WO2019100558A1

WO2019100558A1 - Vapor deposition device

Info

Publication number: WO2019100558A1
Application number: PCT/CN2018/072070
Authority: WO
Inventors: 谭伟
Original assignee: 深圳市华星光电半导体显示技术有限公司
Priority date: 2017-11-27
Filing date: 2018-01-10
Publication date: 2019-05-31
Also published as: CN107805782B; CN107805782A

Abstract

A vapor deposition device. The vapor deposition device comprises a crucible main body (201), a side surface heating device (202) disposed around the crucible main body (201), and a bottom heating device (203) disposed below the crucible main body (201). The bottom heating device (203) can move up and down in the height direction of the side surface heating device (202) and can support the crucible main body (201) to rise to a position higher than the side surface heating device (202). By arranging the heating device at the bottom, the crucible main body (201) can move up and down, thereby improving the maintenance efficiency, shortening the maintenance time, and reducing unnecessary working procedures.

Description

Evaporating device

【技术领域】[Technical Field]

The present application relates to the field of vapor deposition technology, and in particular, to an evaporation device.

【背景技术】【Background technique】

OLED (Organic Light Emitting, Organic Light Emitting) Diode) has all the advantages of solid state, ultra-thin, no viewing angle limitation, fast response, room temperature operation, easy implementation of flexible display and 3D display, and is consistently recognized as the mainstream technology for next-generation display. At present, the main method of OLED device fabrication is to heat the evaporation coating, mainly using a heating container to heat the evaporation material in a vacuum environment, so that the sublimation type or the molten type evaporation material is vaporized at a high temperature and deposited in a TFT (Thin Film Transistor, thin film transistor) on the substrate of the structure or anode structure.

As shown in FIG. 1, the conventional vapor deposition crucible includes a crucible body 101 and an upper cover 104 covering the opening of the crucible body 101; the crucible body 101 is placed inside the heating device 102, and the bottom portion is provided with a support plate 103 for the crucible body 101. The upper cover 104 is provided with an exit hole 105 for containing the vapor deposition material. The vapor deposition principle is that the vapor deposition crucible is heated by the heating device 102 to evaporate or sublimate the material to be vaporized to a certain temperature, and is ejected from the exit hole 105 to form a film on the surface of the substrate to be coated.

However, in the process of maintaining equipment, replacing materials, replacing defects, etc., it is necessary to take out the crucible, weigh the material, and then put the material in the crucible after the maintenance. The loading and unloading requires the operator to enter the narrow cavity, and it is used. The card holder or finger pad is dust-free cloth, and the 坩埚 weighing material is taken out and then fed. The above cumbersome operation steps have caused the following problems: 1. Each time the sputum is weighed, the new material is added, and the new material is not needed, and there is an unnecessary workload, which affects the efficiency; 2. Evaporation source There is no heating at the bottom, such as multiple use each time the bottom material is sublimed, which will cause the bottom material to be heated and deteriorated several times.

【发明内容】 [Summary of the Invention]

The technical problem to be solved by the present application is to provide an evaporation device capable of solving the problem that the conventional vapor deposition device is difficult to replace and the weighing step is cumbersome.

In order to solve the above technical problems, one technical solution adopted by the present application is:

An evaporation apparatus comprising a crucible body, further comprising a side heating device disposed around the crucible body and a bottom heating device disposed below the crucible body; the bottom heating device being capable of being along the side heating device Moving in the height direction up and down, and supporting the raft body to rise above the position of the side heating device; the bottom of the side heating device is provided with an inwardly extending bottom wall, and the bottom heating device is supported on the bottom wall The extension of the bottom heating device is spaced from the inner wall of the side heating device.

An evaporation apparatus comprising a crucible body, further comprising a side heating device disposed around the crucible body and a bottom heating device disposed below the crucible body; the bottom heating device being capable of being along the side heating device The height direction moves up and down, and supports the crucible body to rise above the position of the side heating device.

The beneficial effects of the present application are: different from the prior art, the present application provides an evaporating crucible by providing a bottom heating device under the crucible body, and the crucible body can be heated along the side heating device under the support of the bottom heating device. The direction is moved up and down, which improves the efficiency of maintenance, greatly shortens the maintenance time and reduces the unnecessary work procedures; at the same time, improves the quality of maintenance, avoids the personnel to operate the contaminated materials and the influence of the release on the thickness of the vapor deposition film.

【附图说明】 [Description of the Drawings]

1 is a schematic structural view of a vapor deposition apparatus in the prior art of the present application;

2 is a schematic view of an embodiment of an evaporation device proposed by the present application;

3 is a partially enlarged schematic view showing a portion of the frame A of FIG. 2 in an evaporation device according to the present application;

4 is a schematic structural view of a lifting device in an evaporation device according to the present application;

FIG. 5 is a schematic structural view of another embodiment of an evaporation device according to the present application; FIG.

6 is a schematic diagram of an apparatus of a control system in an evaporation apparatus proposed by the present application.

【具体实施方式】【Detailed ways】

The technical solutions in the embodiments of the present application are clearly and completely described below. It is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present application without departing from the inventive scope are the scope of the present application.

It is worth noting that the directional terms mentioned in this application are, for example, "upper", "lower", "front", "post", "left", "right", "inside", "outside", " The directional terms are used to better and more clearly illustrate and understand the present application, and do not indicate or imply that the device or component referred to must have a specific orientation. It is constructed and operated in a specific orientation and is therefore not to be construed as limiting the application.

In order to explain the present application in more detail, an evaporation apparatus proposed by the present application will be described below with reference to the accompanying drawings.

An evaporation device provided by the present application, as shown in FIG. 2, specifically includes a crucible body 201 and a side heating device 202 disposed around the crucible and a bottom heating device 203, a crucible body 201 and a side heating device 202. There are spaces between the side walls, and the spacing is arranged to enable the side heating device 202 to uniformly heat the crucible body 201. Preferably, the interval may be 1 to 5 cm. In this embodiment, the implementation manner of each heating device is not limited, and resistance heating or electromagnetic heating, or other heating methods may be used.

Thus, the bottom heating device 203 is disposed below the crucible body 201, and the surrounding side heating device 202 can uniformly heat the evaporating material in the crucible, thereby avoiding the evaporating material remaining at the bottom of the crucible body 201.

It should be noted that in the present embodiment, the bottom heating device 203 is movably attached to the side heating device 202. Referring to FIG. 3, it is an embodiment of the bonding manner. It can be seen that the edge of the bottom heating device 203 is provided with an extension portion 2031. The length of the extension portion 2031 is slightly smaller than the inner diameter of the side heating device 202, and forms a gap 209 with the side wall of the side heating device 202, so that the bottom heating device 203 supports the When the crucible body 201 moves up and down along the height direction of the crucible, the frictional force is reduced. The bottom inner wall of the side heating device 202 is further provided with a bottom wall 2021 which is folded inwardly. The extension portion 2031 of the bottom heating device 203 is supported on the bottom wall 2021, and the bottom wall 2021 is used for supporting the bottom heating device 203, and ensures The side heating device 202 and the bottom heating device 203 are seamlessly bonded during heating. Specifically, the lower surface of the extending portion of the edge of the bottom heating device 203 can be arranged in a stepped structure, and the upper surface of the bottom wall 2021 is also provided with a stepped structure matched thereto to achieve seamless fitting and prevent evaporation. When the device is in operation, thermal energy leaks from the gap 209 between the bottom heating device 203 and the side heating device 202, thereby affecting the temperature control during the evaporation process. Similarly, other structures such as a zigzag type, a wave shape, and the like, as long as the seamless fit of the lower surface of the extension portion 2031 and the upper surface of the bottom portion 2021 can be achieved, are within the scope of the present application.

Further, the upper portion of the body 201 is open at the upper portion, and a cover 204 is provided at the opening, and the cover 204 is used to restrict the evaporated vapor deposition material inside the body 201. Further, the vapor deposition apparatus of the present application further includes a heat insulating cover 205 for maintaining the temperature of the crucible body 201, and the heat insulating cover 205 further includes a sealing member 206 for filling between the crucible cover 204 and the side heating device 202. The voids and can function to fix the crucible body 201.

It should be noted that the structure of the sealing member 206 and the connection form between the thermal insulation cover 205 and the crucible main body 201 are not specifically limited. For example, the sealing member 206 may be made of a rubber material to isolate moisture and further provide better sealing and heat preservation effects. Meanwhile, the present application does not limit the manner in which the main body 201 and the lid 204 are closed, and the opening of the body 201 can be closed. For example, an external thread may be provided on the outer surface of the opening of the body 201, and an inner thread matching the external thread may be provided on the inner surface of the lid 204. The cover of the lid 204 and the body 201 is Threaded. Of course, the material of the lid 204 cannot react with the material to be vaporized.

Further, the bottom plate of the main body 201 is of a multi-stage inner convex type, and the bottom heating device 203 is matched with the shape of the bottom of the crucible body 201, and the multi-stage inner convex structure simultaneously serves to increase the thermal contact area and support the crucible body 201. When the crucible body 201 is placed on the bottom heating device 203, the crucible body 201 can be prevented from being released, affecting the evaporation efficiency, and facilitating the pick-and-place of the crucible body 201. Of course, in order to achieve the above technical effects, it is also within the scope of the present application to set the bottom of the crucible body 201 to an inverted V-shape, a multi-stage sawtooth structure, and the like.

Further, the cover 204 and the heat insulating cover 205 are provided with an exit hole 207 for discharging the vapor evaporated by the vapor deposition material in a specified direction, and thus, for the distance between the heat insulating cover 205 and the cover 204, The vapor deposition material capable of evaporating in a gaseous state may be emitted from the exit hole 207. Considering that if the aperture of the exit hole 207 is larger than the outer diameter of the crucible body 201, it may happen that the vapor deposition material evaporated to the gaseous state reaches the top end of the crucible body 201 and is directly ejected from the edge position of the exit hole 207, thereby failing to cause vaporization of the gaseous state. The plating material is evenly sprayed, which affects the uniformity of evaporation. Therefore, it is preferable that the aperture of the exit hole 207 should be smaller than the outer diameter of the crucible body 201. Further, in the embodiment of the present application, the aperture and the number of the exit holes 207 are not limited, and the evaporated gas can be led out and is not easily clogged.

It should be noted that in the embodiment of the present application, the main body 201 and the material are not limited, and the high temperature resistance and the thermal conductivity are good and the deformation is not easy. For example, the material of the main body 201 may be selected from titanium, copper, aluminum, etc., and materials such as quartz and ceramic may also be used.

In the embodiment of the present application, a lifting device is further included. Referring to FIG. 4 , in one embodiment of the present application, the lifting device includes an expansion and contraction portion 212 and a transmission portion 211 nested in the expansion and contraction portion 212 . One end of the expansion and contraction portion 212 is connected with a power device such as a stepping motor or the like. For providing power to the transmission portion 211 for movement, the transmission portion 211 is for supporting the crucible body 201 to move up and down within the heating device.

Further, referring to FIG. 4, in order to realize automatic weighing, a weighing device 210 is further disposed between the transmission portion 211 and the bottom heating device 203, and the weighing device 210 can be connected to the display screen to display the weight information on the screen in real time. on. The weighing apparatus 210 in the present application can be a series of devices having a value for converting pressure into weight, such as an electronic scale. In this embodiment, the weighing device 210 has a convex shape and cooperates with the inner convex structure of the bottom heating device. Of course, the shape of the weighing device 210 should be identical to the bottom heating device 203 and the crucible body 201, so that in addition to the convex shape, other structures that cooperate with the bottom heating device are equally applicable. Meanwhile, since the bottom heating device 203 is placed on the surface of the weighing device 210, in order to prevent the high temperature from damaging the weighing device 210, there is also a heat insulating material (not shown) between the bottom heating device 203 and the weighing device 210, Insulation materials can be selected from traditional insulation materials such as fiberglass, asbestos, rock wool, silicates, etc., or new insulation materials such as aerogel felts, vacuum panels, and the like.

Further, in the present application, the arrangement of the lifting device is not particularly limited, and it is not necessary to add or clean the vapor deposition material to the crucible body 201, and it can be placed on the holder. Of course, the bottom of the body 201 needs to be provided with a weighing device 210, and there is enough space for the lifting device to enter.

In the embodiment of the present application, for the lifting device, the expansion and contraction portion 212 may be a screw, and the transmission portion 211 may be screwed on the screw and supported by the thread of the screw, wherein the transmission portion 211 does not rotate in the radial direction. When the screw rotates, the transmission portion 211 moves up and down with respect to the screw by the transmission effect of the screw. It should be noted that when the expansion and contraction portion 212 moves the transmission portion 211 up and down by means of screw driving, the body 201 may automatically rotate downward with the expansion and contraction portion 212 due to the weight of the body 201 itself. In this case, a groove (not shown) may be opened in the side heating device 202, and the extension portion 2031 of the bottom heating device 203 is further provided with a fixing portion (not shown) into which the fixing portion is inserted. The groove is moved up and down to fix the bottom heating device 203 in the radial direction to prevent the bottom heating device 203 from rotating in the warp direction. Further, in order to prevent relative sliding between the weighing device 210 and the transmission portion 211 in the radial direction, the bottom surface of the weighing device 210 is provided as a rough surface to increase the frictional force with the transmission portion 211. Thus, in combination with the heat insulating material between the bottom heating device and the weighing device, and the friction between the transmission portion 211 and the weighing device 210, the crucible body 201 is fixed in the radial direction when the telescopic portion 212 is stopped.

Of course, the telescopic portion 212 and the transmission portion 211 can also be fixedly coupled together. In some embodiments, the bottom end of the telescopic portion 212 can be provided with a toothed structure, and the toothed structure is matched with a gear driven by the circuit device, as long as the gear is controlled. In the steering, the expansion and contraction portion 212 and the transmission portion 211 fixed to the expansion and contraction portion 212 can be moved up and down, and the crucible body 201 can be raised and lowered to ascend and descend along the height direction of the crucible body 201. Of course, the power unit may be an electric motor or a hydraulic pump, and since the lifting device is used to support the main body to move up and down during operation, the power unit connected to the telescopic portion 212 needs to be fixed to the ground or the support.

In order to further fix the weighing device 210, the upper surface of the transmission portion 211 may be provided with a structure for positioning, such as setting the width of the transmission portion 211 slightly larger than the width of the weighing device 210, and the edge is also slightly higher than other surfaces, so that The weighing device 210 is completely restrained, further reinforcing the entire vapor deposition device.

Next, the working process of an evaporation apparatus proposed by the present application will be specifically described with reference to FIG.

In the vapor deposition device of the embodiment of the present application, when the evaporation device needs maintenance, the Shutter of each evaporation source in the cavity is opened on the operation interface of the vapor deposition device, so that the thermal insulation cover 305 is sequentially opened. Cover 304. It is worth noting that due to the action of the sealing member 306, it is necessary to wait until the inside of the vapor deposition device is in an atmospheric state to open the respective covers. The power unit is controlled to raise the entire vapor deposition device; the expansion and contraction portion 312 of the vapor deposition device is fixedly rotated by the servo motor, and the transmission portion 311 is driven by the screw. The transmission portion 311 moves upward relative to the expansion and contraction portion 312 and is located at the transmission portion 311. The weighing device 310, the bottom heating device 303, and the crucible body 301 are raised to the set position. After the transmission portion 311 is stopped and has no contact with the surrounding heating device 302, the weighing is started, and the weighing device 310 displays the weight information on the operation interface in real time. After the weighing is completed, the long rod clamp is inserted into the cavity to clamp out the material that needs to be added and needs to be replaced. After the loading is completed, the crucible body 301 is placed into the vapor deposition device by the long rod clamp. Then, the telescopic portion 312 in the vapor deposition device is reversely rotated by the servo motor, and the entire crucible body is lowered by the transmission portion 311. Maintenance and feeding. The entire maintenance process does not require people to enter the cavity, nor need to contact the evaporation device to reduce safety hazards and avoid material contamination.

Further, the embodiment of the present application further includes a control system for controlling the operation of the vapor deposition device. As shown in FIG. 6, the control system includes a control device 401. The control device 401 is a central processing unit CPU, and the control of the vapor deposition device can be realized by a form developed by the single chip microcomputer. Further, the weighing device 403 transmits the weight data of the crucible body to the control device 401 in real time through the data transmission device 405, and the control device 401 receives the weight data and displays it on the display device 404. Of course, the weighing device 403 can be implemented by an electronic scale and a Tianping device.

The display device 404 may be an LCD screen or a capacitive screen or a resistive screen; further, the data transmission device may be a wired transmission, such as a network cable, a data line, or the like, or may be a wireless transmission, such as a WIFI transmitter, a Bluetooth transmitter, etc.; In the display device 404, a touch screen can also be added, and the operation action can be recorded and returned to the control device 401; the control device 401 can further transmit the control data to the power control device 402 through the data transmission device 405, thereby realizing the power device such as the rotation speed. The steering control device 402 can also transmit the operating state of the power unit to the control device 401 via the data transmission device 405 and display it on the display device 404.

Of course, the control system in this embodiment can be integrated into the control system of the entire vapor deposition device, and the display device 404 can also be directly displayed on the operation interface.

In summary, embodiments of the present application provide an evaporation apparatus including a crucible body, a surrounding heating device, and a bottom heating device; by providing a bottom structure of the crucible body in a multi-stage structure, and providing a bottom heating device below the crucible body, Improve the quality of the product, avoid the repeated heating of the bottom material of the crucible and deteriorate the quality; improve the maintenance efficiency by setting the lifting device, greatly shorten the maintenance time and reduce the redundant work procedure; at the same time, improve the quality of maintenance and avoid the personnel to operate the contaminated material. And let go affect the thickness of the vapor deposition film.

The foregoing is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope disclosed in the present application. It should be covered by the scope of protection of this application. Therefore, the scope of protection of the present application should be determined by the scope of the claims.

Claims

An evaporation apparatus comprising a crucible body, further comprising a side heating device disposed around the crucible body and a bottom heating device disposed below the crucible body; the bottom heating device being capable of following The side heating device moves up and down in the height direction, and supports the crucible body to rise above the position of the side heating device; the bottom of the side heating device is provided with an inwardly extending bottom wall, and the bottom heating device is supported by On the bottom wall, there is a space between the extension of the bottom heating device and the inner wall of the side heating device.
The vapor deposition device according to claim 1, wherein an edge of the bottom heating device is provided with an extension portion, and a lower surface of the extension portion is in contact with an upper surface of the bottom wall to realize a bottom heating device and Seamless fit of the side heating unit.
The vapor deposition device according to claim 2, wherein a lower surface of the extending portion and an upper surface of the bottom portion are provided with a stepped structure that matches each other.
The vapor deposition device according to claim 3, wherein the vapor deposition device further comprises a lifting device, the lifting device being disposed below the crucible body and the bottom heating device for driving the The crucible body moves up and down along the height direction of the crucible body.
The vapor deposition device according to claim 4, wherein the lifting device comprises a telescopic portion and a transmission portion, the telescopic portion being connected to the power device for providing moving power to the transmission portion; The upper body is supported to move up and down within the heating device.
The vapor deposition device according to claim 5, wherein said vapor deposition device further comprises a weighing device, said weighing device being located between said transmission portion and said bottom heating device; said weighing The device is coupled to a display screen for transmitting and displaying weight information on the display screen in real time.
The vapor deposition apparatus according to claim 6, wherein said bottom heating means is disposed in a plurality of stages, and a shape of a bottom portion of said crucible body is adapted to said bottom heating means.
The vapor deposition device according to claim 7, wherein the weighing device is matched with the shape of the bottom heating device; and a heat insulating material is further disposed between the weighing device and the heating device.
The vapor deposition apparatus according to claim 8, wherein said vapor deposition apparatus further comprises a control system, said control system comprising control means, data transmission means, display means and power control means; said control means passed a data transmission device is coupled to the weighing device, the control device receives the weighing device to record weight data, and displays weight data on the display device; the control device is coupled to the power control device via a data transmission device The power control device is coupled to the power device to control a rotational speed and direction of the power device.
An evaporation apparatus comprising a crucible body, further comprising a side heating device disposed around the crucible body and a bottom heating device disposed below the crucible body; the bottom heating device being capable of following The side heating device moves up and down in the height direction and supports the crucible body to rise above the position of the side heating device.
The vapor deposition apparatus according to claim 10, wherein the bottom side of the side heating means is provided with an inwardly extending bottom wall, and the bottom heating means is supported on the bottom wall.
The vapor deposition device according to claim 11, wherein an edge of the bottom heating device is provided with an extension portion, and a lower surface of the extension portion is in contact with an upper surface of the bottom wall to realize a bottom heating device and Seamless fit of the side heating unit.
The vapor deposition device according to claim 12, wherein the lower surface of the extending portion and the upper surface of the bottom portion are provided with a stepped structure that matches each other.
The vapor deposition apparatus according to claim 10, wherein an extension of said bottom heating means is spaced apart from an inner wall of said side heating means.
The vapor deposition apparatus according to claim 10, wherein said vapor deposition apparatus further comprises a lifting device, said lifting device being disposed below said crucible body and said bottom heating means for driving said The crucible body moves up and down along the height direction of the crucible body.
The vapor deposition device according to claim 15, wherein the lifting device comprises a telescopic portion and a transmission portion, the telescopic portion being connected to the power device for providing moving power to the transmission portion; The upper body is supported to move up and down within the heating device.
The vapor deposition device according to claim 16, wherein said vapor deposition device further comprises a weighing device, said weighing device being located between said transmission portion and said bottom heating device; said weighing The device is coupled to a display screen for transmitting and displaying weight information on the display screen in real time.
The vapor deposition apparatus according to claim 17, wherein said bottom heating means is disposed in a plurality of stages, said bottom portion of said body is shaped to conform to said bottom heating means; said weighing means is said The shape of the bottom heating device is matched.
The vapor deposition apparatus according to claim 18, wherein said vapor deposition apparatus further comprises a control system, said control system comprising control means, data transmission means, display means and power control means; said control means passing a data transmission device is coupled to the weighing device, the control device receives the weighing device to record weight data, and displays weight data on the display device; the control device is coupled to the power control device via a data transmission device The power control device is coupled to the power device to control a rotational speed and direction of the power device.