CN105018893B - A kind of vacuum rotating substrate bearing disk - Google Patents
A kind of vacuum rotating substrate bearing disk Download PDFInfo
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- CN105018893B CN105018893B CN201510457426.4A CN201510457426A CN105018893B CN 105018893 B CN105018893 B CN 105018893B CN 201510457426 A CN201510457426 A CN 201510457426A CN 105018893 B CN105018893 B CN 105018893B
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- disk
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Abstract
Present invention is disclosed a kind of vacuum rotating substrate bearing disk, including magnetic current phosphor bodies, media disk is connected with turn by rotary shaft below the magnetic current phosphor bodies, mask disk and baffle plate, baffle plate is relatively rotated with mask disk, a swing handle is arranged with above magnetic current phosphor bodies, positioning disk is provided between handle and the magnetic current phosphor bodies, the swing handle, which is rotated, drives magnetic fluid body rotation, substrate hole is offered in the media disk, the substrate hole is arranged with substrate tray, on the baffle plate hole is offered in substrate hole relevant position, mask plate is connected with by magnetic on the mask disk, a pointer is connected with the swing handle, the swing handle, which is rotated, drives pointer to be indicated on positioning disk.Integrated function is more on the carrier of the present invention, can place four substrates, mask plate can be changed online, can be accurately positioned by positioning disk, and precision is high when using.
Description
Technical field
The present invention relates to a kind of vacuum rotating substrate bearing disk, OLED is not only applicable to, all heat are applied also for
Evaporation film-forming device, belongs to field of mechanical technique.
Background technology
Vacuum thermal evaporation plated film is in flat-panel monitor (FPD such as organic EL (Electro Luminescence) displays
：Flat Panel Display) manufacture method in be widely used, and in the industrialization of respective films device using
Widely, its general principle is to make source by thermal evaporation using the means of heating, becomes gas phase by solid phase/liquid phase, then gas
Molecule or atom are in evaporation source and substrate（Substrate）Between transport, the molecule or atom finally evaporated is in substrate（Substrate）It is upper heavy
Product.
In organic light-emitting display device, launch the organic luminous layer of visible ray and lead to close to the organic layer of organic luminous layer
Cross and formed using various methods.Especially vacuum deposition method is frequently used due to its simple technique.In vacuum moulding machine
In method, the deposition materials of powdery or solid-state are filled into smelting furnace, and by being heated to smelting furnace in desired region
Upper formation deposition film.Existing media disk function is single, poor sealing performance, and changing needs outage cumbersome.
The content of the invention
In view of the defect that above-mentioned prior art is present, the purpose of the present invention is to propose to a kind of vacuum rotating substrate bearing disk.
The purpose of the present invention, will be achieved by the following technical programs：
Below a kind of vacuum rotating substrate bearing disk, including magnetic current phosphor bodies, the magnetic current phosphor bodies by rotary shaft according to
Secondary to be connected with media disk, mask disk and baffle plate, the baffle plate is relatively rotated with mask disk, is arranged above the magnetic current phosphor bodies
Have and positioning disk is provided between a swing handle, handle and the magnetic current phosphor bodies, the swing handle, which is rotated, drives magnetic fluid
Substrate hole is offered in body rotation, the media disk, the substrate hole is arranged with substrate tray, the baffle plate in substrate
Hole relevant position, which offers to be connected with mask plate, the swing handle by magnetic on hole, the mask disk, is connected with a finger
Pin, the swing handle, which is rotated, drives pointer to be indicated on positioning disk.
Preferably, the substrate hole is provided with the quantity that the hole number opened up on 4, the baffle plate is less than substrate hole.
Preferably, the mask plate is fixed with mask disk by alignment pin.
Preferably, lift lug is arranged with the rotary shaft, one end and the media disk of the lift lug are bolted
Connection.
Preferably, the mask disk is fixed by bolt with rotary shaft.
Preferably, it is provided with cooling water connector on the magnetic current phosphor bodies.
Preferably, two kinds of patterns are provided with every piece of mask plate.
The present invention protrudes effect：Integrated function is more on carrier, can place four substrates, mask can be changed online
Plate, can be accurately positioned by positioning disk.Rotating part uses magnet fluid sealing, and leak rate is small, with reliable sealing.Substrate with
It is in small distance between mask plate, pattern edge influence is deposited small.Using aluminium dish, the weight of substrate frame is alleviated, is deformed simultaneously
Amount is small, adds the precision of evaporation.It is close between baffle plate and mask disk, occlusion effect is preferable.It is overall to use manually operated, cost
It is low, it is economical and practical.
Just accompanying drawing in conjunction with the embodiments below, the embodiment to the present invention is described in further detail, so that of the invention
Technical scheme is more readily understood, grasped.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the present apparatus.
Fig. 2 is the cross-sectional view of the present apparatus.
Embodiment
As shown in Figure 1 to Figure 2, present invention is disclosed a kind of vacuum rotating substrate bearing disk, including magnetic current phosphor bodies 6, institute
The lower section of magnetic current phosphor bodies 6 is stated to be connected with turn for the media disk 3 for placing substrate, mask disk 2 and baffle plate 1, institute by rotary shaft 4
State mask disk 2 to fix with rotary shaft 4 by bolt, the baffle plate 1 is relatively rotated with mask disk 2, the magnetic current phosphor bodies 6 it is upper
Square set, which is provided with a swing handle 7, the swing handle 7, is connected with a pointer 71, and connected mode can be used and welded or other
Fixed form.
It is provided between the swing handle 7 and magnetic current phosphor bodies 6 on positioning disk 8, the positioning disk 8 and is labeled with angle point
Cloth.Specifically, the positioning disk 8 is socketed on the upper end of magnetic current phosphor bodies 6, the swing handle 7 is rotated, and drives magnetic fluid master
Body 6 is rotated, meanwhile, also by the instruction for driving pointer 71 to carry out angle on positioning disk 7.The magnetic current phosphor bodies 6 are stainless steel
Material, and employ magnetic fluid sealing, it is ensured that its sealing property.It is provided with and is held for cooling on the magnetic current phosphor bodies 6
The cooling water connector of load plate.
Substrate hole is offered in the media disk 3, in order to improve efficiency, general substrate hole 2 is provided with four, uniformly and base
On piece disk.The substrate hole is arranged with the substrate tray 31 for preventing substrate from dropping, the baffle plate in substrate hole relevant position
It is 1 to offer the hole that is opened up on hole, the baffle plate 1, when open a hole is offered on baffle plate 1 when, then the same time can complete
The evaporation of one substrate, certainly, the hole on baffle plate can also offer it is multiple, but quantity need be less than media disk on substrate hole count
Amount.
Four pieces of mask plates are connected with by magnetic on the mask disk 2, in order to strengthen connection with it is fixed, the mask plate with
Mask disk 2 is strengthened fixing by alignment pin, and two kinds of patterns are provided with every piece of mask plate.Mask plate is changed for convenience,
Lift lug 5 is also arranged with the rotary shaft 4, one end and the media disk 3 of the lift lug 5 are bolted to connection.Need
During replacing, it is only necessary to exerted a force upwards at lift lug 5, you can separate media disk with mask disk, the replacing to mask plate is carried out,
Evaporation pattern is changed with this, media disk is separated quickly with abrasive disk, the replacing construction of mask plate is quick, less than 15S.
The present invention still has numerous embodiments, all technical sides formed by all use equivalents or equivalent transformation
Case, is within the scope of the present invention.
Claims (6)
1. a kind of vacuum rotating substrate bearing disk, it is characterised in that：Including magnetic current phosphor bodies, pass through below the magnetic current phosphor bodies
Rotary shaft is connected with media disk, mask disk and baffle plate in turn, and the baffle plate is relatively rotated with mask disk, the magnetic current phosphor bodies
Top, which is arranged between a swing handle, handle and the magnetic current phosphor bodies, is provided with positioning disk, the swing handle rotational band
Substrate hole is offered in dynamic magnetic fluid body rotation, the media disk, the substrate hole is arranged with substrate tray, the baffle plate
On offer to be connected with mask plate, the swing handle by magnetic on hole, the mask disk in substrate hole relevant position and connect
A pointer is connected to, the swing handle, which is rotated, drives pointer to be indicated on positioning disk, is provided with the magnetic current phosphor bodies
Cooling water connector.
2. a kind of vacuum rotating substrate bearing disk according to claim 1, it is characterised in that：The substrate hole is provided with 4
Individual, the hole number opened up on the baffle plate is less than the quantity in substrate hole.
3. a kind of vacuum rotating substrate bearing disk according to claim 1, it is characterised in that：The mask plate and mask disk
Fixed by alignment pin.
4. a kind of vacuum rotating substrate bearing disk according to claim 1, it is characterised in that：It is arranged with the rotary shaft
Lift lug, one end and the media disk of the lift lug are bolted to connection.
5. a kind of vacuum rotating substrate bearing disk according to claim 1, it is characterised in that：The mask disk passes through bolt
Fixed with rotary shaft.
6. a kind of vacuum rotating substrate bearing disk according to claim 1, it is characterised in that：Set on every piece of mask plate
It is equipped with two kinds of patterns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510457426.4A CN105018893B (en) | 2015-07-30 | 2015-07-30 | A kind of vacuum rotating substrate bearing disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510457426.4A CN105018893B (en) | 2015-07-30 | 2015-07-30 | A kind of vacuum rotating substrate bearing disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105018893A CN105018893A (en) | 2015-11-04 |
| CN105018893B true CN105018893B (en) | 2017-07-28 |
Family
ID=54409185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510457426.4A Active CN105018893B (en) | 2015-07-30 | 2015-07-30 | A kind of vacuum rotating substrate bearing disk |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105018893B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280898A (en) * | 2017-07-23 | 2019-01-29 | 杰莱特（苏州）精密仪器有限公司 | A kind of vacuum workpiece high speed rotating unit |
| CN111020518B (en) * | 2019-12-30 | 2024-10-11 | 江苏集萃有机光电技术研究所有限公司 | Substrate evaporation carrying disc and vacuum evaporation instrument |
| CN111850501B (en) * | 2020-07-20 | 2022-09-27 | 江苏集萃有机光电技术研究所有限公司 | Substrate frame structure and vacuum evaporation device |
| CN115142011B (en) * | 2022-06-21 | 2024-05-10 | 合肥维信诺科技有限公司 | Auxiliary mask, mask assembly and application method of mask assembly |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2183373Y (en) * | 1994-03-25 | 1994-11-23 | 中国科学院物理研究所 | Multi-substrate and multi-functional slide mechanism for sputtering equipment |
| CN1861833A (en) * | 2005-04-20 | 2006-11-15 | 应用菲林股份有限两合公司 | Magnetic mask holder |
| CN2915882Y (en) * | 2006-05-30 | 2007-06-27 | 南昌大学 | Rotary mask device for vacuum coating |
| CN103045994A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Self-lockable substrate baffle component |
| CN204898058U (en) * | 2015-07-30 | 2015-12-23 | 苏州方昇光电装备技术有限公司 | Rotatory substrate in vacuum bears dish |
-
2015
- 2015-07-30 CN CN201510457426.4A patent/CN105018893B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2183373Y (en) * | 1994-03-25 | 1994-11-23 | 中国科学院物理研究所 | Multi-substrate and multi-functional slide mechanism for sputtering equipment |
| CN1861833A (en) * | 2005-04-20 | 2006-11-15 | 应用菲林股份有限两合公司 | Magnetic mask holder |
| CN2915882Y (en) * | 2006-05-30 | 2007-06-27 | 南昌大学 | Rotary mask device for vacuum coating |
| CN103045994A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Self-lockable substrate baffle component |
| CN204898058U (en) * | 2015-07-30 | 2015-12-23 | 苏州方昇光电装备技术有限公司 | Rotatory substrate in vacuum bears dish |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105018893A (en) | 2015-11-04 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| TA01 | Transfer of patent application right |
Effective date of registration: 20170622 Address after: Wujiang District of Suzhou City, Jiangsu province 215222 Lili town FENHU Road No. 1198 Applicant after: Jiangsu getrain organic photoelectric technology Limited Address before: Xinghu Street Industrial Park in Suzhou city of Jiangsu Province, No. 218 A4-102 215000 Applicant before: Suzhou Fangsheng Optoelectronics Equipment & Technology Co., Ltd. |
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| GR01 | Patent grant |