CN103045994A - Self-lockable substrate baffle component - Google Patents
Self-lockable substrate baffle component Download PDFInfo
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- CN103045994A CN103045994A CN2012105907980A CN201210590798A CN103045994A CN 103045994 A CN103045994 A CN 103045994A CN 2012105907980 A CN2012105907980 A CN 2012105907980A CN 201210590798 A CN201210590798 A CN 201210590798A CN 103045994 A CN103045994 A CN 103045994A
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- drive shaft
- shaft
- main drive
- baffle plate
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Abstract
The invention belongs to the technical field of coating, in particular relates to a self-lockable substrate baffle component. The component comprises a large baseplate baffle, an intermediate shaft, a drive shaft and a driving mechanism, wherein the large baseplate baffle and the intermediate shaft are arranged in a vacuum cavity; the macro-baseplate baffle is arranged at the upper end of the intermediate shaft, and an inclined plane I is arranged at the end part of the lower end of the intermediate shaft; one end of the drive shaft is connected with the driving mechanism, and an inclined plane II corresponding to the inclined plane I arranged at the end part of the lower end of the intermediate shaft is arranged at the other end of the drive shaft and is inserted into the vacuum cavity; the drive shaft is rotationally connected with a vacuum chamber large flange arranged at the lower end of the vacuum cavity and a sleeve is sleeved at the other end of the drive shaft; the inclined plane I arranged at the end part of the lower end of the intermediate shaft is inserted into the sleeve, and is matched with the inclined plane II of the other end of the drive shaft; the drive shaft is driven by the driving mechanism to rotate to drive the intermediate shaft to rotate through friction delivery; and the intermediate shaft and the drive shaft realize self-locking through a friction angle. According to the invention, the intermediate shaft and the drive shaft at the lower part of the substrate baffle component are rotated through friction delivery, so that effective self-locking is realized.
Description
Technical field
The invention belongs to the coating technique field, but the substrate baffle plate assembly of specifically a kind of self-locking.
Background technology
At present, prepare at home in the plated film field, often need to do multilayer film with many substrate sample platform of an equipment, and can do alloy film with the monocrepid sample table of this equipment, need one to be enclosed within and to cook the substrate baffle plate assembly that multilayer film can effectively block the substrate of not working in Machine Design, not contaminated with the substrate that guarantees not work, but when doing alloy film, this substrate baffle plate assembly need to disassemble, and avoids blocking the aura that spatters altogether target.At present, the tunnel shaft of substrate baffle plate assembly and following main drive shaft are that the structure by the gap bearing pin realizes above-mentioned functions, as shown in Figure 1.But must there be certain gap in gap and bearing pin, and substrate baffle plate assembly inertia ratio is larger, and above-mentioned gap can be caused, and initial fix can sideslip behind the long time running.
Summary of the invention
For the problems referred to above, but the object of the present invention is to provide a kind of substrate baffle plate assembly of self-locking.This substrate baffle plate assembly is realized effective self-locking, has solved the deviation phenomenon that original gap and bearing pin produce because of the gap.
To achieve these goals, the present invention is by the following technical solutions:
But a kind of substrate baffle plate assembly of self-locking, it is characterized in that: comprise the large substrates baffle plate, tunnel shaft, main drive shaft and driving mechanism, wherein large substrates baffle plate and tunnel shaft are arranged in the vacuum cavity, described large substrates baffle plate is arranged at the upper end of tunnel shaft, the end, lower end of tunnel shaft is inclined-plane I, one end of described main drive shaft is connected with driving mechanism, the other end is the inclined-plane II corresponding with the inclined-plane I of end, tunnel shaft lower end, and in the insertion vacuum cavity, the large flange of the vacuum chamber of described main drive shaft and vacuum cavity lower end is rotationally connected, be arranged with sleeve on the other end of main drive shaft, the inclined-plane I of the end, lower end of described tunnel shaft inserts in the described sleeve, and match with the inclined-plane II of the main drive shaft the other end; Described main drive shaft rotates, also rotates by friction transmission drive tunnel shaft by the driving mechanism driving, and tunnel shaft and main drive shaft are realized self-locking by sliding angle.
Described driving mechanism comprises motor and speed reduction unit, and wherein speed reduction unit one end is connected with motor, and the other end is connected with described main drive shaft.Be provided with dynamic sealing assembly between described speed reduction unit and the main drive shaft.Described dynamic sealing assembly adopts J RunddichtringO rotating shaft or magnetic fluid.
Described tunnel shaft rotates and is installed on the support that is provided with in the vacuum cavity.
Advantage of the present invention and beneficial effect are: the present invention transmits rotation to the tunnel shaft of substrate baffle plate assembly and following main drive shaft by friction, can realize effective self-locking, has solved the deviation phenomenon that original gap and bearing pin produce because of the gap.
Description of drawings
Fig. 1 is the structural representation of existing substrate baffle plate assembly gap bearing pin;
Fig. 2 is structural representation of the present invention.
Wherein: 1 is large substrate baffle plate, and 2 is tunnel shaft, and 3 is the large flange of vacuum chamber, and 4 is main drive shaft, and 5 is dynamic sealing assembly, and 6 is speed reduction unit, and 7 is motor, and 8 is vacuum cavity.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 2, the present invention includes large substrates baffle plate 1, tunnel shaft 2, main drive shaft 4 and driving mechanism, wherein large substrates baffle plate 1 and tunnel shaft 2 are arranged in the vacuum cavity 8, tunnel shaft 2 rotates and is installed on the support that is provided with in the vacuum cavity 8, large substrates baffle plate 1 is arranged at the upper end of tunnel shaft 2, and the end, lower end of tunnel shaft 2 is inclined-plane I.One end of main drive shaft 4 is connected with driving mechanism, the other end is the inclined-plane II corresponding with the inclined-plane I of end, tunnel shaft 2 lower end and inserts in the vacuum cavity 8, main drive shaft 4 is rotationally connected with the large flange 3 of vacuum chamber of vacuum cavity 8 lower ends, be arranged with sleeve on the other end of main drive shaft 4, the inclined-plane I of the end, lower end of tunnel shaft 2 inserts in the described sleeve and with the inclined-plane II of main drive shaft 4 the other ends and matches.
Described driving mechanism comprises motor 7, dynamic sealing assembly 5 and speed reduction unit 6, and wherein speed reduction unit 6 one ends are connected with the output terminal of motor 7, and the other end is connected with dynamic sealing assembly 5, and dynamic sealing assembly 5 is connected with main drive shaft 4.Dynamic sealing assembly 5 adopts J RunddichtringO rotating shaft or magnetic fluid.
Claims (5)
1. but the substrate baffle plate assembly of a self-locking, it is characterized in that: comprise large substrates baffle plate (1), tunnel shaft (2), main drive shaft (4) and driving mechanism, wherein large substrates baffle plate (1) and tunnel shaft (2) are arranged in the vacuum cavity (8), described large substrates baffle plate (1) is arranged at the upper end of tunnel shaft (2), the end, lower end of tunnel shaft (2) is inclined-plane I, one end of described main drive shaft (4) is connected with driving mechanism, the other end is the inclined-plane II corresponding with the inclined-plane I of tunnel shaft (2) end, lower end, and insert in the vacuum cavity (8), described main drive shaft (4) is rotationally connected with the large flange of vacuum chamber (3) of vacuum cavity (8) lower end, be arranged with sleeve on the other end of main drive shaft (4), the inclined-plane I of the end, lower end of described tunnel shaft (2) inserts in the described sleeve, and match with the inclined-plane II of main drive shaft (4) the other end; Described main drive shaft (4) rotates, also rotates by friction transmission drive tunnel shaft (2) by the driving mechanism driving, and tunnel shaft (2) and main drive shaft (4) are realized self-locking by sliding angle.
2. but press the substrate baffle plate assembly of self-locking claimed in claim 1, it is characterized in that: described driving mechanism comprises motor (7) and speed reduction unit (6), wherein speed reduction unit (6) one ends are connected with motor (7), and the other end is connected with described main drive shaft (4).
3. but by the substrate baffle plate assembly of self-locking claimed in claim 2, it is characterized in that: be provided with dynamic sealing assembly (5) between described speed reduction unit (6) and the main drive shaft (4).
4. but by the substrate baffle plate assembly of self-locking claimed in claim 3, it is characterized in that: described dynamic sealing assembly (5) adopts J RunddichtringO rotating shaft or magnetic fluid.
5. but by the substrate baffle plate assembly of self-locking claimed in claim 1, it is characterized in that: described tunnel shaft (2) rotates and is installed on the support that is provided with in the vacuum cavity (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210590798.0A CN103045994B (en) | 2012-12-29 | 2012-12-29 | Self-lockable substrate baffle component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210590798.0A CN103045994B (en) | 2012-12-29 | 2012-12-29 | Self-lockable substrate baffle component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103045994A true CN103045994A (en) | 2013-04-17 |
| CN103045994B CN103045994B (en) | 2014-08-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210590798.0A Active CN103045994B (en) | 2012-12-29 | 2012-12-29 | Self-lockable substrate baffle component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103045994B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105018893A (en) * | 2015-07-30 | 2015-11-04 | 苏州方昇光电装备技术有限公司 | Vacuum rotary substrate bearing disc |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2596116Y (en) * | 2002-09-29 | 2003-12-31 | 卢午明 | Sealing device for rotary shaft |
| JP2005290499A (en) * | 2004-04-01 | 2005-10-20 | Sony Corp | Vacuum system |
| US20060169939A1 (en) * | 2005-02-02 | 2006-08-03 | Hideki Kihara | Vacuum processing apparatus |
| CN101665913A (en) * | 2009-09-30 | 2010-03-10 | 东莞宏威数码机械有限公司 | Processing device used for vacuum coating |
| CN201513133U (en) * | 2009-09-29 | 2010-06-23 | 山东墨龙石油机械股份有限公司 | Back-off prevention self-locking sucker rod |
| CN101876055A (en) * | 2010-03-23 | 2010-11-03 | 东莞宏威数码机械有限公司 | Baffle cooling device |
-
2012
- 2012-12-29 CN CN201210590798.0A patent/CN103045994B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2596116Y (en) * | 2002-09-29 | 2003-12-31 | 卢午明 | Sealing device for rotary shaft |
| JP2005290499A (en) * | 2004-04-01 | 2005-10-20 | Sony Corp | Vacuum system |
| US20060169939A1 (en) * | 2005-02-02 | 2006-08-03 | Hideki Kihara | Vacuum processing apparatus |
| CN201513133U (en) * | 2009-09-29 | 2010-06-23 | 山东墨龙石油机械股份有限公司 | Back-off prevention self-locking sucker rod |
| CN101665913A (en) * | 2009-09-30 | 2010-03-10 | 东莞宏威数码机械有限公司 | Processing device used for vacuum coating |
| CN101876055A (en) * | 2010-03-23 | 2010-11-03 | 东莞宏威数码机械有限公司 | Baffle cooling device |
Non-Patent Citations (1)
| Title |
|---|
| 李树伟: "《钳工全技师培训教程》", 31 July 2011, 北京：化学工业出版社 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105018893A (en) * | 2015-07-30 | 2015-11-04 | 苏州方昇光电装备技术有限公司 | Vacuum rotary substrate bearing disc |
| CN105018893B (en) * | 2015-07-30 | 2017-07-28 | 江苏集萃有机光电技术研究所有限公司 | A kind of vacuum rotating substrate bearing disk |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103045994B (en) | 2014-08-06 |
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