WO2019169006A2 - Capteur compact amélioré pour agencement de capteur magnétostrictif - Google Patents

Capteur compact amélioré pour agencement de capteur magnétostrictif Download PDF

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Publication number
WO2019169006A2
WO2019169006A2 PCT/US2019/019863 US2019019863W WO2019169006A2 WO 2019169006 A2 WO2019169006 A2 WO 2019169006A2 US 2019019863 W US2019019863 W US 2019019863W WO 2019169006 A2 WO2019169006 A2 WO 2019169006A2
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WO
WIPO (PCT)
Prior art keywords
waveguide
support
coil
assembly
turns
Prior art date
Application number
PCT/US2019/019863
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English (en)
Other versions
WO2019169006A3 (fr
Inventor
Andreas Hill
Aleksey G. Minin
Rene PEKKOLA
Constantin TIMM
Arnold F. Sprecher, Jr.
Original Assignee
Mts Sensor Technologie Gmbh&Co.Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mts Sensor Technologie Gmbh&Co.Kg filed Critical Mts Sensor Technologie Gmbh&Co.Kg
Publication of WO2019169006A2 publication Critical patent/WO2019169006A2/fr
Publication of WO2019169006A3 publication Critical patent/WO2019169006A3/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/48—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means
    • G01D5/485—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using wave or particle radiation means using magnetostrictive devices

Definitions

  • the present disclosure is directed to magnetostrictive sensors
  • Ultrasonic wave converters are commonly used in magnetostrictive sensors and can be generally subdivided into axially and radially (or transversally) arranged systems. This depends on how the ultrasonic wave converter is positioned and implemented along a
  • An axial system is illustrated in Figure 3 and includes a coil 32 which is oriented at the open end along or around the waveguide 33.
  • a coil 32 which is oriented at the open end along or around the waveguide 33.
  • wire turns of the coil 32 are accommodated on a bobbin for mechanical support of the conducting wire.
  • the coil 32 provides typically relative low signal amplitudes for a controller discussed below.
  • the bobbin is bulky due to its length of approximately 5 to 10 mm.
  • the transversal system is illustrated in Figure 4 and includes the waveguide 33 and one or two tapes 31 of magnetostrictive material attached to the waveguide 33.
  • the function of the transversal system is well known.
  • the tape 31 guides an acoustic ultrasonic wave into coil 32 where the electrical signal is detected for further processing in the controller.
  • the transversal system has a higher signal amplitude at the coil 32. This is achieved by utilizing a constructive interference of two incident waves on the tapes 31. One part of the acoustic ultrasonic wave propagates directly into the tape whereas the second part travels further to the end of the waveguide where the wave is reflected before it also propagates back to the tape where it interferes with the other part of the acoustic ultrasonic wave.
  • the end of the waveguide 34 to tape 31 distance, the length of the tape 31 and the location of the coil 32 along the tape 31 have to be carefully chosen and assembled.
  • the coil 32 is disposed 1 ⁇ 4 of the wavelength of the acoustic ultrasonic wave 5.
  • anchor 9 as shown in Figure 2
  • the disadvantage of such a system is the high degree of mechanical accuracy and complexity involved.
  • the tape 31 also has to be well centered in the coil 32, and the assembly process usually involves a kind of welding process to firmly attach tape 31 to waveguide 33.
  • Mechanical deviations can immediately cause a deterioration of the constructive signal interference by signal distortion or a reduced signal to noise ratio (SNR) of the electrical signal before it even reaches the controller.
  • SNR signal to noise ratio
  • the signal is dampened with a damping element after passing the pick-up coil’s aperture so that the reflected signal’s amplitude is reduced to a level where no disturbance is expected.
  • This damping element uses a certain spatial extent to ensure sufficient attenuation, so that additional sensor length is required that does not contribute to the
  • the dead- or null-zones are a limiting factor as they determine at which distance away from the coil 32 the sensor is able to measure within expected limits of accuracy.
  • This dead- or null-zones usually stretches several tens of millimeters, which is not an issue for sensors where the ultrasonic wave converter 7 can be placed well inside a larger housing.
  • One general aspect includes a waveguide assembly for a magneto strictive sensor.
  • the waveguide assembly includes a waveguide and a coil including a support located at an end of the waveguide, or at a position ⁇ 1/4 wavelength of an acoustic pulse carried by the waveguide where constructive interference is expected, and a conductor having plurality of conductor turns secured to the support.
  • Another general aspect includes a waveguide assembly for a magnetostrictive sensor.
  • the waveguide assembly a waveguide supported so as to have a free end.
  • a coil is mounted to the free end of the waveguide.
  • Implementations may include one or more of the following features.
  • the waveguide assembly where the coil is connected to an extension that is connected to the waveguide in a transverse manner.
  • the waveguide assembly where the turns are held in a common plane in a spaced apart fixed relationship relative to each other.
  • the waveguide assembly where the end of the waveguide is secured to a side of the support having the plurality of conductor turns.
  • the waveguide assembly where the waveguide extends through the support and the end of the waveguide or extension is secured to a side of the support.
  • the waveguide assembly 9 where and an endcap is provided over the end of the waveguide or extension.
  • the waveguide assembly and a ferromagnetic layer on one or more sides of the support such as on a side that is opposite the plurality of conductor turns, on the same side as the plurality of conductor turns, and/or on one or more surfaces such as lateral surfaces that extend between the afore-mentioned sides.
  • the waveguide assembly where the ferromagnetic layer is a soft magnetic foil, e.g., mu-metal.
  • the waveguide assembly where the end of the waveguide or extension is attached to the ferromagnetic layer.
  • the waveguide assembly and a second planar coil including a second support and a second conductor having a second plurality of conductor turns secured to the support where the turns are held in a second common plane in a spaced apart fixed relationship relative to each other.
  • the waveguide assembly where the coil includes a support and a conductor having plurality of conductor turns is secured to the support where the turns are held in a common plane in a spaced apart fixed relationship relative to each other.
  • the waveguide assembly where the waveguide is secured to the support where the conductor turns are disposed about a central axis of the waveguide.
  • the waveguide assembly where an end of the waveguide is secured to the support.
  • Yet another general aspect includes a detection assembly for a magnetostrictive sensor.
  • the detection assembly includes a waveguide having a longitudinal axis, a coil having turns oriented orthogonal to the longitudinal axis, and a return wire connected to a remote end of the waveguide and having a portion extending over at least a portion of the turns of the coil so as to induce a voltage in the coil with a polarity opposite the polarity of a voltage induced by current through the waveguide.
  • the waveguide assembly includes a waveguide supported so as to have a free end.
  • a support is mounted to the free end of the waveguide, where the support includes an aperture through which the waveguide extends, and where the support includes a plurality of coils mounted on the support, the plurality of coils arranged in a configuration about the aperture.
  • Implementations may include one or more of the following features.
  • the waveguide assembly where a center axis of each of the coils of the plurality of coils is perpendicular to the waveguide.
  • the waveguide assembly where a center axis of each of the coils of the plurality of coils is parallel to the waveguide.
  • the waveguide assembly where a center axis of each of the coils of the plurality of coils is askew to the waveguide.
  • Figure 1 is a perspective view of an ultrasonic wave converter according to an embodiment of the present disclosure.
  • Figure 2 is a schematic view of a magnetostrictive system on which embodiments of the present disclosure may be practiced.
  • Figure 3 is a perspective view of a portion of a typical axial magnetostrictive system.
  • Figure 4 is a perspective view of a portion of a typical transversal magnetostrictive system.
  • Figure 5 is view of a portion of a half round solderable via substrate.
  • Figure 6 is a view of a portion of a BGA-typ solderable pad substrate.
  • Figure 6A is a view of alternate assemblies on which embodiments of the present disclosure may be practiced.
  • Figure 7 is a view of an assembled embodiment of the present disclosure.
  • Figure 8 is an exploded view of the embodiment of Figure 7.
  • Figure 9 is a side view of another embodiment of the present disclosure.
  • Figure 10 is a side view of another embodiment of the present disclosure.
  • Figure 11 is a side view of another embodiment of the present disclosure.
  • Figure 12 is a side view of another embodiment of the present disclosure.
  • Figures 13A-13D are views of arrangements of coils about an aperture in a support according to additional embodiments of the present disclosure.
  • Figure 14 is a view of a flat wire-wound coil.
  • Figure 15 is a view of a multilayer chip inductor component.
  • Figure 16 is a view of a wire wound chip inductor.
  • Figure 17 is a view of another embodiment of the present disclosure.
  • Figure 18 is a side view of a placement of a coil according to another embodiment of the present disclosure.
  • This disclosure contains a novel design for an ultrasonic wave converter 7 shown in Figure 1 as it is typically used in magnetostrictive sensors as depicted in Figure 2.
  • the ultrasonic wave converter 7 allows the conversion of an acoustic ultrasonic wave 5 propagating along a waveguide 1 into an electrical signal which is further processed inside a controller 18.
  • the controller 18 contains both analog circuitry for filtering, amplification of the analog electrical signal, but also digital or further analog circuits to enable a time of flight (ToF) evaluation between a start- and stop-signal event.
  • a wire with magnetoelastics properties called the waveguide 1
  • an electric current pulse 2 is induced by controller 18 having an electric pulse generator commonly used in magneto strictive sensors, and thus not further elaborated herein.
  • a clock of the controller 18 is started.
  • the pulse 2 is transferred through the magnetoelastic material (the waveguide 1) and an electric circuit is closed using a return wire 3 connected to the end of the waveguide 1.
  • the electric pulse 2 which basically happens instantaneously, a magnetic field is generated in the waveguide 1.
  • an acoustic ultrasonic wave 5 is generated in the waveguide 1, because magnetostrictive materials undergo a change of their physical dimensions when subjected to a magnetic field.
  • This acoustic ultrasonic wave 5 travels from both sides of the position magnet 4 into the waveguide 1.
  • the acoustic ultrasonic wave 5 propagates along the left hand side of the waveguide 1 in Figure 2 to a damper 6 and along the right hand side into the ultrasonic wave converter 7.
  • an electrical signal is generated through an inductive coil 8 in the ultrasonic wave converter 7. This electrical signal is provided to the controller 18, which triggers the above mentioned clock to stop.
  • the controller 18 uses the controller 18 to provide a suitable output signal 19 indicative of the position of the position magnet 4.
  • Such processing is well known in magnetostrictive sensors.
  • the various embodiments of the novel ultrasonic wave converter 7 as shown in Figures 7-10 includes a support such as a printed circuit board (PCB) substrate 21 that supports a planar coil 22 having a number of conductor turns.
  • a planar coil 22 has a support that holds a conductor having at least one set of a plurality of conductor turns in a common plane such that the conductor turns are circumferentially or spirally arranged relative to each other where a perimeter of an outer conductor turn is greater than a perimeter of a conductor turn disposed closer to a center of the circumferentially or spirally arranged conductor turns.
  • a wire-wound air coil ( Figure 14), particularly, such a coil that has a minimal axial length, or an SMD (surface mount device) coil may be used.
  • a coil 22 is located at the actual end of the waveguide 33 and is disposed about a central axis of the waveguide 33.
  • the end 34 of the waveguide 33 where the coil is located is anchorless or free in one embodiment, or fixedly secured to a supporting structure, such as a PCB board, in another embodiment.
  • the conductor turns of the coil 22 may be provided on a single layered PCB substrate 21, but the turns may also be realized on two or more layers of a multi layered PCB substrate 21.
  • a multi layered PCB By using a multi layered PCB, a high degree of flexibility is obtained with respect to mechanical and signal requirements. Generally a larger number of conductor turns tend to provide larger signal amplitudes.
  • the two or more multi layered PCB substrates 21 are in one embodiment disposed adjacent, preferably connected to, each other (i.e. stacked) by soldering the PCB substrates 21 together.
  • Assembling interconnected multi layered PCB substrates 21 can be easily achieved by having either half round solderable vias on the side walls of each coil 22 as shown in the example of Figure 5, or may be soldered together like it is practiced for ball grid arrays (BGAs) as shown in the example of Figure 6.
  • BGAs ball grid arrays
  • the coil 22 may be formed using a flexible PCB substrate 21 A where a plurality of planar sections 21B, for example, are joined to adjacent sections on opposed edges in an accordion manner. Each section includes one or more conductor turns on at least one and preferably on each opposed surface. The planar sections 21B may then be stacked upon each other as shown to provide a compact assembly 21C.
  • a planar coil 22 also offers increased flexibility in the way of integrating it into a sensor design.
  • the planar coil 22 may be either directly integrated as part of another PCB substrate 21 or it may be placed onto another PCB by using it as an individual substrate similar to the implementation shown in Figure 5.
  • the assembly then becomes suitable for a“Pick and Place” process, which is generally applied for surface mount device (SMD) manufacturing for PCBs.
  • SMD surface mount device
  • FIGs 7-8 illustrate an exemplary embodiment of the planar coil 22.
  • Figure 7 shows the planar coil 22 assembled
  • Figure 8 shows the planar coil 22 in an exploded view.
  • the planar coil 22 in this embodiment includes a ferromagnetic layer 25 that acts as an anchor to hold and keep the waveguide 23 in a mechanically stable position.
  • the ferromagnetic layer 25, preferably having high magnetic permeability (e.g., in the p r of 80,000-140,000 or higher), also concentrates the magnetic field inside (substantially in the same geometric plane) the planar coil 22, thus significantly increasing an amplitude level of the electrical signal provided by coil 22.
  • the ferromagnetic layer 25 may be located on a side of the substrate 21 on a side opposite the conductor turns as shown in Figures 7 and 8. However in the exemplary embodiment of Figures 7 and 8, multiple PCB substrates 21 are provided.
  • the planar coil 22 on PCB substrate 21 is fixedly secured or attached to the waveguide 23.
  • a free end of the waveguide 23 is attached to the planar coil 22.
  • the acoustic wave’s wavelength is much larger than the PCB thickness or the layer spacing.
  • the “spot” is the location at or near the actual end of the waveguide where no superposition of the incident wave and the reflected wave occurs. Stated another way, this location or“spot” is less than 1/4 of the acoustic pulse wavelength where constructive interference is expected.
  • Known pickups have wire- wound coils with an axial extent of several millimeters (ca. 8-l2mm).
  • the support or PCB based inductor has an axial length when connected to the waveguide 33 of less than 2mm.
  • the waveguide 23 is guided through an aperture 26 provided at least partially and preferably through the PCB substrate 21.
  • the waveguide 23 may extend freely through the aperture 26 being spaced apart from an inner surface of the aperture, or may be mechanically connected to the planar coil 22.
  • the waveguide 23 may be mechanically connected (e.g. soldered, glued or crimped) to the planar coil 22, i.e. to the substrate 21 or a conductor thereon.
  • a rivet 24 (for example made of copper, as shown in Figures 11-12) may be provided on the waveguide 23 and used to make a mechanical connection between waveguide 33, PCB substrate 21 and/or mu-metal foil 25.
  • the waveguide 23 may also be directly soldered to a solder point on either side of the PCB substrate 21, which can be a through hole via, a ring, or a terminal connector on the PCB substrate 21.
  • the planar coil 22 may be laid out to provide a rotationally symmetric sensor element design, with the waveguide 23 guided through a hole in the supporting material 21 bearing the described coil structure. Since the PCB substrate 21 securely holds the conductors in a fixed position, a conductor turn may be disposed on the edge of the substrate 21 very close to the aperture through which the waveguide 23 extends. This can help increase the strength of the signal from the Coil 22.
  • the waveguide 23 may be connected with help of a rivet or endcap 24 to either the mu-metal foil 25 or planar coil 22.
  • Techniques to connect those parts may be realized by soldering, gluing or crimping those parts together.
  • An embodiment of the PCB substrate 21 shown in Figure 9 contains a circular shaped solderable pad 29.
  • the connection between waveguide 23 and the PCB substrate 21 may be implemented as a low resistive, conductive connection 29. This eliminates welding techniques being used to attach additional connection tapes or pins to the waveguide 23.
  • FIG. 10 shows another implementation of a waveguide 23 being soldered to the mu-metal foil 25, which then can be used to supply the current pulse to the waveguide.
  • Figure 11 illustrates an embodiment using a rivet 24 secured to the end of the waveguide 23.
  • the rivet 24 extends into the aperture or through hole provided in the PCB substrate 21. If desired, the rivet 24 may be fixedly secured to the PCB substrate 21 by being press fitted into the aperture (with or without use of the ring 29). In the embodiment of Figure 12, the rivet 24 is soldered to ring 28 forming a conductive connection.
  • this gap may be filled with a damping material (not shown), such as an elastomeric material, for example silicon.
  • a damping material such as an elastomeric material, for example silicon.
  • the damping material can be in the shape of a preformed tubular element to allow assembly and its proper location in the aperture.
  • the damping material acts as a front end damping element contributing to echo attenuation for increased measurement frequency, and can aid in keeping the waveguide 23 centered in the aperture, particularly if the damping material is in the shape of a preformed tube.
  • An electrical connection is made to, in one embodiment, an end of the waveguide 23 with a conductor connected directly to the end (particularly, if the waveguide 23 is spaced apart from the inner surface of the aperture or is otherwise electrically isolated from for example a ring 28 provided on the substrate). If, however, a ring 28 is used to secure the waveguide 23 to the substrate, the electrical conductor may be connected to the ring 28.
  • FIGS 13A-13D schematically illustrate embodiments of pick-up coil(s) that may be SMD mounted components containing either a flat wire-wound air coil ( Figure 14), a multilayer chip inductor (MLCI) component (Figure 15) having a coil pattern 151, outer electrode 152, and non-magnetic ceramic 153, or a wire wound chip inductor ( Figure 16).
  • MLCI multilayer chip inductor
  • Figure 16 a wire wound chip inductor
  • these types of coils may be mounted on a support 40, such as a PCB (using any of the techniques described above), having an aperture 42 in the middle of the coil windings 44 so that the waveguide 23 may extend through this aperture 42.
  • the coil’s center axis 46 may be arranged perpendicular to the waveguide 23 (Figure 13A), askew to the waveguide 23 ( Figure 13B) or parallel to the waveguide 23 ( Figures 13C and 13D). Although a plurality of coils are arranged circularly or in a matrix about the aperture 42 as illustrated in Figures 13A-13D, if desired, a single coil may also be used. A suitable detection circuit can be connected to one or more coils.
  • Embodiments of the disclosure operate as follows. Referring to Figure 2 for the general operation of the system, the acoustic ultrasonic wave 5 travels from the position magnet 4 towards any of the planar coils 22 of Figures 7-12 or the coils of Figures 13A-13D
  • the coils herein disclosed detect the acoustic ultrasonic wave 5 exactly at or close to the end of the waveguide 34. Signal detection at a position at the actual end of the waveguide leads to the effect that the incident wave and its reflection coincide in a spatial and temporal manner, so that the reflection is diverging from the coil and is not detected by the coil. The shape of the detected signal matches the shape of the incident signal coming from the magnet.
  • the ferromagnetic (e.g., mu-metal) layer 25 with a relative high magnetic permeability concentrates the magnetic flux in the same geometric plane as the planar coil 22 which leads to a relatively large signal.
  • more than one ferromagnetic layer may be present in the coil assembly.
  • a ferromagnetic layer may be provided on a planar side that is parallel to ferromagnetic layer 25 such as the planar side that faces in the opposite direction.
  • ferromagnetic layers on the edge or lateral portions of the support 21, that is, sides that lie in a plane (or have a curved shape if the support is not in the shape of a rectangular block) that intersects with ferromagnetic layer 25.
  • the acoustic ultrasonic wave 5 is transformed into an electrical signal which can be detected at the contacts of the coils herein disclosed.
  • the coil is a planar coil
  • the signal obtained is a true function of the ultrasonic wave from the magnet, because the reflection from the waveguide’s anchored end as found in the transversal system or axial system is not detected.
  • planar coil 22 disposed at a free end of the waveguide 23 has its advantages, if desired, in another embodiment, a bobbin coil could be disposed at the free end of the waveguide 23.
  • the advantage of the bobbin coil is its relatively high number of conductor turns can produce a signal with greater strength.
  • an axial length of the bobbin be as small as possible so that it can be disposed at the end of the waveguide 23 like as discussed with the planner coil 22.
  • the detected signal described above can be assumed to be a first voltage portion that is induced into any of the coils described above.
  • the return wire 50 may be located across the coil 52 (herein illustrated as a planar coil although any of the coils described above may be used) so as to generate a voltage to reduce an unwanted voltage that occurs in the coil 52.
  • the current pulse when a current pulse is fired into the waveguide, the current pulse travels through coil 52.
  • the current pulse induces a voltage into the coil 52, which is commonly known in the art as“ringing”. For purposes of understanding, this voltage will be referred to as a first portion of voltage.
  • the current pulse being substantially instantaneous is also present in the portion 50 of the return wire, which will thereby induce a second portion of voltage in the coil 52 due to orientation and proximity of the portion 50 with respect to coil 52.
  • the second portion of voltage may be inverted with respect to the first portion of voltage so as to reduce it.
  • the coil(s) may also be incorporated in the sensor in the manner of the transversal system as schematically illustrated in Figure 18.
  • the planar coil 22 (having any of the features described above) is connected to an end of a transverse extension 31 (e.g., tape portion) where the end opposite the planar coil 22 is joined to the waveguide 23 (similar to Figure 2).
  • the end of the waveguide 23 would be anchored as in a transversal system of Figure 2.
  • the features described above with respect to the coils and the manner in which they are connected to the end of the waveguide 23 applies to joining the coils to an end of the transverse extension 31.
  • Coils may be either integrated directly onto an existing PCB substrate design or may also be placed on a small separate substrate which may be easily placed onto another PCB and soldered like it is done for conventional SMD component on PCB boards.
  • the coils allow rotational symmetric compact sensor element designs.
  • New sensor designs which require a very compact and small sized sensing element may be without noticeable null zones as the very short dead zone may be completely shifted inside the sensor electronics head.
  • the new sensor element results in a measured signal that is insensitive to
  • the new sensor element does not utilize constructive signal interference with tape and anchor there is no influence resulting in reduced or distorted signal due to misalignment of those mechanical parts.
  • the actual signal detection concentrates at a single spot (small axial length if for example a stacked coil is used) at the end of the waveguide where the signal amplitude is at maximum without any additional interference from other signal reflections.
  • planar coil 22 in conjunction with a mu-metal foil 25 as a flux concentrator to boost the signal amplitude of the ultrasonic wave converter 7.
  • novel ultrasonic wave converter 7 based on a planar coil 22 which may be integrated on another single or multilayered PCB.
  • the waveguide 23 may be equipped with a soldered, glued or crimped rivet 24 which allows connecting it by soldering, gluing or crimping to the mu-metal foil 25 or the planar coil 22.
  • a circular shaped solderable ring or pad 28 on the PCB substrate 21 allows the connection between waveguide 23 and PCB substrate 21. It provides a conductive low resistive connection 29 which avoids another welded connection between a pin and waveguide 23 which allows feeding the current pulse 2 into the waveguide 23.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Abstract

L'invention porte sur un ensemble guide d'ondes pour un capteur magnétorésistif. L'ensemble guide d'ondes comprend un guide d'ondes et une bobine comprenant un support situé à une extrémité du guide d'ondes, ou à une position < 1/4 de longueur d'onde d'une impulsion acoustique portée par le guide d'ondes où l'interférence constructive est attendue, et un conducteur ayant une pluralité de spires conductrices fixées au support.
PCT/US2019/019863 2018-02-27 2019-02-27 Capteur compact amélioré pour agencement de capteur magnétostrictif WO2019169006A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862635978P 2018-02-27 2018-02-27
US62/635,978 2018-02-27

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WO2019169006A2 true WO2019169006A2 (fr) 2019-09-06
WO2019169006A3 WO2019169006A3 (fr) 2019-10-24

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111162754A (zh) * 2019-12-12 2020-05-15 广东工业大学 一种磁致伸缩声波滤波器封装结构及其制作方法
EP3919872A1 (fr) * 2020-06-04 2021-12-08 ASM Automation Sensorik Messtechnik GmbH Capteur de position magnétostrictif pourvu de bobine de détection dans une puce

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US5590091A (en) * 1995-05-11 1996-12-31 Mts Systems Corporation Waveguide suspension device and modular construction for sonic waveguides
US6232769B1 (en) * 1998-06-16 2001-05-15 Balluff, Inc. Modular waveguide assembly for a position sensor and method for making the same
WO2003056280A1 (fr) * 2001-12-31 2003-07-10 Asm Automation Sensorik Messtechnik Gmbh Element detecteur magnetostrictif
WO2010092604A1 (fr) * 2009-02-13 2010-08-19 Gefran S.P.A. Capteur de position à magnétostriction comportant une pluralité de bobines plates
EP2336730B1 (fr) * 2009-12-09 2017-05-17 Gefran S.p.A. Transducteur de position magnétostrictive améliorée

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111162754A (zh) * 2019-12-12 2020-05-15 广东工业大学 一种磁致伸缩声波滤波器封装结构及其制作方法
EP3919872A1 (fr) * 2020-06-04 2021-12-08 ASM Automation Sensorik Messtechnik GmbH Capteur de position magnétostrictif pourvu de bobine de détection dans une puce
US11867536B2 (en) 2020-06-04 2024-01-09 Asm Automation Sensorik Messtechnik Gmbh Magnetostrictive position sensor with detector coil in a chip

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