CN107805782A - A kind of evaporation coating device - Google Patents
A kind of evaporation coating device Download PDFInfo
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- CN107805782A CN107805782A CN201711210074.8A CN201711210074A CN107805782A CN 107805782 A CN107805782 A CN 107805782A CN 201711210074 A CN201711210074 A CN 201711210074A CN 107805782 A CN107805782 A CN 107805782A
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- China
- Prior art keywords
- evaporation coating
- crucible body
- coating device
- crucible
- bottom heating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application is related to a kind of evaporation coating device, and the evaporation coating device includes Crucible body, and is arranged on the side heat device of the Crucible body surrounding and the bottom heating device being arranged on below the Crucible body；The bottom heating device can move up and down along the short transverse of the side heat device, and support the Crucible body to rise above the position of the side heat device.The application sets heater by bottom so that Crucible body can move up and down, and improve maintenance efficiency, shorten service time, reduce unnecessary working procedure.
Description
Technical field
The application is related to evaporation coating technique field, more particularly to a kind of evaporation coating device.
Background technology
OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) have it is all solid state, ultra-thin, ignore
Angle limitation, quick response, working and room temperature, the advantages that Flexible Displays and 3D display is easily achieved, is unanimously acknowledged as the next generation
The mainstream technology of display.The major way that OLED makes at present is heating evaporation plated film, is mainly existed using heating container
Deposition material is heated under vacuum environment, the deposition material of subliming type or fusion is gasified at high operating temperatures, has been deposited on
On the substrate of TFT (Thin Film Transistor, thin film transistor (TFT)) structures or anode construction.
As shown in figure 1, tradition evaporation crucible includes Crucible body 101 and covers the upper lid in the opening of Crucible body 101
104；Crucible body 101 is placed on inside heater 102, and bottom is provided with supporting plate 103, and Crucible body 101 is used to hold
Material to be deposited, upper lid 104 are provided with perforation hole 105.Principle is deposited in it：Evaporation crucible is added by heater 102
Heat make material to be deposited be heated to certain temperature occur evaporation or distillation, projected from perforation hole 105, so as to condense be deposited on it is to be plated
The substrate surface of film forms film.
However, being required for taking out crucible in technological processes such as maintenance facility, more conversion materials, replacing crucibles, weighing material, protect
Placed into after having supported plus material crucible, take dress crucible need operating personnel to enter narrow and small cavity, and to use clip or
Finger pad non-dust cloth, maintenance are taken out crucible weighing material and then fed.Above-mentioned cumbersome operating procedure, causes problems with：
1. every time take out crucible weigh, it is necessary to just add virgin material, it is not necessary to what is added is placing back in, and has unwanted workload, influence
Efficiency；2. evaporation source bottom is not heated, such as it is used for multiple times after each base material is all and distils, base material can be caused multiple
Circulating-heating and in poor quality goes bad.
The content of the invention
The application can solve the problem that traditional evaporated device is not easy more mainly solving the technical problems that provide a kind of evaporation coating device
The problem of changing crucible and cumbersome weighing stage.
In order to solve the above technical problems, the technical scheme that the application uses is：
A kind of evaporation coating device, including Crucible body, in addition to it is arranged on the side heat device of the Crucible body surrounding
With the bottom heating device being arranged on below the Crucible body；The bottom heating device can fill along the side heat
The short transverse put moves up and down, and supports the Crucible body to rise above the position of the side heat device.
By above-mentioned technical characteristic, following technique effect is up to：Bottom heating device is set in Crucible body bottom, risen
To the effect uniformly heated；Bottom heating device is arranged to laterally heater short transverse movement, so as to realize crucible
The technique effect that main body moves up and down in the short transverse of side heat device so that more convenient when Crucible body is changed.
In better embodiment, the side heat bottom of device is provided with the bottom wall inwardly folded, the bottom-heated
The periphery support of device is on bottom wall.
In better embodiment, the bottom heating device edge is provided with extension, the lower surface of the extension with
The upper surface of the bottom wall is in contact, to realize the seamless connection of bottom heating device and side heat device.
In better embodiment, the upper surface of the lower surface of the extension and the bottom is provided with the rank being mutually matched
Ladder-shaper structure.
By above-mentioned technical characteristic, following technique effect is up to：By by bottom heating device and side heat device
The step structure to cooperate is arranged to, realizes seamless applying, the reduction evaporation of bottom heating device and side heat device
Heat of the device during evaporation is spilt from bottom, improves control ability of the Crucible body to temperature.
In better embodiment, between the inwall of the extension of the bottom heating device and the side heat device
With gap.
By above-mentioned technical characteristic, following technique effect is up to：By the extension and side heat of bottom heating device
Device inwall is provided with gap, reduces friction of the bottom heating device during moving up and down with side heat device.
In better embodiment, the evaporation coating device also includes a lowering or hoisting gear, and the lowering or hoisting gear is arranged at described
The lower section of Crucible body and the bottom heating device, for driving short transverse of the Crucible body along the Crucible body
Move up and down.
In better embodiment, the lowering or hoisting gear includes pars contractilis and driving section, the pars contractilis and power set
It is connected, for providing the power of movement for driving section；The driving section is used to support the Crucible body in heater
Lower movement.
By above-mentioned technical characteristic, following technique effect is up to：By setting lowering or hoisting gear, above and below support crucible main body
It is mobile, it can preferably make it that Crucible body is steady in heater, efficiently move.
In better embodiment, the evaporation coating device also includes a weighing device, and the weighing device is located at the biography
Move between portion and the bottom heating device；The weighing device is connected with a display screen, in real time passing weight information
It is defeated and be shown on the display screen.
By above-mentioned technical characteristic, following technique effect is up to：, can be by Crucible body by setting weighing device
Weight information is recorded and shown in real time, facilitates the control to weight during being deposited.
In better embodiment, the bottom heating device is set in multistage convex, the shape of the Crucible body bottom
Shape agrees with the bottom heating device.
By above-mentioned technical characteristic, following technique effect is up to：By the way that Crucible body bottom preferably is arranged into convex
Type, and the shape of bottom heating device and Crucible body keeps agreeing with, and is advantageous to the installation of Crucible body with picking and placeing, can play
Prevent Crucible body from occurring inclined situation in placement process, be more conducive to realize the uniform heating to Crucible body.
In better embodiment, the weighing device is engaged with the shape of the bottom heating device；It is described to weigh
Heat-barrier material is additionally provided between device and the heater.
By above-mentioned technical characteristic, following technique effect is up to：By the way that the shape of weighing device and bottom-heated are filled
Matching is put, and heat-barrier material is set between bottom heating device, evaporation coating device Stability Analysis of Structures can be caused, and effectively protect
Weighing device is protected under the hot environment of bottom-heated, normal work.
In better embodiment, the evaporation coating device also includes a control system, and the evaporation coating device also includes a control
System processed, the control system include control device, data transmission device, display device and power control unit；The control
Device is connected by data transmission device with the weighing device, and the control device receives the weighing device record weight number
According to, and weight data is shown on said display means；The control device is filled by data transmission device and dynamic Control
Put connected, the power control unit is connected with the power set, controls velocity of rotation and the direction of the power set.
By above-mentioned technical characteristic, following technique effect is up to：By adding control system so that changing crucible master
During body, crucible lifting speed can be effectively controlled, it is more convenient.
The beneficial effect of the application is：Prior art is different from, the application provides a kind of evaporation crucible, by crucible master
Bottom heating device is set below body, and Crucible body can be under the support of bottom heating device along side heat device
Short transverse moves up and down, and so as to improve efficiency when crucible maintains, greatly shortens service time, reduces unnecessary work journey
Sequence；Meanwhile the quality of maintenance is improved, avoid human users' contaminated materials and put askew crucible influence evaporation film thickness.
Brief description of the drawings
Fig. 1 is the evaporation coating device structural representation in the prior art of the application；
Fig. 2 is a kind of one embodiment schematic diagram for evaporation coating device that the application proposes；
Fig. 3 is that the A frame portions in a kind of evaporation coating device that the application proposes in Fig. 2 divide close-up schematic view；
Fig. 4 is the lifting device structure schematic diagram in a kind of evaporation coating device that the application proposes；
Fig. 5 is another example structure schematic diagram in a kind of evaporation coating device that the application proposes；
Fig. 6 is the schematic device of the control system in a kind of evaporation coating device that the application proposes.
Embodiment
The technical scheme in the embodiment of the present application will be clearly and completely described below, it is clear that described implementation
Example only some embodiments of the present application, rather than whole embodiments.It is common based on the embodiment in the application, this area
The every other embodiment that technical staff is obtained under the premise of creative work is not made, belong to the model of the application protection
Enclose.
It is worth noting that, the direction term being previously mentioned in the application, for example, " on ", " under ", "front", "rear", " left side ",
" right side ", " interior ", " outer ", " side " etc., be only the direction with reference to annexed drawings, therefore, the direction term used be in order to it is more preferable,
Be illustrated more clearly that and understand the application, rather than instruction or infer meaning device or element must have specific orientation,
With specific azimuth configuration and operation, therefore it is not intended that limitation to the application.
In order to which the application is described in more detail, a kind of evaporation coating device proposed below in conjunction with the accompanying drawings to the application illustrates.
A kind of evaporation coating device that the application provides, as shown in Fig. 2 evaporation coating device specifically includes Crucible body 201 and set
In the side heat device 202 of crucible surrounding and the bottom heating device 203 of lower section, Crucible body 201 and side heat device
There is interval, the setting at interval can make side heat device 202 play uniform heating to Crucible body 201 between 202 side wall
Effect, it is preferable that interval can be 1~5cm.Wherein, the implementation of each heater is not limited in the present embodiment,
Can be with resistance heating or Electromagnetic Heating, or other mode of heatings.
So, the lower section of Crucible body 201 is provided with bottom heating device 203, with reference to the side heat device of surrounding
202, the evaporant in crucible can be played a part of uniformly heating, avoid evaporant and remained in the bottom of Crucible body 201
Situation.
It is worth noting that, in the present embodiment, bottom heating device 203 is bonded with the activity of side heat device 202,
Referring to Fig. 3, one embodiment for laminating type.As can be seen that the edge of bottom heating device 203 is provided with extension 2031,
The length of extension 2031 is slightly less than the internal diameter of side heat device 202, and forms gap with the side wall of side heat device 202
209, reduce and rub when bottom heating device 203 can be caused to support this Crucible body 201 to be moved up and down along crucible short transverse
Wipe power.And the bottom inner circumferential of side heat device 202 is additionally provided with the bottom wall 2021 inwardly folded, the extension of bottom heating device 203
For the support of portion 2031 on bottom wall 2021, bottom wall 2021 is used for support bottom heating device 203, and ensures that side heat fills during heating
Put seamless applying between 202 and bottom heating device 203.Specifically, the extension at the edge of bottom heating device 203 can be passed through
The lower surface in portion is arranged to forge piece of step type structure, and the upper surface of bottom wall 2021 is again provided with matched forge piece of step type structure, with reality
It is existing seamless applying, prevent evaporation coating device when work, heat energy from bottom heating device 203 and side heat device 202 it
Between gap 209 spill, and then influence control to temperature during evaporation.Equally, other such as sawtooth patterns, waveform etc. are tied
Structure, as long as seamless applying, the protection model in the application of the lower surface of extension 2031 and the upper surface of bottom 2021 can be realized
In enclosing.
Further, the upper opening of Crucible body 201, opening are provided with crucible cover 204, and crucible cover 204 is used to evaporate
Deposition material be limited in inside Crucible body 201.Further, the evaporation coating device of the application is additionally provided with insulation cover 205, insulation cover
205 temperature for maintaining Crucible body 201, insulation cover 205 also includes seal 206, for filling crucible cover 204 and side
Space between heater 202, and fixed Crucible body 201 can be played a part of.
It should be noted that the application between the structure and insulation cover 205 and Crucible body 201 of seal 206 to connecting
The form of connecing is not especially limited.For example, seal 206 can be quality of rubber materials, isolation steam can be played, is further functioned as more
Good sealing and heat insulation effect.Meanwhile the application does not also cover mode to Crucible body 201 and crucible cover 204 and is defined, energy
Enough cover tightly the opening of Crucible body 201.For example, external screw thread can be provided with the outer surface of the opening of Crucible body 201,
The internal thread to match with the external screw thread, crucible cover 204 and the lid of Crucible body 201 are provided with the inner surface of crucible cover 204
Conjunction mode screws up for screw thread.Certainly, the material of crucible cover 204 can not react with material to be deposited.
Further, the bottom plate of Crucible body 201 is convex in multistage, bottom heating device 203 and the bottom of Crucible body 201
Shape is agreed with, and convex shape serves the effect of increase thermocontact area and support crucible main body 201 simultaneously in multistage.Work as crucible
Main body 201 is placed on bottom heating device 203, Crucible body 201 can be avoided to put askew, be influenceed evaporation efficiency, be easy to crucible
Main body 201 picks and places.Certainly, in order to realize above-mentioned technique effect, the bottom of Crucible body 201 is such as arranged to reverse V-shaped, more
Level broached-tooth design etc. is equally in the protection domain of the application.
Further, crucible cover 204 and insulation cover 205 are provided with perforation hole 207, perforation hole 207 be used for by deposition material by
The steam of thermal evaporation is discharged towards assigned direction, thus, for the distance between insulation cover 205 and crucible cover 204, so that steaming can be made
Send out and be emitted for gaseous deposition material from perforation hole 207.If it is more than Crucible body in view of the aperture of perforation hole 207
201 external diameter, it is possible that being evaporated to behind gaseous deposition material arrival Crucible body 201 top directly from perforation hole 207
Marginal position at spray, and can not make it that gaseous deposition material uniformly sprays, and influence the uniformity of evaporation.Therefore, it is excellent
The aperture for selecting perforation 207 should be less than the external diameter of Crucible body 201.And for the hole of perforation hole 207 in embodiments herein
Footpath and number can export the gas after evaporation and be not easily blocked without limiting.
It is worth noting that, in embodiments herein, Crucible body 201 and material are not defined, met resistance to
High temperature, good heat conductivity and it is not easy deformation.Such as：The metals such as titanium, copper, aluminium can be selected in the material of Crucible body 201, also may be used
With from materials such as quartz, ceramics.
In embodiments herein, in addition to a lowering or hoisting gear.Referring to Fig. 4, in one embodiment of the application, rise
Falling unit includes pars contractilis 212 and is nested in the driving section 211 of pars contractilis 212, and one end of pars contractilis 212 connects dynamic dress
Put, such as stepper motor, power set are used for the power that movement is provided for driving section 211, and driving section 211 is used to support the earthenware
Crucible main body 201 moves up and down in heater.
Further, please continue to refer to Fig. 4, weighed automatically to realize, driving section 211 and bottom heating device 203 it
Between be additionally provided with weighing device 210, weighing device 210 can be connected with display screen, by weight information real-time display on screen.
Weighing device 210 in the application can be a series of with the devices for converting the pressure to weight amount, such as electronic scale.This reality
Apply in example, weighing device 210 is shaped as convex, the interior convex respective outer side edges with bottom heating device.Certainly, weighing device
210 shape should be consistent with bottom heating device 203 and Crucible body 201, so except upper convex, other and bottom-heated
The structure that device coordinates is equally applicable.Simultaneously as bottom heating device 203 is placed in the surface of weighing device 210, in order to anti-
Only high temperature failure weighing device 210, there is heat-barrier material (not shown) between bottom heating device 203 and weighing device 210,
It is proposed, heat-barrier material can select conventional insulation material, such as glass fibre, asbestos, rock wool, silicate, or Novel heat insulation
Material, such as aerogel blanket, evacuated panel.
Further, setting of the application to lowering or hoisting gear is located at and is not especially limited, it is not necessary to which Crucible body 201 is carried out
When the addition or cleaning of deposition material, it can place it on support.Certainly, the bottom of Crucible body 201 needs to set
Weighing device 210, and leave enough spaces and be easy to lowering or hoisting gear to enter.
In embodiments herein, for lowering or hoisting gear, pars contractilis 212 can be screw rod, and driving section 211 can revolve
It is enclosed on screw rod, is supported by screw flight, wherein driving section 211 does not rotate in radial direction.When screw rod rotates, lead to
The transmission effect of screw thread is crossed, driving section 211 moves up and down with respect to screw rod.It is worth noting that, when pars contractilis 212 is passed using screw rod
When dynamic mode realizes that driving section 211 moves up and down, due to the weight of itself of Crucible body 201, it is possible that Crucible body
201 with the situation under the steering of the automatic rotary of pars contractilis 212., can be by being opened up in side heat device 202 for such case
Groove (not shown), the extension 2031 of bottom heating device 203 are further provided with fixed part (not shown), and fixed part is inserted into
It in groove, can be moved up and down along groove, so as to fix bottom heating device 203 in radial direction, prevent bottom-heated from filling
203 are put to rotate in warp direction.Further, in order to prevent between weighing device 210 and driving section 211 radial direction produce phase
To sliding, the bottom surface of weighing device 210 is arranged to rough surface, to increase the frictional force with driving section 211.So, with reference to bottom
Heat-barrier material between heater and weighing device, and driving section 211 and the rubbing action of weighing device 210, so as to realize
Crucible body 201 is fixed in radial direction when pars contractilis 212 is stopped.
Certainly, together with pars contractilis 212 can also be permanently connected with driving section 211, in certain embodiments, pars contractilis
212 bottoms can be by setting dentalation, and dentalation coordinates with the gear driven from circuit arrangement, as long as controlling gear
Turn to, it is possible to which the driving section 211 for driving pars contractilis 212 and being fixed on pars contractilis 212 moves up and down, and then drives crucible master
The rise and fall of body 201, lifted along the short transverse of Crucible body 201.Certainly, power set can be motor or liquid
Press pump, and because lowering or hoisting gear moves up and down for support crucible main body at work, therefore, what is be connected with pars contractilis 212 is dynamic
Power apparatus needs to be fixed on ground or supporter.
In order to further fix weighing device 210, the upper surface of driving section 211 can be provided with the structure for positioning,
The width of driving section 211 is such as set into the width slightly larger than weighing device 210, and edge is also slightly above other surfaces, so may be used
So that weighing device 210 to be entirely limited, whole evaporation coating device is further strengthened.
Below, with reference to Fig. 5, a kind of course of work of the evaporation coating device proposed to the application illustrates.
A kind of evaporation coating device in the embodiment of the present application, when evaporation coating device needs maintenance, in operation circle of evaporation coating device
The Shutter (gate) of each evaporation source in cavity is opened on face so that open insulation cover 305 and crucible cover 304 successively.Value
It is noted that because the effect of seal 306 is, it is necessary to be atmospheric condition inside the evaporation coating device, each lid could be opened
Son.Control power set so that whole evaporation coating device rises；Pars contractilis 312 in evaporation coating device is under the drive of servomotor
Fixed rotation, driving section 311 is driven by screw thread, the relative telescopic portion 312 of driving section 311 moves upwards, will be located at driving section 311
Weighing device 310, bottom heating device 303 and Crucible body 301 rise to setting position.Driving section 311 stalls and four
After all heaters 302 are contactless, start to weigh, weighing device 310 in real time includes weight information in operation interface.Weigh
After the completion of, being stretched into cavity with Long rod clamp and pressed from both sides out needs added material and needs the crucible changed.Long rod clamp is used after charged
Crucible body 301 is put into evaporation coating device, then, the pars contractilis 312 in evaporation coating device is anti-under the drive of servomotor
To rotation, drive whole Crucible body to decline by driving section 311 and complete maintenance and charging.Whole servicing operations people need not enter
Enter cavity, it is not required that contact evaporation coating device, reduce potential safety hazard, avoid material contamination.
Further, control system is also included in embodiments herein, for controlling the operation of evaporation coating device.Such as Fig. 6 institutes
Show, control system includes control device 401, and control device 401 is central processor CPU, can pass through the shape of microcomputer development
Formula realizes the control to evaporation coating device.Further, the weight data of Crucible body is passed through data transmission device by weighing device 403
405 are real-time transmitted to control device 401, and control device 401 receives weight data and is shown in display device 404.Certainly, claim
It can be electronic scale, the realization of day equality device that refitting, which puts 403,.
Wherein, display device 404 can be lcd screen or capacitance plate, touch screens；Further, data transmission device can be with
For wire transmission, such as netting twine, data wire, or be wirelessly transferred, such as WIFI transmitters, bluetooth transmitters；Showing
In device 404, touch-screen can also be added, operational motion can be recorded, and is returned in control device 401；Control device 401
Further control data can be transferred in power control unit 402 by data transmission device 405, realized to power set
Such as rotating speed, the control turned to；And power control unit 402 also can be filled the working condition of power set by data transfer
Put 405 and be transferred to control device 401, and shown in display device 404.
Certainly, the control system in the present embodiment can be incorporated into the control system of whole evaporation coating device, display device
404 can also be directly displayed in operation interface.
In summary, embodiments herein provides a kind of evaporation coating device, including Crucible body, surrounding heater and bottom
Portion's heater；By the way that Crucible body bottom is arranged into multilevel hierarchy, and bottom-heated is set to fill below Crucible body
Put, lift the quality of product, avoid crucible bottom material from being repeated several times and heat and in poor quality；By setting lowering or hoisting gear, improve
The efficiency of maintenance, greatly shortens service time, reduces unnecessary working procedure；Meanwhile the quality of maintenance is improved, avoid personnel from grasping
Make contaminated materials and put askew crucible influence evaporation thickness.
Described above, the only embodiment of the application, but the protection domain of the application is not limited thereto is any
Those familiar with the art can readily occur in change or replacement in the technical scope that the application discloses, and should all contain
Cover within the protection domain of the application.Therefore, the protection domain of the application should be based on the protection scope of the described claims.
Claims (10)
1. a kind of evaporation coating device, including Crucible body, it is characterised in that also include the side for being arranged on the Crucible body surrounding
Heater and the bottom heating device being arranged on below the Crucible body；The bottom heating device can be along the side
The short transverse of face heater moves up and down, and supports the Crucible body to rise above the position of the side heat device
Put.
2. evaporation coating device according to claim 1, it is characterised in that the side heat bottom of device is provided with and extended internally
Bottom wall, the bottom heating device support is on the bottom wall.
3. evaporation coating device according to claim 2, it is characterised in that the bottom heating device edge is provided with extension,
The lower surface of the extension is in contact with the upper surface of the bottom wall, to realize bottom heating device and side heat device
It is seamless applying.
4. evaporation coating device according to claim 3, it is characterised in that the lower surface of the extension is upper with the bottom
Surface is provided with the step structure being mutually matched.
5. evaporation coating device according to claim 4, it is characterised in that the evaporation coating device also includes a lowering or hoisting gear, institute
The lower section that lowering or hoisting gear is arranged at the Crucible body and the bottom heating device is stated, for driving the Crucible body along institute
The short transverse for stating Crucible body moves up and down.
6. evaporation coating device according to claim 5, it is characterised in that the lowering or hoisting gear includes pars contractilis and driving section,
The pars contractilis is connected with power set, for providing the power of movement for driving section；The driving section is used to support the earthenware
Crucible main body moves up and down in heater.
7. evaporation coating device according to claim 6, it is characterised in that the evaporation coating device also includes a weighing device, institute
Weighing device is stated between the driving section and the bottom heating device；The weighing device is connected with a display screen,
For weight information to be transmitted and including in the display screen in real time.
8. evaporation coating device according to claim 7, it is characterised in that the bottom heating device is set in multistage convex,
The shape of the Crucible body bottom is agreed with the bottom heating device.
9. evaporation coating device according to claim 8, it is characterised in that the weighing device and the bottom heating device
Shape is engaged；Heat-barrier material is additionally provided between the weighing device and the heater.
10. evaporation coating device according to claim 9, it is characterised in that the evaporation coating device also includes a control system, institute
Stating control system includes control device, data transmission device, display device and power control unit；The control device passes through number
It is connected according to transmitting device with the weighing device, the control device receives the weighing device record weight data, and will weight
Amount data are shown on said display means；The control device is connected by data transmission device with power control unit, institute
State power control unit with the power set to be connected, control velocity of rotation and the direction of the power set.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711210074.8A CN107805782B (en) | 2017-11-27 | 2017-11-27 | A kind of evaporation coating device |
| PCT/CN2018/072070 WO2019100558A1 (en) | 2017-11-27 | 2018-01-10 | Vapor deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711210074.8A CN107805782B (en) | 2017-11-27 | 2017-11-27 | A kind of evaporation coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107805782A true CN107805782A (en) | 2018-03-16 |
| CN107805782B CN107805782B (en) | 2019-09-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711210074.8A Active CN107805782B (en) | 2017-11-27 | 2017-11-27 | A kind of evaporation coating device |
Country Status (2)
| Country | Link |
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| CN (1) | CN107805782B (en) |
| WO (1) | WO2019100558A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468594A (en) * | 2018-12-17 | 2019-03-15 | 武汉华星光电半导体显示技术有限公司 | For making the evaporation coating device of Organic Light Emitting Diode |
| CN113388815A (en) * | 2021-07-27 | 2021-09-14 | 福建华佳彩有限公司 | Surface evaporation source structure suitable for crucible |
| CN113646463A (en) * | 2019-03-25 | 2021-11-12 | Lg电子株式会社 | Deposition apparatus |
| CN114182209A (en) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | OLED material evaporation crucible device and use method thereof |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01208453A (en) * | 1988-02-17 | 1989-08-22 | Matsushita Electric Ind Co Ltd | Production of metallic thin film |
| JPH04348022A (en) * | 1991-05-24 | 1992-12-03 | Mitsubishi Electric Corp | Cell for molecular beam epitaxy |
| KR20040021291A (en) * | 2002-09-03 | 2004-03-10 | 삼성 엔이씨 모바일 디스플레이 주식회사 | Forming apparatus of organic thin film and heating crucible thereof |
| EP1560467A1 (en) * | 2002-07-19 | 2005-08-03 | Lg Electronics Inc. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| CN101532172A (en) * | 2009-04-17 | 2009-09-16 | 江苏华盛天龙机械股份有限公司 | Thermal device for growing silicon single crystal |
| CN104233197A (en) * | 2014-09-30 | 2014-12-24 | 苏州普京真空技术有限公司 | Novel crucible |
| CN104762600A (en) * | 2015-04-20 | 2015-07-08 | 京东方科技集团股份有限公司 | Evaporated crucible and evaporation device |
| CN105239154A (en) * | 2015-09-10 | 2016-01-13 | 上海超硅半导体有限公司 | Czochralski method single-crystal silicon growth flow field control technology |
| CN105940140A (en) * | 2014-01-29 | 2016-09-14 | 夏普株式会社 | Deposition apparatus, deposition method, and organic electroluminescent element manufacturing method |
| CN106929802A (en) * | 2015-12-31 | 2017-07-07 | 中国建材国际工程集团有限公司 | Heater device, its operating method for heating crucible and for accommodating and heat the crucible of to be evaporated or distillation material |
| CN106929805A (en) * | 2015-12-31 | 2017-07-07 | 中国建材国际工程集团有限公司 | Accommodate and the crucible of heating material and the system including crucible and heater arrangement |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007270261A (en) * | 2006-03-31 | 2007-10-18 | Kyocera Corp | Vapor deposition device, vapor deposition method, method for manufacturing organic electroluminescence device, and vapor deposition cell |
| JP6049355B2 (en) * | 2012-08-29 | 2016-12-21 | キヤノントッキ株式会社 | Evaporation source |
| CN104213080B (en) * | 2014-08-20 | 2016-08-24 | 京东方科技集团股份有限公司 | Evaporation source and evaporated device |
| CN105441878B (en) * | 2016-01-05 | 2018-12-21 | 京东方科技集团股份有限公司 | Heating device and evaporated device for vapor deposition |
| CN106148899B (en) * | 2016-06-30 | 2018-05-18 | 京东方科技集团股份有限公司 | A kind of vapor deposition crucible and evaporation source |
-
2017
- 2017-11-27 CN CN201711210074.8A patent/CN107805782B/en active Active
-
2018
- 2018-01-10 WO PCT/CN2018/072070 patent/WO2019100558A1/en active Application Filing
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01208453A (en) * | 1988-02-17 | 1989-08-22 | Matsushita Electric Ind Co Ltd | Production of metallic thin film |
| JPH04348022A (en) * | 1991-05-24 | 1992-12-03 | Mitsubishi Electric Corp | Cell for molecular beam epitaxy |
| EP1560467A1 (en) * | 2002-07-19 | 2005-08-03 | Lg Electronics Inc. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| KR20040021291A (en) * | 2002-09-03 | 2004-03-10 | 삼성 엔이씨 모바일 디스플레이 주식회사 | Forming apparatus of organic thin film and heating crucible thereof |
| CN101532172A (en) * | 2009-04-17 | 2009-09-16 | 江苏华盛天龙机械股份有限公司 | Thermal device for growing silicon single crystal |
| CN105940140A (en) * | 2014-01-29 | 2016-09-14 | 夏普株式会社 | Deposition apparatus, deposition method, and organic electroluminescent element manufacturing method |
| CN104233197A (en) * | 2014-09-30 | 2014-12-24 | 苏州普京真空技术有限公司 | Novel crucible |
| CN104762600A (en) * | 2015-04-20 | 2015-07-08 | 京东方科技集团股份有限公司 | Evaporated crucible and evaporation device |
| CN105239154A (en) * | 2015-09-10 | 2016-01-13 | 上海超硅半导体有限公司 | Czochralski method single-crystal silicon growth flow field control technology |
| CN106929802A (en) * | 2015-12-31 | 2017-07-07 | 中国建材国际工程集团有限公司 | Heater device, its operating method for heating crucible and for accommodating and heat the crucible of to be evaporated or distillation material |
| CN106929805A (en) * | 2015-12-31 | 2017-07-07 | 中国建材国际工程集团有限公司 | Accommodate and the crucible of heating material and the system including crucible and heater arrangement |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468594A (en) * | 2018-12-17 | 2019-03-15 | 武汉华星光电半导体显示技术有限公司 | For making the evaporation coating device of Organic Light Emitting Diode |
| CN113646463A (en) * | 2019-03-25 | 2021-11-12 | Lg电子株式会社 | Deposition apparatus |
| CN113646463B (en) * | 2019-03-25 | 2024-01-26 | Lg电子株式会社 | Deposition apparatus |
| CN113388815A (en) * | 2021-07-27 | 2021-09-14 | 福建华佳彩有限公司 | Surface evaporation source structure suitable for crucible |
| CN114182209A (en) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | OLED material evaporation crucible device and use method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2019100558A1 (en) | 2019-05-31 |
| CN107805782B (en) | 2019-09-20 |
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