WO2019138808A1 - 電動機の制御装置 - Google Patents

電動機の制御装置 Download PDF

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Publication number
WO2019138808A1
WO2019138808A1 PCT/JP2018/046683 JP2018046683W WO2019138808A1 WO 2019138808 A1 WO2019138808 A1 WO 2019138808A1 JP 2018046683 W JP2018046683 W JP 2018046683W WO 2019138808 A1 WO2019138808 A1 WO 2019138808A1
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WIPO (PCT)
Prior art keywords
signal
acceleration
load
motor
command
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PCT/JP2018/046683
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English (en)
French (fr)
Japanese (ja)
Inventor
弘 藤原
田澤　徹
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パナソニックＩｐマネジメント株式会社
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Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Priority to CN201880085883.7A priority Critical patent/CN111566928B/zh
Priority to JP2019564595A priority patent/JP7245978B2/ja
Priority to EP18899131.9A priority patent/EP3739748A4/de
Priority to US16/955,131 priority patent/US11320805B2/en
Publication of WO2019138808A1 publication Critical patent/WO2019138808A1/ja

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
    • H02P23/04—Arrangements or methods for the control of AC motors characterised by a control method other than vector control specially adapted for damping motor oscillations, e.g. for reducing hunting
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
    • H02P23/20—Controlling the acceleration or deceleration
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41112—Control parameter such as motor controlled by a torque signal
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P29/00—Arrangements for regulating or controlling electric motors, appropriate for both AC and DC motors
    • H02P29/40—Regulating or controlling the amount of current drawn or delivered by the motor for controlling the mechanical load

Definitions

  • the present invention relates to a motor and a control device for a motor that controls driving operation such as speed or position of the motor with respect to a motor and a mechanical load driven by the motor.
  • the present invention relates to a control device of a motor provided with a control configuration that suppresses vibration caused by anti-resonance of a mechanical load generated at the time of driving or the like.
  • the control device of this type of motor has a feedback control system inside so that the position command input from the host controller matches the position of the motor and the load (mechanical load) to be controlled.
  • the controller for such a motor calculates a torque command value for matching the position command and the motor position from the position command and the position detection value of the motor, and fixes the motor so that the same torque as the torque command value is generated in the motor.
  • the positions of the motor and the load to be controlled (mechanical load) are controlled by controlling the current supplied to the secondary winding.
  • the conventional feed control device installs an acceleration sensor on a slider which is a load to be controlled (mechanical load), and an acceleration which is a weighting factor to an acceleration detection value of the load to be controlled (mechanical load)
  • an acceleration feedback loop that subtracts the product of the feedback gain from the torque command value, it is configured to suppress the vibration that occurs in the load to be controlled (machine load) at the time of acceleration / deceleration or at the time of disturbance application.
  • the present invention solves the conventional problems.
  • the present invention relates to a control device for a motor having a load acceleration feedback system, and a control device for a motor capable of achieving both settling and suppression of vibration by obtaining a vibration suppression effect by load acceleration feedback while maintaining command following performance. Intended to provide. That is, the present invention reduces or avoids the trade-off relationship between the load acceleration feedback gain (acceleration feedback amount) and the command tracking performance, and maintains the command tracking performance while maintaining acceleration feedback from the load side.
  • the present invention reduces or avoids the trade-off relationship between the load acceleration feedback gain (acceleration feedback amount) and the command tracking performance, and maintains the command tracking performance while maintaining acceleration feedback from the load side.
  • the inventors of the present application conducted trial and error repeatedly and conducted intensive studies.
  • the inventors have found a novel control device for a motor in which the vibration suppression effect by the acceleration feedback from the load side is enhanced while maintaining the command following performance. The details are described below.
  • a first aspect for solving the problem is a control device of a motor for driving a load (mechanical load), which includes a position control unit, a commanded acceleration calculation unit, a first subtractor, and a second subtraction.
  • the position control unit inputs a position command signal specifying a target position of the load and a motor position signal indicating the position of the motor driving the load, and outputs a torque command signal.
  • the commanded acceleration calculation unit inputs a position command signal, and outputs a commanded acceleration signal indicating the acceleration of the position command signal.
  • the first subtractor subtracts the commanded acceleration signal from the load acceleration signal indicating the acceleration of the load, and outputs a load acceleration correction signal.
  • the second subtractor subtracts a value obtained by multiplying the load acceleration correction signal by a predetermined weighting factor from the torque command signal, and outputs a torque command correction signal.
  • the torque command correction signal controls the current supplied to the stator winding of the motor.
  • the commanded acceleration calculation unit transmits to the commanded acceleration signal a signal obtained by applying a filtering process equivalent to the transfer characteristic of the motor position signal to the position command signal.
  • a loading rate signal is generated by multiplying the weighting factor.
  • the third aspect is the control device for a motor according to the first aspect, wherein the commanded acceleration calculation unit transmits to the command acceleration signal a transfer characteristic of the motor position signal with respect to the position command signal when the load and the motor are rigid bodies.
  • a load speed signal is generated by multiplying the signal that has been subjected to the filter processing equivalent to the weighting factor by a weighting factor.
  • the controller of the motor of the present invention subtracts the commanded acceleration information in advance from the load acceleration information to be fed back.
  • the controller of the motor according to the present invention prevents the subtraction of the acceleration / deceleration torque by the load acceleration feedback, makes it possible to enhance the vibration suppression effect by the load acceleration feedback while maintaining the command following performance, and has a great industrial value. .
  • amendment part in embodiment of this invention The figure which shows another example of a structure of the control apparatus of the motor in embodiment of this invention.
  • FIG. 1 is a diagram showing an example of a configuration of a control device of a motor according to an embodiment of the present invention.
  • a control device 100 of the motor shown in FIG. 1 detects an acceleration of a load 204 which is an object to be driven connected to the motor 201 via the joint portion 203 and a position detector 202 for detecting the positions of the motor 201 and the motor 201. It is connected to the acceleration detector 205.
  • the motor control device 100 receives a position command signal from a host controller (not shown), and controls the current supplied to the stator winding of the motor so that the position command signal matches the positions of the motor and the load machine.
  • Position detector 202 detects the position of the motor, and outputs to the controller 100 of the motor as a motor position signal theta m.
  • Acceleration detector 205 detects an acceleration of the load, and outputs to the controller 100 of the electric motor as a load acceleration signal A L.
  • the configuration of the motor control device 100 will be described.
  • the motor control device 100 has a position control unit 101, a speed control unit 102, a torque control unit 103, a speed conversion unit 104, a load acceleration correction unit 105, a command acceleration calculation unit 106, a subtractor 107, and a subtractor 108 inside. doing.
  • Position control unit 101 receives a position command signal theta S and the motor position signal theta m, and outputs a speed command signal omega S.
  • the speed control unit 102 receives the speed command signal ⁇ S and the motor speed signal ⁇ m calculated by the speed conversion unit 104 from the motor position signal ⁇ m and outputs a torque command signal ⁇ S.
  • the torque control unit 103 inputs a torque command correction signal ⁇ in obtained by subtracting a load acceleration feedback torque signal ⁇ acc to be described later from the torque command signal ⁇ S so that the same torque as the torque command correction signal ⁇ in is generated by the motor. Control the current supplied to the stator winding of the motor.
  • Command acceleration calculation unit 106 inputs the position command signal theta S, and outputs a command acceleration signal A S indicating the acceleration of the position command.
  • Load acceleration correcting unit 105 inputs the load acceleration correction signal A 'L from the load acceleration signal A L by subtracting the commanded acceleration signal A S, and outputs the load acceleration feedback torque signal tau acc.
  • the controller 100 of the motor internally has a cascaded feedback control system in which the motor position, the motor speed and the load speed are fed back so that the position command and the position of the motor and the load coincide with each other. There is.
  • Position control unit 101 receives a position command signal theta S and the motor position signal theta m, and outputs a speed command signal omega S to reduce the difference between them.
  • Position control unit 101 for example, are multiplied by weighting factors to the position command signal theta S and the motor position signal theta m, performs proportional control operation for outputting a speed command signal omega S.
  • Position control unit 101 for example, are multiplied by weighting factor to the difference value of the position command signal theta S and the motor position signal theta m, performs proportional control operation for outputting a speed command signal omega S.
  • Speed controller 102 receives the speed command signal omega S and the motor speed signal omega m, and outputs a torque command signal tau S to reduce the difference between them.
  • Speed control unit 102 for example, and multiplied by a weighting factor to the difference value of the speed command signal omega S and the motor speed signal omega m, weighted integral value of the difference value of the speed command signal omega S and the motor speed signal omega m
  • the proportional integration operation which outputs the addition value with what multiplied the coefficient as torque command signal (tau) S is performed.
  • Speed conversion section 104 receives the motor position signal theta m, and outputs a motor speed signal omega m indicating the motor speed. Speed conversion section 104, for example, performs a differential operation on the motor position signal theta m, and outputs the calculation result as a motor speed signal omega m.
  • Command acceleration calculation unit 106 inputs the position command signal theta S, and outputs a command acceleration signal A S indicating the acceleration of the position command signal theta S.
  • Commanded acceleration calculation unit 106 for example, by performing double differential processing on the position command signal theta S, calculates a command acceleration signal A S.
  • Subtractor 107 subtracts the commanded acceleration signal A S from the load acceleration signal A L, and outputs the load acceleration correction signal A 'L.
  • the load acceleration correction unit 105 receives the load acceleration correction signal A ′ L, and outputs a value obtained by multiplying the load acceleration correction signal A ′ L by the weighting factor as a load acceleration feedback torque signal ⁇ acc .
  • the subtractor 108 outputs a value obtained by subtracting the load acceleration feedback torque signal ⁇ acc from the torque command signal ⁇ S to the torque control unit 103 as a torque command correction signal ⁇ in .
  • the load acceleration correction unit 105 is configured to output, as a load acceleration feedback torque signal ⁇ acc , a value obtained by multiplying a load acceleration correction signal A ′ L obtained by subtracting the command acceleration signal A S from the load acceleration signal A L by a weighting factor. If a value obtained by multiplying the load acceleration signal A L by a weighting factor is output as the load acceleration feedback torque signal ⁇ acc , the motor or load is used to make the motor position signal ⁇ m or the load position ⁇ L follow the position command signal ⁇ S When the acceleration / deceleration operation is performed, the load acceleration feedback torque signal ⁇ acc is subtracted from the torque command signal ⁇ S.
  • the load acceleration feedback torque signal ⁇ acc is subtracted from the torque required for the acceleration / deceleration operation included in the torque command signal ⁇ S.
  • the operation when the load acceleration feedback torque signal ⁇ acc is subtracted from the torque command signal ⁇ S will be described together with the operation principle of the load acceleration correction unit 105.
  • FIG. 2 is a diagram showing an example of a configuration of the load acceleration correction unit 105 in the embodiment of the present invention.
  • the load acceleration correction unit 105 receives the load acceleration correction signal A ′ L, and outputs a value obtained by multiplying the load acceleration correction signal A ′ L by the load acceleration feedback gain K acc that is a weighting factor as a load acceleration feedback torque signal ⁇ acc Do.
  • the command acceleration signal A S 0
  • the transfer function G ⁇ S ⁇ ⁇ m (s) of the motor position signal ⁇ m with respect to the torque command signal ⁇ S is expressed by the equation (1).
  • the transfer function G ⁇ S ⁇ ⁇ L (s) of the load position ⁇ L with respect to the torque command signal is expressed by equation (2).
  • s is the Laplace operator.
  • J m is an inertia of the motor 201.
  • J L is the inertia of the load 204.
  • ⁇ ′ P is a resonant frequency in the transfer characteristic from the torque command signal ⁇ S to the motor position signal ⁇ m .
  • ⁇ Z is an antiresonance frequency in the transfer characteristic from the torque command signal ⁇ S to the motor position signal ⁇ m .
  • Equation (3) The relationship between the load acceleration feedback gain K acc and the resonance frequency ⁇ ′ P is shown as Equation (3).
  • the relationship between the elastic coefficient K S and the inertia J L of the load 204 and the antiresonance frequency ⁇ Z is expressed by the equation (4).
  • K S indicates the elastic modulus of the joint portion 203.
  • feedback of the load acceleration by the load acceleration correction unit 105 has an effect of reducing the gain at the antiresonance frequency, that is, the sensitivity, as shown by the above equations.
  • the load acceleration signal when operating acceleration and deceleration in order to follow the motor position signal theta m and load acceleration signals A L to a position command signal theta S, without reducing the commanded acceleration signal A S from the load acceleration signal A L, the load acceleration signal
  • a L is directly input to the load acceleration correction unit 105 and the load acceleration feedback torque signal ⁇ acc is calculated, the load acceleration feedback causes a problem that the settling property is deteriorated.
  • the torque required for acceleration and deceleration operation calculated by the position controller 101 and the speed control unit 102, and outputs the torque command signal tau S.
  • the load acceleration signals A L and directly input to the load acceleration correcting unit 105 when calculating the load acceleration feedback torque signal tau acc, torque command signal
  • the torque required for the acceleration / deceleration operation is also reduced, and the command follow-up performance is degraded.
  • the shortage of torque necessary for acceleration / deceleration operation is compensated again by the position control unit 101 and the speed control unit 102 so that the motor position signal ⁇ m and the load position ⁇ L coincide with the position command signal ⁇ S. It is controlled.
  • the position control unit 101 and the speed control unit 102 are feedback control, a delay occurs in control. Due to this control delay, operation delay, overshoot, or undershoot or the like occurs near the stop and the settling property is reduced. That is, as the load acceleration feedback gain (acceleration feedback amount) is increased, the command follow-up performance is degraded. There is a trade-off between the load acceleration feedback gain (acceleration feedback amount) and the command tracking performance.
  • a load acceleration correction signal A ′ L obtained by subtracting in advance a command acceleration signal A S indicating acceleration at the time of acceleration / deceleration operation from the load acceleration signal A L to be fed back is input to the load acceleration correction unit 105 to load acceleration feedback torque signal ⁇
  • the torque required for the acceleration / deceleration operation of the motor 201 and the load 204 is not reduced by the load acceleration feedback. Therefore, the effect of improving the operation delay, overshoot, or undershoot at the time of stopping can be obtained.
  • the acceleration / deceleration torque can be reduced by the load acceleration feedback. It can prevent subtraction.
  • the vibration suppression effect by the load acceleration feedback can be obtained while maintaining the command following performance. Therefore, both stability and vibration suppression can be achieved.
  • FIG. 3 is a diagram showing another example of the configuration of the control device of the motor in the embodiment of the present invention.
  • the filter processing unit 109 of the motor control device 100 shown in FIG. 3 performs filter processing equivalent to the transfer characteristic of the motor position signal with respect to the position command signal, and outputs acceleration information.
  • the acceleration when the acceleration / deceleration operation is actually performed can be reduced in advance from the load acceleration information to be fed back, and the subtraction of the acceleration / deceleration torque by the load acceleration feedback can be prevented. Therefore, the vibration suppression effect by the load acceleration feedback can be obtained while maintaining the command following performance more. Therefore, both stability and vibration suppression can be achieved.
  • the load acceleration to which the commanded acceleration is subtracted is fed back.
  • the rigidity of the junction between the motor and the load is high for the commanded acceleration, that is, the acceleration information subjected to the filter processing equivalent to the transfer characteristic of the motor position with respect to the position command signal when the motor and the load are rigid It may be configured to reduce from the acceleration.
  • the rigidity of the junction between the motor and the load is high, that is, the transfer characteristic of the motor position with respect to the position command signal when the motor and the load are rigid bodies. Filter processing equivalent to and output acceleration information.
  • the acceleration when the acceleration / deceleration operation is actually performed can be reduced in advance from the load acceleration information to be fed back, and the subtraction of the acceleration / deceleration torque by the load acceleration feedback can be prevented. Therefore, the vibration suppression effect by the load acceleration feedback can be obtained while maintaining the command following performance more. Therefore, both stability and vibration suppression can be achieved.
  • the motor control device 100 is the motor control device 100 that drives a load (mechanical load), and includes the position control unit 101, the command acceleration calculation unit 106, and the first control unit. It includes a subtractor 107 corresponding to a subtractor and a subtractor 108 corresponding to a second subtractor.
  • Position control unit 101 the position of the motor for driving the load position command signal theta S to specify a target position of the load and enter the motor position signal theta m shown, and outputs a torque command signal tau S.
  • Command acceleration calculation unit 106 inputs the position command signal theta S, and outputs a command acceleration signal A S indicating the acceleration of the position command signal theta S.
  • the first subtractor subtracts the commanded acceleration signal A S from the load acceleration signal A L indicating the acceleration of the load, and outputs a load acceleration correction signal A ′ L.
  • Second subtractor subtracts a value obtained by multiplying a predetermined weight coefficient on the load acceleration correction signal A 'L from the torque command signal tau S, and outputs a torque command correction signal tau in.
  • the torque command correction signal ⁇ in controls the current supplied to the stator winding of the motor.
  • FIG. 4 is a diagram showing still another example of the configuration of a control device of a motor according to the embodiment of the present invention.
  • the same components as the components shown in FIG. 3 will be assigned the same reference numerals and descriptions thereof will be omitted.
  • weighting factor multiplication section 110 of motor control device 100 shown in FIG. 4 the signal subjected to filter processing in filter processing section 109 is multiplied by the weighting factor.
  • the commanded acceleration calculation unit 106 may include the filter processing unit 109 and the weighting factor multiplication unit 110.
  • the command acceleration calculation unit 106 a commanded acceleration signal A S, the load and the motor and the signal subjected to transmission characteristics equivalent to filtering the motor position signal theta m with respect to the position command signal theta S in the case of a rigid
  • the loading rate signal may be generated by multiplying the weighting factor.
  • the rigidity of the junction between the motor and the load is high, that is, equivalent to the transfer characteristic of the motor position with respect to the position command signal when the motor and the load are rigid bodies. Apply filter processing and output a signal.
  • weighting factor multiplication section 110 of motor control device 100 shown in FIG. 4 the signal subjected to filter processing in filter processing section 109 is multiplied by the weighting factor.
  • the commanded acceleration calculation unit 106 may include the filter processing unit 109 and the weighting factor multiplication unit 110.
  • the motor control device can obtain the vibration suppression effect by the load acceleration feedback while maintaining the command following performance.
  • load acceleration feedback gain acceleration feedback amount
  • command tracking performance vibration suppression effect by acceleration feedback from the load side while maintaining command tracking performance It is possible to provide a motor control device with enhanced Therefore, it is suitable for applications such as a control device of a motor used in a semiconductor manufacturing apparatus or an electronic component mounter.
  • Reference Signs List 100 motor control device 101 position control unit 102 speed control unit 103 torque control unit 104 speed conversion unit 105 load acceleration correction unit 106 command acceleration calculation unit 107 subtracter 108 subtractor 109 filter processing unit 110 weight coefficient multiplication unit 201 motor 202 position Detector 203 Junction 204 Load 205 Acceleration Detector

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Control Of Electric Motors In General (AREA)
  • Control Of Position Or Direction (AREA)
  • Feedback Control In General (AREA)
PCT/JP2018/046683 2018-01-09 2018-12-19 電動機の制御装置 WO2019138808A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201880085883.7A CN111566928B (zh) 2018-01-09 2018-12-19 电动机的控制装置
JP2019564595A JP7245978B2 (ja) 2018-01-09 2018-12-19 電動機の制御装置
EP18899131.9A EP3739748A4 (de) 2018-01-09 2018-12-19 Steuerungsvorrichtung für einen elektromotor
US16/955,131 US11320805B2 (en) 2018-01-09 2018-12-19 Control device for electric motor

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JP2018000989 2018-01-09
JP2018-000989 2018-01-09

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CN114915223A (zh) * 2022-07-13 2022-08-16 佛山市华道超精科技有限公司 伺服控制装置、方法及伺服运动系统

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EP3739748A4 (de) 2021-01-13
CN111566928A (zh) 2020-08-21
JPWO2019138808A1 (ja) 2021-01-07
US20200319622A1 (en) 2020-10-08
JP7245978B2 (ja) 2023-03-27
US11320805B2 (en) 2022-05-03
EP3739748A1 (de) 2020-11-18

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