CN105018893A - Vacuum rotary substrate bearing disc - Google Patents
Vacuum rotary substrate bearing disc Download PDFInfo
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- CN105018893A CN105018893A CN201510457426.4A CN201510457426A CN105018893A CN 105018893 A CN105018893 A CN 105018893A CN 201510457426 A CN201510457426 A CN 201510457426A CN 105018893 A CN105018893 A CN 105018893A
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- mask
- substrate
- disc
- magnetic fluid
- dish
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Abstract
The invention discloses a vacuum rotary substrate bearing disc. The vacuum rotary substrate bearing disc comprises a magnetofluid body. A substrate disc, a mask disc and a baffle are sequentially connected to the lower portion of the magnetofluid body through a rotary shaft. The baffle and the mask disc rotate relative to each other. The upper portion of the magnetofluid body is sleeved with a rotary handle. A positioning disc is arranged between the handle and the magnetofluid body. The rotary handle rotates to drive the magnetofluid body to rotate. Substrate holes are formed in the substrate disc. Substrate trays are arranged under the substrate holes. Holes are formed in the portions, corresponding to the substrate holes, of the baffle. A mask plate is connected to the mask disc through magnetism. A pointer is connected to the rotary handle. The rotary handle rotates to drive the pointer to point to values on the positioning disc. The bearing disc integrates multiple functions; four substrates can be placed on the bearing disc; the mask plate can be replaced on line; accurate positioning can be achieved through the positioning disc; besides, using accuracy is high.
Description
Technical field
The present invention relates to a kind of vacuum rotating substrate bearing dish, be not only applicable to OLED, be also applicable to all thermal evaporation film-forming devices, belong to field of mechanical technique.
Background technology
Vacuum thermal evaporation plated film is widely used in the manufacture method of the flat-panel monitors (FPD: Flat Panel Display) such as organic EL (Electro Luminescence) indicating meter, and apply also widely in the industrialization of respective films device, its ultimate principle utilizes the means of heating to make source be subject to thermal evaporation, gas phase is become by solid phase/liquid phase, then gas molecule or atom transport between evaporation source and substrate (substrate), and the molecule of final evaporation or atom are in the upper deposition of substrate (substrate).
In organic light-emitting display device, launch the organic luminous layer of visible ray and formed by utilizing various method close to the organic layer of organic luminous layer.Especially vacuum deposition method is often used due to its simple technique.In vacuum deposition method, powdery or solid-state deposition material are filled in smelting furnace, and on the region expected, form deposited film by heating to smelting furnace.Existing media disk function singleness, poor sealing performance, and replacing needs outage loaded down with trivial details.
Summary of the invention
In view of the defect that above-mentioned prior art exists, the object of the invention is to propose a kind of vacuum rotating substrate bearing dish.
Object of the present invention, will be achieved by the following technical programs:
A kind of vacuum rotating substrate bearing dish, comprise magnetic fluid main body, media disk is connected with in turn by rotation axis below described magnetic fluid main body, mask dish and baffle plate, described baffle plate and mask dish relatively rotate, the top of described magnetic fluid main body is arranged with a swing handle, dowel disc is provided with between described handle and magnetic fluid main body, described swing handle rotates and drives magnetic fluid body rotation, described media disk offers substrate hole, described substrate hole is arranged with substrate tray, described baffle plate is offered porose in corresponding position, substrate hole, described mask dish is connected with mask plate by magnetic, described swing handle is connected with a pointer, described swing handle rotates and drives pointer to indicate on dowel disc.
Preferably, described substrate hole is provided with 4, and the hole number that described baffle plate is offered is less than the quantity in substrate hole.
Preferably, described mask plate and mask dish are fixed by steady brace.
Preferably, described rotation axis is arranged with lift lug, one end and the media disk of described lift lug are bolted to connection.
Preferably, described mask dish is fixed by bolt and rotation axis.
Preferably, described magnetic fluid main body is provided with cooling water connector.
Preferably, mask plate described in every block is provided with two kinds of patterns.
The present invention gives prominence to effect: function integrated on carrier is many, can place four substrates, can change mask plate online, can accurately be located by dowel disc.Rotating element adopts magnetic current sealing, and leak rate is little, has reliable stopping property.The spacing of substrate and mask plate is less, and institute's evaporation pattern edge impact is little.Adopt aluminium dish, alleviate the weight of substrate frame, deflection is little simultaneously, adds the precision of evaporation.Be close between baffle plate and mask dish, occlusion effect is better.Overall employing manual operation, cost is low, economical and practical.
Below just accompanying drawing in conjunction with the embodiments, is described in further detail the specific embodiment of the present invention, is easier to understand, grasp to make technical solution of the present invention.
Accompanying drawing explanation
Fig. 1 is the perspective view of this device.
Fig. 2 is the cross-sectional view of this device.
Embodiment
As shown in Figure 1 to Figure 2, present invention is disclosed a kind of vacuum rotating substrate bearing dish, comprise magnetic fluid main body 6, media disk 3, mask dish 2 and the baffle plate 1 for placing substrate is connected with in turn by rotation axis 4 below described magnetic fluid main body 6, described mask dish 2 is fixed by bolt and rotation axis 4, described baffle plate 1 relatively rotates with mask dish 2, the top of described magnetic fluid main body 6 is arranged with a swing handle 7, described swing handle 7 is connected with a pointer 71, mode of connection can adopt welding or other fixed forms.
Be provided with dowel disc 8 between described swing handle 7 and magnetic fluid main body 6, described dowel disc 8 is labeled with angular distribution.Concrete, described dowel disc 8 is socketed on the upper end of magnetic fluid main body 6, and described swing handle 7 rotates, and drives magnetic fluid main body 6 to rotate, meanwhile, and the instruction also will pointer 71 being driven on dowel disc 7 to carry out angle.Described magnetic fluid main body 6 is stainless steel, and have employed magnetic fluid sealing, ensure that its sealing property.Described magnetic fluid main body 6 is provided with the cooling water connector for cooling carrier.
Described media disk 3 offers substrate hole, and in order to raise the efficiency, general substrate hole 2 is provided with four, uniform with in media disk.Described substrate hole is arranged with the substrate tray 31 preventing substrate from dropping, described baffle plate is offered porose in corresponding position, substrate hole, the hole that described baffle plate 1 is offered is 1, when open baffle plate 1 offers a hole time, then the same time can complete the evaporation of a substrate, certainly, the hole on baffle plate also can offer multiple, but number needs is less than substrate hole number in media disk.
Described mask dish 2 is connected with four pieces of mask plates by magnetic, and in order to strengthen connecting with fixing, described mask plate and mask dish 2 are strengthened fixing by steady brace, mask plate described in every block is provided with two kinds of patterns.Conveniently change mask plate, described rotation axis 4 is also arranged with lift lug 5, one end and the media disk 3 of described lift lug 5 are bolted to connection.When needing to change, only need upwards to exert a force at lift lug 5 place, media disk can be separated with mask dish, carry out the replacing to mask plate, change evaporation pattern with this, media disk is separated with abrasive disk fast, and the replacing construction of mask plate is quick, is less than 15S.
The present invention still has numerous embodiments, all employing equivalents or equivalent transformation and all technical schemes formed, and all drops within protection scope of the present invention.
Claims (7)
1. a vacuum rotating substrate bearing dish, it is characterized in that: comprise magnetic fluid main body, media disk is connected with in turn by rotation axis below described magnetic fluid main body, mask dish and baffle plate, described baffle plate and mask dish relatively rotate, the top of described magnetic fluid main body is arranged with a swing handle, dowel disc is provided with between described handle and magnetic fluid main body, described swing handle rotates and drives magnetic fluid body rotation, described media disk offers substrate hole, described substrate hole is arranged with substrate tray, described baffle plate is offered porose in corresponding position, substrate hole, described mask dish is connected with mask plate by magnetic, described swing handle is connected with a pointer, described swing handle rotates and drives pointer to indicate on dowel disc.
2. a kind of vacuum rotating substrate bearing dish according to claim 1, is characterized in that: described substrate hole is provided with 4, and the hole number that described baffle plate is offered is less than the quantity in substrate hole.
3. a kind of vacuum rotating substrate bearing dish according to claim 1, is characterized in that: described mask plate and mask dish are fixed by steady brace.
4. a kind of vacuum rotating substrate bearing dish according to claim 1, it is characterized in that: described rotation axis is arranged with lift lug, one end and the media disk of described lift lug are bolted to connection.
5. a kind of vacuum rotating substrate bearing dish according to claim 1, is characterized in that: described mask dish is fixed by bolt and rotation axis.
6. a kind of vacuum rotating substrate bearing dish according to claim 1, is characterized in that: described magnetic fluid main body is provided with cooling water connector.
7. a kind of vacuum rotating substrate bearing dish according to claim 1, is characterized in that: mask plate described in every block is provided with two kinds of patterns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510457426.4A CN105018893B (en) | 2015-07-30 | 2015-07-30 | A kind of vacuum rotating substrate bearing disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510457426.4A CN105018893B (en) | 2015-07-30 | 2015-07-30 | A kind of vacuum rotating substrate bearing disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105018893A true CN105018893A (en) | 2015-11-04 |
| CN105018893B CN105018893B (en) | 2017-07-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510457426.4A Active CN105018893B (en) | 2015-07-30 | 2015-07-30 | A kind of vacuum rotating substrate bearing disk |
Country Status (1)
| Country | Link |
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| CN (1) | CN105018893B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280898A (en) * | 2017-07-23 | 2019-01-29 | 杰莱特（苏州）精密仪器有限公司 | A kind of vacuum workpiece high speed rotating unit |
| CN111020518A (en) * | 2019-12-30 | 2020-04-17 | 江苏集萃有机光电技术研究所有限公司 | Substrate evaporation bearing disc and vacuum evaporation instrument |
| CN111850501A (en) * | 2020-07-20 | 2020-10-30 | 江苏集萃有机光电技术研究所有限公司 | Substrate frame structure and vacuum evaporation device |
| CN115142011A (en) * | 2022-06-21 | 2022-10-04 | 合肥维信诺科技有限公司 | Auxiliary mask, mask assembly and application method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2183373Y (en) * | 1994-03-25 | 1994-11-23 | 中国科学院物理研究所 | Multi-substrate and multi-functional slide mechanism for sputtering equipment |
| CN1861833A (en) * | 2005-04-20 | 2006-11-15 | 应用菲林股份有限两合公司 | Magnetic mask holder |
| CN2915882Y (en) * | 2006-05-30 | 2007-06-27 | 南昌大学 | Rotary mask device for vacuum coating |
| CN103045994A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Self-lockable substrate baffle component |
| CN204898058U (en) * | 2015-07-30 | 2015-12-23 | 苏州方昇光电装备技术有限公司 | Rotatory substrate in vacuum bears dish |
-
2015
- 2015-07-30 CN CN201510457426.4A patent/CN105018893B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2183373Y (en) * | 1994-03-25 | 1994-11-23 | 中国科学院物理研究所 | Multi-substrate and multi-functional slide mechanism for sputtering equipment |
| CN1861833A (en) * | 2005-04-20 | 2006-11-15 | 应用菲林股份有限两合公司 | Magnetic mask holder |
| CN2915882Y (en) * | 2006-05-30 | 2007-06-27 | 南昌大学 | Rotary mask device for vacuum coating |
| CN103045994A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Self-lockable substrate baffle component |
| CN204898058U (en) * | 2015-07-30 | 2015-12-23 | 苏州方昇光电装备技术有限公司 | Rotatory substrate in vacuum bears dish |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109280898A (en) * | 2017-07-23 | 2019-01-29 | 杰莱特（苏州）精密仪器有限公司 | A kind of vacuum workpiece high speed rotating unit |
| CN111020518A (en) * | 2019-12-30 | 2020-04-17 | 江苏集萃有机光电技术研究所有限公司 | Substrate evaporation bearing disc and vacuum evaporation instrument |
| CN111850501A (en) * | 2020-07-20 | 2020-10-30 | 江苏集萃有机光电技术研究所有限公司 | Substrate frame structure and vacuum evaporation device |
| CN115142011A (en) * | 2022-06-21 | 2022-10-04 | 合肥维信诺科技有限公司 | Auxiliary mask, mask assembly and application method thereof |
| CN115142011B (en) * | 2022-06-21 | 2024-05-10 | 合肥维信诺科技有限公司 | Auxiliary mask, mask assembly and application method of mask assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105018893B (en) | 2017-07-28 |
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Effective date of registration: 20170622 Address after: Wujiang District of Suzhou City, Jiangsu province 215222 Lili town FENHU Road No. 1198 Applicant after: Jiangsu getrain organic photoelectric technology Limited Address before: Xinghu Street Industrial Park in Suzhou city of Jiangsu Province, No. 218 A4-102 215000 Applicant before: Suzhou Fangsheng Optoelectronics Equipment & Technology Co., Ltd. |
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