body is arranged at a back pressure position.
  • FIG. 2 is an enlarged cross-sectional view along a flow path showing a main part along a line B-O in FIG. 1, and showing a case where a valve body is arranged at a back pressure position.
  • FIG. 2 is an enlarged cross-sectional view along the flow path showing the main part along line C—O in FIG. 1, showing a case where the valve body is arranged at a back pressure position. It is a figure which shows the ball plunger mechanism used in the modification of embodiment of this invention. It is sectional drawing along the flow path which shows the structure of the gate valve in the modification of embodiment of this invention, and is a figure which shows the case where the valve body is arrange
  • FREE retractable position
  • the movable valve portion A corresponds to the first movable valve portion of the present invention
  • the movable valve portion B corresponds to the second movable valve portion of the present invention
  • the urging part A corresponds to the first urging part of the present invention
  • the urging part B corresponds to the second urging part of the present invention
  • the urging part C corresponds to the third urging part of the present invention. It corresponds.
  • FIG. 1 is a plan view orthogonal to the flow path showing the configuration of the gate valve in the present embodiment.
  • FIG. 2 is a cross-sectional view along the flow path showing the configuration of the gate valve in the present embodiment, and is a view showing a case where the valve body is arranged at the retractable position (FREE).
  • FIG. 2 corresponds to the line segment BOC in FIG. 3 to 6 are views showing a case where the valve body is arranged at the retractable position (FREE), as in FIG.
  • FIG. 3 is an enlarged cross-sectional view along the flow path showing the main part along the line AO in FIG. 1, and shows the structure of a member located in the vicinity of the biasing part A built in the valve box. It is.
  • FIG. 1 is a plan view orthogonal to the flow path showing the configuration of the gate valve in the present embodiment.
  • FIG. 2 is a cross-sectional view along the flow path showing the configuration of the gate valve in the present embodiment, and is a view showing a case where the valve
  • FIG. 4 is an enlarged cross-sectional view along the flow path showing the main part along the line B-O in FIG. 1 and shows the urging part B arranged between the movable valve part A and the movable valve part B. It is a figure which shows the structure of the member located in the vicinity.
  • FIG. 5 is an enlarged cross-sectional view along the flow path showing the main part along the line C—O in FIG. 1, and the movable valve part A and the movable valve at a position where the urging part A and the urging part B do not exist.
  • It is a figure which shows the part B. 6 is an enlarged cross-sectional view showing a main part of the urging portion C in FIG. 1, and is a view of the urging portion C in the depth direction of the drawing in FIG.
  • FIG. 7 is a cross-sectional view along the flow path showing the configuration of the gate valve in the present embodiment, and is a view showing a case where the valve body is arranged at the valve closed position (positive pressure or no differential pressure).
  • FIG. 7 corresponds to the line segment BOC in FIG. 8 to 11 are views showing a case where the valve body is arranged at the valve closed position (positive pressure or no differential pressure), as in FIG.
  • FIG. 8 is an enlarged cross-sectional view along the flow path showing the main part along the line AO in FIG. 1, and shows the structure of the member located in the vicinity of the urging part A built in the valve box. It is.
  • FIG. 9 is an enlarged cross-sectional view along the flow path showing the main part along the line B-O in FIG.
  • FIG. 10 is an enlarged cross-sectional view along the flow path showing the main part along the line C—O in FIG. 1, and the movable valve part A and the movable valve at a position where the urging part A and the urging part B do not exist.
  • FIG. 11 is an enlarged cross-sectional view showing a main part of the urging portion C in FIG. 1, and is a view of the urging portion C in the depth direction of the drawing in FIG.
  • FIG. 12 is a cross-sectional view along the flow path showing the configuration of the gate valve in the present embodiment, and is a view showing a case where the valve body is arranged at the back pressure position.
  • FIG. 12 corresponds to the line segment BOC in FIG. 13 to 15 are views showing the case where the valve element is arranged at the back pressure position, as in FIG.
  • FIG. 13 is an enlarged cross-sectional view along the flow path showing the portion along the line AO in FIG. 1, and shows the structure of the member located near the urging portion A built in the valve box. is there. 14 is an enlarged cross-sectional view along the flow path showing the main part along the line B-O in FIG.
  • FIG. 15 is an enlarged cross-sectional view along the flow path showing the main part along the line C—O in FIG. 1, and the movable valve portion A and the movable valve at a position where the urging portion A and the urging portion B do not exist. It is a figure which shows the part B.
  • FIG. 23 is a schematic configuration diagram illustrating the hydraulic drive device and the urging unit A in FIG.
  • FIG. 24 is a perspective view for explaining the arrangement of the urging portion A in FIG.
  • FIG. 25 is a perspective view for explaining the arrangement of the urging portion A in FIG. 2.
  • 26 to 28 are cross-sectional views showing a hydraulic pressure generating portion of the hydraulic drive device in FIG.
  • FIG. 29 is a top view for explaining a part of the rotation device and the hydraulic drive device in the present embodiment.
  • FIG. 30 is a front view for explaining a part of the rotation device and the hydraulic drive device in the present embodiment.
  • FIG. 31 is a cross-sectional view in the direction of the rotation axis for explaining a part of the rotation device and the hydraulic drive device in the present embodiment.
  • FIG. 32 is a front view for explaining another example of the rotating device in the present embodiment.
  • FIG. 33 is a front view for explaining another example of the rotating device in the present embodiment.
  • a gate valve 100 is a pendulum type slide valve as shown in FIGS.
  • the gate valve 100 includes a valve box 10 having a hollow part 11, a first opening part 12a and a second opening part 12b which are provided so as to be opposed to each other with the hollow part 11 therebetween, and a valve box.
  • the neutral valve body 5 which is arrange
  • a flow path H is set from the first opening 12a toward the second opening 12b. In the following description, the direction along the flow path H may be referred to as the flow path direction H.
  • the gate valve 100 has a valve closing position where the neutral valve body 5 is closed with respect to the first opening 12a (FIG. 7), and an open state where the neutral valve body 5 is retracted from the first opening 12a (FIG. 2). It functions as a position switching unit that operates between the valve open position. Further, the gate valve 100 has a rotating shaft 20 having an axis extending in the flow path direction H.
  • the neutral valve body 5 includes a neutral valve section 30 connected to the position switching section (neutral valve body 5), and a movable valve section connected to the neutral valve section 30 so that the position in the flow direction H can be changed. 40.
  • the movable valve section 40 includes a movable valve section A60 (movable valve frame section) and a movable valve section B50 (movable valve plate section).
  • the movable valve portion A60 (movable valve frame portion) is provided with a first seal portion 61 that is provided around the movable valve portion A and is in close contact with the inner surface of the valve box 10 positioned around the first opening 12a.
  • the movable valve portion B50 (movable valve plate portion) is slidable in the flow direction H with respect to the movable valve portion A60 (movable valve frame portion).
  • the valve box 10 includes a plurality of urging portions A70 (pistons).
  • the urging portion A70 disposed inside the valve box 10 constitutes an elevating mechanism capable of expanding and contracting that presses the movable valve portion A60 in a direction toward the seal surface.
  • the urging unit A70 is connected to a hydraulic drive device (incompressible fluid drive device) 700 and is driven by hydraulic pressure.
  • the urging portion A70 urges the movable valve portion A60 toward the first opening portion 12a in the flow path direction H, and the first seal portion 61 is positioned around the first opening portion 12a. It has a function to be able to adhere to the inner surface.
  • the gate valve according to the embodiment of the present invention connects the movable valve portion A to the neutral valve portion so that the position in the flow direction can be changed, and the movable valve portion A is set to the central position in the flow direction.
  • An urging portion C that urges toward the side is provided.
  • the gate valve according to the embodiment of the present invention includes a biasing portion that constitutes an elevating mechanism capable of expanding and contracting, which presses the movable valve portion A in a direction toward the sealing surface of the valve box inner surface 10A. A.
  • the two movable valve portions A and B and one urging portion B constitute a valve body, and the other urging portion A has a configuration built in the valve box.
  • the weight of the valve body structure can be reduced by the weight of the part A.
  • a biasing part B (spring) is arranged between the movable valve part A60 (movable valve frame part) and the movable valve part B50 (movable valve plate part) (built in the movable valve part).
  • the biasing part B drives the movable valve part A60 (movable valve frame part) and the movable valve part B (movable valve plate part) so that the thickness dimension in the flow path direction H can be adjusted.
  • the valve H is closed from the retracted position where the flow path H is not provided to the position corresponding to the first opening 12a.
  • the movable valve unit 40 moves by a pendulum motion.
  • the urging unit A70 built in the valve box 10 is disposed inside the valve box 10 and can be driven by hydraulic pressure (pressurized incompressible fluid) supplied from the hydraulic driving device 700 (fixed part). ) 71 and a movable portion 72 that can be expanded and contracted in the direction from the fixed portion 71 toward the movable valve portion A60 by the hydraulic drive portion (fixed portion) 71. Further, the urging portion A70 may have a spring 73 that urges the movable portion 72 in a direction to retract.
  • a ring-shaped seal member (O-ring) 75 is provided at the distal end side position of the movable portion 72.
  • the movable part 72 expands and contracts in a state where the movable part 72 is sealed so as to isolate the vacuum side (vacuum space) where the movable valve part A60 side is disposed from the hydraulic drive part (fixed part) 71 side by the seal member 75. It is supposed to be free.
  • the urging portion A70 has a function of moving the movable valve portion A60 toward the first opening 12a by bringing the tip of the urging portion A70 into contact with the movable valve portion A60 by hydraulic pressure.
  • the biasing part A70 brings the movable valve part A60 into contact with the inner surface of the valve box 10 by the function of moving the movable valve part A60 toward the first opening 12a, and the movable valve part A60 is brought into contact with the inner surface of the valve box 10. Press to close the flow path H (valve closing operation).
  • the urging portion C90 retracts the movable valve portion A60 after separating the movable valve portion A60 from the inner surface of the valve box 10 by the function of allowing the movable valve portion A60 to be separated from the first opening 12a.
  • the flow path H is opened (release operation).
  • Mechanical contact operation by the biasing portion A70 that makes the movable valve portion A60 contact the inner surface of the valve box 10 and mechanical separation by the biasing portion C90 that pulls the movable valve portion A60 away from the inner surface of the valve box 10.
  • the biasing portion B that drives the movable valve portion A60 and the movable valve portion B50 so as to adjust the thickness dimension in the flow path direction H is provided between the movable valve portion A and the movable valve portion B. It is arranged. That is, the urging portion B is built in the movable valve portion. Due to the presence of the urging portion B, the movable valve portion A and the movable valve portion B are linked in a series of operations (valve closing operation, release operation, retreat operation). By the release operation and the retreat operation, the movable valve unit 40 performs a valve opening operation that retreats from the valve opening / closing position to the retraction position to open the valve.
  • the valve body is constituted by the two movable valve portions A60 and B50, the two urging portions B80 and the urging portion C90, and another one.
  • the biasing part A can be configured to be built in the valve box. That is, in the embodiment of the present invention, the weight of the valve body can be reduced by the amount that the other urging portion A is built in the valve box. Therefore, according to the embodiment of the present invention, it is possible to provide a gate valve that can perform a highly reliable partitioning operation, reduce the weight of the movable valve portion, and realize a 100% back pressure cancellation rate. it can.
  • the valve box 10 is constituted by a frame having a hollow portion 11.
  • a first opening 12a is provided on the upper surface of the frame in the figure, and a second opening 12b is provided on the lower surface of the frame in the figure.
  • the gate valve 100 is inserted between a space where the first opening 12a is exposed (first space) and a space where the second opening 12b is exposed (second space).
  • the gate valve 100 partitions (closes) the flow path H connecting the first opening 12a and the second opening 12b, that is, the flow path H connecting the first space and the second space.
  • the partitioning state is opened (connecting the first space and the second space).
  • the rotary shaft 20 In the hollow portion 11 of the valve box 10, the rotary shaft 20, the neutral valve portion 30, the two movable valve portions A60 (slide valve plate) and the movable valve portion B50 (counter plate) constituting the movable valve portion 40, and 2
  • One urging portion B80 holding spring
  • an urging portion C90 auxiliary spring
  • An urging portion A is provided inside the frame constituting the valve box 10.
  • the rotating shaft 20 extends substantially parallel to the flow path H, penetrates the valve box 10 and is rotatably provided.
  • the rotating shaft 20 can be rotated by a driving device (not shown).
  • a connecting member (not shown) is fixed to the rotary shaft 20.
  • This connecting member is a substantially flat plate member, for example, and is fixed to one end of the rotating shaft 20 with a screw or the like.
  • the neutral valve portion 30 extends in a direction orthogonal to the axis of the rotary shaft 20 and is disposed so as to be included in a plane parallel to this direction.
  • the neutral valve portion 30 is fixed to the rotating shaft 20 via a connecting member (not shown) or directly without a connecting member (not shown).
  • the neutral valve portion 30 includes a circular portion 30 a that overlaps the movable valve portion 40, and a rotating portion 30 b that rotates the circular portion 30 a as the rotating shaft 20 rotates.
  • the rotating portion 30b is located between the rotating shaft 20 and the circular portion 30a, and is formed in an arm shape in which two arms extend from the rotating shaft 20 toward the circular portion 30a.
  • the circular part 30a may be called an arm part.
  • the rotary shaft 20 and the neutral valve section 30 are provided so as to rotate with respect to the valve box 10 but do not change in position in the flow path H direction.
  • the rotary shaft 20 can be selectively connected to either the upper side or the lower side along the flow path direction H with respect to the neutral valve portion 30. Alternatively, it can be attached to the entire neutral valve body 5, that is, both surfaces of the neutral valve body 5 with respect to the rotating shaft 20.
  • the gate valve when the gate valve is closed, the gate valve is opened and closed based on the arrangement of the gate valve in which the neutral valve body 5 moves so that the movable valve portion 40 closes the first opening 12a. The case will be described.
  • the movable valve portion 40 has a substantially disc shape, a movable valve portion B50 formed substantially concentrically with the circular portion 30a, and a substantially annular movable valve portion arranged so as to surround the movable valve portion B50. A60.
  • the movable valve portion A60 is connected to the neutral valve portion 30 so as to be slidable in the flow path H direction.
  • the movable valve part B50 is fitted to the movable valve part A60 so as to be slidable.
  • the movable valve portion B50 and the movable valve portion A60 can move while sliding in the directions (reciprocating directions) indicated by reference numerals B1 and B2 (FIG. 2) by an urging portion B80 (holding spring).
  • the directions indicated by reference numerals B1 and B2 are directions perpendicular to the surfaces of the movable valve portion B50 and the movable valve portion A60, and are the flow path H direction parallel to the axial direction of the rotary shaft 20.
  • an inner peripheral crank portion 50c is formed in the entire region near the outer periphery of the movable valve portion B50.
  • An outer peripheral crank portion 60c is formed in the entire region near the inner periphery of the movable valve portion A60.
  • the outer peripheral crank portion 60c has a sliding surface 60b parallel to the flow path H direction.
  • the inner peripheral crank portion 50c has a sliding surface 50b parallel to the flow path H direction.
  • the outer peripheral crank portion 60c and the inner peripheral crank portion 50c are fitted so that the sliding surfaces 50b and 60b can slide.
  • a third seal portion 52 sliding seal packing made of an O-ring or the like is disposed between the outer peripheral crank portion 60c and the inner peripheral crank portion 50c.
  • a first seal portion made of, for example, an O-ring or the like formed in an annular shape corresponding to the shape of the first opening 12a on the surface of the movable valve portion A60 facing (contacting) the inner surface of the valve box 10 61 (valve plate seal packing) is provided.
  • the first seal portion 61 is movable in contact with the valve box inner surface 10A of the valve box 10 serving as the peripheral edge of the first opening 12a with the movable valve 40 covering the first opening 12a when the valve is closed. It is pressed by the valve part A60 and the valve box inner surface 10A of the valve box 10. Thus, the first space is reliably isolated from the second space (partition state is ensured).
  • the surface of the movable valve portion B50 facing (contacts) the valve box inner surface 10A of the valve box 10 is formed in an annular shape corresponding to the shape of the second opening 12b, for example, an O ring or the like. Two seal portions 51 (counter cushions) are provided.
  • a rotating shaft drive mechanism (rotating device) 200 (see FIG. 29) for driving (rotating) the rotating shaft 20 is connected to the outer end of the valve shaft 10 of the rotating shaft 20.
  • a rotating shaft drive mechanism (rotating device) 200 for rotating the rotating shaft 20 is an electric actuator.
  • the rotating shaft drive mechanism (rotating device) 200 includes a planetary gear clutch 210 coupled to the rotating shaft 20, a motor 220 as a drive source connected to the planetary gear clutch 210, as shown in FIGS.
  • the power interruption urging device 230 connected to the planetary gear clutch 210, the rotation switching device 240, and the return device are included.
  • the rotary shaft drive mechanism 200 sets the neutral valve body (valve body) 5 to the valve closed position when power is interrupted (when supply of drive power is interrupted).
  • the rotating shaft drive mechanism 200 is configured to be able to sequentially operate the rotating operation of the rotating shaft 20 and the closing operation of the urging unit A70.
  • the electrical disconnection biasing device 230 is a spring lean type having a mainspring spring 231 having a biasing force.
  • the power interruption urging device 230 is configured to release the mainspring spring 231 wound during normal energization at the time of power interruption. At this time, the power interruption urging device 230 rotates the rotary shaft 20 so that the neutral valve body 5 is set to the valve closed position by the urging force of the mainspring spring 231.
  • the rotation switching device 240 is configured to be able to switch a connection state with respect to a drive source that rotationally drives the rotary shaft 20 between energization and power interruption. Specifically, during normal energization (when driving power is supplied), the rotating shaft 20 is rotationally driven by the motor 220. Further, at the time of abnormal power interruption (when the supply of drive power is cut off), the rotary shaft 20 is rotationally driven by the power interruption urging device 230.
  • the return device has a function of setting the power interruption urging device 230, whose urging force is released at the time of power interruption, to a return state in which torque is stored when power is restored from the power interruption state. .
  • the power interruption urging device 230, the rotation switching device 240, and the return device may have a common configuration.
  • the rotating shaft drive mechanism 200 has a planetary gear clutch (planetary gear clutch) 210.
  • planetary gear clutch planetary gear clutch
  • the planetary gear clutch 210 includes a drive gear 211, a sun gear 212, a plurality of planetary gears 213, an internal gear 214, a flange portion 215, and a casing 201 that houses these.
  • the drive gear 211 is rotated by driving the motor 220.
  • the drive gear 211 is rotatably attached to the outer periphery of the rotary shaft 20.
  • the sun gear 212 is formed integrally with the drive gear 211.
  • the sun gear 212 is rotatably attached to the outer periphery of the rotary shaft 20.
  • the planetary gear 213 is located outside the sun gear 212 in the radial direction of the rotation shaft 20.
  • a plurality of planetary gears 213 are provided in the circumferential direction of the rotating shaft 20.
  • the plurality of planetary gears 213 are all arranged so as to mesh with the sun gear 212.
  • the internal gear 214 is rotatably attached to the outer periphery of the rotary shaft 20.
  • the internal gear 214 has inner peripheral teeth 214 a that face the inner side in the radial direction of the rotary shaft 20.
  • the internal gear 214 meshes with each planetary gear 213 by the internal peripheral teeth 214a.
  • the inner peripheral teeth 214 a of the internal gear 214 are located on the radially outer side of the rotary shaft 20 with respect to the planetary gears 213.
  • the flange portion 215 is connected so as to protrude toward the outer periphery of the rotary shaft 20.
  • the flange portion 215 rotates integrally with the rotation shaft 20.
  • One end of a support shaft 213 c that passes through each planetary gear 213 is rotatably attached to the flange portion 215.
  • the rotating shaft 20 is an output shaft in the planetary gear clutch 210.
  • the sun gear 212 and the drive gear 211 are connected by a sleeve 211a through which the rotary shaft 20 passes.
  • Outer teeth 214 b are provided on the outer periphery of the internal gear 214.
  • the internal gear 214 is connected so as to mesh with the internal relay gear 233 at the outer peripheral teeth 214b.
  • the inner relay gear 233 is rotatably attached to the outer periphery of the mainspring shaft 231c.
  • the mainspring shaft 231 c is disposed at a position parallel to the rotation shaft 20.
  • the inner relay gear 233 is integrated with an outer relay gear 234 that is coaxial with the mainspring shaft 231c.
  • the outer relay gear 234 is rotatably attached to the outer periphery of the mainspring shaft 231c.
  • a small relay gear 243 is engaged with the outer relay gear 234.
  • the small relay gear 243 is rotatably attached to the outer periphery of the brake shaft 241c.
  • the brake shaft 241c is disposed at a position parallel to the rotary shaft 20 and the mainspring shaft 231c.
  • the small relay gear 243 is integrated with a large relay gear 244 that is coaxial with the brake shaft 241c.
  • the main relay gear 235 is meshed with the large relay gear 244.
  • the small mainspring gear 235 is integrated with a large mainspring gear 236 that is coaxial with the mainspring shaft 231c.
  • the small mainspring gear 235 and the large mainspring gear 236 rotate integrally with the mainspring shaft 231c.
  • a brake gear 245 is meshed with the mainspring gear 236.
  • the brake gear 245 rotates integrally with the brake shaft 241c.
  • a mainspring spring 231 is connected to the mainspring shaft 231c.
  • the mainspring shaft 231c can be driven by a mainspring spring 231 whose urging force is released.
  • the mainspring shaft 231c is provided with a winding stop portion 231d so that the winding stops in a constant state when the mainspring spring 231 is wound up.
  • the mainspring shaft 231c is provided with a sensor 250 that detects that the mainspring spring 231 has been sufficiently tightened.
  • the sensor 250 is connected to the excitation brake 241 so as to output a detection signal.
  • An excitation actuated brake 241 as a rotation switching device 240 that releases the wound mainspring 231 when power is cut off is connected to the brake shaft 241c.
  • the mainspring spring 231 is a torque storage unit.
  • the mainspring spring 231 rotates the rotary shaft 20 via the relay gear portion when the urging force is released.
  • the rotating shaft drive mechanism 200 is comprised so that the neutral valve body 5 may be made into a valve closed position.
  • the excitation actuated brake 241 exhibits a brake function for the mainspring spring 231 when energized. Thereby, the rotation of the mainspring shaft 231c is stopped during energization.
  • the excitation actuating brake 241 releases the brake function for the mainspring spring 231 and releases the urging force of the mainspring spring 231 when power is interrupted. Thereby, the mainspring shaft 231c can be freely rotated when the power is cut off.
  • a non-excitation actuating brake 221 is connected to the motor 220.
  • the non-excitation actuating brake 221 exhibits a brake function when power is cut off, and stops the rotation of the motor 220.
  • the non-excitation actuated brake 221 cancels the brake function when energized, and enables the motor 220 to be rotationally driven.
  • the motor 220 may be accompanied by a gear unit that adjusts the torque and the number of rotations and a control motor unit.
  • the rotating shaft 20 is provided with a stopper 21 that regulates the rotational position.
  • the stopper 21 restricts the rotation shaft 20 so that the rotation shaft 20 can rotate between the valve closing position and the valve opening position.
  • a switching valve 704 that detects that the neutral valve body 5 has reached the valve closing position is connected to the stopper 21.
  • the switching valve 704 is turned ON, as will be described later, the hydraulic pressure supplied from the connected hydraulic drive device 700 decreases in the hydraulic drive unit (fixed unit) 71, so that the movable unit 72 of the urging unit A 70. It is possible to drive in the closing direction that extends.
  • the rotating shaft drive mechanism 200 exhibits the brake function and maintains this state during normal energization (a state in which drive power is supplied). Further, the mainspring spring 231 is maintained in a wound state.
  • the brake function of the non-excitation actuated brake 221 does not function during normal energization. Therefore, the driving force of the motor 220 can rotate the rotary shaft 20 via the planetary gear clutch 210.
  • the excitation actuated brake 241 maintains a state in which the rotation of the brake shaft 241c is stopped. In this state, the state where the rotation of the brake gear 245 integrated with the brake shaft 241c is stopped is maintained. Therefore, the mainspring gear 236 that meshes with the brake gear 245, and the mainspring shaft 231c integrated with the mainspring gear 236 and the small mainspring gear 235 all maintain a stopped state.
  • the large relay gear 244 meshing with the small mainspring gear 235, the small relay gear 243 integral with the large relay gear 244, the external relay gear 234 meshing with the small relay gear 243, and the internal relay gear 233 integral with the external relay gear 234 Also, the state where the rotation is stopped is maintained. Similarly, the internal gear 214 that meshes with the internal relay gear 233 by the outer peripheral teeth 214b maintains the state where the rotation is stopped.
  • the driving gear 211 is rotationally driven in the planetary gear clutch 210. Then, the sun gear 212 integral with the drive gear 211 rotates. Further, the planetary gear 213 that meshes with the sun gear 212 rotates. At this time, the planetary gear 213 rotates around the axis of the support shaft 213c.
  • the non-excitation actuated brake 221 functions as a brake in the rotary shaft drive mechanism 200.
  • the motor 220 is not driven.
  • the drive gear 211 is stopped from rotating.
  • the sun gear 212 integrated with the drive gear 211 stops rotating.
  • the excitation function brake 241 does not function as a brake.
  • the brake shaft 241c becomes rotatable.
  • the brake gear 245 integrated with the brake shaft 241c is in a rotatable state.
  • the mainspring gear 236 that meshes with the brake gear 245 is in a rotatable state. Further, the small mainspring gear 235 and the mainspring shaft 231c integrated with the large mainspring gear 236 are in a rotatable state. Then, the urging force of the wound mainspring spring 231 is released, and the mainspring shaft 231c rotates.
  • the small mainspring gear 235 integrated with the mainspring shaft 231c rotates.
  • the large relay gear 244 meshing with the small mainspring gear 235 and the small relay gear 243 integral with the large relay gear 244 rotate.
  • the outer relay gear 234 that meshes with the small relay gear 243 and the inner relay gear 233 that is integral with the outer relay gear 234 both rotate.
  • the rotating shaft driving mechanism 200 releases the wound mainspring spring 231 to rotate the rotating shaft 20 to the valve closing position.
  • the stopper 21 integrated with the rotating shaft 20 rotates to the valve closing position.
  • the stopper 21 contacts the switching valve 704. Then, the switching valve 704 is turned on, and the movable portion 72 of the urging portion A70 is driven in the closing direction in which the valve 72 is closed.
  • the non-excitation actuated brake 221 When returning from the power-off state, it is in a state where it can be energized. For this reason, the non-excitation actuated brake 221 is in a state where the brake function does not function. Therefore, the driving force of the motor 220 can rotate the rotary shaft 20 via the planetary gear clutch 210.
  • the excitation actuated brake 241 maintains a state where the brake function does not function. As a result, the brake shaft 241c is maintained in a rotatable state.
  • the brake gear 245 integrated with the brake shaft 241c maintains a rotatable state.
  • the mainspring gear 236 that meshes with the brake gear 245 is in a rotatable state.
  • the small mainspring gear 235 and the mainspring shaft 231c integrated with the large mainspring gear 236 are in a rotatable state.
  • the small mainspring gear 235 integrated with the mainspring shaft 231c is in a rotatable state.
  • Both the large relay gear 244 meshing with the small mainspring gear 235 and the small relay gear 243 integral with the large relay gear 244 are in a rotatable state.
  • outer relay gear 234 that meshes with the small relay gear 243 and the inner relay gear 233 that is integral with the outer relay gear 234 are both rotatable.
  • the internal gear 214 that meshes with the internal relay gear 233 by the outer peripheral teeth 214b is in a rotatable state.
  • the driving gear 211 is rotationally driven in the planetary gear clutch 210. Then, the sun gear 212 integral with the drive gear 211 rotates. Further, the planetary gear 213 that meshes with the sun gear 212 rotates. At this time, the planetary gear 213 rotates around the axis of the support shaft 213c.
  • the internal relay gear 233 that meshes with the internal gear 214 and the outer peripheral teeth 214b rotates.
  • the outer relay gear 234 integrated with the inner relay gear 233 rotates.
  • the small relay gear 243 that meshes with the outer relay gear 234, the large relay gear 244 that is integral with the small relay gear 243, and the small spring gear 235 that meshes with the large relay gear 244 all rotate.
  • the mainspring shaft 231c integrated with the small mainspring gear 235 rotates.
  • the connected mainspring spring 231 By rotating the mainspring shaft 231c, the connected mainspring spring 231 is wound. At the same time, the mainspring gear 236 integrated with the mainspring gear 235 rotates with the rotation of the mainspring gear 235. As the mainspring gear 236 rotates, the brake shaft 241c rotates.
  • the brake gear 245 integrated with the brake shaft 241c, the mainspring gear 236 engaged with the brake gear 245, and the mainspring shaft 231c integrated with the mainspring gear 236 are all in a stopped state.
  • the mainspring spring 231 is maintained in a sufficiently tightened state, and enters a standby state for occurrence of power interruption.
  • the rotation of the mainspring gear 235 integrated with the mainspring gear 236 is stopped. Accordingly, the large relay gear 244 meshing with the small mainspring gear 235, the small relay gear 243 integral with the large relay gear 244, the outer relay gear 234 meshing with the small relay gear 243, and the inner relay gear 233 integral with the outer relay gear 234 are: In either case, the rotation is stopped. Similarly, the internal gear 214 that meshes with the internal relay gear 233 by the outer peripheral teeth 214b is in a state where the rotation is stopped. When the motor 220 is driven in this state, the driving force of the motor 220 is transmitted to the rotary shaft 20 and the neutral valve body 5 can be rotated.
  • the return device At the start of energization (when power failure is restored), the return device has an operable configuration in which the mainspring spring 231 is tightened by driving the motor 220 without functioning the excitation actuated brake 241.
  • the biasing part B80 (holding spring) is located between the movable valve part A and the movable valve part B, and is locally disposed in a region where the movable valve part A60 and the movable valve part B50 overlap. That is, the urging portion B80 is built in the movable valve portion 40 (between the movable valve portion A60 and the movable valve portion B50).
  • the number of places where the urging portion B80 is provided is preferably three or more, and is provided apart from each other.
  • the arrangement of the urging portions B80 that are separated from each other is not limited to the arrangement at equal intervals, and a structure in which a plurality of urging portions B80 are arranged at non-equal intervals may be employed.
  • FIG. 1 shows a configuration example in which three urging portions B80 are arranged at the same angular position (120 degrees) when viewed from the center O of the valve body.
  • the urging portion B80 guides (regulates) the movement of the movable valve portion B by the long shaft portion of the bolt-shaped guide pin 81 fixed to the movable valve portion A60 (movable valve frame portion: slide valve plate). It is configured.
  • the holding spring constituting the urging portion B80 is formed of an elastic member (for example, a spring, rubber, etc.).
  • the biasing portion B80 (holding spring) drives the movable valve portion A60 and the movable valve portion B50 so that the thickness dimension in the flow path direction H can be adjusted. Accordingly, the movable valve portion B50 is interlocked with the moving direction of the movable valve portion A60 (the direction of reference sign B1 or the direction of reference sign B2). At that time, since the movable valve portion B50 is driven so that the thickness dimension in the flow path direction H can be adjusted, the first seal portion 61 of the movable valve portion A60 serves as the valve box of the valve box 10 when the valve is closed. The impact when contacting the inner surface 10A is reduced.
  • the impact when the second seal part 51 of the movable valve part B50 contacts the valve box inner surface 10B of the valve box 10 is mitigated.
  • a sealed space is formed by the movable valve portion B50, the valve box inner surface 10B, and the second seal portion 51.
  • the movable valve portion B50 is provided with a vent hole 53.
  • the guide pin 81 is fixed to the movable valve portion A60 and is erected in the flow path direction H, and is constituted by a rod-like body having a uniform thickness.
  • the guide pin 81 penetrates through the urging portion B80 and is fitted into a hole 50h formed in the movable valve portion B50.
  • the guide pin 81 is configured so that the direction in which the movable valve portion B50 and the movable valve portion A60 slide (the axis indicated by the symbol Q) does not deviate from the directions indicated by the symbols B1 and B2, and the movable valve portion B50. Even when the movable valve portion A60 slides, the position of the movable valve portion B50 and the movable valve portion A60 is restricted so that the movable valve portion B50 and the movable valve portion A60 can move in parallel without changing their postures. Guide with certainty.
  • the urging portion C90 (auxiliary spring) is provided between the neutral valve portion 30 and the movable valve portion A60, and in the flow direction H of the valve box 10, the movable valve portion A60 is flowed to the neutral valve portion 30.
  • the position in the direction is connected to be changeable, and the movable valve portion A is biased toward the center position in the flow path direction.
  • biasing part C90 functions. That is, the urging portion C90 has a structure that promotes a mechanical separation operation for pulling the movable valve portion A60 away from the inner surface of the valve box 10 from the valve closed state (FIG. 7).
  • the urging portion C90 has a circular portion 30a located at the outer peripheral position of the neutral valve portion 30, is located at the outer peripheral position of the movable valve portion A60, and is provided at a portion overlapping the circular portion 30a (position regulating portion 65). Yes.
  • the urging portion C90 is disposed at the same angular position as the urging portion B80 when viewed from the center O of the valve body.
  • FIG. 1 shows a configuration example in which three urging portions C90 are arranged.
  • the urging portion C90 is also an elastic member (for example, a spring, rubber, a leaf spring, etc.) similarly to the urging portion B80.
  • FIG. 6 is a schematic cross-sectional view showing the urging portion C90 when the gate valve is in the valve open state (FIG. 2).
  • FIG. 11 is a schematic cross-sectional view showing the urging portion C90 when the gate valve is in the closed state (FIG. 7).
  • the circular spring portion 30a of the neutral valve portion 30 is such that the portions close to both ends of the leaf spring (biasing portion C90) sandwich the ring-shaped members 92a and 92b by the fixing pins 92 and 93. It is locked along the circumferential direction. Further, a portion close to the center portion of the leaf spring is locked to the position restricting portion 65 of the movable valve portion A60 by the printing pin 91.
  • the leaf spring in which the gate valve is in the open state has the curved portion 90A, so that the distance in the height direction is reduced, that is, the movable valve portion A60 is separated from the neutral valve portion 30 (arm). The distance is reduced (FIG. 6).
  • the leaf spring when the gate valve is in the closed state (FIG. 7) is in a state where the distance in the height direction is extended by eliminating the curved portion 90A shown in FIG.
  • the distance of the movable valve portion A60 from the portion 30 (arm) is in a widened state (FIG. 11).
  • the urging unit A70 (elevating mechanism) is built in the valve box, and the valve body including the two movable valve units A, the movable valve unit B, the two urging units B, and the urging unit C described above. It is a separate body.
  • the urging unit A70 is configured to move the distal end 72a of the movable unit 72 by the hydraulic pressure applied to the hydraulic drive unit (fixed unit) 71 when oil (working fluid, pressurized incompressible fluid) is supplied from the hydraulic drive unit 700. It extends toward the movable valve part A60. By this operation, the urging portion A70 urges the movable valve portion A60 along the flow path direction H toward the first opening 12a.
  • the urging portion A70 has a function of allowing the first seal portion 61 to be in close contact with the inner surface 10A of the valve box around the first opening 12a by the extension operation of the movable portion 72.
  • the extending operation of the movable portion 72 can be performed almost simultaneously in the plurality of urging portions A70 built in the valve box 10.
  • the urging portion A70 does not have a function of allowing the first seal portion 61 to be separated from the inner surface 10A of the valve box around the first opening portion 12a, but itself (movable portion 72 described later) is initially moved.
  • a function of returning to a position (a position in a fixing portion 71 described later) is provided. Therefore, the urging unit A70 is an elevating mechanism that can expand and contract in the direction from the urging unit A70 toward the movable valve unit A60.
  • Each of the plurality of urging portions A70 having such a configuration is disposed in the valve box 10 at a position acting on the movable valve portion A60, and is provided along the movable valve portion A60.
  • the number of places where the urging portion A70 is provided is preferably three or more, and are provided apart from each other.
  • the arrangement of the urging portions A70 that are separated from each other is not limited to the arrangement at equal intervals, and a structure in which a plurality of urging portions A70 are arranged at non-equal intervals may be employed.
  • 1, 23, and 24 illustrate a configuration example in which four urging portions A ⁇ b> 70 are arranged at the same angular position (90 degrees) when viewed from the center O of the valve body.
  • the urging portion A70 in the configuration example shown in FIG. 1 is configured such that the angular position of the urging portion A70 does not overlap with the angular position where the urging portion B80 and the urging portion C described above are arranged.
  • the urging portion A70 in the present embodiment is a hydraulic drive portion (fixed portion) 71 provided inside the valve box 10, and a movable that can extend and contract in a direction from the hydraulic drive portion (fixed portion) 71 toward the movable valve portion A60. It is comprised from the part 72 and the spring 73 (FIG. 23) which urges
  • the hydraulic drive unit (fixed unit) 71 is connected to the hydraulic drive unit 700, and the movable unit 72 can be expanded and contracted in the above direction by the hydraulic pressure supplied from the hydraulic drive unit 700.
  • the hydraulic drive device 700 generates a hydraulic pressure generating unit 701 that generates hydraulic pressure to supply hydraulic pressure to the hydraulic drive unit (fixed unit) 71, and the hydraulic pressure generating unit 701 to the hydraulic drive unit (fixed unit) 71.
  • a switching valve 704 that can detect that rotation is in a closed position and switch hydraulic pressure supply, a drive unit 705 such as a motor that drives the hydraulic pressure generation unit 701, and a control unit (controller) that controls the drive unit 705 706 and a power source 707 that supplies power for driving the driving unit 705.
  • the hydraulic pressure generator 701 is configured to be normally closed as shown in FIGS.
  • the urging unit A70 is provided with a multi-stage sealing device that prevents oil (working oil) that is a working fluid from leaking to the vacuum side where the movable valve unit A60 is disposed when hydraulically driven.
  • the hydraulic pressure generating unit 701 supplies a hydraulic pressure that is positive or negative pressure to the hydraulic driving unit (fixed unit) 71 when the movable unit 72 expands and contracts, and supplies hydraulic pressure to the hydraulic driving unit 71 at the end of the operation. It can be cut. Further, the hydraulic pressure generating unit 701 can appropriately control the contact state of the movable unit 72 with the movable valve unit A60.
  • FIG. 26 to 28 are cross-sectional views showing a hydraulic pressure generating unit 701 in the hydraulic drive device 700.
  • FIG. FIG. 26 shows a closed state of the hydraulic pressure generating unit 701 in the hydraulic drive device 700.
  • FIG. 27 shows a closed / open state of the hydraulic pressure generator 701 in the hydraulic drive device 700.
  • FIG. 28 shows an overpressure state of the hydraulic pressure generator 701 in the hydraulic drive device 700.
  • the hydraulic pressure generation unit 701 pressurizes and supplies the hydraulic drive unit (fixed unit) 71 with pressure oil that is an incompressible fluid, and biases the hydraulic cylinder 710 to bias it.
  • a member 720, a cylinder driving unit 730 capable of driving the hydraulic cylinder 710 against the urging member 720, and a casing 750 for housing these members are provided.
  • the hydraulic cylinder 710 includes a bottomed cylindrical cylinder body 711 and a piston 712 that is relatively movable in the axial direction inside the cylinder body 711.
  • the piston 712 has a hydraulic flow path 713 that penetrates the inside along the axis of the piston 712, and the hydraulic flow path 713 is connected to the hydraulic pipe 702.
  • the hydraulic flow path 713 can flow in or out of the hydraulic pipe 702 with pressure oil (driving fluid) that is an incompressible fluid.
  • a hydraulic flow path 713 of the piston 712 connected to the hydraulic pipe 702 passes through the casing 750.
  • the end 712a of the piston 712 is sealed with an O-ring and a sealing material.
  • An end 712 a of the piston 712 is attached and fixed to the casing 750.
  • An end 712 b opposite to the end 712 a of the piston 712 is located inside the cylinder body 711.
  • the piston 712 is positioned coaxially with the cylinder body 711.
  • An end 711a (first end) of the cylinder body 711 is opened.
  • the end 712 b of the piston 712 is inserted into the cylinder body 711 through the end 711 a of the cylinder body 711.
  • the cylinder body 711 is movable relative to the piston 712 in the axial direction.
  • the cylinder body 711 is movable relative to the casing 750 in the axial direction.
  • the end 711 b (second end) of the cylinder body 711 closes the internal space of the cylinder body 711.
  • a hydraulic space 714 is formed between the bottom surface of the cylinder body 711 (the surface opposite to the end portion 711b) and the end surface of the end portion 712b of the piston 712.
  • the hydraulic space 714 is filled with pressure oil (driving fluid) that is an incompressible fluid.
  • the volume of the hydraulic space 714 increases or decreases when the cylinder body 711 moves relative to the piston 712 in the axial direction. As the volume of the hydraulic space 714 increases or decreases, the pressure oil filled in the hydraulic space 714 flows into or out of the hydraulic pipe 702 via the hydraulic flow path 713.
  • the flange part 711c is provided in the outer peripheral position at the end part 711a of the cylinder body 711.
  • the flange portion 711c is provided around the end portion 711a so as to protrude outward in the radial direction of the cylinder body 711.
  • a circumferential groove 711d is provided on the surface opposite to the end portion 711a in the vicinity of the outer peripheral surface of the cylinder body 711.
  • An end 721a of an inner spring 721 serving as a biasing member 720 is in contact with the circumferential groove 711d.
  • the end portion 722a of the outer spring 722 is in contact with the surface of the flange portion 711c that faces the end portion 711b, which is the outer peripheral position of the circumferential groove 711d.
  • the biasing member 720 has an inner spring 721 and an outer spring 722.
  • the inner spring 721 and the outer spring 722 are coil springs.
  • the inner spring 721 and the outer spring 722 are disposed coaxially with the cylinder body 711 and the piston 712.
  • the inner spring 721 has an inner diameter that is slightly larger than the diameter of the outer peripheral surface of the cylinder body 711.
  • the outer spring 722 has an inner diameter that is slightly larger than the outer diameter of the inner spring 721.
  • the outer spring 722 has a larger wire diameter than the inner spring 721.
  • the outer spring 722 has a larger urging force than the inner spring 721.
  • the inner spring 721 and the outer spring 722 can transmit a biasing force in the expansion / contraction direction to the cylinder body 711. Both the inner spring 721 and the outer spring 722 are urged so as to press the flange portion 711 c of the cylinder body 711 toward the end portion 712 a of the piston 712. An end 721 b of the inner spring 721 and an end 722 b of the outer spring 722 are in contact with the casing 750. Thereby, the urging member 720 urges the cylinder body 711 against the casing 750.
  • the biasing member 720 is not limited to this configuration as long as it can bias the cylinder body 711.
  • a bush 711e and Y-shaped packings 711f and 711g are provided on the inner peripheral surface of the cylinder body 711 at a position close to the end 711a.
  • the inner peripheral surface of the cylinder body 711 and the outer peripheral surface of the piston 712 are slidably sealed.
  • An end portion 731a of the drive shaft 731 of the cylinder driving portion 730 is connected to the end portion 711b of the cylinder body 711 as a coaxial shape at an outer position.
  • the cylinder drive unit 730 includes a drive shaft 731 that moves the cylinder body 711 relative to the piston 712 in the axial direction, and a drive transmission unit that drives the drive shaft 731 by a drive unit 705 such as a motor.
  • the drive shaft 731 is disposed in the casing 750 so as to be coaxial with the cylinder body 711 and the piston 712.
  • the drive shaft 731 is movable in the axial direction.
  • the drive shaft 731 is movable relative to the piston 712 and the casing 750 in the axial direction.
  • a ball screw 731c is formed on the outer peripheral surface of the drive shaft 731 at a position close to the end 731a.
  • the length of the ball screw 731c in the axial direction of the drive shaft 731 is such that, when the cylinder body 711 moves in the axial direction, the inner screw surface 732c, which will be described later, with respect to the entire range (end region, screw forming surface) of the ball screw 731c. It is set so that the screwed state can be maintained.
  • a screw drive gear 732 is coaxially arranged at the outer peripheral position of the ball screw 731c on the radially outer side of the drive shaft 731.
  • the drive shaft 731 is supported with respect to the casing 750 by a screw drive gear 732.
  • a rotation stopper 731h which will be described later, is provided to protrude in the radial direction at an end 731b opposite to the end 731a of the drive shaft 731.
  • the rotation stopper 731 h is located inside a sliding groove 757 provided in the casing 750.
  • the rotation stopper 731h regulates the moving direction of the drive shaft 731 so that the drive shaft 731 can move in the axial direction without rotating.
  • the screw drive gear 732 is cylindrical.
  • the screw drive gear 732 is rotatably supported with respect to the casing 750.
  • Ball bearings 732 f and 732 g are provided on the outer periphery of the screw drive gear 732.
  • the ball bearings 732f and 732g support the screw drive gear 732 so that the casing 750 can rotate coaxially with the drive shaft 731.
  • the screw drive gear 732 does not move in the axial direction with respect to the casing 750.
  • An inner screw surface 732 c is formed on the inner periphery of the screw drive gear 732.
  • the inner screw surface 732 c is screwed with the ball screw 731 c of the drive shaft 731.
  • An outer gear 732 d is formed on the outer periphery of the screw drive gear 732.
  • the outer gear 732d is formed at a position sandwiched between the ball bearing 732f and the ball bearing 732g in the axial direction of the screw drive gear 732.
  • the outer gear 732d is located on the outermost side in the radial direction.
  • the screw driving gear 732 can be integrally connected to an inner screw driving gear 732a formed with an inner screw surface 732c and an outer screw driving gear 732b formed with an outer gear 732d.
  • the outer gear 732d meshes with the drive gear 733d.
  • the drive gear 733 d has a rotation axis parallel to the axis of the drive shaft 731.
  • the drive gear 733d is rotatably supported by a rotation shaft 734 parallel to the axis of the drive shaft 731.
  • the rotating shaft 734 is supported by the casing 750 at a position spaced outward in the radial direction of the drive shaft 731.
  • the drive gear 733d is formed integrally with the drive gear 733e that is coaxial with the drive gear 733d.
  • the drive gear 733e has a larger diameter than the drive gear 733d.
  • the drive gear 733e rotates integrally with the drive gear 733d.
  • the drive gear 733e meshes with the drive gear 735.
  • the drive gear 735 has a rotation axis parallel to the axis of the drive shaft 731.
  • the drive gear 735 is rotatably supported by a rotation shaft 736 that is parallel to the axis of the drive shaft 731.
  • the rotating shaft 736 is supported by the casing 750 at a position further away from the rotating shaft 734 at an outer position in the radial direction of the drive shaft 731.
  • the drive gear 735 meshes with the drive gear 737.
  • the drive gear 737 has a rotation axis parallel to the axis of the drive shaft 731.
  • the drive gear 737 is fixed to a rotation drive shaft 705 a of a drive unit 705 such as a motor parallel to the axis of the drive shaft 731.
  • the rotation drive shaft 705 a is disposed at a position further outside the rotation shaft 736 at the outer position in the radial direction of the drive shaft 731.
  • the rotation drive shaft 705a is rotatably attached to the casing 750 as a penetrating state.
  • the screw drive gear 732, the ball bearings 732f and 732g, the inner screw surface 732c, the outer gear 732d, the drive gear 733d, the drive gear 733e, the rotation shaft 734, the drive gear 735, the rotation shaft 736, and the drive gear 737 constitute a drive transmission unit. To do.
  • the casing 750 includes a cylindrical casing cylinder 751, a casing lid 752 that closes one end of the casing cylinder 751, a rear casing 753 that closes the other end of the casing cylinder 751, and the inside of the casing cylinder 751 (storage space 755). It consists of a ring 754 provided between the casing lid 752 and the rear casing 753, and a lid portion 758 that closes the other end of the rear casing 753.
  • the casing cylinder 751 has an internal shape that extends coaxially with the cylinder body 711, the piston 712, and the drive shaft 731.
  • a housing space 755 is formed inside the casing cylinder 751.
  • the storage space 755 stores therein the cylinder main body 711, the piston 712, the inner spring 721 and the outer spring 722 serving as the biasing member 720, and the end 731a of the drive shaft 731.
  • the storage space 755 has two openings.
  • a piston 712 is located in one of the two openings, and this opening is closed by a casing lid 752.
  • a piston 712 is connected and fixed to the casing lid 752.
  • the end portion 712a of the piston 712 passes through the casing lid 752.
  • a drive shaft 731 is located at the other of the two openings of the storage space 755, and this opening is closed by a rear casing 753.
  • a drive shaft 731 passes through the rear casing 753.
  • the storage space 755 is provided with a ring 754 at a position close to the rear casing 753.
  • the ring 754 is disposed around the drive shaft 731 so as to be coaxial with the drive shaft 731.
  • the inner periphery of the ring 754 and the outer periphery of the drive shaft 731 are separated from each other.
  • the ring 754 has an inner diameter equal to the diameter of the inner periphery of the flange portion 711 c, that is, the outer peripheral surface of the cylinder body 711.
  • the ring 754 has an outer diameter that is equal to the outer diameter of the flange portion 711c.
  • the end portion 721 b of the inner spring 721 and the end portion 722 b of the outer spring 722 that serve as the biasing member 720 are in contact with the surface of the ring 754 facing the casing lid 752.
  • a circumferential groove 754d is provided on the surface of the ring 754 facing the casing lid 752 so as to correspond to the circumferential groove 711d.
  • the end portion 721b of the inner spring 721 serving as the biasing member 720 is in contact with the circumferential groove 754d.
  • the end 722b of the outer spring 722 is in contact with the surface of the ring 754 that faces the casing lid 752 and is located on the outer periphery of the circumferential groove 754d.
  • the casing cylinder 751 and the rear casing 753 are provided with drive system support portions 751k and 753k extending from the housing space 755 toward the radially outer side of the drive shaft 731.
  • the drive system support portions 751k and 753k are formed in a flange shape forming a part in the circumferential direction with respect to the casing cylinder 751 and the rear casing 753.
  • the drive system support part 751k and the drive system support part 753k are in contact with each other. Between the drive system support portion 751k and the drive system support portion 753k, there are a screw drive gear 732, ball bearings 732f and 732g, an inner screw surface 732c, an outer gear 732d, a drive gear 733d, a drive gear 733e, a rotating shaft 734, and a drive. A gear 735, a rotation shaft 736, and a drive gear 737 are sandwiched.
  • Screw drive gear 732, ball bearings 732f and 732g, inner screw surface 732c, outer gear 732d, drive gear 733d, drive gear 733e, and rotating shaft 734 are provided on the opposing surfaces of drive system support 751k and drive system support 753k. Concavities and convexities corresponding to the drive gear 735, the rotating shaft 736, and the drive gear 737 are formed. The uneven portion supports these members.
  • a rotation drive shaft 705a passes through the drive system support portion 751k.
  • a drive unit 705 such as a motor is attached to the drive system support unit 751k.
  • a ball bearing 732f is provided between the casing cylinder 751 and the external screw drive gear 732b (screw drive gear 732).
  • the ball bearing 732f rotatably supports the screw drive gear 732 with respect to the casing cylinder 751.
  • a ball bearing 732g is provided between the rear casing 753 and the external screw drive gear 732b (screw drive gear 732).
  • the ball bearing 732g rotatably supports the screw drive gear 732 with respect to the rear casing 753.
  • the rear casing 753 is formed with a rear space 756 that serves as a relief of the end portion 731b of the drive shaft 731 when the drive shaft 731 moves in the axial direction.
  • a screw drive gear 732 is disposed at a position serving as a boundary between the rear space 756 and the storage space 755. That is, the drive shaft 731 is arranged so as to be movable in the axial direction at a position that becomes a boundary between the rear space 756 and the storage space 755.
  • a slip groove 757 is formed in the rear space 756 so as to increase in diameter.
  • the slip groove 757 is located on the radially outer side of the drive shaft 731.
  • the slip groove 757 allows the rotation of the drive shaft 731 to be restricted and allows the drive shaft 731 to move in the axial direction by the rotation stopper 731 h sliding inside the slide groove 757.
  • An end of the rear space 756 is closed by a lid 758.
  • a limiter switch 760 with which the end 731b of the drive shaft 731 can come into contact is provided at a position close to the lid 758. Limiter switch 760 is connected to control unit 706.
  • the limiter switch 760 detects that the end portion 731b of the drive shaft 731 contacts the limiter switch 760 when the drive shaft 731 moves from the storage space 755 toward the rear space 756. At this time, the limiter switch 760 outputs to the control unit 706 that the end portion 731b of the drive shaft 731 has reached a predetermined position.
  • the control unit 706 that has received this signal outputs a signal for stopping the driving of the driving unit 705 such as a motor.
  • the driving unit 705 such as a motor stops driving. Therefore, the movement position of the drive shaft 731 is regulated by the position where the limiter switch 760 is installed.
  • the hydraulic pressure generating unit 701 can drive the driving unit 705 such as a motor by the output signal of the control unit 706.
  • the drive unit 705 such as a motor is driven to rotate the rotary drive shaft 705a.
  • the drive gear 737 attached to the rotation drive shaft 705a is rotated by the rotation of the rotation drive shaft 705a.
  • the rotation of the drive gear 737 is transmitted to the drive gear 735 that meshes with the drive gear 737.
  • the rotation of the drive gear 735 is transmitted to the drive gear 733e that meshes with the drive gear 735.
  • the rotation of the drive gear 733e is transmitted to a drive gear 733d formed integrally with the drive gear 733e.
  • the rotation of the drive gear 733d is transmitted to the outer gear 732d that meshes with the drive gear 733d, and the screw drive gear 732 rotates.
  • the rotation of the outer gear 732d is transmitted to the inner screw surface 732c of the screw driving gear 732 formed integrally with the outer gear 732d.
  • the rotation of the inner screw surface 732c of the screw drive gear 732 is transmitted to the ball screw 731c of the drive shaft 731 that meshes with the screw drive gear 732, and the drive shaft 731 rotates.
  • the screw drive gear 732 is supported by ball bearings 732f and 732g. For this reason, even if the screw drive gear 732 rotates, the screw drive gear 732 does not move in the axial direction.
  • the drive shaft 731 is supported by the inner screw surface 732c, and the rotation stopper 731h is positioned inside the slide groove 757, so that the movement direction of the drive shaft 731 is restricted. For this reason, the drive shaft 731 moves in the axial direction when the screw drive gear 732 rotates. As described above, the rotational transmission force of the drive unit 705 such as a motor is transmitted to the drive shaft 731 by the drive transmission unit, and the drive shaft 731 moves in the axial direction.
  • the cylinder body 711 is provided with an urging force by an inner spring 721 and an outer spring 722 serving as an urging member 720 that contacts the flange portion 711c.
  • the biasing force from the biasing member 720 is generated in the direction in which the inner spring 721 and the outer spring 722 extend. That is, the direction in which the urging force applied from the urging member 720 to the cylinder body 711 is coincident with the direction in which the cylinder body 711 is separated from the screw drive gear 732. Therefore, the urging force of the urging member 720 is applied to the cylinder body 711 so that the volume of the hydraulic space 714 in the cylinder body 711 is reduced.
  • the gate valve of the present embodiment it can be opened when normally closed, that is, when the driving unit 705 such as a motor is driven. For this reason, the direction in which the drive shaft 731 moves by driving the drive unit 705 such as a motor is opposite to the direction of the urging force of the urging member 720.
  • the drive shaft 731 moves in a direction away from the piston 712 by driving the drive unit 705 such as a motor. Therefore, the drive shaft 731 moves so that the volume of the hydraulic space 714 in the cylinder body 711 increases by driving the drive unit 705 such as a motor.
  • the hydraulic pressure generating unit 701 when the driving unit 705 such as a motor is not driven, the volume of the hydraulic space 714 is reduced by the biasing force of the biasing member 720 as shown in FIG. As a result, pressure oil (driving fluid) that is an incompressible fluid flows into the hydraulic pipe 702 from the hydraulic space 714 via the hydraulic flow path 713. At this time, hydraulic pressure acts on the urging portion A70, and the tip 72a of the movable portion 72 extends.
  • driving fluid driving fluid
  • the hydraulic pressure generating unit 701 drives the driving unit 705 such as a motor
  • the volume of the hydraulic space 714 is increased by the driving force of the driving unit 705 such as a motor as shown in FIG.
  • pressure oil driving fluid
  • hydraulic pressure acts on the urging portion A70, and the tip 72a of the movable portion 72 is retracted.
  • the hydraulic pressure generation unit 701 even when the cylinder body 711 overruns toward the casing lid 752 for some reason, as shown in FIG. 28, the flange portion 711 c comes into contact with the casing lid 752 and the cylinder body 711. Stop moving. Thereby, the reduction
  • the urging portion A70 has a function of moving the movable valve portion A60 toward the first opening portion 12a by bringing the tip 72a of the movable portion 72 into contact with the lower surface 60sb of the movable valve portion A60 and itself (
  • the movable part 72) has two functions of returning to the initial movement position (position in the fixed part 71), and plays the role of a lift mechanism of the valve body.
  • FIG. 2 to 5 show a state in which the movable valve portion 40 (movable valve portion A60, movable valve portion B50) is not in contact with any of the valve box inner surfaces 10A, 10B.
  • This state is called a state in which the valve body is FREE.
  • 6 is an enlarged view showing a main part of the urging portion C in the FREE state (FIG. 2), and is a view of the urging portion C seen in the depth direction of the drawing in FIG.
  • the movable valve portion A60 When the valve body is in a FREE state, the movable valve portion A60 is moved to the inner surface of the valve box 10 by the function of the urging portion A70 described above, that is, the function of moving the movable valve portion A60 toward the first opening 12a. It moves until it contacts 10A, and the flow path H is closed by pressing the movable valve part A60 against the valve box inner surface 10A (valve closing operation).
  • FIG. 7 to 10 show a state in which the flow path H is closed by the valve closing operation described above. This state is referred to as a positive pressure / no differential pressure state.
  • FIG. 11 is an enlarged view showing a main part of the urging portion C in a state of no positive pressure / differential pressure (FIG. 7), and is a view of the urging portion C in FIG.
  • the first seal portion 61 (valve plate seal packing) made of an O-ring or the like and the third seal portion 52 (sliding seal packing) made of an O-ring or the like are substantially the same. Since they are arranged on the same cylindrical surface (for example, arranged so as to overlap the line R shown in FIGS. 3 to 5), a back pressure cancellation rate of about 100% can be obtained.
  • the biasing part A70 in the gate valve of the present embodiment is built in the valve box 10, and includes two movable valve parts A60, a movable valve part B50, two biasing parts B80, and a biasing part C90. It is separate from the neutral valve body 5.
  • the gate valve 100 of this embodiment can reduce the weight of the valve body structure by the weight of the urging portion A70.
  • the urging unit A70 is configured so that the working fluid is operated by the incompressible hydraulic pressure by the hydraulic drive device 700, space is saved as compared with the case where the working fluid uses a compressive fluid such as compressed air (compressed air). At the same time, a reliable valve closing operation can be performed. Furthermore, operational safety can be improved as compared with compressed air driving.
  • the gate valve of the present embodiment a highly reliable partitioning operation is possible and the weight of the valve body is reduced, so that the drive required for the vertical movement of the valve body and the pivoting movement of the valve body is required. Since the force can be suppressed, the structure of the valve body can be simplified and reduced in weight.
  • FIGS. 21 and 22 are vertical cross-sectional views.
  • FIG. 21 shows a case where the valve body is arranged at the retractable position
  • FIG. 22 shows a case where the valve body is arranged at the valve closed position (Patent Document 4).
  • the valve body structure includes a ring-shaped air cylinder 580 corresponding to the urging portion A70 in the gate valve 100 of the present embodiment.
  • a supply path 541 for introducing compressed air to 580 is also necessary, and the valve body structure is extremely complicated.
  • the gate valve having a large area is closed.
  • the air cylinder 580 is formed in a ring shape, the required processing accuracy is extremely high in order to satisfy the required high operation accuracy and high sealing performance. For this reason, we are anxious about the high cost at the time of manufacture of such a conventional gate valve.
  • the urging portion A70 according to the embodiment of the present invention is arranged inside the valve box 10 and is not included in the valve body structure, the valve body structure can be simplified.
  • the supply path 541 that is essential for the conventional gate valve 501 is not necessary in the gate valve 100 of the present embodiment.
  • a gate valve that satisfies the required high operation accuracy and high sealing performance is manufactured at low cost. be able to.
  • the gate valve according to the embodiment of the present invention is disposed inside the valve box and employs the urging portion A70 that is not included in the valve body structure. Since it is possible to select members and devices that are driven with lower power than conventional ones at a lower cost, the present invention contributes to the realization of an energy-saving gate valve.
  • the present invention can perform a highly reliable partitioning operation, can reduce the weight of the movable valve portion, can realize a 100% back pressure cancellation rate, and contributes to the provision of a partition valve having a normally closed structure. .
  • the present invention is not limited to this configuration.
  • the urging portion A70 may be provided at a position close to the first opening 12a. If the urging portion A70 can act on the movable valve portion A60, the position where the urging portion A70 is provided can be freely set.
  • the urging portion A70 shown in FIG. 2 shows a configuration example in which a compressive force is applied to the movable valve portion A60, and the valve closing operation is performed by a mechanical contact operation.
  • the present invention is not limited to this configuration.
  • the urging unit A70 having a function of acting on the compression force in addition to the above-described cylinder mechanism, for example, a pneumatic mechanism, an electromagnetic mechanism, and the like can be cited.
  • the pneumatic mechanism or the like is particularly effective as the urging portion A70 when the gate valve 100 is not a large area. This is because the opening / closing operation can be performed safely without depending on the installation posture of the gate valve 100.
  • FIG. 2 is arranged below the movable valve portion A60 (the back side of the drawing) in FIG. 1, as is clear from FIG. 3 which is a cross-sectional view taken along the line AO in FIG. ing. That is, this embodiment shows a configuration example in which the urging portions A70 are arranged at four positions at a pitch of 90 degrees as shown in FIGS.
  • This configuration example shows a case where four urging portions A70 are arranged at equal intervals, but the present invention is not limited to this configuration, and the number of urging portions A70 is three. A plurality of the above may be sufficient, and the intervals of the urging portions A70 may be non-uniform.
  • this embodiment has disclosed the pin-shaped cylinder as a member which is locally arranged inside the valve box 10 and functions as the urging portion A70, the present invention is not limited to this member. Absent.
  • a ring-shaped cylinder may be used as the urging portion A70.
  • FIG. 1 is a cross-sectional view showing a configuration of a gate valve according to an embodiment of the present invention
  • FIG. 2 is a vertical cross-sectional view.
  • 3 is an enlarged view showing the main part along the line AO in FIG. 1
  • FIG. 4 is an enlarged view showing the main part along the line B-O in FIG. 1
  • FIG. 5 is a line C— in FIG. 2 is an enlarged view showing a main part along O.
  • FIG. FIG. 6 is an enlarged view showing a main part of the urging portion C in FIG.
  • the state in which the neutral valve body 5 is FREE means that the neutral valve body 5 is the inner surface of the valve box 10 (the inner surface of the valve box 10 positioned around the first opening 12a and the valve box positioned around the second opening 12b). 10 is not in contact with the inner surface.
  • the urging portion A70 (elevating mechanism) is composed of a fixed portion 71 disposed inside the valve box 10, and a movable portion 72 that can be expanded and contracted by hydraulic pressure in a direction from the fixed portion 71 toward the movable valve portion A60.
  • the movable portion 72 is also disposed inside the valve box 10 together with the fixed portion 71. That is, the urging portion A70 (elevating mechanism) that is separate from the neutral valve body 5 is not in contact with the neutral valve body 5.
  • the urging portion A70 (elevating mechanism) is built in the valve box 10, and is separate from the neutral valve body 5 including the two movable valve portions A60, the movable valve portion B50, and the urging portion B80. There is no.
  • the urging portion A70 is connected to the hydraulic drive device 700 and is provided with a fixed portion 71 disposed inside the valve box 10 and a movable portion 72 that can expand and contract in a direction from the fixed portion 71 toward the movable valve portion A60. It is configured.
  • the urging portion A70 has a function of moving the movable valve portion A60 toward the first opening portion 12a by bringing the tip 72a of the movable portion 72 into contact with the lower surface 60sb of the movable valve portion A60, and the movable valve.
  • it has two functions of enabling the part A60 to be separated from the first opening 12a, and plays a role of a lifting mechanism of the valve body.
  • the distal end 72a of the movable portion 72 constituting the urging portion A70 comes into contact with the lower surface 60sb of the movable valve portion A60 (arrow F1), whereby the movable valve portion A60 constituting the neutral valve body 5 is obtained.
  • Moves toward the inner surface of the valve box 10 (the valve box inner surface 10A of the valve box 10 around the first opening 12a) (arrow F2).
  • a state in which the first seal portion 61 (valve plate seal packing) is in contact with the valve box inner surface 10A of the valve box 10 by this movement is a valve closed position (valve closed state).
  • the movable valve part B50 and the movable valve part A60 are slid through the third seal part 52 in the direction (reciprocating direction) indicated by reference numerals B1 and B2 (FIG. 2) by the holding spring (biasing part B80). However, during this movement, the movable valve portion B50 also moves in the same direction as the movable valve portion A60.
  • FIG. 7 is a longitudinal sectional view showing the structure of the gate valve according to the embodiment of the present invention.
  • 8 is an enlarged view showing the main part along the line AO in FIG. 1
  • FIG. 9 is an enlarged view showing the main part along the line B-O in FIG. 1
  • FIG. 10 is a line C- in FIG. 2 is an enlarged view showing a main part along O.
  • the state in which the neutral valve body 5 is in the valve closed position is a state in which the neutral valve body 5 is in contact with one inner surface of the valve box 10 (the valve box inner surface 10A around the first opening 12a), and the other inner surface ( The inner surface of the valve box 10 positioned around the second opening 12b is not in contact with the second opening 12b.
  • the urging portion A70 (elevating mechanism) extends the movable portion 72 from the fixed portion 71 disposed inside the valve box 10 in the direction toward the movable valve portion A60 by hydraulic pressure, and moves the distal end 72a of the movable portion 72 to the movable valve. It is made to contact
  • the first seal portion 61 provided on the upper surface 60sa of the movable valve portion A60 is moved around the first opening portion 12a of the valve box 10 by moving the movable valve portion A60 toward the first opening portion 12. The state is in contact with the valve box inner surface 10A).
  • FIG. 12 is a longitudinal sectional view showing the structure of the gate valve according to the embodiment of the present invention.
  • 13 is an enlarged view showing the main part along line AO in FIG. 1
  • FIG. 14 is an enlarged view showing the main part along line BO in FIG. 1
  • FIG. 15 is a line C— in FIG. 2 is an enlarged view showing a main part along O.
  • FIG. 12 is a longitudinal sectional view showing the structure of the gate valve according to the embodiment of the present invention.
  • 13 is an enlarged view showing the main part along line AO in FIG. 1
  • FIG. 14 is an enlarged view showing the main part along line BO in FIG. 1
  • the state in which the neutral valve body 5 is in the back pressure position means that the neutral valve body 5 is in contact with one inner surface of the valve box 10 (the valve box inner surface 10A around the first opening portion 12a) while maintaining the other inner surface. It is also in contact with the inner surface of the valve box 10 located around the second opening 12b.
  • the reverse pressure is that pressure is applied to the valve body in the direction from the closed state to the open state.
  • the biasing part B80 located between the movable valve part A60 and the movable valve part B50 constituting the valve body functions. That is, the movable valve portion B50 and the movable valve portion A60 move while sliding through the third seal portion 52 in the directions (reciprocating directions) indicated by the reference numerals B1 and B2 (FIG. 12) by the urging portion B80. Since it is possible, when the neutral valve body 5 receives a back pressure, the movable valve part B50 moves in the direction of reference sign B2 with respect to the movable valve part A60.
  • the movable valve portion B50 collides with the other inner surface of the valve box 10 (the valve box inner surface 10B around the second opening 12b).
  • the movable valve portion B50 includes the second seal portion 51 at a location facing the valve box inner surface 10B around the second opening 12b.
  • the mechanism that receives the force received by the neutral valve body 5 (the force received in the direction of the reference sign B2) at the valve box inner surface 10B (back body) of the valve box 10 is a reverse pressure canceling mechanism. .
  • an elastic body is preferably used as the second seal portion 51.
  • the movable valve part B50 collides with the valve box inner surface 10B of the valve box 10
  • dust generated at the moment of collision or the valve box inner surface 10B (back body) of the valve box 10 deforms in millimeters and slides slightly. It is necessary to take countermeasures to prevent garbage that occurs.
  • the second seal portion 51 is an elastic body, the elastic body is deformed at the time of collision, thereby preventing any dust from being generated.
  • the gate valve of the present embodiment there is no configuration for generating an urging force by a spring or the like as a configuration for rotating the rotary shaft 20 so as to allow normal close. Therefore, the structure which rotates the rotating shaft 20 against this biasing force is not provided. For this reason, the output of the motor and the urging force of the mainspring spring can be reduced. Thereby, the gate valve which can be reduced in cost, reduced in size, and saved in space can be provided.
  • the rotary shaft 20 can be closed and rotated and the movable valve portion B50 can be closed. Furthermore, when the power shutoff valve is closed, the rotating shaft 20 can be closed and the movable valve portion B50 can be closed sequentially. Thereby, it can be set as the structure of the gate valve which can be normally closed, without preparing a secondary power supply etc. at the time of a power failure. At the same time, it is possible to provide a gate valve with improved safety during power interruption.
  • FIG. 17 to 19 are longitudinal sectional views showing the structure of the gate valve in the modified example of the embodiment of the present invention.
  • FIG. 17 is an enlarged view showing a main part along line AO corresponding to FIG. 3 when the valve body is arranged at the retractable position (FREE).
  • FIG. 18 is an enlarged view showing a main part along the line AO corresponding to FIG. 8 when the valve body is arranged at the valve closed position (positive pressure or no differential pressure).
  • FIG. 19 is an enlarged view showing a main part along line AO corresponding to FIG. 13 when the valve body is arranged at the back pressure position.
  • the urging portion A70 in FIGS. 17 to 19 shows a configuration example having both a function of applying a compressive force to the movable valve portion A60 and a function of applying a tensile force to the movable valve portion A60. Yes.
  • the biasing portion A70 of the modified example includes a fixed portion 71 disposed inside the valve box 10 and a movable portion that can expand and contract in a direction from the fixed portion 71 toward the movable valve portion A60. 72. Further, a ball plunger as shown in FIG. 16 is embedded in the side surface of the movable portion 72. When the movable portion 72 is in a retracted state so that the movable portion 72 is disposed at a position close to the hydraulic drive portion (fixed portion) 71, the ball plunger is more movable than the ring-shaped seal member (O-ring) 75. Located near the tip.
  • an oil leakage buffering space such as a double seal for the seal member in the straight line introduction portion by hydraulic pressure such as the portion.
  • hydraulic pressure such as the portion.
  • the probability of oil contamination in the vacuum chamber can be lowered, which is particularly recommended.
  • the vapor pressure of the hydraulic oil is determined by the required degree of vacuum or the like, but is generally selected to be about 10 ⁇ 3 Pa or less.
  • the “plunger” is a mechanical element part for positioning and fixing a workpiece.
  • the plunger is a plunger body, a spring built in the plunger body, and a tip member (ball or Pin).
  • the plunger has a mechanism in which when a load is applied to the tip member, the tip member sinks into the plunger body, and when the load is released, the tip member returns to the original position by the force of the spring.
  • the ball plunger is a plunger on which the ball located at the tip of the spring operates, and can be sunk by a load applied not only in the vertical direction but also in the lateral direction, and thus is suitable for positioning the sliding mechanism. .
  • a ball plunger 72B is provided on the side surface of the movable portion 72, and a concave portion 65e serving as a receiver for the ball plunger 72B and the distal end portion of the movable portion 72 is disposed in a portion 65A where the distal end portion of the movable portion 72 abuts in the movable valve portion A60.
  • the biasing portion A70 of the modified example has a function of applying a compressive force by hydraulic pressure to the movable valve portion A60 and a function of applying a tensile force to the movable valve portion A60. Is possible.
  • the repulsive force corresponding to the displacement amount of the spring 73 depends on the hydraulic pressure on the piston surface of the cylinder. It is equivalent to power. That is, since the repulsive force of the spring 73 is converted into hydraulic pressure, it is transmitted to the drive unit 705 via the hydraulic pressure generating unit 701. That is, the drive unit 705 cannot maintain an equilibrium state, that is, a stop state unless it exerts a force equivalent to the repulsive force of the spring 73.
  • the hydraulic circuit can be shut off by the solenoid valve 703.
  • the neutral valve portion 30 and the movable valve are configured in the same manner as the configuration in which the ball plunger 72B is provided between the movable valve portion A60 and the movable portion 72 that is a part of the urging portion A70.
  • the gate valve of the modified example can perform a highly reliable partitioning operation as compared with the gate valve of the above-described embodiment and further reduces the weight of the valve body.
  • the driving force required for turning the valve body can be further suppressed. For this reason, the normal close improvement is realized, and the simplification and weight reduction of the configuration of the valve body are easily realized.
  • biasing which consists of the same structure as embodiment mentioned above between movable valve part B50 and the part 67 which is a part of movable valve part A60, and exists in the position which overlaps with movable valve part B50.
  • Part B80 is arranged. Therefore, also in the gate valve in this modified example, the driving force required when the valve body is moved up and down or the valve body is swung is obtained by the urging portion B80.
  • the urging portion C90 that is essential in the gate valve of the above-described embodiment can be excluded from the valve body structure. Become. Therefore, according to the modified example, the driving force required when the valve body is moved up and down or the valve body is swung can be further suppressed, and a gate valve that simplifies the configuration and reduces the weight of the valve body is provided.
  • the structure which provided the two ball plungers 72B and 65B was disclosed, it is not necessary to incorporate two ball plungers together. That is, in the gate valve of the above-described embodiment, any one of the configurations provided with the two ball plungers 72B and 65B may be adopted.
  • urging portion A70 when a plurality of urging portions A70 are arranged inside the valve box 10, as the urging portion A70, for example, “a structure that applies a compressive force to the movable valve portion A shown in the above-described embodiment”.
  • (First structure) ”and“ the structure that combines the function of applying a compressive force to the movable valve portion A and the function of applying a tensile force to the movable valve portion A60 ”described in the above-described modification ( A configuration in which the “second structure)” is alternately arranged may be employed.
  • a structure in which a plurality of second structures are arranged between two first structures or a structure in which a plurality of first structures are arranged between two second structures may be employed.
  • FIG. 32 is an explanatory view showing another example of the rotating means in the present embodiment.
  • the rotating shaft drive mechanism (rotating device) 200 in the present modification is also an electric actuator for rotating the rotating shaft 20 as in the above-described embodiment.
  • the mainspring shaft 231c and the brake shaft 241c are configured as a single coaxial coaxial 205c.
  • the combined coaxial line 205 c is disposed in parallel with the rotation shaft 20.
  • the combined coaxial line 205c is arranged corresponding to the mainspring shaft 231c in the above-described embodiment.
  • a mainspring spring 231 and an excitation actuated brake 241 are connected to the combined coaxial line 205c.
  • the mainspring spring 231 and the excitation actuating brake 241 are connected to the coaxial coaxial 205c at different positions in the axial direction of the coaxial coaxial 205c.
  • a relay gear 209 is disposed between the motor 220 and the drive gear 211.
  • the large relay gear 244 and the small relay gear 243 are rotatably attached to the rotating shaft 20.
  • the counterweight (balancer) CW of the neutral valve body 5 is provided on the rotary shaft 20 so that the torque required for the motor 220 and the mainspring spring 231 can be reduced.
  • the counterweight (balancer) CW is provided at a position that is a shaft target of the neutral valve body 5 of the rotary shaft 20. Further, the counterweight CW can be provided in the switch 21 for operating the switching valve 704.
  • reference numeral 32 indicates a location where a counterweight (balancer) is attached.
  • FIG. 33 is an explanatory view showing another example of the rotating means in the present embodiment.
  • the rotating shaft drive mechanism (rotating device) 200 in the present modification is also an electric actuator for rotating the rotating shaft 20.
  • the rotating shaft drive mechanism (rotating device) 200 includes a hammer-type power interruption urging device 230 connected to the rotating shaft 20, a rotation switching device, and a return device.
  • the rotating shaft 20 is connected to a motor 220. Further, the rotary shaft 20 is provided with a punch 22 that protrudes outward in the radial direction of the rotary shaft 20.
  • the electrical disconnection urging device 230 includes the punch 22, an arcuate gear (fan gear, sector gear) 273, a tightening gear 237, and a tightening motor (illustrated) as a return device.
  • the hammer 22 protrudes from the rotary shaft 20 outward in the radial direction.
  • the hammer 22 is connected to the rotary shaft 20 at an axial position different from that of the motor 220.
  • the hammer 22 is provided with a projecting portion 22a projecting in the axial direction of the rotary shaft 20 at the tip.
  • the protrusion 22 a rotates around the rotation shaft 20 together with the hammer 22.
  • Arc-shaped gears (fan gears, sector gears) 273 are rotatably attached to the rotary shaft 20.
  • the arcuate gear 273 is attached at a position adjacent to the punch 22 in the axial direction of the rotary shaft 20.
  • the arcuate gear 273 has an arcuate tooth portion 273a in a part of the rotating shaft 20 in the circumferential direction.
  • the arcuate gear 273 has a contact groove 273d inside the arcuate tooth portion 273a in the radial direction of the rotary shaft 20.
  • the contact groove 273d is formed on a surface of the rotary shaft 20 facing in the radial direction.
  • the contact groove 273d has a shape recessed in the circumferential direction of the rotating shaft 20.
  • the contact groove 273d is disposed at a position where the protruding portion 22a of the hammer 22 can contact.
  • the contact groove 273d is provided at a position corresponding to the protrusion 22a in the radial direction of the rotary shaft 20.
  • the valve body 5 performs a pendulum operation between the valve open position and the valve closed position in the circumferential direction of the rotating shaft 20 during normal energization, the arc-shaped tooth portion 273a
  • the protrusion 22a of the hammer 22 is provided around the contact groove 273d so that it does not contact the contact groove 273d.
  • the winding gear 237 is attached to the mainspring shaft 231c.
  • the winding gear 237 is attached at a position corresponding to the arcuate tooth portion 273a of the arcuate gear 273 in the axial direction of the mainspring shaft 231c.
  • the winding gear 237 meshes with the arcuate tooth portion 273a of the arcuate gear 273.
  • a winding motor (not shown) is connected to the mainspring shaft 231c. The winding motor can turn up the mainspring spring 231 by rotating the mainspring shaft 231c.
  • the winding gear 237 and the arcuate gear 273 can transmit rotation to each other.
  • the winding gear 237 does not mesh with the arcuate tooth portion 273a of the arcuate gear 273, that is, when the winding gear 237 is in a position corresponding to the missing tooth portion of the arcuate gear 273, the winding gear 237 and the arcuate gear portion 273 are arcuate.
  • the gear 273 idles and does not transmit rotation to each other.
  • the arcuate gear (fan gear, sector gear) 273 rotates in synchronization with the winding gear 237 in a state where the arcuate tooth portion 273a is engaged with the winding gear 237.
  • the arcuate gear 273 rotates around the rotation shaft 20 and the arcuate tooth portion 273a is disengaged from the winding gear 237, the arcuate gear 273 and the winding gear 237 are not connected.
  • the mainspring spring 231 is maintained in a state of being tightened by a tightening motor (not shown), as shown in FIG.
  • a tightening motor not shown
  • the arcuate gear 273 is positioned in a range where the projecting portion 22a of the punch 22 does not contact in the circumferential direction of the rotary shaft 20. is doing.
  • the arcuate tooth portion 273a of the arcuate gear 273 and the winding gear 237 are engaged.
  • the protrusion 22 a of the punch 22 does not contact any part of the arcuate gear 273.
  • the arcuate gear 273 and the winding gear 237 do not affect the rotation of the rotating shaft 20.
  • the non-excitation actuating brake 221 functions and the motor 220 is not driven.
  • the excitation actuated brake 241 does not function.
  • the urging force of the wound spring 231 is released. Since the arcuate gear 273 is rotatably attached to the rotary shaft 20, the rotation of the arcuate gear 273 may affect the rotary shaft 20 in the initial state where the supply of driving power is cut off. Absent.
  • the arcuate gear 273 that meshes with the winding gear 237 rotates as indicated by an arrow RZ2 in FIG.
  • the arcuate gear 273 rotates around the rotation shaft 20 by an angle corresponding to the arcuate tooth portion 273a.
  • the contact groove 273d integrally rotates around the rotation shaft 20 as shown by an arrow RZ2 in FIG. 33 so as to have the same angle as the arcuate tooth portion 273a.
  • the contact groove 273 d presses the protruding portion 22 a of the punch 22 in the circumferential direction of the rotary shaft 20.
  • the rotating shaft drive mechanism (rotating device) 200 rotates the rotating shaft 20 by a predetermined angle through the winding gear 237, the arc-shaped gear 273, and the hammer 22. Thereby, the rotating shaft drive mechanism (rotating device) 200 can rotate the neutral valve body 5 until it reaches the valve closing position at the time of power interruption. That is, the rotating shaft drive mechanism (rotating device) 200 realizes a configuration capable of normal closing.
  • the excitation actuating brake 241 can be provided with a relaxation device.
  • the mitigation device has a function of preventing the contact groove 273d from coming into contact with the protrusion 22a of the hammer 22 vigorously when the arcuate gear 273 starts to rotate.
  • the relaxation device has a function of limiting the biasing force of the mainspring spring 231 until the arcuate gear 273 and the hammer 22 come into contact with each other.
  • the structure which uses the regenerative resistance inserted between the terminals of a winding motor as a braking force of the drive shaft in a winding motor can be considered.
  • the resistance value of the regenerative resistor in the winding motor can be made variable according to both the angle position of the punch 22 and the angle position of the arcuate gear 273. it can.
  • the braking force to the winding motor is controlled to an ideal value.
  • the relaxation function in the relaxation device can be optimized.
  • a configuration other than this can be adopted as the relaxation device.
  • the rotary shaft drive mechanism (rotating device) 200 drives the tightening motor to a position where the arcuate gear 273 does not contact the punch 22.
  • the arcuate gear 273 is rotated.
  • the arcuate gear 273 is rotated so that the missing tooth portion of the arcuate gear 273 corresponds to the winding gear 237.
  • the winding gear 237 is idled by the winding motor.
  • the mainspring spring 231 is tightened by the tightening motor.
  • the rotary shaft driving mechanism (rotating device) 200 moves the operation of the gate valve 100 during normal energization by causing the excitation actuating brake 241 to function after the mainspring spring 231 has been tightened.
  • the brake function of the non-excitation actuating brake 221 is not functioning.
  • the rotating shaft drive mechanism (rotating device) 200 can maintain a state in which the winding motor is energized without operating the excitation actuating brake 241 when power is restored.
  • maintains the stop state of the winding gear 237 ie, the structure which hold
  • the present invention is widely applied to a gate valve for use in switching between a state in which a flow path connecting two spaces having different properties such as a degree of vacuum, temperature, gas atmosphere, and the like is opened in a vacuum apparatus or the like.
  • a gate valve for use in switching between a state in which a flow path connecting two spaces having different properties such as a degree of vacuum, temperature, gas atmosphere, and the like is opened in a vacuum apparatus or the like.
  • the hydraulic circuit is a closed circuit, a safe and reliable operation state can be maintained in any installation posture.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

La présente invention concerne un robinet-vanne comprenant : un carter de vanne comprenant une partie creuse, une première ouverture et une seconde ouverture, les ouvertures étant prévues pour se faire face et communiquer l'une avec l'autre pour former un passage d'écoulement tout en intercalant la partie creuse entre elles ; un corps de vanne neutre qui est disposé dans la partie creuse du carter de vanne et peut fermer la première ouverture ; un arbre rotatif qui présente un arbre rotatif s'étendant dans une direction du passage d'écoulement et fonctionne comme une partie de commutation de position pour actionner le corps de vanne neutre entre une position de fermeture de vanne dans laquelle le corps de vanne neutre ferme la première ouverture et une position ouverte de vanne dans laquelle le corps de vanne neutre ouvre la première ouverture en étant rétracté à partir de celle-ci ; et un dispositif rotatif pourvu d'un actionneur électrique pour mettre en rotation l'arbre rotatif.
PCT/JP2019/013600 2018-04-02 2019-03-28 Robinet-vanne WO2019194067A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019528147A JP6562333B1 (ja) 2018-04-02 2019-03-28 仕切弁
KR1020197025019A KR102389986B1 (ko) 2018-04-02 2019-03-28 게이트 밸브
CN201980001518.8A CN110557960B (zh) 2018-04-02 2019-03-28 闸阀

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-071148 2018-04-02
JP2018071148 2018-04-02

Publications (1)

Publication Number Publication Date
WO2019194067A1 true WO2019194067A1 (fr) 2019-10-10

Family

ID=68100258

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2019/013600 WO2019194067A1 (fr) 2018-04-02 2019-03-28 Robinet-vanne

Country Status (3)

Country Link
CN (1) CN110557960B (fr)
TW (1) TWI695136B (fr)
WO (1) WO2019194067A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004108471A (ja) * 2002-09-18 2004-04-08 Smc Corp 流量制御機構付きゲートバルブ
JP2014027706A (ja) * 2012-07-24 2014-02-06 Azbil Corp 電動アクチュエータ
JP5613087B2 (ja) * 2011-03-17 2014-10-22 株式会社アルバック 仕切弁

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS527145A (en) * 1975-07-02 1977-01-20 Schade Max G Ventilating valve
CN2577058Y (zh) * 2002-10-09 2003-10-01 中冶集团重庆钢铁设计研究总院 一种高位料仓机械除尘阀
JP3837391B2 (ja) * 2003-03-24 2006-10-25 Ｓｍｃ株式会社 ゲートバルブ
WO2007066537A1 (fr) * 2005-12-05 2007-06-14 Ulvac, Inc. Vanne-porte pour appareil a vide
TWI385329B (zh) * 2008-11-21 2013-02-11 V Tex Corp Vacuum gate valve and its opening and closing method
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
CN201696638U (zh) * 2010-05-04 2011-01-05 沈惠冲 全封闭扇形盲板阀
CN201851691U (zh) * 2010-10-15 2011-06-01 保定天福泵阀制造有限公司 电动多点夹紧力翻板式插板阀
WO2012121410A1 (fr) * 2011-03-10 2012-09-13 株式会社アルバック Robinet-vanne et vanne à tiroir

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004108471A (ja) * 2002-09-18 2004-04-08 Smc Corp 流量制御機構付きゲートバルブ
JP5613087B2 (ja) * 2011-03-17 2014-10-22 株式会社アルバック 仕切弁
JP2014027706A (ja) * 2012-07-24 2014-02-06 Azbil Corp 電動アクチュエータ

Also Published As

Publication number Publication date
CN110557960A (zh) 2019-12-10
CN110557960B (zh) 2020-11-27
TWI695136B (zh) 2020-06-01
TW201942499A (zh) 2019-11-01

Similar Documents

Publication Publication Date Title
JP6358727B1 (ja) 仕切弁
WO2011027861A1 (fr) Robinet à soupape
JP6562333B1 (ja) 仕切弁
WO2019194067A1 (fr) Robinet-vanne
CN107763294B (zh) 致动器组件的热容量控制
JP2020125784A (ja) 真空アクチュエータ、仕切りバルブ
JP6562334B1 (ja) 仕切弁
CN112112992B (zh) 闸阀
JP7164452B2 (ja) 仕切りバルブ、スプール弁
JP6861756B2 (ja) 油圧駆動システム、仕切りバルブ
JP2021505819A (ja) ロータリーダンパー、特に車両のサスペンション用ロータリーダンパー
JP2020153251A (ja) 真空アクチュエータ、仕切りバルブ
CN111853266B (zh) 油压驱动系统及闸阀
US20100139478A1 (en) Pressurized Rotary Actuator
JP6861757B2 (ja) 仕切りバルブ
JP6864040B2 (ja) 仕切りバルブ

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2019528147

Country of ref document: JP

Kind code of ref document: A

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19781728

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19781728

Country of ref document: EP

Kind code of ref document: A1