WO2019116802A1 - Dispositif d'analyse de particules - Google Patents

Dispositif d'analyse de particules Download PDF

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Publication number
WO2019116802A1
WO2019116802A1 PCT/JP2018/041753 JP2018041753W WO2019116802A1 WO 2019116802 A1 WO2019116802 A1 WO 2019116802A1 JP 2018041753 W JP2018041753 W JP 2018041753W WO 2019116802 A1 WO2019116802 A1 WO 2019116802A1
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WO
WIPO (PCT)
Prior art keywords
light
imaging
lens
wavelength range
optical element
Prior art date
Application number
PCT/JP2018/041753
Other languages
English (en)
Japanese (ja)
Inventor
長岡　英一
久 秋山
正章 鉤
淳一 青山
慎作 日浦
Original Assignee
株式会社堀場製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社堀場製作所 filed Critical 株式会社堀場製作所
Priority to JP2019558975A priority Critical patent/JPWO2019116802A1/ja
Publication of WO2019116802A1 publication Critical patent/WO2019116802A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids

Definitions

  • the present invention relates to a particle analyzer that analyzes particles by imaging the particles.
  • Patent Document 1 As an apparatus for measuring the particle size distribution, particle shape and the like of particles, as shown in Patent Document 1, a device for imaging a sample flowing in a flow path with a camera and analyzing and processing the image is considered.
  • the depth of field of the imaging lens becomes shallow (small), and particles at a position deviated in the optical axis direction with respect to the focusing plane of the imaging lens There is a problem that it can not measure.
  • the particle analysis device is a particle analysis device for imaging a sample in which particles are dispersed in a dispersion medium to analyze the particles, and an imaging unit for imaging the sample, and the imaging unit An image processing unit configured to process the obtained image data, wherein the imaging unit includes an imaging lens, and a first light receiving element configured to receive light of a first wavelength range of light imaged by the imaging lens; An axis is formed between a second light receiving element for receiving light of a second wavelength range in the light imaged by the imaging lens, an imaging system according to the first wavelength range, and an imaging system according to the second wavelength range And an optical element for enlarging the upper chromatic aberration.
  • the axial chromatic aberration is expanded between the imaging system in the first wavelength range and the imaging system in the second wavelength range by the optical element.
  • the focal length of the imaging lens is different for light in the two wavelength range.
  • the optical element of the present invention In the case where the optical element of the present invention is not used, if the optical magnification is low, the outline of small particles can not be obtained, and the measurement accuracy is degraded. In addition, when the magnification is increased, not only the field of view becomes narrow, but also the depth of field becomes shallow, so the number of particles that can be shot at one time decreases, and the number of shots that only satisfy statistical conditions is required. turn into. That is, it takes time to perform measurement with high accuracy, and shortening the time will deteriorate the measurement accuracy. On the other hand, by using the optical element of the present invention, particles in a position shifted in the optical axis direction of the imaging lens can be measured, so that not only measurement can be performed with high accuracy, but also the measurement time can be shortened.
  • the particle analysis device is provided between the imaging lens and each of the light receiving elements, and is a spectral element that separates light imaged in the imaging lens into light in the first wavelength range and light in the second wavelength range. It is possible to further provide. For example, it is conceivable to use a dichroic prism as the spectral element. Compared to the case where a color filter is provided in front of a light receiving element to receive light in a desired wavelength range by using such a spectral element, the color separation accuracy is high and the light can be easily obtained. Have the advantages of high durability and high resistance to aging.
  • the optical element is an approximately afocal system (an optical system with an infinite focal distance) as a whole.
  • the optical element is a flat plate made of a high dispersion glass material.
  • the optical element is a lens system including a first lens having at least a positive refractive power and a second lens having a negative refractive power.
  • at least one of the first lens and the second lens is made of a high dispersion glass material.
  • the first lens having positive refractive power is a plano-convex lens
  • the second lens having negative refractive power is a plano-concave lens.
  • the optical element is a diffractive optical element that expands chromatic aberration using a diffraction phenomenon.
  • the diffractive optical element is considered to be a lens system including a diffractive optical element in which a diffraction grating is formed on the surface or in the inside.
  • a light irradiator that irradiates the light of the first wavelength range and the second wavelength range to the sample.
  • the wavelength purity can be increased by arbitrarily selecting the wavelength range on the light source side, so that a clearer image can be obtained.
  • chromatic aberration of magnification, distortion and the like can be easily corrected by image processing.
  • the particle analysis device has a flow path through which the sample flows, and the imaging unit images the sample flowing through the flow path.
  • the imaging unit images the sample flowing through the flow path.
  • the focal plane of the imaging unit be disposed to be inclined with respect to the flow path.
  • the imaging unit has a tilt lens, and the focusing surface of the imaging unit be inclined by the tilt lens. With this configuration, there is no need to incline the entire imaging unit with respect to the flow path, and the entire particle analysis device can be miniaturized.
  • the focusing surface of the imaging unit has a substantially rectangular shape
  • the long side of the focusing surface is inclined with respect to the flow direction, so that the inclination angle of the focusing surface can be reduced.
  • the particle analysis device can select the optical magnification of the imaging lens according to the size of the particle.
  • the depth of field changes according to the optical magnification of the imaging lens. Therefore, it is desirable that the inclination angle of the focusing surface be adjustable in accordance with the depth of field of the imaging lens. With this configuration, highly accurate measurement can be performed regardless of the particle size.
  • the imaging unit 3 includes an imaging lens 31 and an imaging element 32 that receives light focused by the imaging lens 31.
  • the imaging device 32 receives a plurality of first light receiving elements 321 that receive light in a first wavelength range, a plurality of second light receiving elements 322 that receive light in a second wavelength range, and light that receives light in a third wavelength range.
  • a plurality of third light receiving elements 323 are provided.
  • the light in the first wavelength range is red light (R)
  • the light in the second wavelength range is green light (G)
  • the light in the third wavelength range is blue light (B) It is.
  • the plurality of first to third light receiving elements 321, 322, and 323 of the present embodiment are arranged in a matrix on a single substrate, and each of the imaging elements 32 is provided.
  • Each image data obtained by the light receiving elements 321, 322, 323 is analyzed by the image processing unit 4.
  • the optical element 33 may be selected as needed so that the distance between the focusing planes F1, F2, and F3 (the distance in the optical axis direction) can be arbitrarily set according to the size and specific gravity of the particles to be measured.
  • an optical element 33 capable of adjusting the amount of axial chromatic aberration (the distance between the focal planes F1, F2, and F3) may be used.
  • the dichroic prism is for separating the incident light into red light, green light and blue light, and the first imaging element 32a comprising a plurality of first light receiving elements 321 on the light emission surface of each light, A second imaging element 32 b including a plurality of second light receiving elements 322 and a third imaging element 32 c including a plurality of third light receiving elements 323 are provided.
  • the optical element 33 is provided between the imaging lens 31 and the spectral element 34.
  • the optical element 33 may be constituted by a lens system including a first lens 33a having at least positive refractive power and a second lens 33b having negative refractive power.
  • the first lens 33a is a plano-convex lens
  • the second lens 33b is a plano-concave lens.
  • the optical element 33 is configured such that the plano-convex lens 33a and the plano-concave lens 33b are disposed close to each other.
  • plano-convex lens 33a and the plano-concave lens 33b order of the concavo-convex surface and the plane
  • a plano-concave, plano-convex lens in which the surface on one side is a plane is advantageous in order to ensure the perpendicularity to the optical axis as the assembly accuracy.
  • a biconvex lens having positive refractive power or a biconcave lens having negative refractive power may be used, and the same performance can be achieved using a meniscus lens having positive or negative refractive power.
  • a cemented lens in which these lenses (plano-concave, plano-convex, biconcave, biconvex, meniscus) are pasted together by adhesion or the like may be used.
  • a high dispersion glass material may be used for the plano-convex lens 33a, or a high dispersion glass material may be used for both the plano-convex lens 33a and the plano-concave lens 33b.
  • the imaging unit 3 of the present embodiment is disposed such that its focal planes F1 to F3 are inclined with respect to the flow path S.
  • the flow channel direction in the present embodiment is the vertical direction, and the focus planes F1 to F3 are inclined with respect to the vertical direction.
  • the light irradiation unit 2 is also disposed to be inclined with respect to the flow path S and is opposed to the imaging unit 3.
  • the inclination angle ⁇ of the focus planes F1 to F3 is the depth dimension D of the flow path S, the length L of the measurement area (long sides of the focus planes F1 to F3), and the depth of field d of the imaging lens 31
  • the relationship with is the following equation. sin ⁇ ⁇ (D ⁇ d) / L
  • the depth of field d of the imaging lens 31 is the depth of field in a single light receiving element (for example, the first light receiving element 321).
  • the observation distance C in one frame of the imaging unit 3 is as follows.
  • C d / sin ⁇
  • imaging can be performed without leaking the particles P in the sample flowing through the flow path S.
  • t C / v t ⁇ (d / sin ⁇ ) / v
  • v is the flow velocity (dropping velocity) of the sample.
  • the particles P shifted in the depth direction orthogonal to the flow channel direction of the flow channel S can be measured. Thereby, measurement can be performed over a wider range in the optical axis direction than in the first embodiment.
  • the optical magnification of the imaging lens 31 may be selectable according to the size of the particle size.
  • the depth of field d changes in accordance with the optical magnification of the imaging lens 31. Therefore, it is desirable that the inclination angle ⁇ of the focus planes F1 to F3 be adjustable in accordance with the depth of field d of the imaging lens 31. With this configuration, highly accurate measurement can be performed regardless of the particle size.
  • the imaging device 32 of the imaging unit 3 may not be provided with a transmission filter or the like that transmits light of a specific wavelength.
  • the imaging unit 3 having such a configuration is generally referred to as a monochrome camera, and a transmission filter is not necessary, so the imaging sensitivity is increased. Further, since each pixel can be photographed under the same condition, more accurate measurement becomes possible.
  • the central part of the particles captured in the image is a bright area (hereinafter referred to as bright area S1), and the outer peripheral part is a dark area (hereinafter referred to as dark area S2).
  • the dark area S2 is an identifiable area.
  • the focal length EFL of these particles is the diameter D of the particles, the refraction of the particles It can be calculated by the following calculation formula using the ratio n1 and the refractive index n2 of the medium in which the particles are dispersed as parameters.
  • EFL n1 ⁇ D / 4 (n1-n2)

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  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

La présente invention concerne un dispositif d'analyse de particules (100) qui mesure des particules déplacées dans la direction d'un axe optique, et qui analyse des particules P par la capture d'images d'un échantillon dans lequel les particules P sont dispersées dans un milieu de dispersion, le dispositif d'analyse de particules (100) comprenant une unité de capture d'image (3) qui capture des images de l'échantillon, et une unité de traitement d'image (4) qui traite des données d'image obtenues par l'unité de capture d'image (3), l'unité de capture d'image (3) comprenant : une lentille d'imagerie (31) ; un premier élément de réception de lumière (321) qui reçoit de la lumière dans une première plage de longueurs d'onde, parmi une lumière à formation d'image par la lentille d'imagerie (31) ; un second élément de réception de lumière (332) qui reçoit de la lumière dans une seconde plage de longueurs d'onde, parmi une lumière à formation d'image par la lentille d'imagerie (31) ; et un élément optique (33) qui agrandit une aberration chromatique axiale, entre un système de formation d'image pour la première plage de longueurs d'onde et un système de formation d'image pour la seconde plage de longueurs d'onde.
PCT/JP2018/041753 2017-12-15 2018-11-09 Dispositif d'analyse de particules WO2019116802A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2019558975A JPWO2019116802A1 (ja) 2017-12-15 2018-11-09 粒子分析装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2017-240819 2017-12-15
JP2017240819 2017-12-15
JP2018-106009 2018-06-01
JP2018106009 2018-06-01

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WO2019116802A1 true WO2019116802A1 (fr) 2019-06-20

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220090081A (ko) * 2020-12-22 2022-06-29 ㈜ 엘티아이에스 입자 측정 장치
JP7453080B2 (ja) 2020-07-20 2024-03-19 旭化成株式会社 輝点異物の検査方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59643A (ja) * 1982-03-25 1984-01-05 ベクトン・デイツキンソン・アンド・カンパニ− 流動細胞測定装置
JPS62269043A (ja) * 1986-05-17 1987-11-21 Canon Inc 粒子解析装置
JPH08320285A (ja) * 1995-05-25 1996-12-03 Hitachi Ltd 粒子分析装置
WO2005018236A1 (fr) * 2003-08-13 2005-02-24 Scalar Corporation Appareil de prise de vues, appareil de traitement d'image, procede de traitement d'image, et programme
US6917421B1 (en) * 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
JP2010286574A (ja) * 2009-06-10 2010-12-24 Nikon Corp 色収差拡大光学系
JP2011501209A (ja) * 2007-10-11 2011-01-06 スリーエム イノベイティブ プロパティズ カンパニー 色共焦点センサ
US20140347447A1 (en) * 2008-12-05 2014-11-27 Unisensor A/S Optical sectioning of a sample and detection of particles in a sample

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001074645A (ja) * 1999-09-03 2001-03-23 Isao Shimizu 微量微細粒子の測定方法及び測定装置
JP2010127723A (ja) * 2008-11-27 2010-06-10 Nikon Corp 形状測定装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59643A (ja) * 1982-03-25 1984-01-05 ベクトン・デイツキンソン・アンド・カンパニ− 流動細胞測定装置
JPS62269043A (ja) * 1986-05-17 1987-11-21 Canon Inc 粒子解析装置
JPH08320285A (ja) * 1995-05-25 1996-12-03 Hitachi Ltd 粒子分析装置
US6917421B1 (en) * 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
WO2005018236A1 (fr) * 2003-08-13 2005-02-24 Scalar Corporation Appareil de prise de vues, appareil de traitement d'image, procede de traitement d'image, et programme
JP2011501209A (ja) * 2007-10-11 2011-01-06 スリーエム イノベイティブ プロパティズ カンパニー 色共焦点センサ
US20140347447A1 (en) * 2008-12-05 2014-11-27 Unisensor A/S Optical sectioning of a sample and detection of particles in a sample
JP2010286574A (ja) * 2009-06-10 2010-12-24 Nikon Corp 色収差拡大光学系

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7453080B2 (ja) 2020-07-20 2024-03-19 旭化成株式会社 輝点異物の検査方法
KR20220090081A (ko) * 2020-12-22 2022-06-29 ㈜ 엘티아이에스 입자 측정 장치
KR102470065B1 (ko) 2020-12-22 2022-11-23 (주) 엘티아이에스 입자 측정 장치

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