WO2019167587A1 - Dispositif de réception, dispositif de rayonnement et élément réfléchissant - Google Patents

Dispositif de réception, dispositif de rayonnement et élément réfléchissant Download PDF

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Publication number
WO2019167587A1
WO2019167587A1 PCT/JP2019/004395 JP2019004395W WO2019167587A1 WO 2019167587 A1 WO2019167587 A1 WO 2019167587A1 JP 2019004395 W JP2019004395 W JP 2019004395W WO 2019167587 A1 WO2019167587 A1 WO 2019167587A1
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Prior art keywords
reflecting
reflected
mirror
light
mems mirror
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PCT/JP2019/004395
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English (en)
Japanese (ja)
Inventor
周作 野田
祥夫 棚橋
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パイオニア株式会社
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Publication of WO2019167587A1 publication Critical patent/WO2019167587A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present invention relates to reception and irradiation of electromagnetic waves.
  • Patent Document 1 discloses a lidar using a MEMS (Micro Electro Mechanical Systems) mirror.
  • an optical system that is a rotation target is used to convert emitted light in the horizontal direction.
  • the optical system that collects the incident light has a problem that the pupil magnification in the sagittal direction is small.
  • An object of this invention is to provide the receiver which can expand the light-receiving range suitably, the irradiation device which can expand the irradiation range of electromagnetic waves, and the reflective member used suitably for these.
  • the invention described in claim is a receiving device that receives a reflected wave in which an electromagnetic wave irradiated by an irradiation unit is reflected by an object, swings with respect to a frame unit, and reflects the incident reflected wave The reflected wave reflected by the first reflecting part so as to be incident on the first reflecting part at an angle smaller than an incident angle of the reflected wave to the first reflecting part. And a second reflecting part for guiding the reflected wave guided by the second reflecting part toward the receiving part.
  • the invention described in claim is an irradiation device that irradiates an electromagnetic wave irradiated by the irradiation unit in a predetermined direction, and swings with respect to a frame portion, and the electromagnetic wave irradiated by the irradiation unit Reflected by the first reflecting portion so as to be incident on the first reflecting portion at an angle larger than an incident angle of the electromagnetic wave irradiated by the irradiating portion and the first reflecting portion to the first reflecting portion.
  • a second reflecting portion for guiding the electromagnetic wave to the first reflecting portion, and the first reflecting portion directs the electromagnetic wave guided by the second reflecting portion to the outside of the second reflecting portion. reflect.
  • the invention according to claim is a reflecting member having a reflecting surface for specularly reflecting electromagnetic waves, wherein the reflecting surface has a part of a predetermined cross section forming a part of a parabola, and a predetermined reference line. On the other hand, it has a shape to be rotated.
  • FIG. 5 is a diagram schematically showing an optical system common to first to third examples.
  • 1 shows a schematic configuration of an irradiation apparatus according to a first embodiment. It is the figure which represented the MEMS mirror and rotary parabolic mirror of the irradiation apparatus on the xz coordinate. An example of the configuration of a rotating parabolic mirror that reflects emitted light three or more times with a MEMS mirror is shown. It is the perspective view which showed the specific shape of the optical element which has a paraboloid mirror. It is the figure which showed schematically the 2nd structural example of the irradiation apparatus. It is the figure which showed schematically the 3rd structural example of the irradiation apparatus.
  • the schematic structure of the measuring apparatus which concerns on 3rd Example is shown. It is the top view which showed one structural example of the MEMS mirror device.
  • the 1st structural example of an optical member is shown.
  • the 2nd structural example of an optical member is shown.
  • the 3rd structural example of an optical member is shown.
  • the receiving device is a receiving device that receives a reflected wave in which the electromagnetic wave irradiated by the irradiation unit is reflected by the object, and is oscillated with respect to the frame unit and is incident thereon.
  • a first reflecting part that reflects a reflected wave; and the reflected by the first reflecting part so as to be incident on the first reflecting part at an angle smaller than an incident angle of the reflected wave to the first reflecting part.
  • a second reflection unit that guides the reflected wave to the first reflection unit, and the first reflection unit reflects the reflected wave guided by the second reflection unit toward the reception unit.
  • “reflecting toward the receiving unit” is not limited to the case where the reflected wave is directly reflected in the direction in which the receiving unit exists, and the receiving unit receives the reflected wave via an optical element such as a mirror. In this case, the case where the reflected wave is reflected toward the optical element is also included. That is, “reflecting toward the reception unit” means that the reflected wave is reflected in the direction received by the reception unit.
  • the receiving apparatus can receive the reflected wave incident on the first reflecting part by the second reflecting part even if the reflected wave incident on the first reflecting part cannot be directly reflected on the light receiving part due to the limitation on the tilt angle of the first reflecting part.
  • the reflected wave can be suitably guided to.
  • the first reflection unit performs the second reflection after performing re-reflection one or more times to reflect the reflected wave guided by the second reflection unit to the second reflection unit.
  • the reflected wave guided by the unit is reflected toward the receiving unit.
  • the receiving apparatus can suitably guide the reflected wave to the receiving unit even when the tilt angle of the first reflecting unit is limited.
  • the second reflecting unit has a reflecting surface in which a part of a predetermined cross section forms a part of a parabola, and the first reflecting unit is disposed at a focal point of the parabola. Is done. According to this structure, the reflected wave reflected by the 2nd reflection part can be incident on the 1st reflection part again.
  • the first reflecting unit reflects the reflected wave in a state inclined at a predetermined angle with respect to a reference plane parallel to the frame unit
  • the second reflecting unit includes the first reflecting unit.
  • the reflected wave reflected by the reflecting part is reflected to make a parallel wave substantially parallel to the reference surface, and then the parallel wave is reflected toward the first reflecting part.
  • the reflected wave reflected by the second reflecting portion can be incident again on the first reflecting portion while changing the incident angle.
  • the irradiation device irradiates the electromagnetic wave irradiated by the irradiation unit in a predetermined direction, and swings with respect to the frame unit, and the electromagnetic wave irradiated by the irradiation unit Reflected by the first reflecting portion so as to be incident on the first reflecting portion at an angle larger than an incident angle of the electromagnetic wave irradiated by the irradiating portion and the first reflecting portion to the first reflecting portion.
  • a second reflecting portion for guiding the electromagnetic wave to the first reflecting portion, and the first reflecting portion directs the electromagnetic wave guided by the second reflecting portion to the outside of the second reflecting portion. reflect.
  • the irradiation apparatus can enlarge the irradiation range of the electromagnetic wave by increasing the apparent inclination angle of the first reflecting portion even when the inclination angle of the first reflecting portion is limited. .
  • the first reflecting unit performs the re-reflection for reflecting the electromagnetic wave guided by the second reflecting unit to the second reflecting unit one or more times, and then performs the second reflecting unit.
  • the electromagnetic wave guided by is reflected toward the outside of the second reflecting portion.
  • the irradiation apparatus can appropriately irradiate the electromagnetic wave toward the outside of the second reflection unit even when the tilt angle of the first reflection unit is limited.
  • the second reflection unit guides the electromagnetic wave reflected by the first reflection unit to a fixed mirror, and transmits the electromagnetic wave reflected by the fixed mirror to the first reflection unit.
  • the second reflecting unit includes a first convex lens and a second convex lens having the same focal length as the first lens, and the first convex lens and the second convex lens are The first convex lens is disposed at a position separated from the first reflecting portion by the focal distance, and the second convex lens is disposed at a position corresponding to the focal distance from the fixed mirror. It is located at a distance.
  • the irradiation device can suitably emit the parallel light toward the outside.
  • the reflecting member has a reflecting surface that specularly reflects electromagnetic waves, and the reflecting surface has a part of a predetermined cross section forming a part of a parabola, and a predetermined reference line. It has a rotationally symmetric shape.
  • a reflecting member is suitably used as the second reflecting portion of the above-described receiving device and irradiation device.
  • the reflecting surface reflects the electromagnetic wave reflected by the reflecting portion swinging with respect to the frame portion by the first region of the reflecting surface, and is reflected by the first region.
  • the electromagnetic wave is reflected by the second region of the reflecting surface to guide the electromagnetic wave to the reflecting portion.
  • the reflecting member can reflect the electromagnetic wave incident on the reflecting member after being reflected by the reflecting portion to the reflecting portion again at a different angle from the reference line when it first enters the reflecting portion. And the inclination angle of the apparent reflection portion can be increased.
  • FIG. 1 is a diagram schematically showing an optical system common to the first to third embodiments.
  • the optical system shown in FIG. 1 is capable of increasing the angle at which light is emitted by being reflected by the movable mirror 200 a plurality of times.
  • the normal direction when the movable mirror 200 is not tilted will be referred to as the “z-axis direction”
  • the directions perpendicular to the z-axis will be referred to as the “x-axis direction”
  • the “y-axis direction” respectively. Determined as shown.
  • the movable mirror 200 is tilted by a predetermined angle (also referred to as “tilt angle ⁇ ”) about the y-axis.
  • optical system shown in FIG. 1 has the following characteristics.
  • the optical system emits parallel light such as collimated laser light when it enters the optical system shown in FIG.
  • a divergent beam having the reflection surface of the movable mirror 200 as a divergence point is emitted as an embodiment.
  • the movable mirror 200 performs scanning by changing the two-dimensional angle between the angle around the x axis and the angle around the y axis, in addition to the angle around the y axis shown in FIG. If the angle has the same property, the reflection angle can be multiplied for the two-dimensional angle.
  • the emitted light is also scanned by wobbling if the optical system is rotationally symmetric with respect to the z axis.
  • FIG. 2 shows a schematic configuration of the irradiation apparatus 10 according to the first embodiment.
  • the irradiation device 10 emits laser light (also referred to as “emitted light Lt”) that is electromagnetic waves (for example, infrared light having a wavelength of 905 nm) to the outside.
  • the irradiation apparatus 10 mainly includes a light source unit 1 that emits the emitted light Lt, a MEMS mirror 2 that is an example of the movable mirror 200 in FIG.
  • the direction in which the emitted light Lt emitted from the light source unit 1 enters the MEMS mirror 2 is the “z-axis direction”, and the direction perpendicular to the z-axis.
  • z-axis direction and the direction perpendicular to the z-axis.
  • x-axis direction and “y-axis direction”, respectively, and these positive directions are determined as shown in the figure.
  • FIG. 2 shows an xz section of the irradiation apparatus 10, and the MEMS mirror 2 is tilted about the y axis by a tilt angle ⁇ .
  • the tilt angle ⁇ is equal to the angle formed by the normal direction of the MEMS mirror 2 with respect to the z axis.
  • the MEMS mirror 2 reflects the laser light incident from the light source unit 1 toward the rotary parabolic mirror 9, reflects the light reflected by the rotary parabolic mirror 9 again, and reflects it toward the outside.
  • the MEMS mirror 2 is, for example, an electrostatic drive type mirror, and is a wobbling (swinging) type mirror whose inclination (that is, an optical scanning angle) changes within a predetermined range under the control of a control unit (not shown).
  • the center “p 0 ” of the MEMS mirror 2 is disposed at the focal point of the parabolic mirror 9.
  • the MEMS mirror 2 is an example of the “first reflector” in the present invention.
  • the parabolic mirror 9 reflects the laser beam reflected at the center p 0 of the MEMS mirror 2 toward the center p 0 of the MEMS mirror 2 again.
  • the rotary parabolic mirror 9 has a rotationally symmetric shape with respect to the z axis, and a cross-sectional shape including the z axis is a parabola having a focal point on the z axis.
  • the rotary parabolic mirror 9 is formed along the broken parabolas 90 and 91 with the center p 0 of the MEMS mirror 2 as the focal point.
  • the parabolic mirror 9 is an example of the “second reflecting portion” and the “reflecting member” in the present invention, and the z axis is an example of the “reference line” in the present invention.
  • FIG. 3 is a diagram showing cross sections of the MEMS mirror 2 and the rotating parabolic mirror 9 on the xz coordinate.
  • the center p 0 of the MEMS mirror 2 is the origin of coordinates (0, 0)
  • the intersection coordinates of the parabola 90 and the x axis are ( ⁇ f, 0)
  • the intersection coordinates of the parabola 91 and the x axis are ( f, 0).
  • “F” indicates the focal length of the parabolas 90 and 91.
  • the emitted light Lt emitted from the light source unit 1 enters the center p 0 of the MEMS mirror 2 along the z-axis, is reflected by the MEMS mirror 2, and enters the position “p 1 ” of the rotary parabolic mirror 9.
  • the exit light Lt reflected at the position p 1 becomes light parallel to the x-axis based on the geometric property of the rotary paraboloid mirror 9 serving as a parabola, and the position “p 2 ” of the rotary paraboloid mirror 9.
  • the exit light Lt reflected at the position p 2 reenters the center p 0 of the MEMS mirror 2 that is the focal point of the paraboloid mirror 9.
  • the emitted light Lt re-entered at the center p 0 of the MEMS mirror 2 is reflected by the MEMS mirror 2 toward the outside.
  • the angle formed by the z-axis when the MEMS mirror 2 first reflects the emitted light Lt is “2 ⁇ ”, whereas the MEMS mirror 2 reflects the emitted light Lt for the second time.
  • the angle formed by the reflected light (that is, the outgoing light Lt emitted to the outside world) with the z-axis is “4 ⁇ ”.
  • the irradiation device 10 includes the rotary parabolic mirror 9 and emits at the same angle as when the tilt angle ⁇ of the MEMS mirror 2 is doubled compared to the configuration without the rotary parabolic mirror 9. Light Lt can be emitted.
  • the apparent tilt angle ⁇ of the wobbling-type MEMS mirror 2 that is generally limited in tilt angle is increased, and the scanning angle is suitably enlarged. be able to.
  • the irradiation region of the emitted light Lt at the position p 1 of the rotary parabolic mirror 9 is an example of the “first region” in the present invention, and the irradiation of the emitted light Lt at the position p 2 of the rotary parabolic mirror 9 is performed.
  • the region is an example of the “second region” in the present invention.
  • the parabolic mirror 9 may be configured to reflect the emitted light Lt to the MEMS mirror 2 three times or more.
  • the rotary parabolic mirror 9 reflects the laser light from the light source unit N times (N is an integer equal to or greater than 3), so that the emitted light Lt whose angle with the z-axis is “2 ⁇ ⁇ N”. Inject outside the irradiation apparatus 10.
  • the emitted light Lt reflected at the position p 3 becomes light parallel to the x-axis based on the geometric property of the rotating parabolic mirror 9 A that becomes a parabola, and the position “p 4 on the rotating parabolic mirror 9 A. Is reflected toward the center p 0 of the MEMS mirror 2 at the position p 4 .
  • the rotary parabolic mirror 9A can triple the apparent tilt angle of the MEMS mirror 2 and suitably enlarge the scanning angle.
  • the rotary parabolic mirror 9B shown in FIG. 4B is configured to reflect the emission light Lt reflected by the MEMS mirror 2 for the third time at the position “p 5 ”.
  • the laser light reflected at the position p 5 based on the geometric properties of the paraboloid mirror 9B becomes parabolic
  • position on the rotating parabolic mirror 9B becomes x-axis
  • the light parallel "p 6" Is reflected toward the center p 0 of the MEMS mirror 2 at the position p 6 .
  • the laser light incident on the MEMS mirror 2 from the position p 6 is reflected by the MEMS mirror 2 and emitted outside the irradiation apparatus 10.
  • the angle formed by the reflected light and the z axis when the MEMS mirror 2 first reflects the emitted light Lt is 2 ⁇ , whereas the reflected light when the MEMS mirror 2 reflects the emitted light Lt for the fourth time.
  • the angle formed by the z-axis (that is, the emitted light Lt emitted to the outside world) is “8 ⁇ ”.
  • the paraboloidal mirror 9B can increase the scanning angle suitably by quadrupling the apparent tilt angle of the MEMS mirror 2.
  • FIGS. 5A to 5C are perspective views showing specific embodiments of the rotary parabolic mirror 9.
  • the rotary parabolic mirror 9 is formed as a side surface of an optical element formed in a truncated cone shape.
  • the optical element shown in FIG. 5A is molded by, for example, injection or pressing.
  • the optical element shown in FIG. 5B is a cylindrical optical element, and is processed so that the inner wall portion of the cylindrical block constitutes the paraboloid mirror 9.
  • the optical element shown in FIG. 5C is a lens, and the center part of the lens is processed in the same manner as the optical element shown in FIG. ing.
  • the rotary parabolic mirror 9 may have various specific modes depending on applications and the like.
  • the irradiation apparatus 10 irradiates the emitted light Lt, which is an electromagnetic wave irradiated by the light source unit 1, in a predetermined direction and is emitted by the light source unit 1.
  • the wobbling type MEMS mirror 2 that reflects the emitted light Lt and the emitted light Lt reflected by the MEMS mirror 2 so as to be incident on the MEMS mirror 2 at an angle larger than the incident angle of the emitted light Lt to the MEMS mirror 2 And a parabolic mirror 9 that leads to the MEMS mirror 2.
  • the MEMS mirror 2 reflects the emitted light Lt guided by the rotary parabolic mirror 9 toward the outside of the rotary parabolic mirror 9.
  • the irradiation apparatus 10 can increase the apparent tilt angle of the wobbling-type MEMS mirror 2 with a limited tilt angle, and can suitably enlarge the scanning angle.
  • the irradiation apparatus 10 to which the present invention is applicable is not limited to the configuration example (referred to as “first configuration example”) having the rotating parabolic mirror 9.
  • first configuration example having the rotating parabolic mirror 9.
  • second configuration examples that do not include the parabolic mirror 9 will be described.
  • N 2
  • FIG. 6 is a diagram schematically illustrating a second configuration example of the irradiation apparatus 10.
  • the irradiation device 10 includes a convex lens 9 a having a focal length “f” and a fixed mirror 9 b instead of the rotary parabolic mirror 9.
  • the convex lens 9a is provided between the MEMS mirror 2 and the fixed mirror 9b, and the MEMS mirror 2 and the fixed mirror 9b are respectively provided at positions separated from the convex lens 9a by twice the focal length. .
  • the exit light Lt reflected from the MEMS mirror 2 enters the fixed mirror 9b after passing through the convex lens 9a, and the exit light Lt reflected from the fixed mirror 9b enters the MEMS mirror 2 again after passing through the convex lens 9a.
  • the angle formed by the reflected light and the z-axis when the MEMS mirror 2 first reflects the emitted light Lt is “2 ⁇ ”
  • the MEMS mirror 2 reflects the emitted light Lt.
  • the angle formed by the z-axis with respect to the reflected light (that is, the emitted light Lt emitted to the outside) when reflected for the second time is “4 ⁇ ”. Therefore, also by the second configuration example, the apparent tilt angle of the MEMS mirror 2 can be increased, and the scanning angle can be suitably enlarged.
  • the convex lens 9a is an example of the “first lens” in the present invention.
  • FIG. 7 is a diagram schematically illustrating a third configuration example of the irradiation apparatus 10.
  • the irradiation device 10 includes a fixed mirror 9 b and an elliptical mirror 9 c instead of the rotary parabolic mirror 9.
  • the MEMS mirror 2 (specifically, the center p 0 of the MEMS mirror 2) is disposed on one of the two focal positions of the elliptical mirror 9c, and the fixed mirror 9b is disposed on the other.
  • the elliptical mirror has a property that light spreading from one focal point of the ellipse is condensed to the other focal point. Therefore, in the third configuration example shown in FIG.
  • the emitted light Lt reflected from the MEMS mirror 2 is reflected by the elliptical mirror 9c and then condensed on the fixed mirror 9b, and after being reflected by the fixed mirror 9b, The light is reflected again and enters the MEMS mirror 2.
  • the angle formed by the reflected light and the z-axis when the MEMS mirror 2 first reflects the emitted light Lt is “2 ⁇ ”
  • the MEMS mirror 2 reflects the emitted light Lt.
  • the angle formed by the z-axis with respect to the reflected light (that is, the emitted light Lt emitted to the outside) when reflected for the second time is “4 ⁇ ”. Therefore, also by the third configuration example, the apparent tilt angle of the MEMS mirror 2 can be increased, and the scanning angle can be suitably enlarged.
  • the elliptical mirror 9c is an example of the “first lens” in the present invention.
  • FIG. 8 is a diagram schematically illustrating a fourth configuration example of the irradiation apparatus 10.
  • the irradiation device 10 includes a convex lens 9 a and a conical mirror 9 d instead of the rotary parabolic mirror 9.
  • the MEMS mirror 2 (specifically, the center p 0 of the MEMS mirror 2) is disposed at the focal position of the convex lens 9a.
  • the emitted light Lt reflected from the MEMS mirror 2 passes through the convex lens 9a, becomes light parallel to the z axis, enters the reflecting surface 93 of the conical mirror 9d, and is reflected twice by the reflecting surface 93.
  • the light passes through the convex lens 9a again and is condensed on the MEMS mirror 2.
  • the angle formed by the reflected light and the z-axis when the MEMS mirror 2 first reflects the emitted light Lt is “2 ⁇ ”
  • the MEMS mirror 2 reflects the emitted light Lt.
  • the angle formed by the z-axis with respect to the reflected light (that is, the emitted light Lt emitted to the outside) when reflected for the second time is “4 ⁇ ”. Therefore, according to the fourth configuration example, the apparent tilt angle of the MEMS mirror 2 can be increased, and the scanning angle can be suitably enlarged.
  • FIG. 9 is a diagram schematically showing a fifth configuration example of the irradiation apparatus 10.
  • the irradiation apparatus 10 replaces the rotary parabolic mirror 9 with a first convex lens 9aa with a focal length “f1”, a second convex lens 9ab with a focal length “f2”, and And a fixed mirror 9b.
  • the convex lenses 9aa and 9ab are provided between the MEMS mirror 2 and the fixed mirror 9b, and are arranged such that the distance between the convex lenses 9aa and 9ab is f1 + f2.
  • the MEMS mirror 2 is disposed at the focal position of the first convex lens 9aa
  • the fixed mirror 9b is disposed at the focal position of the second convex lens 9ab.
  • the MEMS mirror 2, the first convex lens 9aa, the fixed mirror 9b, and the second convex lens 9ab are arranged so that the distance between the MEMS mirror 2 and the first convex lens 9aa is f1, and the fixed mirror 9b and the second convex lens 9ab It arrange
  • the emitted light Lt reflected from the MEMS mirror 2 passes through the first convex lens 9aa, becomes light substantially parallel to the z axis, enters the second convex lens 9ab, and is condensed on the fixed mirror 9b. After being reflected by 9b, the light passes through the convex lenses 9ab and 9aa in order and enters the MEMS mirror 2 again.
  • the angle formed by the reflected light and the z-axis when the MEMS mirror 2 first reflects the emitted light Lt is “2 ⁇ ”, whereas the MEMS mirror 2 reflects the emitted light Lt.
  • the angle formed by the z-axis with respect to the reflected light (that is, the emitted light Lt emitted to the outside) when reflected for the second time is “4 ⁇ ”. Therefore, according to the fifth configuration example, the apparent tilt angle of the MEMS mirror 2 can be increased, and the scanning angle can be suitably enlarged.
  • FIG. 10 is a diagram illustrating a light flux of the emitted light Lt when the emitted light Lt that is parallel light is incident on the MEMS mirror 2.
  • the emitted light Lt that has become parallel light through a collimator lens enters the MEMS mirror 2.
  • a hole may be provided at the center of the convex lens 9aa, and the emitted light Lt that becomes parallel light may pass through the hole.
  • the emitted light Lt that has passed through the convex lens 9aa is collected on the focal plane 94, and after passing through the second convex lens 9ab, becomes parallel light and is reflected by the fixed mirror 9b, and then the second convex lens 9ab and the first convex lens.
  • the light is condensed again at the focal plane 94 between 9 aa and 9aa.
  • the emitted light Lt becomes parallel light after entering the convex lens 9aa, enters the MEMS mirror 2 again, and is emitted to the outside.
  • This configuration has the feature (4) described in the ⁇ Overview> section, and is a preferable configuration for use.
  • FIG. 11 is a diagram schematically illustrating a sixth configuration example of the irradiation apparatus 10.
  • the irradiation device 10 includes a gradient index (GRIN) lens 9 e instead of the parabolic mirror 9.
  • the end surface 95 of the GRIN lens 9e is mirror-coated so that the emitted light Lt incident from the MEMS mirror 2 can be reflected back.
  • the distance between the MEMS mirror 2 and the GRIN lens 9e is adjusted according to the pitch of the GRIN lens 9e.
  • the apparent tilt angle of the MEMS mirror 2 can be increased and the scanning angle can be suitably enlarged.
  • FIG. 12 shows a schematic configuration of the receiving apparatus 11 according to the second embodiment.
  • the second embodiment is an example in which the rotary parabolic mirror 9 included in the irradiation device 10 of the first embodiment is applied to a laser receiving optical system, and the receiving device 11 according to the second embodiment emits from a light source (not shown).
  • the reflected laser beam receives light reflected by an object in the outside world (also referred to as “return light Lr”).
  • the receiving apparatus 11 illustrated in FIG. 12 includes a MEMS mirror 2, a light receiving unit 4 such as an avalanche photodiode (Avalanche PhotoDiode), and a rotary parabolic mirror 9.
  • the direction in which the return light Lr incident on the light receiving unit 4 is emitted from the MEMS mirror 2 is the z axis.
  • the MEMS mirror 2 is a wobbling (swinging) type mirror whose inclination (that is, the angle of optical scanning) changes within a predetermined range, like the MEMS mirror 2 of the irradiation apparatus 10 shown in FIGS. It is.
  • the rotary parabolic mirror 9 has a rotationally symmetric shape with respect to the z axis, like the rotary parabolic mirror 9 of the irradiation apparatus 10 shown in FIGS. 1 to 3, and the cross-sectional shape including the z axis is the same as that of the MEMS mirror 2.
  • a parabola having a focal point at a position overlapping the center p 0 Then, the parabolic mirror 9 guides the return light Lr to the light receiving unit 4 by reflecting the reflected light of the return light Lr incident on the MEMS mirror 2 from the outside to the MEMS mirror 2 again.
  • FIG. 13 is a diagram showing cross sections of the MEMS mirror 2 and the rotating parabolic mirror 9 of the receiving device 11 on the xz coordinate.
  • the return light Lr incident on the center p 0 of the MEMS mirror 2 from the outside of the receiving device 11 is reflected by the MEMS mirror 2 and enters the position “pa 1 ” of the rotary parabolic mirror 9. Then, the return light Lr reflected at the position pa 1 is incident on the position “pa 2 ” of the rotating paraboloid mirror 9 in parallel with the x axis based on the geometric property of the rotating paraboloid mirror 9 serving as a parabola. Furthermore, the return light Lr reflected at the position pa 2 is incident on the center p 0 of the MEMS mirror 2 again. Then, the return light Lr re-entered at the center p 0 of the MEMS mirror 2 is reflected by the MEMS mirror 2 toward the light receiving unit 4.
  • the angle between the return light Lr first incident on the MEMS mirror 2 and the z-axis is “4 ⁇ ”, whereas the return light Lr incident on the MEMS mirror 2 after being reflected by the paraboloid mirror 9 is z-axis.
  • the angle between the two is “2 ⁇ ”.
  • the parabolic mirror 9 makes the angle of the return light Lr incident on the MEMS mirror 2 to the z-axis 1 ⁇ 2 and makes it incident on the MEMS mirror 2 again. Therefore, the irradiation device 10 receives the light having the same angle as that obtained when the tilt angle ⁇ of the MEMS mirror 2 is doubled by providing the rotary parabolic mirror 9 and comparing the configuration without the rotary parabolic mirror 9.
  • the unit 4 can receive light.
  • the apparent tilt angle of the wobbling type MEMS mirror 2 with a limited tilt angle ⁇ can be increased.
  • the larger the apparent tilt angle ⁇ the greater the sagittal pupil magnification.
  • the mirror diameter of the apparent MEMS mirror 2 can be expanded and the received light quantity can be increased suitably.
  • the rotary parabolic mirror 9 used for the receiving device 11 reflects the light incident from the outside to the MEMS mirror 2 three times or more like the rotary parabolic mirror 9 used for the irradiation device 10 of the first embodiment ( That is, the number of reflections N at the MEMS mirror 2 may be 3 or more.
  • the return light Lr when the return light Lr whose angle with the z-axis is 6 ⁇ enters the center p 0 of the MEMS mirror 2 from the outside, the return light Lr has positions “pb 1 ” and “pb 2 ”. , And then reflected again at the position p 0 , and then reflected at the positions pa 1 , pa 2 , and p 0 , respectively, as in the example of FIG. 4 is incident.
  • the rotary parabolic mirror 9A can enlarge the apparent tilt angle of the MEMS mirror 2 by three times.
  • FIG. 14B when the return light Lr whose angle with the z-axis is 8 ⁇ enters the center p 0 of the MEMS mirror 2 from the outside, the return light Lr has positions “pc 1 ” and “pc 2 ”. ”And then again at the position p 0 , and thereafter, similarly to the example of FIG. 14A, the position pb 1 , the position pb 2 , the position p 0 , and the position pa 1 are reflected. , Reflected at position pa 2 and position p 0 , respectively, and enters the light receiving unit 4.
  • the rotary parabolic mirror 9A can enlarge the apparent tilt angle of the MEMS mirror 2 by four times.
  • the rotary parabolic mirror 9 (9A, 9B) reflects the light beam having the angle “2 ⁇ ⁇ N” formed with the z axis N times by the MEMS mirror 2 having the tilt angle ⁇ , and receives the light receiving unit 4 on the z axis. Can be made incident.
  • FIG. 15 is a perspective view of the MEMS mirror 2 and the rotary parabolic mirror 9 when the light beam condensed at the center p 0 is incident on the MEMS mirror 2.
  • 16A is a side view showing the state of FIG. 15, and
  • FIG. 16B is a top view showing the state of FIG. In FIG. 15 and FIGS. 16A and 16B, the light reflected from the MEMS mirror 2 to the light receiving unit 4 is not shown in order to prevent complicated display.
  • the light beam condensed at the center p 0 of the MEMS mirror 2 is condensed again on the center p 0 of the MEMS mirror 2 via the rotary parabolic mirror 9.
  • the light beam reflected at the position pa 1 becomes parallel light in the meridional plane (see FIG. 16A) and enters the position pa 2 , but in the sagittal plane (see FIG. 16B), z
  • the light is condensed once at the position “p 11 ” on the axis.
  • a point conjugate with the center p 0 of the MEMS mirror 2 is always present on the MEMS mirror 2 regardless of the ray angle and the number of reflections.
  • the light re-entering the MEMS mirror 2 is collected again at the center p 0 of the MEMS mirror 2.
  • the light re-entering the MEMS mirror 2 is collected again at the center p 0 of the MEMS mirror 2. Condensate.
  • the receiving device 11 Since the receiving device 11 has a symmetric structure with respect to the z-axis, the receiving device 11 is an optical system having the same magnification as the object on the MEMS mirror 2. Therefore, the light beam diameter on the MEMS mirror 2 does not change unless the aberration of the optical system is taken into consideration. Actually, the beam diameter on the MEMS mirror 2 slightly changes with the number of reflections due to the influence of aberration, but the influence is sufficiently small.
  • FIG. 17A shows the contour 21 of the light flux on the MEMS mirror 2 at the time of the first reflection when the parallel light of 3.6 mm is incident on the MEMS mirror 2 of the receiving apparatus 11 shown in FIG. B) shows the contour 22 of the light beam on the MEMS mirror 2 during the second reflection.
  • the outline of the light beam applied to the MEMS mirror 2 is changed between the first reflection and the second reflection, but the change width is slight. ing. Therefore, when the receiving device 11 is applied to a lidar described later, parallel light is incident on the MEMS mirror 2, but the influence of repeated reflection on the MEMS mirror 2 by the rotating parabolic mirror 9 does not substantially occur.
  • the exit light Lt that becomes a parallel beam is incident on the MEMS mirror 2, the effect of repeated reflection on the MEMS mirror 2 by the rotary parabolic mirror 9 is substantially generated. Absent.
  • the receiving apparatus 11 is a receiving apparatus that receives the reflected light of the return light Lr reflected by the object, and is a wobbling type MEMS mirror that reflects the incident return light Lr. 2 and a rotating parabolic mirror that guides the return light Lr reflected by the MEMS mirror 2 to the MEMS mirror 2 so that the return light Lr is incident on the MEMS mirror 2 at an angle smaller than the initial incident angle of the return light Lr to the MEMS mirror 2.
  • the MEMS mirror 2 reflects the reflected light guided by the rotary parabolic mirror 9 toward the light receiving unit 4.
  • the receiving device 11 can increase the apparent tilt angle of the wobbling type MEMS mirror 2 in which the tilt angle ⁇ is limited.
  • the receiving device 11 is not limited to the structural example which has the paraboloid mirror 9 like the irradiation apparatus 10 of 1st Example. Similarly, even if the receiving device 11 has a configuration without the parabolic mirror 9 (for example, the second to sixth configuration examples shown in the first embodiment), the wobbling type MEMS mirror having a limited tilt angle ⁇ . The apparent tilt angle of 2 can be increased.
  • the third embodiment shows an example in which the irradiation device 10 of the first embodiment and the receiving device 11 of the second embodiment are applied to a rider.
  • FIG. 18 shows a schematic configuration of the measuring apparatus 100 according to the third embodiment.
  • the measuring apparatus 100 emits infrared light (for example, wavelength 905 nm) emitted light Lt that is an electromagnetic wave to the measurement object 10, receives the return light Lr, and measures the distance to the measurement object 10.
  • the measuring device 100 is a rider that is mounted on a vehicle, for example, and has an area within a predetermined distance from the vehicle as a measurement range.
  • the measuring apparatus 100 includes a light source unit 1, a MEMS mirror device 20 having a MEMS mirror 2, an optical member 3, a light receiving unit 4, and a control unit 5.
  • the light source unit 1 emits infrared emission light Lt toward the MEMS mirror 2 of the MEMS mirror device 20.
  • the light receiving unit 4 generates a detection signal corresponding to the light amount of the received return light Lr and sends it to the control unit 5.
  • the MEMS mirror device 20 includes the MEMS mirror 2 and reflects the emitted light Lt incident from the light source unit 1 toward the optical member 3.
  • the MEMS mirror device 20 reflects the return light Lr incident from the optical member 3 toward the light receiving unit 4.
  • the MEMS mirror device 20 reflects the emitted light Lt in a range of 360 degrees at least in the horizontal direction.
  • the optical member 3 causes the exit light Lt incident from the MEMS mirror 2 to exit from the measuring apparatus 100 and causes the return light Lr reflected from the measurement object 10 to enter the MEMS mirror 2.
  • the optical member 3 includes the rotary parabolic mirror 9 described in the first and second embodiments.
  • the paraboloid mirror 9 reflects the emission light Lt and the return light Lr toward the MEMS mirror 2, thereby reflecting the emission light Lt and the return light Lr by the MEMS mirror 2 a plurality of times, and the appearance of the MEMS mirror 2. Increase the tilt angle.
  • the control unit 5 controls the emission of the emitted light Lt from the light source unit 1 and processes the detection signal supplied from the light receiving unit 4 to calculate the distance to the measurement object 10. In addition, the control unit 5 gradually changes the irradiation direction of the emitted light Lt by the MEMS mirror 2 by transmitting a control signal related to the tilt of the MEMS mirror 2 to the MEMS mirror 2.
  • FIG. 19 is a top view showing a configuration example of the MEMS mirror device 20.
  • the MEMS mirror device 20 mainly includes a MEMS mirror 2, a fixed frame 11, a frame portion 12, magnets 14A to 14D, X-axis torsion bars 15A and 15B, and a Y-axis torsion bar. 16A, 16B and strain gauges 17V, 17H.
  • the fixed frame 11 is a structure for supporting the frame portion 12, and is formed of a metal material or a semiconductor material such as silicon.
  • the fixed frame 11 has a frame shape with a gap inside.
  • the frame part 12 has a frame shape with a gap inside.
  • the frame portion 12 is connected to the fixed frame 11 via X-axis torsion bars 15A and 15B, and can swing (rotate) with respect to the fixed frame 11 using the X-axis torsion bars 15A and 15B as rotation axes. .
  • the fixed portion 11 and the frame portion 12 are examples of the “frame portion” in the present invention.
  • the MEMS mirror 2 is swingable with respect to the frame portion 12 using the Y-axis torsion bars 16A and 16B as rotation axes.
  • Convex patterns are formed on the surfaces of the fixed frame 11 and the frame part 12, and the wiring pattern extending from the fixed frame 11 via the X-axis torsion bars 15A and 15B follows the frame shape of the frame part 12,
  • a coil 18 is formed on the surface of the frame portion 12.
  • the magnets 14A to 14D are arranged around the frame portion 12, and generate a magnetic field in the horizontal (H) direction and the vertical (V) direction in a region where the coil 18 formed in the frame portion 12 is present.
  • a strain gauge 17V is provided near the X-axis torsion bar 15B, and a strain gauge 17H is provided near the Y-axis torsion bar 16B.
  • the strain gauge 17V is a sensor that detects the position of the MEMS mirror 2 in the vertical (V) direction, and outputs a voltage corresponding to the twist amount and twist direction of the X-axis torsion bar 15B.
  • the strain gauge 17H is a sensor that detects the position of the MEMS mirror 2 in the horizontal (H) direction, and outputs a voltage corresponding to the twist amount and twist direction of the Y-axis torsion bar 16B.
  • FIG. 20 shows a first configuration example of the optical member 3.
  • the optical member 3 according to the first configuration example includes an omnidirectional lens 7, a convex lens 8, and a rotary parabolic mirror 9.
  • the omnidirectional lens 7 and the convex lens 8 each have a rotationally symmetric shape with respect to the z axis, convert the field of the emitted light Lt reflected by the MEMS mirror 2 into a horizontal direction of 360 degrees, and enter from the horizontal direction of 360 degrees.
  • the returned light Lr is made incident on the MEMS mirror 2.
  • the first mirror 31 is provided between the light source unit 1 and the MEMS mirror 2.
  • the first mirror 31 transmits the emitted light Lt from the light source unit 1 and causes the emitted light Lt to enter the MEMS mirror 2, and reflects the return light Lr reflected by the MEMS mirror 2 to enter the light receiving unit 4. .
  • the first mirror 31 is, for example, a perforated mirror in which a hole is provided at a position overlapping with the optical path of the emitted light Lt.
  • the parabolic mirror 9 is fitted below the processed convex lens 8. Then, the rotating paraboloid mirror 9 makes the emission light Lt incident on the MEMS mirror 2 again by making the emission light Lt reflected by the MEMS mirror 2 at an angle 2 ⁇ with respect to the z-axis, as in the first embodiment. Lt is reflected by the MEMS mirror 2 at an angle 4 ⁇ with respect to the z-axis. Thereafter, the emitted light Lt enters the convex lens 8 and the omnidirectional lens 7 and is emitted in the horizontal direction by the omnidirectional lens 7.
  • the rotary parabolic mirror 9 reflects the return light Lr reflected by the MEMS mirror 2 as in the second embodiment.
  • the light enters the MEMS mirror 2 at an angle 2 ⁇ with respect to the z axis.
  • the return light Lr re-reflected by the MEMS mirror 2 enters the first mirror 31 along the z axis, is reflected by the first mirror 31, and is received by the light receiving unit 4.
  • FIG. 21 shows a second configuration example of the optical member 3.
  • the second configuration example is different from the first configuration example in that a second mirror 32 is provided on the optical path between the first mirror 31 and the MEMS mirror 2, and the light source unit 1 returns in the horizontal direction and emits the light Lr. .
  • the second mirror 32 is provided between the omnidirectional lens 7 and the convex lens 8.
  • the emitted light Lt emitted from the light source unit 1 passes through the first mirror 31, then enters the second mirror 32 without passing through the convex lens 8, and is reflected by the second mirror 32 toward the MEMS mirror 2.
  • the return light Lr reflected from the MEMS mirror 2 toward the second mirror 32 is reflected by the second mirror 32 and further reflected by the first mirror 31 to enter the light receiving unit 4.
  • the parabolic mirror 9 is fitted below the processed convex lens 8. Then, the paraboloid mirror 9 makes the emission light Lt incident on the MEMS mirror 2 again with respect to the z-axis by making the emission light Lt reflected by the MEMS mirror 2 at an angle 2 ⁇ with respect to the z-axis, thereby making the angle 4 ⁇ with respect to the z-axis. Is reflected by the MEMS mirror 2.
  • the paraboloid mirror 9 For the return light Lr incident on the MEMS mirror 2 from the convex lens 8 at an angle 4 ⁇ with respect to the z axis, the paraboloid mirror 9 reflects the return light Lr reflected by the MEMS mirror 2 so that the angle with respect to the z axis. The light is incident on the MEMS mirror 2 by 2 ⁇ and the return light Lr is guided to the light receiving unit 4.
  • FIG. 22 shows a third configuration example of the optical member 3.
  • the optical member 3 according to the third configuration example is different from the first configuration example in that it has a convex mirror 7A that is convex in the negative z-axis direction instead of the omnidirectional lens 7.
  • the convex mirror 7A is provided with a hole 70 so as not to block the optical path of the emission light Lt and the return light Lr between the MEMS mirror 2 and the first mirror 31.
  • the convex mirror 7A reflects the emitted light Lt emitted from the convex lens 8 parallel to the z axis in the horizontal direction and reflects the return light Lr incident in the horizontal direction from the outside toward the convex lens 8. Therefore, the optical member 3 according to the third configuration example can emit the emitted light Lt in the horizontal direction as in the first and second configuration examples.
  • the same effect as the tilt angle ⁇ of the MEMS mirror 2 is increased. Can be obtained.
  • the amount of light received by the light receiving unit 4 is preferably increased, and the spread of the emitted light Lt emitted from the measuring device 100 is increased. It becomes possible to increase the corner.
  • the configuration of the optical member 3 is not limited to the first to third configuration examples described above as long as it is an optical system that converts the visual field horizontally.
  • the optical member 3 may be a catadioptric element or a single mirror.
  • the paraboloid mirror 9 applied to the optical member 3 is not limited to the MEMS mirror 2 that reflects the emitted light Lt and the return light Lr twice, respectively, and is shown in FIGS. 3 (A) and 14 (A).
  • the reflecting mirror 9A and the rotating paraboloid mirror 9B shown in FIGS. 3B and 14B reflect the emitted light Lt and the return light Lr at least three times by the MEMS mirror 2, respectively. It may be.
  • the optical member 3 is not limited to the configuration example having the rotary parabolic mirror 9, and may have a configuration without the rotary parabolic mirror 9 (see FIGS. 6 to 11).
  • a rotationally symmetric optical system In general, when a wobbling type MEMS mirror is applied to a lidar that performs horizontal scanning as described above, since a rotationally symmetric optical system is usually used, incident light from the outside is condensed toward a light receiving element.
  • the optical system has a small sagittal pupil magnification (in general, optical invariants are preserved in this rotationally symmetric optical system, so if the MEMS mechanical tilt angle is set to ⁇ , the sagittal pupil magnification is generally
  • the tilt angle of the MEMS mirror is generally as small as about 15 deg or less, the sagittal pupil magnification is smaller than 1, and the amount of reflected light from the target is also reduced. It will decrease accordingly.
  • the optical tilt angle ⁇ of the reflected light from the MEMS mirror can be substantially increased, and the pupil magnification can be increased. As a result, the amount of reflected light from the target of the lidar can be increased.
  • FIG. 23 is a diagram clearly showing the optical path of the emitted light Lt when the tilt angle ⁇ of the MEMS mirror 2 is increased or decreased by a predetermined angle in the first configuration example shown in FIG. 20.
  • the two-dot chain line indicates the optical path when the tilt angle ⁇ is the smallest among the three tilt angles ⁇
  • the solid line indicates when the tilt angle ⁇ is the largest among the three tilt angles ⁇ .
  • the optical path of is shown.
  • ⁇ 1 is an angle between the emitted light Lt when the tilt angle ⁇ is the smallest and the emitted light Lt when the tilt angle ⁇ is the largest among the emitted light Lt reflected for the first time by the MEMS mirror 2.
  • ⁇ 2 indicates the difference between the emitted light Lt when the tilt angle ⁇ is the smallest and the emitted light Lt when the tilt angle ⁇ is the largest among the emitted light Lt reflected the second time by the MEMS mirror 2. Indicates the angle difference.
  • ⁇ 3 is an angle difference between the emitted light Lt when the tilt angle ⁇ is the smallest and the emitted light Lt when the tilt angle ⁇ is the largest among the emitted light Lt emitted from the omnidirectional lens 7 (that is, Vertical viewing angle).
  • the angle difference ⁇ 1 is an angle difference corresponding to the difference between the largest tilt angle ⁇ and the smallest tilt angle ⁇ among the three tilt angles ⁇
  • the angle difference ⁇ 2 is set in three steps.
  • the vertical viewing angle ⁇ 3 related to the emitted light Lt emitted from the omnidirectional lens 7 is a value corresponding to the angle difference ⁇ 2, and the configuration in which the rotary parabolic mirror 9 is not provided (that is, the emitted light Lt is generated by the angle difference ⁇ 1).
  • the vertical viewing angle when the tilt angle ⁇ of the MEMS mirror 2 is changed can be preferably doubled by the rotary parabolic mirror 9.
  • FIG. 24 is a diagram illustrating an optical path of the exit light Lt when the exit light Lt that is a parallel beam is incident on the convex lens 8 when the MEMS mirror 2 is disposed at the focal point of the convex lens 8.
  • the parallel beam emission light Lt having a predetermined light beam diameter is incident on the convex lens 8 from the light source unit 1 and is collected by the MEMS mirror 2.
  • the emitted light Lt reflected by the MEMS mirror 2 is collected at the center of the MEMS mirror 2 when entering the MEMS mirror 2 again, as in the description of FIGS. 15 and 16.
  • the emitted light Lt incident on the convex lens 8 from the MEMS mirror 2 is converted into a parallel beam by the convex lens 8 and emitted.
  • the measuring device 100 since the emission light Lt can be scanned by the MEMS mirror 2 regardless of the beam diameter of the emission light Lt and the size of the MEMS mirror 2, the measuring device 100 includes the convex lens 8 and the rotary parabolic mirror. Compared with a configuration that does not use 9, scanning can be performed with the emitted light Lt having a larger beam diameter.
  • the measuring apparatus 100 includes the wobbling type MEMS mirror 2 that reflects the emission light Lt emitted from the light source unit 1 and the return light Lr incident from the outside, and the MEMS mirror 2.
  • a rotary parabolic mirror 9 that reflects the reflected light reflected toward the MEMS mirror 2 is provided.
  • the MEMS mirror 2 reflects the emitted light Lt reflected by the rotary parabolic mirror 9 toward a predetermined direction outside the rotary parabolic mirror 9, and returns light Lr reflected by the rotary parabolic mirror 9. Is reflected toward the light receiving unit 4.
  • the measuring apparatus 100 can increase the apparent tilt angle of the wobbling type MEMS mirror 2 with a limited tilt angle ⁇ .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

L'invention concerne un dispositif de rayonnement (10) comprenant un miroir de système microélectromécanique (MEMS) de type oscillant (2) qui rayonne une lumière laser, constituant une onde électromagnétique rayonnée par une unité de source de lumière (1), dans une direction prescrite, et qui réfléchit la lumière émise par l'unité de source de lumière, (1) et un miroir parabolique rotatif (9) qui réfléchit la lumière émise Lt réfléchie par le miroir MEMS (2) vers le miroir MEMS (2). Le miroir MEMS (2) réfléchit ensuite la lumière émise Lt réfléchie par le miroir parabolique rotatif (9) dans une direction prédéterminée à l'extérieur du miroir parabolique rotatif (9).
PCT/JP2019/004395 2018-02-28 2019-02-07 Dispositif de réception, dispositif de rayonnement et élément réfléchissant WO2019167587A1 (fr)

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CN112756281A (zh) * 2021-01-15 2021-05-07 镇江润茂钢球有限公司 一种钢球表面粗糙度筛选装置及其使用方法
JP2021081374A (ja) * 2019-11-22 2021-05-27 パイオニア株式会社 センサ装置
WO2022209137A1 (fr) 2021-03-29 2022-10-06 富士フイルム株式会社 Système optique et dispositif de balayage de lumière
WO2023223994A1 (fr) * 2022-05-16 2023-11-23 株式会社トプコン Dispositif, système et procédé de mesure

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JPS49118436A (fr) * 1973-03-12 1974-11-12
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JPS6332515A (ja) * 1986-07-25 1988-02-12 Takeshi Kato 凹面鏡と凸面鏡を組み合わせたレ−ザ−光線の偏向に必要な距離を短縮する装置
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Publication number Priority date Publication date Assignee Title
JP2021081374A (ja) * 2019-11-22 2021-05-27 パイオニア株式会社 センサ装置
CN112756281A (zh) * 2021-01-15 2021-05-07 镇江润茂钢球有限公司 一种钢球表面粗糙度筛选装置及其使用方法
CN112756281B (zh) * 2021-01-15 2023-12-12 镇江润茂钢球有限公司 一种钢球表面粗糙度筛选装置及其使用方法
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WO2023223994A1 (fr) * 2022-05-16 2023-11-23 株式会社トプコン Dispositif, système et procédé de mesure

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