CN107805782B - A kind of evaporation coating device - Google Patents
A kind of evaporation coating device Download PDFInfo
- Publication number
- CN107805782B CN107805782B CN201711210074.8A CN201711210074A CN107805782B CN 107805782 B CN107805782 B CN 107805782B CN 201711210074 A CN201711210074 A CN 201711210074A CN 107805782 B CN107805782 B CN 107805782B
- Authority
- CN
- China
- Prior art keywords
- crucible body
- heating device
- evaporation coating
- crucible
- bottom heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
Abstract
This application involves a kind of evaporation coating device, the evaporation coating device includes Crucible body, and the bottom heating device that the side heat device of the Crucible body surrounding is arranged in and is arranged in below the Crucible body；The bottom heating device can be moved up and down along the short transverse of the side heat device, and the Crucible body is supported to rise to the position higher than the side heat device.Heating device is arranged by bottom in the application, and Crucible body is moved up and down, and improves maintenance efficiency, shortens service time, reduce extra working procedure.
Description
Technical field
This application involves evaporation coating technique field more particularly to a kind of evaporation coating devices.
Background technique
OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) have it is all solid state, ultra-thin, ignore
Angle limitation, working and room temperature, is easily achieved the advantages that Flexible Displays and 3D display at quick response, is unanimously acknowledged as the next generation
The mainstream technology of display.The major way of OLED device production at present is heating evaporation plated film, is mainly existed using heating container
Evaporation material is heated under vacuum environment, so that the evaporation material of subliming type or fusion is gasified at high operating temperatures, has been deposited on
On the substrate of TFT (Thin Film Transistor, thin film transistor (TFT)) structure or anode construction.
As shown in Figure 1, tradition vapor deposition crucible includes Crucible body 101 and covers the upper cover in the opening of Crucible body 101
104；Crucible body 101 is placed on inside heating device 102, and bottom is equipped with support plate 103, and Crucible body 101 is for holding
Material to be deposited, upper cover 104 are equipped with perforation hole 105.Principle is deposited in it are as follows: is added by 102 pairs of vapor deposition crucibles of heating device
Heat make material to be deposited be heated to certain temperature occur evaporation or distillation, from perforation hole 105 project, thus cohesion be deposited on it is to be plated
The substrate surface of film forms film.
However, requiring to take out crucible in process flows such as maintenance facility, more conversion materials, replacement crucibles, weighing material is protected
Placed into after having supported plus material crucible, take dress crucible need operator enter narrow cavity, and to use clip or
Finger pad non-dust cloth, maintenance take out crucible weighing material and then feed.Above-mentioned cumbersome operating procedure, causes following problems:
1. taking out crucible weighing every time, what is needed just adds virgin material, and do not need to add is placing back in, and has unwanted workload, influences
Efficiency；2. evaporation source bottom is not heated, distils after each base material is such as used for multiple times all being, it is multiple to will cause base material
Circulating-heating and in poor quality are rotten.
Summary of the invention
The application is able to solve traditional evaporated device and is not easy more mainly solving the technical problems that provide a kind of evaporation coating device
Change crucible and the cumbersome problem of weighing stage.
In order to solve the above technical problems, the technical solution that the application uses is:
A kind of evaporation coating device, including Crucible body further include the side heat device that the Crucible body surrounding is arranged in
With the bottom heating device being arranged in below the Crucible body；The bottom heating device can be filled along the side heat
The short transverse set moves up and down, and the Crucible body is supported to rise to the position higher than the side heat device.
By above-mentioned technical characteristic, it is up to following technical effect: bottom heating device being set in Crucible body bottom, is risen
To uniformly heated effect；Laterally heating device short transverse movement is set by bottom heating device, to realize crucible
The technical effect that main body is moved up and down in the short transverse of side heat device is more convenient when so that Crucible body being replaced.
In better embodiment, the side heat bottom of device is equipped with the bottom wall inwardly folded, the bottom-heated
The periphery support of device is on bottom wall.
In better embodiment, the bottom heating device edge be equipped with extension, the lower surface of the extension with
The upper surface of the bottom wall is in contact, to realize the seamless connection of bottom heating device Yu side heat device.
In better embodiment, the upper surface of the lower surface of the extension and the bottom is equipped with the rank being mutually matched
Ladder configuration.
By above-mentioned technical characteristic, it is up to following technical effect: by by bottom heating device and side heat device
It is set as mutually matched step structure, realizes seamless applying, the reduction vapor deposition of bottom heating device and side heat device
Heat of device during vapor deposition is leaked out from bottom, improves Crucible body to the control ability of temperature.
In better embodiment, between the extension of the bottom heating device and the inner wall of the side heat device
With gap.
By above-mentioned technical characteristic, it is up to following technical effect: by the extension and side heat of bottom heating device
Device inner wall is equipped with gap, reduces the bottom heating device friction with side heat device in the process of moving up and down.
In better embodiment, the evaporation coating device further includes a lifting device, and the lifting device is set to described
The lower section of Crucible body and the bottom heating device, for driving the Crucible body along the short transverse of the Crucible body
It moves up and down.
In better embodiment, the lifting device includes pars contractilis and driving section, the pars contractilis and power device
It is connected, for providing mobile power for driving section；The driving section be used to support the Crucible body in heating device on
Lower movement.
By above-mentioned technical characteristic, it is up to following technical effect: by the way that lifting device is arranged, above and below support crucible main body
It is mobile, it can preferably make Crucible body steadily, efficiently move in heating device.
In better embodiment, the evaporation coating device further includes a weighing device, and the weighing device is located at the biography
Between dynamic portion and the bottom heating device；The weighing device is connected with a display screen, in real time passing weight information
Defeated and display is on the display screen.
By above-mentioned technical characteristic, it is up to following technical effect:, can be by Crucible body by the way that weighing device is arranged
Weight information is recorded and is shown in real time, facilitates the control during being deposited to weight.
In better embodiment, the bottom heating device is in multistage convex setting, the shape of the Crucible body bottom
Shape agrees with the bottom heating device.
By above-mentioned technical characteristic, it is up to following technical effect: by preferably setting convex for Crucible body bottom
Type, and the holding of the shape of bottom heating device and Crucible body agrees with, and is conducive to the installation and pick-and-place of Crucible body, can play
It the case where preventing Crucible body from tilting in placement process, is more conducive to realize Crucible body is evenly heated.
In better embodiment, the weighing device is matched with the shape of the bottom heating device；The weighing
Heat-barrier material is additionally provided between device and the heating device.
By above-mentioned technical characteristic, it is up to following technical effect: by filling the shape of weighing device and bottom-heated
Matching is set, and heat-barrier material is set between bottom heating device, evaporation coating device stable structure can be made, and effectively protect
Weighing device is protected under the hot environment of bottom-heated, is worked normally.
In better embodiment, the evaporation coating device further includes a control system, and the evaporation coating device further includes a control
System processed, the control system include control device, data transmission device, display device and power control unit；The control
Device is connected by data transmission device with the weighing device, and the control device receives the weighing device and records weight number
According to, and weight data is shown on said display means；The control device is filled by data transmission device and dynamic Control
Set connected, the power control unit is connected with the power device, controls velocity of rotation and the direction of the power device.
By above-mentioned technical characteristic, it is up to following technical effect: by adding control system, so that in replacement crucible master
When body, crucible lifting speed can be effectively controlled, it is more convenient.
The beneficial effect of the application is: being different from the prior art, the application provides a kind of vapor deposition crucible, by crucible master
Bottom heating device is set below body, and Crucible body can be under the support of bottom heating device along side heat device
Short transverse moves up and down, so that efficiency when improving crucible maintenance, greatly shortens service time, reduce extra work journey
Sequence；Meanwhile the quality of maintenance is improved, personnel's operational pollution material is avoided and puts askew crucible influence vapor deposition film thickness.
Detailed description of the invention
Fig. 1 is the evaporation coating device structural schematic diagram in the prior art of the application；
Fig. 2 is a kind of one embodiment schematic diagram for evaporation coating device that the application proposes；
Fig. 3 is the A frame portion point partial enlargement diagram in a kind of evaporation coating device of the application proposition in Fig. 2；
Fig. 4 is the lifting device structure schematic diagram in a kind of evaporation coating device that the application proposes；
Fig. 5 is another example structure schematic diagram in a kind of evaporation coating device that the application proposes；
Fig. 6 is the schematic device of the control system in a kind of evaporation coating device that the application proposes.
Specific embodiment
Below by the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described implementation
Example is merely a part but not all of the embodiments of the present application.Based on the embodiment in the application, this field is common
Technical staff's every other embodiment obtained without making creative work belongs to the model of the application protection
It encloses.
It is worth noting that, the direction term being previously mentioned in the application, for example, "upper", "lower", "front", "rear", " left side ",
" right side ", "inner", "outside", " side " etc. are only the directions with reference to annexed drawings, therefore, the direction term used be in order to it is more preferable,
Be illustrated more clearly that and understand the application, rather than indicate or imply signified device or element must have a particular orientation,
It is constructed and operated in a specific orientation, therefore should not be understood as the limitation to the application.
In order to which the application is described in more detail, a kind of evaporation coating device proposed with reference to the accompanying drawing to the application is illustrated.
A kind of evaporation coating device provided by the present application, as shown in Fig. 2, evaporation coating device specifically includes Crucible body 201 and setting
In the side heat device 202 of crucible surrounding and the bottom heating device 203 of lower section, Crucible body 201 and side heat device
There is interval, the setting at interval can make side heat device 202 play Crucible body 201 to be evenly heated between 202 side wall
Effect, it is preferable that interval can be 1~5cm.Wherein, the implementation of each heating device is not limited in the present embodiment,
It can be with resistance heating or electromagnetic heating or other heating methods.
In this way, the lower section of Crucible body 201 is provided with bottom heating device 203, in conjunction with the side heat device of surrounding
202, can play the role of to the evaporant in crucible it is uniformly heated, avoid evaporant 201 bottom of Crucible body remain
The case where.
It is worth noting that, in the present embodiment, bottom heating device 203 is bonded with 202 activity of side heat device,
Referring to Fig. 3, being one embodiment of laminating type.As can be seen that 203 edge of bottom heating device is equipped with extension 2031,
The length of extension 2031 is slightly less than the internal diameter of side heat device 202, and forms gap with the side wall of side heat device 202
209, it reduces and rubs when can make bottom heating device 203 that this Crucible body 201 be supported to move up and down along crucible short transverse
Wipe power.And 202 bottom inner circumferential of side heat device is additionally provided with the bottom wall 2021 inwardly folded, the extension of bottom heating device 203
For 2031 support of portion on bottom wall 2021, bottom wall 2021 is used for support bottom heating device 203, and ensures that side heat fills when heating
It sets seamless applying between 202 and bottom heating device 203.Specifically, the extension at 203 edge of bottom heating device can be passed through
The lower surface in portion is set as forge piece of step type structure, and the upper surface of bottom wall 2021 is again provided with matched forge piece of step type structure, with reality
It is existing seamless applying, prevent evaporation coating device at work, thermal energy from bottom heating device 203 and side heat device 202 it
Between gap 209 leak out, and then influence control to temperature during vapor deposition.Equally, other such as sawtooth patterns, the knot such as waveform
Structure, as long as can be realized the seamless applying of 2031 lower surface of extension and 2021 upper surface of bottom, in the protection model of the application
In enclosing.
Further, 201 upper opening of Crucible body, opening are equipped with crucible cover 204, and crucible cover 204 will be for that will evaporate
Evaporation material be limited in inside Crucible body 201.Further, the evaporation coating device of the application is additionally provided with insulation cover 205, insulation cover
205 for maintaining the temperature of Crucible body 201, and insulation cover 205 further includes sealing element 206, for filling crucible cover 204 and side
Gap between heating device 202, and fixed Crucible body 201 can be played the role of.
It should be noted that the application connects between the structure and insulation cover 205 and Crucible body 201 of sealing element 206
The form of connecing is not especially limited.For example, sealing element 206 can be rubber material, isolation steam can be played, is further functioned as more
Good sealing and heat insulation effect.Meanwhile the application is not also defined Crucible body 201 and 204 lid conjunction mode of crucible cover, energy
Enough cover tightly the opening of Crucible body 201.For example, it can be equipped with external screw thread in the outer surface of the opening of Crucible body 201,
The internal screw thread to match with the external screw thread, the lid of crucible cover 204 and Crucible body 201 are equipped in the inner surface of crucible cover 204
Conjunction mode screws up for screw thread.Certainly, the material of crucible cover 204 cannot react with material to be deposited.
Further, 201 bottom plate of Crucible body is convex in multistage, bottom heating device 203 and 201 bottom of Crucible body
Shape is agreed with, and convex shape plays the role of increasing thermocontact area and support crucible main body 201 simultaneously in multistage.Work as crucible
Main body 201 is placed on bottom heating device 203, can put to avoid Crucible body 201 askew, influences evaporation efficiency, is convenient for crucible
The pick-and-place of main body 201.Certainly, in order to realize above-mentioned technical effect, inverted V type, more such as is set by 201 bottom of Crucible body
Grade broached-tooth design etc. is equally within the scope of protection of this application.
Further, crucible cover 204 and insulation cover 205 are equipped with perforation hole 207, perforation hole 207 be used for by evaporation material by
The steam of thermal evaporation is discharged towards assigned direction, thus, for the distance between insulation cover 205 and crucible cover 204, can make to steam
Hair is that gaseous evaporation material is emitted from perforation hole 207.If the aperture in view of perforation hole 207 is greater than Crucible body
201 outer diameter, it is possible that being evaporated to behind gaseous evaporation material arrival 201 top of Crucible body directly from perforation hole 207
Marginal position at spray, and gaseous evaporation material can not be made uniformly to spray, and influence the uniformity of vapor deposition.Therefore, excellent
The aperture for selecting perforation 207 should be less than the outer diameter of Crucible body 201.And for the hole of perforation hole 207 in embodiments herein
Without limiting, the gas after capable of making evaporation is exported and is not easy to plug for diameter and number.
It is worth noting that, not being defined to Crucible body 201 and material in embodiments herein, meet resistance to
High temperature, good heat conductivity and it is not easy deformation.Such as: the metals such as titanium, copper, aluminium can be selected in the material of Crucible body 201, can also
To select the materials such as quartz, ceramics.
It further include a lifting device in embodiments herein.Referring to Fig. 4, being risen in one embodiment of the application
Falling unit includes pars contractilis 212 and the driving section 211 for being nested in pars contractilis 212, and one end of pars contractilis 212 connects dynamic dress
It sets, such as stepper motor, power device is used to provide mobile power for driving section 211, and driving section 211 is used to support the earthenware
Crucible main body 201 moves up and down in heating device.
Further, please continue to refer to Fig. 4, in order to realize automatic weighing, driving section 211 and bottom heating device 203 it
Between be additionally provided with weighing device 210, weighing device 210 can be connected with display screen, on the screen by weight information real-time display.
Weighing device 210 in the application can have the device for converting the pressure to weight amount, such as electronic scale to be a series of.This reality
It applies in example, the shape of weighing device 210 is upper convex, is cooperated with the interior convex shape of bottom heating device.Certainly, weighing device
210 shape should be consistent with bottom heating device 203 and Crucible body 201, so in addition to upper convex, other and bottom-heated
The structure of device cooperation is equally applicable.Simultaneously as bottom heating device 203 is placed in 210 surface of weighing device, in order to anti-
Only high temperature damages weighing device 210, there are also heat-barrier material (not shown) between bottom heating device 203 and weighing device 210,
It proposes, heat-barrier material can choose conventional insulation material, such as glass fibre, asbestos, rock wool, silicate or Novel heat insulation
Material, such as aerogel blanket, evacuated panel.
Further, the application is located at the setting of lifting device and is not especially limited, and does not need to carry out Crucible body 201
When the addition or cleaning of evaporation material, it can place it on bracket.Certainly, the bottom of Crucible body 201 needs to be arranged
Weighing device 210, and there are enough spaces convenient for lifting device entrance.
In embodiments herein, for lifting device, pars contractilis 212 can be screw rod, and driving section 211 can revolve
It is sleeved on the screw rod, is supported by screw flight, wherein driving section 211 does not rotate in radial direction.When screw rod rotates, lead to
The transmission effect of screw thread is crossed, driving section 211 is moved up and down with respect to screw rod.It is worth noting that, when pars contractilis 212 is passed using screw rod
When dynamic mode realizes that driving section 211 moves up and down, due to the weight of Crucible body 201 itself, it is possible that Crucible body
201 rotate downward situation with pars contractilis 212 automatically.It in response to this, can be by being opened up in side heat device 202
The extension 2031 of groove (not shown), bottom heating device 203 is further provided with fixed part (not shown), and fixed part is inserted into
It in groove, can move up and down along groove, to prevent bottom-heated from filling in the fixed bottom heating device 203 of radial direction
203 are set to rotate in warp direction.Further, phase is generated in radial direction between weighing device 210 and driving section 211 in order to prevent
To sliding, 210 bottom surface of weighing device is arranged to rough surface, to increase the frictional force with driving section 211.In this way, in conjunction with bottom
The rubbing action of heat-barrier material and driving section 211 and weighing device 210 between heating device and weighing device, to realize
Crucible body 201 is fixed in radial direction when pars contractilis 212 stops working.
Certainly, pars contractilis 212 and driving section 211 can also be permanently connected together, in some embodiments, pars contractilis
It 212 bottom ends can be by setting dentalation, dentalation and with the gear that circuit device drives, as long as controlling gear
It turns to, so that it may which the driving section 211 for driving pars contractilis 212 and being fixed on pars contractilis 212 moves up and down, and then drives crucible master
201 rise and fall of body are gone up and down along the short transverse of Crucible body 201.Certainly, power device can be motor or liquid
Press pump, and moved up and down since lifting device is used to support Crucible body at work, what is connect with pars contractilis 212 is dynamic
Power device needs to be fixed on ground or supporter.
In order to further fix weighing device 210, structure used for positioning has been can be set in the upper surface of driving section 211,
The width setting of driving section 211 is such as slightly larger than to the width of weighing device 210, and edge is also slightly above other surfaces, in this way may be used
Weighing device 210 to be entirely limited, entire evaporation coating device is further strengthened.
In the following, being illustrated in conjunction with Fig. 5 to a kind of course of work for evaporation coating device that the application proposes.
One of the embodiment of the present application evaporation coating device, when evaporation coating device needs to maintain, in operation circle of evaporation coating device
The Shutter (gate) of each evaporation source in cavity is opened on face, so that successively opening insulation cover 305 and crucible cover 304.Value
It is noted that due to sealing element 306 effect, need to be atmospheric condition inside the evaporation coating device, each lid could be opened
Son.Power device is controlled, so that entire evaporation coating device rises；Pars contractilis 312 in evaporation coating device is driven by servo motor
Fixed rotation drives driving section 311 by screw thread, and 311 relative telescopic portion 312 of driving section moves upwards, and will be located at driving section 311
Weighing device 310, bottom heating device 303 and Crucible body 301 rise to setting position.The stalling of driving section 311 and four
After all heating devices 302 are contactless, start to weigh, weighing device 310 in real time shows weight information in operation interface.Weighing
After the completion, cavity is protruded into Long rod clamp press from both sides out the crucible for needing added material and needing replacing.Long rod clamp is used after charged
Crucible body 301 is put into evaporation coating device, then, the pars contractilis 312 in evaporation coating device is driven by servo motor anti-
To rotation, entire Crucible body decline is driven to complete maintenance and charging by driving section 311.Entire servicing operations people do not need into
Enter cavity, does not also need contact evaporation coating device, reduce security risk, avoid material contamination.
It further, further include control system in embodiments herein, for controlling the operation of evaporation coating device.Such as Fig. 6 institute
Show, control system includes control device 401, and control device 401 is central processor CPU, can pass through the shape of microcomputer development
Formula realizes the control to evaporation coating device.Further, the weight data of Crucible body is passed through data transmission device by weighing device 403
405 are real-time transmitted to control device 401, and control device 401 receives weight data and is shown in display device 404.Certainly, claim
Refitting is set 403 and can be realized for electronic scale, day equality device.
Wherein, display device 404 can be LCD screen or capacitance plate, touch screens；Further, data transmission device can be with
For wire transmission, such as cable, data line, or wireless transmission, such as WIFI transmitter, bluetooth transmitters；It is showing
In device 404, touch screen can also be added, can recorde operational motion, and return in control device 401；Control device 401
Further control data can be transferred in power control unit 402 by data transmission device 405, be realized to power device
Such as control of revolving speed, steering；And the working condition of power device can also be transmitted by data and be filled by power control unit 402
It sets 405 and is transferred to control device 401, and shown in display device 404.
Certainly, the control system in the present embodiment can be integrated into the control system of entire evaporation coating device, display device
404 can also be directly displayed in operation interface.
In conclusion embodiments herein provides a kind of evaporation coating device, including Crucible body, surrounding heating device and bottom
Portion's heating device；By the way that Crucible body bottom is arranged to multilevel structure, and bottom-heated is set below Crucible body and is filled
It sets, promotes the quality of product, avoid crucible bottom material from being repeated several times and heat and in poor quality；By the way that lifting device is arranged, improve
The efficiency of maintenance, greatly shortens service time, reduces extra working procedure；Meanwhile the quality of maintenance is improved, avoid personnel from grasping
Make contaminated materials and puts askew crucible influence vapor deposition film thickness.
The above, the only specific embodiment of the application, but the protection scope of the application is not limited thereto, it is any
Those familiar with the art within the technical scope of the present application, can easily think of the change or the replacement, and should all contain
Lid is within the scope of protection of this application.Therefore, the protection scope of the application should be based on the protection scope of the described claims.
Claims (7)
1. a kind of evaporation coating device, including Crucible body, which is characterized in that further include the side that the Crucible body surrounding is arranged in
Heating device and the bottom heating device being arranged in below the Crucible body；The bottom heating device can be along the side
The short transverse of face heating device moves up and down, and the Crucible body is supported to rise to the position higher than the side heat device
It sets；The side heat bottom of device is equipped with the bottom wall to extend internally, and the bottom heating device support is on the bottom wall；Institute
Bottom heating device edge is stated equipped with extension, the lower surface of the extension is in contact with the upper surface of the bottom wall, with reality
Existing bottom heating device is seamless applying with side heat device；The lower surface of the extension and the upper surface of the bottom are set
There is the step structure being mutually matched.
2. evaporation coating device according to claim 1, which is characterized in that the evaporation coating device further includes a lifting device, institute
The lower section that lifting device is set to the Crucible body and the bottom heating device is stated, for driving the Crucible body along institute
The short transverse for stating Crucible body moves up and down.
3. evaporation coating device according to claim 2, which is characterized in that the lifting device includes pars contractilis and driving section,
The pars contractilis is connected with power device, for providing mobile power for driving section；The driving section is used to support the earthenware
Crucible main body moves up and down in heating device.
4. evaporation coating device according to claim 3, which is characterized in that the evaporation coating device further includes a weighing device, institute
Weighing device is stated between the driving section and the bottom heating device；The weighing device is connected with a display screen,
For weight information to be transmitted in real time and is shown on the display screen.
5. evaporation coating device according to claim 4, which is characterized in that the bottom heating device is in multistage convex setting,
The shape of the Crucible body bottom is agreed with the bottom heating device.
6. evaporation coating device according to claim 5, which is characterized in that the weighing device and the bottom heating device
Shape matches；Heat-barrier material is additionally provided between the weighing device and the heating device.
7. evaporation coating device according to claim 6, which is characterized in that the evaporation coating device further includes a control system, institute
Stating control system includes control device, data transmission device, display device and power control unit；The control device passes through number
It is connected according to transmitting device with the weighing device, the control device receives the weighing device and records weight data, and will weigh
Amount data are shown on said display means；The control device is connected by data transmission device with power control unit, institute
It states power control unit to be connected with the power device, controls velocity of rotation and the direction of the power device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711210074.8A CN107805782B (en) | 2017-11-27 | 2017-11-27 | A kind of evaporation coating device |
| PCT/CN2018/072070 WO2019100558A1 (en) | 2017-11-27 | 2018-01-10 | Vapor deposition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711210074.8A CN107805782B (en) | 2017-11-27 | 2017-11-27 | A kind of evaporation coating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107805782A CN107805782A (en) | 2018-03-16 |
| CN107805782B true CN107805782B (en) | 2019-09-20 |
Family
ID=61590035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711210074.8A Active CN107805782B (en) | 2017-11-27 | 2017-11-27 | A kind of evaporation coating device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107805782B (en) |
| WO (1) | WO2019100558A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109468594A (en) * | 2018-12-17 | 2019-03-15 | 武汉华星光电半导体显示技术有限公司 | For making the evaporation coating device of Organic Light Emitting Diode |
| KR102221960B1 (en) * | 2019-03-25 | 2021-03-04 | 엘지전자 주식회사 | Deposition apparatus |
| CN113388815A (en) * | 2021-07-27 | 2021-09-14 | 福建华佳彩有限公司 | Surface evaporation source structure suitable for crucible |
| CN114182209A (en) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | OLED material evaporation crucible device and use method thereof |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01208453A (en) * | 1988-02-17 | 1989-08-22 | Matsushita Electric Ind Co Ltd | Production of metallic thin film |
| JPH04348022A (en) * | 1991-05-24 | 1992-12-03 | Mitsubishi Electric Corp | Cell for molecular beam epitaxy |
| EP1560467B1 (en) * | 2002-07-19 | 2014-02-26 | LG Display Co., Ltd. | Source for thermal physical vapor deposition of organic electroluminescent layers |
| KR100889759B1 (en) * | 2002-09-03 | 2009-03-24 | 삼성모바일디스플레이주식회사 | Forming apparatus of organic thin film and heating crucible thereof |
| JP2007270261A (en) * | 2006-03-31 | 2007-10-18 | Kyocera Corp | Vapor deposition device, vapor deposition method, method for manufacturing organic electroluminescence device, and vapor deposition cell |
| CN101532172A (en) * | 2009-04-17 | 2009-09-16 | 江苏华盛天龙机械股份有限公司 | Thermal device for growing silicon monocrystal |
| JP6049355B2 (en) * | 2012-08-29 | 2016-12-21 | キヤノントッキ株式会社 | Evaporation source |
| JP6139423B2 (en) * | 2014-01-29 | 2017-05-31 | シャープ株式会社 | Vapor deposition apparatus, vapor deposition method, and organic electroluminescence element manufacturing method |
| CN104213080B (en) * | 2014-08-20 | 2016-08-24 | 京东方科技集团股份有限公司 | Evaporation source and evaporated device |
| CN104233197A (en) * | 2014-09-30 | 2014-12-24 | 苏州普京真空技术有限公司 | Novel crucible |
| CN104762600B (en) * | 2015-04-20 | 2017-05-10 | 京东方科技集团股份有限公司 | Evaporated crucible and evaporation device |
| CN105239154A (en) * | 2015-09-10 | 2016-01-13 | 上海超硅半导体有限公司 | Czochralski method single-crystal silicon growth flow field control technology |
| CN106929802B (en) * | 2015-12-31 | 2021-06-04 | 中国建材国际工程集团有限公司 | Heater device for heating a crucible and system for evaporating or sublimating a material |
| CN106929805B (en) * | 2015-12-31 | 2022-02-25 | 中国建材国际工程集团有限公司 | Crucible for containing and heating a material and system comprising a crucible and a heater arrangement |
| CN105441878B (en) * | 2016-01-05 | 2018-12-21 | 京东方科技集团股份有限公司 | Heating device and evaporated device for vapor deposition |
| CN106148899B (en) * | 2016-06-30 | 2018-05-18 | 京东方科技集团股份有限公司 | A kind of vapor deposition crucible and evaporation source |
-
2017
- 2017-11-27 CN CN201711210074.8A patent/CN107805782B/en active Active
-
2018
- 2018-01-10 WO PCT/CN2018/072070 patent/WO2019100558A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| CN107805782A (en) | 2018-03-16 |
| WO2019100558A1 (en) | 2019-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107805782B (en) | A kind of evaporation coating device | |
| CN104789930B (en) | Evaporated device and adopt the method for operating of this evaporated device | |
| CN105702168A (en) | Curvature-adjustable display device | |
| CN106544637B (en) | Magnetic-controlled sputtering coating equipment | |
| CN103771069A (en) | Horizontal rotating storehouse | |
| CN204240794U (en) | Efficiency material smelting apparatus | |
| CN104213080A (en) | Evaporator source device and evaporation equipment | |
| CN101743617B (en) | Evaporation apparatus | |
| CN107565062B (en) | Thickness monitoring instrument and evaporator | |
| CN104294217A (en) | Evaporation source device | |
| CN206438655U (en) | A kind of solar energy curtain wall | |
| CN109028861A (en) | A kind of high efficiency lithium battery drying unit | |
| CN108001871A (en) | A kind of vaccine refrigerating conveying arrangement | |
| CN103966555A (en) | Evaporation source heating device | |
| CN106477554B (en) | A kind of carbon nanocoils production equipment | |
| CN108130513B (en) | Evaporation coating device and evaporation coating method | |
| CN206122676U (en) | Novel multi freedom casting machine people | |
| CN1255003C (en) | Composite cooking device | |
| CN206791508U (en) | A kind of full-automatic food baking machine | |
| CN209522873U (en) | A kind of material heat treatment device for car antenna production | |
| CN209496054U (en) | A kind of portable power monitoring device | |
| CN207552439U (en) | A kind of vacuum evaporation apparatus of semiconductor film material | |
| CN219997039U (en) | Medicine stability test box | |
| CN206014876U (en) | Separate many cabin independent control temperature rotating speed shaking tables of formula | |
| CN206660141U (en) | A kind of small-sized machine for stir-frying Chinese medicine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |