WO2019192196A1 - Règle de réseau de canal de code pseudo-aléatoire et procédé de lecture associé - Google Patents

Règle de réseau de canal de code pseudo-aléatoire et procédé de lecture associé Download PDF

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Publication number
WO2019192196A1
WO2019192196A1 PCT/CN2018/117885 CN2018117885W WO2019192196A1 WO 2019192196 A1 WO2019192196 A1 WO 2019192196A1 CN 2018117885 W CN2018117885 W CN 2018117885W WO 2019192196 A1 WO2019192196 A1 WO 2019192196A1
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Prior art keywords
pseudo
random code
scale
ruler
main
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PCT/CN2018/117885
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English (en)
Chinese (zh)
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湛文亮
吴维玲
魏文锋
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广州数控设备有限公司
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Publication of WO2019192196A1 publication Critical patent/WO2019192196A1/fr

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776Absolute encoders with analogue or digital scales
    • G01D5/34792Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/249Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using pulse code
    • G01D5/2492Pulse stream
    • G01D5/2495Pseudo-random code

Definitions

  • the invention relates to the research field of grating scale position measuring technology, in particular to a pseudo random code channel grating and a reading method thereof.
  • a grating scale is a measurement feedback device that operates using the optical principle of a grating.
  • the grating ruler is often used in the closed-loop servo system of CNC machine tools for linear displacement or angular displacement detection.
  • the signal measured by the grating scale is a digital pulse, which has the characteristics of large detection range, high detection precision and fast response speed.
  • the incremental grating ruler is based on the principle that the light is modulated into two molar strips by two relatively moving gratings.
  • the molar stripe is counted and subdivided to obtain the displacement variation, and one or more are set on the scale grating.
  • the absolute grating scale is measured by plotting a code track with absolute position coding on the scale grating. The read head can obtain the absolute position by reading the code of the current position.
  • the absolute code of the absolute scale has a serial coded absolute scale and a parallel coded absolute scale.
  • the traditional serial-coded absolute scale since there is only one absolute value code channel, as the range length is extended and the precision resolution is improved, the algorithm derivation of the code sequence is too complicated, and it is difficult to simultaneously satisfy the range and accuracy resolution. High rate requirements.
  • the traditional serial-coded absolute scale produces a series of binary codes through a complex mathematical derivation process based on the range and measurement accuracy of the scale, and burns the series of binary codes to a long strip. on. As the range length increases and the accuracy increases, the mathematical derivation process becomes more complicated, and the research and development workload is large.
  • Patent ZL201310318825.3 discloses a multi-track coding method for an absolute grating rule, which specifically comprises: ordinary single-track binary M-sequence absolute grating linear coding, M-sequence disk encoder, spread code multi-code channel pseudo-random code linear coding , Spreading mode p-ary M-sequence pseudo-random code, suitable for linear absolute position encoder, disc absolute angle encoder, can be positioned at any time, easy to generate and decode low cost.
  • the code channel used in the patent is a plurality of pseudo-random code channels of multiple elements.
  • This method is a cyclic coding method.
  • the pseudo-random code is periodically generated, mainly by increasing the parallel direction of the code channel to extend the length direction. As the length increases, the technical complexity increases significantly, which is not conducive to It is applied to a grating with a large measuring length.
  • the main object of the present invention is to overcome the shortcomings and shortcomings of the prior art, and to provide a pseudo random code channel grating and a reading method thereof; the grating of the invention has high resolution, large range range, short distance of the boot recognition position, and absolute The code-track mathematics derivation method is simple and simplifies the production process.
  • a coding method for a pseudo-random code channel scale characterized in that the coding method comprises the following steps:
  • Step 1 Establish a pseudo-random code table.
  • the pseudo-random code table is set with 2 n+1 storage addresses, and each storage address stores the number of bits of the data content of the current position in binary numbers as n+1;
  • the number of periods of the incremental code channel included in the length of each segment of the pseudo-random code channel M is 2 n+1 ;
  • Step 2 setting the value of the first storage address in the pseudo random code table data to 0;
  • Step 3 setting the value of the second storage address in the pseudo random code table data to be 1;
  • Step 4 The values of the remaining storage addresses in the pseudo-random code table are expressed in the VHDL language formula.
  • n in the encoding method of the pseudo random code channel scale is a positive integer and is an even number.
  • the present invention also provides a pseudo-random code channel scale manufactured by the above-described pseudo-random code channel scale encoding method, comprising a linear guide, a readhead, and a pseudo-random code track scale, the pseudo-random code track scale including the main a ruler, a sub-scale and an incremental code track; the code paths of the main ruler and the sub-foot are continuous unequal-spaced raster reticle lines, and are arranged according to the coding method, and the incremental code channels are consecutively equally spaced Periodic grating reticle.
  • the value of the primary pseudo random code channel M of the main ruler is the value of the highest bit D (n) column of the pseudo random code table;
  • the value of the secondary rule pseudo random code S of the secondary ruler is The product of the primary pseudo-random code track M and the sub-scale scale factor f;
  • the incremental code track is provided with 2 n+1 gratings, and the width of each grating period is the same as the data stripe width corresponding to the grating main ruler 0 or 1.
  • Each raster period includes a bright line and a dark line of equal width.
  • the invention further comprises an LED light-emitting tube, a pseudo-random code grating grating arranged in the direction of the light emitted from the light-emitting tube, a modulation grating piece, a photoelectric conversion device and a readout circuit board, a photoelectric conversion device and a readout circuit board are set in the reading Inside the head.
  • the photoelectric conversion module includes a photoelectric conversion window corresponding to a sine signal and a cosine signal respectively of the main ruler, the sub ruler, and the incremental code track, and the photoelectric conversion window is configured to process the light signal modulated by the photoelectric conversion device signal.
  • the readhead further includes an amplification module, an A/D conversion module, and an FPGA module; and the amplification module amplifies the signals of the sine signal and the cosine signal of the main rule signal, the sub-scale signal, and the incremental code channel, and the A/D conversion
  • the module performs AD conversion on the amplified sine and cosine signals
  • the FPGA includes an AD interface, a main sub-scale interface and an algorithm processing unit, and the AD interface is configured to receive the AD-converted sine and cosine signals, and the main sub-scale interface
  • the pseudo random code waveform signal for receiving the main ruler and the auxiliary ruler, and the FPGA algorithm processing unit synthesizes the above data according to a program algorithm to generate output data.
  • the present invention also provides a method of reading the above pseudo-random code track scale, the reading method comprising the following steps:
  • the first step is to slide the readhead in the same direction
  • the second step is to read the main rule reading, match the current reading value with the content of the data stored in the data table, find the address number corresponding to the current reading value, and confirm the current main pseudo random code channel according to the address number and the moving direction of the reading head.
  • the sub-precision reading, the reading method of the pseudo-random random code S is the same as the reading method of the main pseudo-random code channel M, and the read pseudo pseudo-random code S is subtracted from the main pseudo-random code channel M to obtain the difference. N;
  • the fourth step is to read the subdivided value XF of the current real-time incremental code channel
  • the real-time value obtained from the second step to the fourth step is that the difference N between the main ruler and the secondary ruler is high, the main ruler reading M is the median, and the incremental code track subdivision value XF is the low position.
  • the current main rule reading M address number+n; if the readhead reading movement direction is the direction in which the address value decreases, The current primary pseudo random code channel M is a corresponding address sequence number;
  • the present invention has the following advantages and beneficial effects:
  • the invention can adopt the three-code channel type, that is, the main, the sub-scale and the incremental code channel, in the form of three code channels, and the real-time absolute position can be obtained by a simple operation, and the invalid position distance required to identify the absolute position is recognized.
  • the method of deriving the increase of the span length is simple, which simplifies the product design and production adjustment process, is easy to adjust, and is suitable for mass production.
  • the invention can overcome the problem that the range increasing algorithm existing in the serial coding mode in the prior art is complicated to be complicated, and the error of the booting invalid distance is large; solving the problem that the range of the parallel coding mode existing in the prior art increases the number of code channels, complicated assembly process, etc. problem.
  • the invention is provided with a main size track and an auxiliary size track to participate in absolute position recognition.
  • the number of code bits to be crossed is small, and in the case of the same range and resolution, the coded bits required by the present invention can be reduced by at least 35%, that is, the length of the boot invalid position It is more than 35% shorter than the traditional serial coded absolute scale.
  • 1 is a schematic structural diagram of a pseudo random code channel scale
  • FIG. 2 is a schematic diagram of optical components of a pseudo-random track scale
  • Figure 3 is a schematic diagram showing the data "1" as a bright stripe in the D4 column of Table 1 in the main unit cell segment;
  • FIG. 4 is a schematic diagram of taking a data “0” as a bright stripe in the D4 column of Table 1 as a main unit cell segment;
  • Figure 5 is a schematic diagram showing the arrangement of stripes of the main and sub-scales of the pseudo-random code track scale and the incremental code track;
  • 6 is a schematic diagram showing the arrangement of stripes of main and sub-scales and incremental code channels of a double pseudo random code channel scale
  • FIG. 7 is a schematic diagram showing the optical principle of a dual pseudo random code channel scale
  • Figure 8 is a schematic diagram of a modulation grating and a photoelectric converter assembly of a dual pseudo random code channel scale
  • 10 is an explanatory diagram of reading a pseudo-random code channel grating principal pseudo-random code incremental direction data
  • FIG. 11 is an explanatory diagram of reading data of a pseudo-random code channel grating principal pseudo-random code decrement direction data.
  • the first step is to create a pseudo-random code table.
  • the pseudo-random code table is set with 2 n+1 storage addresses, the storage addresses are addr0 to addr 2 n+1 -1, and each storage address stores the data content in binary numbers, and the number of bits of the binary number is n+1.
  • the data content of the address addr 0 in the pseudo random code table data stores the fixed data 0.
  • the data content of the address addr 1 in the pseudo random code table data stores the fixed data 1.
  • a schematic structural diagram of a pseudo-random track scale in the present invention includes: a scale base 1, a linear guide 2, a read head holder 3, a read head 4, and a pseudo-random code track scale 5.
  • the readhead will retrieve the pseudo-random code sequence of the double pseudo-random code track scale and convert it into the read absolute position data.
  • the pseudo-random code track scale 5 includes a main ruler provided with a main pseudo-random code track M, a sub-pseudo-random code track S sub-scale and an incremental code track.
  • the value of the primary pseudo-random code channel M is the binary number of the highest bit D (n) column of the pseudo-random code table; 1 is a bright stripe, 0 is a dark stripe, or according to the needs of the circuit or optics, or 0 Bright stripes, 1 is dark stripes; the arrangement is burned onto the grating glass substrate.
  • the first 0 position of the first ruler of the main ruler is aligned with the position where the main ruler reads 1.
  • the start 0 position of the second ruler of the main ruler is aligned with the position where the secondary ruler reads 2, from the third segment of the main ruler.
  • the starting 0 position is aligned with the position where the sub-foot reading is 3...
  • the 10th starting point of the main ruler is aligned with the position where the main ruler reads 10, and the main ruler is the 11th segment.
  • the position where the ruler reads 11 is aligned.
  • the incremental code track is provided with 2 n+1 rasters, and the data stripe width of each 0 or 1 of the main or sub scale is a raster period width T of the incremental code track.
  • the optical components of the pseudo-random track scale in the present invention are shown in FIG.
  • the optical component comprises an LED light-emitting tube 6, a pseudo-random code track scale 5 arranged in sequence along the light-emitting tube, a modulating grating piece 7, a photoelectric conversion device 8 and a read-head circuit board 9.
  • the modulating grating piece 7, the photoelectric conversion device 8 and the readout head circuit board 9 are disposed in the reading head 10; the direction of the arrow in the figure is the moving direction of the reading head 10.
  • the schematic diagram of the optical component is: when the LED light-emitting tube 6 emits a bundle of parallel light, which is incident on the pseudo-random code track scale 5, the parallel light is modulated by the pseudo-random code channel scale 5 for the first time signal, and the effect is A light beam passes through the bright stripe and is transmitted to the modulating grating sheet 7 for second signal modulation; the other beam is blocked by the pseudo-random code track scale 5 and the dark stripe of the modulating grating sheet 7 and reflected back. After the beam modulated by the second signal passes through the modulating grating sheet 7, it is incident on the photoelectric conversion device 8. After the photoelectric conversion window of the readhead circuit board 9 corresponding to the photoelectric conversion device 8 receives the incident beam, the optical signal is converted into an electrical signal. Output to the next stage electrical signal processing circuit.
  • the first step is to slide the readhead and slide n+1 pitches in the same direction;
  • the fourth step is to read the subdivided value XF of the current real-time incremental code channel, and the incremental code channel signal is processed by the circuit to generate two sine and cosine signals with a phase difference of 90 degrees, which can be obtained by the inverse tangent function algorithm.
  • the real-time value obtained from the second step to the fourth step is that the difference N between the main ruler and the secondary ruler is high, the main ruler reading M is the median, and the incremental code track subdivision value XF is the low position.
  • the pseudo-random code table is shown in the following table:
  • the binary pseudo-random code channel M is the highest-order D4 column of binary data with 1 as a bright stripe and 0 as a dark stripe, as shown in FIG. Or depending on the needs of the circuit or optics, it can also be 0 for bright stripes and 1 for dark stripes, as shown in Figure 4.
  • the value of the sub-segment pseudo-random code as shown in FIG. 5 is obtained.
  • the incremental code XF is provided with 32 rasters, and the data stripe width of each 0 or 1 of the main ruler is a raster period width T of the incremental code XF.
  • three-code type that is, main, sub-scale and incremental code channels, three code channels are used, and the raster-burning stripe is shown in Fig. 5. Shown.
  • a five-code type is usually adopted.
  • 0 is a dark stripe, and the other is a bright stripe with 0, and 1 is a dark stripe; and an incremental code channel is provided, in the form of a total of five code channels, and a schematic diagram of the raster burn stripe is shown in FIG.
  • FIG. 7 it is a front view of a dual pseudo random code channel scale including five code channels. From the top to the bottom, the first is the secondary pseudo-random code channel with the data 1 as the bright stripe, and the second is the main pseudo-random code channel with the data 1 as the bright stripe, and the third is the main pseudo-random code channel with the data 1 as the bright stripe. Incremental code channel, the fourth strip is the main pseudo-random code channel with data 0 as the bright stripe, and the fifth strip is the sub-pseudo-random code channel with the data 0 as the bright stripe.
  • the structure of the photoelectric converter assembly 8 is as shown in FIG.
  • the photoelectric conversion component is provided with a main ruler M+, M-, an auxiliary ruler S+, S-, an incremental sinusoidal signal A+, A- and a cosine signal B+, B- corresponding to the double pseudo random code channel scale, and a total of 8 photoelectric conversions window.
  • the optical signal modulated by the two signals is incident on the eight photoelectric conversion windows.
  • the corresponding incremental code track position in the photoelectric conversion component, the output incremental sinusoidal signals A+, A- and the incremental cosine signals B+, B- are input to the next-stage electrical signal processing circuit for amplification processing.
  • Corresponding main code track position in the photoelectric conversion component outputting M+, M- a pair of pseudo-random code pulse sequences which are mutually inverted, and synthesizing the pseudo-random code waveform signal of the main size track M after the comparator; in the photoelectric conversion component Corresponding sub-size track position, the S+, S- pair of mutually inverted pseudo-random code pulse sequences are output, and after the comparator, the pseudo-random code waveform signal of the sub-size track S is synthesized.
  • the data processing flow of the readhead of the double pseudo random code channel scale is shown in FIG.
  • the readhead includes an FPGA module.
  • the photoelectric conversion component outputs the sinusoidal A+, A- and cosine B+, B- of the incremental code channel, and after operation and amplification output, respectively generates an incremental code channel A sinusoidal signal, and an incremental code channel B sinusoidal signal; the sinusoidal signal input To the AD converter, the AD converter converts the A and B analog signals into multi-bit binary values DA and DB, and then transmits them to the AD interface of the FPGA.
  • the FPGA performs numerical filtering on the AD interface signals, the inverse tangent algorithm is executed to obtain an increment. Code channel subdivision value FX value.
  • the photoelectric conversion component outputs M+, M- and S+, S- of the main sub-size track, and synthesizes the main pseudometer M pseudo-random code sequence waveform signal and the sub-segment S pseudo-random code sequence waveform signal by the comparator, and transmits the waveform signal to the FPGA main sub-scale interface.
  • the main sub-segment pseudo-random code synthesis algorithm is executed to generate the main rule absolute code value M and the main sub-scale difference value N.
  • the FPGA executes the program algorithm, synthesizes the above data M, N and the incremental track subdivision value FX to generate output data Dout.
  • the FPGA executes the serial bus data processing algorithm, synthesizes the position data according to a predefined serial communication protocol format, and outputs the position data to the external host computer position reading device through the serial bus.
  • the reading method of the double pseudo random code channel scale is as follows.
  • the first step is to slide the readhead and slide n+1 pitches in the same direction;
  • the main pseudo-random code reads data in the incremental direction, as shown in Figure 10, the readhead moves from the position of AD9 to AD13.
  • the reading direction of the reading head is the address increasing direction, and n+1 data is read along the direction.
  • the FPGA will first read the data into the high bit, and then read the data into the lower bit, that is, AD9 is the high bit, and AD13 is the low bit, read
  • the readhead moves from the position of the AD24 to the AD20.
  • the reading direction of the reading head is the direction of decreasing the address, and n+1 data is read along the direction.
  • the FPGA will first read the data into the lower bit, and then read the incoming data to the upper position, that is, the AD24 is the low bit, and the AD20 is the high bit.
  • the data reading process can deduce that the current readhead is stopped at the absolute position of the main ruler data AD20.
  • the third step is to read the sub-foot reading.
  • the reading method of the sub-foot is the same as the reading method of the main ruler in the second step. Then subtract the main rule reading value M from the sub-foot reading value S to obtain the main sub-scale difference N.
  • the fourth step is to read the subdivided value XF of the current real-time incremental code channel

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Abstract

L'invention concerne un procédé de codage de règle de réseau de canal de code pseudo-aléatoire, une règle de réseau de canal de code pseudo-aléatoire produite au moyen du procédé de codage de règle de réseau de canal de code pseudo-aléatoire, et un procédé de lecture de la règle de réseau de canal de code pseudo-aléatoire. La règle de réseau de canal de code pseudo-aléatoire (5) comprend un rail de guidage linéaire (2), une tête de lecture (4), et la règle de réseau de canal de code pseudo-aléatoire ; la règle de réseau de canal de code pseudo-aléatoire (5) comprend une règle primaire, une règle secondaire et des canal de code incrémentiels ; les canaux de code de la règle primaire et de la règle secondaire sont des règles de réseau qui sont disposées en continu à des intervalles inégaux et sont agencées selon le procédé de codage ; les canaux de code incrémentiels sont des règles de réseau périodiques qui sont agencées de façon continue à des intervalles égaux. La règle de réseau présente une résolution élevée, une large plage de mesure, une courte distance de position de reconnaissance de démarrage, un procédé de dérivation mathématique de canal de code en valeur absolue simple, et un processus de production de produit simplifié.
PCT/CN2018/117885 2018-04-02 2018-11-28 Règle de réseau de canal de code pseudo-aléatoire et procédé de lecture associé WO2019192196A1 (fr)

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CN112762836A (zh) * 2020-12-23 2021-05-07 长春汇通光电技术有限公司 光栅尺、光栅尺读数方法、装置和计算机存储介质
CN115469711A (zh) * 2022-01-27 2022-12-13 合肥本源量子计算科技有限责任公司 正余弦信号发生器、存储器及量子计算机控制系统
CN115615336A (zh) * 2022-09-27 2023-01-17 河南乐佳电子科技有限公司 一种光栅式自定位测距装置
WO2023285172A1 (fr) * 2021-07-13 2023-01-19 Neura Robotics GmbH Système de codage et procédé de détermination de la position de la tête de lecture dans un système de codage
CN116734734A (zh) * 2023-08-14 2023-09-12 中国科学院长春光学精密机械与物理研究所 自贴式光栅尺安装装置及方法
CN117346825A (zh) * 2023-10-27 2024-01-05 深圳市英科达光电技术有限公司 多头模拟量相加的高精度增量式光电编码器

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CN110879075B (zh) * 2019-11-08 2021-06-22 杭州电子科技大学 一种高分辨率的增量码道检测方法
CN113124760B (zh) * 2019-12-30 2022-08-02 广东万濠精密仪器股份有限公司 反射式光栅尺
CN113029001B (zh) * 2021-03-18 2022-02-11 中国科学院长春光学精密机械与物理研究所 一种直线位移测量装置和方法
CN113983935B (zh) * 2021-12-29 2022-05-17 太原向明智控科技有限公司 一种采煤机位置编码定位装置及方法
CN116045814B (zh) * 2023-04-03 2023-06-09 合肥安迅精密技术有限公司 对光栅尺信号质量进行评估的方法及装置、存储介质

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