CN205529004U - Rotation type organic material evaporation plant - Google Patents
Rotation type organic material evaporation plant Download PDFInfo
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- CN205529004U CN205529004U CN201620247175.7U CN201620247175U CN205529004U CN 205529004 U CN205529004 U CN 205529004U CN 201620247175 U CN201620247175 U CN 201620247175U CN 205529004 U CN205529004 U CN 205529004U
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- crucible
- bottom plate
- organic material
- electrode
- vaporising device
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Abstract
The utility model discloses a rotation type organic material evaporation plant, including rotation type evaporation unit and drive unit, rotation type evaporation unit includes central rotatable supporting rod, the crucible bottom plate, integrated electrode support, insulation board and electrically conductive slide, wherein the annular is provided with plural crucible on the crucible bottom plate, integrated electrode support includes the drum cover and the electrode carrier ring body, center rotatable supporting rod's bottom and insulation board looks rigid coupling, electrically conductive slide is passed in proper order on the top, the drum cover, the crucible bottom plate, drive unit includes motor and drive wheel, the trunk circling of drive wheel driving electrode carrier ring drives the rotation of crucible bottom plate around the Center rotatable supporting rod. The utility model discloses a rotatory mode realizes the operation in coordination of many organic sources, and compact structure has increased experiment parameter adjustability, many organic source sharing quartzy crystal oscillator probes have reduced the use quantity that quartzy crystal oscillator was popped one's head in, compact structure, easily installation, change, maintenance, control accuracy is high, production efficiency is high, the energy consumption is low, with low costs.
Description
Technical field
This utility model relates to a kind of vaporising device, particularly relates to a kind of rotary organic material vaporising device.
Background technology
Vacuum thermal evaporation plated film is in organic EL (Electro Luminescence) electroluminescent, organic solar batteries, metal electrode, the industries such as packaging for foodstuff are widely used, and the industrialization of respective films device is applied the most widely, its ultimate principle is that the means utilizing heating make source by thermal evaporation, gas phase is become by solid phase/liquid phase, then gas molecule or atom transport between evaporation source and substrate (substrate), and the molecule of final evaporation or atom are in the upper deposition of substrate (substrate).
In organic light-emitting display device, launch the organic luminous layer of visible ray and close to the organic layer of organic luminous layer by utilizing various technological forming.Especially vacuum deposition method, is frequently used due to its simple technique.In vacuum deposition method, the deposition material of powdery or solid-state is filled in crucible, and on desired region, forms deposition film by crucible is heated.
Traditional organic material vaporising device structure is complicated, and organic material evaporating source mostly is single head structure, each evaporation source only one of which crucible, and can not rotate, evaporate if to realize multiple crucible simultaneously, needs to install the evaporation source of multiple single head structure, and cost is the highest.The material being evaporated in the crucible of organic material evaporating source passes through its thickness of quartz crystal oscillator probe measurement, and probe is typically mounted on the oblique upper of crucible.For traditional organic material evaporating source, realize measuring accurately, the crucible of each evaporation source is required for installing a quartz crystal oscillator probe.
Utility model content
The purpose of this utility model is to solve above-mentioned the deficiencies in the prior art, it is provided that a kind of rotary organic material vaporising device.
In order to achieve the above object, the technical scheme that this utility model is used is:
A kind of rotary organic material vaporising device, it is characterised in that: include rotary evaporation element and driver element,
Described rotary evaporation element includes central rotation pole, crucible bottom plate, Integrated electrode seat, insulation board and conduction slide,
On wherein said crucible bottom plate, annular is provided with plural number crucible, and center is provided with the axis hole passed for central rotation pole, it is provided with heater strip in described crucible, described Integrated electrode seat includes cylindrical sleeve and electrode carrying ring body, the bottom that described electrode carrying ring body is arranged at described cylindrical sleeve is peripheral, and it is provided through plural number electrode on it, described conduction slide and described insulation board Joint, described conduction slide be provided with central shaft hole and run through conduction slide for being conducted the complex conduction electrode docked with plural number electrode on described electrode carrying ring body
The bottom of described central rotation pole and described insulation board Joint, central rotation pole sequentially passes through the central shaft hole of described conduction slide, the cylindrical sleeve of described Integrated electrode seat, the axis hole of crucible bottom plate, described crucible bottom plate and the top Joint of described cylindrical sleeve, heater strip in described crucible through the bottom of described crucible, crucible bottom plate and described electrode carry the electrode on ring body and be conducted and be connected, the top of described conduction slide is relative with the bottom surface of described cylindrical sleeve；
Described driver element includes motor and the driving wheel of the driven drive shaft in described motor；
Described driving wheel abuts against with the sidewall of described electrode carrying ring body, and under the driving effect of described driving wheel, described electrode carrying ring body drives crucible bottom plate to rotate around central rotation pole by cylindrical sleeve.
Preferably, described crucible bottom plate being provided with platen, the periphery of described platen is surrounded with for adjacent crucible intercepts plural number dividing plate.
Preferably, on described crucible bottom plate, annular decile is provided with 12 crucibles, and the periphery of described platen is surrounded with 12 dividing plates, and described dividing plate lays respectively between adjacent crucible.
Preferably, described dividing plate is quartz dividing plate or 304 stainless steel separators, and the thickness of described dividing plate is 1 ~ 1.5mm.
Preferably, described crucible bottom plate being provided with plural number slot, the bottom of described crucible has two pins, and the pin of described crucible is plugged in described slot.
Preferably, described crucible bottom plate is circular aluminum dish.
Preferably, described plural number crucible is uncovered towards jointly focusing on substrate to be coated.
Preferably, described insulation board is teflon insulation plate or aluminium oxide ceramics insulation board.
Preferably, described driver element also includes sealing magnetic fluid, described sealing magnetic fluid includes shell and is connected to the axostylus axostyle of described shell, described shell is by a flange and motor Joint, described driving wheel is fixed on the top of described axostylus axostyle, and the bottom of described axostylus axostyle is connected with the drive shaft of described motor by a shaft coupling.
Preferably, on described driving wheel, outer wall is at least provided with an annular groove, is provided with O in described annular groove.
The beneficial effects of the utility model are mainly reflected in:
1. by the way of rotation, realize the most organic source work compound, compact conformation, add experiment parameter adjustability；
The most organic source shares a quartz crystal oscillator probe, decreases the usage quantity of quartz crystal oscillator probe, greatly reduces cost；
3. compact conformation, it is easy to install, change, safeguard；
4. control accuracy is high, production efficiency is high, energy consumption is low, low cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of rotary organic material vaporising device of this utility model；
Fig. 2 is the cross section structure schematic diagram of a kind of rotary organic material vaporising device of this utility model.
Detailed description of the invention
This utility model provides a kind of rotary organic material vaporising device.Below in conjunction with accompanying drawing, technical solutions of the utility model are described in detail, so that it is more readily understood and grasps.
As depicted in figs. 1 and 2, a kind of rotary organic material vaporising device, including rotary evaporation element and driver element, rotary evaporation element includes central rotation pole 1, crucible bottom plate 2, Integrated electrode seat 3, insulation board 4 and conduction slide 5, wherein on crucible bottom plate 2, annular is provided with plural number crucible 6, and center is provided with the axis hole 7 passed for central rotation pole, it is provided with heater strip in crucible 6, Integrated electrode seat 3 includes cylindrical sleeve 8 and electrode carrying ring body 9, the bottom that electrode carrying ring body 9 is arranged at cylindrical sleeve 8 is peripheral, and it is provided through plural number electrode on it, conduction slide 5 and insulation board 4 Joint, conduction slide 5 be provided with central shaft hole, and run through conduction slide for being conducted the complex conduction electrode docked with plural number electrode on electrode carrying ring body.
The bottom of central rotation pole 1 and 4 insulation board Joints, central rotation pole 1 sequentially passes through the conduction central shaft hole of slide 5, the cylindrical sleeve 8 of Integrated electrode seat 3, the axis hole 7 of crucible bottom plate 2, crucible bottom plate 2 and the top Joint of cylindrical sleeve 8, heater strip in crucible 6 is conducted through the electrode on the bottom of crucible 6, crucible bottom plate 2 and electrode carrying ring body 9 and is connected, and it is relative with the bottom surface of cylindrical sleeve 8 to conduct electricity the top of slide 5.Wherein, insulation board is teflon insulation plate or aluminium oxide ceramics insulation board.
Driver element includes motor 10 and the driving wheel 11 of the driven drive shaft in motor 10；Driving wheel 11 abuts against with the sidewall of electrode carrying ring body 9, and under the driving effect of driving wheel 11, electrode carrying ring body 9 drives crucible bottom plate 2 to rotate around central rotation pole 1 by cylindrical sleeve, when electrode carrying ring body 9 rotates, conductive electrode on conduction slide is sequentially connected with the electrode on Integrated electrode seat successively, in order to be electrically heated different crucibles.
Being optimized rotary evaporation element, be provided with platen 12 on crucible bottom plate 2, the periphery of platen 12 is surrounded with for adjacent crucible intercepts plural number dividing plate 13.Wherein, platen 12 is connected with middle rotary supporting rod by the hole axis bar at center, platen is freely rotatable by axostylus axostyle, and it has position-limiting action to the Integrated electrode seat being connected into one with crucible bottom plate, will not rise in rotary course because of the frictional force of driving wheel.
More refining, on crucible bottom plate 2, annular decile is provided with 12 crucibles, and the periphery of platen is surrounded with 12 dividing plates, and dividing plate lays respectively between adjacent crucible.Dividing plate 13 is quartz dividing plate or 304 stainless steel separators, and the thickness of dividing plate 13 is 1 ~ 1.5mm.Being provided with plural number slot on crucible bottom plate 2, the bottom of crucible 6 has two pins, and the pin of crucible 6 is plugged in slot.It addition, crucible bottom plate 2 preferably circular aluminum dish.Above-mentioned plural crucible 6 uncovered towards jointly focusing on substrate to be coated.And the plural crucible of crucible bottom plate shares a quartz crystal oscillator probe, eliminating this labelling in figure, the quantity being realized quartz crystal oscillator probe by focusing is reduced, and greatly reduces cost.
Driver element carries out refinement describe, it also includes sealing magnetic fluid 14, seals magnetic fluid 14 and includes shell and be connected to the axostylus axostyle of shell, and shell is by a flange and motor Joint, driving wheel 11 is fixed on the top of axostylus axostyle, and the bottom of axostylus axostyle is connected with the drive shaft of motor by a shaft coupling.On driving wheel 11, outer wall is at least provided with an annular groove 15, is provided with O 16 in annular groove 15.The frictional force between driving wheel and electrode carrying ring body 9 can be increased by O.
It is below concrete motor process of the present utility model and principle explanation:
First motor is rotated by shaft coupling band movable sealing magnetic fluid, and sealing magnetic fluid drives driving wheel to rotate by central shaft, and driving wheel abuts against with electrode carrying ring body, holds section ring body by frictional force band moving electrode and rotates.Platen, crucible bottom plate, electrode carrying ring body, cylindrical sleeve connection one rotate simultaneously, and Integrated electrode seat docks with the electrode coupling on conduction slide and is powered crucible therebetween.It should be noted that on Integrated electrode seat number of electrodes is crucible 2 times, having 24 electrodes in the preferred embodiment of this case on Integrated electrode seat, composition 12 is right, and conducting electricity the number of electrodes of slide is 4 groups.Conduction slide is fixed, and is connected with the electrode on conduction slide successively by 12 pairs of electrodes thereon when Integrated electrode seat rotates.Plural number crucible is operated, and is focused plated film by uncovered.
Above the technical solution of the utility model is fully described; it should be noted that; detailed description of the invention of the present utility model is also not limited by the description set out above; all technical schemes that those of ordinary skill in the art is formed in the aspect employing equivalents such as structure, method or function or equivalent transformation according to spirit of the present utility model, within all falling within protection domain of the present utility model.
Claims (10)
1. a rotary organic material vaporising device, it is characterised in that: include rotary evaporation element and driver element,
Described rotary evaporation element includes central rotation pole, crucible bottom plate, Integrated electrode seat, insulation board and conduction slide,
On wherein said crucible bottom plate, annular is provided with plural number crucible, and center is provided with the axis hole passed for central rotation pole, it is provided with heater strip in described crucible, described Integrated electrode seat includes cylindrical sleeve and electrode carrying ring body, the bottom that described electrode carrying ring body is arranged at described cylindrical sleeve is peripheral, and it is provided through plural number electrode on it, described conduction slide and described insulation board Joint, described conduction slide be provided with central shaft hole and run through conduction slide for being conducted the complex conduction electrode docked with plural number electrode on described electrode carrying ring body
The bottom of described central rotation pole and described insulation board Joint, central rotation pole sequentially passes through the central shaft hole of described conduction slide, the cylindrical sleeve of described Integrated electrode seat, the axis hole of crucible bottom plate, described crucible bottom plate and the top Joint of described cylindrical sleeve, heater strip in described crucible through the bottom of described crucible, crucible bottom plate and described electrode carry the electrode on ring body and be conducted and be connected, the top of described conduction slide is relative with the bottom surface of described cylindrical sleeve；
Described driver element includes motor and the driving wheel of the driven drive shaft in described motor；
Described driving wheel abuts against with the sidewall of described electrode carrying ring body, and under the driving effect of described driving wheel, described electrode carrying ring body drives crucible bottom plate to rotate around central rotation pole by cylindrical sleeve.
One the most according to claim 1 rotary organic material vaporising device, it is characterised in that: being provided with platen on described crucible bottom plate, the periphery of described platen is surrounded with for adjacent crucible intercepts plural number dividing plate.
One the most according to claim 2 rotary organic material vaporising device, it is characterised in that: on described crucible bottom plate, annular decile is provided with 12 crucibles, and the periphery of described platen is surrounded with 12 dividing plates, and described dividing plate lays respectively between adjacent crucible.
4. according to the rotary organic material vaporising device of the one described in Claims 2 or 3, it is characterised in that: described dividing plate is quartz dividing plate or 304 stainless steel separators, and the thickness of described dividing plate is 1 ~ 1.5mm.
5. according to the one rotary organic material vaporising device described in claim 1,2 or 3 any one, it is characterized in that: on described crucible bottom plate, be provided with plural number slot, the bottom of described crucible has two pins, and the pin of described crucible is plugged in described slot.
One the most according to claim 5 rotary organic material vaporising device, it is characterised in that: described crucible bottom plate is circular aluminum dish.
One the most according to claim 1 rotary organic material vaporising device, it is characterised in that: described plural number crucible uncovered towards jointly focusing on substrate to be coated.
One the most according to claim 1 rotary organic material vaporising device, it is characterised in that: described insulation board is teflon insulation plate or aluminium oxide ceramics insulation board.
One the most according to claim 1 rotary organic material vaporising device, it is characterized in that: described driver element also includes sealing magnetic fluid, described sealing magnetic fluid includes shell and is connected to the axostylus axostyle of described shell, described shell is by a flange and motor Joint, described driving wheel is fixed on the top of described axostylus axostyle, and the bottom of described axostylus axostyle is connected with the drive shaft of described motor by a shaft coupling.
10. according to the rotary organic material vaporising device of the one described in claim 1 or 9, it is characterised in that: on described driving wheel, outer wall is at least provided with an annular groove, is provided with O in described annular groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620247175.7U CN205529004U (en) | 2016-03-29 | 2016-03-29 | Rotation type organic material evaporation plant |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620247175.7U CN205529004U (en) | 2016-03-29 | 2016-03-29 | Rotation type organic material evaporation plant |
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| Publication Number | Publication Date |
|---|---|
| CN205529004U true CN205529004U (en) | 2016-08-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620247175.7U Withdrawn - After Issue CN205529004U (en) | 2016-03-29 | 2016-03-29 | Rotation type organic material evaporation plant |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105624611A (en) * | 2016-03-29 | 2016-06-01 | 苏州方昇光电装备技术有限公司 | Rotary organic material evaporating device |
-
2016
- 2016-03-29 CN CN201620247175.7U patent/CN205529004U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105624611A (en) * | 2016-03-29 | 2016-06-01 | 苏州方昇光电装备技术有限公司 | Rotary organic material evaporating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160831 Effective date of abandoning: 20180424 |